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JP4986882B2 - Filter device - Google Patents
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JP4986882B2 - Filter device - Google Patents

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JP4986882B2
JP4986882B2 JP2008042361A JP2008042361A JP4986882B2 JP 4986882 B2 JP4986882 B2 JP 4986882B2 JP 2008042361 A JP2008042361 A JP 2008042361A JP 2008042361 A JP2008042361 A JP 2008042361A JP 4986882 B2 JP4986882 B2 JP 4986882B2
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electrode
resonator
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将 山崎
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Kyocera Corp
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本発明は、例えば携帯電話、無線LAN(Local Area Network)、UWB(Ultra Wide Band)等の無線通信機器その他の各種通信機器等において使用されるフィルタ装置に関するものである。   The present invention relates to a filter device used in, for example, a wireless communication device such as a mobile phone, a wireless LAN (Local Area Network), a UWB (Ultra Wide Band), and other various communication devices.

近年、携帯電話機や無線LAN等の様々な用途で無線通信機器が用いられるようになっており、各無線通信機器において使用される周波数が互いに近くなっていることから、これらの無線通信機器には、所望周波数帯域の信号のみを選択的に通過させるとともに、通過帯域の低周波側および高周波側に近接した信号帯域における不所望信号の混入を防止して良質の通信を行ない得るようにするために、通過周波数帯域の低周波側および高周波側の減衰帯域にそれぞれ減衰極を備えた帯域通過特性を有するフィルタ装置が搭載されている。   In recent years, wireless communication devices have been used in various applications such as mobile phones and wireless LANs, and the frequencies used in each wireless communication device are close to each other. In order to selectively pass only signals in the desired frequency band, and to prevent unwanted signals from being mixed in the signal band close to the low frequency side and high frequency side of the pass band so that high quality communication can be performed. A filter device having band pass characteristics having attenuation poles in the low frequency side and high frequency side attenuation bands of the pass frequency band is mounted.

情報伝送容量の増加に伴い、無線通信機器は使用可能な周波数帯域において、高周波化と広帯域化とで利用帯域幅を拡張して情報伝送容量を確保するようになってきている。そのため、通過帯域が広く、通過帯域の近傍に減衰極を有する(急峻な減衰特性を有する)フィルタ装置が求められるようになってきている。また、無線通信機器に対する小型化薄型化の要求により、複数の誘電体と電極とを積層したフィルタ装置が採用されている。   Along with the increase in information transmission capacity, wireless communication devices have secured the information transmission capacity by expanding the use bandwidth by increasing the frequency and bandwidth in the usable frequency band. Therefore, a filter device having a wide pass band and having an attenuation pole in the vicinity of the pass band (having a steep attenuation characteristic) has been demanded. In addition, a filter device in which a plurality of dielectrics and electrodes are stacked is employed in response to a demand for miniaturization and thinning of wireless communication devices.

従来のフィルタ装置として、図11に分解斜視図で示すような、多数の誘電体シート11aが積層・接合されて焼結一体化されている誘電体チップ11の内部に、短絡端と開放端とが互い違いとなるインターデジタル型に配置された複数の共振器内導体13と内挿入出力電極15b・16bとが埋設され、誘電体チップ11の外面には、共振器外導体12aと外部入出力電極15a・16aとが設けられているストリップ線路型の積層誘電体フィルタにおいて、共振器内導体13a・13dの短絡端と開放端とが互い違いとなるインターデジタル型であり、隣接する共振器内導体13a・13dの短絡端近傍の共振器外導体12a・12a間を繋ぐ短絡端接続パターン17が埋設されたものが知られている(例えば、特許文献1を参照。)。これによれば、短絡端接続パターン17を形成する層の位置や、パターン幅などのパターン形状を変えることにより、通過帯域付近の任意の周波数に減衰極を設定し、急峻な減衰特性を得ることができるというものである。
特開平11−88009号公報
As a conventional filter device, as shown in an exploded perspective view in FIG. 11, a plurality of dielectric sheets 11a are laminated, bonded, and sintered and integrated into a dielectric chip 11, and a short-circuit end and an open end are provided. A plurality of resonator inner conductors 13 and inner insertion output electrodes 15b and 16b, which are arranged in an interdigital manner, are alternately embedded, and the resonator outer conductor 12a and external input / output electrodes are formed on the outer surface of the dielectric chip 11. In the strip line type multilayer dielectric filter provided with 15a and 16a, the inter-resonator conductors 13a and 13d are interdigital type in which the short-circuited end and the open end are alternated, and adjacent resonator inner conductors 13a A known example is one in which a short-circuit end connection pattern 17 that connects the resonator outer conductors 12a and 12a near the short-circuit end 13d is embedded (see, for example, Patent Document 1). According to this, by changing the position of the layer that forms the short-circuited end connection pattern 17 and the pattern shape such as the pattern width, an attenuation pole can be set at an arbitrary frequency near the passband and a steep attenuation characteristic can be obtained. It can be done.
JP 11-88009 A

近年、新しい通信手段として着目されているUWBは、10m程度の短い距離において広い周波数帯域を使用して大容量のデータ転送を実現するものであり、例えば米国FCC(Federal Communication Commission)の規定によると3.1〜10.6GHzという非常に広い周波数帯域を使用する計画となっている。そして、日本では、無線LANのIEEE802.11.aにおいて使用される5.15GHz〜5.25GHzを避ける形で、3.4GHz〜4.8GHz程度の帯域を使用するローバンドと、6.3GHz〜9.0GHz程度の帯域や7.25GHz〜10.25GHz程度の帯域を使用するハイバンドとに分割された規格が立案されている。このため、ハイバンド用のフィルタであれば、7.25GHz〜10.25GHz程度の広い帯域を使用して阻止域で減衰量が充分に確保された減衰特性が求められている。また、欧州では6.3GHz〜9.0GHz程度の帯域を使用するハイバンドの規格が立案されている。   In recent years, UWB, which has been attracting attention as a new communication means, realizes large-capacity data transfer using a wide frequency band over a short distance of about 10 m. For example, according to the provisions of the US FCC (Federal Communication Commission) It is planned to use a very wide frequency band of 3.1 to 10.6 GHz. In Japan, avoiding the 5.15 GHz to 5.25 GHz used in the wireless LAN IEEE802.11.a, a low band using a band of about 3.4 GHz to 4.8 GHz, a band of about 6.3 GHz to 9.0 GHz, A standard divided into a high band using a band of about 7.25 GHz to 10.25 GHz has been proposed. For this reason, a high-band filter is required to have an attenuation characteristic in which a wide band of about 7.25 GHz to 10.25 GHz is used and an attenuation is sufficiently ensured in the stop band. In Europe, a high-band standard using a band of about 6.3 GHz to 9.0 GHz has been drafted.

しかしながら、従来のフィルタ装置では、通過帯域よりも高域側に急峻に減衰する極を形成すると、この減衰極よりさらに高域側に不要な跳ね上がりのある減衰特性となってしまうという問題があった。   However, in the conventional filter device, there is a problem that if a pole that sharply attenuates to the higher frequency side than the pass band is formed, an attenuation characteristic with unnecessary jumping further to the higher frequency side than the attenuation pole is obtained. .

本発明は、上記問題点に鑑みて案出されたものであり、その目的は、通過帯域よりも高域側で不要な跳ね上がりのない優れた減衰特性を持つ、例えばUWB用にも用いることのできるフィルタ装置を提供することにある。   The present invention has been devised in view of the above-mentioned problems, and its purpose is to be used for, for example, UWB, which has an excellent attenuation characteristic without unnecessary jumping at a higher frequency side than the passband. It is providing the filter apparatus which can be performed.

本発明のフィルタ装置は、複数の誘電体層が積層されてなる積層体と、該積層体を挟んで対向するように配置された接地電極と、前記積層体内において電磁界結合するように横並びに整列され、それぞれ一方端が短絡端で他方端が開放端である複数の共振器電極と、前記積層体内において前記共振器電極が配置された前記誘電体層間とは異なる層間に形成され、初段の前記共振器電極に沿った形状で対向して電磁界結合するとともに、平面視で初段の前記共振器電極の前記開放端側に外部回路から電気信号が入力される電気信号入力点を有する入力結合電極と、前記積層体内において前記共振器電極が配置された前記誘電体層間とは異なる層間に形成され、最終段の前記共振器電極に沿った形状で対向して電磁界結合するとともに、平面視で最終段の前記共振器電極の前記開放端側に外部回路へ電気信号が出力される電気信号出力点を有する出力結合電極と、前記入力結合電極の端部の直上に設けられるとともに、該入力結合電極に電気的に接続された入力端子電極と、前記出力結合電極の端部の直上に設けられるとともに、該出力結合電極に電気的に接続された出力端子電極と、前記積層体内において前記入力結合電極および前記出力結合電極の少なくとも一方に電気的に接続されるとともに、前記入力端子電極および前記出力端子電極に直接接続されておらず、接地電位に接続された電極に対向して電磁界結合する補助結合電極とを備えることを特徴とするものである。
The filter device according to the present invention includes a stacked body in which a plurality of dielectric layers are stacked, a ground electrode disposed so as to face the stacked body, and a side-by-side so as to be electromagnetically coupled in the stacked body. A plurality of resonator electrodes, one end of which is a short-circuited end and the other end is an open end, and are formed in a layer different from the dielectric layer in which the resonator electrode is disposed in the stacked body. Input coupling having an electric signal input point where an electric signal is input from an external circuit to the open end side of the first-stage resonator electrode in a plan view while facing and electromagnetically coupling in a shape along the resonator electrode The electrode is formed in a layer different from the dielectric layer in which the resonator electrode is disposed in the stacked body, and is opposed to the electromagnetic field in a shape along the resonator electrode in the final stage, and in plan view. so And an output coupling electrode having an electrical signal output point electrical signal to an external circuit to the open end of the resonator electrodes of the last stage are output, together with the provided immediately above the end of the input coupling electrode, the input coupling An input terminal electrode electrically connected to the electrode; an output terminal electrode provided directly above the end of the output coupling electrode; and electrically connected to the output coupling electrode; and the input coupling in the stack. It is electrically connected to at least one of the electrode and the output coupling electrode, and is not directly connected to the input terminal electrode and the output terminal electrode, but is electromagnetically coupled to the electrode connected to the ground potential. And an auxiliary coupling electrode.

また、本発明のフィルタ装置は、上記構成において、前記共振器電極が配置された前記誘電体層間に、平面視で複数の前記共振器電極を取り囲むように形成された内部接地電極を備えることを特徴とするものである。   The filter device according to the present invention further includes an internal ground electrode formed so as to surround the plurality of resonator electrodes in a plan view between the dielectric layers where the resonator electrodes are arranged. It is a feature.

また、本発明のフィルタ装置は、上記各構成において、前記入力結合電極に接続された前記補助結合電極は前記誘電体層を挟んで初段の前記共振器電極と、前記出力結合電極に接続された前記補助結合電極は前記誘電体層を挟んで最終段の前記共振器電極と、対向してそれぞれ電磁界結合するように配置されていることを特徴とするものである。   In the filter device of the present invention, the auxiliary coupling electrode connected to the input coupling electrode is connected to the first-stage resonator electrode and the output coupling electrode with the dielectric layer interposed therebetween in each of the above configurations. The auxiliary coupling electrode is disposed so as to be opposed to the final-stage resonator electrode across the dielectric layer so as to be electromagnetically coupled to each other.

また、本発明のフィルタ装置は、上記各構成において、前記補助結合電極が前記内部接地電極と対向していることを特徴とするものである。   The filter device of the present invention is characterized in that, in each of the above-described configurations, the auxiliary coupling electrode is opposed to the internal ground electrode.

また、本発明のフィルタ装置は、上記各構成において、一端が前記誘電体層を挟んで初段の前記共振器電極の短絡端と対向し、他端が前記誘電体層を挟んで最終段の前記共振器電極の短絡端部と対向して配置され、これら一端および他端が対向している前記共振器電極の短絡端にそれぞれ電気的に接続された結合電極を有することを特徴とするものである。   The filter device according to the present invention may be configured such that, in each of the above configurations, one end faces the short-circuited end of the first-stage resonator electrode across the dielectric layer, and the other end sandwiches the dielectric layer. It has a coupling electrode that is disposed opposite to the short-circuited end of the resonator electrode and is electrically connected to the short-circuited end of the resonator electrode that is opposed to the one end and the other end of the resonator electrode. is there.

また、本発明のフィルタ装置は、上記各構成において、前記接地電極と前記共振器電極との間において前記誘電体層を挟んで前記接地電極と対向するとともに、複数の前記共振器電極の開放端にそれぞれ電気的に接続された複数の容量電極を有することを特徴とするものである。   In the filter device of the present invention, in each of the above configurations, the ground electrode is opposed to the ground electrode with the dielectric layer between the ground electrode and the resonator electrode, and the open ends of the plurality of resonator electrodes And a plurality of capacitive electrodes electrically connected to each other.

また、本発明のフィルタ装置は、上記構成において、前記容量電極の一部が前記誘電体層を挟んで前記内部接地電極と対向して電磁界結合するように配置されていることを特徴とするものである。   Further, the filter device of the present invention is characterized in that, in the above configuration, a part of the capacitive electrode is disposed so as to be electromagnetically coupled to face the internal ground electrode across the dielectric layer. Is.

また、本発明のフィルタ装置は、上記各構成において、前記誘電体層を挟んで初段の前記共振器電極に接続された前記容量電極と対向して電磁界結合し、前記入力結合電極に接続された入力結合補強電極、または、前記誘電体層を挟んで最終段の前記共振器電極に接続された前記容量電極と対向して電磁界結合し、前記出力結合電極に接続された出力結合補強電極を備えることを特徴とするものである。   In the filter device of the present invention, in each of the above-described configurations, the capacitor electrode connected to the first-stage resonator electrode across the dielectric layer is electromagnetically coupled to be connected to the input coupling electrode. The input coupling reinforcing electrode or the output coupling reinforcing electrode connected to the output coupling electrode by being electromagnetically coupled to the capacitive electrode connected to the resonator electrode at the final stage across the dielectric layer It is characterized by providing.

