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JP4978591B2 - Pure water production equipment - Google Patents
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JP4978591B2 - Pure water production equipment - Google Patents

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JP4978591B2
JP4978591B2 JP2008224108A JP2008224108A JP4978591B2 JP 4978591 B2 JP4978591 B2 JP 4978591B2 JP 2008224108 A JP2008224108 A JP 2008224108A JP 2008224108 A JP2008224108 A JP 2008224108A JP 4978591 B2 JP4978591 B2 JP 4978591B2
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deionized water
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保幸 有光
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Miura Co Ltd
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Description

本発明は、電気脱イオン装置を用いて原水を処理するようにした純水製造装置に関する。   The present invention relates to a pure water production apparatus that treats raw water using an electrodeionization apparatus.

工水、市水、井水或いは半導体製造工程等からの回収水を処理して純水を製造するシステムとして、原水を逆浸透膜装置で処理した後、電気脱イオン装置を用いて処理する純水製造装置が知られている(例えば特許文献1、2)。
特開2003−1259号公報 特開2001−29752号公報
As a system for producing pure water by treating recovered water from industrial water, city water, well water, or semiconductor manufacturing process, etc. A water production apparatus is known (for example, Patent Documents 1 and 2).
JP 2003-1259 A JP 2001-29752 A

電気脱イオン装置は、一対の電極間に陽イオン交換膜および陰イオン交換膜を交互に配列することにより脱塩室および濃縮室が区画形成され、脱塩室にはイオン交換体が充填された電気脱イオンモジュールに直流電圧および/または直流電流を印加し、逆浸透膜装置等で処理された処理水を通過させることにより、脱イオン水を得るものである。この電気脱イオンモジュールの脱塩室では、通常運転時には入口側のイオン濃度が高く、出口側に向かうに従ってイオン濃度が低くなる濃度勾配が生じる。そのため、出口側では脱イオン水の比抵抗が上昇するが、運転を停止(直流電圧の印加を停止)すると濃度勾配がイオンの拡散により消滅し、脱イオン水の比抵抗は低下する。運転再開時に、脱イオン水の比抵抗が低下したまま通水すると、得られた脱イオン水の純度は低下しているので、そのままでは使用に適さない。そこで、従来は、電気脱イオン装置で処理された脱イオン水が排出される脱イオン水ラインから分岐するリターンラインを設けておき、運転再開時にはこのリターンラインから電気脱イオン装置の前段の処理水タンクに水を循環させる循環運転法が採用されている In the electrodeionization apparatus, a cation exchange membrane and an anion exchange membrane are alternately arranged between a pair of electrodes to form a demineralization chamber and a concentration chamber, and the demineralization chamber is filled with an ion exchanger. Deionized water is obtained by applying a direct current voltage and / or direct current to the electrodeionization module and passing the treated water treated by a reverse osmosis membrane device or the like. In the deionization chamber of this electrodeionization module, a concentration gradient is produced in which the ion concentration on the inlet side is high during normal operation and the ion concentration decreases toward the outlet side. For this reason, the specific resistance of deionized water increases on the outlet side, but when the operation is stopped (application of DC voltage is stopped), the concentration gradient disappears due to ion diffusion, and the specific resistance of deionized water decreases. If the water is passed while the specific resistance of the deionized water is lowered when the operation is resumed, the purity of the obtained deionized water is lowered, so that it is not suitable for use as it is. Therefore, conventionally, a return line branched from a deionized water line from which deionized water treated by the electrodeionization apparatus is discharged is provided, and when the operation is resumed, the treated water before the electrodeionization apparatus is connected from this return line. A circulation operation method in which water is circulated through the tank is adopted .

さらにまた、従来は、電気脱イオン装置の前段の処理水タンクの貯水レベルが所定以下に低下した場合、給水ポンプやイオン交換膜の保護のため、電気脱イオン装置を停止させている。そのため、次回の運転再開時の再起動に時間がかかるという問題があった。   Furthermore, conventionally, when the water storage level of the treated water tank in the previous stage of the electrodeionization apparatus is lowered below a predetermined level, the electrodeionization apparatus is stopped to protect the water supply pump and the ion exchange membrane. Therefore, there is a problem that it takes time to restart at the next restart of operation.

