JP5007673B2 - Integrated thin film solar cell manufacturing equipment - Google Patents

Description

  The present invention relates to an integrated thin film solar cell manufacturing apparatus that mechanically grooves a predetermined layer of an integrated thin film solar cell and performs patterning.

In an integrated thin film solar cell, a large number of solar cells are formed on a single substrate, and many grooves are formed on the single substrate in order to produce a circuit for connecting them in series. In general, this process is called a patterning process, and in addition to known processing means using laser and etching, known means for mechanically processing using a tool of high hardness material such as metal, ceramics, diamond, etc. are adopted. . In any case, since high throughput is required, for example, a method in which a large number of tools are provided in the apparatus and a large number of grooves are simultaneously processed by one scanning is employed (for example, see Patent Document 1). In the above-described prior art, a mechanism for adjusting the interval between a plurality of tools is not described, but in order to optimize the output of the solar cell, it is necessary to adjust the patterning interval. The mechanism is important.
FIG. 9 is a diagram illustrating an example of a mechanism for adjusting a tool interval in a conventional integrated thin film solar cell. Reference numeral 1 denotes a substrate on which a metal thin film, a semiconductor thin film, a transparent conductive film or the like is formed. Reference numeral 2 denotes a processing table for holding the substrate 1, and 3 denotes a plurality of tools for grooving the substrate 1. Reference numeral 4 denotes a plurality of tool units provided with a mechanism for applying pressure to the tool 3, and a large number of them are arranged in order to increase the throughput as described above. Reference numeral 11 denotes a guide for the tool unit 4 installed in a direction for changing (shortening or extending) the interval between the tool units 4. Reference numeral 12 denotes a position adjusting screw for changing (shortening or extending) the interval of the tool unit 4 along the guide 11. Reference numeral 13 denotes a reference base that serves as a reference for position adjustment, and a screw hole is cut in a portion where the position adjustment screw 12 is fitted. Reference numeral 14 denotes a position fixing nut for fixing the position adjusting screw 12 to the reference base 13.
When changing the patterning interval, it is necessary to change the interval of the tool 3, loosen the position fixing nut 14 that fixes the position of the tool unit 4 to be changed, and turn the position adjusting screw 12 to turn the tool unit. 4 is adjusted, and when the tool unit 4 reaches a predetermined position, the rotation is stopped and the position fixing nut 14 is tightened to fix the position of the tool unit 4.
Since it is configured in this manner, when changing the patterning interval, it is necessary to adjust the intervals of the many tool units 4 one by one, and the positional accuracy of the tool unit 4 is required to be high. Changing the interval was very time consuming.
FIG. 10 is a diagram for explaining an improved example of the adjustment mechanism of the tool interval in the conventional integrated thin film solar cell used to solve the above problem. According to this, the structure in which the tool unit 4 is held by the guide 11 is the same as that of the conventional example of FIG. 9, but the power conversion mechanism 9 is attached to each of the plurality of tool units 4 and each of the power transmission mechanisms 8 is attached. And the structure which connects the electric motor 7 which operates the power transmission mechanism 8 is provided. Thereby, by driving the electric motor 7, it becomes possible to adjust the positions of all the tool units 4 electrically, and the labor for adjusting the distance between the tools 3 is greatly reduced, and high accuracy can be realized. It is.
However, such a mechanism is good if the number of tool units 4 is relatively small. However, as the number of tool units 4 is increased in order to increase the throughput, the mechanism installation space becomes extremely large, which in turn reduces the foot of the entire apparatus. There was a problem of large prints. In addition, since the number of components such as the electric motor 7 and the power transmission mechanism 8 is large, the manufacturing cost is high, and it is necessary to assemble and adjust such a mechanism with high precision. Sometimes it was necessary to spend a great deal of effort.

