JP5019097B2 - Electronic component characteristic measuring apparatus and electronic component characteristic value measuring method - Google Patents

Description

The present invention relates to a characteristic measuring device for an electronic component having an element connected to an external electrode and a characteristic value measuring method for the electronic component .

Conventionally, as shown in FIGS. 8 and 9, as a contact detection method in the impedance measuring apparatus 100 including four terminals of current supply terminals Hc and Lc and voltage detection terminals Hp and Lp, measurement is performed from a constant current source. A method of applying a constant current to the target (DUT) 102, detecting that a voltage corresponding to the resistance of the measurement target 102 is generated, and confirming that the terminal and the measurement target 102 are in contact with each other; a constant current source Current flows from the Hc terminal to the Hp terminal, and from the Lc terminal to the Lp terminal, and it is detected that a voltage corresponding to the specific resistance value possessed by the wiring and the terminal is generated at both ends of the constant current source. A method for confirming that the terminal 102 is in contact is known.
JP 2000-171501 A JP 2000-111153 A Japanese Patent Laying-Open No. 2005-069786

  By the way, when measuring the common impedance of the common mode choke coil which is the measurement object 102 or the common mode choke coil array in which a plurality of common mode choke coils are integrated into one chip with these measurement apparatuses 100, the contact of the measurement object 102 is detected. The following problems occur when performing detection.

That is, the voltage generated across the voltage detection terminal when all of the measurement terminal _T 1 through T ₄ and DUT102 are connected, the resistance of the measuring terminals _T 1 through T _4, and the measurement terminal _T 1 through T ₄ This is due to the combined resistance (total resistance) of the contact resistance between the DUTs 102 and the resistance component of the DUT 102.

Here, as shown in FIG. 9, the total resistance R is 1 / R _{total resistance} = 1 / (r ₁ + R ₁ + r ₂ ) + 1 / (r ₃ + R ₂ + r ₄ ). Here, when r = r ₁ ≈r ₂ ≈r ₃ ≈r ₄ and R = R ₁ ≈R ₂ , 1 / R _{overall resistance} = 1 / (2r + R) + 1 / (2r + R), and 1 / R R _{total resistance} = 2 / (2r + R), R _{total resistance} = r + R / 2.

On the other hand, the total resistance value when all the measurement terminals T _{1 to} T ₄ are not connected to the DUT 102 is infinite. For this reason, the contact detection of the DUT 102 can be easily determined by determining whether or not the total resistance value is lower than the threshold value if a predetermined threshold value regarding the total resistance is determined in advance.

However, according to the above formula, the total resistance R depends on the contact resistance value r, but the contact resistance value r varies depending on the surface conditions of the measurement terminals T _{1 to} T ₄ and the electrodes of the DUT 102. The threshold value for performing contact detection cannot be set, and contact detection cannot be performed.

In addition, since the current supply terminal and the voltage detection terminal are short-circuited on the measurement terminals T _{1 to} T ₄ side, it is determined that the contact detection function of the measurement apparatus 100 is always in contact, and the measurement terminal T ₁ ~T ₄ can not confirm whether or not in contact with the DUT102.

Therefore, in consideration of the above circumstances, the present invention provides an electronic component characteristic measuring apparatus and an electronic component that can stably detect whether or not a measurement object is in contact without being affected by the contact resistance value . An object is to provide a characteristic value measuring method .

