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JP4832063B2 - Electrolysis cell and electrolysis method using the same - Google Patents
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JP4832063B2 - Electrolysis cell and electrolysis method using the same - Google Patents

Electrolysis cell and electrolysis method using the same Download PDF

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JP4832063B2
JP4832063B2 JP2005346849A JP2005346849A JP4832063B2 JP 4832063 B2 JP4832063 B2 JP 4832063B2 JP 2005346849 A JP2005346849 A JP 2005346849A JP 2005346849 A JP2005346849 A JP 2005346849A JP 4832063 B2 JP4832063 B2 JP 4832063B2
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channel
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JP2007154217A (en
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前川  弘志
満 貞本
裕明 大塚
哲也 渡辺
健太郎 鈴木
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Mitsui Chemicals Inc
Yokogawa Electric Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

本発明は、電解液の電気分解を生じさせることが可能な電気分解セル、及びそれを用いた電気分解方法に関する。   The present invention relates to an electrolysis cell capable of causing electrolysis of an electrolytic solution and an electrolysis method using the same.

電気分解反応を行なう際、一対の電極間距離を近づけることにより、電気抵抗が低減され無駄なジュール熱の発生を抑制できるので消費電力が軽減されると考えられる。ところが、電気分解により気体が発生する反応においては、一対の電極間を近づけることにより発生する気体が電極に付着し、電流が流れにくくなり電力消費の軽減効果が減じられたり、電圧変動が大きくなったり、生成ガス量が減少するという問題があった。また、電極間を近づけることにより、陽極と陰極で発生した気体が混合しやすくなり、好ましくない。混合防止の目的で隔壁を設けると、電気抵抗が上昇するのでできれば無いほうがよい。   When performing the electrolysis reaction, it is considered that by reducing the distance between the pair of electrodes, electric resistance is reduced and generation of useless Joule heat can be suppressed, so that power consumption is reduced. However, in the reaction in which gas is generated by electrolysis, the gas generated by bringing a pair of electrodes closer to each other adheres to the electrode, making it difficult for current to flow, reducing the power consumption reduction effect, and increasing voltage fluctuation. There was a problem that the amount of generated gas decreased. In addition, by bringing the electrodes close to each other, the gas generated at the anode and the cathode is easily mixed, which is not preferable. If partition walls are provided for the purpose of preventing mixing, the electrical resistance increases, so it is better not to do so.

例えば、水の電気分解により発生する水素は、エネルギー有効利用の観点から注目されている。つまり、電力の豊富な地域や時間において、水を電気分解し水素として貯蔵し、電力が必要な地域や時間に供給することが考えられている。さらに詳しく説明すれば、大都市から離れた大河流域の大型ダムで製造された豊富な電力で、水の電気分解で水素を製造し、パイプラインにより工場や大都市に供給したり、化学物質の原料として消費したり、水素自動車や燃料電池の燃料としたりすることが可能である。また、電力需要の少ない深夜に余剰電力を用いて水の電気分解を行い水素として貯蔵し、電力需要の高まる時間に貯蔵した水素を燃料電池やガスタービンなどの燃料として電力を製造し供給することも可能である。   For example, hydrogen generated by electrolysis of water has attracted attention from the viewpoint of effective energy utilization. In other words, it is considered that water is electrolyzed and stored as hydrogen in regions and times where power is abundant and supplied to regions and times where power is required. In more detail, abundant electricity produced by large dams in a large river basin far from a large city produces hydrogen by electrolysis of water and supplies it to factories and large cities through pipelines. It can be consumed as a raw material, or used as a fuel for hydrogen automobiles or fuel cells. In addition, electrolysis of water is performed using surplus power at midnight when power demand is low and stored as hydrogen, and the stored hydrogen is used as fuel for fuel cells, gas turbines, etc. during the time when power demand increases. Is also possible.

一方、水の電気分解により発生する酸素は、多くの産業上の利用や、医療用途などがある。   On the other hand, oxygen generated by electrolysis of water has many industrial uses and medical uses.

水の電気分解装置に関しては、数多くの報告がある(例えば、特許文献1〜3参照)。特に、特許文献3には、陽極室と陰極室を備え、固体電解液膜を隔膜として用いる、酸素・水素発生装置の水電解装置に用いる気液分離装置が報告されている。しかしながら、気液分離装置は電解セルの外部に設けられ、電極間距離を短くした場合の電極間に滞留する気体に関しては、何ら効果を発揮することはできない。   There are many reports on water electrolysis devices (see, for example, Patent Documents 1 to 3). In particular, Patent Document 3 reports a gas-liquid separation device used for a water electrolysis device of an oxygen / hydrogen generator, which includes an anode chamber and a cathode chamber and uses a solid electrolyte membrane as a diaphragm. However, the gas-liquid separation device is provided outside the electrolysis cell, and no effect can be exhibited with respect to the gas staying between the electrodes when the distance between the electrodes is shortened.

ところで、マイクロ流路内で気液分離する方法として、親水性表面を持つ深い液体チャンネルに沿って、疎水性表面を持つ浅い気体チャンネルを用いる方法が、特許文献4に報告されている。
特開平9−176885号公報 特開平8−333694号公報 特開平8−144078号公報 特開2005−169386号公報
By the way, as a method for gas-liquid separation in a micro flow path, a method using a shallow gas channel having a hydrophobic surface along a deep liquid channel having a hydrophilic surface is reported in Patent Document 4.
Japanese Patent Laid-Open No. 9-176885 JP-A-8-333694 JP-A-8-144078 JP 2005-169386 A

上記特許文献4に開示されているマイクロ流路内で気液分離する方法は、マイクロ流路内で気液分離する方法として好適である。しかしながら、この構造を液体に混入した気体の分離や、気液抽出への応用は示されているが、電気分解反応への応用の記述はなく、もちろん、電気分解により生じた気体が付着した電極から当該気体を除去することに関しては一切述べられていないのが現状である。   The method for gas-liquid separation in the microchannel disclosed in Patent Document 4 is suitable as a method for gas-liquid separation in the microchannel. However, this structure has been shown to be applied to separation of gas mixed in liquid and gas-liquid extraction, but there is no description of application to electrolysis reaction. Of course, the electrode to which gas generated by electrolysis is attached The present situation is that nothing is said about removing the gas from the gas.

電気分解反応において、電気分解により生じた気体が電極に付着したままであると、電極による電気分解能が低下するといった問題があり、改善が望まれている。   In the electrolysis reaction, if the gas generated by electrolysis remains attached to the electrode, there is a problem that the electric resolution by the electrode is lowered, and improvement is desired.

従って、本発明は、前記従来における諸問題を解決し、以下の目的を達成することを課題とする。即ち、本発明の目的は、電気分解により生じた気体を電極表面から速やかに取り除くことが可能な電気分解セル、及びそれを用いた電気分解方法を提供することである。   Accordingly, an object of the present invention is to solve the conventional problems and achieve the following object. That is, an object of the present invention is to provide an electrolysis cell capable of quickly removing gas generated by electrolysis from the electrode surface, and an electrolysis method using the same.

上記課題は、以下の手段により解決される。即ち、
本発明の電気分解セルは、
電解液が流液する液体流路と、
前記液体流路の幅方向端部に接触して配設された気体流路であって、前記液体流路との境界面の近傍において前記液体流路で流液する電解液と気液界面を形成するための気体流路と、
前記液体流路及び/又は気体流路の内壁の少なくとも一部を構成するように配設され、前記電解液の電気分解を起こすための一対の電極であって、少なくとも一部が前記電解液と接触し、且つ前記電解液との接触領域全域が前記液体流路及び前記気体流路の境界から100μm以内に位置する一対の電極と、
を具備することを特徴としている。
The above problem is solved by the following means. That is,
The electrolysis cell of the present invention comprises:
A liquid flow path through which the electrolyte flows,
A gas flow path disposed in contact with a width direction end of the liquid flow path, wherein an electrolyte and a gas-liquid interface flowing in the liquid flow path in the vicinity of a boundary surface with the liquid flow path A gas flow path for forming;
A pair of electrodes arranged to constitute at least a part of an inner wall of the liquid flow path and / or the gas flow path, and for causing electrolysis of the electrolytic solution, at least a part of which is the electrolyte and A pair of electrodes that are in contact with each other and the entire contact area with the electrolytic solution is located within 100 μm from the boundary surface of the liquid channel and the gas channel;
It is characterized by comprising.

本発明の電気分解セルでは、電解液の電気分解により生じた気体が電極に付着しても、電解液との接触領域全域が前記液体流路及び前記気体流路の境界から上記範囲内に位置することで、電極に付着した気体が気液界面と接触するため、電気分解により生じた気体を電極表面から速やかに取り除くことを可能となる。   In the electrolysis cell of the present invention, even if the gas generated by the electrolysis of the electrolytic solution adheres to the electrode, the entire contact area with the electrolytic solution is located within the above range from the boundary of the liquid channel and the gas channel. By doing so, since the gas adhering to the electrode comes into contact with the gas-liquid interface, the gas generated by electrolysis can be quickly removed from the electrode surface.

本発明の電気分解セルにおいては、前記気体流路及び前記液体流路の断面が矩形で構成され、前記気体流路が前記液体流路よりも厚みが薄い場合、前記気体流路内壁における前記電解液に対する接触角が90°以上である、ことがよい。一方、前記気体流路及び前記液体流路の断面が矩形で構成され、前記気体流路が前記液体流路よりも厚みが厚い場合、前記液体流路内壁における前記電解液に対する接触角が90°以下である、ことがよい。 In the electrolysis cell of the present invention, the cross section of the gas passage and the liquid passage is constituted by a rectangular, if the gas flow path has a thin thickness than the liquid flow path, wherein in the gas passage inner wall The contact angle with respect to the electrolytic solution is preferably 90 ° or more. Meanwhile, the cross-section of the gas passage and the liquid passage is constituted by a rectangular, if the gas flow path has a thickness thicker than the liquid flow path, the contact angle with respect to the electrolytic solution in the liquid flow passage inner wall 90 It is good that it is below.

本発明の電気分解セルにおいて、前記一対の電極の幅は、100μm以下であることがよい。また、前記電気分解の反応が、水が酸素と水素に分解される反応であることがよい。   In the electrolysis cell of the present invention, the pair of electrodes may have a width of 100 μm or less. The electrolysis reaction may be a reaction in which water is decomposed into oxygen and hydrogen.

一方、本発明の電気分解方法は、上記本発明の電気分解セルを用い、前記一対の電極により前記電解液を電気分解する、ことを特徴としている。   On the other hand, the electrolysis method of the present invention is characterized in that the electrolytic solution of the present invention is used to electrolyze the electrolytic solution with the pair of electrodes.

本発明によれば、電気分解により生じた気体を電極表面から速やかに取り除くことが可能な電気分解セル、及びそれを用いた電気分解方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the electrolysis cell which can remove rapidly the gas produced by electrolysis from the electrode surface, and the electrolysis method using the same can be provided.

以下、本発明について図面を参照しつつ詳細に説明する。なお、実質的に同一の機能を有する部材には、全図面通して同じ符合を付与し、重複する説明は省略する場合がある。また、図面における平面図では、わかり易いように、流路、電極などの内部構造も実線で描いている。   Hereinafter, the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is provided to the member which has the substantially same function through all the drawings, and the overlapping description may be abbreviate | omitted. Further, in the plan view in the drawing, the internal structures such as the flow paths and the electrodes are drawn with solid lines for easy understanding.

図1は、実施形態に係る電気分解セルを示す平面図である。図2は、実施形態に係る電気分解セルを示す断面図である。図3は、実施形態に係る電気分解セルにおける電極位置を示す部分拡大断面図である。図4は、他の実施形態に係る電気分解セルを示す断面図である。なお、図2〜4は、図1のA−A断面図に相当する断面図である。   FIG. 1 is a plan view showing an electrolysis cell according to the embodiment. FIG. 2 is a cross-sectional view showing the electrolysis cell according to the embodiment. FIG. 3 is a partially enlarged cross-sectional view showing electrode positions in the electrolysis cell according to the embodiment. FIG. 4 is a cross-sectional view showing an electrolysis cell according to another embodiment. 2 to 4 are cross-sectional views corresponding to the AA cross-sectional view of FIG.

実施形態に係る電気分解セルは、図1〜2に示すように、電解液18が流液する液体流路10を有している。当該液体流路10の一端には、電解液18を導入する導入口10Aが連通しており、他端には電解液18を排出する排出口10Bが連通している。   As shown in FIGS. 1 and 2, the electrolysis cell according to the embodiment includes a liquid flow path 10 through which an electrolytic solution 18 flows. An inlet 10A for introducing the electrolytic solution 18 communicates with one end of the liquid channel 10, and a discharge port 10B for discharging the electrolytic solution 18 communicates with the other end.

液体流路10の幅方向両端には、当該流路を挟んで任意の領域で接触し当該流路に流液する電解液18と気液界面を形成させるための2つの気体流路12が配設されている。気体流路12は、電解液18の電気分解により生じた気体14を排出するためのものである。この気体流路12は、図2に示すように、液体流路10よりも深さを浅く構成している。また、この気体流路12は、図4に示すように、液体流路10よりも深さを深く構成してもよい。ここで、流路深さとは流路の厚みを示す。そして、気体流路12には、気体排出用流路12Aを介して排出口12Bが連通している。   At both ends in the width direction of the liquid flow path 10, two gas flow paths 12 are formed to form an air-liquid interface with an electrolyte solution 18 that is in contact with an arbitrary region across the flow path and flows into the flow path. It is installed. The gas flow path 12 is for discharging the gas 14 generated by electrolysis of the electrolytic solution 18. As shown in FIG. 2, the gas flow path 12 is configured to be shallower than the liquid flow path 10. Further, as shown in FIG. 4, the gas channel 12 may be configured to be deeper than the liquid channel 10. Here, the channel depth indicates the thickness of the channel. The gas passage 12 communicates with a discharge port 12B through a gas discharge passage 12A.

ここで、電解液18と気体14との気液界面は、必ずしも液体流路10と気体流路12との境界20と同一面で形成されるわけではないが、おおよそ、境界20近傍で当該境界20が形成する面に対して直交方向に沿った距離で当該境界面から気体流路12側15μm以内(好ましくは10μ以内)の位置に形成される。   Here, the gas-liquid interface between the electrolyte 18 and the gas 14 is not necessarily formed on the same plane as the boundary 20 between the liquid flow path 10 and the gas flow path 12, but the boundary is approximately in the vicinity of the boundary 20. It is formed at a position within 15 μm (preferably within 10 μm) from the boundary surface at a distance along the direction orthogonal to the surface formed by 20.

