JP4819991B2 - Method and apparatus for adjusting magnification of scanning optical microscope - Google Patents

Description

このステップ＃５８での判断の結果、前回の検出位置が調整対象範囲になければ、上記ステップ＃５７に移って次回の検出開始位置をエッジ検出位置とする。
【００７５】
又、上記ステップ＃５４での判断の結果、前回の検出位置が調整対象範囲になければ、ステップ＃５６に移り、調整対象範囲の左端を下記の式（３）により算出し、上記ステップ＃５７に移って次回の検出開始位置をエッジ検出位置とする。
【００７６】

次に、ステップ＃６０において、検出開始位置がラインデータの右端であるか否かを判断し、この判断の結果、ラインデータの右端であれば、ステップ＃６１に移ってエッジカウンタと右端の端数と左端の端数との合計を算出する。
【００７７】
次に、ステップ＃６１において、調整対象範囲と画像サイズとの関係から測定値（スケール数）を算出する。
【００７８】
上記ステップ＃６０での判断の結果、検出開始位置がラインデータの右端でなければ、再びステップ＃５１に戻る。
【００７９】
次に、図３に示す主スキャナの調整手順に戻る。
【００８０】
制御回路３０は、ステップ＃３５において、上記測定値（スケール数）が許容誤差を含んだ調整目標値になったか否かを判断する。例えば、最低拡大倍率の測定目標値が２００で、許容誤差が画像全体に対して５％とすると、各拡大倍率の調整目標値と許容誤差の範囲は、図８に示す関係となる。例えば、拡大倍率１．０では、許容誤差を含んだ測定目標値は、２４０．０±１２．０となる。
【００８１】
次に、この判断の結果、上記測定値（スケール数）が許容誤差を含んだ調整目標値になっていれば、ステップ＃３６に移って現在の駆動電圧値を駆動電圧格納メモリ１８に格納する。
【００８２】
次に、ステップ＃３７において、現在の拡大倍率が設定可能な最高倍率であるか否かを判断し、最高倍率であれば、作業を終了する。最高倍率でなければ、ステップ＃３８に移って拡大倍率の変更可能な最小単位だけ拡大倍率を大きくして再びステップ＃３１に戻る。
【００８３】
上記ステップ＃３５での判断の結果、上記測定値（スケール数）が許容誤差を含んだ調整目標値でなければ、ステップ＃３９に移って許容誤差を含んだ測定目標値と測定値との大小関係を判断し、この判断の結果、測定値が許容誤差を含んだ測定目標値よりも大きければ、ステップ＃４０に移って駆動電圧値の検索下限値を現在の電圧値に変更する。又、測定値が許容誤差を含んだ測定目標値よりも小さければ、ステップ＃４１に移って駆動電圧値の検索上限値を現在の電圧値に変更する。
【００８４】
次に、ステップ＃４２において、駆動する電圧値を現在の探索上限値と探索下限値との中間の値を駆動電圧格納メモリ１８に格納し、再びステップ＃３４に戻る。
【００８５】
そして、試料１１ａ上にレーザ光を走査してこの試料１１ａからの反射光を光検出器１３で検出し、この光検出器１３から出力されるアナログ画像信号を画像制御ユニット１６に送る。この画像制御ユニット１６において、光検出器１３からのアナログ画像信号をデジタル化してその画像データを画像メモリ２１に記憶し、この画像メモリ２１に記憶された画像データ、すなわち図２１に示すようなスケールの画像を表示部２２に表示する。
【００８６】
以上で主スキャナ６の調整を終了する。
【００８７】
次に、上記図２に示す走査型光学顕微鏡のスキャナの全体の調整手順に戻る。
【００８８】
先ず、ステップ＃２３において、試料１１ａの表面のスケールが表示部２２に表示される画像で確認できるようにステージ１０を図示しない昇降機構により上下動させて合焦（ピントを合わせる）させる。
【００８９】
次に、ステップ＃２４において、試料１１ａは、上記図２２に示すような画像が得られるように、スキャナ７の副走査方向に合わせる。
【００９０】
次に、ステップ＃２５において、副スキャナ７の調整が行われる。この副スキャナ７の調整は、主スキャナの調整手順と同様に行われる。但し、表示部２２には、上記図２２に示すような試料１１ａのスケールの画像が表示されると共に、この画像の中央の走査方向に平行なラインの画像情報に対して図９に示すようなラインプロファイルが表示されるところが相違する。
【００９１】
このように上記第１の実施の形態においては、一定間隔のスケールが形成された試料１１ａを用い、この試料１１ａに対してレーザ光を走査して取得された画像データにおけるスケール数（スケールの測定値）に基づいて二次元走査制御ユニット１５の駆動電圧格納メモリ１８に格納する複数の拡大倍率に対応する各走査駆動電圧の調整、すなわち試料１１ａに対するレーザ光の主走査方向に対する複数の拡大倍率に対応する各走査駆動電圧の調整と、レーザ光の副走査方向に対する複数の拡大倍率に対応する各走査駆動電圧の調整とを顕微鏡制御ユニット１７の制御回路３０により自動的に行うので、各スキャナ６、７の各駆動電圧値の調整（振り幅調整）を行うに当たって、その作業者が行っていた殆どの作業を自動的に行うことができ、作業を簡易化して作業者に対する負担を軽減でき、調整結果を作業者によらず一定で、かつ調整による精度についても作業者の熟練度によらず常に高い精度の調整を容易に行うことができる。
【００９２】
なお、上記第１の実施の形態は、次の通り変形してもよい。
【００９３】
例えば、主及び副スキャナ６、７の駆動電圧値の自動調整工程において、調整目標値の検出方法としてバイナリサーチを例として説明したが、その他に、線形サーチや２回以上の線幅の測定結果から調整目標値を推定する方法など、測定値を調整目標値に一致させる方法であればよい。
【００９４】
又、線幅測定工程においても、例えばエッジのカウント方法が下エッジをカウントしたり、上エッジと下エッジとがペアになったものをカウントするなど、画像上のラインパターンを自動的に測定する公知な方法でもよい。
【００９５】
（２）次に、本発明の第２の実施の形態について説明する。
【００９６】
本発明の第２の実施の形態は、上記第１の実施の形態における副スキャナ７の調整作業に先立て行われる上記図２に示すステップ＃２３及び＃２４を省略するものである。
【００９７】
これらステップ＃２３及び＃２４を省略するために、試料１１ａとしては、図１０に示すようにその表面にレーザ光の主走査方向と副走査方向とにそれぞれ平行な各スケールが形成されている。これらスケールは、例えば１μｍピッチに形成されている。
【００９８】
このような試料１１ａを用いれば、上記図２に示すステップ＃２０において、当該試料１１ａの表面の各スケールが表示部２２に表示される画像で確認できるようにステージ１０を図示しない昇降機構により上下動させて合焦（ピントを合わせる）させ、次のステップ＃２１において、試料１１ａを上記図２１に示すような画像が得られるようにスキャナ６の主走査方向に合わせることにより、副スキャナ７の調整では、副スキャナ７の調整作業に先立て行われる上記図２に示すステップ＃２３及び＃２４を省略できる。
【００９９】
なお、走査型光学顕微鏡の構成、スキャナ６、７の調整手順については上記第１の実施の形態と同様であるのでその説明は省略する。
【０１００】
（３）次に、本発明の第３の実施の形態について説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。本発明の第３の実施の形態は、上記第１の実施の形態における主スキャナ６及び副スキャナ７の調整作業に先立て作業者が行う図２に示すステップ＃２０とステップ＃２３との各作業を自動的に処理するようにしたものである。
【０１０１】
図１１は走査型光学顕微鏡の構成図である。ハーフミラー４と集光レンズ１２との間の光路上には、像回転機構４０が設けられている。この像回転機構４０は、試料１１ａに対してレーザ光を走査して取得される試料１１ａの像を光学的に回転させて主走査方向又は副走査方向に補正し合わせる機能を有している。
【０１０２】
この像回転機構４０は、顕微鏡制御ユニット１７の制御回路３０から回転駆動回路４１に対して指示を与えることにより所望の角度だけ試料１１ａの像を回転制御するものとなっている。すなわち、制御回路３０は、回転駆動回路４１を介して像回転光学系４４を制御し、ラインパターンなどの測定対象パターンに対して角度補正する機能を有している。
【０１０３】
図１２は像回転機構４０の構成図である。この像回転機構４０は、リレーレンズ４２、コリレーションレンズ４３、像回転光学系４４及び補正リレーレンズ４５を配列した構成となっている。
【０１０４】
従って、この像回転機構４０は、リレーレンズ４２から出射した試料１１ａからの反射光をコリレーションレンズ４３によりコリレートして像回転光学系４４に入射する。この像回転光学系４４は、当該光学系４４を透過する透過光束像を点対称に１回転させるプリズムを含んでおり、そのプリズムと共に光軸を中心として回転できるようになっている。そして、この像回転光学系４４の透過光束像を補正リレーレンズ４５により投影レンズ１２に対する焦点補正を行って当該投影レンズ１２に導く。
【０１０５】
ここで、測定対象パターンの像回転前後の幅測定値と像回転量とから走査線方向と平行線との交差角すなわち測定対象パターンＰの傾きを検出する原理について図１３を参照して説明する。
【０１０６】
同図１３に示すように垂直方向の走査線に対して所定の角度θ（θが測定対象となる）で傾いている測定対象パターンＰに対して水平方向の走査線と交差する両端のエッジの間隔を幅Ｗ_１、測定対象パターンＰのある角度Ｔで像回転した後の測定対象パターンＰ’について水平方向の走査線と交差する両端のエッジの間隔を幅Ｗ_２とし、像回転前の測定対象パターンＰについて傾き角度θを求める。
なお、測定対象パターンＰと直交するラインと交差する両端のエッジの間隔をＷとする。最終的には、当該間隔Ｗを測定値として出力する。
【０１０７】
幅Ｗ_１とＷ_２とは、
Ｗ_１＝Ｗ／ｃｏｓθ …（４）
Ｗ_２＝Ｗ／ｃｏｓ（θ＋Ｔ） …（５）
により表わされる。
【０１０８】
これら式（４）及び（５）を幅Ｗの形の式に変形して等式をまとめ、
ｃｏｓ（θ＋Ｔ）を加法定理によって分解すると、
Ｗ_１×ｃｏｓθ＝Ｗ_２×（ｃｏｓθ×ｃｏｓＴ−ｓｉｎθ×ｓｉｎＴ）…（６）
となる。ｃｏｓθ、ｓｉｎθを左式にまとめると、Ｗ_２、ｓｉｎＴは０でないことから、
ｓｉｎθ／ｃｏｓθ＝（Ｗ_２×ｃｏｓＴ−Ｗ_１）／（Ｗ_２×ｓｉｎＴ）…（７）
故に
ｔａｎθ＝（Ｗ_２×ｃｏｓＴ−Ｗ_１）／（Ｗ_２×ｓｉｎＴ）…（８）
となる。上記式（８）の右辺より明らかなように幅Ｗ_１、Ｗ_２、角度Ｔから像回転前の測定対象パターンＰについて傾き角度θが求められる。
【０１０９】
又、一般的に任意の２直線の交差点θａは、−９０°＜θａ＜＋９０°で求めることができるので、これら２直線を測定対象パターンＰのエッジと走査線とにすれば、ｔａｎθは、−９０°＜θａ＜＋９０°で１つの解を持つことにより一つの傾き角度θを求めることができる。
【０１１０】
しかるに、制御回路３０は、以上の手順を実行する機能を有するものとなる。この制御回路３０は、上記図２に示すステップ＃２１において、回転駆動回路４１に対して試料１１ａへのレーザ光の走査方向を主走査方向に制御する指示を与える。この指示により像回転機構４０は、試料１１ａに対してレーザ光を走査して取得される試料１１ａの像を光学的に回転させ、レーザ光の走査方向を主走査方向に補正し合わせる。
【０１１１】
又、制御回路３０は、上記図２に示すステップ＃２４において、回転駆動回路４１に対して試料１１ａへのレーザ光の走査方向を副走査方向に制御する指示を与える。この指示により像回転機構４０は、試料１１ａに対してレーザ光を走査して取得される試料１１ａの像を光学的に回転させ、レーザ光の走査方向を副走査方向に補正し合わせる。
【０１１２】
なお、走査型光学顕微鏡の構成、スキャナ６、７の調整手順については上記第１の実施の形態と同様であるのでその説明は省略する。
【０１１３】
