JP4876330B2 - Filter medium roll core material, filter medium roll provided with the core material, and filter medium folding system provided with the filter medium roll - Google Patents

Description

表１に示すように、実施例１〜３の、芯材３に巻き取られる前のＤＯＰ、ＤＢＰ含有量の増加の程度は、比較例の芯材３に巻き取られる前のＤＯＰ、ＤＢＰ含有量の増加の程度に比べ小さい。特にＤＢＰについては顕著である。したがって、紙管５をフィルム７で被覆した芯材３にフィルタ濾材９を巻き取った場合は、紙管５のみからなる芯材３にフィルタ濾材９を巻き取った場合に比べ、フィルタ濾材９への有機物の付着が抑えられていることが分かる。
【００７３】
［他の実施形態］
（ａ）軸材の形状は、筒状のものに限定されるものではなく、中心部が中空でない円筒形状等の部材であってもよい。
【００７４】
（ｂ）フィルム７の紙管５に対する被覆の方法は、巻き付け及び熱収縮によるものに限定されない。
【００７５】
（ｃ）軸材は、紙製のものに限定されず、樹脂等の他の材質からなるものであってものよい。
【００７６】
【発明の効果】
本発明によれば、軸材は、有機物の透過を抑制可能なフィルムにより覆われているため、芯材に巻き付けられたフィルタ濾材に有機物が付着するのが抑えられる。
【図面の簡単な説明】
【図１】 本発明の一実施形態が採用された濾材ロールを示す斜視図。
【図２】 前記濾材ロールの芯材を示す縦断面図。
【図３】 本発明の一実施形態が採用された濾材折りシステムの説明図。
【図４】 ＰＴＦＥフィルムの長手方向への延伸に用いる装置の模式図。
【図５】 ＰＴＦＥフィルムの幅方向への延伸に用いる装置（左半分）及びＰＴＦＥフィルムへの通気性支持材のラミネートに用いる装置（右半分）の模式図。
【図６】 フィルムを熱収縮させて芯材を得る工程の説明図。
【符号の説明】
１ 濾材ロール
３ 芯材
５ 紙管
７ フィルム
９ フィルタ濾材
１１ 濾材折りシステム[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a core material for winding a core material of a filter medium roll, particularly a sheet-like filter medium used for air cleaning.
[0002]
[Prior art]
An air filter unit used for air cleaning is generally composed of a filter medium for collecting airborne particulates and a frame body for holding the filter medium. As a conventional air filter unit of this type, a filter medium comprising a porous membrane made of polytetrafluoroethylene (hereinafter referred to as PTFE) and a breathable support material that is thermally laminated so as to sandwich both sides of the PTFE porous membrane. There is something to prepare.
[0003]
In the process of manufacturing such a filter medium, usually, after the process of thermally laminating the PTFE porous membrane and the air-permeable support material, the process moves to a process of winding the filter medium in a roll shape continuously with this process. As a core material used for winding the filter medium, generally, a highly versatile paper-made cylindrical member (paper tube) is used. Then, the rolled filter medium is packaged and shipped with a paper tube disposed at the center, or is transferred to a process of processing into a predetermined shape for manufacturing an air filter unit.
[0004]
The air filter unit having such a structure has a high collection efficiency due to the fine fiber structure of the PTFE porous membrane, and by utilizing this property, a clean room and a semiconductor manufacturing apparatus that require a high cleanliness space Etc.
[0005]
In a clean room where such semiconductor manufacturing is performed, not only suspended fine particles but also gaseous organic substances such as dioctyl phthalate and dibutyl phthalate (hereinafter, DOP, DBP) are suspended. Since such organic substances cause the quality of the product to deteriorate, it is desirable that the generation amount is suppressed.
[0006]
[Problems to be solved by the invention]
By the way, organic substances such as DOP and DBP are also generated from the filter medium before the start of use, and the generated amount of these organic substances is taken up more than that of the filter medium before being rolled up. It has been clarified by the present inventors that the amount of the filter medium after being formed is larger. As a result of further research, it has been clarified that these organic substances are generated from the paper tube which is the core material of the roll and are adsorbed on the filter medium.
