JP4893651B2 - Component mounting apparatus and mounting method - Google Patents
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Description
本発明は、帯状の樹脂シートに所定間隔で多数のICチップやそのパッケージと接合電極を含む配線パターンあるいは接合電極を含む配線パターンの少なくともいずれか一方が配設された帯状部品集合体から、樹脂シートにICチップやそのパッケージが配設されて成る部品あるいは接合電極を含む配線パターンが配設されて成る部品を切り出して各種基板に実装する部品実装装置及び実装方法に関するものである。 The present invention provides a resin from a belt-shaped component assembly in which at least one of a plurality of IC chips, a package thereof and a wiring pattern including bonding electrodes, or a wiring pattern including bonding electrodes is disposed on a band-shaped resin sheet at a predetermined interval. The present invention relates to a component mounting apparatus and a mounting method for cutting out a component in which an IC chip and its package are disposed on a sheet, or a component in which a wiring pattern including a bonding electrode is disposed and mounting it on various substrates.
上記樹脂シートにICチップやそのパッケージと接合電極を含む配線パターンが配設されて成る部品4としては、図18(a)に示すCOF(Chip On Film)部品4Aのように、樹脂シート7の少なくとも片面に配設された接合電極9を有する配線パターン8上にICチップ10を実装して成り、片面に接合電極9及びICチップ10を有しているものや、図18(b)に示すTCP(Tape Carried Package)部品4BやTAB(Tape Automated Bonding)部品のように、樹脂シート7の接合電極9を有する配線パターン8が設けられている面とは反対側の面にICチップ10やそのパッケージが配設されたものがある。また、樹脂シートに接合電極を含む配線パターンを配設されてなる部品としては、図18(c)に示すFPC(Flexible Printed Circuit)基板等のフレキシブル基板のように、樹脂シート7の少なくとも片面に接合電極9を含む配線パターン8を配設されたものがある。 As a component 4 in which a wiring pattern including an IC chip, its package and a bonding electrode is disposed on the resin sheet, a resin sheet 7 as shown in a COF (Chip On Film) component 4A shown in FIG. An IC chip 10 is mounted on a wiring pattern 8 having a bonding electrode 9 disposed on at least one surface, and the bonding electrode 9 and the IC chip 10 are mounted on one surface, as shown in FIG. Like the TCP (Tape Carried Package) component 4B and the TAB (Tape Automated Bonding) component, the IC chip 10 and its surface on the surface opposite to the surface on which the wiring pattern 8 having the bonding electrode 9 of the resin sheet 7 is provided. Some packages are arranged. Further, as a component in which a wiring pattern including a bonding electrode is provided on a resin sheet, a flexible substrate such as an FPC (Flexible Printed Circuit) substrate shown in FIG. 18C is provided on at least one surface of the resin sheet 7. Some are provided with a wiring pattern 8 including a bonding electrode 9.
これらの部品を基板に実装する従来の部品実装装置においては、帯状部品集合体をその部品の配置間隔でピッチ送りし、所定の部品切り出し位置で、打抜装置により樹脂シートを配線パターンとともに切断して各部品を切り出し、切り出した部品を受け渡し位置に移載し、受け渡し位置上の部品を実装ヘッドで保持し、保持している部品を実装ヘッドにて所定位置に位置決めされている基板の予め異方性導電材が貼付けられている所定の実装位置に仮圧着して装着し、その後部品の接合部位を仮圧着よりも高い温度と圧力で加熱加圧して本圧着することで、部品の接合電極と基板の接合電極を接合し、部品を基板に実装している(例えば、特許文献1参照)。 In a conventional component mounting apparatus that mounts these components on a board, the strip-shaped component assembly is pitch-fed at the interval between the components, and the resin sheet is cut together with the wiring pattern by a punching device at a predetermined component cutting position. Each part is cut out, transferred to the delivery position, the part at the delivery position is held by the mounting head, and the held part is different from the substrate positioned at the predetermined position by the mounting head in advance. Bonding electrodes of components by temporarily pressing and mounting at a predetermined mounting position where an anisotropic conductive material is affixed, and then heat-pressing the bonding portion of the component at a temperature and pressure higher than those of the temporary pressing And the bonding electrode of the substrate are bonded, and the component is mounted on the substrate (for example, see Patent Document 1).
帯状部品集合体から各部品を切り出す工程においては、従来、上型と下型にて構成された打抜金型により打ち抜き、打ち抜いた部品をノックアウトピン(パンチ)で持ち上げ、移載用ノズルにて吸着して受け渡し位置に移載するようにしていたが、ノックアウトピンによる持ち上げ時に部品が位置ずれして移載用ノズルによる吸着が適正に行われないことがあるという問題があったため、上記特許文献1の部品実装装置においては、打抜金型である貫通穴を有する下型とパンチにて打ち抜き、打ち抜いた部品を下方から移載用ノズルにて吸着して受け取り、受け渡し位置に移載するようにしている。 In the process of cutting out each part from the strip-shaped part assembly, conventionally, the punched part is composed of an upper die and a lower die, the punched part is lifted with a knockout pin (punch), and then transferred with a transfer nozzle. Although it was designed to be picked up and transferred to the delivery position, there was a problem that the parts were displaced when picked up by the knockout pin, and there was a problem that the picking up by the transfer nozzle might not be performed properly. In the component mounting apparatus of 1, the punching die is punched with a lower die having a through hole and a punch, and the punched component is picked up by a transfer nozzle from below and received and transferred to a delivery position. I have to.
なお、上記部品の製造に関連してレーザを適用したものとして、TAB部品を製造するためのTABテープの製造工程において、ポリイミドの両面に銅箔を積層したテープの幅方向両側部のスプロケットホールは金型で打ち抜き形成し、幅方向中間部のスプロケットホールは、表裏の銅箔を接続するビアホールの形成と同様に、片面側からUV−YAGレーザにてスプロケットホールの外形に沿って外堀状に裏面側の銅箔を残した状態の溝を形成し、その後反対側の面から銅箔をエッチングして外堀状の溝の底面を除去し、外堀状の溝の内側部分を脱落させることで形成する技術が知られている(例えば、特許文献2参照)。 In addition, in the manufacturing process of the TAB tape for manufacturing the TAB component, the sprocket holes on both sides in the width direction of the tape in which copper foil is laminated on both sides of the polyimide are used as the laser applied in relation to the manufacturing of the above component. The sprocket hole in the middle in the width direction is punched with a mold, and the back surface is shaped like an outer moat along the outer shape of the sprocket hole with a UV-YAG laser from one side, similar to the formation of the via hole that connects the copper foils on the front and back sides. Form a groove with the copper foil on the side left, then etch the copper foil from the opposite surface to remove the bottom surface of the outer moat-shaped groove, and drop off the inner part of the outer moat-shaped groove A technique is known (for example, refer to Patent Document 2).
また、BGA(Ball Grid Array )用のTABテープの製造工程において、樹脂シート(ポリイミドフィルム)にガルバノCO2 レーザにてスルーホールを形成することが知られている(例えば、特許文献3参照)。
ところで、上記特許文献1のように、銅箔などの金属の配線パターンを有するポリイミドなどの樹脂シートを金型にて打ち抜いて部品を切り出す方法では、バリ等が発生してその破片等が金型に堆積するため、比較的短時間で金型のクリーニングが必要になり、生産性を低下させる一因となっていた。特に、近年は樹脂シート及びその上に形成される配線パターンの薄型化が進行しているため、上型若しくはパンチと下型との間のせん断部のクリアランスを非常に小さい寸法に設定する必要があり、その結果金型のクリーニングがさらに頻繁に必要となって生産性を低下させるという問題があった。 By the way, in the method of punching out a resin sheet made of polyimide or the like having a metal wiring pattern such as copper foil with a mold as in the above-mentioned Patent Document 1, burrs or the like are generated and the fragments are Therefore, it is necessary to clean the mold in a relatively short time, which is a cause of lowering productivity. In particular, since the resin sheet and the wiring pattern formed thereon have been made thinner in recent years, it is necessary to set the clearance of the shearing part between the upper die or the punch and the lower die to a very small dimension. As a result, there has been a problem that the mold needs to be cleaned more frequently and the productivity is lowered.
