JP4898136B2 - Intermittently moving microscope with electric optical diaphragm - Google Patents

Description

  The present invention relates to a microscope equipped with an intermittent movement type electric optical diaphragm.

  In general, microscopes are used in various fields such as medical and biology as well as industrial fields such as inspection of semiconductor wafers and magnetic heads, quality control of metal structures, and research and development of new materials. .

  As a conventional microscope, for example, there is an electric microscope disclosed in Patent Document 1 as shown in FIG. This conventional electric microscope includes a light source 101 such as a halogen lamp, a collector lens 102 that condenses light emitted from the light source 101, an ND filter 103 for dimming without changing the color temperature of the light source 101, and a field of view. An electric optical aperture including an aperture stop 104 and an aperture stop 105, a plurality of condenser lenses 106, a stage 108 on which an observation sample 107 is placed, and a plurality of objective lenses 110 attached to an electric revolver 109 are provided.

  The electric optical aperture can be continuously moved from a closed state to an opened state by an instruction from a switch of an operation unit (not shown). In general, the setting position of the electric drive unit represented by the aperture stop 105 is registered for each revolver hole to which a plurality of objective lenses 110 are attached. This is generally called a preset function. When the electric revolver 109 is switched, the aperture stop 105 is also interlocked to move to a set position (preset position) registered with the hole number of the movement destination of the electric revolver 109. . With the preset function, the observer can observe the sample at the optimum position without setting the aperture stop 105 by setting the objective lens 108.

  A conventional microscope disclosed in Patent Document 2 includes a visible light optical system (not shown) and an ultraviolet light observation TV camera 202 for visual observation with a barrel binocular unit 201 of a microscope main body 200 as shown in FIG. In this configuration, a captured image is observed on a monitor 204 of a personal computer (hereinafter, PC) 203. Further, the microscope main body 200 is operated from the PC 203 to display on the monitor 204 the driving / resting state of the electric drive unit and the current position information of the optical aperture. Further, the microscope 200 instructs the absolute movement of the aperture stop by a command from the PC 203. When the observer inputs a command or builds a program, when moving the aperture stop from the preset position, the observer gives an aperture stop movement instruction and confirms the current position, so that quick positioning reproducibility is good. Inspection is possible.

  FIG. 20 shows a conventional microscope structure disclosed in Patent Document 3. This conventional microscope has a configuration in which an operation command switch 301 and an information input device 302 are connected to a microcomputer 303. This microcomputer 303 is connected to motors 305 and 306 and address detection devices 307 and 308. The motor 305 rotates the revolver 309 mounted with the objective lenses 311 to 315, and the motor 306 rotates the turret 310 mounted with a plurality of aperture stops having different diameters.

By rotating the turret 310 in this manner, the present apparatus changes the diameter of the aperture stop. The observer can quickly and accurately set the aperture stop position by instructing the destination turret number when changing the aperture stop from the preset position.
JP 2001-305433 A JP 09-021957 A Japanese Patent Laid-Open No. 06-222269

  The electric microscope disclosed in Patent Document 1 described above has an aperture stop 105 in addition to a preset position when observing a sample 107 having a three-dimensional structure such as a sample having a multi-wiring structure such as a semiconductor substrate or a liquid crystal substrate. In many cases, the image is narrowed down and the depth of focus of the objective lens 110 is increased. In this case, the microscope described above pushes the switch on the operation unit to move the aperture stop 105 to an appropriate diameter. However, since the aperture stop 105 is continuously moved, it takes time to move to the appropriate diameter. In addition, the semiconductor / liquid crystal inspection process requires an accurate and highly reproducible inspection. However, in such a microscope, since the position display part of the aperture stop 105 is not provided, the aperture stop is performed from the preset position. Accurate positioning is impossible, and errors may occur during inspection.

  In recent years, in semiconductor factories and the like, there is a tendency to reduce the installation space for manufacturing apparatuses and inspection apparatuses as much as possible to suppress capital investment in clean rooms and the like, and downsizing of each apparatus is required. Therefore, the microscope disclosed in Patent Document 2 described above adds a system called a PC 203 and a monitor 204, and increases the installation space. In addition, using the PC 203 increases the cost of the entire microscope.

  Furthermore, the movement of the aperture stop of the microscope disclosed in Patent Document 3 described above cannot set a delicate position. In addition, in order to perform delicate position setting, the number of turrets 310 is increased, which increases costs. Further, there is a problem that the turret 310 itself is large and the entire microscope becomes large.

  Therefore, in the present invention, in a microscope using an electric optical diaphragm, a PC or the like is not required, there are no parts of the mechanical intermittent mechanism of the turret, and the movement of the optical diaphragm from the preset value is quick, and positioning is performed. An object of the present invention is to provide a microscope that can be finely adjusted with good reproducibility, low cost, and space saving.

