JP4813071B2 - Macro image display system and macro image display method - Google Patents

Description

  The present invention relates to a macro image display system and a macro image display method used in a production line.

In a flat panel display (hereinafter abbreviated as FPD) and a semiconductor wafer production line, a defect inspection apparatus is provided to inspect for defects on the substrate. As the defect inspection apparatus, the macro illumination light is irradiated on the inspection object, and the visual macro inspection apparatus that visually inspects the reflected light from the inspection object, or the surface image of the inspection object is digital imaging means. 2. Description of the Related Art An automatic macro inspection apparatus that captures an image and performs defect analysis on the captured macro image data by image processing is known. An automatic macro inspection apparatus is used in combination with a visual macro inspection apparatus because it is difficult to automatically and accurately determine the type and determination of defects.
Further, in recent visual macro inspection, a macro image of an object to be inspected created by an automatic macro inspection apparatus is displayed on a display monitor, and visual macro inspection is performed while referring to the macro image, thereby improving the determination accuracy. The technique is taken (for example, refer patent document 1).
JP 2003-90802 A

By the way, in FPD and semiconductor wafer manufacturing processes, defects caused by operating conditions of the manufacturing apparatus may occur continuously at the same position.
However, in the conventional visual inspection method, the inspection object is inspected one by one based on the operator's experience, so it is difficult to determine whether or not defects have occurred continuously in the same place. There was variation depending on the degree.
Further, in the case of an operator with little experience, a defect that has occurred continuously may be overlooked, and it may take time to find a malfunction of the manufacturing apparatus.
Furthermore, even if it is found that defects have occurred continuously due to the manufacturing equipment, the person in charge of the production line may not have detailed knowledge about the settings of the manufacturing equipment, etc. Since it is necessary to search for a person etc. and examine the setting of the manufacturing apparatus, it was not possible to take a quick response.

  This invention is made in view of such a situation, and it aims at displaying defect information at the time of visual inspection, and reducing the dispersion | variation in an operator's determination. Another object of the present invention is to eliminate oversight by an operator during visual inspection and suppress the occurrence of defective products. Another object of the present invention is to increase the inspection efficiency by reducing the inspection time by easily grasping such defects visually when the defects are continuously generated.

The present invention that solves the above problems is a macro image display system that inspects each substrate continuously produced on a production line with an automatic macro inspection apparatus, and displays an image of a result of a defect generated on the substrate. , Obtaining defect information including defect position coordinates on each substrate from a macro image obtained by imaging each substrate surface by the automatic macro inspection apparatus, and overlapping a plurality of the defect position coordinates based on the defect information of each substrate And calculating means for calculating the frequency of overlap, and outputting the macro image, and outputting means for highlighting the defect area on the inspection image based on the frequency of overlap between the defect position coordinates and the defect , A macro image display system characterized by comprising:

In addition, the present invention captures the entire surface of each substrate continuously produced on the production line and obtains an inspection image, and inspects the presence or absence of defects on each substrate by image processing from the inspection image, a step of creating a defect information including the defect position coordinates, the overlapping of a plurality of defect position coordinates based on the defect information of each substrate, and calculating the frequency of overlap, the frequency of overlap of the defect position coordinates When the degree of concentration of defects reaches a predetermined level according to the calculation result, a step of creating defect information data corresponding to defects continuously generated on a plurality of substrates and warning data attached with the macro image , and the warning data Transmitting to a management PC connected to the network; and displaying defect information data and image data on a monitor of the management PC based on the transmitted warning data. It was a macro image display method comprising obtaining.

The present invention also includes a step of obtaining an inspection image by capturing an image of the entire surface of each substrate produced continuously on a production line, and the presence or absence of defects on each substrate by image processing from the inspection image. Inspecting, creating defect information including defect position coordinates and defect determination results, overlapping a plurality of the defect position coordinates based on the defect information of each substrate, calculating the frequency of the overlapping, and the defect When the frequency of overlapping position coordinates reaches a predetermined level, a step of displaying defect information data corresponding to defects continuously generated on a plurality of substrates and the macro image on a monitor of a visual macro inspection apparatus connected to a network And a macro image display method characterized by comprising:

  According to the present invention, when the substrate is continuously produced on the production line, the defect inspection is carried out while producing the substrate, and the concentration degree of the defect continuously generated on the plurality of substrates is calculated. It is possible to reliably grasp a defect that occurs due to a manufacturing apparatus or the like. In addition, when the defect concentration level is displayed on the screen, variations in the operator's determination are reduced and the operator's oversight during visual inspection is eliminated, so that the occurrence of substrate defects can be suppressed.

