JP4842732B2 - Sheet peeling apparatus and sheet peeling method - Google Patents

Description

  The present invention relates to a sheet peeling apparatus and a sheet peeling method for peeling an unnecessary sheet portion from an original fabric in which cuts having a predetermined shape are formed in an adhesive sheet on the release sheet.

  Conventionally, for example, an apparatus described in Patent Document 1 is known as an apparatus for peeling this kind of unnecessary sheet portion. The apparatus of the same document uses a pressing roller (34A, 34B) as a means for peeling the sheet-like film (2b) affixed on the surface of the substrate (2) to the surface of the film (2b) with an adhesive tape ( 31A, 31B) is pressed, and the film (2b) is taken up together with the adhesive tape (31A, 31B). The reference numerals in parentheses are those used in Patent Document 1. The same applies to the following in this column.

  However, according to the apparatus of Patent Document 1, for example, when the unnecessary film portions are located at a predetermined interval on the film (2b) and these unnecessary film portions are to be continuously peeled off, the unnecessary film portions are disposed. Adhesive tape (31A, 31B) is bonded to the necessary film part in order to prevent the problem that the adhesive tape (31A, 31B) for peeling adheres to the necessary film part located between the next unnecessary film part It is necessary to prevent this, and at least a drive device that moves the adhesive tape pressing rollers (34A, 34B) up and down and a control device for controlling the drive device are necessary, and the device itself must be large. Moreover, there is a problem that the control becomes complicated.

JP-A-2001-89018

  The present invention has been made to solve the above-described problems, and the object of the present invention is to dispose the unnecessary sheet portion with a compact device configuration even if it is a raw fabric having unnecessary sheet portions formed discontinuously. An object of the present invention is to provide a sheet peeling apparatus and a sheet peeling method that can be wound up and do not require complicated control.

In order to achieve the above-mentioned object, the sheet peeling apparatus of the present invention has an adhesive sheet temporarily attached to the release sheet, and a cut of a predetermined shape is formed on the adhesive sheet at a predetermined interval from the original fabric. a sheet peeling apparatus for peeling away the inner as unnecessary sheet portion, the sheet peeling apparatus, a conveying means for conveying the original sheet, the peeling tape feeding the peeling tape for peeling off the unnecessary sheet portion feeding And a pressing unit that presses the peeling tape against the unnecessary sheet portion, and the pressing unit includes a convex roller that has a convex portion on an outer periphery and is provided so that the peeling tape can be wound around. , by rotation of the convex roller, in synchronization with intervals of the convex portion is conveyed in the required seat portion adhered to the peeling tape to the unnecessary sheet portion, the peeling tape The unnecessary sheet portion can be peeled away from the release sheet, and the convex portion has a front end and a rear end in the rotational direction of the convex roller, and the front end is radially outward from the outer peripheral surface of the convex roller. It has a convex curved surface shape that rises and gradually approaches the outer peripheral surface of the convex roller as it goes from the front end to the rear end .

  The pressing start shape of the convex portion may be substantially the same shape as the shape of the front end portion in the traveling direction of the unnecessary sheet portion.

  The pressing start position of the convex portion against the unnecessary sheet portion may be a position ahead of the front end portion in the traveling direction of the unnecessary sheet portion.

  Furthermore, it may have a winding means for winding the unnecessary sheet portion together with the peeling tape, and may be configured to wind up the peeling tape fed out from the pressing means with a predetermined tension.

In order to achieve the above object, the sheet peeling method of the present invention is such that an adhesive sheet is temporarily attached to a release sheet, and a cut of a predetermined shape is formed on the adhesive sheet at a predetermined interval from the original fabric. A sheet peeling method for peeling an inner side as an unnecessary sheet portion , wherein the sheet peeling method conveys the original fabric, pays out a peeling tape for peeling the unnecessary sheet portion, and has a convex portion on the outer periphery. wound around the roller, by rotation of the convex roller, in synchronization with intervals of the convex portion is conveyed in the unnecessary sheet portion adhering a peeling tape to the unnecessary sheet portion away the peeling tape from the release sheet it is adapted to peel the unnecessary sheet portion by the convex portion has a front end and a rear end in the rotation direction of the convex roller, the front end or the outer circumferential surface of the convex roller With rising radially outward, characterized in that it gradually becomes convex curved shape to approach the outer peripheral surface of the convex roller according toward the rear end from the front end.

