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JP4948825B2 - Bearing member and manufacturing method thereof - Google Patents
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JP4948825B2 - Bearing member and manufacturing method thereof - Google Patents

Bearing member and manufacturing method thereof Download PDF

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JP4948825B2
JP4948825B2 JP2005333292A JP2005333292A JP4948825B2 JP 4948825 B2 JP4948825 B2 JP 4948825B2 JP 2005333292 A JP2005333292 A JP 2005333292A JP 2005333292 A JP2005333292 A JP 2005333292A JP 4948825 B2 JP4948825 B2 JP 4948825B2
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peripheral surface
bearing
electroformed
master
inner peripheral
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JP2007139063A (en
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建治 日比
康裕 山本
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NTN Corp
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NTN Corp
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Priority to JP2005333292A priority Critical patent/JP4948825B2/en
Priority to PCT/JP2006/317508 priority patent/WO2007034671A1/en
Priority to US12/066,463 priority patent/US8419281B2/en
Priority to CN201210370122.0A priority patent/CN102878214B/en
Priority to CN2006800339724A priority patent/CN101263310B/en
Priority to KR1020087006757A priority patent/KR20080050585A/en
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本発明は、電鋳部を有する軸受部材およびその製造方法に関する。   The present invention relates to a bearing member having an electroformed part and a manufacturing method thereof.

この種の軸受部材は、電鋳部の成形母体となるマスター表面に析出した面がマスター表面の面精度に倣って高精度に形成可能であることを利用して、この電鋳部の析出面で軸受面を構成した軸受部材として好適に用いられている。   This type of bearing member uses the fact that the surface deposited on the master surface, which is the molding base of the electroformed part, can be formed with high accuracy following the surface accuracy of the master surface. It is suitably used as a bearing member that constitutes a bearing surface.

例えば、特開2003−56552号公報(特許文献1)には、電鋳部をインサート部品として一体に型成形した軸受部材が提案されている。この軸受部材は、電鋳部の成形母体となるマスター軸の非導電性マスキング部以外の領域に電鋳殻である円筒状の電鋳部を析出形成し、この電鋳部をインサート部品として軸受部材を樹脂で型成形した後、軸受部材の電鋳部をマスター軸から分離することで、分離面となる電鋳部の内周面をそのまま軸受面として使用可能としたことを特徴とするものである。
特開2003−56552号公報
For example, Japanese Patent Application Laid-Open No. 2003-56552 (Patent Document 1) proposes a bearing member in which an electroformed part is integrally molded as an insert part. This bearing member is formed by depositing a cylindrical electroformed part, which is an electroformed shell, in a region other than the non-conductive masking part of the master shaft that is the molding base of the electroformed part, and this electroformed part serves as a bearing. After the member is molded with resin, the electroformed part of the bearing member is separated from the master shaft, so that the inner peripheral surface of the electroformed part that becomes the separation surface can be used as it is as a bearing surface It is.
JP 2003-56552 A

上記の手法で形成した軸受部材では、電鋳部とマスター軸との分離が残留応力の解放に伴って行われるため、分離後のマスター軸の外周面と電鋳部の内周面との間の隙間は軸方向で均一幅となる。従来では、電鋳部が軸受部材の軸方向全長に亘って形成されているため、上記手法では、軸受部材の内周面と軸受部材の外周面との間に、軸受部材の全長に亘って均一幅の隙間しか得られない。   In the bearing member formed by the above method, the separation between the electroformed part and the master shaft is performed along with the release of the residual stress, so that the separation between the outer peripheral surface of the master shaft and the inner peripheral surface of the electroformed part is performed. The gap is uniform in the axial direction. Conventionally, since the electroformed part is formed over the entire length in the axial direction of the bearing member, in the above method, the entire length of the bearing member is provided between the inner peripheral surface of the bearing member and the outer peripheral surface of the bearing member. Only gaps of uniform width can be obtained.

しかしながら、軸受に対する要求特性によっては、部分的に異なる幅の隙間が求められる場合もある。例えばオイル漏れ防止等のために軸受部材の端部にシール空間を形成する場合、あるいは二つの軸受面の間に逃げ部を形成する場合には、軸受部材の内周面と軸部材の外周面との間に、軸受すき間よりも大きい幅の隙間を形成する必要がある。   However, depending on the required characteristics of the bearing, gaps with partially different widths may be required. For example, when a seal space is formed at the end of the bearing member to prevent oil leakage, or when an escape portion is formed between two bearing surfaces, the inner peripheral surface of the bearing member and the outer peripheral surface of the shaft member It is necessary to form a gap having a width larger than that of the bearing gap.

軸方向で半径方向寸法の異なる隙間(異径隙間)は、例えば電鋳部の内周面に後加工を施して、その内径寸法を拡大させることでも得ることはできるが、電鋳部の厚さは通常1mm以下であるから、精度面やコスト面を考慮すると実用的ではない。   The gaps with different radial dimensions in the axial direction (different-diameter gaps) can also be obtained by, for example, post-processing the inner peripheral surface of the electroformed part and enlarging the inner diameter dimension. Since the thickness is usually 1 mm or less, it is not practical in consideration of accuracy and cost.

そこで、本発明は、高精度の異径隙間を低コストに得ることを目的とする。   Accordingly, an object of the present invention is to obtain a highly accurate different-diameter gap at a low cost.

上記目的を達成するため、本発明は、マスター表面に目的とする金属を電解析出してなる電鋳部と、電鋳部と一体に形成された成形部とを備え、電鋳部の内周面に、軸部材を支持する軸受面が形成された軸受部材であって、内周面が、成形部の内周面と、マスター表面から剥離させた電鋳部の内周面とで形成され、かつ成形部の内周面が、電鋳部の内周面に対して段差を持ち、マスター表面に形成した被膜で成形された成形面であることを特徴とする軸受部材を提供する。 In order to achieve the above object, the present invention comprises an electroformed part formed by electrolytically depositing a target metal on a master surface, and a molded part formed integrally with the electroformed part, and has an inner periphery of the electroformed part. The bearing member is formed with a bearing surface for supporting the shaft member on the surface, and the inner peripheral surface is formed by the inner peripheral surface of the molding part and the inner peripheral surface of the electroformed part separated from the master surface. and the inner circumferential surface of the forming portion, Chi lifting a step with respect to the inner peripheral surface of the electroformed part, to provide a bearing member which is a forming surface which is molded by the film formed on the surface of the master.

このように、本発明によれば、軸受部材の内周面が、成形部の内周面と電鋳部の内周面とで形成されているので、軸部材の外周面との間の隙間が、電鋳部の内周面との間のみならず、成形部の内周面との間にも形成される。この際、成形部の内周面が電鋳部の内周面に対して段差を持つことで、成形部の内周面と軸部材の外周面との間で異径隙間を形成することができる。また、電鋳加工により形成された電鋳部の内周面が高精度に得られると共に、成形部の内周面を成形面とすることで、成形部の内周面も高精度に得られる。そのため、これら内周面と軸部材の外周面との間に形成される異径隙間を高精度に得ることができる。   Thus, according to the present invention, since the inner peripheral surface of the bearing member is formed by the inner peripheral surface of the molded part and the inner peripheral surface of the electroformed part, there is a gap between the outer peripheral surface of the shaft member. However, it is formed not only between the inner peripheral surface of the electroformed part but also between the inner peripheral surface of the molded part. At this time, the inner peripheral surface of the molded part has a step with respect to the inner peripheral surface of the electroformed part, so that a different-diameter gap can be formed between the inner peripheral surface of the molded part and the outer peripheral surface of the shaft member. it can. In addition, the inner peripheral surface of the electroformed part formed by electroforming can be obtained with high precision, and the inner peripheral surface of the molded part can also be obtained with high precision by using the inner peripheral surface of the molded part as a molding surface. . Therefore, a different diameter gap formed between the inner peripheral surface and the outer peripheral surface of the shaft member can be obtained with high accuracy.

上記構成の軸受部材は、例えばこの軸受部材と、軸受部材の内周に挿入した軸部材とを備え、成形部の内周面と軸部材の外周面との間に半径方向の隙間を形成した軸受装置として提供可能である。この場合、上記半径方向の隙間でシール空間を形成することができる。また、上記半径方向の隙間で逃げ部を形成することもできる。   The bearing member configured as described above includes, for example, this bearing member and a shaft member inserted into the inner periphery of the bearing member, and a radial gap is formed between the inner peripheral surface of the molded portion and the outer peripheral surface of the shaft member. It can be provided as a bearing device. In this case, the seal space can be formed by the gap in the radial direction. Further, the escape portion can be formed by the radial gap.

