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JP4851786B2 - Measuring method of micro area potential of photoconductor - Google Patents
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JP4851786B2 - Measuring method of micro area potential of photoconductor - Google Patents

Measuring method of micro area potential of photoconductor Download PDF

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JP4851786B2
JP4851786B2 JP2005349019A JP2005349019A JP4851786B2 JP 4851786 B2 JP4851786 B2 JP 4851786B2 JP 2005349019 A JP2005349019 A JP 2005349019A JP 2005349019 A JP2005349019 A JP 2005349019A JP 4851786 B2 JP4851786 B2 JP 4851786B2
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潔 増田
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Ricoh Co Ltd
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本発明は、高電位に帯電した感光体の微小領域電位を高い空間分解能で測定することができる感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置に関する。   The present invention relates to a method for measuring a micro area potential of a photoconductor and a measurement apparatus for a micro area potential of a photoconductor capable of measuring a micro area potential of a photoconductor charged to a high potential with high spatial resolution.

複写機やレーザプリンターなどにおける電子写真方式の画像形成は、通常、感光体の表面を均一に帯電する帯電工程と、帯電した感光体表面を露光して静電潜像を形成する露光工程と、形成された静電潜像を現像剤(トナー)で現像する現像工程と、得られたトナー像を記録媒体、又は中間転写ベルトに転写する転写工程と、転写されたトナー像を定着する定着工程と、転写後の感光体上の残留トナーを除去するクリーニング工程と、感光体上の静電潜像を除去する除電工程とからなる。
このように、電子写真方式の画像形成での最終画像のアウトプット品質には各工程が関与しているため、最終画像から露光工程での潜像品質を知ることは容易ではない。このため、一定の帯電条件に対する帯電電位と、一定の露光条件に対する露光後電位とを測定し、これらの特性値が一定温度及び湿度の環境下でどのように変わるか、あるいは帯電、及び露光の繰り返しサイクルの後、どのように変わるかをみて、形成される潜像の品質を推測する手段しかなかった。
しかし、このような評価手段では、潜像の劣化である、いわゆる地汚れと言われる背景の汚れ、画像ボケ(又は画像流れ)という異常画像の評価は、表面電位計が感光体上の広い領域(感光体表面と表面電位計プローブとの距離2mmに対し直径10〜15mmの領域)の帯電電位をマクロに測定するため、潜像の異常を知ることはできなかった。そこで、近時、高画質化の流れのなかで、微小領域の静電潜像を直接測定し、潜像の状態を正確に評価する方法の提供が望まれている。
Electrophotographic image formation in a copying machine, a laser printer, etc., is usually a charging process that uniformly charges the surface of the photoreceptor, an exposure process that forms an electrostatic latent image by exposing the charged photoreceptor surface, A developing process for developing the formed electrostatic latent image with a developer (toner), a transferring process for transferring the obtained toner image to a recording medium or an intermediate transfer belt, and a fixing process for fixing the transferred toner image And a cleaning process for removing residual toner on the photoconductor after transfer, and a charge eliminating process for removing an electrostatic latent image on the photoconductor.
Thus, since each process is involved in the output quality of the final image in electrophotographic image formation, it is not easy to know the latent image quality in the exposure process from the final image. For this reason, the charging potential for a certain charging condition and the post-exposure potential for a certain exposure condition are measured, how these characteristic values change under a constant temperature and humidity environment, or charging and exposure. The only way to estimate the quality of the latent image formed was to see how it would change after repeated cycles.
However, with such an evaluation means, the latent image is deteriorated, so-called background dirt, so-called background dirt, and abnormal images such as image blurring (or image blur) are evaluated by a surface electrometer in a wide area on the photoconductor. Since the charged potential in a region (a region having a diameter of 10 to 15 mm with respect to a distance of 2 mm between the surface of the photoreceptor and the surface electrometer probe) was measured macroscopically, it was impossible to know the abnormality of the latent image. Therefore, in recent years, it has been desired to provide a method for directly measuring the electrostatic latent image in a minute region and accurately evaluating the state of the latent image in the course of improving the image quality.

最近、微小領域の静電潜像を直接評価する方法として、例えば、(1)カンチレバー方式、(2)エレクトロメータ方式、(3)光減衰による変位電流方式(誘導電流方式)、などが提案されている。
前記(1)のカンチレバー方式は、感光体表面と探針の間に働く力F(例えば、静電引力など)による片持ち梁の機械的変位を測定、あるいは振動状態の変化を片持ち梁の背面にレーザ光を照射し、反射した光を検出して、その変位量の値から表面電位を測定する方法である(特許文献1及び特許文献2参照)。
しかし、前記(1)のカンチレバー方式では、感光体のような数百Vの帯電電位ではカンチレバーと感光体が静電気力で接触してしまう。また、感光体とカンチレバーとが接触しない程度に距離をとると、空間分解能の低下が生じる。更に、感光体とカンチレバーとの距離はそのままとし、接触しない程度の撓み力の材料を片持ち梁に使うと感度の劣化が避けられない、という問題がある。
Recently, for example, (1) cantilever method, (2) electrometer method, and (3) displacement current method (induced current method) by light attenuation have been proposed as methods for directly evaluating the electrostatic latent image of a minute region. ing.
In the cantilever method (1), the mechanical displacement of the cantilever beam due to the force F (for example, electrostatic attraction) acting between the surface of the photosensitive member and the probe is measured, or the change in the vibration state is measured. In this method, the back surface is irradiated with laser light, the reflected light is detected, and the surface potential is measured from the displacement value (see Patent Document 1 and Patent Document 2).
However, in the cantilever method (1), the cantilever and the photosensitive member come into contact with each other with electrostatic force at a charging potential of several hundred volts as in the photosensitive member. Further, if the distance is set so that the photoconductor and the cantilever do not come into contact with each other, the spatial resolution is lowered. Further, there is a problem that deterioration in sensitivity is inevitable if a material having a bending force that does not contact the photosensitive member and the cantilever is used for the cantilever.

前記(2)エレクトロメータ方式は、感光体表面に近接して、ある面積を持つ電極を配置し、該電極に誘導された電荷がグランドに対して持つ電位を測定する方法である(特許文献3参照)。
前記(2)のエレクトロメータ方式では、電極には感光体表面の所定領域の電荷量に対応した電荷量が誘起され、感光体と電極との距離(ギャップ)を狭くする必要がある。また、この方式では、一般的に、測定の空間分解能としてA(μm)が必要なとき、ギャップはA(μm)以内、かつ電極のサイズはA(μm)以内×A(μm)以内とする必要がある。そのため、小さい空間分解能実現のためには小さな電極でギャップを小さくする必要がある。また、この方式では帯電した感光体が移動し、表面の電荷が電極を横切るときに誘起される変位電流を測定する方法がとられることが多いが、測定中は狭小なギャップを一定に維持するための特別な機構が必要となる。また、電極サイズが小さくなり、検出信号が小さくなるので、測定が極めて困難となる。
The (2) electrometer method is a method in which an electrode having a certain area is arranged in the vicinity of the surface of the photosensitive member, and the electric potential induced by the electrode is measured with respect to the ground (Patent Document 3). reference).
In the electrometer method (2), a charge amount corresponding to a charge amount in a predetermined region on the surface of the photoreceptor is induced in the electrode, and it is necessary to narrow a distance (gap) between the photoreceptor and the electrode. In this method, generally, when A (μm) is required as the spatial resolution of measurement, the gap is within A (μm) and the electrode size is within A (μm) × A (μm). There is a need. Therefore, it is necessary to reduce the gap with a small electrode in order to realize a small spatial resolution. In this method, a method of measuring a displacement current induced when a charged photoreceptor moves and a surface charge crosses an electrode is often used, but a narrow gap is kept constant during measurement. A special mechanism is required. Moreover, since the electrode size is reduced and the detection signal is reduced, measurement becomes extremely difficult.

