JP4884027B2 - Manufacturing method of liquid crystal display device - Google Patents
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本発明は、液晶表示装置に係り、特に配向膜に光の照射で配向制御能を付与した液晶表示パネルを具備した液晶表示装置の製造方法に関する。 The present invention relates to a liquid crystal display device, and more particularly to a method of manufacturing a liquid crystal display device including a liquid crystal display panel in which an alignment film is provided with an alignment control ability by light irradiation.
液晶表示装置に使用する配向膜を配向処理すなわち配向制御能を付与する方法として、従来からラビングで処理する方法がある。このラビングによる配向処理は、配向膜を布で擦ることで配向処理を行うものである。一方、配向膜に非接触で配向制御能を付与する光配向法がある。 As a method for imparting an alignment treatment, that is, an alignment control ability, to an alignment film used in a liquid crystal display device, there is a conventional method of rubbing. The alignment treatment by rubbing is performed by rubbing the alignment film with a cloth. On the other hand, there is a photo-alignment method in which alignment control ability is imparted to the alignment film without contact.
図6は、光配向法を説明する概念図である。ガラス基板SUBの表面に配向制御能を付与する前の配向膜ORIを形成する。このガラス基板SUBの配向膜ORIの上方から光源SALからの偏光紫外線PUVを照射する。光源SALには、超高圧水銀ランプ、メタルハライドランプ等の紫外線を含む広範囲の光を放射するショートアーク型放電ランプを用いることにより、波長230〜400nmの波長の成分を含む偏光紫外線PUVを照射可能としている。偏光紫外線PUVは、配向膜ORIに対しては、矢印で示したように揺動させることで、より均一な照射を行なうことも可能である。この偏光紫外線PUVはショートアーク光源SALの光路に偏光子を介挿することで得られる。偏光子は、偏光子に対し所定の角度で入射した光を偏光光とする偏光素子であり、ブリュースタ角を利用したものや、光の干渉を利用したもの,複数の直線状の細長い電気導体を同一平面状に平行に配置したワイヤーグリッドを利用したものなどが一般的に用いられるが、ここでは波長230〜400nmの波長成分を偏光紫外線とするものであれば何でもよく、偏光子の図示は省略した。
FIG. 6 is a conceptual diagram illustrating the photo-alignment method. An alignment film ORI before imparting alignment control ability is formed on the surface of the glass substrate SUB. The polarized ultraviolet light PUV from the light source SAL is irradiated from above the alignment film ORI of the glass substrate SUB. As the light source SAL, by using a short arc type discharge lamp that emits a wide range of light including ultraviolet rays, such as an ultra-high pressure mercury lamp and a metal halide lamp, it is possible to irradiate polarized ultraviolet rays PUV containing a component having a wavelength of 230 to 400 nm. Yes. The polarized ultraviolet light PUV can be irradiated more uniformly by swinging the alignment film ORI as indicated by an arrow. This polarized ultraviolet light PUV is obtained by inserting a polarizer in the optical path of the short arc light source SAL. A polarizer is a polarizing element that uses light incident on the polarizer at a predetermined angle as polarized light. The polarizer uses a Brewster angle, uses light interference, or a plurality of linear elongated electrical conductors. In general, a wire grid using a wire grid arranged in parallel on the same plane is used. However, any wavelength component having a wavelength of 230 to 400 nm may be used as polarized ultraviolet rays. Omitted.
そして、配向膜ORIに対して偏光紫外線PUVを照射して配向制御能を付与する光配向処理時(配向プロセス)中に、同時に熱を与えて配向膜ORIに加熱処理を施す。この加熱温度は200℃程度である。 Then, during the photo-alignment process (alignment process) in which the alignment film ORI is irradiated with polarized ultraviolet light PUV to provide alignment control ability, heat is simultaneously applied to the alignment film ORI. This heating temperature is about 200 ° C.
図7は、偏光紫外線PUVの照射と加熱処理を同時に行なう従来の偏光紫外線の照射による配向膜に対する配向制御能の付与プロセスを説明する図である。図7(a)に示したように、配向膜に偏光紫外線を照射すると、図7(b)のように偏光方向と直交する方向に延びる配向膜高分子主鎖が短波長側の偏光紫外線で切断される。切断された主鎖の一部は図7(c)の符号CH1に示したように偏光方向に再配列し、長波長側の偏光紫外線で架橋する。過熱は、配向膜の分子鎖運動を活発にし、あるいは熱架橋を行なわせる効果をもつ。なお、表1に光と熱の役割を示す。
しかし、偏光紫外線PUVの照射と加熱処理を同時に行なう従来の偏光プロセスでは、図7(c)の符号CH2に示したように偏光方向の主鎖方向に再配列する前に偏光方向と直角方向のままで架橋する分子が生じる。このように、切断された主鎖の分子が偏光方向と直角方向のままで架橋すると、配向制御能が低下し、配向規制力不足による残像の原因となる。 However, in the conventional polarization process in which the irradiation with the polarized ultraviolet light PUV and the heat treatment are performed at the same time, as shown by the symbol CH2 in FIG. 7 (c), before the rearrangement in the main chain direction of the polarization direction, Molecules that crosslink as they occur. As described above, if the molecules of the main chain that has been cut are cross-linked in the direction perpendicular to the polarization direction, the orientation control ability is lowered, causing afterimages due to insufficient orientation regulating force.
