JP4843995B2 - Organic electronic material coating apparatus and organic electronic device manufacturing method using the same - Google Patents

Description

  The present invention relates to an apparatus for forming an organic electronic material layer by a nozzle coating method and an organic electronic element manufacturing method using the apparatus.

Conventionally, as a method for manufacturing an organic electronic element using an organic electronic material such as an organic electroluminescence element, an organic thin film transistor, or a solar battery, a nozzle coating method as shown in Patent Document 1 is known.
JP 2004-335492 A

  In the case of the above-described nozzle coating method, when the flow rate when the organic electronic material such as organic electroluminescence (hereinafter referred to as organic EL) material is supplied to the nozzle or the moving speed of the nozzle fluctuates, the organic coating is formed accordingly. There is a problem that the layer thickness of the EL layer varies. Variations in the thickness of the organic EL layer cause variations in light emission efficiency and luminance. Therefore, such an organic EL element is eliminated as a defective product, and yield is reduced.

  In order to improve the yield of the organic EL element, the defective product may be repaired. However, in the case of a defective product in which the layer thickness of the organic EL layer is out of the standard, after the organic EL layer is formed, an electrode or Since the protective film is applied by vapor deposition or sputtering, it is almost impossible to repair after the product is completed.

  Repair of defective products with varying organic EL layer thickness is possible before the post-process for depositing the electrode or protective film, that is, at the time when the organic EL layer is formed. Therefore, there is a problem that a lighting test cannot be performed and a defective portion cannot be specified. A method of measuring the layer thickness of the organic EL layer formed to identify the defective part is conceivable. However, this requires a lot of equipment costs such as measuring instruments and inspection time, and is not very practical.

  An object of the present invention is to provide an organic electronic material coating apparatus capable of manufacturing an organic electronic element in which an organic electronic material layer is formed by a nozzle coating method with high yield and low cost, and a method for manufacturing an organic electronic element using the same. That is.

An organic electronic material coating apparatus of the present invention is an apparatus for forming an organic electronic material layer by applying an organic electronic material to a surface of a substrate with a nozzle, and the nozzle and / or the substrate is parallel to the substrate surface. A first moving mechanism for moving the nozzles and / or the substrate relative to each other at a predetermined speed along a direction of 1, and a predetermined direction along a second direction orthogonal to the first direction parallel to the substrate surface A second moving mechanism that moves relative to each other at a speed; a coating material supply mechanism that supplies the organic electronic material to the nozzle at a predetermined flow rate; and an organic electronic material layer having a desired thickness on the substrate surface. And a controller for driving and controlling the first and second moving mechanisms and the coating material supply mechanism, and the controller includes a pass / fail judgment unit and an overall control unit, and the pass / fail judgment unit includes: First move And relative movement velocity information along the first direction of the nozzle with respect to the substrate fed from the mechanism, the position information in the second direction of the nozzle sent from said second moving mechanism, At least three types of information including the flow rate information when the organic electronic material sent from the coating material supply mechanism is supplied to the nozzle is the moving operation in the first moving mechanism and the second moving mechanism. In addition, it is input in real time with the application operation of the organic electronic material, and it is determined in real time whether or not each of these pieces of information is within an allowable range based on a predetermined criterion, and is outside the allowable range. The value of each information when and the position of the nozzle and / or the substrate at that time were stored as defect information, and the application of the organic electronic material layer to the entire substrate surface was completed The defect information is output to the overall controller at point, the overall control unit, to the defect information, characterized in that to perform acceptance determination based on the acceptance criteria have been set in advance is there.

