JP4924548B2 - Method for manufacturing surface-treated metal member, metal member hanging jig and bath liquid guide jig - Google Patents

Description

  The present invention relates to a method for producing a surface-treated metal member in which a metal member is immersed in a bath solution to form a film on the surface of the metal member, and a metal member hanging jig and a bath solution guide jig used therefor.

  The manufacturing process of an integrated circuit or a liquid crystal panel includes a process (a photolithography process) of transferring a circuit pattern drawn on a transparent substrate called a photomask or a reticle to a resist applied on a wafer. If a foreign substance such as dust adheres to the transparent substrate used in this step, the circuit pattern transferred to the resist becomes unclear, so the transparent substrate is covered with a dust-proof cover called a pellicle.

  The pellicle includes a support frame that encloses the entire circuit pattern drawn on the transparent substrate, and a light-transmitting pellicle film that is covered on one surface of the support frame. The adhesive layer formed on the other surface of the support frame is adhered to the transparent substrate.

  For the support frame of the pellicle, a metal member made of aluminum or aluminum alloy that has been surface-treated by anodization is often used. When such a metal member is used to form the support frame, the support frame is light and easy to handle, and as a result, the photolithography process can be speeded up.

  When anodizing the metal member, the metal member is immersed in an electrolytic solution (bath solution) in an electrolytic bath and energized, whereby an oxide film is formed on the surface of aluminum, The surface hardness is increased.

By the way, in recent years, as the liquid crystal panel is increased in size, the support frame has a recess (including a groove; the same applies hereinafter) for holding the pellicle, a recess for making contact with the electrode, and divided formation. Various recesses for joining the framed frames are formed (see Patent Documents 1 to 3).
JP 2006-284927 A Japanese Patent Laying-Open No. 2005-10765 JP 2004-361649 A

  By the way, in the support frames as shown in the above-mentioned Patent Documents 1 to 3, when an aluminum metal member is anodized, the recess may be arranged to open downward in the electrolytic solution. In such a case, a gas such as oxygen generated by anodic oxidation enters into the recess and accumulates as a bubble, and a portion that does not come into contact with the electrolytic solution is generated in the recess, resulting in an anodic oxidation failure or the like. There was a problem that there was.

  In addition, as a technique for avoiding gas accumulation, a technique as disclosed in JP-A-2005-89778 has been proposed. In the surface treatment technique disclosed in Patent Document 1, a gas guiding gap is formed on a contact surface between a hollow frame member in which a jig is inserted and arranged, and the jig, and gas is generated using the guiding gap. In this way, the anodic oxidation failure (surface treatment failure) that occurs at the end in the longitudinal direction of the hollow frame member in which the jig is inserted and disposed is eliminated.

  However, in the surface treatment technique described above, a gas guiding gap is formed on the contact surface between the hollow frame member in which the jig is inserted and arranged, and the jig, and the gas is guided upward and discharged. Therefore, it is effective when the frame material has a specific shape such as a hollow shape that extends in the vertical direction, but it cannot sufficiently cope with the change of the shape, and it opens downward and the upper part is closed. It was not possible to cope with the concave portions.

  Therefore, the present invention has been devised to solve the above-described problem, and even in a concave portion that opens downward in the bath liquid, gas accumulation can be avoided and occurrence of surface treatment defects can be prevented. It is an object of the present invention to provide a method for producing a surface-treated metal member for a metal member, a metal member suspension jig, and a bath liquid guide jig.

  The invention according to claim 1 for solving the above-described problem is the method for producing a surface-treated metal member in which a metal member having a recess on the surface is immersed in a bath solution to form a film on the surface of the metal member. And holding the metal member such that the bath member guide jig is provided below the concave portion with a guide portion for guiding the bath liquid to the concave portion. In the dipping process, the bath liquid is guided to the recess by the bath liquid guide jig.

  According to such a method, when the metal member is immersed in the bath liquid, the bath liquid is guided from the bath liquid guide jig into the concave portion opened downward, and the bath liquid enters the inner surface of the concave portion. Accumulation can be avoided and occurrence of surface treatment defects can be prevented.