このように上記第３の実施の形態によれば、主スキャナ６又は副スキャナ７の各調整作業に先立て作業者がそれぞれ行う試料１１ａの向きを主走査方向又は副走査方向へ補正し合わせる作業を省略し自動的に主スキャナ又は副スキャナの調整作業ができる。
【０１１４】
（４）次に、本発明の第４の実施の形態について説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。本発明の第４の実施の形態は、上記第１の実施の形態における主スキャナ６及び副スキャナ７の調整作業に先立て作業者が行う図２に示すステップ＃２０、＃２１とステップ＃２３、＃２４との各作業を自動的に処理するようにしたものである。
【０１１５】
すなわち、本発明の第４の実施の形態は、上記第３の実施の形態において表面にレーザ光の主走査方向と副走査方向とにそれぞれ平行な例えば１μｍピッチの各スケールが形成された図１０に示す試料１１ａを用いることである。
【０１１６】
この試料１１ａを用いれば、上記図２に示すステップ＃２１において、試料１１ａを上記図２１に示すような画像が得られるようにスキャナ６の主走査方向に合わせることにより、副スキャナ７の調整では、副スキャナ７の調整作業に先立て行われる上記図２に示すステップ＃２３及び＃２４を省略できる。
【０１１７】
なお、走査型光学顕微鏡の構成、スキャナ６、７の調整手順については上記第１の実施の形態と同様であるのでその説明は省略する。
【０１１８】
（５）次に、本発明の第５の実施の形態について説明する。なお、図１と同一部分には同一符号を付してその詳しい説明は省略する。
【０１１９】
本発明の第５の実施の形態は、上記第１の実施の形態に対して駆動電圧格納メモリ１８が図１４に示すように各拡大倍率に対する各駆動電圧値が全ての対物レンズ（例えば対物１、対物２、…、対物Ｎ）９ごとに全て持つこと、統制工程を全ての対物レンズ９に対して行うことで、対物レンズ９間の拡大倍率誤差を含めて調整を行うものである。
【０１２０】
次に、倍率調整方法について図１５に示す走査型光学顕微鏡のスキャナ６、７の全体の調整手順に従って説明する。
【０１２１】
先ず、ステップ＃７０において、レボルバ８に取り付けられている各対物レンズ９のうち例えば対物レンズ（対物１）９が光軸上にセットされる。
【０１２２】
次に、ステップ＃２０において、試料１１ａの表面のスケールが表示部２２に表示される画像で確認できるようにステージ１０を図示しない昇降機構により上下動させて合焦（ピントを合わせる）させる。
【０１２３】
次に、ステップ＃２１において、試料１１ａは、上記図２１に示すような画像が得られるように、スキャナ６の主走査方向に合わせる。
【０１２４】
次に、ステップ＃２２において、主スキャナ６の調整が行われる。この主スキャナ６の調整は、上記図３に示す主スキャナの調整手順に従って行われる。この主スキャナの調整手順により対物レンズ（対物１）９をセットしたときの各拡大倍率（１．０〜６．０倍）に対する主スキャナ６の各駆動電圧値が駆動電圧格納メモリ１８に格納される。
【０１２５】
主スキャナ６の調整が終了すると、ステップ＃２３において、試料１１ａの表面のスケールが表示部２２に表示される画像で確認できるようにステージ１０を図示しない昇降機構により上下動させて合焦（ピントを合わせる）させる。
【０１２６】
次に、ステップ＃２１において、試料１１ａは、上記図２１に示すような画像が得られるように、副スキャナ７の副走査方向に合わせる。
【０１２７】
次に、ステップ＃２２において、副スキャナ７の調整が行われる。この副スキャナ７の調整により対物レンズ（対物１）９をセットしたときの各拡大倍率（１．０〜６．０倍）に対する副スキャナ７の各駆動電圧値が駆動電圧格納メモリ１８に格納される。
【０１２８】
以上のように対物レンズ（対物１）９に対する主スキャナ６及び副スキャナ７の各調整が終了すると、ステップ＃７１において全ての対物レンズ（例えば対物１、対物２、…、対物Ｎ）９に対する調整が終了したか否かの判断が行われ、この判断の結果、全ての対物レンズ（例えば対物１、対物２、…、対物Ｎ）９に対する調整が終了していなければ、再びステップ＃７０に戻り、レボルバ８に取り付けられている各対物レンズ９のうち例えば対物レンズ（対物２）９が光軸上にセットされる。
【０１２９】
そして、上記同様に対物レンズ（対物２）９に対する主スキャナ６と副スキャナ７との各調整が行われ、これら主スキャナ６と副スキャナ７との調整により対物レンズ（対物２）９をセットしたときの各拡大倍率（１．０〜６．０倍）に対する主スキャナ６と副スキャナ７との各駆動電圧値がそれぞれ駆動電圧格納メモリ１８に格納される。
【０１３０】
以下同様に、対物レンズ（対物３、…、対物Ｎ）９に対する主スキャナ６と副スキャナ７との各調整が行われ、これら主スキャナ６と副スキャナ７との調整により対物レンズ（対物３、…、対物Ｎ）９をセットしたときの各拡大倍率（１．０〜６．０倍）に対する主スキャナ６と副スキャナ７との各駆動電圧値がそれぞれ駆動電圧格納メモリ１８に格納される。
【０１３１】
このように上記第５の実施の形態によれば、全ての対物レンズ（対物１、対物２、…、対物Ｎ）９ごとに各スキャナ６、７の各駆動電圧値の調整を作業者によらず一定で、かつ調整による精度についても作業者の熟練度によらず常に高い精度の調整を容易に行うことができる。
【０１３２】
なお、上記第５の実施の形態は、上記第１の実施の形態に対して駆動電圧格納メモリ１８に上記図１４に示すような各拡大倍率に対する各駆動電圧値を全ての対物レンズ（例えば対物１、対物２、…、対物Ｎ）９ごとに持ち、統制工程を全ての対物レンズ９に対して行うことで、対物レンズ９間の拡大倍率誤差を含めて調整を行うものとしたが、上記第２乃至４の実施の形態に対しても同様に、駆動電圧格納メモリ１８に上記図１４に示すような各拡大倍率に対する各駆動電圧値を全ての対物レンズ（例えば対物１、対物２、…、対物Ｎ）９ごとに持ち、統制工程を全ての対物レンズ９に対して行うようにしてもよい。
【０１３３】
なお、本発明は、上記第１乃至第５の実施の形態に限定されるものでなく、実施段階ではその要旨を逸脱しない範囲で種々に変形することが可能である。
【０１３４】
さらに、上記実施形態には、種々の段階の発明が含まれており、開示されている複数の構成要件における適宜な組み合わせにより種々の発明が抽出できる。例えば、実施形態に示されている全構成要件から幾つかの構成要件が削除されても、発明が解決しようとする課題の欄で述べた課題が解決でき、発明の効果の欄で述べられている効果が得られる場合には、この構成要件が削除された構成が発明として抽出できる。
【０１３５】
例えば、上記第１乃至第５の実施の形態は、次の通り変形してもよい。
【０１３６】
上記第１乃至第５の実施の形態に適用した走査型光学顕微鏡において、試料１１ａの表面に自動的に合焦するＡＦ（オートフォーカス）ユニットを備え、このＡＦユニットの制御を制御回路３０により行うようにすれば、作業者が行っていた上記図２に示すステップ＃２０と＃２３を自動的に行うことができる。
【０１３７】
又、上記第１乃至第５の実施の形態に適用した走査型光学顕微鏡において、二次元走査手段の一つがスキャナ６、７以外の走査手段、例えば対物光学系を移動させる手段でもよい。この場合、調整工程は、１つのスキャナに対して調整を行うだけとなる。
【０１３８】
【発明の効果】
以上詳記したように本発明によれば、作業者に対する負担を軽減し、拡大倍率に対する駆動電圧の調整結果を作業者によらず一定で、かつ精度高く行うことができる走査型光学顕微鏡の倍率調整方法及びその装置を提供できる。
【図面の簡単な説明】
【図１】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第１の実施の形態を示す構成図。
【図２】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態におけるスキャナの全体の調整手順を示す図。
【図３】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における主スキャナの調整手順を示す図。
【図４】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における線幅測定手順を示す図。
【図５】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における試料のスケールの画像のラインプロファイルを示す図。
【図６】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における線幅の測定を説明するための図。
【図７】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における測定の初期設定画面を示す図。
【図８】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における拡大倍率の調整目標値と許容誤差の範囲の関係を示す図。
【図９】本発明に係わる走査型光学顕微鏡の倍率調整方法の第１の実施の形態における試料のスケールの副走査における画像のラインプロファイルを示す図。
【図１０】本発明に係わる走査型光学顕微鏡の倍率調整方法の第２の実施の形態におけるスキャナを調整するために使用される他の試料の構成図。
【図１１】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第３の実施の形態を示す構成図。
【図１２】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第３の実施の形態における像回転機構の構成図。
【図１３】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第３の実施の形態における測定対象パターンの像回転前後の幅測定値と像回転量とから走査線方向と平行線との交差角を検出する原理を説明するための図。
【図１４】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第５の実施の形態における駆動電圧格納メモリの構成図。
【図１５】本発明に係わる走査型光学顕微鏡の倍率調整方法を適用した第５の実施の形態におけるスキャナの全体の調整手順を示す図。
【図１６】従来の一般的な走査型光学顕微鏡の構成図。
【図１７】従来の走査型光学顕微鏡における駆動電圧格納メモリの構成図。
【図１８】従来の走査型光学顕微鏡におけるスキャナ（二次元走査手段）の全体の調整手順を示す図。
【図１９】従来の走査型光学顕微鏡における主スキャナの調整手順を示す図。
【図２０】走査型光学顕微鏡のスキャナを調整するために使用される試料の構成図。
【図２１】従来の走査型光学顕微鏡における主スキャナを調整するための試料の表示画像を示す図。
【図２２】従来の走査型光学顕微鏡における副スキャナを調整するための試料の表示画像を示す図。
【符号の説明】
１：顕微鏡本体
２：点光源
３：ミラー
４：ハーフミラー
５：二次元走査手段
６：主スキャナ
７：副スキャナ
８：レボルバ
９：対物レンズ
１０：ステージ
１１：標本
１１ａ：試料
１２：集光レンズ
１３：光検出器
１４：制御処理装置
１５：二次元走査制御ユニット
１６：画像制御ユニット
１７：顕微鏡制御ユニット
１８：駆動電圧格納メモリ
１９：二次元走査駆動回路
２０：Ａ／Ｄ変換器
２１：画像メモリ
２２：表示部
２３：入力部
２４：出力部
３０：制御回路
３１：メモリ
４０：像回転機構
４１：回転駆動回路
４２：リレーレンズ
４３：コリレーションレンズ
４４：像回転光学系
４５：補正リレーレンズ[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a method for adjusting the magnification of a scanning optical microscope used for measuring the surface information of a specimen, and its mounting.In placeRelated.
[0002]
[Prior art]
