JP4841933B2 - Scribing equipment - Google Patents

Description

  The present invention relates to a scribing apparatus for forming a scribe groove on the surface of a brittle material such as a quartz plate or a wafer.

Conventionally, as a method for cleaving a brittle material, a cleaving device has been proposed in which a scribe groove is formed on the surface of the brittle material by a scribe device, and the brittle material is cleaved by a blade along the scribe groove. Conventionally, the following scribing devices have been proposed. That is, this conventional scribing apparatus includes a table that supports a workpiece, a movable support that is moved in the horizontal direction and moved up and down by a horizontal movement mechanism and a lifting mechanism, and a vertical axis with respect to the movable support. A bracket mounted rotatably; and a scribe blade mounted rotatably around the horizontal axis at a position displaced from the vertical axis by a predetermined distance in the horizontal direction relative to the bracket.

In the conventional scribing device, the scribe blade swings around the vertical axis on the movable support together with the bracket at a position displaced from the vertical axis of the movable support. By controlling the attitude, a linear scribe groove can be formed. However, when the scribe blade is constantly swung, the scribe groove may not be linear, and there is a problem that the processing accuracy of the scribe groove is lowered.

  An object of the present invention is to provide a scribing apparatus capable of improving the processing accuracy of a scribe groove.

In order to solve the above problems, the invention according to claim 1 is characterized in that a movable support is mounted above a table that supports a workpiece, and a bracket is attached to the lower end of the movable support via a bearing mechanism. It is mounted so as to be reciprocally rotatable around a vertical axis, and a scribe blade is attached to the bracket at a position displaced by a predetermined distance in the horizontal direction from the vertical axis, and the table or scribe blade is moved in the horizontal direction to move the upper surface of the workpiece. In the scribing apparatus in which a scribe groove is formed in the upper surface of the bracket, a lock mechanism is provided for preventing the bracket and the scribe blade from swinging horizontally around the vertical axis with respect to the movable support. Is connected to a support shaft, and the support shaft is rotatably supported via a bearing in a hole formed in a lower end portion of the movable support, and the lock mechanism The air cylinder is provided with a piston rod pressed against the upper end surface of the support shaft, and pressure air is supplied from a pressure air supply source to the piston side cylinder chamber of the air cylinder via an air supply path. The gist of the present invention is that the rod side cylinder chamber of the air cylinder accommodates a biasing member that always biases the piston rod to the retracted position .

Invention of Claim 2 is comprised in Claim 1 in which the said movable support body is comprised by the movable support rod inserted in the inside of the attachment cylinder attached to the saddle moved to an up-down direction by the raising / lowering mechanism, The gist of the invention is that the air cylinder is configured such that pressure air is supplied to a piston-side cylinder chamber of the air cylinder from an air supply path formed in the mounting cylinder and the movable support rod.

According to a third aspect of the present invention, in the first aspect, a support shaft is coupled to the upper surface of the bracket, and the support shaft is rotatable via a bearing with respect to a mounting hole formed in a lower end portion of the movable support body. The lock mechanism is configured by an air cylinder having a piston rod pressed against the upper end surface of the support shaft, and the piston rod is always prevented from swinging in the piston-side cylinder chamber of the air cylinder. An urging member for urging the position is accommodated, and the rod side cylinder chamber of the air cylinder is configured to be supplied with pressure air from a pressure air supply source through an air supply path. The gist is that the piston rod is pressed by a member to a position that prevents the bracket from swinging.

The gist of a fourth aspect of the present invention is that, in any one of the first to third aspects, a scribe blade is rotatably attached to a lower portion of the bracket.

  According to the present invention, a lock mechanism is provided that prevents the bracket and the scribe blade from swinging in the horizontal direction around the vertical axis with respect to the movable support. For this reason, in the step of forming the scribe groove, the lock mechanism is operated in a state where the scribe groove is formed by a predetermined length and the scribe blade is not oscillated and moves in a linear direction. In addition, the swing of the scribe blade can be prevented. As a result, the scribe groove can be formed in a straight line with high accuracy in the operation of forming the scribe groove for the workpiece.

Hereinafter, an embodiment of a scribing apparatus embodying the present invention will be described with reference to FIGS. 1 and 2.
As shown in FIG. 1, the lower portion of the scribing apparatus, the workpiece support table 11 So設, on the upper surface of the workpiece support table 11, the workpiece 12 scribe groove 12a is formed is mounted, word over The workpiece 12 is sucked and held at a predetermined position by a suction device (not shown) provided on the hook support table 11. The work support table 11 is reciprocated in the X-axis (horizontal) direction, that is, the scribe direction by the X-axis moving mechanism 13.