The invention of claim 1 has a resistance value, whereas the electronic component characteristic measurement apparatus for measuring a characteristic value of the electronic component having two or more coils having respective external electrodes on end and the other end A measuring unit for measuring electric resistance and impedance characteristics other than the electric resistance, and a measuring unit connected to the measuring device and having measuring terminals T1, T2, T3, and T4 connected to the external electrodes, respectively. The measurement terminal T1 is connected to an external electrode at one end of one of the two coils, and the measurement terminal T2 is connected to the other end of one of the two coils. The measurement terminal T3 is connected to the external electrode at one end of the remaining coil of the two coils, and the measurement terminal T4 is connected to the remaining coil of the two coils. other The measuring terminal T1 and the measuring terminal T3 are connected in parallel to the Lo side of the measuring instrument, and the measuring terminal T2 and the measuring terminal T4 are connected to the Hi electrode of the measuring instrument. are connected in a parallel to the side, the resistance value is, before substantially the same as the Kigaibu electrode and the contact resistance value of the measurement terminals T2, T4, alternatively at less, little effect of the variation of the contact resistance _A resistor _RA having a sufficiently large resistance value which is not received is connected at least between the measuring terminal T1 and the Lo side of the measuring instrument, or between the measuring terminal T2 and the Hi side of the measuring instrument, and , At least between the measuring terminal T3 and the Lo side of the measuring instrument, or between the measuring terminal T4 and the Hi side of the measuring instrument.

The invention according to claim 2 is an electronic component characteristic value measuring method for measuring the characteristic value of the electronic component using the electronic component characteristic measuring apparatus according to claim 1, wherein the measurement terminals T1, T2 , T3, T4 are all in contact with the external electrode, and the measurement terminals T1, T2, T3, T4 are in contact with the external electrode of one of the two coils. When the measured DC resistance value is lower than the threshold value, the measurement terminals T1, T2, T3, and T4 are all in contact with the external electrode. Is detected .

According to the present invention, the resistance value of the element of the electronic component is approximately equal to or less than the contact resistance value of the external electrode and the measurement terminal of the element of the electronic component, and greater than the variation of the contact resistance value. Since a resistor having a value is connected between the measurement terminal and the measuring instrument, the total resistance value (the value of the combined resistance) is a larger proportion of the resistance value of the resistor, and the resistance of this resistor It depends greatly on the value. Thereby, the value of the total resistance (the value of the combined resistance) is hardly affected by the variation in the contact resistance value. As a result, it is possible to perform stable contact detection of an electronic component without being substantially affected by variations in the contact resistance value.

According to the present invention, even when a plurality of external electrodes are provided, the resistors are connected between the measuring terminals and the measuring devices that are in contact with all the external electrodes. It is possible to perform stable contact detection of electronic components without being substantially affected by the above.

  Next, a characteristic measuring apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a characteristic measuring apparatus according to an embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of the characteristic measuring apparatus.

As shown in FIGS. 1 and 2, the characteristic measuring apparatus 10 includes measurement terminals T ₁ , T ₂ , T ₃ , and T _{4 that} are in contact with the external electrodes 14A, 14B, 14C, and 14D of the measurement target (DUT) 12. And an impedance measuring instrument (for example, an LCR meter) 18 that measures the electrical resistance of the DUT 12 and electrical characteristics other than the electrical resistance. The impedance measuring device 18 has a function of measuring DC resistance in order to detect contact of the DUT 12.

Also, the Hi-side impedance measuring instrument 18, and the measurement terminal T _2, and the measurement terminal T _4, but are connected. And the measuring terminal T ₂ and the measurement terminal T _4, they are connected so as to be parallel to each other. Between the measuring terminal T ₂ and the impedance measuring device 18, the first resistor R _A is connected. Further, a second resistor _RA is connected between the measurement terminal T ₄ and the impedance measuring device 18. The first resistor _RA and the second resistor _RA are provided in parallel to each other.

Here, the first resistor _RA and the second resistor _RA are set so as to have a resistance value larger than each variation of contact resistance values r ₁ , r ₂ , r ₃ , r ₄ described later. Has been. The resistance values of the first resistor _RA and the second resistor _RA are (given contact resistance value) + ((DUT specific resistance value + resistance value of the resistor _RA ) / 2) −. It is determined by the formula (variation of contact resistance × 2).

In addition, a measurement terminal T ₁ and a measurement terminal T ₃ are connected to the Lo side of the impedance measuring instrument 18. And the measuring terminal T ₁ and the measurement terminal T _3, and is connected so as to be parallel to each other.