A scanning optical microscope illuminates the surface of an observation sample in a point shape with a point light source, and condenses the transmitted or reflected light from the illuminated sample surface again in a point shape to form an image on a photodetector. The density information of the light imaged on the photodetector is obtained.
[0003]
FIG. 16 is a configuration diagram of a general scanning optical microscope. The microscope main body 1 is provided with a point light source 2. Laser light (point light source) emitted from the point light source 2 is reflected by the mirror 3, passes through the half mirror 4, and enters the two-dimensional scanning unit 5. The two-dimensional scanning means 5 includes a main scanner 6 and a sub scanner 7 (hereinafter, the main scanner 6 and the sub scanner 7 are collectively referred to as scanners 6 and 7) made of galvanometer mirrors. And scanning in the sub-scanning direction. The scanned laser beam is image-formed on the surface of the specimen 11 on the stage 10 by the objective lens 9 attached to the revolver 8.
[0004]
The reflected light from the specimen 11 that has been illuminated in the form of dots is incident on the half mirror 4 again through the objective lens 9 and the two-dimensional scanning means 5, and is reflected and condensed by the condenser lens 12 to be detected. Incident on the vessel 13. Therefore, the photodetector 13 receives the reflected light when the light is scanned over the entire measurement region on the surface of the specimen 11 and outputs an analog image signal thereof.
[0005]
On the other hand, the control processing device 14 controls the two-dimensional scanning means 5 of the microscope body 1 and inputs the detection signal from the photodetector 13 to obtain the image data of the specimen 11. Each function of the image control unit 16 and the microscope control unit 17 is provided.
[0006]
The two-dimensional scanning control unit 15 includes a drive voltage storage memory 18 in which the drive voltage values of the scanners 6 and 7 for driving the scanners 6 and 7 are stored, and the scanner 6 read from the drive voltage storage memory 18. , 7 has a two-dimensional scanning drive circuit 19 for driving the scanners 6, 7 respectively.
[0007]
The image control unit 16 digitizes the analog image signal from the photodetector 13 and the digital image signal from the A / D converter 20, for example, 512 pixels × 512 pixels × 8 bits. It has an image memory 21 that stores (256 gradations) image data, and a display unit 22 that displays the image data stored in the image memory 21, that is, a two-dimensional image of the surface of the specimen 11.
[0008]
The microscope control unit 17 operates the two-dimensional scanning control unit 15 and the image control unit 16 in a coordinated manner. For example, the microscope control unit 17 includes an input unit 23 composed of a keyboard, an output unit 24 composed of a monitor and the like, and a control circuit 25. Yes.
[0009]
Therefore, the two-dimensional scanning control unit 15 drives the scanners 6 and 7 with each drive voltage value read from the drive voltage storage memory 18. The scanners 6 and 7 scan the laser beam over the entire measurement area on the surface of the specimen 11 and guide the reflected light from the specimen 11 to the photodetector 13. The photodetector 13 receives reflected light from the surface of the specimen 11 and outputs an analog image signal thereof.
[0010]
The image control unit 16 converts the analog image signal from the light detector 13 into a digital image signal by the A / D converter 20, stores it in the image memory 21 as image data, and reads out this image data. A two-dimensional image of the surface of the specimen 11 is displayed on the display unit 22.
[0011]
By the way, in the position control of the galvanometer mirror used in the scanners 6 and 7, there is a deviation between the position of the galvanometer mirror indicated by the drive signal from the two-dimensional scanning drive circuit 19 and the actual position of the galvanometer mirror. As a method of correcting this deviation and stably scanning the scanners 6 and 7, for example, the scanner 6 and 7 are converged to a certain amount by PID control (Japanese Patent Laid-Open No. 7-14184) or the drive waveform data of the scanner is corrected. There is a method (Japanese Patent Laid-Open No. 10-10449).
[0012]
On the other hand, as a method for optically enlarging and reducing an image, there is a method of changing the scanning width of the scanners 6 and 7. This method expands / contracts the scanning width by increasing / decreasing the drive voltage values of the scanners 6 and 7, and adjusting the sampling rate of the image data to be inversely proportional to the drive voltage so that the number of sampling of the image data is always the same. To do. The scanned image obtained by this method can be enlarged and reduced while the image size is constant.
[0013]
As a method other than the above, for example, as described in JP-A-10-13671, the scanning magnification is variably controlled on the assumption that the relationship between the scanning width of the scanners 6 and 7 and the drive voltage value is linear. Thus, the magnification of the image is changed.
