JP4896675B2 - Fluid control valve - Google Patents

Description

  According to the present invention, a fluid flow path is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the displacement of the valve body is The present invention relates to a fluid control valve that causes the fluid flowing into the upstream fluid chamber to flow out through the downstream fluid chamber.

  FIG. 7 shows a cross-sectional configuration of a conventional fluid control valve.

  As illustrated, the fluid control valve 110 includes a bottom plate 112, a body 114, and a cover 116. The body 114 is provided with an inflow port 118 and an outflow port 120. The inflow port 118 and the outflow port 120 are communicated and blocked by a valve body 126. That is, when the tapered portion 126a of the valve body 126 is seated on the seat portion 132 formed by the inner wall of the body 114, the gap between the inlet 118 and the outlet 120 is blocked, and the tapered portion 126a is separated from the seat portion 132. Thus, the inlet 118 and the outlet 120 are communicated with each other.

  An elastic force of a coil spring 136 is applied to the valve body 126 in the valve closing direction via a spring receiving member 134. In contrast, a force in the valve opening direction is applied to the valve body 126 by the pressure application member 138.

  In such a configuration, when a predetermined liquid chemical is supplied to the inlet 118 and a predetermined pressure is applied to the pressure applying member 138, the tapered portion 126a of the valve body 126 is separated from the seat portion 132 and flows into the inlet 118. The chemical solution flows out to the outlet 120. At this time, the pressure of the chemical solution flowing out from the outlet 120 can be controlled by the pressure of the pressure applying member 138.

In addition, as a conventional fluid control valve, there exist some which were described in the following patent document 1, etc. other than what is described in FIG.
JP 2003-84841 A

  By the way, in the fluid control valve 110, an oscillation phenomenon in which the pressure of the chemical solution flowing out from the outlet 120 oscillates may occur, and the controllability of the pressure may be lowered. This phenomenon tends to occur more easily as the taper angle of the tapered portion 126a is reduced. On the other hand, when the taper angle is increased, both the members are consumed due to the contact between the taper portion 126a of the valve body 126 and the seat portion 132, and these fragments may be mixed into the chemical solution.

  Further, the inventors have found that the oscillation phenomenon is eliminated by providing an O-ring or the like on the side surface of the valve body 126 and applying a frictional force to the valve body 126. However, in this case, if the frictional force is too large, the displacement of the valve body 126 is dull, and the pressure controllability is reduced. Moreover, it is extremely difficult to adjust the frictional force of the O-ring to a predetermined force. Furthermore, even if the frictional force of the O-ring can be adjusted to a predetermined force, the frictional force may change due to aging.

  The present invention has been made in order to solve the above-described problems, and an object of the present invention is to provide a fluid flow path upstream by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion. When the fluid that flows into the upstream fluid chamber due to the displacement of the valve element is discharged to the outside through the downstream fluid chamber, the fluid pressure oscillation phenomenon is more appropriately suppressed. It is an object of the present invention to provide a fluid control valve that can be used.

  Hereinafter, means for solving the above-described problems and the operation and effects thereof will be described.

  According to the first aspect of the present invention, a fluid flow path is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the valve In a fluid control valve that causes fluid flowing into the upstream fluid chamber to flow out to the outside through the downstream fluid chamber due to body displacement, a movable member that is displaced in conjunction with the shaft portion, and a side surface of the movable member A regulating member that is provided on a side and restricts the displacement direction of the movable member to the displacement direction of the valve body; and deflecting means that deflects the movable member toward the regulating member side with respect to the displacement direction of the valve body. It is characterized by that.

  In the above configuration, since the restriction member is provided on the side surface side of the movable member, the displacement direction of the movable member can be restricted to the displacement direction of the valve body. Further, since the movable member is deflected to the regulating member side by the deflecting means when the movable member is displaced, the movable member is displaced while being in contact with the regulating member. As a result, when the movable member is displaced, a predetermined resistance force is applied, and as a result, a predetermined resistance force is applied to the valve body. For this reason, it is possible to avoid the occurrence of pressure oscillation. In addition, since this resistance force can be realized by deflecting the movable member, a stable resistance force can be applied to the valve body regardless of the individual difference of the fluid control valve, temperature change, or the like.