光配向に関する従来技術を開示したものとして特許文献1を挙げることができる。特許文献1では、光配向プロセスに終始一貫して同一光源を用いて照射を行い、また、光配向処理時の温度は一定としたものを開示する。
図6で説明したように、光分解型の配向制御能を付与するプロセス(配向プロセス)では、配向膜の配向に不要となる方向の配向膜主鎖を偏光紫外線PUVで分解させることで配向性を得る。このときに同時に熱を加えることで、高い配向性(配向規制力、配向制御能)を得ることができる。この処理において、配向膜中では、(1)光分解、(2)分解により分子鎖長が短くなった配向膜主鎖が熱運動で位置を変え(再配列)、(3)分解した小さな分子がある確率で再度架橋する、という3つの反応が進行している。
As I explained in FIG 6, in the process (alignment process) for imparting alignment control function of the photolytic, orientation by decomposing with polarized ultraviolet PUV a direction of the alignment film backbone becomes unnecessary on the orientation of the alignment layer Get. By simultaneously applying heat at this time, high orientation (orientation regulating force, orientation control ability) can be obtained. In this process, in the alignment film, (1) photodecomposition, (2) the alignment film main chain whose molecular chain length has been shortened by decomposition is repositioned by thermal motion (rearrangement), and (3) decomposed small molecules Three reactions are in progress: crosslinks again with a certain probability.
このとき、上記(2)の再配列が行われずにそのまま架橋してしまうと、その分子は上記(1)で分解させる前の不要な方向主鎖であり、上記(1)により再分解サイクルに戻るだけであり、その架橋は配向性を向上させる効果を得ることができない。そのため、(2)での分子の位置を変えることが配向性向上に不可欠である。しかし、架橋に必要な熱量を終始加えると、分子鎖運動と並行して架橋反応も起きるため、再配列が行われて架橋された真の配向性向上に寄与する架橋成分の量が少なくなる。 At this time, if the re-arrangement of (2) is not performed and the cross-linking is performed as it is, the molecule is an unnecessary directional main chain before being decomposed in (1), and the re-decomposition cycle is caused by (1). It only returns, and the crosslinking cannot obtain the effect of improving the orientation. Therefore, changing the molecular position in (2) is essential for improving the orientation. However, when the amount of heat necessary for crosslinking is added all the time, a crosslinking reaction also occurs in parallel with the molecular chain movement, so that the amount of the crosslinking component that contributes to the improvement of the true orientation after the rearrangement is reduced.
また、配向プロセスで用いる光源は、光源の配置や偏光子等の偏光生成素子の偏光軸むら等の影響により、実際には照射されている光束内で照射軸は同一にはならない。一般的に、照射軸は光束内で連続的に変化し、光束の中央部の照射軸に対して周辺部の照射軸のずれ角が大きくなる。このため、配向処理に必要な許容照射軸が得られない領域は遮光スリットにより捨てることになり、光を効率的に利用できない。
In addition, the light source used in the alignment process does not have the same irradiation axis in the actually irradiated light beam due to the influence of the arrangement of the light source and the polarization axis unevenness of the polarization generating element such as a polarizer. Generally, the irradiation axis is continuously changed within the light beam, the angle of deviation of the irradiation axis of the peripheral portion is increased relative to the irradiation axis of the central portion of the light beam. For this reason, the area where the allowable irradiation axis necessary for the alignment treatment cannot be obtained is discarded by the light shielding slit, and light cannot be used efficiently.
本発明の目的は、偏光照射で分離された分子鎖が再配置前に架橋するのを抑制することで、配向制御能の低下を阻止して高品位の表示を可能とした液晶表示パネルを用いた液晶表示装置の製造方法を提供することにある。 An object of the present invention is to use a liquid crystal display panel that can prevent high-quality display by preventing a decrease in alignment control ability by suppressing crosslinking of molecular chains separated by polarized light irradiation before rearrangement. Another object of the present invention is to provide a method for manufacturing a liquid crystal display device.
本発明は、画素選択用のアクティブ素子が形成された主面の最上層に第1の配向膜を有する一方の基板と、カラーフィルタが形成された主面の最上層に第2の配向膜を有する他方の基板と、前記一方の基板の前記第1の配向膜と前記他方の基板の前記第2の配向膜の間に封止された液晶とからなる液晶表示パネルを具備し、少なくとも前記第1の配向膜に偏光の照射で液晶配向制御能を付与するための配向処理を行なう液晶表示装置の製造方法である。 The present invention provides one substrate having a first alignment film on the uppermost layer of the main surface on which an active element for pixel selection is formed, and a second alignment film on the uppermost layer of the main surface on which a color filter is formed. And a liquid crystal display panel comprising a liquid crystal sealed between the first alignment film of the one substrate and the second alignment film of the other substrate, and having at least the first This is a method for manufacturing a liquid crystal display device, in which an alignment treatment for imparting a liquid crystal alignment control ability by irradiation of polarized light is performed on one alignment film.
そして、本発明の製造方法は、前記配向膜に前記偏光の照射処理中に加熱処理を行い、当該加熱処理の温度を前記偏光の照射処理中に変化させることを特徴とする。この加熱処理の温度変化を、前記偏光の照射処理中の初期、中期、および後期にかけて昇温する昇温プロファイルとする。例えば、この初期、中期、および後期での温度を、それぞれ100℃、100℃〜150℃、200℃〜220℃とすることができる。 The production method of the present invention is characterized in that the alignment film is subjected to a heat treatment during the polarized light irradiation treatment, and the temperature of the heat treatment is changed during the polarized light irradiation treatment. The temperature change of the heat treatment is defined as a temperature rise profile in which the temperature rises in the initial, middle, and late stages during the polarized light irradiation treatment. For example, the temperatures at the initial stage, middle stage, and late stage can be set to 100 ° C., 100 ° C. to 150 ° C., and 200 ° C. to 220 ° C., respectively.
また、本発明は、前記照射処理中の前記偏光の波長を経時的に変化させることを特徴とする。この偏光の波長は、当該偏光の照射処理中の初期、中期、および後期にかけて長くなる増加プロファイルとすることができ、たとえば、それぞれ230〜270nm、270nm〜280nm、280〜330nmとすることができる。 Further, the present invention is characterized in that the wavelength of the polarized light during the irradiation treatment is changed over time. The wavelength of this polarized light can be an increasing profile that becomes longer in the initial, middle, and late stages during the irradiation treatment of the polarized light, and can be, for example, 230 to 270 nm, 270 nm to 280 nm, and 280 to 330 nm, respectively.
