JP5000537B2 - Component conveying device, component mounting device, and component inspection device - Google Patents

Description

  The present invention relates to a component conveying apparatus having a movable head unit including a plurality of heads for holding components, a component mounting apparatus having the apparatus, and the like.

2. Description of the Related Art Conventionally, there is a component mounting apparatus equipped with a head unit on which a plurality of heads are mounted, and by using this head unit, components are taken out from a tape feeder, and a plurality of components are simultaneously transported and mounted on a substrate. In this type of component mounting apparatus, it is necessary to individually lift and lower the component suction nozzles (component holding members) provided in each head when holding or mounting components. A linear motion mechanism using a screw shaft was provided to raise and lower each nozzle individually. However, recently, as disclosed in Patent Document 1, for example, there is provided a device in which a nozzle is moved up and down by a linear motion mechanism using a linear motor. In brief, the head has a shaft-type linear motor in which a shaft-type mover is inserted into a ring-shaped stator as a drive source, and sucks and holds parts by a nozzle provided at the tip of the mover. In addition, the nozzle is driven up and down by the operation of the linear motor.
JP 2006-180645 A

  In recent years, the mounting density of the component mounting board has been increased, and on the other hand, the production of the board is required to be further accelerated. In order to meet such demands, it is necessary to efficiently mount components at close mounting positions while suppressing the amount of movement of the head unit on the substrate during component mounting. It is essential to reduce the pitch.

  However, in the conventional head structure to which a shaft type linear motor is applied, a cylindrical stator is arranged on the outer periphery of a shaft (movable element) having a nozzle with a certain gap, and the shaft is further stopped when the motor is stopped. Since a return spring for resetting to the raised position is arranged on the outer periphery of the shaft, it is difficult to reduce the size of the head in the width direction (radial direction), which is disadvantageous in arranging a plurality of heads at a narrow pitch. .

  The present invention has been made in view of the above circumstances, and an object thereof is to enable a plurality of heads to be mounted on a head unit at a narrower pitch.

In order to solve the above-described problems, the present invention has a movable head unit including a plurality of heads that hold a component, and in the component transport apparatus that transports a component by the head unit, the plurality of heads include: Mounted in parallel with the head unit in a state of being aligned in a horizontal first direction, each head extending vertically with respect to the head unit, and a slider movably mounted on the rail A guide means having a component, a component holding member provided so as to be movable in the vertical direction with respect to the head unit by the guide means, and a stator and a mover constituted by a coil portion and a permanent magnet. A linear motor that drives the component holding member forward and backward while generating a suction force between the child and the mover, and upward with respect to the component holding member Anda return spring which gives an urging force of the first direction and has a head unit support member which extends in a direction parallel to the second longitudinal direction direction perpendicular to the longitudinal direction of the head unit support member in a horizontal plane The head unit is disposed on the front side of the head unit support member and supported so as to be movable in the longitudinal direction along the head unit support member. A linear motor main body part composed of a coil part and a permanent magnet and guide means are arranged in a line in order from the front end side in the return spring, the linear motor, and the component holding member in the plan view. The motor main body portion, the guide means and the return spring are arranged at predetermined positions on the axis line.

In the component mounting apparatus configured as described above, when the linear motor main body portion, the guide means, and the return spring constituting the head are in the horizontal plane, the second direction perpendicular to the longitudinal direction of the head unit support member is the front-rear direction. Since the component holding member is arranged at a predetermined position on the axis line in which the linear motor main body part, the guide means and the return spring are arranged in a plan view, the parts are arranged in the front-rear direction. It can be set as a compact structure. Therefore, a plurality of heads can be arranged at a narrower pitch.
Further, according to this configuration, since the return spring is disposed at the front end in the arrangement direction, there is an advantage that access to the return spring is easy and maintenance performance such as spring replacement accompanying deterioration with time is improved.
In addition, the return spring can be easily accessed without being obstructed by the head unit support member, and the maintainability such as the replacement of the spring is further improved.