前記(3)の誘導電流方式は、感光体表面に近接して設置された電極で、帯電した感光体表面に極小のスポット光を照射し、光減衰による表面電荷の消失によって電極に誘導される電荷量(誘導電流)を測定し、表面電位を測定する方法である(非特許文献1参照)。前記(3)の誘導電流方式は、透明ガラスに透明導電膜が成膜された電極が使用され、背面より光照射を行う方式であり、原理的に空間分解能は照射するスポット光のサイズのみに依存するので、電極サイズは任意であり、この方法では、感光体表面とプローブとの間の距離(ギャップ)も最大2mm程度まで任意である(ただし、当然であるが、ギャップが大きくなれば、検出信号は小さくなる)。
また、前記(3)の誘導電流方式では、透明ガラス電極の背面より10μmサイズのビームスポットを照射し、10μm領域で生じる光減衰電位変化による誘導電流(変位電流)を検出し、その信号の大きさからスポット光照射前の電位を求め、順次測定位置を変えて、潜像プロファイル(副走査方向の一次元プロファイル)を得ている。しかし、80μm幅(副走査方向)のビームで書き込み、形成された1ラインの潜像幅がビームサイズの約2倍強の幅(μm)に測定されており、この方式においても、更なる改善が望まれているのが現状である。
The induced current method (3) is an electrode installed in the vicinity of the surface of the photoconductor, and the charged surface of the photoconductor is irradiated with a minimal spot light and is induced to the electrode by the disappearance of the surface charge due to light attenuation. This is a method of measuring the amount of charge (induced current) and measuring the surface potential (see Non-Patent Document 1). In the induction current method (3), an electrode in which a transparent conductive film is formed on a transparent glass is used, and light irradiation is performed from the back surface. In principle, the spatial resolution is limited to the size of the spot light to be irradiated. Therefore, the electrode size is arbitrary, and in this method, the distance (gap) between the surface of the photoreceptor and the probe is also arbitrary up to about 2 mm (however, of course, if the gap becomes larger, The detection signal is small).
In the induced current method (3), a 10 μm-sized beam spot is irradiated from the back surface of the transparent glass electrode, and an induced current (displacement current) due to a light attenuation potential change occurring in the 10 μm region is detected, and the magnitude of the signal is detected. Then, the potential before spot light irradiation is obtained, and the measurement position is sequentially changed to obtain a latent image profile (one-dimensional profile in the sub-scanning direction). However, the width of the latent image of one line that was written and formed with a beam of 80 μm width (sub-scanning direction) was measured to be a width (μm) that is about twice as large as the beam size. This is the current situation.

このように潜像の直接測定においては、信号が小さく雑音に埋もれやすいという問題がある。例えば、80μm幅の潜像のプロファイルを10μmピッチで測定すること(測定の空間分解能が10μmということ)を確保するためには、ビームサイズは10μm以下にする必要がある。その結果、感光体上の露光領域が小さくなり、電位減衰が生じる領域が小さく、電極に誘導される電流信号が小さくなるという問題がある。
また、より大きな信号強度を得るため、電極を感光体表面に接近させると、感光体に入射した光が反射して電極に戻り、そこで、反射して感光体に入射する際に前とは入射角度が異なる。その結果、露光領域が入射スポット光のサイズ以上に広がってしまい、測定の空間分解能を劣化させてしまうという問題がある。
Thus, in the direct measurement of the latent image, there is a problem that the signal is small and is easily buried in noise. For example, in order to ensure that a profile of a latent image having a width of 80 μm is measured at a pitch of 10 μm (a spatial resolution of measurement is 10 μm), the beam size needs to be 10 μm or less. As a result, there is a problem that the exposure area on the photoconductor is small, the area where the potential decay occurs is small, and the current signal induced in the electrode is small.
Also, in order to obtain a larger signal intensity, when the electrode is brought closer to the surface of the photoconductor, the light incident on the photoconductor is reflected and returns to the electrode, where it is incident on the front when reflected and incident on the photoconductor. The angle is different. As a result, there is a problem that the exposure area is expanded beyond the size of the incident spot light, and the spatial resolution of the measurement is deteriorated.

特開平5−119093号公報Japanese Patent Application Laid-Open No. 5-119093 特開平5−149988号公報Japanese Patent Laid-Open No. 5-149988 特開平11−184188号公報JP-A-11-184188 Japan Hard Copy 2001 論文集 P281Japan Hard Copy 2001 Proceedings P281

本発明は、従来における諸問題を解決し、以下の目的を達成することを課題とする。即ち、本発明は、高電位に帯電した感光体へ微小レーザスポット光を露光し、微小領域で表面電位変化を生じさせ、その電位変化により電極に誘導される電荷量の変化を測定し、その信号の大きさから露光前の表面帯電電位のレベルを知ることができる感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置を提供することを目的とする。   An object of the present invention is to solve various problems in the prior art and achieve the following objects. That is, the present invention exposes a minute laser spot light to a photosensitive member charged to a high potential, causes a surface potential change in a minute region, measures a change in the amount of charge induced to the electrode due to the potential change, and It is an object of the present invention to provide a method for measuring a micro area potential of a photoconductor and an apparatus for measuring a micro area potential of the photoconductor, which can know the level of the surface charge potential before exposure from the signal magnitude.

前記課題を解決するため本発明者らが鋭意検討を重ねた結果、特に、測定の空間分解能を劣化させるという従来からの問題点を効果的に解消することができ、露光前の感光体の不明の帯電電位のレベルを正確かつ効率よく測定することができる感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置を知見した。   As a result of intensive studies by the present inventors in order to solve the above-mentioned problems, in particular, the conventional problem of degrading the spatial resolution of the measurement can be effectively solved, and the photoconductor before exposure is unknown. The present inventors have discovered a method for measuring a micro area potential of a photoconductor and an apparatus for measuring a micro area potential of a photoconductor capable of accurately and efficiently measuring the level of the charging potential of the photoconductor.

本発明は、本発明者による前記知見に基づくものであり、前記課題を解決するための手段は以下の通りである。即ち、
<1> 帯電された感光体を所定のビームサイズのスポット光で短パルス露光し、このときの電位変化を前記感光体と近接対向する電極により信号強度として検出し、該信号強度を、複数の既知の帯電電位に対して前記スポット光を照射したときの信号強度との関係から作成した検量線データに当てはめて、測定対象である感光体の不明の帯電電位レベルを求める感光体の微小領域電位の測定方法であって、
前記検量線データは、所定の帯電電位に対する信号強度が、感光体表面の位置をピッチSとすると、次式、ピッチS≧「測定方向のビームサイズ」を満たすように複数回移動させて、その都度、スポット光を照射して得られたデータであることを特徴とする感光体の微小領域電位の測定方法である。
<2> 信号強度が一定値であり、かつ安定したときの測定回数をN(ただし、N≧1)としたとき、N回目以降の信号強度を帯電電位に対する信号強度として検量線データを作成し、かつ測定対象である感光体に対し、測定開始したい位置より(N−1)×ピッチSだけ離れた位置からスポット光の照射を開始して、ピッチSでの測定をN回以上繰り返す前記<1>に記載の感光体の微小領域電位の測定方法である。
前記<1>及び<2>のいずれかに記載の本発明の感光体の微小領域電位の測定方法においては、感光体からの反射光が電極で反射及び再入射し、測定ピッチ以上に露光領域が広がっても、測定ピッチで規定される空間分解能を落とすことなく、測定が可能となる。
This invention is based on the said knowledge by this inventor, and the means for solving the said subject are as follows. That is,
<1> The charged photosensitive member is exposed to a short pulse with a spot light having a predetermined beam size, and a potential change at this time is detected as a signal intensity by an electrode that is in close proximity to the photosensitive member. Apply to the calibration curve data created from the relationship with the signal intensity when the spot light is applied to a known charged potential, and obtain the unknown charged potential level of the photoreceptor to be measured to obtain the micro-region potential of the photoreceptor. Measuring method,
The calibration curve data is moved a plurality of times so that the signal intensity with respect to a predetermined charging potential satisfies the following formula, pitch S ≧ “beam size in the measurement direction”, where the position of the surface of the photoreceptor is pitch S, This is a method for measuring the micro-region potential of a photoreceptor, characterized in that it is data obtained by irradiating spot light each time.
<2> When the signal intensity is a constant value and the number of measurements when the signal intensity is stable is N (where N ≧ 1), calibration curve data is created using the signal intensity for the Nth and subsequent times as the signal intensity for the charged potential. In addition, spot light irradiation is started from a position (N−1) × pitch S away from the position at which measurement is to be started on the photoconductor to be measured, and the measurement at pitch S is repeated N times or more. 1> is a method for measuring a microregion potential of a photoconductor.
In the method for measuring the microregion potential of the photoconductor of the present invention according to any one of the above <1> and <2>, the reflected light from the photoconductor is reflected and reincident by the electrode, and the exposure region is larger than the measurement pitch. Measurement can be performed without degrading the spatial resolution defined by the measurement pitch even if the spread is increased.