本発明のフィルタ装置によれば、初段の共振器電極に沿った形状で対向して電磁界結合するとともに、平面視で初段の共振器電極の開放端側に外部回路から電気信号が入力される電気信号入力点を有する入力結合電極と、最終段の共振器電極に沿った形状で対向して
電磁界結合するとともに、平面視で最終段の共振器電極の開放端側に外部回路へ電気信号が出力される電気信号出力点を有する出力結合電極とを備えることから、入力結合電極と初段の共振器電極との結合および出力結合電極と最終段の共振器電極との結合は、誘電体層を介してブロードサイドにインターデジタル型で結合するので、磁界による結合と電界による結合とが加算されてさらに強く電磁界結合することができ、従来の1/4波長共振器を利用したフィルタで実現可能だった領域を遙かに超えた広い通過帯域であっても、挿入損失が大きく増加することのない、広い通過帯域の全域に渡って平坦で低損失な通過特性を有するフィルタ装置を得ることができる。また、入力結合電極の端部の直上に設けられるとともに、入力結合電極に電気的に接続された入力端子電極と、出力結合電極の端部の直上に設けられるとともに、出力結合電極に電気的に接続された出力端子電極と、入力結合電極および出力結合電極の少なくとも一方に電気的に接続されるとともに、入力端子電極および出力端子電極に直接接続されておらず、接地電位に接続された電極に対向して電磁界結合する補助結合電極を備えることから、補助結合電極により入力結合電極および出力結合電極と接地電位に接続された電極とのC結合を調整することで、入力結合電極および出力結合電極の等価的な電気長を調整することができるので、入力結合電極または出力結合電極によるλ/2共振の減衰極を所望の周波数にシフトすることができ、シフトさせたλ/2共振の減衰極により、通過帯域の高域側の減衰極よりさらに高周波側に生じる不要な跳ね上がりを除去した優れた減衰特性を有するフィルタ装置とすることができる。
According to the filter device of the present invention, an electromagnetic signal is coupled to face each other in a shape along the first-stage resonator electrode, and an electric signal is input from an external circuit to the open end side of the first-stage resonator electrode in plan view. The input coupling electrode having an electrical signal input point is opposed to the electromagnetic coupling in a shape along the final-stage resonator electrode, and an electrical signal is sent to an external circuit on the open end side of the final-stage resonator electrode in plan view. Are provided with an output coupling electrode having an electrical signal output point from which the input coupling electrode and the first-stage resonator electrode are coupled, and the coupling between the output coupling electrode and the last-stage resonator electrode is a dielectric layer. Since it is coupled to the broadside via an interdigital type, the coupling by the magnetic field and the coupling by the electric field can be added to achieve a stronger electromagnetic coupling, which is realized by a filter using a conventional quarter wavelength resonator. OK It is possible to obtain a filter device having a flat and low-loss pass characteristic over the entire wide passband, in which the insertion loss does not increase greatly even in a wide passband far exceeding the range. it can. In addition, the input terminal electrode is provided directly above the end of the input coupling electrode, is electrically connected to the input coupling electrode, and is provided directly above the end of the output coupling electrode. The connected output terminal electrode is electrically connected to at least one of the input coupling electrode and the output coupling electrode, and is not directly connected to the input terminal electrode and the output terminal electrode. Since the auxiliary coupling electrode that opposes the electromagnetic field coupling is provided, the input coupling electrode and the output coupling are adjusted by adjusting the C coupling between the input coupling electrode and the output coupling electrode and the electrode connected to the ground potential by the auxiliary coupling electrode. Since the equivalent electrical length of the electrode can be adjusted, the attenuation pole of the λ / 2 resonance by the input coupling electrode or the output coupling electrode can be shifted to a desired frequency. By the shifted a lambda / 2 resonant attenuation pole may be a filter device having excellent damping properties to remove further unwanted jump occurs in the high-frequency side of the attenuation pole of the high-frequency side of the passband.

また、本発明のフィルタ装置によれば、共振器電極が配置された誘電体層間に、平面視で複数の共振器電極を取り囲むように形成された内部接地電極を備えるときには、内部接地電極が共振器電極の周囲を取り囲むことによって、共振器電極から発生する電磁波の周囲への漏洩を低減することができる。この効果は、モジュール基板の一部の領域に本発明のフィルタ装置が形成される場合に、モジュール基板の他の領域への悪影響を防止する上で特に有用である。   According to the filter device of the present invention, when the internal ground electrode formed so as to surround the plurality of resonator electrodes in a plan view is provided between the dielectric layers where the resonator electrodes are arranged, the internal ground electrode resonates. By surrounding the periphery of the resonator electrode, leakage of electromagnetic waves generated from the resonator electrode to the periphery can be reduced. This effect is particularly useful in preventing adverse effects on other areas of the module substrate when the filter device of the present invention is formed in a partial area of the module substrate.

また、本発明のフィルタ装置によれば、入力結合電極に接続された補助結合電極は誘電体層を挟んで初段の共振器電極と、出力結合電極に接続された補助結合電極は誘電体層を挟んで最終段の共振器電極と、対向してそれぞれ電磁界結合するように配置されているときには、入力結合電極または出力結合電極と共振器を構成する共振器電極とのC結合を強めることができるので、反射が低減されて広い通過帯域の全域に渡ってより平坦な通過特性を有するフィルタ装置を提供することができる。   Further, according to the filter device of the present invention, the auxiliary coupling electrode connected to the input coupling electrode has the first resonator electrode sandwiched between the dielectric layers, and the auxiliary coupling electrode connected to the output coupling electrode has the dielectric layer interposed therebetween. When arranged so as to be electromagnetically coupled to the resonator electrode at the final stage across the input, the C coupling between the input coupling electrode or the output coupling electrode and the resonator electrode constituting the resonator may be strengthened. Therefore, it is possible to provide a filter device that has a flatter pass characteristic over a wide passband with reduced reflection.

また、本発明のフィルタ装置によれば、一端が誘電体層を挟んで初段の共振器電極の短絡端と対向し、他端が誘電体層を挟んで最終段の共振器電極の短絡端部と対向して配置され、これら一端および他端が対向している共振器電極の短絡端にそれぞれ電気的に接続された結合電極を有するときには、結合の弱い初段の共振器電極と最終段の共振器電極との間の結合を強めることができるので、フィルタの通過帯域により近い位置の周波数(通過帯域の低域側または高域側)に減衰極を形成することができ、より急峻な減衰特性を有するフィルタ装置を提供することができる。   Further, according to the filter device of the present invention, one end is opposed to the short-circuited end of the first-stage resonator electrode with the dielectric layer interposed therebetween, and the other end is short-circuited end of the final-stage resonator electrode with the dielectric layer interposed therebetween. The first-stage resonator electrode and the final-stage resonance are weakly coupled when the coupling electrode is disposed opposite to each other and electrically connected to the short-circuited ends of the resonator electrodes whose one end and the other end are opposed to each other. Since the coupling between the filter electrode and the filter electrode can be strengthened, an attenuation pole can be formed at a frequency closer to the filter pass band (lower or higher passband side), resulting in steeper attenuation characteristics. Can be provided.

また、本発明のフィルタ装置によれば、補助結合電極が内部接地電極と対向するように配置されているときには、補助結合電極を入力結合電極および出力結合電極と同じ層に配置することが可能であるので、補助結合電極と入力結合電極および出力結合電極との電気的接続を行なうために、誘電体層を貫通する貫通導体を形成する必要がなく、印刷等によってより容易に位置精度よく補助結合電極を形成することができ、減衰特性のバラツキの小さいフィルタ装置とすることができる。   Further, according to the filter device of the present invention, when the auxiliary coupling electrode is arranged so as to face the internal ground electrode, the auxiliary coupling electrode can be arranged in the same layer as the input coupling electrode and the output coupling electrode. As a result, there is no need to form a through conductor that penetrates the dielectric layer in order to make electrical connection between the auxiliary coupling electrode, the input coupling electrode, and the output coupling electrode. An electrode can be formed, and a filter device with small variation in attenuation characteristics can be obtained.

また、本発明のフィルタ装置によれば、接地電極と共振器電極との間において誘電体層を挟んで接地電極と対向するとともに、複数の共振器電極の開放端にそれぞれ電気的に接続された複数の容量電極を有するときには、容量電極と接地電極との距離は共振器電極と接地電極との距離より短くなり、これにより共振器電極と接地電極との間の結合がより強くなり共振器電極のC結合が強化されるので、各共振器電極の長さを短縮することができ、より小型のフィルタ装置を提供することができる。   According to the filter device of the present invention, the ground electrode is opposed to the ground electrode with the dielectric layer interposed between the ground electrode and the resonator electrode, and electrically connected to the open ends of the plurality of resonator electrodes. When there are a plurality of capacitive electrodes, the distance between the capacitive electrode and the ground electrode is shorter than the distance between the resonator electrode and the ground electrode, which increases the coupling between the resonator electrode and the ground electrode. Therefore, the length of each resonator electrode can be shortened, and a smaller filter device can be provided.

また、本発明のフィルタ装置によれば、容量電極の一部が誘電体層を挟んで内部接地電極と対向して電磁界結合するように配置されているときには、内部接地電極は共振器電極が形成された誘電体層間と同じ誘電体層間に形成されており、容量電極を内部接地電極と結合させるように対向させると共振器電極と容量電極との電気的接続を行なう貫通導体等の配線長を短くすることができるので、この配線による不要なインダクタンスを減らすことができ、電極間の配線のインダクタンスによる副次的な共振のない優れたフィルタ特性を有するフィルタ装置とすることができる。   Further, according to the filter device of the present invention, when a part of the capacitance electrode is disposed so as to be electromagnetically coupled to the internal ground electrode across the dielectric layer, the internal ground electrode is the resonator electrode. It is formed between the same dielectric layers as the formed dielectric layers, and the wiring lengths of through conductors etc. that make electrical connection between the resonator electrode and the capacitive electrode when the capacitive electrode is opposed so as to be coupled with the internal ground electrode Therefore, it is possible to reduce unnecessary inductance due to this wiring, and it is possible to provide a filter device having excellent filter characteristics free from secondary resonance due to the wiring inductance between the electrodes.

また、本発明のフィルタ装置によれば、誘電体層を挟んで初段の共振器電極に接続された容量電極と対向して電磁界結合し、入力結合電極に接続された入力結合補強電極と、誘電体層を挟んで最終段の共振器電極に接続された容量電極と対向して電磁界結合し、出力結合電極に接続された出力結合補強電極とを備えるときには、初段の共振器電極に接続された容量電極と入力結合電極に接続された入力結合補強電極との間の電磁界結合が、初段の共振器電極と入力結合電極との間の電磁界結合に加算され、同様に、最終段の共振器電極に接続された容量電極と出力結合電極に接続された出力結合補強電極との間の電磁界結合が、最終段の共振器電極と出力結合電極との間の電磁界結合に加算されるので、入力結合電極と初段の共振器電極との間の電磁界結合、および出力結合電極と最終段の共振器電極との間の電磁界結合がさらに強まり、非常に広い通過帯域幅であっても、挿入損失の増加がさらに低減された、広い通過帯域の全域に渡ってより平坦でより低損失な通過特性を有するフィルタ装置を得ることができる。この効果は、容量電極を形成して共振器電極を短くすると、入力結合電極と初段の共振器電極とが重なる面積、および出力結合電極と最終段の共振器電極とが重なる面積が小さくなり、それぞれの間の電磁界結合が小さくなるので、このような場合に特に有用であり、小型で高性能のフィルタ装置を得ることができる。   In addition, according to the filter device of the present invention, the input coupling reinforcing electrode connected to the input coupling electrode is electromagnetically coupled opposite to the capacitor electrode connected to the first-stage resonator electrode across the dielectric layer, and When the dielectric layer is sandwiched between the capacitive electrode connected to the final-stage resonator electrode and electromagnetically coupled opposite to the capacitive electrode and connected to the output-coupled electrode, it is connected to the first-stage resonator electrode. The electromagnetic coupling between the capacitive electrode formed and the input coupling reinforcing electrode connected to the input coupling electrode is added to the electromagnetic coupling between the first-stage resonator electrode and the input coupling electrode. The electromagnetic coupling between the capacitive electrode connected to the resonator electrode and the output coupling reinforcing electrode connected to the output coupling electrode is added to the electromagnetic coupling between the final-stage resonator electrode and the output coupling electrode. Between the input coupling electrode and the first-stage resonator electrode. EM coupling, and the coupling between the output coupling electrode and the final-stage resonator electrode is further strengthened, and the increase in insertion loss is further reduced even with a very wide pass bandwidth. It is possible to obtain a filter device that has a flatter and lower-loss pass characteristic over the entire band. This effect is that when the capacitor electrode is formed and the resonator electrode is shortened, the area where the input coupling electrode and the first stage resonator electrode overlap, and the area where the output coupling electrode and the last stage resonator electrode overlap, are reduced. Since the electromagnetic coupling between them becomes small, it is particularly useful in such a case, and a small and high-performance filter device can be obtained.

本発明のフィルタ装置の実施の形態の例について以下に詳細に説明する。図1〜図5、図7および図8はそれぞれ本発明のフィルタ装置の実施の形態の一例を示す分解斜視図である。また、図6は図5のフィルタ装置のA−A線における断面の一部を示す断面図である。図1〜8において、1aは誘電体層、1は誘電体層1aが積層されてなる積層体、2aは接地電極、2bは内部接地電極、3a〜3dは共振器電極、3aは初段の共振器電極、3cは最終段の共振器電極、4は入力結合電極、4aは入力端子電極、4bは入力結合補強電極、5は出力結合電極、5aは出力端子電極、5bは出力結合補強電極、6は補助結合電極、7は結合電極、8は容量電極である。また、破線は誘電体層1aの上下に位置する導体層(例えば共振器3aと入力結合電極4)を電気的に接続するための誘電体層1aを貫通する貫通導体があることを示している。   Examples of embodiments of the filter device of the present invention will be described in detail below. 1 to 5, 7, and 8 are exploded perspective views showing examples of embodiments of the filter device of the present invention. 6 is a cross-sectional view showing a part of a cross section taken along line AA of the filter device of FIG. 1-8, 1a is a dielectric layer, 1 is a laminate formed by laminating a dielectric layer 1a, 2a is a ground electrode, 2b is an internal ground electrode, 3a to 3d are resonator electrodes, and 3a is a first stage resonance. 3c is the final stage resonator electrode, 4 is the input coupling electrode, 4a is the input terminal electrode, 4b is the input coupling reinforcing electrode, 5 is the output coupling electrode, 5a is the output terminal electrode, 5b is the output coupling reinforcing electrode, 6 is an auxiliary coupling electrode, 7 is a coupling electrode, and 8 is a capacitive electrode. The broken line indicates that there is a through conductor that penetrates the dielectric layer 1a for electrically connecting the conductor layers (for example, the resonator 3a and the input coupling electrode 4) located above and below the dielectric layer 1a. .

図1〜図3に示す例では、本発明のフィルタ装置は、積層体1の外表面に形成された入力端子電極4aに外部回路から入力された電気信号は、電気信号入力点から入力結合電極4へ伝達され、主に、入力結合電極4と電磁界結合した初段の共振器電極3aへ、さらに電磁結合により最終段の共振器電極3cへ伝達され、最終段の共振器電極3cと電磁結合された出力結合電極5を介して出力端子電極5aへと伝達されてフィルタとして機能する。   In the example shown in FIGS. 1 to 3, the filter device of the present invention is such that an electric signal input from an external circuit to an input terminal electrode 4 a formed on the outer surface of the laminate 1 is input from an electric signal input point to an input coupling electrode. 4 is transmitted to the first-stage resonator electrode 3a electromagnetically coupled to the input coupling electrode 4 and further to the final-stage resonator electrode 3c by electromagnetic coupling, and is electromagnetically coupled to the final-stage resonator electrode 3c. The output coupling electrode 5 is transmitted to the output terminal electrode 5a to function as a filter.

