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JP4817009B2 - Method for manufacturing printed wiring board - Google Patents
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JP4817009B2 - Method for manufacturing printed wiring board - Google Patents

Method for manufacturing printed wiring board Download PDF

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JP4817009B2
JP4817009B2 JP2005363113A JP2005363113A JP4817009B2 JP 4817009 B2 JP4817009 B2 JP 4817009B2 JP 2005363113 A JP2005363113 A JP 2005363113A JP 2005363113 A JP2005363113 A JP 2005363113A JP 4817009 B2 JP4817009 B2 JP 4817009B2
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ivh
printed wiring
wiring board
positioning
hole
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JP2007165759A (en
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啓幸 工藤
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Resonac Corp
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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Description

本発明は、プリント配線板の製造方法、特に、非貫通穴のIVHと回路導体とを位置決めする多層プリント配線板の製造方法、及び非貫通穴のIVHと回路導体とを位置決めする位置決めマークに関するものである。   The present invention relates to a method for manufacturing a printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board for positioning a non-through hole IVH and a circuit conductor, and a positioning mark for positioning a non-through hole IVH and a circuit conductor. It is.

従来の多層プリント配線板では、各内層の回路導体と非貫通穴のバイアホールとを位置決めすることは、貫通スルーホールを基準マークとし、貫通スルーホールの下方からの透過光をCCDカメラで受光し、貫通スルーホールと回路導体パターンを位置決めすることが重点となり、非貫通穴のバイアホールは貫通スルーホールを代替えとして位置決めすることとなり、非貫通穴のバイアホールと回路導体パターンの高精度の位置決めをすることが困難であった。   In a conventional multilayer printed wiring board, positioning the circuit conductors of each inner layer and via holes of non-through holes is achieved by using the through through hole as a reference mark and receiving the transmitted light from below the through through hole with a CCD camera. Therefore, the positioning of the through-hole and the circuit conductor pattern is important, and the via hole of the non-through hole is positioned as an alternative to the through-hole, and the via hole of the non-through hole and the circuit conductor pattern are positioned with high accuracy. It was difficult to do.

従来例として、特開2004−146427号公報に開示されている多層プリント配線板の製造方法がある。
これは、樹脂付き銅箔を積層しながら多段に重ねたバイアホールを形成するものでビルドアップ法による多層プリント配線板の製造方法であって、多層プリント配線板の下方からの透過光を認識できる銅箔を除去した基準マーク(φ1.0mm)をコア材となる両面プリント配線板の第1バイアホール用のボトムランドに設け、この上面に前記基準マークが認識できる程度の面積(φ2.0mm)の円形開口部を穿設した樹脂付き銅箔を積層し、多層プリント配線板の下方からの透過光を検出することによる第1バイアホールの位置決め部(11)、バイアホール位置調整穴明け部(12)、第1バイアホール形成部(13)を設ける多層プリント配線板の製造方法である。
As a conventional example, there is a method for manufacturing a multilayer printed wiring board disclosed in Japanese Patent Application Laid-Open No. 2004-146427.
This is a method of manufacturing a multilayer printed wiring board by a build-up method that forms via holes stacked in layers while laminating resin-coated copper foil, and can recognize transmitted light from below the multilayer printed wiring board The reference mark (φ1.0 mm) from which the copper foil has been removed is provided on the bottom land for the first via hole of the double-sided printed wiring board as the core material, and the area (φ2.0 mm) is such that the reference mark can be recognized on the upper surface. The first via-hole positioning part (11) and via-hole position adjusting hole part (11) by detecting the transmitted light from below the multilayer printed wiring board are laminated. 12) A method for producing a multilayer printed wiring board in which a first via hole forming portion (13) is provided.

