JP4911902B2 - Piezoelectric generator - Google Patents

Description

  The present invention relates to a piezoelectric power generating element used for piezoelectric power generation, a portable self-supporting power source (generator) disposed on an insole (insole) of shoes, and the like.

The piezoelectric body generates an electric charge proportional to the strain by distorting the polar crystal when an external stress is applied. Load sensors, microphones, and the like are known as this type of application. Piezoelectric power generation is an attempt to positively extract weak signals from these sensors as electrical energy, and in recent years, development has been focused on the following demands.
(1) Requirements for self-supporting distributed power supply due to widespread use of mobile terminals (2) Longer battery life (3) Security (Power for walking recognition lighting and bicycle identification display at midnight walking)
Piezoelectric elements used for these applications are
(1) Piezoelectric polymer (polyvinylidene fluoride)
(2) Piezoelectric ceramics (PZT: lead zirconate titanate)
It is. Incidentally, there is a proposal of an insole formed of a layered piezoelectric ceramic plate in which two plate-shaped piezoelectric ceramic elements are joined with their polarizations reversed (see Patent Document 1).

  Piezoelectric polymers are less prone to failure leading to deformation → destruction due to external forces due to their flexibility. However, the stress distribution in the deformed structure has both compression / tension, and there is an offset of generated charges. This is a problem that cannot be taken out efficiently even though power is generated.

When using piezoelectric ceramics, a structure in which ceramics are bonded to a shim material is used.
Its features are (1) simple structure,
(2) Only one stress can be efficiently extracted as an electrical signal by mechanical-electrical conversion.
(3) Excellent long-term storage compared to piezoelectric polymer,
Is a point. Therefore, it is preferable to use ceramics.

  However, as problems, there are element destruction due to deformation, as a conventional example, there is a limitation in actual use, such as adding a new structure for limiting deformation to within an allowable range, limiting use, and the like.

When a ceramic dielectric film is formed using ceramic powder having an average particle size of 0.08 μm to 1.2 μm by the gas deposition method, a dense film having a strong adhesion to the substrate can be formed. (See Patent Document 2). However, in the proposal, there is no description of specific numerical values regarding the mechanical strength of the ceramic film obtained. When the present inventor formed a film using the ceramic powder having the above-mentioned particle size range, a grain structure having an average particle size of 0.01 to 0.8 μm was obtained. In the tissue, a suitable mechanical strength of the piezoelectric power generation element cannot be obtained.
Further, the spiral piezoelectric ceramic element is described in Patent Document 3 as an actuator (electrical input is converted into force).
In addition, in piezoelectric power generation, Patent Documents 4 and 5 describe an element in which a plurality of strips are arranged on a flat plate.
Patent Document 6 shows a structure in which two ceramics are laminated.

Conventional piezoelectric power generation has been used in a single plate, in which a plurality of plates are arranged or laminated.
In this structure, as shown in FIG. 2, the upper and lower counter electrodes are formed on the piezoelectric ceramic and subjected to polarization treatment to form a piezoelectric element.
In the power generation mechanism, an external force in almost the same direction as the illustrated polarization direction is applied (in some cases, the arrows are facing each other. Importantly, no external force is applied from the direction perpendicular to the polarization axis). On the other hand, the piezoelectric ceramic element receives a stress and generates a voltage proportional to the piezoelectric G constant.

On the other hand, when an external force equal to or greater than the element breaking stress is applied, the element is destroyed. As measures against this, structural measures for limiting the amount of stress deformation are taken, and measures for increasing the mechanical strength of the element (Japanese Patent Application No. 2003-378829) are taken. It is possible to provide a structure having a relative density of 95% or more and a thickness of 01 μm or more and 0.1 μm or less. Such a structure is not generated by a conventional thermal solid-phase reaction, and is different from the gas jet deposition method (particles). And a piezoelectric ceramic film with dramatically improved fracture strength can be formed on a metal shim material.
However, structural ingenuity complicates the element and limits the usage pattern.
Although it differs from piezoelectric power generation, a spiral actuator could be made by molding and firing PZT slurry, but it was difficult to downsize, and it was difficult to make electrodes, and although it showed excellent actuator characteristics, We did not use for.
In general, the concept of applying stress in a direction different from the polarization direction of the piezoelectric element is conventionally known (for example, cited documents 7, 8, and 9). This is because the piezoelectric ceramic layer is a scanning electron microscope. It is not related to piezoelectric elements formed by ceramics consisting of aggregates of small grain structures with an average particle diameter of 0.01 μm or more and 0.1 μm or less as a result of observation. Not from.