その一方で、近年は部品を実装する基板における実装部位(デイスプレイパネル用の基板の場合、表示部の1又は複数の側縁部の「額縁部」と呼ばれる部位に接合電極が配列されている。)の幅寸法、すなわち接合電極の個々の端子の長手方向である実装部位の幅寸法が小さくなるとともに、配線パターン及び接合電極の細線化と狭ピッチ化の進行が顕著であるため、部品の切り出し寸法の精度向上が求められている。そのため、金型による打ち抜き以外に、生産性を向上できる他の適当な切り出し方法がなかなか見つからないというのが現状であった。 On the other hand, in recent years, bonding electrodes are arranged in a portion called a “frame portion” of one or a plurality of side edge portions of the display portion in the case of a mounting portion on a substrate on which a component is mounted (in the case of a display panel substrate). ), That is, the width dimension of the mounting portion, which is the longitudinal direction of each terminal of the bonding electrode, and the progress of thinning and narrowing of the wiring pattern and bonding electrode is remarkable. There is a need for improved dimensional accuracy. For this reason, it has been difficult to find other suitable cutting methods that can improve productivity other than punching with a mold.
例えば、YAGレーザや、特許文献2に記載されているUV−YAGレーザや、特許文献3に記載されているCO2 レーザにて部品を切り出すことが考えられるが、部品を切り出すための切断部が、樹脂シートの片面に断続的に銅箔の接合電極が配列されている構成であるため、樹脂シートと接合電極の両方を精度良く切断することができないという問題があった。すなわち、上記のように接合電極が細線化・狭ピッチ化しているため、接合電極の切断部近傍が大きく溶損したり、ひずんだり、反り返ったりして適正な接合が不可能な状態になったり、樹脂シートの切断部近傍が大きく溶損したり、黒こげ状態になったりするか、逆に接合電極と樹脂シートの何れかが切断されない状態になってしまうという問題があった。一般に、基本波のYAGレーザ(波長:1064nm)では、金属系の材料の切断には適しているが、樹脂シートの切断が不可能であり、CO2 レーザ(波長:10600nm)では主として熱加工となるので樹脂系の材料の切断には適しているが、接合電極が焼け飛んで精度のよい切断ができないという課題がある。また、主としてケミカル加工となるUV−YAGレーザ(波長:355nm)を適用した特許文献2は、両面の全面が銅箔で覆われたポリイミドの銅箔の表面からレーザ光を照射して連続した表面である銅箔とポリイミドを溝状に加工するものであるが、表面に断続的に接合電極を有する樹脂シートの切断に適用すると、確実に切断できないか、接合電極に異常が発生して適正な接合を確保できるような切断は不可能であるという問題が発生した。 For example, it is conceivable to cut out a part with a YAG laser, a UV-YAG laser described in Patent Document 2, or a CO2 laser described in Patent Document 3, but a cutting part for cutting out the part is Since the copper foil bonding electrodes are intermittently arranged on one side of the resin sheet, there is a problem that both the resin sheet and the bonding electrode cannot be cut with high accuracy. That is, since the bonding electrode is thinned and narrowed as described above, the vicinity of the cutting portion of the bonding electrode is greatly melted, distorted, warped, and proper bonding becomes impossible, There is a problem that the vicinity of the cut portion of the resin sheet is greatly melted or blackened, or conversely, either the bonding electrode or the resin sheet is not cut. In general, a fundamental wave YAG laser (wavelength: 1064 nm) is suitable for cutting a metal-based material, but a resin sheet cannot be cut, and a CO2 laser (wavelength: 10600 nm) is mainly thermal processing. Therefore, it is suitable for cutting a resin-based material, but there is a problem that the bonding electrode burns out and cannot be cut accurately. In addition, Patent Document 2 to which a UV-YAG laser (wavelength: 355 nm) mainly used for chemical processing is applied is a continuous surface by irradiating laser light from the surface of a polyimide copper foil whose entire surfaces are covered with copper foil. The copper foil and polyimide are processed into a groove shape, but when applied to the cutting of a resin sheet having a joining electrode intermittently on the surface, it is impossible to cut reliably or an abnormality occurs in the joining electrode and the proper There was a problem that it was impossible to cut to ensure the joining.
本発明は、上記従来の問題に鑑み、樹脂シートにICチップやそのパッケージが配設されている部品をその帯状部品集合体から、生産性良くかつ精度良く切り出して基板上に実装することができる部品実装装置及び実装方法を提供することを目的とする。 In view of the above-described conventional problems, the present invention can cut out a component in which an IC chip and its package are arranged on a resin sheet from the band-shaped component assembly with high productivity and accuracy and mount it on a substrate. An object is to provide a component mounting apparatus and a mounting method.
本発明の部品実装装置は、樹脂シートにICチップやそのパッケージと接合電極を含む配線パターンあるいは接合電極を含む配線パターンの少なくともいずれか一方が配設された部品が多数、帯状の樹脂シートに連続的に配設された帯状部品集合体を間欠的に送給する部品送給部と、樹脂シートの配線パターン配設側とは反対側の表面から780nm以下の波長のレーザを照射し、接合電極部を含む部品の外周を切断して部品を切り出すレーザ切断部と、切り出した部品の接合電極を基板の接合電極に位置合わせして基板に部品を装着する実装部とを備えたものである。 The component mounting apparatus according to the present invention has a large number of components in which at least one of an IC chip, a wiring pattern including a package thereof and a bonding electrode, or a wiring pattern including a bonding electrode is disposed on a resin sheet. A component feeding section for intermittently feeding the belt-shaped component assembly arranged on the surface, and a laser having a wavelength of 780 nm or less from the surface opposite to the wiring pattern placement side of the resin sheet, A laser cutting unit that cuts the outer periphery of the component including the part and cuts out the component, and a mounting unit that aligns the bonding electrode of the cut-out component with the bonding electrode of the substrate and mounts the component on the substrate.
