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JP4862625B2 - Non-contact displacement sensor device - Google Patents
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JP4862625B2 - Non-contact displacement sensor device - Google Patents

Non-contact displacement sensor device Download PDF

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JP4862625B2
JP4862625B2 JP2006314105A JP2006314105A JP4862625B2 JP 4862625 B2 JP4862625 B2 JP 4862625B2 JP 2006314105 A JP2006314105 A JP 2006314105A JP 2006314105 A JP2006314105 A JP 2006314105A JP 4862625 B2 JP4862625 B2 JP 4862625B2
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core
displacement sensor
detection target
sensor device
coil
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JP2008128814A (en
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伸浩 齊藤
一成 北地
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Sinfonia Technology Co Ltd
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Description

本発明は周囲に磁性体があったとしても影響を受けることがない検出精度の高い非接触型変位センサ装置に関する。   The present invention relates to a non-contact displacement sensor device with high detection accuracy that is not affected even if there is a magnetic substance in the surroundings.

従来の非接触型変位センサ装置として特開2006−208138号公報(特許文献1)に示されるものが提供されている。この非接触型変位センサ装置1は、図4(a)に示されるように、一部に切欠部2Aが形成されたコ字状のコア2と、このコア2の基部2Bを間に介在させるように配置されたコイル3とからなるセンサ部材4を有するものであって、コイル3に交流電流が流れると、図5(a)(b)に示されるような交流磁界が形成される。なお、図5において(a)は検出対象Wがある場合の交流磁界の流れを示す図、(b)は検出対象Wがない場合の交流磁界の流れを示す図である。   As a conventional non-contact type displacement sensor device, a device disclosed in Japanese Patent Laid-Open No. 2006-208138 (Patent Document 1) is provided. As shown in FIG. 4A, this non-contact type displacement sensor device 1 has a U-shaped core 2 partially formed with a notch 2A and a base 2B of the core 2 interposed therebetween. When the sensor member 4 including the coil 3 arranged as described above is provided and an alternating current flows through the coil 3, an alternating magnetic field as shown in FIGS. 5 (a) and 5 (b) is formed. 5A is a diagram illustrating the flow of an AC magnetic field when there is a detection target W, and FIG. 5B is a diagram illustrating the flow of an AC magnetic field when there is no detection target W.

一方、符号Wで示される検出対象は、アクチュエータの磁性体5に固定されるものであって、コア2の切欠部2A内にて矢印X方向に沿って移動する(図4(a)(b)及び図5(c)参照)。そして、アクチュエータの駆動によって検出対象Wが矢印X方向に移動した場合には、コイル3のインダクタンスが変化し、このインダクタンスの変化を、図示しない検出回路で測定することによって、この検出対象Wの矢印X方向への変位量xが測定される。
特開2006−208138号公報
On the other hand, the detection target indicated by the symbol W is fixed to the magnetic body 5 of the actuator and moves along the arrow X direction in the notch 2A of the core 2 (FIGS. 4A and 4B). ) And FIG. 5 (c)). When the detection target W is moved in the direction of the arrow X by driving the actuator, the inductance of the coil 3 is changed, and the change of the inductance is measured by a detection circuit (not shown) to thereby detect the arrow of the detection target W. A displacement amount x in the X direction is measured.
JP 2006-208138 A

ところで、上記のような非接触型変位センサ装置1は、直線運動をするアクチュエータの内部に組み込まれることが多いために、図5(c)に示すように、センサ部材4が、検出対象Wを固定する磁性体5に挟まれた場合に、センサ部材4と磁性体5との距離によっては、交流磁界からの漏れ磁束が磁性体5にも流れてしまい、この漏れ磁束と、アクチュエータ駆動時に発生する振動などによって、検出対象W側の磁性体5がY方向(上下方向)方向にずれたり、また、センサ部材4全体が同じくY方向にずれたりする恐れがあり、その結果、コイル3のインダクタンスが変化して誤検出が発生するという問題があった。   By the way, since the non-contact type displacement sensor device 1 as described above is often incorporated in an actuator that moves linearly, as shown in FIG. Depending on the distance between the sensor member 4 and the magnetic body 5 when sandwiched between the magnetic bodies 5 to be fixed, the leakage magnetic flux from the alternating magnetic field also flows into the magnetic body 5 and is generated when the actuator is driven. The magnetic body 5 on the detection target W side may be displaced in the Y direction (vertical direction) due to vibrations that occur, and the entire sensor member 4 may also be displaced in the Y direction. There is a problem that false detection occurs due to change.