The method for producing an organic electronic device of the present invention is a method for producing an organic electronic device comprising an organic electronic material layer formed by applying an organic electronic material to the surface of a substrate with a nozzle. The organic electronic material is supplied at a predetermined flow rate, and the nozzle and / or the substrate is moved relative to each other at a predetermined speed along a first direction parallel to the substrate surface, and the organic electronic material is The nozzle and / or the substrate is applied to the substrate surface and the nozzle and / or the substrate is orthogonal to the first direction parallel to the substrate surface every time one line of the nozzle is applied along the first direction. along the direction are relatively moved by a predetermined distance, and the relative moving speed information along said first direction of the nozzle relative to the substrate, and the position information in the second direction of the nozzle, the organic photoelectric At least three types of information with the flow rate information at the time of supplying the material to the nozzle is input in real time with the coating operation of the nozzle and / or movement and the organic electronic material of the substrate, the information Each of the information is determined in real time whether or not each of the information is within an allowable range based on a predetermined criterion, and the value of each information when the information is out of the allowable range and the time at the time The nozzle and / or the position of the substrate is stored as defect information, and after the formation of the coating of the organic electronic material layer on the entire surface of the substrate is completed, a pass / fail criterion set in advance for the defect information. it is characterized in that to perform acceptance determination based on the.

According to the organic electronic material coating apparatus of the present invention and the method of manufacturing an organic electronic element using the same, the nozzle and / or substrate moving operation and the moving speed of the nozzle supplied in real time with the organic electronic material coating application operation are performed. From at least three types of information, information on the position of the information, and information on the flow rate of the organic electronic material supplied to the nozzle, each of these pieces of information is within an allowable range based on a criterion set in advance for the information. The value of each information when it is out of the allowable range and the position of the nozzle and / or substrate at that time are stored as defect information, and the organic electronic material layer on the entire substrate surface applying at the time of completion of the finished because there is acceptance judgment based on the acceptance criteria preset for defect information is performed, the organic electronic device completed application of the organic electronic material of Before carrying out the subsequent steps because, to be able to repair the defective portion of the organic electron material layer on the basis of the acceptance judgment result, it can be manufactured in a very good yield low cost organic electronic devices.

Further, in the organic electronic material coating apparatus of the present invention, the pass / fail judgment unit is formed by coating the organic electronic material layer from the movement speed information in the first direction of the nozzle and the flow rate information sent from the coating material supply mechanism. The layer thickness is calculated, and it is determined whether or not the calculated value is within the preset allowable range of the layer thickness of the organic electronic material layer. and / or it is preferable that a position of the substrate has a structure that is stored as the defect information, thereby, can be extracted efficiently defective portion with less noise.

  The organic electronic material coating apparatus of the present invention is more suitable for the case where an organic EL material is applied to form an organic EL layer. In that case, defective portions in the formed organic EL layer are reliably and efficiently extracted. Is done.

  FIG. 1 is a perspective view showing an organic EL material coating apparatus as an embodiment of the present invention, and FIG. 2 is a half-finished organic EL display element intermediate product when an organic EL layer is applied and formed by the coating apparatus. FIG. 3 is a block diagram showing the main configuration of the organic EL material coating apparatus of the present embodiment.

  First, based on FIG. 2, the structure of the organic EL display element intermediate product manufactured by the organic EL material coating apparatus of this embodiment will be described.

  On the surface of the glass substrate 201, a plurality of first electrodes 202 made of a transparent conductive film such as ITO (Indium Tin Oxide) are arranged in parallel to each other in a predetermined direction (in this example, the horizontal direction on the paper surface).

  A plurality of metal banks 203 are arranged in parallel to each other at equal intervals so as to be orthogonal to the extending direction of the first electrodes 202. The metal bank 203 is made of metal such as gold or copper, and is disposed in correspondence with the pixel columns, and serves as a bank (bank) that partitions the pixel columns. Further, the metal bank 203 of this embodiment is electrically connected to a thin film transistor (not shown) provided corresponding to each pixel area, and a source for driving the organic EL layer via the thin film transistor for each pixel. Also serves as wiring. In addition, the peripheral surface of the metal bank 203 is coated with an insulating film (not shown), thereby ensuring insulation against the surroundings.

  In each pixel column partitioned by the metal bank 203, first, a hole injection layer 204 of the organic EL layer is formed by a nozzle coating method so as to cover the first electrode 202. As the organic electronic material for forming the hole injection layer 204, phenylamine-based or phthalocyanine-based vanadium oxide, molybdenum oxide, or the like is preferably used.