[0014]
However, in practice, the relationship between the scanning width and the driving voltage is not strictly linear due to the physical individual differences constituting the scanners 6 and 7 and the non-linearity of the driving waveform. The magnification error in measuring the surface information cannot fall within a certain allowable range.
[0015]
In order to keep this magnification error within the allowable range, a drive voltage value storage memory is prepared for each settable magnification, and the drive voltage value is adjusted in advance so that the scanning width at each magnification can guarantee the measurement accuracy. ing. That is, the two-dimensional scanning control unit 15 reads a scanning driving voltage value (hereinafter, abbreviated as a driving voltage value) corresponding to the current magnification setting magnification from the driving voltage storage memory 18 and supplies the scanning driving voltage value to the two-dimensional scanning driving circuit 19. It is variably controlled. For example, if variable control is possible in increments of 0.1 with a scanning magnification of 1.0 to 6.0, the configuration of the drive voltage storage memory 18 is all that can be set for each of the scanners 6 and 7, as shown in FIG. Each drive voltage value for each magnification can be stored.
[0016]
Here, a method for adjusting each drive voltage value for each magnification of the scanners 6 and 7 will be described. FIG. 18 shows an overall adjustment procedure for the scanners 6 and 7, and FIG. 19 shows an adjustment procedure for the main scanner 6.
[0017]
As shown in FIG. 18, the main scanner 6 is adjusted in step # 1 and the sub scanner 7 is adjusted in step # 2 to adjust the drive voltage values for the magnifications of the scanners 6 and 7, respectively.
[0018]
The adjustment procedure of the main scanner 6 will be described with reference to FIG. As a sample 11a for adjusting the scanners 6 and 7, a sample as shown in FIG. 20 is used. The sample 11a is formed with a scale having a constant interval. In step # 11, the sample 11a is placed on the stage 10 in accordance with the scanning direction of the scanners 6 and 7 (here, the main scanner 6) so as to obtain an image as shown in FIG.
[0019]
Next, in step # 12, the stage 10 is moved up and down by an elevating mechanism (not shown) and focused (focused) so that the scale of the surface of the sample 11a can be confirmed by an image displayed on the display unit 22.
[0020]
Next, in step # 13, the drive voltage value of the main scanner 6 is set to a reference voltage that maximizes the scanning width of the main scanner 6, and the zoom magnification is set to the minimum magnification.
[0021]
Next, in step # 14, the microscope control unit 17 causes the two-dimensional scanning control unit 15 and the image control unit 16 to cooperate with each other, scan light on the sample 11a, and reflect the reflected light from the sample 11a to the photodetector 13. The analog image signal output from the photodetector 13 is sent to the image control unit 16. In the image control unit 16, the analog image signal from the photodetector 13 is digitized and the image data is stored in the image memory 21, and the image data stored in the image memory 21, that is, a scale as shown in FIG. Are displayed on the display unit 22.
[0022]
Next, in step # 15, an image of a scale as shown in FIG. 21 displayed on the display unit 22 is visually observed by an operator, and the scale number (measured value of the scale) matches the adjustment target value from this image. Judge whether or not. As a result of determining whether or not the number of scales matches the adjustment target value, for example, if the adjustment target value at 1 magnification is 20.0, the image display result is as shown in FIG. If the number of scales is 20, the adjustment at the magnification of 1 is completed.
[0023]
If the number of scales does not coincide with the adjustment target value, if not, the process proceeds to step # 16. For example, each adjustment is performed in the direction of increasing the drive voltage value. Then, the adjustment of the drive voltage value is repeated (steps # 14 to # 16), and the number of scales is matched with the adjustment target value.
[0024]
Next, when the scale number matches the adjustment target value, the drive voltage value at that time is stored in the drive voltage storage memory 18 of the two-dimensional scanning control unit 15. For example, if the magnification currently being adjusted is 1.1, the drive voltage value is stored in a region 18a 1.1 times the main scanner drive voltage value of the drive voltage storage memory 18 shown in FIG.
[0025]
Next, in step # 17, it is determined whether or not the adjustment of all enlargement magnifications has been completed. If not, the next enlargement magnification to be adjusted is set in step # 18, and the process returns to step # 14. Returning, the drive voltage value at that magnification is adjusted.
[0026]
When all the magnification adjustments are completed, the adjustment operation is terminated.
[0027]
On the other hand, the adjustment procedure of the sub scanner 7 is the same as that of the main scanner 6. The difference is that the sample 11a is aligned so that the image displayed on the display unit 22 matches the scanning direction of the sub scanner 7 as shown in FIG. The adjustment target value is 13.0 in terms of the number of scales placed on the stage 10 and, for example, at an enlargement magnification of 1 ×.
[0028]
[Problems to be solved by the invention]
However, in order to perform all the adjustment operations of the drive voltage values as described above, since the enlargement magnification is set in increments of 0.1 of 1.0 to 6.0, for example, the main scanner 6 and the sub scanner 7 are set. In both cases, the operations of steps # 12 to # 15 and # 16 must be repeated 51 times, which is very time consuming and a heavy burden on the operator.
[0029]
In addition, since the operator determines whether or not the adjustment for each magnification has been completed, the adjustment results vary depending on the operator, and in order to obtain high accuracy, A certain level of skill is required.
[0030]
Accordingly, the present invention provides a magnification adjustment method and apparatus for a scanning optical microscope capable of reducing the burden on the operator and making the adjustment result of the drive voltage value with respect to the enlargement magnification constant and accurate regardless of the operator. The purpose is to provide.
[0032]
[Means for Solving the Problems]
  The present invention according to claim 1 scans a specimen with light, receives light from the specimen, obtains image data of the specimen, and adjusts a scanning width of light with respect to the specimen to adjust the width of the specimen. In a scanning optical microscope that adjusts an enlargement magnification, a plurality of samples are formed based on measured values of the scale in the image data obtained by scanning the sample with the light using a sample having a constant interval scale. Adjust each scanning drive voltage corresponding to the magnificationThe enlargement is performed by a binary search method that repeatedly narrows the range including the scanning drive voltage corresponding to the adjustment target value by a half from the magnitude relationship between the measured value of the scale and the adjustment target value. Obtain each scanning drive voltage corresponding to the magnificationThis is a method for adjusting the magnification of a scanning optical microscope.
  The present invention according to claim 2 scans a specimen with light, receives light from the specimen to acquire image data of the specimen, and adjusts a scanning width of the light with respect to the specimen to In a scanning optical microscope that adjusts an enlargement magnification, a plurality of samples are formed based on measured values of the scale in the image data obtained by scanning the sample with the light using a sample having a constant interval scale. Each of the scanning drive voltages corresponding to the enlargement magnification of the sample, wherein the sample is formed with respective scales parallel to the main scanning direction and the sub-scanning direction of the light. And adjusting the scan drive voltages corresponding to the plurality of enlargement magnifications in the main scanning direction and adjusting the scan drive voltages corresponding to the plurality of enlargement magnifications in the sub-scanning direction. It is the magnification adjusting method of a scanning optical microscope according to claim.
  The present invention according to claim 3 scans a specimen with light, receives light from the specimen, obtains image data of the specimen, and adjusts a scanning width of light with respect to the specimen to adjust the width of the specimen. In a scanning optical microscope that adjusts an enlargement magnification, a plurality of samples are formed based on measured values of the scale in the image data obtained by scanning the sample with the light using a sample having a constant interval scale. Each of the scanning drive voltages corresponding to the enlargement magnification is adjusted by rotating an image of the sample obtained by scanning the light with respect to the sample using an optical image rotating means. Correction is performed in the main scanning direction or the sub-scanning direction, and thereafter, adjustment of each scanning drive voltage corresponding to the plurality of enlargement magnifications in the main scanning direction and correspondence to the plurality of enlargement magnifications in the sub-scanning direction are performed. That said the magnification adjusting method of a scanning optical microscope which is characterized in that the adjustment of the scanning drive voltage.
[0033]
  Claim7The invention according to the descriptionA scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In the above, a sample on which scales of a constant interval are formed, means for scanning the sample with the light to acquire image data thereof, means for counting the number of scales in the image data, and Means for adjusting each scanning drive voltage corresponding to a plurality of magnifications based on the number; means for storing each scanning drive voltage after the adjustment in a drive voltage storage memory; and measurement value and adjustment of the scale Corresponding to the enlargement magnification is achieved by a binary search method in which the range including the scanning drive voltage corresponding to the adjustment target value is narrowed every half from the magnitude relationship with the target value. Is the magnification adjusting device of a scanning optical microscope, characterized by comprising means for determining the respective scan driving voltage.
  The present invention according to claim 9 scans a specimen with light, receives light from the specimen, obtains image data of the specimen, and adjusts a scanning width of light with respect to the specimen to adjust the width of the specimen. In a scanning optical microscope that adjusts an enlargement magnification, a sample on which scales of a fixed interval are formed, means for scanning the sample with the light to acquire image data thereof, and the number of scales in the image data Means for counting each of the scanning drive voltages corresponding to the plurality of magnifications based on the number of scales, and means for storing each of the adjusted scan drive voltages in a drive voltage storage memory. The sample is formed with respective scales parallel to the main scanning direction and the sub-scanning direction of the light, and the means for adjusting each scanning drive voltage uses the sample, Performing an adjustment of the respective scan driving voltages corresponding to a plurality of the magnification in the main scanning direction, and an adjustment of each of the scan driving voltages corresponding to a plurality of the magnification with respect to the subscanning directionIt is characterized byMagnification adjustment device for scanning optical microscope.