本発明は、このような課題に鑑みてなされたものであり、処理水タンクの貯水レベルの低下で循環運転に切換えることにより、次回の起動時間を短縮することができる純水製造装置を提供することを目的とする。 This invention is made | formed in view of such a subject, and provides the pure water manufacturing apparatus which can shorten the next starting time by switching to circulation operation by the fall of the water storage level of a treated water tank. For the purpose.

本発明者は、電気脱イオン装置の前段の処理水タンクの貯水レベルを検知し、所定以下のレベルに低下したとき、循環運転に切換えることにより、電気脱イオン装置を停止させることなく、次回の起動時間を短縮することができることを見出し、これに基づいて、以下のような新たな純水製造装置を発明するに至った。 The present inventor detects the water storage level of the treated water tank in the previous stage of the electrodeionization device, and when it falls to a predetermined level or less, by switching to the circulation operation, the electrodeionization device is not stopped next time. It has been found that the startup time can be shortened, and based on this, the inventors have invented a new pure water production apparatus as described below.

) 被処理水を処理する逆浸透膜装置と、前記逆浸透膜装置で処理した処理水を貯留する処理水タンクと、前記処理水タンクから供給される処理水を処理する電気脱イオン装置と、前記電気脱イオン装置で処理された脱イオン水を排出する脱イオン水ラインと、前記脱イオン水ラインから分岐し、脱イオン水を前記処理水タンクにリターンさせるリターンラインと、前記脱イオン水ラインと前記リターンラインとの分岐部に設けられ、脱イオン水を前記リターンラインに流す循環運転と脱イオン水ラインに流す非循環運転とに切換える切換弁と、前記電気脱イオン装置に直流電圧および/または直流電流を印加する電源装置と、前記処理水タンクに設けられた貯水レベル検知用のレベルセンサと、貯水レベルが所定以下に低下したとき、前記レベルセンサの検知信号に基づいて、前記切換弁を循環運転に切換える制御部と、を備えたことを特徴とする純水製造装置。 ( 1 ) A reverse osmosis membrane device for treating water to be treated, a treated water tank for storing treated water treated by the reverse osmosis membrane device, and an electrodeionization device for treating treated water supplied from the treated water tank A deionized water line that discharges deionized water treated by the electrodeionization device, a return line that branches from the deionized water line and returns the deionized water to the treated water tank, and the deionized water A switching valve which is provided at a branch portion between the water line and the return line and switches between a circulating operation for flowing deionized water to the return line and a non-circulating operation for flowing the deionized water line; And / or a power supply device for applying a direct current, a level sensor for water storage level detection provided in the treated water tank, and when the water storage level falls below a predetermined level, Based on the detection signal of the serial level sensor, wherein a control unit for switching the circulation operation of the switching valve, water purifying apparatus, comprising the.

) 前記電気脱イオン装置への流量を調整する流量調整弁と、前記電源装置の電圧を調整する電圧制御部とを備え、前記制御部は、前記切換弁を循環運転に切換えたとき、前記流量調整弁を絞り、かつ前記電源装置の印加電圧を低下させる制御を行うことを特徴とする()記載の純水製造装置。 ( 2 ) A flow rate adjustment valve that adjusts the flow rate to the electrodeionization device and a voltage control unit that adjusts the voltage of the power supply device, wherein the control unit switches the switching valve to circulation operation, The pure water production apparatus according to ( 1 ), wherein the flow rate adjusting valve is throttled and control is performed to reduce the voltage applied to the power supply device.

本発明に係る純水製造装置によれば、処理水タンクの貯水レベルが低下しても装置を停止することなく、循環運転に切換えることにより、次回の起動時間を短縮することができる。 According to the water purifying system engaged Ru in the present invention, without water level of treated water tank may stop device be reduced by switching the circulation operation, it is possible to shorten the next boot time.

図1は、本発明の実施形態による純水製造装置のシステム構成図である。   FIG. 1 is a system configuration diagram of a pure water production apparatus according to an embodiment of the present invention.

図1において、1は逆浸透膜装置、2は処理水タンク、3は電気脱イオン装置、4は直流の電源装置、5は制御部、6は起動スイッチ、7は切換弁を示している。   In FIG. 1, 1 is a reverse osmosis membrane device, 2 is a treated water tank, 3 is an electrodeionization device, 4 is a DC power supply device, 5 is a control unit, 6 is a start switch, and 7 is a switching valve.

