JP4847746B2 - Mirror holder with angle adjustment mechanism - Google Patents

Description

  The present invention relates to a mirror holder for holding a mirror of a laser oscillator and fixing it to an oscillator body or the like, and more particularly to a mirror holder provided with a mechanism for finely adjusting the angle of the mirror.

A laser oscillator irradiates a laser medium such as a YAG rod installed between a total reflection mirror and an output mirror with excitation light, reflects and amplifies the light emitted from the laser medium between the mirrors, and then partially Is taken out from the output mirror.
And, in order to secure a stable laser output, the direction (parallelism) of the total reflection mirror and the output mirror that are arranged to face each other is extremely important. Therefore, a mirror holder having a mechanism for finely adjusting the angle of each mirror However, various proposals have been made so far (see the following patent document).
JP2002-21835 JP-A-2005-215507

A mirror holder described in Patent Document 1 includes a front plate for holding a mirror, a main body for mounting in a laser device, a plurality of through holes for storing springs formed at corresponding positions, and the through holes. A tension coil spring to be inserted into the hole, a plurality of through holes for inserting adjustment screws formed in the main body, and a plurality of adjustment screws are provided.
The front plate and the main body are contracted by inserting a tension coil spring into a through hole formed by combining the through holes for storing each spring, and hooking both ends of the front plate and the main body using pins. Bonded by force.
Then, by screwing the adjusting screw into each through hole for inserting the adjusting screw formed in the main body, the tip of the adjusting screw is brought into contact with the inner surface of the front plate. If the optional adjustment screw is further rotated in this state, the amount of protrusion of the adjustment screw increases and the distance between the front plate and the main body changes partially. As a result, the tilt angle or rotation angle of the front plate holding the mirror Adjustment is realized.
In the case of this mirror holder, after the angle adjustment by the adjustment screw is completed, a lock screw is screwed into a lock member that applies a force parallel to the axial direction of the adjustment screw to the adjustment screw, and the tip of the adjustment screw is pressed against the main body. It has a mechanism to lock the movement of

The mirror holder described in Patent Document 2 also includes a plate for holding the mirror, a block for mounting in the laser device, a plurality of through holes for storing springs formed at corresponding positions, and the through holes. A tension coil spring inserted into the inside, a plurality of through holes for insertion of adjustment screws formed in the main body, and a plurality of adjustment screws.
The plate and the block are joined by the contraction force of the spring by inserting a tension coil spring into the through-hole formed by combining the respective spring-accommodating through-holes and hooking both ends of the plate and the block using pins. Is done.
Then, by screwing the adjusting screw into each through hole for inserting the adjusting screw formed in the block, the tip thereof is brought into contact with the inner surface of the plate. If the optional adjustment screw is further rotated in this state, the protruding amount of the adjustment screw increases and the distance between the plate and the block partially changes. As a result, the tilt angle or rotation angle of the plate holding the mirror is adjusted. Is realized.
In the case of this mirror holder, after the angle adjustment by the adjustment screw is completed, the plate is blocked by inserting one fixing screw into the through hole of the block and screwing the tip into the screw hole formed in the plate. The structure to be fastened to is provided.

As described above, each of the mirror holders of Patent Documents 1 and 2 has a structure in which the mirror holding member and the installation member are joined and held by the tensile stress of the coil spring disposed in the through hole of both members. If a tension coil spring with a very strong force is used, it will be difficult to engage the hooks at both ends with each member, and it will be a heavy burden on the hook, so the tensile stress is inevitably limited and high. There was a problem that the holding force could not be realized. For this reason, while adjusting the angle of the mirror by turning the adjusting screw, there has been a drawback that a positional deviation is likely to occur between the two members due to the rotational force.
In addition, once the coil spring is attached, the tensile stress cannot be flexibly adjusted. Therefore, after securing a stronger holding force than usual, the angle between the two members can be finely adjusted with a narrow adjustment width. I couldn't.
Furthermore, both of them are provided with a lock means (angle fixing means) after completion of the angle adjustment, but since both of them are a system in which a lock screw is screwed into a place away from the coil spring as an urging means, there is no positional deviation at the time of locking. It was easy to occur.