In this configuration, the mover of the linear motor has a U-shaped cross section, extends in the vertical direction, and is fixed to the slider with the guide means interposed therein, and a side surface of the slide base. The linear motor includes a plurality of permanent magnets fixed to a side surface on one end side in the front-rear direction and arranged in a vertical direction along the side surface. It is preferable that the linear motor main body portions are arranged in the front-rear direction with respect to the guide means by disposing the stator so as to face each other in the direction.
The component holding members are arranged in the arrangement direction along with the guide means and the return spring along the front-rear direction when the second direction orthogonal to the longitudinal direction of the head unit support member is defined as the front-rear direction in a horizontal plane. However, according to the configuration in which the linear motor main body portion, the guide means, and the return spring are disposed below these in a side view, the component holding member is disposed below the linear motor main body portion and the like. Therefore, the head can be made compact in a direction orthogonal to the head arrangement direction.

  In the configuration of the head in which the return spring, the linear motor main body, and the guide means are arranged in a direction orthogonal to the head arrangement direction, the guide force means the position where the propulsive force is applied by the linear motor and the position where the return spring is urged. On the other hand, since they are offset in the direction in which they are arranged (direction perpendicular to the head arrangement direction), the moment of these forces causes twisting of the guide means and hinders smooth drive (particularly lowering) of the component holding member. Can be considered. However, such inconvenience is mitigated by the following configuration.

  That is, the head has a configuration in which the return spring, the linear motor main body portion, and the guide means are arranged in order from one end side in the arrangement direction. According to this configuration, since the return spring and the linear motor main body are located on the same side with respect to the guide means, when the component holding member is lowered, the moment that acts on the guide means by the propulsive force of the linear motor and the return spring The direction of the moment acting on the guide means is reversed. Accordingly, the total moment acting on the guide means is reduced, and thereby the occurrence of twisting of the guide means when the component holding member is lowered is mitigated.

  On the other hand, a component mounting apparatus according to the present invention is a component mounting apparatus that takes out a component from a component supply unit and mounts it on a substrate by a component conveying device having a movable head unit having a plurality of heads for holding the component. The component conveying device includes the component conveying device as described above.

  The component inspection apparatus according to the present invention takes out a component from a component supply unit and transfers it to a predetermined component inspection unit by a component conveying device having a movable head unit having a plurality of heads for holding the component. In the component inspection apparatus that performs the component inspection, the component conveying apparatus includes the above-described component conveying apparatus.

  According to these devices, since the component conveying device as described above is provided, it is possible to efficiently mount components at close positions on the substrate using a head unit having a head mounted at a narrow pitch. In addition, it is possible to efficiently transfer parts to a plurality of closely inspected parts inspection units.

  According to the present invention, the guide means, the linear motor main body portion, and the return spring that constitute the head are arranged so as to be aligned along a direction orthogonal to the head arrangement direction. Since the drive shaft is disposed at a predetermined position on the axis line where the springs are arranged, the head itself can be configured to be compact in the head arrangement direction. Therefore, a plurality of heads can be arranged at a narrow pitch in the head arrangement direction.

  FIG. 1 is a plan view showing a schematic configuration of a component mounting apparatus according to the present invention (a component mounting apparatus to which a component conveying apparatus according to the present invention is applied). In the drawings used in this description including this figure, XYZ rectangular coordinate axes are shown in order to clarify the directional relationship of each figure.

  As shown in the figure, a conveyor 12 is disposed as a board transport mechanism on a base 10 of the component mounting apparatus, and a printed board P (hereinafter simply referred to as a board P) is placed from the right side of the figure by the conveyor 12. It is transported to the left side and carried into a predetermined work position (the position of the substrate P shown in the figure). A substrate support device 11 that supports the substrate P with a backup pin during a mounting operation is disposed in a region below the work position.

  Feeder installation areas 13 are provided on both sides of the conveyor 12 (upper and lower sides in FIG. 1). In these feeder installation areas 13, for example, component feeders such as tape feeders 14 are arranged in parallel along the conveyor 12. Has been placed. Each tape feeder 14 holds a small piece of chip parts such as an integrated circuit (IC), a transistor, a resistor, a capacitor, etc. at a predetermined interval, and holds a reel on which a held tape is wound. By feeding the tape, the component is supplied to the component supply position at the tip of the feeder, and the component is picked up by the head unit 15.