また、本発明は、前記光配向処理の終了時に加熱処理を実施することができる。この加熱処理の処理時間は10分〜60分で、加熱温度は150℃〜250℃とすることができる。 Moreover, this invention can implement a heat processing at the completion | finish of the said photo-alignment process. The treatment time of this heat treatment is 10 minutes to 60 minutes, and the heating temperature can be 150 ° C. to 250 ° C.
また、本発明は、前記光配向処理時に照射する偏光を、少なくとも2種類の偏光方向を持ち、かつ、それぞれの偏光の照射波長域が異なるものを用い、前記初期、および後期における前記偏光の前記配向軸に対する偏光方向の照射角度が、前記初期では230〜270nmの光を90度、前記後期では280〜330nmの光を85度とすることができる。 In the present invention, the polarized light irradiated at the time of the photo-alignment treatment has at least two types of polarization directions and the irradiation wavelength ranges of the polarized lights are different from each other. The irradiation angle in the polarization direction with respect to the alignment axis can be set to 90 degrees for light of 230 to 270 nm in the initial stage and 85 degrees for light of 280 to 330 nm in the latter stage.
また、本発明は、前記偏光の走査方向の光束の軸分布角を±100以下とし、かつその軸分布が当該走査の方向で対称形状になるように照射することができる。 Further, according to the present invention, irradiation can be performed so that the axial distribution angle of the light beam in the scanning direction of the polarized light is ± 100 or less and the axial distribution is symmetrical in the scanning direction.
なお、本発明は、上記の構成および後述する実施の形態に開示される構成に限定されるものではなく、本発明の技術思想を逸脱することなく、種々の変更が可能であることは言うまでもない。 Note that the present invention is not limited to the above-described configuration and the configuration disclosed in the embodiments described later, and it goes without saying that various modifications can be made without departing from the technical idea of the present invention. .
本発明によれば、配向制御能の低下を阻止して高品位の表示を可能とした液晶表示パネルを用いた液晶表示装置の製造方法を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the liquid crystal display device using the liquid crystal display panel which prevented the fall of orientation control ability and enabled the display of high quality can be provided.
以下、本発明の具体的な実施の形態について、実施例の図面を参照して詳細に説明する。 Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings of the examples.
図1は、本発明による液晶表示装置の製造方法の光配向法を説明する概念図である。実施例1では、初期P1、中期P2、後期P3の時系列で配向プロセスを構成する。ガラス基板SUBの表面に配向制御能を付与する前の配向膜ORIが形成されている。このガラス基板SUBの配向膜ORIの上方から、230〜400nmの波長領域を含むの棒状の偏光源LALにより偏光紫外線PUVを照射する。この偏光紫外線PUVは必要に応じて波長カットフィルタF1,F2を通して、目的の波長成分を主体とした偏光成分を得ている。棒状の偏光源LALは,特表2001−512850号公報等に示される棒状の高圧水銀ランプ(紫外線を含む広範囲の光を放射するロングアーク型放電ランプ)によって得られた細長いスリット状の光束を偏光子に入射することで得ることが出来るが、図中では偏光子の図示は省略している。ロングアーク偏光源LALは複数本を配列し、大矢印で示したように、ロングアーク偏光源LALの配列方向に従って熱を加えながら、初期、中期、後期の時系列で移動させる。また、必要に応じてガラス基板SUBを細矢印で示したように前後に揺動させることで、均一な照射をさせることもできるようになっている。なお熱を加える方法は、図中においてはIRヒーターを基板搬送系の真下に配置することで、基板の下方から熱Hを加えているが,基板に熱を加えることができれば配置位置はどこでもよく、またその方式も、装置系全体を密閉して熱風加熱する方法やホットプレートを基板の真下に配置して、ホットプレート毎基板を図中の大矢印方向に移動させる方法など、どのような加熱方法を用いても特に問題にはならない。 FIG. 1 is a conceptual diagram illustrating a photo-alignment method of a method for manufacturing a liquid crystal display device according to the present invention. In the first embodiment, the alignment process is configured in the time series of the initial P1, the middle P2, and the late P3. An orientation film ORI before imparting orientation control ability is formed on the surface of the glass substrate SUB. From above the alignment film ORI of the glass substrate SUB, polarized ultraviolet light PUV is irradiated by a rod-shaped polarization source LAL including a wavelength region of 230 to 400 nm. The polarized ultraviolet light PUV obtains a polarization component mainly composed of a target wavelength component through the wavelength cut filters F1 and F2 as necessary. The rod-shaped polarization source LAL polarizes an elongated slit-shaped light beam obtained by a rod-shaped high-pressure mercury lamp (a long arc discharge lamp that emits a wide range of light including ultraviolet rays) as disclosed in JP-T-2001-512850. Although it can be obtained by being incident on the polarizer, the polarizer is not shown in the figure. A plurality of long arc polarized light sources LAL are arranged, and as indicated by the large arrows, they are moved in time series of early, middle and late periods while applying heat according to the arrangement direction of the long arc polarized light sources LAL. Further, if necessary, the glass substrate SUB can be swung back and forth as indicated by a thin arrow so that uniform irradiation can be performed. In the figure, the method of applying heat is to place the IR heater directly below the substrate transfer system in the figure, so that heat H is applied from below the substrate. However, as long as heat can be applied to the substrate, the arrangement position may be anywhere. In addition, the heating method can be any of the methods such as sealing the entire system and heating with hot air, or placing the hot plate directly under the substrate and moving the hot plate substrate in the direction of the large arrow in the figure. There is no particular problem using the method.