  The present invention has been devised to solve the above-described problems of conventional mirror holders, and can ensure a relatively strong holding force at the time of angle adjustment, and can also have a holding force according to a necessary adjustment width. An object of the present invention is to provide a mirror holder that can be flexibly adjusted and is less likely to be displaced when locked.

  In order to achieve the above object, a mirror holder with an angle adjusting mechanism according to claim 1 is provided with a mirror holding member for mounting a mirror, a base member disposed opposite to the mirror holding member, and a through hole of the base member. A plurality of angle adjusting screws that are screwed together and whose tips abut against the opposing surface of the mirror holding member, a connecting screw for engaging the mirror holding member and the base member, and a bias between the mirror holding member and the base member The first and second compression springs, a through hole for accommodating the first compression spring formed in the base member, and an urging force (compression stress) of the first compression spring in the through hole = Repulsive force), a stopper (locking portion), a through hole for accommodating the second compression spring formed in the mirror holding member, and an energizing force of the second compression spring in the through hole With stopper A screw receiving member engaged with a tip of the connecting screw, the connecting screw being a first compression spring housed in the through hole of the base member and a second housing housed in the through hole of the mirror holding member. One compression spring is disposed between the head of the connecting screw and one stopper, and the other compression spring is disposed between the screw receiving member and the other stopper. It is characterized by being.

  The mirror holder with an angle adjusting mechanism according to claim 2 is a mirror holding member for mounting the mirror, a base member arranged to face the mirror holding member, and a through hole of the base member, and the tip is held by the mirror. A plurality of angle adjusting screws abutting against the opposing surfaces of the member, a plurality of connecting screws for engaging the mirror holding member and the base member, and a plurality of first for biasing between the mirror holding member and the base member. A compression spring, a plurality of second compression springs, a plurality of through holes for accommodating the first compression springs formed in the base member, and a stopper for receiving the biasing force of the first compression spring in each through hole A plurality of through holes for accommodating the second compression springs formed in the mirror holding member, a stopper for receiving the urging force of the second compression springs in each through hole, and a tip of the connecting screw. Combined Each of the connecting screws is inserted through a first compression spring housed in the through hole of the base member and a second compression spring housed in the through hole of the mirror holding member. The compression spring is arranged between the head of each connecting screw and one stopper, and the other compression spring is arranged between the screw receiving member and the other stopper.

  The mirror holder with an angle adjusting mechanism according to a third aspect is the mirror holder according to the first or second aspect, wherein the through-hole formed in the base member is a wide hole for accommodating the first compression spring. A diameter portion and a narrow diameter portion for inserting a connecting screw are provided, and a step portion formed between the wide diameter portion and the narrow diameter portion functions as the stopper, and is formed on the mirror holding member. The through hole has a wide diameter portion for accommodating the second compression spring and a narrow diameter portion for inserting the connecting screw, and is formed between the wide diameter portion and the narrow diameter portion. The portion functions as the stopper described above.

  The mirror holder with an angle adjusting mechanism according to claim 4 is a mirror holding member for mounting the mirror, a base member arranged to face the mirror holding member, and a through hole of the base member, and the tip is held by the mirror. A plurality of angle adjusting screws abutting against the opposing surfaces of the member, a plurality of connecting screws for engaging the mirror holding member and the base member, and a plurality of first for biasing between the mirror holding member and the base member. A compression spring and a plurality of second compression springs; a plurality of recesses for accommodating the first compression springs formed in the base member; and a through-hole for inserting a connection screw formed in the bottom surface of each recess; One common recess for storing the second compression spring formed in the mirror holding member, a plurality of through holes for inserting connection screws formed in the bottom surface of the common recess, and a plurality of screw holes One screw receiving member, The connecting screws are connected to the first compression spring housed in the recess of the base member, the through hole of the base member, the through hole of the mirror holding member, and the second compression spring housed in the common recess of the mirror holding member. Each of the first compression springs is inserted between the screw holes of the common screw receiving member, the first compression spring is disposed between the head of each connecting screw and the bottom surface of the recess, and the second The compression spring is arranged between the common screw receiving member and the bottom surface of the common recess.