  The present invention according to claim 10 scans a specimen with light, receives light from the specimen, obtains image data of the specimen, and adjusts a scanning width of light with respect to the specimen, In a scanning optical microscope that adjusts an enlargement magnification, a sample on which scales of a fixed interval are formed, means for scanning the sample with the light to acquire image data thereof, and the number of scales in the image data Means for counting each of the scanning drive voltages corresponding to the plurality of magnifications based on the number of scales, and means for storing each of the adjusted scan drive voltages in a drive voltage storage memory. And rotating the image of the sample obtained by scanning the light with respect to the sample using an optical image rotating means to correct in the main scanning direction or the sub-scanning direction. The means for adjusting the scan drive voltage includes adjusting the scan drive voltages corresponding to the plurality of enlargement magnifications in the main scanning direction, and adjusting the scan drive voltages corresponding to the plurality of enlargement magnifications in the sub-scanning direction. It is the magnification adjustment apparatus of the scanning optical microscope characterized by performing adjustment.
[0041]
DETAILED DESCRIPTION OF THE INVENTION
(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 16 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0042]
FIG. 1 is a configuration diagram of a scanning optical microscope. The control circuit 30 of the microscope control unit 17 uses the sample 11a on which the scales at regular intervals shown in FIG. 20 are formed, and the number of scales in the image data acquired by scanning the sample 11a with a laser beam (scale). Based on the measured value), a function for adjusting each drive voltage value corresponding to a plurality of magnifications stored in the drive voltage storage memory 18 of the two-dimensional scanning control unit 15 is provided.
[0043]
In this adjustment method, each drive voltage value corresponding to a plurality of magnifications in the main scanning direction of the laser beam with respect to the sample 11a and each drive voltage value corresponding to a plurality of magnifications in the sub-scanning direction of the laser beam are adjusted. And do. The drive voltage value corresponding to each enlargement magnification is a binary search that repeats narrowing the range including the drive voltage value corresponding to the adjustment target value by half from the magnitude relationship between the number of scales and the adjustment target value. The method is used.
[0044]
The control circuit 30 is provided with a memory 31. In this memory 31, the sample 11 a on which scales of constant intervals are formed according to the overall adjustment procedure of the scanners 6 and 7 of the scanning optical microscope shown in FIG. 2 and the adjustment procedure of the main scanner 6 shown in FIG. Scanning the laser beam, receiving the reflected light from the sample 11a and acquiring the image data of the sample 11a, and each drive voltage corresponding to a plurality of magnifications based on the number of scales in the acquired image data A magnification adjustment program of a scanning optical microscope having a step of adjusting a value is recorded.
[0045]
Next, the magnification adjustment method of the scanning optical microscope will be described according to the overall adjustment procedure of the scanners 6 and 7 of the scanning optical microscope shown in FIG.
[0046]
As the sample 11a for adjusting the scanners 6 and 7, the sample 11a in which scales with a constant interval are formed as shown in FIG. 20 is used.
[0047]
Next, in step # 20, the stage 10 is moved up and down by an elevating mechanism (not shown) and focused (focused) so that the scale of the surface of the sample 11a can be confirmed by an image displayed on the display unit 22.
[0048]
Next, in step # 21, the sample 11a is aligned with the main scanning direction of the scanner 6 so that an image as shown in FIG. 21 is obtained.
[0049]
Next, in step # 22, the main scanner 6 is adjusted. The adjustment of the main scanner 6 is performed according to the adjustment procedure of the main scanner shown in FIG.
[0050]
First, when an operator operates the input unit 23 of the microscope control unit 17 to give an instruction to start a process, the microscope control unit 17 coordinates the two-dimensional scanning control unit 15 and the image control unit 16 on the sample 11a. The laser beam is scanned and the reflected light from the sample 11 a is detected by the photodetector 13, and an analog image signal output from the photodetector 13 is sent to the image control unit 16. In the image control unit 16, the analog image signal from the photodetector 13 is digitized and the image data is stored in the image memory 21, and the image data stored in the image memory 21, that is, a scale as shown in FIG. Are displayed on the display unit 22.
[0051]
Next, in step # 30, the drive voltage value stored in the drive voltage storage memory 18 is initialized. In this initialization, the value of the minimum magnification of the enlargement magnification is set to the maximum value that can be set for the drive voltage value. The drive voltage values for other magnifications are generally inversely proportional to the magnification, and the minimum magnification is 1.0, and therefore is obtained using the following equation (1).
[0052]
Drive voltage value at a certain magnification = drive voltage value at a minimum magnification / magnification magnification (1)
All the drive voltage values obtained by this equation (1) other than the minimum magnification are stored for each magnification in the drive voltage storage memory 18 shown in FIG.
[0053]
Next, in step # 31, each drive voltage value corresponding to each enlargement magnification currently stored in the drive voltage storage memory 18 is read.
[0054]
Next, in step # 32, the upper limit of the range in which the adjustment target value (adjustment target value with respect to the measured value of the scale) is detected is set as the voltage value applied to the scanners 6 and 7. This upper limit value is set as the search upper limit value. This search upper limit value is initialized with the maximum drive voltage value that can be set in the two-dimensional scan drive circuit 19. The control circuit 30 stores this drive voltage value in the drive voltage storage memory 18.
[0055]
Next, in step # 33, the lower limit of the range in which the adjustment target value is detected is set as the drive voltage value to the scanners 6 and 7. This lower limit value is set as a search lower limit value. This search lower limit value is initialized with the minimum drive voltage value that can be set in the two-dimensional scanning drive circuit 19. The control circuit 30 stores this drive voltage value in the drive voltage storage memory 18.
[0056]
Next, in step # 34, the number of scales of the sample 11a is obtained based on the image currently displayed on the display unit 22 (line width measuring step). This line width measurement step is performed as follows according to the procedure shown in FIG.
[0057]
In this line width measurement step, the display unit 22 currently displays an image of the scale of the sample 11a as shown in FIG. 21 and also displays image information of a line parallel to the scanning direction at the center of the image. As shown in FIG. 5, a line profile is displayed with the position of the pixel on the horizontal axis and the luminance value of each pixel on the horizontal axis.
[0058]
In general, when the line width is automatically measured, the intersection between the threshold and the line profile as shown in FIG. 6 is obtained, and the distance between the intersections at which the slope of the line profile increases at this intersection. Measurement is performed by obtaining.
[0059]
In this adjustment of the drive voltage values of the scanners 6 and 7 (in other words, the amplitude adjustment), since the scale interval (edge interval) of the sample 11a to be measured is known (1 μm pitch in this scale), the inclination of the line profile Measurement can be performed according to the number of intersection points where the number of increases.
[0060]
Therefore, prior to the actual line width measurement process, the operator displays an initial setting screen for measurement as shown in FIG. Set the following measurement conditions for each type.
[0061]
The line position displayed on the initial setting screen designates line data to be used in the line width measurement process from the image. Actually, it represents the coordinate value of the axis perpendicular to the scanning direction of the scanners 6 and 7 in the coordinate system of the pixel unit with the upper left coordinate (0, 0) of the image data. For example, if the line position of the main scanner 6 is 256, line data of (0, 256) to (511, 256) is used in the line width measurement process.
[0062]
The line average is the number of line data when an average value of a plurality of line data parallel to the scanning direction of the scanners 6 and 7 is used in order to reduce the influence of noise components generated in the A / D conversion circuit. Is specified. For example, if the line position of the main scanner 6 is 256 and the average number of lines is 10, the line data from (0,251) to (511,251) to the line data from (0,260) to (511,260). The average value of each pixel of a total of 10 line data is used in the line width measurement process.
[0063]
The threshold value is a percentage value where the minimum value when the maximum value and the minimum value of the line data are normalized is 0. For example, if the threshold value is 30%, the threshold value is 30% shown in FIG.
[0064]
The adjustment target range is a value indicating the range with respect to the size of the image parallel to the scanning direction of the scanners 6 and 7 as a percentage. For example, when the adjustment target range is 80%, the adjustment target range shown in FIG. 6 is 80%.
[0065]
After setting the measurement conditions as described above, the line width is measured. This will be described according to the line width measurement procedure shown in FIG.
[0066]
First, in step # 50, the edge detection position is set to the left end of the line data that is the source of the line profile, the edge counter is initialized to 0, and the previous detection position is set to the left end of the line data.
[0067]
Next, in step # 51, an intersection with the threshold value closest to the right side from the current detection position, that is, an edge position is searched.
[0068]
Next, in step # 52, it is determined whether the searched edge is upward, that is, whether the slope of the line profile is increasing.
[0069]
If the detected edge is upward, the process proceeds to step # 53 to determine whether or not the detected position is within the adjustment target range shown in FIG.
[0070]
If the detection position is within the adjustment target range as a result of this determination, the process proceeds to step # 54 to determine whether or not the previous detection position is within the adjustment target range. If the result of this determination is that the previous detected position is within the adjustment target range, the process moves to step # 55 and the edge counter is incremented by one.
[0071]
Next, in step # 57, the next detection start position is set to the edge detection position. The next detection start position is set as the edge detection position.
[0072]
If the detected edge is not upward as a result of the determination in step # 52, the process proceeds to step # 57 to set the next detection start position as the edge detection position.
