JP4852020B2 - Buffer body and packing body - Google Patents

Description

  The present invention relates to a buffer body and a packaging body that protect a storage case for a processing jig related to a substrate such as a semiconductor wafer.

  Conventionally, when dicing a semiconductor wafer having a diameter of 12 inches (φ300 mm), the semiconductor wafer is mounted on a tape frame recommended by SEMI Standard G74-0699 and the tape frame mounted with the semiconductor wafer is a coin stack type. And transport it to the factory, transfer the tape frame to the frame cassette and store it again in this factory, and then set the semiconductor wafer on the processing equipment such as dicer (Patent Document) 1 and 2).

  Although not shown in the drawing, the frame cassette is generally formed in a box shape using aluminum and the front and rear portions are opened, and functions to store and arrange 13 or 25 tape frames vertically.

By the way, since the conventional frame cassette is made of aluminum as described above, there has been a problem that conductive foreign matter is generated in contact with the tape frame or that handling is hindered because it is heavy.
In order to solve the problem, a resin frame cassette was proposed instead of an aluminum frame cassette, and the tape frame was stored in this frame cassette, shipped and transported immediately, and the tape frame transfer work was saved. Is being considered.
JP-A-8-80989 JP 2005-508274 Gazette

  However, when a tape frame is stored in a resin frame cassette and shipped or transported, the frame cassette is stored and packed in a corrugated cardboard box or the like through a cushioning material processed into an appropriate shape. A new problem arises that the cushioning material is scraped off due to vibration or impact and adheres to the tape frame or semiconductor wafer, which adversely affects the subsequent packaging process or substrate mounting process.

  In addition, when a general cushioning material (foamed polystyrene, foamed polyethylene, etc.) is used when shipping and transporting the frame cassette, a sufficient cushioning effect cannot be expected. May cause damage. Furthermore, since a general cushioning material is large and bulky, there is a problem that storage space and its cost increase.

  The present invention has been made in view of the above, and an object of the present invention is to provide a buffer body and a package body that can prevent foreign matter from adhering to a processing jig or a substrate and can be expected to have a sufficient buffering effect.

In the present invention, in order to solve the above-mentioned problems, vacuum forming is performed using a resin processing jig storage case capable of storing a processing jig for mounting a substrate in a container body, and a molding material containing a thermoplastic resin. Alternatively, it is pressure-formed , and includes a pair of flexible trays that sandwich the processing jig storage case from above and below ,
The processing jig storage case is formed in a box-shaped container main body having an opening at the front and rear, and projectingly formed on both side walls of the container main body, and horizontally supports the ring frame of the processing jig. and a pair of support pieces, and arrayed at intervals a pair of support pieces in the vertical direction of the container body, and partitioned and formed between the insertion grooves of the ring frame and the adjacent support strip support piece, the support A stopper facing the rear side of the side of the ring frame is provided at the rear of the lower surface of the piece, and an inclined surface that regulates the shakiness of the ring frame is formed on the side of the stopper,
Each tray is formed on the outer periphery of the fitting cover part, which is recessed in a substantially U-shaped longitudinal section and is fitted into the upper half or lower half of the container body of the processing jig storage case. A substantially frame-shaped flange in plan view extending in the direction, a substantially U-shaped recess in plan view formed in a part of the flange, and a substantially U-shaped projection in plan view formed in the remaining portion of the flange. Including a concave bottom of the fitting cover, and forming a corner of the bottom of the fitting covering in a contact avoiding portion that avoids contact with the container body of the processing jig storage case. And forming the bellows, interposing the bellows between the fitting cover portion and the concave portion and the convex portion, butting both ends of the concave portion and the convex portion of the flange,
When the processing jig storage case is sandwiched between a pair of trays , the concave portion of one tray and the convex portion of the other tray are fitted together, and the convex portion of one tray and the concave portion of the other tray are fitted together. It is characterized in that the the like.

The processing jig storage case includes a flexible lid that detachably opens and closes at least one of the opened front portion and rear portion of the container main body. The lid includes a ring frame of the processing jig. Interfering bulges can be formed.