In order to achieve the object, the present invention provides an optical optical diaphragm member that includes an optical diaphragm that narrows a light beam emitted from a light source , a drive unit that opens and closes the optical diaphragm, and a control unit that controls the drive unit. An operation unit for instructing the control unit to open and close the optical diaphragm and operating the optical diaphragm to open and close , the control unit opening the optical diaphragm by an operation by the operation unit When receiving an instruction to open and close, if it is determined that the operation unit has been operated even after a lapse of a certain time since the operation of the operation unit has been performed, The intermittent movement type electric motor characterized in that when the opening / closing of the optical diaphragm is continuously driven and it is determined that the optical diaphragm is not operated , the driving unit is controlled to intermittently drive the opening / closing of the optical diaphragm at regular intervals. With optical aperture Provide a microscope.

  According to the present invention, in a microscope using an electric optical aperture, a control device such as a computer is not required, parts of a mechanical intermittent mechanism such as a turret are not required, and the preset value of the optical aperture is not required. It is possible to provide a microscope which can move quickly, has good reproducibility of positioning, can be finely adjusted with low cost and space.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  A first embodiment according to the present invention will be described in detail with reference to FIGS.

  FIG. 1 is a diagram showing a schematic configuration of the entire apparatus according to the first embodiment of the present invention.

  As shown in FIG. 1, the microscope 1 has a revolver unit 4 disposed at a position facing a stage 3 on which a sample 2 can be mounted. The revolver 4a provided in the revolver unit 4 can be equipped with up to six objective lenses 5. In the revolver 4a, numbers 1 to 6 are assigned to mounting holes (not shown) for mounting the objective lenses. In addition, the revolver unit 4 includes a revolver motor 6 and a revolver sensor group 7. The revolver sensor group 7 includes a hole number sensor (not shown) that detects the current hole number of the revolver unit 4 and a movement completion sensor (not shown) that detects that the optical axis has been inserted into the objective lens 5. Yes.

  The illumination unit 8 includes a microscope light source 9 that emits light to irradiate the sample 2, an illumination system lens 9 (a) that transmits light emitted from the microscope light source 9, and an illumination system lens 9 (a). A diaphragm member 11 which is a wing diaphragm provided in an aperture diaphragm (hereinafter referred to as AS: Aperture Stop) unit 10 and configured by at least two diaphragm wings, and a position of the diaphragm member 11 Illumination system lens 9 (b) that is transmitted after being focused on, a field stop (not shown) that is transmitted by illumination system lens 9 (b) (hereinafter referred to as FS: Field Stop), and light toward objective lens 5. And a half mirror 12 that deflects by 90 degrees.

  In addition, the AS unit 10 disposed on the optical axis includes an AS motor 16 configured by a pulse motor that is driven to open and close the diaphragm member 11 that is a blade diaphragm, and an origin position of the AS motor 16. And an AS sensor 17 for detection. The AS unit 10 adjusts the brightness and contrast of the image of the sample 2 by opening and closing the aperture member 11.

  The light deflected 90 degrees by the half mirror 12 passes through the objective lens 5 and is irradiated onto the sample 2 mounted on the stage 3. The reflected light reflected by the sample 2 passes through the objective lens 5 and the half mirror 12 again and then passes through the lens barrel 13. At this time, the observer can observe the sample 2 by displaying an image obtained from the eyepiece 14 or the CCD camera 15 on a monitor (not shown).

  The stage 3 is movable in the plane directions of the X and Y directions, and is mounted on a focusing unit 18 that is movable in the Z direction perpendicular to the plane. The microscope 1 is configured such that the sample 2 can be adjusted to the focus position of the objective lens 5 by the observer moving the focusing unit 18.

  Next, the configuration of the front switch 20 as an operation unit will be described in detail with reference to FIG. FIG. 2 is a diagram showing an external configuration of the front switch 20.

  The microscope 1 is provided with a front switch 20 for an observer to operate the revolver unit 4 and the AS unit 10 which are electric drive units.

  The front switch 20 is a blinking pilot lamp 21 for displaying the power ON state of the microscope 1 and the revolver unit 4 clockwise (hereinafter referred to as CW (Clock Wise), the revolver hole is in the minus direction) or counterclockwise. A revolver drive button group 22 that rotates in the following direction (referred to as CCW (Counter Clock Wise), where the revolver hole is in the plus direction) and an AS drive button group 23 that opens and closes the aperture member 11 of the AS unit 10 are configured.

  The revolver drive button group 22 includes a CW button 24 and a CCW button 25. When the CW button 24 or the CCW button 25 is pressed once, a drive instruction is issued from the control unit 40 to the revolver motor 6, and the objective lens 5 is rotated and switched.