[0007]
In clean rooms that require a higher degree of cleanliness, high-capacity air filter units such as HEPA (: High Efficiency Particulate Air) filters and ULPA (: Ultra Low Penetration Air) filters are installed. Since these filters using a PTFE porous membrane have a very small fiber diameter of the filter medium, they particularly have the property of easily adsorbing such organic substances.
[0008]
An object of the present invention is to suppress adhesion of organic substances to a filter medium wound around a shaft material such as a paper tube.
[0009]
[Means for Solving the Problems]
The core material of Claim 1 is for winding up the filter material used for air purification in roll shape, Comprising: A shaft material and a film are provided. The shaft material generates gaseous organic substances that can be adsorbed by the filter medium. The film covers the outer peripheral surface of the shaft member and can suppress the permeation of gaseous organic substances .
[0010]
As described above, the amount of organic matter generated from the filter medium is greater after being wound on the core material than before being wound on the core material. It was revealed that it was generated from the material (paper tube) and adsorbed on the filter medium. Such an organic material is not limited to a paper shaft material, but may be generated from other materials such as a resin shaft material.
[0011]
Therefore, in this core material, the shaft material is covered with a film capable of suppressing the permeation of organic matter, thereby preventing the organic matter from adhering to the filter medium.
[0012]
The core material according to claim 2 is the core material according to claim 1, wherein the shaft material is made of paper.
[0013]
As described above, the paper tube is generally used as a shaft member for winding the filter medium because of its versatility. Therefore, here, it is assumed that the filter medium is wound around a paper tube, and in such a case, the adhesion of organic matter to the filter medium is suppressed.
[0014]
The core material according to claim 3 is the core material according to claim 1 or 2, wherein the film includes at least a layer having an oxygen permeability of less than 20000 ml / (m ² · day · Mpa).
[0015]
In this core material, as the film for covering the shaft material, a film provided with a layer having an oxygen permeability smaller than a predetermined value is used, thereby preventing gaseous organic substances from passing through the film. ing. Therefore, also here, it is possible to suppress organic matter from adhering to the filter medium wound around the core material. The core material according to claim 4, wherein the film is At least a portion of the polyester layer is included.
[0016]
Polyester has a high gas barrier property and can effectively suppress the permeation of gaseous organic substances such as DOP and DBP.
[0017]
Therefore, in this core material, a polyester layer is provided on at least a part of the film so that organic matter generated from the shaft material can be prevented from adhering to the filter medium.
[0018]
The core material according to claim 5 is the core material according to any one of claims 1 to 3, wherein the film includes at least a part of an ethylene-vinyl alcohol copolymer (hereinafter, EVOH) layer.
[0019]
EVOH, like polyester, has a high gas barrier property and can effectively suppress the permeation of organic matter. Therefore, in this core material, an EVOH layer is provided on at least a part of the part of the film, thereby suppressing the adhesion of organic substances to the filter medium.
[0020]
The core material according to claim 6 is the core material according to any one of claims 1 to 3, wherein the film includes a nylon layer at least partially.
[0021]
Nylon, like polyester and EVOH, has a high gas barrier property and can effectively suppress permeation of organic matter. Therefore, in this core material, a nylon layer is provided on at least a part of the film, thereby suppressing the adhesion of organic substances to the filter medium.
[0022]
The core material according to claim 7 is the core material according to any one of claims 1 to 6, wherein the filter medium has a porous film made of PTFE.
[0023]
As described above, since the filter medium using the PTFE porous membrane has a fine fiber structure and high collection efficiency, it is generally a space that requires high cleanliness such as a clean room in the semiconductor manufacturing industry. It is used as an air filter unit installed in
[0024]
However, since the PTFE porous membrane has a fiber diameter smaller than that of a conventional glass filter medium or the like, it has a property of easily adsorbing organic parts such as DOP and DBP in a clean room. Further, since semiconductor products handled in a clean room are easily affected by these organic substances, it is particularly required to avoid the organic substances from adhering to the filter medium before use.
[0025]
Therefore, this core material is intended for a filter medium that uses a PTFE porous membrane, and in such a filter medium, in particular, adhesion of organic substances is suppressed.