The best mode for carrying out the invention will be described in detail with reference to the drawings.
FIG. 1 shows an example in which the macro image display system is applied to a production factory for manufacturing a semiconductor wafer incorporating a macro inspection apparatus or a glass substrate for FPD.
First, an outline of a macro image display system including the visual macro inspection apparatus 100 will be described.
The visual macro inspection apparatus 100 irradiates macro illumination light from above onto a work such as a glass substrate for FPD or a semiconductor wafer, and visually inspects reflected light from the work to inspect defects on the work. It is connected to the manufacturing apparatus 101 arranged on the line and other apparatuses via a network. Here, examples of the manufacturing apparatus 101 include an apparatus for applying a resist to a workpiece such as an FPD substrate and a semiconductor substrate, an exposure apparatus, and the like. The operating conditions of such a manufacturing apparatus 101 include a management PC (personal computer). ) 102. The automatic macro inspection apparatus 103 is an apparatus that inspects a defect by capturing an image of the entire surface of a workpiece with an imaging apparatus, performing image processing, and comparing the image with data relating to a defect registered in advance. As a result of inspection by the automatic macro inspection apparatus 103, when it is determined that the substrate to be inspected has a defect, defect data including defect information such as a defect position and a defect type is created and stored in the substrate information data storage unit 104. It has become so. The automatic macro inspection apparatus 103 outputs image data captured from the entire workpiece and stores it in the image data storage means 105.

Here, in the substrate information data storage means 104, for example, a defect information file having a format as shown in FIG. 2 is stored as an electronic file. The defect information file stores information such as inspection date, lot ID (Identification), product type number, and process number as basic information . As the substrate information, a substrate ID, a substrate determination result, and a substrate determination reason are stored, and as the cell information, a cell ID, a cell determination result, and a cell determination reason are stored. As the defect position information, defect position coordinates and a defect determination result are stored. The defect position information represents the position of the defect in a predetermined orthogonal coordinate system. For example, as the first defect, (x, y) = (100.000, 200.00) and (x, y) = 2 (110.000, 220.000) are stored. Then, as shown in FIG. 3, the inside of the rectangular area whose diagonal is the two coordinates is recognized as a position having a defect. The defect determination result is information stored in association with the defect position coordinates, and stores statuses such as “OK” and “NG”. This is an index for determining a defect according to size and type.

The visual macro inspection apparatus 100 shown in FIG. 1 acquires a defect information file from the substrate information data storage unit 104, acquires image data from the image data storage unit 105, performs internal data processing, and displays necessary information. Displayed on the monitor 106.
The management PCs 107 and 108 are for checking the state of the inspection apparatuses 100 and 103 and the manufacturing apparatus 101 from a remote location, and are installed at a location remote from the production line.
In this macro screen display system, an operator (inspector) who performs a visual macro inspection and a staff who manages a factory process are displayed on the display monitor 106 of the visual macro inspection apparatus 100 and management PCs 107 and 108. Based on the information captured by the automatic macro inspection apparatus 103, it is possible to grasp the state of the FPD substrate that is the substrate to be inspected. Information displayed on the display monitor 106 and the management PCs 107 and 108 is fed back to the manufacturing apparatus 101 and is referred to when adjusting the operating conditions of the manufacturing apparatus 101.