  The AS drive button group 23 includes an open button 26 and a close button 27. The drive of the AS unit 10 is driven while the buttons are kept pressed, and the drive is stopped when released (continuous mode). Further, when the AS drive button group 23 is momentarily pushed away, the diaphragm member 11 moves intermittently (step mode).

  The revolver drive button group 22 and the AS drive button group 23 are arranged on the front of the microscope 1 that is easy for the observer to operate so that the observer can immediately access the buttons while operating the handle (not shown) of the focusing unit 18. Has been placed.

Next, the display unit 30 will be described in detail with reference to FIG. FIG. 3 is a diagram illustrating an external configuration of the display unit 30.
As shown in FIG. 3, the display unit 30 includes a plurality of, for example, eight LEDs 31 (a) to 31 (h), and is installed to display the current diaphragm position of the diaphragm member 11. For example, when the diaphragm member 11 is throttled to the minimum value, only the LED 31 (a) is lit, and when the diaphragm member 11 is opened to the maximum value, the LEDs 31 (a) to (h) are lit. ing.

  Next, the control unit 40 will be described in detail with reference to FIGS. 1 and 4. FIG. 4 is a diagram illustrating a configuration of the control unit 40.

  As shown in FIG. 4, the control unit 40 includes a CPU 41, a RAM 42 that stores data such as calculation data, a ROM 43 that stores a control program, an AS preset diameter of each objective lens 5, and a non-volatile memory 44. The revolver sensor group 7 of the revolver unit 4 is controlled, the drive of the motor is counted, the revolver unit I / O unit 45 (a) for storing the current position, and the AS sensor 17 of the AS unit 10 are controlled, AS unit I / O unit 45 (b) for storing the current position based on the count value of the driving amount, front switch I / O unit 45 (c) serving as input / output of the front switch 20, and input / output to the display unit 30 Display unit I / O unit 45 (d), setting unit I / O unit 45 (e) for setting the switch of setting unit 19, and revolver unit I / O unit 45 a revolver driver 46 that drives the revolver motor 6 under the control from a), and an AS driver 47 that drives the AS motor 16 provided in the AS unit 10 under the control from the AS unit I / O unit 45 (b). Is composed of.

  Next, the control of the display unit will be described in detail with reference to FIGS. FIG. 5 is a diagram illustrating a control configuration of the CPU 41 and the display unit I / O unit 45 (d) which are part of the control unit 40. FIG. 6 is a diagram illustrating data stored in the RAM 42 and the ROM 43.

  As shown in FIG. 5, in order to light the LEDs 31 (a) to 31 (h) of the display unit 30, the CPU 41 sends an "H" signal to the address corresponding to each button of the display unit I / O unit 45 (d). Send. Similarly, when turning off the light, an “L” signal is transmitted to the same address.

  As shown in FIG. 6, the AP address of the RAM 42 has a revolver hole preset table, in which the revolver hole number is stored in the first column and the preset diameter is stored in the second column. The RT address of the ROM 43 has a rotary preset table. The first column stores the rotary switch number of the setting unit 19 and the second column stores the set position.

Next, the configuration of the setting unit 19 will be described in detail with reference to FIG. FIG. 7 is a diagram illustrating an external configuration of the setting unit 19.
The setting unit 19 shown in FIG. 7 includes a piano switch 61 and rotary switches 62 (a) to 62 (f). The piano switch 61 can perform microscope settings such as an AS button invalid setting in order to prevent an erroneous operation by an observer. The same number of rotary switches 62 (a) to 62 (f) as the revolver holes are prepared, and the AS set diameter (AS preset setting position) for each revolver hole can be switched in 16 steps.

Next, the operation method of the present embodiment configured as described above will be described in detail.
First, the initialization process of the microscope 1 will be described with reference to the flowchart shown in FIG. For ease of explanation, an example in which the revolver unit 4 is located in the hole 3 after the power is turned on will be described.

  First, when the microscope 1 is powered on, the CPU 41 in the control unit 40 is initialized (Step 1). After initialization, each setting value of the piano switch 61 of the setting unit 19 shown in FIG. 7 is read and the microscope 1 is set (Step 2). Next, each set value of the rotary switch 62 is acquired, and the start address sw address in the RAM 42 shown in FIG. 6 is set to sw = [N] (N = 1 to 6) (Step 3). Here, in order to set a preset value for each revolver hole, the RT [sw] address in the ROM 43 is referred to and set to the AP [1] to [6] addresses of the RAM 42 (Step 4). Here, since the set value of the rotary switch 62 (a) corresponding to the revolver hole 1 shown in FIG. 7 is 0, sw [1] = 0, and if this 0 is substituted for the start address RT of the ROM 43, RT [ Since the content of the address 0] is 3000, 3000 is set in the AP [1] address. Similarly, sw [2] = 1, AP [2] = 2000, sw [3] = 2, AP [3] = 1500, sw [4] = 3, AP [4] = 1100, sw [5] = 6 AP [5] = 500, sw [6] = D, AP [6] = 100 are set. Thereafter, the AS unit 10 performs initialization. As the initialization operation, the origin position of the AS motor 16 is determined, so that the AS motor 16 moves to the position of the AS sensor 17 (Step 5).