配向プロセスの初期P1と中期P2にかけては、波長カットフィルタF1を通したロングアーク光源LALからの波長は230〜270nmで、与える熱Hは初期では100℃、中期では100〜150℃とする。そして、後期P3では波長カットフィルタF2を通したロングアーク光源LALからの波長は280〜330nmで、与える熱Hは200℃とする。この偏光紫外線PUVはロングアーク光源LALの光路に偏光子を介挿することで得られるが、偏光子の図示は省略した。 The wavelength from the long arc light source LAL that has passed through the wavelength cut filter F1 is 230 to 270 nm from the initial P1 and the intermediate period P2 of the alignment process, and the heat H to be applied is 100 ° C. in the initial stage and 100 to 150 ° C. in the intermediate period. In the latter period P3, the wavelength from the long arc light source LAL that has passed through the wavelength cut filter F2 is 280 to 330 nm, and the heat H to be applied is 200 ° C. The polarized ultraviolet light PUV is obtained by inserting a polarizer in the optical path of the long arc light source LAL, but the illustration of the polarizer is omitted.
このように、実施例1では、配向膜ORIに対して偏光紫外線PUVを照射して配向制御能を付与する光配向処理時(配向プロセス)中に、同時に熱Hを与えて配向膜ORIに加熱処理を施す。 As described above, in Example 1, during the photo-alignment process (alignment process) in which the alignment film ORI is irradiated with the polarized ultraviolet light PUV to provide the alignment control ability, the heat is applied to the alignment film ORI at the same time. Apply processing.
図2は、偏光紫外線PUVの照射中に時系列で加熱処理を行なう配向制御能の付与プロセスを説明する図である。図2(a)〜図7(b)は初期P1におけるプロセス内容である。配向膜の高分子の主鎖MMCは図2(a)に示したように交差している。この配向膜ORIに波長230〜270nmの偏光紫外線を照射すると共に加熱(略100℃)することで分子鎖運動が促進され、図2(b)のように偏光方向と直交する方向の主鎖が切断される。 FIG. 2 is a diagram for explaining a process for imparting orientation control ability in which heat treatment is performed in time series during irradiation with polarized ultraviolet light PUV. FIG. 2A to FIG. 7B show process contents in the initial P1. The main chain MMC of the polymer of the alignment film intersects as shown in FIG. The alignment film ORI is irradiated with polarized ultraviolet rays having a wavelength of 230 to 270 nm and heated (approximately 100 ° C.) to promote molecular chain movement, and the main chain in a direction orthogonal to the polarization direction as shown in FIG. Disconnected.
切断された主鎖の一部は、中期P2で加熱温度を若干上昇させる(略100〜150℃)ことで、図2(c)に示したように偏光方向の主鎖に倣った方向に再配列する。 A part of the cut main chain is regenerated in the direction following the main chain in the polarization direction as shown in FIG. 2C by slightly raising the heating temperature (approximately 100 to 150 ° C.) in the middle period P2. Arrange.
そして、図2(d)の後期P3では、波長カットフィルタF2を通したロングアーク光源LALからの波長は280〜330nmと、さらに高い加熱(略200℃)を与えることで、再配置された切断高分子の主鎖が光および熱架橋される(再架橋)。 Then, in the latter period P3 of FIG. 2D, the wavelength from the long arc light source LAL that has passed through the wavelength cut filter F2 is 280 to 330 nm, and by applying higher heating (approximately 200 ° C.), the rearranged cutting is performed. The main chain of the polymer is photocrosslinked with heat (recrosslinking).
実施例1では、光配向プロセスを3段階に分割し、切断された主鎖が切断されない偏光方向の主鎖に沿う再配置に時間をかけることで、より揃った分子配列が得られる。これにより、配向規制力が向上し、残像の発生が抑制されて、高品質の画像表示を得ることができる。 In Example 1, the photo-alignment process is divided into three stages, and a more uniform molecular arrangement is obtained by taking time for rearrangement along the main chain in the polarization direction in which the cut main chain is not cut. Thereby, the orientation regulating force is improved, the occurrence of afterimages is suppressed, and a high-quality image display can be obtained.
このように、光配向処理工程を初期、中期、後期に分け、それぞれの処理プロセスで光分解(初期)、再配置(中期)、再架橋(後期)に最適な反応条件とすることで、それぞれの反応の効率を高めることができる。加熱温度を変化させる昇温プロファイルは、初期では光分解を促進する条件として偏光紫外線PUVに加えて100℃程度の熱を加えることで、光分解反応を促進することができる。中期の再配列では、分子のガラス転移点温度に近い温度で架橋が発生しない温度である略100〜150℃、後期は架橋に必要な200℃前後とする。これらの処理により、より整った分子鎖配向状態を得ることが出来るため、配向規制力が向上し、残像が起こりにくくなる。 In this way, the photo-alignment treatment process is divided into an initial stage, a middle stage, and a late stage, and by setting each reaction process as an optimal reaction condition for photolysis (initial stage), rearrangement (middle stage), and recrosslinking (late stage), The efficiency of the reaction can be increased. The temperature rising profile for changing the heating temperature can accelerate the photodecomposition reaction by applying heat of about 100 ° C. in addition to the polarized ultraviolet light PUV as a condition for promoting photodecomposition at the initial stage. In the rearrangement in the middle period, the temperature at which the crosslinking does not occur at a temperature close to the glass transition temperature of the molecule is about 100 to 150 ° C., and the latter period is about 200 ° C. necessary for the crosslinking. By these treatments, a more ordered molecular chain alignment state can be obtained, so that the alignment regulating force is improved and an afterimage hardly occurs.
