JP4869264B2 - Substrate processing system, automatic backup device, data backup method and controller - Google Patents

Description

  In a substrate processing apparatus for processing a substrate such as a semiconductor substrate of a semiconductor device or a glass substrate of a liquid crystal display (LCD), a data file to which data indicating various processing histories of the substrate is automatically written is processed during substrate processing. The present invention relates to an automatic backup device for performing backup.

  In general, when a semiconductor substrate (such as a silicon wafer) of a semiconductor device is processed according to a recipe procedure, data indicating the processing history of the substrate is left in a data file. Here, the processing history of the semiconductor substrate refers to a history of various phenomena that occur during processing of the semiconductor substrate. Examples of the processing history include an alarm generation history indicating that a failure has occurred in a substrate processing apparatus for processing a semiconductor substrate.

  By the way, the storage capacity of the data file in which the processing history data of the semiconductor substrate is written is finite. Therefore, in order to save the processing history data of the semiconductor substrate for a long time, it is necessary to back up the data file before the data file becomes full. That is, it is necessary to save the processing history data written in the data file.

  Conventionally, when backing up a data file in which processing history data of a semiconductor substrate is written, backup is manually performed. That is, the backup is performed according to the user's backup operation.

  However, in such a configuration, when the data file is full, there is a problem that necessary processing history data is lost unless a backup operation is performed by the user. This is because when the data file is full, newly generated processing history data is overwritten on the processing history data already written in the data file.

  Accordingly, an object of the present invention is to provide an automatic backup device that can prevent the loss of necessary processing history data as much as possible.

  In order to solve the above problem, an automatic backup device according to claim 1 is provided with a backup condition setting means for setting a backup condition of a data file to which data indicating a processing history is written at the time of processing a board, And a backup unit that automatically backs up a data file when a condition set by the backup condition setting unit is satisfied during processing.

  In the above configuration, first, a condition for automatically backing up the data file is set by the backup condition setting means. This setting is performed by a user, for example, prior to the processing of the substrate. Thereafter, when the substrate processing is started, the substrate processing history data is written to the data file. At this time, the backup unit determines whether or not the backup condition is satisfied. When the backup condition is satisfied, the backup process of the data file is executed by the backup unit. As described above, the data file is automatically backed up in accordance with a predetermined backup condition.

  The automatic backup apparatus according to claim 2 is the apparatus according to claim 1, wherein the backup condition setting means includes a first backup condition for automatically backing up a data file at a predetermined time interval as a backup condition; The second backup condition for automatically backing up the data file when a predetermined amount of data is written to the data file can be selectively set.

  In the above configuration, when the first backup condition is set, the data file is automatically backed up at a predetermined time interval. On the other hand, when the second backup condition is set, the data file is automatically backed up when a predetermined amount of data is written.

  According to a third aspect of the present invention, there is provided an automatic backup apparatus according to the first aspect of the present invention, wherein the backup means processes the data file that has been backed up as the first processing method that automatically deletes the data file. The second processing method can be selectively set.

  In the above configuration, when the first processing method is selected as the processing method, the data file that has been backed up is automatically deleted from the backup source medium. On the other hand, when the second processing method is selected, the data file that has been backed up is left as it is on the backup source medium.

  As described in detail above, according to the automatic backup device of the first aspect, the means for setting the backup condition of the data file in which the processing history data of the substrate is written, and the set backup condition are satisfied during the processing of the substrate. Then, since a means for automatically backing up the data file is provided, the data file can be automatically backed up. Thereby, necessary processing history data can be reliably left.

  According to the automatic backup device of claim 2, as a backup condition, a condition for automatically backing up a data file at a predetermined time interval, and when a predetermined amount of data is written in the data file, Since the conditions for automatically backing up this data file can be set selectively, even if processing history data is generated randomly, the required processing history data can be reliably and efficiently Can leave.

  Furthermore, according to the automatic backup device of claim 3, as the method for processing the data file that has been backed up, the first processing method that automatically deletes the data file and the second processing method that does not delete the data file are selected. Therefore, even when the storage capacity of the backup source medium is small, it is possible to prevent this from becoming full as much as possible.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a block diagram showing a hardware configuration of an embodiment of an automatic backup apparatus according to the present invention. FIG. 1 shows the configuration of the entire semiconductor substrate processing system provided with this automatic backup device.