  The invention according to claim 2 is a surface-treated metal that forms an oxide film on the surface of the metal member by immersing a metal member made of aluminum or aluminum alloy having a recess on the surface in a bath solution made of an electrolytic solution and energizing it. In the member manufacturing method, the metal member is held so that the concave portion is downward, and a bath liquid guide jig provided with a guide portion for guiding the bath liquid to the concave portion is provided below the concave portion, In the method for producing a surface-treated metal member, the bath liquid is guided to the concave portion by the bath liquid guide jig when the metal member is immersed in the bath liquid.

  According to such a method, when the metal member is immersed in the bath liquid, the bath liquid (electrolyte solution) is guided from the bath liquid guide jig to the recess opening downward, and the bath liquid enters the inner surface of the recess. Therefore, accumulation of gas can be avoided and occurrence of surface treatment failure (anodization failure) can be prevented.

  According to a third aspect of the present invention, in the surface-treated metal according to the first or second aspect, the guide portion is formed in a cylindrical shape in which an upper opening is smaller than a lower opening. It is a manufacturing method of a member.

  According to such a method, when the metal member is immersed in the bath liquid by making the upper opening of the bath liquid guide jig smaller than the lower opening, the bath liquid is used as the bath liquid guide jig. In the upper part of the water, it is collected on the center side (opening), and the flow of the bath liquid toward the concave portion can be strengthened.

  The invention according to claim 4 is characterized in that the guide portion is formed in a cylindrical shape having a frustum shape whose upper portion is reduced in diameter. It is a manufacturing method of a surface treatment metal member.

  According to such a method, when the guide portion is formed in a cylindrical shape having a truncated cone shape whose upper portion is reduced in diameter, the bath liquid is sequentially applied to the inner surface of the guide portion when the metal member is immersed in the bath liquid. By being pushed, the bath liquid is collected in the center (upper opening) from the lower part to the upper part of the bath liquid guide jig, and the flow of the bath liquid from the upper opening part to the upper concave part can be strengthened.

  The invention according to claim 5 is the surface treatment according to claim 3 or 4, wherein the bath liquid guide jig is provided with a nozzle portion facing the concave portion on the guide portion. It is a manufacturing method of a metal member.

  According to such a method, by providing the nozzle portion facing the recess on the guide portion, the bath liquid is efficiently sprayed toward the recess when the metal member is immersed in the bath liquid. It will be.

  The invention according to claim 6 is characterized in that the metal member is swung after the metal member is immersed in the bath solution, and the surface-treated metal according to any one of claims 1 to 5 It is a manufacturing method of a member.

According to this method, since the bath liquid located around the bath liquid guide jig enters into concave portion, even when the gas remaining in the unlikely event the recess when downward movement of the metal member, reservoir gases Can be reliably avoided.

  The invention which concerns on Claim 7 is equipped with the holding means to hold | maintain the said metal member in the surface treatment process which produces | generates a film | membrane on the surface of the metal member which has a recessed part on the surface, hold | maintains the said metal member, and suspends it in bath liquid. A hanging jig to be immersed, wherein the bath liquid is guided to the recess when the holding means is lowered to a position below the recess that opens downward in the metal member while holding the metal member. A metal member suspending jig provided with a bath liquid guide jig provided with a guide portion.

  According to such a configuration, when the metal member is immersed in the bath liquid, the bath liquid is guided and poured from the bath liquid guide jig into the recess opening downward, so that the bath liquid enters the recess. Therefore, accumulation of gas can be avoided and occurrence of surface treatment defects can be prevented.

  In the invention according to claim 8, the holding means is provided with a rod-like member at a position below the metal member in a state where the metal member is held, and the bath liquid guide jig is provided with the rod-like member. The metal member suspending jig according to claim 7, wherein the jig is detachably attached to the metal member.

  According to such a configuration, since the mounting position of the bath liquid guide jig can be changed, it is possible to cope with a plurality of metal members having different concave positions.