<3> 前記<1>から<2>のいずれかに記載の感光体の微小領域電位の測定方法に用いられる感光体の微小領域電位の測定装置であって、
感光体と、該感光体を保持し回転させる回転手段と、前記感光体表面を一様に帯電させる帯電器と、該帯電された感光体に所定のビームサイズのスポット光を短パルス露光するレーザ露光器と、感光体の微小領域の電位変化を検出する電極と、除電器とを前記感光体の回転方向にこの順に有することを特徴とする感光体の微小領域電位の測定装置である。
本発明の感光体の微小領域電位の測定装置においては、感光体からの反射光が電極で反射及び再入射し、測定ピッチ以上に露光領域が広がっても、測定ピッチで規定される空間分解能を落とすことなく、測定が可能である。
<3> A device for measuring a micro area potential of a photoconductor used in the method for measuring a micro area potential of the photo conductor according to any one of <1> to <2>,
A photosensitive member, a rotating means for holding and rotating the photosensitive member, a charger for uniformly charging the surface of the photosensitive member, and a laser for exposing the charged photosensitive member to spot light having a predetermined beam size for a short pulse exposure. An apparatus for measuring a micro area potential of a photoconductor, comprising an exposure device, an electrode for detecting a potential change in a micro area of the photoconductor, and a static eliminator in this order in the rotation direction of the photoconductor.
In the measurement device for the micro area potential of the photoconductor of the present invention, even if the reflected light from the photoconductor is reflected and re-entered by the electrode, and the exposure area spreads beyond the measurement pitch, the spatial resolution specified by the measurement pitch is obtained. Measurement is possible without dropping.

本発明によると、従来における問題を解決することができ、高電位に帯電した感光体へ微小レーザスポット光を露光し、感光体の微小領域で電位変化を生じさせ、該電位変化により電極に誘導される電荷量の変化、即ち、誘導電流(変位電流)を測定することによって、その信号の大きさから露光前の感光体の微小領域の不明の帯電電位のレベルを知ることができる感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置を提供することができる。   According to the present invention, a conventional problem can be solved, and a fine laser spot light is exposed to a photosensitive member charged to a high potential, a potential change is generated in a minute region of the photosensitive member, and the potential change induces the electrode. By measuring the change in the amount of charge generated, that is, the induced current (displacement current), it is possible to know the level of the unknown charging potential in the minute area of the photoreceptor before exposure from the magnitude of the signal. It is possible to provide a method for measuring a micro-region potential and an apparatus for measuring a micro-region potential of a photoreceptor.

(感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置)
本発明の感光体の微小領域電位の測定方法は、帯電された感光体を所定のビームサイズのスポット光で短パルス露光し、このときの電位変化を前記感光体と近接対向する電極により信号強度として検出し、該信号強度を、複数の既知の帯電電位に対して前記スポット光を照射したときの信号強度との関係から作成した検量線データに当てはめて、測定対象である感光体の不明の帯電電位レベルを求める感光体の微小領域電位の測定方法であって、前記検量線データは、所定の帯電電位に対する信号強度が、感光体表面の位置をピッチSとすると、次式、ピッチS≧「測定方向のビームサイズ」を満たすように複数回移動させて、その都度、スポット光を照射して得られたデータである。
この場合、信号強度が一定値であり、かつ安定したときの測定回数をN(ただし、N≧1)としたとき、N回目以降の信号強度を帯電電位に対する信号強度として検量線データを作成し、かつ測定対象である感光体に対し、測定開始したい位置より(N−1)×ピッチSだけ離れた位置からスポット光の照射を開始して、ピッチSでの測定をN回以上繰り返すことが好ましい。
(Measuring method of micro area potential of photoconductor and measuring apparatus of micro area potential of photoconductor)
According to the method of measuring the microregion potential of the photoconductor of the present invention, the charged photoconductor is exposed to a short pulse with a spot beam having a predetermined beam size, and the change in potential at this time is detected by an electrode in close proximity to the photoconductor. And the signal intensity is applied to calibration curve data created from the relationship with the signal intensity when the spot light is irradiated to a plurality of known charged potentials, and the photoconductor to be measured is unknown. A method for measuring a micro-region potential of a photoconductor for obtaining a charge potential level, wherein the calibration curve data has a signal intensity with respect to a predetermined charge potential, where the position on the surface of the photoconductor is a pitch S, the following formula: pitch S ≧ This is data obtained by moving a plurality of times so as to satisfy the “beam size in the measurement direction” and irradiating the spot light each time.
In this case, when the signal strength is a constant value and the number of measurements when the signal strength is stable is N (where N ≧ 1), the calibration curve data is created using the signal strength for the Nth and subsequent times as the signal strength for the charged potential. In addition, it is possible to start spot light irradiation at a position separated by (N−1) × pitch S from the position at which measurement is to be started on the photoconductor to be measured, and repeat measurement at pitch S N times or more. preferable.

本発明の感光体の微小領域電位の測定装置は、本発明の前記感光体の微小領域電位の測定方法に用いられ、
感光体と、該感光体を保持し回転させる回転手段と、前記感光体表面を一様に帯電させる帯電器と、該帯電された感光体に所定のビームサイズのスポット光を短パルス露光するレーザ露光器と、感光体の微小領域の電位変化を検出する電極と、除電器と、を前記感光体の回転方向にこの順に有してなり、更に必要に応じてその他の部材を有してなる。
以下、本発明の感光体の微小領域電位の測定方法の説明を通じて、本発明の感光体の微小領域電位の測定装置の詳細についても明らかにする。
The measurement device for the microregion potential of the photoconductor of the present invention is used in the method for measuring the microregion potential of the photoconductor of the present invention,
A photosensitive member, a rotating means for holding and rotating the photosensitive member, a charger for uniformly charging the surface of the photosensitive member, and a laser for exposing the charged photosensitive member to spot light having a predetermined beam size for a short pulse exposure. An exposure unit, an electrode for detecting a change in potential of a micro area of the photoconductor, and a static eliminator are provided in this order in the rotation direction of the photoconductor, and further include other members as necessary. .
Hereinafter, the details of the measuring device for the micro area potential of the photoconductor of the present invention will be clarified through the description of the method for measuring the micro area potential of the photoconductor of the present invention.