The illustrated semiconductor substrate processing system includes a plurality of semiconductor substrate processing apparatuses 10 (1), 10 (2),..., And a controller (hereinafter referred to as “block controller”) that centrally controls them.
20, a digital audio tape (hereinafter referred to as “DAT”) 30 and a magnetic optical disk (hereinafter referred to as “MO”) 40 used as a backup destination medium of the data file in which the processing history data is written, and a backup of the data file. A backup condition setting unit 50 for setting conditions. In the figure, as a plurality of semiconductor substrate processing apparatuses, for example, 32 reaction tube apparatuses (hereinafter referred to as “tubes”) 10 (1) to 10 (32) are shown as representatives.

  The block controller 20 and the tubes 10 (1) to 10 (32) are connected by, for example, a local area network (hereinafter referred to as “LAN”) 60. Further, the block controller 20 and the DAT 30 and the MO 40 are connected by, for example, a SCSI (small computer interface) 70.

  The block controller 20 has a built-in hard disk 21. The hard disk 21 stores a backup condition setting file F1 in which a backup condition set by the backup condition setting unit 50 is written, and a data file F2 in which processing history data of the semiconductor substrate is written. The hard disk 21 is set with a shared memory M shared by all the tubes 10 (1) to 10 (32).

The shared memory M stores a connection media flag SE ISYSP and an automatic backup media flag SE ITUBE.

The connection media flag SE ISYSP is a flag indicating the media connected to the block controller 20. The value of this flag SEISYS is set to 0 when neither DAT 30 nor MO 40 is connected to the controller 20, and is set to 1 when only DAT 30 is connected, and only MO 40 is connected. If the DAT 30 and the MO 40 are both connected, it is set to 3. Note that the value of the flag SEISYS is automatically set by the block controller 20 when the block controller 20 is activated.

The automatic backup media flag SE ITUBE is a flag indicating the backup destination media of the data file F2. The value of this flag SE ITUBE is set to 0 when the backup destination medium of the data file F2 is not specified, and is set to 1 when DAT30 is specified as this medium, and MO40 is specified. If it is, it is set to 2. The value of this flag SEITUBE is set by the user when setting the backup conditions. The flag SE ITUBE is provided for each processing history data of each tube 10 (n) (n = 1 to 32). The type of processing history data will be described next.

  The data file F2 is provided for each processing history data of each tube 10 (n). As this processing history data, for example, alarm (ALARM) data D (1) indicating that a failure has occurred in the tube 10 (n), and the temperature and gas flow rate collected at regular intervals within the processing time of the semiconductor substrate Trace (TRACE) data D (2) indicating the above, event (EVENT) data D (3) indicating the maximum, minimum and average values of each data in a certain time zone within the processing time of the semiconductor substrate, There is point (POINT) data D (4) indicating each data when a certain time has elapsed from the start of processing. Accordingly, the hard disk 21 stores a maximum of 32 × 4 data files F2.

The backup condition setting unit 50 includes, for example, a display unit that displays a backup condition setting screen. The backup condition is set by the user operating the backup condition setting screen displayed on the display unit by a touch operation or the like. The controller 20 executes the backup process of the data file F2 when the backup condition set by the user is satisfied during the processing of the semiconductor substrate.

  FIG. 2 is a diagram illustrating an example of a backup condition setting screen for one tube 10 (n). The illustrated backup condition setting screen is for instructing a transition to a title display portion 1A indicating that the screen is a backup condition setting screen, a current time display portion 2A for displaying the current time, and a parameter change menu screen. A menu (MENU) button 3A, a copy (COPY) button 4A for hard copying the backup condition setting screen, and an exit (EXIT) button 5A for instructing a transition to the overview screen. The current time is represented by month (MM), day (DD), year (YY), hour (hh), and minute (mm ′). Here, the parameter change menu screen is a menu screen for the user to perform a parameter change operation. Moreover, an overview screen is a screen which shows the outline of the operation | movement content of all the tubes 10 (1) -10 (32).