本発明のフィルタ装置は、複数の誘電体層1aが積層されてなる積層体1と、この積層体1を挟んで対向するように配置された接地電極2a・2aと、積層体1内において電磁界結合するように横並びに整列され、それぞれ一方端が短絡端で他方端が開放端である複数の共振器電極3a〜3cと、積層体1内において共振器電極3a〜3cが配置された誘電体層1a・1a間とは異なる層間に形成され、初段の共振器電極3aに沿った形状で対向して電磁界結合するとともに、平面視で初段の共振器電極3aの開放端側に外部回路からの電気信号が入力される電気信号入力点を有する入力結合電極4と、積層体内において共振器電極3a〜3cが配置された誘電体層1a・1a間とは異なる層間に形成され、最終段の共振器電極3cに沿った形状で対向して電磁界結合するとともに、平面視で最終段の共振器電極3cの開放端側に外部回路へ電気信号が出力される電気信号出力点を有する出力結合電極5と、積層体1内において入力結合電極4および出力結合電極5の少なくとも一方に電気的に接続されるとともに、接地電位に接続された電極に対向して電磁界結合する補助結合電極6とを備えることを特徴とするものである。   The filter device of the present invention includes a laminate 1 in which a plurality of dielectric layers 1 a are laminated, ground electrodes 2 a and 2 a arranged so as to face each other with the laminate 1 interposed therebetween, and electromagnetic waves in the laminate 1. Dielectrics in which a plurality of resonator electrodes 3a to 3c are arranged side by side so as to be coupled to each other, one end is a short-circuited end and the other end is an open end, and the resonator electrodes 3a to 3c are disposed in the laminate 1 Formed between layers different from between the body layers 1a and 1a, and opposingly electromagnetically coupled in a shape along the first-stage resonator electrode 3a, and an external circuit on the open end side of the first-stage resonator electrode 3a in plan view The input coupling electrode 4 having an electric signal input point to which an electric signal from the input signal is input and the dielectric layers 1a and 1a in which the resonator electrodes 3a to 3c are arranged in the laminate are formed between different layers, and the final stage Along the resonator electrode 3c of An output coupling electrode 5 having an electric signal output point at which an electric signal is output to an external circuit on the open end side of the final-stage resonator electrode 3c in a plan view, and the laminated body 1 And an auxiliary coupling electrode 6 that is electrically connected to at least one of the input coupling electrode 4 and the output coupling electrode 5 and electromagnetically couples to the electrode connected to the ground potential. Is.

本発明のフィルタ装置によれば、このような構成としたことから、入力結合電極4と初段の共振器電極3aとの結合および出力結合電極5と最終段の共振器電極3cとの結合は、誘電体層1aを介してブロードサイドにインターデジタル型で結合するので、磁界による結合と電界による結合とが加算されてさらに強く電磁界結合することができ、従来の1/4波長共振器を利用したフィルタで実現可能だった領域を遙かに超えた広い通過帯域であっても、挿入損失が大きく増加することのない、広い通過帯域の全域に渡って平坦で低損失な通過特性を有するフィルタ装置を得ることができる。また、入力結合電極4または出力結合電極5によるλ/2共振の減衰極が不要な跳ね上がりの発生する周波数より高周波側に位置する場合に、補助結合電極6により入力結合電極4および出力結合電極5と接地電位に接続された電極とのC結合の量を増加させて、入力結合電極4および出力結合電極5の等価的な電気長を長くすることができるので、入力結合電極4および出力結合電極5によるλ/2共振の減衰極を低周波側にシフトすることができる。そして、このC結合の量を調整することで等価的な電気長を調整して、入力結合電極4および出力結合電極5によるλ/2共振の減衰極を跳ね上がりの発生する周波数の近傍にシフトすることにより、不要な跳ね上がりを除去した優れた減衰特性を有するフィルタ装置とすることができる。   According to the filter device of the present invention, because of such a configuration, the coupling between the input coupling electrode 4 and the first-stage resonator electrode 3a and the coupling between the output coupling electrode 5 and the last-stage resonator electrode 3c are as follows. Since it is coupled to the broad side via the dielectric layer 1a in an interdigital manner, the coupling by the magnetic field and the coupling by the electric field can be added to achieve stronger electromagnetic coupling, and a conventional quarter wavelength resonator is used. A filter that has a flat and low-loss pass characteristic over the entire wide passband, with no significant increase in insertion loss, even in a wide passband that far exceeds the range that could be achieved with a special filter. A device can be obtained. Further, when the attenuation pole of λ / 2 resonance by the input coupling electrode 4 or the output coupling electrode 5 is located on the higher frequency side than the frequency at which unnecessary jump occurs, the auxiliary coupling electrode 6 causes the input coupling electrode 4 and the output coupling electrode 5 to be Since the equivalent electrical length of the input coupling electrode 4 and the output coupling electrode 5 can be increased by increasing the amount of C coupling between the electrode and the electrode connected to the ground potential, the input coupling electrode 4 and the output coupling electrode 5 can shift the attenuation pole of λ / 2 resonance to the low frequency side. The equivalent electrical length is adjusted by adjusting the amount of C coupling, and the λ / 2 resonance attenuation pole by the input coupling electrode 4 and the output coupling electrode 5 is shifted to the vicinity of the frequency at which the jump occurs. Thus, it is possible to obtain a filter device having an excellent attenuation characteristic from which unnecessary jumping is removed.

本発明のフィルタ装置は、図3に示す例のように、上記構成において、共振器電極3a〜3cが配置された誘電体層間1a・1a間に、平面視で複数の共振器電極3a〜3cを取り囲むように形成された内部接地電極2bを備えることが好ましい。このように内部接地電極2bが共振器電極3a〜3cを取り囲むことによって、共振器電極3a〜3cから発生する電磁波の周囲への漏洩を低減することができる。この効果は、モジュール基板の一部の領域に本発明のフィルタ装置が形成される場合に、モジュール基板の他の領域への悪影響を防止する上で特に有用である。   As shown in the example shown in FIG. 3, the filter device of the present invention has a plurality of resonator electrodes 3 a to 3 c in a plan view between the dielectric layers 1 a and 1 a where the resonator electrodes 3 a to 3 c are arranged. It is preferable to include an internal ground electrode 2b formed so as to surround. As described above, the internal ground electrode 2b surrounds the resonator electrodes 3a to 3c, thereby reducing leakage of electromagnetic waves generated from the resonator electrodes 3a to 3c to the periphery. This effect is particularly useful in preventing adverse effects on other areas of the module substrate when the filter device of the present invention is formed in a partial area of the module substrate.

また、本発明のフィルタ装置は、図2に示す例のように、上記各構成において、入力結合電極4に接続された補助結合電極6は誘電体層1aを挟んで初段の共振器電極3aと、出力結合電極5に接続された補助結合電極6は誘電体層1aを挟んで最終段の共振器電極3cと、それぞれ対向して電磁界結合するように配置されていることが好ましい。このような構成としたときは、所望の周波数における不要な跳ね上がりを除去した優れた減衰特性を有することに加え、入力結合電極4または出力結合電極5と共振器を構成する共振器電極3a,3cとのC結合を強化することができるので、反射特性が低減されて広い通過帯域の全域に渡ってより平坦な通過特性を有するフィルタ装置を提供することができる。   Further, in the filter device of the present invention, as in the example shown in FIG. 2, in each of the above configurations, the auxiliary coupling electrode 6 connected to the input coupling electrode 4 is connected to the first-stage resonator electrode 3a with the dielectric layer 1a interposed therebetween. The auxiliary coupling electrode 6 connected to the output coupling electrode 5 is preferably disposed so as to be electromagnetically coupled to the final-stage resonator electrode 3c across the dielectric layer 1a. In such a configuration, the resonator electrode 3a, 3c that forms a resonator with the input coupling electrode 4 or the output coupling electrode 5 in addition to having an excellent attenuation characteristic that eliminates unnecessary jumping at a desired frequency. Therefore, it is possible to provide a filter device having a flatter pass characteristic over the entire wide passband with reduced reflection characteristics.

また、本発明のフィルタ装置は、上記各構成において、補助結合電極6が内部接地電極2bと対向しているときには、補助結合電極6を入力結合電極および出力結合電極と同じ層に配置することが可能であるので、補助結合電極6と入力結合電極4および出力結合電極5との電気的接続を行なうために、誘電体層1aを貫通する貫通導体を形成する必要がなく、印刷等によってより容易に位置精度よく補助結合電極6を形成することができ、減衰特性のバラツキの小さいフィルタ装置とすることができる。   In the filter device of the present invention, when the auxiliary coupling electrode 6 faces the internal ground electrode 2b in each of the above configurations, the auxiliary coupling electrode 6 may be disposed in the same layer as the input coupling electrode and the output coupling electrode. Since it is possible, it is not necessary to form a through conductor penetrating the dielectric layer 1a in order to electrically connect the auxiliary coupling electrode 6, the input coupling electrode 4 and the output coupling electrode 5, and it is easier by printing or the like. Thus, the auxiliary coupling electrode 6 can be formed with high positional accuracy, and a filter device with little variation in attenuation characteristics can be obtained.

また、本発明のフィルタ装置は、図4および図5に示す例のように、上記各構成において、一端が誘電体層1aを挟んで初段の共振器電極3aの短絡端と対向し、他端が誘電体層1aを挟んで最終段の共振器電極3cの短絡端部と対向して配置され、これら一端および他端が対向している共振器電極3a・3cの短絡端にそれぞれ電気的に接続された結合電極7を有することが好ましい。このような構成としたときには、結合の弱い初段の共振器電極3aと最終段の共振器電極3cとの間の結合を強めることができるので、フィルタの通過帯域により近い位置の周波数(通過帯域の低域側または高域側)に減衰極を形成することができ、より急峻な減衰特性を有するフィルタ装置を提供することができる。   Further, as in the examples shown in FIGS. 4 and 5, the filter device of the present invention has one end opposed to the short-circuited end of the first-stage resonator electrode 3a with the dielectric layer 1a interposed therebetween, and the other end in each configuration described above. Is disposed opposite to the short-circuited end of the resonator electrode 3c in the final stage with the dielectric layer 1a interposed therebetween, and electrically connected to the short-circuited ends of the resonator electrodes 3a and 3c with one end and the other end facing each other. It is preferable to have a coupled electrode 7 connected. In such a configuration, since the coupling between the first-stage resonator electrode 3a and the last-stage resonator electrode 3c, which are weakly coupled, can be strengthened, the frequency closer to the passband of the filter (the passband An attenuation pole can be formed on the low frequency side or the high frequency side, and a filter device having a steeper attenuation characteristic can be provided.

また、本発明のフィルタ装置は、図4および図5に示す例のように、接地電極2aと共振器電極3a,3b,3c,3dとの間において誘電体層1aを挟んで接地電極2aと対向するとともに、複数の共振器電極3a,3b,3c,3dの開放端にそれぞれ電気的に接続された複数の容量電極8を有することが好ましい。このような構成としたときには、容量電極8と接地電極2aとの距離は共振器電極3a,3b,3c,3d,3eと接地電極2aとの距離より短く、これにより共振器電極3a,3b,3c,3d,3eと接地電極2aとの間の結合がより強くなって共振器電極3a,3b,3c,3d,3eと接地電極2aとのC結合が強化されるので、各共振器電極3a,3b,3c,3d,3eの長さを短縮することができ、より小型なフィルタ装置を提供することができる。   Further, as in the example shown in FIGS. 4 and 5, the filter device of the present invention includes a ground electrode 2a sandwiching a dielectric layer 1a between the ground electrode 2a and the resonator electrodes 3a, 3b, 3c, 3d. It is preferable to have a plurality of capacitive electrodes 8 that face each other and are electrically connected to the open ends of the plurality of resonator electrodes 3a, 3b, 3c, 3d, respectively. In such a configuration, the distance between the capacitive electrode 8 and the ground electrode 2a is shorter than the distance between the resonator electrodes 3a, 3b, 3c, 3d, and 3e and the ground electrode 2a, whereby the resonator electrodes 3a, 3b, Since the coupling between 3c, 3d, 3e and the ground electrode 2a becomes stronger and the C coupling between the resonator electrodes 3a, 3b, 3c, 3d, 3e and the ground electrode 2a is strengthened, each resonator electrode 3a , 3b, 3c, 3d, 3e can be shortened, and a smaller filter device can be provided.

また、本発明のフィルタ装置は、図5および図6に示す例のように、上記構成において、容量電極8の一部が誘電体層1aを挟んで内部接地電極2bと対向して電磁界結合するように配置されているのが好ましい。内部接地電極2bは、図5に示す例のように、通常、共振器電極3a〜3dが形成された誘電体層1a・1a間と同じ誘電体層1a・1a間に形成されており、容量電極8を内部接地電極2bと結合させるように対向させると、容量電極8を接地電極2aのみと結合させるように対向させた場合(図6に破線で示した容量電極8aの場合)と比較して、共振器電極3a〜3dと容量電極8との電気的接続を行なう貫通導体等の配線長を短くすることができるので、この配線による不要なインダクタンスを減らすことができ、電極間の配線のインダクタンスによる副次的な共振のない優れたフィルタ特性を有するフィルタ装置とすることができる。また、共振器電極3a〜3dと容量電極8との電気的接続を行なう貫通導体等の配線長が同じ場合であっても、容量電極8と内部接地電極2bとの間の静電容量が加わるので、共振器電極3a〜3dの開放端と接地電位との間の静電容量がさらに増加し、共振器電極3a〜3dの長さを短縮することができるので、より小型のバンドパスフィルタとしてのフィルタ装置を得ることができる。   Further, in the filter device of the present invention, as in the example shown in FIGS. 5 and 6, in the above configuration, a part of the capacitive electrode 8 is opposed to the internal ground electrode 2b with the dielectric layer 1a interposed therebetween, and is electromagnetically coupled. It is preferable to arrange so as to. As in the example shown in FIG. 5, the internal ground electrode 2b is normally formed between the dielectric layers 1a and 1a that are the same as the dielectric layers 1a and 1a on which the resonator electrodes 3a to 3d are formed. When the electrode 8 is opposed so as to be coupled to the internal ground electrode 2b, it is compared with the case where the capacitor electrode 8 is opposed so as to be coupled only to the ground electrode 2a (in the case of the capacitor electrode 8a shown by the broken line in FIG. 6). As a result, the wiring length of a through conductor or the like for electrical connection between the resonator electrodes 3a to 3d and the capacitor electrode 8 can be shortened, so that unnecessary inductance due to this wiring can be reduced, and the wiring between the electrodes can be reduced. A filter device having excellent filter characteristics free from secondary resonance due to inductance can be obtained. In addition, even when the wiring length of the through conductor or the like for electrical connection between the resonator electrodes 3a to 3d and the capacitive electrode 8 is the same, electrostatic capacitance is added between the capacitive electrode 8 and the internal ground electrode 2b. Therefore, the capacitance between the open ends of the resonator electrodes 3a to 3d and the ground potential is further increased, and the length of the resonator electrodes 3a to 3d can be shortened. The filter device can be obtained.

