JP4849804B2 - Robot operation method - Google Patents

Description

The present invention relates to a method of operating a robot for transferring and transferring a workpiece between apparatuses such as a cassette for stacking and storing plate-shaped workpieces in a multi-stage, and a furnace for similarly stacking and storing and drying processing, in particular. The present invention relates to a method for operating a robot that can omit teaching using another cassette (deployment cassette) by teaching using one cassette (reference cassette) .

Conventionally, there are robots that transfer workpieces such as semiconductor wafers and glass substrates between cassettes. The robot is previously taught a predetermined operation necessary for conveyance, and performs a uniform operation according to the teaching data.

Specifically, an extraction preparation position for picking up a workpiece housed in a cassette installed at a certain point with a robot arm, an extraction start position taken with a robot arm, and the picked workpiece at another point. Stores teaching data such as a storing preparation position for storing in a cassette, a retracting start position for storing and retracting an arm, detailed position information such as other operation paths, and other speed information and work information. A desired operation can be performed.

And this teaching data is comprised based on the absolute coordinates (robot coordinates) peculiar to the robot, and the operator confirms and inputs each absolute position and finishes inputting all the points. The teaching work for one robot is completed. Further, even when the same robot is used in another cassette (different position), in order to teach the same operation, it is necessary to input the absolute position one by one using another cassette.

For this reason, there are inventions described in Patent Documents 1 to 3 for reducing the burden of such teaching work.

In the invention described in Patent Document 1, an identification mark is provided in each of the grooves of the cassette, and the operation is performed by aligning the position of the arm while detecting the identification mark. According to this invention, the identification mark and the cassette are associated with each other in a 1: 1 ratio, and by detecting the identification mark one by one, the robot can be operated without performing teaching work. is there.

In the inventions described in Patent Documents 2 and 3, detection marks are provided in each storage unit so that the positional relationship with the cassette is constant, the reference position of the hand with respect to the detection marks is obtained, and other storage units The correction position of the hand with respect to the detection mark is obtained, and the coordinates of the hand when the reference position matches the correction position are determined as the positioning coordinates. According to this invention, the positioning coordinates of the hand in each storage unit can be taught using the reference position and the correction position, and the burden of teaching work can be reduced.

JP-A-5-114641 (FIG. 1) JP-A-8-71973 (paragraph [0030]) JP 2001-158507 A (paragraph [0011])

However, since the invention described in Patent Document 1 aligns the arm while detecting each identification mark, it interferes with high speed loading / unloading of the workpiece by the robot. Yes.

In addition, the inventions described in Patent Documents 2 and 3 perform the operation of actually moving the robot to determine the positioning coordinates, and recognize the image of the detection mark. Therefore, it takes time for accurate image recognition.

In addition, any of the inventions described in Patent Documents 1 to 3 is provided with an identification mark (detection mark) for one storage section (storage section), and a plurality of storage sections (storage sections). ) Is not considered.

Furthermore, as the size of glass substrates has increased due to the recent increase in liquid crystal and plasma displays, the size of robots has also increased, and the robot teaching work has various problems.

First, since teaching work must be performed by at least three people, there are problems such as a rise in labor costs and deterioration in work efficiency. That is, the substrate itself, which is a workpiece, increases in size, and in order to visually confirm the positional relationship between the workpiece and the cassette, two workers, a worker in charge of the left side and a worker in charge of the right side, are required. Since a worker who operates the machine is also necessary, at least three people are required. In particular, visual confirmation is required as the substrate, which is a workpiece, such as a 6th generation glass substrate (about 1.5 mx 1.8 m) and a 7th generation glass substrate (about 1.9 mx 2.2 m) becomes larger. The number of personnel will increase.

Secondly, there is a problem that teaching work at a high place is necessary and dangerous due to the increase in the size of the cassette and the increase in the vertical stroke of the robot. That is, since it is necessary to visually confirm the positional relationship between the workpiece and the cassette at a high place (for example, at a position of 4 m), the teaching work is dangerous. Further, in addition to the danger in working at high places, an unexpected danger due to malfunction or malfunction of the robot being taught is also predicted.

Furthermore, in connection with the first problem, if personnel for visual confirmation at a high place are required, the number of personnel for further visual confirmation increases.

As described above, the teaching work has been increased due to the increase in the size of the cassette and the efficiency of the teaching work has been variously studied. The biggest problem is the variation in the structure between the cassettes. In other words, since the cassettes have become larger and the number of substrates to be stored has increased, it is difficult to install each shelf-shaped storage unit that stores substrates one by one with high dimensional accuracy, and each storage The error in which the variation in the number of parts is allowed is inevitably reduced from the viewpoint of the accommodation efficiency, which is an increase in the number of copies to be stored, but the teaching work in consideration of the variation in the individual cassettes has not been automated.

The present invention has been made in view of these points, and an object of the present invention is to use teaching data obtained by teaching using a certain cassette as a reference in order to reduce the burden of teaching work of the robot. Thus, an object of the present invention is to provide a robot operating method in which teaching using other cassettes is omitted, and teaching data in other cassettes is automatically generated and executed .

In order to solve the above problems, the present invention provides reference cassette position data obtained as position coordinates recognized by a robot from an identification mark provided for recognizing a physical positional relationship between a reference cassette and a development cassette. And developing cassette teaching data in the developing cassette is automatically generated from the teaching data for the reference cassette taught using the reference cassette based on the developing cassette position data.

More specifically, the present invention provides the following.

(1) The same outline structure, comprising a plurality of accommodating portions capable of accommodating a workpiece inside a frame having an outer frame, and an open surface of the frame that enables loading and unloading of the workpiece by a robot. A plurality of plate-like workpieces are stacked and stored in a plurality of cassettes having a plurality of cassettes, or an operation method of a robot for unloading the workpieces from the cassette, wherein the plurality of cassettes are aligned on a constant basis In each of the plurality of cassettes, the outer frame on the open surface side serves as an index for the plurality of storage portions, specifies a predetermined part of each cassette, and stores the work by the robot. And a step of providing an identification mark that enables unloading at the same position for each of the plurality of cassettes, and selecting one of the plurality of cassettes as a reference cassette. A reference teaching data obtaining step for obtaining reference teaching data necessary for a predetermined operation of the robot using the reference cassette, and an XY detection sensor for scanning the identification mark provided on the outer frame in the XY direction on the hand of the robot And a detection sensor comprising a Z detection sensor for scanning the Z direction of the outer frame, and a reference for scanning the identification mark provided on the reference cassette to identify the certain predetermined portion of the reference cassette A reference position data acquisition step for obtaining position data, and using the other plurality of cassettes as a development cassette, the detection sensor is used to scan the identification mark provided on the development cassette, so that the predetermined predetermined of the development cassette a deployed position measuring step of measuring the deployed position data for specifying a portion to scan the identification marks provided on the plurality cassettes each Obtained, on the basis of the relative positional relationship between the deployed position data and the reference position data, automatically generating expanded teaching necessary data from the reference teaching data, to achieve a predetermined operation by using the expansion cassette An unfolding teaching data generating step, and an operation executing step of causing the robot to be operated with respect to the unfolding cassette based on the unfolding teaching data while executing the operation of the robot with respect to the reference cassette based on the reference teaching data. A robot operating method characterized by comprising:

According to the present invention, the plurality of cassettes are aligned and arranged with a certain reference, and one of the plurality of cassettes is used as a reference cassette, while the other plurality of cassettes is selected as a development cassette, and the plurality of cassettes is selected. Based on the reference position data for specifying a predetermined portion related to the reference cassette and the development position data for specifying the predetermined portion related to the development cassette , which are obtained by scanning the identification marks provided on the respective reference marks , Since the robot teaching data necessary for realizing the predetermined operation using the developing cassette can be automatically generated from the reference teaching data acquired using the teaching data, the teaching work using the developing cassette can be omitted. This can reduce the burden of teaching work. In addition, if the reference cassette is installed at a safe position where teaching work is easy, teaching of a deployment cassette at a dangerous position such as a high place can be omitted. Can be secured.