本発明は、従来の有していた問題を解決しようとするものであって、周囲に磁性体があったとしても影響を受けることが少ない検出精度の高い非接触型変位センサ装置の提供を目的とする。   An object of the present invention is to provide a non-contact displacement sensor device with high detection accuracy that is less affected even if there is a magnetic body around it. And

そして、上記目的を達成するために本発明の課題解決手段では、コアに固定されたコイルの磁界の変化を検出することにより、検出対象の移動量を測定する非接触型変位センサ装置であって、前記コアは、コア基部と、このコア基部に一定の間隔をおいて立設され、その間隙部に前記検出対象が通過する検出部を有する3つのコア立設部とから構成し、前記コイルは、中央のコア立設部を間に介在させるようにコア基部上に配置する。   In order to achieve the above object, the problem-solving means of the present invention is a non-contact displacement sensor device that measures the amount of movement of a detection target by detecting a change in the magnetic field of a coil fixed to a core. The core is composed of a core base and three core standing parts that are erected at a certain interval from the core base and have a detection part through which the detection target passes. Are arranged on the core base so that the central core standing portion is interposed therebetween.

また、本発明の課題解決手段では、コアに固定されたコイルの磁界の変化を検出することにより、検出対象の移動量を測定する非接触型変位センサ装置であって、前記コアは、コア基部と、このコア基部に一定の間隔をおいて立設され、その間隙部に前記検出対象が通過する検出部を有する少なくとも3つのコア立設部とを具備し、前記コイルは、前記コア基部上に、中間部に位置するコア立設部をそれぞれ挟むように配置する。   The problem-solving means of the present invention is a non-contact type displacement sensor device for measuring a movement amount of a detection target by detecting a change in a magnetic field of a coil fixed to the core, wherein the core includes a core base portion. And at least three core standing portions having a detection portion that passes through the core base portion at a predetermined interval and through which the detection target passes, and the coil is disposed on the core base portion. In addition, the core standing portions located in the intermediate portion are disposed so as to be sandwiched therebetween.

また、本発明の課題解決手段では、前記コア立設部に、前記検出対象が通過する検出部側に突出する突起部を設ける。   In the problem solving means of the present invention, the core standing portion is provided with a protruding portion that protrudes toward the detection portion through which the detection target passes.

本発明に示される非接触型変位センサ装置では、コア基部に一定の間隔をおいて3つのコア立設部を立設し、中央のコア立設部を間に介在させるように設けたコア基部上のコイルによって、コア立設部間の2つの間隙部を通過する検出対象の変位を検出するようにした。すなわち、本発明の非接触型変位センサ装置では、中央のコア立設部を間に介在させるように配置されたコイルからの磁束が、中央のコア立設部を経由した後、分割されて端部側の2つのコア立設部に至ることから、漏れ磁束を少なくすることができ、周囲に磁性体があったとしても、その漏れ磁束が磁性体に与える影響は少なく、これにより検出対象の変位を高い精度で検出することが可能となる。   In the non-contact type displacement sensor device shown in the present invention, the core base portion is provided so that three core standing portions are erected at a certain interval from the core base portion, and the central core standing portion is interposed therebetween. The upper coil detects the displacement of the detection target passing through the two gaps between the core standing parts. That is, in the non-contact type displacement sensor device of the present invention, the magnetic flux from the coil arranged so as to interpose the central core standing portion is divided and then split after passing through the central core standing portion. Because it reaches the two core standing parts on the part side, the leakage magnetic flux can be reduced, and even if there is a magnetic substance around it, the influence of the leakage magnetic flux on the magnetic substance is small. The displacement can be detected with high accuracy.