  The invention described in Means 2 is the invention described in Means 1, wherein when the movable member deflects toward the regulating member, the relative relationship between the movable member and the member that transmits the force accompanying the displacement of the valve body to the movable member. It is further characterized by further comprising means for enabling a smooth displacement.

  In the above configuration, even when the movable member is deflected by the deflecting unit, the deflection of the member that transmits the force accompanying the displacement of the valve body can be suitably suppressed or avoided. Thereby, the deflection of the valve body can be suppressed or avoided, and as a result, the state of the fluid flowing out to the outside can be more suitably controlled.

  The invention described in the means 3 is the invention described in the means 1 or 2, wherein one end of either the member that transmits a force accompanying the displacement of the valve body to the movable member or the movable member has a hemispherical recess. And the other end is housed in the recess.

  In the above configuration, since the other end is housed in one hemispherical recess, even if the movable member is deflected by the deflecting means, the member that transmits the force accompanying the displacement of the valve body is preferably deflected. Can be suppressed or avoided. Thereby, the deflection of the valve body can be suppressed or avoided, and as a result, the state of the fluid flowing out to the outside can be more suitably controlled.

  The invention described in means 4 is characterized in that, in the invention described in means 3, the member for transmitting the force accompanying displacement of the valve body to the movable member is a shaft portion of the valve body.

  In the above configuration, since the third member is not interposed between the valve body and the movable member, an increase in the number of parts can be avoided.

  The invention according to means 5 is characterized in that, in the invention according to any one of means 1 to 4, the deflection means is constituted by the movable member.

  In the above configuration, by configuring the deflecting means by the movable member, it is possible to avoid setting other members of the fluid control valve to deflect the movable member. For this reason, a deflection | deviation means can be comprised appropriately.

  The invention described in means 6 is the invention described in means 5, wherein the movable member is exerted by a spring formed so that both ends in the axial direction are flat, and the deflecting means is provided on the movable member. The contact surface with the said spring is comprised by making it an inclined surface, It is characterized by the above-mentioned.

  In the above configuration, the movable member can be deflected with respect to the axial direction of the spring by making the contact surface of the movable member with the spring an inclined surface. For this reason, a deflection | deviation means can be comprised simply and appropriately.

  The invention according to means 7 is the invention according to any one of means 1 to 6, further comprising a pressure applying member that divides the downstream fluid chamber and is displaced in conjunction with the valve body, wherein the downstream fluid A pressure can be applied to the chamber through the pressure applying member.

  In the above configuration, the displacement of the valve body is fixed at a position where the pressure applied via the pressure applying member and the force by the fluid are balanced. For this reason, the pressure of the fluid flowing out to the outside can be controlled as desired by the pressure applied by the pressure application member. In particular, since the oscillation of the pressure is suppressed by providing the deflection means, the pressure flowing out to the outside can be controlled with high accuracy.

  At this time, it is desirable to further include means for applying a force to the valve body in the direction opposite to the direction in which the pressure is applied by the pressure application member, such as the spring described in the means 5.

(First embodiment)
Hereinafter, a first embodiment in which a fluid control valve according to the present invention is applied to a fluid control valve used in a semiconductor manufacturing process will be described with reference to the drawings.

  FIG. 1 shows a cross-sectional configuration of a fluid control valve according to this embodiment.

  As shown in the drawing, the fluid control valve 10 has a substantially rectangular parallelepiped shape by integrally assembling the bottom plate 12, the body 14, and the cover 16 in this order. Here, the bottom plate 12 and the cover 16 are formed of a resin such as propylene resin, for example, and the body 14 is formed of a resin such as a fluorine-based synthetic resin.