この気液界面の形成には、界面張力差を利用する。つまり、図2に示すように、気体流路12が液体流路10よりも深さが浅い場合、気体流路12内壁が電解液18に対する接触角が90°以上であると、電解液18が気体流路12に入り込まない状況を作り出し、気液界面を形成することができる。   The formation of this gas-liquid interface utilizes the difference in interfacial tension. That is, as shown in FIG. 2, when the gas channel 12 is shallower than the liquid channel 10, if the contact angle of the inner wall of the gas channel 12 with respect to the electrolyte 18 is 90 ° or more, the electrolyte 18 A situation that does not enter the gas flow path 12 can be created, and a gas-liquid interface can be formed.

また、図4に示すように、気体流路12が液体流路10よりも深さが深い場合、液体流路10内壁が電解液18に対する接触角が90°以下であると、電解液18が気体流路12に入り込まない状況を作り出し、気液界面を形成することができる。   As shown in FIG. 4, when the gas flow path 12 is deeper than the liquid flow path 10, if the contact angle of the inner wall of the liquid flow path 10 with respect to the electrolyte 18 is 90 ° or less, the electrolyte 18 A situation that does not enter the gas flow path 12 can be created, and a gas-liquid interface can be formed.

さらに詳しく説明すれば、電解液18の圧力が、電解液18が気体流路12に侵入するのに必要な圧力を上回らなければ、電解液18は気体流路12に侵入することが出来ず、液体流路10及び気体流路12の境界20近傍に気液界面を形成することが可能となる。   More specifically, if the pressure of the electrolytic solution 18 does not exceed the pressure necessary for the electrolytic solution 18 to enter the gas channel 12, the electrolytic solution 18 cannot enter the gas channel 12, A gas-liquid interface can be formed in the vicinity of the boundary 20 between the liquid channel 10 and the gas channel 12.

ここで、図2に示すように、気体流路12が液体流路10よりも深さが浅い場合、電解液18が気体流路12に侵入するのに必要な圧力は、次のヤング−ラプラスの式により求められる。
式1:△P=2γ[sin(θ−90°)/r]
(式中、△Pは気体流路12に侵入するのに必要な圧力(Pa)、γは電解液18の界面張力(N/m)、θは気体流路12内壁の電解液18に対する接触角(°)、rは気体流路12の深さ(m)
Here, as shown in FIG. 2, when the gas channel 12 is shallower than the liquid channel 10, the pressure required for the electrolyte 18 to enter the gas channel 12 is the following Young-Laplace. It is calculated by the following formula.
Formula 1: ΔP = 2γ [sin (θ−90 °) / r]
(In the formula, ΔP is a pressure (Pa) necessary to enter the gas flow path 12, γ is an interfacial tension (N / m) of the electrolytic solution 18, and θ is a contact of the inner wall of the gas flow path 12 with the electrolytic solution 18). Angle (°), r is the depth of the gas flow path 12 (m)

また、同様に、図4に示すように、気体流路12が液体流路10よりも深さが深い場合、電解液18が気体流路12に侵入するのに必要な圧力は、次のヤング−ラプラスの式により求められる。
式2:△P=2γcos(θ)/r
(式中、△Pは気体流路12に侵入するのに必要な圧力(Pa)、γは電解液18の界面張力(N/m)、θは液体流路10内壁の電解液18に対する接触角(°)、rは気体流路12の深さ(m)
Similarly, as shown in FIG. 4, when the gas channel 12 is deeper than the liquid channel 10, the pressure required for the electrolyte solution 18 to enter the gas channel 12 is -It is determined by the Laplace formula.
Formula 2: ΔP = 2γcos (θ) / r
(Where ΔP is the pressure (Pa) required to enter the gas flow path 12, γ is the interfacial tension (N / m) of the electrolytic solution 18, and θ is the contact of the inner wall of the liquid flow channel 10 with the electrolytic solution 18) Angle (°), r is the depth of the gas flow path 12 (m)

つまり、電解液18と気体の圧力差が、ヤング−ラプラスの式から求められる圧力を上回らない条件が、電解液18が気体流路12に侵入しない条件ということになる。   That is, the condition that the pressure difference between the electrolyte 18 and the gas does not exceed the pressure obtained from the Young-Laplace equation is the condition that the electrolyte 18 does not enter the gas flow path 12.

また、図2に示すように、気体流路12が液体流路10よりも深さが浅い場合、(式1)より明らかなように、気体流路12内壁の電解液18に対する接触角が90°未満では、電解液18が気体流路12に侵入する圧力は負になり、電解液18が気体流路12に侵入することになるので、気体流路12内壁の電解液18に対する接触角が90°以上であることがよいことがわかる。   As shown in FIG. 2, when the gas flow path 12 is shallower than the liquid flow path 10, the contact angle of the inner wall of the gas flow path 12 with respect to the electrolyte 18 is 90 as is clear from (Equation 1). If it is less than 0 °, the pressure at which the electrolytic solution 18 enters the gas flow path 12 becomes negative and the electrolytic solution 18 enters the gas flow path 12, so that the contact angle of the inner wall of the gas flow path 12 with respect to the electrolytic solution 18 is It can be seen that the angle is preferably 90 ° or more.

反対に、図4に示すように、気体流路12が液体流路10よりも深さが深い場合、(式2)から明らかなように、液体流路10内壁の電解液18に対する接触角が90°を超えると、電解液18が気体流路12に侵入する圧力は負になり、電解液18が気体流路12に侵入することになるので、液体流路10内壁の電解液18に対する接触角が90°以下であることがよいことがわかる。   On the contrary, as shown in FIG. 4, when the gas flow path 12 is deeper than the liquid flow path 10, the contact angle of the inner wall of the liquid flow path 10 with respect to the electrolytic solution 18 is apparent from (Equation 2). If the angle exceeds 90 °, the pressure at which the electrolytic solution 18 enters the gas flow path 12 becomes negative, and the electrolytic solution 18 enters the gas flow path 12, so that the inner wall of the liquid flow path 10 contacts the electrolytic solution 18. It can be seen that the angle is preferably 90 ° or less.

なお、電解液18と気体14の圧力差は、ブルドン式圧力計、沈鐘式圧力計、リング式圧力計、分銅式圧力計、ダイヤフラムと歪みゲージが一体化した半導体圧力センサなどにより実測して求めてもよいし、流体の圧力損失は、層流の場合、次のハーゲン−ポアズイユの式からも計算できる。
式:△P=2μvlL/S
(上記式中、ΔPは流路長さLでの電解液の圧力損失(Pa)、μは電解液の粘度(Pa・sec)、vは電解液の流速(m/sec)、lは流路の周長(m)、Lは流路の長さ(m)、Sは流路の断面積(m)を表す)
The pressure difference between the electrolytic solution 18 and the gas 14 is obtained by actual measurement using a Bourdon pressure gauge, a bell pressure gauge, a ring pressure gauge, a weight pressure gauge, a semiconductor pressure sensor in which a diaphragm and a strain gauge are integrated, or the like. Alternatively, the pressure loss of the fluid can be calculated from the following Hagen-Poiseuille equation in the case of laminar flow.
Formula: ΔP = 2 μvl 2 L / S 2
(In the above formula, ΔP is the pressure loss (Pa) of the electrolytic solution at the flow path length L, μ is the viscosity of the electrolytic solution (Pa · sec), v is the flow rate of the electrolytic solution (m / sec), and l is the flow rate. The circumference of the path (m), L is the length of the flow path (m), and S is the cross-sectional area (m 2 ) of the flow path)

また、図2に示すように、気体流路12が液体流路10よりも深さが浅い場合、気体流路12内壁の電解液18に対する接触角は90°以上が好ましいが、110°以上がさらに好ましく、120°以上がとりわけ好ましい。この接触角の上限は、幾何的に可能な180°である。このような接触角を満たすためには、気体流路12を構成する部材(基板)として電解液18に対する接触角が90°以上の素材を用いても良く、素材の接触角が90°未満であっても表面処理することにより、接触角を90°以上にすることができれば使用することができる。   As shown in FIG. 2, when the gas channel 12 is shallower than the liquid channel 10, the contact angle of the inner wall of the gas channel 12 with respect to the electrolyte 18 is preferably 90 ° or more, but 110 ° or more. More preferably, 120 ° or more is particularly preferable. The upper limit of this contact angle is 180 ° which is geometrically possible. In order to satisfy such a contact angle, a material having a contact angle with respect to the electrolytic solution 18 of 90 ° or more may be used as a member (substrate) constituting the gas flow path 12, and the contact angle of the material is less than 90 °. Even if it exists, it can be used if the contact angle can be 90 ° or more by surface treatment.

ここで言う表面処理方法についても特に限定されないが、例えば、市販のテフロン(登録商標)やシリコーンを用いた撥水スプレーによる処理、テトラフロオロメタン、テトラフロオロエタンなどのフッ素系ガスを用いたプラズマ処理、オクタデシルシランなどを用いて化学修飾する処理などが挙げられ、気体流路12を形成する基板の素材や電解液18の性質に応じて適宜選択することができる。また、電解液18に対する接触角が90°以上である気体流路12の部材の表面に、微細な凹凸をつけることで接触角を高める工夫をしても良い。   The surface treatment method mentioned here is not particularly limited, but for example, treatment with a water-repellent spray using commercially available Teflon (registered trademark) or silicone, or fluorine-based gas such as tetrafluoromethane or tetrafluoroethane was used. Examples thereof include plasma treatment, treatment with chemical modification using octadecylsilane, and the like, which can be appropriately selected according to the material of the substrate forming the gas flow path 12 and the properties of the electrolytic solution 18. Further, the contact angle with respect to the electrolytic solution 18 may be devised to increase the contact angle by providing fine irregularities on the surface of the member of the gas flow path 12 having a contact angle of 90 ° or more.

具体的に、例えば、電解液18が水溶液であれば、基板の素材としてテフロン(登録商標)なら表面処理することなく、電解液との接触角90°以上が得られる。また、例えば、基板の素材としてアクリル、ポリカーボネート、ポリイミド等のプラスチップには、テトラフロオロメタンなどフッ素系ガスを用いるプラズマ処理を適用することができる。また、基板の素材としてガラス、石英、シリコンなどには、オクタデシルシランなどを用いる化学修飾法を適用することができる。また、基板の素材としてプラチナ、ステンレススチール、ニッケルなどの金属には、テフロン(登録商標)コート剤による処理を適用することができる。   Specifically, for example, if the electrolytic solution 18 is an aqueous solution, a contact angle of 90 ° or more with the electrolytic solution can be obtained without surface treatment if the substrate material is Teflon (registered trademark). Further, for example, plasma treatment using a fluorine-based gas such as tetrafluoromethane can be applied to a plus chip such as acrylic, polycarbonate, or polyimide as a substrate material. A chemical modification method using octadecylsilane or the like can be applied to glass, quartz, silicon, or the like as a substrate material. Further, treatment with a Teflon (registered trademark) coating agent can be applied to a metal such as platinum, stainless steel, or nickel as a substrate material.

一方、図4に示すように、気体流路12が液体流路10よりも深さが深い場合、液体流路10内壁の電解液18に対する接触角は90°以下が好ましいが、70°以下がさらに好ましく、30°以下がとりわけ好ましい。なお、この接触角の下限は、幾何的に可能な0°である。このような接触角を満たすためには、液体流路10を構成する部材(基板)として電解液18に対する接触角が90°以下の素材を用いても良く、素材の接触角が90°を越えていても表面処理することにより、接触角を90°以下にすることができれば使用することができる。   On the other hand, as shown in FIG. 4, when the gas channel 12 is deeper than the liquid channel 10, the contact angle of the inner wall of the liquid channel 10 with respect to the electrolyte 18 is preferably 90 ° or less, but 70 ° or less. Further preferred is 30 ° or less. The lower limit of the contact angle is 0 ° which is geometrically possible. In order to satisfy such a contact angle, a material having a contact angle with respect to the electrolytic solution 18 of 90 ° or less may be used as a member (substrate) constituting the liquid flow path 10, and the contact angle of the material exceeds 90 °. Even if it can be used, it can be used if the contact angle can be reduced to 90 ° or less by surface treatment.

ここで言う表面処理方法についても特に限定されないが、液体流路10を構成する部材(基板)の素材や電解液の性質に応じて適宜選択することができる。具体的には、例えば、電解液18が水溶液であれば、基板の素材としてガラスや酸化チタンなら表面処理することなく、電解液18に対する接触角90°以下が得られ、また、基板の素材としてアクリルやポリカーボネートなどのプラスチックは、酸素ガスを用いたプラズマ処理や、UVオゾン処理、などで親水化することが可能である。また、電解液18に対する接触角が90°以下である気体流路12の部材の表面に、表面に微細な凹凸をつけて接触角を下げる工夫をしても良い。
The surface treatment method referred to here is not particularly limited, but can be appropriately selected according to the material of the member (substrate) constituting the liquid flow path 10 and the properties of the electrolytic solution. Specifically, for example, if the electrolytic solution 18 is an aqueous solution, a contact angle of 90 ° or less with respect to the electrolytic solution 18 can be obtained without surface treatment if the substrate material is glass or titanium oxide. Plastics such as acrylic and polycarbonate can be hydrophilized by plasma treatment using oxygen gas, UV ozone treatment, or the like. Further, the surface of the member of the gas flow path 12 having a contact angle with respect to the electrolytic solution 18 of 90 ° or less may be devised so as to reduce the contact angle by providing fine irregularities on the surface.

ここで、電解液18に対する接触角は、静止した状態の液滴と基板の接触角を測定する液滴法で測定した。測定には、協和界面科学株式会社製「接触角計CA−X型」を用いて、液滴と基板との断面の接点2ヶ所と液滴の頂点をコンピューター画面に入力して求める「3点クリック法」で行なった。また、液滴は、協和界面科学株式会社製「オートディスペンサAD−21型」を用いて、1.8μLの液滴体積になるよう設定した。   Here, the contact angle with respect to the electrolytic solution 18 was measured by a droplet method for measuring a contact angle between a stationary droplet and a substrate. For the measurement, use a “contact angle meter CA-X type” manufactured by Kyowa Interface Science Co., Ltd., and enter the two points of contact between the droplet and the substrate and the vertex of the droplet on the computer screen. The “click method” was used. Moreover, the droplet was set so that it might become a droplet volume of 1.8 microliters using "auto dispenser AD-21 type" by Kyowa Interface Science Co., Ltd.

また、図4に示すように、気体流路12が液体流路10よりも深さが深い場合、液体流路10の深さは50μm以下が好ましく、30μm以下が好ましく、15μm以下がとりわけ好ましい。なお、加工精度の観点から、下限は0.1μmである。気体流路12の深さが50μm以下であると、発生した気体14は液体流路10に存在し難くなり、容易に気体流路12に取り除かれる。反対に、液体流路の深さが50μmを超えると、発生した気体14が液体流路10に入り込みやすく、気体流路12に取り除くのが難しくなることがある。   As shown in FIG. 4, when the gas flow path 12 is deeper than the liquid flow path 10, the depth of the liquid flow path 10 is preferably 50 μm or less, preferably 30 μm or less, and particularly preferably 15 μm or less. From the viewpoint of processing accuracy, the lower limit is 0.1 μm. When the depth of the gas flow path 12 is 50 μm or less, the generated gas 14 is difficult to exist in the liquid flow path 10 and is easily removed by the gas flow path 12. On the other hand, when the depth of the liquid flow path exceeds 50 μm, the generated gas 14 tends to enter the liquid flow path 10 and may be difficult to remove to the gas flow path 12.