JP 2001-1119048 A

As described above, in the configuration of the tool interval adjustment mechanism in the conventional integrated thin film solar cell shown in FIG. 9, when changing the patterning interval, it is necessary to adjust the intervals of the many tool units 4 one by one. In addition, since the position accuracy of the tool unit 4 is required to be high, there is a problem that it takes much time to change the patterning interval.
Further, in the improved example of the tool spacing adjustment mechanism in the conventional integrated thin-film solar cell shown in FIG. 10, each tool unit 4 is equipped with an electric mechanism to easily adjust the spacing of the tools 3, so that the mechanism installation space is large. There is a problem that the installation space of the entire apparatus becomes large. In addition, since the number of components such as electric mechanisms increases, the manufacturing cost increases, and it is necessary to assemble and adjust such mechanisms with high accuracy. There was a problem that it was necessary to break.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an integrated thin-film solar cell manufacturing apparatus that can easily cope with a change in patterning pitch at a low cost.

In the integrated thin-film solar cell manufacturing apparatus according to the present invention, a large number of solar cells are formed on a substrate, and in order to fabricate a circuit for connecting them in series, a large number of grooves are formed on the substrate for patterning. In order to fix the position of each tool unit provided in each tool unit, a plurality of tool units provided with a mechanism for applying a predetermined pressure to the tool, and a plurality of tools for grooving the substrate A gripping mechanism that is connected to or released from the gripper, a gripped guide that is gripped by the gripping mechanism, an electric motor that moves the position of the tool unit, a power transmission mechanism that transmits the power of the motor, and a power transmission that is provided in each tool unit. A power conversion mechanism that converts the power transmitted by the mechanism into a linear motion of the tool unit, and is provided in each tool unit, and connects the power conversion mechanism and the tool unit. Comprising a tool gap adjustment mechanism consists of a clutch for opening is provided with a plurality of combinations of the electric motor and a power transmission mechanism in the vertical, the combination of electric motor and a power transmission mechanism provided in the upper portion, a long tool A unit is attached, and a short tool unit is attached to the combination of the electric motor and the power transmission mechanism provided in the lower portion, and the tool units are alternately arranged in a staggered manner to narrow the tool unit interval .

  According to this invention, each of the plurality of tool units is provided with a gripping mechanism for fixing the position, so that the position of an arbitrary tool unit can be fixed or released, and the power for causing each tool unit to move linearly is selected. An arbitrary tool unit can be moved electrically by providing a clutch that is connected or released. As a result, it is possible to realize the adjustment of the tool interval, which takes time, with high accuracy in a short time. In addition, the electric motor and the power transmission mechanism may basically be one set, and each tool unit only needs to be provided with an inexpensive gripping mechanism and clutch, so that the apparatus cost can be reduced. In addition, since the electric motor and the power transmission mechanism may be basically one set, the labor required for assembly, adjustment, and maintenance can be greatly reduced, and further, space saving is excellent.

Embodiment 1 FIG.
FIG. 1 is an explanatory diagram showing a schematic configuration of an integrated thin film solar cell manufacturing apparatus according to Embodiment 1 of the present invention, and FIG. 2 shows a clutch and a grip of the integrated thin film solar cell manufacturing apparatus according to Embodiment 1 of the present invention. FIGS. 3 to 6 are explanatory diagrams for explaining the operation of the integrated thin-film solar cell manufacturing apparatus according to the first embodiment of the present invention.