しかし、上記の製造方法では、バイアホールの位置決めをする多層プリント配線板の下方からの透過光を検出する第1バイアホールの位置決め部(11)を基準マークと、この基準マークが認識できる程度の面積(φ2.0mm)の円形開口部をコア材上面の外層部に設けるから、コア材の樹脂は透過率の良い材質に限定されること、この基準マークのスペースは配線回路導体の配置ができず無効領域となる。さらに、バイアホール位置調整穴明け部(12)のスペースも無効領域である。   However, in the above manufacturing method, the positioning part (11) of the first via hole that detects the transmitted light from below the multilayer printed wiring board that positions the via hole is a reference mark and the reference mark can be recognized. Since a circular opening with an area (φ2.0 mm) is provided in the outer layer on the top surface of the core material, the resin of the core material is limited to a material with good transmittance, and the space of this reference mark allows the wiring circuit conductor to be arranged. It becomes an invalid area. Furthermore, the space of the via hole position adjusting hole (12) is also an invalid area.

また、プリント配線板の各層に形成されるバイアホールを多段に重ねるスタックバイアホールを形成する場合は、コア材に設けられた導体からなる第1のボトムランドを最初の基準として、第1のバイアホールの位置決めをレーザー穴明け加工し、次にその第1のバイアホールの第1トップランドを基準として、第2のバイアホールの位置決めをレーザー穴明け加工し、第2のバイアホールの第2トップランドを形成する。
しかし、このようにレーザー穴明け加工は位置決め基準がそれぞれ変わるため、第1のバイアホールの中心位置と第2のバイアホールの中心位置がズレ、位置決めを高精度にすることが困難であった。
In addition, when forming a stacked via hole in which via holes formed in each layer of the printed wiring board are stacked in multiple stages, the first bottom land made of a conductor provided in the core material is used as the first reference, and the first via is formed. The hole positioning is performed by laser drilling, and then the second via hole is positioned by laser drilling with reference to the first top land of the first via hole, and the second top of the second via hole is processed. Form a land.
However, since the laser drilling process changes the positioning reference, the center position of the first via hole and the center position of the second via hole are misaligned, and it is difficult to make the positioning highly accurate.

プリント配線板の高密度化が進むにつれて、各段の内層回路相互、外層から各段の内層回路との電気的な接続をするには、NCドリル穴明けによる穴径の大きい貫通スルーホールよりレーザー穴明けによる穴径の小さい非貫通のバイアホールの適用が多くなり非貫通のバイアホール内に導体めっきを施したIVHと表面回路導体との位置決め精度の要求が高くなっている。   As the printed circuit board becomes more dense, lasers can be used to connect the inner circuit of each stage and between the outer layer and the inner circuit of each stage. The application of non-penetrating via holes with small hole diameters due to drilling has increased, and the requirement for positioning accuracy between IVH and surface circuit conductors in which conductor plating is applied in non-penetrating via holes has increased.

また、貫通スルーホールと非貫通のIVHが混在するプリント配線板では、貫通スルーホールのNCドリル穴明け工程(装置)と非貫通のバイアホールのレーザー穴明け工程(装置)とは、工程及び装置が異なるため、貫通スルーホールと非貫通のIVHに位置ズレが生じる。
特に、この非貫通のIVHと表面回路導体(ランド、ライン)の位置決めを高精度にする必要があった。
特開2004−146427号公報
Moreover, in a printed wiring board in which through-holes and non-through IVHs are mixed, the NC drill drilling process (device) for through-through holes and the laser drilling process (device) for non-through via holes are: Therefore, a positional deviation occurs between the through-hole and the non-through-hole IVH.
In particular, the positioning of the non-penetrating IVH and the surface circuit conductor (land, line) was required to be highly accurate.
JP 2004-146427 A