また、本発明のフィルタ装置は、図7および図8に示す例のように、上記各構成において、誘電体層1aを挟んで初段の共振器電極3aに接続された容量電極8と対向して電磁界結合し、入力結合電極4に接続された入力結合補強電極4b、または、誘電体層1aを挟んで最終段の共振器電極3cに接続された容量電極8と対向して電磁界結合し、出力結合電極5に接続された出力結合補強電極5bを備えることが好ましい。初段の共振器電極3aに接続された容量電極8と入力結合電極4に接続された入力結合補強電極4bとの間の電磁界結合が、初段の共振器電極3aと入力結合電極4との間の電磁界結合に加算され、同様に、最終段の共振器電極3cに接続された容量電極8と出力結合電極5に接続された出力結合補強電極5bとの間の電磁界結合が、最終段の共振器電極3cと出力結合電極5との間の電磁界結合に加算されるので、入力結合電極4と初段の共振器電極3aとの間の電磁界結合、および出力結合電極5と最終段の共振器電極3cとの間の電磁界結合がさらに強まり、非常に広い通過帯域幅であっても、挿入損失の増加がさらに低減された、広い通過帯域の全域に渡ってより平坦でより低損失な通過特性を有するフィルタ装置を得ることができる。また、入力結合電極4と初段の共振器電極3aとの間の電磁界結合、および出力結合電極5と最終段の共振器電極3cとの間の電磁界結合がさらに強まる分だけ、共振器電極3a〜3dを短くすることもできるので、小型のフィルタ装置を得ることができる。   Further, as in the examples shown in FIGS. 7 and 8, the filter device of the present invention is opposed to the capacitor electrode 8 connected to the first-stage resonator electrode 3a with the dielectric layer 1a interposed therebetween in each of the above configurations. The electromagnetic coupling is performed so as to oppose the input coupling reinforcing electrode 4b connected to the input coupling electrode 4 or the capacitive electrode 8 connected to the resonator electrode 3c at the final stage across the dielectric layer 1a. The output coupling reinforcing electrode 5b connected to the output coupling electrode 5 is preferably provided. The electromagnetic coupling between the capacitive electrode 8 connected to the first stage resonator electrode 3a and the input coupling reinforcing electrode 4b connected to the input coupling electrode 4 is between the first stage resonator electrode 3a and the input coupling electrode 4. Similarly, the electromagnetic field coupling between the capacitive electrode 8 connected to the resonator electrode 3c at the final stage and the output coupling reinforcing electrode 5b connected to the output coupling electrode 5 is performed in the final stage. Is added to the electromagnetic field coupling between the resonator electrode 3c and the output coupling electrode 5, so that the electromagnetic coupling between the input coupling electrode 4 and the first stage resonator electrode 3a, and the output coupling electrode 5 and the last stage The electromagnetic coupling with the resonator electrode 3c is further strengthened, and even with a very wide passband width, the increase in insertion loss is further reduced, flatter and lower across the wide passband. A filter device with lossy pass characteristics can be obtained. . Further, the resonator electrode is further increased by the electromagnetic field coupling between the input coupling electrode 4 and the first stage resonator electrode 3a and the electromagnetic field coupling between the output coupling electrode 5 and the last stage resonator electrode 3c. Since 3a-3d can also be shortened, a small filter apparatus can be obtained.

接地電極2a・2aは、誘電体層1aが積層された積層体1の上下面に、入力端子電極4aおよび出力端子電極5aの周囲を除いたほぼ全面に配置されており、接地電位に接続されている。   The ground electrodes 2a and 2a are arranged on almost the entire surface excluding the periphery of the input terminal electrode 4a and the output terminal electrode 5a on the upper and lower surfaces of the laminate 1 in which the dielectric layers 1a are laminated, and are connected to the ground potential. ing.

共振器電極3a,3b,3c,3dは、積層体1の1つの層間に横並びに配置されて相互に電磁界結合(エッジ結合)している。隣り合う共振器電極3a,3b,3c,3d,3e同士の間隔は小さい方が強い結合が得られ、容易に通過帯域を広くできるので好ましいが、短絡端から開放端の間において互いに短絡しないようにして等間隔に良好に形成するには、例えば、0.05〜0.5mm程度に設定される。横並びに配置されて相互に電磁界結合するためには、共振器電極3a,3b,3c,3dの形状は細長い帯状のものであるのが好ましい。共振器電極3a〜3eは、積層体1内において互いに電磁界結合するように平面視で横並びに整列されていればよい。通常は、例えば図1に示す例のように、4つの共振器電極3a〜3dが1つの誘電体層1a・1a間に配置されるが、共振器電極3a,3cを1つの誘電体層1a・1a間に配置し、共振器電極3b,3dを誘電体層1aを1層介した別の誘電体層1a・1a間に配置してもよい。このように配置すると、隣り合う共振器電極間における短絡がないのでその形成は容易になるので好ましいが、誘電体層1aの層数が増加してフィルタ装置の厚みは厚いものとなる。   The resonator electrodes 3a, 3b, 3c, 3d are arranged side by side between one layer of the multilayer body 1 and are electromagnetically coupled (edge coupled) to each other. It is preferable that the distance between the adjacent resonator electrodes 3a, 3b, 3c, 3d, and 3e is small because strong coupling can be obtained and the pass band can be easily widened. For example, the thickness is set to about 0.05 to 0.5 mm in order to satisfactorily form at regular intervals. The resonator electrodes 3a, 3b, 3c, and 3d are preferably formed in an elongated strip shape so that they are arranged side by side and are electromagnetically coupled to each other. The resonator electrodes 3a to 3e may be aligned side by side in a plan view so as to be electromagnetically coupled to each other in the multilayer body 1. Usually, as in the example shown in FIG. 1, for example, the four resonator electrodes 3a to 3d are arranged between one dielectric layer 1a and 1a, but the resonator electrodes 3a and 3c are arranged in one dielectric layer 1a. The resonator electrodes 3b and 3d may be disposed between the other dielectric layers 1a and 1a with one dielectric layer 1a interposed therebetween. This arrangement is preferable because there is no short circuit between adjacent resonator electrodes and the formation thereof is facilitated. However, the number of dielectric layers 1a is increased and the thickness of the filter device is increased.

図1〜図4、図7および図8に示す例のように、共振器電極3a〜3dをインターデジタル型に配置したときには、共振器電極3a〜3d間の結合は磁界による結合と電界による結合とが加算されることにより、各共振器電極3a〜3d間においてより強い結合が生じることによって、それぞれの共振モードにおける共振周波数の間の周波数間隔を、従来の1/4波長共振器を利用したフィルタで実現可能だった帯域を超えて調整することができ、広帯域な通過帯域を有するフィルタ装置とすることができる。また、インターデジタル型に配置された共振器電極3a〜3d間の結合は強い磁界結合となり、共振器電極3a〜3dのパターン幅を小さくして磁界を強める必要がないので、共振器電極3a〜3dのパターン幅を大きくすることによって共振器電極3a〜3dの電気抵抗を小さくし、共振器の急峻性共振の鋭さを示すQ値(quality factor)を高くすることができる。その結果として、広い通過帯域を有し急峻な減衰特性を有する、例えばUWB用途のバンドパスフィルタに適したフィルタ装置とすることができる。   When the resonator electrodes 3a to 3d are arranged in an interdigital manner as in the examples shown in FIGS. 1 to 4, 7 and 8, the coupling between the resonator electrodes 3a to 3d is coupled by a magnetic field and by an electric field. Are added to each other so that stronger coupling occurs between the resonator electrodes 3a to 3d, and the frequency interval between the resonance frequencies in the respective resonance modes is used by using a conventional quarter wavelength resonator. The filter device can be adjusted beyond the band that can be realized by the filter, and a filter device having a wide passband can be obtained. Further, the coupling between the resonator electrodes 3a to 3d arranged in the interdigital type is a strong magnetic field coupling, and it is not necessary to reduce the pattern width of the resonator electrodes 3a to 3d to increase the magnetic field. By increasing the pattern width of 3d, the electrical resistance of the resonator electrodes 3a to 3d can be reduced, and the Q value (quality factor) indicating the sharpness of the sharp resonance of the resonator can be increased. As a result, a filter device having a wide passband and a steep attenuation characteristic, for example, suitable for a bandpass filter for UWB applications can be obtained.

また、図5に示す例のように、共振器電極3a〜3dをコムライン型に配置したときは、インターデジタル型と比べて共振器電極3a〜3d間の結合が弱いことから、通過帯域が狭く急峻な特性が得られ、また各共振器電極3a〜3dのパターン幅を小さくできることによって小型化できるため、携帯電話用や無線LAN等の比較的小型の無線機器に適したフィルタ装置となる。   In addition, when the resonator electrodes 3a to 3d are arranged in the comb line type as in the example shown in FIG. 5, the coupling between the resonator electrodes 3a to 3d is weaker than that of the interdigital type. Since narrow and steep characteristics can be obtained and the pattern width of each of the resonator electrodes 3a to 3d can be reduced, the size can be reduced. Therefore, the filter device is suitable for relatively small wireless devices such as mobile phones and wireless LANs.

接地電極2a・2aは、誘電体層1aが積層された積層体1の上下面に、入力端子電極4aおよび出力端子電極5aの周囲を除いたほぼ全面に配置されており、接地電位に接続されている。
The ground electrodes 2a and 2a are arranged on almost the entire surface excluding the periphery of the input terminal electrode 4a and the output terminal electrode 5a on the upper and lower surfaces of the laminate 1 in which the dielectric layers 1a are laminated, and are connected to the ground potential. ing.

共振器電極3a,3b,3c,3dは、上下の接地電極2a・2aと共にストリップライン共振器を構成しており、短絡端が上下の接地電極2a・2aに接続されて接地電位に接続されることによって1/4波長共振器として機能する。共振器電極3a,3b,3c,3d,3eと上下の接地電極2a・2aとの接続は、図1に示す例のように、共振器電極3a〜3dを形成した層間に共振器電極3a,3b,3c,3dの短絡端同士を接続するための導体層を設け、この導体層と貫通導体(図示せず。)とにより接続したり、この導体層を誘電体層1aの端部まで延ばして誘電体層1aの端面(積層体1の側面)に形成した端面導体(図示せず。)により接続したりすればよい。共振器電極3a,3b,3c,3dの短絡端同士を接続するための導体層を設けない場合は、共振器電極3a,3b,3c,3dのそれぞれを貫通導体により接地電極2a・2aに接続してもよいし、共振器電極3a〜3dの短絡端を誘電体層1aの端部まで延ばして誘電体層1aの端面(積層体1の側面)に形成した端面導体によって接地電極2a・2aに接続してもよい。端面導体で接続すると、共振器電極3a〜3dから発生する電磁波の周囲への漏洩を低減するシールド層として端面導体を機能させることができ、貫通導体の場合でも、その間隔を小さくしたり、共振器電極3a〜3dの周りに二重以上に配列し、側面から見てできるだけ貫通導体を隙間なく配置したりすれば、同様にシールドの機能がより顕著になるので好ましい。図1に示す例のように、共振器電極3a,3b,3c,3dの短絡端同士を接続するための導体層を設けると、共振器電極3a,3b,3c,3dの短絡端を接地電極2a・2aに接続するのが容易となるので好ましい。   The resonator electrodes 3a, 3b, 3c, and 3d form a stripline resonator together with the upper and lower ground electrodes 2a and 2a, and the short-circuit ends are connected to the upper and lower ground electrodes 2a and 2a and connected to the ground potential. This functions as a quarter wavelength resonator. The connection between the resonator electrodes 3a, 3b, 3c, 3d, and 3e and the upper and lower ground electrodes 2a and 2a is performed between the resonator electrodes 3a and 3a formed between the layers where the resonator electrodes 3a to 3d are formed as shown in FIG. A conductor layer for connecting the short-circuited ends of 3b, 3c, and 3d is provided, and this conductor layer is connected to a through conductor (not shown), or this conductor layer is extended to the end of the dielectric layer 1a. The connection may be made by an end face conductor (not shown) formed on the end face of the dielectric layer 1a (side face of the multilayer body 1). When the conductor layer for connecting the short-circuit ends of the resonator electrodes 3a, 3b, 3c, and 3d is not provided, the resonator electrodes 3a, 3b, 3c, and 3d are connected to the ground electrodes 2a and 2a through the through conductors. Alternatively, the short-circuit ends of the resonator electrodes 3a to 3d may be extended to the end portion of the dielectric layer 1a, and the ground electrodes 2a and 2a may be formed by the end surface conductor formed on the end surface of the dielectric layer 1a (side surface of the multilayer body 1). You may connect to. When connected by an end face conductor, the end face conductor can function as a shield layer that reduces leakage of electromagnetic waves generated from the resonator electrodes 3a to 3d to the surroundings. It is preferable to arrange the electrode conductors 3a to 3d in a double or more manner around the electrodes 3a to 3d and arrange the through conductors as far as possible as viewed from the side surface, because the function of the shield becomes more remarkable. When the conductor layer for connecting the short-circuit ends of the resonator electrodes 3a, 3b, 3c, 3d is provided as in the example shown in FIG. 1, the short-circuit ends of the resonator electrodes 3a, 3b, 3c, 3d are connected to the ground electrode. Since it becomes easy to connect to 2a * 2a, it is preferable.

内部接地電極2bは、上述した共振器電極3a,3b,3c,3dの短絡端同士を接続するための導体層と共振器電極3a,3b,3c,3dの並びの両側に形成された導体層とからなる環状のものである。接地電極2aと共振器電極3a,3b,3c,3dとの接続を、内部接地電極2bの共振器電極3a,3b,3c,3dの並びの両側に位置する部分でも行なえば、共振器電極3a〜3dから発生する電磁波の周囲への漏洩をより効果的に低減することができる。   The internal ground electrode 2b includes a conductor layer for connecting the short-circuit ends of the resonator electrodes 3a, 3b, 3c, and 3d and a conductor layer formed on both sides of the array of the resonator electrodes 3a, 3b, 3c, and 3d. It is a circular thing consisting of. If the connection between the ground electrode 2a and the resonator electrodes 3a, 3b, 3c, 3d is also performed at the portions of the internal ground electrode 2b located on both sides of the array of the resonator electrodes 3a, 3b, 3c, 3d, the resonator electrode 3a Leakage of electromagnetic waves generated from ˜3d to the surroundings can be reduced more effectively.

共振器電極3は、図1〜図3、図7および図8に示す例では3つ(3a〜3c)設けられているが、例えば図4および図5に示す例のように4つの共振器電極3(3a〜3d)を設けてもよいし、またはそれ以上の個数で設けてもよく、損失が大きくならない程度の個数であればよい。UWBのローバンド用途では、損失と減衰特性のバランスから4つが好ましい。   In the example shown in FIGS. 1 to 3, 7, and 8, three resonator electrodes 3 (3 a to 3 c) are provided. For example, as shown in FIGS. 4 and 5, four resonator electrodes 3 are provided. The electrodes 3 (3a to 3d) may be provided, or may be provided in a larger number as long as the loss does not increase. For UWB low-band applications, four are preferred from the balance of loss and attenuation characteristics.