  The mirror holder with an angle adjusting mechanism according to claim 5 is the mirror holder according to claims 1 to 4, wherein at least a portion of the opposing surface of the mirror holding member that is in contact with the angle adjusting screw is made by a quenching member. It is characterized by the construction.

  The mirror holder with an angle adjusting mechanism according to claim 6 is the mirror holder according to any one of claims 1 to 5, wherein the first compression spring and the second compression spring further include a plurality of disc springs laminated. It is characterized by comprising spring groups.

  The mirror holder with an angle adjusting mechanism according to a seventh aspect is the mirror holder according to the first to fifth aspects, wherein the first compression spring and the second compression spring are formed of a compression coil spring. .

In the mirror holder with an angle adjusting mechanism according to claim 1, a compression spring is housed in each of the through hole (or recess) of the base member and the through hole (or recess) of the mirror holding member, The compression spring is disposed between the head of the connection screw and one stopper (or the bottom surface of the recess), and between the screw receiving member into which the tip of the connection screw is screwed and the other stopper (or the bottom surface of the recess).
For this reason, when the connecting screw is loosened, the compression stress of each compression spring is applied to each stopper, and the base member and the mirror holding member can be pressed in the joining direction (closing direction). It is possible to adjust the angle.
Further, when the connecting screw is fully tightened, the compression spring is completely contracted and the movable width is almost eliminated, so that the angle between the base member and the mirror holding member can be fixed.

The mirror holder with an angle adjusting mechanism according to any one of claims 1 to 7 uses a compression spring as means for urging the mirror holding member and the base member in the joining direction, and for mounting as in the case of a tension spring. Because it is not necessary to attach the hook to each member, it is possible to adopt a compression spring with a correspondingly high compressive stress and urge the members in the joining direction with a stronger force. It becomes possible to do.
In addition, the repulsion force (compression stress) of the compression spring can be set to an arbitrary strength by adjusting the looseness of the connecting screw. This is convenient when performing fine angle adjustment.
In addition, since the connecting screw that functions as the locking means and the compression spring that functions as the biasing means are arranged on the same axis, no extra external force is applied to the biasing means as the connecting screw rotates, and the locking is achieved. It is possible to prevent the positional deviation caused by the above.

Further, in the mirror holder with an angle adjusting mechanism according to any one of claims 1 to 7, the compression spring that biases the mirror holding member and the base member in the closing direction (joining direction) is a through-hole (or a concave portion) of the mirror holding member. Dispersed and arranged in the inner and through holes (or recesses) of the base member.
When the connecting screw is properly screwed into the screw receiving member, one compression spring is compressed between the head of the connecting screw and the stopper (or the bottom of the recess), and the other compression spring is engaged with the tip of the connecting screw. Since the compressed screw receiving member and the stopper (or the bottom surface of the recess) are compressed, each exerts a repulsive force independently.
As a result, it is possible to provide a far wider adjustment stroke and a stronger holding force than in the case where the compression spring is disposed on either the base member or the mirror holding member.

  In the mirror holder with an angle adjusting mechanism according to claim 4, since the tip of each connecting screw is engaged with the common screw receiving member, the screw receiving member is not particularly pressed when screwed. However, the rotation is restricted. For this reason, it becomes possible to improve the work efficiency at the time of an assembly and adjustment compared with the case where rotation of a screw receiving member is controlled individually.

  In the mirror holder with an angle adjustment mechanism according to claim 5, the portion where the angle adjustment screw abuts on the opposing surface of the mirror holding member is formed of a hardened quenching member. Even when the load on the opposite surface increases, it is possible to effectively prevent the occurrence of defects such as deformation.

FIG. 1 shows the back of the mirror holder 10 with an angle adjusting mechanism according to the present invention, and FIG. 2 is a cross-sectional view taken along the line AA of FIG.
As shown in the figure, the mirror holder 10 with an angle adjusting mechanism includes a base member 12 and a mirror holding member 14 made of aluminum.
FIG. 3 is a cross-sectional view showing a state where the base member 12 and the mirror holding member 14 are separated.

