JP4883348B2 - Fine recess processing apparatus and fine recess processing method - Google Patents

Description

  The present invention provides, for example, a fine recess processing apparatus used for forming a fine recess (oil sump) for realizing low friction on the inner peripheral surface of a cylinder bore (circular hole) in a cylinder block of an automobile engine, and The present invention relates to a fine recess processing method.

  Conventionally, shot blasting is often used when forming a fine recess in the inner peripheral surface of the cylinder bore of the cylinder block as described above. In this shot blasting, a masking sheet having a predetermined shape of holes is affixed to the inner peripheral surface of the cylinder bore, and then small particles such as ceramics are projected toward the inner peripheral surface of the cylinder bore together with compressed air. A fine recess is formed in a portion exposed through the through hole of the surface.

After forming the fine recesses, the masking sheet is removed and washed, and then honing is performed again, so that the swelled portion formed around the fine recesses by the above shot blasting process is removed. It was.
JP 2002-307310 A

  However, in the formation of fine recesses by shot blasting as described above, it is difficult to regularly arrange the fine recesses, and in addition, the masking sheet affixing process and removal from the inner peripheral surface of the circular hole The process and the cleaning process are indispensable, and there is a problem that the processing cost increases by the amount of such work, and it has been a conventional problem to solve these problems.

  The present invention has been made by paying attention to the above-described conventional problems, and can form fine concave portions with good accuracy with respect to the inner peripheral surface of the circular hole of the workpiece, and reduce processing costs. It is an object of the present invention to provide a fine recess processing apparatus and a fine recess processing method capable of realizing the above.

A fine recess processing apparatus according to claim 1 of the present invention is a processing apparatus for forming a fine recess in an inner peripheral surface of a circular hole of a workpiece, and is a tool holder that is rotationally driven by being arranged coaxially with the circular hole. When the roller support member that is held by the tool holder, a rotatable foam roller parallel roller axis and the rotation axis of the tool holder relative to and roller support member has a convex portion of the recess formed in an outer peripheral portion A first load generating means for pressing the roller support member in a direction in which the foam roller advances with respect to the inner peripheral surface of the circular hole; and a roller support member in a direction in which the foam roller moves backward with respect to the inner peripheral surface of the circular hole The second load generating means that presses the load holder includes at least one load generating means, and a radial moving means that is movable in the radial direction with respect to the tool holder. One direction With the roller support member in a state that is, the first load generating means, a spring interposed between the radial direction moving means and the roller support member, the roller supported by the rotation of the tool holder and the form roller The roller support member is movable in the radial direction with respect to the tool holder so that the foam roller is pressed against the inner peripheral surface of the circular hole by the centrifugal force generated in the tool holder.

  The above-mentioned fine recess processing apparatus is arranged such that the circular hole of the workpiece and the tool holder are arranged coaxially, and the tool holder is rotationally driven, whereby the centrifugal force generated on the roller support member and the foam roller by the rotation of the tool holder. Then, the foam roller is rolled along the inner peripheral surface of the circular hole while the foam roller is pressed against the inner peripheral surface of the circular hole to continuously form fine concave portions on the inner peripheral surface of the circular hole. At this time, the conditions such as the rotational speed of the tool holder are controlled so that the centrifugal force generated in the foam roller always has a predetermined pressure contact load.

When in the fine pore recess machining apparatus of the present invention, for a given pressure load of the foam roller, centrifugal force acting on the form roller a small rotational speed of the tool holder is less than a predetermined pressure load, first load The generated load of the generating means (the load in the forward direction of the foam roller) is reduced by the centrifugal force to maintain the pressure contact load of the foam roller at a predetermined value.

  Further, when the rotational speed of the tool holder is large and the centrifugal force is larger than the predetermined pressure contact load with respect to the predetermined pressure contact load of the foam roller, the generated load of the second load generating means (in the direction of retraction of the foam roller) (Load) is increased by the amount of centrifugal force, and the pressure contact load of the foam roller is maintained at a predetermined value.