また、異径隙間の形状として、電鋳部と成形部のうち、何れか一方の内周面を他方の内周面の軸方向両側に配置した構成が考えられる。例えば上記半径方向の隙間でシール空間を形成する場合には、成形部の内周面を電鋳部の内周面の軸方向両側に配置して、上記半径方向の隙間を軸受装置の軸方向両端に形成するのが好ましい。また、上記半径方向の隙間で逃げ部を形成する場合には、電鋳部の内周面を成形部の内周面の軸方向両側に配置して、上記半径方向の隙間を複数の軸受面間に形成するのが好ましい。もちろん、本発明に係る異径隙間としては、上記例示の構成に限らず、種々の形態を採ることが可能である。   Further, as the shape of the different-diameter gap, a configuration in which one of the inner peripheral surfaces of the electroformed portion and the molded portion is disposed on both axial sides of the other inner peripheral surface is conceivable. For example, when the seal space is formed by the gap in the radial direction, the inner peripheral surface of the molded part is arranged on both sides in the axial direction of the inner peripheral surface of the electroformed part, and the radial gap is arranged in the axial direction of the bearing device. It is preferable to form at both ends. In the case where the clearance portion is formed by the radial gap, the inner peripheral surface of the electroformed portion is arranged on both sides in the axial direction of the inner peripheral surface of the molded portion, and the radial gap is formed into a plurality of bearing surfaces. It is preferable to form in between. Of course, the gap of different diameters according to the present invention is not limited to the configuration illustrated above, and can take various forms.

また、上記目的を達成するため、本発明は、マスター表面に目的とする金属を電解析出してなる電鋳部と、電鋳部と一体に形成された成形部とを備え、電鋳部の内周面に軸受面を有する軸受部材を製造するに際し、表面の一部に非導電性被膜を形成したマスターを用いて電鋳加工を行い、次いでマスター表面に形成された電鋳部及び非導電性被膜をインサートした状態で射出成形を行って、非導電性被膜で成形部の内周面を成形した後、非導電性被膜の除去を行うことを特徴とする軸受部材の製造方法を提供する。 In order to achieve the above object, the present invention comprises an electroformed part formed by electrolytically depositing a target metal on a master surface, and a molded part formed integrally with the electroformed part. When manufacturing a bearing member having a bearing surface on the inner peripheral surface , electroforming is performed using a master having a non-conductive coating formed on a part of the surface, and then the electroformed portion formed on the master surface and non-conductive What line injection molding sex film while insert after forming the inner peripheral surface of the molded part in a non-conductive coating, provide a method of manufacturing a bearing member, characterized in that the removal of the non-conductive coating To do.

電鋳部の内周面と、電鋳部の内周面に対して段差を有する成形部の内周面とを有する軸受部材の内周面を形成するのに、例えばマスター軸を段付き軸状のマスターを使用する場合、成形品の内周面形状が基本的にマスター軸の内周面形状に依存するので、内周面形状の自由度が低くなる。また、形状変更や寸法変更ごとにマスター軸を加工する手間がかかり、高コスト化の要因となる。   In order to form the inner peripheral surface of the bearing member having the inner peripheral surface of the electroformed part and the inner peripheral surface of the molded part having a step with respect to the inner peripheral surface of the electroformed part, for example, the master shaft is a stepped shaft. When the shape master is used, the shape of the inner peripheral surface of the molded product basically depends on the shape of the inner peripheral surface of the master shaft, so the degree of freedom of the inner peripheral surface shape is reduced. Moreover, it takes time and effort to process the master axis for each shape change or dimension change, which causes an increase in cost.

これに対し、非導電性被膜で表面の一部を被覆したマスター軸を用いて電鋳加工を行い、次いでマスター軸を、電鋳部および非導電性被膜を含めてインサートして射出成形を行った後、マスター軸の分離および非導電性被膜の除去を行うようにすれば、マスターの表面形状に依存しない軸受部材の内周面が得られるので、その形状自由度を高めることができる。   On the other hand, electroforming is performed using a master shaft whose surface is partially covered with a non-conductive coating, and then injection molding is performed by inserting the master shaft including the electroformed portion and the non-conductive coating. Thereafter, if the master shaft is separated and the non-conductive film is removed, the inner peripheral surface of the bearing member independent of the surface shape of the master can be obtained, so that the degree of freedom in shape can be increased.

特に軸受部材が、電鋳部と成形部のうち、何れか一方の内周面を他方の内周面の軸方向両側に配置した構造を有する場合、前者の方法では、射出成形後にマスター軸を分離する際、マスター軸外周面の段部と軸受部材内周面の段部とが軸方向で干渉するため、段差サイズによっては分離不可となる可能性があるが、後者の方法であれば、マスターは均一径にできるから、この種の干渉を排除することができ、マスターと軸受部材とを確実に分離することができる。   In particular, when the bearing member has a structure in which one of the inner peripheral surface of the electroformed portion and the molded portion is disposed on both sides in the axial direction of the other inner peripheral surface, the former method uses the master shaft after injection molding. When separating, the step on the outer peripheral surface of the master shaft and the step on the inner peripheral surface of the bearing member interfere with each other in the axial direction. Since the master can have a uniform diameter, this type of interference can be eliminated, and the master and the bearing member can be reliably separated.

また、マスターとして(特に軸の部分には)均一径のものが使用できるので、製造コストの低廉化を図ることができる。非導電性被膜はマスターの表面に形成すればよいので、その制御も、内周面に高精度な加工を施す場合と比べて比較的容易であり、より一層の低コスト化が図ることが可能である。   Further, since a master with a uniform diameter can be used as the master (particularly for the shaft portion), the manufacturing cost can be reduced. Since the non-conductive film only needs to be formed on the surface of the master, its control is relatively easy compared to the case where high-precision processing is performed on the inner peripheral surface, and further cost reduction can be achieved. It is.

非導電性被膜のマスター表面への形成方法としては、例えばスピンコート法をはじめ、汎用的なコーティング法が使用可能である。また、この他にも、インクジェット法等で液滴状の微量インクをマスター表面に供給し、かかるインクの集合体で被膜を形成する方法が使用可能である。非導電性被膜に適した材料としては、その作業工程を考慮して、耐メッキ性(電解質溶液に対する耐性)や耐環境性、耐熱性、溶剤への溶解性などに優れた樹脂材料を選択使用するのが好ましい。   As a method for forming the non-conductive film on the master surface, for example, a general coating method such as a spin coating method can be used. In addition to this, it is possible to use a method in which a small amount of droplet-like ink is supplied to the master surface by an ink jet method or the like, and a film is formed with such an aggregate of inks. As materials suitable for non-conductive coatings, resin materials with excellent plating resistance (resistance to electrolyte solution), environmental resistance, heat resistance, and solvent solubility are selected and used in consideration of the work process. It is preferable to do this.

ただ、樹脂部の内周面を成形するものがマスター表面をマスキングするための非導電性被膜である必要は無く、樹脂部の成形後に、除去可能なものであればよい。そのため、異径隙間を形成する方法として、電鋳部に軸受面を有する軸受部材を製造するに際し、表面の一部に非導電性被膜を形成したマスターを用いて電鋳加工を行った後、非導電性被膜を除去すると共に、除去領域の一部又は全体に樹脂層を形成し、次いでマスター表面の電鋳部および樹脂層をインサートした状態で射出成形を行った後、樹脂層の除去を行う方法も考えられる。この場合、非導電性被膜用の材料としては、主に耐メッキ性を満足するものであればよく、樹脂層用の材料としては、耐熱性に優れ、溶剤により溶け易いものであればよい。これにより、使用可能な材料の選択幅が広がり、より安価な材料を選択使用することができる。   However, what forms the inner peripheral surface of the resin portion does not need to be a non-conductive coating for masking the master surface, and may be any material that can be removed after the formation of the resin portion. Therefore, as a method of forming a gap of different diameter, when producing a bearing member having a bearing surface in the electroformed part, after performing electroforming using a master having a non-conductive coating formed on a part of the surface, After removing the non-conductive film, forming a resin layer in part or all of the removal area, and then performing injection molding with the electroformed part of the master surface and the resin layer inserted, and then removing the resin layer A way to do it is also conceivable. In this case, the material for the non-conductive film may be any material that mainly satisfies the plating resistance, and the material for the resin layer may be any material that has excellent heat resistance and is easily soluble in a solvent. Thereby, the selection range of the material which can be used spreads, and a cheaper material can be selected and used.

以上のように、本発明によれば、高精度の異径隙間を低コストに得ることができる。   As described above, according to the present invention, a highly accurate different diameter gap can be obtained at low cost.

以下、本発明の一実施形態を図1〜図4に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

図1は、本発明の一実施形態に係る軸受装置1の断面図を示す。同図において、軸受装置1は、軸部材2と、軸部材2を内周に挿入可能な軸受部材3とを備える。このうち軸受部材3は、電鋳部4と成形部5とからなり、電鋳部4をインサート部品として樹脂材料で一体に射出成形される。   FIG. 1 shows a cross-sectional view of a bearing device 1 according to an embodiment of the present invention. In FIG. 1, a bearing device 1 includes a shaft member 2 and a bearing member 3 capable of inserting the shaft member 2 into the inner periphery. Of these, the bearing member 3 includes an electroformed part 4 and a molded part 5, and is integrally injection-molded with a resin material using the electroformed part 4 as an insert part.