  In the illustrated backup condition setting screen, a DAT selection button 6A for selecting DAT 30 as a backup destination medium of the data file F2, an MO selection button 7A for selecting MO 40, and a set backup condition Is displayed in the backup condition setting file F1 and the shared memory M.

Further, the backup condition setting screen shown in the figure includes a file type (FileType) column 9A indicating the type of the data file F2, a selective backup (Select Backup) column 10A for selecting an automatic backup method, and an automatic backup time interval. Backup interval column 11A for designating, backup start date / time (BackupDate) column 12A for designating the automatic backup start date and time, and whether or not to delete the backed up data file F2 A file deletion (File Delete) column 13A is displayed.

  In the file type column 9A, a backup state selection button 14A (m) for selecting a backup state is displayed for each processing history data D (m) (m = 1 to 4). Here, the backup state includes an automatic backup state for automatically backing up the data file F2 and a manual backup state for manually backing up the data file F2.

  Normally, the manual backup state is selected when the backup condition setting screen is activated. In this state, when the backup state selection button 14A (m) is operated once, the automatic backup state is selected. Thereafter, when the backup state selection button 14A (m) is further operated once, this time, the manual backup state is selected. Similarly, each time the backup state selection button 14A (m) is operated once, the automatic backup state and the manual backup state are alternately selected.

  The backup state selection button 14A (m) is normally displayed in the manual backup state and reversely displayed in the automatic backup state, for example. Thereby, the user can know the backup state by looking at the display form of the backup state selection button 14A (m).

In the selected backup column 10A, a cycle (CYCLE) button 15A (m) and a data full (DATAFULL) button 16A (m) are displayed for each processing history data D (m). The cycle button 15A (m) is a button for designating a cycle method as an automatic backup method. Here, the cycle method is a method of automatically performing backup processing at predetermined time intervals. The data full button 16A (m) is a button for designating a data full method as an automatic backup method. Here, the data full method is a method of automatically performing backup processing when the data file F2 is full.

  The backup interval column 11A includes a day (DAY) button 17A (m), a month (MONTH) button 18A (m), and a monthly (MONTHLY) button 19A (m) for each processing history data D (m). Count buttons 20A (m), 21A (m), and 22A (m) are displayed.

  The date button 17A (m) is a button for designating that the unit of the backup interval is a day unit. The count button 20A (m) corresponding to the date button 17A (m) is a button for designating a daily backup interval. When the count button 20A (m) is operated once, the count value is incremented by one. This count value can be set from 1 to 31, for example. If the count value is set to 5, backup is performed every 5 days. The count value is displayed on the surface of the count button 20A (m), for example.

  The month button 18A (m) is a button for designating that the unit of the backup interval is a month unit. The count button 21A (m) corresponding to the month button 18A (m) is a button for designating a monthly backup interval. When the count button 21A (m) is operated once, the count value is incremented by one. This count value can be set from 1 to 12, for example. When the count value is set to 3, backup is performed every 3 months. The count value is displayed on the surface of the count button 21A (m), for example.

  Monthly button 19A (m) is a button for designating that backup is performed on a predetermined date every month. The count button 22A (m) corresponding to the monthly button 19A (m) is a button for designating the date of backup. When the count button 22A (m) is operated once, the count value is incremented by one.

  This count value can be set from 1 to 31, for example. When this count value is set to 29 or 30, backup is performed on the 29th or 30th of every month. However, in this case, for February, if it is a leap year, backup is performed on February 29, and if it is not a leap year, backup is performed on February 28.

  When the count value is set to 31, backup is performed on the 31st of every month for January, March, May, July, August, October, and December, and April, June, and September. In November, backup is performed on the 30th of every month. As for February, if it is a leap year, backup is performed on February 29, and if it is not a leap year, backup is performed on February 28.

  In the backup start date / time column 12A, a start date / time display portion 23A (m) for displaying the start date / time of backup is provided for each processing history data D (m). The backup start date and time is represented by month (MM), day (DD), hour (hh), and minute (mm ′).

  The month can be set from 1 to 12. The date can be set from 1 to 30 for April, June, September, and November. For January, March, May, July, August, October, and December, 1 to 31 can be set. As for February, 1 to 29 can be set for leap years, and 1 to 28 can be set for non-leap years. The hour can be set from 0 to 23, and the minute can be set from 0 to 59. These settings are performed in the same manner as when the backup interval is set by the count buttons 20A (m), 21A (m), and 22A (m) described above. That is, for example, when setting the month, it is performed by operating the part corresponding to the month in the start date and time display unit 23A (m).