Moreover, in order to solve the said subject, in this invention, the buffer body of Claim 1 or 2 is accommodated in a package.

  Here, the substrate in the claims includes at least a semiconductor wafer (φ200 mm, φ300 mm, φ450 mm), various glass plates, and the like. The processing jig storage case may be entirely made of resin, or most of it may be made of resin. In addition to the thermoplastic resin, the molding material may contain various fillers such as an antistatic agent. The tray and the lid can be formed using a resin sheet. These do not specifically ask for transparency, opaqueness, and translucency.

  The lid body may be one that removably opens and closes the front part or the rear part that the container body opens, or may be one that opens and closes the front and rear parts of the container body. Moreover, the concave part and the convex part do not specifically ask for a plurality. Further, the package may be a known cardboard box or a dedicated box.

According to the present invention, it is possible to suppress the foreign matter from adhering to the processing jig or the substrate and to expect a sufficient buffering effect. In addition, since the stopper of the support piece regulates the rear portion of the ring frame, it is possible to effectively prevent the positional displacement and dropout of the inserted ring frame. In addition, since the inclined surface of the stopper gradually fills the extra space of the insertion groove, it is possible to suppress the vertical shaking of the ring frame due to vibration, and less damage to the substrate and the ring frame. . In addition, when the tray is vacuum-formed, it can be expected to produce a variety of trays in a small variety and at low cost, and the degree of freedom of surface decoration can be improved.
In addition, when forming a tray with compressed air, it is possible to obtain a shape that is faithful to the mold, so that a highly accurate tray can be obtained, and sharp lines and textures can be transferred smoothly and easily. It becomes possible. Further, if the bottom corner of the insertion covering portion of the tray is a contact avoidance portion that avoids contact with the container main body of the processing jig storage case, the bottom corner of the insertion covering portion is rounded. It is possible to suppress damage due to contact with the corners, and to repetitively use the tray, thereby reducing the environmental load. Furthermore, if the concave portion and the convex portion of the tray are each formed in a substantially U-shaped plane, and both end portions of the concave portion and the convex portion are brought into contact with each other, the inflow of gas from the outside can be prevented and the sealing degree can be improved. It becomes possible.

In addition, a flexible lid for detachably opening and closing at least one of the front and rear portions of the container body of the processing jig storage case is provided, and this lid interferes with the ring frame of the processing jig. If the bulging portion is formed, rattling of the processing jig housed in the container body can be suppressed.

Moreover, if the recessed part and convex part of a tray are each formed in a plane substantially U shape, and both ends of these concave part and convex part are faced together, the inflow of the gas from the outside can be prevented and a sealing degree can be improved. It becomes possible.
Furthermore, if the bottom corner portion of the insertion covering portion of the tray is formed into a substantially semicircular plane so as to avoid contact with the container body of the processing jig storage case, the bottom of the insertion covering portion There is an effect that the corners are prevented from being damaged by contact with the container body, and the environmental load can be reduced by allowing the tray to be used repeatedly.

  Hereinafter, a preferred embodiment of a shock absorber according to the present invention will be described with reference to the drawings. The shock absorber in this embodiment includes a processing jig 1 on which a semiconductor wafer W is mounted, as shown in FIGS. A storage case 10 made of resin that can be stored in the container body 20, a pair of trays 30 that are molded using a molding material containing a thermoplastic resin, and sandwich the storage case 10 for processing jig; The processing jig storage case 10 includes a pair of lids 40 that open and close the opened front and rear portions of the container body 20, and is stored and packed in a packing body 50 made of a cardboard box or the like.

  As shown in FIG. 1, the semiconductor wafer W is made of, for example, a silicon wafer having a diameter of 300 mm that is sliced thinly and rounded, and both front and back surfaces are formed as mirror surfaces, and a notch for alignment is substantially flat at the peripheral portion. Selectively cut into a semi-elliptical shape.