  The body 14 is provided with an inlet 18 and an outlet 20. The fluid control valve 10 causes the chemical solution that has flowed into the inflow port 18 to flow out to the outside via the outflow port 20. Specifically, the inflow port 18 can communicate with the outflow port 20 via the upstream fluid chamber 22 and the downstream fluid chamber 24.

  The upstream fluid chamber 22 and the downstream fluid chamber 24 can communicate with each other at the center of the body 14. Specifically, the upstream fluid chamber 22 and the downstream fluid chamber 24 are communicated and blocked by the valve body 26. The valve body 26 includes a shaft portion 30 and a flexible membrane portion 28 that is connected at the center lower portion of the shaft portion 30. The shaft portion 30 is configured to include an enlarged portion 30a whose cross-sectional area is enlarged at the central portion in the axial direction. The enlarged portion 30a has a tapered shape in which the cross-sectional area is reduced as it approaches the flexible film portion 28. The enlarged portion 30a has the largest cross-sectional area at the end portion farthest from the flexible membrane portion 28, whereby the end portion of the enlarged portion 30a extends in a direction orthogonal to the axial direction. On the other hand, it has a flat plane portion.

  The valve body 26 is accommodated so that the axial direction of the shaft portion 30 penetrates the upstream fluid chamber 22 and the downstream fluid chamber 24. Specifically, the axis of the shaft portion 30 is disposed on a line D having a direction from the bottom plate 12 side to the cover 16 side of the fluid control valve 10 and passing through a substantially central portion of a cross section orthogonal to the same direction. ing. The valve body 26 can be displaced along the direction of the line D. In other words, it can be displaced along the axial direction of the valve body 26. As a result, the end portion of the enlarged portion 30 a is seated on the seat portion 32 formed by the inner wall of the body 14, whereby the upstream fluid chamber 22 and the downstream fluid chamber 24 are blocked. On the other hand, the upstream fluid chamber 22 and the downstream fluid chamber 24 are communicated with each other by the valve body 26 being displaced downward in the figure along the axial direction of the shaft portion 30.

  The end of the flexible membrane portion 28 is fixed by being sandwiched between the bottom plate 12 and the body 14. As a result, the upstream fluid chamber 22 and the bottom plate 12 are partitioned by the flexible membrane portion 28.

  An end portion of the shaft portion 30 on the flexible film portion 28 side is formed in a hemispherical shape and is accommodated in a hemispherical concave portion 34 a of the spring receiving member 34. Although the spring receiving member 34 is a substantially columnar member, the cross-sectional area is enlarged and formed in three steps. And the said recessed part 34a is formed in the edge part side where the cross-sectional area becomes the largest, and the coil spring 36 is contacting the part where the same cross-sectional area becomes the largest. The portion of the spring receiving member 34 that has the smallest cross-sectional area is housed in a regulating member 12 a formed by the inner wall of the bottom plate 12. The restricting member 12a is a member that divides a substantially cylindrical hole, and the axis of the hole is formed to coincide with the line D. As a result, the spring receiving member 34 has its side surface in contact with the regulating member 12a, so that the displacement direction is regulated in the line D direction.

  On the other hand, an end portion of the shaft portion 30 of the valve body 26 on the side away from the flexible membrane portion 28 is fitted into the central portion of the pressure application member 38. Since the pressure applying member 38 includes the flexible film portion 38a at the end thereof, when the valve body 26 is displaced along the line D, the pressure applying member 38 can follow the displacement. The end of the pressure application member 38 is fixed by being sandwiched between the body 14 and the cover 16. Thereby, the space between the downstream fluid chamber 24 and the cover 16 is blocked. The cover 16 is formed with a pressure working chamber 16a and is filled with air whose pressure is adjusted from the outside.

  Next, the operation of the fluid control valve 10 will be described.