  The invention according to claim 9 is a surface treatment process in which a metal member having a recess on the surface is immersed in a bath solution to form a film on the surface of the metal member. A bath liquid guide jig for guiding the bath liquid into the recess opening to the guide, wherein the upper opening is formed in a cylindrical shape smaller than the lower opening, and the guide section guides the bath liquid to the recess. A bath liquid guide jig comprising:

  According to such a configuration, when the metal member is immersed in the bath liquid, the bath liquid is guided from the bath liquid guide jig to the concave portion opened downward, so that the bath liquid enters the inner surface of the concave portion, The accumulation of gas in the concave portion can be avoided, and the occurrence of surface treatment defects can be prevented.

  According to the present invention, even in the concave portion that opens downward in the bath liquid, an excellent effect is exhibited in which gas accumulation can be avoided and occurrence of surface treatment defects can be prevented.

  Next, the best mode for carrying out the present invention will be described in detail with appropriate reference to the drawings. In this embodiment, as shown in FIG. 4, the metal member 1 is formed by immersing the metal member 1 made of aluminum or aluminum alloy constituting the support frame of the pellicle in a bath solution 10 made of an electrolytic solution and energizing it. The method for producing the surface-treated metal member, the metal member suspending jig 30 and the bath liquid guide jig 20 will be described with reference to an example in which an oxide film is generated on the surface 2 of the metal. The “up” direction and “down” direction in this specification are based on the state in which the metal member 1 is held in the hanging jig 30 and immersed in the bath solution 10, and serves as a support frame for the pellicle. It has nothing to do with usage.

As the bath solution 10, for example, an electrolytic solution such as dilute sulfuric acid or oxalic acid is used, and is stored in a liquid tank 11 having an open top. The metal member 1 is held by the hanging jig 30 and is suspended and immersed in the bath liquid 10 from above the liquid tank 11. Then, by electrolysis in the bath solution 10 with the metal member 1 side as an anode, the surface 2 of the metal member 1 is electrochemically oxidized to form an oxide film of aluminum oxide Al ₂ O ₃ . By such anodizing treatment, a surface-treated metal member with improved corrosion resistance is produced.

  As shown in FIGS. 1 and 3, the manufacturing method of the surface-treated metal member according to the present embodiment comprises a metal member (pellicle support frame) 1 made of aluminum or an aluminum alloy having a recess 3 on the surface made of an electrolytic solution. A method for manufacturing a surface-treated metal member that has been subjected to an anodizing treatment for generating an oxide film on the surface 2 of the metal member 1 by immersing it in a bath solution 10 (see FIGS. 4 to 6) and energizing it. While holding the metal member 1 with the jig 30 so that the concave portion 3 is below, a bath liquid guide jig 20 provided with a guide portion 21 a for guiding the bath liquid 10 to the concave portion 3 is provided below the concave portion 3. When the metal member 1 is immersed in the bath solution 10, the bath solution 10 is guided to the recess 3 by the bath solution guide jig 20.

  The metal member 1 in the present embodiment has a rectangular frame shape, and is held on the lower surface of the lower side portion 1 a that is the lower side of the metal member 1 while being held in the hanging jig 30 and immersed in the bath liquid 10. For example, the recess 3 is formed as a hole for gripping the pellicle in a later step. The concave portion 3 is formed in an inverted bottomed shape having a downward opening and a bottom surface on the upper side, and has, for example, a cylindrical shape with a circle as a bottom surface. Note that the shape of the recess 3 is not limited to a cylindrical shape, and is appropriately determined according to the shape of the gripping jig and the intended use of the hole. Other shapes such as a long cylindrical shape, a prismatic shape, etc. It may be.

  Next, the configuration of the hanging jig 30 that holds the metal member 1 will be described. As shown in FIG. 3, the hanging jig 30 is formed in a rectangular frame shape and has an outer peripheral frame 31. A bracket 32 for suspending the suspending jig 30 is provided on the upper portion of the outer peripheral frame 31. The upper end of the bracket 32 is folded back in a U shape, and a locking portion 32a is formed. The outer peripheral frame 31 is made of, for example, titanium having predetermined strength and conductivity, and is fixed to each other by welding or screws.