  Since the AS unit 10 moves to the preset position corresponding to the current hole position of the revolver unit 4, the AS unit 10 acquires the current hole position from the hole number sensor of the revolver sensor group 7 (Step 6). Next, the acquired hole number is set at the n-th address in the RAM 42 (Step 7). Since the revolver unit 4 at this time is installed in the hole 3 as described above, n = 3. Therefore, the AS preset diameter set at the AP [n] address of the RAM 42 is acquired (Step 8), and set at the tap address in the RAM 42 (Step 9). At this time, since the content of the AP [3] address is 1500, tap = 1500. The AS unit 10 moves to the position of the tap address, that is, the position of 1500 (Step 10), and the initialization ends.

  Next, the processing operation of the AS unit 10 during revolver driving will be described with reference to the flowchart shown in FIG. Here, only the operation when the revolver unit 4 is in the hole 3 and the CCW button 25 is pressed will be described.

  First, it is determined whether or not the revolver drive button group 22 has been pressed (Step 21). When the revolver drive button group 22 is pressed, it is determined whether or not the CW button is pressed (Step 22). On the other hand, when the revolver drive button group 22 is not pressed, the standby state is maintained. When it is determined that the CW button has been pressed in this determination, 1 is subtracted from the current revolver hole position set in advance in the n-th address in the RAM 42 and set to the tn address in the RAM 42 (Step 23). If it is determined that the button has not been pressed, 1 is added to the current revolver hole position set in advance in the n-th address in the RAM 42, and the t-th address in the RAM 42 is set (Step 24). Here, since the CCW button has been pressed, the process proceeds to Step 24 and is set at address tn in the RAM 42 (tn = 4).

  Next, when the destination revolver hole number is set, the revolver unit 4 moves to the hole number tn (= 4) (Step 25). Next, in order to operate the AS unit 10 in conjunction, a preset diameter is acquired from the AP [tn] address of the RAM 42 (Step 26).

  The acquired preset diameter is set at the tap address in the RAM 42 (Step 27). Here, since tn = 4, tap = 1100.

  Finally, when the destination of the AS unit 10 is set, the AS unit 10 moves to the set position (Step 28). After the movement, although not shown here, the value in the address n in the RAM 42 is rewritten, the refresh operation at the address tn is updated, and this flow is finished.

  Next, the movement process of the AS unit 10 will be described with reference to the flowchart shown in FIG.

  First, a case where the open button 26 of the AS drive button group 23 is continuously pressed (continuous movement processing mode) will be described.

  First, it is determined whether or not the open button 26 has been pressed (Step 31). If it is pressed in this determination, it waits for 500 msec to distinguish between the continuous mode and the step mode (Step 32). For example, after waiting for 500 msec, it is determined whether or not the open button 26 is pressed again (Step 33).

  If the open button 26 has been pressed again, it is determined which of the opening and closing drive instruction buttons has been pressed (Step 34). If the close button 27 is pressed in this determination (closed), the dir address in the RAM 42 is set to CL (CLOSE). (Step 35). On the other hand, when the open button 26 is pressed (open), the dir address in the RAM 42 is set to OP (OPEN). (Step 36). After setting the moving direction in this way, the aperture member 11 provided in the AS unit 10 continuously moves in the set dir direction (Step 37). After the continuous movement, it is determined whether or not the limit has been reached (Step 38). If the limit is reached, return to Step 37. If the limit is not reached, it is determined whether or not the open button 26 of the AS button group 23 is OFF (released) (Step 39). If the open button 26 is not OFF, the process returns to Step 37. If it is OFF, the diaphragm member 11 finishes moving, and the flow ends.

  Next, a case where the open button 26 is momentarily pressed (step movement processing mode) will be described with reference to FIGS. 6, 10, and 11. FIG. 11 is a diagram illustrating the operation regarding the step movement.

  As shown in FIG. 6, the driving range of the AS unit is from position 0 to 3000, and positions RT [0] to RT [9] and RT [A] to RT [F] are arranged over the entire range. Yes. As described above, when the open button 26 is pressed (Step 31), for example, after waiting for 500 msec (Step 32), the state of the open button 26 is confirmed again (Step 33). If the AS button is OFF, Step 40 and subsequent steps Go to move mode sequence.