JP 2001-204507 A JP 2001-152360 A Japanese Patent No. 2669291 JP 2001-339963 A Japanese Patent Laid-Open No. 5-39661 JP-A-2002-76467 JP-A-2002-76467 JP-A-8-114408 JP-A-9-298324 JP 11-191646 A

  The present invention assumes an insole inserted into a shoe sole as one application of a piezoelectric power generation element. In our daily activities, the act of walking is indispensable, and it has been reported that we walk about 10,000 to 100,000 steps per day. By using a part of this movement for piezoelectric power generation, it is considered that the energy circulation of daily life can be restored.

  In order to prevent the above-described destruction and maximize the input energy, it is necessary to dramatically improve the breaking strength of the piezoelectric ceramic. The fracture strength of ceramics depends greatly on the particle size of the ceramics that constitute them. In particular, in grain boundary fracture, since cracks propagate along the grain boundaries, attempts have been made to segregate the second component that prevents crack propagation at the triple points of the grain boundaries. However, in the case of piezoelectric ceramics, the segregation of the second component is not preferable because it degrades the piezoelectric performance.

The present invention has been made in view of the above-described circumstances, and has improved the technique described in the specification of Japanese Patent Application No. 2003-378829. It does not take a complicated element structure and is a relatively simple technique. An object of the present invention is to provide a piezoelectric power generation element that can suppress generation.
Another object of the present invention is to provide an external stress conversion mechanism to improve the power generation efficiency per unit area of the piezoelectric element, and to integrate in a linear shape or a planar shape by integration to widen the range of use. And

  Furthermore, the object of the present invention is to improve the power generation efficiency per unit volume with a novel structure, and further, the piezoelectric element in which the element itself is self-limiting without taking any special structural measures to break down due to stress deformation. It is to provide a power generation element.

  Furthermore, the object of the present invention is to provide a material composition that is particularly excellent in piezoelectric performance, and in recent years, a material that does not contain lead is desired as an environmentally regulated substance, and ceramics are oxides. While the usage regulations are not strict but are expected to become stricter in the future, we will provide technology to respond to it, and in the past, elements were used on the order of sub-millimeter thickness, but in the form of a film Contributes to the effective use of resources, provides a dense body that can guarantee performance that could not be obtained with conventional piezoelectric ceramics composed of a fine particle structure, and provides a production method for producing this preferred element by a simple method, In particular, the present element is to be provided by a technique capable of forming a film easily and at high speed.

As a result of research to solve the above problems, the mechanical strength of the ceramic film depends on the grain structure of the ceramic, and the piezoelectric power generation element composed of the piezoelectric ceramic film laminated on the shim material has an average grain size as the ceramic grain structure. It has been previously found that a preferable mechanical strength can be obtained if the diameter is in the range of 0.01 μm to 0.1 μm, but further studies have been made with the aim of improving the mechanical strength and durability, and to the present invention. It came.
That is, the above-mentioned problem is that (1) “a piezoelectric ceramic layer is formed on one side of a metal shim material with ceramics having an average particle size of 0.01 μm or more and 0.1 μm or less by observation with a scanning electron microscope. A piezoelectric power generating element characterized in that an electrode provided on the surface of the piezoelectric ceramic layer and the metal shim material serve as a counter electrode, and an electric force is generated by applying an external force different from the polarization direction to the polarized piezoelectric ceramic element. Is achieved.

Further, the above object is achieved by (2) “piezoelectric power generation element according to (1) above, wherein the relative density of the ceramic forming the piezoelectric ceramic layer is 95% or more” of the present invention. .

In addition, the above-described problem is (3) “piezoelectric power generation element according to (1) or (2) above, wherein the metal shim material has a so-called spiral shape in which strips are rounded. Is achieved.

  In addition, the above-mentioned problem is (4) “piezoelectric power generation element according to any one of (1) to (3) above, wherein the ceramic composition is composed of a lead zirconate titanate-based composition. Is achieved.

  In addition, the above-mentioned problem is (5) of the present invention, wherein the ceramic is composed of a composition containing barium titanate as a main component. Is achieved.

  In addition, the above object is achieved by (6) “piezoelectric power generating element according to any one of (1) to (3) above, wherein the ceramic is composed of a potassium niobate composition”. The

  Further, the above-mentioned problem is (7) of the present invention according to any one of (1) to (6) above, wherein the film thickness of the piezoelectric ceramic layer is in the range of 0.5 μm to 30 μm. This is achieved by the “piezoelectric power generation element” described.