本発明の感光体の微小領域電位の測定方法は、高電位から低電位までの電位に帯電した感光体へ微小レーザスポットをワンショット露光し、意図的に微小領域の表面電位変化を生じさせ、その電位変化により感光体に近接されて設置された電極に誘導される電荷量の変化、即ち、誘導電流(変位電流)を測定し、その信号の大きさから露光前の表面電位のレベルを求める方式を改良したものである。   The method of measuring the microregion potential of the photoconductor of the present invention is to subject the photoconductor charged to a potential from a high potential to a low potential one-shot exposure of a microlaser, intentionally causing a change in the surface potential of the microregion, A change in the amount of charge induced in an electrode placed close to the photoreceptor due to the potential change, that is, an induced current (displacement current) is measured, and the level of the surface potential before exposure is obtained from the magnitude of the signal. It is an improvement of the method.

従来の「Japan Hard Copy 2001 論文集 P281」(前記非特許文献1)などに記載の測定方法では、測定位置を感光体ドラム回転方向に微小ピッチで変え、上記測定を繰り返し、最終的に潜像の一次元プロファイルを得るものであり、測定の空間分解能を確保するため電位検出に使用するビームを小さくする必要がある(ビームサイズ10μmを使用)。その結果、電位変化が生じる領域が小さく、得られる信号が小さくなってしまうという問題があった。
前記問題の解決方法としては、(1)信号処理回路(増幅回路)の改良、(2)電極を感光体に一層近づける、等が挙げられる。前記(1)はワンショットの信号(単発信号の意味)をS/N比を確保して増幅するのは困難である。一方、可能であれば同じ信号を繰り返し取り込み、重ね合わせで増幅する等の手段を用いることが考えられるが、測定の原理から、これは不可能である。前記(2)は有効であり、仮に、電極と感光体との間の距離1mmを0.1mmにすると、10倍程度アップする。
In the conventional measuring method described in “Japan Hard Copy 2001 Proceedings P281” (Non-Patent Document 1) and the like, the measurement position is changed at a minute pitch in the photosensitive drum rotation direction, the above measurement is repeated, and finally a latent image is obtained. In order to secure a spatial resolution of measurement, it is necessary to reduce the beam used for potential detection (use a beam size of 10 μm). As a result, there is a problem that the region where the potential change occurs is small and the signal obtained is small.
Examples of a solution to the problem include (1) improvement of a signal processing circuit (amplifying circuit) and (2) bringing the electrode closer to the photoreceptor. In (1), it is difficult to amplify a one-shot signal (meaning single-shot signal) while ensuring an S / N ratio. On the other hand, if possible, it is conceivable to use means such as repeatedly capturing the same signal and amplifying by superposition, but this is not possible due to the principle of measurement. The above (2) is effective, and if the distance 1 mm between the electrode and the photosensitive member is 0.1 mm, it is increased about 10 times.

本発明の感光体の微小領域の測定方法は、潜像の副走査方向の一次元プロファイルを測定するものであることから、主走査方向の露光サイズを大きくする。即ち、電位変化が生じる領域を大きくすることで、副走査方向の露光サイズを小さくすることを可能にし、測定の空間分解能を確保し、電極を感光体に接近させ、信号のS/N比の改善を計った上で、電極を接近させることが無視できなくなる影響、具体的には、感光体に入射した光が反射し、電極に戻り、更に反射及び再入射し、ビームサイズ以上、かつ測定ピッチ以上に露光領域が広がり空間分解能を劣化させるという問題の解決を、実現したものである。   Since the method for measuring a micro area of the photoconductor of the present invention measures a one-dimensional profile of a latent image in the sub-scanning direction, the exposure size in the main scanning direction is increased. That is, by increasing the area where the potential change occurs, it is possible to reduce the exposure size in the sub-scanning direction, ensure the spatial resolution of the measurement, bring the electrode closer to the photoconductor, and the signal S / N ratio. After making improvements, the effect of approaching the electrode is not negligible. Specifically, the light incident on the photoreceptor reflects, returns to the electrode, and then reflects and re-enters. This solves the problem that the exposure area expands beyond the pitch and degrades the spatial resolution.

まず、帯電した感光体に所定のビームサイズのスポット光(以下、「検知光」と称することもある)を短パルス露光し、このときの感光体上の電位変化を近接対向する電極で検出する方法に関し、予め複数の既知の帯電電位に対して上記検知光を照射したときの信号強度との関係(以下、「検量線データ」と称することもある)を得る。この検量線データを基に、測定対象の不明の帯電電位に対し、該検知光を照射し、得られる信号強度から照射された部位の帯電電位レベルを知る評価方法において、検量線データは、所定の帯電電位に対する信号強度が感光体上の位置をピッチS(ただし、ピッチS≧「測定方向のビームサイズ」)で複数回移動し、その都度、検知光を照射して得たデータであって、該信号強度が一定値で安定したときの測定回数をN(ただし、N≧1)としたときN回目以降の信号強度をこのときの帯電電位に対する信号強度として検量線データを作成し、かつ不明の帯電電位部位に対して照射する際には、測定開始したい位置より(N−1)×ピッチSだけ離れた位置から照射を開始し、ピッチSで測定をN回以上繰り返す。   First, spot light (hereinafter sometimes referred to as “detection light”) having a predetermined beam size is exposed to a charged photosensitive member for a short pulse, and a potential change on the photosensitive member at this time is detected by electrodes that are closely opposed to each other. With respect to the method, a relationship with signal intensity when the detection light is irradiated to a plurality of known charged potentials in advance (hereinafter also referred to as “calibration curve data”) is obtained. In the evaluation method for irradiating the detection light to the unknown charged potential of the measurement object based on the calibration curve data and knowing the charged potential level of the irradiated portion from the obtained signal intensity, the calibration curve data is a predetermined value. The signal intensity with respect to the charging potential is data obtained by moving the position on the photoconductor a plurality of times at a pitch S (where pitch S ≧ “beam size in the measurement direction”) and irradiating the detection light each time. When the number of measurements when the signal intensity is stabilized at a constant value is N (where N ≧ 1), calibration curve data is created with the signal intensity for the Nth and subsequent times as the signal intensity for the charged potential at this time, and When irradiating an unknown charged potential region, irradiation is started from a position separated by (N−1) × pitch S from a position where measurement is desired to be started, and measurement is repeated N times or more at pitch S.

ここで、前記検知光のビームサイズは大きいほど、信号強度が大きくなるが、測定の空間分解能を確保するためには小さい方がよく、トレードオフの関係にある。これを解決するための一つの方法として、検知光として線状レーザビームを使用する方法がある。本発明では、線状レーザビームは主走査方向18000μm×副走査方向24μm(655nm)を使用している。これにより、測定が可能になるだけの信号強度が得られ、副走査方向の測定の空間分解能が確保される。主走査方向のサイズ5000μm(ギャップ0.2mm、帯電電位下限500V)でも可能であり、測定の目的に応じて、条件を決めることになる。
本発明のレーザ露光光学系において、副走査方向のサイズは、感光体表面と光学系との距離で決まり、この距離が変わるとサイズが変わる。このときの距離は、製作される光学系ユニットの固有の値であり、距離に公差がある。距離をどの程度厳密に設定し、維持できるかを、公差との関係で考慮して、製作する光学ユニット、ひいてはビームサイズが決定される。
Here, the larger the beam size of the detection light, the larger the signal intensity. However, in order to ensure the spatial resolution of the measurement, it is better that the signal intensity is small, and there is a trade-off relationship. As one method for solving this, there is a method using a linear laser beam as detection light. In the present invention, the linear laser beam uses 18000 μm in the main scanning direction × 24 μm (655 nm) in the sub-scanning direction. Thereby, a signal intensity sufficient to enable measurement is obtained, and a spatial resolution of measurement in the sub-scanning direction is ensured. A size of 5000 μm in the main scanning direction (gap: 0.2 mm, charging potential lower limit: 500 V) is also possible, and conditions are determined according to the purpose of measurement.
In the laser exposure optical system of the present invention, the size in the sub-scanning direction is determined by the distance between the photoreceptor surface and the optical system, and the size changes as this distance changes. The distance at this time is a unique value of the manufactured optical system unit, and there is a tolerance in the distance. The optical unit to be manufactured, and hence the beam size, is determined in consideration of how closely the distance can be set and maintained in relation to the tolerance.