  When the pressure-controlled chamber 16a is not filled with air whose pressure is adjusted, as shown in FIG. 1, the valve element 26 is caused by the elastic force of the coil spring 36 applied to the valve element 26 via the spring receiving member 34. The end portion of the enlarged portion 30 a is seated on the seat portion 32. Thereby, the space between the upstream fluid chamber 22 and the downstream fluid chamber 24 is blocked. For this reason, the chemical | medical solution which flowed in from the inflow port 18 does not flow out to the outflow port 20 side.

  On the other hand, when the pressure-controlled chamber 16a is filled with air whose pressure is adjusted, the pressure application member 38 is displaced downward along the line D in accordance with the pressure in the pressure-action chamber 16a. As a result, the valve body 26 is displaced downward in the figure while aligning its axis with the line D. For this reason, the edge part of the expansion part 30a leaves | separates from the sheet | seat part 32, and the upstream fluid chamber 22 and the downstream fluid chamber 24 are connected. As a result, the chemical solution flowing in from the inflow port 18 flows out from the outflow port 20 through the upstream fluid chamber 22 and the downstream fluid chamber 24. At this time, the pressure of the chemical solution flowing out from the outlet 20 is adjusted to a constant pressure corresponding to the pressure in the pressure action chamber 16a. This is because the force that displaces the valve body 26 downward by the pressure in the pressure working chamber 16a, the force that the elastic force of the coil spring 36 displaces the valve body 26, and the force that the chemical solution exerts on the valve body 26 are: This is because the displacement of the valve body 26 is fixed at the balance. Thereby, the chemical solution having a substantially constant pressure supplied from the inflow port 18 side can be controlled to a desired pressure lower than this with high accuracy and allowed to flow out from the outflow port 20.

  By the way, in general, in the pressure control by the fluid control valve, there is a problem that an oscillation phenomenon in which the pressure of the fluid flowing out to the outside oscillates occurs. Therefore, in this embodiment, the axial direction of the spring receiving member 34 is deflected toward the regulating member 12a, so that a resistance force is applied when the valve body 26 is displaced, and the oscillation phenomenon is suppressed or avoided.

  FIG. 2A shows an enlarged view of the spring receiving member 34 and the coil spring 36. As shown in the figure, the coil spring 36 is formed flat at both ends by reducing the cross-sectional area of the spring material at both ends in the axial direction (line D direction). That is, the both end portions are formed so as to be in a plane having a normal line in the axial direction (line D direction) of the coil spring 36. For this reason, by arranging the coil spring 36 with the axial direction coinciding with the normal direction of the flat surface, the upper end surface of the coil spring 36 can be made flat, and the coil spring 36 can be stably disposed. it can. On the other hand, as shown in the enlarged view of FIG. 2B, the spring receiving member 34 has a contact surface 34b with the coil spring 36 formed as an inclined surface. That is, the contact surface 34b is inclined with respect to a surface having the axial direction of the spring receiving member 34 as the normal direction. Here, the inclination angle θ is a very small angle (for example, “1 to 3 °”). As a result, as shown in FIG. 2A, the axial direction of the spring receiving member 34 is relative to the axial direction (line D direction) of the coil spring 36 even though both ends of the coil spring 36 are flat. Slightly deflected.

  For this reason, the spring receiving member 34 is slightly deflected toward the regulating member 12a shown in FIG. Therefore, when the spring receiving member 34 is displaced along with the displacement of the valve body 26, the distal end side of the spring receiving member 34 comes into contact with the regulating member 12a. For this reason, when the spring receiving member 34 is displaced, a resistance force is exerted from the regulating member 12a. For this reason, the force that causes oscillation in the fluid control valve 10 is canceled by the resistance force. In particular, the force to be applied to the valve body 26 and the spring receiving member 12a in order to avoid the oscillation phenomenon is required to be extremely small and the fluctuation thereof should be small. Can be satisfied. That is, the spring receiving member 34 can be deflected by a simple method in which the contact surface 34b between the spring receiving member 34 and the coil spring 36 is an inclined surface. The force that the spring receiving member 34 receives from the regulating member 12a due to this deflection becomes stable regardless of manufacturing variations (solid differences), aging, temperature changes, and the like.