In FIG. 1, reference numeral 1 denotes a substrate having a metal thin film, a semiconductor thin film, a transparent conductive film or the like formed on the surface. Reference numeral 2 denotes a processing table for holding the substrate 1, and 3 denotes a plurality of tools for grooving the substrate 1. As the material of the tool 3, a material having a high hardness coating such as super steel, ceramics, diamond, diamond-like-carbon (DLC) or TiN having high hardness is used. Reference numeral 4 denotes a plurality of tool units (T _{1 to} T _n ) having a mechanism for applying a predetermined pressure to the tool 3, and a large number of them are arranged in order to increase the throughput. Reference numeral 5 denotes a gripping mechanism that is provided in each tool unit 4 and includes, for example, a brake for fixing the position of the tool unit 4. Reference numeral 6 denotes a gripped guide that is gripped by the gripping mechanism 5 that fixes the position of each tool unit 4, and also has a function as a guide for causing each tool unit 4 to move linearly. 7 is an electric motor for moving the position of each tool unit 4, and 8 is a power transmission mechanism comprising a ball screw or the like for transmitting the power of the electric motor 7. Reference numeral 9 denotes a power conversion mechanism composed of, for example, a ball screw nut or the like that converts the power transmitted by the power transmission mechanism 8 into a linear motion operation of the tool unit 4. Reference numeral 10 denotes a clutch for connecting or releasing the power conversion mechanism 9 and the tool unit 4. The clutch 10 has a function of transmitting the power of the electric motor 7 to the tool unit 4 when connected and disconnecting the power of the electric motor 7 when released. The plurality of tools 3, the plurality of tool units 4, the gripping mechanism 5, the gripped guide 6, the electric motor 7, the power transmission mechanism 8, the power conversion mechanism 9 and the clutch 10 constitute a tool interval adjusting mechanism.

  FIGS. 2A to 2D show a state where the clutch 10 and the gripping mechanism 5 are connected and released. In FIG. 2, the connected state is black and the open state is white. 2A shows that the clutch 10 and the gripping mechanism 5 are both open, FIG. 2B shows that the clutch 10 is connected, the gripping mechanism 5 is open, and FIG. 2C shows that the clutch 10 is open. The gripping mechanism 5 is in a connected state, and FIG. 2D shows both the clutch 10 and the gripping mechanism 5 in a connected state.

Next, the operation of the present invention will be described with reference to FIGS. In addition, the connection state of the clutch 10 and the gripping mechanism 5 indicates the connection state in black and the release state in white.
3, the case of moving only tool unit T ₅ on the right side as an example. Before the operation, all the gripping mechanisms 5 are in the connected state, and all the clutches 10 are in the released state. Next, in FIG. 4, is connected only clutch 10 of the tool unit T _5, to open only the gripping mechanism 5. Subsequently, in FIG. 5, when operating the electric motor 7, the power of the motor 7 is transmitted via the power transmission mechanism 8, a power conversion mechanism 9, further only the clutch 10 of the tool unit T ₅ in the connected state is power convey, to move the tool unit T _5. On the other hand, the tool unit T ₅ except clutch 10 is not transmitted power of the power converting mechanism 9 the tool unit 4, Note tool unit 4 because it and fixed in position by the gripping mechanism 5 is not moved. Subsequently, in FIG. 6, when the tool unit T ₅ reaches the desired position, the gripping mechanism 5 in coupled condition, a series of operations ends by releasing the clutch 10. This is done for each tool unit 4 to complete the adjustment of the tool spacing.

  With the above operation, the tool unit 4 can be easily moved with high accuracy without requiring a troublesome adjustment operation such as the adjustment mechanism of the tool interval in the conventional integrated thin film solar cell. Even if there are a plurality of tool units 4, the electric motor 7 and the power transmission mechanism 8 are configured as a set. This greatly reduces the time required for assembly, adjustment, and maintenance. In addition, since the installation space for the device is reduced for the same reason, the space of the apparatus can be saved.

Embodiment 2. FIG.
FIG. 7 is an explanatory diagram showing a schematic configuration of an integrated thin-film solar cell manufacturing apparatus according to Embodiment 2 of the present invention.
In the first embodiment, the gripped guide 6 also functions as a linear motion guide for the tool unit 4, but in the second embodiment, as shown in FIG. 7, load resistance and moment resistance are improved. For the purpose, a dedicated upper linear motion guide 15 and a lower linear motion guide 16 may be provided separately.

