JP4962043B2 - Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus - Google Patents

Description

  The present invention relates to an electro-optical device, a method for manufacturing the electro-optical device, and an electronic apparatus, and more particularly, to a configuration and a manufacturing method used in the manufacturing process of the electro-optical device.

  In general, an electro-optical device such as a liquid crystal display has an electro-optical panel in which an electro-optical material such as liquid crystal is sandwiched between a pair of panel substrates made of glass or the like, and a plurality of electric fields can be applied independently. An electrode structure for arranging the pixels is provided, and an electric field applied to the electro-optic material is controlled for each pixel, so that a desired image can be displayed.

In recent years, an electro-optical device has been developed in which a function-added plate-like body for adding another function is arranged on the viewing side of the electro-optical panel. For example, by using a viewing-angle barrier layer as a function-added plate-like body, a device capable of displaying a three-dimensional image or configuring a different image to be visible from two different orientations has been manufactured ( For example, see Patent Documents 1 and 2 below).
Japanese Patent Laid-Open No. 2005-10738 JP 2005-266438 A

  By the way, when the electro-optical panel and the function-added plate-like body (viewing angle barrier layer) are overlaid, an alignment step is required to place both in a planar state. For reasons of the electro-optic panel manufacturing process, the alignment mark formed on the inner surfaces of the pair of panel substrates constituting the electro-optic panel and the alignment mark formed on the function-added plate-like body are photographed with an imaging device or the like. Then, the positional relationship between the alignment marks is derived by image processing to align the electro-optic panel and the function-added plate-like body.

  However, the pair of alignment marks are separated in the focal direction of the imaging device by the thickness of the panel substrate on the viewing side of the electro-optic panel. This makes it impossible to accurately recognize the other alignment mark. For this reason, in practice, alignment must be performed by focusing the imaging device at an intermediate depth between the pair of alignment marks, and as a result, the focusing of the imaging device does not match any alignment mark. There is a problem that it is difficult to sufficiently increase the alignment accuracy.

  Further, there are cases where alignment is performed by focusing on both alignment marks by moving the camera axis used for alignment up and down. However, even in this case, an error occurs due to the axial accuracy of the camera axis, so that there is a problem that the alignment accuracy cannot be sufficiently increased. Further, since it is necessary to move the camera axis, there is a problem that it takes time for alignment, the cycle time increases, and the productivity decreases.

  Therefore, the present invention solves the above problems, and an object of the present invention is to provide a configuration capable of increasing the alignment accuracy in the alignment process between the electro-optical panel and the function-added plate-like body. More generally, in an electro-optical device having at least a first substrate, a second substrate, and a third substrate, the alignment between the first substrate and the second substrate and the alignment between the second substrate and the third substrate are both highly accurate. It is in providing the structure which can be performed.

In view of such circumstances, at least the first substrate, the second substrate, and the third substrate are sequentially stacked on the electro-optical device of the present invention, and the second substrate and the first substrate are on the mutually opposing surfaces. A first alignment mark and a second alignment mark are respectively formed at the corresponding planar positions, and the third alignment mark and the fourth alignment are respectively disposed at the corresponding planar positions on the mutually opposing surfaces of the third substrate and the second substrate. In the electro-optical device in which the mark is formed, the first alignment mark and the second alignment mark are visually recognized in at least the second polarization state among the first polarization state and the second polarization state having different polarization states. The third alignment mark and the fourth alignment mark are made of a material that is visible in the first polarization state. Made is, moreover, characterized in that it is configured in a invisible material in the second polarization state.
Further, the electro-optical device according to the present invention as described above is provided in a region where the first alignment mark and the second alignment mark, and the third alignment mark and the fourth alignment mark do not overlap each other in a plane. It is characterized by being.
In the electro-optical device according to the invention described above, the fourth alignment mark is formed in a region overlapping the first alignment mark in a plane.
In the electro-optical device according to the invention described above, one of the first polarization state and the second polarization state is natural light, and the other polarization state is linear polarization.
In the electro-optical device according to the present invention as described above, an electro-optical material is arranged between the second substrate and the third substrate to form an electro-optical panel, and the first substrate is a function-added plate. It is a state.

  According to this invention, the first alignment mark is formed on one surface of the electro-optical panel facing the function-added plate-like body, and the second alignment mark is formed on the surface of the function-added plate-like body facing the one surface. As a result, the alignment marks are not separated from each other via the panel substrate, so that defocusing with respect to the alignment marks is reduced. As a result, the electro-optical panel and the function-added plate-like body can be aligned with high accuracy. Is possible.

  Here, when each alignment mark is optically detected by an imaging device or the like, the electro-optical panel and the electro-optical panel are disposed in a planar range of at least a part of the overlapping portion of the electro-optical panel and the function-added plate-like body. A see-through area in which at least one of the function-added plate-like bodies is see-through (transparent) is provided, and each of the alignment marks is formed in the see-through area. On the other hand, when at least one of the electro-optical panel and the function-added plate-like body is configured to be transparent (transparent), the formation position of each alignment mark is not particularly limited.

  In the present invention, the electro-optical panel includes an electro-optical material disposed between a pair of panel substrates, and a third alignment mark is formed on the inner surface of the panel substrate on the function-added plate-like body side of the pair of panel substrates. It is preferable that a fourth alignment mark is formed at a position corresponding to the third alignment mark on the inner surface of the panel substrate opposite to the function-added plate-like body. According to this, since the third alignment mark and the fourth alignment mark are respectively formed on the opposing surfaces of the pair of panel substrates, they are arranged close to each other. Since the positioning can be performed with high accuracy, the substantial alignment accuracy between the electro-optical panel and the function-added plate-like body can be further increased. In this case, since the other internal structure is formed on the inner surfaces of the pair of panel substrates of the electro-optic panel, the third and fourth alignment marks are formed of the same material simultaneously with the other internal structure. This can prevent an increase in the number of manufacturing steps.