In the fine recess processing method of the present invention, when forming the fine recess on the inner peripheral surface of the circular hole of the workpiece, a tool holder that is arranged coaxially with the circular hole and is driven to rotate, and held by the tool holder. A roller support member having a convex portion for forming a concave portion on the outer peripheral portion, and a foam roller rotatable about a roller axis parallel to the rotation axis of the tool holder with respect to the roller support member. A micro recess processing device is used in which the roller support member is movable in the radial direction with respect to the tool holder so that the foam roller is pressed against the inner peripheral surface of the circular hole by centrifugal force generated on the roller support member and the foam roller. Thus , the circular hole of the workpiece and the tool holder are arranged coaxially and the roller axis of the foam roller is offset with respect to the rotation axis of the tool holder.

In this fine recess processing method, by rotating the tool holder, the foam roller is rolled along the inner peripheral surface of the circular hole while the foam roller is pressed against the inner peripheral surface of the circular hole. the fine recesses on the inner peripheral surface of the circular hole formed continuously, that Gyosu control the rotational speed of the tool holder so as to maintain the pressure load to a predetermined load due to the centrifugal force caused in the off Omurora.

  According to the fine concave portion processing apparatus of the present invention, the fine concave portion can be formed with high efficiency and high accuracy on the inner peripheral surface of the circular hole of the workpiece, and in addition, the foam roller is formed on the inner peripheral surface. Can be pressed with a constant load, so there is no need to finish the inner peripheral surface with high precision before processing the fine recess, and this pre-process can be omitted, resulting in a significant reduction in processing costs. Can be realized.

Further, according to the fine recess processing apparatus, in addition to the first load generating means for pressing the foam roller in the forward direction against the inner peripheral surface of the circular hole, the second load generating means for pressing the foam roller in the backward direction. By adopting it, it is possible to cancel at least the centrifugal force applied to the foam roller during processing, while maintaining a simple and compact structure. This makes the depth and size uniform even when the tool holder is rotated at high speed. Can be formed with a low load, and the machining efficiency can be further increased with the speed of rotation of the tool holder, and the structure is simple and small, so that Can also respond.
Furthermore, according to the fine recess processing apparatus, since the radial direction moving means is provided, it is easy to cope with circular holes having different diameters, and since a spring is used as the load generating means, it is simple and small. Even with this structure, a sufficient load can be applied to the roller support member and the foam roller.

  According to the fine recess processing method of the present invention, the fine recess can be formed with high efficiency and high accuracy on the inner peripheral surface of the circular hole of the workpiece, and the inner peripheral surface before processing is accurately finished. It is possible to achieve a significant reduction in machining cost, and at least the centrifugal force applied to the foam roller during machining can be offset, so even when the tool holder is rotated at high speed, Fine recesses having a uniform sheath size can be formed with a low load, and the processing efficiency can be further increased as the tool holder rotates faster.

  Hereinafter, an embodiment of a fine recess processing apparatus and a processing method according to the present invention will be described with reference to the drawings.

  The fine recess processing apparatus 1 shown in FIG. 2 is an NC machine tool that uses a cylinder block of an automobile engine as a workpiece and forms a fine recess on the inner peripheral surface of a cylinder bore that is a circular hole, and is movable in the vertical direction. A main spindle head 2, a main spindle 3 supported in a state of protruding downward from the main spindle head 2, and a workpiece placing device that is movable in biaxial directions perpendicular to each other in a horizontal plane below the main spindle head 2. A table 4 and a tool holder 10 that is coaxially mounted on the main shaft 3 and rotates integrally therewith are provided, and the tool holder 10 is attached to and detached from the main shaft 3 by an automatic tool changer (not shown).

  As shown in FIG. 1, the tool holder 10 has a shank portion 10A that is a portion to be mounted on the main shaft 3, and a body portion 10B that is continuous below the shank portion 10B. A tool holder is provided below the body portion 10B. An adapter 11 as radial movement means movable in the radial direction with respect to 10, a roller support member 12 movable in the movement direction of the adapter 11 with respect to the adapter 11 (radial direction of the tool holder 10), A foam roller 13 that is rotatable about a roller axis L2 parallel to the rotation axis L1 of the tool holder 10 with respect to the roller support member 12 is provided. The foam roller 13 can be moved forward and backward with respect to the inner peripheral surface of the cylinder bore B. Yes.

  The adapter 11 is provided with a moving mechanism (not shown) provided with a stepping motor, for example, between the body portion 10B of the tool holder 10 and reciprocates in the radial direction of the tool holder 10 by this moving mechanism. Move.