ここで、液体流路10の流路長さは特に限定されず、反応液濃度、反応液流量、電流密度、電流効率などを考慮し適宜設計してよい。   Here, the channel length of the liquid channel 10 is not particularly limited, and may be appropriately designed in consideration of the reaction solution concentration, the reaction solution flow rate, the current density, the current efficiency, and the like.

また、液体流路10に電解液18を導入するための導入口10Aは、図示しないが、外部より流路内に流体を導入するための供給手段と接続されていてもよい。また、流路内に小型のポンプなどの供給手段を内蔵させてもよい。外部より液体流路10に電解液18を導入するための供給手段は、特に限定されるものではないが、例えば、種々のポンプや、圧送する方法、重力差を利用する方法、高圧に圧縮された容器から供給する方法、などを用いることができる。ポンプとして具体例を示すとすれば、1)シリンダー内の流体をピストンで押し込めるシリンジポンプ、2)ピストンポンプ、ダイヤフラムポンプといったピストンやプランジャーなどの往復運動を利用して圧力を高める往復式ポンプ、3)ギアポンプやペリスタポンプといった歯車やローラーを回転し、流体を空隙に閉じ込めて押し動かして輸送する回転式ポンプ、4)ボリュートポンプや、デフューザポンプといった、流体を回転羽根で回転しその遠心力によって圧力を高める遠心式ポンプや、その他一般的に知られているポンプなどが挙げられる。   Further, the inlet 10A for introducing the electrolytic solution 18 into the liquid flow path 10 may be connected to a supply means for introducing fluid into the flow path from the outside, although not shown. A supply means such as a small pump may be built in the flow path. The supply means for introducing the electrolytic solution 18 from the outside into the liquid flow path 10 is not particularly limited. For example, various pumps, a method of pumping, a method of using a difference in gravity, and a high pressure compressed For example, a method of supplying from a separate container can be used. Specific examples of pumps include 1) a syringe pump that pushes fluid in a cylinder with a piston, and 2) a reciprocating pump that increases pressure using a reciprocating motion of a piston or plunger, such as a piston pump or a diaphragm pump, 3) Rotating pumps that rotate gears and rollers such as gear pumps and peristaltic pumps, confine the fluid in a gap and push it to transport, 4) Rotary fluids such as volute pumps and diffuser pumps, which rotate by rotating blades and pressurize by centrifugal force Centrifugal pumps that increase the pressure, and other generally known pumps.

また、液体流路10の水力相当直径は、1μm以上2000μm以下が好ましく、10μm以上1000μm以下がさらに好ましい。液体流路10の水力相当直径が10μm以下では、圧力損失が甚だ大きくなると共に、処理量も著しく少なくなることがあるため好ましくなく、2000μm以上では温度制御が困難になるため副生成物が増加することがあるので好ましくない。ここで言う水力相当直径とは、(流路断面積×4÷濡れ辺長)で表すことができる。   Further, the hydraulic equivalent diameter of the liquid channel 10 is preferably 1 μm or more and 2000 μm or less, and more preferably 10 μm or more and 1000 μm or less. If the hydraulic equivalent diameter of the liquid flow path 10 is 10 μm or less, the pressure loss becomes extremely large and the processing amount may be remarkably reduced, which is not preferable, and if it is 2000 μm or more, temperature control becomes difficult and by-products increase. This is not preferable. The hydraulic equivalent diameter mentioned here can be expressed by (channel cross-sectional area × 4 ÷ wetting side length).

なお、電解液18の前処理方法や後処理方法は、特に限定されないが、液体流路10と同様の水力相当直径の流路を使って、行なってもよい。   The pre-treatment method and post-treatment method of the electrolytic solution 18 are not particularly limited, but may be performed using a flow path having a hydraulic equivalent diameter similar to the liquid flow path 10.

このような構成の液体流路10及び/又は気体流路12の内壁の少なくとも一部を構成するように、一対の電極16が配設されている。一対の電極16の露出部16Aが液体流路10及び/又は気体流路12の内壁の少なくとも一部を構成している。また、図示しないが、セルには一対の電極16のそれぞれと電気的に接続し、外部電源と接続される端子も配設されている。   A pair of electrodes 16 is disposed so as to constitute at least a part of the inner wall of the liquid channel 10 and / or the gas channel 12 having such a configuration. The exposed portions 16 </ b> A of the pair of electrodes 16 constitute at least a part of the inner walls of the liquid channel 10 and / or the gas channel 12. Although not shown, the cell is also provided with a terminal that is electrically connected to each of the pair of electrodes 16 and connected to an external power source.

そして、一対の電極16は、少なくとも一部が電解液18と接触し、且つ電解液18の接触領域全域が液体流路10及び気体流路12の境界から100μm以内(好ましくは50μm以内)に位置するように配設される。これにより、電気分解により発生した気体14を、速やかに電極16から気体流路12に分離することが可能となる。   The pair of electrodes 16 are at least partially in contact with the electrolytic solution 18, and the entire contact region of the electrolytic solution 18 is located within 100 μm (preferably within 50 μm) from the boundary between the liquid channel 10 and the gas channel 12. Is arranged. Thereby, the gas 14 generated by electrolysis can be quickly separated from the electrode 16 into the gas flow path 12.

ここで、気体14を分離するメカニズム、即ち電極16で発生し付着した気体14を電極16から気体流路12へ分離するメカニズムは、気泡と気泡が近づいていくと、ある時点で一つの気泡に合一が起こる現象は良く知られているが、この現象を応用したものである。つまり、電極16で発生した気泡のそばに、電解液18と気体14との気液界面があれば、気泡は気液界面に接したときに合一することになり、電気分解セル外部に抜き取ることが可能となる。このような考えで電気分解セルを設計し実験したところ、電極16で発生した気体14は発生した直後は小さい気泡となり電極16に付着しているが、発生した電極16近傍に気液界面があり発生した気泡が接触すれば、気体14(気泡)は気体流路12側に引き込まれることが明らかになった。   Here, the mechanism for separating the gas 14, that is, the mechanism for separating the gas 14 generated and adhered to the electrode 16 from the electrode 16 to the gas flow path 12, is as follows. The phenomenon in which unification occurs is well known, but is an application of this phenomenon. That is, if there is a gas-liquid interface between the electrolytic solution 18 and the gas 14 near the bubble generated at the electrode 16, the bubble will be united when it comes into contact with the gas-liquid interface, and is extracted outside the electrolysis cell. It becomes possible. As a result of designing and experimenting with an electrolysis cell based on such an idea, the gas 14 generated at the electrode 16 becomes a small bubble immediately after the generation and adheres to the electrode 16, but there is a gas-liquid interface near the generated electrode 16. It has been clarified that the gas 14 (bubbles) is drawn to the gas flow path 12 side when the generated bubbles come into contact.

詳しく検討した結果、電極16は、電解液18と接触し、且つ電解液18との接触領域全域が液体流路10及び気体流路12の境界20から100μm以内(好ましくは50μm以内)に設置すると、電気分解により生じた気体14を電極16表面から速やかに取り除くことが可能となることが明らかとなった。   As a result of detailed examination, the electrode 16 is in contact with the electrolytic solution 18, and the entire contact area with the electrolytic solution 18 is set within 100 μm (preferably within 50 μm) from the boundary 20 between the liquid channel 10 and the gas channel 12. It was revealed that the gas 14 generated by electrolysis can be quickly removed from the surface of the electrode 16.

ここで、「電解液18との接触領域全域が液体流路10及び気体流路12の境界20から所定範囲以内に位置する」とは、液体流路10の電解液流液方向と直交に電気分解セルを切断したとき、その断面において、液体流路10及び気体流路12の境界20のうち電極16に最も近い部位から、電極16の電解液接触領域のうち液体流路10及び気体流路12の境界20に最も遠い部位までの距離が、所定範囲内にあることを意味する。   Here, “the entire contact area with the electrolytic solution 18 is located within a predetermined range from the boundary 20 between the liquid flow path 10 and the gas flow path 12” means that the electric current is perpendicular to the direction of the electrolytic flow of the liquid flow path 10. When the decomposition cell is cut, the liquid flow path 10 and the gas flow path in the electrolyte solution contact region of the electrode 16 from the portion closest to the electrode 16 in the boundary 20 of the liquid flow path 10 and the gas flow path 12 in the cross section. This means that the distance to the part farthest from the 12 boundaries 20 is within a predetermined range.

また、電極16は、少なくとも電解液に接触していなければ電気分解を起こすことはできないのは自明であるが、その電解液接触領域が液体流路10及び気体流路12の境界20から上記範囲を超えて離れていると、電気分解により発生した気体が気液界面に接触し難くなり、気泡が大きくなり気液界面に接触するまでに時間が掛かったり、気体流路12に吸収されず液体流路を流れたりするようになる。このため、上記範囲内に電解液接触領域全域が存在することが必要である。   Further, it is obvious that the electrode 16 cannot be electrolyzed unless it is in contact with at least the electrolytic solution, but the electrolytic solution contact region is within the above range from the boundary 20 between the liquid flow channel 10 and the gas flow channel 12. If the distance is greater than the distance, the gas generated by the electrolysis is difficult to contact the gas-liquid interface, and it takes time for the bubbles to increase and contact the gas-liquid interface. It will flow through the flow path. For this reason, it is necessary that the entire electrolyte contact region exists within the above range.

一方、電極16は、電解液18の電気分解反応を生じさせなければならないため、電解液18と接触しなければならないが、気体流路12側のみに電極16が位置する場合、電極16の少なくとも一部が液体流路10及び気体流路12の境界20から15μm以内(好ましくは10μm以内)に位置することが好ましく、より好ましくは10μm以内に位置することである。これは、おおよそ、気液界面が境界20近傍で当該境界20が形成する面に対して直交方向に沿った距離で当該境界面から気体流路12側15μm以内に形成されるためである。この範囲内に電極16の少なくとも1部を位置させることで、気液界面が電極の一部にかかり電解液との接触領域を持つこととなる。   On the other hand, since the electrode 16 must cause an electrolytic reaction of the electrolytic solution 18, it must be in contact with the electrolytic solution 18, but when the electrode 16 is located only on the gas flow path 12 side, at least the electrode 16 It is preferable that a part is located within 15 μm (preferably within 10 μm) from the boundary 20 between the liquid channel 10 and the gas channel 12, and more preferably within 10 μm. This is because the gas-liquid interface is formed within 15 μm from the boundary surface at a distance along the direction orthogonal to the surface formed by the boundary 20 near the boundary 20. By positioning at least a part of the electrode 16 within this range, the gas-liquid interface covers a part of the electrode and has a contact area with the electrolytic solution.

ここで、気体流路12側のみに電極16が位置する場合における「電極16の少なくとも一部が液体流路10及び気体流路12の境界20から所定範囲内に位置する」とは、液体流路10の電解液流液方向と直交に電気分解セルを切断したとき、その断面において液体流路10及び気体流路12の境界20のうち電極16に最も近い部位から、電極16のうち液体流路10及び気体流路12の境界20に最も近い部位までの距離が、所定範囲内にあることを意味する。   Here, when the electrode 16 is located only on the gas flow path 12 side, “at least a part of the electrode 16 is located within a predetermined range from the boundary 20 between the liquid flow path 10 and the gas flow path 12” When the electrolysis cell is cut perpendicular to the direction of the electrolyte flowing in the passage 10, the liquid flow in the electrode 16 starts from the portion of the boundary 20 between the liquid flow path 10 and the gas flow path 12 closest to the electrode 16 in the cross section. This means that the distance to the part closest to the boundary 20 between the path 10 and the gas flow path 12 is within a predetermined range.

以上をまとめると、図3に示すように、電極16は、気体流路12側のみに位置する場合、電極16の少なくとも1部が電解液18と接触する必要があるため、電極16の少なくとも一部が液体流路10及び気体流路12の境界20から15μm以内位置することが必要であり、点線で描いた電極16−1のように15μmを超えて位置すると電解液18と接触しなくなる。   In summary, as shown in FIG. 3, when the electrode 16 is located only on the gas flow path 12 side, at least a part of the electrode 16 needs to be in contact with the electrolytic solution 18. The part needs to be located within 15 μm from the boundary 20 between the liquid flow path 10 and the gas flow path 12, and if the position exceeds 15 μm as in the electrode 16-1 drawn with a dotted line, it does not come into contact with the electrolytic solution 18.

一方、電極16は、液体流路10側のみに位置する場合、電解液18との接触領域全域が液体流路10及び気体流路12の境界20から100μm以内(好ましくは50μm以内)に位置(点線で描いた電極16−2、電極16−3の位置)することが必要であり、点線で描いた電極16−4のように100μmを超えて位置すると付着した気体14が速やかに気体流路12へ分離されなくなる。   On the other hand, when the electrode 16 is located only on the liquid flow path 10 side, the entire contact area with the electrolytic solution 18 is located within 100 μm (preferably within 50 μm) from the boundary 20 between the liquid flow path 10 and the gas flow path 12 ( The positions of the electrodes 16-2 and 16-3 drawn by dotted lines) are necessary, and when the position is more than 100 μm as in the electrode 16-4 drawn by dotted lines, the attached gas 14 quickly becomes a gas flow path. 12 will not be separated.

なお、電極16が、液体流路10及び気体流路12の境界20をまたがるように配置される場合、上記各条件を満たす必要がある。   In addition, when the electrode 16 is disposed so as to straddle the boundary 20 between the liquid flow path 10 and the gas flow path 12, it is necessary to satisfy each of the above conditions.

よって、本実施形態では、一対の電極16は、少なくとも一部が電解液18と接触し、且つ電解液18の接触領域全域が液体流路10及び気体流路12の境界から100μm以内(好ましくは50μm以内)に位置するように配設されることが必要である。   Therefore, in the present embodiment, at least a part of the pair of electrodes 16 is in contact with the electrolytic solution 18, and the entire contact region of the electrolytic solution 18 is within 100 μm from the boundary between the liquid channel 10 and the gas channel 12 (preferably It is necessary to be disposed so as to be located within 50 μm).