軸受部材3の内周面のうち軸方向両端を除く領域は、電鋳部4の内周面4aで形成される。電鋳部4の内周面4aは対向する軸部材2の外周面2aとの間に、すき間幅C1の軸受すき間6を形成している。また、軸方向両端に位置し、内周面4aと共に軸受部材3の内周面を構成する第二成形面5a、5aは、後述するが、非導電性被膜9の外表面(成形面9a1)に倣って成形されたものであり、電鋳部4の内周面4aに対して段差を有する。第二成形面5aは、この実施形態では径一定の円筒面であり、対向する軸部材2の外周面2aとの間に半径方向の隙間7を形成している。半径方向隙間7のすき間幅C2は、軸受すき間6のすき間幅C1より大きい。   A region of the inner peripheral surface of the bearing member 3 excluding both axial ends is formed by the inner peripheral surface 4 a of the electroformed part 4. Between the inner peripheral surface 4a of the electroformed part 4 and the outer peripheral surface 2a of the opposing shaft member 2, a bearing clearance 6 having a clearance width C1 is formed. Further, the second molding surfaces 5a and 5a that are located at both ends in the axial direction and constitute the inner circumferential surface of the bearing member 3 together with the inner circumferential surface 4a are described later, but the outer surface of the non-conductive coating 9 (molding surface 9a1). And has a step with respect to the inner peripheral surface 4 a of the electroformed part 4. In this embodiment, the second molding surface 5a is a cylindrical surface having a constant diameter, and a radial gap 7 is formed between the outer peripheral surface 2a of the opposing shaft member 2. The gap width C <b> 2 of the radial gap 7 is larger than the gap width C <b> 1 of the bearing gap 6.

半径方向隙間7は、この実施形態では、軸受内部に充満された潤滑油のシール空間となり、軸受すき間6を潤滑油で満たした状態では、潤滑油の油面は、常に軸方向両端のシール空間(半径方向隙間7、7)内に維持される。なお、図1に示す軸受すき間6および半径方向隙間7は、軸部材2や軸受部材3に比べれば何れも微小であるが、同図では、形状の理解を容易にするため、軸受すき間6のすき間幅C1および半径方向隙間7のすき間幅C2を、軸部材2の径方向寸法に比べて大きく(誇張して)描いている。   In this embodiment, the radial gap 7 becomes a seal space for the lubricating oil filled in the bearing. When the bearing gap 6 is filled with the lubricating oil, the oil surface of the lubricating oil always has a seal space at both ends in the axial direction. Maintained within (radial gaps 7, 7). The bearing gap 6 and the radial gap 7 shown in FIG. 1 are both smaller than those of the shaft member 2 and the bearing member 3, but in FIG. The gap width C1 and the gap width C2 of the radial gap 7 are drawn larger (exaggerated) than the radial dimension of the shaft member 2.

上記構成の軸受装置1において、軸部材2の相対回転時、軸受すき間6に満たされた潤滑油が油膜を形成し、かかる油膜を介して軸部材2が軸受部材3に対してラジアル方向に相対回転自在に支持される。また、この際、シール空間となる半径方向隙間7が軸受すき間6の大気開放側に隣接して形成されているため、軸部材2の相対回転に伴い潤滑油が軸受すき間6から軸受外部に漏れ出すのを防いで、潤滑油を軸受内部に保持することができる。   In the bearing device 1 having the above-described configuration, when the shaft member 2 is relatively rotated, the lubricating oil filled in the bearing gap 6 forms an oil film, and the shaft member 2 is relative to the bearing member 3 in the radial direction via the oil film. It is supported rotatably. At this time, since the radial gap 7 serving as a seal space is formed adjacent to the atmosphere opening side of the bearing gap 6, the lubricating oil leaks from the bearing gap 6 to the outside of the bearing with the relative rotation of the shaft member 2. It is possible to keep the lubricating oil inside the bearing.

以下、軸受装置1の製造工程の一例を、軸受部材3の製造工程を中心に説明する。   Hereinafter, an example of the manufacturing process of the bearing device 1 will be described focusing on the manufacturing process of the bearing member 3.

軸受部材3は、電鋳加工で使用するマスター8の表面に非導電性被膜9を形成する工程、非導電性被膜9を形成したマスター8に電鋳加工を行って電鋳部4を形成する工程、電鋳部4および非導電性被膜9を有するマスター8をインサート部品として軸受部材3の型成形(インサート成形)を行う工程、電鋳部4とマスター8とを分離する工程、および軸受部材3から非導電性被膜9を除去する工程とを経て製造される。   The bearing member 3 forms a non-conductive film 9 on the surface of a master 8 used in electroforming, and electroforms the master 8 on which the non-conductive film 9 is formed to form an electroformed part 4. A process, a process of performing molding (insert molding) of the bearing member 3 using the electroformed part 4 and the master 8 having the nonconductive coating 9 as an insert part, a process of separating the electroformed part 4 and the master 8, and a bearing member 3 through a step of removing the non-conductive coating 9 from the substrate 3.

電鋳部4の成形母体となるマスター8は、この実施形態では軸状をなし、例えば焼入処理をしたステンレス鋼で断面輪郭真円状に、かつ軸方向で均一径に形成される。マスター8の材料としては、ステンレス鋼以外にも、例えばクロム系合金やニッケル系合金など、マスキング性、導電性、耐薬品性を有するものであれば金属、非金属を問わず任意に選択可能である。   In this embodiment, the master 8 serving as a molding base of the electroformed part 4 has an axial shape. For example, the master 8 is formed of a stainless steel that has been subjected to a quenching process so as to have a perfectly circular cross-sectional shape and a uniform diameter in the axial direction. The material of the master 8 can be arbitrarily selected from metals and non-metals as long as it has masking properties, electrical conductivity, and chemical resistance, such as a chromium alloy and a nickel alloy, in addition to stainless steel. is there.

マスター8は、むく軸(中実軸)の他、中空軸あるいは中空部に樹脂を充填した中実軸であってもよい。また、マスター8の外周面精度は、軸受面となる電鋳部4の内周面4aの面精度を直接左右するので、なるべく高精度に仕上げておくことが望ましい。   The master 8 may be a solid shaft in which a hollow shaft or a hollow portion is filled with resin in addition to the peeled shaft (solid shaft). Moreover, since the outer peripheral surface accuracy of the master 8 directly affects the surface accuracy of the inner peripheral surface 4a of the electroformed part 4 serving as a bearing surface, it is desirable that the master 8 be finished as high as possible.

マスター8の表面のうち、電鋳部4の形成予定領域を除く領域には、マスキングのための非導電性被膜9が形成される。また、非導電性被膜9は、この実施形態では、成形部5の第二成形面5aを成形し、軸部材2の外周面2aとの間に半径方向隙間7を形成するためのものである。そのため、図2に示すように、マスター8の表面に形成された非導電性被膜9のうち、成形部5の第二成形面5aに対応する箇所(成形部9a)は、他所に比べて肉厚に形成されている。   On the surface of the master 8, a non-conductive coating 9 for masking is formed in a region excluding the region where the electroformed part 4 is to be formed. Further, in this embodiment, the non-conductive coating 9 is for forming the second molding surface 5a of the molding unit 5 and forming the radial gap 7 between the outer peripheral surface 2a of the shaft member 2. . Therefore, as shown in FIG. 2, in the nonconductive film 9 formed on the surface of the master 8, the portion (molded portion 9 a) corresponding to the second molded surface 5 a of the molded portion 5 is meat compared to the other portions. It is formed thick.

マスター8の表面に非導電性被膜9を形成する方法として、種々の方法が使用可能であり、例えばスピンコート法が挙げられる。また、この他には、液滴状の微量インクをインクジェット法等によりマスター表面に供給し、かかる微量インクの集合体で非導電性被膜9を形成する方法などが考えられる。上述した方法のうち、前者は、均等厚みの被膜を短時間で形成するのに優れた方法であるのに対し、後者は、微小かつ複雑な形状の被膜を形成するのに優れた方法である。そのため、形成すべき非導電性被膜9の形状に合わせて、上記方法を使い分けるのが好ましい。   Various methods can be used as a method of forming the non-conductive coating 9 on the surface of the master 8, and examples thereof include a spin coating method. In addition, a method of supplying a small amount of droplet-like ink to the master surface by an ink jet method or the like and forming the non-conductive film 9 with an aggregate of such a minute amount of ink can be considered. Among the methods described above, the former is an excellent method for forming a uniform-thickness film in a short time, whereas the latter is an excellent method for forming a fine and complex-shaped film. . For this reason, it is preferable to use the above-mentioned method properly in accordance with the shape of the nonconductive film 9 to be formed.

非導電性被膜9を形成する材料としては、絶縁性(非電解析出性)はもちろん、電解質溶液に対する耐食性、さらには後述する成形部5の成形温度に対する耐久性(耐熱性)や溶剤に対する溶け易さ(溶解性)等を有する材料であることが好ましく、例えば酢酸ビニル樹脂やエチルセルロース、アセチルブチルセルロース、シェラック(天然樹脂)などが一例として挙げられる。   As a material for forming the non-conductive coating 9, not only insulation (non-electrolytic precipitation), but also corrosion resistance to the electrolyte solution, and further, durability (heat resistance) with respect to the molding temperature of the molded part 5 to be described later and solubility to the solvent It is preferable that the material has ease (solubility), and examples thereof include vinyl acetate resin, ethyl cellulose, acetylbutyl cellulose, shellac (natural resin), and the like.