  First, the position of the current AS unit 10 in the preset table is confirmed. For this purpose, the current position of the current AS unit 10 is acquired from the AS unit I / O unit 45 (b), and the current position is set at the cp address in the RAM 42 (Step 40). Next, a comparison is performed on the value of RT [i] (starting from i = 0) and the value of cp at cp ≧ RT [i] (Step 41). In this comparison, if RT [i] is larger than cp, it is determined that the current position has not been reached, i is incremented (Step 42), and the address of RT [i] is increased, that is, the set position is decreased. Then, the process returns to Step 41, and it is determined which position is the current position repeatedly until cp ≧ RT [i] becomes true. On the other hand, if it is determined in this determination that RT [i] is smaller than cp and the current position is in the table, the movement destination of the AS unit 10 is set. First, it is checked whether the direction of the pressed button of the AS drive button group 23 is the open button 26 or the close button 27 (Step 43).

  When the open button 26 is pressed in this check, it is determined whether i = 0 (Step 44). When i = 0, the setting position of the AS unit 10 is 3000. Therefore, since the AS unit 10 cannot move any more, RT [i] of the current position is set at the tap address in the RAM 42 that designates the movement destination (Step 45). When i.noteq.0, as shown in FIG. 11, the AS unit 10 intermittently moves to the value of the next higher table, so RT [i-1] is set at the tap address (Step 46).

  On the other hand, the operation when the close button 27 is pressed in Step 43 is determined as cp = RT [i] since the movement destination of the AS unit 10 is different as shown in Case 1 and Case 2 in FIG. 11 (Step 47). .

  If the result is true, it is determined whether i = 15 (Step 48). If i = 15, the AS unit position 10 is 0, and the AS unit 10 cannot move any further. Therefore, RT [i] of the current position is set at the tap address. (Step 49). When i ≠ 15, as shown in case 2 in FIG. 10, the AS unit 10 moves intermittently to the value of the next lower table, so RT [i + 1] is set to the tap address (Step 50).

  If cp ≠ RT [i] in Step 47, the current AS unit 10 position is in the middle of the table as in Case 1 shown in FIG. 11, and RT [i] is set at the tap address. (Step 51).

  Thus, the AS unit 10 moves to the value of the set tap address (Step 52), and this flow ends.

Next, the operation method of the display unit 30 will be described in detail with reference to FIG.
After the operation of the AS unit 10 is completed, the current position of the AS unit 10 is acquired from the AS unit I / O unit 45 (b). At this time, if the current position is 0, the CPU 41 issues a lighting instruction only for an address corresponding to the LED 31 (a) of the AS unit I / O unit 45 (b).

  Similarly, when the current position is 1 to 100, the lighting instructions to the addresses of the LEDs 31 (a) and (b) are given, and when the current position is 101 to 150, the addresses to the addresses of the LEDs 31 (a) to (c) are displayed. Like a lighting instruction, a lighting instruction is issued to the address of the LED 31 corresponding to the current position of the AS unit 10.

  In this embodiment, when the AS drive button group 23 is pressed, the diaphragm member 11 is intermittently moved as represented by the continuous mode and the step mode, and the current position of the AS unit 10 can be displayed on the display unit 30. Thereby, it can be made cheap and space-saving without using a PC or an AS turret. In addition to the AS preset value, the observer can move the AS unit 10 quickly and accurately when moving and observing the AS unit 10.

  Next, a second embodiment according to the present invention will be described in detail with reference to FIGS. FIG. 12 is an external configuration diagram of the front switch 20 according to the present embodiment. FIG. 13 is a flowchart when performing preset setting of the AS unit according to the present embodiment. In the present embodiment, only components that are different from the first embodiment described above will be described, and the same reference numerals are given to the same components as those in the first embodiment, and detailed description thereof will be omitted.

  As shown in FIG. 12, the front switch 20 adds a setting switch 28 for setting the current position of the AS unit 10 to each number of the rotary switch 62. Although not shown, the setting table (RT [i] table) of the AS unit 10 by each number of the rotary switch 62 is in the nonvolatile memory 44.

Next, the operation of this embodiment will be described with reference to FIG.
When the power of the microscope 1 is turned on, the setting value of the piano switch 61 of the setting unit 19 shown in FIG. At this time, it is determined whether or not Bit 1 of the piano switch 61 is pressed (Step 61). At this time, if Bit 1 of the piano switch 61 is OFF, the observation mode is set, and an initialization operation is performed (Step 62). This sequence ends after the initialization operation is completed. On the other hand, if Bit1 is ON, the setting mode is to assign the current value of the AS unit 10 to each number of each rotary switch 62, and the counter i in the RAM 42 (not shown) is set to 0 (Step 63).