Embodiment 3 FIG.
FIG. 8 is an explanatory view showing a schematic configuration of an integrated thin-film solar cell manufacturing apparatus according to Embodiment 3 of the present invention.
In the first and second embodiments, a set of combinations of the electric motor 7 and the power transmission mechanism 8 is provided, but is not limited to the set. That is, in the third embodiment, for example, as shown in FIG. 8, when the interval between the tool units 4 is narrowed, the size of the gripping mechanism 5 and the clutch 10 becomes a problem. By providing a plurality of combinations of the transmission mechanisms 8 and arranging the tool units 4 in a staggered manner, the interval between the tool units 4 can be reduced. In FIG. 8, two combinations of the electric motor 7 and the power transmission mechanism 8 are provided, and the combination of the electric motor 7 and the power transmission mechanism 8 provided in the lower portion includes an odd number of short tool units 4 (T ₁ , T ₃ , T ₅ , T ₇ ) and an even number of long tool units 4 (T ₂ , T ₄ , T ₆ , T ₈ ) are attached to the combination of the electric motor 7 and the power transmission mechanism 8 provided in the upper part. .

Embodiment 4 FIG.
In the first to third embodiments, it was used for the purpose of individually adjusting the distance between the tools 3. However, in FIG. 1, all the clutches 10 are connected and all the gripping mechanisms 5 are opened, and the electric motor 7 is operated. When operated, all the tool units 4 operate in a lump, and therefore can be used for the purpose of pitch feed in patterning. As a result, since the adjustment of the tool interval and the pitch feed for patterning can be performed by the same mechanism, the manufacturing cost can be greatly reduced, and in addition, space saving, assembly, adjustment, and simplification of maintenance work can be achieved.

It is explanatory drawing which shows schematic structure of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing explaining operation | movement of the clutch and holding mechanism of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing explaining operation | movement of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing explaining operation | movement of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing explaining operation | movement of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing explaining operation | movement of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 1 of this invention. It is explanatory drawing which shows schematic structure of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 2 of this invention. It is explanatory drawing which shows schematic structure of the manufacturing apparatus of the integrated thin film solar cell in Embodiment 3 of this invention. It is explanatory drawing which shows an example of the adjustment mechanism of the tool space | interval in the conventional integrated thin film solar cell. It is explanatory drawing which shows the example of improvement of the adjustment mechanism of the tool space | interval in the conventional integrated type thin film solar cell.

Explanation of symbols

1 Substrate 2 Processing platform 3 Tool 4 Tool unit 5 Grip mechanism (brake)
6 Grip guide 7 Electric motor 8 Power transmission mechanism (ball screw)
9 Power conversion mechanism (ball screw nut)
10 Clutch
11 Guide 12 Position adjusting screw 13 Base 14 Position fixing nut 15 Dedicated upper linear motion guide 16 Dedicated lower linear motion guide

Claims (3)

In an apparatus for manufacturing an integrated thin-film solar cell, in which a large number of solar cells are formed on a substrate and a circuit for connecting them in series is manufactured, and a plurality of grooves are formed on the substrate and patterned.
A plurality of tools for grooving the substrate, a plurality of tool units having a mechanism for applying a predetermined pressure to the tool, and provided in each tool unit, for fixing the position of each tool unit A gripping mechanism that is connected or released, a gripped guide that is gripped by the gripping mechanism, an electric motor that moves the position of the tool unit, a power transmission mechanism that transmits power of the electric motor, and each tool unit. A power conversion mechanism that converts the power transmitted by the power transmission mechanism into a linear motion of the tool unit; and provided in each tool unit for connecting or releasing the power conversion mechanism and the tool unit. comprising a tool gap adjustment mechanism consists of a clutch,
A plurality of combinations of the electric motor and the power transmission mechanism are provided above and below, a long tool unit is attached to the combination of the electric motor and the power transmission mechanism provided in the upper part, and a combination of the electric motor and the power transmission mechanism provided in the lower part The apparatus for manufacturing an integrated thin-film solar cell , wherein short tool units are attached and the tool units are alternately arranged in a staggered manner to narrow the tool unit interval .   2. The integrated thin-film solar cell manufacturing apparatus according to claim 1, wherein a plurality of tool units are selectively operated by connecting or releasing a gripping mechanism and a clutch provided in each tool unit.   2. The patterning processing pitch feed is performed by operating all of the plurality of tool units collectively by operating the electric motor in a state where all the clutches are connected and all the gripping mechanisms are opened. The manufacturing apparatus of the integrated thin film solar cell as described.

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