  In the sheet peeling apparatus and sheet peeling method of the present invention, the release sheet includes, for example, the release sheet 1 of the first raw fabric 3 and other sheets described in the embodiment of the present invention, The adhesive sheet includes the pressure-sensitive adhesive sheet 2 of the first original fabric 3 and other sheets.

  In the present invention, as described above, the pressing means having the convex portion rotates in synchronization with the interval at which the unnecessary sheet portion is conveyed, and the convex portion comes into contact with the unnecessary sheet portion. Since it has a structure that presses against the unnecessary sheet part and winds up the unnecessary sheet part together with the peeling tape, when pressing the peeling tape against the unnecessary sheet part, a drive device that moves the convex part up and down and control to control it The apparatus can be omitted, and an effect of being able to peel off an unnecessary sheet portion without requiring complicated control with a compact device configuration can be obtained.

  Furthermore, when the pressing start shape of the convex portion is substantially the same as the shape of the front end portion in the advancing direction of the unnecessary sheet portion, when the convex portion presses the peeling tape against the unnecessary sheet portion, the pressing start region is the unnecessary sheet portion. Since the tape can be attached to the end of the unnecessary sheet portion, the peeling tape can be firmly adhered to the end region of the unnecessary sheet portion, and reliable peeling can be realized.

  Further, by setting the pressing start position of the convex portion to the unnecessary sheet portion to a position ahead of the front end portion in the advancing direction of the unnecessary sheet portion, the peeling tape can be securely bonded to the end portion of the unnecessary sheet portion. , Peeling failure can be avoided.

  Furthermore, by providing a winding means for winding the unnecessary sheet portion together with the peeling tape and winding the peeling tape fed from the pressing means with a predetermined tension, the peeling tape expands and contracts due to the protrusion of the convex portion. Or fluttering can be prevented.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  1 is an overall configuration diagram of a sheet processing apparatus to which the present invention is applied, FIG. 2 is a perspective view of a first unnecessary sheet peeling portion in the sheet processing apparatus of FIG. 1, FIG. 3 is a partial sectional view of FIG. 1 is a perspective view of a sheet bonding portion in the sheet processing apparatus of FIG. 1, FIG. 5 is a partial cross-sectional view of FIG. 4, FIG. 6 is a perspective view of a second unnecessary sheet peeling portion in the sheet processing apparatus of FIG. It is explanatory drawing of the usage example of the sheet | seat processed with the 1 sheet processing apparatus.

  As shown in FIG. 1, the sheet processing apparatus M of the present embodiment includes a first processing unit M1 and a second processing unit M2, and the first processing unit M1 peels off unnecessary sheet portions and the like. In the part, sheets are bonded and unnecessary sheet portions are peeled off.

  The first processed portion M1 is a raw fabric 3 (see FIGS. 2 and 3) in which a belt-like pressure-sensitive adhesive sheet 2 (hereinafter referred to as “pressure-sensitive sheet 2”) is temporarily attached to a belt-like release sheet 1. The first raw fabric feeding means 4 for feeding out the opposite material is referred to as “first original fabric 3”, and the first notch forming means for forming a cut C1 having a predetermined shape in the fed first original fabric 3. 7, a peeling tape feeding means 9 for feeding the peeling tape 8 for peeling the unnecessary sheet portion 5 formed by the first cut forming means 7, and the fed peeling tape 8 as the unnecessary sheet. A pressing means 10 that presses against the portion 5 and a winding means 11 that winds the unnecessary sheet portion 5 together with the peeling tape 8 are provided.