Wherein the upper portion of the scribing apparatus, the saddle 14, the X-axis direction to be movable, and the Y-axis moving mechanism 16 by the Z-axis moving mechanism 15 as an elevating mechanism which is illustrated in simplified Z-axis (vertical) direction It is reciprocably mounted in the Y-axis (horizontal) direction perpendicular to the. The front surface of the saddle 14, the attachment cylinder 21 having a cylindrical shape is mounted to direct the vertical direction. A movable support shaft 22 as a movable support is inserted into the center hole of the mounting cylinder 21 so as to protrude downward. The mounting cylinder 21 and the movable support shaft 22, so as not to relatively move by the relative movement prevention mechanism (not shown) to the central axis O1 direction of the movable support shaft 22, and, about the central axis O1 by the relative rotation prevention mechanism (not shown) It is assembled so that relative rotation is impossible.

  A small-diameter hole 23 and a large-diameter hole 24 are formed vertically and concentrically at the lower end of the movable support shaft 22, and a scribe blade unit 26 is attached to the large-diameter hole 24 via a radial ball bearing 25. ing. The scriber blade unit 26 includes a support shaft 27 that is supported in the large-diameter hole 24 so as to be rotatable around the same vertical axis O1 ′ as the central axis O1, and a bracket 28 that is coupled to the lower end of the support shaft 27. And a scribe blade 30 supported at the lower end of the bracket 28 by a connecting pin 29 so as to be rotatable around a horizontal axis O2. The horizontal axis O2 of the scribe blade 30 is displaced by a predetermined distance E in the horizontal direction from the vertical axis O1 ′. The support shaft 27 is engaged with a C-shaped retaining ring C1 for preventing the support shaft 27 from coming off from the radial ball bearing 25, and the radial ball bearing 25 is pulled out from the inner peripheral surface of the large-diameter hole 24. A C-type retaining ring C2 is prevented. In this embodiment, the bearing mechanism K1 of the bracket 28 is constituted by the large-diameter hole 24, the radial ball bearing 25, the support shaft 27, and the like formed in the mounting cylinder 21.

  With the above configuration, the bracket 28 and the scribe blade 30 of the scribe blade unit 26 are swung in the horizontal (Y-axis) direction around the vertical axis O1 ′ as shown in FIG.

  Inside the movable support shaft 22, a lock mechanism K <b> 2 for preventing the rotation of the support shaft 27 and preventing the scribe blade unit 26 from swinging is provided. The lock mechanism K2 will be described. A cylinder chamber 31 is formed on the movable support shaft 22 so as to be positioned in the vicinity of the upper portion of the small-diameter hole 23. A piston rod 32 is accommodated in the cylinder chamber 31. Yes. The piston rod 32 includes a piston 33, a rod 34 connected to the lower surface of the piston 33, and a seal ring 35 accommodated in an annular groove formed on the outer peripheral surface of the piston 33. A lower end portion of the rod 34 protrudes downward from an insertion hole 36 formed in the partition wall of the small diameter hole 23 and the cylinder chamber 31, and can contact the upper end surface of the support shaft 27.

  The cylinder chamber 31 is partitioned by the piston 33 into a piston-side cylinder chamber R1 located at the upper portion and a rod-side cylinder chamber R2 located at the lower portion. The rod-side cylinder chamber R2 includes a coil spring that urges the piston rod 32 upward and urges the lower end surface of the rod 34 away from the upper end surface of the support shaft 27, that is, the unlocking direction. A biasing member 37 is accommodated. The rod side cylinder chamber R <b> 2 is communicated with the atmosphere by a communication path 38 formed in the movable support shaft 22.

Then, by supplying pressurized air to the piston-side cylinder chamber R1, the piston rod 32 is moved downward, thereby scribing blade is pressed against the lower end surface of the rod 34 on the upper end face of the support shaft 27 An air supply mechanism that supplies pressure air for locking the unit 26 will be described.

An air supply passage 39 is formed at the center of the movable support shaft 22 as an air supply passage having a distal end communicating with the piston-side cylinder chamber R1 and a proximal end opened to the outer peripheral surface of the movable support shaft 22. . An annular groove 40 is formed on the outer peripheral surface of the movable support shaft 22 over the entire circumference, and the base end of the air supply passage 39 is opened in the groove 40.