The head unit 15 for mounting components is provided above the base 10. The head unit 15 picks up components from the tape feeder 14 and conveys them onto the substrate P and mounts them on a predetermined position on the substrate P. The head unit 15 is mounted in a predetermined position on the substrate P. It can be moved in the transport direction , the first direction ) and in the Y-axis direction (second direction) orthogonal thereto on the horizontal plane. That is, the head unit 15 is movably supported by the head unit support member 18 extending in the X-axis direction. The head unit support member 18 is supported by a fixed rail 17 whose both ends extend in the Y-axis direction, and is movable along the fixed rail 17 in the Y-axis direction. The head unit 15 is driven in the X-axis direction via the ball screw shaft 21 by the X-axis servo motor 20, while the head unit support member 18 is moved in the Y-axis direction via the ball screw shaft 23 by the Y-axis servo motor 22. To be driven. In this embodiment, the head unit 15 and the above-described mechanism for moving the head unit 15 correspond to the component conveying apparatus according to the present invention.

  As shown in FIG. 2, the head unit 15 is equipped with a plurality of heads 16 for holding and transporting components. In this embodiment, a total of ten heads 16 are arranged in a row in the X-axis direction. Is arranged. Each head 16 has a drive shaft 34 extending in the Z-axis direction (vertical direction), and a component suction nozzle 35 is attached to the tip (lower end) of the drive shaft 34. The nozzle 35 is connected to the negative pressure generator via an internal passage of the drive shaft 34 and a switching valve (not shown), and a negative pressure suction force is applied to the tip of the suction nozzle from the negative pressure generator at the time of component suction. This makes it possible to adsorb and hold parts. In this embodiment, the drive shaft 34 and the nozzle 35 correspond to a component holding member according to the present invention.

  The nozzle 35 (drive shaft 34) can be moved up and down (moved in the Z-axis direction) and rotated around the nozzle central axis (R axis) with respect to the head unit 15, and is driven by the lift drive mechanism and the rotation drive mechanism, respectively. It has become so. Among these drive mechanisms, the lift drive mechanism is incorporated in each head 16. The configuration of each head 16 including the elevation drive mechanism and the configuration of the rotation drive mechanism will be described later.

  A substrate imaging unit 24 is mounted on the head unit 15. The board imaging unit 24 includes an area camera having a CCD or other imaging device, an illumination device, and the like. The board imaging unit 24 is fixed in a downward posture with respect to the head unit 15 and picks up various marks on the board P carried into the work position. It is possible.

  On the base 10, as shown in FIG. 1, a component imaging unit 25 is provided for imaging a component adsorbed by each head 16 (nozzle 35) of the head unit 15. Similarly to the board imaging unit 24, the component imaging unit 25 includes an area camera, a lighting device, and the like, and is fixed on the base 10 in an upward posture. As a result, when the head unit 15 is disposed above the component imaging unit 25 after the component is picked up, the component picked up by each head 16 can be picked up by the component imaging unit 25.

  Next, specific configurations of the head unit 15 and each head 16 will be described.

  Ten heads 16 are mounted on the head unit 15 as described above. Each head 16 is a member flattened in the X-axis direction, and is fixed to the head unit 15 integrally in a state where ten heads are arranged in the X-axis direction, as shown in FIG.

  3 to 5 show a specific configuration of the head 16, FIG. 3 is a side view (viewed along the line III-III in FIG. 2), FIG. 4 is a front view, and FIG. 1 shows the head 16 in an exploded perspective view. In FIG. 5, some components such as the drive shaft 34 are omitted for convenience.

  The head 16 generally includes the drive shaft 34 having the nozzle 35 at the lower end, a linear guide 32 (guide means) that drives the drive shaft 34, the nozzle 35, and the like in the Z-axis direction, and a linear motor 40. And a return spring 48 for applying an upward urging force to the nozzle 35 and the like, and a frame 30 and the like, and the components such as the linear guide 32 and the like are assembled into the frame 30 as a unit. The nozzle 35 is driven in the Z-axis direction by the linear motor 40, and the nozzle 35 is held at the upper position by the urging force of the return spring 48 when the linear motor 40 is stopped.

  More specifically, the frame 30 is a plate-shaped member that is flat in the X-axis direction and includes a side wall portion 302 around a part of the base plate 301, and is made of a surface-treated aluminum alloy or the like. The frame 30 is assembled with a linear motor 40 and a linear guide 32.