  A holding space for the metal member 1 is located inside the outer peripheral frame 31, and holding means 34 for holding the metal member 1 is provided. The holding means 34 is provided at an upper holding frame 35 provided at a position above the metal member 1 in a state where the metal member 1 is held and immersed in the bath liquid 10 and at a position below the metal member 1. The lower holding frame 36 is provided, and the metal member 1 is sandwiched and held from above and below.

  The upper holding frame 35 includes a fixed rod-like member 35a and a movable rod-like member 35b that are spaced apart in the vertical direction, a spring member 35c interposed between the fixed rod-like member 35a and the movable rod-like member 35b, and a movable rod-like member 35b. The electrode member 35d is provided. Similarly to the outer peripheral frame 31, the fixed rod member 35a and the movable rod member 35b are made of, for example, titanium having a predetermined strength and conductivity, and are both arranged parallel to each other along the horizontal direction. The fixed rod member 35a is provided above the movable rod member 35b. Both ends of the fixed rod-shaped member 35a are fixed to the side 31a of the outer peripheral frame 31 by fastening means such as screws. The movable rod-shaped member 35b is engaged with a long hole (not shown) formed in the side 31a of the outer peripheral frame 31 so that the movable rod-shaped member 35b can move up and down while maintaining a parallel state with the fixed rod-shaped member 35a. It is configured to move. The electrode member 35d is a member that extends downward below the movable rod-shaped member 35b and is connected to the upper side 1b of the metal member 1. The electrode member 35d has a pin shape with a narrowed tip, and a base end portion of the electrode member 35d is held and fixed to the movable rod-shaped member 35b, and the movable rod-shaped member 35b made of titanium and the hanging jig 30 are interposed therebetween. It is connected to a current supply source (not shown). The electrode member 35d is configured to contact and energize the electrode member 35d in a state where the tip is pressed against the bottom surface of an electrode recess (not shown) formed in the metal member 1.

  The lower holding frame 36 includes a rod-shaped member 36a and an electrode member 36b provided on the rod-shaped member 36a. Like the outer peripheral frame 31, the rod-shaped member 36a is made of, for example, titanium having a predetermined strength and conductivity, has a cylindrical shape, and is arranged along the horizontal direction. The rod-shaped member 36 a is provided below the metal member 1 with a predetermined interval while holding the metal member 1. Both ends of the rod-shaped member 36a are fixed to the side 31a of the outer peripheral frame 31 by fastening means such as screws. The electrode member 36 b is a member provided on the upper side of the rod-shaped member 36 a and connected to the lower side portion 1 a of the metal member 1. Similar to the electrode member 35d of the upper holding frame 35, the electrode member 36b has a pin shape with a narrowed tip, and a base end portion thereof is held and fixed to the rod-shaped member 36a and is a rod-shaped member made of titanium. 36a and a suspension jig 30 are connected to a current supply source (not shown). The electrode member 36b is in contact with and energized in a state where its tip is pressed against the bottom surface of a recess (not shown) for an electrode formed in the metal member 1. That is, in the metal member 1, the lower side 1a is placed on the plurality of electrode members 36b, and the upper side 1b is urged downward by the plurality of electrode members 35d, so that the upper and lower electrode members 35d, 36b It is held by the hanging jig 30 in a state of being sandwiched by.

  The bath liquid guide jig 20 is detachably fixed to the rod-shaped member 36a. Next, the configuration of the bath liquid guide jig 20 will be described.

  As shown in FIGS. 1 to 3, the bath liquid guide jig 20 is made of a synthetic resin having corrosion resistance to the bath liquid 10 (see FIG. 4), and is disposed on the upper side of the rod-shaped member 36a. The guide member 21 includes a clamping member 22 disposed below the guide member 21, and a bolt 23 that fixes the clamping member 22 to the guide member 21.