That is, conventionally, for example, when there are four cassettes of the same shape, the robot teaching operation has been forced for all four, but according to the present invention, one of the four cassettes is used as a reference cassette. The teaching work using only the reference cassette is performed to collect the reference teaching data, and the developing teaching data in the developing cassette can be automatically generated by using the reference teaching data. Further, according to the present invention, in the past, the operation of teaching each cassette by giving position data to each robot one by one, according to the present invention, using the automatically generated development teaching data as a guide, the structure of each cassette Since fine teaching data can be obtained by making fine adjustments according to characteristics (differences in physical conditions), it is possible to reduce the burden from the viewpoint of not having to teach the robot one by one. . In other words, the present invention only teaches the robot using the reference cassette, and the development cassette (other cassettes) does not need to be taught.

Also, assuming that the reference cassette is installed at a position where teaching work is easy and a cassette installed at a high place is selected as a development cassette, Since the teaching of the development cassette at the place can be omitted, the work at a high place is eliminated, and an excellent one in terms of safety can be provided.

Here, since the reference cassette and the expansion cassette are installed at physically different positions, in order to automatically generate the expansion teaching data from the reference teaching data, information on the positional relationship between the reference cassette and the expansion cassette is required. Necessary. For this reason, the same identification mark is provided at a predetermined position of each of the reference cassette and the development cassette, and based on the position data (reference position data, development position data) of each cassette obtained by scanning this identification mark, Development teaching data is generated. That is, the reference cassette and deployment cassette has the same external structure, the same identification mark in the same position that are provided, the position data (reference position data, deployed position data) based on the deployment It becomes easy to generate teaching data. Even if the reference cassette and the development cassette do not have such a structure and configuration, for example, even if the relative size is different, the structure and configuration of the reference cassette is developed based on the reference position data. If the structure and configuration of the development cassette can be known from the position data, the development teaching data can be automatically generated based on the information. Furthermore, even if the substrate is stored in an apparatus such as a drying furnace having the same storage configuration as the cassette, if an identification mark is provided at a position similar to the cassette, a virtual cassette is configured. Can be generated automatically.

The “identification mark” is a mark provided on the cassette so that the position (robot coordinate) of the cassette can be measured by specifying a predetermined part of the cassette by a predetermined sensor of the robot. As the identification mark, various forms and shapes are conceivable. Moreover, it is preferable that the identification mark is provided on or in the vicinity of the open surface on the side where the workpiece is loaded and unloaded in the cassette. In this way, it is possible to easily scan the identification mark within a range where the robot performs a predetermined operation.

For example, when an identification mark is provided on the outer frame of the cassette, there are various types such as a seal, such as a quadrangle, a circle, a triangle, etc., irregularities on the outer frame of the cassette, or only a part of the color being different. Marking is possible. However, it is necessary to employ a sensor beam having a different reflectivity between the identification mark and the outer frame in the vicinity thereof so that it can be distinguished and recognized .

According to the present invention, in a cassette including a plurality of storage portions and an open surface of the frame, an identification mark serving as an index for the plurality of storage portions is provided on the outer frame on the open surface side. Therefore, it contributes to measuring the absolute position of the robot and calculating the relative position with respect to the plurality of storage units.

Further, at least two cassettes have the same structure, the identification mark of the same shape at the same position to provide a cassette which is provided, it is possible to reduce the burden of the teaching work.

Here, the “identification mark that serves as an index for a plurality of storage units” is different from the identification mark provided in each storage unit (see Patent Document 1), and the number of storage units and the number of identification marks are different. This means that the position of each container is recognized by the relative position from the identification mark.

In addition, the “same outer structure” means that the same number of accommodating portions are provided in a frame of at least approximately the same size, and “the same identification mark is provided at the same position ” It means that the substantially identical identification mark is provided at substantially the same position as the frame of substantially the same size. The above “substantially the same” means that an error that does not hinder the robot's work operation is allowed, and it is possible to allow a wide range of identity as the robot and cassette become larger. is there.

According to the present invention, the identification mark provided on the outer frame of the frame in the cassette (substrate storage device) is scanned by the XY detection sensor provided in the robot hand, while the frame in the cassette is detected by the Z detection sensor. since scanning the outer frame in the Z direction (depth direction), it recognizes the identification mark by the detection sensor, XY direction position, and can be measured in the Z direction position of the outer frame, to reduce the burden of the teaching work It becomes possible.

(2) The robot operating method characterized in that the identification mark is a sign attached on a frame surrounding an open surface for carrying in and carrying out the work of the cassette.

According to the present invention, since the mark as the identification mark is provided on the frame surrounding the open surface for loading and unloading the workpiece with respect to the cassette, it is easy to detect and scan the identification mark by the sensor provided in the robot. The reference position data and the simple position data can be easily obtained.

In addition, it is preferable that the identification mark is provided as a sign having substantially the same outer structure at substantially the same position in the vicinity of at least three vertices on the open surface.

(3) The XY detection sensor is a reflective sensor in which a light emitting element and a light receiving element are connected, and the Z detection sensor is a light shielding sensor in which the light emitting element and the light receiving element are opposed to each other, the XY detection sensor and An operation method of a robot, wherein the Z detection sensor is arranged so that a beam direction is a right angle .

According to the present invention, the XY detection sensor is a reflection type sensor, the Z detection sensor is a light shielding sensor, and the beam directions of the XY detection sensor and the Z detection sensor are perpendicular to each other. It is possible to recognize the identification mark and easily perform the measurement work of the position in the XY direction and the position in the Z direction of the outer frame.

(4) A plurality of the identification marks are provided for each of the plurality of cassettes, and the reference teaching data includes data obtained by calculation, and the plurality of identification marks provided on the reference cassette are scanned. A distortion detecting step for detecting distortion of the reference cassette based on the reference position data obtained as described above, a correcting step for correcting the reference teaching data based on the distortion amount detected by the distortion detecting step, Based on the development position data obtained by scanning a plurality of identification marks provided on the development cassette, based on the distortion detection step of detecting the distortion of the development cassette, based on the amount of distortion detected by the distortion detection step, And a correction step of correcting the development teaching data .

According to the present invention, it is possible to detect the distortion of the reference cassette from the reference position data and correct the already obtained reference teaching data based on the amount of the distortion. Therefore, it is possible to grasp the structural characteristics of each cassette.

Here, the structural characteristics of the cassette are differences in physical conditions. In addition to the dimensional errors and distortions specific to each cassette, the cassette characteristics are caused by the inclination and distortion of the floor and base on which the cassettes are installed. Includes tilt and distortion.

Furthermore, according to the present invention, since the developed teaching data already obtained can be corrected based on the distortion amount obtained by the distortion detecting step, the teaching data can be created according to the structure of each cassette. This can be done automatically, and the burden of teaching work can be reduced.

(5) The operation method of the robot, wherein the distortion detection step is a step of detecting distortion in the XY direction and / or Z direction of the frame body in the reference cassette or the expansion cassette.

According to the present invention, the distortion of the cassette can be decomposed into two elements of XY distortion and Z distortion, and can be detected by a simple method based on either or both of them.

(6) The detection sensor includes an XY detection sensor and a Z detection sensor, and the distortion detection step is performed in the XY direction obtained by scanning the identification mark provided on the cassette using the XY detection sensor . From the position information in the Z direction obtained by scanning the position in the Z direction of the frame body in the cassette using the XY distortion detection step for detecting distortion in the XY direction of the cassette from the position information and the Z detection sensor. And a Z distortion detecting step of detecting distortion in the Z direction of the cassette .