また、信号強度は、感光体表面と電極とのギャップにも依存し、あるところまでは狭くするほど信号強度が大きくなる。ギャップ制御のしやすさからも、0.1〜0.5mmが好ましい。   The signal intensity also depends on the gap between the surface of the photoreceptor and the electrode, and the signal intensity increases as the signal intensity becomes narrower. Also from the ease of gap control, 0.1 to 0.5 mm is preferable.

ここで、図1は、本発明の感光体の微小領域電位の測定装置の一例を示す概略図である。この図1の測定装置は、感光体1と、該感光体1を保持し回転させる回転手段9と、前記感光体表面を一様に帯電させる帯電器13と、該帯電された感光体1に所定のビームサイズのスポット光5を短パルス露光するレーザ露光器10と、感光体1の微小領域の電位変化を検出する電極4と、除電器14と、を前記感光体の回転方向にこの順に有する。
なお、図1中、2は潜像書き込み装置、3は表面電位計プローブ、6はレーザビーム光学系、7はPCコントローラ、8は電流増幅器、10はパルスジェネレータ、11はオシロスコープ、12はLDドライバをそれぞれ示す。
Here, FIG. 1 is a schematic view showing an example of a measuring device for the micro-region potential of the photoreceptor of the present invention. The measuring apparatus shown in FIG. 1 includes a photosensitive member 1, a rotating unit 9 that holds and rotates the photosensitive member 1, a charger 13 that uniformly charges the surface of the photosensitive member, and the charged photosensitive member 1. A laser exposure device 10 that performs short pulse exposure of a spot beam 5 having a predetermined beam size, an electrode 4 that detects a potential change in a minute region of the photoreceptor 1, and a static eliminator 14 are arranged in this order in the rotation direction of the photoreceptor. Have.
In FIG. 1, 2 is a latent image writing device, 3 is a surface potential meter probe, 6 is a laser beam optical system, 7 is a PC controller, 8 is a current amplifier, 10 is a pulse generator, 11 is an oscilloscope, and 12 is an LD driver. Respectively.

前記電極4は、透明ガラスに透明導電性薄膜を成膜したものであり、これはガラス電極を感光体サンプルに対向させたとき、電極を通して光を照射することが可能なため、露光装置の配置等で使い勝手が向上する。前記透明ガラスとしては一般のガラスでもよいが、BK−7、石英ガラス等が通過波長域も広く、測定用としては好ましい。
前記透明導電薄膜としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ITOなどが好適である。透明導電膜の成膜は、ガラスの片側全面に成膜してもよく、パターンマスクを用い、細線(≦1mm)でメッシュ状に成膜してもよい。この場合、[ITO成膜部分の面積/ITO成膜無し部分の面積]の面積比が0.2前後となるようにすると、電極を通過する光が800nm以上の波長を含むとき、この波長の光を大きく損なうことなく通過させることができる。このことは、測定の目的に応じて適宜選択することができる。
The electrode 4 is formed by forming a transparent conductive thin film on a transparent glass, and this can be irradiated with light through the electrode when the glass electrode is opposed to the photoreceptor sample. Ease of use improves. The transparent glass may be general glass, but BK-7, quartz glass, and the like have a wide pass wavelength range and are preferable for measurement.
There is no restriction | limiting in particular as said transparent conductive thin film, According to the objective, it can select suitably, For example, ITO etc. are suitable. The transparent conductive film may be formed on the entire surface of one side of the glass, or may be formed in a mesh shape with a thin line (≦ 1 mm) using a pattern mask. In this case, if the area ratio of [area of the ITO film forming portion / area of the ITO non-film forming portion] is about 0.2, when the light passing through the electrode includes a wavelength of 800 nm or more, this wavelength Light can pass through without significant loss. This can be appropriately selected according to the purpose of measurement.

また、通過させる光がレーザである場合、レーザ入射側のガラスには反射防止膜を設けることが好ましい。これはレーザ入射側のガラス表面で反射したレーザが発光部に戻り、複合共振器を形成して、レーザ光に揺らぎが生じる、いわゆる戻り光ノイズを防ぐためである。
前記電極4を感光体に対向させて設置する場合には、感光体との距離は近いほど信号が大きくなり好ましいが、感光体の静電容量にも関係して一概には規定できないが、後述する実施例で使用している感光体では10〜15μm程度のギャップが最大の信号強度を与えることが計算から予測される。これ以上近づけると逆に信号強度は小さくなる。本発明では、ギャップ制御のしやすさから、ギャップが0.1〜0.5mmとなるように電極を設置することが好ましい。
When the light to be transmitted is a laser, it is preferable to provide an antireflection film on the glass on the laser incident side. This is to prevent so-called return light noise, in which the laser beam reflected from the glass surface on the laser incident side returns to the light emitting portion, forms a composite resonator, and the laser beam fluctuates.
In the case where the electrode 4 is placed facing the photoconductor, the closer the distance to the photoconductor, the greater the signal, which is preferable. In the photoconductor used in the embodiment, it is predicted from the calculation that a gap of about 10 to 15 μm gives the maximum signal intensity. On the contrary, the signal intensity decreases as the distance further approaches. In this invention, it is preferable to install an electrode so that a gap may be 0.1-0.5 mm from the ease of gap control.

前記感光体に与える露光エネルギーは所定の電位、例えば、800(−V)を100(−V)にするのに必要な露光エネルギー(=光パワー×点灯時間)になるように光パワーと時間を決める。光パワーはレーザ駆動電流を調節して決め、レーザ点灯時間は感光体のキャリアトランジットタイムを基準とし、これ以下に設定するのが好ましい。これは、測定される信号強度は電極に誘起される電荷密度の流れであり、時間が短いほど、信号が大きくなるためである。   The exposure energy given to the photosensitive member is set to a predetermined potential, for example, the optical power and time so that the exposure energy (= light power × lighting time) required to change 800 (−V) to 100 (−V). Decide. The optical power is determined by adjusting the laser driving current, and the laser lighting time is preferably set to be shorter than this with reference to the carrier transit time of the photoreceptor. This is because the measured signal intensity is the flow of charge density induced in the electrode, and the shorter the time, the greater the signal.

前記レーザビームは、通常ガウシアン分布をしたビームを想定し、最大強度の1/e(約13.5%)の強度になる位置(直径)をビーム径とする。一方、ビームが照射され電位減衰が生じる感光体上の電位減衰領域サイズは露光エネルギーの強さによる。極めて弱い露光エネルギーであれば、1/eより小さい領域になることもあり、極めて強い露光エネルギーであれば、1/eより広い領域でも電位減衰が生じることになる。これは、1/eで決まるサイズには全体の約94.5%のエネルギーが入り、残り約5.5%のエネルギーは1/eの外であることから理解できる。
この場合、感光体を所定の電位より0V近傍まで減衰させるのに必要な露光エネルギーの数十、数百倍、又はそれ以上の露光エネルギーのときには1/eより広い領域で電位減衰が生じるが、必要露光エネルギー程度以下であれば、1/eの外側の電位減衰は小さく、ほとんど無視できるため、便宜上、「ビームサイズ=露光領域サイズ=電位減衰領域サイズ」としている。
The laser beam is assumed to be a beam having a normal Gaussian distribution, and the position (diameter) at which the intensity becomes 1 / e 2 (about 13.5%) of the maximum intensity is set as the beam diameter. On the other hand, the size of the potential attenuation region on the photoreceptor where the beam is irradiated and the potential is attenuated depends on the intensity of the exposure energy. If the exposure energy is extremely weak, the region may be smaller than 1 / e 2. If the exposure energy is extremely strong, potential attenuation occurs even in a region wider than 1 / e 2 . This can be understood from the fact that the size determined by 1 / e 2 contains about 94.5% of the total energy and the remaining 5.5% of the energy is outside 1 / e 2 .
In this case, the potential attenuation occurs in a region wider than 1 / e 2 when the exposure energy is several tens, several hundreds times or more of the exposure energy required to attenuate the photosensitive member from the predetermined potential to near 0V. If it is less than or equal to the required exposure energy, the potential attenuation outside 1 / e 2 is small and almost negligible, so for convenience, “beam size = exposure area size = potential attenuation area size”.