  On the hole injection layer 204, the light emitting layer 206 is laminated | stacked by the nozzle coating system through the interlayer layer 205. FIG. Examples of organic electronic materials for forming the light emitting layer 206 include dye-based light emitting materials such as cyclopentadiene derivatives and triphenylamine derivatives, metal complex-based light emitting materials such as aluminum quinolinol complexes, and polymers such as polyparaphenylene vinylene derivatives. A light emitting material is preferably used.

  Note that the interlayer layer 205 is provided in order to increase the light emission efficiency of the light emitting layer 206, and is formed by a nozzle coating method using an organic electronic material, like the hole injection layer 204 and the light emitting layer 206.

  The hole injection layer 204, the light emitting layer 206, and the interlayer layer 205 described above are each dissolved in an organic solvent such as toluene or tetralin to be liquefied into an ink and the organic EL material coating apparatus according to the present invention. Is formed by coating.

  As shown in FIG. 1, the organic EL material coating apparatus of the present embodiment is generally configured to reciprocate the nozzle portion 1 and the nozzle portion 1 in a line scanning direction along the pixel row (hereinafter referred to as X-axis direction). Axis moving mechanism unit 2, workpiece holding mechanism unit 3 holding application workpiece w, Y axis moving mechanism 4 for moving workpiece holding mechanism unit 3 in the Y-axis direction orthogonal to the X-axis direction, and coating material for nozzle unit 1 It consists of a material liquid supply unit 5 for supplying liquid and a controller 6 for controlling driving of the entire organic EL material coating apparatus.

  The nozzle unit 1 includes an application nozzle 11 and a holder 12 that holds the application nozzle 11. In the present embodiment, respective dedicated nozzles for coating and forming the three types of organic EL layers of the hole injection layer 204, the light emitting layer 206, and the interlayer layer 205 shown in FIG. 2 should be prepared and formed. It is a method of exchanging whenever the type of the organic EL layer changes.

  The nozzle unit 1 in which the application nozzle 11 is held by the holder 12 is fixed to the slider 21 of the X-axis movement mechanism unit 2 and is reciprocated in the X-axis direction together with the slider 21.

  In the X-axis movement mechanism unit 2, a linear servo motor 23 (see FIG. 3) is configured by the above-described slider 21 and a stator unit (not shown) housed in an elongated rectangular parallelepiped housing 22. Therefore, in the housing 22, a plurality of permanent magnets (not shown) are arranged in parallel along the longitudinal direction of the housing, that is, the X-axis direction, with individual N poles and S poles alternately adjacent to each other. The linear servomotor 23 is provided with an encoder 24 (see FIG. 3).

  As shown in FIG. 3, the linear servo motor 23 is driven and controlled by an X-axis driver 61 in the controller 6. The X-axis driver 61 drives and controls the linear servo motor 23 in accordance with the movement information sent from the encoder 24, and performs feedback control so that the movement speed of the slider 21 falls within the set standard range.

  The Y-axis moving mechanism 4 is a moving mechanism using a linear servo motor similar to the X-axis moving mechanism 2, and includes an elongated rectangular housing 42 that houses a slider 41 and a stator portion (not shown). The casing 42 is installed with its longitudinal direction along the Y-axis direction orthogonal to the X-axis direction on the same plane. In the casing 42, a plurality of permanent magnets (not shown) are arranged in parallel along the longitudinal direction of the casing, that is, the Y-axis direction, with the individual N poles and S poles alternately adjacent to each other. As shown in FIG. 3, an encoder 44 is attached to the linear servo motor 43, and the linear servo motor 43 is driven and controlled by a Y-axis driver 62 in the controller 6. The driving means of the Y-axis moving mechanism 4 is not limited to a linear servo motor, and a ball screw driving system using a pulse motor, a timing belt driving system, and the like can be suitably used.