  In the present invention, it is preferable that the first alignment mark and the second alignment mark and the third alignment mark and the fourth alignment mark are provided in a region where they do not overlap with each other in a plane. According to this, when the alignment between the electro-optical panel and the function-added plate-like body is performed, the first alignment mark and the second alignment mark are substantially used by being formed in a region that does not overlap in plan. The alignment work and the alignment work using the third alignment mark and the fourth alignment mark are less likely to interfere with other alignment marks, so that the electro-optic panel and the function-added plate-like body can be accurately and reliably Can be positioned.

  In the present invention, the first alignment mark and the second alignment mark are made of a material that can be visually recognized at least in the second polarization state among the first polarization state and the second polarization state, which have different polarization states. The third alignment mark and the fourth alignment mark are made of a material that is visible in the first polarization state, and are made of a material that is invisible in the second polarization state, or the first alignment mark It is preferably formed in a region overlapping with the alignment mark in a plan view. According to this, since the alignment of the pair of panel substrates of the electro-optical panel is optically performed in the first polarization state using the third alignment mark and the fourth alignment mark, both alignment marks are visible. Alignment can be performed without hindrance. On the other hand, after the electro-optical panel is already formed, when the alignment between the electro-optical panel and the function-added plate is optically performed in the second polarization state using the first alignment mark and the second alignment mark, The third alignment mark and the fourth alignment mark become invisible, or are covered with the first alignment mark and do not interfere with the alignment, so the third alignment mark and the fourth alignment mark interfere with the alignment. Can be prevented.

  Here, the first polarization state and the second polarization state may be any combination as long as the polarization states are different from each other. For example, one of the polarization states is natural light (the vibration plane is equalized in all directions). In the state where the other has only linearly polarized light parallel to the X axis, the other has only linearly polarized light parallel to the X axis and the other is linearly polarized light parallel to the Y axis. In this case, one may have only clockwise circularly polarized light and the other may have only counterclockwise circularly polarized light.

  According to another electro-optical device of the present invention, in the electro-optical device in which at least a first substrate, a second substrate, and a third substrate are sequentially stacked, the second substrate and the first substrate face each other. A first alignment mark and a second alignment mark are respectively formed at corresponding planar positions on the surface to be processed, and a third alignment mark is respectively formed at the corresponding planar positions on the mutually opposing surfaces of the second substrate and the thirty-second substrate. A fourth alignment mark is formed.

  According to the present invention, in the overlapping structure of the first substrate, the second substrate, and the third substrate, the first and second alignment marks are formed on the surfaces facing each other by the first alignment mark and the second alignment mark. Is positioned, and the second and third substrates are positioned by the third alignment mark and the fourth alignment mark formed on the surfaces facing each other, so that the thickness direction between the corresponding alignment marks is determined at each positioning. Since the distance is close, the alignment accuracy can be increased. In this case, the number of substrates may be four or more. In any case, the present invention has a configuration in which alignment marks are formed on the front and back of one substrate having both sides sandwiched between other substrates.

  In the present invention, it is preferable that the first alignment mark and the second alignment mark and the third alignment mark and the fourth alignment mark are provided in a region where they do not overlap with each other in a plane.

  In the present invention, the first alignment mark and the second alignment mark are made of a material that can be visually recognized at least in the second polarization state among the first polarization state and the second polarization state, which have different polarization states. The third alignment mark and the fourth alignment mark are made of a material that is visible in the first polarization state, and are made of a material that is invisible in the second polarization state, or the second alignment mark. It is preferable that the first alignment mark provided on the substrate is formed in a region overlapping with the plane.

  Next, an electro-optical device manufacturing method according to the present invention includes: an electro-optical panel; and an electro-optical device manufacturing method including a function-added plate-like body disposed on one surface of the electro-optical panel. A first alignment mark formed on the one surface of the electro-optic panel, and a second alignment mark formed on a surface facing the one surface of the function-added plate-like body at a position corresponding to the first alignment mark; , And a step of positioning the electro-optical panel and the function-added plate-like body using the first alignment mark and the second alignment mark. .

In view of such circumstances, the method of manufacturing the electro-optical device according to the present invention is different from each other in the polarization state of the electro-optical device manufacturing method in which at least the first substrate, the second substrate, and the third substrate are sequentially stacked. Of the first polarization state and the second polarization state, a first alignment mark is formed on a surface of the second substrate facing the first substrate with a material that is visible in at least the second polarization state, and the first Forming a second alignment mark with a material that is visible in the second polarization state on a surface of the substrate facing the second substrate and corresponding to the first alignment mark; and And a fourth alignment mark and a third alignment marker made of a material that is visible in the first polarization state and invisible in the second polarization state, respectively, on the mutually opposing surfaces of the third substrate. Forming the first substrate, positioning the second substrate and the first substrate using the first alignment mark and the second alignment mark in the second polarization state, and the first polarization state Preferably, the method includes the step of positioning the second substrate and the third substrate using the fourth alignment mark and the third alignment mark .
In the electro-optical device manufacturing method according to the present invention described above, one of the first polarization state and the second polarization state is natural light, and the other polarization state is linear polarization. And

  In the present invention, the first alignment mark and the second alignment mark are made of a material that can be visually recognized at least in the second polarization state among the first polarization state and the second polarization state, which have different polarization states. The third alignment mark and the fourth alignment mark are made of a material that is visible in the first polarization state, and are made of a material that is invisible in the second polarization state, or the first alignment mark An alignment mark is formed in a region overlapping with the alignment mark, and the pair of panel substrates is positioned using the third alignment mark and the fourth alignment mark in the first polarization state, and then in the second polarization state. The first alignment mark and the second alignment mark are used for positioning the electro-optical panel and the function-added plate-like body. It is preferable to perform.

  Next, an electronic apparatus according to an aspect of the invention includes the electro-optical device described above. Examples of this type of electronic apparatus include a personal computer, a television receiver, an electronic timepiece, a mobile phone, and a vehicle-mounted display device that include the electro-optical device as a display device.