従来は、貫通スルーホールと非貫通のIVHが混在するプリント配線板では、貫通スルーホールを形成するNCドリル穴明け装置と非貫通のバイアホールを形成するレーザー穴明け装置とは装置機能が異なるため、当然加工工程が別々と異なり、位置決めガイドの相違、プリント配線板の伸縮、貫通スルーホールと非貫通のIVHに位置ズレが生じる問題があった。
本願において、IVHとは外層の回路導体から内層の回路導体に達するブラインドビアや内層の回路導体相互を接続するベリードビアを総称してIVH(インタスティシャルビアホール)と呼ぶものである。
また、第1段目、第2段目のレーザー穴明け加工では、レーザー穴明け位置決め基準がそれぞれ変わるため、第1のバイアホールの中心位置と第2のバイアホールの中心位置がズレ、非貫通のIVHと表面回路導体(ランドや配線ライン)の位置決め精度が悪かった。
Conventionally, in a printed wiring board in which through through holes and non-through IVHs are mixed, the NC drilling device that forms through holes and the laser drilling device that forms non-through via holes have different device functions. Of course, the processing steps are different from each other, and there are problems of positioning guides, expansion and contraction of the printed wiring board, and positional misalignment between the through-hole and the non-through-hole IVH.
In this application, IVH is a generic term for blind vias reaching from the outer layer circuit conductor to the inner layer circuit conductor, and buried vias connecting the inner layer circuit conductors, and are referred to as IVH (interstitial via hole).
In the first and second stages of laser drilling, the laser drilling positioning reference changes, so the center position of the first via hole and the center position of the second via hole are misaligned and not penetrated. The positioning accuracy of IVH and surface circuit conductors (land and wiring lines) was poor.

本発明は、プリント配線板の外層から各段の内層の回路導体に達するIVH用のバイアホールをレーザー孔明け加工で、外層から各段の内層までの深さで孔明け加工しておき、このバイアホールの非貫通穴内に導体めっきを施した多数のIVHを設定する。
上記の多数のIVHと回路導体であるIVHのトップランドの回路導体(ランドや配線ライン)の位置決めを高精度にするために、特定領域内に複数(M段×N列)のIVHに対応する位置決めマークを設ける多層プリント配線板の製造方法を提供することを目的とする。
In the present invention, a via hole for IVH reaching from the outer layer of the printed wiring board to the circuit conductor of the inner layer of each step is formed by laser drilling, and drilling is performed at a depth from the outer layer to the inner layer of each step. A number of IVHs with conductor plating are set in the non-through holes of the via holes.
In order to position the IVH top land circuit conductors (lands and wiring lines) with high accuracy, a plurality of IVHs (M stages × N columns) are supported in a specific area. It aims at providing the manufacturing method of the multilayer printed wiring board which provides a positioning mark.

上記の課題を解決するために請求項1の発明は、多層プリント配線板の製造方法において、バイアホールの非貫通穴内に導体めっきを施した(複数段)×(複数列)のIVHブロックをIVHの位置決めマーク(M)とし、この位置決めマーク(M)のIVHからの反射光をCCDカメラで受光し、IVHと該IVHの上面側に形成した表面回路導体との位置決めをするプリント配線板の製造方法である。
つまり、多層プリント配線板の製造方法において、バイアホールの非貫通穴内に導体めっきを施したIVHを位置決め基準とし、このIVHの反射光をCCDカメラで受光し、該IVHの上面側に形成したトップランドである回路導体の位置を一致させて正確な位置決めをするプリント配線板の製造方法である。また、(複数段)×(複数列)のIVHブロックをIVHの位置決めマーク(M)とするものである。
In order to solve the above-mentioned problems, the invention of claim 1 is a method for manufacturing a multilayer printed wiring board, wherein a (multi-stage) × (multi-row) IVH block in which non-through holes of via holes are subjected to conductor plating is IVH. Of the positioning mark (M), and the reflected light from the IVH of the positioning mark (M) is received by the CCD camera, and the printed wiring board for positioning the IVH and the surface circuit conductor formed on the upper surface side of the IVH is manufactured. Is the method.
In other words, in the method of manufacturing a multilayer printed wiring board, a top formed on the upper surface side of the IVH is obtained by using the IVH reflected by the IVH as a positioning reference, with the IVH having conductor plating in the non-through hole of the via hole. This is a method of manufacturing a printed wiring board in which the positions of circuit conductors that are lands are matched to perform accurate positioning. In addition, (multiple stages) × (multiple columns) IVH blocks are used as IVH positioning marks (M).

請求項2の発明は、位置決めマーク(M)が(奇数段)×(奇数列)のブロックからなる中心位置にIVHを配置しないようにしたプリント配線板の製造方法である。
The invention of claim 2 is a method of manufacturing a printed wiring board in which the positioning mark (M) is not arranged at the center position consisting of blocks of (odd number stages) × (odd number columns).