  As shown in FIGS. 1 and 2, the processing jig 1 includes a hollow ring frame 2 that can accommodate a semiconductor wafer W, and a flexible adhesive layer that covers the hollow from below on the back surface of the ring frame 2. 3 is detachably adhered, and the semiconductor wafer W is detachably adhered on the adhesive layer 3. The ring frame 2 is formed into a flat plate using a molding material containing a predetermined resin and the like, and a positioning notch 4 is formed in a substantially triangular shape on both sides of the front part, and in the center of the rear part of the surface. The RFID tag 5 for identifying the moving body is attached.

  As shown in FIGS. 2 to 5, the processing jig storage case 10 is provided in a container main body 20 that stores the processing jig 1 on which the semiconductor wafer W is mounted in a removable manner, and in both side walls 23 of the container main body 20. A pair of support pieces 26 that are provided in a pair and horizontally support the ring frame 2 of the processing jig 1 are configured to be transparent, and are packaged in a polyethylene packaging bag from the viewpoint of preventing contamination.

  As shown in FIG. 2, the container body 20 includes a rectangular bottom plate 21 having a size capable of accommodating the processing jig 1, a top plate 22 having the same shape facing the bottom plate 21 with an interval from above, A processing jig 1 having a pair of side walls 23 vertically connecting between both side portions of the bottom plate 21 and the top plate 22 and having a rectangular box shape in which the front and rear portions are respectively open, Alternatively, the ring frame 2 of the processing jig 1 on which the semiconductor wafer W is mounted functions so as to be aligned and stored horizontally via a transfer robot (not shown).

  The bottom plate 21, the top plate 22, and the pair of side walls 23 of the container body 20 are each injection-molded with a molding material containing a resin such as polycarbonate, and are assembled with a plurality of fasteners such as screws. As shown in FIG. 2, a rectangular groove 24 that contributes to the insertion and removal of the lower ring frame 2 is cut out at the front end of the inner surface of the bottom plate 21, and there is a gap between the upper front part and the upper rear part of the pair of opposite side walls 23. As shown in FIG. 3 and FIG. 4, a handle 25 for gripping operation having a substantially hat shape is pivotally supported so that it can be raised and lowered.

  As shown in FIGS. 2 and 5, a plurality of the pair of support pieces 26 are arranged at predetermined intervals in the vertical direction of the container body 20, and there is a gap between the support pieces 26 adjacent to each other in the vertical direction. Each of the support pieces 26 is formed as an elongated plate extending in the front-rear direction of the container body 20. Each insertion groove 27 is formed to extend in the front-rear direction of the container body 20 similarly to the support piece 26 and has a height (width) equal to or greater than the thickness of the ring frame 2.

  As shown in FIG. 5, a stopper 28 is formed integrally on the rear side of the lower surface of each support piece 26 so as to interfere and face the rear side of the ring frame 2. An inclined surface 29 that gradually narrows toward 26 is formed smoothly, and this inclined surface 29 faces the rear surface of the ring frame 2 with a gap.

  In addition, as shown in FIG. 6, the protrusion which opposes with the clearance gap between the surface side parts of the ring frame 2 is integrally formed in the lower surface center part of each support piece 26, and this protrusion is formed in a tapered trapezoid. Then, both sides can be formed as a smooth inclined surface 29 that gradually narrows toward the lower support piece 26.

  As shown in FIGS. 7 to 9, the pair of trays 30 are each formed into a semitransparent flexibility by using a predetermined sheet made of PP or the like having excellent flexibility balance and bending strength, for example. Each tray 30 includes an insertion covering portion 31 that is inserted into and covered with the processing jig storage case 10, a flange 35 that extends horizontally outward from the periphery of the insertion covering portion 31, and one surface of the flange 35. Are provided with a concave groove 38 formed in the portion and a ridge 39 formed on the remaining portion of the surface of the flange 35 so as to be stackable, specifically formed by a vacuum forming method in which chipping and debris are unlikely to occur. The