電鋳加工は、NiやCu等の金属イオンを含んだ電解質溶液にマスター8を浸漬し、電解質溶液に通電して目的の金属をマスター8の表面のうち、非導電性被膜9を除く領域(外周面8aの露出領域)に電解析出させることにより行われる。電解質溶液には、カーボンなどの摺動材、あるいはサッカリン等の応力緩和材を必要に応じて含有させることも可能である。析出金属の種類は、軸受の軸受面に求められる硬度、あるいは潤滑油に対する耐性(耐油性)など、必要とされる特性に応じて適宜選択される。   Electroforming is performed by immersing the master 8 in an electrolyte solution containing metal ions such as Ni and Cu, and energizing the electrolyte solution to remove the target metal from the surface of the master 8 excluding the nonconductive film 9 ( This is performed by electrolytic deposition on the exposed area of the outer peripheral surface 8a. The electrolyte solution may contain a sliding material such as carbon or a stress relaxation material such as saccharin as necessary. The kind of the deposited metal is appropriately selected according to required properties such as hardness required for the bearing surface of the bearing or resistance to lubricating oil (oil resistance).

以上の工程を経ることにより、図3に示すように、マスター8表面の非導電性被膜9形成領域以外の領域に電鋳部4を形成した電鋳軸10が製作される。この段階で、電鋳軸10は、マスター8の外周面8aの軸方向一部領域に円筒状の電鋳部4を形成し、電鋳部4の軸方向両端に隣接して非導電性被膜9の成形部9aを形成した形態をなす。なお、電鋳部4の厚みは、これが薄すぎると軸受面(内周面4a)の耐久性低下等につながり、厚すぎるとマスター8からの剥離性が低下する可能性があるので、求められる軸受性能や軸受サイズ、さらには用途等に応じて最適な厚み、例えば10μm〜200μmの範囲に設定される。   By passing through the above process, as shown in FIG. 3, the electroformed shaft 10 in which the electroformed part 4 is formed in a region other than the non-conductive coating 9 forming region on the surface of the master 8 is manufactured. At this stage, the electroformed shaft 10 forms a cylindrical electroformed portion 4 in a partial region in the axial direction of the outer peripheral surface 8 a of the master 8, and is adjacent to both ends of the electroformed portion 4 in the axial direction. Nine molded parts 9a are formed. In addition, the thickness of the electroformed part 4 is calculated | required since it will lead to the durable fall of a bearing surface (inner peripheral surface 4a), etc., when this is too thin, and the peelability from the master 8 may fall when too thick. The optimum thickness is set in accordance with the bearing performance, the bearing size, and the application, for example, in the range of 10 μm to 200 μm.

上記工程を経て製作された電鋳軸10は、軸受部材3をインサート成形する成形型内にインサート部品として供給配置される。   The electroformed shaft 10 manufactured through the above steps is supplied and arranged as an insert part in a mold for insert-molding the bearing member 3.

図4は、軸受部材3のインサート成形工程を概念的に示すもので、可動型11、および固定型12からなる金型には、ランナ13およびゲート14と、キャビティ15とが設けられる。ゲート14は、この実施形態では、同図に示す点状ゲートであり、成形金型の、成形部5の軸方向一端面に対応する位置に、円周方向等間隔に複数設けられる。各ゲート14のゲート面積は、充填する溶融樹脂の粘度や成形品の形状に合わせて適切な値に設定される。   FIG. 4 conceptually shows an insert molding process of the bearing member 3, and a runner 13, a gate 14, and a cavity 15 are provided in a mold including the movable mold 11 and the fixed mold 12. In this embodiment, the gate 14 is a dotted gate shown in the figure, and a plurality of gates 14 are provided at equal intervals in the circumferential direction at positions corresponding to one end surface in the axial direction of the molding portion 5 of the molding die. The gate area of each gate 14 is set to an appropriate value according to the viscosity of the molten resin to be filled and the shape of the molded product.

上記構成の金型において、電鋳軸10を位置決め配置した状態で可動型11を固定型12に接近させて型締めする。この際、電鋳軸10(マスター8)表面に形成された電鋳部4および非導電性被膜9は共にキャビティ15内にある。次に、型締めした状態で、スプルー(図示は省略する)、ランナ13、およびゲート14を介してキャビティ15内に溶融樹脂Pを射出・充填し、成形部5を電鋳軸10と一体に成形する。   In the mold configured as described above, the movable mold 11 is brought close to the fixed mold 12 and clamped while the electroformed shaft 10 is positioned and arranged. At this time, both the electroformed part 4 and the nonconductive film 9 formed on the surface of the electroformed shaft 10 (master 8) are in the cavity 15. Next, in a state where the mold is clamped, molten resin P is injected and filled into the cavity 15 through the sprue (not shown), the runner 13, and the gate 14, and the molded part 5 is integrated with the electroformed shaft 10. Mold.

これにより、成形部5は、金型11、12内に設けられたキャビティ15に即した形状に成形される。また、成形部5の内周面のうち、電鋳部4の外径側に位置する領域は電鋳部4の外周面4bで成形される(第一成形面5b)。また、成形部5の内周面のうち、電鋳部4の軸方向両端側に位置する領域は、キャビティ15の一部を形成する非導電性被膜9の成形面9a1に倣って成形される(第二成形面5a、5a)。   Thereby, the shaping | molding part 5 is shape | molded by the shape according to the cavity 15 provided in the metal mold | dies 11 and 12. FIG. Moreover, the area | region located in the outer-diameter side of the electroformed part 4 among the internal peripheral surfaces of the shaping | molding part 5 is shape | molded by the outer peripheral surface 4b of the electroformed part 4 (1st shaping | molding surface 5b). Moreover, the area | region located in the axial direction both ends side of the electroformed part 4 among the internal peripheral surfaces of the shaping | molding part 5 is shape | molded according to the shaping | molding surface 9a1 of the nonelectroconductive film 9 which forms a part of cavity 15. FIG. (Second molding surfaces 5a, 5a).

溶融樹脂Pとしては、例えば液晶ポリマー(LCP)、ポリフェニレンサルファイド(PPS)樹脂、ポリアセタール樹脂、ポリアミド樹脂等の結晶性ポリマーや、ポリフェニルサルフォン(PPSU)、ポリエーテルサルフォン(PES)、ポリエーテルイミド(PEI)等の非晶性樹脂が使用可能である。もちろんこれらは一例にすぎず、軸受の用途や使用環境に適合した樹脂材料が任意に選択可能である。必要に応じて強化材(繊維状、粉末状等の形態は問わない)や潤滑剤、導電化剤等の各種充填材を加えてもよい。   Examples of the molten resin P include crystalline polymers such as liquid crystal polymer (LCP), polyphenylene sulfide (PPS) resin, polyacetal resin, polyamide resin, polyphenylsulfone (PPSU), polyethersulfone (PES), and polyether. Amorphous resin such as imide (PEI) can be used. Of course, these are merely examples, and a resin material suitable for the application and use environment of the bearing can be arbitrarily selected. You may add various fillers, such as a reinforcement (regardless of forms, such as a fiber form and a powder form), a lubrication agent, and a electrically conductive agent as needed.

型開き後、マスター8、非導電性被膜9、電鋳部4、および成形部5が一体となった成形品を金型11、12から脱型する。この成形品は、その後の分離工程で電鋳部4と非導電性被膜9、および成形部5とからなる二次成形品と、マスター8とに分離される。   After the mold opening, the molded product in which the master 8, the nonconductive film 9, the electroformed part 4, and the molded part 5 are integrated is removed from the molds 11 and 12. This molded product is separated into a secondary molded product composed of the electroformed part 4, the nonconductive film 9, and the molded part 5 and the master 8 in a subsequent separation step.

分離工程では、例えばマスター8あるいは電鋳部4に衝撃を加えることで、電鋳部4の内周面4aをマスター8の外周面8aから剥離させる。これにより、マスター8が軸受部材3(電鋳部4)から引抜かれる。   In the separation step, for example, the inner peripheral surface 4 a of the electroformed part 4 is peeled from the outer peripheral surface 8 a of the master 8 by applying an impact to the master 8 or the electroformed part 4. Thereby, the master 8 is pulled out from the bearing member 3 (electroformed part 4).

なお、電鋳部4の分離手段としては、上記手段以外に、例えば電鋳部4とマスター8とを加熱(又は冷却)し、両者間に熱膨張量差を生じさせることによる方法、あるいは両手段(衝撃と加熱)を併用する手段等が使用可能である。   In addition to the above-described means, the electroformed part 4 may be separated by, for example, a method in which the electroformed part 4 and the master 8 are heated (or cooled) to cause a difference in thermal expansion between them, or both. Means using both means (impact and heating) can be used.

電鋳部4をマスター8から分離した後、電鋳部4の軸方向両端内周に残る非導電性被膜9を溶剤により溶解する。これにより、非導電性被膜9が除去され、完成品としての軸受部材3が得られる。また、非導電性被膜9の除去に伴い、成形部5の第二成形面5aが軸受部材3の内周に露出した状態となる。   After separating the electroformed part 4 from the master 8, the non-conductive coating 9 remaining on the inner circumferences at both axial ends of the electroformed part 4 is dissolved with a solvent. Thereby, the nonconductive film 9 is removed, and the bearing member 3 as a finished product is obtained. Further, with the removal of the non-conductive coating 9, the second molding surface 5a of the molding part 5 is exposed to the inner periphery of the bearing member 3.