[First Embodiment]
Next, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a schematic longitudinal sectional view schematically showing the overall configuration of the electro-optical device according to the first embodiment of the invention. The electro-optical device (liquid crystal device in the illustrated example) is a pair of transparent panel substrates 11 (corresponding to the third substrate) and 12 (corresponding to the second substrate) made of glass, plastic, or the like. Is bonded with a sealing material 13 so as to have a predetermined interval (generally about 5 to 10 μm), and an electro-optical panel (liquid crystal panel) in which an electro-optical material (liquid crystal) 14 is sealed between the panel substrates 11 and 12. ) 10 and a function-added plate-like body (corresponding to the first substrate) 20 disposed on one surface (the upper surface in the drawing) of the electro-optical panel 10. The electro-optical panel 10 is provided with polarizing plates 15 and 16 on both front and back sides as necessary. Moreover, it is preferable that the electro-optical panel 10 and the function-added plate-like body 20 are adhered by a transparent adhesive 20X.

  In the present embodiment, the driving region set in the plane region where the electro-optical material 14 of the electro-optical panel 10 is disposed (for example, when the electro-optical panel 10 is a liquid crystal display, the liquid crystal Display area 10X of the display body is provided. In the drive region 10X, a plurality of pixels which are arranged on the inner surfaces of the panel substrates 11 and 12 and which are not shown are arranged so as to face each other and which can be controlled independently from other portions. These pixels are configured so that an electric field can be applied independently to the electro-optic material by the electrodes, and as a result, the drive region 10X can form a light transmission distribution in a desired distribution mode according to a plurality of pixel arrays. It is comprised so that it may become.

  In the present embodiment, the first alignment mark 10A is formed on the one surface of the electro-optical panel 10, and the first alignment mark is formed on the surface of the function-added plate-like body 20 facing the electro-optical panel 10. A second alignment mark 20A is formed at a position corresponding to 10A. The first alignment mark 10 </ b> A and the second alignment mark 20 </ b> A are configured to face each other directly before bonding with the adhesive 20 </ b> X.

  The first alignment mark 10 </ b> A and the second alignment mark 20 </ b> A are formed in regions that can be seen through from either the front or back of the electro-optical panel 10 or the function-added plate-like body 20 (upper or lower in the illustrated example), respectively. . Further, the transparent region is formed of a material that can be identified through the panel substrates 11 and 12 and the function-added plate-like body 20, such as a metal thin film or a resin film.

  In the electro-optical panel 10, the third alignment mark 10 </ b> B is formed on the inner surface (the surface facing the panel substrate 12) of the panel substrate 11, and on the inner surface (the surface facing the panel substrate 11) of the panel substrate 12. A fourth alignment mark 10C is formed at a position corresponding to the third alignment mark 10B. The third alignment mark 10B and the fourth alignment mark 10C are configured to be directly opposed to each other before the panel substrates 11 and 12 are bonded together by the sealing material 13.

  The third alignment mark 10B and the fourth alignment mark 10C can be formed of the same material as the first alignment mark 10A and the second alignment mark 20A. However, if there is no problem in alignment, the first alignment mark and the second alignment mark may be formed of a different material as in a third embodiment described later.

  A method for manufacturing the electro-optical device according to the present embodiment described above will be described below. First, the electrodes and other predetermined internal structures are formed on the inner surfaces of the panel substrates 11 and 12. At this time, the third alignment mark 10B and the fourth alignment mark 10C are formed on the inner surfaces of the panel substrates 11 and 12, respectively. Here, in order to reduce the number of manufacturing steps and reduce the manufacturing cost, it is preferable that the third alignment mark 10B is formed of the same material in the same step as at least a part of the internal structure of the panel substrate 11. The fourth alignment mark 10 </ b> C is preferably formed of the same material in the same process as at least a part of the internal structure of the panel substrate 12.

  Next, the panel substrates 11 and 12 are bonded to each other through the sealing material 13. At this time, since the internal structure on the panel substrate 11 and the internal structure on the panel substrate 12 must be positioned with high accuracy, the third alignment mark 10B and the fourth alignment mark 10C are used. Thus, for example, the positions of both alignment marks are photographed from the panel substrate 12 side using an imaging device 30X such as a CCD camera, and positioned so that both alignment marks are in a normal plane positional relationship. Instead of the imaging device 30X, an imaging device 30Y indicated by a dotted line may be used to photograph the positions of both alignment marks from the panel substrate 11 side.

  Thereafter, the polarizing plates 15 and 16 are stuck on the outer surfaces of the panel substrates 11 and 12 to complete the electro-optical panel 10.

  In the electro-optical panel 10, it is necessary to form the first alignment mark 10A on the outer surface of the panel substrate 12 as described above. The first alignment mark 10 </ b> A may be formed by providing a dedicated process separately from the above processes, or the first alignment mark 10 </ b> A may be polarized at the same time in the process of attaching the polarizing plate 16 on the outer surface of the panel substrate 12. It is also possible to form with the same material at the same time as other processes, for example, with the same material as the plate 16.

  On the other hand, a second alignment mark 20 </ b> A is formed on the function-added plate-like body 20 on the surface (the lower surface in the drawing) facing the electro-optical panel 10. Similarly to the first alignment mark 10A, the second alignment mark 20A may be formed by providing a dedicated process separately from other manufacturing processes of the function-added plate-like body 20, or other manufacturing processes. At the same time, it may be formed of the same material.

  Next, the function-added plate-like body 20 is arranged on the electro-optical panel 10 completed as described above, and the first alignment mark 10A and the second alignment mark 20A are arranged to face each other, and the same as described above. Then, the image is picked up by the image pickup device 30X and aligned.

  FIG. 2 is an enlarged explanatory view showing a planar shape of the first alignment mark 10A and the second alignment mark 20A and an overlapping state at the time of alignment. In the illustrated example, the first alignment mark 10A has a circular shape, and the second alignment mark 20A has a ring shape. In the present embodiment, both alignment marks are photographed by the imaging device 30X, and the center point 10g of the first alignment mark 10A and the center point 20g of the second alignment mark 20A are calculated by image processing, respectively. The electro-optical panel 10 and the function-added plate-like body 20 are positioned so that 20g matches.