According to the present invention, the distortion of the reference cassette or expand the cassette as a shift in the XY direction position information and the robot coordinate of the Z-direction position information, the XY distortion in the XY direction, and separated into two elements with Z distortion detection can do. The XY distortion is a two-dimensional distortion in the XY direction parallel to the open surface on the side where the work is taken in and out, and the Z distortion is a one-dimensional distortion in the Z direction parallel to the direction where the work is taken in and out. is there. Accordingly, since the distortion of the reference cassette and the developing cassette can be detected from the positions in the XY direction and the Z direction of the frame body with a simple sensor configuration, the structure of the individual cassettes in the XY direction and the Z direction, such as tilt and distortion. It becomes possible to grasp the above characteristics by a simple method.

If a plurality of identification marks are provided in the same plane of the reference cassette or the development cassette, the plurality of identification marks can be easily scanned and XY distortion can be detected by a simple method. That is, by measuring the positions of one identification mark and another identification mark arranged on the left and right, it is possible to detect the presence or absence of distortion in the XY direction and the amount of distortion.

Here, the plurality of identification marks are provided on the same surface of the reference cassette or the development cassette. In the cassette, the plurality of identification marks are provided on the open surface of the frame body that enables loading and unloading of workpieces by the robot. Means that. Further, even if the surface is parallel to the open surface, the same effect can be obtained if the identification mark can be provided in the same surface.

Also, it is possible to detect the presence and amount of strain of the strain of the cassette in the Z-direction by measuring the position in the Z-direction at a predetermined position and the lower position of the upper frame (length in the depth direction) it can. Here, the predetermined positions are preferably one identification mark arranged on the upper side of the frame and another identification mark arranged on the lower side.

Further, according to the present invention, it is possible to detect the distortion of the reference cassette from the positions of the outer frame of the frame body in the XY direction and the Z direction , and correct the already obtained reference teaching data based on the distortion amount. it can. Further, it is possible to detect the distortion of the expansion cassette from the positions of the outer frame of the frame body in the XY direction and the Z direction , and correct the expansion teaching data already obtained based on the distortion amount. Thus, teaching data can be automatically created according to the structure of each cassette, and the burden of teaching work can be reduced.

The predetermined operation (7) already taught the robot, when executing in altered robot characteristics, the first teaching data necessary for a predetermined operation of the robot prior to the modification of the characteristics, provided on the cassette the stores and the first position data of the robot prior to the modification of the characteristics obtained by scanning an identification mark, using the detection sensor provided in the hand of the robot after the change of the characteristics, the cassette an identification mark scanning step of scanning the identification mark provided, and after the change position measuring step of measuring a second position data of the robot obtained on the basis of the scanning by the identification mark scanning step, said first position data Necessary for realizing a predetermined operation after a change in characteristics from the first teaching data based on a relative positional relationship with the second position data. Robot method of working which is characterized in that and a post-change teaching data generating step of automatically generating the teaching data of the robot.

According to the present invention, even when the characteristics of the robot change, such as when the robot's hand or arm parts are replaced or when the robot's position or axis is shifted due to maintenance, the robot before the change in characteristics From the teaching data (first teaching data), the teaching data (second teaching data) necessary for the robot to realize a predetermined operation after the change in characteristics can be automatically generated, so the teaching work is performed again. There is no need, and the burden of teaching work can be reduced.

Here, the positional deviation or axis deviation of the robot is determined by scanning the identification mark provided on the cassette, and the first position data (cassette position data before the characteristic change) recognized by the robot before the characteristic change and the characteristic. It can be detected by the relative positional relationship with the second position data (cassette position data after the characteristic change) recognized by the robot after the change, and the teaching data can be easily corrected based on the detected amount. Can do.

Furthermore, the “robot before the change in characteristics” and the “robot after the change in characteristics” are not necessarily limited to the same robot in which some parts are replaced, but may be different robots having the same design configuration or different design configurations. A robot may be used. In short, after the teaching data (first teaching data) for a predetermined cassette group (consisting of a reference cassette and a development cassette) is obtained, a new position is determined based on the detection of the relative positional relationship of the position data unique to each robot. Teaching data (second teaching data) can be automatically generated.

As described above, in the robot operating method according to the present invention, the plurality of cassettes are aligned and arranged with a constant reference, and one of the plurality of cassettes is used as a reference cassette, while the other plurality of the plurality of cassettes are arranged. Simply select a cassette as the expansion cassette, perform the teaching operation using the reference cassette, and omit the teaching operation using another expansion cassette that is physically located at a position different from the reference cassette. Since data can be automatically generated from reference teaching data, the burden of teaching work can be reduced. In addition, by grasping the structure of the cassette using the sensor provided on the hand, it is possible to accurately recognize the structural characteristics of the cassette and automatically correct the automatically generated development teaching data. Appropriate teaching data can be obtained, and the burden of teaching work can be reduced.

Further, even in a robot whose characteristics have changed, by detecting the change in characteristics with respect to the cassette using the identification mark, it is possible to reduce the burden of the robot again teaching work after the change in characteristics.

The best mode for carrying out the present invention will be described below with reference to the drawings.

[Robot teaching system configuration]
FIG. 1 is a configuration diagram of a robot teaching system according to an embodiment of the present invention.

The robot teaching system includes a robot 100, a robot controller 200, an information processing terminal 300, a teaching operation terminal (teaching pendant) 400, and a position measuring instrument (teaching bar) 500. In FIG. 1, various devices and devices are electrically connected by a wired connection such as a serial cable. However, the present invention is not limited to this, and may be wirelessly connected by infrared communication or Bluetooth. Moreover, it is good also as a structure connected via LAN, the internet, etc.

In the robot teaching system according to the embodiment of the present invention, the position measuring instrument 500 is attached to the hand 120 of the robot 100, the position of the target cassette (reference cassette, development cassette) is measured, and information processing is performed as position data. Store in terminal 300. The information processing terminal 300 automatically generates the development teaching data in the development cassette from the reference teaching data in the reference cassette using the teaching data and position data taught in advance. Details will be described later.

[Electric configuration of robot controller]
FIG. 2 is a block diagram showing an electrical configuration of the robot controller 200 in the robot teaching system according to the embodiment of the present invention.

In the robot controller 200, a CPU 101, a ROM 102, a RAM 103, an EEPROM 104, a plurality of communication I / Fs 105a and 105b, an external input / output I / F 106, and a servo control unit 110 are connected by a bus.

The CPU 101 controls the control center of the robot controller 200 and controls the robot 100.

The ROM 102 stores a system program that supports the basic functions of the robot. The RAM 103 interfaces with the CPU 101 and functions as a working area for the CPU 101. That is, in the RAM 103, writing and reading of variable values are performed at random. The EEPROM 104 can be electrically erased and written any number of times, and can retain the memory without supplying power from the outside.

An information processing terminal 300 and a teaching operation terminal 400 are connected to the communication I / Fs 105a and 105b, respectively, and various data and programs for robot control are input / output. The external input / output I / F 106 is connected to a sensor provided in the robot and an actuator of a peripheral device.

The servo control unit 110 includes servo controllers 1 to n (n: the total number of axes of the robot plus the number of movable axes of the tool), and arithmetic processing (trajectory creation and interpolation, reverse) receiving a control command created through conversion, etc.), controlled via the servo amplifiers 110a ₁ ~110a _n servo motor 110b ₁ ~110b _n constituting the actuator of the robot axes mechanism. Signals from the servo control unit 110 and the external input / output I / F 106 are exchanged between the robot controller 200 and the robot 100 via the electrical connection described above.

[Electrical configuration of information processing terminal]
Next, the electrical configuration of the information processing terminal 300 in the robot teaching system according to the embodiment of the present invention will be described below with reference to FIG.

3, in the information processing terminal 300, a CPU 301, a ROM 302, a RAM 303, an input unit 304, an output unit 305, and a communication unit 306 are connected by a bus.