[0026]
A core material according to an eighth aspect of the present invention is the core material according to any one of the first to seventh aspects, wherein the shaft material is covered by winding a film.
The shaft is covered by winding a film.
[0027]
With this core material, a core material capable of suppressing the adhesion of organic matter can be obtained by a simple method.
[0028]
A filter medium roll according to a ninth aspect includes the core material according to any one of the first to eighth aspects, and a filter medium. The filter medium has a trapping efficiency of 99.97% or more of particles having a particle diameter of 0.3 μm or more when the filter medium permeation speed is 1.4 cm / sec and a filter medium permeation speed of 1.4 cm / sec. Used for an air filter unit having a pressure loss of 50 Pa or more and 500 Pa or less.
[0029]
The HEPA filter has a pressure loss when the trapping efficiency of particles having a particle diameter of 0.3 μm or more is 99.97% or more and the filter medium permeation wind speed is 1.4 cm / sec when the filter medium permeation wind speed is 1.4 cm / sec. However, in the HEPA filter provided with the PTFE porous membrane, the fiber diameter of the filter medium is small, and organic substances such as DOP and DBP tend to adhere.
[0030]
In addition, since the HEPA filter is installed in a clean room where high cleanliness is required, it is particularly required to prevent these organic substances from adhering to the filter medium compared to other filters. is there.
[0031]
Therefore, in this air filter unit, in particular, the adhesion of organic matter to the filter medium used in the HEPA filter is suppressed.
[0032]
According to a tenth aspect of the present invention, a filter medium roll includes the core material according to any one of the first to eighth aspects and a filter medium. The filter medium has a trapping efficiency of 99.9999% or more of particles having a particle diameter of 0.1 μm or more when the filter medium permeation wind speed is 1.4 cm / sec and a filter medium permeation wind speed of 1.4 cm / sec. Used for an air filter unit having a pressure loss of 50 Pa or more and 500 Pa or less.
[0033]
The ULPA filter has a pressure loss of 50 Pa or more and 500 Pa when the collection efficiency of particles having a particle diameter of 0.1 μm or more in the case of 1.4 cm / sec is 99.9999% or more and the filter medium permeation speed is 1.4 cm / sec. Although it has the following performance, in the ULPA filter provided with the PTFE porous membrane, the fiber diameter of the filter medium is very small, and organic substances such as DOP and DBP are particularly easily attached.
[0034]
In addition, since the ULPA filter is installed in a clean room that requires higher cleanliness than the HEPA filter, it is difficult for the HEPA filter to prevent organic substances such as DOP and DBP from adhering to the filter medium. It is more demanding than it is.
[0035]
Therefore, in this air filter unit, the adhesion of organic substances is particularly suppressed with respect to the filter medium used in the air filter unit functioning as a ULPA filter.
[0036]
The filter medium roll according to claim 11 includes a core material and a filter medium. The core material is one according to any one of claims 1 to 8 . The filter medium is used for air purification wound around a core material.
[0037]
In the conventional filter medium roll, since the filter medium and the paper tube are in direct contact with each other, the organic matter generated from the paper tube can easily adhere to the filter medium.
[0038]
Therefore, in this filter medium roll, an organic substance generated from the shaft material can be prevented from adhering to the filter medium by interposing a film capable of suppressing the permeation of organic matter between the filter medium and the shaft material. .
[0039]
Medium folding system according to claim 1 2 is provided with a filter medium roll, and a filter medium lead portion and the filter medium folding means. The filter medium roll is the one according to claim 11 . The filter medium folding means draws the filter medium from the filter medium roll and forms a predetermined fold in the filter medium.
[0040]
In order to use the filter medium as an air filter unit, for example, it is alternately folded and formed into a wave shape (the filter medium in this state is called a filter pack). When the filter medium is processed into a filter pack, a corrugated crease is formed in advance. This process is usually performed continuously with the process of drawing the filter medium from the filter medium roll.
[0041]
Therefore, if the organic matter adheres to the filter medium roll, a filter pack contaminated with the organic matter is formed, and further, an air filter unit contaminated with the organic matter is manufactured.
[0042]
Therefore, in this filter material folding system, by applying a predetermined shape to the filter medium using a filter medium roll in which the adhesion of organic substances is suppressed, it is possible to prevent the production of an air filter unit contaminated with organic substances. .