  Note that the third alignment mark 10B and the fourth alignment mark 10C are also configured in the same manner as described above so that the reference numerals are given in parentheses in FIG. 2, and using these, the panel substrates 11 and 12 are configured in the same manner as described above. Positioning is performed.

  In the present embodiment, as described above, the first alignment mark 10A is formed on one surface of the electro-optical panel 10, and the second alignment mark 20A is a surface facing the electro-optical panel 10 of the function-added plate-like body 20. Since the first alignment mark 10A and the second alignment mark 20A are directly opposed to each other when the electro-optical panel 10 and the function-added plate-like body 20 are positioned, the alignment marks are Since they are close to each other and the defocus of the captured image is reduced, the alignment accuracy can be increased.

  The above points are also valid for the third alignment mark 10B and the fourth alignment mark 10C, and the alignment accuracy of the panel substrates 11 and 12 can be improved. As a result, since the accuracy of the internal structure of the electro-optical panel 10 is increased, the substantial positioning accuracy of the electro-optical panel 10 and the function-added plate-like body 20 is also improved.

  In the manufacturing method of the above embodiment, the electro-optical panel 10 including the pair of panel substrates 11 and 12 is configured first, and then the electro-optical panel 10 and the function-added plate-like body 20 are positioned, and the adhesive For example, after the function-added plate-like body 20 is positioned on the panel substrate 12 and bonded and fixed, the panel substrate 11 is bonded to the electro-optical panel 10 via the sealing material 13. You may make it comprise.

  Further, in the illustrated example, each of the alignment marks described above is arranged outside the drive region 10X, and particularly formed outside the seal material 13, so that it can be visually recognized without affecting the structure in the drive region 10X. There is an effect that it can be formed well. However, the present invention is not limited to the case where each alignment mark is configured at the above position, and can be formed at any position as long as it does not interfere with other structures. These points are the same in other embodiments described below.

[Second Embodiment]
Next, a second embodiment according to the present invention will be described with reference to FIG. In this embodiment, parts corresponding to those in the first embodiment are denoted by the same reference numerals, and description of similar parts is omitted.

  In the present embodiment, the planar region P in which the first alignment mark 10A and the second alignment mark 20A are formed and the planar region Q in which the third alignment mark 10B and the fourth alignment mark 10C are formed are planar with each other. Arranged in non-overlapping areas. In the case of the illustrated example, specifically, both the planar areas P and Q are arranged outside the driving area 10A. More specifically, the plane areas P and Q are set on both sides of the drive area 10X.

  Accordingly, for example, when the function-added plate-like body 20 is positioned on the electro-optical panel 10 after the electro-optical panel 10 is formed by the same procedure as the manufacturing method described in the first embodiment, the first alignment is performed. When aligning the mark 10A and the second alignment mark 20A, it is possible to prevent a situation in which the third alignment mark 10B and the fourth alignment mark 10C overlap the visual fields of the imaging devices 30X and 30Y and cause alignment failure.

  In addition, as an aspect provided in the area | region where plane area | region P and Q do not overlap planarly, it is preferable that it is an aspect which other alignment marks do not interfere at the time of alignment, but it is alignment especially by a camera image etc. It is desirable that they are separated so that other areas do not fall within the imaging range in which the image processing is performed. Specifically, when all the alignment marks are properly aligned, the outermost edge of the alignment marks in each planar area What is necessary is just to space apart so that it may become the space | interval more than the maximum diameter of an alignment mark.

[Third Embodiment]
Next, a third embodiment according to the present invention will be described with reference to FIG. Also in this embodiment, parts corresponding to those in the first embodiment are denoted by the same reference numerals, and description of similar parts is omitted.

  Although the present embodiment is basically configured in the same manner as the first embodiment, the first alignment mark 10A and the second alignment mark 20A have a first polarization state and a second polarization state that are different in polarization state from each other. The third alignment mark 10B is configured to be visible in the first polarization state and invisible in the second polarization state. Further, the third alignment mark 10B is configured to be invisible in the second polarization state. 4 The alignment mark 10C is made of a material that can be visually recognized in the first polarization state, and is limited to a region that overlaps the first alignment mark 10A in plan view. Different.

  The third alignment mark 10B is, for example, visible with predetermined linearly polarized light as the first polarization state (linear polarization with the polarization axis orthogonal to the drawing sheet as an example) as the first polarization state, and as the second polarization state. Consists of materials that cannot be seen with natural light. Such a material is, for example, a material that gives a phase difference to polarized light having vibration planes in different directions, in other words, a substance having an optical rotation (such as a chiral nematic liquid crystal layer having an optical rotation of 90 degrees). ) Other materials having birefringence and having a predetermined retardation Δn · d (Δn is refractive index anisotropy and d is thickness) (for example, liquid crystal polymer) can be used.

  In the present embodiment, in the alignment process for positioning the panel substrates 11 and 12 constituting the electro-optical panel 10, the panel substrates 11 and 12 are arranged between the light source 30Z that emits natural light and the imaging device 30X, and the light source 30Z. Each part is set so that natural light emitted from the camera passes through the region where each alignment mark is formed and is imaged by the imaging device 30X.

  When the polarizing plates 31 and 32 are arranged before and after the electro-optical device on the optical path, the third alignment mark 10B is photographed only with the linearly polarized light that passes through the polarizing plate 31 and also through the polarizing plate 32. . In this case, the polarizing plates 31 and 32 are configured to realize the first polarization state (for example, as an example, the polarizing plates 31 and 32 are installed in a posture having a transmission axis orthogonal to the drawing sheet. ), The third alignment mark 10B is photographed without hindrance.

  That is, of the natural light emitted from the light source 30Z, only the linearly polarized light having a polarization axis orthogonal to the drawing sheet is transmitted by the polarizing plate 31, and the linearly polarized light passes through the third alignment mark 10B, for example, 90 The light passing through a material having no refractive index anisotropy (isotropic material) such as another glass substrate travels on the polarization axis as it is, and eventually reaches the polarizing plate 32. The polarizing plate 32 does not pass the linearly polarized light whose polarization axis is rotated by 90 degrees by passing through the third alignment mark 10B, but passes the other original linearly polarized light, so the third alignment mark 10B is displayed in black. The Further, since the fourth alignment mark 10C is made of a material that can be visually recognized in the first polarization state, it is displayed as it is.