[0073]
If the detection position is not within the adjustment target range as a result of the determination at step # 53, the process proceeds to step # 58 to determine whether the previous detection position is within the adjustment target range. As a result of this determination, if the previous detection position is within the adjustment target range, the process proceeds to step # 59, the right end of the adjustment target range is calculated by the following equation (2), and the process proceeds to step # 57 to start the next detection. Let the position be the edge detection position.
[0074]

If the result of determination in step # 58 is that the previous detection position is not within the adjustment target range, the process proceeds to step # 57 to set the next detection start position as the edge detection position.
[0075]
If the result of determination in step # 54 is that the previous detection position is not within the adjustment target range, the process proceeds to step # 56, the left end of the adjustment target range is calculated by the following equation (3), and step # 57 is performed. The next detection start position is set as the edge detection position.
[0076]

Next, in step # 60, it is determined whether or not the detection start position is the right end of the line data. If the result of this determination is that the line data is the right end, the process proceeds to step # 61 and the edge counter and the right end fraction are determined. And the leftmost fraction.
[0077]
Next, in step # 61, a measurement value (number of scales) is calculated from the relationship between the adjustment target range and the image size.
[0078]
If the result of determination in step # 60 is that the detection start position is not the right end of the line data, processing returns to step # 51 again.
[0079]
Next, the procedure returns to the main scanner adjustment procedure shown in FIG.
[0080]
In step # 35, the control circuit 30 determines whether or not the measured value (number of scales) has reached an adjustment target value including an allowable error. For example, if the measurement target value of the minimum magnification is 200 and the allowable error is 5% of the entire image, the adjustment target value of each magnification and the range of allowable error have the relationship shown in FIG. For example, at an enlargement ratio of 1.0, the measurement target value including an allowable error is 240.0 ± 12.0.
[0081]
Next, as a result of this determination, if the measured value (number of scales) is an adjustment target value including an allowable error, the process proceeds to step # 36 and the current drive voltage value is stored in the drive voltage storage memory 18. .
[0082]
Next, in step # 37, it is determined whether or not the current enlargement magnification is a settable maximum magnification. If it is the maximum magnification, the operation is terminated. If it is not the maximum magnification, the process proceeds to step # 38, the enlargement magnification is increased by the smallest unit that can change the enlargement magnification, and the process returns to step # 31 again.
[0083]
If the result of determination in step # 35 is that the measured value (number of scales) is not an adjustment target value that includes an allowable error, the process proceeds to step # 39 to determine whether the measured target value that includes the allowable error and the measured value are large or small. The relationship is determined, and if the result of this determination is that the measured value is larger than the measurement target value including an allowable error, the process proceeds to step # 40 to change the search lower limit value of the drive voltage value to the current voltage value. On the other hand, if the measured value is smaller than the measurement target value including an allowable error, the process proceeds to step # 41 to change the search voltage upper limit value of the drive voltage value to the current voltage value.
[0084]
Next, in step # 42, the drive voltage value is stored in the drive voltage storage memory 18 as an intermediate value between the current search upper limit value and the search lower limit value, and the process returns to step # 34 again.
[0085]
Then, the sample 11 a is scanned with laser light, the reflected light from the sample 11 a is detected by the photodetector 13, and an analog image signal output from the photodetector 13 is sent to the image control unit 16. In the image control unit 16, the analog image signal from the photodetector 13 is digitized and the image data is stored in the image memory 21, and the image data stored in the image memory 21, that is, a scale as shown in FIG. Are displayed on the display unit 22.
[0086]
This completes the adjustment of the main scanner 6.
[0087]
Next, the procedure returns to the overall adjustment procedure of the scanner of the scanning optical microscope shown in FIG.
[0088]
First, in step # 23, the stage 10 is moved up and down by an elevating mechanism (not shown) and focused (focused) so that the scale of the surface of the sample 11a can be confirmed by an image displayed on the display unit 22.
[0089]
Next, in step # 24, the sample 11a is adjusted in the sub-scanning direction of the scanner 7 so that an image as shown in FIG. 22 is obtained.
[0090]
Next, in step # 25, the secondary scanner 7 is adjusted. The adjustment of the sub scanner 7 is performed in the same manner as the adjustment procedure of the main scanner. However, the display unit 22 displays an image of the scale of the sample 11a as shown in FIG. 22, and the image information of the line parallel to the scanning direction at the center of the image as shown in FIG. The place where the line profile is displayed is different.
[0091]
As described above, in the first embodiment, the number of scales (measurement of scale) in the image data obtained by scanning the sample 11a with the laser beam is used using the sample 11a on which scales of a constant interval are formed. Value), adjustment of each scanning drive voltage corresponding to a plurality of magnifications stored in the drive voltage storage memory 18 of the two-dimensional scanning control unit 15, that is, a plurality of magnifications with respect to the main scanning direction of the laser beam with respect to the sample 11a. Adjustment of each corresponding scanning drive voltage and adjustment of each scanning drive voltage corresponding to a plurality of magnifications in the sub-scanning direction of the laser light are automatically performed by the control circuit 30 of the microscope control unit 17, so that each scanner 6 When adjusting the drive voltage values of 7 and 7 (adjustment of the amplitude), most of the work that the operator was doing can be automatically performed. The work can be simplified to reduce the burden on the operator, the adjustment result is constant regardless of the operator, and the accuracy of the adjustment can always be easily adjusted with high accuracy regardless of the skill level of the operator. .
[0092]
The first embodiment may be modified as follows.
[0093]
For example, in the automatic adjustment process of the drive voltage values of the main and sub scanners 6 and 7, a binary search has been described as an example of a method for detecting an adjustment target value. In addition, a linear search or a measurement result of two or more line widths has been described. Any method may be used as long as the measurement value matches the adjustment target value, such as a method of estimating the adjustment target value from the method.
[0094]
Also in the line width measurement process, the line pattern on the image is automatically measured, for example, the edge counting method counts the lower edge, or counts the pair of the upper edge and the lower edge. A known method may be used.
[0095]
(2) Next, a second embodiment of the present invention will be described.
[0096]
In the second embodiment of the present invention, steps # 23 and # 24 shown in FIG. 2 performed prior to the adjustment work of the sub scanner 7 in the first embodiment are omitted.
[0097]
In order to omit these steps # 23 and # 24, the sample 11a is formed with respective scales parallel to the main scanning direction and the sub-scanning direction of the laser beam on the surface thereof as shown in FIG. These scales are formed at a pitch of 1 μm, for example.
[0098]
If such a sample 11a is used, in step # 20 shown in FIG. 2 above, the stage 10 is moved up and down by an elevating mechanism (not shown) so that each scale on the surface of the sample 11a can be confirmed by an image displayed on the display unit 22. In the next step # 21, the sample 11a is aligned with the main scanning direction of the scanner 6 so as to obtain an image as shown in FIG. In the adjustment, steps # 23 and # 24 shown in FIG. 2 performed prior to the adjustment work of the sub scanner 7 can be omitted.
[0099]
Since the configuration of the scanning optical microscope and the adjustment procedure of the scanners 6 and 7 are the same as those in the first embodiment, description thereof is omitted.
[0100]
(3) Next, a third embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted. In the third embodiment of the present invention, each of steps # 20 and # 23 shown in FIG. 2 performed by the operator prior to the adjustment work of the main scanner 6 and the sub scanner 7 in the first embodiment is performed. The work is automatically processed.
[0101]
FIG. 11 is a configuration diagram of a scanning optical microscope. An image rotation mechanism 40 is provided on the optical path between the half mirror 4 and the condenser lens 12. The image rotation mechanism 40 has a function of optically rotating an image of the sample 11a obtained by scanning the sample 11a with a laser beam and correcting the image in the main scanning direction or the sub-scanning direction.
[0102]
The image rotation mechanism 40 controls the rotation of the image of the sample 11a by a desired angle by giving an instruction from the control circuit 30 of the microscope control unit 17 to the rotation drive circuit 41. That is, the control circuit 30 has a function of controlling the image rotation optical system 44 via the rotation drive circuit 41 and correcting the angle with respect to a measurement target pattern such as a line pattern.
[0103]
FIG. 12 is a configuration diagram of the image rotation mechanism 40. The image rotation mechanism 40 has a configuration in which a relay lens 42, a correlation lens 43, an image rotation optical system 44, and a correction relay lens 45 are arranged.
[0104]
Therefore, the image rotation mechanism 40 correlates the reflected light from the sample 11 a emitted from the relay lens 42 by the correlation lens 43 and enters the image rotation optical system 44. The image rotation optical system 44 includes a prism that rotates the transmitted light beam image transmitted through the optical system 44 one time in a point-symmetric manner, and can rotate around the optical axis together with the prism. The transmitted light beam image of the image rotation optical system 44 is subjected to focus correction on the projection lens 12 by the correction relay lens 45 and guided to the projection lens 12.
[0105]
Here, the principle of detecting the crossing angle between the scanning line direction and the parallel line, that is, the inclination of the measurement target pattern P, from the width measurement values before and after the image rotation of the measurement target pattern and the image rotation amount will be described with reference to FIG. .
[0106]
As shown in FIG. 13, with respect to the measurement target pattern P that is inclined at a predetermined angle θ (θ is a measurement target) with respect to the vertical scanning line, Width W₁, The width of the edge of the measurement object pattern P ′ after the image rotation at a certain angle T of the measurement object pattern P is defined by the width W₂The inclination angle θ is obtained for the measurement target pattern P before image rotation.