請求項3の発明は、位置決めマークとIVH穴の位置のブロックが個別プリント配線板を複数面付けした有効領域外の特定領域内に配置されるプリント配線板の製造方法である。
According to a third aspect of the present invention, there is provided a printed wiring board manufacturing method in which the positioning mark and the block of the IVH hole are arranged in a specific area outside the effective area where a plurality of individual printed wiring boards are provided.

請求項1から3のプリント配線板は各段の回路導体(配線パターンであるランドや配線ライン等)と、バイアホール穴の非貫通穴内に導体めっきを施したにIVHの位置とを一致させて、正確な位置決めをするプリント配線板の製造方法が提供できる。
In the printed wiring board according to claims 1 to 3 , the circuit conductors of each stage (lands and wiring lines as wiring patterns) are aligned with the IVH positions after conductor plating is performed in the non-through holes of the via holes. A method of manufacturing a printed wiring board that performs accurate positioning can be provided.

特に、多層プリント配線板の製造方法において、バイアホールの非貫通穴内に導体めっきを施したIVHを位置決め基準とし、このIVHからの反射光をCCDカメラで受光し、該IVHの上面側に形成したトップランドの回路導体の位置決めを高精度にできるプリント配線板の製造方法である。
つまり、IVHと(複数段)×(複数列)のIVHブロックをIVHの上面側に形成したトップランドである表面回路導体との位置決めをするための位置決めマーク(M)を提供できる。
In particular, in the method of manufacturing a multilayer printed wiring board, IVH obtained by plating a conductor in a non-through hole of a via hole is used as a positioning reference, and reflected light from the IVH is received by a CCD camera and formed on the upper surface side of the IVH. This is a method of manufacturing a printed wiring board capable of positioning a topland circuit conductor with high accuracy.
That is, it is possible to provide the positioning mark (M) for positioning the IVH and the surface circuit conductor which is a top land in which (multiple stages) × (multiple columns) IVH blocks are formed on the upper surface side of the IVH.

多層プリント配線板の層間を接続するIVH用のバイアホールのレーザー孔明け加工方法において、各層間の絶縁樹脂層から内層の回路導体(金属導体)に達する非貫通のバイアホールとIVHのトップランドの回路導体である配線パターン(ランドや配線ライン)の位置決めを高精度にするプリント配線板の製造方法を説明する。   In the laser drilling method of the via hole for IVH connecting the layers of the multilayer printed wiring board, the non-penetrating via hole reaching the inner layer circuit conductor (metal conductor) from the insulating resin layer between each layer and the top land of IVH A method for manufacturing a printed wiring board for highly accurate positioning of wiring patterns (lands and wiring lines) that are circuit conductors will be described.

本願では、炭酸ガスレーザーを照射して、内層回路導体の所定箇所にボトムランド上の樹脂を燃焼分解して除去することによりφ0.10mmのバイアホールを形成した。IVHとは外層の回路導体から内層の回路導体に達するブラインドビアや内層の回路導体相互を接続するベリードビアを総称してIVH(インタスティシャルビアホール)と呼ぶ。   In the present application, a via hole having a diameter of 0.10 mm was formed by irradiating a carbon dioxide laser and burning and removing the resin on the bottom land at a predetermined position of the inner layer circuit conductor. IVH is a generic term for blind vias that reach from the outer layer circuit conductor to the inner layer circuit conductor and buried vias that connect the inner layer circuit conductors together, and are referred to as IVH (interstitial via hole).