この構成によれば、帯状部品集合体からレーザ照射によって各部品を切り出して基板に装着することができ、金型で打ち抜いて部品を切り出す場合のように金型のクリーニングを頻繁に行う必要がないので、生産性の高い部品実装を実現でき、かつレーザ照射による切り出しに当たって、配線パターン配設側とは反対側の樹脂シートの表面から780nm以下のケミカル加工が主となる短波長のレーザを照射することにより、CO2 レーザ(波長:10600nm)のように波長の長いレーザによる熱加工を主とした切断加工でないことにより、樹脂シートが大きく溶損したり焼け焦げたりする一方で配線パターンの接合電極が切断できないというようなことがなく、また面的に連続している樹脂シートの表面側からレーザを照射することで、樹脂シートを連続的に精度良く切断することができるとともに、その間に樹脂シートの裏面側に断続的に存在している金属箔から成る接合電極に、レーザ切断に先立ってレーザーが照射されている部分より断続的に存在している金属箔からなる接合電極に加工時の熱が伝熱した状態で、接合電極にレーザが照射されることで、切断できなかったり、逆に接合に支障を来たすような溶損や歪や反り返りを生じることなく、確実にかつ精度良く切断することができる。因みに、接合電極の配置面側からレーザを照射すると、樹脂シート単独の部位で適切に切断できるような出力と移動速度でレーザを照射すると、金属箔から成る接合電極の配置部ではレーザがその表面で反射されて切断することができなくなり、逆に接合電極の配置部を確実に切断できるような出力と移動速度でレーザを照射すると、樹脂シート単独の部位で大きく溶損したり黒焦げ状態になったりするため寸法精度の良い切断加工を行うことが不可能である。 According to this configuration, each component can be cut out from the belt-like component assembly by laser irradiation and mounted on the substrate, and there is no need to frequently clean the die as in the case of punching out with a die. Therefore, high-productivity component mounting can be realized, and when cutting out by laser irradiation, a short wavelength laser mainly for chemical processing of 780 nm or less is irradiated from the surface of the resin sheet opposite to the wiring pattern arrangement side. As a result, the resin sheet is largely melted or burnt while the bonding electrode of the wiring pattern cannot be cut because it is not a cutting process mainly performed by a laser having a long wavelength such as a CO2 laser (wavelength: 10600 nm). By irradiating the laser from the surface side of the resin sheet that is not continuous, The resin sheet can be continuously and accurately cut, and the laser is irradiated to the joining electrode made of a metal foil intermittently existing on the back side of the resin sheet before the laser cutting. The joint electrode made of metal foil that is intermittently present from the part is irradiated with laser while the heat is transferred to the joint electrode. It can cut reliably and accurately without causing such melting damage, distortion, and warping. By the way, when the laser is irradiated at an output and moving speed that can be appropriately cut at the part of the resin sheet alone when the laser is irradiated from the side where the bonding electrode is disposed, the laser is irradiated on the surface of the bonding electrode arrangement part made of metal foil. If the laser beam is irradiated with an output and moving speed that can be reliably cut off the arrangement part of the bonding electrode, the resin sheet alone may be greatly melted or burnt. Therefore, it is impossible to perform cutting with high dimensional accuracy.
また、部品の樹脂シートの厚さは50μm以下、接合電極を含む配線パターンを形成する金属箔の厚さは10μm以下であるのが好適である。すなわち、近年、樹脂シートの厚さが50μm以下、金属箔の厚さが10μm以下と、ますます薄くなってきたことにより、上記780nm以下の波長のレーザ照射によって上記作用効果がより効果的に発揮されて、生産性が高く精度の良い切断が安定して実現される。 The thickness of the resin sheet of the component is preferably 50 μm or less, and the thickness of the metal foil forming the wiring pattern including the bonding electrode is preferably 10 μm or less. That is, in recent years, the thickness of the resin sheet is 50 μm or less and the thickness of the metal foil is 10 μm or less, and the above-mentioned effects are more effectively exhibited by laser irradiation with a wavelength of 780 nm or less. Thus, cutting with high productivity and high accuracy can be realized stably.
また、レーザ切断部は、帯状部品集合体の切り出すべき部品の部位を支持するステージと、ステージの上部に配設されたレーザ照射手段と、ステージの透光部を通して部品に設けられた位置マークを認識する部品位置検出手段とを備え、部品位置検出手段の検出結果に基づいてレーザ照射手段による切断位置を制御すると、部品を高い位置精度で切り出すことができ、接合電極の寸法精度を高くできるため、基板側の接合電極が配置されている部位の幅寸法が小さくても、高い信頼性をもって確実に接合することができる。 The laser cutting unit also includes a stage that supports a part portion to be cut out of the band-shaped component assembly, laser irradiation means disposed on the upper part of the stage, and a position mark provided on the part through the light transmitting part of the stage. If the cutting position by the laser irradiation unit is controlled based on the detection result of the component position detecting unit, the component can be cut out with high positional accuracy and the dimensional accuracy of the bonding electrode can be increased. Even if the width dimension of the portion where the substrate-side bonding electrode is disposed is small, the bonding can be reliably performed with high reliability.
また、レーザ切断部による部品の外周の切り出し形状は方形形状であり、このレーザ切断部は、帯状部品集合体の移動方向に第1と第2のレーザ照射手段が配設され、第1のレーザ照射手段は部品の帯状部品集合体の長手方向の両側縁を切断し、第2のレーザ照射手段は部品の帯状部品集合体の長手方向と直交する両側縁における接合電極部を切断すると、部品の四周の互いに平行な2辺をそれぞれ別々にレーザ照射手段にて切断することで、より短時間で部品を切り出すことができる。 The cut-out shape of the outer periphery of the component by the laser cutting unit is a square shape, and the laser cutting unit is provided with first and second laser irradiation means in the moving direction of the band-shaped component assembly, and the first laser The irradiation means cuts both side edges in the longitudinal direction of the belt-like component assembly of the component, and the second laser irradiation means cuts the bonding electrode portion on both side edges orthogonal to the longitudinal direction of the belt-like component assembly of the parts. By cutting the two parallel sides of the four circumferences separately with the laser irradiation means, the component can be cut out in a shorter time.
また、本発明の部品実装方法は、樹脂シートにICチップやそのパッケージと接合電極を含む配線パターンあるいは接合電極を含む配線パターンの少なくともいずれか一方が配設された部品が多数、帯状の樹脂シートに連続的に配設された帯状部品集合体を間欠的に送給する部品送給工程と、樹脂シートの配線パターン配設側とは反対側の表面から780nm以下の波長のレーザを照射し、接合電極部を含む部品の外周を切断して部品を切り出す部品切り出し工程と、切り出した部品の接合電極を基板の接合電極に位置合わせして基板に部品を装着する実装工程とを有するものである。 Further, the component mounting method of the present invention includes a belt-shaped resin sheet in which a resin sheet is provided with at least one of a wiring pattern including an IC chip, a package thereof and a bonding electrode, or a wiring pattern including a bonding electrode. Irradiating a laser having a wavelength of 780 nm or less from the surface opposite to the wiring pattern placement side of the resin sheet, the component feeding step of intermittently feeding the strip-shaped component assembly continuously disposed on It has a component cutting-out process for cutting out the outer periphery of the component including the bonding electrode portion and cutting out the component, and a mounting process for aligning the bonding electrode of the cut-out component with the bonding electrode of the substrate and mounting the component on the substrate .
この構成によれば、上記のように帯状部品集合体からレーザ照射によって各部品を切り出して基板に装着するので、金型で打ち抜いて部品を切り出す場合に比して金型による打ち抜き時のバリ等が発生せず、生産性の良い部品実装を実現でき、かつ配線パターン配設側とは反対側の樹脂シートの表面から780nm以下の短波長のレーザを照射して部品を切り出すので、面的に連続している樹脂シートの表面側からのレーザ照射にて樹脂シートを連続的に精度良く切断することができるとともに裏面側に断続的に存在している金属箔から成る接合電極に、連続している樹脂シートのレーザ加工時の熱が伝熱され、その状態で接合電極をレーザ照射にて切断することで、確実にかつ精度良く切断することができる。 According to this configuration, as described above, each component is cut out from the belt-shaped component assembly by laser irradiation and mounted on the substrate, so that, for example, burrs when punching with a die are cut out as compared with the case where the component is cut out with a die Can be mounted with good productivity, and the part is cut out by irradiating a laser with a short wavelength of 780 nm or less from the surface of the resin sheet opposite to the wiring pattern arrangement side. The resin sheet can be continuously and accurately cut by laser irradiation from the front surface side of the continuous resin sheet, and continuously on the bonding electrode made of a metal foil present intermittently on the back surface side. Heat at the time of laser processing of the resin sheet is transferred, and the bonding electrode is cut by laser irradiation in this state, so that the resin sheet can be cut reliably and accurately.