Further, the above-mentioned problem is (8) “ a line type piezoelectric power generation element in which electrodes of a plurality of piezoelectric power generation elements are electrically connected in parallel with external leads, wherein the piezoelectric power generation element is the above-mentioned (1) to This is achieved by a line-type piezoelectric power generation device characterized by being a piezoelectric power generation device according to any one of (7) .

In addition, the above-mentioned object is achieved by (9) “ Line-type piezoelectric power generation element according to (8) characterized in that the line-type piezoelectric power generation elements are gathered in a plane ” of the present invention.

Further, the above-mentioned problem is (10) “ a step of forming a ceramic layer by imparting kinetic energy to piezoelectric ceramic particles and colliding with one surface of a spiral metal shim material to form a ceramic layer, It is achieved by a method for manufacturing a piezoelectric power generation element characterized by having a step of forming an upper electrode on the surface .

Furthermore, the problem is, (11) "The piezoelectric ceramic particles of the present invention, lead zirconate titanate-based composition, and wherein the composition composed mainly of barium titanate, or potassium niobate-based composition This is achieved by the “piezoelectric power generation element manufacturing method according to (10) ”.

  As will be apparent from the following detailed and specific description, according to the present invention, a piezoelectric power generating element that is extremely small and capable of high efficiency conversion is provided, and external force can be self-limited before breakdown, and reliability is improved. An extremely high effect is provided in that a flat integrated piezoelectric power generation element is provided by integrating the elements in a line shape or arranging the line integrated elements in a plane.

  In particular, since the piezoelectric ceramic layer is formed of ceramics having an average particle size of 0.01 μm or more and 0.1 μm or less, it has a piezoelectric ceramic film that has significantly superior fracture strength compared to conventional ones. A piezoelectric power generating element can be obtained, and an extremely excellent effect that it can be used for various uses as well as the above-mentioned insole of the shoe sole is exhibited.

  In addition, since the relative density of the ceramic forming the piezoelectric ceramic layer is 95% or more, it is possible to obtain a piezoelectric power generating element having a dense structure and having a piezoelectric ceramic film with more excellent fracture strength. Excellent effect is exhibited.

  In addition, a piezoelectric power generation element made of a material excellent in piezoelectricity can be obtained, and furthermore, a piezoelectric power generation element corresponding to environmental regulations not containing lead can be obtained, and a material that does not operate at 120 ° C. or higher ( Piezoelectric generators that can be used effectively with barium titanate), or show stable performance even in high operating environments such as operating at higher temperatures by using heat-resistant materials (potassium niobate composition) An extremely excellent effect that an element can be provided is exhibited.

  Furthermore, since the film thickness of the piezoelectric ceramic layer is in the range of 0.5 μm or more and 30 μm or less, an extremely excellent effect of enabling efficient piezoelectric power generation conversion with respect to stress is exhibited.

  Furthermore, since the piezoelectric ceramic layer is formed by applying kinetic energy to the ceramic particles and colliding with the substrate, a dense structure can be obtained by a simple and high-speed film formation method. An extremely excellent effect that a piezoelectric power generation element having an excellent piezoelectric ceramic film can be obtained is exhibited.

  In addition, a very small and highly efficient convertible piezoelectric power generation element is provided, and the external force can be self-limited before breaking, and a highly reliable element is provided. This element is integrated in a line or this line integration. It can be said that a planar integrated piezoelectric power generation element can be provided by arranging the elements in a planar shape, and that a complicated and reliable manufacturing method for obtaining a piezoelectric power generation element having excellent characteristics as described above can be provided. An extremely excellent effect is exhibited.

Hereinafter, embodiments of the present invention will be described in detail.
A structure having a relative density of 95% or more and a particle size of 0.01 μm or more and 0.1 μm or less according to the present invention is not generated by the conventional thermal solid-phase reaction, and is different from that by a gas jet deposition method (particle spraying method). It is to be produced. According to this, a piezoelectric ceramic film having dramatically improved fracture strength can be formed on a metal shim material, and can be provided as a self-supporting power supply element such as an insole. It is possible to provide a piezoelectric power generating element that can be used.
Here, the relative density is a relative value with respect to the theoretical density. For the theoretical density, see Kiyoshi Okazaki, “Ceramics Dielectric Engineering 4th Edition”, p. It is detailed in 24. First, the lattice volume is obtained from XRD. Next, the mass of the lattice is obtained from the chemical formula, and the density is calculated by the volume divided by the mass.