  Since the resistance force can be applied to the valve body 26 by such a simple method, the clearance between the regulating member 12a and the spring receiving member 34 can be increased, and the sliding in the fluid control valve 10 can be performed. Resistance can be reduced. For this reason, the controllability of pressure can be improved.

  Furthermore, by storing the hemispherical tip of the valve body 26 in the hemispherical recess of the spring receiving member 34, the relative positional relationship between the recess 34a of the spring receiving member 34 and the tip of the valve body 26 is mechanical. Automatically adjustable. For this reason, even if the spring receiving member 34a is deflected, the valve body 26 can maintain the axial direction in the displacement direction (direction of line D). Therefore, the enlarged portion 30 a of the valve body 26 can be satisfactorily seated on the seat portion 32. For this reason, the controllability of pressure can be further improved. It is desirable that the diameter of the recess 34 a of the spring receiving member 34 is set to be larger than the diameter of the hemispherical tip of the valve body 26.

  In addition, since the pressure oscillation phenomenon can be suppressed or avoided in the above-described aspect, there is also a demand for the contact surface of the valve body 26 with the seat portion 32 to have a tapered shape with a large angle at which the oscillation phenomenon hardly occurs. Hateful. For this reason, as in the present embodiment, the contact surface with the seat portion 32 can also be a flat surface, so that consumption of the seat portion 32 and the valve body 26 can be suitably suppressed or avoided.

  According to the embodiment described in detail above, the following effects can be obtained.

  (1) The axial direction of the spring receiving member 34 is deflected toward the regulating member 12a with respect to the displacement direction (line D direction) of the valve element 26. As a result, a stable resistance force can be applied to the spring receiving member 34 when the spring receiving member 34 is displaced, regardless of the individual difference, aging, temperature change, or the like of the fluid control valve 10. Therefore, occurrence of pressure oscillation can be suitably suppressed or avoided.

  (2) The spring receiving member 34 and the valve body 26 are in direct contact with each other. As described above, since the third member is not interposed between the spring receiving member 34 and the valve body 26, an increase in the number of parts can be avoided.

  (3) The hemispherical tip of the valve body 26 is housed in the hemispherical recess 34a of the spring receiving member 34. Thereby, even if the spring receiving member 34 is deflected, the deflection of the valve body 26 can be avoided, and the pressure of the fluid flowing out to the outside can be more suitably controlled.

  (4) The contact surface 34b of the spring receiving member 34 with the coil spring 36 is an inclined surface. Accordingly, the spring receiving member 34 can be easily and appropriately deflected with respect to the axial direction of the coil spring 36. On the other hand, for example, when the end surface on the spring receiving member 34 side of the coil spring 36 is not reduced in cross-sectional area and the end surface is inclined, the coil spring 36 is manufactured during the manufacture of the fluid control valve 10. Is stored in the bottom plate 12, the direction of the coil spring 36 must be checked, and the manufacturing process becomes complicated.

  (5) Pressure was applied to the downstream fluid chamber 24 by the pressure application member 38. Thereby, the pressure of the fluid flowing out to the outside can be controlled as desired.

(Second Embodiment)
Hereinafter, the second embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  FIG. 3A shows the configuration of the fluid control valve 10 according to the present embodiment. In FIG. 3A, members corresponding to those in FIG. 1 are given the same reference numerals for convenience.

  As shown in the drawing, the fluid control valve 10 of the present embodiment does not decrease the cross-sectional area of the spring material at the end of the coil spring 36 on the spring receiving member 34 side, thereby moving the spring receiving member 34 to the regulating member 12a side. To deflect. That is, as shown in FIG. 3B in which the spring receiving member 34 and the coil spring 36 are enlarged, the coil spring 34 has a flat end on the bottom plate 12 side, while the spring receiving member 34 side has a flat end. The end is inclined. For this reason, although the contact surface with the coil spring 36 is formed flat in the spring receiving member 34, the spring receiving member 34 can be deflected.