[0043]
DETAILED DESCRIPTION OF THE INVENTION
[Filter media roll]
FIG. 1 shows a filter medium roll 1 in which an embodiment of the present invention is adopted.
[0044]
The filter medium roll 1 includes a core material 3 and a filter medium 9.
[0045]
As shown in FIG. 2, the core material 3 is for winding up the filter medium 9 and has a paper tube 5 and a film 7.
[0046]
The paper tube 5 is a paper tubular member and has a length in the longitudinal direction that is approximately the same as the length in the width direction of the filter medium 9.
[0047]
The film 7 is a resin member that covers the outer peripheral surface of the paper tube 5. As the film 7, a PET film is used in the present embodiment, but other polyester films, EVOH films, films having high gas barrier properties such as nylon films, films made of combinations thereof, or these films and other kinds of films. The film which consists of a combination with a film may be sufficient.
[0048]
The film 7 may be a film having an oxygen permeability of less than 20000 ml / (m ² · day · Mpa) or a combination of this and another film. Oxygen permeability of this case is preferably less than ^{10000ml / (m 2 · day ·} Mpa), and more preferably less than ^{5000ml / (m 2 · day ·} Mpa). The oxygen permeability is a value measured by a measurement method according to JIS standard (JIS-Z-1707).
[0049]
In this embodiment, the film 7 covers the paper tube 5 by being wound around the paper tube 5. However, the film 7 may be covered by heat shrinking as will be described later.
[0050]
The filter medium 9 is composed of a PTFE porous membrane and two air-permeable support materials that are heat-laminated so as to sandwich both sides of the PTFE porous membrane. Here, the filter medium 9 can be used for a HEPA filter, that is, the trapping efficiency of particles having a particle diameter of 0.3 μm or more when the filter medium permeation wind speed is 1.4 cm / second is 99.97% or more. It is preferable to be used for an air filter unit, and can be used for an ULPA filter, that is, particles having a particle diameter of 0.1 μm or more when the filter medium permeation wind speed is 1.4 cm / second. It is preferable to be used for an air filter unit having a collection efficiency of 99.9999% or more.
[0051]
[Filter medium folding system]
FIG. 3 shows a filter medium folding system 11 in which an embodiment of the present invention is adopted.
[0052]
The filter medium folding system 11 includes the above-described filter medium roll 1, a folding unit 13, and a heating unit 15.
[0053]
The filter medium folding part 13 is composed of two teeth 13a arranged above and below the filter medium 9, and the tips of these teeth 13a are alternately fed to the upstream side (filter medium roll 1 side). Then, the filter medium 9 is pulled out from the filter medium roll 1, and a wave-shaped fold is formed in the filter medium 9.
[0054]
The heating unit 15 is a heater for heating the filter medium 9 in which the folds are formed, and is disposed on the downstream side of the filter medium folding unit 13. Here, the filter medium 9 is heated to about 80 ° C.
【Example】
<Manufacture of filter media>
First, 100 parts by weight of PTFE fine powder having a number average molecular weight of 6,200,000 (“Polyfluorone Fine Powder F-104U” manufactured by Daikin Industries, Ltd.) and 25 weight of hydrocarbon as an extrusion aid (“Isopar” manufactured by Esso Petroleum Corporation) Part was added and mixed.
[0056]
Next, this mixture was formed into a round bar shape by paste extrusion. And this round bar-shaped molded object was shape | molded by the calender roll heated at 70 degreeC, and the PTFE film was obtained. The PTFE film was passed through a hot air drying path at 250 ° C. to evaporate and remove the extrusion aid, thereby obtaining an unfired film having an average thickness of 200 μm and an average width of 150 mm.
[0057]
Next, this PTFE green film was stretched in the longitudinal direction at a stretch ratio of 5 using the apparatus shown in FIG. The unfired film was set on a roll 21, and the stretched film was wound on a take-up roll 22. The stretching temperature was 250 ° C. In FIG. 4, reference numerals 23 to 25 denote rolls, reference numerals 26 and 27 denote heat rolls, and reference numerals 28 to 32 denote rolls.