また、部品の樹脂シートの厚さは50μm以下、接合電極を含む配線パターンを形成する金属箔の厚さは10μm以下であると、上記作用効果がより効果的に発揮されて、生産性が高く精度の良い切断が安定して実現される。 In addition, when the thickness of the resin sheet of the component is 50 μm or less and the thickness of the metal foil forming the wiring pattern including the bonding electrode is 10 μm or less, the above-described effects are more effectively exhibited and the productivity is high. Accurate cutting can be realized stably.
また、帯状部品集合体の切り出すべき部品の部位をステージ上に支持し、ステージの透光部を通して部品に設けられた位置マークを認識して部品位置を検出し、検出した部品位置に基づいてレーザ照射位置を制御して切断すると、認識時の部品の位置とレーザ照射によるレーザ加工時の部品の位置を同じにすることができるので、部品を高い位置精度で切り出すことができ、その接合電極の寸法精度が高いため、基板側の接合電極が配置されている部位の幅寸法が小さくても、高い信頼性をもって確実に接合することができる。 In addition, the part part to be cut out of the belt-like part assembly is supported on the stage, the position mark provided on the part is recognized through the light transmitting part of the stage, the part position is detected, and the laser is based on the detected part position. When cutting by controlling the irradiation position, the position of the part at the time of recognition and the position of the part at the time of laser processing by laser irradiation can be made the same, so the part can be cut out with high positional accuracy. Since the dimensional accuracy is high, even if the width dimension of the portion where the bonding electrode on the substrate side is disposed is small, the bonding can be reliably performed with high reliability.
また、レーザ照射手段による部品の外周のレーザの照射による切り出し形状は方形形状であり、帯状部品集合体の移動方向に第1と第2のレーザ照射手段を配設し、部品の帯状部品集合体の長手方向の両側縁を第1のレーザ照射手段にて切断し、部品の帯状部品集合体の長手方向と直交する両側縁における接合電極部を第2のレーザ照射手段にて切断すると、部品の四周の互いに平行な2辺をそれぞれ別々にレーザ照射手段にて切断することで、より短時間で部品を切り出すことができる。 Further, the cut-out shape of the outer periphery of the component by the laser irradiation means by the laser irradiation is a square shape, the first and second laser irradiation means are arranged in the moving direction of the band-shaped component assembly, and the band-shaped component assembly of the component When both side edges in the longitudinal direction are cut by the first laser irradiating means, and the joining electrode portions on both side edges orthogonal to the longitudinal direction of the band-like component assembly of the parts are cut by the second laser irradiating means, By cutting the two parallel sides of the four circumferences separately with the laser irradiation means, the component can be cut out in a shorter time.
本発明の部品実装装置及び実装方法によれば、帯状部品集合体からレーザ照射によって各部品を切り出して基板に装着するので、金型で打ち抜く場合のように頻繁なクリーニングが不要となって生産性の高い部品実装を実現でき、かつ面的に連続している樹脂シートの表面側から780nm以下の短波長のレーザを照射することで、樹脂シートを連続的に精度良く切断でき、かつ裏面側に断続的に存在している接合電極が樹脂シートを介して加熱された状態でレーザを照射して接合電極を切断するので、樹脂シートと接合電極を確実にかつ精度良く切断することができる。 According to the component mounting apparatus and the mounting method of the present invention, since each component is cut out from the strip-shaped component assembly by laser irradiation and mounted on the substrate, frequent cleaning is unnecessary as in the case of punching with a mold. High-precision component mounting is possible, and by irradiating a short-wavelength laser of 780 nm or less from the surface side of the resin sheet that is continuously continuous, the resin sheet can be cut continuously and accurately, and the back surface side Since the joining electrode that is intermittently present is irradiated with laser in a state where the joining electrode is heated via the resin sheet, the joining electrode is cut, so that the resin sheet and the joining electrode can be cut reliably and accurately.
以下、本発明を、液晶表示パネルのガラス基板の側縁部に部品を実装する部品実装装置に適用した一実施形態について、図1〜図12を参照して説明する。 Hereinafter, an embodiment in which the present invention is applied to a component mounting apparatus that mounts components on a side edge portion of a glass substrate of a liquid crystal display panel will be described with reference to FIGS.
図1〜図7において、本実施形態の部品実装装置は、ガラス基板などの基板1を搬入する基板搬入装置2と、基板搬入装置2から基板1を受け取って部品実装動作に伴う移動及び位置決めを行う移動装置3と、移動装置3にて位置決めされた基板1の側縁部に部品4を装着する実装装置5と、部品を実装された基板1を移動装置3から受け取って搬出する基板搬出装置6を備えている。 1 to 7, the component mounting apparatus according to the present embodiment includes a substrate carry-in device 2 that carries a substrate 1 such as a glass substrate, and the movement and positioning associated with the component mounting operation by receiving the substrate 1 from the substrate carry-in device 2. The moving device 3 to be performed, the mounting device 5 for mounting the component 4 on the side edge portion of the substrate 1 positioned by the moving device 3, and the substrate unloading device for receiving and unloading the substrate 1 mounted with the component from the moving device 3 6 is provided.
本実施形態における部品4は、図5、図6に示すように、樹脂シート7の少なくとも片面に接合電極9を有する配線パターン8が形成されるとともにICチップ10が実装されてなるCOF(Chip On Film)であり、樹脂シート7の片面に接合電極9及びICチップ10が配設されている。この部品4が多数、長尺の帯状で両側に送り用のスプロケットホール12aを有する帯状樹脂シート12に所定ピッチ間隔で連続的に配設された帯状部品集合体11の形態で製造され、各部品4を切り出すとき帯状樹脂シート12より樹脂シート7が切り分けられる。帯状部品集合体11はリール13(図1参照)に巻回されて供給され、図6に示すように、部品4の外周を取り囲む切断線14(制御上の切断位置のデータである)に沿って切断することで、各部品4を切り出すように構成されている。 As shown in FIGS. 5 and 6, the component 4 in this embodiment is a COF (Chip On) in which a wiring pattern 8 having bonding electrodes 9 is formed on at least one surface of a resin sheet 7 and an IC chip 10 is mounted. The bonding electrode 9 and the IC chip 10 are disposed on one side of the resin sheet 7. A large number of these parts 4 are manufactured in the form of a strip-shaped component assembly 11 continuously disposed at a predetermined pitch interval on a strip-shaped resin sheet 12 having long strips and sprocket holes 12a for feeding on both sides. When 4 is cut out, the resin sheet 7 is cut from the belt-shaped resin sheet 12. The strip-shaped component assembly 11 is supplied by being wound around a reel 13 (see FIG. 1), and as shown in FIG. 6, along a cutting line 14 (data of a cutting position for control) surrounding the outer periphery of the component 4. Each component 4 is cut out by cutting.