また、本発明に示される非接触型変位センサ装置では、コア基部に一定の間隔をおいて少なくとも3つのコア立設部を立設し、中間部に位置するコア立設部を間に介在させるように設けたコア基部上のコイルによって、複数のコア立設部間の間隙部を通過する検出対象の変位を検出するようにした。すなわち、本発明の非接触型変位センサ装置では、中間部に位置するコア立設部を間に介在させるように配置されたコイルからの磁束が、中間部のコア立設部を経由した後、分割されて両側のコア立設部に至ることから、漏れ磁束を少なくすることができ、周囲に磁性体があったとしても、その漏れ磁束が磁性体に与える影響は少なく、これにより検出対象の変位を高い精度で検出することが可能なる。   Further, in the non-contact type displacement sensor device shown in the present invention, at least three core standing portions are erected at a certain interval on the core base portion, and the core standing portion located at the intermediate portion is interposed therebetween. The displacement of the detection target that passes through the gaps between the plurality of core standing parts is detected by the coil on the core base that is provided as described above. That is, in the non-contact type displacement sensor device of the present invention, after the magnetic flux from the coil arranged so as to interpose the core standing portion located in the intermediate portion passes through the core standing portion of the intermediate portion, Since it is divided and reaches the core standing part on both sides, the leakage magnetic flux can be reduced, and even if there is a magnetic substance around it, the influence of the leakage magnetic flux on the magnetic substance is small. Displacement can be detected with high accuracy.

本発明に示される非接触型変位センサ装置では、コア立設部に、検出対象が通過する検出部側に突出する突起部を設けるようにしたので、磁束の流れを内側の突起部に導いて、外部への漏れ磁束を少なくすることができ、この点においても、漏れ磁束が周囲の磁性体に与える影響を少なくすることができ、検出対象の変位を高い精度で検出することが可能となる   In the non-contact type displacement sensor device shown in the present invention, the core standing portion is provided with the protruding portion that protrudes toward the detecting portion through which the detection target passes, so that the magnetic flux flow is guided to the inner protruding portion. The leakage magnetic flux to the outside can be reduced, and also in this respect, the influence of the leakage magnetic flux on the surrounding magnetic body can be reduced, and the displacement of the detection target can be detected with high accuracy.

以下に本発明に係わる第1の実施の形態を図1及び図2に基づいて説明する。図1(a)において符号10で示される非接触型変位センサ装置は、間隙部11Aを有し全体として“3の字”に形成されたコア11と、コア11を挟むように配置されたコイル12とからなるセンサ部材13を具備するものである。コア11は、水平に配置されたコア基部14と、このコア基部14に一定の間隔をおいて立設される3つのコア立設部15とから構成されており、これらコア立設部15の間の間隙部11Aの上部位置は、検出対象Wが通過する検出部16となっている。コイル12は、中央のコア立設部15を間に介在させるようにコア基部14上に配置されており、コイル12に交流電流が流れると、図1(b)に点線で示されるような交流磁界が形成される。   A first embodiment according to the present invention will be described below with reference to FIGS. A non-contact type displacement sensor device denoted by reference numeral 10 in FIG. 1A includes a core 11 having a gap portion 11A and formed in a “3” shape as a whole, and a coil disposed so as to sandwich the core 11 therebetween. The sensor member 13 consisting of 12 is provided. The core 11 is composed of a horizontally disposed core base portion 14 and three core standing portions 15 standing on the core base portion 14 at a predetermined interval. The upper position of the gap 11A is a detection unit 16 through which the detection target W passes. The coil 12 is disposed on the core base portion 14 so that the central core standing portion 15 is interposed therebetween. When an alternating current flows through the coil 12, the alternating current as shown by a dotted line in FIG. A magnetic field is formed.

検出対象Wは、アクチュエータの磁性体(図示略)に固定されており、コア11の間隙部11A上部に位置する検出部16にて、紙面と直交する方向に移動する。そして、アクチュエータの駆動によって検出対象Wが移動した場合には、コイル12のインダクタンスが変化し、このインダクタンスの変化を、図示しない検出回路で測定することによって、この検出対象Wの矢印X方向(図1において紙面と直交する方向)への変位が測定される。図1において(b)は検出対象Wがある場合の交流磁界の流れを示す図、(c)は検出対象Wがない場合の交流磁界の流れを示す図であり、これらの図を参照して判るように、コイル12に交流電流が流れた場合に、コイル12からの磁束は、中央のコア立設部15を経由した後、分割されて端部側に位置する両側のコア立設部15に至る。   The detection target W is fixed to a magnetic body (not shown) of the actuator, and moves in a direction perpendicular to the paper surface by the detection unit 16 located above the gap 11A of the core 11. When the detection target W is moved by driving the actuator, the inductance of the coil 12 changes, and the change in the inductance is measured by a detection circuit (not shown) to thereby detect the detection target W in the direction of the arrow X (see FIG. 1 in a direction perpendicular to the paper surface). 1B is a diagram showing the flow of an alternating magnetic field when there is a detection target W, and FIG. 1C is a diagram showing the flow of an alternating magnetic field when there is no detection target W. With reference to these drawings, FIG. As can be seen, when an alternating current flows through the coil 12, the magnetic flux from the coil 12 passes through the central core standing portion 15 and is then divided and positioned on both ends of the core standing portion 15. To.