  On the other hand, as shown in FIG. 4, in the alignment step of positioning the electro-optical panel 10 and the function-added plate-like body 20, the polarizing plates 31 and 32 are not arranged on the optical path, and natural light that is in the second polarization state is used as it is. When the image is taken, the third alignment mark 10B becomes invisible and will not appear in the image taken by the imaging device 30X. That is, the polarization axis of the light that has passed through the third alignment mark 10B is rotated by 90 degrees, but the light that is captured by the imaging device 30X is natural light, and thus the light that has passed through the third alignment mark 10B is not. The intensity difference from the light is substantially eliminated (if the light absorption rate of the third alignment mark 10B is sufficiently low). Further, since the fourth alignment mark 10C is limited to be formed in a region overlapping with the first alignment mark 10A, in this photographing state, the fourth alignment mark 10C is covered with the first alignment mark 10A and cannot be seen. Hereinafter, the above configuration is simply referred to as a “first configuration”.

  On the other hand, contrary to the above, the third alignment mark 10B can be visually recognized with natural light as the first polarization state, and predetermined linearly polarized light as the second polarization state (for example, the polarization axis is orthogonal to the drawing sheet). It is also possible to use a material that cannot be visually recognized in a linearly polarized light direction. Such a material transmits, for example, the same material as a normal polarizing plate having a transmission axis in a predetermined direction, that is, linearly polarized light having a polarization axis in a predetermined direction, but a polarization axis in a direction orthogonal to the predetermined direction. It can be composed of a material that blocks (absorbs) linearly polarized light having

  In the present embodiment, in the step of aligning the pair of panel substrates 11 and 12, an electro-optical device is disposed between the light source 30Z that emits natural light and the imaging device 30X, and the natural light emitted from the light source 30Z is aligned with each alignment. Each unit is set so as to pass through the area where the mark is formed and be imaged by the imaging device 30X. When the image is taken with natural light as it is, the third alignment mark 10B appears on the image because the transmittance is low by blocking linearly polarized light having a polarization axis in a direction orthogonal to the predetermined direction. The fourth alignment mark 10C is also visible on the image because it is visually recognized in the first polarization state.

  On the other hand, when the polarizing plates 31 and 32 are disposed before and after the electro-optical device on the optical path, the third alignment mark 10B is photographed only with the linearly polarized light that passes through the polarizing plate 31 and also through the polarizing plate 32. . In this case, if the transmission axes of the polarizing plates 31 and 32 are set to coincide with the transmission axis of the third alignment mark 10B, the polarized light passing through the polarizing plates 31 and 32 has the third alignment mark 10B. Since the third alignment mark 10B passes, the third alignment mark 10B becomes invisible and is not reflected in the captured image of the imaging device 30X. In this case, the fourth alignment mark 10C is covered with the first alignment mark 10A as in the first configuration. Hereinafter, the above configuration is simply referred to as “second configuration”.

  A method of manufacturing the configuration of the third embodiment configured as described above will be described below with reference to FIGS. FIG. 5 is an explanatory diagram showing a state in which one example of the first alignment mark 10A, the second alignment mark 20A, the third alignment mark 10B, and the fourth alignment mark 10C is viewed in a planar manner. FIG. 5 shows that the pair of panel substrates 11 and 12 are already bonded together by alignment using the third alignment mark 10B and the fourth alignment mark 10C to form the electro-optical panel 10, and then the function-added plate-like body The state when 20 is piled up is shown.

  Here, in the illustrated example, the first alignment mark 10 </ b> A formed on the upper surface of the panel substrate 12 and the fourth alignment mark 10 </ b> C formed on the lower surface of the panel substrate 12 are formed in a shape and position that are planarly coincident with each other. That is, one mode in which the fourth alignment mark 10C is limited to be formed in a region overlapping the first alignment mark 10A in a plan view is shown.

  FIG. 6 is an enlarged plan view (a) showing an overlapping state of the third alignment mark 10B and the fourth alignment mark 10C after completion of alignment in the alignment process of the pair of panel substrates 11 and 12 of the electro-optical panel 10, and thereafter FIG. 6B is an enlarged plan view (b) showing an overlapping state of the first alignment mark 10A and the second alignment mark 20A before the alignment is completed in the alignment process of the electro-optical panel 10 and the function-added plate-like body 20;

  First, based on the first configuration described above, first, in the step of aligning the pair of panel substrates 11 and 12 of the electro-optical panel 10, the panel substrates 11 and 12 are superimposed on the optical path as shown in FIG. When the polarizing plates 31 and 32 are arranged before and after the structure and the image pickup device 30X takes a picture, the light in the first polarization state emitted from the light source 30Z is transmitted through the polarizing plate 31 in a predetermined direction. The linearly polarized light having a polarization axis along the axis is converted into linearly polarized light having a polarization axis perpendicular to a predetermined direction, for example, by passing through the third alignment mark 10B. The polarized light does not pass through the polarizing plate 32. As a result, the third alignment mark 10B appears in black on the image taken by the imaging device 30X as shown in FIG. 6A. . On the other hand, the fourth alignment mark 10C is made of a material that is visible in the first polarization state (for example, made of a material that blocks or absorbs light regardless of the polarization state). As shown, it appears black on the image. Therefore, by processing the image, the center of gravity of the third alignment mark 10B and the fourth alignment mark 10C can be calculated, and the pair of panel substrates 11 and 12 can be aligned so that the center of gravity is matched. .