FIG. 4 is a plan view showing the back surface 16 of the base member 12, and FIG. 5 is a plan view showing the front surface (opposing surface) 18 of the base member 12.
As illustrated, the base member 12 has a substantially L-shaped shape.
As shown in FIGS. 2 and 3, the base member 12 is formed with through holes 20 extending from the back surface 16 to the front surface 18, and each through hole 20 has a first adjusting screw 22 for adjusting the tilt angle. A second adjusting screw 24 for fulcrum formation and spacing adjustment, and a third adjusting screw 26 for adjusting the rotation angle are respectively inserted and screwed into a female screw formed on the inner surface of the through hole 20. (In FIG. 2 and FIG. 3, only two through holes 20 are depicted, but actually three through holes 20 are formed).
A ball 29 is rotatably mounted at the tip of each adjustment screw.

Two recesses 32 are formed in the vicinity of the second adjustment screw 24 on the back surface 16 of the base member 12. Each recess 32 has a sufficient diameter to accommodate the first disc spring group 34 inserted into the head side of the connecting screw 30.
Further, on the bottom surface of each recess 32, a through hole 33 for inserting only the connecting screw 30 is formed concentrically.
Since the through hole 33 has a smaller diameter than the recess 32, a step is formed between the bottom surface of the recess 32 and the through hole 33.
The base member 12 has a plurality of through holes 35 for fixing to a laser oscillator body (not shown).

FIG. 6 is a plan view showing the back surface (opposing surface) 36 of the mirror holding member 14, and FIG. 7 is a plan view showing the front surface 38 of the mirror holding member 14.
As illustrated, a frame portion 42 for holding the mirror 40 is formed at the center of the mirror holding member 14.

Further, on the rear surface 36 of the mirror holding member 14, a pair of through holes 44 for inserting connection screws, a first receiving portion 46 with which the ball 29 of the first adjusting screw 22 abuts, and a second adjustment A second receiving portion 48 with which the ball 29 of the screw 24 abuts and a third receiving portion 50 with which the ball 29 of the third adjusting screw 26 abuts are provided.
The first receiving portion 46 has a flat circular shape and is formed by a quenching member such as SK steel. The second receiving portion 48 has a circular shape with a concave portion 52 at the center, and is also formed of a quenching member. As shown in FIGS. 2 and 3, the main bodies of the first receiving portion 46 and the second receiving portion 48 are both fitted in a through hole formed in the mirror holding member 14 and reach the front surface 38. .
On the other hand, the third receiving portion 50 has a pair of shafts 54 made of a quenching member embedded in the back surface 36, and a third adjusting screw 26 along a groove between the shafts 54, 54 arranged in parallel. The ball 29 slides back and forth.

On the front surface 38 of the mirror holding member 14, a common recess 58 for accommodating the second disc spring group 56 inserted through the distal end side of each connecting screw 30 is formed.
The opening 60 and the bottom surface 62 of the common recess 58 have a bowl shape with rounded rectangular corners, and the pair of through holes 44, 44 described above are opened on the bottom surface 62.

Hereinafter, a method for assembling the mirror holder 10 will be described.
First, as shown in FIG. 3, with the front surface 18 of the base member 12 and the rear surface 36 of the mirror holding member 14 facing each other, the connecting screw 30 is inserted from the back surface 16 side of the base member 12 into the recess 32 and the through hole 33. Let
At this time, a first disc spring group 34 (a plurality of disc springs 34 a + washers 34 b) is inserted into the head side of the connecting screw 30.

  Next, the tip of the connecting screw 30 is inserted into the through hole 44 of the mirror holding member 14, and a second disc spring group 56 (a plurality of disc springs 56 a + washers 56 b is attached to the tip of each connecting screw 30 reaching the recess 58. ) Is inserted.