  The Y-axis driver 62 feedback-controls the linear servo motor 43 according to the movement information sent from the encoder 44 so that the slider 41 moves at a pitch within a set standard range. Here, the moving pitch of the slider 41 is a pitch corresponding to the arrangement pitch of the metal banks 204 (see FIG. 2) in the organic EL display element to be manufactured.

  On the slider 41 of the Y-axis moving mechanism 4, the work holding mechanism unit 3 is installed. The work holding mechanism unit 3 includes a turntable 31 and a suction stage 32, and the turntable 31 is rotatably supported by a slider 41. The suction stage 32 sucks and holds the workpiece w by vacuum suction, and is fixed to the turntable 31 so as to be integrally rotatable. In the present embodiment, as the work w, the organic EL display element intermediate before the above-described three types of organic EL layers are applied and formed is sucked and held on the suction stage 31.

  The turntable 31 is rotationally driven by a servo motor 33 shown in FIG. 3, and an encoder 34 is attached to the servo motor 33, and the servo motor 33 is driven and controlled by a θ-axis driver 63 in the controller 6. The θ-axis driver 63 feedback-controls the servo motor 33 according to the rotational movement information sent from the encoder 33 so that the workpiece w is held at a specified rotational angle position.

  The material liquid supply unit 5 that supplies the organic EL material liquid to the nozzle unit 1 includes a tank 51 that stores the material liquid, a pump 52 that pumps the material liquid in the tank 51 to the nozzle unit 1, and a material liquid that is pumped. A flow meter 53 for detecting the flow rate and a filter 54 for removing the contaminants mixed in the material liquid are connected in series via a tube 55.

  As shown in FIG. 3, the flow meter 53 outputs the detected flow rate information to the pump control circuit 64 in the controller 6, and the pump control circuit 64 passes the organic EL material liquid supply flow rate set. The pump 52 is feedback-controlled according to the input flow rate information so as to be within the range.

  The controller 6 includes the X, Y, and θ axis drivers 61, 62, and 63, the pump control circuit 64, the NC control unit 65 that controls the axis drivers 61, 62, and 63, and the organic EL layer that is formed by coating. It consists of a pass / fail judgment unit 66 for judging pass / fail and an overall control unit 67 for controlling the driving of the entire organic EL material coating apparatus of the present embodiment.

  The overall control unit 67 outputs a control signal to the NC control circuit 65 and the pump control circuit 64 according to a program introduced in advance, and the NC control circuit 65 and the pump control circuit 64 are controlled by the overall control unit 67. In response to the signals, drive signals are output to the X, Y, and θ axis drivers 61, 62, and 63 and the pump 52, respectively.

  Here, in the pass / fail judgment unit 66, the movement speed information of the application nozzle 11 in the X-axis direction from the X-axis driver 61, and the position information of the application nozzle 11 in the Y-axis direction from the Y-axis driver 62 are supplied to the pump control circuit. 64, the flow rate information of the material liquid is input from the NC control unit, and the instruction position information indicating the position of the coating nozzle 11 in both the X and Y axes is input. Then, the pass / fail determination unit 66 determines whether or not the input information is within an allowable range of a preset determination criterion, and outputs the pass / fail determination result to the overall control unit 67.

  In this embodiment, the pass / fail judgment unit 66 uses the three types of input information of the movement speed information of the application nozzle 11 in the X-axis direction, the position information in the Y-axis direction, and the flow rate information of the material liquid as judgment criteria. In contrast to each acceptable range that has been set, if it is outside, the value and position are stored as defect information, and when all organic EL material liquids are applied to one substrate, all defects are stored. Information is output to the overall control unit 67.

  Next, the determination operation by the quality determination unit 66 described above will be described in detail based on the flowchart of FIG.