上述の如く形成された軸受部材3の内周に、引抜いたマスター8とは別に作成した軸部材2を挿入することで、図1に示す軸受装置1が完成する。この場合、第二成形面5aと軸部材2の外周面2aとの間に形成される半径方向隙間7の径方向すき間幅C2は、電鋳部4の内周面4aと軸部材2の外周面2aとの間の軸受すき間6の径方向すき間幅C1に比べて、非導電性被膜9の成形部9aの径方向厚みの分だけ大きい。   The bearing device 1 shown in FIG. 1 is completed by inserting the shaft member 2 created separately from the pulled-out master 8 into the inner periphery of the bearing member 3 formed as described above. In this case, the radial clearance width C2 of the radial gap 7 formed between the second molding surface 5a and the outer peripheral surface 2a of the shaft member 2 is equal to the outer peripheral surface of the inner peripheral surface 4a of the electroformed part 4 and the shaft member 2. It is larger than the radial clearance width C1 of the bearing clearance 6 between the surface 2a by the radial thickness of the molded portion 9a of the non-conductive coating 9.

このように、マスター8の表面に非導電性被膜9を形成した状態で電鋳部4を形成し、その後の成形部5(軸受部材3)のインサート成形において、非導電性被膜9の成形面9a1で成形部5の第二成形面5aを成形し、非導電性被膜9を除去することで、電鋳部4の内周面4aと段差を介して隣接する成形部5の内周面5aを形成することができる。また、軸部材2の外周面2aと電鋳部4の内周面4aとの間の軸受すき間6と軸方向に隣接し、かつその半径方向のすき間幅を異ならせた(C1<C2)半径方向隙間7を形成することができる。従って、非導電性被膜9の成形部9aの形状を適宜調整することで、電鋳部4の内周面4aを含めた軸受部材3の内周面と、内周に挿入される均一径の軸部材2の外周面2aとの間に形成される径方向のすき間を、マスター8の表面形状によって限定されることなく、自由な形状に形成することができる。   In this way, the electroformed part 4 is formed in a state where the nonconductive film 9 is formed on the surface of the master 8, and the molding surface of the nonconductive film 9 is formed in the subsequent insert molding of the molded part 5 (bearing member 3). By molding the second molding surface 5a of the molding part 5 with 9a1 and removing the non-conductive coating 9, the inner circumferential surface 5a of the molding part 5 adjacent to the inner circumferential surface 4a of the electroformed part 4 through a step. Can be formed. Also, the bearing gap 6 between the outer peripheral surface 2a of the shaft member 2 and the inner peripheral surface 4a of the electroformed portion 4 is adjacent to the axial gap and the radial gap width is different (C1 <C2). A directional gap 7 can be formed. Accordingly, by appropriately adjusting the shape of the molded portion 9a of the non-conductive coating 9, the inner peripheral surface of the bearing member 3 including the inner peripheral surface 4a of the electroformed portion 4 and a uniform diameter inserted into the inner periphery. The radial gap formed between the outer peripheral surface 2a of the shaft member 2 is not limited by the surface shape of the master 8, and can be formed in a free shape.

また、マスター8の外周面8a形状(表面形状)を半径方向隙間7に対応した形状とする必要はなく、上記実施形態のように、径一定の円筒面形状のもので済む。従って、マスター8を引抜く際も無理抜きにならずに済み、軸受面となる電鋳部4の内周面4aの損傷を防ぐことができる。   Further, the shape of the outer peripheral surface 8a (surface shape) of the master 8 does not have to be a shape corresponding to the radial gap 7, and may be a cylindrical surface shape having a constant diameter as in the above embodiment. Therefore, it is not necessary to forcibly remove the master 8, and damage to the inner peripheral surface 4a of the electroformed portion 4 serving as a bearing surface can be prevented.

また、この実施形態に係る軸受装置1であれば、電鋳部4の内周面4aが高精度に形成されるので、軸部材2の外周面2aとの間に形成される軸受すき間6を小さく(数μm程度)設定しても高い軸受性能(振れ精度など)を得ることができる。そのため、例えば軸受すき間6のすき間幅C1に対する半径方向隙間7のすき間幅C2の比が3≦(C2/C1)≦50となるサイズの半径方向隙間7であれば、高いシール性と共に、防塵性(外部からの異物侵入を阻止)を発揮することが可能となるため好ましい。   Further, in the bearing device 1 according to this embodiment, since the inner peripheral surface 4a of the electroformed part 4 is formed with high accuracy, the bearing clearance 6 formed between the outer peripheral surface 2a of the shaft member 2 is increased. High bearing performance (runout accuracy, etc.) can be obtained even if it is set small (about several μm). Therefore, for example, if the radial gap 7 is sized so that the gap width C2 of the radial gap 7 with respect to the gap width C1 of the bearing gap 6 is 3 ≦ (C2 / C1) ≦ 50, it has high sealing performance and dust resistance. This is preferable because it is possible to exhibit (preventing entry of foreign matter from the outside).

以上、本発明の一実施形態を説明したが、本発明は上記実施形態に限られるものではない。   Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

上記実施形態では、表面に非導電性被膜9を形成したマスター8上に電鋳部4を形成し、かかる非導電性被膜9および電鋳部4を有する電鋳軸10をインサート部品として成形部5(軸受部材3)を射出成形すると共に、非導電性被膜9の成形面9a1で第二成形面5aを成形した場合を説明したが、これ以外の方法を採ることもできる。例えば、図5に示すように、表面に非導電性被膜9を形成したマスター8の外周面8aに電鋳部4を析出形成した後、非導電性被膜9を除去し、この非導電性被膜9の一部除去領域に、非導電性被膜9とは別材料からなる樹脂層19を形成する。そして、樹脂層19を形成した電鋳軸20をインサート部品として(電鋳部4および樹脂層19をキャビティ15内にインサートした状態で)成形部5(軸受部材3)を成形した後、樹脂層19を除去する方法などが実施可能である。この場合、樹脂層19の表面19aに倣って成形部5の第二成形面5aが成形される。   In the above embodiment, the electroformed part 4 is formed on the master 8 having the nonconductive film 9 formed on the surface, and the electroformed shaft 10 having the nonconductive film 9 and the electroformed part 4 is used as an insert part to form a molded part. While the case where the second molding surface 5a is molded with the molding surface 9a1 of the non-conductive coating 9 has been described while 5 (the bearing member 3) is injection molded, other methods may be employed. For example, as shown in FIG. 5, after the electroformed portion 4 is deposited on the outer peripheral surface 8a of the master 8 having the nonconductive film 9 formed on the surface, the nonconductive film 9 is removed, and the nonconductive film is removed. A resin layer 19 made of a material different from the non-conductive coating 9 is formed in a partly removed region of 9. Then, after molding the molded part 5 (the bearing member 3) using the electroformed shaft 20 on which the resin layer 19 is formed as an insert part (with the electroformed part 4 and the resin layer 19 inserted into the cavity 15), the resin layer A method of removing 19 can be implemented. In this case, the second molding surface 5 a of the molding part 5 is molded following the surface 19 a of the resin layer 19.

かかる方法によれば、非導電性被膜9用の材料には、射出成形時の耐熱性や被膜除去時の流動性(内周への流れ込み易さ)を考慮する必要が無く、一方、樹脂層19用の材料には、電鋳時の耐食性等を考慮しなくて済む。そのため、各々の被膜9、19用に使用可能な材料の選択幅が広がり、より安価な材料を使用することが可能となる。例えば、樹脂層19には、アセトン等の汎用的な溶剤でも溶かすことができる酢酸ビニル樹脂、アセチルブチルセルロース、アセチルセルロース等の樹脂が使用可能である。   According to such a method, the material for the non-conductive coating 9 does not need to take into consideration the heat resistance at the time of injection molding and the fluidity at the time of removing the coating (ease of flowing into the inner periphery), while the resin layer It is not necessary to consider the corrosion resistance at the time of electroforming and the like for the material for 19. Therefore, the selection range of materials that can be used for each of the coating films 9 and 19 is widened, and it is possible to use cheaper materials. For example, a resin such as vinyl acetate resin, acetylbutyl cellulose, or acetyl cellulose that can be dissolved in a general-purpose solvent such as acetone can be used for the resin layer 19.