  The roller support member 12 includes a slide 15 guided by a horizontal guide 14 provided on the lower surface of the adapter 11, and a main body portion 16 depending from the slide body 15, and a combined angular contact ball bearing is provided at the lower end portion of the main body portion 16. A foam roller 13 is rotatably mounted via a vertical support shaft 17 including the same. The center line of the support shaft 17 is the roller shaft L2.

  The foam roller 13 has a diameter smaller than the diameter of the cylinder bore B, and has a convex portion for forming a concave portion on the outer peripheral portion thereof. At this time, the foam roller 13 is provided with projection-type convex portions for forming dimple-shaped fine concave portions at predetermined intervals, or with roller-shaped convex portions for continuously forming groove-shaped fine concave portions. It can be.

  The material of the foam roller 13 is not particularly limited. For example, the foam roller 13 is made of carbide, a hard metal other than carbide, ceramics such as alumina and silicon nitride, and has high strength and toughness. Even if the workpiece is a high-hardness material such as hardened steel, fine concave portions can be formed.

  Here, the adapter 11 includes holding portions 11a and 11b protruding downward on both sides in the moving direction of the tool holder 10 with respect to the body portion 10B, and between the holding portion 11a and the slide 15 of the roller support member 12. In addition, a first compression coil spring 18A as a first load generating means for pressing the roller support member 12 in the direction in which the foam roller 13 advances (rightward in FIG. 1) with respect to the inner peripheral surface of the cylinder bore B, A piezoelectric first load cell 19A is interposed as a first load detecting means for detecting a load generated by one compression coil spring (first load generating means) 18A.

  Further, the adapter 11 is a roller in a direction (left direction in FIG. 1) in which the foam roller 13 moves backward with respect to the inner peripheral surface of the cylinder bore B between the other holding portion 11b and the slide 15 of the roller support member 12. A second compression coil spring 18B as second load generation means for pressing the support member 12 and a piezoelectric type as second load detection means for detecting a load generated by the second compression coil spring (second load generation means) 18B. A second load cell 19B is interposed.

  As described above, if the first and second compression coil springs 18A and 18B are employed as the first and second load generating means, the roller support member 12 and the foam roller 13 can be obtained with a simple and small structure. A sufficient load can be applied.

  Further, if the first and second load cells 19A and 19B are employed as the first and second load detection means, the first and second compression coil springs 18A and 18B can be obtained with a simple and small structure. The generated load due to can be detected accurately.

  Further, the fine recess processing apparatus 1 includes a rotary encoder 20 as a rotational speed detecting means for detecting the rotational speed (the number of rotations) of the tool holder 10 as indicated by a virtual line in FIG. The rotary encoder 20 detects the rotation speed of the spindle 3 that rotates integrally with the tool holder 10 in the spindle head 2, and has a simple and small structure, but the rotation speed of the tool holder 10. Can be detected accurately.

  Further, in the fine recess processing apparatus 1, the spindle head 2 relatively moves the axial movement means, that is, the cylinder block (workpiece) CB and the tool holder 10 in the direction along the center line L3 of the cylinder bore (circular hole). Here, the tool holder 10 is moved up and down.

  Further, the fine recess processing apparatus 1 includes a control device (not shown) to which detection signals from the first and second load cells 19A and 19B and the rotary encoder 20 are input. Operation control of the head 2, the spindle 3, the table 4, and the adapter 11 is performed.

  In the fine recess processing apparatus 1 described above, when forming the fine recess on the inner peripheral surface of the cylinder bore B, first, positioning is performed so that the rotation axis L1 of the tool holder 10 and the center line L3 of the cylinder bore B coincide. The tool holder 10 is lowered by the spindle head 2 and the foam roller 13 is inserted into the cylinder bore B.

  Next, by moving the adapter 11, the foam roller 13 is moved forward to contact the inner peripheral surface of the cylinder bore B, and the adapter 11 is continuously moved until the load detected by the first load cell 19A reaches a preset value.