  Next, in the step of aligning the electro-optical panel 10 and the function-added plate-like body 20 after the electro-optical panel 10 is completed, the polarizing plates 31 and 32 are disposed between the light source 30Z and the imaging device 30X shown in FIG. First, the natural light which is the second polarization state emitted from the light source 30Z is transmitted as it is and photographed by the imaging device 30X. At this time, the polarization axis of the light passing through the third alignment mark 10B rotates. However, if the light absorption rate of the third alignment mark 10B is sufficiently low, the intensity of natural light itself is hardly different from that around the mark. As shown in FIG. 6B, the third alignment mark 10B does not appear on the image captured by the imaging device 30X. Further, the fourth alignment mark 10C does not appear by being covered with the first alignment mark 10A. Therefore, when alignment is performed using the first alignment mark 10A and the second alignment mark 20A that are visible in the second polarization state, the third alignment mark 10B and the fourth alignment mark 10C are visually disturbed. In addition, erroneous calculation can be eliminated when image processing is performed.

  Next, the manufacturing method will be described in the case of the second configuration. In this case, first, in the step of aligning the pair of panel substrates 11 and 12 of the electro-optical panel 10, the polarizing plates 31 and 32 are not arranged between the light source 30Z and the imaging device 30X shown in FIG. The natural light which is the first polarization state emitted from the light is transmitted as it is and photographed by the imaging device 30X. At this time, when passing through the third alignment mark 10B, the linearly polarized light having the vibration direction along the transmission axis of the mark is transmitted, but the linearly polarized light along the absorption axis is absorbed. Due to the light absorption rate (usually below 50%), the intensity of natural light decreases, and the third alignment mark 10B appears on the image taken by the imaging device 30X as shown in FIG. The fourth alignment mark appears in the same manner as in the first configuration. Therefore, by processing the image, the center of gravity of the third alignment mark 10B and the fourth alignment mark 10C can be calculated, and the pair of panel substrates 11 and 12 can be aligned so that the center of gravity is matched. .

  Next, in the step of aligning the electro-optical panel 10 and the function-added plate-like body 20 after the electro-optical panel 10 is completed, polarizing plates 31 and 32 are provided before and after the electro-optical panel on the optical path as shown in FIG. When arranged and photographed by the imaging device 30X, the light in the second polarization state emitted from the light source 30Z becomes linearly polarized light having a polarization axis along the transmission axis directed in a predetermined direction by the polarizing plate 31, and the linearly polarized light is By passing the third alignment mark 10B having the transmission axis along the predetermined direction as it is, the image is passed through the polarizing plate 32 having the transmission axis in the same direction in an optical state that is the same as that around the mark. As a result, as shown in FIG. 6B, the third alignment mark 10B does not appear on the image captured by the imaging device 30X. Further, the fourth alignment mark 10C does not appear by being covered with the first alignment mark 10A in the same manner as the first configuration. On the other hand, the first alignment mark 10A and the second alignment mark 20A are visible in the second polarization state (for example, made of a material that blocks or absorbs light regardless of the polarization state). Appears black. Therefore, when the alignment is performed using the first alignment mark 10A and the second alignment mark 20A that are visible in the second polarization state, the third alignment mark 10B and the fourth alignment mark 10C are visually disturbed. In addition, erroneous calculation can be eliminated when image processing is performed.

  In any of the above configuration examples, the case where the fourth alignment mark 10C is limited to be formed in the region overlapping the first alignment mark 10B has been described. However, the fourth alignment mark 10C is the first alignment mark 10C. When it has at least a portion that deviates from the region overlapping with the alignment mark 10A in a plane, that is, when the fourth alignment mark 10C behind may protrude and cause a failure when detecting the first alignment mark 10B, By forming the fourth alignment mark 10C using the same material as the third alignment mark 10B, it is possible to prevent a failure from occurring when the first alignment mark 10A and the second alignment mark 20A are used.

  Further, when the alignment of the pair of panel substrates 11 and 12 is completed, the third alignment mark 10B is limited to be formed in a region overlapping the first alignment mark 10A in a planar manner. In this case, in the alignment process between the electro-optical panel 10 and the function-added plate-like body 20, the third alignment mark 10B is entirely covered with the first alignment mark 10A, and thus alignment is not hindered. Therefore, instead of configuring the third alignment mark 10B with a material having a phase difference or a material having polarization characteristics as described above, the third alignment mark 10B may be configured in advance so as to be in the above state.

[Function-added plate]
Next, the configuration of the function-added plate-like body 20 in each of the above embodiments will be described. The function-added plate-like body 20 includes a planar heater for heating the electro-optical panel 10, a coordinate input sensor such as a touch panel for detecting touch operations and coordinates thereof, and an optical sensor such as an ambient sensor for detecting ambient brightness. Various additional functional elements such as an optical sheet such as a viewing angle control film, a transparent protective plate made of an acrylic plate for protecting the display screen, and the like can be used. In particular, a viewing angle barrier layer for making the display screen of the electro-optical panel 10 three-dimensional or two-screen can be provided as the function-added plate-like body 20. Below, the structure is demonstrated about the case where the function addition plate-shaped body 20 comprises a viewing angle barrier layer.

  7A and 7B are a plan view and a cross-sectional view illustrating a configuration example of the function-added plate-like body 20 that can form the viewing angle barrier layer. The function-added plate-like body 20 is formed by laminating transparent additional substrates 21 and 22 such as glass and plastic with a sealing material 23, and a liquid crystal 24 is enclosed inside the sealing material 23 between the additional substrates 21 and 22. ing.

  On the inner side of the sealing material 23, a drive region 20Y is formed in which a plurality of strip-like electrodes 21a and 22a that are opposed to each other are arranged on the inner surfaces of both the additional substrates 21 and 22 in a stripe shape in the horizontal direction of the screen. Yes. In the drive region 20Y, strip-like electrodes 21a and 22a extending in the vertical direction of the screen are formed so as to face each other by a transparent conductor such as ITO (indium tin oxide). And the opposing area | region 20S of the electrodes 21a and 22a and the non-opposing area | region 20T which these electrodes do not oppose are each comprised by strip | belt shape, and are arranged by the screen left-right direction alternately. Note that polarizing plates 25 and 26 are disposed on the outer surfaces of the additional substrates 21 and 22, respectively.