以下、本発明の感光体の微小領域電位の測定方法における手順について、具体的に説明する。
(1)検量線データ取得の手順
図1及び図2に示すように、感光体ドラム1を回転させ、該感光体表面を帯電器(不図示)により帯電する。次に、潜像書き込み器2により1ライン書き込みを行う工程があるが、ここでは書き込みOFFである。1ラインの潜像にあたる感光体上の部位が信号検出部直前に来たところで帯電及び回転を停止する。
次に、655nmの検知光(線状レーザビーム:主走査方向18000μm×副走査方向24μm)を照射する。このときの、電位減衰(=電荷変化)による誘導電流(変位電流)を測定する。感光体ドラム表面を測定ピッチS(ただし、Sは副走査方向のビームサイズ24μm以上にする。ここでは50μmにしている)だけ移動し、検知光を照射して、信号を得る。これを所定回数繰り返す。その結果得られる信号の例を図8に示す。
図8において、「信号強度」は信号の立ち上がり開始点より最大ピークまでの高さ(幅)にしている。図8では信号は(−)極性のため、下側に向かって立ち上がっている。最初より得られる信号強度が順次小さくなっていくが、これは前記したように電極で反射した光が戻り、露光領域を広げ、測定ピッチS以上に広がっているためである。次に、測定ピッチSだけ移動して照射したときに既に前回の照射の影響を受け、電位が少々低下しているためである。この信号が繰り返しの測定が進み安定して得られるようになるのは、前回、前々回の照射の影響が同じになるためである。信号強度が安定して得られ始めたときの測定回数をN回目とし、トータルの繰り返し回数をn回とすると、N回目のデータか、あるいはN回目以降nまでのデータ(個数:(n−N+1))の平均値をこのときの帯電電位に対して得られる信号強度とする。
次に、帯電電位を変えて、同様の測定を繰り返し、「帯電電位」対「信号強度」の検量線データを得る。
Hereinafter, the procedure in the method for measuring the microregion potential of the photoconductor of the present invention will be specifically described.
(1) Calibration Curve Data Acquisition Procedure As shown in FIGS. 1 and 2, the photosensitive drum 1 is rotated and the surface of the photosensitive member is charged by a charger (not shown). Next, there is a step of writing one line by the latent image writer 2, but here the writing is OFF. Charging and rotation are stopped when the part on the photoreceptor corresponding to the latent image of one line comes immediately before the signal detection unit.
Next, 655 nm detection light (linear laser beam: main scanning direction 18000 μm × sub-scanning direction 24 μm) is irradiated. At this time, an induced current (displacement current) due to potential decay (= charge change) is measured. The surface of the photosensitive drum is moved by a measurement pitch S (where S is a beam size of 24 μm or more in the sub-scanning direction, 50 μm here), and a detection light is irradiated to obtain a signal. This is repeated a predetermined number of times. An example of the resulting signal is shown in FIG.
In FIG. 8, “signal intensity” is the height (width) from the rising start point of the signal to the maximum peak. In FIG. 8, the signal rises downward because of the (−) polarity. The signal intensity obtained from the beginning gradually decreases, because the light reflected by the electrode returns as described above, widens the exposure area, and extends beyond the measurement pitch S. Next, this is because when the irradiation is performed by moving by the measurement pitch S, the potential is already slightly affected by the previous irradiation. The reason why this signal can be obtained stably through repeated measurement is that the influence of the previous and previous irradiations is the same. Assuming that the number of measurements when the signal intensity starts to be obtained stably is the Nth and the total number of repetitions is n, the Nth data or the data from the Nth to n (number: (n−N + 1) The average value of)) is the signal intensity obtained with respect to the charging potential at this time.
Next, the charge potential is changed and the same measurement is repeated to obtain calibration curve data of “charge potential” versus “signal intensity”.

(2)帯電電位の測定の手順
図1及び図2に示すように、感光体ドラム1を回転させ、該感光体表面を帯電器(不図示)により帯電する。次に、潜像書き込み器2により1ライン書き込みを行う。ただし、1ラインの副走査方向のサイズは約85μmである。1ラインの潜像にあたる感光体上の部位が信号検出部直前に来たところで帯電及び回転を停止する。
このとき、ピッチS×(N−1)だけ手前で停止する。655nmの検知光(線状レーザビーム:主走査方向18000μm×副走査方向24μm)を照射する。次に、電位減衰(=電荷変化)による誘導電流(変位電流)を測定する。次いで、感光体ドラム表面を測定ピッチSだけ移動し、検知光を照射して信号を得る。これを所定回数繰り返す。測定ピッチS(ここではSは50μm)で移動したとき、N回目以降の測定部位では、前回、前々回・・・の照射による影響度合いは同じになっているため、(N−1)回までの信号強度データは破棄し、N回目からの信号強度データを読み込む。このデータを、予め作成してある検量線データに当てはめて、帯電電位を求める。また、得られた帯電電位データを測定位置に対してプロットすることで、ピッチS(=50μm)の空間分解能で1ライン書き込みの潜像のプロフィール(副走査方向)を得ることができる。
(2) Procedure for Measuring Charging Potential As shown in FIGS. 1 and 2, the photosensitive drum 1 is rotated and the surface of the photosensitive member is charged by a charger (not shown). Next, one line writing is performed by the latent image writer 2. However, the size of one line in the sub-scanning direction is about 85 μm. Charging and rotation are stopped when the part on the photoreceptor corresponding to the latent image of one line comes immediately before the signal detection unit.
At this time, the operation stops before the pitch S × (N−1). Detecting light of 655 nm (linear laser beam: main scanning direction 18000 μm × sub-scanning direction 24 μm) is irradiated. Next, an induced current (displacement current) due to potential decay (= charge change) is measured. Next, the surface of the photosensitive drum is moved by the measurement pitch S, and a signal is obtained by irradiating detection light. This is repeated a predetermined number of times. When moving at the measurement pitch S (here, S is 50 μm), the measurement level after the Nth time has the same degree of influence due to the irradiation of the previous time, the last time, etc., so that it is up to (N−1) times. The signal strength data is discarded and the signal strength data from the Nth time is read. This data is applied to calibration curve data prepared in advance to determine the charging potential. Further, by plotting the obtained charging potential data against the measurement position, it is possible to obtain a one-line-written latent image profile (sub-scanning direction) with a spatial resolution of pitch S (= 50 μm).

以下、本発明の実施例を説明するが、本発明は、これらの実施例に何ら限定されるものではない。   Examples of the present invention will be described below, but the present invention is not limited to these examples.