The CPU 301 controls the control center of the information processing terminal 300, and performs various controls according to programs stored in the ROM 302. The ROM 302 stores a program for causing the information processing terminal 300 to execute various processes, and includes a robot teaching program to be described later. Details will be described in the “Robot teaching program” column.

The RAM 303 interfaces with the CPU 301 and functions as a working area for the CPU 301. The input unit 304 includes a mouse and a keyboard, and transmits information input by the operator to the CPU 301. The output unit 305 includes a monitor, a speaker, and the like, and notifies the operator of various types of information based on a control signal received from the CPU 301. The communication unit 306 is electrically connected to the communication I / F 105a of the robot controller 200, and transmits / receives various information to / from the robot controller 200.

[Configuration of teaching operation terminal]
In addition to the LCD display, the teaching operation terminal 400 includes linear operation keys, rotation operation keys, axis operation keys, and the like in various coordinate systems, and is electrically connected to the I / F 105b of the robot controller 200. Through the robot controller 200, manual operation command input to the robot 100 and information such as position and operation are monitored. The robot controller 200 and the teaching operation terminal 400 are the same as the conventional one.

[Configuration of position measuring instrument]
FIG. 4 is a configuration diagram of the position measuring instrument 500 and the robot hand 120 to which the position measuring instrument 500 is attached in the robot teaching system according to the embodiment of the present invention.

The position measuring instrument 500 includes a support 501 and a pair of left and right sensor units 502a and 502b. The sensor unit 502a is provided with a reflective XY detection sensor 503a in which a light emitting element and a light receiving element are connected, and a light shielding type Z detection sensor 504a _{1 to} 504a ₂ in which the light emitting element and the light receiving element are opposed to each other. cage, also one of the sensor unit 502b, a light emitting element and a light receiving element and the XY sensor of reflection type linked to 503b, the light emitting element and the light receiving Z sensor 504b of the element facing the light-shielding type _{1 -504b 2} , Is provided. FIG. 4 shows a state where the hand 120 is attached.

Position measuring instrument 500 having such a configuration operates by XY sensor 503a, 503b detects the reflected light A ₂ by emitting a beam A ₁ toward the object X, a detection signal robot controller 200. The position measuring instrument 500 operates by detecting the beams emitted from the light emitting elements 504a ₁ and 504b ₁ with the respective light receiving elements 504a ₂ and 504b ₂ .

Note that the position measuring instrument 500 shown in FIG. 4 is provided with various sensors in a pair of left and right, so that it can detect right and left at the same time, but the present invention is not limited to this, and one XY detection is possible. What is the configuration, including a sensor and one Z detection sensor, two XY detection sensors and one Z detection sensor, and a plurality of XY detection sensors and Z detection sensors Absent.

The reflective XY detection sensors 503a and 503b scan the object (for example, an identification mark positioned substantially in front of the robot) to obtain reflected light, while the light-shielding Z detection sensors 504a _{1 to} 504a ₂ , 504b _{1 to} 504b ₂ have an XY detection sensor and a XY detection sensor because of the functional difference of scanning while detecting an object (for example, the outer frame of the frame) by blocking the beam in the physical space between the light emitting element and the light receiving element. The XY detection sensor and the Z detection sensor are arranged so that the beam direction of the Z detection sensor becomes a right angle .

In the present embodiment, the reflection type and light shielding type XY detection sensors and Z detection sensors are not limited to this, and an ultrasonic sensor or other sensors can also be used. Moreover, if a distance sensor is used for the XY detection sensors 503a and 503b, it can also be used as a Z detection sensor.

In the position measuring instrument 500 having such a configuration, the support 501 can be attached to and detached from the tip of the hand of the robot 100, and is mounted on the robot hand 120 in FIG. Moreover, it is preferable that the position measuring instrument 500 has the same length as the lateral width W of the cassette C. In that case, both the left and right pillars of the frame can be scanned simultaneously.

[Cassette and identification mark]
FIG. 5 is a configuration diagram of the cassette C according to the embodiment of the present invention.

The cassette C is provided with an open surface 10 of the frame body 9, a plurality of accommodating portions 11 a to 11 j in the frame body 9, and rectangular identification marks 1 to 4. Specifically, the frame body 9 only needs to be provided with an open surface 10 so that at least a part of the frame body 9 is opened to allow loading / unloading of the workpiece, and the workpiece can be accommodated in the frame body 9. In this way, a plurality of storage portions 11a to 11j (storage regions) are provided in a shelf shape. In FIG. 5, the work W is stacked and placed (a part of the reference sign W is omitted).

Further, identification marks 1 to 4 are provided on the outer frame 9 on the open surface 10 side, which serves as a reference for measuring the current position of the cassette C. The identification marks 1 to 4 are scanned by the XY detection sensors 503a and 503b of the position measuring instrument 500 so that the identification marks 1 to 4 can be distinguished from the outer frame (cassette C itself) in the vicinity thereof. The outer frame member is different in reflection. Furthermore, it is desirable to consider the positional relationship of the XY detection sensors for the pasting positions of the identification marks 1 to 4 so that the measurement with the position measuring instrument 500 including a pair of left and right XY detection sensors can be made efficient. Further, although the number of identification marks attached is not limited, increasing the number of attachments in one cassette improves the accuracy of the cassette positional relationship and contributes to more accurate teaching. In order to acquire position data on a two-dimensional XY plane, it is preferable to provide at least three locations. An appropriate identification mark can be selected and applied according to the method of the XY detection sensor.

Further, the cassette C is provided with a vertical tension 12 provided in the Z direction, a horizontal tension 14 provided in the XZ plane, and a pillar 16, and the plurality of vertical tensions 12 intersect with each other. It is supported by the horizontal tension (refer FIG. 9). In FIG. 5, the workpiece W is placed on the vertical tension 12. Each accommodating part is divided by the horizontal tension | tensile_strength 14, As a result, a several accommodating part will be provided. Further, the column 16 supports one end of the vertical tension 12 at the back of the cassette C, and is schematically illustrated in FIG.

[Reference cassette and expansion cassette]
FIG. 6 is a diagram for explaining the relationship between the reference cassette and the development cassette.

As shown in FIG. 6, a plurality of cassettes are aligned and arranged according to a certain standard. In the embodiment of the present invention, four cassettes C ₁₁ , C ₁₂ , C ₂₁ , C ₂₂ are arranged in two rows in two rows. When installed, one cassette is a reference cassette and the other cassette is a development cassette. Note that the arrangement of the cassette is not limited to this, and depending on the layout of the process, an appropriate arrangement such as a radial arrangement around the robot is possible.

The reference cassette is used for teaching a predetermined operation by actually performing a teaching operation of the robot, and can be arbitrarily selected by a teacher. For example, a cassette installed at a position where teaching work can be easily performed can be selected. In the following, and it selects the cassette C ₁₁ to the reference cassette.

When one cassette is selected in this way, the other cassettes C ₁₂ , C ₂₁ and C ₂₂ become development cassettes. The expansion cassette means one that automatically creates teaching data from the contents taught using the reference cassette. That is, if the reference cassette C ₁₁ and the development cassettes C ₁₂ , C ₂₁ , C ₂₂ have substantially the same structure, the teaching contents necessary for the predetermined operation of the robot will be the same, so that it is omitted. It is going to plan. Here, since the reference cassette C ₁₁ and the development cassettes C ₁₂ , C ₂₁ , C ₂₂ are installed at physically different positions, in order to obtain information on the positional relationship between the reference cassette and the development cassette, Identification marks 1 to 4 are provided on the cassette. In order to obtain information on an accurate positional relationship, substantially the same identification mark needs to be provided at approximately the same position.