[0058]
Next, the obtained longitudinally stretched film was stretched at a stretch ratio of 30 times in the width direction using a device (tenter) shown in the left half of FIG. At this time, the stretching temperature was 290 ° C., the heat setting temperature was 360 ° C., and the stretching speed was 330% / second.
[0059]
The filter medium 9 was obtained by thermally fusing the following nonwoven fabrics A and B to both sides of the obtained PTFE porous membrane with the apparatus shown in the right half of FIG.
Nonwoven fabric A: “Elves S0403WDO” manufactured by Unitika Ltd. PET / PE core / sheath nonwoven fabric, basis weight 40 g / m ²
Nonwoven fabric B: “Elves T0403WDO” manufactured by Unitika Ltd. PET / PE core / sheath nonwoven fabric, basis weight 40 g / m ²
[0060]
In FIG. 5, reference numeral 34 denotes an unwinding roll, 35 denotes a preheating zone, 36 denotes a stretching zone, 37 denotes a heat setting zone, 39 denotes a laminating roll, and 41 denotes a winding roll.
[0061]
<Manufacture of core material>
First, the film 7 was cut from the PET film so that the length in the width direction was about 1 cm longer than the length in the longitudinal direction of the paper tube 5. Next, the film 7 was wound around the entire outer surface of the paper tube 5 and fixed with a double-sided tape.
[0062]
In addition to being manufactured by winding in this way, the core material 3 may be manufactured by heat shrinking as described below.
[0063]
An outline of this method is shown in FIG. Here, first, a paper tube 5 having a longitudinal length of 770 mm and an inner diameter of 3 inches, and a tubular film 10 having a longitudinal length of 782 mm, an inner diameter of 155 mm, and a thickness of 60 μm are prepared. And what inserted the paper tube 5 in the inner peripheral side of the cylindrical film 10 is mounted in the predetermined | prescribed stand 41, and the inner peripheral side of the electric furnace 43 is allowed to pass through while vibrating this stand 41 on the conveyor 45. . At this time, heating is performed in the electric furnace 43 under the following conditions so that the contraction rate in the longitudinal direction is 10%.
Heating temperature: 110 ° C (summer), 120 ° C (winter)
Heating time: 6 seconds (summer), 8-9 seconds (winter)
[0064]
By such a method, a film 7 having a radial thickness of about 6 mm is formed on the outer peripheral surface of the paper tube 5.
[0065]
<Manufacture of filter media rolls>
The core material 3 in which the paper tube 5 was covered with the PET film was mounted on the take-up roll 41 shown in FIG. 5, and the filter medium 9 was wound around the core material 3 (Example 1).
[0066]
The core material 3 in which the paper tube 5 was covered with the film containing the EVOH layer was mounted on the winding roll 41, and the filter medium 9 was wound around the core material 3 (Example 2).
[0067]
The core material 3 in which the paper tube 5 was covered with the film containing the nylon layer was set on the take-up roll 41, and the filter medium 9 was wound around the core material 3 (Example 3).
[0068]
The paper tube 5 was set on the roll 21, and the filter medium 9 was wound around the paper tube 5 (comparative example).
[0069]
<Measurement of DOP and DBP content>
The filter media rolls 1 of Examples and Comparative Examples were sealed in PET bags to block them from the organic matter in the outside air, left standing for 50 hours and then opened, and the DOP and DBP contents of the filter media 9 were measured. On the other hand, in order to compare the DOP and DBP contents of the filter medium 9 before and after winding on the core material 3, the DOP and DBP contents of the filter medium 9 before winding on the core material 3 were also measured.
[0070]
The DOP and DBP contents contained in the filter medium 9 were performed by a hexane extraction method described below.
[0071]
A filter medium piece 2.0 g was cut out from the filter medium 9 and placed in a sample bottle. Next, 30 ml of hexane was put into the sample bottle, and ultrasonic cleaning was performed for 10 minutes with an ultrasonic cleaner. After the ultrasonic cleaning was completed, the sample was taken out from the sample bottle, and the hexane remaining in the sample bottle was evaporated at room temperature in a nitrogen atmosphere, and 100 μl of hexane was newly added. 2 μl was sampled from the hexane solution, and the contents of DOP and DBP were measured by gas chromatography. The measurement results are shown in Table 1.