  The linear motor 40 has a stator 42 and a mover 44. The stator 42 includes a stator body in which a coil 422 (coil portion) is mounted on a comb-shaped core 421, and a pair of sub teeth 423 and 423 that are separate from the stator body. The stator main body and the sub teeth 423 and 423 are respectively fixed to the base plate 301 with bolts. As shown in FIG. 3, the sub teeth 423 and 423 are aligned with both ends of the coil 422 of the stator main body. It is fixed to. These sub teeth 423 and 423 reduce the so-called cogging force by supplementing the magnetic flux formation at both ends of the stator when the motor is driven. In the present embodiment, the sub teeth 423 and 423 are provided separately from the stator main body, but may of course be provided integrally with the stator main body (core 421).

  The mover 44 is provided side by side in the Y-axis direction with respect to the stator 42. The mover 44 has a slide base 441 having a U-shaped cross section extending in the Z-axis direction. A plurality of permanent magnets 442 are provided on a side surface (a surface facing the stator 42) of the slide base 441 via a yoke 443. Are arranged. Specifically, a permanent magnet 442 having an N pole on the stator 42 side and an S pole on the mover 44 side and an S pole on the stator 42 side and an N pole permanent magnet 442 on the mover 44 side are alternately arranged in the Z-axis direction. ing. The movable element 44 is fixed to a slider 322, which will be described later, so that the movable element 44 can move in the Z-axis direction. In this embodiment, the stator 42, the permanent magnet 442 of the mover 44, and the back yoke 443 (that is, the portion other than the slide base 441) correspond to the linear motor main body according to the present invention.

  The linear guide 32 includes a rail 321 extending in the Z-axis direction and a plurality of sliders 322 and 322 that are slidably mounted in the Z-axis direction with respect to the rail 321, and the rail 321 is attached to the base plate 301. It is incorporated in the frame 30 by being fixed with bolts. The movable element 44 (slide base 441) of the linear motor 40 is fixed to the sliders 322 and 322 of the linear guide 32. Thus, when a predetermined drive signal is given to the stator 42 of the linear motor 40 from a linear drive control unit (not shown), the movable element 44 is driven in the Z-axis direction at a direction and speed according to the drive signal. It has become.

  Note that the stator 42 and the mover 44 are in a state where a predetermined gap is formed between them (precisely between the mover side end of the comb-shaped core 421 and the stator side surface of the permanent magnet 442). It is fixed to the frame 30.

  More specifically, the base plate 301 is integrally formed with a pair of protrusions 303 and 303 having a reference surface 304 for positioning the stator. On the other hand, teeth are arranged in both ends of the core 421 of the stator 42. Extending portions 421a and 421a are integrally formed. Then, each extended portion 421a of the core 421 is abutted against the reference surface 304 of each of the protrusions 303 and 303 from the side opposite to the movable element 44 side (left side in FIG. 3). A bolt 425 is screwed into the screw hole 301 a of the base plate 301 through the formed through hole. Thereby, the stator 42 is assembled to the frame 30 in a state where the stator 42 is positioned in the Y-axis direction.

  Further, a protrusion 305 for positioning the mover is integrally formed on the base plate 301, and the rail 321 is opposed to the protrusion 305 from the side opposite to the stator 42 side (right side in FIG. 3). In this state, a bolt 325 is screwed into the screw hole 301b of the base plate 301 through a through hole formed in the rail 321. As a result, the movable element 44 is assembled to the frame 30 through the linear guide 32 while being positioned in the Y-axis direction. The movable element 44 may be assembled at a predetermined position of the slider 322 after the rail 321 is assembled to the base plate 301. Alternatively, the rail 321 may be assembled to the base plate 301 after the movable element 44 is assembled to the slider 322 in advance. It may be assembled to.

  As described above, the stator 42 and the mover 44 are assembled to the frame 30 with the stator 42 and the mover 44 positioned in the Y-axis direction, respectively, so that a gap of a predetermined dimension is formed between the stator 42 and the mover 44. ing. In the figure, reference numeral 323 is a stopper that restricts movement of the slider 322 in the Z-axis direction, and reference numeral 324 is a stopper that restricts movement of the movable element 44 (slide base 441) in the Z-axis direction. Each is fixed to the base plate 301 with a bolt.