  The guide member 21 includes a guide portion 21a that guides the bath solution 10 to the recess 3 when the metal member 1 is immersed in the bath solution 10, and a pair of leg portions that are placed on the rod-like member 36a and support the guide portion 21a. 21b. The guide portion 21a is formed in a cylindrical shape in which the upper opening 24a is smaller than the lower opening 24b. Specifically, the inner surface of the guide portion 21a is gradually reduced in diameter toward the upper side, and the outer surface is formed to have a quadrangular frustum shape with a smaller upper portion, and has an inverted funnel shape (roof shape). ). The inner surface of the guide portion 21a constitutes a guide surface 20a that guides the bath liquid 10 toward the upper opening 24a. The guide portion 21a is formed wider than the rod-shaped member 36a. When the guide portion 21a is installed on the rod-shaped member 36a, the end portion of the guide surface 20a (inner surface) extends outward from both ends in the width direction of the rod-shaped member 36a. (See (a) and (c) of FIG. 3).

  On the guide part 21a, the nozzle part 25 facing the recessed part 3 is provided. The nozzle portion 25 is a portion formed integrally with the upper end of the guide portion 21a, and has a through hole 25a inside thereof. The outer shape of the nozzle portion 25 of the present embodiment has a quadrangular prism shape with a square bottom surface, and the inner shape (through hole 25a) is formed in a cylindrical shape. The inner diameter of the through hole 25a of the nozzle portion 25 is the same length as the inner diameter of the opening 24a at the top of the guide portion 21a. Note that the through hole 25a of the nozzle portion 25 is not limited to a cylindrical shape having the same shape at the upper end and the lower end, and may have a circular shape in which the shape of the upper end is smaller than the shape of the lower end. Alternatively, the shape of the upper end may be a flat oval shape or an elliptical shape.

  An arcuate notch 26 having the same diameter as the outer peripheral surface of the rod-shaped member 36a is formed on the lower surface of the leg 21b. The arc-shaped notch 26 is formed in a semicircle or an arc shape shorter than that. Bolt holes 27 (see FIG. 2B) are formed on both sides of the arc-shaped notch 26 so as to open downward.

  The sandwiching member 22 has an arcuate notch 28 having the same diameter as the outer peripheral surface of the rod-shaped member 36a on the upper surface, and bolt through holes 29 ((b in FIG. 2) are formed on both sides of the arcuate notch 28. )) Is formed penetrating in the vertical direction. The arc-shaped cutout portion 28 is formed in a semicircle or an arc shape shorter than that, and is sandwiched between the leg portion 21b when the rod-shaped member 36a is sandwiched between the leg portion 21b and the clamping member 22 of the guide member 21. A gap is preferably formed between the member 22 and the member 22. Then, by tightening the guide member 21 and the clamping member 22 with the bolt 23, the rod-shaped member 36a can be firmly clamped, and the bath liquid guide jig 20 can be securely fixed.

  Next, the manufacturing method of the surface treatment metal member which performs surface treatment to the metal member 1 using the above-mentioned hanging jig | tool 30 and the bath liquid guide jig | tool 20 is demonstrated.

  First, a plate-like metal member 1 is formed by punching a plate material obtained through hot rolling and cold rolling. Then, the outer peripheral surface of the frame is drilled to form the recesses 3 and electrode recesses (not shown), and then, if necessary, machine such as shot blasting for scratching and roughening the surface. Surface treatment.

  Thereafter, as shown in FIG. 3, the metal member 1 is held by the hanging jig 30. When holding the metal member 1 on the hanging jig 30, the hanging jig 30 is laid down, and the movable rod-shaped member 35b of the upper holding frame 35 is fixed against the urging force of the spring member 35c. Move to side 35a. In this state, the metal member 1 is set between the movable rod-shaped member 35b and the rod-shaped member 36a of the lower holding frame 36, and the lower holding frame 36 is placed in the electrode recess (not shown) on the lower side 1a of the metal member 1. The tip end portion of the electrode member 36b is inserted to engage the lower side portion 1a. Then, the movable rod-shaped member 35b is returned to the upper side 1b side of the metal member 1, and the tip of the electrode member 35d is inserted into the electrode recess of the upper side 1b to engage the upper side 1b. As a result, the movable rod-shaped member 35b is urged and pressed by the spring member 35c toward the metal member 1, and the metal member 1 is sandwiched between the lower electrode member 36b and the upper electrode member 35d to be suspended. It will be held by the tool 30.