原水は、活性炭濾過装置(図示せず)等によって濾過された後、逆浸透膜装置1で脱塩処理され、得られた処理水は処理水タンク2に貯水される。処理水タンク2の処理水は電気脱イオン装置3へ送られ、さらに精製された後、脱イオン水ライン8から脱イオン水(純水)としてユースポイントに送られる。また、本実施形態に係る純水製造装置においては、脱イオン水ライン8から切換弁7を介して分岐され、処理水タンク2に処理水をリターンさせるリターンライン9が設けられている。   The raw water is filtered by an activated carbon filter (not shown) or the like and then desalted by the reverse osmosis membrane device 1, and the obtained treated water is stored in the treated water tank 2. The treated water in the treated water tank 2 is sent to the electrodeionization device 3 and further purified, and then sent from the deionized water line 8 to the use point as deionized water (pure water). Further, in the pure water production apparatus according to this embodiment, a return line 9 is provided that branches from the deionized water line 8 via the switching valve 7 and returns the treated water to the treated water tank 2.

また、起動スイッチ6は、ユースポイントでの脱イオン水の使用状態に応じてオンオフするものであり、例えば脱イオン水ライン8に設けられたフロースイッチや、脱イオン水の貯水タンク(図示せず)に設けられたレベルスイッチなどが利用される。すなわち、起動スイッチ6は、ユースポイントで脱イオン水が使用されることにより、フロースイッチが流れを検知したり、レベルスイッチがレベルの低下を検知したりするとオン状態となるものである。   The start switch 6 is turned on / off according to the use state of deionized water at the use point. For example, a flow switch provided in the deionized water line 8 or a deionized water storage tank (not shown). ) Is used. That is, the activation switch 6 is turned on when deionized water is used at the point of use, so that the flow switch detects a flow or the level switch detects a decrease in level.

電気脱イオン装置3には、一対の電極間に陽イオン交換膜および陰イオン交換膜を交互に配列することにより脱塩室および濃縮室が区画形成され、脱塩室にはイオン交換体が充填された電気脱イオンモジュールを備えている。脱塩室に充填されるイオン交換体としては、通常、陽イオン交換樹脂と陰イオン交換樹脂とを混合したもの(いわゆる混床樹脂)、或いは陽イオン交換繊維と陰イオン交換繊維を混合したものが用いられる。   In the electrodeionization apparatus 3, a cation exchange membrane and an anion exchange membrane are alternately arranged between a pair of electrodes to form a demineralization chamber and a concentration chamber, and the demineralization chamber is filled with an ion exchanger. An electrodeionization module is provided. The ion exchanger filled in the desalting chamber is usually a mixture of cation exchange resin and anion exchange resin (so-called mixed bed resin), or a mixture of cation exchange fiber and anion exchange fiber. Is used.

この電気脱イオン装置3には、電源装置4から直流電圧が印加される。通常の運転時における直流電圧は、例えば300ボルトとする。   A direct current voltage is applied to the electrodeionization device 3 from the power supply device 4. The DC voltage during normal operation is, for example, 300 volts.

電気脱イオン装置3を停止した後、運転を再開するときは、予め切換弁7をリターンライン9側に切換えておく。この操作は、例えば制御部5において電気脱イオン装置3の停止を判定し、切換弁7をリターンライン9側に切換えるように制御することにより達成される。また、例えば制御部5において起動スイッチ6のオン状態を判定(すなわち、ユースポイントでの脱イオン水の使用開始を判定)し、切換弁7をリターンライン9側に切換えるように制御することにより達成される。   When the operation is resumed after the electrodeionization device 3 is stopped, the switching valve 7 is switched to the return line 9 side in advance. This operation is achieved, for example, by determining that the electrodeionization device 3 is stopped in the control unit 5 and controlling the switching valve 7 to switch to the return line 9 side. For example, the controller 5 determines that the start switch 6 is turned on (that is, determines the start of use of deionized water at the use point) and controls the switching valve 7 to switch to the return line 9 side. Is done.