Next, based on FIGS. 7 to 9, reference teaching data obtained by teaching necessary for a predetermined operation of the robot, and various measurements using the position measuring instrument 500 attached to the hand 120 of the robot 100 are obtained. Reference position data, development position data, XY distortion, and Z distortion will be described.

[Standard teaching data]
FIG. 7 is a diagram for explaining teaching necessary for a predetermined operation of the robot.

In order for the robot to perform a predetermined operation for transferring a workpiece such as a semiconductor wafer or a glass substrate between cassettes, it is necessary to teach the robot in advance. Teaching the robot is to perform for each cassette C used were common, in the embodiment of the present invention, and performs teaching using only standard cassettes C _11.

The specific teaching contents are the same as in the prior art, and the teaching operation terminal 400 teaches while inputting the position of the robot. For example, when teaching a process of loading a workpiece into the accommodating part 11a, the pre-accommodating preparation position P ₁ before moving the robot hand 120 into the accommodating part 11a, the hand 120 moves into the accommodating part 11a and accommodates. Reference teaching data includes position data such as an accommodation preparation position P ₂ for entering the posture, an accommodation lowering position P ₃ for lowering the hand 120 to accommodate the workpiece in the accommodating portion 11a, and a pullback position P _{4 for} retracting the hand after accommodation. As you get. Conversely, when teaching the process of unloading the workpiece, position data from P ₄ to P ₃ , P ₃ to P ₂ , and P ₂ to P ₁ are obtained (see FIG. 7B). Furthermore, the position data receiving section 11b, 11c, · · ·, continue to collect about 11j, reference teaching data using the reference cassette _{C 11} is obtained. The reference teaching data can include not only position data but also speed data and work command data.

More specifically with reference to FIG. 7B, the hand position of the robot to which the workpiece W is to be loaded reaches P ₂ via P ₁ . At this time, the hand 120 is in a state where the workpiece W (indicated by a broken line) is mounted. Next, the work W (indicated by a solid line) is placed on the vertical tension 12 by lowering the hand. Further, the hand is lowered from P ₂ to P ₃ , and the hand is pulled back to P ₄ when the work W is securely accommodated. When the processes from P ₁ to P ₄ are executed, the robot hand 120 that transports the workpiece W faces each other with the pillars 16 interposed therebetween so as not to interfere with the vertical and horizontal burrs 12 and 14 of the cassette C. It moves between the vertical edges 12 and 12. In FIG. 7A, for the sake of convenience of explanation, the pillars 16 provided at the innermost part between the vertical shears 12 are shown. Note that the "hand position", indicated by the position data is a coordinate for a given position of the hand, indicate the coordinate point by Figure 7 (a) (b) P 4 in the P _1.

In addition to collecting position data for each storage unit, for example, teaching is performed for the storage units 11a and 11j, and then the position data is divided and calculated according to the number of storage units. You can also. That is, the reference teaching data necessary for the predetermined operation of the robot taught using the reference cassette can include data that is not actually taught but is theoretically calculated. In particular, if the distortion of the reference cassette C ₁₁ is small, it is possible to reduce teaching work by calculation.

The reference teaching data obtained in this way is stored as a part of the storage area (ROM 302 or RAM 303) of the information processing terminal 300 as an initial teaching storage unit in addition to the storage area (RAM 103 or EEROM 104) of the robot controller 200. .

[Reference position data, development position data]
FIG. 8 is an explanatory diagram for acquiring the position data (reference position data, developed position data) of the cassette C using the position measuring instrument 500. In FIG. 8, a front view of the cassette C and a top view of the position measuring instrument 500 are schematically shown.

The position data can be acquired by scanning the identification marks 1 to 4 provided on the cassette C (reference cassette, development cassette). That is, the robot's hand is moved to scan the identification mark in four directions, and in other words, the position where the light receiving element does not receive the reflected light of the beam emitted from the light emitting elements of the reflective XY detection sensors 503a and 503b. The boundary position between the mark and the outer frame of the cassette C is detected, and the robot coordinates at this position are obtained. Based on the coordinates obtained as a result of scanning in four directions, the center position of the identification mark can be obtained.

Since the position measurement instrument 500 shown in FIG. 8 is provided with a pair of left and right reflection type XY detection sensors, the center position of the left and right identification marks (for example, identification marks 1 and 2) can be determined by one operation. Can be sought. By performing this scanning for the identification marks 1 and 2 and the identification marks 3 and 4, the center positions of the four identification marks are obtained, and these are acquired as reference position data in the reference cassette or development position data in the development cassette.

The reference position data obtained in this way is stored as a part of the storage area (ROM 302 or RAM 303) of the information processing terminal 300 as an initial teaching storage unit. Similarly, the development position data is also stored in the storage area (ROM 302 or RAM 303).

[XY distortion]
As shown in FIG. 8, by detecting the position data by scanning the four identification marks 1 to 4, the presence / absence of distortion of the cassette C in the vertical and horizontal directions is detected, and the amount of distortion is detected. Can do. Specifically, when the four identification marks 1 to 4 are affixed to symmetrical positions, the center position coordinates of each identification mark are detected and based on the center position coordinates, the same as the cassette C A square with a shape (a square by measurement) can be obtained. When the measured square body is distorted with respect to a design square body without any distortion (reference square body), that is, the center position coordinates and the design coordinates of the marker mark of the measured cassette C are measured. If there is a deviation, it can be determined that the cassette C itself is distorted, and the amount of distortion (distortion direction and degree of distortion) can be detected. In the above description, distortion due to measurement at four points is detected. However, it is sufficient if data for forming a two-dimensional plane can be obtained. Therefore, it is sufficient to obtain at least three points of data, which is more efficient. Teaching and distortion measurement are possible.

[Z distortion]
Z distortion can be detected by scanning the distance and position of the outer frame of the cassette C in the Z direction. FIG. 9 is an explanatory diagram for detecting distortion of the cassette C in the Z direction (depth direction) using the position measurement instrument 500. In FIG. 9, a top view of the cassette C and a top view of the position measuring instrument 500 are schematically shown.

The distance and position in the Z direction are such that the light receiving element 504a ₂ (504b ₂ ) receives the beam light emitted from the light emitting element 504a ₁ (504b ₁ ) of the light shielding type Z detection sensor from the light receiving element 504a _2. (504b ₂ ) moves forward to a light-shielding position that does not receive beam light, or conversely moves backward from a light-shielding position to a non-light-shielding position, and detects a position where light shielding and non-light-shielding are switched as a Z-direction position. Obtain and measure robot coordinates. In other words, the light emitting element 504a ₁ (504b ₁ ) and the light receiving element 504a ₂ (504b ₂ ) are moved forward or backward so as to sandwich the outer frame of the cassette, and the position where the Z detection sensor is switched ON / OFF is scanned. Thus, the position in the Z direction is obtained. Further, the distance from the predetermined position to the Z direction position is measured and set as the Z direction distance. When scanning the Z direction position, the hand is moved forward and backward while the XY direction is fixed or maintained.

The Z distortion is obtained by measuring the position in the Z direction and the distance from the predetermined position by scanning the Z detection sensor at a predetermined XY direction position (XY coordinate position) of the hand to obtain the first robot coordinates. Similarly, the second robot coordinate can be obtained at another XY coordinate position of the hand, and the Z-direction distance at both robot coordinates can be obtained by comparison. According to FIG. 8, the robot coordinate at the position of the identification mark 1 and the robot coordinate at the position of the identification mark 3 are obtained, and the inclination of the frame 9 in the vertical direction can be detected by comparing them. Similarly, by comparing the coordinates in the identification mark 1 with the coordinates in the identification mark 2, it is possible to detect distortion when the left and right positions of the frame body 9 are not symmetrical.

Thus, the distortion of the frame can be detected from the position information (robot coordinates) obtained by scanning the Z-direction distance / position using the Z detection sensor. The overall distortion of the cassette C can be roughly grasped by obtaining the robot coordinates for all of the identification marks 1 to 4, but if the number of detected robot coordinates is further increased, more accurate distortion of the cassette can be detected. be able to.