  A drive shaft 34 is attached to the mover 44 of the linear motor 40 configured as described above. Specifically, a mounting arm 37 extending in the Y-axis direction toward the lower side of the stator 42 is fixed to the lower end portion of the slide base 441, and the drive shaft 34 is connected to the lower surface of the mounting arm 37 via the shaft support member 36. Is installed.

  The drive shaft 34 has a hollow shaft, and is supported so as to be rotatable around the R axis with respect to the shaft support member 36. A negative pressure introduction port 361 provided in the shaft support member 36 and a negative pressure not shown in the figure. It is connected to the negative pressure generator via a passage.

  The drive shaft 34 is held by the head unit 15 so as to be axially displaceable and rotatable about the shaft center (around the R axis) by a spline or the like (not shown).

  A return spring 48 is disposed at a position opposite to the linear guide 32 with a linear motor main body portion (a portion of the linear motor 40 other than the slide base 441) interposed therebetween. The return spring 48 is mounted across the upper end portion of the frame 30 and the mounting arm 37, whereby an upward biasing force is applied to the drive shaft 34 via the mounting arm 37 and the shaft support member 36. Has been.

  The head 16 incorporates a magnetic sensor 45 as a position detection sensor for detecting the positions of the mover 44 and the drive shaft 34 (nozzle 35). That is, as shown in FIG. 5, a scale is magnetically recorded on the side surface of the mover 44 (slide base 441) of the linear motor 40 opposite to the surface on which the permanent magnet 442 is disposed. The plate-shaped magnetic scale 46 is fixed along the slide base 441. On the other hand, in the frame 30, a magnetic sensor 45 such as an MR sensor or a Hall sensor is attached to a sensor support portion 306 provided on the base plate 301. The magnetic sensor 46 can be moved by reading the magnetic scale 46. The positions of the child 44 and the drive shaft 34 (nozzle 35) can be detected. In the figure, reference numeral 451 is a cover member that covers the control board and the like of the magnetic sensor 45.

  The ten heads 16 configured as described above are overlapped with each other in the X-axis direction, and a return spring 48 is located on the front side of the head unit 15 (on the side opposite to the head unit support member 18 side). It is fixed integrally in the state. Specifically, a pair of positioning pins 310, 310 project from the frame 30 on the assembly surface side of the linear guide 32 and the like, and a corresponding positioning hole (not shown) is formed on the other surface side. The positioning pins 310 and 310 are inserted into the positioning holes of the adjacent heads 16 so that the heads 16 are overlapped in the X-axis direction while being positioned with respect to each other. Then, mounting frames 15b are respectively mounted on the mounted heads 16 group from the outside in the X-axis direction, and the mounting frames 15b and the heads 16 group are bolted through through holes 312 formed in the frames 30. 151 and the nut 152 are integrally fastened, and both mounting frames 15b are positioned and fixed with respect to the main body frame 15a of the head unit 15. Accordingly, ten heads 16 are integrally fixed to the head unit 15.

  As shown in FIG. 2, the drive shaft 34 of each head 16 fixed to the head unit 15 is held by a holding portion 15c provided on the main body frame 15a. Further, the drive shaft 34 is rotatably supported by the holding portion 15c, and drive pulleys (not shown) of drive motors (rotary motors) 26, 26 fixed to the main body frame 15a by a drive belt or the like not shown. Thus, the rotational drive mechanism is configured.

  In the component mounting apparatus configured as described above, components are mounted as follows.

  First, the head unit 15 moves to the feeder installation area 13 and the components are sucked by the heads 19. Specifically, after a predetermined head 16 is disposed above the tape feeder 15, the drive shaft 34 is driven up and down by the linear motor 40, whereby the nozzle 35 is lowered to suck and take out the components in the tape. . At this time, if possible, parts are taken out simultaneously by the plurality of heads 16. When the suction of the components is completed, the head unit 15 moves on the board P along the predetermined path after passing over the component recognition camera 17. During this movement, the component suction state by each head 16 (nozzle 35) is image-recognized and the correction amount at the time of mounting is calculated. When the head unit 15 reaches the first mounting position on the substrate P, the drive shaft 34 is driven up and down by the linear motor 40 to mount components on the substrate P, and thereafter the head unit 15 sequentially moves to the mounting position. As a result, the remaining suction components are mounted on the substrate P.