次いで、制御部5は、起動スイッチ6のオン状態を判定すると、これに基づいて電源装置4の電圧を通常の運転時より高い値、例えば350ボルトに設定する。また、制御部5は、起動スイッチ6のオン状態を判定すると、電気脱イオン装置3の給水ポンプ(図示せず)を作動させ、処理水タンク2から電気脱イオン装置3に処理水が供給されることにより、脱イオン水が脱イオン水ライン8から排出される。切換弁7がリターンライン9側に切換えられているときは、脱イオン水はリターンライン9から処理水タンク2にリターンし、処理水タンク2から電気脱イオン装置3に供給される循環運転が行われる。そして、脱イオン水の比抵抗が所定の値になると、切換弁7をユースポイント側に切換え、電源装置4の電圧も通常(例えば300ボルト)に戻し、通常運転が行われる。   Next, when determining the ON state of the start switch 6, the control unit 5 sets the voltage of the power supply device 4 to a higher value than that during normal operation, for example, 350 volts based on this. In addition, when the control unit 5 determines that the start switch 6 is turned on, the control unit 5 operates a water supply pump (not shown) of the electrodeionization device 3 so that treated water is supplied from the treated water tank 2 to the electrodeionization device 3. As a result, deionized water is discharged from the deionized water line 8. When the switching valve 7 is switched to the return line 9 side, the deionized water returns from the return line 9 to the treated water tank 2 and is circulated from the treated water tank 2 to the electric deionizer 3. Is called. When the specific resistance of deionized water reaches a predetermined value, the switching valve 7 is switched to the use point side, the voltage of the power supply device 4 is also returned to normal (for example, 300 volts), and normal operation is performed.

本実施形態によれば、起動時に、通常運転時より高い直流電圧を印加することにより脱イオン速度を高め、循環運転の時間を短縮し、これにより、電気脱イオン装置3の起動時間を短縮することができる。   According to the present embodiment, at the time of start-up, a higher DC voltage is applied than during normal operation to increase the deionization speed and shorten the circulation operation time, thereby shortening the start-up time of the electrodeionization device 3. be able to.

図2は、本発明の純水製造装置の第2実施形態を示す。第2実施形態においては、処理水タンク2内に第1レベルスイッチ10と第2レベルスイッチ11が設けられている。第1レベルスイッチ10は循環運転開始用のレベルセンサとして機能し、第2レベルスイッチ11は電気脱イオン装置3を停止させる停止インタロック用のレベルセンサとして機能する。処理水タンク2の下流には紫外線酸化装置14が設けられ、紫外線酸化装置14と電気脱イオン装置3の間には流量調整弁13が設けられている。   FIG. 2 shows a second embodiment of the pure water production apparatus of the present invention. In the second embodiment, a first level switch 10 and a second level switch 11 are provided in the treated water tank 2. The first level switch 10 functions as a level sensor for starting circulation operation, and the second level switch 11 functions as a level sensor for stop interlock that stops the electrodeionization device 3. An ultraviolet oxidation device 14 is provided downstream of the treated water tank 2, and a flow rate adjusting valve 13 is provided between the ultraviolet oxidation device 14 and the electrodeionization device 3.

処理水タンク2内の貯水レベルが所定レベルまで低下したとき第1レベルスイッチ10がこれを検知し、この検知信号に基づいて制御部12が切換弁7をリターンライン9側に切換えることにより、循環運転に入る。循環運転に入ると、制御部12により電気脱イオン装置3の上流に設けられた流量調整弁13を絞ることにより、電気脱イオン装置3への給水流量を減少(脱塩室への給水流量を減少)させ、かつ制御部12から電源装置4に信号を送り、電源装置4の印加電圧を通常運転時より低下させる。このように、貯水レベルが所定レベルまで低下すると自動的に循環運転に入るとともに、通常より減少した供給流量および低下した印加電圧で循環運転する。したがって、処理水タンク2の貯水レベルが所定以下に低下した場合でも、循環運転に切換えることにより、電気脱イオン装置3の通電を停止することがない。これにより、脱塩室内の濃度勾配が消滅することなく、また処理水タンク2内の処理水の脱イオンが進行するので、次回に起動する際の起動時間を短縮することができる。   When the stored water level in the treated water tank 2 is lowered to a predetermined level, the first level switch 10 detects this, and based on this detection signal, the control unit 12 switches the switching valve 7 to the return line 9 side to circulate. Start driving. When the circulating operation is started, the flow rate adjustment valve 13 provided upstream of the electrodeionization device 3 is throttled by the control unit 12 to reduce the feedwater flow rate to the electrodeionization device 3 (the feedwater flow rate to the demineralization chamber is reduced). And a signal is sent from the control unit 12 to the power supply device 4 to lower the voltage applied to the power supply device 4 during normal operation. As described above, when the water storage level is lowered to a predetermined level, the circulation operation is automatically started, and the circulation operation is performed with the supply flow rate decreased and the applied voltage decreased. Therefore, even when the water storage level of the treated water tank 2 falls below a predetermined level, the energization of the electrodeionization device 3 is not stopped by switching to the circulation operation. As a result, the concentration gradient in the desalting chamber does not disappear, and the deionization of the treated water in the treated water tank 2 proceeds, so that the startup time at the next startup can be shortened.