The central hole of the mounting cylinder 21, the so as to correspond to the groove 40, is formed the groove portion 41 as an air supply path circular, from the air inlet 42 formed in the mounting cylinder 21 in the groove portion 41 Pressure air is introduced. Pressure air is supplied to the air inlet 42 through a pressure air supply source 43, a pipe 44 as an air supply path, and an electromagnetic on-off valve 45 connected to the pipe 44. When the electromagnetic on-off valve 45 is switched from the closed port 45a to the open port 45b, the pressure air is supplied from the pressure air supply source 43 through the pipe 44, the air inlet 42 and the air supply passage 39 to the piston side cylinder chamber R1. The piston rod 32 is pushed downward against the urging force of the urging member 37, and the scriber blade unit 26 is locked so as not to swing.

Next, the operation of the scribing apparatus configured as described above will be described.
In FIG. 1, the piston rod 32 is lifted upward by the urging member 37 of the air cylinder, the lower end surface of the rod 34 is separated from the upper end surface of the support shaft 27, and the electromagnetic on-off valve 45 is demagnetized so that the closed port 45a The state switched to is shown. In this state, the work 12 is placed on the upper surface of the work support table 11, and the work 12 is sucked and held at a predetermined position by a suction device (not shown). Then, the Z-axis moving mechanism 15 is operated to lower the saddle 14, the mounting cylinder 21, and the movable support shaft 22 to a predetermined height position. This position Ru set position der to be able to scribe the blade 30 of the scribing cutter unit 26 to form a scribe groove 12a to the surface of the workpiece 12.

Next, by operating the X-axis moving mechanism 13, the workpiece support table 11 and the workpiece 12 are linearly moved in the horizontal direction, that is, in the scribe direction X (left direction) shown in FIG. Thus, the scribe groove 12 a is formed on the upper surface of the workpiece 12 by the scribe blade 30 of the scribe blade unit 26. In the initial stage of the process of forming the scribe groove 12a with respect to the workpiece 12, the bracket 28 and the scribe blade 30 swing in the horizontal direction around the vertical axis O1 ′ of the support shaft 27, so FIGS. 2 (a) and 2 (b). As shown in FIG. 3, the scribe groove 12a is not linear but is in a meandering state. Then, as shown in FIG. 2 (c), after the scribe groove 12a is formed for a predetermined length, the bracket 28 and the scribe blade 30 are moved to a position directed in the linear direction without swinging, A linear scribe groove 12a is formed.

  As shown in FIG. 2C, when the scribe groove 12a is stably formed in a straight line, the electromagnetic on-off valve 45 is switched from the closed port 45a to the open port 45b, and the pressure air Pressure air is supplied from the supply source 43 into the piston-side cylinder chamber R <b> 1 through the pipe 44, the air inlet 42, and the air supply passage 39. Then, the piston rod 32 is moved downward against the urging force of the urging member 37, and the lower end surface of the rod 34 is pressed into contact with the upper end surface of the support shaft 27. As a result, the scriber blade unit 26 is prevented from swinging in the horizontal direction about the vertical axis O1 ′. In this locked state, the piston rod 32 is held non-rotatable by the frictional resistance of the seal ring 35 against the inner peripheral surface of the cylinder chamber 31, and the frictional contact between the upper end surface of the support shaft 27 and the lower end surface of the rod 34. The rod 34 and the support shaft 27 are held by being prevented from relative rotation.

  In the locked state of the scribe blade unit 26, when the operation of forming the single scribe groove 12a is finished, the Z-axis moving mechanism 15 is operated, the scribe blade unit 26 is raised, and the X-axis moving mechanism 13 is It is actuated and moved to the scribe start position. Thereafter, the Y-axis moving mechanism 16 is operated, and the scribe blade unit 26 is moved in the Y-axis direction to the next formation position of the scribe groove 12a. Then, the Z-axis moving mechanism 15 is actuated again, the scriber blade unit 26 is moved downward, and the machining operation of the second scribe groove 12a is performed. In this way, a plurality of scribe grooves 12a are sequentially formed on the upper surface of the work 12, and the work support table 11 is turned 90 degrees by a turning mechanism (not shown) to form a plurality of scribe grooves 12a. The scribe grooves 12a are formed on the upper surface of the work 12 in a grid pattern in plan view. The workpiece 12 is cleaved into a plurality of quadrangular elements along the scribe grooves 12a by a cleaving device.

According to the scribing apparatus of the above embodiment, the following effects can be obtained.
(1) In the above embodiment, the bracket 28 of the scribe blade unit 26 attached to the lower end portion of the movable support shaft 22 and the lock mechanism K2 for preventing the scribe blade 30 from swinging in the horizontal direction are provided. For this reason, in the middle of the process of forming the scribe groove 12 a for the work 12, the scribe blade unit 26 is locked to the movable support shaft 22, so that the plurality of scribe grooves 12 a can be linearly stabilized with respect to the work 12. Thus, the processing accuracy of the scribe groove 12a can be improved.