  The first original fabric feeding means 4 is constituted by a support roller 6 that supports the first original fabric 3 wound in a roll shape, and the first original fabric 3 is converted into the first notch forming means 7. It is provided so that it can be fed out sequentially.

  The first cut forming means 7 includes a die cut roller 12 and a receiving roller 13, and a first original fabric 3 is passed between the die cut roller 12 and the receiving roller 13 so that the die cut roller 12 is not shown. Cuts C1 (see FIG. 2) having a predetermined shape reaching the release sheet 1 from the pressure sensitive sheet 2 side of the first original fabric 3 are formed at predetermined intervals by the cutter blade. The inside of the cut C1 formed in this way becomes an unnecessary sheet portion 5. The first original fabric 3 after the completion of the cutting is conveyed to the pressing means 10 via the guide roller R1.

  The peeling tape feeding means 9 is constituted by a support roller 15 that supports the peeling tape 8 wound in a roll shape, and is fed to the pressing means 10 via a guide roller R2. As shown in FIG. 2, an adhesive layer 16 is provided on one surface of the peeling tape 8 that is fed out.

  As shown in FIGS. 2 and 3, the pressing unit 10 includes a convex roller 18 having a convex portion 17 on the outer peripheral surface and a receiving roller 19. Between the convex roller 18 and the receiving roller 19, the first original fabric 3 conveyed from the first notch forming means 7 and the peeling tape 8 conveyed from the peeling tape feeding means 9 are passed. The convex portion 17 is configured to abut the adhesive layer 16 of the peeling tape against the unnecessary sheet portion 5 in synchronization with the interval at which the unnecessary sheet portion 5 is conveyed. That is, the rotational pitch of the lowest point 17B in FIG. 3 of the convex portion 17 and the rotational pitch of the die cut roller 12 of the first cut forming means 7 are set to be substantially the same. The convex roller 18 and the receiving roller 19 are rotationally driven by a motor (not shown).

  Further, as shown in FIG. 2, the pressing means 10 is configured such that the front end portion 17A of the convex portion 17 starts to press the unnecessary sheet portion 5 first, and the shape of the pressing surface is the unnecessary sheet portion. 5 has substantially the same shape as that of the front end portion 5A in the traveling direction. As a result, when the peeling tape 8 is pressed against the unnecessary sheet portion 5, the pressing start area can be attached exactly along the shape of the unnecessary sheet portion 5, so that the peeling tape 8 is attached to the end portion of the unnecessary sheet portion 5. Can adhere firmly to the area. Further, the pressing start position P of the convex portion 17 is adjusted to be a position ahead of the front end portion 5A in the traveling direction of the unnecessary sheet portion 5 as shown in FIG. Thereby, the tape 8 for peeling can be reliably adhere | attached on the edge part of the unnecessary sheet | seat part 5, and peeling defect can be avoided.

  The winding means 11 includes a winding roller 20 for winding the unnecessary sheet portion 5 together with the peeling tape 8, and a driving roller 21 connected to a motor 23 for winding the peeling tape 8 with a predetermined tension. , And a nip roller 22. When the motor 23 is driven to rotate, the peeling tape 8 to which the unnecessary sheet portion 5 is stuck is pulled up by the driving roller 21 and the nip roller 22 to the upper side of the convex roller 18 and wound up by the winding roller 20. On the other hand, the first original fabric 3 from which the unnecessary sheet portion 5 is peeled (hereinafter referred to as “first processed original fabric 3A”) is conveyed to the second processing section M2 via the guide rollers R3 and R4.