Furthermore, in addition to detecting Z distortion based on position information, when the robot hand moves forward or backward, the time difference (time) at which the pair of left and right light-shielding Z detection sensors of the position measuring instrument 500 is switched ON / OFF Z distortion can also be detected from (information).

[Automatic measurement of position data]
FIG. 10 is a flowchart of a subroutine program for acquiring the above-described reference position data and developed position data using the position measuring instrument 500 attached to the robot hand in the robot teaching program according to the embodiment of the present invention. Show.

First, the hand 120 is moved to a scanning position where the XY detection sensors 503a and 503b of the position measuring instrument 500 attached to the hand 120 and the identification marks 1 and 2 (or 3 and 4) are substantially opposed to each other. (Step S1) Next, it is confirmed that the light-shielding type Z detection sensors 504a and 504b are in the non-light-shielded state position, that is, the position measuring instrument 500 is in a position not interfering with the outer frame 9 of the cassette C. If the Z detection sensors 504a and 504b are shielded from light (OFF), the processing is interrupted and adjustments such as retreating the hand 120 are performed. When the Z detection sensors 504a and 504b are ON, the process proceeds to an identification mark scanning process for scanning the identification marks 1 and 2 (or 3 and 4) provided in the cassette C. (Step S2)

In the identification mark scanning step (step S3) for scanning the identification mark provided in the cassette C, the hand is moved up, down, left and right (XY direction) to scan the identification mark in four directions, and the reflection type XY detection sensors 503a and 503b. ON / OFF switching position, that is, the robot position coordinates of the upper, lower, left and right of the identification mark.

Next, a reference position measurement process or a development position measurement process is performed to determine whether or not the center position (XY direction position) of the identification mark is detected from the robot position coordinates obtained by scanning the identification mark (step S4). ). If it is determined that the center position is not detected, the process is repeated from step S3. On the other hand, if it is determined that it has been detected, the position coordinates are stored in the RAM 303 or the like, and the coordinates of the XY direction position are acquired. After the detection, the hand 120 moves to the center position of the identification mark (step S5).

Next, the hand 120 is moved forward (step S6), and the detection of the Z direction position and distance is executed. At this time, the position in the Z direction is detected when the Z detection sensor provided in the position measurement instrument 500 detects that the Z detection sensor is shielded from light (OFF state) while detecting that the Z detection sensor is not shielded from light (ON state). The position coordinate at that time and the time to that position are detected. If it is determined that the position in the Z direction has not been detected, the process of step S6 is repeated and the hand continues to advance. On the other hand, if it is determined that it has been detected, the position coordinates are stored in the RAM 303 or the like, and the coordinates of the Z-direction position are acquired (step S7).

Thereafter, the hand 120 is moved backward (step S8). The backward movement is performed by a predetermined amount, for example, the backward movement to the position advanced in step S3.

Next, it is determined whether or not another identification mark is to be scanned (step S9). When the scanning is finished, this subroutine program is immediately finished.

On the other hand, when it is determined that scanning is performed, for example, when the center mark detection and the Z direction distance / position detection are performed by scanning the identification marks 1 and 2 provided on the lower side of the cassette, The identification marks 3 and 4 provided on the upper side of the cassette are scanned. In this case, the hand 120 is raised (step S10). The hand 120 is raised until the XY detection sensor detects another identification mark 3 and 4 to be scanned next (step S11), and when the identification mark is detected, the scanning of the identification mark is started again ( In step S3), the same steps are repeated from step S4 to step 9 below.

In this way, the YX sensor is used to scan the identification mark to detect the position in the YX direction, and the Z detection sensor is used to detect the position and distance in the Z direction. The development position data of the cassette can be acquired. In the above-described embodiment, since the symmetrical position measuring instrument 500 is used, the left and right identification marks are scanned simultaneously. Moreover, when scanning a some identification mark, it is preferable to make the shape of a corresponding identification mark the same.

[Generate expanded position data]
FIG. 11 shows the robot teaching program according to the embodiment of the present invention, in which XY distortion and Z distortion are detected using the acquired reference position data and development position data, development teaching data is generated, and teaching is performed. It is a flowchart explaining a series of operation | movement which correct | amends the distortion with respect to data.

First, initial settings are made (step S100). That is, information such as reference teaching data and reference position data already stored in the RAM 303 of the information processing terminal 300 is called. The reference teaching data is acquired in advance by a known method as described above, and the reference position data is acquired in advance by a subroutine program shown in FIG.

Next, an identification mark scanning step for scanning an identification mark provided on the development cassette is executed (step S101), and a development position measurement step for measuring development position data of the development cassette is executed to detect the position in the XY direction. (Step S102). In addition, a Z direction detection step of scanning the Z direction distance and position of the outer frame of the developing cassette is executed to detect the Z direction position (step S103). These series of processes are performed by a subroutine program shown in FIG.

On the other hand, based on the development position data measured at step S102 and the Z-direction distance / position data measured at step S103, the XY distortion detection process and the Z distortion detection process are executed (step S104). XY distortion detection and Z distortion detection can also be performed together with each measurement / detection step.

Next, a teaching data generation step for automatically generating the expansion teaching data in the expansion cassette is executed (step S105). That is, it is necessary to realize a predetermined operation using the development cassette from the reference teaching data based on the relative positional relationship between the reference position data called in the initial setting and the development position data measured in step S102. Automatic robot teaching data is generated automatically.

For example, referring to FIG. 6 and FIG. 7, reference teaching data (P ₁ , P ₂ , P ₃ , P _4, etc.) taught using the reference cassette C ₁₁ is converted into the reference cassette C ₁₁ and the expansion cassette C _12. , C ₂₁ , C ₂₂ in consideration of the positional relationship, coordinate conversion is performed. The positional relationship between the reference cassette and the development cassette can be obtained from the reference position data and the development position data obtained by the subroutine program shown in FIG.

Finally, if necessary, a first correction process and a second correction process for correcting the development teaching data automatically generated by the theoretical calculation are executed (step S106). A first correction step for correcting the development teaching data based on the distortion amount detected by the XY distortion detection step, and a second correction step for correcting the development teaching data based on the distortion amount detected by the Z distortion detection step. By applying correction according to each distortion, it is possible to obtain appropriate development teaching data. The same applies to the correction process for the reference teaching data as well as the development teaching data.

[Other Embodiment 1]
In the above embodiment, the example has been described in which the reference mark data and the developed position data are acquired by scanning the identification mark using the position measuring instrument 500 separately provided on the robot hand 120. However, the present invention is not limited to this. For example, the same function as that of the position measuring instrument 500 can be achieved by using a sensor mounted on a robot hand or arm. Next, the embodiment will be described.

FIG. 12 shows the configuration of the robot hand 121 in this embodiment.

The robot hand 121 includes four forks 122a, 122c, 122b, and 122d, and places and transports a workpiece such as a glass substrate using these forks as a placement portion. Alignment sensors 50a and 50b are provided at the tips of the left and right forks 122a and 122d. The alignment sensor is a reflective sensor in which a light emitting element and a light receiving element are connected, and is usually used to detect the presence and position of a workpiece such as a glass substrate housed in a cassette. The alignment sensors 50a and 50b use, as a detection target, a workpiece that is positioned on the upper side when the forks 122a, 122c, 122b, and 122d of the robot hand 121 move to the lower side of the detection target such as a glass substrate. Then, the presence and position of the detection object are detected by emitting a beam toward this and detecting the reflected light.

FIG. 13 is a diagram showing a configuration of the cassette Cx and the identification mark in the present embodiment.