  The function-added plate-like body 20 becomes a uniform transparent plate in a state where a predetermined voltage is not applied between the electrodes 21a and 22a. However, when a predetermined voltage is applied between the electrodes 21a and 22a, the opposing region 20S is shielded from light in a stripe shape to form a barrier layer that blocks light from the electro-optical panel 10. When this barrier layer is formed, the light emitted from the electro-optical panel 10 is periodically blocked, so that when viewing the screen of the electro-optical device from two viewing angles biased to the left and right, a plurality of strips that can be viewed The image area can be different on the left and right. Therefore, by displaying a part of different images in the left and right belt-like image areas, the images viewed at the two viewing angles can be made different from each other, or the left and right eye field images can be displayed in the left and right image areas. It is possible to display the three-dimensional image by making the two viewing angles coincide with the distance between the left and right eyes.

  In the case where the viewing angle barrier layer as described above is the function-added plate-like body 20, the position in the left-right direction of the drive region 10X of the electro-optic panel 10 is extremely high accuracy with the barrier position in the left-right direction of the function-added plate-like body 20. Since the desired performance cannot be exhibited unless the above is satisfied, the configuration for alignment according to the present invention is extremely useful when such a viewing angle barrier layer is configured as the function-added plate-like body 20.

  The viewing angle barrier layer is not limited to the switching type configuration using the liquid crystal shutter as described above, and may be a fixed type configuration in which a light shielding band is periodically formed, for example. Any substrate having an arbitrary structure can be used as long as it is configured as a semi-light-shielding substrate for separating the display image of the optical panel.

[Fourth Embodiment]
Next, a fourth embodiment according to the present invention will be described with reference to FIGS. As shown in FIG. 8, the fourth embodiment includes an electro-optical panel (specifically, a liquid crystal display panel) 10 including substrates 11 and 12 and a function-added plate-like body. 40 and a function-added plate-like body 50 are stacked.

  The second alignment mark 40A corresponding to the first alignment mark 10A formed on the upper surface (surface on the function addition plate-like body 40) of the substrate 12 is provided on the lower surface (surface on the substrate 12 side) of the function addition plate-like body 40. The substrate 12 and the function-added plate-like body 40 are aligned using the pair of alignment marks, and are adhered by a transparent adhesive 40X.

  Further, a fifth alignment mark 40B is formed on the upper surface of the function-added plate-like body 40 (the surface on the function-added plate-like body 50 side), and the sixth alignment mark 50A corresponding to the fifth alignment mark 40B has the above-mentioned function addition. It is formed on the lower surface of the plate-like body 50 (the surface on the function-added plate-like body 40 side). The function-added plate-like body 40 and the function-added plate-like body 50 are aligned using the pair of alignment marks, and are adhered by a transparent adhesive 50X.

  Note that the set of the first alignment mark 10A and the second alignment mark 40A has the same configuration as that of each of the embodiments described above in relation to the set of the third alignment mark 10B and the fourth alignment mark 10C. The overlapping positional relationship (in this case, the configuration relating to the optical characteristics of the set of the third alignment mark 10B and the fourth alignment mark 10C is also the same), or the positional relationship that does not overlap in a plane. Further, the set of the fifth alignment mark 40B and the sixth alignment mark 50A is the same as the above in relation to the set of the third alignment mark 10B and the fourth alignment mark 10C. Further, the mutual relationship between the set of the first alignment mark 10A and the second alignment mark 40A and the set of the fifth alignment mark 40B and the sixth alignment mark 50A is the same as that in each of the above embodiments, that is, A configuration similar to the mutual relationship between the set of the first alignment mark 10A and the second alignment mark 40A and the set of the third alignment mark 10B and the fourth alignment mark 10C can be employed.

  FIG. 9 is an explanatory diagram illustrating a configuration example of the function-added plate-like bodies 40 and 50 according to the fourth embodiment. In this configuration example, the function-added plate-like body 40 is a barrier polarizing plate having a structure in which strip-like regions 40a and 40b having different phase differences in the plane direction are alternately arranged in a stripe shape. That is, the regions 40a and 40b have different degrees of modulation (retardation) with respect to polarized light.

  Such a barrier polarizing plate can be prepared, for example, by the following method. First, an alignment film made of a photo-curing resin or the like is applied on a transparent substrate, and the alignment film is exposed to the first polarized light through an exposure mask that shields only a range corresponding to the area 40b, for example. The range corresponding to the region 40b is photo-aligned and cured in the first alignment state, and then exposed to the second polarized light so that the range corresponding to the region 40b is in the second alignment state different from the first alignment state. Harden. Next, by applying a liquid crystal polymer on the alignment film, the liquid crystal polymer layer is aligned corresponding to two different alignment state ranges of the alignment film, and the regions 40a and 40b are formed. The Thereafter, the barrier polarizing plate is formed by curing the liquid crystal polymer layer by light irradiation or the like.

  On the other hand, the function-added plate-like body 50 is constituted by a liquid crystal panel in which a liquid crystal 53 is disposed between substrates 51 and 52. On the inner surfaces of the substrates 51 and 52 facing each other, planar transparent electrodes 51a and 52a (so-called solid electrodes) are formed so as to oppose each other. This liquid crystal panel changes the polarization state of transmitted light when an electric field is not applied between the pair of electrodes 51a and 52a, and does not affect the polarization state of transmitted light when an electric field of a predetermined level or more is applied. It becomes a state.

  Therefore, in the electric field application state shown on the left side of the one-dot chain line in FIG. However, in the state where no electric field is applied to the right side of the alternate long and short dash line in FIG. 9, the light that has passed through the region 40 a passes through the polarizing plate 54, but the light that has passed through the region 40 b is blocked by the polarizing plate 54. That is, in this configuration example, the function-added plate-like bodies 40 and 50 serve as a parallax barrier layer when no electric field is applied, but are merely transparent plates when an electric field is applied. Note that the arrows shown in FIG. 9 indicate the directions of the polarization vibration planes of the light emitted from the electro-optical panel 10 and the transmitted light thereafter.