  Also by this embodiment described above, the effects (1) to (3) and (5) of the first embodiment can be obtained.

(Third embodiment)
Hereinafter, the third embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  FIG. 4 shows the configuration of the fluid control valve 10 according to the present embodiment. In FIG. 4, members corresponding to those in FIG. 1 are given the same reference numerals for convenience.

  As shown in the drawing, in the present embodiment, a hemispherical convex portion 34c is provided at an end portion of the spring receiving member 34 that is not accommodated in the regulating member 12a. Specifically, the convex portion 34 c is formed with the axis of the spring receiving member 34 as the center. And hemispherical recessed part 26a is formed in the edge part by the side of the flexible membrane part 28 among the valve bodies 26, and the said convex part 34c is accommodated in the recessed part 26a. The contact surface of the spring receiving member 34 with the coil spring 36 is an inclined surface as in the first embodiment.

  Also according to the present embodiment described above, it is possible to obtain effects according to the effects (1) to (5) of the first embodiment.

(Fourth embodiment)
Hereinafter, the fourth embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  FIG. 5 shows a configuration of the fluid control valve 10 according to the present embodiment. In FIG. 5, members corresponding to those in FIG.

  As illustrated, in the present embodiment, the valve body 26 also has a function of a spring receiving member. That is, the end of the valve body 26 on the flexible membrane portion 28 side is a spring receiver 26b. Further, a hemispherical convex portion 26 c is formed at the end portion of the valve body 26 around the axis. On the other hand, a deflected member 40 is provided on the regulating member 12a. A hemispherical recess 40a is provided at the end of the deflected member 40 on the side different from the regulating member 12a side. And the said convex part 26c is accommodated in this recessed part 40a. The deflected member 40 is basically made of resin, but a metal piece 40b is embedded in a part of the side surface of the end portion on the regulating member 12a side. As a result, the deflected member 40 has a non-uniform density at the end on the regulating member 12a side, and the density of only a part of the end is increased. For this reason, the deflected member 40 is deflected in the direction in which the density is increased. In other words, it is deflected toward the side in which the metal piece 40b is embedded with respect to the axial direction. For this reason, the deflected member 40 is deflected toward the regulating member 12 a with respect to the axial direction of the valve body 26.

  Also according to the present embodiment described above, it is possible to obtain effects according to the effects (1) to (5) of the first embodiment.

(Fifth embodiment)
Hereinafter, a fifth embodiment will be described with reference to the drawings, focusing on differences from the first embodiment.

  FIG. 6A shows the configuration of the fluid control valve 10 according to the present embodiment. In FIG. 6A, members corresponding to those in FIG. 1 are given the same reference numerals for convenience.

  As shown in the drawing, an enlarged portion 52 a is formed on the shaft portion 52 of the valve body 50. When the enlarged portion 52a is seated on the seat portion 32, the upstream fluid chamber 22 and the downstream fluid chamber 24 are blocked, and when the enlarged portion 52a is separated from the seat portion 32, the upstream fluid chamber. 22 and the downstream fluid chamber 24 communicate with each other.

  The valve body 50 includes a flexible membrane portion 54a and a pressure applying member 54b. The upstream fluid chamber 22 is partitioned from the bottom plate 12 by the flexible membrane portion 54a, and the pressure applying member 54b. The downstream fluid chamber 24 is partitioned from the cover 16. A hemispherical convex portion 52b is provided at the end of the valve body 50 on the pressure applying member 54b side.

  On the other hand, a spring receiving member 60 is provided on the cover 16 side. The spring receiving member 60 includes a hemispherical concave portion 60a, and the convex portion 52b is accommodated in the concave portion 60a. The spring receiving member 60 is given an elastic force in the valve closing direction of the valve body 50 by a pair of coil springs 62 and 64. Both ends of the pair of coil springs 62 and 64 are formed flat. Further, the displacement direction of the spring receiving member 60 is regulated from the side surface thereof by the regulating member 16 b formed by the inner wall of the cover 16. In this embodiment, the pressure action chamber 16a is defined by the cover 16 and the pressure application member 54b.