電極16の幅は、100μm以下が好ましく、50μm以下がさらに好ましく、10μm以下がとりわけ好ましい。なお、微細加工の限界の点から電極16幅の下限は0.1μmである。電極16の幅とは、液体流路10の電解液流液方向と直交に電気分解セルを切断したとき、その断面において電極16と電解液18が接する面の最大距離を言う。具体的には、例えば、板状の電極16端面が電解液接触領域に相当する場合、その板状体の厚みを示し、円筒形或いは円柱形のワイヤーなら直径を指す。電極16の幅は、電極16に付着する気泡の直径とよく相関しており、電極16表面以外に付着する面がなければ、電極幅の約2〜3倍の直径の気泡が付着することが、電極16表面の観察から明らかになった。また、電極16幅が狭いほど、高い電流密度で電気分解しても気泡を抜き取ることができた。これは、気泡が小さい時点で、気体流路12に取り込まれるためと考えられる。   The width of the electrode 16 is preferably 100 μm or less, more preferably 50 μm or less, and particularly preferably 10 μm or less. Note that the lower limit of the width of the electrode 16 is 0.1 μm from the viewpoint of the limit of fine processing. The width of the electrode 16 refers to the maximum distance of the surface where the electrode 16 and the electrolytic solution 18 are in contact with each other when the electrolysis cell is cut perpendicularly to the direction of flowing of the electrolytic solution in the liquid flow path 10. Specifically, for example, when the end face of the plate-like electrode 16 corresponds to the electrolyte contact region, the thickness of the plate-like body is indicated, and the diameter is indicated for a cylindrical or columnar wire. The width of the electrode 16 correlates well with the diameter of the bubbles adhering to the electrode 16, and if there is no adhering surface other than the surface of the electrode 16, bubbles having a diameter of about 2 to 3 times the electrode width may adhere. It became clear from observation of the surface of the electrode 16. Further, as the width of the electrode 16 was narrower, bubbles could be extracted even when electrolysis was performed at a high current density. This is probably because the bubbles are taken into the gas flow path 12 when the bubbles are small.

電極16の形状は、特に限定されない。ワイヤー状でも、板状でも、薄膜状でもよい。本実施形態では、断面L状の板状体を適用している。また、電極16の設置形態は、特に限定されず、本実施形態では、流路の内壁の一部を構成するように設置しているが、例えば、一対の電極16の間に絶縁性スペーサーを挟んで設置してもよい。   The shape of the electrode 16 is not particularly limited. It may be wire, plate, or thin film. In the present embodiment, a plate-like body having an L-shaped cross section is applied. In addition, the installation form of the electrode 16 is not particularly limited. In this embodiment, the electrode 16 is installed so as to constitute a part of the inner wall of the flow path. For example, an insulating spacer is provided between the pair of electrodes 16. You may install between.

電極16の作製方法は特に限定されない。好ましい方法として、ワイヤー状の導電体を液体流路10と気体流路12の境界20上或いはその近傍に沿うように設置したり、板状(或いは薄膜状)の導電体を液体流路10と気体流路12の境界20上或いはその近傍に配置したりしてもよい。なお、薄膜状の導電体を電極16として用いる場合は、電極形状にくり貫いた薄板のマスクを被せたり、フォトレジストを使ったりしてから、金属を蒸着やスパッタリング技術を用いて形成する方法が挙げられる。本実施形態では、断面L状の板状体からなる導電体をその一端面(電極基板24から露出する電極16の露出部16A)が流路内壁の一部を構成するように、液体流路10と気体流路12の境界20近傍に沿うよう配置している。   The method for manufacturing the electrode 16 is not particularly limited. As a preferred method, a wire-shaped conductor is installed on or near the boundary 20 between the liquid flow path 10 and the gas flow path 12, or a plate-shaped (or thin film-shaped) conductor is connected to the liquid flow path 10. You may arrange | position on the boundary 20 of the gas flow path 12, or its vicinity. In the case of using a thin-film conductor as the electrode 16, there is a method of forming a metal by vapor deposition or sputtering technique after covering with a thin plate mask cut into an electrode shape or using a photoresist. Can be mentioned. In the present embodiment, the liquid flow path is formed so that one end face (exposed portion 16A of the electrode 16 exposed from the electrode substrate 24) of the conductor made of a plate-like body having an L-shaped cross section constitutes a part of the inner wall of the flow path. 10 and the gas flow path 12 are arranged along the vicinity of the boundary 20.

電極16の素材は、通電すれば特に限定されない。例えば、パラジウム、プラチナ、ロジウム、イリジウム、ニッケル、金、タングステン、ニオブ、カドニウム、マンガン、タリウム、鉛、水銀などの金属や合金、グラッシーカーボン、分光分析級黒鉛、熱分解黒鉛、炭素クロスなどの炭素素材やそれらの粉末をキシレンワックス、エポキシ樹脂、シリコーンゴム、ヌジョールなどに分散させたものなどを使用することができる。また、上記金属を蒸着やスパッタを用いて付着させる際には、基板との付着性を向上させるために、下地としてクロムやチタンなどの薄膜を付着させてもよい。また、炭素は、金属電極の表面に炭素粉末を接着性のある素材に分散させたペーストを塗布しても良く、同様に金属電極の表面に炭化水素化合物を塗布し、減圧下で熱分解させて熱分解黒鉛としてもよい。   The material of the electrode 16 is not particularly limited as long as it is energized. For example, palladium, platinum, rhodium, iridium, nickel, gold, tungsten, niobium, cadmium, manganese, thallium, lead, mercury and other metals and alloys, glassy carbon, spectroscopic grade graphite, pyrolytic graphite, carbon cloth, etc. Materials and powders thereof dispersed in xylene wax, epoxy resin, silicone rubber, Nujol, etc. can be used. In addition, when the metal is attached by vapor deposition or sputtering, a thin film such as chromium or titanium may be attached as a base in order to improve adhesion to the substrate. Carbon may be coated with a paste in which carbon powder is dispersed in an adhesive material on the surface of the metal electrode. Similarly, a hydrocarbon compound is coated on the surface of the metal electrode and thermally decomposed under reduced pressure. Pyrolytic graphite may be used.

電極16の表面には、金属めっきなどの手法を施し、電極表面を広げる工夫をしても良く、特に触媒活性の高い白金黒やパラジウム黒などを付着させてもよい。   A technique such as metal plating may be applied to the surface of the electrode 16 so as to widen the electrode surface, and platinum black or palladium black having particularly high catalytic activity may be attached.

電解液18は、電極により電気化学反応を生じさせる媒体である。電気化学反応は、気体14が発生する反応であれば特に限定されない。例えば、アルコール類の還元反応により水素を発生する反応や、カルボン酸類の酸化反応により二酸化炭素を発生する反応、水の電気分解により水素と酸素を発生させる反応や、塩化物イオンを含む水溶液の電気分解により水素と塩素を発生させる反応などが挙げられる。それらの中でも、水は表面張力が高いので、本発明の構造を用いれば比較的容易に気液界面を作り出すことができるので、水溶液を用いた反応は好ましく、水の電気分解により水素と酸素を発生させる反応がさらに好ましい。   The electrolytic solution 18 is a medium that causes an electrochemical reaction with electrodes. The electrochemical reaction is not particularly limited as long as the reaction generates gas 14. For example, a reaction that generates hydrogen by a reduction reaction of alcohols, a reaction that generates carbon dioxide by an oxidation reaction of carboxylic acids, a reaction that generates hydrogen and oxygen by electrolysis of water, or the electricity of an aqueous solution containing chloride ions Examples include reactions that generate hydrogen and chlorine by decomposition. Among them, since water has a high surface tension, a gas-liquid interface can be created relatively easily by using the structure of the present invention. Therefore, a reaction using an aqueous solution is preferable, and hydrogen and oxygen are generated by electrolysis of water. The reaction to be generated is more preferable.

また、電気化学反応としては、支持電解質を用いた電気化学反応でもよい。その種類や使用量は、反応溶液に溶解し導電性を持たせることができれば特に限定されない。支持電解質は溶媒中でイオンとして働くので、イオン化しやすいアニオンとカチオンで組み合わされた塩や酸やアルカリである。カチオンとしては、水素イオンや、Li、Na、K、Rb、Csなどのアルカリ金属イオンや、アンモニウムイオン、テトラメチルアンモニウムイオン、テトラエチルアンモニウムイオン、テトラ(n−プロピル)アンモニウムイオン、テトラ(i−プロピル)アンモニウムイオン、テトラ(n−ブチル)アンモニウムイオン、テトラ(n−ヘキシル)アンモニウムイオンなどの第4級アルキルアンモニウムなどが挙げられる。アニオンとしては、Cl、Br、Iなどのハロゲンイオンや、水酸基イオン、酢酸イオン、硫酸イオン、硝酸イオン、過塩素酸イオン、BF 、PF 、ビス(トリフルオロメタンスルホニル)イミド、ビス(1,1,2,2,3,3,3−ヘプタフルオロ−1−プロパンスルホニル)イミド、ビス(1,1,2,2,3,3,4,4,4−ノナフルオロ−1−ブタンスルホニル)イミド、各種スルホン酸イオンなどが挙げられる。 Further, the electrochemical reaction may be an electrochemical reaction using a supporting electrolyte. The kind and amount of use are not particularly limited as long as they can be dissolved in the reaction solution and have conductivity. Since the supporting electrolyte acts as an ion in the solvent, it is a salt, acid, or alkali combined with an anion and a cation that are easily ionized. Examples of the cation include hydrogen ions, alkali metal ions such as Li + , Na + , K + , Rb + , Cs + , ammonium ions, tetramethylammonium ions, tetraethylammonium ions, tetra (n-propyl) ammonium ions, And quaternary alkyl ammonium such as tetra (i-propyl) ammonium ion, tetra (n-butyl) ammonium ion, tetra (n-hexyl) ammonium ion, and the like. Examples of anions include halogen ions such as Cl , Br and I , hydroxyl ions, acetate ions, sulfate ions, nitrate ions, perchlorate ions, BF 4 , PF 6 , bis (trifluoromethanesulfonyl) imide. Bis (1,1,2,2,3,3,3-heptafluoro-1-propanesulfonyl) imide, bis (1,1,2,2,3,3,4,4,4-nonafluoro-1 -Butanesulfonyl) imide, various sulfonate ions, and the like.

本実施形態に係る電気分解セルは、例えば、各流路となる溝が形成された流路基板22と、電極16が表面に配設されたり、埋め込まれた電極基板24とで構成している。   The electrolysis cell according to the present embodiment includes, for example, a flow path substrate 22 in which a groove serving as each flow path is formed, and an electrode substrate 24 on which the electrode 16 is disposed or embedded. .

流路基板22は、例えば、エッチングや機械加工などによって流路となる溝などを形成することで作製することができる。   The flow path substrate 22 can be manufactured, for example, by forming a groove that becomes a flow path by etching or machining.

電極基板24は、例えば、基板に溝を形成し当該溝にワイヤや板状の導電体を埋め込むことで作製したり、基板に蒸着やスパッタにより薄膜状の導電体を堆積させて作製することができる。本実施形態では、電極基板24は、開口26Aが設けられた開口基板26と、当該開口基板26の開口26Aに電極16を介して嵌め込まれるように設けられた凸部28Aを有する凸状基板28と、を、開口基板26の開口26A内周部に断面L字状の電極16の端面(電極基板24から露出する電極16の露出部16A)と凸部28A上面が露出するように、基板間に断面L字状の電極16を介して積層している。   The electrode substrate 24 can be manufactured, for example, by forming a groove in the substrate and embedding a wire or a plate-like conductor in the groove, or by depositing a thin-film conductor on the substrate by vapor deposition or sputtering. it can. In the present embodiment, the electrode substrate 24 has a convex substrate 28 having an opening substrate 26 provided with an opening 26A and a convex portion 28A provided so as to be fitted into the opening 26A of the opening substrate 26 via the electrode 16. Between the substrate so that the end surface of the electrode 16 having an L-shaped cross section (the exposed portion 16A of the electrode 16 exposed from the electrode substrate 24) and the upper surface of the convex portion 28A are exposed on the inner peripheral portion of the opening 26A of the opening substrate 26. Are stacked via an electrode 16 having an L-shaped cross section.

そして、流路に相当する溝、露出した電極側を対向させるように、熱圧着、熱融着など加熱し圧力を掛ける方法や、ねじを使って締め付ける方法や、接着剤による接着により、流路基板22と電極基板24とを貼り合わせることで、電気分解セルを得ることができる。   Then, by applying heat and pressure such as thermocompression bonding and heat fusion so that the groove corresponding to the flow path and the exposed electrode side face each other, tightening with screws, or bonding with an adhesive, An electrolysis cell can be obtained by bonding the substrate 22 and the electrode substrate 24 together.

なお、流路基板22及び電極基板24の素材は、少なくとも表面が絶縁性であることが好ましい。電気分解セルに電極16を組み込むため、電極16間の絶縁性を確保するためである。一方、シリコンや金属など導電性材料であっても表面を絶縁化処理したものであれば使用することができる。   In addition, it is preferable that the material of the flow path substrate 22 and the electrode substrate 24 has an insulating surface at least. This is because the electrode 16 is incorporated in the electrolysis cell, so that insulation between the electrodes 16 is ensured. On the other hand, even a conductive material such as silicon or metal can be used as long as the surface is insulated.

以上説明した本実施形態に係る電気分解セルでは、電解液18の電気分解により生じた気体14が電極16に付着しても、電解液18の接触領域全域が液体流路10及び気体流路12の境界20から上記範囲内に位置しているので、電極16に付着した気体14が気液界面と接触するため、電気分解により生じた気体14を電極16表面から速やかに取り除くことを可能となる。   In the electrolysis cell according to the present embodiment described above, even if the gas 14 generated by the electrolysis of the electrolytic solution 18 adheres to the electrode 16, the entire contact area of the electrolytic solution 18 is the liquid channel 10 and the gas channel 12. Since the gas 14 adhering to the electrode 16 contacts the gas-liquid interface, the gas 14 generated by electrolysis can be quickly removed from the surface of the electrode 16. .

これにより、例えば、電極16間の距離を小さくすることが可能であり、電極16への気体14付着面積や付着時間を抑制することが可能となり電気分解の際の電圧が安定したり、電極の消耗が抑制できたりする。また、両極で気体14が発生する電気分解の場合は、気体14の混合を抑制するための隔壁が不要になるなどの効果がある。   As a result, for example, the distance between the electrodes 16 can be reduced, the area where the gas 14 adheres to the electrodes 16 and the adhesion time can be suppressed, the voltage during electrolysis can be stabilized, Consumption can be suppressed. Further, in the case of electrolysis in which the gas 14 is generated at both electrodes, there is an effect that a partition for suppressing the mixing of the gas 14 becomes unnecessary.

なお、本発明は、上記本実施形態に係る電気分解セルの構造に限られるわけではなく、他の形態、例えば、図9〜図12に示す形態などにも適宜適用することができる。また、電気分解処理能力を高める目的のため、同一基板上に本発明の電気分解セルを並列させてもよく、また基板を複数枚重ねて使用することもできる。   The present invention is not limited to the structure of the electrolysis cell according to the present embodiment, and can be appropriately applied to other forms, for example, the forms shown in FIGS. In addition, for the purpose of increasing the electrolysis processing capability, the electrolysis cells of the present invention may be arranged in parallel on the same substrate, or a plurality of substrates can be used in an overlapping manner.

以下、本発明を実施例により具体的に説明するが、本発明はこれらの実施例により何ら限定されるものではない。   EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited at all by these Examples.