  The file deletion column 13A is provided with a delete (DELETE) button 24A (m) and a non-delete (NOTDELETE) button 25A (m) for each processing history data D (m). Here, the delete button 25A (m) is a button for designating that the backed up data file F2 is deleted from the backup source medium, that is, the hard disk 21, and the non-delete button 25A (m) It is a button for designating not to delete.

  FIG. 3 is a diagram showing the format of the backup condition setting file F1. As shown in the figure, the backup condition setting file F1 is written with a record R (1) in which data indicating the automatic backup condition of the alarm data D (1) is written and data indicating the automatic backup condition of the trace data D (2). Record R (2), record R (3) in which data indicating automatic backup conditions for event data D (3) are written, and record R (4) in which data indicating automatic backup conditions for point data D (4) are written ). The length of each record R (m) is set to 64 bytes. The format of each record R (m) is set to the same format.

  FIG. 4 is a diagram showing the format of each record R (m). As shown in the figure, each record R (m) includes data indicating the backup status, data indicating the start date and time of automatic backup, data indicating the automatic backup method, data indicating the interval of automatic backup, and automatic backup. Data indicating an interval unit, data indicating whether or not the data file F2 has been deleted after automatic backup, and spare data are written.

  As described above, the data indicating the backup status is set by operating the backup status setting button 14A (m) shown in FIG. The data type is set to a short type and the size is set to 1 byte. When this data value is 0, it indicates a manual backup state, and when it is 1, it indicates an automatic backup state.

  As described above, the data indicating the start date / time of automatic backup is set by operating the start date / time display unit 23A (m). The data type is set to a character type, and the size is set to 12 bytes.

  As described above, the data indicating the automatic backup method is set by operating the cycle button 15A (m) or the data full button 16A (m). The data type is set to the short type and the size is set to 1 byte. If this data value is 0, it indicates that the automatic backup method is neither the cycle method nor the data full method, 1 indicates that it is a cycle method, and 2 indicates that the data full method is used. Indicates that there is.

  Data indicating the automatic backup interval is set by operating the counter 20A (m), 21A (m) or 22A (m). This data is set only when the cycle method is set as the automatic backup method. The data type is set to the short type and the size is set to 1 byte.

  The data indicating the unit of the automatic backup interval is set by operating the date button 17A (m), month button 18A (m) or monthly button 19A (m) as described above. This data is set only when the automatic backup method is the cycle method. The data type is set to the short type and the size is set to 1 byte. When the value of this data is 0, the unit of the automatic backup interval is not specified. When it is 1, the day is specified. When it is 2, the month is specified. When it is 3, the monthly is specified. .

  Data indicating whether or not the data file F2 is deleted is set by operating the delete button 24A (m) or the non-delete button 25A (m) as described above. The data type is set to the short type and the size is set to 1 byte. When the value of this data is 1, deletion of the data file F2 is designated, and when it is 2, non-deletion is designated.

  The spare data type is set to the short type, and the size is set to 21 bytes.

  The operation of the above configuration will be described. First, the backup condition setting operation will be described. FIG. 5 is a flowchart showing the processing of the block controller 20 during this operation. In addition, the figure shows the process of the block controller 20 at the time of the backup condition setting operation of one process history data D (m) in one tube 10 (n).

  In this process, the block controller 20 first instructs the user to specify data D (m) for setting the automatic backup state as the backup state (step S11). This instruction is performed, for example, by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates data D (m) for setting the automatic backup state as the backup state. This designation is performed by operating the backup status setting button 14A (m) displayed in the file type column 9A.

  Next, the block controller 20 instructs the user to specify the automatic backup method (step S12). This instruction is also performed by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates either the cycle method or the data full method as the automatic backup method. In this case, simultaneous designation of the two methods is prohibited. This designation is performed by operating either the cycle button 15A (m) or the data full button 16A (m) displayed in the selected backup field 10A.