  That is, when the foam roller 13 comes into contact with the inner peripheral surface of the cylinder bore B and the adapter 11 continues to move, the first compression coil spring 18A is compressed between the adapter 11 and the roller support member 12, and the repulsive force is reduced. Since the load is applied to the foam roller 13 as a generated load and the load is detected by the first load cell 19A, if the adapter 11 continues to move until the detected load of the first load cell 19A reaches a set value, the foam The roller 13 is pressed against the inner peripheral surface of the cylinder bore B with a predetermined load.

  In this state, the roller axis L2 of the foam roller 13 is offset with respect to the rotation axis L1 of the tool holder 10, and the center of gravity of the functional unit including the adapter 11, the roller support member 12, and the foam roller 13 is the tool holder 10 It is in the form roller 13 side with respect to the rotation axis L1.

  Thereafter, when the set value of the load is detected by the first load cell 19A, when the movement of the adapter 11 is stopped and the tool holder 10 is rotationally driven by the main shaft 3, the foam roller 13 is in pressure contact with the inner peripheral surface of the cylinder bore B. And the fine roller is formed on the inner peripheral surface of the cylinder bore B by the rolling of the foam roller 13. Further, when the rotational driving of the main shaft 3 and the lowering of the main shaft head (axial movement means) 2 are synchronized, fine concave portions are continuously formed along a spiral locus on the inner peripheral surface of the cylinder bore B. As a result, fine concave portions can be efficiently formed in a wide region of the inner peripheral surface.

  At this time, in the fine recess processing apparatus 1 and the processing method, the first and second load cells 19A and 19B detect the generated loads of the first and second compression coil springs 18A and 18B, and the rotary encoder 20 uses the tool. The rotational speed of the holder 10 is detected, and the pressure load of the foam roller 13 on the inner peripheral surface of the cylinder bore B is controlled according to the rotational speed of the tool holder 10.

  More preferably, before the foam roller 13 enters the cylinder bore B, the tool holder 10 is rotationally driven on a trial basis, and the rotational speed and the centrifugal force generated on the roller support member 12 and the foam roller 13 due to the rotation are measured. During the subsequent processing, the pressure contact load of the foam roller 13 is controlled based on the relationship between the rotational speed and the centrifugal force of the tool holder 10 and the generated load and rotational speed data acquired during the processing.

  That is, in the fine recess processing apparatus 1 and the processing method, the roller shaft L2 of the foam roller 13 is offset from the rotation axis L1 of the tool holder 10, and the center of gravity of the functional unit is on the foam roller 13 side. During processing, the foam roller 13 rolls around the rotation axis L1 of the tool holder 10, so that the roller support member 12 and the foam roller 13 correspond to the rotational speed (number of rotations) as shown in FIG. Centrifugal force Fb acts.

  This centrifugal force Fb corresponds to the relationship between the rotational speed of the tool holder 10 and the pressure contact load of the foam roller 13 with respect to the inner peripheral surface of the cylinder bore B, and the foam roller 13 increases as the rotational speed of the tool holder 10 increases. Will increase the pressure contact load.

  Therefore, in the fine recess processing apparatus 1 and the processing method, the relationship between the rotational speed and the centrifugal force is obtained in advance to form a fine recess having a desired size and depth as shown in FIG. The reference pressure contact load Fa of the foam roller 13 is set, and the reference rotation speed Vs at which the reference pressure load Fa coincides with the centrifugal force Fb is set.

  When the rotational speed of the tool holder 10 is equal to or lower than the reference rotational speed Vs and the centrifugal force Fb is smaller than the reference pressure contact load Fa, the pressure contact load of the foam roller 13 is the difference between the reference pressure load Fa and the centrifugal force Fb. Control is performed so as to keep the difference (Fa-Fb).

  Specifically, by moving the adapter 11 in the backward direction of the foam roller 13, the generated load of the first compression coil spring 18A (the load in the forward direction of the foam roller) is reduced by the centrifugal force Fb, As a result, the pressure contact load of the foam roller 13 is maintained at the reference pressure load Fa.

  Further, when the rotation speed of the tool holder 10 is equal to or higher than the reference rotation speed Vs and the centrifugal force Fb is larger than the reference pressure contact load Fa, the pressure contact load of the foam roller 13 is equal to the centrifugal force Fb and the reference pressure load Fa. Control is performed so as to keep the difference (Fb-Fa).