また、上記実施形態では、非導電性被膜9の形状、特に成形部9aの形状を膜厚一定とした場合を例示したが、もちろんこれ以外の形状であってもよい。図6はその一例を示すもので、外周に電鋳部4を形成したマスター8の要部を拡大して示している。同図において、マスター8の表面に形成された非導電性被膜29は径差を有し、その大径部側で電鋳部4と軸方向に隣接している。かかる形状の非導電性被膜29を設けた電鋳軸をインサート部品として成形部5(軸受部材3)を成形することで、図7に示すように、成形部5の内周に、非導電性被膜29の大径側成形面29aに倣った形状の大径側内周面5cと、小径側成形面29bに倣った形状の小径側内周面5dとがそれぞれ成形される。このうち、大径側内周面5cは軸方向に隣接する電鋳部4の内周面4aとの間に段差を有する。これにより、軸部材2を軸受部材3の内周に挿入した状態では、大径側内周面5cおよび小径側内周面5dと、対向する軸部材2の外周面2aとの間に、すき間幅を軸方向で異ならせた(C3>C4)半径方向隙間27が形成される。   In the above embodiment, the case where the shape of the non-conductive film 9, particularly the shape of the molded portion 9 a is made constant, is exemplified, but of course other shapes may be used. FIG. 6 shows an example thereof, and shows an enlarged main part of the master 8 in which the electroformed part 4 is formed on the outer periphery. In the figure, the non-conductive film 29 formed on the surface of the master 8 has a diameter difference, and is adjacent to the electroformed part 4 in the axial direction on the large diameter part side. By forming the molding part 5 (bearing member 3) using the electroformed shaft provided with the non-conductive coating 29 having such a shape as an insert part, the inner periphery of the molding part 5 is non-conductive as shown in FIG. A large-diameter side inner peripheral surface 5c having a shape following the large-diameter side molding surface 29a of the coating 29 and a small-diameter side inner peripheral surface 5d having a shape following the small-diameter side molding surface 29b are respectively formed. Among these, the large-diameter side inner peripheral surface 5c has a step between the axially adjacent inner peripheral surface 4a of the electroformed part 4. Thus, in a state where the shaft member 2 is inserted into the inner periphery of the bearing member 3, there is a gap between the large-diameter side inner peripheral surface 5c and the small-diameter side inner peripheral surface 5d and the outer peripheral surface 2a of the opposing shaft member 2. A radial gap 27 having a different width in the axial direction (C3> C4) is formed.

この場合、半径方向隙間27の、すき間幅C3の領域では、比較的多くの潤滑油が保持されると共に、半径方向隙間27の、すき間幅C4の領域はシール空間として機能する。そのため、軸受内部に潤滑油を継続的に供給しなくても、電鋳部4の内周面4aで構成される軸受面、あるいは軸受すき間6に、常に潤沢な潤滑油を供給することができ、かかる軸受装置を長期に亘って安定的に使用することができる。   In this case, a relatively large amount of lubricating oil is retained in the region of the clearance gap C3 in the radial gap 27, and the region of the clearance width C4 in the radial clearance 27 functions as a seal space. Therefore, abundant lubricating oil can always be supplied to the bearing surface constituted by the inner peripheral surface 4a of the electroformed portion 4 or the bearing gap 6 without continuously supplying the lubricating oil into the bearing. Such a bearing device can be used stably over a long period of time.

図8は、マスター8の表面に形成可能な非導電性被膜9の他形態を示している。同図における非導電性被膜39はその膜厚を軸方向に漸次増大させた、いわゆるテーパ面形状をなすもので、その薄肉側(小径側)で電鋳部4と隣接している。かかる形状の非導電性被膜39を設けた電鋳軸をインサート部品として成形部5(軸受部材3)を成形することで、図9に示すように、成形部5の内周に、非導電性被膜39のテーパ状成形面39aに倣った形状のテーパ状内周面5eが成形される。テーパ状内周面5eの下端側(小径側)はは軸方向に隣接する電鋳部4の内周面4aとの間に段差を有する。これにより、軸部材2を軸受部材3の内周に挿入した状態では、テーパ状内周面5eと、対向する軸部材2の外周面2aとの間に、すき間幅C5を軸方向上方に向けて漸次拡大させた半径方向隙間37が形成される。   FIG. 8 shows another embodiment of the nonconductive film 9 that can be formed on the surface of the master 8. The non-conductive film 39 in the figure has a so-called tapered surface shape in which the film thickness is gradually increased in the axial direction, and is adjacent to the electroformed part 4 on the thin wall side (small diameter side). By forming the molded part 5 (bearing member 3) using the electroformed shaft provided with the non-conductive coating 39 having such a shape as an insert part, as shown in FIG. A tapered inner peripheral surface 5e having a shape following the tapered forming surface 39a of the coating 39 is formed. The lower end side (small diameter side) of the tapered inner peripheral surface 5e has a step between the inner peripheral surface 4a of the electroformed part 4 adjacent in the axial direction. Thus, in a state where the shaft member 2 is inserted into the inner periphery of the bearing member 3, the gap width C5 is directed upward in the axial direction between the tapered inner peripheral surface 5e and the outer peripheral surface 2a of the opposing shaft member 2. Thus, a radial gap 37 that is gradually enlarged is formed.

この場合、半径方向隙間37では、毛細管力によるシール作用が生じる。そのため、図1に示すような径一定のシール空間と比べてより高いシール機能を半径方向隙間37で発揮することができる。   In this case, in the radial gap 37, a sealing action by capillary force occurs. Therefore, a higher sealing function can be exhibited in the radial gap 37 as compared to a sealing space having a constant diameter as shown in FIG.

また、上記実施形態では、軸受部材3の軸方向両端に、半径方向隙間7、27、37が形成されるように、非導電性被膜9、29、39がマスター8表面に形成されていたが、これ以外の箇所に形成することも可能である。例えば、所定膜厚の非導電性被膜9を、軸受部材3の軸方向中央に対応する箇所に予め形成し、この状態で電鋳加工を施す。これにより、例えば図10に示すように、複数の電鋳部4間に、電鋳部4の内周面4aよりも大径の内周面5aを成形部5の成形面として形成することができる。従って、軸方向に離隔して形成される複数(この図示例では2つ)の軸受すき間6(すき間幅C1)間に、いわゆる逃げ部としての半径方向隙間7(すき間幅C2 C2>C1)が形成された軸受部材3を得ることができる。   In the above embodiment, the non-conductive coatings 9, 29, and 39 are formed on the surface of the master 8 so that the radial gaps 7, 27, and 37 are formed at both axial ends of the bearing member 3. It is also possible to form in other places. For example, a non-conductive coating 9 having a predetermined thickness is formed in advance at a location corresponding to the center in the axial direction of the bearing member 3, and electroforming is performed in this state. Thereby, for example, as shown in FIG. 10, an inner peripheral surface 5 a having a larger diameter than the inner peripheral surface 4 a of the electroformed part 4 can be formed as a molding surface of the molded part 5 between the plurality of electroformed parts 4. it can. Therefore, a radial gap 7 (gap width C2 C2> C1) as a so-called relief portion is formed between a plurality of (two in the illustrated example) bearing gaps 6 (gap width C1) spaced apart in the axial direction. The formed bearing member 3 can be obtained.

何れにしても、半径方向隙間7、27、37の位置、形状、サイズ等は、非導電性被膜9、29、39によって調整可能である。例えば、上記実施形態では、軸受部材3の軸方向両端に半径方向隙間7、27、37が形成されている場合を例示したが、軸方向一端にのみ形成されていてもよい。もちろん、上述の構成は、非導電性被膜9、29、39に代えて、図5に示す樹脂層19で成形部5の内周面(第二成形面5a)を成形する場合にも、同様に適用可能である。   In any case, the position, shape, size, etc. of the radial gaps 7, 27, 37 can be adjusted by the non-conductive coatings 9, 29, 39. For example, in the above-described embodiment, the case where the radial gaps 7, 27, and 37 are formed at both ends in the axial direction of the bearing member 3 is illustrated, but may be formed only at one end in the axial direction. Of course, the above-described configuration is the same when the inner peripheral surface (second molding surface 5a) of the molded part 5 is molded with the resin layer 19 shown in FIG. 5 instead of the non-conductive coatings 9, 29, and 39. It is applicable to.

また、以上の実施形態では、非導電性被膜9、29、39の除去を、マスター8の引抜き後に行う場合を説明したが、上記工程を逆の順序で行うことも可能である。すなわち、軸方向端部から溶剤により非導電性被膜9、29、39が溶解可能である限り、非導電性被膜9、29、39の除去をマスター8の引抜きに先んじて行うことができる。もちろん、マスター8の引抜き時、マスター8と一体に非導電性被膜9、29、39が成形部5から剥離除去されるのであればそれで構わない。もちろん、マスター8を引抜かずに、そのまま軸部材2として使用することも可能である。   In the above embodiment, the case where the nonconductive films 9, 29, 39 are removed after the master 8 is pulled out has been described. However, the above steps can be performed in the reverse order. That is, as long as the non-conductive coatings 9, 29, 39 can be dissolved by the solvent from the axial ends, the non-conductive coatings 9, 29, 39 can be removed prior to the master 8 being pulled out. Of course, as long as the non-conductive coatings 9, 29, 39 are peeled and removed from the molded part 5 integrally with the master 8 when the master 8 is pulled out, it does not matter. Of course, it is also possible to use the shaft 8 as it is without pulling out the master 8.