Next, the configuration of the visual macro inspection apparatus 100 will be described with reference to FIG.
The visual macro inspection apparatus 100 includes a visual macro inspection control unit 401. The visual macro inspection control unit 401 is connected to an automatic macro inspection apparatus 103 and a substrate transport robot 402 which are external devices, and further includes a substrate holder. The unit 403, the substrate rotation stage unit 404, the illumination unit 405, and the data input / output means 406 are connected. The substrate transfer robot 402 transfers the substrate to be inspected from the automatic macro inspection apparatus 103 to the visual macro inspection apparatus 100 and places it on the substrate holder unit 403. The substrate holder unit 403 is mounted on the substrate rotation stage unit 404 and holds the substrate to be inspected. The substrate rotation stage unit 404 is configured to rotate the substrate to be inspected at various angles with respect to the operator. The illumination unit 405 is a device that irradiates the surface of the workpiece with macro illumination light from above the substrate holder unit 403. For this reason, the operator can visually observe the workpiece illuminated by the illumination unit 405 from various angles by operating an operation unit such as a joystick and tilting the substrate rotation stage unit 404 back and forth or left and right. . The visual macro inspection control unit 401 is configured to output information on the workpiece to the data input / output means 406 when the workpiece (substrate to be inspected) is carried into the visual macro inspection apparatus 100 by the substrate transfer robot 402. ing.

When the data input / output unit 406 receives workpiece information, the data input / output unit 406 accesses the external substrate information data storage unit 104 and the image data storage unit 105 to acquire a defect information file and image data. Further, the data input / output unit 406 is connected to an input unit 407 such as a keyboard and a mouse, a data processing unit 408 (calculation unit), and an image display processing unit 409.
The data processing unit 408 has a function of extracting information for each defect from the defect information file fetched from the data input / output unit 406 and creating defect history data. Further, as will be described in detail later, it has a function of calculating the overlap of defects. In addition to the data input / output unit 406, a defect history input / output unit 410 and an image display processing unit 409 are connected to the data processing unit 408. Here, an example of the data format of the defect history data is shown in FIG. In the defect history data RKD shown in FIG. 5, one piece of data is created for each defect of one workpiece, and production information such as a processing date, an inspection period, a product number, a process number, a lot ID, and a substrate ID is described. Yes. In addition, information on the number of overlaps is added to the defect history data. Hereinafter, the defect history data will be described as having the format shown in FIG.

Further, the defect history input / output unit 410 shown in FIG. 4 performs data input / output processing with respect to the defect history storage unit 411.
The image display processing unit 409 is connected to the macro diffraction image display device 412 and the macro interference image display device 413, and performs processing for displaying the result of the data processing as an image.

Here, an outline of the calculation of the overlap of defect positions performed by the data processing means 408 will be described with reference to FIGS.
FIG. 6 shows defect history data RKD1 and defect history data RKD2 stored in the defect history storage unit 411, respectively. The relationship between the defect positions stored in the defect history data RKD1 and RKD2 is schematically shown in FIG. In FIG. 7, a hatched portion is a portion where defects are overlapped. That is, the data processing means 408 obtains a plurality of defect history data RKD (for example, defect history data RKD1, RKD2) from the defect history storage means 411 through the defect history input / output means 410 as needed, as shown in FIG. The part where the defect overlaps is obtained by calculation.

Further, details of a method for calculating the overlap of defects will be described with reference to FIG.
The defect history storage means 411 stores a plurality of defect history data RKD as shown in FIG. In the defect history data RKD, production information such as an inspection period is described as described above, and the overlap of defects is calculated based on the production information. Here, when calculating the overlap, for example, it is necessary to set conditions for calculation, such as calculating the overlap only for the lot whose lot ID is A123400. The condition specifies at least one piece of production information included in the defect history data RKD.
The input unit 407 inputs data for setting a condition when calculating the overlap. Then, based on the data input by the input unit 407, the data processing unit 408 notifies the defect history input / output unit 410 of the conditions for calculating the overlap of defects. The defect history input / output unit 410 extracts the corresponding defect history data RKD from the defect history storage unit 411 based on the notified condition, and passes it to the data processing unit 408. The data processing unit 408 performs overlap calculation based on the defect history data RKD extracted from the defect history storage unit 411.