以上のように構成された非接触型変位センサ装置10では、コア基部14に一定の間隔をおいて3つのコア立設部15を立設し、中央のコア立設部15を間に介在させるように設けたコア基部14上のコイル12によって、コア立設部15間の2つの間隙部11Aを通過する検出対象Wの変位を検出するようにした。すなわち、上記の非接触型変位センサ装置10では、図1(b)及び(c)に示すように、中央のコア立設部15を間に介在させるように配置されたコイル12からの磁束が、中央のコア立設部15を経由した後、分割されて端部側に位置する両側のコア立設部15に至ることから、漏れ磁束を少なくすることができ、周囲に磁性体があったとしても、その漏れ磁束が磁性体に与える影響は少なく、これにより検出対象Wの変位を高い精度で検出することが可能となる。   In the non-contact type displacement sensor device 10 configured as described above, three core standing portions 15 are erected at a certain interval on the core base portion 14, and the central core standing portion 15 is interposed therebetween. The displacement of the detection target W that passes through the two gap portions 11A between the core standing portions 15 is detected by the coil 12 on the core base portion 14 provided as described above. That is, in the non-contact type displacement sensor device 10 described above, as shown in FIGS. 1B and 1C, the magnetic flux from the coil 12 disposed so as to interpose the central core standing portion 15 is interposed. After passing through the central core standing part 15, it is divided and reaches the core standing part 15 on both sides located on the end side, so that leakage magnetic flux can be reduced and there is a magnetic body around However, the influence of the leakage magnetic flux on the magnetic material is small, so that the displacement of the detection target W can be detected with high accuracy.

なお、この第1の実施形態では、図1(a)に符号17で示すようにコア基部14に立設される両側部のコア立設部15の上部に、間隙部11A側に突出する突起部17を設け、かつ中央のコア立設部15の壁面15Aを平滑としたが、これに限定されず、図2(a)に示すように、中央のコア立設部15において、間隙部11A側に突出する突起部17を設ける、又は図2(b)に示すように、3つ全てのコア立設部15の上部に、間隙部11A側にそれぞれ突出する4つの突起部17を設けるようにしても良い。   In the first embodiment, as indicated by reference numeral 17 in FIG. 1 (a), a protrusion projecting toward the gap 11A on the upper side of the core standing portion 15 on both sides of the core base portion 14 is provided. Although the portion 17 is provided and the wall surface 15A of the central core standing portion 15 is made smooth, the present invention is not limited to this, and as shown in FIG. Protrusions 17 projecting to the side are provided, or, as shown in FIG. 2B, four projecting parts 17 projecting to the gap 11A side are provided at the top of all three core standing parts 15. Anyway.

そして、このような非接触型変位センサ装置10では、コア立設部15に、検出対象Wが通過する検出部16側に突出する突起部17を設けるようにしたので、磁束の流れを内側の突起部17に導いて、外部への漏れ磁束を少なくすることができ、この点においても、漏れ磁束が周囲の磁性体に与える影響を少なくすることができ、検出対象Wの変位を高い精度で検出することが可能となる。   In such a non-contact displacement sensor device 10, the core standing portion 15 is provided with the protrusion 17 that protrudes toward the detection portion 16 through which the detection target W passes, so that the magnetic flux flows on the inner side. The leakage magnetic flux to the outside can be reduced by being guided to the protrusion 17, and also in this respect, the influence of the leakage magnetic flux on the surrounding magnetic body can be reduced, and the displacement of the detection target W can be performed with high accuracy. It becomes possible to detect.

