JP4896597B2 - Air component control method for working atmosphere - Google Patents

Description

  The present invention, in the manufacturing process of the plasma display panel consisting of the front plate and the back plate, after forming a protective layer on the front plate, the air component of the working atmosphere that performs the step of sealing the back plate to the front plate, The present invention relates to a method for controlling an air component in a working atmosphere, which is controlled so that the protective layer does not change.

  In general, the plasma display panel manufacturing process includes a step of manufacturing a front plate, a step of manufacturing a back plate, and a step of assembling the front plate and the back plate.

  In the step of producing the front plate, after a predetermined electrode is formed, a dielectric layer is formed for the purpose of protecting the electrode. This dielectric layer is vulnerable to ion bombardment caused by discharge, and this ion bombardment shortens the panel life. In addition, since the dielectric layer has low efficiency of secondary electron emission necessary for plasma discharge, the discharge voltage becomes high. Therefore, magnesium oxide (MgO) that is resistant to ion bombardment and excellent in secondary electron emission properties is formed on the surface of the dielectric layer as a protective layer. The protective layer made of MgO is formed by sputtering or the like in a vacuum chamber. After the front plate is produced in this way and the protective layer is formed, the front plate is taken out from the vacuum chamber.

  And in the said assembly process, the said front board and the back board produced at the separate process are piled up first, and it seals by sealing the peripheral part. Next, the atmosphere in the panel in which the front plate and the rear plate are sealed is exhausted, and then a light emission (discharge) gas is introduced into the panel.

In such a process, after the front plate is taken out of the vacuum chamber, the protective layer formed on the front plate is exposed to the air in the clean room until the rear plate is superimposed on the front plate. Since the protective layer is made of MgO, it easily reacts with moisture (H ₂ O) or carbon dioxide (CO ₂ ) in the air, and magnesium hydroxide [Mg (OH) ₂ is reacted with the H ₂ O. However, magnesium carbonate (MgCO ₃ ) is precipitated on the surface of the protective layer by the reaction with CO ₂ . If these compounds are still deposited, problems such as unstable display will occur. Therefore, by applying a voltage higher than the actual drive to the panel to generate plasma, Aging is performed to remove the compound.

However, the aging process takes a long time (about 20 hours). For this reason, conventionally, a method for shortening the time has been proposed (see, for example, Patent Document 1). In Patent Document 1, a second protective film that is easily removed by aging is formed on the surface of the protective layer.
JP-A-11-149865

  However, in the said patent document 1, the process of forming a 2nd protective film on the surface of a protective layer is needed. Moreover, although the time required for aging is shortened, the aging step is essential.

  The present invention has been made in view of such circumstances, and it is not necessary to form a second protective film on the surface of the protective layer, and an aging step can be eliminated, or the time required for aging can be greatly increased. It is an object of the present invention to provide a method for controlling the air component of the working atmosphere that can be shortened.

In order to achieve the above object, the air component control method for a working atmosphere according to the first aspect of the present invention is a protection method in which a front plate is made of magnesium oxide in a manufacturing process of a plasma display panel comprising a front plate and a back plate. After forming the layer, to the clean room that performs the process of sealing the back plate to the front plate, supply artificial air consisting of nitrogen gas vaporized liquid nitrogen and oxygen gas vaporized liquid oxygen, the above The clean room is made to have an artificial air atmosphere, and the worker who works in the clean room is put on the protective device (A) below.
(A) A protector provided with a face covering at least the nose and mouth of an operator, and a hose communicating the inside of the face with the outside of the clean room.

  Moreover, the air component control method for the working atmosphere according to the second aspect of the present invention includes forming a protective layer made of magnesium oxide on the front plate in the manufacturing process of the plasma display panel including the front plate and the back plate. Supply clean air, which removes moisture and carbon dioxide from the air in the atmosphere, to the clean room that performs the process of sealing the back plate to the front plate, and make the clean room the adjusted air atmosphere and work in the clean room The worker is to wear the protective device (A).

In addition, the air component control method for the working atmosphere of the third aspect of the present invention, after forming a protective layer made of magnesium oxide on the front plate in the manufacturing process of the plasma display panel comprising the front plate and the back plate, Artificial air consisting of nitrogen gas vaporized from liquid nitrogen and oxygen gas vaporized from liquid oxygen is supplied to a clean room where the process of sealing the back plate to the front plate is performed. At the same time, the worker who works in the clean room is configured to wear the protective equipment (B) below.
(B) A face that covers at least the nose and mouth of the worker, a first check valve that allows air to flow only in the direction from the outside to the inside of the face, and adsorption that adsorbs moisture and carbon dioxide. comprising: a tank, a hose inside and the suction tank of the facepiece is in communication, and a second check valve that permits air flow only in the direction to the suction tank from the inside of the facepiece Protective equipment.