  When the application operation of the organic EL material liquid is started, first, the position of the application nozzle in the Y-axis direction is stored (S1), and then it is determined whether or not the position of the application nozzle in the X-axis direction is an effective application position ( S2). Here, the effective application position is a graph showing the relationship between the movement speed and position of the application nozzle 11 in the X-axis direction shown in FIG. 5, and the movement speed is controlled so as to be substantially constant within the acceptable range. A position within the range Ae (hereinafter referred to as an effective application area). Information indicating the effective application area Ae is preset according to the work w and stored in the overall control unit 67. The pass / fail judgment unit 66 accesses the overall control unit 67 to determine the effective application area Ae. By reading the information and comparing it with the positional information of the application nozzle in the X-axis direction, it is determined whether or not the position of the application nozzle is within the effective application area Ae. This determination process is repeatedly performed until the application nozzle reaches the effective application area Ae.

  When the application nozzle advances into the effective application area Ae, it is determined whether or not the movement speed in the X-axis direction is within the acceptable range (S3). If it is outside the acceptable range (NO), the application nozzle at that time is determined. The moving speed value and position are stored as speed defect information (S4).

  Next, it is determined whether or not the flow rate of the material liquid supplied to the coating nozzle is within the set acceptable range (S5). If it is outside the acceptable range, the flow rate value at that time and the position of the coating nozzle are determined. Is stored as defective flow information (S6).

  Next, it is determined whether the position of the coating nozzle in the Y-axis direction, that is, the line to be scanned is the same as the line at the start of coating stored in step S1 (S7). If the line has changed, the coating nozzle at that time is changed. The positions in the X and Y axis directions are stored as Y position defect information (S8). If the scanning line of the coating nozzle is shifted, the coating nozzle is quickly returned to the original normal position by feedback control by the Y-axis driver.

  Next, it is determined whether or not the position of the application nozzle in the X-axis direction has deviated from the effective application area Ae (see FIG. 5), that is, whether or not the effective application for one line has been completed (S9). When the effective application operation is being performed in the area Ae, the process returns to step S3, and the pass / fail judgment of the movement speed of the application nozzle in the X-axis direction is performed again. That is, while the coating nozzle scans the effective coating area Ae, the operation flow of steps S3 to S9 is repeated in a short cycle. Therefore, the pass / fail judgment regarding the three information of the X-axis direction velocity (S3), the Y-axis direction position (S7) and the flow rate (S5) of the feed material for the application nozzle is processed as if it were within the effective application time of one line. Repeatedly.

  When the application nozzle moves out of the effective application area Ae and the effective application of one line is completed, it is determined whether or not the effective application of all lines in one work is completed (S10), and the application of all lines is not completed. In the case (NO), the application nozzle is moved to the application start position of the next line (S11). That is, the Y-axis driver 52 (see FIG. 3) is operated while the application nozzle is returned to the home position in the X-axis direction in which the X-axis driver 51 (see FIG. 3) is operated to start the one-line application operation. Move one pitch in the axial direction. After the coating nozzle is positioned at the home position of the next coating line, the processing steps S1 to S10 are performed again, and this processing flow is repeated until the coating of all lines is completed.

  If application of all lines has been completed in step S10 (YES), the defect information stored in steps S4, S6 and S8 so far is output to the overall control unit 67 (see FIG. 3) (S12). The coating operation of the organic EL layer of the first layer is completed.

  Next, the overall control unit 67 completes the application of the material liquid over all the lines of the first layer, that is, all the lines of the lowermost hole injection layer 205 in the three organic EL layers shown in FIG. With respect to the organic EL display element intermediate product that has been applied, the failure information output from the pass / fail judgment unit 66 to the overall control unit 67 and stored is compared with the pass / fail judgment criteria stored in advance to make a pass / fail judgment. Then, this pass / fail judgment result is displayed on, for example, a display provided in the organic EL material coating apparatus to notify the operator.

  The organic EL display element intermediate product determined to be defective is transferred to the repair process, and the defective portion where the layer thickness of the formed hole injection layer is out of the acceptable range is repaired. Since the organic EL display element intermediate product transferred to the repair process has no electrode or protective film formed on the hole injection layer, the defective portion can be easily repaired using an organic solvent.