また、四周の切断線14のうち、帯状樹脂シート12の長手方向に沿う一対の切断線14aは少なくとも樹脂シート7のみを切断し、帯状樹脂シート12の幅方向(長手方向に対して直交する方向)に沿う一対の切断線14bは樹脂シート7とその片面に断続的に多数存在する接合電極9を切断するものである。さらに、一対の切断線14bのうちの一方で切断される接合電極9は基板1の接合電極に接合される出力側の接合電極9aで、他方で切断される接合電極9は回路基板15(図17参照)の接合電極に接合される入力側の接合電極9bである。 Of the four cutting lines 14, the pair of cutting lines 14 a along the longitudinal direction of the strip-shaped resin sheet 12 cuts at least the resin sheet 7, and the width direction of the strip-shaped resin sheet 12 (direction orthogonal to the longitudinal direction). ) Along the pair of cutting lines 14b cut the resin sheet 7 and the joining electrodes 9 that are intermittently present on one side thereof. Further, the joining electrode 9 cut at one of the pair of cutting lines 14b is an output-side joining electrode 9a joined to the joining electrode of the substrate 1, and the joining electrode 9 cut at the other is the circuit board 15 (FIG. 17), the input-side joining electrode 9b to be joined to the joining electrode.
図17(a)に示すように、本実施形態の液晶表示パネルの基板1には、隣り合う2辺に対応して液晶表示パネルのソース側とゲート側をそれぞれ駆動制御する回路基板15が配設されており、基板1の隣り合う2つの側縁部に配設された接合電極にそれぞれ部品4の出力側の接合電極9aが接合され、かつ各部品4の入力側の接合電極9bが回路基板15の接合電極に接合されている。なお、図17(b)に示すように、部品4の接合電極9aと基板1の接合電極(実装部位)1a、及び部品4の接合電極9bと回路基板15の接合電極15aは、異方性導電材(ACF)16を介して電気的に接続するとともに機械的に固定するように接合されている。 As shown in FIG. 17A, the substrate 1 of the liquid crystal display panel of the present embodiment is provided with a circuit board 15 for driving and controlling the source side and the gate side of the liquid crystal display panel corresponding to two adjacent sides. The bonding electrode 9a on the output side of the component 4 is bonded to the bonding electrode disposed on the two adjacent side edges of the substrate 1, and the bonding electrode 9b on the input side of each component 4 is connected to the circuit. Bonded to the bonding electrode of the substrate 15. As shown in FIG. 17B, the bonding electrode 9a of the component 4 and the bonding electrode (mounting part) 1a of the substrate 1, and the bonding electrode 9b of the component 4 and the bonding electrode 15a of the circuit board 15 are anisotropic. It is joined so as to be electrically connected and mechanically fixed through the conductive material (ACF) 16.
また、図7に示すように、部品4の樹脂シート7は、厚さTが50μm以下、具体例としては38μmのポリイミドからなり、配線パターン8及びその配線パターンを構成する接合電極9は、厚さtが10μm以下、具体例としては8μmの銅箔から成っている。また、接合電極9の配列ピッチPは、出力側の接合電極9aで100μm以下、具体例としては70μmピッチであり、出力側の接合電極9bで300〜500μm程度である。 Further, as shown in FIG. 7, the resin sheet 7 of the component 4 is made of polyimide having a thickness T of 50 μm or less, specifically 38 μm, and the wiring pattern 8 and the bonding electrode 9 constituting the wiring pattern are thick. The thickness t is 10 μm or less, and a specific example is made of 8 μm copper foil. The arrangement pitch P of the bonding electrodes 9 is 100 μm or less for the output-side bonding electrodes 9a, specifically 70 μm pitch, and about 300 to 500 μm for the output-side bonding electrodes 9b.
帯状部品集合体11から上記のように各部品を4を切り出して基板1に実装する実装装置5は、図1、図2に示すように、リール13から帯状部品集合体11を間欠的に送給する部品送給部21と、接合電極9を含む部品4の外周を制御上の切断位置データである切断線14に沿って切断して部品4を切り出すレーザ切断部22と、切り出した部品4の接合電極9aを基板1の接合電極1aに位置合わせてして基板1に部品4を装着する実装部23とを備えている。 As shown in FIGS. 1 and 2, the mounting apparatus 5 that cuts out each component 4 from the strip-shaped component assembly 11 and mounts it on the substrate 1 intermittently sends the strip-shaped component assembly 11 from the reel 13 as shown in FIGS. 1 and 2. A feeding part 21 to be fed, a laser cutting part 22 that cuts the outer periphery of the part 4 including the bonding electrode 9 along a cutting line 14 that is cutting position data for control, and cuts out the part 4; The bonding electrode 9a is aligned with the bonding electrode 1a of the substrate 1 and a mounting portion 23 for mounting the component 4 on the substrate 1 is provided.
部品送給部21は、リール13から引き出した帯状部品集合体11を、ガイドローラ24を経てテンション機構部25に通し、所定のテンションが負荷された状態にして、ガイドローラ26、ガイド部材27を介してレーザ切断部22に送給し、このレーザ切断部22にて部品4を切り出された後の帯状樹脂シート12を、スプロケットホール12aに係合する送り歯を有する送りローラ28にて部品4の配設ピッチに応じて間欠的に送り出し、ガイドローラ29aと排出ローラ29bを介して廃棄ボックス30に廃棄するように構成されている。テンション機構部25は、移動自在に支持されると共に重力やバネ等にて一方向に移動付勢されたテンションローラ25aと、そのテンションローラ25aの移動付勢方向と反対側に、互いに間隔をあけて並列して配設した一対のガイドローラ25bとから成り、帯状部品集合体11を一対のガイドローラ25b間でテンションローラ25aに略180°巻回させ、帯状部品集合体11に付勢力の約半分のテンションが負荷されるように構成されている。 The component feeding unit 21 passes the belt-shaped component assembly 11 pulled out from the reel 13 through the guide roller 24 and the tension mechanism unit 25 so that a predetermined tension is applied to the guide roller 26 and the guide member 27. The belt-shaped resin sheet 12 after the component 4 is cut out by the laser cutting unit 22 is fed to the component 4 by the feed roller 28 having feed teeth that engage with the sprocket holes 12a. According to the arrangement pitch, the paper is intermittently sent out and discarded into the disposal box 30 via the guide roller 29a and the discharge roller 29b. The tension mechanism unit 25 is movably supported and is urged to move in one direction by gravity, a spring, or the like, and is spaced apart from the opposite side of the tension roller 25a. The belt-shaped component assembly 11 is wound approximately 180 ° around the tension roller 25a between the pair of guide rollers 25b, and the belt-shaped component assembly 11 is reduced by about a biasing force. Half tension is applied.
レーザ切断部22は、図3、図4に詳細に示すように、樹脂シート7の配線パターン8を配設した側とは反対側の、断続的な配線パターン8に対して連続的な樹脂シート7表面に向けて上方から780nm以下の波長のレーザ、具体的には532nmの波長のグリーンレーザを照射するように、レーザ照射手段31が上部に配設されている。このレーザ照射手段31の下部に対向するように、上記帯状部品集合体11を支持するステージ32が配設されている。このステージ32は、透明な石英板等にて構成されるとともに、その下方に部品位置認識手段としての認識カメラ33が配置され、部品4に設けられている位置マーク(図示せず)をステージ32を通して画像認識して部品4の位置を精度良く検出するように構成されている。なお、ステージ32を通して位置マーク(図示せず)を認識できればよいので、ステージ32は必ずしも透明でなくても、位置マーク(図示せず)の配設部位に開口を設けたものでも良い。また、ステージ32の周囲の上部には画像認識するための照明手段34が配設されている。 As shown in detail in FIGS. 3 and 4, the laser cutting unit 22 is a resin sheet that is continuous with the intermittent wiring pattern 8 on the side opposite to the side where the wiring pattern 8 of the resin sheet 7 is provided. A laser irradiation means 31 is disposed on the upper side so as to irradiate a laser having a wavelength of 780 nm or less, specifically a green laser having a wavelength of 532 nm, from above toward the surface. A stage 32 that supports the band-shaped component assembly 11 is disposed so as to face the lower portion of the laser irradiation means 31. The stage 32 is composed of a transparent quartz plate or the like, and a recognition camera 33 as a part position recognition unit is disposed below the stage 32, and a position mark (not shown) provided on the part 4 is marked with the stage 32. The position of the component 4 is detected with high accuracy through image recognition. Since the position mark (not shown) may be recognized through the stage 32, the stage 32 may not necessarily be transparent, but may be provided with an opening at a position mark (not shown). An illumination means 34 for recognizing an image is disposed at the upper part around the stage 32.