  (2) In the above embodiment, as the lock mechanism K2, the pressure air is supplied from the pressure air supply source 43 into the piston-side cylinder chamber R1 through the pipe 44, the air inlet 42, the groove 41, and the air supply passage 39. I did it. For this reason, flexible piping can be reduced and pressure air can be stably supplied to the piston side cylinder chamber R1 of the lock mechanism K2.

In addition, you may change the said embodiment as follows.
That is, as shown in FIG. 3, the urging member 37 is accommodated in the piston-side cylinder chamber R1, and the communication passage 38 is formed on the piston-side cylinder chamber R1 side, and the air supply passage 39 is formed in the rod-side cylinder chamber R2. You may make it supply the pressure air from. In this case, the rod 34 of the piston rod 32 is moved downward by the urging member 37 and the support shaft 27 is always pressed, so that the electromagnetic on-off valve 45 is switched to the open port 45b. Then, the machining operation of the scribe groove 12a is started, and after the scribe groove 12a is formed for a predetermined length, the electromagnetic on-off valve 45 is switched to the closed port 45a and is pressed below the piston rod 32 by the biasing member 37. Then, the scribe blade unit 26 is locked.

  In this other example, since the scriber blade unit 26 is always locked by the biasing member 37, the amount of pressure air consumed can be reduced as compared with the above embodiment, and the scribe groove 12a can be processed. Cost can be reduced.

The center part longitudinal cross-sectional view of the scribing apparatus of this invention. (A), (b) and (c) are top views explaining operation | movement of the scribe blade unit of a scribe apparatus. The fragmentary longitudinal cross-section which shows another example of this invention.

Explanation of symbols

K1 ... Bearing mechanism, K2 ... Lock mechanism, O1 '... Vertical axis, R1 ... Piston side cylinder chamber, R2 ... Rod side cylinder chamber, 11 ... Table, 12 ... Workpiece, 12a ... Scribe groove, 13 ... X axis movement mechanism, DESCRIPTION OF SYMBOLS 14 ... Saddle, 15 ... Z-axis moving mechanism, 16 ... Y-axis moving mechanism, 21 ... Mounting cylinder, 22 ... Movable support, 24 ... Large diameter hole, 25 ... Bearing, 27 ... Support shaft, 28 ... Bracket, 30 Scribe blade, 32, 34 piston rod, 37 biasing member, air supply passage 39 as an air supply path, 41 groove portion as an air supply path, 43 pressure air supply source , 44 as an air supply path Piping .

Claims (4)

A movable support is mounted above the table that supports the workpiece, and a bracket is mounted on the lower end of the movable support via a bearing mechanism so as to be capable of reciprocating rotation around a vertical axis. In a scribe device in which a scribe blade is attached at a position displaced by a predetermined distance in the horizontal direction from the vertical axis, and the table or scribe blade is moved in the horizontal direction to form a scribe groove on the upper surface of the workpiece.
A locking mechanism for preventing the bracket and scribing blade relative to the movable support to swing in the horizontal direction about the vertical axis is provided,
A support shaft is coupled to the upper surface of the bracket, the support shaft is rotatably supported via a bearing in a hole formed in a lower end portion of the movable support body, and the lock mechanism includes an upper end surface of the support shaft. An air cylinder having a piston rod that is pressed against the cylinder, and is configured such that pressure air is supplied to a piston-side cylinder chamber of the air cylinder from a pressure air supply source through an air supply path. The rod side cylinder chamber contains a biasing member that constantly biases the piston rod to the retracted position.   In Claim 1, the said movable support body is comprised by the movable support rod inserted in the inside of the attachment cylinder attached to the saddle moved to an up-down direction by the raising / lowering mechanism, and the said attachment cylinder is included in the said air cylinder. A scribing device characterized in that pressure air is supplied to a piston-side cylinder chamber of the air cylinder from an air supply path formed in the body and the movable support rod.   In claim 1, a support shaft is coupled to the upper surface of the bracket, the support shaft is rotatably supported via a bearing with respect to a mounting hole formed in a lower end portion of the movable support body, and the lock mechanism includes: The air cylinder includes a piston rod that is pressed against the upper end surface of the support shaft, and a biasing member that constantly biases the piston rod to a swing preventing position is provided in a piston-side cylinder chamber of the air cylinder. The rod-side cylinder chamber of the air cylinder is configured so that pressure air is supplied from a pressure air supply source through an air supply path, and the piston rod is always swung by the biasing member. It is comprised so that it may be pressed to the position which blocks | prevents, The scribing apparatus characterized by the above-mentioned.   The scribing device according to claim 1, wherein a scribing blade is rotatably attached to a lower portion of the bracket.

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