従来の偏光照射では、光分解に必要な波長域も光架橋に必要な波長域も同時に照射していた。これに対し、本実施例では、初期の照射波長を光分解に必要な波長域を主として照射し、後期の照射波長域を光架橋に必要な波長域を主として照射することで、それぞれの反応工程で最適な反応条件とすることができる。このため、より整った分子鎖配向状態を得ることが出来、配向規制力が向上し、残像が起こりにくくなる。
The conventional polarization irradiation, the wavelength range necessary for photolysis wavelength range required to photocrosslinking was also shines irradiation simultaneously. In contrast, in the present embodiment, the initial emission wavelength mainly irradiating the wavelength range necessary for photolysis, primarily to morphism shining a wavelength range necessary for photocrosslinking radiation wavelength range of late, each reaction Optimum reaction conditions can be achieved in the process. For this reason, a more ordered molecular chain alignment state can be obtained, the alignment regulating force is improved, and afterimages are less likely to occur.
光分解に必要な波長は、一般的なシクロブタンテトラカルボン酸とフェニレンジアミンによるポリイミドを使用した場合、フェニレンジアミンの吸収波長域である230〜270nmである。この波長域を主として照射することが好適である。また、後期の光架橋で必要な波長は280〜330mmであり、この波長域を主として照射し、なるべく光分解波長の照射強度を下げることが望ましい。 The wavelength required for the photolysis is 230 to 270 nm, which is the absorption wavelength region of phenylenediamine, when a general cyclobutanetetracarboxylic acid and polyimide based on phenylenediamine are used. It is preferable to irradiate mainly in this wavelength range. Further, the wavelength necessary for the later photocrosslinking is 280 to 330 mm, and it is desirable to mainly irradiate this wavelength region and to reduce the irradiation intensity of the photolysis wavelength as much as possible.
光分解型の配向制御能を付与する配向プロセスでは、液晶配向に不要な方向の配向膜主鎖を偏光紫外線PUVで分解させることで配向性を得る。さらに詳細には、光配向処理では一方の配向膜主鎖を切断することで他方の分子の主鎖の配向規制力を相対的に向上させている。しかし、短くなった配向膜主鎖であっても液晶との相互作用は存在し,その相互作用の方向は不要な配向方向であるため、配向性の低下要因であると言える。また、熱による再配列で配向方向に動いた短い配向膜主鎖は、初期的には配向性の向上要因になる。 In an alignment process that imparts photolytic alignment control capability, alignment is obtained by decomposing an alignment film main chain in a direction unnecessary for liquid crystal alignment with polarized ultraviolet light PUV. More specifically, in the photo-alignment treatment, the alignment regulation force of the main chain of the other molecule is relatively improved by cutting one alignment film main chain. However, even with a shortened alignment film main chain, there is an interaction with the liquid crystal, and the direction of the interaction is an unnecessary alignment direction. In addition, the short alignment film main chain moved in the alignment direction by the rearrangement by heat becomes an improvement factor of the alignment property in the initial stage.
しかし、分子量の小さな配向膜では、液晶が電界駆動により配向膜の配向方向と異なる方向に向いたときに、液晶と配向膜の相互作用による強いトルクによる影響で配向膜主鎖は駆動前の配向方向からずれた方向に向き易くなる。つまり、液晶駆動により配向方向が乱されるということであり、表示装置として使用中に配向性を低下させる要因となる。そこで、配向処理の最後に加熱処理を加えることで、配向膜中特に配向膜表面に存在する低分子化合物を除去することができ、相対的に高分子の配向膜とすることができるため、上記液晶駆動による配向性低下の影響を受け難くすることができる。加熱処理はかならずしも配向処理の直後である必要はなく、一対の基板を組み合わせて液晶セルを作製するまでの工程で行えばよい。また,加熱方法はIR加熱や熱風加熱、ホットプレート加熱などの方法で150〜250℃(基板の温度)で10〜60分程度加熱すればよい。加熱中の雰囲気は、窒素などの不活性ガス中で行うことが望ましいが、通常の大気雰囲気でも十分な脱ガス効果が得られる。 However, in the alignment film with a small molecular weight, when the liquid crystal is directed in a direction different from the alignment direction of the alignment film by electric field driving, the alignment film main chain is aligned before driving due to the influence of strong torque due to the interaction between the liquid crystal and the alignment film. It becomes easy to face in the direction shifted from the direction. In other words, the orientation direction is disturbed by driving the liquid crystal, which causes a decrease in orientation during use as a display device. Therefore, by applying a heat treatment at the end of the alignment treatment, it is possible to remove low molecular compounds present in the alignment film, particularly on the alignment film surface, and a relatively high molecular alignment film can be obtained. It can be made difficult to be affected by the decrease in orientation due to liquid crystal driving. The heat treatment is not necessarily performed immediately after the alignment treatment, and may be performed until the liquid crystal cell is manufactured by combining a pair of substrates. The heating method may be heating at 150 to 250 ° C. (substrate temperature) for about 10 to 60 minutes by IR heating, hot air heating or hot plate heating. The atmosphere during heating is desirably performed in an inert gas such as nitrogen, but a sufficient degassing effect can be obtained even in a normal air atmosphere.
一般的なシクロブタンテトラカルボン酸とフェニレンジアミンによるポリイミドを使用した場合、光配向膜ポリイミドの光切断工程では、光吸収部であるフェニレンジアミンの分子方向に光吸収が発生する。従って、光切断する場合、配向方向から最も離れた90°方向の偏光紫外線PUVを照射することで配向方向の分子を残し、配向に不要な分子を切断する。 When a general cyclobutanetetracarboxylic acid and phenylenediamine-based polyimide is used, light absorption occurs in the molecular direction of phenylenediamine, which is a light absorption part, in the photo-cutting step of the photo-alignment film polyimide. Therefore, in the case of photo-cutting, irradiation with polarized ultraviolet light PUV in the 90 ° direction farthest from the alignment direction leaves the molecules in the alignment direction and cuts molecules unnecessary for alignment.
