JP4824964B2 - Adhesive sheet and electronic component manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesive sheet excellent in antistatic property, which makes frictional electrification which damages an adherend hard to occur and in which the antistatic layer does not peel off because the abrasion resistance of the antistatic layer is improved. <P>SOLUTION: The adhesive sheet has an antistatic layer that contains an organic binder and a monomer having a quaternary ammonium salt group, wherein the organic binder is a (meth)acrylate polymer. Further, the antistatic layer contains an epoxy curing agent. The adhesive sheet has an adhesive layer on one surface and the antistatic layer on the other surface. The use of the adhesive sheet can suppress the influence of frictional electrification caused in the manufacturing process of electronic parts. The adhesive sheet is suitable as an adhesive sheet used for electronic parts, particularly as one used in making electronic parts by the backgrinding or dicing of an aggregate for electronic parts such as a semiconductor wafer and a chip-like part. <P>COPYRIGHT: (C)2007,JPO&amp;INPIT

Description

The present invention relates to an adhesive sheet and an electronic component manufacturing method.

In the manufacture of various electronic components, a unit is used with a dicing blade equipped with abrasive grains such as diamond, fixing an electronic component assembly (commonly called "work") formed by forming a circuit pattern on a semiconductor wafer or circuit board material. A method of dicing for each chip or unit device is known (see Patent Documents 1 to 3).

The electronic component assembly is not only an electronic component assembly formed by simply forming a circuit pattern on a semiconductor wafer or circuit board material, but also, for example, a sealing resin package sealed with an epoxy resin, specifically a ball Grid arrays (BGA), chip size packages (CSP), stack memory modules, system on modules, etc. may be used.

JP 09-007976 A Japanese Patent Application Laid-Open No. 07-026223 JP 2002-69395 A

An adhesive sheet with excellent antistatic properties that does not cause triboelectric charge that causes damage to the assembly of electronic parts that are adherends, and does not peel off the antistatic layer by improving the wear resistance of the antistatic layer. provide.

The present invention is an adhesive sheet having an antistatic layer containing an organic binder , a monomer having a quaternary ammonium salt group, and an epoxy curing agent , and a method for producing an electronic component using the same.

The antistatic layer of the present invention is less likely to cause frictional charging, has excellent wear resistance, and has the effect of being less peeled off.

In this specification, (meth) acrylate means a general term for acrylate and methacrylate. Similarly, a compound containing (meth), such as (meth) acrylic acid, is a generic term for a compound having “meth” and a compound not having it.

The antistatic layer is an organic binder containing a monomer having a quaternary ammonium salt group. If a monomer having a quaternary ammonium salt group is used, triboelectric charging can be reduced.

As the organic binder, for example, an acrylic, urethane, polyester, epoxy, polyvinyl chloride, melanin, polyimide, or silicone polymer polymer is used. In particular, the (meth) acrylic acid ester-based polymer has good compatibility with monomers having a quaternary ammonium salt group, enhances antistatic performance, and further enhances adhesion to the base material layer. Therefore, it is preferable.

Monomers having a quaternary ammonium salt group include, for example, dimethylaminoethyl (meth) acrylate quaternary chloride, diethylaminoethyl (meth) acrylate quaternary chloride, methylethylaminoethyl (meth) acrylate quaternary chloride, P-dimethylaminostyrene quaternary chloride, P-diethylaminostyrene quaternary chloride and the like can be mentioned.

The amount of the monomer having a quaternary ammonium salt group varies depending on the type and can be appropriately determined, but is preferably 0.01 to 30 parts by mass with respect to 100 parts by mass of the organic binder. If the amount is too small, the antistatic effect is not exhibited, and if the amount is too large, the adhesion between the base material layer and the antistatic layer, and between the antistatic layer and the pressure-sensitive adhesive layer may be lowered.

A (meth) acrylic acid ester polymer is a polymer or copolymer of a (meth) acrylic acid ester monomer. A copolymer of a (meth) acrylic acid ester monomer and a functional group-containing monomer can be suitably used.

Examples of (meth) acrylic acid ester monomers include butyl (meth) acrylate, 2-butyl (meth) acrylate, t-butyl (meth) acrylate, pentyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meta ) Acrylate, nonyl (meth) acrylate, decyl (meth) acrylate, lauryl (meth) acrylate, methyl (meth) acrylate, ethyl (meth) acrylate, isopropyl (meth) acrylate, tridecyl (meth) acrylate, myristyl (meth) acrylate Cetyl (meth) acrylate, stearyl (meth) acrylate, cyclohexyl (meth) acrylate, benzyl (meth) acrylate, and the like. One kind or two or more kinds of (meth) acrylic acid ester monomers can be used.