  The second processed portion M2 has a raw fabric 27 (see FIGS. 4 and 5; see FIG. 4 and FIG. 5 below) in which a belt-like heat-sensitive adhesive sheet 26 such as a die bonding sheet is attached to the belt-like base sheet 25. (Referred to as “second raw fabric 27”), a second raw fabric feeding means 28, a first preliminary heating means 29 for heating the first processed raw fabric 3A, and the first processed raw fabric A second preheating means 30 for heating the second original fabric 27 separately from 3A and a downstream side in the transport direction of the two preheating means 29, 30 and the first processed after the heating The pasting means 31 for pasting the original fabric 3A and the second original fabric 27, and the first processed original fabric 3A and the second original fabric 27 that have been pasted together (hereinafter, this pasting is completed) 2nd cuts C2 and C3 are formed on the "bonding completed original fabric 3B") Rutotomoni configured to include an unnecessary sheet removal unit 34 for removing unnecessary sheet portion 33 which is formed by the second cut.

  The second original fabric feeding means 28 is constituted by a support roller 35 that supports a second original fabric 27 wound in a roll shape, and is supplied to the second preheating means 30 via a guide roller R7. It is provided so that it can be fed out sequentially.

  The first preheating means 29 is constituted by a heating roller 32A, and its surface temperature is managed by a temperature sensor 52A as a measuring means. That is, a control device (not shown) controls the temperature of the heating roller 32A so that the temperature measured by the temperature sensor 52A is always a predetermined temperature. When the first processed original fabric 3A passes through the outer peripheral surface of the heating roller 32A, the first processed original fabric 3A is heated by the heat. The first processed raw fabric 3A after heating is conveyed to the bonding means 31 via the guide rollers R5 and R6.

  The second preheating means 30 is also constituted by a heating roller 32B, the surface temperature of which is managed by a temperature sensor 52B as a measuring means in the same manner as the first preheating means 29, and a control device (not shown) The temperature of 32B is controlled, and when the 2nd original fabric 27 passes the heating roller 32B outer peripheral surface, the 2nd original fabric 27 is heated with the heat. The heated second original fabric 27 is conveyed to the bonding means 31 via the conveyance roller R8.

  The pasting means 31 is composed of a pair of heatable pressure rollers 36 and 37, and is conveyed from the first processed raw material 3 </ b> A after being conveyed from the first heating means 29 and the second heating means 30. The heated second original fabric 27 is overlapped and passed between the pressure rollers 36 and 37, and the first processed original fabric 3A and the second original fabric 27 are bonded together while being heated. . During this heating, the first processed original fabric 3A and the second original fabric 27 are bonded together by the heat-sensitive adhesive sheet 26 to become a bonded completed original fabric 3B. The pressure rollers 36 and 37 are temperature-controlled by temperature sensors 52C and 52D, respectively, that measure the surface temperatures of the pressure rollers 36 and 37, and the temperatures thereof are controlled by a control device (not shown). The pasting completion original fabric 3B is conveyed to the unnecessary sheet removing means 34 via the guide roller R9.

  The heating by the pair of pressure rollers 36 and 37 is called the main heating in relation to the preheating by the preheating means 29 and 30, but the main heating can be omitted. For example, when the heat-sensitive adhesive component of the heat-sensitive adhesive sheet 26 constituting the second raw fabric 27 is activated between the completion of preheating and the start of bonding, Heating is not necessary, and the main bonding of the first processed original fabric 3A and the second original fabric 27 can be performed only by pressing. That is, the adhesive cannot be expected to have a sufficient adhesive force immediately after the temperature rises, and the activation of the adhesive starts slightly after the temperature rise. Taking advantage of this principle, heating is performed once before bonding, and bonding is performed with an activated adhesive. By performing preliminary heating in this way, even when bonding is performed at a high speed, it can be dealt with.

  In the present embodiment, as the means for adjusting the time from the completion of the preheating described above to the start of bonding, the transport path length of the first processed raw fabric 3A from the first preheating means 29 to the bonding means 31 is changed. A first path length changing means 39 that performs the second path length changing means 40 that changes the transport path length of the second original fabric 27 from the second preheating means 30 to the bonding means 31; Yes.