Next, the overlap calculation processing of the data processing means 408 will be described with reference to the flowcharts of FIGS.
First, in the search condition input process (step S901), when calculating the overlap of defects, in order to search for data to be calculated from a plurality of defect history data RKD, date, lot ID, product number, process number, automatic Input of production information conditions such as a device number for identifying the macro inspection device 103 is received from the input means 407. As a search condition, a set of recently manufactured substrates may be extracted, or a set including substrates manufactured on the previous day or before may be extracted.
In the defect history data reading step (step S902), data that matches the search condition acquired in the search condition input step (step S901) is read from the defect history storage unit 411. Here, the number of defects read at this time is M (positive integer).

  Next, in the overlap information initial data creation step (step S903), overlap information data LKD is created with the overlap number l = 0 as an initial value for all of the read defect history data RKD. Here, the overlap number l = 0 means that the defect does not overlap with any other defect. On the other hand, for example, when the defect position of the defect history data RKD1 in FIG. 6 and the defect position of the defect history data RKD2 overlap as shown by the hatched portion in FIG. If l = 0, the hatched portion in FIG. 7 is the overlap number l = 1. The overlap information data LKD is created in the same data format as the defect history data RKD. Further, the overlap information data LKD with the overlap number l = 0 created as the initial value is data having the same contents as the defect history data RKD read first from the defect history storage means 411.

In the variable initial setting step (step S904), the initial setting when calculating the overlap is as follows: overlap number l = 0, defect number N _l = M when overlap number l = 0, overlap information data number m = 1, overlap Information data number n = 2 is set. Here, the defect number N _l represents the number of defects when the overlap number is l. The overlap information data number m is a number when serial numbers are assigned to the M defect history data RKD, and can take a value in a range of m = 1 to M−1. The overlap information data number n is a number when serial numbers are assigned to the overlap information data created in the overlap information initial data creation step (step S903), and can take values from (m + 1) to _Nl. .

Subsequently, a loop for the overlap number l (steps S905 and S916), a loop for the overlap information data number m (steps S907 and S915), and a loop for the overlap information data number n (steps S908 and S914). An overlap loop is formed, and an overlap comparison step (step S909), an overlap portion determination step (step S910), an overlap range setting step (step S911), and an overlap analysis data recording step (step S912) are executed. Yes.
In the overlap comparison step (step S909), the overlap between the first overlap information data LKD1 and the second overlap information data LKD2 is calculated. Then, with reference to the result of calculating the overlap of defects, the presence or absence of overlap is determined in the overlap portion determination step (step S910). When there is an overlap of defect positions with the overlap information data LKD1 and LKD2, in the overlap range setting step (step S911), the coordinates of the overlapped portion are extracted and set.

  For example, as shown in FIG. 11, the defect coordinates of the overlap information data LKD1 are [XA (m, l), YA (m, l)]-[XB (m, l), YB (m, l)]. If the defect coordinates of the second overlap information data LKD2 are [XA (n, l), YA (n, l)]-[XB (n, l), YB (n, l)], the defect Rectangular overlap occurs at the position, the start point coordinates of the overlapped rectangles are set as [XA (k, l + 1), YA (k, l + 1)], and the end point coordinates of the overlapped rectangles are set to [XB (k, l + 1). ), YB (k, l + 1)]. In this way, the information of the portion where the overlap is recognized is recorded in the overlap information data LKD as the k-th defect (step S912).

  More specifically, in the first loop, when the overlap number is 1 = 0, the overlap information data number m = 1, that is, the first overlap information data LKD is selected, and the overlap information data number n = 2 (= m + 1), That is, the second overlap information data LKD is selected, and the presence or absence of an overlapping area between these two data LKD is checked. If there is an overlapping area, the overlapping area is registered once as overlapping information data LKD having an overlapping number l = 1. In this way, the overlap between the defects having the overlap number 1 = 0 is examined, and the overlap information data LKD having the overlap number 1 = 1 is created for the overlapping defects. Further, the overlap between the first overlap information data LKD in the overlap number l = 1 and the second overlap information data LKD in the overlap number l = 1 is checked. It is registered as overlap information data LKD with the overlap number l = 2. Thereafter, the overlap frequency is calculated for all the overlap information data LKD. The overlap between defects is examined for all the overlap information data LKD, and the overlap information data LKD with the maximum number of overlaps 1 = M is created.