レーザ照射手段31は、認識カメラ33により得られた画像データから求めた部品4の位置検出結果に基づいてレーザ35を走査するように構成されている。これにより、図6に示すように、レーザ35が所期の切断線14に沿って位置精度良く走査され、接合電極9a、9bが寸法精度良く切断されて、図5に示すように、部品4が切り出される。その結果、図17(b)に示すように、基板1の接合電極(実装部位)1aが配設されている側縁部(「額縁部」と呼ばれることがある)の幅寸法が小さく、基板1の表示部側の立ち上がり側縁1bと部品4の対向側縁との間の隙間dが、例えば0.3mmというような小さい寸法に設定されている場合でも安定して確実に接合することができる。また、レーザ35による切断時に、その切断部位にエアをブローするともに吸引して排出する手段(図示せず)を設けることで、切断中に発生することのあるすすなどが部品4に付着するのを防止することができる。また、レーザ35がグリーンレーザであるため、切断時に各部品4にその履歴などの各種データの印字を行い、基板1に実装された状態の部品4の履歴をトレースできるようにすることもできる。 The laser irradiation means 31 is configured to scan the laser 35 based on the position detection result of the component 4 obtained from the image data obtained by the recognition camera 33. As a result, as shown in FIG. 6, the laser 35 is scanned along the intended cutting line 14 with high positional accuracy, and the bonding electrodes 9a and 9b are cut with high dimensional accuracy. As shown in FIG. Is cut out. As a result, as shown in FIG. 17B, the width dimension of the side edge portion (sometimes referred to as “frame portion”) where the bonding electrode (mounting portion) 1a of the substrate 1 is disposed is small, and the substrate Even if the gap d between the rising side edge 1b on the display unit 1 side and the opposing side edge of the component 4 is set to a small dimension such as 0.3 mm, it can be stably and reliably joined. it can. Further, when cutting by the laser 35, by providing means (not shown) for blowing and sucking air to the cutting site, soot that may be generated during cutting adheres to the component 4. Can be prevented. Further, since the laser 35 is a green laser, various data such as the history can be printed on each component 4 at the time of cutting so that the history of the component 4 mounted on the substrate 1 can be traced.
次に、図1、図2に示す実装装置5の帯状部品集合体11から切り出された部品4を基板1へ実装するまでの動作を説明する。実装装置5の実装部23は、レーザ切断部22で切り出された部品4を保持して受け渡し位置の仮置き台36に移載する移載手段37と、仮置き台36に移載された部品4を保持して基板1の接合電極1aが配設されている側縁部に装着する実装ヘッド38と、基板1の上記側縁部を下方から支持する受け台39を備えている。実装ヘッド38は、移動テーブル40にて仮置き台36と受け台39との間で往復移動可能な可動体41に、昇降動作可能な実装手段42と認識カメラ43が搭載され、仮置き台36上の部品4を位置認識して実装手段42にて保持し、少なくとも一部が透明体で構成されている受け台39の下部に設けられた認識カメラ(図示せず)にて受け台39を通して基板1の接合電極1aの位置と部品4の位置とを認識して部品4を装着することで、位置精度良く装着するように構成されている。 Next, an operation until the component 4 cut out from the strip-shaped component assembly 11 of the mounting apparatus 5 shown in FIGS. 1 and 2 is mounted on the substrate 1 will be described. The mounting unit 23 of the mounting apparatus 5 includes a transfer means 37 that holds the component 4 cut out by the laser cutting unit 22 and transfers it to the temporary placement table 36 at the delivery position, and a component transferred to the temporary placement table 36. 4, a mounting head 38 that is mounted on the side edge of the substrate 1 where the bonding electrode 1 a is disposed, and a cradle 39 that supports the side edge of the substrate 1 from below. The mounting head 38 is mounted on a movable body 41 that can reciprocate between a temporary table 36 and a receiving table 39 on a moving table 40, and mounting means 42 that can move up and down and a recognition camera 43 are mounted. The position of the upper part 4 is recognized and held by the mounting means 42, and is passed through the cradle 39 by a recognition camera (not shown) provided at the lower part of the cradle 39 which is at least partially made of a transparent body. By recognizing the position of the bonding electrode 1a of the substrate 1 and the position of the component 4 and mounting the component 4, it is configured to be mounted with high positional accuracy.
なお、本実施形態では、基板1の一方の側縁部に接合されるソース側の部品4と、基板1の隣り合う他方の側縁部に接合されるゲート側の部品4を順次実装できるように、それぞれの部品4を送給する一対の部品供給部21、21が位置切替可能に並列して配設されている。 In this embodiment, the source-side component 4 bonded to one side edge of the substrate 1 and the gate-side component 4 bonded to the other adjacent side edge of the substrate 1 can be sequentially mounted. In addition, a pair of component supply units 21 and 21 for feeding the respective components 4 are arranged in parallel so as to be position-switchable.
本実施形態によれば、レーザ切断部22にてレーザ35の照射によって帯状部品集合体11から各部品4を切り出し、実装部23にて基板1に装着するようにしているので、従来の金型で打ち抜いて部品を切り出す場合のように金型のクリーニングを頻繁に行う必要がなく、基板1に対する部品4の実装の生産性を向上することができる。また、その部品4の切り出しに当たって、断続的に存在している金属箔から成る配線パターン8の配設側とは反対側の樹脂シート7の表面から、ケミカル加工が主となる短波長のグリーンレーザ(YAGレーザの波長の半分の532nmの波長)を照射しているので、一般的なCO2 レーザのように波長の長いレーザにて熱加工によって切断するものでないため、樹脂シート7が大きく溶損したり焼け焦げる一方で、配線パターン8の接合電極9が切断できないというようなことがない。また、面的に連続している樹脂シート7の表面側からレーザ35を照射することで、樹脂シート7を連続的に精度良く切断することができるとともに、その間に樹脂シート7の表面の反対側である裏面側に断続的に存在している金属箔から成る接続電極9にレーザ切断に先立って連続している樹脂シート7のレーザ加工時の熱が伝熱して予め加熱され、その状態で、接続電極9にレーザ35が照射されることで、切断できなかったり、逆に接合に支障を来たすような溶損や歪や反り返りを生じることなく、確実にかつ精度良く切断することができる。特に、部品4の樹脂シート7の厚さが50μm以下の38μm、接合電極9を含む配線パターン8を形成する金属箔の厚さが10μm以下の8μmであるので、上記のように780nm以下の波長のレーザ35の照射によって上記作用効果がより効果的に発揮され、生産性が高く精度の良い切断が安定して実現される。 According to this embodiment, each component 4 is cut out from the strip-shaped component assembly 11 by irradiation of the laser 35 at the laser cutting unit 22 and mounted on the substrate 1 at the mounting unit 23. Thus, it is not necessary to frequently clean the mold as in the case of punching out and cutting out the components, and the productivity of mounting the components 4 on the substrate 1 can be improved. Further, when cutting out the component 4, a short wavelength green laser mainly used for chemical processing from the surface of the resin sheet 7 on the side opposite to the side where the wiring pattern 8 made of a metal foil is present intermittently. (The wavelength of 532 nm, which is half the wavelength of the YAG laser) is irradiated, so that the resin sheet 7 is greatly melted or damaged because it is not cut by thermal processing with a long wavelength laser like a general CO2 laser. While being burnt, there is no case where the bonding electrode 9 of the wiring pattern 8 cannot be cut. Moreover, by irradiating the laser 35 from the surface side of the resin sheet 7 which is continuous in a plane, the resin sheet 7 can be continuously and accurately cut, and the opposite side of the surface of the resin sheet 7 in the meantime. The heat at the time of laser processing of the resin sheet 7 continuous prior to laser cutting is transferred to the connection electrode 9 made of a metal foil that is intermittently present on the back surface side, and is heated in advance, By irradiating the connection electrode 9 with the laser 35, the connection electrode 9 can be reliably and accurately cut without causing melting, distortion, or warping, which cannot be cut or adversely affect bonding. In particular, the thickness of the resin sheet 7 of the component 4 is 38 μm which is 50 μm or less, and the thickness of the metal foil which forms the wiring pattern 8 including the bonding electrode 9 is 8 μm which is 10 μm or less. The above-described effects are more effectively exhibited by the irradiation of the laser 35, and high productivity and accurate cutting can be stably realized.
