JP4840254B2 - X-ray inspection equipment - Google Patents

Description

  The present invention captures X-ray fluoroscopic images of various samples, and displays an X-ray inspection apparatus (X-ray fluoroscopy) that displays the X-ray fluoroscopic images taken or a plurality of X-ray fluoroscopic images taken. Apparatus and X-ray CT apparatus).

  An X-ray inspection apparatus that performs a fluoroscopic inspection of various samples should be inspected between an X-ray generator and an X-ray detector that are arranged vertically with the X-ray generator and the X-ray detector facing each other. A sample is placed and an X-ray fluoroscopic image of the sample is detected by an X-ray detector. The sample is generally placed on a table assembled on an XY moving stage movable in the X-axis direction and the Y-axis direction that intersect perpendicularly on a horizontal plane, and a desired observation point in the sample is detected by an X-ray detector. Positioning to keep within the field of view.

  FIG. 7 and FIG. 8 show an example of a table of a conventional X-ray inspection apparatus, and a sample is placed between an X-ray generator A and an X-ray detector B that are vertically arranged facing each other. A table 1 for placing C is arranged. The table 1 is assembled to an XY moving stage S that can move in the X-axis and Y-axis directions that intersect at right angles on a horizontal plane. That is, the table 1 is attached to a pair of left and right parallel X-axes 2 and 2 so as to be movable in the axial direction. 3 is attached so as to be movable along the axial direction. Accordingly, the table 1 itself forms an X-axis direction moving stage, and the X-axis 2 that supports the table 1 and the side frames 8 and 8 that connect the front and rear slide members 4 and 4 have a substantially square frame shape in the Y-axis direction moving stage. Is forming.

The X-axis direction moving stage, that is, the movement of the table 1 is performed by the screw shaft 5 that is rotated by the motor M1 and the screw receiving portion 6 that is attached to the table 1 and meshes with the screw shaft 5, and The movement is performed by a screw shaft 7 that is rotated by a motor M2 and a screw receiving portion 9 that is attached to the side frame 8 and meshes with the screw shaft 7. The table 1 is formed with an opening 1c in which a central portion of the table is greatly cut out so that X-rays can be transmitted. It is blocked. Although not shown, the entire table including the X axis and the Y axis can be moved up and down by the lifting mechanism for the purpose of making the magnification of the X-ray fluoroscopic image obtained by the X-ray detector variable. There is also a case.
JP 2005-43275 A

  In the X-ray inspection apparatus shown in the above example, when the sample to be inspected is relatively small in plan, the X-ray transmission opening 1c of the table 1 serving as the X-axis direction moving stage can be made small. However, if the sample is large in plan, such as a large substrate, the opening must be enlarged, resulting in a form like a rectangular frame and lower table rigidity. . In order to increase the rigidity of the table, it is necessary to enlarge the entire table, and there are problems in terms of weight reduction and space.

In addition, when moving a flat rectangular frame-shaped moving body such as the above table or Y-axis direction moving stage along the left and right rails, if the rigidity of the moving body is low, a force to deform into a parallelogram is received. In addition to causing adverse effects on smooth running, deformation is likely to occur. In particular, when the screw shafts 5 and 7 for moving to a position biased to one end side are provided like the above-described table and the Y-axis direction moving stage, this tendency is easily received.
Accordingly, the present invention provides a simple mechanism using a rope that can prevent a deformation when the X-axis direction moving stage and the Y-axis direction moving stage in the X-ray inspection apparatus move and can smoothly move the stage. The purpose is to provide a simple structure.

In order to solve the above problems, the present invention takes the following technical means. That X-ray inspection apparatus according to the present invention, and the X-ray generator and the X-ray detector are arranged vertically so as to face the sample by the table at right angles in the horizontal plane placed to be examined therebetween In an X-ray inspection apparatus assembled on an XY moving stage that can move in the intersecting X axis and Y axis directions, the X axis moving stage and / or the Y axis moving stage of the XY moving stage are The rope is fastened to the left and right sides by the at least one end rope on the left and right sides perpendicular to the moving direction of the stage, and the other end is secured to the right side so as to maintain a tension state. Is arranged such that the vicinity of both ends of the rope is along the left and right sides by changing the direction of the rope with a pulley attached to the fixed frame portion of the device, Rope end of the square is reversed by the reversing pulley to the other rope end attached to the fixed frame of the frame of the device is extended in the opposite direction, during the stage movement, one side of the right and left side portions Is formed so as to be synchronously pulled in the moving direction by the other side portion .

Here, the X-axis direction moving stage refers to the table itself that moves along the X-axis direction.

The Y-axis direction moving stage refers to the X axis that moves along the Y axis direction, the table on the X axis, and the entire member attached thereto.