逆浸透膜装置1の作動により処理水タンク2の貯水レベルが元に復帰した場合は、制御部12により切換弁7をユースポイント側に切換えるとともに、電源装置4の印加電圧および流量調整弁13の絞りを通常に戻し、通常運転が行われる。   When the water storage level of the treated water tank 2 is restored to the original level by the operation of the reverse osmosis membrane device 1, the control unit 12 switches the switching valve 7 to the use point side, and applies the applied voltage of the power supply device 4 and the flow rate adjustment valve 13. The aperture is returned to normal and normal operation is performed.

第2レベルスイッチ11は、給水ポンプや電気脱イオンモジュールを破損から保護するためのものである。すなわち、貯水レベルが第1レベルスイッチ10の位置からさらに低下したときは第2レベルスイッチ11がこれを検知し、この検知信号に基づいて制御部12は制御部5に信号を送り、電源装置4および給水ポンプをオフとして運転を停止する。   The second level switch 11 is for protecting the water supply pump and the electrodeionization module from damage. That is, when the water storage level further decreases from the position of the first level switch 10, the second level switch 11 detects this, and based on this detection signal, the control unit 12 sends a signal to the control unit 5, and the power supply device 4 And the operation is stopped by turning off the water supply pump.

以上、説明したように、本発明の実施形態によれば、電気脱イオン装置3の起動時に、切換弁7をリターンライン9側に切換えるとともに、通常運転時より高い直流電圧および/または直流電流を印加するようにしたことにより、循環運転の時間を短縮し、その分ユースポイントに脱イオン水を早く供給することができる。   As described above, according to the embodiment of the present invention, when the electrodeionization apparatus 3 is started, the switching valve 7 is switched to the return line 9 side, and a higher DC voltage and / or DC current than during normal operation is applied. By applying the voltage, the time for the circulation operation can be shortened, and the deionized water can be quickly supplied to the use point accordingly.

また、本実施形態によれば、処理水タンク2の貯水レベルが所定以下に低下したとき、第1レベルスイッチ10(レベルセンサ)の検知信号に基づいて、切換弁7を循環運転に切換えるようにしたので、貯水レベルが所定以下のレベルに低下したときでも、切換弁7をリターンライン9に切換え、循環運転とすることにより、電気脱イオン装置3を停止させることなく、次回の起動時間を短縮することができる。また、紫外線酸化装置14の紫外線ランプは、電気脱イオン装置3の起動・停止に併せて点灯・消灯を繰り返すことにより寿命が低下するが、本実施形態ではこれを防止することができる。   Moreover, according to this embodiment, when the water storage level of the treated water tank 2 falls below a predetermined level, the switching valve 7 is switched to the circulation operation based on the detection signal of the first level switch 10 (level sensor). Therefore, even when the water storage level drops below a predetermined level, the switching valve 7 is switched to the return line 9 to perform the circulation operation, thereby shortening the next startup time without stopping the electrodeionization device 3. can do. Moreover, although the lifetime of the ultraviolet lamp of the ultraviolet oxidizer 14 is reduced by repeatedly turning on and off as the electrodeionization apparatus 3 is started and stopped, this can be prevented in the present embodiment.

また、本実施形態によれば、循環運転に切換えたとき、流量調整弁13を絞り、かつ電源装置4の印加電圧を低下させることにより、循環運転時の省エネルギを実現することができる。   Further, according to the present embodiment, when switching to the circulation operation, it is possible to realize energy saving during the circulation operation by restricting the flow rate adjustment valve 13 and lowering the applied voltage of the power supply device 4.