また、レーザ切断部22において、部品位置検出手段としての認識カメラ33にて部品4の位置を検出し、その検出結果に基づいてレーザ照射手段31による切断位置を制御するようにしているので、部品4を高い寸法精度で切り出すことができ、この部品4の接合電極9の寸法精度が高いため、図17(b)に示したように、基板1側の接合電極1aが配置されている部位の幅寸法(基板1の額縁部の幅寸法)が小さくても、高い信頼性をもって確実に接合することができる。 Further, in the laser cutting unit 22, the position of the component 4 is detected by the recognition camera 33 as the component position detecting means, and the cutting position by the laser irradiation means 31 is controlled based on the detection result. 4 can be cut out with high dimensional accuracy, and the dimensional accuracy of the bonding electrode 9 of the component 4 is high. Therefore, as shown in FIG. 17B, the portion of the bonding electrode 1a on the substrate 1 side is disposed. Even if the width dimension (the width dimension of the frame portion of the substrate 1) is small, it can be reliably bonded with high reliability.
次に、具体実施例について説明する。面的に連続している樹脂シート7の表面側から、出力が6Wで、波長が532nmのグリーンレーザを照射するレーザ照射手段31を適用し、出力85%で、レーザの走査速度65mm/sで、1回走査にて、厚さ38μmのポリイミドシートの表面側の反対側である裏面に厚さ8μmの銅箔の配線パターン8が積層されている帯状部品集合体11から部品4を切り出した。その部品4の接合電極9における切断状態は、図8に示すように、接合電極9が配設された樹脂シート7の表面の反対側である裏面側、及び、図9に示すように、ポリイミドシートから成る樹脂シート7からなる表面側が共に精度良く切断され、接合電極9(9a、9b)の状態は、溶損や歪や反りを殆ど発生せず、高精度の接合に適した性状を呈している。 Next, specific examples will be described. Applying laser irradiation means 31 for irradiating a green laser with an output of 6 W and a wavelength of 532 nm from the surface side of the resin sheet 7 that is continuous in plane, with an output of 85% and a laser scanning speed of 65 mm / s In one scan, the component 4 was cut out from the strip-shaped component assembly 11 in which the wiring pattern 8 of the copper foil having a thickness of 8 μm was laminated on the back surface opposite to the front surface side of the polyimide sheet having a thickness of 38 μm. As shown in FIG. 8, the cut state of the component 4 at the bonding electrode 9 is a back surface side opposite to the surface of the resin sheet 7 on which the bonding electrode 9 is disposed, and a polyimide as illustrated in FIG. 9. Both of the surface sides made of the resin sheet 7 made of a sheet are cut with high accuracy, and the state of the bonding electrodes 9 (9a, 9b) hardly causes melting, distortion or warpage, and exhibits properties suitable for high-precision bonding. ing.
これに対して、レーザ照射手段として、出力が30Wで、波長が10600nmのCO2 レーザを適用し、出力80%で、レーザの走査速度137mm/sで、上記と同様に面的に連続している樹脂シート7の表面側から1回走査にて、上記帯状部品集合体11から部品4を切り出したところ、図10に示すように、樹脂シート7の切断部が大きく焼け焦げるとともに接合電極9の端部が飛び散って高精度の切断ができなかった。また、このとき出力側の配列ピッチ100μm以下の接合電極9aに対して入力側の接合電極9bは3〜5倍程度ピッチ間隔及び幅寸法が大きいことで切断できなかった。一方、加工速度を速くすると、樹脂シート7は切断できたが、接合電極9(9a、9b)が切断できなかった。 On the other hand, as a laser irradiation means, a CO2 laser having an output of 30 W and a wavelength of 10600 nm is applied, the output is 80%, and the scanning speed of the laser is 137 mm / s. When the component 4 is cut out from the band-shaped component assembly 11 by scanning once from the surface side of the resin sheet 7, as shown in FIG. 10, the cut portion of the resin sheet 7 is greatly burned and the end of the bonding electrode 9. The parts were scattered and cutting with high precision was not possible. Further, at this time, the input-side joining electrode 9b could not be cut due to the pitch interval and the width dimension being about 3 to 5 times larger than the joining electrode 9a having an output-side arrangement pitch of 100 μm or less. On the other hand, when the processing speed was increased, the resin sheet 7 could be cut, but the bonding electrodes 9 (9a, 9b) could not be cut.
また、上記帯状部品集合体11における帯状樹脂シート12の表面の反対側である裏面に断続的に存在している金属箔から成る配線パターン8及び接合電極9が配置されている側から、上記のように出力が6Wで、波長が532nmのグリーンレーザを照射するレーザ照射手段31を適用し、出力80%で、1回走査にて、レーザ走査速度である加工速度を10〜150mm/sの範囲で変化させて、部品4の切り出しを行った。加工速度が10mm/sでは、図11に示すように、接合電極9が殆ど切断されなかった。また、加工速度が25mm/sでは、図12に示すように、接合電極9の端部に黒焦げが発生し、精度の良い切断を実現できなかった。また、加工速度が55mm/sでは、図13に示すように、接合電極9が切断されなかった。また、加工速度が150mm/sで、3回走査して切断すると、図14に示すように、接合電極9が部分的には切断されたが、切断された接合電極9の端部に黒焦げが発生した。また、加工速度が100mm/sで、2回走査して切断した例では、図15に示すように、入力側の接合電極9bを切断することができなかった。 Further, from the side where the wiring pattern 8 and the joining electrode 9 made of a metal foil intermittently present on the back surface opposite to the surface of the belt-shaped resin sheet 12 in the belt-shaped component assembly 11 are disposed, In this way, the laser irradiation means 31 that irradiates a green laser having an output of 6 W and a wavelength of 532 nm is applied, and the processing speed as the laser scanning speed is in a range of 10 to 150 mm / s at one output at an output of 80%. Then, the part 4 was cut out. When the processing speed was 10 mm / s, the bonding electrode 9 was hardly cut as shown in FIG. Further, when the processing speed was 25 mm / s, as shown in FIG. 12, the charring occurred at the end of the bonding electrode 9, and the cutting with high accuracy could not be realized. Further, when the processing speed was 55 mm / s, the bonding electrode 9 was not cut as shown in FIG. Further, when the processing speed is 150 mm / s and it is cut by scanning three times, as shown in FIG. 14, the bonding electrode 9 is partially cut, but the end of the cut bonding electrode 9 is charred. Occurred. Further, in the example in which the processing speed was 100 mm / s and the sample was scanned and cut twice, as shown in FIG. 15, the input-side joining electrode 9b could not be cut.