次に、第2の実施形態を図3に基づき参照して説明する。図3に示される非接触型変位センサ装置20が、第1の実施の形態に示される非接触型変位センサ装置10と異なるのは、コア21とコイル22からなるセンサ部材23の構成である。すなわち、センサ部材23のコア21は、コア基部24に一定の間隔をおいて立設されるコア立設部25の本数に特徴を有するものであって、本実施形態では、コア立設部25が5本立設され、かつ両端部を除く中間部の3本のコア立設部25を間に介在させるように、コア基部24上に二対のコイル22が設置されている。そして、上記非接触型変位センサ装置20では、コイル22に交流電流が流れ、図3に点線で示されるような交流磁界が形成されているときに、アクチュエータの駆動によって検出対象Wが図3の紙面と直交する方向に移動し、かつ間隙部21Aの上部に位置する検出部26を通過した場合には、コイル22のインダクタンスが変化し、このインダクタンスの変化を、図示しない検出回路で測定することによって、この検出対象Wの変位が測定される。   Next, a second embodiment will be described with reference to FIG. The non-contact type displacement sensor device 20 shown in FIG. 3 is different from the non-contact type displacement sensor device 10 shown in the first embodiment in the configuration of a sensor member 23 including a core 21 and a coil 22. That is, the core 21 of the sensor member 23 is characterized by the number of core standing portions 25 that are erected on the core base portion 24 at a predetermined interval. In this embodiment, the core standing portion 25 is provided. Are installed in two, and two pairs of coils 22 are installed on the core base 24 so as to interpose three core standing portions 25 in the middle portion excluding both ends. In the non-contact displacement sensor device 20, when an AC current flows through the coil 22 and an AC magnetic field as shown by a dotted line in FIG. 3 is formed, the detection target W is driven by the actuator as shown in FIG. When moving in a direction orthogonal to the paper surface and passing through the detection unit 26 positioned above the gap 21A, the inductance of the coil 22 changes, and the change in inductance is measured by a detection circuit (not shown). Thus, the displacement of the detection target W is measured.

そして、以上のように構成された非接触型変位センサ装置20では、中間部に位置するコア立設部25(中3本のコア立設部25)を間に介在させるように配置されたコイル22からの磁束が、中間部のコア立設部25を経由した後、分割されて両側のコア立設部25に至ることから、第1の実施の形態と同様に漏れ磁束を少なくすることができ、周囲に磁性体があったとしても、漏れ磁束が磁性体に与える影響を少なくすることができ、これにより検出対象Wの変位を高い精度で検出することが可能となる。   In the non-contact type displacement sensor device 20 configured as described above, the coils are arranged so that the core standing portions 25 (the three core standing portions 25) located in the middle are interposed therebetween. After the magnetic flux from 22 passes through the core standing portion 25 at the intermediate part and is divided to reach the core standing portion 25 on both sides, the leakage magnetic flux can be reduced as in the first embodiment. Even if there is a magnetic body around it, the influence of the leakage magnetic flux on the magnetic body can be reduced, and thereby the displacement of the detection target W can be detected with high accuracy.

なお、上記の非接触型変位センサ装置20では、図2に示される非接触型変位センサ装置10と同様の突起部27を、間隙部21Aに向けて全て突出するように全てのコア立設部25に設けたが、これに限定されず、図1又は図2(a)に示すようにコア立設部25に部分的に突起部27を設けるようにしても良い。また、コア基部24に一定の間隔をおいて立設されるコア立設部25の本数は少なくとも3本であり、第2の実施形態に示される5本に限定されるものではない。   In the non-contact type displacement sensor device 20 described above, all the core standing portions are formed such that the same protrusions 27 as the non-contact type displacement sensor device 10 shown in FIG. 2 protrude toward the gap portion 21A. However, the present invention is not limited to this, and as shown in FIG. 1 or FIG. Further, the number of the core standing portions 25 that are erected on the core base portion 24 at a predetermined interval is at least three, and is not limited to five as shown in the second embodiment.