Note that the interval between the edges at both ends that intersect the line orthogonal to the measurement target pattern P is W. Finally, the interval W is output as a measurement value.
[0107]
Width W₁And W₂Is
W₁= W / cos θ (4)
W₂= W / cos (θ + T) (5)
Is represented by
[0108]
These equations (4) and (5) are transformed into an equation of the form of the width W to summarize the equations,
When cos (θ + T) is decomposed by the addition theorem,
W₁× cos θ = W₂× (cos θ × cos T−sin θ × sin T) (6)
It becomes. When cos θ and sin θ are combined into the left equation, W₂, SinT is not 0,
sin θ / cos θ = (W₂× cosT-W₁) / (W₂× sinT) (7)
Therefore
tan θ = (W₂× cosT-W₁) / (W₂× sinT) (8)
It becomes. As apparent from the right side of the above equation (8), the width W₁, W₂From the angle T, the tilt angle θ is obtained for the measurement target pattern P before image rotation.
[0109]
In general, the intersection θa between two arbitrary straight lines can be obtained by −90 ° <θa <+ 90 °. Therefore, if these two straight lines are used as the edge of the measurement target pattern P and the scanning line, tan θ is One tilt angle θ can be obtained by having one solution at −90 ° <θa <+ 90 °.
[0110]
However, the control circuit 30 has a function of executing the above procedure. In step # 21 shown in FIG. 2, the control circuit 30 gives an instruction to the rotation drive circuit 41 to control the scanning direction of the laser beam on the sample 11a to the main scanning direction. In response to this instruction, the image rotation mechanism 40 optically rotates the image of the sample 11a obtained by scanning the laser beam with respect to the sample 11a, and corrects the scanning direction of the laser beam to the main scanning direction.
[0111]
In step # 24 shown in FIG. 2, the control circuit 30 gives an instruction to the rotation drive circuit 41 to control the scanning direction of the laser beam on the sample 11a to the sub scanning direction. In response to this instruction, the image rotation mechanism 40 optically rotates the image of the sample 11a obtained by scanning the sample 11a with the laser beam, and corrects the scanning direction of the laser beam to the sub-scanning direction.
[0112]
Since the configuration of the scanning optical microscope and the adjustment procedure of the scanners 6 and 7 are the same as those in the first embodiment, description thereof is omitted.
[0113]
As described above, according to the third embodiment, the work of correcting the direction of the sample 11a performed by the operator prior to each adjustment work of the main scanner 6 or the sub scanner 7 in the main scanning direction or the sub scanning direction. It is possible to automatically adjust the main scanner or the sub scanner.
[0114]
(4) Next, a fourth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted. In the fourth embodiment of the present invention, steps # 20, # 21 and # 23 shown in FIG. 2 are performed by an operator prior to the adjustment work of the main scanner 6 and the sub scanner 7 in the first embodiment. , # 24 and the respective operations are automatically processed.
[0115]
That is, in the fourth embodiment of the present invention, each scale having, for example, a 1 μm pitch parallel to the main scanning direction and the sub-scanning direction of the laser beam is formed on the surface in the third embodiment. The sample 11a shown in FIG.
[0116]
When this sample 11a is used, in step # 21 shown in FIG. 2, the sample 11a is adjusted in the main scanning direction of the scanner 6 so as to obtain the image shown in FIG. The steps # 23 and # 24 shown in FIG. 2 performed prior to the adjustment work of the sub scanner 7 can be omitted.
[0117]
Since the configuration of the scanning optical microscope and the adjustment procedure of the scanners 6 and 7 are the same as those in the first embodiment, description thereof is omitted.
[0118]
(5) Next, a fifth embodiment of the present invention will be described. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0119]
In the fifth embodiment of the present invention, as shown in FIG. 14, the drive voltage storage memory 18 has a drive voltage value corresponding to each enlargement magnification of all objective lenses (for example, objective 1) as compared to the first embodiment. , Objective 2,..., Objective N) 9, and the control process is performed for all objective lenses 9, thereby adjusting the magnification magnification error between the objective lenses 9.
[0120]
Next, the magnification adjustment method will be described in accordance with the overall adjustment procedure of the scanners 6 and 7 of the scanning optical microscope shown in FIG.
[0121]
First, in step # 70, among the objective lenses 9 attached to the revolver 8, for example, the objective lens (object 1) 9 is set on the optical axis.
[0122]
Next, in step # 20, the stage 10 is moved up and down by an elevating mechanism (not shown) and focused (focused) so that the scale of the surface of the sample 11a can be confirmed by an image displayed on the display unit 22.
[0123]
Next, in step # 21, the sample 11a is aligned with the main scanning direction of the scanner 6 so that an image as shown in FIG. 21 is obtained.
[0124]
Next, in step # 22, the main scanner 6 is adjusted. The adjustment of the main scanner 6 is performed according to the adjustment procedure of the main scanner shown in FIG. The drive voltage storage memory 18 stores each drive voltage value of the main scanner 6 corresponding to each magnification (1.0 to 6.0 times) when the objective lens (object 1) 9 is set by the adjustment procedure of the main scanner. The
[0125]
When the adjustment of the main scanner 6 is completed, in step # 23, the stage 10 is moved up and down by an elevating mechanism (not shown) so that the scale of the surface of the sample 11a can be confirmed in the image displayed on the display unit 22 to focus (focus). Adjust).
[0126]
Next, in step # 21, the sample 11a is aligned with the sub-scanning direction of the sub-scanner 7 so that an image as shown in FIG. 21 is obtained.
[0127]
Next, in step # 22, the secondary scanner 7 is adjusted. The drive voltage storage memory 18 stores each drive voltage value of the sub scanner 7 for each magnification (1.0 to 6.0 times) when the objective lens (object 1) 9 is set by adjusting the sub scanner 7. The
[0128]
When each adjustment of the main scanner 6 and the sub scanner 7 with respect to the objective lens (object 1) 9 is completed as described above, in step # 71, adjustments for all objective lenses (for example, objective 1, objective 2,..., Objective N) 9 are made. If the adjustment for all objective lenses 9 (for example, objective 1, objective 2,..., Objective N) has not been completed, the process returns to step # 70 again. Among the objective lenses 9 attached to the revolver 8, for example, the objective lens (object 2) 9 is set on the optical axis.
[0129]
Similarly to the above, each adjustment of the main scanner 6 and the sub scanner 7 with respect to the objective lens (object 2) 9 is performed, and the objective lens (object 2) 9 is set by adjusting the main scanner 6 and the sub scanner 7. The drive voltage values of the main scanner 6 and the sub scanner 7 corresponding to the respective enlargement magnifications (1.0 to 6.0 times) are stored in the drive voltage storage memory 18, respectively.
[0130]
Similarly, each adjustment of the main scanner 6 and the sub scanner 7 with respect to the objective lens (object 3,..., Objective N) 9 is performed, and the objective lens (object 3,. ..., the drive voltage values of the main scanner 6 and the sub-scanner 7 for each magnification (1.0 to 6.0 times) when the objective N) 9 is set are stored in the drive voltage storage memory 18, respectively.
[0131]
As described above, according to the fifth embodiment, the operator adjusts the drive voltage values of the scanners 6 and 7 for every objective lens (object 1, objective 2,..., Objective N) 9. Therefore, it is possible to easily perform adjustment with high accuracy at all times regardless of the skill level of the operator.
[0132]
In the fifth embodiment, the drive voltage value for each magnification as shown in FIG. 14 is stored in the drive voltage storage memory 18 for all objective lenses (for example, the objective lens) in the first embodiment. 1, objective 2,..., Objective N) 9, and the control process is performed on all objective lenses 9 to perform adjustment including the magnification error between the objective lenses 9. Similarly, in the second to fourth embodiments, the driving voltage storage memory 18 stores the driving voltage values for the respective magnifications as shown in FIG. 14 for all objective lenses (for example, objective 1, objective 2,...). , Each objective N) 9 may have a control process for all objective lenses 9.
[0133]
The present invention is not limited to the first to fifth embodiments described above, and various modifications can be made without departing from the scope of the invention at the stage of implementation.
[0134]
Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. If the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0135]
For example, the first to fifth embodiments may be modified as follows.
[0136]
The scanning optical microscope applied to the first to fifth embodiments includes an AF (autofocus) unit that automatically focuses on the surface of the sample 11a, and the control circuit 30 controls the AF unit. By doing so, the steps # 20 and # 23 shown in FIG. 2 performed by the operator can be automatically performed.
[0137]
In the scanning optical microscope applied to the first to fifth embodiments, one of the two-dimensional scanning means may be a scanning means other than the scanners 6 and 7, for example, a means for moving the objective optical system. In this case, the adjustment process only adjusts for one scanner.
[0138]
【The invention's effect】
As described above in detail, according to the present invention, the magnification of the scanning optical microscope that can reduce the burden on the operator and can perform the adjustment result of the driving voltage with respect to the enlargement magnification constant and with high accuracy regardless of the operator. An adjustment method and apparatus thereof can be provided.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a first embodiment to which a magnification adjustment method for a scanning optical microscope according to the present invention is applied.
FIG. 2 is a diagram showing an overall adjustment procedure of a scanner in a first embodiment of a magnification adjustment method for a scanning optical microscope according to the present invention.