Next, as shown in FIG. 8, a plate nut 64 as a screw receiving member is put on the common recess 58 of the mirror holding member 14.
The plate nut 64 has a bowl shape similar to that of the concave portion 58 of the mirror holding member 14, and is formed to be slightly smaller in size than the opening 60.
The plate nut 64 has a pair of screw holes 66 and 66 formed therein.
Finally, the tip of each connecting screw 30 is aligned with the screw holes 66, 66 of the plate nut 64, and the connecting screw 30 is rotated so that the tip of the connecting screw 30 is screwed into the screw hole 66 as shown in FIG. Then, the base member 12 and the mirror holding member 14 are integrated via the connecting screw 30.
In this state, the first disc spring group 34 is disposed so as to be extendable and contractable between the head of the connection screw 30 and the bottom surface (step portion) of the recess 32, and the second disc spring group 56 is a plate nut. 64 and the bottom surface 62 of the common recess 58 are arranged so as to be expandable and contractable, and the repulsive force of the disc spring groups 34 and 56 urges the base member 12 and the mirror holding member 14 in the joining direction. It becomes.
When the coupling screw 30 is further tightened against the repulsive force of the disc spring groups 34 and 56, the disc spring groups 34 and 56 are fully contracted as shown in FIG. The angle between the members 14 is locked.

In order to adjust the tilt angle and rotation angle of the mirror 40, first, both the connecting screws 30 are slightly loosened to release the locked state.
Even in this case, since the repulsive force of the first disc spring group 34 and the second disc spring group 56 is effective as described above, the gap between the mirror holding member 14 and the base member 12 is held sufficiently firmly, and the positional deviation occurs. Will not occur.
Next, when the first adjusting screw 22 is rotated to the right and left by the required amount, the protruding amount at the tip thereof increases and decreases, and the ball 29 of the second adjusting screw 24 and the concave portion 52 of the second receiving portion 48 are used as fulcrums. The tilt angle between the base member 12 and the mirror holding member 14 is adjusted.
When the third adjustment screw 26 is rotated to the right and left by the required amount, the amount of protrusion at the tip of the third adjustment screw 26 increases and decreases, and the ball 29 of the second adjustment screw 24 and the recess 52 of the second receiving portion 48 are used as fulcrums. Thus, the rotation angle between the base member 12 and the mirror holding member 14 is adjusted.
When the distance between the base member 12 and the mirror holding member 14 is to be adjusted, the second adjusting screw 24 is rotated to the right and left by a necessary amount.
After the above angle adjustment is completed, both connecting screws 30 are tightened until the disc spring groups 34 and 56 are fully contracted, and the angle between the base member 12 and the mirror holding member 14 is fixed.

This mirror holder 10 uses a compression spring made up of disc spring groups 34 and 56 as means for urging the base member 12 and the mirror holding member 14 in the joining direction, so that it looks like a tension spring made up of a coil spring. There is no need to provide mounting hooks at both ends.
Therefore, it is possible to save the space for storing the hook, and accordingly, a larger number of disc springs 34a and 56a can be stored in the recess 32 of the base member 12 and the common recess 58 of the mirror holding member 14, so that the base member 12 and Even if the thickness of the mirror holding member 14 is set to be relatively thin, a strong holding force can be secured.

Further, since the repulsive force of the disc spring groups 34 and 56 can be adjusted by adjusting the looseness of the connecting screw 30, more precise angle adjustment is possible.
That is, when the connecting screw 30 is slightly loosened, a higher biasing force is applied to the bottom surface of the concave portion 32 of the base member 12 and the bottom surface 62 of the common concave portion 58 of the mirror holding member 14 instead of narrowing the adjustment width. . Therefore, after the angle adjustment between the base member 12 and the mirror holding member 14 is once completed, the angle adjustment with a very small width can be performed with high accuracy while maintaining a strong holding force.

  Further, since the locking connecting screw 30 is inserted into the disc spring groups 34 and 56 as the urging means and the respective members are coaxially arranged, an extra external force is applied to the urging means by the rotation of the connecting screw 30. Therefore, it is possible to effectively prevent the occurrence of displacement when locked.

The disc spring has a structure in which a large number of elastic bodies with relatively small deflections are connected, so there is an advantage that the relationship between the amount of expansion and contraction of the whole spring and the repulsive force is stable, while a wide adjustment stroke and strong hold In order to secure power, it is necessary to increase the number of installations.
On the other hand, in the case of the mirror holder 10 according to the present invention, since a disc spring to be inserted through the connecting screw 30 is distributed on the base member 12 side and the mirror holding member 14 side, the base member or mirror holding is adopted. Compared with the case where the disc spring is stored in only one of the members, a larger number of disc springs can be mounted, and as a result, it is easy to ensure a wider adjustment stroke and a stronger holding force.