入力結合電極4および出力結合電極5は、それぞれ初段の共振器電極3aおよび最終段の共振器電極3cと電磁界結合するものであるので、それぞれ初段の共振器電極3aおよび最終段の共振器電極3cに沿った形状である。上述したように、共振器電極3a〜3cの形状は細長い帯状とするのが好ましいので、入力結合電極4および出力結合電極5の形状も細長い帯状とするのが好ましい。   Since the input coupling electrode 4 and the output coupling electrode 5 are electromagnetically coupled to the first-stage resonator electrode 3a and the final-stage resonator electrode 3c, respectively, the first-stage resonator electrode 3a and the final-stage resonator electrode 3 respectively. It is the shape along 3c. As described above, since the resonator electrodes 3a to 3c are preferably formed in an elongated band shape, the input coupling electrode 4 and the output coupling electrode 5 are also preferably formed in an elongated band shape.

入力結合電極4と出力結合電極5とは、図1〜図5に示す例では、両方とも共振器電極3a〜3dに対して誘電体層1aを挟んで上側の同一の誘電体層1a・1a間に配置しているが、図7および図8に示す例のように、共振器3a〜3eに対して誘電体層1aを挟んで上下の異なる誘電体層1a・1a間に配置してもよい。   In the example shown in FIGS. 1 to 5, the input coupling electrode 4 and the output coupling electrode 5 are both the same dielectric layers 1a and 1a on the upper side of the resonator electrodes 3a to 3d with the dielectric layer 1a interposed therebetween. However, as in the example shown in FIGS. 7 and 8, the resonator layers 3a to 3e may be disposed between the upper and lower dielectric layers 1a and 1a with the dielectric layer 1a interposed therebetween. Good.

入力結合電極4および出力結合電極5は、積層体1の外表面に形成された入力端子電極4aおよび出力端子電極5aにそれぞれ接続される。図1〜図8に示す例では、積層体1の上面や下面に形成された入力端子電極4aおよび出力端子電極5aに貫通導体で接続されているが、積層体1の側面に形成した端面導体により接続してもよい。また、積層体1の側面に形成した入力端子電極4aおよび出力端子電極5aに入力結合電極4および出力結合電極5から引き出した導体層で接続してもよい。不要な浮遊容量の発生を抑えるためには、積層体1の上面や下面に形成された入力端子電極4aおよび出力端子電極5aに貫通導体で接続するのが好ましい。   The input coupling electrode 4 and the output coupling electrode 5 are connected to the input terminal electrode 4a and the output terminal electrode 5a formed on the outer surface of the multilayer body 1, respectively. In the example shown in FIGS. 1 to 8, the input terminal electrode 4 a and the output terminal electrode 5 a formed on the upper surface and the lower surface of the multilayer body 1 are connected by a through conductor, but the end surface conductor formed on the side surface of the multilayer body 1. You may connect by. Further, the input terminal electrode 4 a and the output terminal electrode 5 a formed on the side surface of the multilayer body 1 may be connected by a conductor layer drawn from the input coupling electrode 4 and the output coupling electrode 5. In order to suppress the generation of unnecessary stray capacitance, it is preferable to connect the input terminal electrode 4a and the output terminal electrode 5a formed on the upper and lower surfaces of the multilayer body 1 with through conductors.

入力結合補強電極4bおよび出力結合補強電極5bは、図7に示す例のように、入力結合電極4、出力結合電極5が形成される誘電体層1a・1a間とは異なる誘電体層1a・1a間に形成してもよいし、図8に示す例のように、入力結合電極4、出力結合電極5が形成される誘電体層1a・1a間と同じ誘電体層1a・1a間に形成してもよい。   As in the example shown in FIG. 7, the input coupling reinforcing electrode 4b and the output coupling reinforcing electrode 5b are different from the dielectric layers 1a and 1a in which the input coupling electrode 4 and the output coupling electrode 5 are formed. It may be formed between the dielectric layers 1a and 1a that are formed between the dielectric layers 1a and 1a on which the input coupling electrode 4 and the output coupling electrode 5 are formed, as in the example shown in FIG. May be.

例えば、図7に示す例のように、容量電極8が内部接地電極2bと主に結合するように、入力結合電極4および出力結合電極5が形成された誘電体層1a・1a間と同じ誘電体層1a・1a間に容量電極8が形成されている場合は、入力結合補強電極4bおよび出力結合補強電極5bは、容量電極8と接地電極2a,2aとの間に形成すればよい。この例の場合は、入力結合電極4と入力端子電極4aとの接続は、入力結合補強電極4bを介して行なわれており、入力結合電極4の電気信号入力点は入力結合補強電極4bが接続される点となる。また、出力結合電極5と出力端子電極5aとの接続は、出力結合電極5を介して行なわれており、出力結合電極5の電気信号出力点は出力結合補強電極5bが接続される点となる。   For example, as in the example shown in FIG. 7, the same dielectric between the dielectric layers 1a and 1a in which the input coupling electrode 4 and the output coupling electrode 5 are formed so that the capacitive electrode 8 is mainly coupled to the internal ground electrode 2b. When the capacitive electrode 8 is formed between the body layers 1a and 1a, the input coupling reinforcing electrode 4b and the output coupling reinforcing electrode 5b may be formed between the capacitive electrode 8 and the ground electrodes 2a and 2a. In this example, the input coupling electrode 4 and the input terminal electrode 4a are connected via the input coupling reinforcing electrode 4b, and the input coupling reinforcing electrode 4b is connected to the electric signal input point of the input coupling electrode 4. It will be a point. The output coupling electrode 5 and the output terminal electrode 5a are connected via the output coupling electrode 5. The electrical signal output point of the output coupling electrode 5 is a point to which the output coupling reinforcing electrode 5b is connected. .

内部接地電極2bが形成されないか、または、例えば図8に示す例のように、内部接地電極2bが形成されても容量電極8が接地電極2aと主に結合するように、入力結合補強電極4bおよび出力結合補強電極5bと接地電極2a、2aとの間の誘電体層1a・1a間に容量電極8が形成されている場合は、入力結合電極4の、初段の共振器電極3aの開放端側に入力結合補強電極4bを配置して、接続導体層で入力結合電極4と接続すればよい。この接続導体層は、例えば図8に示す例のように、容量電極8と初段の共振器電極3aとを接続する貫通導体と短絡しないようにする。出力結合補強電極5bも同様にして接続すればよく、接続導体層の形状は、図8に示すような、出力結合補強電極5bの接続導体層のような形状としてもよい。   The input coupling reinforcing electrode 4b is formed such that the internal ground electrode 2b is not formed or the capacitive electrode 8 is mainly coupled to the ground electrode 2a even if the internal ground electrode 2b is formed as in the example shown in FIG. When the capacitive electrode 8 is formed between the dielectric layers 1a and 1a between the output coupling reinforcing electrode 5b and the ground electrodes 2a and 2a, the open end of the first-stage resonator electrode 3a of the input coupling electrode 4 The input coupling reinforcing electrode 4b may be disposed on the side and connected to the input coupling electrode 4 with a connection conductor layer. For example, as shown in FIG. 8, the connection conductor layer is configured not to be short-circuited with the through conductor connecting the capacitor electrode 8 and the first-stage resonator electrode 3a. The output coupling reinforcing electrode 5b may be connected in the same manner, and the shape of the connecting conductor layer may be a shape like the connecting conductor layer of the output coupling reinforcing electrode 5b as shown in FIG.

入力結合補強電極4bおよび出力結合補強電極5bは、対向する容量電極8,8と相似形で、一回り小さいものにすることで、容量電極8,8と結合しつつ、接地電極2aや内部接地電極2bと容量電極8,8との間に入力結合補強電極4bおよび出力結合補強電極5bが配置されることで、容量電極8,8と接地電極2aや内部接地電極2bとの電磁界結合が大きく減少することを抑えられる。
Input coupling reinforcing electrode 4b and the output coupling reinforcing electrode 5b is a similar figure with a capacitor electrode 8, 8 facing, by the small round, while bound to the capacitance electrodes 8, 8, Ya ground electrode 2a by input coupling reinforcing electrodes 4b and output coupling reinforcing electrodes 5b between the internal ground electrode 2b and the capacitance electrodes 8, 8 are disposed, the capacitance electrodes 8, 8 ground electrodes 2a and internal ground electrode 2b It is possible to suppress a significant decrease in the electromagnetic field coupling.

また、図7に示す例のように、接地電極2aと容量電極8,8との間に入力結合補強電極4bや出力結合補強電極5bが配置される場合は、入力結合補強電極4bと容量電極8との電磁界結合ならびに出力結合補強電極5bと容量電極8との電磁界結合を強めて、入
力結合補強電極4bや出力結合補強電極5bと接地電極2,2との電磁界結合を相対的に弱めるために、入力結合補強電極4bおよび入力結合補強電極4bと接地電極2a,2aとの間の誘電体層1aの厚みよりも、入力結合補強電極4bと容量電極8との間の誘電体層1aおよび入力結合補強電極4bと容量電極8との間の誘電体層1aの厚みを薄くする方が好ましい。また、接地電極2a,2aと容量電極8との電磁界結合が弱まるので、容量電極8と内部接地電極2bとの電磁界結合を強めるために、これらの間の誘電体層1a,1aも薄くして、この電磁界結合が主となるようにするのが好ましい。
When the input coupling reinforcing electrode 4b and the output coupling reinforcing electrode 5b are arranged between the ground electrode 2a and the capacitive electrodes 8 and 8 as in the example shown in FIG. 7, the input coupling reinforcing electrode 4b and the capacitive electrode The electromagnetic field coupling between the input coupling reinforcing electrode 4b and the output coupling reinforcing electrode 5b and the ground electrodes 2a and 2a is strengthened. In order to weaken relatively, the thickness between the input coupling reinforcing electrode 4b and the capacitive electrode 8 is larger than the thickness of the dielectric layer 1a between the input coupling reinforcing electrode 4b and the input coupling reinforcing electrode 4b and the ground electrodes 2a and 2a. It is preferable to reduce the thickness of the dielectric layer 1a and the dielectric layer 1a between the input coupling reinforcing electrode 4b and the capacitive electrode 8. In addition, since the electromagnetic coupling between the ground electrodes 2a and 2a and the capacitive electrode 8 is weakened, the dielectric layers 1a and 1a between them are also thinned to strengthen the electromagnetic coupling between the capacitive electrode 8 and the internal ground electrode 2b. Thus, it is preferable that this electromagnetic field coupling is dominant.

補助結合電極6は、接地電位に接続された電極に対向して電磁界結合するものであり、接地電位に接続された電極とは、接地電極2a、内部接地電極2bおよび共振器電極3a〜3dのことである。   The auxiliary coupling electrode 6 is electromagnetically coupled opposite to the electrode connected to the ground potential. The electrodes connected to the ground potential are the ground electrode 2a, the internal ground electrode 2b, and the resonator electrodes 3a to 3d. That is.

また、補助結合電極6は、入力結合電極4および出力結合電極5の少なくとも一方に電気的に接続されていればよいが、図1〜図8に示す例のように、入力結合電極4および出力結合電極5の両方に接続されているのが好ましい。補助結合電極6により所望の周波数にシフトする減衰極は、入力結合電極4または出力結合電極5によるλ/2共振の減衰極であることから、補助結合電極6を入力結合電極4および出力結合電極5の両方に接続することにより、入力結合電極4および出力結合電極5の両方により形成される大きい減衰極をシフトさせることができ、大きい跳ね上がりを除去することが可能となる。また、跳ね上がりが小さい場合は、シフト量が小さくても跳ね上がりを除去することが可能となるので、設計の自由度が高くなる。   The auxiliary coupling electrode 6 only needs to be electrically connected to at least one of the input coupling electrode 4 and the output coupling electrode 5. However, as in the examples shown in FIGS. It is preferable to be connected to both of the coupling electrodes 5. Since the attenuation pole shifted to a desired frequency by the auxiliary coupling electrode 6 is an attenuation pole of λ / 2 resonance by the input coupling electrode 4 or the output coupling electrode 5, the auxiliary coupling electrode 6 is changed to the input coupling electrode 4 and the output coupling electrode. By connecting to both of them, the large attenuation pole formed by both the input coupling electrode 4 and the output coupling electrode 5 can be shifted, and it is possible to remove a large jump. Further, when the jump is small, it is possible to remove the jump even if the shift amount is small, so that the degree of freedom in design increases.

補助結合電極6と接地電位に接続された電極との間のC結合の量が大きくなると、入力結合電極4または出力結合電極5による減衰極の発生する周波数は、より低周波側にシフトする。このC結合の量は、補助結合電極6と接地電位に接続された電極とが互いに重なる面積に比例し、補助結合電極6と接地電位に接続された電極との間の距離(誘電体層1aの厚み)に反比例するので、これらにより調整することができる。   When the amount of C coupling between the auxiliary coupling electrode 6 and the electrode connected to the ground potential increases, the frequency at which the attenuation pole is generated by the input coupling electrode 4 or the output coupling electrode 5 is shifted to a lower frequency side. The amount of the C bond is proportional to the area where the auxiliary coupling electrode 6 and the electrode connected to the ground potential overlap each other, and the distance (dielectric layer 1a) between the auxiliary coupling electrode 6 and the electrode connected to the ground potential. Therefore, it can be adjusted by these.

補助結合電極6と接地電位に接続された電極とが互いに重なる面積および補助結合電極6と接地電位に接続された電極との間の距離が一定であっても、補助結合電極6と入力結合電極4および出力結合電極5との電気的な接続点の位置を、入力結合電極4および出力結合電極5の開放端側にすると、入力結合電極4および出力結合電極5の電気長が長くなるので減衰極のシフト量が大きくなる。このとき、図4および図5に示す例のように、補助結合電極6の入力結合電極4および出力結合電極との接続点が、補助結合電極6の端部にあると、より電気長を長くすることができる。   Even if the area where the auxiliary coupling electrode 6 and the electrode connected to the ground potential overlap each other and the distance between the auxiliary coupling electrode 6 and the electrode connected to the ground potential is constant, the auxiliary coupling electrode 6 and the input coupling electrode 4 and the output coupling electrode 5 are placed on the open end side of the input coupling electrode 4 and the output coupling electrode 5, the electric lengths of the input coupling electrode 4 and the output coupling electrode 5 become longer, so that attenuation occurs. The amount of pole shift increases. At this time, if the connection point between the input coupling electrode 4 and the output coupling electrode of the auxiliary coupling electrode 6 is at the end of the auxiliary coupling electrode 6 as in the example shown in FIGS. can do.

補助結合電極6が共振器電極3a,3cに対向する場合は、補助結合電極6を入力結合電極4および出力結合電極5と共振器電極3a,3cとの間に配置すると、補助結合電極6の面積の分だけ入力結合電極4および出力結合電極5と共振器電極3a,3cとのC結合が小さくなる。このため、よりシフト量を大きくするためには、図5に示す例のように、補助結合電極6と入力結合電極4および出力結合電極5との重なりが小さくなるように、入力結合電極4および出力結合電極5の開放端で補助結合電極6に接続し、そこから開放端を延長する方向に補助結合電極6が延びるようにするとよい。   When the auxiliary coupling electrode 6 faces the resonator electrodes 3a and 3c, the auxiliary coupling electrode 6 is disposed between the input coupling electrode 4 and the output coupling electrode 5 and the resonator electrodes 3a and 3c. The C coupling between the input coupling electrode 4 and the output coupling electrode 5 and the resonator electrodes 3a and 3c is reduced by the area. Therefore, in order to further increase the shift amount, the input coupling electrode 4 and the input coupling electrode 4 and the output coupling electrode 5 are reduced so that the overlap between the auxiliary coupling electrode 6 and the input coupling electrode 4 and the output coupling electrode 5 is reduced as in the example shown in FIG. The output coupling electrode 5 may be connected to the auxiliary coupling electrode 6 at the open end, and the auxiliary coupling electrode 6 may extend in a direction extending from the open end.