[0072]
[Table 1]

As shown in Table 1, the degree of increase in the DOP and DBP contents before being wound on the core material 3 in Examples 1 to 3 is DOP and DBP content before being wound on the core material 3 of the comparative example. Small compared to the amount of increase. This is particularly true for DBP. Therefore, when the filter medium 9 is wound around the core material 3 in which the paper tube 5 is covered with the film 7, the filter medium 9 can be compared with the case where the filter medium 9 is wound around the core material 3 consisting only of the paper tube 5. It can be seen that the adhesion of organic matter is suppressed.
[0073]
[Other Embodiments]
(A) The shape of the shaft member is not limited to a cylindrical shape, and may be a member such as a cylindrical shape whose central portion is not hollow.
[0074]
(B) The method of coating the film 7 on the paper tube 5 is not limited to winding and heat shrinking.
[0075]
(C) The shaft member is not limited to paper, and may be made of other materials such as resin.
[0076]
【Effect of the invention】
According to the present invention, since the shaft member is covered with a film capable of suppressing the permeation of organic matter, it is possible to prevent the organic matter from adhering to the filter medium wound around the core member.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a filter medium roll in which an embodiment of the present invention is adopted.
FIG. 2 is a longitudinal sectional view showing a core material of the filter medium roll.
FIG. 3 is an explanatory diagram of a filter medium folding system in which an embodiment of the present invention is employed.
FIG. 4 is a schematic view of an apparatus used for stretching a PTFE film in the longitudinal direction.
FIG. 5 is a schematic view of an apparatus used for stretching a PTFE film in the width direction (left half) and an apparatus used for laminating a breathable support material on the PTFE film (right half).
FIG. 6 is an explanatory diagram of a process of obtaining a core material by heat shrinking a film.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Filter medium roll 3 Core material 5 Paper tube 7 Film 9 Filter filter medium 11 Filter medium folding system

Claims (12)

A core material for winding a filter material used for air purification into a roll,
A shaft that generates gaseous organic matter that can be adsorbed by the filter medium ;
A film that covers the outer peripheral surface of the shaft material and can suppress the transmission of the gaseous organic matter ,
The core material of the filter media roll provided with.   The core material of the filter media roll according to claim 1, wherein the shaft material is made of paper. The core material of the filter medium roll according to claim 1, wherein the film includes a layer having an oxygen permeability of less than 20000 ml / (m ² · day · Mpa) at least partially.   The core material of the filter media roll according to any one of claims 1 to 3, wherein the film includes a polyester layer at least partially.   The core material of the filter media roll according to any one of claims 1 to 3, wherein the film includes an ethylene-vinyl alcohol copolymer layer at least partially.   The core material of the filter media roll according to any one of claims 1 to 3, wherein the film includes a nylon layer at least in part.   The filter medium roll core material according to any one of claims 1 to 6, wherein the filter medium has a porous membrane made of polytetrafluoroethylene.   The core material of the filter media roll according to any one of claims 1 to 7, wherein the shaft material is covered by winding the film. A core material according to any one of claims 1 to 8,
The pressure loss is 50 Pa when the trapping efficiency of particles having a particle diameter of 0.3 μm or more is 99.97% or more when the filter medium permeation wind speed is 1.4 cm / sec and the filter medium permeation wind speed is 1.4 cm / sec. A filter medium used for an air filter unit having a pressure of 500 Pa or less ;
Filter media roll with A core material according to any one of claims 1 to 8,
When the filtration medium permeation wind speed is 1.4 cm / second, the collection efficiency of particles having a particle diameter of 0.1 μm or more is 99.9999% or more and when the filtration medium permeation wind speed is 1.4 cm / second, the pressure loss is 50 Pa. A filter medium used for an air filter unit having a pressure of 500 Pa or less ;
Filter media roll with A core material according to any one of claims 1 to 8 ,
A filter medium used for air purification wound around the core;
Filter media roll with The filter media roll according to claim 11,
Filter medium folding means for pulling out the filter medium from the filter medium roll and forming a predetermined crease in the filter medium;
Filter media folding system with

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