  In the component mounting apparatus according to the present invention as described above, a plurality of (10) heads 16 are mounted on the head unit 15 and mounted on the substrate P while transporting components by these heads 16. In addition, each head 16 includes a linear guide 32, a linear motor main body portion (a portion of the linear motor 40 other than the slide base 441) and a return spring 48 in a direction (Y-axis direction) orthogonal to the head arrangement direction (X-axis direction). Since the nozzles 35 (drive shafts 34) are arranged below the linear motors 40, etc., the head 16 is a compact flat in the X-axis direction as shown in FIG. It becomes a structure. Since a plurality of such flat-structured heads 16 are mounted on the head unit 15 so as to overlap each other in the X-axis direction, the heads 16 are arranged at a narrow pitch in the X-axis direction. Become. Therefore, according to this component mounting apparatus, as a result of the plurality of heads 16 being mounted on the head unit 15 at a narrow pitch in this way, the board P that requires high-density mounting, that is, the board P close to the mounting position. When mounting these components, it is possible to mount the components by efficiently moving the nozzle 35 to the adjacent mounting position while suppressing the amount of movement of the head unit 15, and thus mounting the components more efficiently. Can do.

  Each head 16 is fixed to the head unit 15 with the return spring 48 positioned on the front side of the head unit 15 (on the opposite side to the head unit support member 18 side). During maintenance, the operator can easily access the return spring and perform work without being interrupted by the head unit support member 18. Therefore, there is also an advantage that the maintainability of the return spring 48 is good.

  As described above, in the configuration of the head 16 in which the return spring 48, the linear motor main body portion, and the linear guide 32 are arranged in the Y-axis direction, the operation position of the propulsive force by the linear motor 40 and the operation of the urging force by the return spring 48 are used. Since the position is offset, the linear guide 32 (slider 322) is twisted due to the moment of these forces, particularly during component mounting or mounting, and the smooth lowering operation of the nozzle 35 (drive shaft 34) is hindered. It is possible that However, in the head 16 described above, the return spring 48, the linear motor main body portion, and the linear guide 32 are arranged in this order from one end side in the Y-axis direction, and the linear guide 32 is formed by the propulsive force F1 (see FIG. 3) of the linear motor 40. The moment acting on the linear guide 32 is reversed due to the acting moment and the biasing force F2 of the return spring 48 (see FIG. 3). Accordingly, the total moment acting on the linear guide 32 can be effectively reduced, and as a result, the twist of the linear guide 32 when the nozzle is lowered can be reduced. Therefore, while the return spring 48, the linear motor main body portion, and the linear guide 32 are arranged side by side along the Y-axis direction (that is, the head 16 has a flat structure), the nozzles can be smoothly used for mounting components on the board P. There is also an advantage that 35 can be driven.

  Here, the problem is only the twist of the linear guide 32 when the nozzle (drive shaft 34) is lowered, because the twist of the linear guide 32 when the nozzle is raised has little effect on the mounting accuracy. is there. In other words, even after the parts are picked up (after picking up the parts from the tape feeder 14), the linear guide 32 is twisted when the nozzle is raised, and the picked-up parts are rattled. Correction is possible by component recognition processing by the imaging unit 25, and there is almost no influence on mounting accuracy. This is because the component is not sucked when the nozzle rises after the component is mounted, and therefore there is no room for the component to be displaced due to the play.

  By the way, the component mounting apparatus described above is an example of a preferred embodiment of the component mounting apparatus according to the present invention, and the specific configuration thereof can be appropriately changed without departing from the gist of the present invention.

  For example, in the above-described embodiment, the head 16 has the return spring 48, the linear motor main body portion (the portion of the linear motor 40 other than the slide base 441), and the linear guide 32 in a substantially line in order from one end side along the Y-axis direction. For example, the linear motor main body portion, the linear guide 32, and the return spring 48 may be arranged in this order from one end side. However, in order to reduce the twist generated in the linear guide 32 when the nozzle is lowered and to smoothly drive the drive shaft 34, it is desirable to arrange the linear motor main body portion and the like in the arrangement as in the above embodiment.