また、補助結合電極6が共振器電極3a,3cに対向する場合は、図4に示す例のように、補助結合電極6が共振器電極3a,3cの開放端側と対向していると、共振器電極3a,3cの開放端側がより電界が強いために共振器電極3a,3cと補助結合電極6と間のC結合がより強いものとなり、フィルタ特性としてより反射低減の効果が大きくなるので好ましい。   Further, when the auxiliary coupling electrode 6 faces the resonator electrodes 3a and 3c, as in the example shown in FIG. 4, when the auxiliary coupling electrode 6 faces the open end side of the resonator electrodes 3a and 3c, Since the open-field side of the resonator electrodes 3a and 3c has a stronger electric field, the C-coupling between the resonator electrodes 3a and 3c and the auxiliary coupling electrode 6 becomes stronger, and the effect of reducing reflection becomes greater as a filter characteristic. preferable.

跳ね上がりの発生する周波数と入力結合電極4または出力結合電極5によるλ/2共振の減衰極が発生する周波数との差に応じて、また、反射特性を考慮して、上記したような補助結合電極6の配置や寸法を調整すればよい。   Depending on the difference between the frequency at which the jump occurs and the frequency at which the attenuation pole of λ / 2 resonance is generated by the input coupling electrode 4 or the output coupling electrode 5, and in consideration of the reflection characteristics, the auxiliary coupling electrode as described above The arrangement and dimensions of 6 may be adjusted.

結合電極7は、結合の弱い初段の共振器電極3aと最終段の共振器電極3dとの間の結合を強めるために設けるものであり、例えば図4に示す例において、第2段の共振器電極3bと第3段の共振器電極3dとの結合が増えると、共振器電極3a〜3dと接地電極2a・2aとで形成される基本的なフィルタの中心周波数がずれるなど通過帯域内のフィルタ特性が変わることととなり、結合電極7を加えることによる減衰特性の設計が複雑になってしまう。また、結合電極7において初段の共振器電極3aに対向する部分と最終段の共振器電極3cに対向する部分とを接続するパターンの線幅が大きいと、結合電極7自身が接地電極のように機能することから共振器電極3a〜3dによる磁界に影響を与えることにより、フィルタのQ値が低下して通過帯域の損失が大きくなってしまう。そのため、初段の共振器電極3aに対向する部分と最終段の共振器電極3cに対向する部分とを接続する部分は、その間の第2段および第3段の共振器電極3b・3dと対向する面積を小さくして結合をできるだけ小さくするために、小さい幅のパターンで、第2段および第3段の共振器電極3b・3cと直交するように設けるとよい。また、初段の共振器電極3aおよび最終段の共振器電極3cに対向する部分までの距離を大きくすることにより結合を小さくするために、この直交する部分をさらに1層以上の誘電体層1aを挟んだ位置に形成して、貫通導体により初段の共振器電極3aに対向する部分および最終段の共振器電極3cに対向する部分に接続してもよい。   The coupling electrode 7 is provided to strengthen the coupling between the first-stage resonator electrode 3a and the last-stage resonator electrode 3d, which are weakly coupled. For example, in the example shown in FIG. When the coupling between the electrode 3b and the third-stage resonator electrode 3d increases, the filter in the pass band such as the center frequency of the basic filter formed by the resonator electrodes 3a to 3d and the ground electrodes 2a and 2a deviates. The characteristic changes, and the design of the attenuation characteristic by adding the coupling electrode 7 becomes complicated. Further, if the line width of the pattern connecting the portion facing the first-stage resonator electrode 3a and the portion facing the last-stage resonator electrode 3c in the coupling electrode 7 is large, the coupling electrode 7 itself becomes a ground electrode. Since it functions, it affects the magnetic field generated by the resonator electrodes 3a to 3d, thereby lowering the Q value of the filter and increasing the loss of the passband. Therefore, the portion connecting the portion facing the first-stage resonator electrode 3a and the portion facing the last-stage resonator electrode 3c faces the second-stage and third-stage resonator electrodes 3b and 3d therebetween. In order to reduce the area and make the coupling as small as possible, it is preferable to provide a pattern with a small width so as to be orthogonal to the second-stage and third-stage resonator electrodes 3b and 3c. Further, in order to reduce the coupling by increasing the distance to the part facing the first-stage resonator electrode 3a and the last-stage resonator electrode 3c, this orthogonal part is further provided with one or more dielectric layers 1a. It may be formed at a sandwiched position and connected to a portion facing the first-stage resonator electrode 3a and a portion facing the last-stage resonator electrode 3c by a through conductor.

結合電極7と共振器電極3a・3dとの間の誘電体層1aの層数により結合電極7と共振器電極3a・3cとの間の距離を変更したり、結合電極7のパターン幅や長さ等のパターン形状や平面視での位置により結合電極7と共振器電極3a・3cとが重なる面積を変更したりすることで、結合電極7と共振器電極3a・3cとの間の電磁界結合度の強弱を調整でき、減衰極が生じる周波数を任意に設定できる。共振器電極3a・3cとの間で十分な結合が得られ、フィルタ装置を作製する際の位置ずれにより初段の共振器電極3aおよび最終段の共振器電極3d以外の共振器電極3b・3dとの結合が発生してしまうことがないように、結合電極7の初段の共振器電極3aに対向する部分および最終段の共振器電極3cに対向する部分は、共振器電極3a・3cの形状に沿った帯状で、共振器電極3a・3cよりも幅の小さい形状とするのがよい。   Depending on the number of dielectric layers 1a between the coupling electrode 7 and the resonator electrodes 3a and 3d, the distance between the coupling electrode 7 and the resonator electrodes 3a and 3c can be changed, or the pattern width and length of the coupling electrode 7 can be changed. The electromagnetic field between the coupling electrode 7 and the resonator electrodes 3a and 3c is changed by changing the area where the coupling electrode 7 and the resonator electrodes 3a and 3c overlap depending on the pattern shape and the position in plan view. The degree of coupling can be adjusted, and the frequency at which the attenuation pole occurs can be set arbitrarily. Sufficient coupling is obtained between the resonator electrodes 3a and 3c, and the resonator electrodes 3b and 3d other than the first-stage resonator electrode 3a and the final-stage resonator electrode 3d and The portion of the coupling electrode 7 that faces the first-stage resonator electrode 3a and the portion that faces the last-stage resonator electrode 3c have the shape of the resonator electrodes 3a and 3c. It is good to make it the shape which has a width | variety smaller than resonator electrode 3a * 3c with the strip | belt shape along.

容量電極8と共振器電極3a〜3dとは、貫通導体で電気的に接続されるが、これらの配置は、平面視での重なりができるだけ小さくなるようにするのが好ましい。容量電極8と共振器電極3a〜3dとが平面視で重なると、その重なった面積分だけ共振器電極3a〜3dと接地電極2aとの結合が小さくなってしまい、また、例えば初段の共振器電極3aに接続された容量電極8と他の共振器電極3b〜3dとが平面視で重なると、初段の共振器電極3aと他の共振器電極3b〜3dとの結合量が変わってしまうからである。このようなことから、図4および図5に示す例のように、容量電極8を長方形や楕円形のような細長い形状とし、共振器電極3a〜3dの開放端と容量電極8の一方端とを接続し、容量電極8の他方端を共振器電極3a〜3dの開放端を延長する方向に向けるとよい。また、図7および図8に示す例のように、容量電極8の共振器電極3a〜3cと平面視で重なる部分の幅は小さく、接地電極2や内部接地電極2と重なる部分の幅は大きい、例えば凸形状(T字形状)とすると、上記のような不具合がなく、短い容量電極8でも接地電極2aや内部接地電極2bとの結合が得やすいのでより好ましい。 The capacitive electrode 8 and the resonator electrodes 3a to 3d are electrically connected by through conductors, and it is preferable that their arrangement be as small as possible in plan view. When the capacitive electrode 8 and the resonator electrodes 3a to 3d overlap in plan view, the coupling between the resonator electrodes 3a to 3d and the ground electrode 2a is reduced by the overlapped area, and for example, the first-stage resonator When the capacitive electrode 8 connected to the electrode 3a and the other resonator electrodes 3b to 3d overlap in plan view, the coupling amount between the first-stage resonator electrode 3a and the other resonator electrodes 3b to 3d changes. It is. Therefore, as in the example shown in FIGS. 4 and 5, the capacitive electrode 8 has an elongated shape such as a rectangle or an ellipse, and the open ends of the resonator electrodes 3 a to 3 d and one end of the capacitive electrode 8 And the other end of the capacitive electrode 8 may be oriented in the direction of extending the open ends of the resonator electrodes 3a to 3d. Also, as in the example shown in FIGS. 7 and 8, small width of the portion overlapping the resonator electrode 3a~3c in a plan view of the capacitor electrode 8, the width of the portion overlapping the ground electrode 2 a and the internal grounding electrode 2 b Is larger, for example, a convex shape (T-shape), which is more preferable because the above-described problems do not occur and even the short capacitive electrode 8 can easily be coupled to the ground electrode 2a and the internal ground electrode 2b.

容量電極8は、図5に示す例では、共振器電極3a〜3dに対して誘電体層1aを挟んで上方にそれぞれ1つずつ設けられているが、共振器電極3a〜3eの下方にそれぞれ1つずつ設けてもよいし、図7および図8に示す例のように共振器電極3a〜3eの上方または下方のいずれかにそれぞれ1つずつ設けてもよいし、あるいは、図4に示す例のように、複数の各共振器電極3a〜3dのそれぞれに対して、上方および下方の両方にそれぞれ1つずつ設けてもよい。容量電極8が上述した凸形状(T字形状)の場合は、図7および図8に示す例のように、共振器電極3a〜3cに対して誘電体層1aを挟んで上方と下方とに分けて容量電極8を配置すると、接地電極2aや内部接地電極2bと重なる部分の幅をより大きくすることができるので好ましい。   In the example shown in FIG. 5, the capacitor electrode 8 is provided one above the resonator electrodes 3 a to 3 d with the dielectric layer 1 a interposed therebetween, but below the resonator electrodes 3 a to 3 e. One may be provided, or one may be provided above or below the resonator electrodes 3a to 3e as in the examples shown in FIGS. 7 and 8, or as shown in FIG. As an example, each of the plurality of resonator electrodes 3a to 3d may be provided on both the upper side and the lower side. When the capacitive electrode 8 has the above-described convex shape (T-shape), as in the example shown in FIGS. 7 and 8, the resonator electrode 3 a to 3 c are positioned above and below the dielectric layer 1 a. It is preferable to separately arrange the capacitive electrode 8 because the width of the portion overlapping the ground electrode 2a and the internal ground electrode 2b can be increased.

誘電体層1aとしては、例えば、アルミナ,ムライト,窒化アルミニウム,BaO−TiO系,CaO−TiO系,MgO−TiO系およびガラスセラミックス等のセラミック材料、あるいは四ふっ化エチレン樹脂(ポリテトラフルオロエチレン;PTFE),四ふっ化エチレン−エチレン共重合樹脂(テトラフルオロエチレン−エチレン共重合樹脂;ETFE),四ふっ化エチレン−パーフルオロアルコキシエチレン共重合樹脂(テトラフルオロエチレン−パーフルテロアルキルビニルエーテル共重合樹脂;PFA)等のフッ素樹脂やガラスエポキシ樹脂,ポリイミド等の有機樹脂材料が用いられる。これらの材料による誘電体層1aの形状や寸法(厚みや幅,長さ)は、使用される周波数や用途等に応じて設定される。セラミック材料の場合は、より高周波の信号を伝送することが可能な、Au,Ag,Cu等の低抵抗金属からなる導体材料と同時焼成が可能な低温焼成セラミックスが好ましい。 As the dielectric layer 1a, for example, alumina, mullite, aluminum nitride, BaO—TiO 2 series, CaO—TiO 2 series, MgO—TiO 2 series, ceramic materials such as glass ceramics, or tetrafluoroethylene resin (polytetra PTFE), tetrafluoroethylene-ethylene copolymer resin (tetrafluoroethylene-ethylene copolymer resin; ETFE), tetrafluoroethylene-perfluoroalkoxyethylene copolymer resin (tetrafluoroethylene-perfluteroalkyl vinyl ether) Fluorine resin such as copolymer resin (PFA), glass epoxy resin, and organic resin material such as polyimide are used. The shape and dimensions (thickness, width, length) of the dielectric layer 1a made of these materials are set according to the frequency used, the application, and the like. In the case of a ceramic material, low-temperature fired ceramics that can be fired simultaneously with a conductor material made of a low-resistance metal such as Au, Ag, or Cu that can transmit a higher frequency signal is preferable.

接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8は、誘電体層1aがセラミック材料からなる場合は、W,Mo,Mo−Mn,Au,Ag,Cu等の金属を主成分とするメタライズ層により形成される。また、誘電体層1aが樹脂系材料からなる場合は、厚膜印刷法,各種の薄膜形成方法,めっき法あるいは箔転写法等により形成した金属層や、このような金属層上にめっき層を形成したもの、例えばCu層,Cr−Cu合金層,Cr−Cu合金層上にNiめっき層およびAuめっき層を被着させたもの,TaN層上にNi−Cr合金層およびAuめっき層を被着させたもの,Ti層上にPt層およびAuめっき層を被着させたもの,Ni−Cr合金層上にPt層およびAuめっき層を被着させたもの等が挙げられる。その厚みや幅は、伝送される高周波信号の周波数や用途等に応じて設定される。   Ground electrode 2a, internal ground electrode 2b, resonator electrodes 3a to 3d, input coupling electrode 4, input terminal electrode 4a, input coupling reinforcing electrode 4b, output coupling electrode 5, output terminal electrode 5a, output coupling reinforcing electrode 5b, auxiliary coupling When the dielectric layer 1a is made of a ceramic material, the electrode 6, the coupling electrode 7 and the capacitor electrode 8 are formed of a metallized layer mainly composed of a metal such as W, Mo, Mo—Mn, Au, Ag, or Cu. The When the dielectric layer 1a is made of a resin material, a metal layer formed by a thick film printing method, various thin film forming methods, a plating method or a foil transfer method, or a plating layer on such a metal layer is formed. For example, Cu layer, Cr—Cu alloy layer, Cr—Cu alloy layer with Ni plating layer and Au plating layer deposited, TaN layer with Ni—Cr alloy layer and Au plating layer Examples thereof include those deposited, those obtained by depositing a Pt layer and an Au plating layer on a Ti layer, and those obtained by depositing a Pt layer and an Au plating layer on a Ni—Cr alloy layer. The thickness and width are set according to the frequency and application of the transmitted high-frequency signal.