図1に示す感光体の微小領域電位の測定装置は、以下の機器で構成した。なお、以下の機器構成及び条件は、特に断りがない限り、以下の全ての実施例において共通である。
・感光体ドラムとして、株式会社リコー製の積層OPC(有機光半導体)ドラム(外径60mm×長さ334mm)、帯電電位800(−V)から100(−V)への電位減衰に必要な露光エネルギーは655nmにおいて、0.3μJ/cmである。800(−V)におけるトランジットタイムは、およそ300μsである。
・検知光用レーザ光学系(静止ビーム露光):主走査方向18000μm×副走査方向24μm、波長655nm(リコー光学株式会社製)、感光体表面との距離74mm(本光学系に固有な値)に保つことでビームサイズを規定、ビーム面積は0.43mmであった。与える露光エネルギーはレーザ駆動電流で光パワーを決め、レーザ点灯時間は2μsにした。ここでは800(−V)を100(−V)にするのに必要な露光エネルギーで行った。なお、使用した線状ビームのビームプロフィールを図3に示した。
・感光体ドラムの回転:精密回転ステージKS432−75(駿河精機株式会社製)+コントローラD223(駿河精機株式会社製)を使用した。1回の測定サイクル:回転−停止−パルス露光−回転の周期は、およそ0.8sにした。
・電極:サイズ30mm×10mm、厚み1mmの石英ガラスの片側にITOを成膜したものを用いた。この電極にはレーザ入射側に反射防止膜が成膜されている。ITOの平均膜厚は169μm、表面抵抗は54Ω/□であった。
・感光体と電極のギャップは0.1mmにした。
・レーザのトリガー:任意波形発生装置(アジレント・テクノロジー社製、HP33120A)を使用し、One shot pulseを発生させて、トリガーとした。パルス幅は2μsにした。
・画像書き込み器:株式会社リコー製のレーザプリンターのレーザ書き込み装置を取り外し、これを改造して組み込んだ。
・信号処理系:電流増幅器(KEITHLEY428)+オシロスコープ(横河電機株式会社製、DL708)
・ドラム保持及び回転装置:図1に示す構成、機能を有する株式会社リコー製のドラム評価装置を利用した。
・帯電器:スコロトロン帯電器に高圧電源(TREK 609A−3)の出力を印加して帯電し、検量線データ作成時に使用する帯電電位は表面電位計(TREK Model344)で確認した。帯電電位は800(−V)〜200(−V)の範囲にした。
・測定は全て自動化されており、自作ソフトによる。
The apparatus for measuring the microregion potential of the photoreceptor shown in FIG. The following equipment configuration and conditions are common to all the following embodiments unless otherwise specified.
As a photosensitive drum, a laminated OPC (organic optical semiconductor) drum (outer diameter 60 mm × length 334 mm) manufactured by Ricoh Co., Ltd., exposure necessary for potential attenuation from a charged potential 800 (−V) to 100 (−V) The energy is 0.3 μJ / cm 2 at 655 nm. The transit time at 800 (−V) is approximately 300 μs.
Laser optical system for detection light (stationary beam exposure): main scanning direction 18000 μm × sub-scanning direction 24 μm, wavelength 655 nm (manufactured by Ricoh Optical Co., Ltd.), distance to the photoreceptor surface 74 mm (value unique to this optical system) The beam size was defined by keeping the beam area, and the beam area was 0.43 mm 2 . The exposure energy to be applied is determined by the laser drive current and the optical power is determined. Here, the exposure energy required to change 800 (−V) to 100 (−V) was used. The beam profile of the used linear beam is shown in FIG.
Rotation of photosensitive drum: A precision rotary stage KS432-75 (manufactured by Suruga Seiki Co., Ltd.) + Controller D223 (manufactured by Suruga Seiki Co., Ltd.) was used. One measurement cycle: rotation-stop-pulse exposure-rotation period was about 0.8 s.
Electrode: An ITO film formed on one side of quartz glass having a size of 30 mm × 10 mm and a thickness of 1 mm was used. This electrode has an antireflection film formed on the laser incident side. The average film thickness of ITO was 169 μm, and the surface resistance was 54Ω / □.
-The gap between the photoconductor and the electrode was 0.1 mm.
Laser trigger: An arbitrary waveform generator (manufactured by Agilent Technologies, HP33120A) was used to generate One shot pulse, which was used as a trigger. The pulse width was 2 μs.
-Image writer: The laser writing device of the laser printer manufactured by Ricoh Co., Ltd. was removed, and this was modified and incorporated.
Signal processing system: current amplifier (KEITHLEY428) + oscilloscope (Yokogawa Electric Corporation, DL708)
Drum holding and rotating device: A drum evaluation device manufactured by Ricoh Co., Ltd. having the configuration and functions shown in FIG. 1 was used.
Charger: The scorotron charger was charged by applying the output of a high-voltage power supply (TREK 609A-3), and the charged potential used when preparing the calibration curve data was confirmed with a surface potentiometer (TREK Model 344). The charging potential was in the range of 800 (-V) to 200 (-V).
・ All measurements are automated and are based on self-made software.

(実施例1)
−微小領域電位の測定−
上記感光体を、上記測定装置を用いて、上記手順(1)に基づき、感光体の微小領域電位を測定した。測定ピッチSは30μm、50μm、及び100μmの3通りとした。帯電電位は800(−V)の1通りとした。結果を表1及び図4に示す。また。測定回数毎のデータを測定位置に直した結果を図5に示す。
Example 1
-Measurement of micro-region potential-
The micro area potential of the photoconductor was measured on the photoconductor based on the procedure (1) using the measuring apparatus. There were three measurement pitches S, 30 μm, 50 μm, and 100 μm. The charging potential was one of 800 (-V). The results are shown in Table 1 and FIG. Also. FIG. 5 shows the result of converting the data for each measurement count to the measurement position.

Figure 0004851786
(*)「安定する位置」は、測定開始位置からの距離を表す。
Figure 0004851786
(*) “Stable position” represents the distance from the measurement start position.

表1、図4及び図5の結果から、測定の最初より、測定位置を変えた繰り返し測定で信号強度が変化していく(小さくなっていく)のがわかる。また、最初の測定から100μm程度離れた位置でデータが安定することがわかる。
これらのことから、電極での反射による露光領域の広がりの影響は、片側100μm程度あることがわかった。
From the results of Table 1, FIG. 4 and FIG. 5, it can be seen that the signal intensity changes (becomes smaller) from the beginning of the measurement by repeated measurement with the measurement position changed. It can also be seen that the data is stable at a position about 100 μm away from the first measurement.
From these facts, it was found that the influence of the spread of the exposure region due to reflection at the electrode is about 100 μm on one side.

(実施例2)
−微小領域電位の測定−
上記測定装置を使用して、感光体と電極とのギャップを0.2mmとし、測定ピッチSを100μm、150μm、及び200μmにして、微小領域電位を測定した。結果を表2及び図6に示す。
(Example 2)
-Measurement of micro-region potential-
Using the above measuring apparatus, the gap between the photoconductor and the electrode was 0.2 mm, the measurement pitch S was 100 μm, 150 μm, and 200 μm, and the microregion potential was measured. The results are shown in Table 2 and FIG.

Figure 0004851786
(*)「安定する位置」は、測定開始位置からの距離を表す。
Figure 0004851786
(*) “Stable position” represents the distance from the measurement start position.

表2及び図6の結果から、測定の最初より、測定ピッチSが100μmでは測定位置を変えた繰り返し測定で信号強度が変化するのがわかる。測定ピッチSが150μm、及び200μmでは1回目と2回目以降で変化がないデータが得られた。
これらの結果から、電極での反射による露光領域の広がりの影響は片側100μm程度であることがわかった。
From the results of Table 2 and FIG. 6, it can be seen from the beginning of the measurement that when the measurement pitch S is 100 μm, the signal intensity changes by repeated measurement with the measurement position changed. When the measurement pitch S was 150 μm and 200 μm, data having no change was obtained between the first time and the second time.
From these results, it was found that the influence of the spread of the exposure region due to reflection at the electrode was about 100 μm on one side.