  In addition, the air component control method for the working atmosphere of the fourth aspect of the present invention, after forming the protective layer made of magnesium oxide on the front plate in the manufacturing process of the plasma display panel comprising the front plate and the back plate, Supply clean air, which removes moisture and carbon dioxide from the air in the atmosphere, to the clean room that performs the process of sealing the back plate to the front plate, and make the clean room the adjusted air atmosphere and work in the clean room The worker is to wear the protective device (B).

In the air component control method for a work atmosphere according to the first aspect of the present invention, the worker's intake air can be supplied from the outside of the clean room to the inside of the face piece through the hose, and the exhalation can be supplied from the inside of the face piece through the hose to the clean room It can be exhausted to the outside. Thereby, the air component of the working atmosphere of a clean room does not change with an operator's respiration, consists of nitrogen gas and oxygen gas, and can maintain the state which does not contain moisture and carbon dioxide. For this reason, the protective layer made of magnesium oxide formed on the front plate does not react with moisture or carbon dioxide until the back plate is sealed to the front plate, and magnesium hydroxide is not formed on the surface of the protective layer. Magnesium carbonate can be prevented from precipitating. As a result, the aging process for removing the magnesium hydroxide and magnesium carbonate can be eliminated.

  In addition, when an operator enters and exits the clean room, moisture and carbon dioxide may enter from the outside of the clean room. In addition, when an operator attaches / detaches the protective equipment in a clean room, moisture and carbon dioxide may be discharged in the clean room as the operator's breath. However, the moisture and carbon dioxide in such a case are very little, and there is little or even no magnesium hydroxide and magnesium carbonate deposited on the surface of the protective layer. Therefore, even if aging is performed to remove the very small amount of magnesium hydroxide and magnesium carbonate, the time required for the aging can be greatly shortened.

  In the air component control method for the working atmosphere according to the second aspect of the present invention, the worker wears the same protective equipment as the air component control method for the working atmosphere according to the first aspect. Can be supplied from the outside of the clean room to the inside of the face piece via a hose, and exhaled air can be exhausted from the inside of the face piece to the outside of the clean room via the hose. Thereby, the air component of the working atmosphere of a clean room does not change with an operator's respiration, and can maintain the state which does not contain moisture and carbon dioxide. For this reason, similarly to the air component control method in the working atmosphere of the first aspect, magnesium hydroxide and magnesium carbonate are not deposited on the surface of the protective layer, and an aging step for removing these compounds is unnecessary. Or the time required for aging can be greatly shortened. In addition, in the air component control method for the working atmosphere of the second aspect, because the adjusted air obtained by removing moisture and carbon dioxide from the air in the atmosphere is supplied to the clean room, the air component of the working atmosphere of the clean room includes In addition to nitrogen and oxygen, argon and the like are also included.

  In particular, the face body of the protective device is provided with a first check valve that allows air to flow only in the direction from the outside to the inside of the face body, and from the inside of the face body to the outside of the clean room. If a second check valve is provided that allows air flow only in the direction of the air, the operator can obtain intake air from the artificial air in the clean room via the first check valve. The exhaled air can be exhausted from the inside of the face piece to the outside of the clean room through the hose and the second check valve.

On the other hand, in the air component control method for the working atmosphere according to the third aspect of the present invention, the worker's intake air can be supplied from the artificial air in the clean room via the first check valve, and the exhalation can be supplied from the inside of the face piece. It can be adsorbed by an adsorption tank via a hose (second check valve). Also in this manner, as in the air component control method for the working atmosphere of the first aspect, the air component of the clean room working atmosphere is not changed by the worker's breathing and maintains a state in which neither moisture nor carbon dioxide is contained. Therefore, magnesium hydroxide and magnesium carbonate are not deposited on the surface of the protective layer, and an aging step for removing these compounds can be eliminated, or the time required for aging can be shortened very much. it can.