  Therefore, in the present embodiment, switching between a three-dimensional image display body (or two-screen display body) having a barrier layer and a normal two-dimensional image display body is performed depending on whether or not an electric field is applied to the function-added plate-like body 50. Can be configured. Note that the configuration in which four or more substrates are laminated is not limited to the structure shown in FIG. 9, but various configurations such as a structure in which a parallax barrier layer and an optical compensator are stacked on an electro-optical panel, for example. Can be taken.

[Electronics]
Finally, an embodiment of an electronic apparatus equipped with the electro-optical device will be described with reference to FIG. FIG. 10 is a schematic perspective view showing the appearance of an example of an electronic apparatus according to the present invention. The electronic apparatus 1000 in the illustrated example is an in-vehicle car navigation system, and includes a main body 1010 and a display unit 1020 connected to the main body 1010. The main body 1010 is provided with an operation surface 1011 provided with operation buttons and the like, and an inlet 1012 for a recording medium such as a DVD. The electro-optical device 100 is stored inside the display unit 1020, and the display by the electro-optical device 100, that is, the display of the navigation image can be viewed on the display screen 1020a of the display unit 1020.

  In this electronic apparatus 1000, since the above-described electro-optical device 100 is mounted, it is possible to mount a high-quality display device that is positioned with high accuracy, thereby realizing a high-quality display image. can do.

  Note that the electro-optical device, the manufacturing method thereof, and the electronic apparatus of the present invention are not limited to the illustrated examples described above, and various modifications can be made without departing from the scope of the present invention. It is. For example, in the above-described embodiment, an example in which a liquid crystal display panel is used as an electro-optical panel has been shown. However, the present invention is not limited to such a configuration. For example, an organic electroluminescence display panel, an electrophoretic display panel, Various electro-optical panels such as various display panels called electronic paper can be used.

The schematic longitudinal cross-sectional view which shows the structure of 1st Embodiment typically. The enlarged plan view which shows the example of a shape of a pair of alignment mark. The schematic longitudinal cross-sectional view which shows the structure of 2nd Embodiment typically. The schematic longitudinal cross-sectional view which shows the structure of 3rd Embodiment typically. The enlarged plan view which shows the planar positional relationship of the alignment mark of 3rd Embodiment. The enlarged plan view (a) which shows the alignment mark vicinity after the first alignment process of 3rd Embodiment, and the enlarged plan view (b) which shows the alignment mark vicinity before the next alignment process. The longitudinal cross-sectional view which shows the structure of a function addition plate-shaped object typically, and a cross-sectional view. The schematic longitudinal cross-sectional view which shows typically the structure of 4th Embodiment. Schematic explanatory drawing which shows the principle of the variable barrier structure of 4th Embodiment. The schematic perspective view which shows an example of an electronic device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Electro-optical panel, 10A ... 1st alignment mark, 10B ... 3rd alignment mark, 10C ... 4th alignment mark, 10X ... Drive area | region, 11, 12 ... Panel board | substrate, 13 ... Sealing material, 14 ... Electro-optical substance ( Liquid crystal), 15, 16 ... polarizing plate, 20 ... function-added plate, 20A ... second alignment mark, 20X ... adhesive, 20Y ... drive region, 21, 22 ... additional substrate, 23 ... sealing material, 24 ... liquid crystal , 25, 26 ... polarizing plate, 30X, 30Y ... imaging device, 30Z ... light source, 31, 32 ... polarizing plate, 40 ... function-added plate (barrier polarizing plate), 50 ... function-added plate (variable barrier) Liquid crystal panel), 51, 52 ... substrate, 53 ... liquid crystal, 54 ... polarizing plate

Claims (8)

At least the first substrate, the second substrate, and the third substrate are sequentially overlapped, and the first alignment mark and the second alignment are respectively positioned at corresponding planar positions on the mutually opposing surfaces of the second substrate and the first substrate. In the electro-optical device in which a mark is formed, and a third alignment mark and a fourth alignment mark are formed at corresponding planar positions on the mutually opposing surfaces of the third substrate and the second substrate, respectively.
The first alignment mark and the second alignment mark are made of a material that is visible in at least the second polarization state among the first polarization state and the second polarization state, which have different polarization states from each other,
The third alignment mark and the fourth alignment mark are made of a material that is visible in the first polarization state and made of a material that is invisible in the second polarization state. Optical device.   The first alignment mark and the second alignment mark, and the third alignment mark and the fourth alignment mark are provided in a region where they do not overlap with each other in plane. Electro-optic device.   The electro-optical device according to claim 1, wherein the fourth alignment mark is formed in a region that overlaps the first alignment mark in a planar manner.   The polarization state according to any one of claims 1 to 3, wherein one of the first polarization state and the second polarization state is natural light and the other polarization state is linear polarization. Electro-optic device. 2. The electro-optical material is disposed between the second substrate and the third substrate to form an electro-optical panel, and the first substrate is a function-added plate-like body. The electro-optical device according to claim 1.   An electronic apparatus comprising the electro-optical device according to any one of claims 1 to 5. In the method of manufacturing an electro-optical device in which at least a first substrate, a second substrate, and a third substrate are sequentially stacked,
A first alignment mark is formed on one surface of the second substrate that faces the first substrate with a material that is visible in at least the second polarization state of the first polarization state and the second polarization state, which have different polarization states. formed, the the first and the second substrate and the opposing surfaces on the a corresponding to the first alignment mark position of the substrate, forming a second alignment mark with a material that is visible in the second polarization state When,
The fourth alignment mark and the third alignment are made of a material that is visible in the first polarization state and invisible in the second polarization state on the mutually opposing surfaces of the second substrate and the third substrate, respectively. Forming a mark;
Positioning the second substrate and the first substrate using the first alignment mark and the second alignment mark in the second polarization state;
Positioning the second substrate and the third substrate using the fourth alignment mark and the third alignment mark in the first polarization state;
An electro-optical device manufacturing method comprising:   The method of manufacturing an electro-optical device according to claim 7, wherein one of the first polarization state and the second polarization state is natural light, and the other polarization state is linear polarization.

Images