  Next, the block controller 20 determines the automatic backup method designated by the user (step S13). When the designated automatic backup method is the cycle method, the block controller 20 instructs the user to designate the unit of the automatic backup interval (step S14). This instruction is also performed by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates one of daily unit, monthly unit or monthly unit as the unit of the backup interval. In this case, simultaneous designation of two or more units is prohibited. This designation is performed by operating one of the date button 17A (m), month button 18A (m), or monthly button 19A (m).

  Next, the block controller 20 instructs the user to specify the backup interval (step S15). This instruction is also performed by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates a backup interval. This designation is performed by operating one of the count buttons 20A (m), 21A (m), or 22A (m).

  Next, the block controller 20 instructs the user to specify the start date and time of automatic backup (step S16). This instruction is also performed by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates the start date and time of automatic backup. This designation is performed by operating the start date and time display unit 23A (m).

  Next, the block controller 20 instructs the deletion of the backed up data file F2 (step S17). This instruction is also performed, for example, by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user designates deletion when deleting the data file F2, and designates non-deletion when not deleting it. In this case, simultaneous designation of both is prohibited. These designations are made by operating the delete button 24A (m) or the non-delete button 25A (m).

  Next, the block controller 20 instructs the user to select a backup destination medium (step S18). This instruction is also performed, for example, by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user selects either DAT 30 or MO 40. In this case, simultaneous selection of both is prohibited. This selection is performed by operating either the DAT button 6A or the MO button 7A.

  Next, the block controller 20 instructs the operation of the set button 8A (step S19). This instruction is also performed, for example, by displaying an instruction message at a predetermined position on the backup condition setting screen. Upon receiving this instruction, the user operates the set button 8A.

  When this operation is performed, the block controller 20 records data R (m) corresponding to the data D (m) of the condition setting file F1 in the data indicating the set backup conditions except for the data indicating the backup destination medium. ) And the automatic backup media flag SEITUBE is written to the shared memory M based on the data indicating the backup destination medium (step S20).

  When the data full method is designated as the automatic backup method, there is no need to designate a backup interval or the like, and the process proceeds from step S13 to step S17.

  This completes the backup condition setting process for one processing history data D (m) of one tube 10 (n). Therefore, if such a process is executed for the four process history data D (1) to D (4), the backup condition setting process for one tube 10 (n) is completed. If this is repeated 32 times, the backup condition setting process for 32 tubes 10 (1) to 10 (32) is completed. The above is the backup condition setting operation.

  Next, the automatic backup operation will be described. FIG. 6 is a flowchart showing the processing of the block controller 20 during this automatic backup operation. In addition, the figure shows the process of the block controller 20 at the time of backup operation of one process history data D (m) in one tube 10 (n). The illustrated process is started when the processing of the semiconductor substrate is started.

  In this process, the block controller 20 first determines whether or not the automatic backup condition is satisfied (step S21). If the automatic backup condition is not satisfied, the block controller 20 continues this determination process as it is. On the other hand, when the automatic backup condition is satisfied, the block controller 20 executes the backup process of the data file F2 (step S22). In this case, the data file F2 is written to the medium designated by the automatic backup media flag SEITUBE.

When this process is finished, the block controller 20 determines whether or not the process of the semiconductor substrate is finished (step S23). If the processing of the semiconductor substrate is not completed, the process returns to step S21. Thereby, the process described above is executed again. This state is continued until the processing of the semiconductor substrate is completed. When the processing of the semiconductor substrate is finished, it is in a finished state. The above is the automatic backup operation.

  According to the embodiment described above in detail, the means for setting the backup condition of the data file F2 in which the processing history data D (m) of the semiconductor substrate is written, and the backup set at the time of processing the semiconductor substrate. If the condition is satisfied, means for automatically backing up the data file F2 is provided, so that the data file F2 can be automatically backed up. Thereby, the necessary process history data D (m) can be reliably left.

  Further, according to the present embodiment, as a backup condition, a condition for automatically backing up the data file F2 at predetermined time intervals, and when the data file F2 becomes full, the data file F2 is automatically Since the conditions for backup can be selectively set, the necessary processing history data D (m) can be reliably obtained even when the processing history data D (m) of the semiconductor substrate is randomly generated. And can be left efficiently.