  The first and second path length changing means 39, 40 are provided with a displacement roller 42 that is slidably displaceable via a single-axis robot 41. The displacement roller 42 is a first processed original fabric 3A, second A configuration is adopted in which the transport path length is changed in accordance with the amount of slide displacement by sliding displacement in a direction intersecting the transport path of the original fabric 27. By adopting such a configuration, for example, when the displacement roller 42 is slid in the direction indicated by the arrow A in FIG. 1, the transport path length of the first processed raw fabric 3A becomes longer, and the preheating is completed accordingly. The time from the beginning to the beginning of pasting becomes longer. Thereby, sufficient adhesive force can be obtained even when it takes time to activate the adhesive.

  As shown in FIG. 6, the unnecessary sheet removing means 34 winds up the die cut roller 44, the receiving roller 45, and the unnecessary sheet portion 33 for forming the cuts C2 and C3 having a predetermined shape in the pasting completed original fabric 3B. And a product take-up roller 47 for taking up the lamination completed raw material 3B after the unnecessary sheet portion 33 is separated and removed. The bonding completion original fabric 3B conveyed from the bonding means 31 passes between the die cut roller 44 and the receiving roller 45, and is released from the base sheet 25 side by the cutter blades 44A and 44B formed on the die cut roller 44. Cuts C2 and C3 having a predetermined shape until reaching 1 are formed (see FIG. 6). Then, the portion surrounded by the cuts C2 and C3 is wound as an unnecessary sheet portion 33 by the waste take-up roller 43, and on the other hand, the bonding completed raw material 3B after separating and removing the unnecessary sheet portion 33 is a product. It is wound around a winding roller 47.

  Of the product wound up as described above, the inner portion of the cut C2 is used as a support sheet S for supporting the semiconductor wafer on the ring frame F as shown in FIG. In the usage example of FIG. 7, the ring-shaped pressure-sensitive adhesive sheet 2 is bonded to the ring frame F, and the wafer W is bonded onto the heat-sensitive adhesive sheet 26 located inside the pressure-sensitive adhesive sheet 2. . Then, in the dicing process, the wafer W is cut into a square shape together with the heat-sensitive adhesive sheet 26 and bonded to the lead frame with the adhesive of the adhesive sheet 26.

  Next, the overall operation of the sheet processing apparatus configured as described above will be briefly described with reference to FIG.

  According to the sheet processing apparatus M in FIG. 1, the first processing is performed on the first original fabric 3 in the first processing unit M1. That is, after the first original fabric 3 fed from the first original fabric feeding means 4 is conveyed to the first cutting means 7 and the notch C1 having a predetermined shape is formed in the first original fabric 3, the notch is cut. The formed first original fabric 3 is conveyed to the pressing means 10. And by the convex part 17 of the convex roller 18, the peeling tape 8 is pressed against and adhered to the unnecessary sheet portion 5 (the inner part of the cut C1) of the first raw fabric 3, and the peeling tape 8 is pulled up, Unnecessary sheet portion 5 is peeled off and wound around winding roller 20 together with peeling tape 8.

  The first processed raw fabric 3A formed by the first processing is then transported to the second processing section M2 and heated to a predetermined temperature by the first preheating means 29. At the same time, the second original fabric 27 fed out from the second original fabric feeding means 28 is heated to a predetermined temperature by the second preheating means 30 and thus heated separately. 1 processed original fabric 3A and 2nd original fabric 27 are bonded by the bonding means 31. FIG.

  Then, the laminated original fabric 3B that has been laminated is conveyed to the unnecessary sheet removing means 34, and after the cuts C2 and C3 having a predetermined shape are formed, a portion surrounded by the cuts C2 and C3 is an unnecessary sheet. In a state where the portion 33 is peeled and removed, the product is wound around the product winding roller 47.

  In the above-described embodiment, since the outer shape of the unnecessary sheet portion 5 is circular as shown in FIG. 2, the shape (pressing start shape) of the front end portion 17A in the rotation direction of the convex portion 17 is cut off a part of the arc. However, the present invention is not limited to this, and it may be substantially the same shape as the shape of the front end portion 5A in the traveling direction of the unnecessary sheet portion 5.