以上の説明では、単一のレーザ照射手段31にて部品4の四周の切断線14に沿って切断するようにした例を示したが、他の構成例として、図16に示すように、レーザ切断部22に、帯状部品集合体11の移動方向に第1と第2のレーザ照射手段51、52を配設し、第1のレーザ照射手段51にて部品4の帯状部品集合体11の長手方向の両側縁に沿う切断線14aを切断し、第2のレーザ照射手段52にて部品4の帯状部品集合体11の長手方向と直交する両側縁に沿う切断線14bにて接合電極9の部分を切断するようにしても良い。ここで、第2のレーザ照射手段52に対応して、認識カメラ33及び照明手段34を配設して、部品4の検出位置に基づいて第2のレーザ照射手段52による切断位置を制御するのが好適である。 In the above description, the example in which the single laser irradiation means 31 cuts along the cutting lines 14 around the four sides of the component 4 has been shown. However, as another configuration example, as shown in FIG. First and second laser irradiation means 51 and 52 are disposed in the cutting portion 22 in the moving direction of the band-shaped component assembly 11, and the first laser irradiation means 51 makes the length of the band-shaped component assembly 11 of the component 4 long. The cutting line 14a along both side edges in the direction is cut, and the portion of the bonding electrode 9 is cut along the cutting lines 14b along the both side edges perpendicular to the longitudinal direction of the band-like component assembly 11 of the component 4 by the second laser irradiation means 52. You may make it cut | disconnect. Here, the recognition camera 33 and the illumination means 34 are arranged corresponding to the second laser irradiation means 52, and the cutting position by the second laser irradiation means 52 is controlled based on the detection position of the component 4. Is preferred.
こうすると、部品42の四周の切断線14の互いに平行な2辺14a、14bをそれぞれ別々にレーザ照射手段51、52にて切断することで、より短時間で部品4を切り出すことができて一層生産性を向上することができ、さらに第2のレーザ照射手段52に対応して部品位置検出手段として認識カメラ33を配設し、その検出結果に基づいて第2のレーザ照射手段52による切断位置を制御することで、特に基板1の接合電極と接合する接合電極9aの寸法精度を上記のように高くすることができ、基板1側の接合電極が配置されている部位の幅寸法(基板1の額縁部の幅寸法)が小さくても、高い信頼性をもって確実に接合することができるという効果が発揮される。 In this way, the parts 4 can be cut out in a shorter time by cutting the two parallel sides 14a and 14b of the cutting line 14 on the four sides of the part 42 separately by the laser irradiation means 51 and 52, respectively. Productivity can be improved, and a recognition camera 33 is provided as a part position detection unit corresponding to the second laser irradiation unit 52, and the cutting position by the second laser irradiation unit 52 is based on the detection result. In particular, the dimensional accuracy of the bonding electrode 9a to be bonded to the bonding electrode of the substrate 1 can be increased as described above, and the width dimension of the portion where the bonding electrode on the substrate 1 side is disposed (the substrate 1). Even if the width dimension of the frame portion is small, it is possible to reliably bond with high reliability.
本発明の部品実装装置及び実装方法によれば、帯状部品集合体からレーザ照射によって各部品を切り出して基板に装着するので、金型で打ち抜く場合のように頻繁なクリーニングが不要となって生産性の高い部品実装を実現でき、かつ面的に連続している樹脂シートの表面側から780nm以下の短波長のレーザを照射することで、樹脂シートを連続的に精度良く切断でき、かつ樹脂シートの表面の反対側である裏面側に断続的に存在している金属箔から成る接合電極が、面的に連続している樹脂シートのレーザ加工時の熱がこの樹脂シートを介して加熱された状態でレーザを照射して接合電極を切断するので、樹脂シートと接続電極を確実にかつ精度良く切断することができ、その結果樹脂シートにICチップやそのパッケージと接合電極を含む配線パターンあるいは接合電極を含む配線パターンの少なくともいずれか一方が配設された部品を各種基板に実装する部品実装装置に好適に利用することができる。 According to the component mounting apparatus and the mounting method of the present invention, since each component is cut out from the strip-shaped component assembly by laser irradiation and mounted on the substrate, frequent cleaning is unnecessary as in the case of punching with a mold. High-precision component mounting, and by irradiating a short-wavelength laser of 780 nm or less from the surface side of the continuous resin sheet, the resin sheet can be cut continuously and with high accuracy. The bonding electrode made of a metal foil that is intermittently present on the back side, which is the opposite side of the front surface, is a state in which the heat at the time of laser processing of the resin sheet in which the surface is continuous is heated through this resin sheet Since the bonding electrode is cut by irradiating with the laser, the resin sheet and the connection electrode can be cut reliably and accurately, and as a result, the IC chip and its package and the bonding electrode are formed on the resin sheet. A component at least one of the wiring pattern is provided comprising a wiring pattern or the bonding electrode comprises can be suitably used in the component mounting apparatus to be mounted on various substrates.
1 基板
4 部品
5 実装装置
7 樹脂シート
8 配線パターン
9(9a、9b) 接合電極
10 ICチップ
11 帯状部品集合体
14 切断線
21 部品送給部
22 レーザ切断部
23 実装部
31 レーザ照射手段
32 ステージ
33 認識カメラ(部品位置認識手段)
35 レーザ
51 第1のレーザ照射手段
52 第2のレーザ照射手段
DESCRIPTION OF SYMBOLS 1 Board | substrate 4 Component 5 Mounting apparatus 7 Resin sheet 8 Wiring pattern 9 (9a, 9b) Joining electrode 10 IC chip 11 Band-shaped component assembly 14 Cutting line 21 Component feeding part 22 Laser cutting part 23 Mounting part 31 Laser irradiation means 32 Stage 33 Recognition camera (part position recognition means)
35 Laser 51 First laser irradiation means 52 Second laser irradiation means
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008032181A JP4893651B2 (en) | 2008-02-13 | 2008-02-13 | Component mounting apparatus and mounting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| JP2008032181A JP4893651B2 (en) | 2008-02-13 | 2008-02-13 | Component mounting apparatus and mounting method |
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| JP2009194100A JP2009194100A (en) | 2009-08-27 |
| JP4893651B2 true JP4893651B2 (en) | 2012-03-07 |
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| KR101739168B1 (en) * | 2014-05-30 | 2017-05-23 | 주식회사 엘지화학 | Electrode cutter |
| CN109849105A (en) * | 2018-11-16 | 2019-06-07 | 惠科股份有限公司 | Chip on film punching device, display device assembling equipment and assembling system thereof |
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| JPH07185847A (en) * | 1993-12-28 | 1995-07-25 | Kanegafuchi Chem Ind Co Ltd | TAB tape processing method |
| JPH11254170A (en) * | 1998-03-12 | 1999-09-21 | Hitachi Constr Mach Co Ltd | Optical device for laser beam machining |
| JP2003209146A (en) * | 2002-01-16 | 2003-07-25 | Seiko Instruments Inc | Tape-shaped mounting structure and mounting method using the same |
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