  Further, a coil spring 65 is provided between the bottom plate 12 and the valve body 50 to apply an elastic force in the valve closing direction to the valve body 50.

  In such a configuration, the contact surface of the spring receiving member 60 with the coil spring 62 is formed as an inclined surface as shown in FIG. Accordingly, the spring receiving member 60 is deflected toward the regulating member 16b with respect to the displacement direction of the valve body 50.

  Also according to the present embodiment described above, it is possible to obtain effects according to the effects (1) to (5) of the first embodiment.

(Other embodiments)
Each of the above embodiments may be modified as follows.

  -You may use together the spring receiving member 34 of 1st Embodiment, and the coil spring 36 of 2nd Embodiment.

  In the configuration of the first embodiment, the contact surface of the spring receiving member 34 and the coil spring 36 is flat, and a metal piece is embedded in only a part of the end on the regulating member 12a side. The spring receiving member 34 may be deflected by making the density distribution non-uniform.

  -In 4th Embodiment, while providing the hemispherical convex part in the edge part which is not the regulating member 12a side among the to-be-biased members 40, hemispherical recessed part in the edge part by the side of the flexible film | membrane part 28 of the valve body 26 By providing, the convex portion may be stored in the concave portion.

  In the fourth embodiment, the deflected member 40 is made of resin and the metal piece 40b is embedded therein, but this is not a limitation. In short, the deflected member 40 may be deflected by making the density of the deflected member 40 non-uniform. This non-uniformization is desirably performed by increasing the density of only a part of the side surface of the end portion on the regulating member 12a side.

  -In 5th Embodiment, it is good also considering the contact surface with the coil spring 64 side among the spring receiving members 60 as an inclined surface. Further, both of the contact surfaces with the coil springs 62 and 64 may be inclined surfaces. Moreover, you may adjust the cross-sectional area of a spring material so that the surface at the side of the spring receiving member 60 among the coil spring 62 or the coil spring 64 may become an inclined surface.

  -In 5th Embodiment, the hemispherical recessed part may be provided in the edge part of the valve body 50, a convex part may be provided in the edge part of the spring receiving member 60, and the convex part may be accommodated in a recessed part.

  In each of the above embodiments, the spring receiving members 34 and 60 and the deflected member 40 are in contact with the valve bodies 26 and 50. However, the present invention is not limited to this, and a third member may be interposed therebetween. Good. Even in this case, one end of each of the spring receiving members 34 and 60 and the deflected member 40 and the third member is formed in a hemispherical shape, and the other end is formed as a hemispherical concave portion. If the portion is housed in the other concave portion, the axial deflection of the valve bodies 26 and 50 can be preferably suppressed or avoided regardless of the deflection of the spring receiving members 34 and 60 and the deflected member 40. In addition, the portion housed in the recess may be a substantially perfect sphere instead of a hemisphere. Furthermore, the end portion and the concave portion are not limited to the hemispherical shape, and the concave portion may be formed in a triangular prism shape, for example. In short, the spring receiving members 34, 60 and the deflected member, such as a structure in which the contact surface between the spring receiving members 34, 60 and the deflected member 40 and the third member or the valve bodies 26, 50 can be changed with a small resistance. Any structure that enables relative displacement between the member 40 and the third member or the valve bodies 26 and 50 may be used.

  The means for applying pressure via the pressure applying member is not limited to using pressurized air. For example, as can be seen in Patent Document 1, an elastic member such as a spring may be used.

  Other than that, the general configuration of the fluid control valve is not limited to those exemplified in the above embodiments and modifications thereof. For example, in the fourth and fifth embodiments, another elastic member such as rubber may be used instead of the coil springs 36, 64, 65.