  Thereafter, the bath liquid guide jig 20 is fixed below the respective recesses 3 of the lower side 1a of the metal member 1. When fixing the bath liquid guide jig 20, first, as shown in FIG. 1, the guide member 21 is placed on the rod-shaped member 36 a so that the nozzle portion 25 at the upper end of the bath liquid guide jig 20 faces the recess 3. Install in. And the clamping member 22 is pressed from the lower side of the rod-shaped member 36a, and it fastens to the leg part 21b of the guide member 21 with the volt | bolt 23, and the clamping member 22 is fixed. As a result, the rod-shaped member 36 a is sandwiched between the leg portion 21 b and the sandwiching member 22, and the bath liquid guide jig 20 is fixed to the hanging jig 30. As described above, the bath liquid guide jig 20 is detachably fixed to the rod-shaped member 36 a by the bolt 23, so that the position adjustment can be appropriately performed according to the position of the recess 3.

  Next, as shown in FIG. 4, the hanging jig 30 holding the metal member 1 is immersed in the bath solution 10. When the suspending jig 30 is immersed in the bath solution 10, the locking portion 32 a of the bracket 32 is locked to an arm portion of a lifting device (not shown) and is suspended. And the raising / lowering device is operated and the hanging jig | tool 30 is lowered | hung in the bath liquid 10 of the liquid tank 11, and is immersed.

  At this time, as shown in FIG. 5, the bath liquid guide jig 20 descends in the bath liquid 10, so that the bath liquid 10 located below the bath liquid guide jig 20 is on the bath liquid guide jig 20 side. It will flow relatively toward. As a result, the bath solution 10 passes through both sides of the rod-shaped member 36a and flows into the guide portion 21a from the lower opening 24b. Then, the bath liquid 10 that has flowed in is relatively pushed toward the upper opening 24a while being pushed by the guide surface 20a that is the inner surface of the guide portion 21a and guided toward the center. At this time, the bath liquid 10 is compressed toward the center side toward the upper portion of the guide portion 21a, and flows upward from the opening 24a. And the bath liquid 10 passes through the through-hole 25a of the nozzle part 25, is efficiently injected toward the inner side of the recessed part 3, is sprayed on the inner surface of the recessed part 3, and the gas inside the recessed part 3 is Extruded to avoid gas accumulation. As a result, the bath liquid 10 comes into uniform contact with the inner surface of the recess 3 and the occurrence of surface treatment defects can be prevented.

  If the hanging jig 30 is lowered to a predetermined depth, next, the hanging jig 30 is swung in the vertical direction as shown by the white arrow in FIG. Here, when the suspending jig 30 moves downward, the bath liquid 10 that has flowed into the inside of the guide portion 21a is pushed by the guide surface 20a in the same manner as when the suspending jig 30 descends. It is guided to the center side, passes through the through hole 25a of the nozzle portion 25 from the opening 24a, is sprayed toward the inside of the recess 3, and is sprayed on the inner surface of the recess 3. As described above, since the bath liquid 10 enters the concave portion 3 even by rocking, even if the gas remains in the concave portion 3 when it descends, the accumulation of gas can be surely avoided. Thereby, the occurrence of surface treatment defects can be prevented, and the product performance of the metal member 1 can be greatly improved. Note that the swinging direction is not limited to the direction of the white arrow in FIG. 6, and may be a horizontal direction, or various directions in which the vertical direction and the horizontal direction are appropriately combined.

  Further, by swinging the suspension jig 30, the bath liquid 10 around the electrode member 36b enters the electrode recess formed in the lower side 1a of the metal member 1 and pushes out the accumulated gas. be able to.