FIG. 3 is a diagram showing an adjustment procedure of the main scanner in the first embodiment of the magnification adjustment method of the scanning optical microscope according to the present invention.
FIG. 4 is a diagram showing a line width measurement procedure in the first embodiment of the magnification adjustment method for a scanning optical microscope according to the present invention.
FIG. 5 is a diagram showing a line profile of a scale image of a sample in the first embodiment of the magnification adjustment method for a scanning optical microscope according to the present invention.
FIG. 6 is a diagram for explaining line width measurement in the first embodiment of the magnification adjustment method for a scanning optical microscope according to the present invention;
FIG. 7 is a diagram showing an initial setting screen for measurement in the first embodiment of the magnification adjustment method for the scanning optical microscope according to the present invention.
FIG. 8 is a diagram showing a relationship between an enlargement magnification adjustment target value and an allowable error range in the first embodiment of the magnification adjustment method for a scanning optical microscope according to the present invention;
FIG. 9 is a view showing an image line profile in sub-scanning of a sample scale in the first embodiment of the magnification adjustment method for a scanning optical microscope according to the present invention.
FIG. 10 is a configuration diagram of another sample used for adjusting the scanner in the second embodiment of the magnification adjustment method of the scanning optical microscope according to the present invention.
FIG. 11 is a configuration diagram showing a third embodiment to which a magnification adjustment method for a scanning optical microscope according to the present invention is applied.
FIG. 12 is a configuration diagram of an image rotation mechanism in a third embodiment to which a magnification adjustment method for a scanning optical microscope according to the present invention is applied.
FIG. 13 shows a scanning line direction and parallel lines based on a measured width and an image rotation amount of a measurement target pattern before and after image rotation in a third embodiment to which the magnification adjustment method of a scanning optical microscope according to the present invention is applied. The figure for demonstrating the principle which detects the crossing angle of.
FIG. 14 is a configuration diagram of a drive voltage storage memory in a fifth embodiment to which a magnification adjustment method for a scanning optical microscope according to the present invention is applied.
FIG. 15 is a diagram showing an overall adjustment procedure of a scanner according to a fifth embodiment to which a magnification adjustment method for a scanning optical microscope according to the present invention is applied;
FIG. 16 is a configuration diagram of a conventional general scanning optical microscope.
FIG. 17 is a configuration diagram of a drive voltage storage memory in a conventional scanning optical microscope.
FIG. 18 is a diagram showing an overall adjustment procedure of a scanner (two-dimensional scanning means) in a conventional scanning optical microscope.
FIG. 19 is a diagram showing an adjustment procedure of a main scanner in a conventional scanning optical microscope.
FIG. 20 is a configuration diagram of a sample used for adjusting a scanner of a scanning optical microscope.
FIG. 21 is a view showing a display image of a sample for adjusting a main scanner in a conventional scanning optical microscope.
FIG. 22 is a diagram showing a display image of a sample for adjusting a sub-scanner in a conventional scanning optical microscope.
[Explanation of symbols]
1: Microscope body
2: Point light source
3: Mirror
4: Half mirror
5: Two-dimensional scanning means
6: Main scanner
7: Secondary scanner
8: Revolver
9: Objective lens
10: Stage
11: Specimen
11a: Sample
12: Condensing lens
13: Photodetector
14: Control processing device
15: Two-dimensional scanning control unit
16: Image control unit
17: Microscope control unit
18: Drive voltage storage memory
19: Two-dimensional scanning drive circuit
20: A / D converter
21: Image memory
22: Display section
23: Input section
24: Output unit
30: Control circuit
31: Memory
40: Image rotation mechanism
41: Rotation drive circuit
42: Relay lens
43: Correlation lens
44: Image rotation optical system
45: Correction relay lens

Claims (12)

A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
Each scanning drive voltage corresponding to a plurality of magnifications based on a measured value of the scale in the image data obtained by scanning the sample with the light using a sample on which a scale with a constant interval is formed It has been made to adjust the,
The binary search method that repeatedly narrows the range including the scan drive voltage corresponding to the adjustment target value every half from the magnitude relationship between the measured value of the scale and the adjustment target value corresponds to the enlargement magnification. Find each scan drive voltage,
A magnification adjustment method for a scanning optical microscope. A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
Each scanning drive voltage corresponding to a plurality of magnifications based on a measured value of the scale in the image data obtained by scanning the sample with the light using a sample on which a scale with a constant interval is formed Which adjusts
The sample is formed with each scale parallel to the main scanning direction and the sub-scanning direction of the light,
Using the sample, the adjustment of each scanning drive voltage corresponding to the plurality of magnifications in the main scanning direction and the adjustment of each scanning driving voltage corresponding to the plurality of magnifications in the sub-scanning direction. Do,
Magnification adjusting method of a scanning optical microscope you wherein a. A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
Each scanning drive voltage corresponding to a plurality of magnifications based on a measured value of the scale in the image data obtained by scanning the sample with the light using a sample on which a scale with a constant interval is formed Which adjusts
The image of the sample acquired by scanning the light with respect to the sample is rotated using an optical image rotating means and corrected in the main scanning direction or the sub-scanning direction.
Thereafter, the adjustment of each scanning drive voltage corresponding to the plurality of magnifications in the main scanning direction and the adjustment of each scanning driving voltage corresponding to the plurality of magnifications in the sub-scanning direction are performed.
Magnification adjusting method of a scanning optical microscope you wherein a. Adjusting each of the scanning drive voltages corresponding to the plurality of magnifications in the main scanning direction of the light and adjusting each of the scanning driving voltages corresponding to the plurality of magnifications in the sub-scanning direction of the light. The magnification adjustment method for a scanning optical microscope according to claim 1. Each of the scan drive voltages is obtained by a binary search method in which the range including the scan drive voltage corresponding to the adjustment target value is narrowed by half from the magnitude relationship between the scale measurement value and the adjustment target value. magnification adjusting method of a scanning optical microscope according to claim 1, wherein the determination. 4. The magnification adjustment method for a scanning optical microscope according to claim 1 , wherein the respective scanning drive voltages are adjusted for each objective lens for obtaining each magnification. A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
A sample on which a regular interval scale is formed;
It means for obtaining the image data by scanning by the light to the sample,
Means for counting the number of scales in the image data;
It means for adjusting each scan driving voltages corresponding to a plurality of the magnification based on the number of the scale,
Means for storing each of the scanning drive voltages after the adjustment in a drive voltage storage memory;
The binary search method that repeatedly narrows the range including the scan drive voltage corresponding to the adjustment target value every half from the magnitude relationship between the measured value of the scale and the adjustment target value corresponds to the enlargement magnification. Means for determining each scanning drive voltage;
A magnification adjustment apparatus for a scanning optical microscope, comprising: The means for adjusting each scanning drive voltage corresponds to the adjustment of each scanning driving voltage corresponding to the plurality of magnifications in the main scanning direction of the light and the plurality of magnifications in the sub-scanning direction of the light. The magnification adjustment apparatus for a scanning optical microscope according to claim 7, wherein the scanning drive voltage is adjusted. A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
A sample on which a regular interval scale is formed;
Means for scanning the sample with the light and acquiring the image data;
Means for counting the number of scales in the image data;
Means for adjusting each scanning drive voltage corresponding to a plurality of magnifications based on the number of scales;
Means for storing each adjusted scan drive voltage in a drive voltage storage memory;
Comprising
The sample is formed with each scale parallel to the main scanning direction and the sub-scanning direction of the light,
The means for adjusting each scanning drive voltage is configured to adjust each scanning drive voltage corresponding to the plurality of magnifications in the main scanning direction and use the sample to adjust the plurality of magnifications in the sub-scanning direction. Adjusting each of the corresponding scanning drive voltages,
A magnification adjustment apparatus for a scanning optical microscope . A scanning optical microscope that scans a specimen with light, receives light from the specimen, acquires image data of the specimen, and adjusts the magnification of the specimen by adjusting the scanning width of the light with respect to the specimen In
A sample on which a regular interval scale is formed;
Means for scanning the sample with the light and acquiring the image data;
Means for counting the number of scales in the image data;
Means for adjusting each scanning drive voltage corresponding to a plurality of magnifications based on the number of scales;
Means for storing each adjusted scan drive voltage in a drive voltage storage memory;
Comprising
The image of the sample obtained by scanning the light with respect to the sample is rotated using an optical image rotating means to correct in the main scanning direction or the sub-scanning direction, and thereafter, each scanning drive The voltage adjusting means adjusts the scan drive voltages corresponding to the plurality of enlargement magnifications in the main scanning direction, and adjusts the scan drive voltages corresponding to the plurality of enlargement magnifications in the sub-scanning direction. I do,
A magnification adjustment apparatus for a scanning optical microscope. The means for adjusting each scanning drive voltage repeatedly narrows the range including the scanning drive voltage corresponding to the adjustment target value by one half from the magnitude relationship between the measured value of the scale and the adjustment target value. 11. The magnification adjustment apparatus for a scanning optical microscope according to claim 9, wherein the scanning drive voltages are obtained by a binary search method. 11. The scanning type according to claim 7, 9 or 10, wherein the means for adjusting each scanning drive voltage adjusts each scanning drive voltage for each objective lens for obtaining each magnification. Magnification adjustment device for optical microscope.

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