以下、図1に基づいてプリント配線板の製造方法を説明する。まず、コア材5となる両面プリント配線板の両面に設けた内層回路導体2の所定箇所に第1ボトムランド3(本図では4ケ所)を設け、この上面の第1段目のバイアホール内に導体めっきを施した第1IVH8(本図では4ケ所)を設定する。
上記の非貫通の第1IVH8の表面(上面側)に回路導体である配線パターン(ランドや配線ライン)を形成する。この非貫通の第1IVH8とIVHの第1トップランド4の位置決めを高精度にするプリント配線板の製造方法である。
Hereinafter, a method for manufacturing a printed wiring board will be described with reference to FIG. First, first bottom lands 3 (four in this figure) are provided at predetermined positions of the inner layer circuit conductor 2 provided on both surfaces of the double-sided printed wiring board serving as the core material 5, and the first step via hole on the upper surface is provided. 1st IVH8 (4 places in this figure) to which conductor plating was applied is set.
A wiring pattern (land or wiring line) that is a circuit conductor is formed on the surface (upper surface side) of the non-penetrating first IVH 8. This is a method for manufacturing a printed wiring board, in which the positioning of the non-penetrating first IVH 8 and the first top land 4 of IVH is made highly accurate.

図4、図5に基づいて前記の非貫通のIVHと、このIVHのトップランドの位置決めを高精度にする位置決めマークM(M1〜M4)について説明する。
図4では、貫通スルーホール17と非貫通のIVH7が混在するプリント配線板において、プリント配線板の位置決めマークMの位置を個別のプリント配線板を複数面付けした大盤のプリント配線板10の有効領域Eの外部の特定領域に(1箇所の位置決めマークM=5mm×5mm以内)に複数個の位置決めマークM(M1〜M4)として、非貫通のIVH7を配置させる(本図ではコーナー部に4箇所)が、板取り効率を向上させるため位置決めマークMを小さくして(例えば1mm×1mmサイズ)大盤のプリント配線板10の有効領域E内に配置することもできる。
The non-penetrating IVH and the positioning marks M (M1 to M4) for accurately positioning the top land of the IVH will be described with reference to FIGS.
In FIG. 4, in the printed wiring board in which the through-through hole 17 and the non-through IVH 7 are mixed, the position of the positioning mark M of the printed wiring board is an effective area of the large printed wiring board 10 in which a plurality of individual printed wiring boards are attached. Non-penetrating IVHs 7 are arranged as a plurality of positioning marks M (M1 to M4) in a specific area outside E (within one positioning mark M = 5 mm × 5 mm) (in this figure, four positions are provided in the corner portion) However, the positioning mark M can be made smaller (for example, 1 mm × 1 mm size) and placed in the effective area E of the large printed wiring board 10 in order to improve the board cutting efficiency.

なお、プリント配線板の位置決めマークMの位置は製造工程中の湿度や温度、研磨荷重などによるプリント配線板基材の伸縮とフォトマスクフィルムの合わせ位置の寸法を補正確認するため通常大盤のプリント配線板10に2箇所以上(例えばM1とM2、M3とM4)設ける。
この位置決めマークMは、バイアホールの非貫通穴内に導体めっきを施したIVH7を位置決め基準とし、非貫通のIVH7とIVH7のトップランドの回路導体(ランドや配線ライン)の位置決めを高精度にするものである。
In addition, the position of the positioning mark M on the printed wiring board is usually a printed wiring board on a large board in order to correct and confirm the size of the alignment position of the printed wiring board base and the photomask film due to humidity, temperature, polishing load, etc. during the manufacturing process. Two or more places (for example, M1 and M2, M3 and M4) are provided on the plate 10.
This positioning mark M is based on IVH7 with conductor plating in the non-through hole of the via hole, and makes positioning of the non-through IVH7 and IVH7 top land circuit conductors (lands and wiring lines) highly accurate. It is.

図5において、位置決めマークMの具体例を示す。
図5(a)はプリント配線板の非貫通のIVH7(φ0.10mm)をピッチP=0.5mmで5段×5列に配置し、中心位置(3段×3列の箇所)には中心部であることが明確に検出できるように非貫通のIVH7は配置しないようにした。つまり、位置決めマークMは(約2mm×2mmサイズ)と小さくできる。
FIG. 5 shows a specific example of the positioning mark M.
In FIG. 5A, non-penetrating IVH7 (φ0.10 mm) of the printed wiring board is arranged in 5 rows × 5 rows at a pitch P = 0.5 mm, and the center position (3 steps × 3 rows) is the center. The non-penetrating IVH7 is not arranged so that it can be clearly detected that it is a part. That is, the positioning mark M can be made as small as (about 2 mm × 2 mm size).