  Specifically, by moving the adapter 11 in the backward direction of the foam roller 13, the generated load of the second compression coil spring 18B (the load in the backward direction of the foam roller) is increased by the centrifugal force Fb, As a result, the pressure contact load of the foam roller 13 is maintained at the reference pressure load Fa.

  As described above, according to the fine recess processing apparatus 1 and the processing method described above, the fine recess can be formed with high efficiency and high accuracy on the inner peripheral surface of the cylinder bore B, and in addition to the inner peripheral surface. Since the foam roller 13 can be pressed with a constant load, it is not necessary to accurately finish the inner peripheral surface before processing the fine recesses, and this pre-process can be omitted, resulting in a processing cost. Realizes a significant reduction in

  Further, the first compression coil spring 18A that presses the foam roller 13 in the forward direction against the inner peripheral surface of the cylinder bore B and the second compression coil spring 18B that presses the foam roller 13 in the backward direction are employed. Since the centrifugal force acting on the roller support member 12 and the foam roller 13 can sometimes be canceled, even when the tool holder 10 is rotated at high speed, a fine recess having a uniform depth and size can be formed with a low load. In addition, the machining efficiency can be further enhanced as the rotation speed of the tool holder 10 is increased, and the structure is simple and small, so that the cylinder bore B having a small diameter can be dealt with.

  Furthermore, since the fine recess processing apparatus 1 includes the adapter 11 as a radial movement means that can move in the radial direction with respect to the tool holder 10, it is easy to cope with cylinder bores B having different diameters. In the above embodiment, the case where the fine concave portions having a uniform size and depth are formed is explained. However, the pressure contact load of the foam roller 13 is changed during the processing, and the size and depth of the fine concave portions are partially different. It is also possible to

  The cylinder block CB in which fine concave portions are regularly formed on the inner peripheral surface of the cylinder bore B by the fine concave portion processing apparatus 1 and the processing method described above functions effectively as an oil reservoir, This reduces the friction of the inner peripheral surface, which is the sliding contact surface, and can contribute to higher output of the engine.

  FIG. 4 is a view for explaining another embodiment of the fine recess processing apparatus of the present invention. Note that the same components as those in the previous embodiment are denoted by the same reference numerals and detailed description thereof is omitted.

  The tool holder 10 in the illustrated fine recess processing apparatus has a first load generating means in contrast to the first and second load generating means being compression coil springs (18A, 18B) in the previous embodiment. The case where the compression coil spring 18A is used and the actuator 28 that is driven to extend and contract is used as the second load generating means is illustrated.

  Even in the fine recess processing apparatus using the tool holder 10 described above, the same operation and effect as in the previous embodiment can be obtained, and in particular, by adopting the actuator 28 as the second load generating means, FIG. 3, when the centrifugal force Fb is greater than the reference pressure contact load Fa and the pressure contact load of the foam roller 13 is controlled so as to maintain the difference (Fb−Fa) between the centrifugal force Fb and the reference pressure load Fa, As in the embodiment, the actuator 11 is driven to extend without moving the adapter 11 so that the generated load (the load in the backward direction of the foam roller) is increased by the centrifugal force Fb. The pressure contact load can be maintained at the reference pressure load Fa.

  As described above, if the first load generating means is the compression coil spring 18A and the second load generating means is the actuator 28, the effect of the adapter (radial direction moving means) 11, that is, the cylinder bore B having a different diameter can be easily dealt with. The centrifugal force acting on the roller support member 12 and the foam roller 13 at the time of processing can be canceled while maintaining the possible effects.

  In addition, both the first and second load generating means can be actuators. In this case, the adapter 11 may be provided, or the adapter 11 may be eliminated to simplify the structure. Can also be realized.

  FIG. 5 is a view for explaining still another embodiment of the fine recess processing apparatus of the present invention. The tool holder 10 in the fine recess processing apparatus shown in FIG. 5 is different from the previous embodiment in the second embodiment. The other configuration is the same as that of the tool holder 10 in the previous embodiment.

  The fine recess processing apparatus in this embodiment is suitable when the rotational speed of the tool holder 10 is equal to or higher than the reference rotational speed Vs and the centrifugal force Fb is always larger than the reference pressure contact load Fa (see FIG. 3). Thus, the structure can be further simplified by the amount that does not require the compression coil spring 18A as the first load generating means for generating the reference pressure contact load Fa.