再架橋工程では、分解されて生成したマレイミド末端を光架橋している。この光架橋の際、マレイミドの遷移吸収モーメントの方向に偏光を照射してやることで、より整った分子配向状態を得ることが出来る。全く置換基のないマレイミドの遷移モーメントは配向膜の主鎖に対して90°の方向になり、光切断時の偏光方向と一致するため、この場合は偏光紫外線PUVの方向を変える必要はない。一方、置換基のついたマレイミドの遷移モーメントは配向膜の主鎖に対して90°の方向からずれるため、その方向にあわせた偏光紫外線PUVを当てることで再架橋を促進することができる。例として示したマレイミドについては、配向膜の主鎖に対して85°の方向になる。 In the recrosslinking step, the maleimide terminal generated by decomposition is photocrosslinked. In this photocrosslinking, a more ordered molecular orientation state can be obtained by irradiating polarized light in the direction of the transition absorption moment of maleimide. The transition moment of maleimide having no substituent is 90 ° with respect to the main chain of the alignment film and coincides with the polarization direction at the time of light cutting. In this case, it is not necessary to change the direction of the polarized ultraviolet light PUV. On the other hand, since the transition moment of the maleimide having a substituent is shifted from the direction of 90 ° with respect to the main chain of the alignment film, re-crosslinking can be promoted by applying polarized ultraviolet light PUV in accordance with the direction. The maleimide shown as an example has a direction of 85 ° with respect to the main chain of the alignment film.
本実施例では、光源または基板を偏光紫外線PUVを照射しながら走査して処理するプロセスで使用可能である。その場合、本方法を実施する装置の配置を分解、再配列、再架橋に分けることで実現できる。その際、配向処理に必要な許容照射軸が得られない。大きな軸ずれ領域についても、その軸分布が偏光の走査方向に対称形状となるのであれば、スキャン処理で平均軸角度を小さくすることができる。そのとき、スキャン方向の光束の軸分布角を±100以下であれば問題なく使用可能である。 In this embodiment, the present invention can be used in a process of scanning and processing a light source or a substrate while irradiating polarized ultraviolet light PUV. In that case, it is realizable by dividing | segmenting arrangement | positioning of the apparatus which implements this method into decomposition | disassembly, rearrangement, and re-bridge | crosslinking. At that time, an allowable irradiation axis necessary for the alignment treatment cannot be obtained. Even in the case of a large axis deviation region, the average axis angle can be reduced by the scanning process if the axis distribution is symmetrical in the polarization scanning direction. At that time, if the axial distribution angle of the light beam in the scanning direction is ± 100 or less, it can be used without any problem.
光分解型の配向プロセスでは、配向に不要な方向の配向膜主鎖を、その方向に偏光紫外線PUVの照射軸をあわせて照射することで分解し配向性を得る。しかし、実際の偏光紫外線PUVは照射軸方向以外の光成分も持つ。この照射軸方向の光強度を照射軸と直交する光強度で割った値が消光比であるが、この値が小さいと光分解させたくない方向の分子の分解量が増大する。この許容値は上記したような処理をした場合には許容値はより厳しくなる。 In the photolysis type alignment process, the alignment film main chain in a direction unnecessary for alignment is decomposed and irradiated with the irradiation axis of polarized ultraviolet light PUV in that direction to obtain alignment. However, the actual polarized ultraviolet light PUV also has light components other than the irradiation axis direction. The value obtained by dividing the light intensity in the irradiation axis direction by the light intensity orthogonal to the irradiation axis is the extinction ratio. However, if this value is small, the amount of molecules decomposed in the direction in which photodecomposition is not desired increases. This allowable value becomes stricter when the processing as described above is performed.
光束の軸分布角の大きい光源をスキャンで相殺する場合、初期に照射した時の光束角度の影響を強く受ける。一つの光源を低速でスキャンする場合特に寄与率が大きく、軸の相殺ができない。複数の光源を用いて高速でスキャンをすることで,軸の相殺が可能である。 When a light source having a large light beam axial distribution angle is canceled by scanning, it is strongly influenced by the light beam angle when initially irradiated. When scanning a single light source at a low speed, the contribution ratio is particularly large and the axes cannot be offset. Axes can be offset by scanning at high speed using multiple light sources.
図3は、光配向の処理装置を模式的に説明する図である。液晶表示パネルのガラスを好適とする一方の基板である薄膜トランジスタ基板(TFT基板)あるいは同じく他方の基板であるカラーフィルタ基板(CF基板)に塗布した配向膜に配向制御能を付与する。図3において、ガラス基板SUB主面(内面)に配向制御能未付与の配向膜ORIが成膜されている。光源はロングアーク光源LALで、この紫外線ランプLALからの紫外線は偏光子PLZで所定の偏光成分のみが選択され、ガラス基板に成膜された配向膜ORIを照射する。ガラス基板を矢印A方向に移送させ、基板全域の配向膜に配向制御能を付与する。なお、光源に対する基板の移動は相対的なものであり、光源側を移動させてもよく、あるいは光源と基板の両者を移動させるようにしてもよい。 FIG. 3 is a diagram schematically illustrating a photo-alignment processing apparatus. Alignment controllability is imparted to an alignment film applied to a thin film transistor substrate (TFT substrate) which is one of the substrates suitable for glass of a liquid crystal display panel or a color filter substrate (CF substrate) which is also the other substrate. In FIG. 3, an alignment film ORI to which no alignment control ability is imparted is formed on the glass substrate SUB main surface (inner surface). The light source is a long arc light source LAL, and the ultraviolet light from the ultraviolet lamp LAL is selected only by a polarizer PLZ with a predetermined polarization component, and irradiates the alignment film ORI formed on the glass substrate. The glass substrate is moved in the direction of arrow A, and the alignment control ability is imparted to the alignment film over the entire area of the substrate. The movement of the substrate relative to the light source is relative, and the light source side may be moved, or both the light source and the substrate may be moved.