  As the number of disc springs increases and the holding force increases, the load on the back surface 36 of the mirror holding member 14 due to the adjustment screw ball 29 increases. As described above, the first receiving portion 46 and the second receiving portion 46 Since the receiving part 48 and the third receiving part 50 are made of a hardened quenching member, it is possible to prevent problems such as deformation.

In the case of this mirror holder 10, as described above, the common recess 58 for accommodating the second disc spring group 56 inserted through both the connecting screws 30 is formed on the front surface 38 of the mirror holding member 14, and A mechanism is adopted in which the tip is screwed into the screw holes 66, 66 of a single plate nut 64 that is slightly smaller than the opening 60 of the common recess 58, so that the plate nut 64 hits the wall surface in the common recess 58 and As a result of the rotation being restricted, the connecting screws 30 can be screwed together without any particular means for preventing rotation, and the assembly process can be made more efficient and easier to adjust.
However, the present invention is not limited to this. For example, recesses for accommodating the second disc spring groups 56 are formed in the mirror holding member 14 by the number of the connecting screws 30, the second disc spring groups 56 are arranged on each, and the tip of each connecting screw 30 is attached. You may screw individually using screw receiving members, such as a nut.

In the above, the bottom surface of the concave portion 32 of the base member 12 functions as a stopper for receiving the repulsive force of the first disc spring group 34, and the bottom surface 62 of the common concave portion 58 of the mirror holding member 14 is the second dish. Although an example of functioning as a stopper that receives the repulsive force of the spring group 56 has been shown, the present invention is not limited to this.
In short, it is only necessary to receive the repulsive force of the first disc spring group 34 and the second disc spring group 56 and to urge the base member 12 and the mirror holding member 14 in the joining direction. For example, the first disc spring group A through hole having a diameter sufficient to accommodate 34 and the second disc spring group 56 is formed in the base member 12 and the mirror holding member 14, and each disc spring group is moved in each through hole. You may substitute by forming the projection part (contact part) to regulate.

  In the above, an example in which the first disc spring group 34 and the second disc spring group 56 are inserted through the connecting screw 30 has been shown. Instead, the first compression coil spring and the second compression coil spring are used. It may be arranged in the recess 32 of the base member 12 and in the common recess 58 of the mirror holding member 14, and the connecting screw 30 may be inserted through each.

It is a top view which shows the back surface of the mirror holder with an angle adjustment mechanism concerning this invention. It is AA sectional drawing of FIG. It is sectional drawing which shows the state which isolate | separated the base member and the mirror holding member. It is a top view which shows the back surface of a base member. It is a top view which shows the front (opposite surface) of a base member. It is a top view which shows the back surface (opposite surface) of a mirror holding member. It is a top view which shows the front of a mirror holding member. It is a top view which shows the front of the mirror holder with an angle adjustment mechanism. It is sectional drawing which shows the state which tightened the connection screw of the mirror holder with an angle adjustment mechanism.

Explanation of symbols

10 Mirror holder with angle adjustment mechanism
12 Base material
14 Mirror holding member
16 Back of base member
18 Front of base member
20 Through hole for adjusting screw
22 First adjustment screw
24 Second adjustment screw
26 Third adjustment screw
29 balls
30 Connection screw
32 Recess of base member
33 Base member through hole
34 First disc spring group
34a Belleville spring
34b washer
36 Rear side of mirror holding member
38 Front of mirror holding member
40 mirror
42 Frame
44 Through hole of mirror holding member
46 First receiving part
48 Second receiving part
50 Third receiving part
52 recess
54 shaft
56 Second disc spring group
56a Belleville spring
56b washer
58 Common recess
60 Common recess opening
62 Bottom of common recess
64 plate nut
66 Screw hole

Claims (7)