誘電体層1a,接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8の形成は、従来周知の方法を用いればよい。例えば誘電体層1aがガラスセラミックスから成る場合であれば、まずそれら誘電体層1aとなるガラスセラミックスのグリーンシートを準備し、グリーンシート上にスクリーン印刷法によりAg等の導体ペーストを所定形状で印刷塗布して接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8の各電極パターンを形成する。次に、これらの電極パターンが形成されたグリーンシートを重ねて圧着するなどして積層体を作製し、この積層体を850〜1000℃で焼成することにより形成する。その後、外表面に露出している導体層上には、NiめっきおよびAuめっき等のめっき皮膜を形成する。誘電体層1aが有機樹脂材料から成る場合であれば、例えば有機樹脂シート上に接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8の各電極パターン形状に加工したCu箔を転写し、Cu箔が転写された有機樹脂シートを積層して接着剤で接着することにより形成する。   Dielectric layer 1a, ground electrode 2a, internal ground electrode 2b, resonator electrodes 3a-3d, input coupling electrode 4, input terminal electrode 4a, input coupling reinforcement electrode 4b, output coupling electrode 5, output terminal electrode 5a, output coupling reinforcement Formation of the electrode 5b, the auxiliary coupling electrode 6, the coupling electrode 7, and the capacitor electrode 8 may be performed by a conventionally known method. For example, if the dielectric layer 1a is made of glass ceramics, first prepare green sheets of glass ceramics to be the dielectric layers 1a, and print a conductor paste such as Ag in a predetermined shape on the green sheets by screen printing. Apply and ground electrode 2a, internal ground electrode 2b, resonator electrodes 3a-3d, input coupling electrode 4, input terminal electrode 4a, input coupling reinforcing electrode 4b, output coupling electrode 5, output terminal electrode 5a, output coupling reinforcing electrode 5b The electrode patterns of the auxiliary coupling electrode 6, the coupling electrode 7 and the capacitive electrode 8 are formed. Next, a green body with these electrode patterns formed thereon is stacked and pressure-bonded, for example, to produce a laminate, and this laminate is formed by firing at 850 to 1000 ° C. Thereafter, a plating film such as Ni plating or Au plating is formed on the conductor layer exposed on the outer surface. If the dielectric layer 1a is made of an organic resin material, for example, the ground electrode 2a, the internal ground electrode 2b, the resonator electrodes 3a to 3d, the input coupling electrode 4, the input terminal electrode 4a, and the input coupling reinforcement are formed on the organic resin sheet. The Cu foil processed into the electrode pattern shape of the electrode 4b, the output coupling electrode 5, the output terminal electrode 5a, the output coupling reinforcing electrode 5b, the auxiliary coupling electrode 6, the coupling electrode 7 and the capacitive electrode 8 is transferred, and the Cu foil is transferred. The organic resin sheets are laminated and bonded with an adhesive.

接地電極2aと共振器電極3a〜3dの短絡端とを接続する接続導体は、それらの間に位置する誘電体層1a内に形成された貫通導体または誘電体層1aの端面に形成された端面導体の形態で形成することにより、積層されたそれら誘電体層1aの内部に形成するフィルタ装置の設計自由度が向上するとともに、より小型で高性能なフィルタ装置とすることができる。   The connection conductor connecting the ground electrode 2a and the short-circuit ends of the resonator electrodes 3a to 3d is a through conductor formed in the dielectric layer 1a located between them or an end face formed on the end face of the dielectric layer 1a. By forming in the form of a conductor, the degree of freedom in designing the filter device formed inside the laminated dielectric layers 1a is improved, and a more compact and high-performance filter device can be obtained.

このような接続導体となる貫通導体や側面導体は、誘電体層1aがガラスセラミックス等のセラミックスから成る場合には、貫通導体は、例えば前述の製造方法において接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8の各電極パターンを形成する前に、グリーンシートに金型加工やレーザー加工によってあらかじめ形成しておいた貫通孔内に同様の導体ペーストを印刷法等によって充填することで形成することができ、端面導体は、例えば共振器電極3a〜3eの電極パターンの短絡端を端面に露出させたグリーンシート積層体を形成した後、同様の導体ペーストをグリーンシート積層体の側面に印刷することによって形成することができる。また、端面導体は、グリーンシートに共振器電極3a〜3dの列の幅程度の貫通穴を形成しておき、共振器電極3a〜3dの電極パターンの短絡端をこの貫通穴に接するように形成した後、グリーンシートの積層前または積層後に導体ペーストを貫通穴の内面に印刷し、または貫通穴に充填して、貫通穴の部分で切断することによっても形成することができる。誘電体層1aが樹脂系材料から成る場合も同様に、グリーンシートに代えて有機樹脂シートを用い、導体ペーストの印刷やめっきにより貫通孔内に貫通導体を形成したり、薄膜法等により側面導体を形成したりすればよい。共振器電極3a〜3dの電極パターンの短絡端を積層体の側面に露出させるには、共振器電極3a〜3dの電極パターンの短絡端がグリーンシート(あるいは有機樹脂シート)の端部に位置するように形成したり、共振器電極3a〜3dの電極パターンを形成したグリーンシート(有機樹脂シート)を積層した後に、共振器電極3a〜3dの電極パターンの短絡端が側面に露出するように積層体を切断したりすればよい。   When the dielectric layer 1a is made of ceramics such as glass ceramics, the through conductors and the side conductors serving as the connection conductors are, for example, the ground electrode 2a, the internal ground electrode 2b, the resonance in the manufacturing method described above. 3a-3d, input coupling electrode 4, input terminal electrode 4a, input coupling reinforcing electrode 4b, output coupling electrode 5, output terminal electrode 5a, output coupling reinforcing electrode 5b, auxiliary coupling electrode 6, coupling electrode 7, and capacitive electrode 8 Before forming each electrode pattern, it is possible to form the end face by filling the green sheet with a similar conductor paste into the through holes previously formed by mold processing or laser processing. For example, after forming a green sheet laminate in which the short-circuit ends of the electrode patterns of the resonator electrodes 3a to 3e are exposed on the end faces, It can be formed by printing on the side surface of the green sheet laminate. Further, the end face conductor is formed so that through holes having a width about the width of the resonator electrodes 3a to 3d are formed in the green sheet, and the short-circuit ends of the electrode patterns of the resonator electrodes 3a to 3d are in contact with the through holes. Thereafter, the conductive paste can be printed on the inner surface of the through hole before or after the green sheet is laminated, or can be formed by filling the through hole and cutting at the through hole portion. Similarly, when the dielectric layer 1a is made of a resin-based material, an organic resin sheet is used instead of the green sheet, and a through conductor is formed in the through hole by printing or plating a conductor paste, or a side conductor is formed by a thin film method or the like. May be formed. In order to expose the short-circuit ends of the electrode patterns of the resonator electrodes 3a to 3d on the side surfaces of the stacked body, the short-circuit ends of the electrode patterns of the resonator electrodes 3a to 3d are located at the end of the green sheet (or organic resin sheet). Or after laminating green sheets (organic resin sheets) on which the electrode patterns of the resonator electrodes 3a to 3d are formed, the short-circuit ends of the electrode patterns of the resonator electrodes 3a to 3d are laminated so as to be exposed on the side surfaces. Just cut your body.

具体的には、UWBのローバンド規格に用いられるような、通過帯域の中心周波数が3.9GHzのバンドパスフィルタとしてのフィルタ装置は、図4に示すような形態であれば、例えば誘電体層1aとして比誘電率が9.4のガラスセラミックスを用い、接地電極2a,内部接地電極2b,共振器電極3a〜3d,入力結合電極4,入力端子電極4a,入力結合補強電極4b,出力結合電極5,出力端子電極5a,出力結合補強電極5b,補助結合電極6,結合電極7,容量電極8および貫通導体にAgメタライズを用いることにより得られる。比誘電率が9.4のガラスセラミックスは、例えば、ガラス成分としてPbO,B,SiO,Al,ZnOおよびアルカリ土類金属酸化物を主成分とする結晶化ガラスが50質量%とフィラー成分としてアルミナが50質量%とからなるものを用いればよい。 Specifically, a filter device as a band-pass filter having a center frequency of 3.9 GHz as used in the UWB low-band standard has the form shown in FIG. 4, for example, as the dielectric layer 1a. Glass ceramics having a relative dielectric constant of 9.4 is used, and ground electrode 2a, internal ground electrode 2b, resonator electrodes 3a to 3d, input coupling electrode 4, input terminal electrode 4a, input coupling reinforcing electrode 4b, output coupling electrode 5, output terminal It is obtained by using Ag metallization for the electrode 5a, the output coupling reinforcing electrode 5b, the auxiliary coupling electrode 6, the coupling electrode 7, the capacitive electrode 8, and the through conductor. Glass ceramics having a relative dielectric constant of 9.4 include, for example, 50% by mass of crystallized glass mainly composed of PbO, B 2 O 3 , SiO 2 , Al 2 O 3 , ZnO and an alkaline earth metal oxide as glass components. And what consists of 50 mass% of alumina as a filler component may be used.

このとき、誘電体層1aは、厚みを上から順に、350μm,50μm,50μm,100μm,350μmとした。接地電極2a・2aは、寸法を3.1mm×3.6mmとし、内部接地電極2bは外寸を3.1mm×3.6mmで内寸(開口の寸法)を2.7mm×1.85mmとする。この開口内に寸法が0.4mm×1.7mmの共振器電極3a,3b,3c,3dを0.25mm,0.17mm,0.25mm間隔で横並びに整列し、各短絡端を内部接地電極2bに接続して、各開放端と内部接地電極2bとの間隔を0.15mm、共振器電極3aおよび3dと内部接地電極2bとの間隔を0.215mmとなるように配置した。内部接地電極2bと積層体1の上下面の接地電極2a・2aとは、外周部に配列した直径0.1mmの貫通導体で接続する。入力結合電極4は寸法を0.3mm×2.25mmとして、初段の共振器電極3aの開放端側と平面視で0.3mm×1.7mmの範囲で重なるように配置し、0.2mm×0.2mmの入力端子電極4aの中心と直径0.1mmの貫通導体で接続した。出力結合電極5も同様に寸法を0.3mm×2.25mmとして、最終段の共振器電極3cの開放端側と平面視で0.3mm×1.7mm重なるように配置し、0.2mm×0.2mmの出力端子電極5aの中心と直径0.1mmの貫通導体で接続した。補助結合電極6は、寸法を0.3mm×1.2mmとし、入力結合電極4の開放端と補助結合電極6の一端とを合わせるとともに初段の共振器電極3aの開放端側と平面視で0.3mm×1.2mmの範囲で重なるように配置し、入力結合電極4の開放端から、および補助結合電極6の一端からそれぞれ0.1mmの位置同士を直径0.1mmの貫通導体で接続した。また、同じ寸法の補助結合電極6の一端と出力結合電極5の開放端とを合わせるとともに最終段の共振器電極3cの開放端側と平面視で0.3mm×1.2mmの範囲で重なるように配置し、出力結合電極5の開放端から、および補助結合電極6の一端からそれぞれ0.1mmの位置同士を直径0.1mmの貫通導体で接続した。結合電極7は、2つの0.1mm×0.975mmのものの端部同士を1.97mm×0.1mm幅の導体層で接続したクランク形とし、初段および最終段の共振器電極3a,3cそれぞれの短絡端側と平面視で0.1mm×0.875mmの範囲で重なるように配置し、内部接地電極2bと重なる0.1mm×0.1mmの部分の中心で直径0.1mmの貫通導体により接続した。容量電極8は、寸法が0.2mm×0.72mmのものを、共振器電極3a,3cの開放端部と平面視で0.2mm×0.2mmの範囲で重なり、内部接地電極2bと0.2mm×0.37mmの範囲の重なるように初段および最終段の共振器電極3a,3cそれぞれの上下に配置し、共振器電極3a,3cの開放端部と重なる部分の中心で直径0.1mmの貫通導体により接続した。また、0.2mm×0.6mmの寸法の容量電極8を、第2段および第3段の共振器電極3b,3dの開放端部と平面視で0.2mm×0.2mmの範囲で重なり、内部接地電極2bと0.2mm×0.25mmの範囲の重なるように共振器電極3b,3dそれぞれの上下に配置し、第2段および第3段の共振器電極3b,3dの開放端部と重なる部分の中心で直径0.1mmの貫通導体により接続した。   At this time, the thickness of the dielectric layer 1a was 350 μm, 50 μm, 50 μm, 100 μm, and 350 μm in order from the top. The ground electrodes 2a and 2a have dimensions of 3.1 mm × 3.6 mm, and the internal ground electrode 2b has an outer dimension of 3.1 mm × 3.6 mm and an inner dimension (opening dimension) of 2.7 mm × 1.85 mm. In this opening, resonator electrodes 3a, 3b, 3c, and 3d having dimensions of 0.4 mm × 1.7 mm are aligned side by side at intervals of 0.25 mm, 0.17 mm, and 0.25 mm, and each short-circuit end is connected to the internal ground electrode 2b. The distance between each open end and the internal ground electrode 2b is 0.15 mm, and the distance between the resonator electrodes 3a and 3d and the internal ground electrode 2b is 0.215 mm. The internal ground electrode 2b and the ground electrodes 2a and 2a on the upper and lower surfaces of the laminate 1 are connected by through conductors having a diameter of 0.1 mm arranged on the outer periphery. The input coupling electrode 4 has a size of 0.3 mm × 2.25 mm, and is arranged so as to overlap with the open end side of the first-stage resonator electrode 3 a in a range of 0.3 mm × 1.7 mm in plan view, and has an input terminal of 0.2 mm × 0.2 mm The center of the electrode 4a was connected with a through conductor having a diameter of 0.1 mm. Similarly, the output coupling electrode 5 has a size of 0.3 mm × 2.25 mm and is arranged so as to overlap 0.3 mm × 1.7 mm in plan view with the open end side of the resonator electrode 3 c at the final stage, and an output terminal of 0.2 mm × 0.2 mm The center of the electrode 5a was connected with a through conductor having a diameter of 0.1 mm. The auxiliary coupling electrode 6 has a size of 0.3 mm × 1.2 mm, the open end of the input coupling electrode 4 and one end of the auxiliary coupling electrode 6 are aligned, and the open end side of the first-stage resonator electrode 3a is 0.3 mm × in plan view. They were arranged so as to overlap each other in a range of 1.2 mm, and the positions 0.1 mm from the open end of the input coupling electrode 4 and one end of the auxiliary coupling electrode 6 were connected by a through conductor having a diameter of 0.1 mm. Further, one end of the auxiliary coupling electrode 6 having the same size and the open end of the output coupling electrode 5 are matched and arranged so as to overlap with the open end side of the final-stage resonator electrode 3c in a range of 0.3 mm × 1.2 mm in plan view. The positions of 0.1 mm from the open end of the output coupling electrode 5 and one end of the auxiliary coupling electrode 6 were connected by a through conductor having a diameter of 0.1 mm. The coupling electrode 7 has a crank shape in which two 0.1 mm × 0.975 mm ends are connected by a conductor layer having a width of 1.97 mm × 0.1 mm, and the short-circuit end side of each of the first-stage and final-stage resonator electrodes 3a and 3c. And arranged so as to overlap in a range of 0.1 mm × 0.875 mm in plan view, and connected by a through conductor having a diameter of 0.1 mm at the center of a 0.1 mm × 0.1 mm portion overlapping the internal ground electrode 2b. The capacitive electrode 8 having a size of 0.2 mm × 0.72 mm overlaps with the open ends of the resonator electrodes 3 a and 3 c in a range of 0.2 mm × 0.2 mm in plan view, and is 0.2 mm × 0.37 mm from the internal ground electrode 2 b. The resonator electrodes 3a and 3c at the first stage and the last stage are disposed above and below the resonator electrodes 3a and 3c so as to overlap each other, and are connected by a through conductor having a diameter of 0.1 mm at the center of the portion overlapping the open ends of the resonator electrodes 3a and 3c. Further, the capacitive electrode 8 having a size of 0.2 mm × 0.6 mm is overlapped with the open ends of the second and third stage resonator electrodes 3b and 3d within a range of 0.2 mm × 0.2 mm in plan view, and the internal ground electrode 2b is disposed above and below the resonator electrodes 3b and 3d so as to overlap each other in the range of 0.2 mm × 0.25 mm, and at the center of the portion overlapping the open ends of the second-stage and third-stage resonator electrodes 3b and 3d. They were connected by a through conductor having a diameter of 0.1 mm.