  On the other hand, the organic EL display element intermediate product determined as a non-defective product by the overall control unit 67 is held by the suction stage 32 by the NC control unit 65 operating the Y-axis driver 52 according to an instruction from the overall control unit 67. In this state, the application start position in the Y-axis direction is returned. Thereafter, the same application operation as the above-described application operation of the hole injection layer is performed, and the interlayer layer 206 and the organic EL light-emitting layer 207 are sequentially applied and formed. The same acceptance / rejection determination process as the process performed for the hole injection layer 205 is performed, and for the workpiece determined to be defective, the same repair process is performed each time, and the defect is repaired.

  As described above, the organic EL material liquid coating apparatus according to the present embodiment applies the moving speed information in the scanning line direction of the coating nozzle when coating the material liquid, the confirmation information of the scanning line position, and the coating nozzle for the material liquid. Three types of information on the flow rate information to be supplied to the real time, and these three types of information including those position information including position information obtained by performing each pass / fail judgment based on each preset judgment criterion Information is memorized one by one, and when all the lines of the organic EL material liquid are applied, the stored information is output to the overall control unit as defect information of the formed organic EL material layer. The portion where the layer thickness may be out of the acceptable range in the formed organic EL material layer (hereinafter referred to as a defective portion) is used as the organic EL material. It can be grasped at the time of forming the layer, and based on this, before the other organic EL material layer is laminated thereon, the defective portion where the layer thickness actually deviates from the acceptable range is identified and repaired. The yield of the organic EL display element is greatly improved. Further, in this case, since the pass / fail judgment unit outputs the defect information including the portion that is likely to cause a layer thickness defect from the collected information, the defect portion is reliably grasped and repaired without leaking, and the organic EL display element Yield is further improved.

  In the above-described embodiment, the pass / fail determination unit performs pass / fail determination on whether or not each of the collected three types of information is out of the pass range of each determination criterion set in advance. Although these three types of defect information are output to the overall control unit as defect information of the organic EL material layer formed by coating, the present invention is not limited to this.

For example, even if the scanning moving speed (moving speed in the X-axis direction) of the application nozzle exceeds the acceptable range, if the amount of the material liquid applied at this time is moderately larger than the acceptable range, the obtained organic EL material layer The layer thickness at that position may be within the acceptable range. That is, when the layer thickness t of the organic EL material layer is Q, the flow rate supplied to the coating nozzle of the material liquid is V, the scanning movement speed of the coating nozzle is V, and the coefficient is K,
t = K × Q / V (1)
It becomes. Therefore, the layer thickness t of the organic EL material layer is calculated from the values Q and V obtained from the movement speed information of the application nozzle in the scanning line direction and the flow rate information of the material liquid supplied to the application nozzle according to the above equation (1). By calculating in real time and making a pass / fail judgment for this calculated value, it is possible to identify with high accuracy the defective part whose layer thickness is actually out of the acceptable range, and work efficiency in the repair process of the defective part Is improved, the number of manufacturing steps is reduced, and the cost reduction of the organic EL display element is promoted.

  Further, the application nozzle and the work only need to move relative to each other, and are not limited to the method in which one is stopped and the other is moved as in the above-described embodiment, and both may be moved, or the X axis is moved. In this case, the workpiece may be moved, and the coating nozzle may be moved by moving the Y axis.

  Furthermore, the present invention is not limited to the case of manufacturing an organic EL display element by applying an organic EL material liquid, but also in the case of manufacturing another organic electronic element using an organic electronic material such as an organic thin film transistor or a solar battery. Of course, it can be widely applied.