また、以上の実施形態では、電鋳部4と一体に形成される成形部5を樹脂の射出成形で形成した場合を例示したが、他の材質、例えば金属の型成形(モールド成形)などで成形部5を形成することも可能である。この他にも例えば金属粉末を圧粉成形(型成形)した後焼結することで形成される焼結金属で成形部5を形成することもできる。   Moreover, although the case where the molding part 5 formed integrally with the electroformed part 4 was formed by injection molding of resin was illustrated in the above embodiment, other materials, for example, metal mold molding (mold molding), etc. It is also possible to form the molded part 5. In addition to this, for example, the molded part 5 can be formed of a sintered metal formed by compacting (molding) metal powder and then sintering.

また、以上の実施形態では、軸受すき間6に形成される軸受として流体真円軸受を構成した場合を説明したが、この他にも、流体の動圧作用を生じるための動圧発生部を内周面4aに設けた構成を採用することができる。その場合、例えば図示は省略するが、軸方向に対して傾斜した複数の溝(動圧溝)をへリングボーン形状に配列した領域を形成することもできる。あるいは、同じく図示は省略するが、例えば内周面4aに複数の円弧面を形成し、これら円弧面と円弧面に対向する軸部材2の真円状外周面2aとの間の径方向すき間を周方向に向けてくさび状に縮小させた、いわゆる多円弧軸受を構成することもできる。また、これらラジアル方向の動圧発生部は、軸受部材3の内周面(内周面4a)の側に設ける他、軸部材2の外周面2aの側に設けることも可能である。   In the above embodiment, a case where a fluid perfect circle bearing is configured as a bearing formed in the bearing gap 6 has been described. However, in addition to this, a dynamic pressure generating portion for generating a fluid dynamic pressure action is included. The structure provided in the surrounding surface 4a is employable. In this case, for example, although not shown, a region in which a plurality of grooves (dynamic pressure grooves) inclined with respect to the axial direction are arranged in a herringbone shape can be formed. Alternatively, although not shown, for example, a plurality of arc surfaces are formed on the inner circumferential surface 4a, and a radial clearance between the arc surface and the perfect circular outer circumferential surface 2a of the shaft member 2 facing the arc surface is formed. A so-called multi-arc bearing reduced in a wedge shape toward the circumferential direction can also be configured. These radial dynamic pressure generating portions can be provided on the inner peripheral surface (inner peripheral surface 4 a) side of the bearing member 3 or on the outer peripheral surface 2 a side of the shaft member 2.

また、非導電性被膜9、29、39は、上述のように、マスター8の外周面8aに円周方向に連続して形成する以外にも、円周方向あるいは軸方向に断続的に形成してもよい。円周方向に不連続に形成した場合の軸受面形状として、例えば図示は省略するが、電鋳部4の内周面4aと非導電性被膜9、29、39で成形された成形部5の内周面とを円周方向に交互に配設し、これより軸受部材3の内周面に複数本の軸方向溝を形成した、いわゆるステップ軸受が挙げられる。   Further, as described above, the non-conductive coatings 9, 29, 39 are intermittently formed in the circumferential direction or the axial direction in addition to being continuously formed in the circumferential direction on the outer peripheral surface 8a of the master 8. May be. As a bearing surface shape when formed discontinuously in the circumferential direction, for example, although not shown, the inner peripheral surface 4a of the electroformed part 4 and the molded part 5 formed by the non-conductive coatings 9, 29, 39 are provided. There is a so-called step bearing in which inner circumferential surfaces are alternately arranged in the circumferential direction, and thereby a plurality of axial grooves are formed on the inner circumferential surface of the bearing member 3.

また、以上の実施形態では、いわゆるラジアル軸受部について述べたが、本発明は、スラスト軸受部(スラスト軸受面)を設けた軸受装置(軸受部材)に対しても適用が可能である。例えば、図示は省略するが、ラジアル軸受面となる電鋳部の内周面と共に、スラスト軸受面となる電鋳部の端面(軸直交端面)を共に形成した軸受部材に対しても本発明を適用することができる。   Moreover, although what was called a radial bearing part was described in the above embodiment, this invention is applicable also to the bearing apparatus (bearing member) which provided the thrust bearing part (thrust bearing surface). For example, although not shown in the drawings, the present invention is also applied to a bearing member in which both the inner peripheral surface of the electroformed part serving as a radial bearing surface and the end surface (axial orthogonal end surface) of the electroformed part serving as a thrust bearing surface are formed. Can be applied.

また、以上の実施形態では、軸受装置1の内部に充満し、軸受すき間に潤滑膜を形成する流体として、潤滑油を例示したが、これに限ることなく、例えば空気等の気体や、磁性流体等の流動性を有する潤滑剤、あるいは潤滑グリース等を使用することもできる。   In the above embodiment, the lubricating oil is exemplified as the fluid that fills the inside of the bearing device 1 and forms the lubricating film between the bearing gaps. However, the present invention is not limited to this. For example, a gas such as air or a magnetic fluid is used. It is also possible to use a lubricant having fluidity such as lubricant grease or the like.

以上説明した軸受装置は、例えば情報機器用のモータに組み込んで使用可能である。以下、軸受装置を上記モータ用の軸受に適用した構成例を、図11に基づいて説明する。なお、図1〜図10に示す実施形態と構成・作用を同一にする部位および部材については、同一の参照番号を付し、重複説明を省略する。   The bearing device described above can be used by being incorporated in a motor for information equipment, for example. Hereinafter, a configuration example in which the bearing device is applied to the motor bearing will be described with reference to FIG. In addition, about the site | part and member which make the structure and effect | action same as embodiment shown in FIGS. 1-10 the same reference number, the duplicate description is abbreviate | omitted.

図11は、軸受装置101を組み込んだモータ100の断面図を示している。このモータ100は、例えばHDD等のディスク駆動装置用のスピンドルモータとして使用されるものであって、軸部材102を回転自在に非接触支持する軸受装置101と、軸部材102に装着されたロータ(ディスクハブ)111と、例えば半径方向のギャップを介して対向させたステータコイル112およびロータマグネット113とを備えている。ステータコイル112は、ブラケット114の外周に取付けられ、ロータマグネット113はディスクハブ111の内周に取付けられている。ディスクハブ111には、磁気ディスク等のディスクDが一又は複数枚保持されている。ステータコイル112に通電すると、ステータコイル112とロータマグネット113との間の電磁力でロータマグネット113が回転し、それによって、ディスクハブ111及びディスクハブ111に保持されたディスクDが軸部材102と一体に回転する。   FIG. 11 shows a cross-sectional view of the motor 100 in which the bearing device 101 is incorporated. The motor 100 is used as a spindle motor for a disk drive device such as an HDD, for example, and includes a bearing device 101 that rotatably supports a shaft member 102 in a non-contact manner, and a rotor ( Disk hub) 111, and a stator coil 112 and a rotor magnet 113 that are opposed to each other with a gap in the radial direction, for example. The stator coil 112 is attached to the outer periphery of the bracket 114, and the rotor magnet 113 is attached to the inner periphery of the disk hub 111. The disk hub 111 holds one or more disks D such as magnetic disks. When the stator coil 112 is energized, the rotor magnet 113 is rotated by electromagnetic force between the stator coil 112 and the rotor magnet 113, whereby the disk hub 111 and the disk D held by the disk hub 111 are integrated with the shaft member 102. Rotate to.

この実施形態において、軸受装置101は、軸受部材103と、軸受部材103の内周に挿入される軸部材102とを備えている。軸受部材103は、一端を開口した有底筒状の電鋳部104と、電鋳部104と一体に形成される成形部105とからなる。電鋳部104の内周面104aより大径でかつ内周面104aとの間に段差を有する成形部105の内周面105aは、対向する軸部材102の外周面102aとの間に、シール空間となる半径方向隙間107を形成する。この場合、内周面105aは、上記実施形態と同様に、マスター8の表面に形成された非導電性被膜9の成形面9a1に倣って成形される。   In this embodiment, the bearing device 101 includes a bearing member 103 and a shaft member 102 that is inserted into the inner periphery of the bearing member 103. The bearing member 103 includes a bottomed cylindrical electroformed portion 104 having an open end, and a molded portion 105 formed integrally with the electroformed portion 104. The inner peripheral surface 105a of the molding portion 105 having a larger diameter than the inner peripheral surface 104a of the electroformed portion 104 and having a step between the inner peripheral surface 104a and the outer peripheral surface 102a of the opposed shaft member 102 is sealed. A radial gap 107 serving as a space is formed. In this case, the inner peripheral surface 105a is molded following the molding surface 9a1 of the non-conductive coating 9 formed on the surface of the master 8, as in the above embodiment.

上記構成の軸受装置101において、軸部材102の回転時、軸部材102の外周面102aと軸受部材103の軸受面(内周面104a)との間のラジアル軸受すき間106には潤滑油の油膜が形成され、これにより、軸部材102をラジアル方向に回転自在に支持するラジアル軸受部Rが形成される。同時に、軸部材102の下端面102bと、これに対向する電鋳部104の内底面104bとの間に、軸部材102をスラスト方向に回転自在に支持するスラスト軸受部Tが形成される。   In the bearing device 101 configured as described above, when the shaft member 102 rotates, an oil film of lubricating oil is formed in the radial bearing gap 106 between the outer peripheral surface 102a of the shaft member 102 and the bearing surface (inner peripheral surface 104a) of the bearing member 103. Thus, a radial bearing portion R that supports the shaft member 102 rotatably in the radial direction is formed. At the same time, a thrust bearing portion T that supports the shaft member 102 rotatably in the thrust direction is formed between the lower end surface 102b of the shaft member 102 and the inner bottom surface 104b of the electroformed portion 104 opposed thereto.