本発明に係わる第1の実施形態を示す正面図であって、(a)は基本構成図、(b)は検出対象がある場合の磁束を示す図、(c)は検出対象がない場合の磁束を示す図。BRIEF DESCRIPTION OF THE DRAWINGS It is a front view which shows 1st Embodiment concerning this invention, Comprising: (a) is a basic block diagram, (b) is a figure which shows magnetic flux when there exists a detection target, (c) is a case where there is no detection target The figure which shows magnetic flux. 第1の実施形態の変形例を示す正面図であって、(a)は中央のコア立設部に突起部を設けた場合の図、(b)全てのコア立設部に突起部を設けた場合の図。It is a front view which shows the modification of 1st Embodiment, (a) is a figure at the time of providing a projection part in the center core standing part, (b) Protrusion part is provided in all the core standing parts. Figure of the case. 本発明に係わる第2の実施形態を示す正面図。The front view which shows 2nd Embodiment concerning this invention. 従来の非接触型変位センサ装置を示す図であって、(a)正面図、(b)矢印B−Bに沿って図4(a)を切断した側断面図。It is a figure which shows the conventional non-contact type displacement sensor apparatus, Comprising: (a) Front view, (b) Side sectional view which cut | disconnected Fig.4 (a) along arrow BB. 従来の非接触型変位センサ装置の磁束の流れを示す正面図であって、(a)は検出対象がある場合の磁束を示す図、(b)は検出対象がない場合の磁束を示す図、(c)は周囲に磁性体がある場合の磁束を示す図。It is a front view which shows the flow of the magnetic flux of the conventional non-contact type displacement sensor apparatus, Comprising: (a) is a figure which shows magnetic flux when there exists a detection target, (b) is a figure which shows magnetic flux when there is no detection target, (C) is a figure which shows magnetic flux when there exists a magnetic body around.

符号の説明Explanation of symbols

10 非接触型変位センサ装置
11 コア
11A 間隙部
12 コイル
13 センサ部材
14 コア基部
15 コア立設部
16 検出部
17 突起部
20 非接触型変位センサ装置
21 コア
21A 間隙部
22 コイル
23 センサ部材
24 コア基部
25 コア立設部
26 検出部
27 突起部
DESCRIPTION OF SYMBOLS 10 Non-contact displacement sensor apparatus 11 Core 11A Gap part 12 Coil 13 Sensor member 14 Core base 15 Core standing part 16 Detection part 17 Protrusion part 20 Non-contact displacement sensor apparatus 21 Core 21A Gap part 22 Coil 23 Sensor member 24 Core Base 25 Core standing part 26 Detection part 27 Projection part

Claims (3)

コアに固定されたコイルの磁界の変化を検出することにより、検出対象の移動量を測定する非接触型変位センサ装置であって、
前記コアは、コア基部と、このコア基部に一定の間隔をおいて立設され、その間隙部に前記検出対象が通過する検出部を有する3つのコア立設部とを具備してなり、
前記コイルは、中央のコア立設部を間に介在させるようにコア基部上に配置されることを特徴とする非接触型変位センサ装置。
A non-contact displacement sensor device that measures the amount of movement of a detection target by detecting a change in the magnetic field of a coil fixed to a core,
The core comprises a core base, and three core standing portions that are provided at a certain interval on the core base and have a detection portion through which the detection target passes in the gap portion,
The said coil is arrange | positioned on a core base part so that a center core standing part may be interposed in between, The non-contact-type displacement sensor apparatus characterized by the above-mentioned.
コアに固定されたコイルの磁界の変化を検出することにより、検出対象の移動量を測定する非接触型変位センサ装置であって、
前記コアは、コア基部と、このコア基部に一定の間隔をおいて立設され、その間隙部に前記検出対象が通過する検出部を有する少なくとも3つのコア立設部とを具備してなり、
前記コイルは、前記コア基部上に、中間部に位置するコア立設部をそれぞれ挟むように配置されることを特徴とする非接触型変位センサ装置。
A non-contact displacement sensor device that measures the amount of movement of a detection target by detecting a change in the magnetic field of a coil fixed to a core,
The core comprises a core base, and at least three core standing parts that are provided at a predetermined interval on the core base and have a detection part through which the detection target passes.
The said coil is arrange | positioned so that the core standing part located in an intermediate part may be pinched | interposed on the said core base part, The non-contact-type displacement sensor apparatus characterized by the above-mentioned.
前記コア立設部には、前記検出対象が通過する検出部側に突出する突起部が設けられていることを特徴とする請求項1又は2に記載の非接触型変位センサ装置。   The non-contact type displacement sensor device according to claim 1, wherein the core standing part is provided with a protruding part that protrudes toward a detection part through which the detection target passes.
JP2006314105A 2006-11-21 2006-11-21 Non-contact displacement sensor device Expired - Fee Related JP4862625B2 (en)

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JPS4516449Y1 (en) * 1964-12-17 1970-07-08
JPH04236301A (en) * 1991-01-18 1992-08-25 Sanmei Denki Kk Displacement detector
JP4390347B2 (en) * 1999-03-15 2009-12-24 株式会社アミテック Position detection device
JP2001219827A (en) * 2000-02-14 2001-08-14 Toyota Motor Corp Pedal device
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