  According to the present invention, various piezoelectric ceramic powders having an average particle size of 0.8 μm are placed on an air current, accelerated to a speed of 20 m / sec or more, and then collided with a substrate to form a ceramic particle deposited film or structure. It is possible. Energy conversion from kinetic energy at the time of particle collision to the substrate is performed, and some of the particles are destroyed, so that a structure having a particle size finer than the original particle size can be formed.

  The structure thus manufactured is a dense body having a relative density of 95% or more. In the case of oxide ceramics, particle breakage at the time of collision occurs, in particular, the separation of oxygen atoms in the crystal structure, and this oxygen deficiency also exhibits a part of the pinning action during the movement of the conventional domain wall. In order to partially compensate for oxygen vacancies, after the ceramic structure is formed, a heat treatment at 600 ° C. or higher is performed in the air to cause piezoelectricity to appear.

  The lead zirconate titanate-based material in the present invention includes a known three-component system. In addition, as a material system that does not contain lead, the ceramic composition mainly composed of barium titanate includes that in which barium is partially substituted with an alkaline earth element, and titanium is substituted with hafnium and zirconium. means. The potassium niobate-based composition may be a composition in which an alkali metal is substituted for potassium, or niobium may be partially replaced with tantalum. Moreover, the composition which consists of a solid solution of a potassium niobate type composition and a barium titanate type composition is also included.

  The thickness of the piezoelectric ceramic layer in the present invention is preferably in the range of 0.5 μm or more and 30 μm or less. Piezoelectric ceramics can be roughly classified into two types: bulk and film. A disadvantage of bulk ceramics is that they are inferior in mechanical strength. Moreover, the electrode structure and the wiring method tend to be complicated as a result of the cancellation of stress. On the other hand, an element bonded to a shim material is suitable because there is no stress cancellation, and the bonding process can be omitted by forming a film directly instead of bonding. Further, the distribution of the stress in the thickness direction has a large outermost surface. Therefore, it is sufficient that a small amount of piezoelectric film is deposited on the substrate, and efficient piezoelectric power generation conversion with respect to the stress becomes possible.

FIG. 3 shows a spiral piezoelectric power generation element (hereinafter simply referred to as a piezoelectric element) and the relationship between the polarization direction and external force.
Examples of line type integration are shown in FIGS.
A planar type can be formed by arranging a plurality of these (see FIG. 6).

(External force conversion mechanism)
When the external force shown in FIG. 3 acts on the piezoelectric ceramic, a shear strain different from the polarization direction is generated. At this time, the piezoelectric body generates a charge with g ₁₅ (piezoelectric constant tensor notation) having the highest piezoelectric constant, and therefore generates a larger charge than before. Conventionally, g ₃₁ is about 4 times higher.
Since the long side of the strip corresponds to the circumference of the spiral, higher integration is achieved. That is, this element has a function of making a conventional strip very long and converting it into a highly efficient strain direction.

(External force self-limiting mechanism)
When the deformation of the spiral is estimated, the second circumference exists with a first circumference and a space. Since the deformation ends when the space is closed, the strength can be designed by designing the proportion of the space, and the element can be prevented from being destroyed by an external force.

(Line integration)
An opening is provided at the center of the spiral and a plurality of piezoelectric elements are fixed by passing a support rod. Since the piezoelectric element has a counter electrode for extracting electric charge, it is desirable to use this support rod for electrical connection from the viewpoint of easy integration.
The first piezoelectric element is inserted into the conductive support rod, and only the counter electrode 1 is connected. It is necessary to provide some insulation so as not to contact the counter electrode 2, and it is convenient if the counter electrode 2 is formed with a slight gap from the central through hole.
An insulator such as a resin is disposed between the elements.
Further, by connecting the counter electrodes 2 with each other through an external lead, a line integrated piezoelectric power generation element can be formed.

  The following is a method for testing the fracture strength of the ceramic structure, a method for calculating the average particle diameter of the ceramics forming the piezoelectric ceramic layer, and a method for calculating the film density of the piezoelectric ceramic layer in the present invention.

Fracture strength test method (compared with conventional product)
A cylindrical element is wound around a laminated element (ceramic / shim material) 20 mm long and 5 mm wide, and the cylindrical diameters leading to ceramic breakdown are compared. That is, in the case of conventional lead zirconate titanate ceramics, the plate thickness is 100 μm, the shim material (42 alloy) is 100 μm, and the fracture diameter is 150 mm. In the present invention, 1/5 or less of the fracture diameter is determined as “good”.