In the air component control method for work atmosphere according to the fourth aspect of the present invention, the worker wears the same protective equipment as the air component control method for work atmosphere according to the third aspect. Can be supplied from artificial air in a clean room via a first check valve, and exhaled air can be adsorbed from the inside of the face piece via a hose (second check valve) in an adsorption tank . Thereby, the air component of the working atmosphere of a clean room does not change with an operator's respiration, and can maintain the state which does not contain moisture and carbon dioxide. For this reason, similarly to the air component control method in the working atmosphere of the first aspect, magnesium hydroxide and magnesium carbonate are not deposited on the surface of the protective layer, and an aging step for removing these compounds is unnecessary. Or the time required for aging can be greatly shortened. In the air component control method for the working atmosphere of the fourth aspect, as in the air component control method for the working atmosphere of the second aspect, the adjusted air obtained by removing moisture and carbon dioxide from the air in the air is used in a clean room. Therefore, in addition to nitrogen and oxygen, argon and the like are included in the air component of the working atmosphere of the clean room.

  Next, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to this.

  FIG. 1 shows a first embodiment of an air component control method for a working atmosphere according to the present invention. In this embodiment, in the manufacturing process of the plasma display panel composed of the front plate and the back plate, the vacuum chamber 6 for forming a protective layer made of magnesium oxide (MgO) on the front plate, and before taking out from the vacuum chamber 6 A sealing device 7 for sealing the back plate to the face plate is installed in one clean room 5. An artificial air production device 3 and an air circulation device 4 are connected to the clean room 5. In the clean room 5, one or more workers 1 are working, and each worker 1 is wearing the protective equipment 2 according to the present invention described in detail below. In addition to the artificial air production device 3 and the air circulation device 4, the clean room 5 includes conventionally known air conditioning equipment (not shown) required for the clean room 5 that maintains the clean room 5 in an appropriate clean state. Z).

  More specifically, the protector 2 worn by the worker 1 has a face body 21 whose peripheral edge is in close contact with the face of the worker 1 and covers the nose, mouth and eyes, the inside of the face body 21 and the outside of the clean room 5. And a hose 22 communicating with each other. The hose 22 is preferably flexible so as to follow the movement of the operator 1, and a filter 23 is preferably attached to the tip located outside the clean room 5. The intake air of the worker 1 is supplied from the outside of the clean room 5 to the inside of the face body 21 through the filter 23 and the hose 22, and the exhalation of the worker 1 is supplied from the inside of the face body 21 through the hose 22 to the clean room 5. It is designed to be exhausted outside.

  The artificial air production apparatus 3 includes a liquid nitrogen tank 31, a liquid oxygen tank 32, a mixer 33 connected to both tanks, and a space between the mixer 33 and the ceiling space 51 of the clean room 5. The temperature rising device 34 provided is provided, and these are connected by piping. Then, liquid nitrogen is supplied from the liquid nitrogen tank 31 and liquid oxygen is supplied from the liquid oxygen tank 32 to the mixer 33, whereby the liquid nitrogen is vaporized by the mixer 33, and nitrogen gas and oxygen gas are used. Artificial air is to be produced. The artificial air is heated to a predetermined temperature (about room temperature) by the heating device 34 and then supplied to the ceiling space 51 of the clean room 5.

  The oxygen gas concentration of the artificial air is preferably controlled to about 20% by volume (the remainder is nitrogen gas), which is the same as that of the atmosphere. This control can be performed by adjusting the amounts of liquid nitrogen and liquid oxygen supplied to the mixer 33 with a valve or the like.

The air circulation device 4 is connected between the underfloor space 52 of the clean room 5 and a pipe downstream from the temperature riser 34 of the artificial air production device 3, and in order from the underfloor space 52 side, moisture (H An adsorption tower 41 for adsorbing ₂ O) and carbon dioxide (CO ₂ ) and a blower 42 are provided, and these are connected by piping. Then, by operating the blower 42, air in the working atmosphere of the clean room 5 is sucked from the underfloor space 52, and H ₂ O and CO ₂ in the air are adsorbed by the adsorption tower 41, and then the artificial air. The artificial air introduced into the piping of the manufacturing apparatus 3 and heated by the heater 34 is introduced into the ceiling space 51 of the clean room 5. Here, the adsorption tower 41 is a container filled with an adsorbent that adsorbs H ₂ O and CO _2. Examples of the adsorbent include a mixture of activated alumina and synthetic zeolite, activated carbon, and zeolite. , Molecular sieves and the like.

  A HEPA filter is disposed on the ceiling of the clean room 5, and the manufactured artificial air and the circulating air that has passed through the air circulation device 4 cause the HEPA filter to adsorb fine particles such as particles contained therein. After that, it is supplied to the working atmosphere of the clean room 5. The floor of the clean room 5 is formed with small ventilation holes that communicate the working atmosphere of the clean room 5 and the underfloor space 52 so that the air in the working atmosphere of the clean room 5 is introduced into the underfloor space 52. It has become.