The other configuration of the cassette Cx except for the identification marks 21, 22, 23, and 24 is the same as the cassette C or the known cassette. Therefore, in the following, for convenience of explanation, the same components as those of the cassette C are denoted by the same reference numerals as those of the cassette C, and detailed description thereof is omitted.

The identification marks 21, 22, 23, and 24 are plates having a plane substantially perpendicular to the open surface 10 of the frame 9, and are attached to the frame 9 on the open surface 10 side to measure the position of the cassette Cx. The standard. The identification marks 21 to 24 have a plane and a shape with an area that allows scanning by the alignment sensors 50a and 50b provided at the tips of the forks 122a and 122d of the hand 121, and the alignment sensors 50a and 50b. The lower surfaces to be opposed can be configured appropriately according to the type of sensor. Moreover, it is preferable to provide each pasting position of the identification marks 21 to 24 at least at three or more positions so that the position data on the two-dimensional XY plane can be acquired, similar to the identification mark of the cassette C described above. In this embodiment, there are four locations.

Next, a subroutine program for obtaining position data (reference position data or developed position data) for the cassette Cx using the alignment sensors 50a and 50b (hereinafter simply referred to as “sensors 50a and 50b”) will be described. FIG. 14 shows the flow of the operation.

First, the hand 121 is moved to the scanning start position (step S201). The scanning start position is a position where any one of the sensors 50a and 50b and any one of the plates of the identification marks 21, 22, 23, and 24 substantially face each other. In the following, the case where the sensor 50a is positioned below the identification mark 22 will be described with reference to FIG.

Next, it is confirmed that the sensor 50a is ON (the identification mark 22 is detected). If the sensor 50a is OFF (the identification mark 22 is not detected), the processing is interrupted, and adjustments such as moving the hand 121 and resetting the scanning start position are performed. If the sensor 50a is ON, the process proceeds to the next Y coordinate measurement process. (Step S202)

In the Y coordinate measurement process, the hand 121 is moved downward (minus in the Y direction) while detecting that the sensor 50a is ON (step S203), and the hand 121 moves until it detects a position where the sensor 50a is OFF. And stop (step S204). Here, the detection limit of the sensor 50a is obtained. Next, the hand 121 is returned a certain distance from the sensor OFF position to the upper side (plus in the Y direction), and the height of the hand 121 at this time is set as the Y coordinate of the identification mark 22 (step S205). This height is a position where the sensor 50a reliably detects the identification mark 22.

In the next Z coordinate measurement process, first, the hand 121 is moved away from the cassette Cx (Z direction plus) until the sensor 50a is turned off while maintaining the height of the Y coordinate (step S206), and the sensor 50a. Is moved until the position at which is turned OFF is detected (step S207). Here, the boundary 22a in the Z direction of the identification mark 22 is detected. Next, the hand 121 is returned a certain distance from the position of the boundary 22b in the direction approaching the cassette Cx (minus in the Z direction), and the position of the hand 121 at this time is set as the Z coordinate of the identification mark 22 (step S208). Note that the return distance from the boundary 22a is appropriately determined depending on the size of the identification mark 22 and the attachment position of the sensor 50a to the hand 121.

Next, the X coordinate measurement process is executed. While maintaining the Y and Z coordinates, the hand 121 is moved to the right side in FIG. 12 (X direction plus) until the sensor 50a is turned off (step S209), and is moved until the position where the sensor 50a is turned off is detected. (Step S210). Here, the boundary 22b in the X direction of the identification mark 22 is detected. Next, the hand 121 is returned a certain distance from the position of the boundary 22b to the left side (X direction minus), and the position of the hand 121 at this time is set as the X coordinate of the identification mark 22 (step S211). The return distance from the boundary 22b is determined as appropriate within the size range of the identification mark 22. Further, the movement of the hand 121 in the X direction in the X coordinate measurement process when the identification mark 21 on the left side of the cassette Cx is scanned by the sensor 50b is opposite to the above case. Also, similar robot coordinates can be obtained even if the X coordinate measurement step is performed before the Z coordinate measurement step.

Thus, the robot coordinates of the identification mark 22 determined by scanning the identification mark 22 are stored in the RAM 303 or the like. Thereafter, it is determined whether or not another identification mark is to be scanned (step S212). If scanning is to be performed, steps S201 to S211 are repeated. On the other hand, if another scan is not performed, this subroutine program is immediately terminated.

A plurality of cassettes having the same configuration in which substantially the same identification marks are provided at substantially the same positions as the cassette Cx as the reference cassette and the development cassette, and the reference position data based on the robot coordinates obtained by the subroutine program of this embodiment. If the development position data is configured, it is possible to acquire the reference position data for the reference cassette and automatically generate the development position data for the development cassette, as in the flowchart of FIG. That is, the initial reference data acquisition and the steps S101 to S103 in FIG. 11 can be executed by the subroutine program of this embodiment.

Note that the XY distortion detection and the Z distortion detection in the present embodiment are detected by comparing the robot coordinates obtained by the subroutine program. That is, the inclination or distortion in the Z direction is detected by detecting the difference between the Z coordinates of the identification marks 21 and 24 (or 22 and 23), and XY is determined by comparing the identification marks 21 and 22 (or 23 and 24). A distortion in the direction can be detected. Further, when the four identification marks 1 to 4 are provided at symmetrical positions, the robot coordinates (position data) for the respective identification marks are detected, and the cassette shape by the measurement based on the position coordinates is distorted. If the design cassette is distorted, that is, if there is a deviation between the measured position coordinates of the marker mark of the cassette Cx and the design position coordinates, it is determined that the cassette C itself is distorted. The amount of distortion (distortion direction and degree of distortion) can be detected.

According to the configuration of the present embodiment, the reference mark data and the developed position data can be acquired by scanning the identification mark without using a special position measuring instrument, and the structural characteristics of the cassette can be grasped. be able to. In addition, since the position measuring instrument is not attached, the hand tip does not take weight and the hand does not bend, and the hand does not vibrate due to the reaction during acceleration or bending during measurement. Accurate position measurement can be performed without generating a measurement error, and accurate position data and distortion correction data can be obtained. Also, the development position data becomes more accurate.

[Other embodiment 2]
Next, in the above embodiment, an example will be described in which the edge (corner portion) of the substrate, which is a work housed in a predetermined stage of the cassette, is used as the identification mark.

FIG. 15 is a diagram showing the relationship between the edge of the substrate that serves as a marker in the position measurement operation and the sensor at the tip of the hand, and the inside of the circle is enlarged. In the uppermost work storage section in the cassette Cy, a reference work 31 is placed as a glass substrate serving as a reference for position measurement, and a similar reference work 32 is placed in the lowermost stage. The robot hand 121 is the same as in the other embodiment 1, and the alignment sensors 50a and 50b are mounted on the tip of the fork.

Here, a case where the robot coordinates for the front right corner portion 31a of the upper reference workpiece 31 are obtained will be described as an example. The sensor 50a of the hand 121 moves to the lower side of the front end right corner portion 31a to determine the coordinate in the Y direction, and then scans the front end of the reference workpiece 31 on the opening side of the front end right corner portion 31a to determine the Z coordinate. The X coordinate is determined by scanning the right end of the front right corner 31a. This is the same operation as the subroutine program of FIG. In other words, in this embodiment, a virtual identification mark is provided at the edge (corner portion) of the reference workpiece, and the reference position data and the developed position data are obtained by the subroutine program of FIG. 14 as in the other embodiment 1. Is what you get.

According to the above configuration, there is no need to use a special position measuring instrument and to provide a special identification mark on the cassette. The reference position data and the development position data of the cassette can be acquired, and the structural characteristics of the cassette can be grasped, and the same effects as those of the above embodiments can be obtained.

As long as the same arrangement is used for the reference cassette and the development cassette, the storage unit on which the reference workpiece is placed is not limited to the uppermost stage and the lowermost stage, and may be an arrangement having a predetermined separation. Further, since detection and correction of Z distortion and XY distortion and generation of expansion teaching data for the expansion cassette are the same as those in the above-described embodiments, description thereof will be omitted.