  That is, when setting the backup condition, it is conceivable that only the condition for backing up the data file F2 at a predetermined time interval can be set. However, in such a configuration, when the processing history data D (m) is randomly generated, the following problem occurs.

  That is, in this case, if the backup interval is increased, the data file F2 may become full before the data file F2 is backed up, and the necessary processing history data D (m) may be lost. On the other hand, if the backup interval is shortened, the data file F2 may be backed up even if the capacity of the data file F2 has a considerable margin, and the usage efficiency of the backup destination medium may be reduced.

  Therefore, in the present embodiment, as a backup condition, not only a condition for backing up the data file F2 at a predetermined time interval but also a condition for backing up when the data file F2 becomes full can be set. is there. According to such a configuration, when the processing history data D (m) is randomly generated, the above-described problem can be solved by setting the latter condition as the backup condition.

  Further, according to the present embodiment, as the processing method of the data file F2 that has been backed up, the first processing method that automatically deletes the data file F2 and the second processing method that does not delete it can be selectively set. Thus, even when the storage capacity of the backup source medium (hard disk 21) is small, it is possible to prevent this from becoming full as much as possible.

  As mentioned above, although one embodiment of the present invention was described in detail, the present invention is not limited to the above-described embodiment.

  For example, in the previous embodiment, as a method of backing up the data file F2 when a predetermined amount of processing history data is written in the data file F2, a method of backing up when the data file F2 is full will be described. did. However, in the present invention, the backup may be performed before it becomes full.

In the previous embodiment, the case where the present invention is applied to an automatic backup device of a semiconductor substrate processing system having a tube as the semiconductor substrate processing device has been described. However, the present invention can also be applied to an automatic backup device of a semiconductor substrate processing system having a semiconductor substrate processing apparatus other than a tube.

  In the previous embodiment, the case where the present invention is applied to an automatic backup device of a semiconductor substrate processing system having a plurality of semiconductor substrate processing devices has been described. However, the present invention can also be applied to an automatic backup apparatus of a semiconductor substrate processing system having one semiconductor substrate processing apparatus.

  In the previous embodiment, the case where the present invention is applied to an automatic backup device of a semiconductor substrate processing system for processing a semiconductor substrate of a semiconductor device has been described. However, the present invention can also be applied to an automatic backup device of a substrate processing system that processes substrates other than the semiconductor substrate of the semiconductor device. For example, the present invention can also be applied to an automatic backup device of a glass substrate processing system that processes a glass substrate of an LCD.

  Of course, the present invention can be variously modified without departing from the scope of the invention.

It is a block diagram which shows the structure of one Embodiment of the automatic backup apparatus which concerns on this invention. It is a figure which shows the backup condition setting screen of one embodiment. It is a figure which shows the format of the backup condition setting file of one embodiment. It is a figure which shows the format of the record which comprises the backup condition setting file of one embodiment. It is a flowchart for demonstrating the backup condition setting operation | movement of one Embodiment. It is a flowchart for demonstrating the backup operation | movement of one Embodiment.

Explanation of symbols

10 (1) to 10 (32) ... Tube, 20 ... Block controller, 30 ... DAT, 40 ... MO, 50 ... Backup condition setting unit, 60 ... LAN, 70 ... SCSI, 1A ... Title display unit, 2A ... Current time Display section, 3A ... menu button, 4A ... copy button, 5A ... exit button, 6A ... DAT selection button, 7A ... MO selection button, 8A ... set button, 9A ... file type column, 10A ... select backup column, 11A ... backup Interval column, 12A ... Backup start date / time column, 13A ... File deletion column, 14A (1) -14A (4) ... Backup status selection button, 15A (1) -15A (4) ... Cycle button, 16A (1) -16A (4) ... Data full button, 17A (1) to 17A (4) ... Day button, 18A (1) to 18A (4) ... Month button, 19A (1) to 19A (4) ... Monthly button, 20A (1) -20A (4), 21A (1) -21A (4), 22A (1) -22A (4) ... Count button, 23A (1) -23A (4) ... Start date and time display Part, 24A (1) -24A (4) ... delete button, 25A (1) -25A (4) ... non-delete button.