Calculation of average particle diameter The cross section of the piezoelectric ceramic layer was observed with a scanning electron microscope (SEM). In SEM particle size observation, an image was stored at an observation magnification of 50,000 times or more and a resolution of 252 pixels / inch, and after adjusting contrast and brightness with image processing software (Photoshop), the image was expanded and measured. It should be noted that pretreatment was performed using diluted hydrochloric acid at a temperature of 60 ° C. and an immersion time of 120 seconds or less. 50 or more samples were taken by SEM photography and photographic intercept method, and calculated from arithmetic mean.

Calculation of film density After film deposition of the piezoelectric ceramic layer, the film thickness is made uniform by polishing, cut out integrally with the substrate using a dicing saw, the density is calculated using the Archimedes method, and the substrate density is subtracted (corrected). Obtain the film density.

[Example 1]
A stainless steel sheet (thickness: 100 μm) is used as the shim material, PZT manufactured by Sakai Chemical Co., Ltd. is used as the ceramic composition, and a PZT ceramic film is formed under the following conditions by the gas jet deposition apparatus shown in FIG. went.
Carrier gas: He, particle velocity: 70 m / sec, PZT film thickness: 10 μm, heat treatment: 600 ° C., 1 hour,
Polarization conditions: DC electric field: 60 kV / cm, temperature: 200 ° C., time: 30 minutes.
About the obtained PZT ceramic film, the average particle diameter, the film density, and the fracture diameter were measured and evaluated by the above-described measurement methods. The results are shown in Table 1.

[Example 2]
A PZT ceramic film was formed in the same manner as in Example 1 except that the particle speed was 85 m / sec, and heat treatment and polarization treatment were performed. The obtained PZT ceramic film was evaluated in the same manner as in Example 1 by measuring the average particle diameter, film density, and fracture diameter. The results are shown in Table 1.

[Comparative Example 1]
A PZT ceramic film was formed in the same manner as in Example 1 except that the particle velocity was 20 m / sec, and heat treatment and polarization treatment were performed. The obtained PZT ceramic film was evaluated in the same manner as in Example 1 by measuring the average particle diameter, film density, and fracture diameter. The results are shown in Table 1.

[Example 3]
Ceramics as in Example 1 except that the ceramic composition is (Ba, Sr) (Ti, Zr) O3, the particle velocity is 50 m / sec, the polarization conditions are DC electric field: 60 kV / cm electric field air cooling, and temperature: 150 ° C. A film was formed, and heat treatment and polarization treatment were performed. The obtained ceramic film was evaluated in the same manner as in Example 1 by measuring the average particle diameter, the film density, and the fracture diameter. The results are shown in Table 1.

[Example 4]
A ceramic film was formed in the same manner as in Example 3 except that the ceramic composition was (K, Na) NbO3-BaTiO3 and the polarization condition temperature was 250 ° C., and heat treatment and polarization treatment were performed. The obtained ceramic film was evaluated in the same manner as in Example 1 by measuring the average particle diameter, the film density, and the fracture diameter. The results are shown in Table 1.

[Example 5]
The same as in Example 1 except that the ceramic composition was PNN-PZ-PT, the particle velocity was 60 m / sec, the ceramic film thickness was 0.5 μm, the polarization conditions were DC electric field: 40 kV / cm electric field air cooling, and temperature: 70 ° C. A ceramic film was formed, and heat treatment and polarization treatment were performed. The obtained ceramic film was evaluated in the same manner as in Example 1 by measuring the average particle diameter, the film density, and the fracture diameter. The results are shown in Table 1.

表中、比較例１は破壊直径が３０ｍｍ以上となり×である。
［実施例６］
（ＰＺＴ成膜）
渦巻き加工した厚さ５０μｍのステレスシートを支持基板（兼、対電極１として使用）として、ＰＺＴの成膜を行なう。
渦巻き形状は、幅１００μｍ、スペース１００μｍ、周回数：２周
最大外周径：３００μｍ（図３参照）実施例１−２の条件で厚さ１００μｍ堆積する。
（対電極２の形成）
樹脂に包埋後、ステンレスシートとは反対面を研磨し、ＰＺＴ堆積膜表面を露出すると同時に、ＰＺＴ膜厚を５０μｍになるように研磨調整する。
スクリーン印刷でＡｇ／Ｐｄ電極を印刷した後、乾燥させ、包埋樹脂除去後、６００℃、１０分の熱処理によりＰＺＴ特性の向上処理と焼付け電極の形成を実行する。
分極処理を行ない、圧電発電素子が作製できる。