  And the air component control method of the working atmosphere of this invention is performed as follows. That is, first, artificial air composed of nitrogen gas and oxygen gas produced by the artificial air production apparatus 3 is supplied from the ceiling space 51 of the clean room 5, and the clean room 5 is filled with the artificial air. In this state, the front plate on which the protective layer made of MgO is formed is taken out from the vacuum chamber 6 installed in the clean room 5, and then the back plate is sealed to the front plate using the sealing device 7. At this time, the worker 1 performs work in a state where the protective device 2 is worn. During this work, the air circulation device 4 is operated appropriately (intermittently or continuously) to circulate air (artificial air) in the working atmosphere of the clean room 5.

In the air component control method of the working atmosphere of the present invention performed in this way, since the worker 1 is wearing the protective equipment 2, the H ₂ O and CO ₂ contained in the breath of the worker 1 are clean room. 5 is not discharged into the working atmosphere. That is, the air component in the working atmosphere of the clean room 5 maintains the artificial air composed of nitrogen gas and oxygen gas, and does not contain H ₂ O or CO ₂ . For this reason, the protective layer made of MgO formed on the front plate does not react with either H ₂ O or CO ₂ until the back plate is sealed to the front plate. Neither magnesium oxide [Mg (OH) ₂ ] nor magnesium carbonate (MgCO ₃ ) can be deposited. As a result, an aging process for removing the Mg (OH) ₂ and MgCO ₃ can be eliminated.

Further, when the operator 1 and out of the clean room 5, and when the H ₂ O and CO ₂ from entering from the outside of the clean room 5, when the operator 1 in a clean room 5 is detached the protector 2, the operator in some cases, such as H ₂ O and CO ₂ as one of the exhalation is discharged in a clean room 5. However , in such a case, H ₂ O and CO ₂ are slight, and there is no Mg (OH) ₂ and MgCO ₃ precipitated on the surface of the protective layer. Moreover, in the first embodiment, the air in the working atmosphere of the clean room 5 is circulated by the air circulation device 4 including the adsorption tower 41 that adsorbs H ₂ O and CO _2. The H ₂ O and CO ₂ can be adsorbed by the adsorption tower 41. Thereby, precipitation of Mg (OH) ₂ and MgCO _{3 on} the surface of the protective layer can be further prevented. From this point of view, even if the aging process is not required or the aging is performed, the time required for the aging can be extremely shortened.

In the first embodiment, the face body 21 of the protective equipment 2 worn by the worker 1 is a face body that covers the eyes in addition to the nose and mouth. However, the present invention is not limited to this. Also, a face covering the mouth may be used. However, in this case, since the working atmosphere does not contain H ₂ O, it is preferable to wear goggles that cover the eyes in order to prevent the eyes from drying. Moreover, you may use the face body which covers the whole head.

  In addition, it is preferable from the viewpoint of safety that an oxygen gas concentration sensor is installed in the clean room 5 so that the oxygen gas concentration does not become a dangerous concentration for the human body. For example, the signal from the oxygen gas concentration sensor is fed back to the artificial air production apparatus 3, and the produced oxygen gas concentration is adjusted appropriately accordingly. Furthermore, it is preferable that the alarm siren be sounded when the oxygen gas concentration becomes dangerous to the human body.

  The second embodiment of the air component control method for working atmosphere of the present invention is the same as the first embodiment (see FIG. 1), in which the face body 21 of the protector 2 is directed from the outside to the inside of the face body 21 The face body 21 is provided with a first check valve (not shown) that allows only air flow, and the hose 22 is located inside the face body 21 from the inside of the face body 21 to the outside of the clean room 5. The hose 22 is provided with a second check valve (not shown) that allows the air flow only in the direction of. The rest is the same as in the first embodiment.

When such a protector 2 is used, the worker 1 can obtain the intake air from the artificial air in the clean room 5 through the first check valve. Then, exhaled air can be exhausted from the inside of the face piece 21 to the outside of the clean room 5 through the hose 22 and the second check valve, as in the first embodiment. For this reason, also in the second embodiment, the working atmosphere of the clean room 5 can be made into a slight state even if H ₂ O and CO ₂ are not included or included. As a result, there is no Mg (OH) ₂ and MgCO ₃ deposited on the surface of the protective layer, and even if there is, it is possible to make very little, even if the aging process is unnecessary or aging is performed, The time required for the aging can be extremely shortened.