  The fitting covering portion 31 is formed in a substantially U-shaped cross section having a substantially rectangular plane, in other words, a hollow substantially truncated pyramid shape, and a deformable unevenness 32 that exhibits an impact mitigating function is formed on the flat shallow bottom. It is inserted into the upper half or the lower half of the processing jig storage case 10 to cover and protect it. The unevenness 32 of the insertion covering portion 31 is formed by arranging a plurality of stepped bottomed cylindrical portions 33 near the center of the bottom of the insertion covering portion 31. In addition, the four corners at the bottom of the fitting covering portion 31 are curved and formed in a substantially semi-circular semispherical shape to form a contact avoiding portion 34 that avoids contact with the container body 20 of the processing jig storage case 10.

  The flange 35 is formed around the insertion covering portion 31 and has a substantially planar frame shape, and a folded piece 36 is integrally formed at the tip portion and is directed while being inclined toward the bottom of the insertion covering portion 31. The flange 35 forms a substantially frame-shaped bellows 37 that expands and contracts inward and outward by being bent continuously at the end side, which is a part thereof, in the thickness direction. The bellows 37 is located between the fitting covering portion 31 and the groove 38 and the ridge 39, and functions to relieve a strong impact by expanding and contracting.

  The concave groove 38 is formed, for example, in a substantially U-shaped plane near the tip of the half of the flange 35, surrounds the half of the bellows 37 from the outside, and is detachably fitted to the convex 39 of the opposing tray 30. Is done. Further, the ridge 39 is formed to protrude in a substantially U-shape, for example, near the tip of the remaining half of the flange 35, and both end portions thereof are continuously abutted against both end portions of the groove 38 and the remaining bellows 37. The half is surrounded from the outside and is detachably fitted into the concave groove 38 of the opposing tray 30.

  As shown in FIGS. 10 to 13, each lid body 40 is formed into a horizontally long substantially cross-sectional shape having flexibility and elasticity by a molding material containing a predetermined resin, and is formed in the front and rear portions of the container body 20 that are open. Fits detachably. The substantially rectangular lid body 40 is transparently formed using a predetermined sheet made of PP or the like having excellent flexibility balance and bending strength, for example, and interferes with the ring frame 2 in the vertical direction of the center portion. A plurality of substantially linear protrusions 41 that are positioned and clamped are formed, and a substantially rectangular bulging portion 42 that presses against both side portions of the ring frame 2 and prevents rattling is provided on both side portions. It is integrally formed in three dimensions.

  Each protrusion 41 is linearly extended in the left-right direction, interferes with the ring frame 2 and is positioned and clamped, and improves the strength and rigidity of the lid 40. Moreover, as shown in FIG.11 and FIG.12, the peripheral part of the cover body 40 bends | curves toward the protrusion 41 and the bulging part 42 side, and exhibits a substantially frame shape, and the container main body 20 of both sides of the up-and-down part is shown. A locking portion 43 that locks to the outer peripheral surfaces of the opened front and rear portions is integrally bulged.

  As shown in FIG. 8 and FIG. 9, the package 50 includes a grooved exterior cardboard box that opens and closes an opened upper portion with a plurality of flaps 51, but is not limited thereto. For example, a cardboard box such as a telescope type, an assembled type, a plug-in type, or a Bliss type may be used.

In the above, when the ring frame 2 of the processing jig 1 is stored in the container main body 20, the ring frame 2 of the processing jig 1 may be horizontally inserted into the container main body 20 from the front by a transport robot.
Then, the ring frame 2 is horizontally inserted into the insertion groove 27 of the container body 20 and slides, and both side portions of the ring frame 2 are supported substantially horizontally from below by the pair of support pieces 26, and the inclined surface 29 of the stopper 28. The ring frame 2 is guided to contact and stop, so that the ring frame 2 is properly positioned and accommodated in the container body 20.

  When the ring frame 2 of the processing jig 1 is stored in the container main body 20, the lid bodies 40 are detachably fitted to the front and rear open portions of the container main body 20, and a plurality of protrusions 41 of the lid body 40 are provided. However, by holding the front and rear portions of the ring frame 2 and restricting the movement thereof, rattling of the ring frame 2 in the vertical direction due to vibration during transportation, transportation, and transportation is suppressed and prevented.