It is a perspective view which shows the organic electroluminescent material coating device as one Embodiment of this invention. It is typical sectional drawing which shows the organic electroluminescent display element intermediate product manufactured using the said organic electroluminescent material application | coating apparatus. It is a block diagram which shows the main structures of the said organic EL material application apparatus. It is a flowchart figure which shows operation | movement of the said organic EL material application apparatus. It is a graph which shows the relationship between the moving speed and position of a nozzle in the application | coating operation | movement by the said organic EL material application | coating apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Application nozzle part 11 Application nozzle 2 X-axis movement mechanism 3 Work holding mechanism 4 Y-axis movement mechanism 5 Material liquid supply mechanism 52 Pump 53 Flowmeter 6 Controller 61 X-axis driver 62 Y-axis driver 63 θ-axis driver 64 Pump control circuit 65 NC control circuit 66 Pass / fail judgment section 67 Overall control section

Claims (4)

The organic electronic material was applied with a nozzle to the surface of the substrate there is provided an apparatus for forming an organic electronic material layer,
A first moving mechanism for moving the nozzle and / or the substrate relative to each other at a predetermined speed along a first direction parallel to the substrate surface;
A second moving mechanism for moving the nozzle and / or the substrate relative to each other at a predetermined speed along a second direction orthogonal to the first direction parallel to the substrate surface;
A coating material supply mechanism for supplying the organic electronic material to the nozzle at a predetermined flow rate;
A controller for driving and controlling the first and second moving mechanisms and the coating material supply mechanism so as to form an organic electronic material layer of a desired thickness on the substrate surface;
The controller has a pass / fail judgment unit and an overall control unit, and the pass / fail judgment unit has a relative moving speed along the first direction of the nozzle with respect to the substrate sent from the first moving mechanism. flow rate at the time of supply and information, the position information in the second direction of the nozzle sent from said second moving mechanism, the organic electronic material sent from the coating material supply mechanism into the nozzle At least three types of information are input in real time along with the movement operation in the first movement mechanism and the second movement mechanism and the application operation of the organic electronic material , and each of these pieces of information is It is determined in real time whether or not each information is within an allowable range based on a predetermined criterion, and the value of each information when it is out of the allowable range and the nozzle at that time Alternatively, the position of the substrate is stored as defect information, and when the application of the organic electronic material layer to the entire substrate surface is completed, the defect information is output to the overall control unit, and the overall control unit is for the faulty information, organic electronic material application apparatus which is characterized in that the acceptance determination based on the acceptance criteria set in advance. The pass / fail judgment unit calculates the layer thickness of the organic electronic material layer formed by coating from movement speed information of the nozzle in the first direction and flow rate speed information sent from the coating material supply mechanism, It is determined whether or not the value is within a preset allowable range of the thickness of the organic electronic material layer, and the calculated value when the value is outside the allowable range and the nozzle and / or the substrate at that time 2. The organic electronic material coating apparatus according to claim 1, wherein a position is stored as the defect information . The organic electronic material, an organic electronic material coating apparatus according to claim 1 or 2, characterized in that the electroluminescent material. A method of manufacturing an organic electronic device comprising an organic electronic material layer formed by applying an organic electronic material to a surface of a substrate with a nozzle,
Supplying the organic electronic material to the nozzle at a predetermined flow rate;
Applying the organic electronic material to the substrate surface with the nozzle while moving the nozzle and / or the substrate relative to each other at a predetermined speed along a first direction parallel to the substrate surface;
Each time the application of one line along the first direction of the nozzle is completed, the nozzle and / or the substrate is predetermined along a second direction orthogonal to the first direction parallel to the substrate surface. Move relative distance,
Relative movement speed information of the nozzle along the first direction with respect to the substrate, position information of the nozzle in the second direction, and flow rate speed information when supplying the organic electronic material to the nozzle And at least three types of information are input in real time along with the movement operation of the nozzle and / or the substrate and the application operation of the organic electronic material, and each of these pieces of information is preset for each information. It is determined in real time whether or not it is within an allowable range according to the determination criterion being made, and the value of each information when it is out of the allowable range and the position of the nozzle and / or the substrate at that time are used as defect information. Remember ,
After coating formation to the entire surface of the substrate of the organic electronic material layer is completed, with respect to the defect information, organic electron and performs have been acceptance judgment based on the acceptance criteria have been set in advance Device manufacturing method.

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