図5(b)はプリント配線板の位置決めマークMのサイズを小さくするためプリント配線板の非貫通のIVH7(φ0.10mm)をピッチP=0.5mmで3段×3列に配置し、中心位置(2段×2列の箇所)には中心部であることが明確に検出できるように非貫通のIVH7は配置しないようにした。この場合は位置決めマークMは(約1mm×1mmサイズ)とさらに小さくできる。
なお、IVH7の穴径がφ0.20mm以上の場合はIVH7の反射光が強く(多く)なるから1個の非貫通のIVH7として配置してもよい。
In FIG. 5B, in order to reduce the size of the positioning mark M on the printed wiring board, non-penetrating IVH7 (φ0.10 mm) of the printed wiring board is arranged in 3 rows × 3 rows at a pitch P = 0.5 mm. The non-penetrating IVH 7 is not arranged at the position (2 steps × 2 rows) so that the center can be clearly detected. In this case, the positioning mark M can be further reduced to (about 1 mm × 1 mm size).
In addition, when the hole diameter of IVH7 is φ0.20 mm or more, the reflected light of IVH7 becomes strong (a lot), and may be arranged as one non-penetrating IVH7.

なお、位置決めマークMとして、非貫通のIVH7を1個のみ配置することもできるが孔径が小径であるため位置決めマークMを識別することが困難である。また、この位置決めマークMは(奇数段)×(奇数列)のブロックからなる中心位置には中心部であることが明確に検出できるように非貫通のIVH7は配置しないようにすることが望ましい。ただし、IVH7の穴径、ピッチP、配置(M段×N列)等は適宜選択することもできるが標準化したほうがよい。   Note that only one non-penetrating IVH 7 can be arranged as the positioning mark M, but it is difficult to identify the positioning mark M because the hole diameter is small. Further, it is desirable not to arrange the non-penetrating IVH 7 so that the positioning mark M can be clearly detected to be the central portion at the center position composed of (odd number of stages) × (odd number of rows) blocks. However, the hole diameter, pitch P, arrangement (M stages × N rows), etc. of IVH7 can be selected as appropriate, but should be standardized.

多層プリント配線板の位置決め基準として、バイアホールの非貫通穴内に導体めっきを施したIVHの(奇数段)×(奇数列)のブロックを位置決めマークとし、このIVHの反射光をCCDカメラで受光し、大盤のプリント配線板の有効領域内に配置する該IVHの上面側に形成したトップランドである回路導体の位置決めをするIVHブロックの位置決めマークである。   As a positioning reference for multilayer printed wiring boards, a block of IVH (odd number) x (odd number) with conductor plating in the non-through hole of the via hole is used as a positioning mark, and the reflected light of IVH is received by a CCD camera. These are IVH block positioning marks for positioning the top-land circuit conductor formed on the upper surface side of the IVH arranged in the effective area of the large printed wiring board.

次に図2に示すように、コア材5の両面に設けた第1バイアホール内に導体めっきを施した第1IVH8(本図では4ケ所)と、この非貫通の第1IVH8の上面側に形成した第1トップランド4の上面に絶縁樹脂を介して第2バイアホール内に導体めっきを施した第2IVH9(本図では4ケ所)と、この非貫通の第2IVH9の上面側に高精細の第2トップランド6を形成して6層の多層プリント配線板1を形成した。この非貫通の第2IVH9とIVHの第1トップランド6の位置決めを位置決めマークMを活用し高精度に位置決めしたプリント配線板の製造方法である。   Next, as shown in FIG. 2, the first IVH 8 (four places in this figure) in which the first via hole provided on both surfaces of the core material 5 is plated and the non-penetrating first IVH 8 is formed on the upper surface side. The second IVH9 (four locations in this figure) in which the upper surface of the first topland 4 is subjected to conductor plating in the second via hole via an insulating resin, and the high-definition second IVH9 on the upper surface side of the non-penetrating second IVH9. Two top lands 6 were formed to form a multilayer printed wiring board 1 having six layers. This is a printed wiring board manufacturing method in which positioning of the non-penetrating second IVH 9 and IVH first top land 6 is performed with high accuracy using the positioning mark M.