  In the overlap information data LKD obtained in this way, a large overlap number l indicates the presence of a defect having a high concentration degree. For example, when some of the defects indicated in the M defect history data RKD overlap each other, overlap information data LKD having an overlap number 1 = M including the coordinates of the overlapped part is created. In addition, the area specified by the overlap information data LKD having a small overlap number l indicates that the defect does not occur in a concentrated manner.

In the overlap calculation processing shown in the flowcharts of FIGS. 9 and 10, the overlap rectangle data is compared with the two overlap information data LKD, and if there is an overlap, the overlap number l is incremented for the overlapped rectangle ( +1) and recorded as new overlap information data. However, a method of incrementing the overlap number for a range included in one or both of the compared two overlap information data LKD is also conceivable. Further, in the overlap calculation processing shown in the flowcharts of FIGS. 9 and 10, the position of the defect is handled as a rectangle, but it can also be handled as a circle defined by the center coordinates and the radius.
Furthermore, in the overlap calculation processing shown in the flowcharts of FIGS. 9 and 10, the overlap of defects is calculated from the defect history data RKD, but can also be obtained from a defect image output from the automatic macro inspection apparatus 103. For example, a flag indicating whether or not there is a defect is provided for each pixel of the image, and the overlap between the images is compared for each pixel. That is, the overlap of defects can be obtained as the overlap of each pixel by adding the flags of the overlapping pixels.

Next, a defect data display method will be described with reference to FIG. FIG. 12 shows a macro image display screen 1100 as an example of displaying a macro image and defects.
The macro image display screen 1100 has a map display unit 1101. The map display unit 1101 is a display unit that displays a macro image and a defect, and on the side thereof, a screen control unit 1102 and a display setting unit 1103 are arranged side by side. The screen control unit 1102 controls the display method of the screen, and the display setting unit 1103 is a part that sets the defect data display method. Further, a thumbnail display unit 1104 is arranged below the map display unit 1101. The thumbnail display unit 1104 is a part that displays a reduced list of macro images.

  Here, FIG. 13 shows an example of the map display unit 1101. In FIG. 13, a macro image 1201 is displayed on the map display unit 1101. The macro image 1201 is an image of the entire mother glass with six liquid crystal panels taken by the automatic macro inspection apparatus 103 shown in FIG. 1, and a defect 1203 is displayed in the cell 1202. A highlighted display such as changing the color of the frame is performed on the cell 1202 where the defect exists. The presence / absence of a defect is determined based on the defect coordinates described in the defect history data RKD. By displaying such a macro image 1201 on the display monitor 160 of the visual macro inspection apparatus 100 or the display monitor of the management PCs 107 and 109, the inspector can instantly grasp the cells highlighted on the screen, and the visual macro By observing the cell in the inspection, the inspection can be performed in a short time. Further, the defects 1203 are highlighted and distinguished from each other in the order of occurrence frequency, that is, in order of increasing overlap. The order in which the overlap is large is determined based on the result of the overlay calculation performed by the data processing means 408 (see FIG. 8) using a plurality of defect history data RKD. As a result, the inspector can focus on the position where the defect is concentrated and can perform an efficient inspection.

  Next, an example of the display setting unit 1103 illustrated in FIG. 12 will be described with reference to FIG. A defect display list 1301 is provided above the display setting unit 1103. The defect display list 1301 associates the level assigned to the number of overlaps with the color when displaying the overlapping part of the color by color depending on the number of times of overlap (the number of overlaps 1). it's shown. In FIG. 14, as the number of overlapping times increases, that is, as the level rises, the color classification is performed in stages from green to red. The level can be set by pressing an overlap level display setting button 1302 arranged below the defect display list 1301. At this time, an overlap level display setting screen 1401 as shown in FIG. The overlap level display setting screen 1401 is provided with an overlap level selection unit 1402 for setting an overlap level. The overlap level selection unit 1402 can select a level from a pull-down list. In addition, an overlap number setting unit 1403 is provided, and an overlap number corresponding to the level selected by the overlap level selection unit 1402 can be set. Furthermore, an overlapping display color setting unit 1404 is provided so that a color to be highlighted can be selected for the level selected by the overlapping level selection unit 1402.