なお、図11では、スラスト軸受部Tをいわゆるピボット軸受で構成した場合を例示しているが、本発明は、動圧溝等の動圧発生手段で軸部材102をスラスト方向に非接触支持する動圧軸受にも適用可能である。   FIG. 11 illustrates the case where the thrust bearing portion T is constituted by a so-called pivot bearing. However, in the present invention, the shaft member 102 is supported in a non-contact manner in the thrust direction by dynamic pressure generating means such as a dynamic pressure groove. It can be applied to a hydrodynamic bearing.

本発明の軸受装置は、以上の例示に限らず、モータの回転軸支持用として広く適用可能である。上記の通り、本発明によれば、軸受部材の内周面に高い形状自由度により、シール機能をはじめ優れた軸受性能を軸受装置に付与することができるので、上記HDD等の磁気ディスク駆動用のスピンドルモータをはじめとして、高回転精度が要求される情報機器用の小型モータ、例えば光ディスクの光磁気ディスク駆動用のスピンドルモータ、あるいはレーザビームプリンタのポリゴンスキャナモータ等における回転軸支持用としても好適に使用することができる。   The bearing device of the present invention is not limited to the above examples, and can be widely applied to support a rotating shaft of a motor. As described above, according to the present invention, the bearing device can be provided with excellent bearing performance including a sealing function due to a high degree of freedom in shape on the inner peripheral surface of the bearing member. It is also suitable for rotating shaft support in small motors for information equipment that require high rotational accuracy, such as spindle motors for driving magneto-optical disks for optical disks, polygon scanner motors for laser beam printers, etc. Can be used for

本発明の一実施形態に係る軸受装置の断面図である。It is sectional drawing of the bearing apparatus which concerns on one Embodiment of this invention. 非導電性被膜を形成したマスターの斜視図である。It is a perspective view of the master which formed the nonelectroconductive film. 電鋳軸の斜視図である。It is a perspective view of an electroformed shaft. 軸受部材の型成形工程を概念的に示す図である。It is a figure which shows notionally the molding process of a bearing member. 樹脂被膜を形成した電鋳軸の斜視図である。It is a perspective view of the electroformed shaft in which the resin film was formed. 電鋳軸の他形態を示す要部拡大図である。It is a principal part enlarged view which shows the other form of an electroformed shaft. 他形態に係る軸受装置の要部拡大図である。It is a principal part enlarged view of the bearing apparatus which concerns on another form. 電鋳軸の他形態を示す要部拡大図である。It is a principal part enlarged view which shows the other form of an electroformed shaft. 他形態に係る軸受装置の要部拡大図である。It is a principal part enlarged view of the bearing apparatus which concerns on another form. 他形態に係る軸受装置の断面図である。It is sectional drawing of the bearing apparatus which concerns on another form. 軸受装置を備えたモータの一形態を示す断面図である。It is sectional drawing which shows one form of the motor provided with the bearing apparatus.

符号の説明Explanation of symbols

1 軸受装置
2 軸部材
3 軸受部材
4 電鋳部
5 成形部
6 軸受すき間
7 半径方向隙間
8 マスター
9 非導電性被膜
15 キャビティ
19 樹脂層
27、37 半径方向隙間
29、39 非導電性被膜
100 モータ
101 軸受装置
102 軸部材
103 軸受部材
107 半径方向隙間C1、C2、C3、C4、C5 径方向すき間幅
R ラジアル軸受部
T スラスト軸受部
DESCRIPTION OF SYMBOLS 1 Bearing apparatus 2 Shaft member 3 Bearing member 4 Electroformed part 5 Molding part 6 Bearing clearance 7 Radial clearance 8 Master 9 Non-conductive coating 15 Cavity 19 Resin layers 27 and 37 Radial clearance 29 and 39 Non-conductive coating 100 Motor DESCRIPTION OF SYMBOLS 101 Bearing apparatus 102 Shaft member 103 Bearing member 107 Radial direction clearance C1, C2, C3, C4, C5 Radial clearance width R Radial bearing part T Thrust bearing part

Claims (7)

マスター表面に目的とする金属を電解析出してなる電鋳部と、電鋳部と一体に形成された成形部とを備え、電鋳部の内周面に、軸部材を支持する軸受面が形成された軸受部材であって、
内周面が、成形部の内周面と、マスター表面から剥離させた電鋳部の内周面とで形成され、かつ成形部の内周面が、電鋳部の内周面に対して段差を持ち、マスター表面に形成した被膜で成形された成形面であることを特徴とする軸受部材。
An electroformed part formed by electrolytically depositing a target metal on the master surface, and a molded part formed integrally with the electroformed part, and a bearing surface for supporting the shaft member is provided on the inner peripheral surface of the electroformed part. A formed bearing member,
The inner peripheral surface is formed by the inner peripheral surface of the molded part and the inner peripheral surface of the electroformed part peeled from the master surface , and the inner peripheral surface of the molded part is Chi lifting the step bearing member which is a forming surface which is molded by the film formed on the surface of the master.
成形部の内周面は、成形部の成形後に被膜を溶解することで軸受部材の内周に露出させた成形面である請求項1記載の軸受部材。 The bearing member according to claim 1 , wherein the inner peripheral surface of the molded part is a molded surface exposed to the inner periphery of the bearing member by dissolving the coating after the molding of the molded part . 請求項1又は2に記載の軸受部材と、軸受部材の内周に挿入した軸部材とを備え、成形部の内周面と軸部材の外周面との間に半径方向の隙間を形成した軸受装置。   A bearing comprising the bearing member according to claim 1 and a shaft member inserted in the inner periphery of the bearing member, wherein a radial gap is formed between the inner peripheral surface of the molded part and the outer peripheral surface of the shaft member. apparatus. 前記半径方向の隙間でシール空間を形成した請求項3記載の軸受装置。   The bearing device according to claim 3, wherein a seal space is formed by the gap in the radial direction. 前記半径方向の隙間で逃げ部を形成した請求項3記載の軸受装置。   The bearing device according to claim 3, wherein a relief portion is formed by the gap in the radial direction. マスター表面に目的とする金属を電解析出してなる電鋳部と、電鋳部と一体に形成された成形部とを備え、電鋳部の内周面に軸受面を有する軸受部材を製造するに際し、
表面の一部に非導電性被膜を形成したマスターを用いて電鋳加工を行い、次いでマスター表面に形成された電鋳部および非導電性被膜をインサートした状態で射出成形を行って、非導電性被膜で成形部の内周面を成形した後、非導電性被膜の除去を行うことを特徴とする軸受部材の製造方法。
Producing a bearing member having an electroformed portion formed by electrolytically depositing a target metal on the master surface and a molded portion formed integrally with the electroformed portion, and having a bearing surface on the inner peripheral surface of the electroformed portion. On the occasion
Perform electroforming using the master forming a non-conductive coating on a portion of the surface, then the line I injection molding while inserting the electroformed portion and nonconductive film formed on the surface of the master, the non A method for manufacturing a bearing member , comprising: forming an inner peripheral surface of a molded portion with a conductive film, and then removing the nonconductive film.
電鋳部に軸受面を有する軸受部材を製造するに際し、
表面の一部に非導電性被膜を形成したマスターを用いて電鋳加工を行った後、非導電性被膜を除去すると共に、除去領域の一部又は全体に樹脂層を形成し、次いでマスター表面の電鋳部および樹脂層をインサートした状態で射出成形を行った後、樹脂層の除去を行うことを特徴とする軸受部材の製造方法。
When manufacturing a bearing member having a bearing surface in the electroformed part,
After electroforming using a master having a non-conductive coating formed on a part of the surface, the non-conductive coating is removed and a resin layer is formed on a part or the whole of the removal region, and then the master surface A method for producing a bearing member, comprising performing injection molding in a state where the electroformed part and the resin layer are inserted, and then removing the resin layer.
JP2005333292A 2005-09-20 2005-11-17 Bearing member and manufacturing method thereof Expired - Fee Related JP4948825B2 (en)

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PCT/JP2006/317508 WO2007034671A1 (en) 2005-09-20 2006-09-05 Bearing member and production method thereof, and bearing device provided with bearing member and production method thereof
US12/066,463 US8419281B2 (en) 2005-09-20 2006-09-05 Bearing member and method for manufacturing the same, and bearing unit having bearing member and method for manufacturing the same
CN201210370122.0A CN102878214B (en) 2005-09-20 2006-09-05 Bearing member, motor and method for manufacturing bearing member
CN2006800339724A CN101263310B (en) 2005-09-20 2006-09-05 Bearing component, manufacturing method thereof, and bearing device including bearing component
KR1020087006757A KR20080050585A (en) 2005-09-20 2006-09-05 Bearing member, its manufacturing method, and bearing apparatus provided with bearing member, and its manufacturing method

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