その次に図3に示すように、(図2の上面側のみ表示してある)この非貫通の第2IVH9とIVHの第2トップランド6の位置決めにおいて、プリント配線板上からの拡散光を位置決めマークM部に照射し、位置決めマークM部の非貫通のIVH7からの反射光をCCDカメラ20で受光し、高精度に高精細第2IVH9と高精細の上面側の第2トップランド6を含む回路導体を高位置決めして形成する。
つまり、小径高精度のIVHを位置決めガイドとして、高精細のIVH表面のトップランドを含む回路導体を高位置決めして形成するプリント配線板の製造方法である。
Next, as shown in FIG. 3, in positioning of the non-penetrating second IVH 9 and IVH second top land 6 (shown only on the upper surface side in FIG. 2), the diffused light from the printed wiring board is positioned. A circuit including the high-definition second IVH 9 and the high-definition second top land 6 on the upper surface side with high accuracy, by irradiating the mark M portion and receiving reflected light from the non-penetrating IVH 7 of the positioning mark M portion with the CCD camera 20 The conductor is formed with high positioning.
That is, it is a method for manufacturing a printed wiring board in which a small-diameter, high-precision IVH is used as a positioning guide and a circuit conductor including a top land on a high-definition IVH surface is highly positioned.

そして、この非貫通の一段目の第1IVH8と二段目の第2IVH9を同一箇所に2段(多段)に重ねたスタックバイアホール構造とし、非貫通の位置決めマークMとすることもできる。   The first through-hole first IVH 8 and the second through-hole second IVH 9 can be stacked via holes in the same place in two stages (multi-stages), and the non-penetrating positioning mark M can be obtained.

また、直接描画露光と呼ばれる直接描画露光システムにより、多層プリント配線板に直接露光して、高精細で高位置決めの表面回路導体を形成するプリント配線板の製造方法を説明する。
上記の直接描画露光では、水銀灯によるUV光やレーザー光を利用するから描画速度が速く、高解像度の直接描画露光システムである。
In addition, a method of manufacturing a printed wiring board that forms a high-definition, high-positioning surface circuit conductor by directly exposing a multilayer printed wiring board using a direct drawing exposure system called direct drawing exposure will be described.
The direct drawing exposure described above is a high-resolution direct drawing exposure system with high drawing speed because it uses UV light or laser light from a mercury lamp.

直接描画露光システムでは、露光形成する治工具(フォトフィルムマスクやガラス乾板など)を使用せずに多層プリント配線板の上面に感光性ラミネートフィルムを真空圧着してから、レーザーダイレクトイメージング(LDI)と呼ばれる直接描画データにより直接描画露光して高精細IVHと高精細の上面側のトップランドを含む回路導体を高位置決めして形成するものである。   In the direct drawing exposure system, laser direct imaging (LDI) is used after vacuum-pressing a photosensitive laminate film on the upper surface of a multilayer printed wiring board without using an exposure forming tool (such as a photo film mask or a glass dry plate). The circuit conductor including the high-definition IVH and the top land on the upper surface side of the high-definition surface is formed by high-positioning by direct drawing exposure using direct drawing data called.

多層プリント配線板の位置決め基準として、バイアホールの非貫通穴内に導体めっきを施したIVHの位置決めマーク(M)を位置決め基準とし、直接描画露光システムにより、IVHとIVH上面の高精細の回路導体とを高精度に位置決め形成する   As a positioning reference for the multilayer printed wiring board, the IVH positioning mark (M) with conductor plating in the non-through hole of the via hole is used as a positioning reference. Positioning with high accuracy

上記のLDIシステムでは、従来の表面回路導体を露光する際の治工具(フォトフィルムマスクやガラス乾板など)を使用しないから、多層プリント配線板と露光する治工具との位置決めをする露光前の段取り作業が不要となる。   Since the above-mentioned LDI system does not use a conventional tool (such as a photo film mask or a glass dry plate) for exposing the surface circuit conductor, the pre-exposure setup for positioning the multilayer printed wiring board and the tool to be exposed is performed. Work becomes unnecessary.