  According to the present invention, with the movement of the X-axis direction moving stage or the Y-axis direction moving stage, two points on the left and right side portions orthogonal to the moving direction are synchronously pulled in the moving direction by the endless rope. It is possible to move with a good balance between left and right, which can alleviate the deformation of the square frame-shaped moving stage during movement, and can smoothly travel.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2 show a first embodiment of the present invention, FIG. 3 shows a second embodiment of the present invention, and FIG. 4 shows a third embodiment of the present invention. FIG. 5 is a plan view obtained by slightly modifying the embodiment shown in FIG. 4, and FIG. 6 is a perspective view showing still another embodiment of the present invention.

  In the first embodiment shown in FIG. 1 and FIG. 2, a sample is placed between an X-ray generator A and an X-ray detector B (see FIG. 7) which are vertically arranged in a state of being opposed to each other. Table 1 is arranged. The table 1 is assembled to an XY moving stage S that can move in the X-axis and Y-axis directions that intersect at right angles on a horizontal plane. Since the basic configuration of the XY moving stage S is the same as that described with reference to FIGS. 7 and 8, the same components will be described with the same reference numerals.

  The table 1 is attached to a pair of left and right parallel X-axes 2 and 2 so as to be movable in the axial direction. The X-axis 2 and 2 are slide members 4 that support both ends of the pair of left and right Y-axes 3 and 3. Is attached to be movable along the axial direction. Accordingly, the table 1 itself forms an X-axis direction moving stage, and the X-axis 2 that supports the table 1 and the side frames 8 and 8 that connect the front and rear slide members 4 and 4 have a substantially square frame shape in the Y-axis direction moving stage. Is forming. One of the Y-axes 3 and 3 is held at both ends by fixed frames 15a and 15d connected to a fixed frame portion such as a frame of the apparatus, and the other is held by fixed frames 15b and 15c.

  The movement of the X-axis direction moving stage is performed by a screw shaft 5 that is rotated by a motor M1 and a screw receiving portion 6 that is attached to the table 1 and meshes with the screw shaft 5. The movement of the Y-axis direction moving stage is performed by a motor. This is performed by a screw shaft 7 that is rotated by M 2 and a screw receiving portion 9 that is attached to the side frame 8 and meshes with the screw shaft 7. The table 1 is formed with an opening 1c in which the central portion of the table is greatly cut out so that X-rays can be transmitted. The opening 1c is made of a thin plate 10 made of X-ray transmissive material such as aluminum or carbon. It is blocked.

In this embodiment, the movement direction of the Y-axis direction moving stage formed in a square frame shape by the X axis 2 and 2 supporting the table 1 and the left and right side frames 8 and 8 connecting the front and rear slide members 4 and 4, Ends of one end-like rope 11 are fixed to side surfaces orthogonal to each other, that is, left and right side frames 8 and 8 by fixing pins 12a and 12b.
One end portion (right side portion in the figure) of the rope 11 extends from the fixed pin 12a along the right frame 8 in the moving direction of the Y axis direction moving stage, and the other end portion (left side portion in the figure) extends from the fixed pin 12b. The right end of the rope is extended in the direction opposite to the extending direction and is reversed by a reversing pulley 13 provided on the fixed frame 15c. The intermediate portion of the rope 11 is held in a tensioned state by the two pulleys 14a and 14b attached to the fixed frame portion at the remote point, whereby the rope 11 is arranged in a U shape in plan view.
That is, the rope 11 extending from the fixed pin 12a is bent at a right angle toward the left Y-axis 3 by a pulley 14a attached to the fixed frame 15a that supports the right Y-axis 3, and its extension is further extended. The idler pulley 14b attached to the fixed frame 15b is bent at a right angle toward the reversing pulley 13 and is inverted by the reversing pulley 13 so that its end is fixed to the fixing pin 12b.

  With such a configuration, when the square frame-shaped Y axis direction moving stage moves along the Y axes 3 and 3 by driving the motor M2, the fixing pins 12a and 12b attached to the left and right side frames 8 and 8 are also simultaneously moved in the same direction. Move to. Along with this movement, the two points of the fixing pins 12a and 12b are pulled in the moving direction in a balanced manner synchronously by the rope 11 connected to the fixing pins 12a and 12b. It is possible to mitigate the deformation of the rectangular frame-shaped moving stage during movement, and it is possible to run smoothly.

  In the above embodiment, an example using a single rope 11 has been shown. However, as shown in FIG. 3, a rope 11 a having the same configuration as that of the rope 11 may be arranged symmetrically with the rope 11. . Thereby, the effect mentioned above can further be heightened by the two ropes 11 and 11a.