以上、本発明の実施形態を説明したが、具体例を例示したに過ぎず、特に本発明を限定するものではなく、逆浸透膜装置1、処理水タンク2、電気脱イオン装置3、電源装置4、切換弁7、制御部5、制御部12等の具体的構成および配置は適宜設計変更可能である。また、上記の実施形態に記載された効果は、本発明から生じる最も好適な効果を列挙したに過ぎず、本発明による効果は、本発明の実施形態に記載されたものに限定されるものではない。   As mentioned above, although embodiment of this invention was described, it only illustrated the specific example and does not specifically limit this invention, the reverse osmosis membrane apparatus 1, the treated water tank 2, the electrodeionization apparatus 3, and a power supply device 4. Specific configurations and arrangements of the switching valve 7, the control unit 5, the control unit 12, and the like can be appropriately changed in design. In addition, the effects described in the above-described embodiment only list the most preferable effects resulting from the present invention, and the effects according to the present invention are not limited to those described in the embodiments of the present invention. Absent.

本発明の第1実施形態の純水製造装置のシステム構成図である。It is a system block diagram of the pure water manufacturing apparatus of 1st Embodiment of this invention. 本発明の第2実施形態の純水製造装置のシステム構成図である。It is a system block diagram of the pure water manufacturing apparatus of 2nd Embodiment of this invention.

符号の説明Explanation of symbols

1 逆浸透膜装置
2 処理水タンク
3 電気脱イオン装置
4 電源装置
5 制御部
6 起動スイッチ
7 切換弁
8 脱イオン水ライン
10 第1レベルスイッチ
11 第2レベルスイッチ
12 制御部
13 流量調整弁
DESCRIPTION OF SYMBOLS 1 Reverse osmosis membrane apparatus 2 Treated water tank 3 Electrodeionization apparatus 4 Power supply device 5 Control part 6 Starting switch 7 Switching valve 8 Deionized water line 10 1st level switch 11 2nd level switch 12 Control part 13 Flow control valve

Claims (2)

被処理水を処理する逆浸透膜装置と、
前記逆浸透膜装置で処理した処理水を貯留する処理水タンクと、
前記処理水タンクから供給される処理水を処理する電気脱イオン装置と、
前記電気脱イオン装置で処理された脱イオン水を排出する脱イオン水ラインと、
前記脱イオン水ラインから分岐し、脱イオン水を前記処理水タンクにリターンさせるリターンラインと、
前記脱イオン水ラインと前記リターンラインとの分岐部に設けられ、脱イオン水を前記リターンラインに流す循環運転と脱イオン水ラインに流す非循環運転とに切換える切換弁と、
前記電気脱イオン装置に直流電圧および/または直流電流を印加する電源装置と、
前記処理水タンクに設けられた貯水レベル検知用のレベルセンサと、
貯水レベルが所定以下に低下したとき、前記レベルセンサの検知信号に基づいて、前記切換弁を循環運転に切換える制御部と、を備えたことを特徴とする純水製造装置。
A reverse osmosis membrane device for treating water to be treated;
A treated water tank for storing treated water treated by the reverse osmosis membrane device;
An electrodeionization apparatus for treating the treated water supplied from the treated water tank;
A deionized water line for discharging deionized water treated by the electrodeionization device;
A return line that branches off from the deionized water line and returns the deionized water to the treated water tank;
A switching valve that is provided at a branch portion between the deionized water line and the return line, and switches between a circulating operation for flowing deionized water to the return line and a non-circulating operation for flowing to the deionized water line;
A power supply device for applying a DC voltage and / or a DC current to the electrodeionization device;
A level sensor for water storage level detection provided in the treated water tank;
And a controller that switches the switching valve to a circulating operation based on a detection signal of the level sensor when the water storage level drops below a predetermined level.
前記電気脱イオン装置への流量を調整する流量調整弁を備え、
前記制御部は、前記切換弁を循環運転に切換えたとき、前記流量調整弁を絞り、かつ前記電源装置の印加電圧を低下させる制御を行うことを特徴とする請求項記載の純水製造装置。
A flow rate adjusting valve for adjusting the flow rate to the electrodeionization device;
When the control unit switches the switching valve to the circulation operation, the flow restrictor adjustment valve, and the power supply pure water production apparatus according to claim 1, wherein the performing control to lower the voltage applied .
JP2008224108A 2008-09-01 2008-09-01 Pure water production equipment Expired - Fee Related JP4978591B2 (en)

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