1 is an overall configuration diagram of a sheet processing apparatus to which the present invention is applied. The perspective view of the structure which peels the unnecessary sheet | seat part of a 1st original fabric in the sheet | seat processing apparatus of FIG. The fragmentary sectional view of FIG. The perspective view of the sheet bonding part in the sheet processing apparatus of FIG. The fragmentary sectional view of FIG. The perspective view of the structure which peels the unnecessary sheet | seat part of a bonding completion original fabric in the sheet | seat processing apparatus of FIG. Explanatory drawing of the usage example of the sheet | seat processed with the sheet | seat processing apparatus of FIG.

Explanation of symbols

1 Release sheet 2 Pressure-sensitive adhesive sheet (adhesive sheet)
5 Unnecessary sheet portion 5A Front end portion 8 in the traveling direction of the unnecessary sheet portion Peeling tape 9 Peeling tape feeding means 10 Pushing means 11 Winding means 17 Convex portion 17A Convex rotation direction front end portion 18 Convex roller C1 Cut R1 Guide roller ( Transport means)
P Pressing start position of convex part

Claims (5)

Release sheet the adhesive sheet is temporarily adhered to, from the adhesive sheet raw cuts of predetermined shape is formed at a predetermined distance in a counter, a sheet peeling apparatus for peeling away the inside of the cut as unnecessary sheet portion,
The sheet peeling apparatus is
Conveying means for conveying the original fabric;
A peeling tape feeding means for feeding out a peeling tape for peeling the unnecessary sheet portion;
Anda pressing means for pressing the peeling tape to the unnecessary sheet portion,
The pressing means includes a convex roller that has a convex portion on the outer periphery and is provided so that the peeling tape can be wound around. The convex portion is synchronized with the interval at which the unnecessary sheet portion is conveyed by the rotation of the convex roller. Then, the peeling tape is adhered to the unnecessary sheet part, and the unnecessary sheet part is provided so as to be peelable by moving the peeling tape away from the peeling sheet,
The convex portion has a front end and a rear end in the rotation direction of the convex roller, and the front end rises radially outward from the outer peripheral surface of the convex roller, and gradually increases from the front end toward the rear end. A sheet peeling apparatus characterized by having a convex curved surface shape approaching the surface . The sheet peeling device according to claim 1, wherein a pressing start shape of the convex portion is substantially the same shape as a shape of a front end portion in the traveling direction of the unnecessary sheet portion. 3. The sheet peeling apparatus according to claim 1, wherein a pressing start position of the convex portion is a position ahead of a front end portion in a traveling direction of the unnecessary sheet portion. Furthermore, it has a winding means which winds up the said unnecessary sheet | seat part with the said peeling tape, and winds up the peeling tape paid out from the said pressing means by predetermined tension | tensile_strength. The sheet peeling apparatus as described in. A sheet peeling method in which an adhesive sheet is temporarily attached to a release sheet, and a cut of a predetermined shape is formed on the adhesive sheet at a predetermined interval, and the inside of the cut is peeled off as an unnecessary sheet portion ,
The sheet peeling method includes:
Transport the original fabric,
Rolling out a peeling tape for peeling off the unnecessary sheet portion, hung around a convex roller having a convex portion on the outer periphery ,
By rotation of the convex roller, the unnecessary sheet by the convex portion is adhered to the unnecessary sheet portion peeling tape in synchronization with the conveyance is the distance of the unnecessary sheet portion away the peeling tape from the release sheet It comes to peel off the part ,
The convex portion has a front end and a rear end in the rotation direction of the convex roller, and the front end rises radially outward from the outer peripheral surface of the convex roller, and gradually increases from the front end toward the rear end. A sheet peeling method characterized by having a convex curved surface shape approaching the surface .

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