  Next, it is determined whether or not counter i ≦ F (Step 64). If i ≦ F in this determination, the rotary switch 62 is moved to the number i, here 0 (Step 65). Thereafter, the AS unit 10 is moved to the position to be assigned to the rotary switch 0 by the operation of the open button 26 or the close button 27 (Step 66). Further, the setting switch 27 is pressed (Step 67), the current position is acquired from the AS unit I / O unit 45 (b), and set to RT [0] (Step 68). Then, i is incremented (Step 69), and the process returns to Step 64. This sequence is repeated 16 times in total for the number of the rotary switch 62.

  If the counter i> F in the determination of Step 64 (Step 64), the setting of all the numbers of the rotary switch 62 is completed, and this sequence is finished.

When such a setting mode ends, the microscope 1 is set to the observation mode by turning off Bit 1 of the piano switch 61 and turning on the power again.
In the present embodiment, since the AS preset table value can be arbitrarily set, it is possible to set the AS unit 10 according to the preference of the observer.

  Next, a third embodiment according to the present invention will be described in detail with reference to FIGS. FIG. 14 is an external configuration diagram of the hand switch 71 according to the present embodiment. FIG. 15 is a diagram showing a table in the nonvolatile raw memory 44 according to the present embodiment. FIG. 16 is a flowchart for explaining the initial setting according to the present embodiment. In the present embodiment, only components that are different from the first embodiment described above will be described, and the same reference numerals are given to the same components as those in the first embodiment, and detailed description thereof will be omitted.

  As shown in FIG. 14, the hand switch 71 includes a revolver drive button group 72 for instructing movement of the revolver unit 4, an AS drive button group 73 for instructing movement of the AS unit 10, and current states of the revolver unit 4 and the AS unit 10. The display window 74 for displaying the state of the above, a selection button group 75 used when setting the objective lens 5 installed in each revolver hole, and a setting button 76.

  As shown in FIG. 15, the nonvolatile memory 44 in the control unit 40 is provided with an OB table and an RT table. In the OB table, the address of the revolver hole number is described in the first column, and objective lens information such as type and magnification is described in the second column. In the RT table, the revolver hole and the rotary switch number address are described in the first column, and the set position value of the AS unit 10 is described in the second column. Further, at the CAL address of the ROM 43, there is a CAL table corresponding to the objective lens information of the objective lens described in the OB table and in which basic values for setting the table are set. Although not shown, the control unit 40 uses a hand switch I / O unit that is an interface between the hand switch 71 and the CPU 41.

Next, the operation method of the present embodiment will be described in detail with reference to FIG.
When the microscope 1 is turned on, the setting value of the piano switch 61 of the setting unit 19 is first read to set the microscope. At this time, it is determined whether Bit 2 of the piano switch 61 is ON (Step 81). If it is not ON in this determination, the observation mode is set, an initialization operation is performed (Step 82), and this sequence is terminated. On the other hand, if it is ON in this determination, it is determined whether Bit 3 of the piano switch 61 is ON (Step 83). If Bit 3 is ON in this determination, the mode shifts to an input mode for inputting the type and magnification of the objective lens 5 attached to the current revolver hole.

  In the input mode, the current hole number is acquired from the revolver sensor group 7 and set to the n-th address in the RAM 42 (Step 84). Here, as shown in FIG. 14, the display window 74 displays the type and magnification of the objective lens as, for example, “OB1 L10”. OB1 indicates the current revolver hole 1, and L10 indicates that the magnification of the long working distance objective lens is 10 times. Any one of the selection buttons 75 is pressed to select the type of the objective lens 5 that is installed (Step 85). Next, the setting button 76 is pressed (Step 86).

  As a result, the current objective lens type is set to the OB [n] address (Step 87). Then, values from RT [n] [0] to RT [n] [F] are automatically calculated (Step 88). A detailed calculation method will be described later. Here, the objective lens 5 is moved and converted (Step 89), the same processing from Step 84 to Step 89 is repeated, and the type of the objective lens 5 is registered for all the revolver holes.

  When registration is completed for all the revolver holes, Bit 3 of the piano switch 61 is turned OFF, the power is turned on again, and after confirming Step 81 again, the process proceeds to Step 83. Here, since Bit3 is OFF, the mode shifts to observation mode 2.

  In the observation mode 2, first, the current set value of the rotary switch 62 is acquired and set to sw [1] to [6] (Step 90). Then, the preset value of each revolver hole is set at addresses AP [1] to [6] in the RAM 42 with reference to the RT table. Here, since the rotary switch 62 (a) set value of the revolver hole 1 is 0 as shown in FIG. 6, RT [1] [0] is set to AP [1]. Similarly, AP [2] = RT [2] [1], AP [3] = RT [3] [2], AP [4] = RT [4] [3], AP [5] = RT [ 5] [6], AP [6] = RT [6] [D] are set (Step 91). Thereafter, the initialization operation of the AS unit 10 is started (Step 92). The subsequent operation is the same as the operation after Step 5 shown in FIG. 8, and a description thereof is omitted here.