  Moreover, in the said embodiment, although the head 16 (drive shaft 34) becomes a structure which arrange | positions the drive shaft 34 in the downward position with respect to the return spring 48, the linear motor 40, the linear guide 32, etc., for example, The drive shaft 34 may be disposed side by side in the Y-axis direction together with the return spring 48, the linear motor main body portion, and the linear guide 32. In short, the nozzle 35 (drive shaft 34) may be disposed at a predetermined position on the axis line in which the return spring 48, the linear motor main body portion, and the linear guide 32 are arranged in plan view. However, the configuration in which the nozzle 35 (drive shaft 34) is arranged at a lower position of the linear motor 40 or the like as in the above embodiment is advantageous in reducing the size of the head unit 15 in the Y-axis direction.

  In the above-described embodiment, the application of the present invention has been described using a component mounting apparatus as an example. However, the application target of the present invention is not limited to a component mounting machine, and includes, for example, a plurality of heads that hold components. The present invention can also be applied to a component inspection apparatus that takes out a component from a component supply unit and transfers it to a predetermined component inspection unit by a component conveyance device having a movable head unit and performs component inspection.

It is a top view which shows schematic structure of the component mounting apparatus (component mounting apparatus which has the component conveyance apparatus which concerns on this invention) concerning this invention. It is a front view which shows the specific structure of a head unit. FIG. 3 is a side view (a view taken along the line III-III in FIG. 2) showing a configuration of a head mounted on the head unit. It is a front view which shows the structure of a head. It is a disassembled perspective view which shows the structure of a head. It is a perspective view explaining how to assemble each head to the head unit.

Explanation of symbols

15 Head unit 16 Head 30 Frame 32 Linear guide 321 Rail 322 Slider 34 Drive shaft 35 Nozzle 40 Linear motor 42 Stator 44 Movable element

Claims (5)

In a component conveying apparatus that has a movable head unit having a plurality of heads for holding components and conveys components by this head unit,
The plurality of heads are mounted in parallel to the head unit in a state aligned in a horizontal first direction ,
Each of the heads has a guide means having a rail extending in the vertical direction with respect to the head unit and a slider movably mounted on the rail;
A component holding member provided to be movable in the vertical direction with respect to the head unit by the guide means;
A linear motor that has a stator and a mover constituted by a coil part and a permanent magnet, and drives the component holding member to move up and down while generating an attractive force between the stator and the mover;
A return spring for applying an upward biasing force to the component holding member,
The head unit has a head unit support member that extends in a direction parallel to the first direction, and the head unit is the head unit when the second direction orthogonal to the longitudinal direction of the head unit support member is defined as the front-rear direction in a horizontal plane. It is arranged on the front side of the unit support member and is supported so as to be movable in the longitudinal direction along the head unit support member. Among the return spring and the linear motor in order from the front end side along the front-rear direction The linear motor main body portion composed of the coil portion and the permanent magnet and the guide means are arranged so as to be aligned in a line,
The component conveying device , wherein the component holding member is disposed at a predetermined position on an axis line in which the linear motor main body portion, the guide means, and the return spring are arranged in a plan view. The mover of the linear motor has a U-shaped cross section and extends in the vertical direction. The slide base is fixed to the slider in a state in which the guide means is interposed therein, and a side surface of the slide base. A plurality of permanent magnets fixed to a side surface on one end side in the front-rear direction and arranged in the vertical direction along the side surface;
In the linear motor, the linear motor main body portion is arranged in the front-rear direction with respect to the guide means by arranging the stator so that the coil part faces the front-rear direction with respect to the permanent magnet. parts conveying apparatus according to claim 1, characterized in that out. In the component conveying apparatus according to claim 1 or 2,
The component conveying device , wherein the component holding member is disposed below the linear motor main body portion, the guide means, and the return spring in a side view . In a component mounting apparatus that takes out a component from a component supply unit and mounts it on a substrate by a component conveying device having a movable head unit including a plurality of heads that hold the component.
  A component mounting apparatus comprising the component conveying apparatus according to claim 1 as the component conveying apparatus. In a component inspection apparatus that takes out a component from a component supply unit and transfers it to a predetermined component inspection unit by a component conveying device having a movable head unit having a plurality of heads for holding the component,
  A component inspection apparatus comprising the component conveyance device according to claim 1 as the component conveyance device.

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