  The fluid control valve 10 is not limited to the one that controls the pressure of the chemical solution, but may be a valve that controls the pressure of pure water used to adjust the concentration of the chemical solution, for example, in the semiconductor manufacturing process. Furthermore, the fluid control valve 10 is not limited to that used in the semiconductor manufacturing process, but may be used in a chemical product manufacturing process, for example.

Sectional drawing which shows the cross-sectional structure of the fluid control valve concerning 1st Embodiment. Sectional drawing and the side view which expand and show the structure of the spring receiving member concerning the embodiment. Sectional drawing which shows the cross-sectional structure of the fluid control valve concerning 2nd Embodiment. Sectional drawing which shows the cross-sectional structure of the fluid control valve concerning 3rd Embodiment. Sectional drawing which shows the cross-sectional structure of the fluid control valve concerning 4th Embodiment. Sectional drawing which shows the cross-sectional structure of the fluid control valve concerning 5th Embodiment. Sectional drawing which shows the cross-sectional structure of the conventional fluid control valve.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Fluid control valve, 26, 50 ... Valve body, 26, 52 ... Shaft part, 28, 54a ... Flexible film | membrane part, 34 ... Spring receiving member (one Embodiment of a movable member), 40 ... Deflected member ( One embodiment of a movable member).

Claims (9)

A fluid passage is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the upstream side is displaced by displacement of the valve body. In the fluid control valve that causes the fluid flowing into the fluid chamber to flow out to the outside through the downstream fluid chamber,
A movable member that is displaced in conjunction with the shaft portion;
A regulating member that is provided on a side surface of the movable member and regulates a displacement direction of the movable member to a displacement direction of the valve body;
Deflection means for deflecting the movable member toward the regulating member with respect to the displacement direction of the valve body ,
The fluid control valve is characterized in that the movable member is displaced so as to move in parallel with the displacement direction of the valve body in accordance with the displacement of the valve body . A fluid passage is partitioned into an upstream fluid chamber and a downstream fluid chamber by a valve body including a shaft portion and a flexible membrane portion connected to the shaft portion, and the upstream side is displaced by displacement of the valve body. In the fluid control valve that causes the fluid flowing into the fluid chamber to flow out to the outside through the downstream fluid chamber,
A movable member that is displaced in conjunction with the shaft portion;
A regulating member that is provided on a side surface of the movable member and regulates a displacement direction of the movable member to a displacement direction of the valve body;
Deflection means for deflecting the movable member toward the regulating member with respect to the displacement direction of the valve body ,
The movable member is exerted by a spring formed so that both ends in the axial direction are flat,
The deflection means is configured by making a contact surface with the spring of the movable member an inclined surface,
The regulating member is in contact with a portion of the movable member that is separated from the contact surface with the spring in the axial direction of the movable member . The fluid is used in a semiconductor manufacturing process or a chemical product manufacturing process,
The regulating member, according to claim 1 or 2 fluid control valve according to characterized in that it is provided outside the flow path of the fluid. When the movable member is deflected to the regulating member side, the movable member further includes means for allowing relative displacement between the movable member and a member that transmits a force accompanying the displacement of the valve body to the movable member. The fluid control valve according to any one of claims 1 to 3 . One end of either the member that transmits the force accompanying the displacement of the valve body to the movable member or the movable member has a hemispherical recess, and the other end is accommodated in the recess. the fluid control valve according to any one of claims 1-4, characterized. The fluid control valve according to claim 5 , wherein the member that transmits a force accompanying displacement of the valve body to the movable member is a shaft portion of the valve body. It said deflection means, a fluid control valve according to any one of claims 1 to 6, characterized in that is constituted by the movable member. The movable member is exerted by a spring formed so that both ends in the axial direction are flat,
The fluid control valve according to claim 6 , wherein the deflecting unit is configured such that a contact surface with the spring of the movable member is an inclined surface. A pressure applying member that divides the downstream fluid chamber and is displaced in conjunction with the valve body;
Wherein the downstream fluid chamber, fluid control valve according to any one of claims 1-8, characterized in that pressure through the pressure applying member is made to be applied.

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