(実施例1−1)
以下のようにして、図5及び図6に示す電気分解セルを作製した。なお、図5は、実施例1−1で作製した電気分解セルを示す平面図である。図6は、図5の1−1断面図である。
(Example 1-1)
The electrolysis cell shown in FIGS. 5 and 6 was produced as follows. In addition, FIG. 5 is a top view which shows the electrolysis cell produced in Example 1-1. 6 is a cross-sectional view taken along the line 1-1 in FIG.

1)流路基板22としてのポリカーボネート板(30mm×70mm,2mmt)を機械加工し、断面が矩形となるように、液体流路10と液体流路10を挟んで2本の気体流路12となる溝を形成した。液体流路10の寸法は、幅1.0mm、深さ500μm、電極16にかかる長さ(電極と接触する長さ)は20mmであった。また、気体流路12の寸法は、幅1.0mm、深さ100μm、電極16にかかる長さは20mmであった。このようにして、気体流路12が液体流路よりも深さが浅い流路基板22を得た。
2)電極基板24の開口基板26としてのポリカーボネート板(30mm×70mm,1mmt)を機械加工し、当該開口基板26としてのポリカーボネート板と凸状基板28としてのポリカーボネート板に加工した凸部28Aが収まる形状の開口26Aを形成した。開口26Aの寸法は、幅1.02mm、長さ20mmであった。
3)電極基板24の凸状基板28としてのアクリル板(ポリメチルメタクリレート)板(30mm×70mm,2mmt)を機械加工し、幅1mm、長さ20mm、高さ1mmの凸部28Aを形成した
1) A polycarbonate plate (30 mm × 70 mm, 2 mmt) as the flow path substrate 22 is machined, and the two gas flow paths 12 are sandwiched between the liquid flow path 10 and the liquid flow path 10 so that the cross section is rectangular. A groove was formed. The dimensions of the liquid channel 10 were a width of 1.0 mm, a depth of 500 μm, and a length applied to the electrode 16 (a length in contact with the electrode) of 20 mm. The dimensions of the gas channel 12 were a width of 1.0 mm, a depth of 100 μm, and a length applied to the electrode 16 of 20 mm. In this manner, a flow path substrate 22 in which the gas flow path 12 was shallower than the liquid flow path was obtained.
2) A polycarbonate plate (30 mm × 70 mm, 1 mmt) as the opening substrate 26 of the electrode substrate 24 is machined so that the convex portion 28A processed into the polycarbonate plate as the opening substrate 26 and the polycarbonate plate as the convex substrate 28 is accommodated. A shaped opening 26A was formed. The dimensions of the opening 26A were 1.02 mm in width and 20 mm in length.
3) An acrylic plate (polymethyl methacrylate) plate (30 mm × 70 mm, 2 mmt) as the convex substrate 28 of the electrode substrate 24 was machined to form a convex portion 28A having a width of 1 mm, a length of 20 mm, and a height of 1 mm.

4)厚さ10μmのプラチナ箔を加工し、末端部を折り曲げ、断面L字状の電極16とし、これを開口基板26と凸状基板28との間に挟みこみ、開口基板26の開口26A内周部に断面L字状の電極16の端面と凸部28A上面が露出するように、重ね合わせ隙間を接着剤で埋めたて接着した。接着剤が硬化した後、表面を研磨し凹凸を10μm以下に加工した。このようにして一対の電極16を有する電極基板24を作製した。   4) A platinum foil having a thickness of 10 μm is processed, and the end portion is bent to form an electrode 16 having an L-shaped cross section, which is sandwiched between the opening substrate 26 and the convex substrate 28, and within the opening 26 </ b> A of the opening substrate 26. The overlapping gap was filled with an adhesive and bonded so that the end face of the electrode 16 having an L-shaped cross section and the upper surface of the convex portion 28A were exposed on the periphery. After the adhesive was cured, the surface was polished and the unevenness was processed to 10 μm or less. In this way, an electrode substrate 24 having a pair of electrodes 16 was produced.

5)流路基板22を、テトラフルオロメタンを用いたプラズマ処理をした。また、同様に、電極基板24を、液体流路10内壁を構成する面をポリイミドテープでマスキングした後、テトラフルオロメタンを用いたプラズマ処理をした。プラズマ処理条件は、各基板をカソードにセットし、テトラフルオロメタン流量50sccm、真空度150mTorr、パワー密度1.78W/cm、30秒間処理した。このときの、処理面(流路基板22の流路となる溝内壁と電極基板24の液体流路10内壁を構成する面以外の領域)の使用する電解液18に対する接触角は、125°であった。 5) The flow path substrate 22 was subjected to plasma treatment using tetrafluoromethane. Similarly, the electrode substrate 24 was subjected to plasma treatment using tetrafluoromethane after masking the surface constituting the inner wall of the liquid flow path 10 with a polyimide tape. Plasma treatment conditions were as follows: each substrate was set on the cathode, and a tetrafluoromethane flow rate of 50 sccm, a vacuum degree of 150 mTorr, a power density of 1.78 W / cm 2 , and treatment was performed for 30 seconds. At this time, the contact angle with respect to the electrolytic solution 18 used on the processing surface (the region other than the groove inner wall serving as the flow path of the flow path substrate 22 and the surface constituting the inner wall of the liquid flow path 10 of the electrode substrate 24) is 125 °. there were.

6)電極基板24を、液体流路10内壁を構成する面以外にポリイミドテープでマスキングした後、酸素を用いたプラズマ処理をした。プラズマ処理条件は、基板をアノードにセットし、酸素流量50sccm、真空度150mTorr、パワー密度1.27W/cm、5分間処理した。このときの、処理面(電極基板24の液体流路10内壁を構成する面)の使用する電解液18に対する接触角は、15°であった。 6) The electrode substrate 24 was masked with a polyimide tape on the surface other than the surface constituting the inner wall of the liquid flow path 10 and then subjected to plasma treatment using oxygen. Plasma treatment conditions were as follows: the substrate was set on the anode, and the oxygen flow rate was 50 sccm, the degree of vacuum was 150 mTorr, and the power density was 1.27 W / cm 2 for 5 minutes. At this time, the contact angle of the processing surface (the surface constituting the inner wall of the liquid channel 10 of the electrode substrate 24) with respect to the electrolytic solution 18 used was 15 °.

7)流路基板22と電極基板24とを、電極16の露出部16Aの位置を正確に合わせて重ね合わせた。これらを厚さ10mmのアクリル板を加工した2枚の冶具で挟み込み、ねじを用いて締め付け、流路から電解液18が漏れないようにした。電極16の露出部16Aはその一辺が気体流路12と液体流路10の境界20上に位置して気体流路12側に10μm延在するように配置されていた。このようにしてセルを得た。   7) The flow path substrate 22 and the electrode substrate 24 were overlapped with the position of the exposed portion 16A of the electrode 16 accurately aligned. These were sandwiched between two jigs obtained by processing an acrylic plate having a thickness of 10 mm, and tightened with screws to prevent the electrolyte solution 18 from leaking from the flow path. The exposed portion 16A of the electrode 16 was disposed so that one side thereof was positioned on the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 and extended to the gas flow channel 12 side by 10 μm. A cell was thus obtained.

作製したセルに対し、シリンジポンプを用いて0.01Nの希硫酸を導入口10Aより液体流路10へ供給した。10mL/minの流量で供給しても、希硫酸は液体流路10から気体流路12に漏れることなく、また、液体流路10と気体流路12の境界20近傍で気液界面が形成されていることが、顕微鏡による観察により確認した。   0.01N dilute sulfuric acid was supplied to the liquid channel 10 from the inlet 10A using a syringe pump. Even when supplied at a flow rate of 10 mL / min, dilute sulfuric acid does not leak from the liquid flow path 10 to the gas flow path 12, and a gas-liquid interface is formed in the vicinity of the boundary 20 between the liquid flow path 10 and the gas flow path 12. It was confirmed by observation with a microscope.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け200μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12の気体14と合体し消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、20〜30μmまで成長してから消滅した。電流を300μAまで上げて、上記と同様の条件で実験したところ、電極16で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。このときの電流密度は、150mA/cmであった。 Then, while supplying 0.01 N diluted sulfuric acid as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 200 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that it quickly merged with the gas 14 in the gas flow path 12 and disappeared when contacting the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 disappeared after growing to 20 to 30 μm. When the current was increased to 300 μA and an experiment was performed under the same conditions as described above, bubbles generated at the electrode 16 were sucked into the gas flow path 12 and could be separated into gas and liquid. The current density at this time was 150 mA / cm 2 .

(比較例1−1)
電極基板24における電極16の露出部16Aの位置を基板面と平行にずらし、気体流路12と液体流路10の境界20から、気体流路12側に100μm離した以外は、実施例1−1と同様に実験した。電解液18として0.01Nの希硫酸を、液体流路10に供給したが、希硫酸が電極16の位置まで到達せず接しなかったので、電気分解をすることが出来なかった。
(Comparative Example 1-1)
Example 1 except that the position of the exposed portion 16A of the electrode 16 on the electrode substrate 24 is shifted parallel to the substrate surface and separated from the boundary 20 between the gas channel 12 and the liquid channel 10 by 100 μm toward the gas channel 12 side. The same experiment as in Example 1 was performed. Although 0.01 N dilute sulfuric acid was supplied to the liquid flow path 10 as the electrolytic solution 18, the dilute sulfuric acid did not reach the position of the electrode 16 and was not in contact therewith, so electrolysis could not be performed.

(比較例1−2)
電極基板24における電極16の露出部16Aの位置を基板面と平行にずらし、電極16の位置を、気体流路12と液体流路10の境界20から、液体流路10側に115μm離した以外は、実施例1−1と同様に実験した。なお、電極16の露出部16A全面が電解液接触領域となっており、その領域が境界20から100μmを越えて位置していた。
(Comparative Example 1-2)
The position of the exposed portion 16A of the electrode 16 on the electrode substrate 24 is shifted in parallel with the substrate surface, and the position of the electrode 16 is 115 μm away from the boundary 20 between the gas flow path 12 and the liquid flow path 10 toward the liquid flow path 10. Were the same as in Example 1-1. The entire exposed portion 16A of the electrode 16 was an electrolyte contact region, and the region was located beyond the boundary 20 by more than 100 μm.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け300μAで定電流電解した。両電極から生じた気体14は、電極に付着したまま大きくなり、気体流路12に分離することができなかった。   Then, while supplying 0.01 N dilute sulfuric acid as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 300 μA. The gas 14 generated from both electrodes increased while remaining attached to the electrodes, and could not be separated into the gas flow path 12.

(実施例1−2)
電極基板24における電極16の露出部16Aの位置を基板面と平行にずらし、電極16の位置を、気体流路12と液体流路10の境界20から、液体流路10側に100μm離した以外は、実施例1−1と同様に実験した。なお、電極16の露出部16A全面が電解液接触領域となっており、その全領域が境界20から100μm以内に位置していた。
(Example 1-2)
The position of the exposed portion 16A of the electrode 16 on the electrode substrate 24 is shifted parallel to the substrate surface, and the position of the electrode 16 is separated from the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 by 100 μm toward the liquid flow channel 10. Were the same as in Example 1-1. The entire exposed portion 16A of the electrode 16 is an electrolyte contact region, and the entire region is located within 100 μm from the boundary 20.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け300μAで定電流電解した。両電極から生じた気体14は、電極に付着したまま大きくなり、実施例1−1に比べて時間は掛かったが速やかに気体流路12に分離することができた。   Then, while supplying 0.01 N dilute sulfuric acid as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 300 μA. The gas 14 generated from both electrodes grew while adhering to the electrodes, and although it took longer time than Example 1-1, it could be quickly separated into the gas flow path 12.

(実施例1−3)
電極基板24における電極16の露出部16Aの位置を基板面と平行にずらし、電極16の位置を、気体流路12と液体流路10の境界20から、液体流路10側に50μm離した以外は、実施例1−1と同様に実験した。なお、電極16の露出部16A全面が電解液接触領域となっており、その全領域が境界20から50μm以内に位置していた。
(Example 1-3)
The position of the exposed portion 16A of the electrode 16 on the electrode substrate 24 is shifted parallel to the substrate surface, and the position of the electrode 16 is separated from the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 by 50 μm toward the liquid flow channel 10. Were the same as in Example 1-1. The entire exposed portion 16A of the electrode 16 is an electrolyte contact region, and the entire region is located within 50 μm from the boundary 20.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け300μAで定電流電解した。両電極から生じた気体14は、電極に付着したまま大きくなり、実施例1−1に比べて時間は掛かったが実施例1−2よりも速やかに気体流路12に分離することができた。   Then, while supplying 0.01 N dilute sulfuric acid as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 300 μA. The gas 14 generated from both electrodes grew while adhering to the electrodes, and took longer than Example 1-1, but could be separated into the gas flow path 12 more quickly than Example 1-2. .

(実施例1−4)
厚さ10μmのプラチナ箔の替わりに厚さ50μmのプラチナ箔を用い、電極基板24の開口基板26の開口26Aの幅をプラチナ箔の厚さに合わせて広くした以外は、実施例1−1と同様に電気分解セルを作製し実験した。なお、電極16の露出部16Aをその一辺が気体流路12と液体流路10の境界20上に位置して液体流路10側に50μm延在するように配置させた。
(Example 1-4)
Example 1-1, except that a platinum foil having a thickness of 50 μm was used instead of the platinum foil having a thickness of 10 μm, and the width of the opening 26A of the opening substrate 26 of the electrode substrate 24 was increased in accordance with the thickness of the platinum foil. Similarly, an electrolysis cell was fabricated and experimented. The exposed portion 16A of the electrode 16 was arranged so that one side thereof was located on the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 and extended to the liquid flow channel 10 side by 50 μm.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、100〜150μmで気体流路12に吸い込まれた。電流を900μAまで上げて、上記と同様の条件で実験したが、電極16で発生した気泡は、気体流路内の気体14と合一し、気泡を分離することが出来た。このときの電流密度は、90mA/cmであった。 Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 was 100 to 150 μm and was sucked into the gas flow path 12. The experiment was performed under the same conditions as above with the current increased to 900 μA, but the bubbles generated at the electrode 16 were united with the gas 14 in the gas flow path, and the bubbles could be separated. The current density at this time was 90 mA / cm 2 .