Next, the calculation at Step 88 will be described using the RT table shown in FIG.
The setting position of the diaphragm member 11 is generally said to be 70 to 80% of the objective lens pupil diameter, and is set according to the observer's preference within the pupil diameter range according to the observation. Here, the pupil diameter is determined by the following equation.
(Pupil diameter) = 2 × NA (Numerical aperture) × f (Focal distance of objective lens): Unit [mm]
In Step 65 of the flowchart shown in FIG. 16, after the type / magnification of the objective lens 5 is set to OB [n], first, the CAL table in the nonvolatile memory 44 shown in FIG. 15 is referred to. In the CAL table, basic values are set according to the type of each objective lens. This basic value is position information of the diaphragm member 11 corresponding to the pupil diameter, and is a value calculated by the following formula according to each objective lens.
(Basic value) = (pupil diameter) × (projection magnification of AS onto pupil position) ⁻¹ × 3000 (pulse) ÷ (AS maximum diameter) − (1)
The referenced values from the CAL table are set to RT [1] [i] to RT [6] [i] based on the values obtained by the following equations.
RT [N] [i] = (basic value) ÷ 16 × (16−i) − (2)
(However, N = revolver number: 1-6, i = rotary switch number: 1-16)
Here, since OB [1] is set to L5, referring to the value of L5 in the CAL table, it is 1800. From the equation (2),
RT [1] [0] = 1800 ÷ 16 × (16−0) = 1800
RT [1] [1] = 1800 ÷ 16 × (16−1) = 1687.5≈1688
Thus, the RT table is calculated.

As described above, according to the present embodiment, the AS preset table corresponding to the objective lens 5 is automatically generated, so that the observer can perform the optimum observation according to the use magnification without setting time. .
In the present invention, the optical diaphragm is limited to the epi-illumination AS, but may be a translucent AS or an epi-illumination / transmission FS.

  In the present invention, the piano type switch 61 and the rotary switch 62 are used, but the configuration of the setting unit 19 is not limited to this. The number of bits of these switches is not limited to this number.

In the present invention, the standby time is set to 500 msec in order to distinguish between the continuous mode and the step mode, but the present invention is not limited to this. Further, step movement and continuous movement may be switched by the piano switch 61 of the setting unit 19 or the like.
In the present invention, a system not using a PC has been described. However, a system provided with a PC may be used if space saving is possible.

  In the present invention, the display unit 30 uses eight LEDs, but this number is not limited. Moreover, 7 segment LED, a liquid crystal, a plasma display, etc. may be sufficient. Furthermore, in the step mode, the AS unit 10 is intermittently moved as many times as the button is pressed, and the observer can store the number of times so that accurate positioning can be achieved.

  In the present invention, the RT [i] table extends over the entire movement range, but is not limited to this. Further, when the AS unit 10 becomes below a certain position, the step movement may be switched to the continuous movement.

  In the present invention, the combination of the revolver hole number and the preset value has been described. However, the observation method-revolver hole number-preset value may be used. Needless to say, an AP [i] table is required for each observation method at this time.

In the present invention, the moving speed in the continuous mode is constant, but the moving speed may be a speed at which the brightness of the visual field changes to be constant.
In the present invention, the AS unit 10 is moved only by the operation using the open button 26 and the close button 27. However, as shown in FIG. 17, a button for directly instructing the movement destination may be provided.

In the present invention, the microscope operation is performed using the front switch 20, but a hand switch as shown in FIG. 14 may be used. At this time, it goes without saying that a hand switch I / O unit is required in the control unit 40.
In the first embodiment, the RT [i] table is provided in the ROM, but it may be in a nonvolatile memory.

  In the second embodiment, the set values of all the revolver holes are assigned by one rotary switch 62, but the operation of the flowchart shown in FIG. 13 may be performed for each revolver hole. In the second embodiment, the flowchart shown in FIG. 13 loops until i = F. When the value of RT [i] becomes 0, all the values after RT [i] become 0, and this loop is executed. It is also possible to exit.

In the second embodiment, the setting switch 28 is newly provided in the front switch 27, but buttons on the front switch 27 such as the open button 26 and the close button 27 may be substituted.
In the second embodiment, the AS setting value is assigned using the front switch in the assignment of each number of the rotary switch 62. However, the assignment may be performed using communication from a PC or the like. In this case, it goes without saying that a communication I / O unit is required in the control unit 40.