Styrene, vinyl toluene, allyl acetate, (meth) acrylonitrile, vinyl acetate, vinyl propionate, vinyl butyrate, vinyl versatate, vinyl ethyl ether, vinyl propyl ether, vinyl isobutyl ether and the like within the range not impairing the purpose of the present invention ( You may use together with a meth) acrylic acid ester monomer.

Examples of the functional group-containing monomer include monomers having a hydroxyl group, a carboxyl group, an epoxy group, an amide group, an amino group, a methylol group, a sulfonic acid group, a sulfamic acid group, a (phosphite) group, and the like.

Examples of the monomer having a hydroxyl group include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, and the like.

Examples of the monomer having a carboxyl group include (meth) acrylic acid, crotonic acid, maleic acid, maleic anhydride, itaconic acid, fumaric acid, acrylamide N-glycolic acid, and cinnamic acid.

Examples of the monomer having an epoxy group include allyl glycidyl ether and (meth) acrylic acid glycidyl ether.

Examples of the monomer having an amide group include (meth) acrylamide. Examples of the monomer having an amino group include N, N-dimethylaminoethyl (meth) acrylate. Examples of the monomer having a methylol group include N-methylolacrylamide.
One or more functional group-containing monomers can be used.

Use of an epoxy curing agent for the antistatic layer can prevent the antistatic layer from peeling off due to wear. Examples of the epoxy curing agent include neopentyl glycol diglycidyl ether, polyethylene glycol diglycidyl ether, bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, phthalic acid diglycidyl ester, dimer acid diglycidyl ether, and triglycidyl isocyanurate. , Diglycerol triglycidyl ether, sorbitol tetraglycidyl ether, N, N, N ′, N′-tetraglycidyl m-xylenediamine, 1′3-bis (N, N-diglycidylaminomethyl) cyclohexane, N, N, There is N ′, N′-tetraglycidyldiaminodiphenylmethane.

If the amount of the epoxy curing agent is small, the effect of improving the wear resistance of the antistatic layer is not exhibited. If the amount is too large, the antistatic performance is lowered. 1-30 mass parts is preferable.

The antistatic layer can be suitably used for an adhesive sheet. The antistatic layer can be formed on one side or both sides of the pressure-sensitive adhesive sheet. The method of forming the antistatic layer is, for example, a method of directly applying on the base material layer with a coater such as a gravure, comma, bar, knife, or roll, or a convex plate, a concave plate, a flat plate, a flexo, an offset, or Although the method etc. which print with printing machines, such as a screen, are mentioned, it does not specifically limit.

The thickness of the formed antistatic layer is preferably 0.1 to 20 μm after drying. If it is thin, the antistatic effect will not be exhibited, and even if it is applied excessively, no further effect can be expected, and there are cases where it is not possible to cope with applications requiring transparency of the pressure-sensitive adhesive sheet.

For the base material layer of the pressure-sensitive adhesive sheet, a known synthetic resin or the like can be appropriately selected and used according to the application. Examples thereof include polyvinyl chloride, polyethylene, polypropylene, polyester, ethylene vinyl alcohol, polyurethane, polyamide, polyimide, and PET. The thickness and width of the base material layer can be appropriately selected according to the application. The substrate layer may be a single layer or multiple layers.

In order to improve the adhesion between the base material layer, the pressure-sensitive adhesive layer, and the antistatic layer, the base material layer may be subjected to treatment such as corona discharge or anchor coating.

For the adhesive used in the adhesive layer, for example, a rubber adhesive, an acrylic adhesive, a urethane adhesive, a silicone adhesive, or the like can be used.

A known additive such as a tackifier, a curing agent, a plasticizer, a photopolymerizable compound, a photoinitiator, a foaming agent, a polymerization inhibitor, an anti-aging agent, a filler and the like may be appropriately added to the adhesive. Good.

A method for applying the pressure-sensitive adhesive on the base material layer or the antistatic layer is not particularly limited, and for example, a coater method, a screen method, a gravure method, a mesh method, or the like can be applied. The thickness of the applied pressure-sensitive adhesive layer is not particularly limited, and is about 1 to 100 μm in thickness after drying.

The pressure-sensitive adhesive sheet of the present invention is suitably used for attaching an electronic component assembly called a workpiece in a dicing step and a back grinding step, which are electronic component manufacturing steps.

The pressure-sensitive adhesive sheet of Example 1 was produced according to the following formulation.
<Antistatic layer>
100 parts by weight of a copolymer of methyl methacrylate and n-butyl methacrylate as an organic binder, 10 parts by weight of dimethylaminoethyl methacrylate quaternary chloride as a monomer having a quaternary ammonium salt group, and N, A solution in which 20 parts by mass of N, N ′, N′-tetraglycidyl m-xylenediamine was mixed was prepared.