[Other application examples]
According to the robot teaching program according to the embodiment of the present invention, even when the characteristics of the robot change, such as when the robot hand or arm parts are replaced or the robot is displaced due to maintenance, etc. From the first teaching data of the robot before the characteristic change, the second teaching data necessary for the robot after the characteristic change to realize a predetermined operation can be automatically generated.

That is, although the position of the identification mark provided on the cassette does not shift, it may be detected that the position of the identification mark is shifted when viewed from the robot when maintenance is performed on the robot. In this case, in order to automatically generate the second teaching data necessary for the robot to realize the predetermined operation after the change of the characteristic from the first teaching data of the robot before the change of the characteristic (correct the first teaching data). In order to obtain the second teaching data), the relative positional relationship between the first position data of the cassette obtained before the change of the characteristic and the second position data of the cassette obtained after the change of the characteristic can be obtained. .

Further, according to the robot teaching program according to the embodiment of the present invention, it is possible to reduce the burden of teaching on other robots based on position data and teaching data obtained by a certain robot. . This is because an identification mark is provided on the cassette, and this identification mark serves as an index for the storage unit or an index for the teaching data in each storage unit, so that the position information is obtained by scanning the identification mark. This is because teaching data can be created.

As described above, according to the present invention, only the teaching work is performed using the reference cassette, the teaching work using another developing cassette is omitted, and the developing teaching data is automatically generated from the reference teaching data. Therefore, the burden of teaching work can be reduced. Further, even in a robot whose characteristics have changed, by detecting the change in characteristics with respect to the cassette using the identification mark, it is possible to reduce the burden of the robot again teaching work after the change in characteristics.

The block diagram of the robot teaching system which concerns on embodiment of this invention. The block diagram which shows the electric constitution of the robot in the robot teaching system which concerns on embodiment of this invention. The block diagram which shows the electric constitution of the information processing terminal in the robot teaching system which concerns on embodiment of this invention. The block diagram of the position measuring instrument and robot hand which concern on embodiment of this invention. The block diagram of the cassette which concerns on embodiment of this invention. The figure for demonstrating the relationship between a reference | standard cassette and an expansion | deployment cassette. The figure for demonstrating the teaching required for predetermined operation | movement of a robot. Explanatory drawing for acquiring the position data of a cassette using a position measuring instrument. Explanatory drawing for detecting the distortion to the depth direction (Z direction) of a cassette using a position measuring instrument. The flowchart of the subroutine of the program for robot teaching which concerns on embodiment of this invention. The flowchart of the program for robot teaching which concerns on embodiment of this invention. Schematic of the robot hand according to another embodiment 1 of the present invention. The block diagram of the cassette concerning other Embodiment 1 of this invention. The flowchart of the subroutine of the program for robot teaching which concerns on other Embodiment 1 of this invention. Explanatory drawing for acquiring position data with the corner | angular of the board | substrate which concerns on other Embodiment 2 of this invention.

100 Robot 120, 121 Hand 200 Robot controller 300 Information processing terminal 400 Teaching operation terminal (teaching pendant)
500 Position measuring instrument (teaching bar)
502a, 502b Detection sensor unit 50a, 50b Alignment sensor W Work C Cassette 1, 2, 3, 4, 21, 22, 23, 24 Identification mark 9 Frame 10 Open surface

Claims (7)

It has a plurality of storage units that can store a work inside a frame having an outer frame, and an open surface of the frame that enables loading and unloading of the work by a robot, and has the same external structure. A plurality of plate-like workpieces stacked in a plurality of stages and stored in a plurality of cassettes, or a robot operating method for carrying out the workpieces from the cassette,
The plurality of cassettes are aligned and arranged according to a certain standard,
In each of the plurality of cassettes, the outer frame on the open surface side serves as an index for the plurality of storage units, and a predetermined part of each cassette is specified, and the robot can store and carry out the workpiece. Providing an identification mark at the same position for each of the plurality of cassettes;
A reference teaching data acquisition step of obtaining one of the plurality of cassettes as a reference cassette and obtaining reference teaching data necessary for a predetermined operation of the robot using the reference cassette;
In the robot hand, using the detection sensor provided with an XY detection sensor for scanning the identification mark provided on the outer frame in the XY direction and a Z detection sensor for scanning the Z direction of the outer frame, the reference cassette A reference position data acquisition step of obtaining reference position data for scanning the identification mark provided on the reference cassette and specifying the predetermined portion of the reference cassette;
The other plurality of cassettes are selected as development cassettes, and using the detection sensor, the identification mark provided on the development cassette is scanned, and development position data for specifying the predetermined part of the development cassette is obtained. Development position measurement process to measure,
Based on the relative positional relationship between the reference position data and the development position data obtained by scanning the identification mark provided on each of the plurality of cassettes , the reference teaching data is used to use the development cassette. A development teaching data generation step for automatically generating development teaching data necessary for realizing the predetermined operation;
An operation execution step of causing the robot to operate on the expansion cassette based on the expansion teaching data, and executing the operation of the robot on the reference cassette based on the reference teaching data;
A method for operating a robot, comprising: 2. The robot operating method according to claim 1, wherein the identification mark is a sign attached on a frame surrounding an open surface for carrying in and out the work of the cassette. The XY detection sensor is a reflective sensor in which a light emitting element and a light receiving element are connected, and the Z detection sensor is a light shielding sensor in which the light emitting element and the light receiving element are opposed to each other, the XY detection sensor and the Z detection sensor. 3. The robot operating method according to claim 2, wherein the sensor beam direction is arranged at right angles . A plurality of the identification marks are provided for each of the plurality of cassettes,
The reference teaching data includes data obtained by calculation,
Based on reference position data obtained by scanning a plurality of identification marks provided on the reference cassette, a distortion detection step for detecting distortion of the reference cassette, and a distortion amount detected by the distortion detection step A correction step for correcting the reference teaching data;
Based on development position data obtained by scanning a plurality of identification marks provided on the development cassette, a distortion detection step for detecting distortion of the development cassette, and based on a distortion amount detected by the distortion detection step A correction step of correcting the development teaching data;
The robot operating method according to claim 1, further comprising: The distortion detection step of detecting distortion of the reference cassette is a step of detecting any distortion in the XY direction or Z direction of the frame body in the reference cassette, and the distortion detection for detecting distortion of the development cassette. The robot operating method according to claim 4, wherein the step is a step of detecting any distortion in the XY direction or the Z direction of the frame body in the expansion cassette. The detection sensor comprises an XY detection sensor and a Z detection sensor,
The strain detection step includes
XY distortion detection step of detecting distortion in the XY direction of the cassette from position information in the XY direction obtained by scanning the identification mark provided on the cassette using the XY detection sensor;
A Z distortion detection step of detecting distortion in the Z direction of the cassette from position information in the Z direction obtained by scanning the Z direction position of the frame in the cassette using the Z detection sensor;
The robot operating method according to claim 5, further comprising: In order to execute the predetermined operation of the robot already taught by the robot having changed characteristics,
Storing first teaching data necessary for a predetermined operation of the robot before a change in characteristics, and first position data of the robot before a change in characteristics obtained by scanning the identification mark provided on the cassette; Leave
An identification mark scanning step of scanning the identification mark provided on the cassette using the detection sensor provided on the hand of the robot after the change in characteristics;
A post-change position measurement step of measuring second position data of the robot obtained based on scanning by the identification mark scanning step;
Based on the relative positional relationship between the first position data and the second position data, robot teaching data necessary for realizing a predetermined operation after a change in characteristics is automatically generated from the first teaching data. Post-change teaching data generation process,
The robot operating method according to claim 1, further comprising:

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