また、直接描画露光システムでは、多層プリント配線板の温度や湿度による伸縮、寸法バラツキ、製造工程バラツキによる個別位置に合わした伸縮自在のLDIデータで直接描画して露光できるから高精細IVHと高精細の表面回路導体を高位置決めできる。   In addition, the direct drawing exposure system enables high-definition IVH and high-definition because it can be drawn and exposed directly with stretchable LDI data tailored to individual positions due to temperature and humidity expansion, dimensional variation, and manufacturing process variation of multilayer printed wiring boards. The surface circuit conductor can be positioned highly.

本発明のプリント配線板の製造方法を説明する4層の多層プリント配線板の断面図である。It is sectional drawing of the multilayer printed wiring board of 4 layers explaining the manufacturing method of the printed wiring board of this invention. 本発明のプリント配線板の製造方法を説明する6層の多層プリント配線板の断面図である。It is sectional drawing of the multilayer printed wiring board of 6 layers explaining the manufacturing method of the printed wiring board of this invention. 本発明の第2IVH9と、この第2IVHの第2トップランド6の位置決めを説明する拡大断面図である。It is an expanded sectional view explaining positioning of 2nd IVH9 of this invention, and 2nd top land 6 of this 2nd IVH. 本発明の位置決めマークMの特定領域について説明する平面図である。It is a top view explaining the specific area | region of the positioning mark M of this invention. 本発明の位置決めマークMの具体例を示す平面図である。It is a top view which shows the specific example of the positioning mark M of this invention.

符号の説明Explanation of symbols

1…プリント配線板、2…内層回路導体、3…第1ボトムランド、
4…第1トップランド、5…コア材、6…第2トップランド、
7…IVH、17…貫通スルーホール、8…第1IVH、9…第2IVH、
20…CCDカメラ、M…位置決めマーク。
DESCRIPTION OF SYMBOLS 1 ... Printed wiring board, 2 ... Inner-layer circuit conductor, 3 ... 1st bottom land,
4 ... 1st top land, 5 ... Core material, 6 ... 2nd top land,
7 ... IVH, 17 ... through hole, 8 ... first IVH, 9 ... second IVH,
20: CCD camera, M: positioning mark.

Claims (3)

多層プリント配線板の製造方法において、バイアホールの非貫通穴内に導体めっきを施した(複数段)×(複数列)のIVHブロックをIVHの位置決めマーク(M)とし、この位置決めマーク(M)のIVHからの反射光をCCDカメラで受光し、IVHと該IVHの上面側に形成した回路導体との位置決めをすることを特徴とするプリント配線板の製造方法。 In the method of manufacturing a multilayer printed wiring board, an IVH block (multiple rows) × (multiple rows) in which conductor plating is performed in a non-through hole of a via hole is used as an IVH positioning mark (M), and the positioning mark (M) A method of manufacturing a printed wiring board, comprising: receiving reflected light from IVH with a CCD camera; and positioning IVH and a circuit conductor formed on an upper surface side of the IVH. 請求項1において、位置決めマーク(M)が(奇数段)×(奇数列)のブロックからなる中心位置にIVHを配置しないようにしたことを特徴とするプリント配線板の製造方法。2. The method of manufacturing a printed wiring board according to claim 1, wherein the IVH is not arranged at a center position where the positioning mark (M) is composed of blocks of (odd number) × (odd number). 請求項1または2において、複数個の位置決めマーク(M)が、多層プリント配線板の有効領域の外部の特定領域に配置されることを特徴とするプリント配線板の製造方法。3. The method of manufacturing a printed wiring board according to claim 1, wherein the plurality of positioning marks (M) are arranged in a specific area outside the effective area of the multilayer printed wiring board.
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JP5407470B2 (en) * 2009-03-25 2014-02-05 凸版印刷株式会社 Multilayer circuit board manufacturing method
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CN111031686A (en) * 2019-12-26 2020-04-17 沪士电子股份有限公司 Positioning method for grabbing PCB and positioning hole glue removing device for PCB

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