  FIG. 6 is a view for explaining still another embodiment of the fine recess processing apparatus of the present invention. The tool holder 10 in the fine recess processing apparatus shown in FIG. The member 12 can be moved in the radial direction with respect to the tool holder 10, and only the centrifugal force Fb generated in the roller support member 12 and the foam roller 13 by the rotation of the tool holder 10 is used to form the foam roller against the inner peripheral surface of the cylinder bore B. 13 is that the compression coil springs 18A and 18B as the first and second load generating means are both omitted, and the other configuration is the tool holder in the previous embodiment. 10 is the same.

  In the fine recess processing apparatus in this embodiment, the conditions such as the rotation speed (the number of rotations) of the tool holder 10 are controlled so that the centrifugal force Fb generated on the foam roller 13 always becomes the reference pressing load Fa (predetermined pressing load). In this way, the structure can be further simplified as much as neither of the compression coil springs 18A and 18B as the first and second load generating means is required.

  The fine recess processing apparatus and the processing method of the present invention are not limited to the above-described embodiments, and the details of the configuration can be changed as appropriate, and the inside of the circular hole other than the cylinder bore can be changed. It is also applicable to the case where fine recesses are formed on the peripheral surface, for example, the inner peripheral surface of a cylinder bore of a compressor that is a sliding member, or the inner peripheral surface of a sliding bearing of a sliding bearing that is also a sliding member. It is also effective to further improve the quality of the inner peripheral surface of the circular hole by removing the bulge of the material generated around the fine concave portion by honing etc. after forming the fine concave portion on the inner peripheral surface of the circular hole It is.

It is sectional drawing of the principal part explaining one Example of the fine recessed part processing apparatus of this invention. It is a perspective view which shows the whole fine recessed part processing apparatus. It is a graph which shows the relationship between the rotational speed of a tool holder, the press-contact load of a foam roller, and centrifugal force. It is sectional drawing of the principal part explaining the other Example of the fine recessed part processing apparatus of this invention. It is a simplified sectional view of the principal part explaining other examples of the fine crevice processing device of the present invention. It is a simplified sectional view of the principal part explaining other examples of the fine crevice processing device of the present invention.

Explanation of symbols

B Cylinder bore (circular hole)
CB Cylinder block (workpiece)
DESCRIPTION OF SYMBOLS 1 Fine recessed part processing apparatus 2 Spindle head (Axial movement means)
10 Tool holder 11 Adapter (radial movement means)
12 roller support member 13 foam roller 18A first compression coil spring (first load generating means)
18B Second compression coil spring (second load generating means)
19A First load cell (first load detecting means)
19B 2nd load cell (2nd load detection means)
20 Rotary encoder (rotational speed detection means)
28 Actuator

Claims (16)