Claims (10)

At least one substrate processing apparatus for processing a substrate;
Backup condition setting means having a setting screen for displaying the backup condition of the processing history data of the substrate and individually setting the backup condition of the processing history data written during substrate processing;
When the backup condition set by the backup condition setting unit is satisfied, a controller that individually backs up the data file provided in each processing history data of each substrate processing apparatus , and a substrate processing system comprising :
The backup condition setting means includes, as the backup condition, a first backup condition for backing up the processing history data at a predetermined time interval, and when a predetermined amount of the processing history data is written in the data file. A second backup condition for automatically backing up the processing history data, and the setting condition so that it can be selectively set,
The setting screen is configured to be able to set a backup interval and a backup start date and time when the first backup condition is specified, and when the second backup condition is specified, the backup interval and the backup A substrate processing system configured such that a start date and time is not set.   The backup condition setting means can selectively set, as a method for processing the data file after the backup, a first processing method for automatically deleting the data file and a second processing method for not deleting the data file. The substrate processing system according to claim 1, wherein the substrate processing system is displayed on the setting screen. Said backup condition setting means, the substrate processing system of claim 1, wherein displaying the way to back up manually for each of the processing history data, and how to back up automatically, the setting screen as a selectively settable . A backup condition setting means having a setting screen for displaying the backup condition of the processing history data of the substrate and individually setting the backup condition of the processing history data written during the substrate processing;
A controller that automatically backs up the data file when the backup condition set by the backup condition setting means is satisfied,
The backup condition setting means includes a first backup condition for automatically backing up the processing history data at a predetermined time interval as the backup condition, and a predetermined amount of the processing history data written in the data file. When the second backup condition for automatically backing up this processing history data is displayed, the setting screen is displayed so that it can be selectively set,
The setting screen is configured to be able to set a backup interval and a backup start date and time when the first backup condition is specified, and when the second backup condition is specified, the backup interval and the backup An automatic backup device configured so that the start date and time are not set. The backup condition setting means can selectively set, as a method for processing the data file after the backup, a first processing method for automatically deleting the data file and a second processing method for not deleting the data file. The automatic backup apparatus according to claim 4, wherein the automatic backup apparatus displays the setting screen. 5. The automatic backup device according to claim 4, wherein the backup condition setting means displays on the setting screen so that a method of manually backing up each processing history data and a method of automatically backing up can be set selectively. . A backup condition setting unit having a setting screen for displaying the backup condition of the processing history data of the substrate and individually setting the backup condition of the processing history data written at the time of substrate processing, and set by the backup condition setting unit A controller for automatically backing up the data file when the backup condition is satisfied, and a data backup method implemented by a backup device comprising:
The backup condition setting means has a first backup condition for automatically backing up the processing history data at a predetermined time interval as the backup condition, and a predetermined amount of the processing history data is written in the data file. A second backup condition for automatically backing up the processing history data sometimes, and displaying the setting screen so as to be selectively settable,
When the first backup condition is set, the backup condition setting means configures the setting screen so that a backup interval and a backup start date can be set;
A data backup method comprising a step of configuring the setting screen so that the backup condition setting means does not set the backup interval and the backup start date and time when the second backup condition is designated. 8. The step of displaying the setting condition screen so that the backup condition setting means can selectively set a method of manually backing up the designated processing history data and a method of automatically backing up the specified processing history data. Data backup method. As a method for processing the data file after the backup is completed, the backup condition setting means has a selection button for selecting a first processing method for automatically deleting the data file and a second processing method for not deleting the data file. 9. The data backup method according to claim 7, further comprising a display step. Displays a backup condition for the substrate processing history data, and has a backup screen having a setting screen for individually setting the processing history data backup conditions written during substrate processing.
Group condition setting means,
A controller in an automatic backup device that automatically backs up the data file when the backup condition set by the backup condition setting means is satisfied;
All backup condition setting means includes a first backup means for automatically backing up the processing history data at a predetermined time interval as the backup condition, and a predetermined amount of the processing history data is written in all k data files. A second backup condition for automatically backing up this processing history data at the time, and displayed on the setting screen so that it can be selectively set,
When the first backup condition is specified, the setting screen is configured so that a backup interval and a backup start date and time can be set. When the second backup condition is specified, the backup interval and the backup start A controller configured on the setting screen so that the date and time are not set.

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