(実施例1−5)
厚さ10μmのプラチナ箔の替わりに厚さ100μmのプラチナ板を用い、電極基板24の開口基板26の開口26Aの幅をプラチナ板の厚さに合わせて広くした以外は、実施例1−1と同様に電気分解セルを作製し実験した。なお、電極16の露出部16Aをその一辺が気体流路12と液体流路10の境界20上に位置して液体流路10側に100μm延在するように配置させた。
(Example 1-5)
Example 1-1, except that a platinum plate having a thickness of 100 μm is used instead of the platinum foil having a thickness of 10 μm, and the width of the opening 26A of the opening substrate 26 of the electrode substrate 24 is increased in accordance with the thickness of the platinum plate. Similarly, an electrolysis cell was fabricated and experimented. The exposed portion 16A of the electrode 16 was disposed so that one side thereof was positioned on the boundary 20 between the gas flow path 12 and the liquid flow path 10 and extended to the liquid flow path 10 side by 100 μm.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、200〜300μmで気体流路12に吸い込まれた。電流を1.4mAまで上げて、上記と同様の条件で実験したが、電極16で発生した気泡は、気体流路12内の気体14と合一し、気泡を分離することが出来た。このときの電流密度は、70mA/cmであった。 Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 was 200 to 300 μm and was sucked into the gas flow path 12. The experiment was performed under the same conditions as described above with the current increased to 1.4 mA, but the bubbles generated at the electrode 16 were united with the gas 14 in the gas flow path 12 and the bubbles could be separated. The current density at this time was 70 mA / cm 2 .

(実施例1−6)
流路基板22と電極基板24に、テトラフルオロメタンを用いたプラズマ処理を施さなかった点以外は、実施例1−1と同様にして実験した。このプラズマ処理非処理面(流路基板22の流路となる溝内壁と電極基板24の液体流路10内壁を構成する面以外の領域)の使用する電解液18に対する接触角は、85°であった。
(Example 1-6)
The experiment was performed in the same manner as in Example 1-1 except that the flow path substrate 22 and the electrode substrate 24 were not subjected to the plasma treatment using tetrafluoromethane. The contact angle with respect to the electrolyte solution 18 used by this non-plasma-treated surface (a region other than the groove inner wall serving as the flow path of the flow path substrate 22 and the surface constituting the inner wall of the liquid flow path 10 of the electrode substrate 24) is 85 °. there were.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。しかし、気液界面は不安定で、しばらくすると電解液18が気体流路12に侵入し、気泡を分離することができなくなった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. However, the gas-liquid interface was unstable, and after a while, the electrolyte solution 18 entered the gas flow path 12 and the bubbles could not be separated.

(実施例1−7)
電極基板24に、酸素を用いたプラズマ処理を施さなかった点以外は、実施例1−1と同様にして実験した。このプラズマ処理非処理面(電極基板24の液体流路10内壁を構成する面)の使用する電解液18に対する接触角は、65°であった。
(Example 1-7)
The experiment was performed in the same manner as in Example 1-1 except that the electrode substrate 24 was not subjected to the plasma treatment using oxygen. The contact angle of the plasma-treated non-treated surface (the surface constituting the inner wall of the liquid channel 10 of the electrode substrate 24) with respect to the electrolytic solution 18 used was 65 °.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。しかし、しばらくすると、発生した気体14が液体流路10の底面(電極基板24の液体流路10を構成する面)に付着して、気泡を分離できなかった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. However, after a while, the generated gas 14 adhered to the bottom surface of the liquid channel 10 (the surface constituting the liquid channel 10 of the electrode substrate 24), and the bubbles could not be separated.

(比較例1−3)
厚さ10μmのプラチナ箔の替わりに厚さ200μmのプラチナ板を用い、電極基板24の開口基板26の開口26Aの幅をプラチナ板の厚さに合わせて広くした以外は、実施例1−1と同様に電気分解セルを作製し実験した。なお、電極16の露出部16Aをその一辺が気体流路12と液体流路10の境界20上に位置して液体流路10側に200μm延在するように配置させた。このため、電極16の露出部16A全面が電解液接触領域となっており、その領域のうち境界20から100μmを越えて位置する領域が存在していた。
(Comparative Example 1-3)
Example 1-1, except that a platinum plate having a thickness of 200 μm was used instead of the platinum foil having a thickness of 10 μm, and the width of the opening 26A of the opening substrate 26 of the electrode substrate 24 was increased to match the thickness of the platinum plate. Similarly, an electrolysis cell was fabricated and experimented. The exposed portion 16A of the electrode 16 was disposed so that one side thereof was positioned on the boundary 20 between the gas flow path 12 and the liquid flow path 10 and extended to the liquid flow path 10 side by 200 μm. For this reason, the entire exposed portion 16A of the electrode 16 is an electrolyte contact region, and a region located beyond 100 μm from the boundary 20 exists in the region.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、電極16に付着したまま大きくなり、電極16上部の面(液体流路10内壁)に接するようになり、気体流路12に分離することができなかった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 grew while adhering to the electrode 16, came into contact with the upper surface of the electrode 16 (inner wall of the liquid flow channel 10), and could not be separated into the gas flow channel 12.

(実施例2−1)
以下のようにして、図7及び図8に示す電気分解セルを作製した。なお、図7は、実施例2−1で作製した電気分解セルを示す平面図である。図8は、図7の2−2断面図である。
(Example 2-1)
The electrolysis cell shown in FIGS. 7 and 8 was produced as follows. In addition, FIG. 7 is a top view which shows the electrolysis cell produced in Example 2-1. 8 is a cross-sectional view taken along the line 2-2 of FIG.

1)流路基板22としてのアクリル板(30mm×70mm,2mmt)を機械加工し、断面が矩形となるように、液体流路10と液体流路10を挟んで2本の気体流路12となる溝を形成した。液体流路10の寸法は、幅1.0mm、深さ10μm、電極16にかかる長さは20mmであった。また、気体流路12の寸法は、幅1.0mm、深さ500μm、電極16にかかる長さは20mmであった。このようにして、気体流路12が液体流路よりも深さが深い流路基板22を得た。   1) An acrylic plate (30 mm × 70 mm, 2 mmt) as the flow path substrate 22 is machined, and the two liquid flow paths 12 are sandwiched between the liquid flow path 10 and the liquid flow path 10 so that the cross section is rectangular. A groove was formed. The dimensions of the liquid channel 10 were a width of 1.0 mm, a depth of 10 μm, and a length applied to the electrode 16 of 20 mm. The dimensions of the gas channel 12 were a width of 1.0 mm, a depth of 500 μm, and a length applied to the electrode 16 of 20 mm. In this way, a flow path substrate 22 in which the gas flow path 12 was deeper than the liquid flow path was obtained.

2)電極基板24の開口基板26としてのアクリル板(30mm×70mm,1mmt)を機械加工し、当該開口基板26としてのポリカーボネート板と凸状基板28としてのポリカーボネート板に加工した凸部28Aが収まる形状の開口26Aを形成した。開口26Aの寸法は、幅1.02mm、長さ20mmであった。   2) An acrylic plate (30 mm × 70 mm, 1 mmt) as the opening substrate 26 of the electrode substrate 24 is machined, and the convex portion 28A processed into the polycarbonate plate as the opening substrate 26 and the polycarbonate plate as the convex substrate 28 is accommodated. A shaped opening 26A was formed. The dimensions of the opening 26A were 1.02 mm in width and 20 mm in length.

3)電極基板24の凸状基板28としてのアクリル板(30mm×70mm,2mmt)を機械加工し、幅1mm、長さ20mm、高さ1mmの凸部28Aを形成した。   3) An acrylic plate (30 mm × 70 mm, 2 mmt) as the convex substrate 28 of the electrode substrate 24 was machined to form a convex portion 28A having a width of 1 mm, a length of 20 mm, and a height of 1 mm.

4)厚さ10μmのプラチナ箔を加工し、末端部を折り曲げ、断面L字状の電極16とし、これを開口基板26と凸状基板28との間に挟みこみ、開口基板26の開口26A内周部に断面L字状の電極16の端面と凸部28A上面が露出するように、重ね合わせ隙間を接着剤で埋めたて接着した。接着剤が硬化した後、表面を研磨し凹凸を10μm以下に加工した。このようにして一対の電極16を有する電極基板24を作製した。
5)流路基板22及び電極基板24を、酸素を用いたプラズマ処理をした。プラズマ処理条件は、ポリカーボネート板をアノードにセットし、酸素流量50sccm、真空度150mTorr、パワー密度1.27W/cm、5分間処理した。このときの、処理面(流路基板22の流路となる溝内壁と電極基板24の各流路を構成する全面)の使用する電解液18に対する接触角は、15°であった。
4) A platinum foil having a thickness of 10 μm is processed, and the end portion is bent to form an electrode 16 having an L-shaped cross section, which is sandwiched between the opening substrate 26 and the convex substrate 28, and within the opening 26A of the opening substrate 26 The overlapping gap was filled with an adhesive and bonded so that the end face of the electrode 16 having an L-shaped cross section and the upper surface of the convex portion 28A were exposed on the periphery. After the adhesive was cured, the surface was polished and the unevenness was processed to 10 μm or less. In this way, an electrode substrate 24 having a pair of electrodes 16 was produced.
5) The flow path substrate 22 and the electrode substrate 24 were subjected to plasma treatment using oxygen. Plasma treatment conditions were as follows: a polycarbonate plate was set on the anode, and the oxygen flow rate was 50 sccm, the degree of vacuum was 150 mTorr, and the power density was 1.27 W / cm 2 for 5 minutes. At this time, the contact angle with respect to the electrolytic solution 18 used by the processing surface (the inner wall of the groove serving as the flow path of the flow path substrate 22 and the entire surface constituting each flow path of the electrode substrate 24) was 15 °.

6)流路基板22と電極基板24とを、電極16の露出部16Aの位置を正確に合わせて重ね合わせた。これらを厚さ10mmのアクリル板を加工した2枚の冶具で挟み込み、ねじを用いて締め付け、流路から電解液18が漏れないようにした。電極16の露出部16Aはその一辺が気体流路12と液体流路10の境界20上に位置して気体流路12側に10μm延在するように配置されていた。このようにしてセルを得た。   6) The flow path substrate 22 and the electrode substrate 24 were overlapped with the position of the exposed portion 16A of the electrode 16 accurately aligned. These were sandwiched between two jigs obtained by processing an acrylic plate having a thickness of 10 mm, and tightened with screws to prevent the electrolyte solution 18 from leaking from the flow path. The exposed portion 16A of the electrode 16 was disposed so that one side thereof was positioned on the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 and extended to the gas flow channel 12 side by 10 μm. A cell was thus obtained.

作製したセルに対し、シリンジポンプを用いて0.01Nの希硫酸を導入口10Aより液体流路10へ供給した。10mL/minの流量で供給しても、希硫酸は液体流路10から気体流路12に漏れることなく、また、液体流路10と気体流路12の境界20近傍で気液界面が形成されていることが、顕微鏡による観察により確認した。   0.01N dilute sulfuric acid was supplied to the liquid channel 10 from the inlet 10A using a syringe pump. Even when supplied at a flow rate of 10 mL / min, dilute sulfuric acid does not leak from the liquid flow path 10 to the gas flow path 12, and a gas-liquid interface is formed in the vicinity of the boundary 20 between the liquid flow path 10 and the gas flow path 12. It was confirmed by observation with a microscope.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け200μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12の気体14と合体し消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、20〜30μmまで成長してから消滅した。電流を300μAまで上げて、上記と同様の条件で実験したところ、電極16で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。このときの電流密度は、150mA/cmであった。 Then, while supplying 0.01 N diluted sulfuric acid as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 200 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that it quickly merged with the gas 14 in the gas flow path 12 and disappeared when contacting the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 disappeared after growing to 20 to 30 μm. When the current was increased to 300 μA and an experiment was performed under the same conditions as described above, bubbles generated at the electrode 16 were sucked into the gas flow path 12 and could be separated into gas and liquid. The current density at this time was 150 mA / cm 2 .

(実施例2−2)
液体流路10の深さを50μmにした以外は、実施例2−1と同様に電気分解セルを作製し実験した。
(Example 2-2)
An electrolytic cell was produced and experimented in the same manner as in Example 2-1, except that the depth of the liquid channel 10 was changed to 50 μm.

そして、電解液18として0.01Nの希硫酸をシリンジポンプを用いて流路に供給し、電極16間に電圧を掛け200μAで定電流電解した。両電極16から生じた気体14は、速やかに気体流路12の気体14と合体し消滅する様子が確認できた。電流を500μAまで上げて、上記と同様の条件で実験したところ、電極16で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。このときの電流密度は、250mA/cmであった。 Then, 0.01 N dilute sulfuric acid was supplied to the flow path as an electrolytic solution 18 using a syringe pump, and voltage was applied between the electrodes 16 to perform constant current electrolysis at 200 μA. It was confirmed that the gas 14 generated from both electrodes 16 quickly merged with the gas 14 in the gas flow path 12 and disappeared. When the current was increased to 500 μA and an experiment was performed under the same conditions as described above, bubbles generated at the electrode 16 were sucked into the gas flow path 12 and could be separated into gas and liquid. The current density at this time was 250 mA / cm 2 .

(実施例2−3)
液体流路10の深さを100μmにした以外は、実施例2−1と同様に電気分解セルを作製し実験した。
(Example 2-3)
An electrolysis cell was produced and tested in the same manner as in Example 2-1, except that the depth of the liquid channel 10 was set to 100 μm.

そして、電解液18として0.01Nの希硫酸をシリンジポンプを用いて流路に供給し、電極16間に電圧を掛け200μAで定電流電解した。両電極16から生じた気体は、速やかに気体流路12の気体14と合体し消滅する様子が確認できた。しかし、しばらくすると、両電極16から生じた気体14は、一部気体流路12の気体14と合体し消滅する様子が確認できたが、大部分は液体流路上で合一し大きくなり、気体流路12に引き抜かれることはなかった。   Then, 0.01 N dilute sulfuric acid was supplied to the flow path as an electrolytic solution 18 using a syringe pump, and voltage was applied between the electrodes 16 to perform constant current electrolysis at 200 μA. It was confirmed that the gas generated from both electrodes 16 quickly merged with the gas 14 in the gas flow path 12 and disappeared. However, after a while, it was confirmed that the gas 14 generated from both electrodes 16 partially merged with the gas 14 in the gas flow path 12 and disappeared, but most of the gas 14 was united and enlarged on the liquid flow path. It was not pulled out into the flow path 12.

(実施例2−4)
厚さ10μmのプラチナ箔の替わりに厚さ50μmのプラチナ箔を用い、電極基板24の開口基板26の開口26Aの幅をプラチナ箔の厚さに合わせて広くした以外は、実施例2−1と同様に電気分解セルを作製し実験した。なお、電極16の露出部16Aをその一辺が気体流路12と液体流路10の境界20上に位置して液体流路10側に50μm延在するように配置させた。
(Example 2-4)
Example 2-1 except that a platinum foil having a thickness of 50 μm was used instead of the platinum foil having a thickness of 10 μm, and the width of the opening 26A of the opening substrate 26 of the electrode substrate 24 was increased according to the thickness of the platinum foil. Similarly, an electrolysis cell was fabricated and experimented. The exposed portion 16A of the electrode 16 was arranged so that one side thereof was located on the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 and extended to the liquid flow channel 10 side by 50 μm.