図4は、本発明が適用される液晶表示パネルの構成例を説明する一画素付近の断面模式図である。この液晶表示パネルPNLはIPS方式の液晶表示パネルであり、ガラスを好適とするTFT基板SUB1とCF基板SUB2の間に封入した液晶LCを有する。TFT基板SUB1の内面にはゲート電極GT、ゲート絶縁膜GI、シリコン半導体層SI、ソース電極SD1、ドレイン電極SD2からなる薄膜トランジスタTFTが形成されている。薄膜トランジスタTFTを覆って絶縁層INSが形成され、この絶縁層INS上に対向電極CTがパターニングされている。 FIG. 4 is a schematic cross-sectional view of the vicinity of one pixel for explaining a configuration example of a liquid crystal display panel to which the present invention is applied. This liquid crystal display panel PNL is an IPS liquid crystal display panel, and has a liquid crystal LC sealed between a TFT substrate SUB1 and a CF substrate SUB2, which are preferably made of glass. A thin film transistor TFT including a gate electrode GT, a gate insulating film GI, a silicon semiconductor layer SI, a source electrode SD1, and a drain electrode SD2 is formed on the inner surface of the TFT substrate SUB1. An insulating layer INS is formed to cover the thin film transistor TFT, and the counter electrode CT is patterned on the insulating layer INS.
対向電極CTを覆ってパッシベーション膜(パス膜)PASが成膜されている。このパス膜PASの上には画素電極PXがパターニングされ、絶縁層INSとパス膜PASに形成したコンタクトホールを通してソース電極SD1に接続されている。画素電極PXと対向電極CTとは、表示面側からみて櫛歯状に互いに噛み合うように配置されている。そして、最上層に一方の配向膜ORI1が形成されている。 A passivation film (pass film) PAS is formed to cover the counter electrode CT. On the pass film PAS, the pixel electrode PX is patterned and connected to the source electrode SD1 through a contact hole formed in the insulating layer INS and the pass film PAS. The pixel electrode PX and the counter electrode CT are arranged so as to mesh with each other in a comb shape when viewed from the display surface side. One alignment film ORI1 is formed on the uppermost layer.
また、CF基板SUB2の内面にはブラックマトリクスBMと、このブラックマトリクスBMで区画されたカラーフィルタCFが形成されている。このカラーフィルタCFの上にはオーバーコート層(平滑層)OCを介して他方の配向膜ORI2が形成されている。 A black matrix BM and a color filter CF partitioned by the black matrix BM are formed on the inner surface of the CF substrate SUB2. On the color filter CF, the other alignment film ORI2 is formed via an overcoat layer (smooth layer) OC.
この液晶表示パネルでは、上記の一方の配向膜ORI1と他方の配向膜ORI2の両方に光配向処理で液晶配向制御能が付与されている。なお、少なくともTFT基板SUB1側の配向膜ORI1は、該TFT基板SUB1の内面が薄膜トランジスタTFTの存在で凹凸が激しいため、光配向処理で液晶配向制御能を付与することで、配向安定性が得られ、高品質の画像表示を可能とした液晶表示装置を構成できる。 In this liquid crystal display panel, the liquid crystal alignment control ability is imparted to both the one alignment film ORI1 and the other alignment film ORI2 by the optical alignment process. In addition, at least the alignment film ORI1 on the TFT substrate SUB1 side has a rough surface due to the presence of the thin film transistor TFT on the inner surface of the TFT substrate SUB1, and therefore alignment stability can be obtained by providing a liquid crystal alignment control ability by a photo-alignment process. Thus, a liquid crystal display device capable of displaying a high-quality image can be configured.
なお、TFT基板SUB1とCF基板SUB2の外面には、それぞれ偏光板POL1、POL2が積層されて液晶表示パネルPNLを構成している。 Note that polarizing plates POL1 and POL2 are laminated on the outer surfaces of the TFT substrate SUB1 and the CF substrate SUB2, respectively, to form a liquid crystal display panel PNL.
図5は、本発明により製造された液晶表示装置の全体構造例を説明する展開斜視図である。図4と同一符号は同一機能部分に対応する。液晶表示パネルPNLは、周辺(ここでは、上辺と左辺)に駆動回路が搭載されている。上辺に搭載されているのはデータ線駆動回路チップ、左辺に搭載されているのは走査線駆動回路チップである。なお、ここでは駆動回路チップを搭載と記載したが、これに代えてTFT基板上に直接作り込んだ駆動回路とすることもできる。 FIG. 5 is a developed perspective view illustrating an example of the entire structure of a liquid crystal display device manufactured according to the present invention. The same reference numerals as those in FIG. 4 correspond to the same functional parts. The liquid crystal display panel PNL has a drive circuit mounted on the periphery (here, the upper side and the left side). A data line driving circuit chip is mounted on the upper side, and a scanning line driving circuit chip is mounted on the left side. Here, the description has been made that the drive circuit chip is mounted, but instead of this, a drive circuit formed directly on the TFT substrate may be used.
駆動回路はフレキシブルプリント基板FPCで図示しない信号源に接続されている。液晶表示パネルPNLの背面にはバックライトユニットBLが設置されている。バックライトユニットBLは、導光板GLB、光源、プリズムシートや拡散シートからなる光学補償部材、導光板GLBの背面に設置された図示されない反射シートなどを収容したモ−ルドフレームMDLで構成される。 The drive circuit is connected to a signal source (not shown) by a flexible printed circuit board FPC. A backlight unit BL is installed on the back surface of the liquid crystal display panel PNL. The backlight unit BL includes a light guide plate GLB, a light source, an optical compensation member made of a prism sheet or a diffusion sheet, a mold frame MDL that houses a reflection sheet (not shown) installed on the back surface of the light guide plate GLB.