In the third embodiment shown in FIG. 14, the values of the RT table are determined using the equations (1) and (2). However, the present invention is not limited to this equation, and an optimum table can be set for each objective lens. Good.
In the third embodiment, the hand switch 71 is used to set the objective lens. However, the setting may be performed by communication from a system such as a PC. In this case, it goes without saying that a communication I / O unit is required in the control unit 40.

It is a figure which shows schematic structure of the whole apparatus in 1st Embodiment which concerns on this invention. It is a figure which shows the external appearance structure of the front switch in this apparatus. It is a figure which shows the external appearance structure of the display part in this apparatus. It is a figure which shows the structure of the control part in this apparatus. It is a figure which shows the control structure of CPU which is a part of control part in this apparatus, and a display part. It is a figure which shows the data inside the memory in this apparatus. It is a figure which shows the external appearance structure of the setting part in this apparatus. It is a flowchart which shows the initialization process of a microscope. It is a flowchart which shows the processing operation of AS unit at the time of a revolver drive. It is a flowchart which shows the movement process of AS unit. It is operation | movement explanatory drawing about step movement. It is an external appearance block diagram of the front switch in 2nd Embodiment which concerns on this invention. It is a flowchart at the time of performing the preset setting of the AS unit according to the present embodiment. It is an external appearance block diagram of the hand switch in 3rd Embodiment which concerns on this invention. It is a figure which shows the table in the non-volatile raw memory which concerns on this embodiment. It is a flowchart at the time of performing the initial setting which concerns on this embodiment. It is a figure which shows the modification concerning the structure of AS unit. It is a figure which shows the structure of the conventional microscope. It is a figure which shows the structure of the conventional microscope. It is a figure which shows the structure of the conventional microscope.

Explanation of symbols

  1: microscope, 2: sample, 3: stage, 4 revolver unit, 5: objective lens, 6: revolver motor, 7: revolver sensor group, 8: illumination unit, 9: microscope light source, 9 (a), (b) : Illumination system lens, 10: AS unit, 11: aperture member, 12: half mirror, 13: lens barrel, 14: eyepiece lens, 15: CCD camera, 16: AS motor, 17: AS sensor, 18: focusing unit , 19: setting unit, 20: front switch, 21: pilot lamp, 22: revolver drive button group, 23: AS drive button group, 24: CW button, 25: CCW button, 26: open button, 27: close button, 30: Display unit, 31 (a), (b), (c), (d), (e), (f), (g), (h): LED, 40: Control unit, 41: CPU, 42 : RAM, 43: ROM, 4: Nonvolatile raw memory, 45 (a): Revolver unit I / O unit, 45 (b): AS unit I / O unit, 45 (c): Front switch I / O unit, 45 (d): Display unit I / O section, 45 (e): setting section I / O section, 46: revolver driver, 47: AS driver, 61: piano switch, 62 (a), (b), (c), (d), ( e), (f), (g), (h): Rotary switch.

Claims (7)

An electric optical diaphragm member comprising an optical diaphragm for narrowing a light beam emitted from a light source, and a drive unit for opening and closing the optical diaphragm;
A control unit for controlling the drive unit ;
An operation unit for instructing the control unit to open and close the optical aperture, and operating the optical aperture to open and close ,
A microscope comprising:
The control unit, when receiving an instruction to open and close the optical diaphragm by an operation by the operation unit, determines whether the operation unit is operated even after a predetermined time has elapsed since the operation of the operation unit was performed, If it is determined that it is also operated after a predetermined time has elapsed, the opening and closing of the optical aperture is continuously driven, if it is determined that not operated, the opening and closing of the optical aperture so as to intermittently drive at regular intervals The intermittent movement type electric optical diaphragm microscope characterized by controlling the drive unit . The optical diaphragm is composed of at least two diaphragm blades ,
The microscope with an intermittent movement type electric optical diaphragm according to claim 1, wherein the electric optical diaphragm member changes an opening diameter of the diaphragm spring in accordance with control of the control unit . The intermittent movement type electric optical aperture microscope according to claim 1, wherein the interval for intermittent driving is determined based on a value arbitrarily set in a setting table provided in the control unit.   At least two objective lenses;
  An electric revolver that attaches the objective lens and moves the objective lens on the optical axis;
  Further comprising
  2. The intermittent movement type electric optical diaphragm according to claim 1, wherein the controller determines the interval for intermittent driving based on values set in different setting tables for each position of the hole of the electric revolver. microscope. The microscope with intermittent movement type electric optical aperture according to claim 4 , wherein the setting table is automatically generated based on information of the objective lens set in advance from the operation unit. The setting table has a hole as many switches of the revolver, stop intermittent movement type electric optical according to claim 4, characterized in that switching the preset diameter of the electric optical diaphragm member for each hole of the revolver With microscope. The microscope with an intermittently moving electric optical aperture according to claim 6 , wherein the set diameter is switched by a rotary switch.

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