(実施例3)
−検量線データの作成−
実施例1と同様にして、測定ピッチS毎に帯電電位を800(−V)〜200(−V)、100V間隔で測定した。各測定ピッチのデータにおいて、信号強度が安定する回数以降のデータを平均化し、該平均値をそのときの帯電電位に対応した信号強度として、上記手順に従って検量線データを作成した。結果を図7に示す。
図7の結果から、同じ帯電電位に対し測定ピッチの短いものほど、信号強度が小さいのは、信号強度が安定するまでの測定回数が多く、それだけ、電極による反射及び再入射の影響を受ける回数が多く、その分、帯電電位の低下が大きいためであると思われる。
(Example 3)
−Creation of calibration curve data−
In the same manner as in Example 1, the charging potential was measured at intervals of 100 V at 800 (−V) to 200 (−V) for each measurement pitch S. In the data of each measurement pitch, the data after the number of times that the signal intensity is stabilized was averaged, and the calibration curve data was created according to the above procedure with the average value as the signal intensity corresponding to the charged potential at that time. The results are shown in FIG.
From the results of FIG. 7, the shorter the measurement pitch with respect to the same charged potential, the smaller the signal intensity is because the number of times of measurement until the signal intensity becomes stable is much, and the number of times affected by reflection and re-incidence by the electrode. This is probably due to the large decrease in the charging potential.

(実施例4)
−検量線データに基づく帯電電位の測定−
実施例3において、検量線データを作成したときに使用しなかった帯電電位に感光体を帯電し、30μmピッチ、50μmピッチ、及び100μmピッチで測定し、それぞれ測定5回目、測定3回目、及び測定3回目の信号強度を取得した。このデータを実施例3の検量線データにあてはめ、帯電電位を読み取った。得られた帯電電位値と、表面電位計でモニターしていた帯電電位値とを比較した。結果を表3に示す。
Example 4
-Measurement of charging potential based on calibration curve data-
In Example 3, the photoconductor was charged to a charging potential that was not used when the calibration curve data was created, and measurement was performed at 30 μm pitch, 50 μm pitch, and 100 μm pitch, and the fifth measurement, the third measurement, and the measurement, respectively. A third signal strength was acquired. This data was applied to the calibration curve data of Example 3, and the charged potential was read. The obtained charging potential value was compared with the charging potential value monitored by a surface potential meter. The results are shown in Table 3.

Figure 0004851786
表3の結果から、測定ピッチ50μm、及び測定ピッチ100μmであれば検量線データから読み出されるデータには問題はないことがわかった。
Figure 0004851786
From the results of Table 3, it was found that there is no problem in the data read from the calibration curve data if the measurement pitch is 50 μm and the measurement pitch is 100 μm.

本発明の感光体の微小領域電位の測定方法及び感光体の微小領域電位の測定装置によれば、感光体の微小領域の帯電電位を直接測定し、潜像の状態を評価できるので、従来は困難であった画像形成装置における潜像の劣化である、いわゆる地汚れと言われる背景の汚れ、画像ボケ(又は画像流れ)という異常画像の正確な評価が可能となる。   According to the method for measuring the micro area potential of the photoconductor and the apparatus for measuring the micro area potential of the photoconductor of the present invention, the charged potential of the micro area of the photoconductor can be directly measured to evaluate the state of the latent image. This makes it possible to accurately evaluate abnormal images such as background stains and image blurring (or image blur), which are so-called background stains, which are deterioration of latent images in image forming apparatuses that have been difficult.

図1は、本発明の感光体の微小領域電位の測定装置の一例を示す全体概略図である。FIG. 1 is an overall schematic diagram showing an example of a measuring device for a micro area potential of a photoconductor of the present invention. 図2は、測定データのシーケンス例を示す図である。FIG. 2 is a diagram illustrating a sequence example of measurement data. 図3は、実施例において検知光に使用した線状ビームのプロフィールを示す図である。FIG. 3 is a diagram illustrating a profile of a linear beam used for detection light in the example. 図4は、実施例1の測定データ(X軸が測定の回数)を示すグラフである。FIG. 4 is a graph showing measurement data of Example 1 (X-axis is the number of measurements). 図5は、実施例1の測定データ(X軸が測定開始からの距離)を示すグラフである。FIG. 5 is a graph showing measurement data of Example 1 (X axis is a distance from the start of measurement). 図6は、実施例2の測定データ(X軸が測定の回数)を示すグラフである。FIG. 6 is a graph showing measurement data of Example 2 (X-axis is the number of times of measurement). 図7は、実施例3の測定データ(検量線データ)を示すグラフである。FIG. 7 is a graph showing measurement data (calibration curve data) of Example 3. 図8は、実施例4の測定データ(得られる信号の例、信号強度の説明)を示すグラフである。FIG. 8 is a graph showing measurement data of Example 4 (example of signals obtained, description of signal strength).

符号の説明Explanation of symbols

1 感光体ドラム
2 潜像書き込み装置
3 表面電位計プローブ
4 電極
5 入射レーザ
6 レーザビーム光学系
7 PCコントローラ
8 電流増幅器
9 回転手段
10 パルスジェネレータ
11 オシロスコープ
12 LDドライバ
13 露光器
14 除電器
DESCRIPTION OF SYMBOLS 1 Photosensitive drum 2 Latent image writing device 3 Surface potential meter probe 4 Electrode 5 Incident laser 6 Laser beam optical system 7 PC controller 8 Current amplifier 9 Rotating means 10 Pulse generator 11 Oscilloscope 12 LD driver 13 Exposure unit 14 Charger 14

Claims (1)

帯電された感光体を所定のビームサイズのスポット光で短パルス露光し、このときの電位変化を前記感光体と近接対向する電極により信号強度として検出し、該信号強度を、複数の既知の帯電電位に対して前記スポット光を照射したときの信号強度との関係から作成した検量線データに当てはめて、測定対象である感光体の不明の帯電電位レベルを求める感光体の微小領域電位の測定方法であって、
前記検量線データは、所定の帯電電位に対する信号強度が、感光体表面の位置をピッチSとすると、次式、ピッチS≧「測定方向のビームサイズ」を満たすように前記感光体表面を複数回移動、停止させて、その停止の度に、スポット光を照射して得られたデータであって、信号強度が一定値であり、かつ安定したときの信号強度測定回数をN(ただし、N≧1)としたとき、N回目以降の信号強度を帯電電位に対する信号強度として前記検量線データを作成し、かつ感光体の不明の帯電電位レベルを求める際、前記測定対象である感光体に対し、測定開始したい位置より(N−1)×ピッチSだけ離れた位置からスポット光の照射を開始して、ピッチSでの信号強度測定をN回以上繰り返し、(N−1)回までの信号強度データを破棄することを特徴とする感光体の微小領域電位の測定方法。
The charged photoconductor is exposed to a short pulse with a spot beam having a predetermined beam size, and the potential change at this time is detected as a signal intensity by an electrode in close proximity to the photoconductor, and the signal intensity is detected by a plurality of known charging charges. A method for measuring a micro area potential of a photoconductor to obtain an unknown charged potential level of a photoconductor to be measured by applying it to a calibration curve data created from a relationship with a signal intensity when the spot light is applied to the potential. Because
The calibration curve data is obtained by measuring the surface of the photoconductor a plurality of times so that the signal intensity with respect to a predetermined charging potential satisfies the following formula, pitch S ≧ “beam size in the measurement direction”, where the position of the photoconductor surface is pitch S. Data obtained by irradiating a spot light each time it is moved and stopped, and the number of signal intensity measurements when the signal intensity is constant and stable is N (where N ≧ 1), the calibration curve data is created with the signal intensity for the Nth and subsequent times as the signal intensity with respect to the charging potential, and when the unknown charging potential level of the photosensitive member is obtained, measurements started like the position (N-1) to start the irradiation of the spot light from a position spaced × pitch S, a signal strength measurement at the pitch S to repeat N times or more, up to (N-1) times discard the signal strength data Measurement method for a micro region potential of the photosensitive member, wherein the door.
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