そして、液晶表示パネルPNLの上から金属材の上フレームSHDを被せ、モ−ルドフレームMDLの背面に設けた金属材の下フレームMFLと接続して一体化される。液晶表示パネルPNLに形成された電子潜像をバックライトユニットBLからの照明光で可視化する。 Then, an upper frame SHD of a metal material is placed on the liquid crystal display panel PNL, and is connected to and integrated with the lower frame MFL of the metal material provided on the back surface of the mold frame MDL. The electronic latent image formed on the liquid crystal display panel PNL is visualized with illumination light from the backlight unit BL.
SUB・・・基板、SUB1・・・TFT基板、SUB2・・・CF基板、PX・・・画素電極、ORI・・・配向膜、ORI1・・・TFT基板側の配向膜、ORI2・・・CF基板側の配向膜、CT・・・対向電極(共通電極)、CF・・・カラーフィルタ、LC・・・液晶、BM・・・ブラックマトリクス、POL1,POL2・・・偏光板、PUV・・・偏光紫外線、LAL・・・ロングアーク光源。
SUB ... Substrate, SUB1 ... TFT substrate, SUB2 ... CF substrate, PX ... Pixel electrode, ORI ... Alignment film, ORI1 ... Alignment film on TFT substrate side, ORI2 ... CF Alignment film on substrate side, CT ... counter electrode (common electrode), CF ... color filter, LC ... liquid crystal, BM ... black matrix, POL1, POL2 ... polarizing plate, PUV ... Polarized ultraviolet light, LAL ... Long arc light source.
Claims (4)
前記配向膜に前記偏光の照射処理中に加熱処理を行い、
前記加熱処理は、100℃で行う第1の工程と、前記第1の工程の後に100℃〜150℃で行う第2の工程と、前記第2の工程の後に200℃〜220℃で行う第3の工程とを有していることを特徴とする液晶表示装置の製造方法。 One substrate having the first alignment film on the uppermost layer of the main surface on which the active element for pixel selection is formed, and the other substrate having the second alignment film on the uppermost layer of the main surface on which the color filter is formed And a liquid crystal display panel comprising a liquid crystal sealed between the first alignment film of the one substrate and the second alignment film of the other substrate, and at least the first alignment film A method of manufacturing a liquid crystal display device that performs an alignment treatment for imparting liquid crystal alignment control ability by irradiation of polarized light,
The alignment film is subjected to a heat treatment during the irradiation treatment of the polarized light ,
The heat treatment includes a first step performed at 100 ° C., a second step performed at 100 ° C. to 150 ° C. after the first step, and a second step performed at 200 ° C. to 220 ° C. after the second step. A process for producing a liquid crystal display device.
前記偏光の照射処理中の前記加熱処理の温度は、前記第1の配向膜の光分解反応を促進することが出来る温度から、前記第1の配向膜が架橋するのに必要な温度にまで上昇させることを特徴とする液晶表示装置の製造方法。 In claim 1,
The temperature of the heat treatment during the irradiation treatment of the polarized light rises from a temperature capable of promoting the photodecomposition reaction of the first alignment film to a temperature necessary for the first alignment film to crosslink. A manufacturing method of a liquid crystal display device characterized by comprising:
前記偏光の波長を前記偏光の照射処理中に長くすることを特徴とする液晶表示装置の製造方法。 In claim 1 or 2 ,
A method for manufacturing a liquid crystal display device, wherein the wavelength of the polarized light is lengthened during the irradiation treatment of the polarized light .
前記第1の工程において照射する前記偏光の波長が230〜270nmであり、前記第2の工程において照射する前記偏光の波長が270nm〜280nmであり、前記第3の工程において照射する前記偏光の波長が280〜330nmであることを特徴とする液晶表示装置の製造方法。 In any one of Claims 1 thru | or 3 ,
The wavelength of the polarized light irradiated in the first step is 230 to 270 nm, the wavelength of the polarized light irradiated in the second step is 270 nm to 280 nm, and the wavelength of the polarized light irradiated in the third step Is 280-330 nm, The manufacturing method of the liquid crystal display device characterized by the above-mentioned.
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| US10108050B2 (en) | 2014-02-26 | 2018-10-23 | Samsung Display Co., Ltd. | Photoalignment agent, liquid crystal display device including the same, and method of manufacturing the same |
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| JP5654228B2 (en) | 2009-11-13 | 2015-01-14 | 株式会社ジャパンディスプレイ | Liquid crystal display device and method of manufacturing liquid crystal display device |
| CN102289107A (en) * | 2011-07-01 | 2011-12-21 | 深圳市华星光电技术有限公司 | Device and method for making pretilt angle of liquid crystal panel |
| JP5205498B2 (en) * | 2011-08-08 | 2013-06-05 | 株式会社ジャパンディスプレイイースト | Light irradiation device |
| JP5821860B2 (en) * | 2013-01-21 | 2015-11-24 | ウシオ電機株式会社 | Polarized light irradiation device |
| CN106154647A (en) * | 2015-03-26 | 2016-11-23 | 鸿富锦精密工业(深圳)有限公司 | The manufacture method of display panels, display panels and display device |
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| JPH0553118A (en) * | 1991-08-29 | 1993-03-05 | Toshiba Corp | Production of liquid crystal oriented film |
| JPH10253963A (en) * | 1997-03-07 | 1998-09-25 | Hitachi Chem Co Ltd | Liquid crystal-oriented film, method for imparting liquid crystal-orienting capability, liquid crystal-holding substrate, production of liquid crystal-holding substrate, liquid crystal display element, production of liquid crystal display element, and material for liquid crystal-oriented film |
| JPH11142850A (en) * | 1997-11-05 | 1999-05-28 | Hitachi Ltd | Polarized light irradiation method and apparatus |
| JP2000319510A (en) * | 1999-05-14 | 2000-11-21 | Jsr Corp | Liquid crystal alignment agent and liquid crystal alignment treatment method |
| JP4900632B2 (en) * | 2000-08-30 | 2012-03-21 | Dic株式会社 | Photo-alignment film material, photo-alignment film and method for producing the same |
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