  While swinging the hanging jig 30, the metal member 1 is energized through the electrode members 35 d and 36 b to generate an oxide film on the surface 2 of the metal member 1. When the generation of the oxide film is completed, the energization is stopped, the hanging jig 30 is pulled up, and the movable rod-shaped member 35b of the upper holding frame 35 is opposed to the urging force of the spring member 35c to the fixed rod-shaped member 35a side. To remove the metal member 1. At this time, at the bottom of the electrode recess of the metal member 1, a portion that has not been subjected to the surface treatment remains in the portion that has been in contact with the tip of the electrode members 35 d and 36 b, but a minute amount is left at the bottom of the hole. There is no problem because it is a point. Thereafter, the fine holes formed in the oxide film are dyed and dyed, and immersed in warm water for sealing treatment. Finally, the shape is corrected, the flatness measurement inspection is performed, and the operation is completed.

  As described above, when the bath liquid guide jig 20 is provided below the recess 3 formed to open downward, when the metal member 1 is immersed in the bath liquid 10, the bath liquid guide jig 20 The bath liquid 10 is guided, the bath liquid 10 enters the inner surface of the recess 3, the internal gas is pushed out, and the accumulation of gas can be avoided. Therefore, it is possible to prevent the occurrence of surface treatment defects and to manufacture the metal member 1 having high product performance.

  Next, the configuration of the bath liquid guide jig according to another embodiment will be described.

  As shown in FIG. 7, the bath liquid guide jig 20 ′ has an opening 24a ′ at the upper part of the guide portion 21a ′ in the longitudinal direction of the rod-shaped member 36a, as compared with the bath liquid guide jig 20 shown in FIG. It is formed in an oval shape extending in the direction. The nozzle portion 25 'formed integrally therewith has a through hole 25a'. The nozzle portion 25 ′ of the present embodiment has a quadrangular prism shape whose outer shape is a rectangular shape extending in the longitudinal direction of the rod-shaped member 36a, and an inner shape of an elliptical oval column having the same shape as the opening 24a ′. (Through hole 25a '). Other configurations are the same as those in FIG. 2, and thus the same reference numerals are given and description thereof is omitted.

  According to the bath liquid guide jig 20 ′ configured as described above, the bath liquid 10 flows upward in a flat shape from the opening 24a ′ and the through hole 25a ′ of the nozzle portion 25 ′. Even when a long concave portion (not shown) along the longitudinal direction is formed on the lower surface of the metal member, the bath liquid can be pushed over the entire inner surface of the concave portion.

  The shape of the upper opening 24a ′ of the guide portion 21a ′ and the cross-sectional shape of the through-hole 25a ′ of the nozzle portion 25 ′ are not limited to the oval shape, and depending on the opening shape of the recess, You may make it become a square, a rectangle, a polygon, and an ellipse shape. Further, the through hole 25a 'of the nozzle portion 25' may have a shape in which the upper side is narrowed.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various design changes can be made without departing from the spirit of the present invention. For example, in the above embodiment, an oxide film is formed on the surface 2 of the metal member 1 by immersing the metal member 1 made of aluminum or aluminum alloy constituting the support frame of the pellicle in a bath solution 10 made of an electrolyte and energizing it. Although the production method of the surface-treated metal member has been described by taking the anodizing treatment to be generated as an example, it is not limited to this. For example, even when a metal member made of a material other than aluminum or an aluminum alloy and having a concave portion that opens downward on its lower surface is immersed in a bath solution to perform other surface treatment Is possible.

  Further, in the above-described embodiment, the rod-shaped member 36a for mounting the bath liquid guide jig 20 is formed in a columnar shape, but is not limited to this, and the cross section is formed in a square or polygonal prism shape. May be. In this case, the notch part formed in the leg part 21b and the clamping member 22 of the bath liquid guide jig | tool 20 is formed in the shape according to the external shape of a rod-shaped member.