In the second embodiment, since the worker 1 sucks the artificial air that does not contain H ₂ O, a cloth moistened with water to prevent thirst and the like. Is preferably detachably mounted on the inside of the face piece 21.

FIG. 2 shows a third embodiment of the air component control method for a working atmosphere according to the present invention. In this embodiment, in the second embodiment, the worker 1 wears the following as the protective equipment 2. In other words, the protector 2 includes an adsorption tank 24 that adsorbs H ₂ O and CO _2, and the worker 1 supports the adsorption tank 24. A hose 22 extending from the face body 21 is connected to the adsorption tank 24, and a second check valve (not shown) similar to the second embodiment is provided in the hose 22. Moreover, the said face body 21 is the same as that of the said 2nd Embodiment, and is provided with the same 1st non-return valve (not shown). Here, the adsorption tank 24 is a container filled with an adsorbent that adsorbs H ₂ O and CO _2. Examples of the adsorbent include a mixture of activated alumina and synthetic zeolite, activated carbon, and zeolite. , Molecular sieves and the like.

When such a protective device 2 is used, the worker 1 can obtain intake air from the artificial air in the clean room 5 through the first check valve, as in the second embodiment. And exhaled air can be adsorbed by the adsorption tank 24 from the inside of the face piece 21 through the hose 22 and the second check valve. For this reason, also in the third embodiment, the working atmosphere of the clean room 5 can be made into a slight state even if H ₂ O and CO ₂ are not included or included. As a result, there is no Mg (OH) ₂ and MgCO ₃ deposited on the surface of the protective layer, and even if there is, it is possible to make very little, even if the aging process is unnecessary or aging is performed, The time required for the aging can be extremely shortened.

  In the third embodiment, the adsorption tank 24 is carried by the worker 1, but the present invention is not limited to this, and the adsorption tank 24 is placed on the floor surface or wall surface in the vicinity of the worker 1 working. It may be fixed.

  In each of the first to third embodiments, the air circulation device 4 is provided. However, the present invention is not limited to this, and as shown in FIG. You may discharge | release air | atmosphere from the underfloor space 52 of the clean room 5, without providing the apparatus 4 (refer FIG. 1). In each of the above embodiments, a vaporizer (not shown) is provided between the liquid nitrogen tank 31 and the mixer 33 and between the liquid oxygen tank 32 and the mixer 33, respectively. Nitrogen gas and oxygen gas vaporized by a vessel may be supplied to the mixer 33, respectively.

FIG. 4 shows a fifth embodiment of the air component control method for a working atmosphere according to the present invention. In this embodiment, in place of the artificial air production device 3 in the fourth embodiment (see FIG. 3), adjusted air obtained by removing H ₂ O and CO ₂ from air in the atmosphere is supplied to the clean room. A regulated air supply device 8 is connected to the clean room 5. Other than that, it is the same as that of the said 4th Embodiment [the protector 2 is the same as that of 1st Embodiment (refer FIG. 1)], and the same code | symbol is attached | subjected to the same part.

More specifically, the adjusted air supply device 8 includes a compressor (compressor or the like) 81 installed in the atmosphere, a cooler (aftercooler or the like) 82 connected to the compressor 81, and the cooler. 82 and an adsorbing tower 83 provided between the space 51 above the ceiling of the clean room 5 and these are connected by piping. The adsorption tower 83 is filled with an adsorbent that adsorbs H ₂ O and CO ₂ , and examples of the adsorbent include a mixture of activated alumina and synthetic zeolite, activated carbon, zeolite, molecular sieve, and the like. .

And by operating the said compressor 81, air is extract | collected from air | atmosphere and pressure | voltage rises, Then, it introduce | transduces into the space 51 on the ceiling of the clean room 5 through the said cooler 82 and the adsorption tower 83. Yes. That is, since the compressed air pressurized by the compressor 81 contains a large amount of moisture at a high temperature, the compressed air is cooled to a predetermined temperature (about room temperature) by the cooler 82, thereby containing the contained moisture. Are condensed and separated. Further, the subsequent adsorption tower 83 adsorbs H ₂ O and CO ₂ , thereby removing H ₂ O and CO ₂ . Then, the adjusted air from which the H ₂ O and CO ₂ have been removed is supplied to the clean room 5. Since this adjusted air is air obtained by removing H ₂ O and CO ₂ from air in the atmosphere, argon and the like are included in addition to nitrogen and oxygen.