そして、電解液18として0.01Nの希硫酸を、シリンジポンプを用いて流路に供給し、電極間に電圧を掛け200μAで定電流電解した。両電極から生じた気体14は、速やかに気体流路12の気体14と合体し消滅する様子が確認できた。電流を100μAまで上げて、上記と同様の条件で実験したところ、電極で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。このときの電流密度は、10mA/cmであった。 Then, 0.01 N dilute sulfuric acid was supplied as an electrolytic solution 18 to the flow path using a syringe pump, and voltage was applied between the electrodes to conduct constant current electrolysis at 200 μA. It was confirmed that the gas 14 generated from both electrodes quickly merged with the gas 14 in the gas flow path 12 and disappeared. When the current was increased to 100 μA and an experiment was performed under the same conditions as described above, bubbles generated at the electrodes were sucked into the gas flow path 12 and could be separated into gas and liquid. The current density at this time was 10 mA / cm 2 .

(実施例2−5)
流路基板22と電極基板24に、酸素を用いたプラズマ処理を施さなかった点以外は、実施例2−1と同様にして実験した。このプラズマ処理非処理面(流路基板22の流路となる溝内壁と電極基板24の液体流路10内壁を構成する面の領域)の使用する電解液18に対する接触角は、85°であった。
(Example 2-5)
The experiment was performed in the same manner as in Example 2-1, except that the plasma treatment using oxygen was not performed on the flow path substrate 22 and the electrode substrate 24. The contact angle with respect to the electrolyte solution 18 used by this plasma-treated non-treated surface (the region of the groove constituting the flow path of the flow path substrate 22 and the area constituting the inner wall of the liquid flow path 10 of the electrode substrate 24) was 85 °. It was.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け100μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。しかし、気液界面は不安定で、しばらくすると電解液18が気体流路12に侵入し、気泡を分離することができなくなった。   Then, while supplying 0.01 N diluted sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 100 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. However, the gas-liquid interface was unstable, and after a while, the electrolyte solution 18 entered the gas flow path 12 and the bubbles could not be separated.

(実施例2−6)
流路基板22と電極基板24に、酸素を用いたプラズマ処理を施さず、替わりにテトラフルオロメタンを用いたプラズマ処理を施した点以外は、実施例2−1と同様にして実験した。プラズマ処理条件は、各基板をアノードにセットし、テトラフルオロメタン流量50sccm、真空度150mTorr、パワー密度1.27W/cm、90秒間処理した。このプラズマ処理面(流路基板22の流路となる溝内壁と電極基板24の液体流路10内壁を構成する面の領域)の使用する電解液18に対する接触角は、95°であった。
(Example 2-6)
The experiment was performed in the same manner as in Example 2-1, except that the flow path substrate 22 and the electrode substrate 24 were not subjected to the plasma treatment using oxygen, but instead were subjected to the plasma treatment using tetrafluoromethane. As for the plasma treatment conditions, each substrate was set on the anode, and the treatment was performed for 90 seconds at a tetrafluoromethane flow rate of 50 sccm, a degree of vacuum of 150 mTorr, a power density of 1.27 W / cm 2 . The contact angle with respect to the electrolyte solution 18 used of this plasma treatment surface (the region of the groove constituting the flow path of the flow path substrate 22 and the area constituting the inner wall of the liquid flow path 10 of the electrode substrate 24) was 95 °.

そして、電解液18として0.01Nの希硫酸を1μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け100μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。しかし、気液界面は不安定で、しばらくすると電解液18が気体流路12に侵入し、気泡を分離することができなくなった。   Then, while supplying 0.01 N diluted sulfuric acid as the electrolytic solution 18 at a flow rate of 1 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 100 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that the gas 14 disappeared as soon as it was sucked into the gas flow path 12 when it contacted the gas-liquid interface. However, the gas-liquid interface was unstable, and after a while, the electrolyte solution 18 entered the gas flow path 12 and the bubbles could not be separated.

また、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給したところ、気液界面を形成することができず、電解液18が気体流路12に侵入してしまった。   Further, when 0.01 N dilute sulfuric acid was supplied as an electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a gas-liquid interface could not be formed, and the electrolytic solution 18 entered the gas flow path 12. I have.

(実施例3−1)
以下のようにして、図9及び図10に示す電気分解セルを作製した。なお、図9は、実施例3−1で作製した電気分解セルを示す平面図である。図10は、図9の3−3断面図である。
(Example 3-1)
The electrolysis cell shown in FIGS. 9 and 10 was produced as follows. In addition, FIG. 9 is a top view which shows the electrolysis cell produced in Example 3-1. 10 is a cross-sectional view taken along line 3-3 of FIG.

1)流路基板22としてのポリカーボネート板(30mm×70mm、厚さ2mm)を機械加工し、断面が矩形となるように、液体流路10と液体流路10を挟んで2本の気体流路12となる溝を形成した。液体流路10の寸法は、幅1.4mm、深さ500μm、電極16にかかる長さは30mmであった。また、気体流路12の寸法は、幅1.0mm、深さ100μm、電極16にかかる長さは30mmであった。このようにして、気体流路12が液体流路10よりも深さが浅い流路基板22を得た。   1) Two gas flow paths sandwiching the liquid flow path 10 and the liquid flow path 10 so that a polycarbonate plate (30 mm × 70 mm, thickness 2 mm) as the flow path substrate 22 is machined to have a rectangular cross section. A groove to be 12 was formed. The liquid channel 10 had a width of 1.4 mm, a depth of 500 μm, and a length applied to the electrode 16 of 30 mm. The dimensions of the gas channel 12 were a width of 1.0 mm, a depth of 100 μm, and a length applied to the electrode 16 of 30 mm. In this way, a flow path substrate 22 in which the gas flow path 12 was shallower than the liquid flow path 10 was obtained.

2)電極基板24としてのポリカーボネート板(30mm×70mm、厚さ2mm)も機械加工し、プラチナワイヤーからなる電極16が収まる形状の溝24Aを形成した。溝24Aの寸法は、幅100μm、深さ100μm、電極16にかかる長さは30mmであった。また、プラチナワイヤーからなる電極16の収まる溝24Aは、上記の1)で作製した液体流路10と気体流路12の境界20が中央となるようにした形成した。プラチナワイヤーからなる電極16は、直径100μmのものを用い、電極16を溝に収めつつ、溝24Aの両端に空けた貫通孔から露出して端子30とし、これを電源と接続した。このようにして、電極基板24を得た。   2) A polycarbonate plate (30 mm × 70 mm, thickness 2 mm) as the electrode substrate 24 was also machined to form a groove 24A in which the electrode 16 made of platinum wire was accommodated. The dimensions of the groove 24A were a width of 100 μm, a depth of 100 μm, and a length applied to the electrode 16 of 30 mm. Further, the groove 24A in which the electrode 16 made of platinum wire is accommodated was formed so that the boundary 20 between the liquid flow path 10 and the gas flow path 12 prepared in the above 1) was at the center. An electrode 16 made of platinum wire having a diameter of 100 μm was used, and the electrode 16 was accommodated in the groove, and exposed from the through-holes opened at both ends of the groove 24A to be the terminal 30, which was connected to the power source. In this way, an electrode substrate 24 was obtained.

3)流路基板22と電極基板24を、テトラフルオロメタンを用いたプラズマ処理をした。プラズマ処理条件は、基板をカソードにセットし、テトラフルオロメタン流量50sccm、真空度150mTorr、パワー密度1.78W/cm、30秒間処理した。このときの、処理面(流路基板22の流路となる溝内壁と電極基板24の各流路を構成する全面)の使用する電解液18に対する接触角は、125°であった。 3) The flow path substrate 22 and the electrode substrate 24 were subjected to plasma treatment using tetrafluoromethane. Plasma treatment conditions were as follows: the substrate was set on the cathode, and a tetrafluoromethane flow rate of 50 sccm, a vacuum degree of 150 mTorr, a power density of 1.78 W / cm 2 , and a treatment for 30 seconds. At this time, the contact angle with respect to the electrolytic solution 18 used by the processing surface (the inner wall of the groove serving as the flow path of the flow path substrate 22 and the entire surface constituting each flow path of the electrode substrate 24) was 125 °.

4)流路基板22と電極基板24とを、電極16の露出部16Aの位置を正確に合わせて重ね合わせた。これらを厚さ10mmのアクリル板を加工した2枚の冶具で挟み込み、ねじを用いて締め付け、流路から電解液18が漏れないようにした。電極16の露出部16Aはその中央が気体流路12と液体流路10の境界20上に位置するように配置されていた。このようにしてセルを得た。   4) The flow path substrate 22 and the electrode substrate 24 were overlapped with the position of the exposed portion 16A of the electrode 16 accurately aligned. These were sandwiched between two jigs obtained by processing an acrylic plate having a thickness of 10 mm, and tightened with screws to prevent the electrolyte solution 18 from leaking from the flow path. The exposed portion 16 </ b> A of the electrode 16 is arranged so that the center thereof is located on the boundary 20 between the gas flow path 12 and the liquid flow path 10. A cell was thus obtained.

作製したセルに対し、シリンジポンプを用いて0.01Nの希硫酸を導入口10Aより液体流路10へ供給した。10mL/minの流量で供給しても、希硫酸は液体流路10から気体流路12に漏れることなく、また、液体流路10と気体流路12の境界20近傍で気液界面が形成されていることが、顕微鏡による観察により確認した。   0.01N dilute sulfuric acid was supplied to the liquid channel 10 from the inlet 10A using a syringe pump. Even when supplied at a flow rate of 10 mL / min, dilute sulfuric acid does not leak from the liquid flow path 10 to the gas flow path 12, and a gas-liquid interface is formed in the vicinity of the boundary 20 between the liquid flow path 10 and the gas flow path 12. It was confirmed by observation with a microscope.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12の気体14と合体し消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、20〜30μmまで成長してから消滅した。電流を2.0mAまで上げて、上記と同様の条件で実験したところ、電極16で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。しかしながら、電流を3.0mAまで上げて、上記と同様の条件で実験したところ、電極で発生した気泡は液体流路に付着し大きくなり、ついには液体流路を流れるようになり、気体流路12に吸収できないものが発生するようになった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that it quickly merged with the gas 14 in the gas flow path 12 and disappeared when contacting the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 disappeared after growing to 20 to 30 μm. When the current was increased to 2.0 mA and an experiment was performed under the same conditions as described above, bubbles generated in the electrode 16 were sucked into the gas flow path 12 and could be separated into gas and liquid. However, when the current was increased to 3.0 mA and an experiment was performed under the same conditions as described above, bubbles generated in the electrodes adhered to the liquid flow channel and became larger, eventually flowing through the liquid flow channel. No. 12 can be absorbed.

(実施例3−2)
流路基板22及び電極基板24としてのポリカーボネート板をアクリル板に変更した以外は、実施例3−1と同様にして実験した。なお、アクリル板に対してテトラフルオロメタンを用いたプラズマ処理面(流路基板22の流路となる溝内壁と電極基板24の各流路内壁を構成する面)の使用する電解液18に対する接触角は、110°であった。
(Example 3-2)
The experiment was performed in the same manner as in Example 3-1, except that the polycarbonate plate as the flow path substrate 22 and the electrode substrate 24 was changed to an acrylic plate. It should be noted that the plasma processing surface using tetrafluoromethane with respect to the acrylic plate (the surface constituting the flow path of the flow path substrate 22 and the surface constituting each flow path inner wall of the electrode substrate 24) to the electrolytic solution 18 used. The angle was 110 °.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け500μAで定電流電解した。両電極から生じた気体14は、最初は電極に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。このときの電極に付着した気泡の直径は、平均200〜300μmまで成長してから、気体流路12内の気体14と合一し、気泡を分離することが出来た。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 500 μA. It was confirmed that the gas 14 generated from both electrodes was initially attached to the electrode, but disappeared as soon as it was drawn into the gas flow path 12 when it contacted the gas-liquid interface. At this time, the diameter of the bubbles adhering to the electrode grew to an average of 200 to 300 μm, and then merged with the gas 14 in the gas flow channel 12 to separate the bubbles.

(比較例3−1)
電極基板24におけるワイヤーからなる電極16の位置を基板面と平行にずらし、電極16の中心を気体流路12と液体流路10の境界20から、気体流路12側に150μm離した以外は、実施例3−1と同様に実験した。電解液18として0.01Nの希硫酸を、液体流路10に供給したが、希硫酸が電極16の位置まで到達せず接しなかったので、電気分解をすることが出来なかった。
(Comparative Example 3-1)
The position of the electrode 16 made of a wire on the electrode substrate 24 is shifted parallel to the substrate surface, and the center of the electrode 16 is separated from the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 by 150 μm to the gas flow channel 12 side. The experiment was performed in the same manner as in Example 3-1. Although 0.01 N dilute sulfuric acid was supplied to the liquid flow path 10 as the electrolytic solution 18, the dilute sulfuric acid did not reach the position of the electrode 16 and was not in contact therewith, so electrolysis could not be performed.

(比較例3−2)
電極基板24におけるワイヤーからなる電極16の位置を基板面と平行にずらし、電極16の中心を気体流路12と液体流路10の境界20から、液体流路10側に150μm離した以外は、実施例3−1と同様に実験した。なお、電極16の露出部16A全面が電解液接触領域となっており、その領域が境界20から100μmを越えて位置していた。
(Comparative Example 3-2)
The position of the electrode 16 made of a wire on the electrode substrate 24 is shifted parallel to the substrate surface, and the center of the electrode 16 is separated from the boundary 20 between the gas flow channel 12 and the liquid flow channel 10 by 150 μm to the liquid flow channel 10 side. The experiment was performed in the same manner as in Example 3-1. The entire exposed portion 16A of the electrode 16 was an electrolyte contact region, and the region was located beyond the boundary 20 by more than 100 μm.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け500μAで定電流電解した。電極16で発生した気泡は、液体流路10に付着したり、液体流路10を流れたりして、気体流路12に吸い込まれず、気液分離することは出来なかった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 500 μA. Bubbles generated at the electrode 16 adhered to the liquid flow path 10 or flowed through the liquid flow path 10 and were not sucked into the gas flow path 12 and could not be separated into gas and liquid.

(実施例3−3)
テトラフルオロメタンを用いたプラズマ処理を行なわなかった点以外は、実施例3−2と同様にして電気分解セルを作製した。流路基板22(アクリル板)及び電極基板24(アクリル板)における非処理面(流路基板22の流路となる溝内壁と電極基板24の各流路を構成する面)の使用する電解液18に対する接触角は、65°であった。
(Example 3-3)
An electrolysis cell was produced in the same manner as in Example 3-2 except that the plasma treatment using tetrafluoromethane was not performed. Electrolyte used on the non-processed surfaces (surfaces constituting the flow path of the flow path substrate 22 and the flow path of the electrode substrate 24) of the flow path substrate 22 (acrylic plate) and the electrode substrate 24 (acrylic plate) The contact angle with respect to 18 was 65 °.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、電極間に電圧を掛け500μAで定電流電解した。両電極から生じた気体14は、最初は電極に付着するが、気液界面に接触すると速やかに気体流路12側に吸い込まれるように消滅する様子が確認できた。しかし、しばらくすると、発生した気体14は液体流路10を流れ、気液分離することは出来なかった。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the electrodes to perform constant current electrolysis at 500 μA. It was confirmed that the gas 14 generated from both electrodes was initially attached to the electrode, but disappeared as soon as it was drawn into the gas flow path 12 when it contacted the gas-liquid interface. However, after a while, the generated gas 14 flowed through the liquid channel 10 and could not be gas-liquid separated.