  Furthermore, in the said embodiment, although the inner surface of the guide part 21a of the bath liquid guide jig | tool 20 is formed in the taper shape gradually diameter-reduced toward upper direction, it is not limited to this. As long as the upper opening portion of the guide portion 21a is formed to be smaller than the lower opening portion, the inner surface may be formed to have a reduced diameter through the stepped portion.

It is the perspective view which showed the best form for implementing the bath liquid guide jig | tool which concerns on this invention. It is the figure which showed the best form for implementing the bath liquid guide jig | tool which concerns on this invention, Comprising: (a) is a top view, (b) is a front view, (c) is a side view. It is the perspective view which showed the best form for implementing the hanging jig | tool which concerns on this invention. It is the perspective view which showed the best form for implementing the manufacturing method of the surface treatment metal member which concerns on this invention. It is sectional drawing which showed the state of the bath liquid at the time of the descent | fall of a hanging jig | tool. It is sectional drawing which showed the state of the bath liquid at the time of rocking | fluctuation of a hanging jig. It is the figure which showed the other best form for implementing the bath liquid guide jig | tool which concerns on this invention, Comprising: (a) is a top view, (b) is a front view, (c) is a side view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal member 2 Surface 3 Recessed part 10 Bath liquid 20 Bath liquid guide jig 21a Guide part 24a (Upper part) Opening part 24b (Lower part) Opening part 25 Nozzle part 30 Hanging jig 36a Bar-shaped member 20 'Bath liquid guide treatment Tool 21a 'Guide part 24a' (Upper) opening 25 'Nozzle part

Claims (9)

In the method for producing a surface-treated metal member in which a metal member having a recess on the surface is immersed in a bath solution to form a film on the surface of the metal member,
While holding the metal member so that the concave portion is down, provided below the concave portion a bath liquid guide jig provided with a guide portion for guiding the bath liquid to the concave portion,
The method for producing a surface-treated metal member, wherein the bath liquid is guided to the recess by the bath liquid guide jig when the metal member is immersed in the bath liquid. In the method for producing a surface-treated metal member that generates an oxide film on the surface of the metal member by immersing and energizing a metal member made of aluminum or an aluminum alloy having a recess on the surface in a bath solution made of an electrolytic solution
While holding the metal member so that the concave portion is down, provided below the concave portion a bath liquid guide jig provided with a guide portion for guiding the bath liquid to the concave portion,
The method for producing a surface-treated metal member, wherein the bath liquid is guided to the recess by the bath liquid guide jig when the metal member is immersed in the bath liquid. The method for producing a surface-treated metal member according to claim 1, wherein the guide portion is formed in a cylindrical shape in which an upper opening is smaller than a lower opening. The method for manufacturing a surface-treated metal member according to any one of claims 1 to 3, wherein the guide portion is formed in a cylindrical shape having a truncated cone shape in which an upper portion is reduced in diameter. The method for producing a surface-treated metal member according to claim 3 or 4, wherein the bath liquid guide jig includes a nozzle portion facing the concave portion on the guide portion. The method for producing a surface-treated metal member according to any one of claims 1 to 5, wherein the metal member is swung after the metal member is immersed in the bath solution. A hanging jig that includes a holding means for holding the metal member in a surface treatment process for generating a film on the surface of a metal member having a recess on the surface, and holds the metal member and hangs it in a bath solution and immerses it. And
A bath liquid guide jig provided with a guide portion for guiding the bath liquid to the recess when the holding means is lowered at a position below the recess that opens downward in the metal member in a state where the metal member is held. A metal member hanging jig characterized by comprising: The holding means is provided with a rod-like member at a position below the metal member while holding the metal member,
The metal bath suspension jig according to claim 7, wherein the bath liquid guide jig is detachably attached to the rod-shaped member. In a surface treatment process in which a metal member having a recess on the surface is immersed in a bath solution to form a film on the surface of the metal member, the bath is formed in the recess that opens downward when the metal member is immersed in the bath solution. A bath liquid guide jig for guiding the liquid,
A bath liquid guide jig comprising an upper opening formed in a cylindrical shape smaller than the lower opening, and a guide portion for guiding the bath liquid to the recess.

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