Also in the fifth embodiment, as in the above-described embodiments, the working atmosphere of the clean room 5 does not include H ₂ O or CO ₂ or can be in a slight state even if it is included. . As a result, there is no Mg (OH) ₂ and MgCO ₃ deposited on the surface of the protective layer, and even if there is, it is possible to make very little, even if the aging process is unnecessary or aging is performed, The time required for the aging can be extremely shortened.

  In the fifth embodiment, the protective device 2 worn by the worker 1 is the same as that of the first embodiment (see FIG. 1). However, the present invention is not limited to this. The second embodiment (not shown) or the third embodiment (see FIG. 2) may be used.

  In the fifth embodiment, the air circulation device 4 (see FIG. 1) is not provided. However, the present invention is not limited to this, and as in the first to third embodiments, An air circulation device 4 may be provided.

It is explanatory drawing which shows typically 1st Embodiment of the air component control method of the working atmosphere of this invention. It is explanatory drawing which shows typically 3rd Embodiment of the air component control method of the working atmosphere of this invention. It is explanatory drawing which shows typically 4th Embodiment of the air component control method of the working atmosphere of this invention. It is explanatory drawing which shows typically 5th Embodiment of the air component control method of the working atmosphere of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Worker 2 Protective equipment 3 Artificial air production apparatus 5 Clean room 6 Vacuum chamber 7 Sealing device 21 Face body 22 Hose

Claims (5)

In the manufacturing process of a plasma display panel consisting of a front plate and a back plate, after forming a protective layer made of magnesium oxide on the front plate, liquid nitrogen is added to the clean room where the back plate is sealed to the front plate. Artificial air consisting of vaporized nitrogen gas and oxygen gas vaporized from liquid oxygen is supplied to make the clean room into the artificial air atmosphere, and to the worker who works in the clean room, the protective equipment (A) below An air component control method for a working atmosphere, characterized in that
(A) A protector provided with a face covering at least the nose and mouth of an operator, and a hose communicating the inside of the face with the outside of the clean room. In the manufacturing process of a plasma display panel consisting of a front plate and a back plate, after forming a protective layer made of magnesium oxide on the front plate, in a clean room that performs the process of sealing the back plate to the front plate, supplying conditioned air to remove the moisture and carbon dioxide from the air, as well as the clean room to the adjustment air atmosphere, and characterized in that to mount the protection of the lower SL (a) to the operator working in the clean room A method for controlling the air component of the working atmosphere.
(A) A protector provided with a face covering at least the nose and mouth of an operator, and a hose communicating the inside of the face with the outside of the clean room.   The face body of the protective device is provided with a first check valve that allows air flow only in the direction from the outside to the inside of the face body, and in the hose, the direction from the inside of the face body to the outside of the clean room The air component control method for a working atmosphere according to claim 1 or 2, further comprising a second check valve that enables only air flow. In the manufacturing process of a plasma display panel consisting of a front plate and a back plate, after forming a protective layer made of magnesium oxide on the front plate, liquid nitrogen is added to the clean room where the back plate is sealed to the front plate. Artificial air consisting of vaporized nitrogen gas and oxygen gas vaporized from liquid oxygen is supplied to make the clean room into the artificial air atmosphere, and to the worker working in the clean room, the protective equipment (B) below An air component control method for a working atmosphere, characterized in that
(B) A face that covers at least the nose and mouth of the worker, a first check valve that allows air to flow only in the direction from the outside to the inside of the face, and adsorption that adsorbs moisture and carbon dioxide. comprising: a tank, a hose inside and the suction tank of the facepiece is in communication, and a second check valve that permits air flow only in the direction to the suction tank from the inside of the facepiece Protective equipment. In the manufacturing process of a plasma display panel consisting of a front plate and a back plate, after forming a protective layer made of magnesium oxide on the front plate, in a clean room that performs the process of sealing the back plate to the front plate, supplying conditioned air to remove the moisture and carbon dioxide from the air, as well as the clean room to the adjustment air atmosphere, and characterized in that to mount the protection of the lower SL (B) to the operator working in the clean room A method for controlling the air component of the working atmosphere.
(B) A face that covers at least the nose and mouth of the worker, a first check valve that allows air to flow only in the direction from the outside to the inside of the face, and adsorption that adsorbs moisture and carbon dioxide. A tank, a hose communicating with the inside of the face piece and the adsorption tank, and a second check valve that allows air to flow only from the inside of the face piece to the adsorption tank. Protective equipment.

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