A mirror holding member for mounting the mirror;
A base member disposed opposite to the mirror holding member;
A plurality of angle adjusting screws that are screwed into the through holes of the base member and whose front ends are in contact with the opposing surface of the mirror holding member;
A connecting screw for engaging the mirror holding member and the base member;
A first compression spring and a second compression spring for biasing between the mirror holding member and the base member;
A through hole for accommodating the first compression spring formed in the base member;
A stopper for receiving the biasing force of the first compression spring in the through hole;
A through hole for accommodating a second compression spring formed in the mirror holding member;
A stopper for receiving the urging force of the second compression spring in the through hole;
A screw receiving member engaged with the tip of the connecting screw,
The connection screw is inserted through a first compression spring housed in the through hole of the base member and a second compression spring housed in the through hole of the mirror holding member,
One compression spring is arranged between the head of the connecting screw and one stopper, and the other compression spring is arranged between the screw receiving member and the other stopper. Mirror holder with angle adjustment mechanism. A mirror holding member for mounting the mirror;
A base member disposed opposite to the mirror holding member;
A plurality of angle adjusting screws that are screwed into the through holes of the base member and whose front ends are in contact with the opposing surface of the mirror holding member;
A plurality of connecting screws for engaging the mirror holding member and the base member;
A plurality of first compression springs and a plurality of second compression springs for biasing between the mirror holding member and the base member;
A plurality of through holes for accommodating the first compression springs formed in the base member;
A stopper for receiving the biasing force of the first compression spring in each through hole;
A plurality of through holes for accommodating the second compression springs formed in the mirror holding member;
A stopper for receiving the urging force of the second compression spring in each through hole;
A screw receiving member engaged with the tip of the connecting screw,
Each of the above connecting screws is inserted through a first compression spring housed in the through hole of the base member and a second compression spring housed in the through hole of the mirror holding member,
One compression spring is arranged between the head of each connecting screw and one stopper, and the other compression spring is arranged between the screw receiving member and the other stopper. Mirror holder with angle adjustment mechanism. The through hole formed in the base member includes a wide diameter portion for housing the first compression spring and a narrow diameter portion for inserting the connecting screw. The step formed between functions as the above-mentioned stopper,
The through hole formed in the mirror holding member includes a wide diameter portion for housing the second compression spring, and a narrow diameter portion for inserting the connecting screw, and the wide diameter portion and the narrow diameter portion The mirror holder with an angle adjusting mechanism according to claim 1, wherein a step portion formed between the two functions as the stopper. A mirror holding member for mounting the mirror;
A base member disposed opposite to the mirror holding member;
A plurality of angle adjusting screws that are screwed into the through holes of the base member and whose front ends are in contact with the opposing surface of the mirror holding member;
A plurality of connecting screws for engaging the mirror holding member and the base member;
A plurality of first compression springs and a plurality of second compression springs for biasing between the mirror holding member and the base member;
A plurality of recesses for accommodating the first compression springs formed on the base member;
A through-hole for inserting a connecting screw formed on the bottom surface of each recess;
One common recess for housing the second compression spring formed in the mirror holding member;
A plurality of through holes for connecting screw insertion formed on the bottom surface of the common recess,
A screw receiving member having a plurality of screw holes,
Each of the connecting screws is connected to the first compression spring housed in the recess of the base member, the through hole of the base member, the through hole of the mirror holding member, and the second compression spring housed in the common recess of the mirror holding member. Each is inserted, and each tip is engaged with the screw hole of the common screw receiving member,
The first compression spring is disposed between the head of each connecting screw and the bottom surface of the recess, and the second compression spring is disposed between the common screw receiving member and the bottom surface of the common recess. Mirror holder with angle adjustment mechanism.   The mirror holder with an angle adjusting mechanism according to any one of claims 1 to 4, wherein at least a portion of the opposing surface of the mirror holding member that is in contact with the angle adjusting screw is configured by a quenching member.   6. The mirror holder with an angle adjusting mechanism according to claim 1, wherein the first compression spring and the second compression spring are formed of a group of disk springs in which a large number of disk springs are stacked. 6. The mirror holder with an angle adjusting mechanism according to claim 1, wherein the first compression spring and the second compression spring are compression coil springs.

Images