  At the time of the above operation, the rear portion of the ring frame 2 is restricted by the stopper 28, so that the inserted ring frame 2 is effectively prevented from being displaced or dropped. Further, since the tapered inclined surface 29 of the stopper 28 gradually fills the extra space of the insertion groove 27, it is possible to prevent the ring frame 2 from rattling in the vertical direction due to vibration, and to suppress the semiconductor wafer W. And the ring frame 2 is not damaged.

  Next, when the processing jig storage case 10 storing the required number of ring frames 2 is stored in the packing body 50 and packed, first, a lid is formed on the front and rear portions of the processing jig storage case 10 that are opened. 40 is mounted, the ring frame 2 and its semiconductor wafer W are prevented from fluttering in advance, the processing jig storage case 10 is wrapped with a packaging bag, and the processing jig storage case is wrapped between a pair of trays 30. 10 is sandwiched and incorporated, and the pair of trays 30 are brought into close contact with each other by fitting the concave grooves 38 and the ridges 39 of the pair of opposing trays 30.

  When the pair of trays 30 are brought into close contact with each other, the pair of trays 30 are stored in the opened package 50 from above, the plurality of flaps 51 of the package 50 are bent to close the openings, and then the plurality of packages 50 If the flap 51 is sealed with an adhesive tape or the like, the processing jig storage case 10 can be packed, shipped and transported.

  According to the above configuration, the processing jig storage case 10 is sandwiched between the pair of dedicated trays 30 functioning as cushioning materials, instead of shipping or transporting the processing jig storage case 10 as it is. Therefore, the cushioning material is scraped off due to vibration or shock during transportation and adheres to the ring frame 2 or the semiconductor wafer W, and does not adversely affect the subsequent packaging process or substrate mounting process.

  Further, since each tray 30 is formed using a sheet rather than a foam material that is easily pulverized, generation of particles and dust can be prevented in advance, and each tray 30 is formed into a stackable configuration. Can be organized in a space-saving manner. In addition, since the concave and convex portions 32 are formed on the fitting covering portion 31 and the bellows 37 are formed on the flange 35, even if the packing body 50 drops and a strong impact acts, the processing jig storage case 10 and the semiconductor wafer W are applied. Damage can be effectively suppressed by reducing the impact acting on the surface.

  Further, when the pair of opposing trays 30 are brought into close contact with each other, the elongated U-shaped concave groove 38 and the ridge 39 are fitted, so that the degree of contact can be remarkably increased to improve the buffer function. Further, since each tray 30 has a shape that can be formed by vacuum forming or pressure forming, the fit at the time of stacking is good.

  Moreover, since the contact avoiding part 34 which avoids a contact with the square corners of the container main body 20 is formed at the four corners of the bottom of the fitting covering part 31, the bottom corner of the fitting covering part 31 is connected to the container main body 20. It is possible to suppress and prevent the damage caused by the contact. Furthermore, since both ends of the concave groove 38 and the ridge 39 are not abutted through a gap but are continuously abutted to prevent the inflow of gas from the outside, a significant improvement in the sealing function can be expected.

  In the above embodiment, the tray 30 and the lid body 40 are thermoformed, but the present invention is not limited to this. For example, the tray 30 and the lid 40 may be thermoformed using a sheet made of PS, PE, PET, PVC, PA, or the like. Further, the processing jig storage case 10 may be sandwiched and incorporated between the pair of left and right trays 30. As the flange 35 moves from the inner direction to the outer direction, it is possible to change the height difference between the peak portion and the valley portion of the bellows 37 and change the buffer function.

  In addition, a long groove for improving the strength is formed on the outside of one side of the bellows 37, and a long ridge for improving the strength can be formed on the outside of the other side of the bellows 37. is there. Further, the right half of the bellows 37 may be surrounded by the concave groove 38, or it may not be so. Furthermore, the left half of the bellows 37 may be surrounded by the ridge 39, or not.