Moreover, in this invention, the combination of the rope 11 and a pulley can also be comprised as shown in FIG. In this embodiment, the rope 11 extending from the fixing pin 12a attached to the right frame 8 is reversed by a reversing pulley 16 attached to a fixed frame portion such as a frame of the apparatus, and is substantially on the extension line of the left Y-axis 3. The pulley 18 is obliquely extended toward the idler pulley 18, and is bent toward the fixed pin 12 b on the left side by the idler pulley 18 and is fixed to the fixed pin 12 b. In the case of this embodiment as well, the two points of the fixed pins 12a and 12b are synchronously moved in a balanced manner by the rope 11 connected to the fixed pins 12a and 12b as the Y-axis direction moving stage moves. Therefore, the deformation at the time of movement of the square frame-shaped Y-axis direction moving stage can be reduced. In this case, two pulleys can be omitted.
However, in this embodiment, the obliquely extended portion of the rope 11 may enter the region of the opening 1c of the table 1 when the Y-axis direction moving stage is moved, which may cause harmful effects on X-ray transmission. Therefore, as shown in FIG. 5, another pulley 17 is provided at the midpoint between the left and right Y-axes 3 and 3 so as to prevent a part of the rope 11 from entering the opening 1 c of the table 1. Also good. In this case, since the rope 11 is gently bent at the section of the pulley 17 at the midpoint between the left and right Y-axes 3 and 3, the pulley 11 is omitted and a curved fixed guide surface is used. You can also.

FIG. 6 shows an example in which the configuration of the rope according to the present invention is implemented on an X-axis direction moving stage. In this embodiment, the end portions of one end of the rope 11 on the left and right side surfaces 1a and 1b which are substantially orthogonal to the moving direction of the table 1 serving as an X-axis direction moving stage, as in the previous embodiment. Are fixed by fixing pins 20a and 20b.
One end portion (upper portion in the figure) of the rope 11 extends from the fixed pin 20a along the right side surface 1a of the table 1 and is bent at a right angle by a pulley 21a attached to the slide member 4. Further, the extension portion is folded at a right angle in the direction of the table 1 by a pulley 21 b attached to the other slide member 4 and extended to the reversing pulley 22 attached to the slide member 4 fixed to the right frame 8. The end portion is fixed to the fixed pin 20b by being reversed by the reversing pulley 22.
Accordingly, in this embodiment, as in the previous embodiment, when the table 1 moves along the X-axis 2 and 2 by driving the motor M1, the fixing pins 20a and 20b attached to the left and right side surfaces 1a and 1b are also moved. Move in the same direction at the same time. Along with this movement, the two points of the fixing pins 20a and 20b are pulled in the movement direction in a balanced manner synchronously by the rope 11 connected to the fixing pins 20a and 20b. Thereby, the deformation of the table, that is, the X-axis direction moving stage is reduced, and the table can be smoothly moved along the X-axis 2 and 2.

  In the above embodiment, the case where the rope 11 is attached to the X-axis direction moving stage and the example where the rope 11 is attached to the Y-axis direction moving stage are individually shown. However, the rope 11 is attached to both the moving stages. Of course it is possible. In addition, the present invention is not limited to the embodiment described above, and it is needless to say that various aspects are included without departing from the spirit of the present invention.

  The present invention can be used for an X-ray fluoroscopy device or an X-ray inspection device equipped with an open or sealed X-ray tube.

The perspective view which shows the structure of the XY movement stage of the X-ray inspection apparatus which is one Embodiment of this invention. The top view of the said XY movement stage. The perspective view which shows the other Example of the XY movement stage in this invention. The top view which shows other Example of the XY movement stage in this invention. The top view which added some corrections to the Example shown in FIG. The perspective view which shows another Example of the XY movement stage in this invention. Schematic explanatory drawing of the conventional X-ray inspection apparatus. The perspective view of the XY movement stage in the conventional X-ray inspection apparatus.

Explanation of symbols

A: X-ray generator B: X-ray detector S: XY movement stage 1: Table 2: X axis 3: Y axis 11: Rope
13, 16, 22: Inverted pulleys 14a, 14b, 17, 18, 21a, 21b: idle pulleys

Claims (1)

An X-ray generator and an X-ray detector are vertically arranged in a state of being opposed to each other, and a table on which a sample to be examined is placed can move in the X-axis and Y-axis directions perpendicular to each other on a horizontal plane. In the X-ray inspection apparatus assembled on the XY moving stage, the X-axis direction moving stage and / or the Y-axis direction moving stage of the XY moving stage are perpendicular to the moving direction of the stage. by at least one closed end shaped rope one end of the rope to the left side in section and the other end to the right side, is fastened to keep taut,
The rope is arranged such that portions near both ends of the rope are along the left and right side portions by changing the direction of the rope with a pulley attached to a fixed frame portion of the device,
Furthermore, one of the rope ends is inverted by a reversing pulley that extends in a direction opposite to the other rope end and is attached to a fixed frame of the frame of the device,
An X-ray inspection apparatus formed such that when the stage is moved , one of the left and right sides is pulled in the moving direction synchronously by the other side .

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