(実施例4)
以下のようにして、図11及び図12に示す電気分解セルを作製した。なお、図11は、実施例4で作製した電気分解セルを示す平面図である。図12は、図11の4−4断面図である。
Example 4
The electrolysis cell shown in FIGS. 11 and 12 was produced as follows. In addition, FIG. 11 is a top view which shows the electrolysis cell produced in Example 4. FIG. 12 is a cross-sectional view taken along line 4-4 of FIG.

流路基板22としてのポリカーボネート板(30mm×70mm、厚さ2mm)を機械加工し、断面が矩形となるように、液体流路10と液体流路10を挟んで2本の気体流路12となる溝を形成した。液体流路10の寸法は、幅200μm、深さ500μm、電極16にかかる長さは20mmであった。また、気体流路12の寸法は、幅1.0mm、深さ100μm、電極16にかかる長さは20mmであった。このようにして、気体流路12が液体流路10よりも深さが浅い流路基板22を得た。   A polycarbonate plate (30 mm × 70 mm, thickness 2 mm) as the flow path substrate 22 is machined, and the two gas flow paths 12 are sandwiched between the liquid flow path 10 and the liquid flow path 10 so that the cross section is rectangular. A groove was formed. The dimensions of the liquid channel 10 were a width of 200 μm, a depth of 500 μm, and a length applied to the electrode 16 of 20 mm. The dimensions of the gas channel 12 were a width of 1.0 mm, a depth of 100 μm, and a length applied to the electrode 16 of 20 mm. In this way, a flow path substrate 22 in which the gas flow path 12 was shallower than the liquid flow path 10 was obtained.

2)電極基板24としてのポリカーボネート板(30mm×70mm、厚さ2mm)も機械加工し、厚さ100μmのプラチナ板からなる電極16が収まる形状の窪み24Bを形成した。窪み24Bの寸法は、幅10mm、長さ20mm、深さ100μmであった。また、プラチナ板からなる電極16の収まる窪み24Bは2箇所作っている。そして、電極16の端面(露出部16A)と窪み24B側壁とが10μmの間隙24Cを有し、且つ電極16の端面(露出部16A)が液体流路10と気体流路12の境界20上に位置するように、窪み24Bに収めた。   2) A polycarbonate plate (30 mm × 70 mm, thickness 2 mm) as the electrode substrate 24 was also machined to form a recess 24B in which the electrode 16 made of a platinum plate having a thickness of 100 μm was accommodated. The dimensions of the recess 24B were 10 mm in width, 20 mm in length, and 100 μm in depth. Two recesses 24B for accommodating the electrodes 16 made of a platinum plate are formed. The end face (exposed portion 16A) of the electrode 16 and the side wall of the recess 24B have a gap 24C of 10 μm, and the end face (exposed portion 16A) of the electrode 16 is on the boundary 20 between the liquid flow path 10 and the gas flow path 12. It was stored in the depression 24B so as to be positioned.

3)流路基板22に、テトラフルオロメタンを用いたプラズマ処理をした。プラズマ処理条件は、基板をカソードにセットし、テトラフルオロメタン流量50sccm、真空度150mTorr、パワー密度1.78W/cm、30秒間処理した。このときの、処理面(流路基板22の流路となる溝内壁)の使用する電解液18に対する接触角は、125°であった。 3) The flow path substrate 22 was subjected to a plasma treatment using tetrafluoromethane. Plasma treatment conditions were as follows: the substrate was set on the cathode, and a tetrafluoromethane flow rate of 50 sccm, a vacuum degree of 150 mTorr, a power density of 1.78 W / cm 2 , and a treatment for 30 seconds. At this time, the contact angle with respect to the electrolytic solution 18 used by the processing surface (the groove inner wall serving as the flow path of the flow path substrate 22) was 125 °.

4)電極基板24の窪み24Bに収める前のプラチナ板からなる電極表面にフッ素樹脂コーティング剤(耐熱TFEコート ファインケミカルジャパン社製)をスプレーコートし、加熱硬化(175℃,1時間)させた。この処理面(電極16表面)の使用する電解液18に対する接触角は、119°であった。但し、電解液18と接触する電極16端面(露出部16A)を紙やすりで研磨し、フッ素樹脂コートを削り取り電極16を露出させた。 4) A fluorine resin coating agent (heat-resistant TFE coat manufactured by Fine Chemical Japan Co., Ltd.) was spray-coated on the electrode surface made of a platinum plate before being stored in the recess 24B of the electrode substrate 24, and heat-cured (175 ° C., 1 hour). The contact angle of the treated surface (surface of the electrode 16) with respect to the electrolytic solution 18 used was 119 °. However, the end surface (exposed portion 16A) of the electrode 16 in contact with the electrolytic solution 18 was polished with a sandpaper, and the fluororesin coat was scraped to expose the electrode 16.

5)流路基板22と電極基板24とを、電極16の露出部16Aの位置を正確に合わせて重ね合わせた。これらを厚さ10mmのアクリル板を加工した2枚の冶具で挟み込み、ねじを用いて締め付け、流路から電解液18が漏れないようにした。電極16の端面(露出部16A)は気体流路12と液体流路10の境界20上に位置するように配置されていた。このようにしてセルを得た。   5) The flow path substrate 22 and the electrode substrate 24 were overlapped with the position of the exposed portion 16A of the electrode 16 accurately aligned. These were sandwiched between two jigs obtained by processing an acrylic plate having a thickness of 10 mm, and tightened with screws to prevent the electrolyte solution 18 from leaking from the flow path. The end face (exposed portion 16 </ b> A) of the electrode 16 was disposed so as to be located on the boundary 20 between the gas flow path 12 and the liquid flow path 10. A cell was thus obtained.

なお、研磨し導電性のあるプラチナ板からなる電極16の端面(露出部16A)と窪み24B側壁との間には10μmの間隙24Cを設けたため、間隙24Cにも電解液18が流液し、電極16の端面(露出部16A)は電解液18と接触しており、電気分解が生じることができる。   Since a 10 μm gap 24C was provided between the end face (exposed portion 16A) of the electrode 16 made of polished and conductive platinum plate and the side wall of the depression 24B, the electrolytic solution 18 also flowed into the gap 24C. The end face (exposed portion 16A) of the electrode 16 is in contact with the electrolytic solution 18, and electrolysis can occur.

作製したセルに対し、シリンジポンプを用いて0.01Nの希硫酸を導入口10Aより液体流路10へ供給した。180mL/minの流量で供給しても、希硫酸は液体流路10から気体流路12に漏れることなく、また、液体流路10と気体流路12の境界20近傍で気液界面が形成されていることが、顕微鏡による観察により確認した。     0.01N dilute sulfuric acid was supplied to the liquid channel 10 from the inlet 10A using a syringe pump. Even when supplied at a flow rate of 180 mL / min, dilute sulfuric acid does not leak from the liquid flow path 10 to the gas flow path 12, and a gas-liquid interface is formed in the vicinity of the boundary 20 between the liquid flow path 10 and the gas flow path 12. It was confirmed by observation with a microscope.

そして、電解液18として0.01Nの希硫酸を10μL/minの流量でシリンジポンプを用いて供給しながら、一対の電極16間に電圧を掛け500μAで定電流電解した。両電極16から生じた気体14は、最初は電極16に付着するが、気液界面に接触すると速やかに気体流路12の気体14と合体し消滅する様子が確認できた。このときの電極16に付着した気泡の直径は、20〜30μmまで成長してから消滅した。電流を5.0mAまで上げて、上記と同様の条件で実験したところ、電極16で発生した気泡は、気体流路12に吸い込まれ気液分離することが出来た。   Then, while supplying 0.01 N dilute sulfuric acid as the electrolytic solution 18 at a flow rate of 10 μL / min using a syringe pump, a voltage was applied between the pair of electrodes 16 to perform constant current electrolysis at 500 μA. The gas 14 generated from both electrodes 16 was initially attached to the electrode 16, but it was confirmed that it quickly merged with the gas 14 in the gas flow path 12 and disappeared when contacting the gas-liquid interface. At this time, the diameter of the bubbles attached to the electrode 16 disappeared after growing to 20 to 30 μm. When the current was increased to 5.0 mA and an experiment was performed under the same conditions as described above, bubbles generated at the electrode 16 were sucked into the gas flow path 12 and could be separated into gas and liquid.

なお、上記いずれの実施例も、水の電気分解反応により、酸素と水素に分解され、それぞれ回収することができた。また、本実施例では、水の電気分解反応を生じさせるための物質として硫酸を用いた例を示したが、硫酸に限られず、他の物質であってもよい。   In each of the above examples, water was electrolyzed and decomposed into oxygen and hydrogen, and each could be recovered. In the present embodiment, an example is shown in which sulfuric acid is used as a substance for causing an electrolysis reaction of water, but it is not limited to sulfuric acid, and other substances may be used.

実施形態に係る電気分解セルを示す平面図である。It is a top view which shows the electrolysis cell which concerns on embodiment. 実施形態に係る電気分解セルを示す断面図である。It is sectional drawing which shows the electrolysis cell which concerns on embodiment. 実施形態に係る電気分解セルにおける電極位置を示す部分拡大断面図である。It is a partial expanded sectional view which shows the electrode position in the electrolysis cell which concerns on embodiment. 他の実施形態に係る電気分解セルを示す断面図である。It is sectional drawing which shows the electrolysis cell which concerns on other embodiment. 実施例1−1で作製した電気分解セルを示す平面図である。It is a top view which shows the electrolysis cell produced in Example 1-1. 図5の1−1断面図である。It is 1-1 sectional drawing of FIG. 実施例2−1で作製した電気分解セルを示す平面図である。It is a top view which shows the electrolysis cell produced in Example 2-1. 図7の2−2断面図である。It is 2-2 sectional drawing of FIG. 実施例3−1で作製した電気分解セルを示す平面図である。It is a top view which shows the electrolysis cell produced in Example 3-1. 図9の3−3断面図である。It is 3-3 sectional drawing of FIG. 実施例4で作製した電気分解セルを示す平面図である。6 is a plan view showing an electrolysis cell produced in Example 4. FIG. 図11の4−4断面図である。It is 4-4 sectional drawing of FIG.

符号の説明Explanation of symbols

10 液体流路
10A 導入口
10B 排出口
12 気体流路
12A 気体排出用流路
12B 排出口
14 気体
16 電極
16A 露出部
18 電解液
20 液体流路及び気体流路の境界
22 流路基板
24 電極基板
24A 溝
24B 窪み
24C 間隙
26 開口基板
26A 開口
28 凸状基板
28A 凸部
30 端子
DESCRIPTION OF SYMBOLS 10 Liquid flow path 10A Inlet 10B Discharge port 12 Gas flow path 12A Gas discharge flow path 12B Discharge port 14 Gas 16 Electrode 16A Exposed portion 18 Electrolyte 20 Liquid flow path and gas flow path boundary 22 Flow path substrate 24 Electrode substrate 24A Groove 24B Dimple 24C Gap 26 Open substrate 26A Open 28 Convex substrate 28A Convex portion 30 Terminal

Claims (6)

電解液が流液する液体流路と、
前記液体流路の幅方向端部に接触して配設された気体流路であって、前記液体流路との境界面の近傍において前記液体流路で流液する電解液と気液界面を形成するための気体流路と、
前記液体流路及び/又は気体流路の内壁の少なくとも一部を構成するように配設され、前記電解液の電気分解を起こすための一対の電極であって、少なくとも一部が前記電解液と接触し、且つ前記電解液との接触領域全域が前記液体流路及び前記気体流路の境界から100μm以内に位置する一対の電極と、
を具備することを特徴とする電気分解セル。
A liquid flow path through which the electrolyte flows,
A gas flow path disposed in contact with a width direction end of the liquid flow path, wherein an electrolyte and a gas-liquid interface flowing in the liquid flow path in the vicinity of a boundary surface with the liquid flow path A gas flow path for forming;
A pair of electrodes arranged to constitute at least a part of an inner wall of the liquid flow path and / or the gas flow path, and for causing electrolysis of the electrolytic solution, at least a part of which is the electrolyte and A pair of electrodes that are in contact with each other and the entire contact area with the electrolytic solution is located within 100 μm from the boundary surface of the liquid channel and the gas channel;
An electrolysis cell comprising:
前記気体流路及び前記液体流路の断面が矩形で構成され、前記気体流路が前記液体流路よりも厚みが薄く、前記気体流路内壁における前記電解液に対する接触角が90°以上である、ことを特徴とする請求項1に記載の電気分解セル。 The gas channel and the liquid channel have a rectangular cross section, the gas channel is thinner than the liquid channel, and the contact angle of the gas channel inner wall with the electrolyte is 90 ° or more. The electrolysis cell according to claim 1. 前記気体流路及び前記液体流路の断面が矩形で構成され、前記気体流路が前記液体流路よりも厚みが厚く、前記液体流路内壁における前記電解液に対する接触角が90°以下である、ことを特徴とする請求項1に記載の電気分解セル。 The gas channel and the liquid channel have a rectangular cross section, the gas channel is thicker than the liquid channel, and the contact angle of the inner wall of the liquid channel with respect to the electrolyte is 90 ° or less. The electrolysis cell according to claim 1. 前記一対の電極の幅は、100μm以下であることを特徴とする請求項1に記載の電気分解セル。   The electrolysis cell according to claim 1, wherein the pair of electrodes has a width of 100 μm or less. 前記電気分解の反応が、水が酸素と水素に分解される反応であることを特徴とする請求項1に記載の電気分解セル。   The electrolysis cell according to claim 1, wherein the electrolysis reaction is a reaction in which water is decomposed into oxygen and hydrogen. 請求項1〜5のいずれか1項に記載した電気分解セルを用い、前記一対の電極により前記電解液を電気分解する、ことを特徴とする電気分解方法。   An electrolysis method using the electrolysis cell according to any one of claims 1 to 5, wherein the electrolytic solution is electrolyzed by the pair of electrodes.
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JP3798276B2 (en) * 2001-08-16 2006-07-19 三菱電機株式会社 Electrochemical element and electrochemical element apparatus
JP2004069499A (en) * 2002-08-06 2004-03-04 Canon Inc Liquid transfer device and chemical analyzer using the same
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WO2016063206A1 (en) 2014-10-20 2016-04-28 Ecole Polytechnique Federale De Lausanne (Epfl) Membrane-less electrolyzer
EP3209817A1 (en) * 2014-10-20 2017-08-30 Ecole Polytechnique Fédérale de Lausanne (EPFL) Membrane-less electrolyzer

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