It is a perspective explanatory view showing typically the processing jig in the embodiment of the buffer concerning the present invention. It is front explanatory drawing which shows typically the storage case for processing jigs in embodiment of the buffer body which concerns on this invention. It is a plane explanatory view showing typically the storage case for processing jigs in the embodiment of the buffer concerning the present invention. It is side surface explanatory drawing which shows typically the storage case for process jigs in embodiment of the buffer body which concerns on this invention. It is explanatory drawing which shows typically the inside of the storage case for processing jigs in embodiment of the buffer body which concerns on this invention. It is explanatory drawing which shows typically the other inside of the processing jig storage case in embodiment of the buffer body which concerns on this invention. It is a plane explanatory view showing typically an embodiment of a buffer concerning the present invention. It is front explanatory drawing which shows typically embodiment of the buffer body which concerns on this invention. It is explanatory drawing which shows typically a pair of tray in embodiment of the buffer body which concerns on this invention. It is explanatory drawing which shows typically the cover body in embodiment of the buffer body which concerns on this invention. It is side surface explanatory drawing which shows typically the cover body in embodiment of the buffer body which concerns on this invention. It is bottom explanatory drawing which shows typically the cover body in embodiment of the buffer body which concerns on this invention. It is explanatory drawing which shows typically the cover body in embodiment of the buffer body which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Processing jig 2 Ring frame 3 Adhesive layer 10 Storage case 20 for processing jigs Container main body 23 Side wall 26 Supporting piece 27 Insertion groove 28 Stopper 29 Inclined surface 30 Tray 31 Insertion covering part 32 Concavity and convexity 33 Bottomed cylindrical part 34 Contact avoidance part 35 Flange 37 Bellows 38 Concave groove (concave part)
39 Convex (convex)
40 Lid 41 Protrusion 42 Swelling 43 Locking 50 Packaging W Semiconductor Wafer (Substrate)

Claims (3)

A processing jig storage case capable of storing a processing jig for mounting a substrate in the container body, and a processing jig storage case formed by vacuum molding or pressure forming using a molding material containing a thermoplastic resin. Comprising a pair of flexible trays sandwiching from above and below ,
The processing jig storage case is formed in a box-shaped container main body having an opening at the front and rear, and projectingly formed on both side walls of the container main body, and horizontally supports the ring frame of the processing jig. and a pair of support pieces, and arrayed at intervals a pair of support pieces in the vertical direction of the container body, and partitioned and formed between the insertion grooves of the ring frame and the adjacent support strip support piece, the support A stopper facing the rear side of the side of the ring frame is provided at the rear of the lower surface of the piece, and an inclined surface that regulates the shakiness of the ring frame is formed on the side of the stopper,
Each tray is formed on the outer periphery of the fitting cover part, which is recessed in a substantially U-shaped longitudinal section and is fitted into the upper half or lower half of the container body of the processing jig storage case. A substantially frame-shaped flange in plan view extending in the direction, a substantially U-shaped recess in plan view formed in a part of the flange, and a substantially U-shaped projection in plan view formed in the remaining portion of the flange. Including a concave bottom of the fitting cover, and forming a corner of the bottom of the fitting covering in a contact avoiding portion that avoids contact with the container body of the processing jig storage case. And forming the bellows, interposing the bellows between the fitting cover portion and the concave portion and the convex portion, butting both ends of the concave portion and the convex portion of the flange,
When the processing jig storage case is sandwiched between a pair of trays , the concave portion of one tray and the convex portion of the other tray are fitted together, and the convex portion of one tray and the concave portion of the other tray are fitted together. cushion, characterized in that the the like. A flexible lid that detachably opens and closes at least one of the front and rear of the container body of the processing jig storage case is provided, and this lid interferes with the ring frame of the processing jig. The shock absorber according to claim 1, wherein a bulging portion is formed. A packing body that houses the buffer according to claim 1 .

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