In the table, Comparative Example 1 is x with a fracture diameter of 30 mm or more.
[Example 6]
(PZT film formation)
A PZT film is formed using a spiral-processed stainless sheet having a thickness of 50 μm as a support substrate (also used as the counter electrode 1).
The spiral shape is a width of 100 μm, a space of 100 μm, the number of turns: 2 rounds, the maximum outer circumference: 300 μm (see FIG. 3), and a thickness of 100 μm is deposited under the conditions of Example 1-2.
(Formation of counter electrode 2)
After embedding in the resin, the surface opposite to the stainless steel sheet is polished to expose the surface of the PZT deposited film, and at the same time, the PZT film thickness is adjusted to 50 μm.
After the Ag / Pd electrode is printed by screen printing, it is dried and the embedded resin is removed, and then the PZT characteristics are improved and the baking electrode is formed by heat treatment at 600 ° C. for 10 minutes.
A piezoelectric power generation element can be manufactured by performing polarization treatment.

[Example 7] (line type assembly)
(Partial trimming of counter electrode 2)
Trimming is performed by a well-known method so as not to cause electrical contact with respect to the center hole of the counter electrode 2 of the element obtained in the process shown in the sixth embodiment.
(Device integration support)
A stainless steel wire (with a wire diameter of 50 μm) is mounted using a center hole, and a desired number of integrations is mounted using a device, an insulating sheet, a metal foil that leads the counter electrode 2 and the electrode, and an insulating sheet as one unit of repetition. The inserted metal foils are connected, and two terminals made of stainless steel wire and metal foil can be taken out.
This is completed by embedding the resin in a cylinder.

It is the schematic of the gas jet deposition apparatus used in the Example. It is the figure which showed the conventional piezoelectric power generation mechanism. It is the figure which showed the relationship between the spiral direction piezoelectric generating element, its polarization direction, and external force. It is the figure which showed the line type | mold integration example. It is another figure which showed the line type | mold integration example. It is the figure which showed the planar type example arrange | positioned in multiple numbers.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Gas cylinder 20 Gas conveyance pipe 30 Aerosol formation tank 40 Aerosol conveyance pipe 50 Vacuum tank 51 XYZ (theta) stage 52 Substrate holder 53 Mask pattern 54 Nozzle 60 Vacuum exhaust apparatus

Claims (10)

A piezoelectric ceramic layer was formed on one surface of a spiral metal shim material with ceramics having an average particle diameter of 0.01 μm or more and 0.1 μm or less by observation with a scanning electron microscope, and provided on the surface of the piezoelectric ceramic layer. A piezoelectric power generating element characterized in that a counter electrode is formed of an electrode and the metal shim material, and an electric force is generated by applying an external force different from the polarization direction to a polarized piezoelectric ceramic element.   The piezoelectric power generating element according to claim 1, wherein a relative density of ceramics forming the piezoelectric ceramic layer is 95% or more. The piezoelectric power generation element according to claim 1 or 2 , wherein the composition of the ceramic is a lead zirconate titanate composition. 3. The piezoelectric power generating element according to claim 1, wherein the ceramic is made of a composition mainly composed of barium titanate. The piezoelectric power generating device according to claim 1 or 2, wherein the ceramic is characterized by comprising a potassium niobate-based composition. The piezoelectric film thickness of the ceramic layer is 0.5μm or more, the piezoelectric power generating device according to any one of claims 1 to 5, characterized in that it is the range of 30 [mu] m. A line-type piezoelectric power generation element in which electrodes of a plurality of piezoelectric power generation elements are electrically connected in parallel by external leads , wherein the piezoelectric power generation element is the piezoelectric power generation element according to any one of claims 1 to 6. A line-type piezoelectric power generation element characterized by the above. Line type piezoelectric generating element according to claim 7, characterized in that an aggregation of the line-type piezoelectric generating element in a plane. Impart kinetic energy to the piezoelectric ceramic particles, characterized by comprising the step of collide on one surface of the metal shim of spiral formed, the step of forming the ceramic layer to form an upper electrode on the surface of the ceramic layer A method for manufacturing a piezoelectric power generation element. Said piezoelectric ceramic particles, lead zirconate titanate-based compositions, the method for manufacturing a piezoelectric power generating device according to claim 9, wherein the composition composed mainly of barium titanate, or potassium niobate-based composition.

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