A processing device for forming fine recesses on the inner peripheral surface of a circular hole of a workpiece,
A tool holder which is arranged coaxially with the circular hole and is driven to rotate;
A roller support member held by the tool holder;
A foam roller having a convex part for forming a concave part on the outer peripheral part and rotatable about a roller axis parallel to the rotational axis of the tool holder with respect to the roller support member ;
First load generating means for pressing the roller support member in a direction in which the foam roller advances with respect to the inner peripheral surface of the circular hole, and a roller support member in a direction in which the foam roller moves backward with respect to the inner peripheral surface of the circular hole. Comprising at least one of the second load generating means to be pressed;
With a radial movement means that is movable in the radial direction with respect to the tool holder, the radial movement means is provided with the roller support member in a state in which the movement directions are matched,
The first load generating means is a spring interposed between the radial movement means and the roller support member,
The roller support member can be moved in the radial direction with respect to the tool holder so that the foam roller is pressed against the inner peripheral surface of the circular hole by centrifugal force generated on the roller support member and the foam roller by the rotation of the tool holder. A fine recess processing apparatus characterized by the above. A processing device for forming fine recesses on the inner peripheral surface of a circular hole of a workpiece,
A tool holder which is arranged coaxially with the circular hole and is driven to rotate;
A roller support member held by the tool holder;
A foam roller having a convex part for forming a concave part on the outer peripheral part and rotatable about a roller axis parallel to the rotational axis of the tool holder with respect to the roller support member;
First load generating means for pressing the roller support member in a direction in which the foam roller advances with respect to the inner peripheral surface of the circular hole, and a roller support member in a direction in which the foam roller moves backward with respect to the inner peripheral surface of the circular hole. Comprising at least one of the second load generating means to be pressed;
With a radial movement means that is movable in the radial direction with respect to the tool holder, the radial movement means is provided with the roller support member in a state in which the movement directions are matched,
The second load generating means is a spring interposed between the radial direction moving means and the roller support member,
The roller support member can be moved in the radial direction with respect to the tool holder so that the foam roller is pressed against the inner peripheral surface of the circular hole by centrifugal force generated on the roller support member and the foam roller by the rotation of the tool holder. A fine recess processing apparatus characterized by the above. 3. The fine recess processing apparatus according to claim 2 , wherein the first load generating means is a spring interposed between the radial moving means and the roller support member .   The fine recess processing apparatus according to any one of claims 1 to 3, further comprising axial movement means for relatively moving the work piece and the tool holder in a direction along the center line of the circular hole. . 5. The fine recess processing apparatus according to claim 1, wherein at least one of the first and second load generating means is an actuator driven to extend. The fine recess processing apparatus according to any one of claims 1 to 5 , further comprising a rotation speed detecting means for detecting a rotation speed of the tool holder. The fine recess processing apparatus according to claim 6 , wherein the rotation speed detecting means is a rotary encoder. The fine recess processing apparatus according to any one of claims 1 to 7 , further comprising load detection means for detecting a load generated by the first and second load generation means. 9. The fine recess processing apparatus according to claim 8 , wherein the load detection means is a load cell. When forming a fine recess on the inner peripheral surface of the circular hole of the workpiece,
A tool holder that is arranged coaxially with the circular hole and is driven to rotate, a roller support member that is held by the tool holder, a convex portion for forming a concave portion on the outer periphery, and the tool holder with respect to the roller support member A roller provided with a foam roller rotatable around a roller shaft parallel to the rotation shaft, and in order to press the foam roller against the inner peripheral surface of the circular hole by centrifugal force generated in the roller support member and the foam roller by the rotation of the tool holder Using a fine recess processing device that allows the support member to move in the radial direction with respect to the tool holder ,
The circular hole of the workpiece and the tool holder are arranged coaxially, the roller axis of the foam roller is offset with respect to the rotation axis of the tool holder, and the tool holder is driven to rotate in this state, thereby supporting the roller support member. And while the foam roller is pressed against the inner peripheral surface of the circular hole by centrifugal force generated on the foam roller, the foam roller is rolled along the inner peripheral surface of the circular hole to form a fine recess on the inner peripheral surface. In addition, a fine recess processing method characterized by controlling the rotational speed of the tool holder so as to maintain the pressure contact load of the foam roller at a predetermined load. Before the foam roller is inserted into the circular hole of the workpiece, the tool holder is driven to rotate, and the rotational speed and the centrifugal force generated on the roller support member and the foam roller by the rotation are measured. The fine recess processing method according to claim 10 , wherein the pressure contact load of the foam roller with respect to the inner peripheral surface of the circular hole is controlled based on the relationship. 12. The method of machining a fine recess according to claim 10, wherein the tool holder is driven to rotate and the workpiece and the tool holder are relatively moved in a direction along the center line of the circular hole. A sliding member having a sliding hole is circular holes, with a fine recess machining apparatus according to any one of claim 1 to 9 on the inner peripheral surface of the sliding surface of the slide hole A sliding member characterized in that a fine recess is formed. A cylinder block having a cylinder bore is circular holes, with a fine recess machining apparatus according to any one of claims 1 to 9, characterized in that the formation of the fine recesses on the inner peripheral surface of the cylinder bore Cylinder block. A compressor having a cylinder bore which is a circular hole, wherein the fine concave portion is formed on the inner peripheral surface of the cylinder bore using the fine concave portion processing apparatus according to any one of claims 1 to 9. . A slide bearing having a shaft hole which is a circular hole, wherein the fine recess is formed on the inner peripheral surface of the shaft hole by using the fine recess processing device according to any one of claims 1 to 9. And plain bearings.

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