  In the display setting unit 1103 shown in FIG. 14, display conditions 1303 are arranged and displayed between the overlap level display setting button 1302 and the defect display list 1301. The display condition 1303 can be set by pressing a display condition setting button 1304 provided on the lower side of this screen. FIG. 16 shows an example of a setting screen that is displayed when the display condition setting button 1304 is pressed. In this display condition setting screen 1501, the period for overlapping calculation is set in the period setting unit 1502, the upper limit of the number of workpieces to be displayed is set by the substrate number upper limit setting unit 1503, and the lot number upper limit setting unit 1504 sets the lot number. An upper limit is set. Further, the lot range setting unit 1505 sets a continuous lot range, and the product type setting unit 1506 sets the product number. The process number is set by the process setting unit 1507, and the device number is set by the device number setting unit 1508. Each setting unit 1502 to 1508 is provided with a check box so that an item checked in the check box can be set.

  Next, an example of the thumbnail display unit 1104 is shown in FIG. The thumbnail display unit 1104 displays a list of macro images of each workpiece imaged by the automatic macro inspection apparatus 103 within a range that meets the conditions set on the display condition setting screen 1501 shown in FIG. The list is displayed together with the substrate ID display 1602 on a reduced macro image 1601 obtained by reducing the macro image of the work. When the number of reduced macro images 1601 is large, a scroll bar 1603 for scrolling the reduced macro images 1601 is displayed. According to such a thumbnail display unit 1104, the inspector can view a plurality of substrate result images at a time using the reduced macro image 1601 of the thumbnail display unit 1104, and instantly grasp information on defects on the substrate. be able to. When the reduced macro image 1601 in the thumbnail display portion 1104 is clicked with a mouse or the like, the macro screen having the board ID is enlarged and displayed on the map display portion 1101.

  Further, an example of the screen control unit 1102 is shown in FIG. The screen control unit 1102 has an enlarge button 1701 and a reduce button 1702 so that the screen size can be changed. Below the reduction button 1702, a defect display button 1703 is provided. The defect display button 1703 is a button for switching the defect displayed on the map display unit 1101 (see FIG. 12) between display and non-display. When non-display is selected, raw data without a display indicating a defect is displayed. Further, a defect history display button 1704 is provided on the lower side. The defect history display button 1704 can display or hide the overlapping portion of defects displayed on the map display unit 1101. On the bottom side, a thumbnail display switching button 1705 is provided. A thumbnail display switching button 1705 is a button for switching whether to display all the reduced macro images 1601 within a predetermined range displayed on the thumbnail display unit 1104 or only defective ones. Next to these buttons 1703 to 1705, status display sections 1706, 1707, and 1708 for displaying the statuses set by operating the buttons are provided in association with the buttons 1703 to 1705. The status display sections 1706 to 1708 display characters such as “displaying” and “defects only”, and when a display such as a defect is selected or a thumbnail display with a defect is selected. The corresponding status display sections 1706 to 1708 are lit up.

In this macro screen display system, the data processing means 408 of the visual macro inspection apparatus 100 calculates the overlap of defects based on the information created by the automatic macro inspection apparatus 103, and the defect concentration level reaches a predetermined level. Can also output a warning from the visual macro inspection apparatus 100 to the management PCs 107 and 108 outside the production line. In this case, for example, when the defect concentration level set by the display setting unit 1103 shown in FIG. 14 reaches level 5, the data input / output means 406 causes the overlap information data LKD of the portion, the image data of the workpiece, Is attached to the management PCs 107 and 108 via the network. Examples of the management PCs 107 and 108 include a terminal device that is constantly monitored by a process manager of a production line in which a problem has occurred, and a terminal device that is highly likely to transmit information to such a process manager. .
In these management PCs 107 and 108, a program capable of monitoring and displaying a macro image display screen 1100 as shown in FIG. 12 is installed, and necessary information is displayed on the screen based on the warning data. The process manager confirms this screen and inputs necessary instructions to the management PCs 107 and 108. Then, the management PCs 107 and 108 create instruction data based on necessary instructions, and transmit the instruction data to the management PC 102 of the manufacturing apparatus 101 in which a defect has occurred. Necessary instructions may be written directly on the macro image display screen 1101 and may be written here, or text data created by another editor is attached when the instruction data is transmitted. Also good.