このような例の本発明のフィルタ装置(実施例)のフィルタ特性は、図9の線図に実線の特性曲線で示すようなものとなる。また、このような例の本発明のフィルタ装置によるフィルタ特性に対して、補助結合電極6のみを有さないフィルタ装置(比較例)において得られるフィルタ特性は、図9に破線の特性曲線で示すようなものとなる。また、このときの本発明のフィルタ装置の通過帯域における反射特性は、図10に実線で示すようなものとなり、同様に比較例の反射特性は、図10に破線で示すようなものとなる。図10における一点鎖線および二点鎖線は、それぞれ本発明のフィルタ装置によるフィルタ特性および比較例のフィルタ装置によるフィルタ特性を示す。なお、図9および図10に示す線図において、縦軸は挿入損失(単位:dB)を、横軸は周波数(単位:GHz)を示す。   The filter characteristics of the filter device (example) of the present invention in such an example are as shown by a solid characteristic curve in the diagram of FIG. Further, the filter characteristics obtained in the filter device (comparative example) not having only the auxiliary coupling electrode 6 with respect to the filter properties of the filter device of the present invention in such an example are shown by the dashed characteristic curve in FIG. It will be like that. Further, the reflection characteristic in the pass band of the filter device of the present invention at this time is as shown by a solid line in FIG. 10, and similarly, the reflection characteristic of the comparative example is as shown by a broken line in FIG. The one-dot chain line and the two-dot chain line in FIG. 10 indicate the filter characteristic of the filter device of the present invention and the filter characteristic of the filter device of the comparative example, respectively. In the diagrams shown in FIGS. 9 and 10, the vertical axis represents insertion loss (unit: dB), and the horizontal axis represents frequency (unit: GHz).

図9に示すフィルタ特性から、比較例のフィルタ特性は、約19GHzに入力結合電極4または出力結合電極5によるλ/2共振の減衰極を有し、約15.3GHzに結合電極7による減衰特性の跳ね上がりを有しているのに対して、本発明のフィルタ装置の実施例のフィルタ特性は、入力結合電極4または出力結合電極5によるλ/2共振の減衰極が15.3GHzにシフトしたことにより、跳ね上がりが打ち消されていることが分かる。   From the filter characteristics shown in FIG. 9, the filter characteristic of the comparative example has an attenuation pole of λ / 2 resonance by the input coupling electrode 4 or the output coupling electrode 5 at about 19 GHz, and the attenuation characteristic by the coupling electrode 7 at about 15.3 GHz. Whereas the filter characteristic of the embodiment of the filter device of the present invention has a jumping up, the attenuation pole of λ / 2 resonance by the input coupling electrode 4 or the output coupling electrode 5 is shifted to 15.3 GHz. You can see that the bounce is canceled.

以上のことから、本発明のフィルタ装置によれば、入力結合電極4および出力結合電極5の少なくとも一方に電気的に接続されるとともに、接地電位に接続された電極に対向して電磁界結合する補助結合電極6とを備えることから、入力結合電極4または出力結合電極5によるλ/2共振の減衰極が不要な跳ね上がりの発生する周波数より高周波側に位置する場合に、補助結合電極6により入力結合電極4および出力結合電極5と接地電位に接続された電極とのC結合の量を増加させて、入力結合電極4および出力結合電極5の等価電気長を、入力結合電極4および出力結合電極5のみによる電気長よりも長くすることができるので、入力結合電極4および出力結合電極5によるλ/2共振の減衰極を低周波側にシフトすることができる。そして、このC結合の量を調整することで等価的な電気長を調整して、入力結合電極4および出力結合電極5によるλ/2共振の減衰極を跳ね上がりの発生する周波数の近傍にシフトすることにより、不要な跳ね上がりを除去した優れた減衰特性を有するものであることが分かる。   From the above, according to the filter device of the present invention, it is electrically connected to at least one of the input coupling electrode 4 and the output coupling electrode 5 and is electromagnetically coupled opposite to the electrode connected to the ground potential. Since the auxiliary coupling electrode 6 is provided, when the attenuation pole of the λ / 2 resonance by the input coupling electrode 4 or the output coupling electrode 5 is located on the higher frequency side than the frequency at which unnecessary jumping occurs, the input is performed by the auxiliary coupling electrode 6. The amount of C coupling between the coupling electrode 4 and the output coupling electrode 5 and the electrode connected to the ground potential is increased, and the equivalent electrical length of the input coupling electrode 4 and the output coupling electrode 5 is changed to the input coupling electrode 4 and the output coupling electrode. Therefore, the attenuation pole of λ / 2 resonance by the input coupling electrode 4 and the output coupling electrode 5 can be shifted to the low frequency side. Then, by adjusting the amount of C coupling, the equivalent electrical length is adjusted, and the attenuation pole of λ / 2 resonance by the input coupling electrode 4 and the output coupling electrode 5 is shifted to the vicinity of the frequency at which the jump occurs. Thus, it can be seen that it has excellent damping characteristics from which unnecessary jumping is removed.

なお、比較例に対してさらに容量電極8を有さない従来のフィルタ装置において、本発明のフィルタ装置(および比較例のフィルタ装置)と同様の周波数に減衰極を有するものとするには、共振器電極3a〜3dを長くしなければならず、フィルタ装置の大きさが大きくなってしまうばかりでなく、減衰極よりさらに高周波側に減衰特性の跳ね上がりがあるものとなり、無線LANで使用する帯域に対する減衰帯域において十分に減衰していないフィルタ特性となってしまう。   In addition, in the conventional filter device that does not further include the capacitive electrode 8 with respect to the comparative example, in order to have an attenuation pole at the same frequency as the filter device of the present invention (and the filter device of the comparative example), resonance is required. The device electrodes 3a to 3d have to be lengthened, and not only the size of the filter device is increased, but also the attenuation characteristic jumps to a higher frequency side than the attenuation pole, and the band used in the wireless LAN is increased. The filter characteristic is not sufficiently attenuated in the attenuation band.

本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 図5に示すフィルタ装置のA−A断面の一例を示す断面図である。It is sectional drawing which shows an example of the AA cross section of the filter apparatus shown in FIG. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 本発明のフィルタ装置の実施の形態の一例を模式的に示す分解斜視図である。It is a disassembled perspective view which shows typically an example of embodiment of the filter apparatus of this invention. 図4に示すフィルタ装置の伝送特性のシミュレーション結果を示す図である。It is a figure which shows the simulation result of the transmission characteristic of the filter apparatus shown in FIG. 図4に示すフィルタ装置の伝送特性のシミュレーション結果を示す図である。It is a figure which shows the simulation result of the transmission characteristic of the filter apparatus shown in FIG. 従来のフィルタ装置を示す分解斜視図である。It is a disassembled perspective view which shows the conventional filter apparatus.

符号の説明Explanation of symbols

1・・・積層体
1a・・・誘電体層
2a・・・接地電極
2b・・・内部接地電極
3a,3b,3c,3d・・・共振器電極
4・・・入力結合電極
4a・・・入力端子電極
4b・・・入力結合補強電極
5・・・出力結合電極
5a・・・出力端子電極
5b・・・出力結合補強電極
6・・・補助結合電極
7・・・結合電極
8・・・容量電極
DESCRIPTION OF SYMBOLS 1 ... Laminated body 1a ... Dielectric layer 2a ... Ground electrode 2b ... Internal ground electrode 3a, 3b, 3c, 3d ... Resonator electrode 4 ... Input coupling electrode 4a ... Input terminal electrode 4b ... Input coupling reinforcing electrode 5 ... Output coupling electrode 5a ... Output terminal electrode 5b ... Output coupling reinforcing electrode 6 ... Auxiliary coupling electrode 7 ... Coupling electrode 8 ... Capacitance electrode

Claims (8)

複数の誘電体層が積層されてなる積層体と、
該積層体を挟んで対向するように配置された接地電極と、
前記積層体内において電磁界結合するように横並びに整列され、それぞれ一方端が短絡端で他方端が開放端である複数の共振器電極と、
前記積層体内において前記共振器電極が配置された前記誘電体層間とは異なる層間に形成され、初段の前記共振器電極に沿った形状で対向して電磁界結合するとともに、平面視で初段の前記共振器電極の前記開放端側に外部回路から電気信号が入力される電気信号入力点を有する入力結合電極と、
前記積層体内において前記共振器電極が配置された前記誘電体層間とは異なる層間に形成され、最終段の前記共振器電極に沿った形状で対向して電磁界結合するとともに、平面視で最終段の前記共振器電極の前記開放端側に外部回路へ電気信号が出力される電気信号出力点を有する出力結合電極と、
前記入力結合電極の端部の直上に設けられるとともに、該入力結合電極に電気的に接続された入力端子電極と、
前記出力結合電極の端部の直上に設けられるとともに、該出力結合電極に電気的に接続された出力端子電極と、
前記積層体内において前記入力結合電極および前記出力結合電極の少なくとも一方に電気的に接続されるとともに、前記入力端子電極および前記出力端子電極に直接接続されておらず、接地電位に接続された電極に対向して電磁界結合する補助結合電極とを備えることを特徴とするフィルタ装置。
A laminate in which a plurality of dielectric layers are laminated;
A ground electrode disposed so as to face each other with the laminate interposed therebetween;
A plurality of resonator electrodes that are arranged side by side so as to be electromagnetically coupled in the laminate, each having one end short-circuited and the other end open;
The multilayer body is formed between layers different from the dielectric layer in which the resonator electrode is disposed, and is opposed to the electromagnetic field in a shape along the first-stage resonator electrode, and the first-stage in the plan view. An input coupling electrode having an electric signal input point to which an electric signal is input from an external circuit on the open end side of the resonator electrode;
The multilayer body is formed between layers different from the dielectric layer where the resonator electrode is disposed, and is opposed to the electromagnetic field in a shape along the resonator electrode in the final stage, and in the plan view, the final stage. An output coupling electrode having an electrical signal output point at which an electrical signal is output to an external circuit on the open end side of the resonator electrode;
An input terminal electrode provided directly above the end of the input coupling electrode and electrically connected to the input coupling electrode;
An output terminal electrode provided immediately above an end of the output coupling electrode and electrically connected to the output coupling electrode;
In the laminate, it is electrically connected to at least one of the input coupling electrode and the output coupling electrode, and is not directly connected to the input terminal electrode and the output terminal electrode, but to an electrode connected to a ground potential. A filter device comprising: an auxiliary coupling electrode facing and electromagnetically coupling.
前記共振器電極が配置された前記誘電体層間に、平面視で複数の前記共振器電極を取り囲むように形成された内部接地電極を備えることを特徴とする請求項1記載のフィルタ装置。   2. The filter device according to claim 1, further comprising an internal ground electrode formed so as to surround the plurality of resonator electrodes in a plan view between the dielectric layers on which the resonator electrodes are arranged. 前記入力結合電極に接続された前記補助結合電極は前記誘電体層を挟んで初段の前記共振器電極と、前記出力結合電極に接続された前記補助結合電極は前記誘電体層を挟んで最終段の前記共振器電極と、対向してそれぞれ電磁界結合するように配置されていることを特徴とする請求項1または請求項2に記載のフィルタ装置。   The auxiliary coupling electrode connected to the input coupling electrode is the first stage resonator electrode across the dielectric layer, and the auxiliary coupling electrode connected to the output coupling electrode is the final stage across the dielectric layer. 3. The filter device according to claim 1, wherein the filter device is disposed so as to be electromagnetically coupled to each of the resonator electrodes. 前記補助結合電極が前記内部接地電極と対向していることを特徴とする請求項2記載のフィルタ装置。   The filter device according to claim 2, wherein the auxiliary coupling electrode is opposed to the internal ground electrode. 一端が前記誘電体層を挟んで初段の前記共振器電極の短絡端と対向し、他端が前記誘電体層を挟んで最終段の前記共振器電極の短絡端部と対向して配置され、これら一端および他端が対向している前記共振器電極の短絡端にそれぞれ電気的に接続された結合電極を有することを特徴とする請求項1乃至請求項4のいずれかに記載のフィルタ装置。   One end faces the short-circuited end of the first-stage resonator electrode across the dielectric layer, and the other end faces the short-circuited end of the last-stage resonator electrode across the dielectric layer, 5. The filter device according to claim 1, further comprising a coupling electrode that is electrically connected to a short-circuited end of the resonator electrode facing the one end and the other end. 前記接地電極と前記共振器電極との間において前記誘電体層を挟んで前記接地電極と対向するとともに、複数の前記共振器電極の開放端にそれぞれ接続された複数の容量電極を有することを特徴とする請求項1乃至請求項5のいずれかに記載のフィルタ装置。   It has a plurality of capacitance electrodes which are opposed to the ground electrode with the dielectric layer interposed between the ground electrode and the resonator electrode, and are respectively connected to open ends of the plurality of resonator electrodes. The filter device according to any one of claims 1 to 5. 前記容量電極の一部が前記誘電体層を挟んで前記内部接地電極と対向して電磁界結合するように配置されていることを特徴とする請求項6記載のフィルタ装置。   The filter device according to claim 6, wherein a part of the capacitive electrode is disposed so as to be electromagnetically coupled to the internal ground electrode across the dielectric layer. 前記誘電体層を挟んで初段の前記共振器電極に接続された前記容量電極と対向して電磁界結合し、前記入力結合電極に接続された入力結合補強電極、または、前記誘電体層を挟んで最終段の前記共振器電極に接続された前記容量電極と対向して電磁界結合し、前記出力結合電極に接続された出力結合補強電極を備えることを特徴とする請求項6または請求項7に記載のフィルタ装置。   An electromagnetic coupling between the capacitive electrode connected to the resonator electrode in the first stage across the dielectric layer and an input coupling reinforcing electrode connected to the input coupling electrode, or the dielectric layer sandwiched 8. An output coupling reinforcing electrode connected to the output coupling electrode by being electromagnetically coupled opposite to the capacitor electrode connected to the resonator electrode at the last stage. The filter device according to 1.
JP2008042361A 2008-02-25 2008-02-25 Filter device Expired - Fee Related JP4986882B2 (en)

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