<Manufacture of sheets>
The pressure-sensitive adhesive sheet was a polyethylene sheet having a thickness of 100 μm as a base material layer, an antistatic layer having a thickness of 1 μm was provided on one surface thereof, and a pressure-sensitive adhesive layer having a thickness of 20 μm was applied to the other surface of the base material layer.

The pressure-sensitive adhesive layer uses 100 parts by weight of acrylic pressure-sensitive adhesive (96% by weight of 2-ethylhexyl acrylate and 4% by weight of 2-hydroxyethyl acrylate) and 3 parts by weight of toluene diisocyanate as a curing agent. did.

In Reference Example 1 , in the formulation of Example 1, the amount of monomer having a quaternary ammonium salt group was 0.005 parts by mass.
In Reference Example 2 , the compounding amount of the epoxy curing agent of Example 1 was set to 0.05 parts by mass.
In Example 2 , the (meth) acrylate polymer of Example 1 was used as a polyester resin binder (Polyester WR-961 manufactured by Nippon Synthetic Chemical Co., Ltd.).
In Reference Example 3 , the epoxy curing agent of Example 1 was not blended.

In Comparative Example 1, the monomer having the quaternary ammonium salt group of Example 1 was not blended.
Comparative Example 2 does not have the antistatic layer of Example 1.

<Evaluation method>
Saturation voltage and half-life: evaluated by JIS L1094 method.
Measurement environment: temperature 23 ° C, humidity 50%
Measuring apparatus: Static Honest Meter H-0110 manufactured by Sicid Electrostatics
Applied voltage: 10 kV

Abrasion resistance: The antistatic layer of the adhesive sheet was rubbed with a metal plate. “Excellent” when the antistatic layer did not scrape off, but slightly scraped off, but good antistatic performance after abrasion resistance test (saturation voltage less than 0.5 kV, half-life) Less than 5 s) is “good”, scraping partially occurs, and the antistatic performance after the wear resistance test is reduced (saturation voltage is 0.5 kV or more, half-life is 5 s or more) The case was set to “OK”.

<Evaluation results>
In Example 1, the saturation voltage was less than 0.1 kV, the half-life was less than 1 s, the antistatic performance was good, and the wear resistance was also good.
The pressure-sensitive adhesive sheet of Reference Example 1 had a saturation voltage of 0.3 kV and a half-life of 3.2 s, which was good in antistatic performance as compared with Example 1, but also had good wear resistance.
The pressure-sensitive adhesive sheet of Reference Example 2 had a satisfactory saturation voltage of less than 0.1 kV and a half-life of less than 1 s. In addition, with respect to the wear resistance, although the antistatic layer was slightly scraped off, the antistatic performance after the wear resistance test was good (the saturation voltage was 0.2 kV, the half-life was 2.3 s).
The pressure-sensitive adhesive sheet of Example 2 had good saturation resistance and 0.2 kV and a half-life of 1.7 s, although the antistatic performance was lower than that of Example 1, and was good in wear resistance.
Reference Example 3 showed good characteristics in saturation voltage and half-life, but the abrasion resistance was slightly inferior to the other examples.

Since Comparative Example 1 and Comparative Example 2 did not have antistatic properties, they were not worthy of adoption.

The pressure-sensitive adhesive sheet can suppress the influence of frictional charging that occurs in the electronic component manufacturing process. It is suitable for pressure-sensitive adhesive sheets used when electronic components, particularly semiconductor component assemblies such as semiconductor wafers and chip components, are back-ground or diced into electronic components.

Claims (5)

100 parts by weight of an organic binder, 0.01 to 30 parts by weight of a monomer having a quaternary ammonium salt group, and 0.1, N, N, N ′, N′-tetraglycidyl m-xylenediamine which is an epoxy curing agent An adhesive sheet for electronic parts having an antistatic layer containing ~ 30 parts by mass . The pressure-sensitive adhesive sheet according to claim 1, wherein the organic binder is a (meth) acrylic acid ester-based polymer. The pressure-sensitive adhesive sheet according to claim 1 or 2 , further comprising a sheet-like base material layer, a pressure-sensitive adhesive layer on one side, and an antistatic layer on the other side. The pressure-sensitive adhesive according to any one of claims 1 to 3 , comprising a sheet-like base material layer, an antistatic layer on one or both surfaces of the base material layer, and an adhesive layer on the antistatic layer. Sheet. The manufacturing method of the electronic component using the adhesive sheet as described in any one of Claims 1 thru | or 4 .