Upon receiving the instruction data from the process manager, the management PC 102 of the manufacturing apparatus 101 notifies the person in charge of the production line by displaying an error on the manufacturing apparatus 101 or sounding an alarm. Also, necessary instructions created by the process manager are displayed on the management PC 102 on the screen. The person in charge reads necessary instructions displayed on the screen, adjusts the conditions of the manufacturing apparatus 101, and repairs the manufacturing apparatus 101.
When the manufacturing apparatus 101 is adjusted, the workpiece manufactured thereafter is inspected by the automatic macro inspection apparatus 103 and the visual macro inspection apparatus 100 in the same manner as described above. If the defect is eliminated, the defect in that portion is eliminated, so that the defect display on the macro image display screen 1101 is reduced or the highlighted display of the cell 1202 is released. Therefore, the operator of the visual macro inspection apparatus 100 can easily confirm the improvement of the manufacturing apparatus 101 by visual inspection. On the other hand, if the defects are not eliminated and the defects are not reduced, the macro image display screen 1101 does not change, and the warning data is output again.

According to this embodiment, since the data processing means 408 of the visual macro inspection apparatus 100 calculates the overlap of defect positions of a plurality of workpieces, defects are continuously generated due to the manufacturing apparatus 101 and the like. In this case, it is possible to grasp the occurrence state objectively and reliably. For this reason, when the defect inspection of the substrate surface manufactured on the production line is performed in real time and the concentration of defects is confirmed, it is possible to immediately inspect the manufacturing apparatus 101 and solve the defect. .
Further, when calculating the overlap, the overlap number l is defined, and the overlap number l is increased every time a defect overlaps, so the degree of concentration of defects can be objectively and gradually converted to data with the overlap number l. Can do. Accordingly, it is possible to accurately display the screen and whether or not a warning is necessary. For this reason, uniform evaluation can be performed regardless of the skill level of the operator.
Further, on the macro image display screen 1101, an image is displayed for each work and for each cell, and further, a highlighted cell is highlighted or a different display is performed depending on the degree of concentration of defects. It is easy to confirm and enables accurate and quick evaluation. Here, if there is a possibility that an abnormality has occurred in the same production line or manufacturing apparatus 101, the defect history data RKD for the manufacturing apparatus 101 or the like is extracted, overlapped, and displayed on the screen. Trends can be easily grasped.
And if the concentration of defects exceeds a predetermined level, a warning is issued through the network, so that even if the process manager is away from the production line, appropriate measures can be taken. And work efficiency can be improved.

Note that the present invention can be widely applied without being limited to the above-described embodiment.
For example, the data input / output means 406, the input means 407, the data processing means 408, the defect history input / output means 410, the defect history storage means 411, and the image display processing means 409 are provided in a computer device separate from the visual macro inspection apparatus 100. May be.
Also, each process in the embodiment may be performed by installing a program in a computer device and executing the program, and executing each of the units 406 to 411. Even in such a case, the above-described actions and effects can be realized. Here, the program may be recorded on a recording medium readable by a computer device, or may be downloaded via a network.

It is a figure which shows schematic structure of the macro image display system in embodiment of this invention. It is a figure which shows an example of a defect information file. It is a schematic diagram which shows a defect position. It is a figure which shows the structure of a visual macro inspection apparatus. It is a figure which shows an example of defect history data. It is a figure which shows an example of defect history data, Comprising: It is a figure for demonstrating the overlap of two defect history data. It is a schematic diagram which shows the overlap of two defects. It is a figure which shows the main structures for calculating the overlap of a defect in a visual macro inspection apparatus. It is a flowchart which shows the overlap calculation of a defect. It is a flowchart which shows the overlap calculation of a defect. It is a schematic diagram for demonstrating the process which overlaps the area | region where a defect position overlaps and extracts information data. It is a figure which shows the structure of a macro image display screen. It is a figure which shows an example of the map display part of a macro image display screen. It is a figure which shows an example of the display setting part of a macro image display screen. It is a figure which shows an example of the screen which sets an overlap level display. It is a figure which shows an example of the screen which sets the display conditions of a macro image. It is a figure which shows an example of the thumbnail display part of a macro image display screen. It is a figure which shows an example of the screen control part of a macro image display screen.

Explanation of symbols

100 Visual macro inspection device 106 Display monitor 107, 108 Management PC (other computer device)
406 Data input / output means (output means)
408 Data processing means (calculation means)
409 Image display processing means (output means)
1201 Macro image 1202 Cell display 1203 Defect display

Claims (10)

A macro image display system that inspects each substrate continuously produced on a production line with an automatic macro inspection device, and displays an image of a result of a defect generated on the substrate,
Obtaining defect information including defect position coordinates on each substrate from a macro image obtained by imaging the surface of each substrate by the automatic macro inspection apparatus, and overlapping a plurality of the defect position coordinates based on the defect information of each substrate Computing means for calculating the frequency of overlap ;
An output means for highlighting a defect area on the inspection image based on the frequency of overlap of the defect position coordinates and the defect while outputting the macro image ;
A macro image display system comprising: Further comprising a defect history storage means for creating and storing defect history data including the defect position coordinates and defect judgment result from the defect information of each substrate,
Said computing means, said from defects history storage means acquires defect history data of each substrate, the overlap said from the defect position coordinates of each defect history data of the defect position information, to calculate the frequency of the overlap,
2. The macro image according to claim 1, wherein the output unit outputs, on a monitor, a macro image of each substrate that is determined to have a defect continuously generated on a plurality of substrates based on a calculation result of the arithmetic unit. Display system. The computing means and the output means are connected via a control unit of a visual macro inspection apparatus connected to a network,
2. The macro image display system according to claim 1, wherein the output unit outputs a macro image of each substrate determined to have a defect continuously generated on a plurality of substrates by the arithmetic unit to a monitor. 3. 4. The output unit according to claim 1, wherein the output unit outputs a macro image of each substrate that is determined to be defective continuously generated on a plurality of substrates by the arithmetic unit in a thumbnail display. Macro image display system. The output means superimposes and displays the image data of each substrate determined to have a defect continuously generated on a plurality of substrates by the computing means, and highlights the data in color in the order of the overlapping of the defects. The macro image display system according to any one of claims 1 to 3. 4. The macro image display system according to claim 1, wherein the output unit displays a defective portion that is determined to be defective continuously generated on a plurality of substrates by the arithmetic unit. 5. A process of obtaining an inspection image by imaging the entire surface of each substrate continuously produced in the production line;
Inspecting the presence or absence of defects on each substrate by image processing from the inspection image, and creating defect information including defect position coordinates ;
Overlap of a plurality of defect position coordinates based on the defect information of each substrate, calculating the frequency of overlap ;
When the defect concentration degree reaches a predetermined level according to the calculation result of the frequency of overlap of the defect position coordinates, defect information data corresponding to defects continuously generated on a plurality of substrates and warning data attached with the macro image are displayed. Creating a process;
Transmitting the warning data to a management PC connected to the network;
Displaying defect information data and image data on the monitor of the management PC based on the transmitted warning data;
A macro image display method comprising: Further, a step of creating instruction data for a manufacturing apparatus having a defect based on the defect information data and image data in the management PC;
Transmitting the instruction data to the manufacturing apparatus connected to the network;
The macro image display method according to claim 7, further comprising: The step of creating the defect information includes capturing an image of the entire surface of each substrate continuously produced on a production line with an automatic macro inspection device, and defect position coordinates from the image data acquired by the automatic macro inspection device. 8. The macro image display method according to claim 7, wherein defect information including a defect determination result is created. Capturing an image of the entire surface of each substrate produced continuously in a production line and obtaining an inspection image; and
Inspecting the presence or absence of defects on each substrate by image processing from the inspection image, creating defect information including defect position coordinates and defect determination results;
Overlap of the plurality of defect position coordinates based on the defect information of each substrate, calculating the frequency of the overlap ,
When the frequency of the overlap of the defect position coordinates reaches a predetermined level, the defect information data corresponding to the defect continuously generated on a plurality of substrates and the macro image are displayed on the monitor of the visual macro inspection apparatus connected to the network. And a process of
A macro image display method comprising:

Images