The DUT 12 to be measured is provided with external electrodes 14A, 14B, 14C, and 14D to which the measurement terminals T ₁ , T ₂ , T ₃ , and T ₄ are connected. The DUT 12 includes elements 20A and 20B connected to the external electrodes 14A, 14B, 14C, and 14D. Further, the impedances of the elements 20A and 20B of the DUT 12 are Z ₁ and Z ₂ . In the present embodiment, as the DUT 12, as shown in FIG. 3, the common mode choke coil 22 having two coils having a pair of external electrodes, and as shown in FIG. 4, a plurality of common mode choke coils. Is used as a common chip.

Here, as shown in FIG. 2, the contact resistance value between the external electrodes 14A of DUT12 and the measurement terminal _{T 1} is _{r 1.} Further, the contact resistance value between the external electrodes 14B of DUT12 and the measurement terminal _{T 2} are a _{r 2.} Further, the contact resistance value between the external electrodes 14C and the measurement terminal _{T 3} of DUT12 is _{r 3.} Further, the contact resistance value between the measurement terminals _{T 4} and external electrode 14D of DUT12 is _{r 4.}

The resistance values R ₁ and R ₂ of the elements 20A and 20B are substantially the same as the contact resistance values r ₂ and r ₄ of the external electrodes 14B and 14D of the elements 20A and 20B and the measurement terminals T ₂ and T _4. Or less than that.

  Next, the operation of the characteristic measuring apparatus 10 according to this embodiment will be described.

As shown in FIG. 1 and FIG. 2, by providing each resistor _RA at each measurement terminal T ₂ , T ₄ , the direct current resistance value (overall resistance value) viewed from the impedance measuring instrument 18 is r = r ₁ ≈ If r ₂ ≈r ₃ ≈r ₄ and R = R ₁ ≈R ₂ , then r + (R + R _A ) / 2.

At this time, by making the resistance value of each resistor _RA sufficiently larger than the contact resistance value r, the ratio of _RA to the entire resistance value increases. For this reason, the overall resistance value greatly depends on the resistance value of the resistor _RA . As a result, the value of the overall resistance (the value of the combined resistance) is hardly affected by variations in the contact resistance value r. As a result, stable contact detection of the DUT 12 can be performed with almost no influence of variations in the contact resistance value r.

In particular, it has been found that by making R ₁ = R ₂ = 1Ω and R _A = 20Ω, the contact detection of the DUT 12 is stabilized without being affected by the contact resistance value r. The resistance value of each resistor R _A connected to each measurement terminal T _2, T _4, because the measurement terminal T _2, T ₄ tip is corrected when carrying out the calibration, the measured impedance of DUT12 There is no impact. Further, since the switching device such as a scanner is not used to detect the contact of the DUT 12, the accuracy of the impedance measuring device 18 is not lowered.

Specifically, the DC resistance value of the DUT 12 is about 1Ω / element, and when all four measurement terminals T ₁ , T ₂ , T ₃ , and T ₄ are connected to the DUT 12, the measured DC resistance value Is about 10.5Ω to 11.5Ω. On the other hand, when the measurement terminal is in contact with only one element (T ₁ and T ₂ are in contact, T ₃ and T ₄ are in contact), the DC resistance value is 21Ω to 22Ω, and any element is in contact. If not, it becomes 10 kΩ which is the limit of the impedance measuring device 18. Therefore, if the threshold is set to about 15Ω, it can be detected that the four measurement terminals T ₁ , T ₂ , T ₃ and T ₄ are all in contact with the elements 20A and 20B of the DUT 12. it can.

Further, even when a plurality of external electrodes 14A, 14B, 14C, and 14D are provided, the resistor _RA is in contact with all the external electrodes 14A, 14B, 14C, and 14D, and the measurement terminals T ₁ , T ₂ , Since it is connected between T ₃ , T ₄ and the impedance measuring device 18, stable contact of the DUT 12 is hardly affected by variations in the contact resistance values r ₁ , r ₂ , r ₃ , r _4. Detection can be performed.

Further, as shown in FIG. 3, each element 20A, 20B of the DUT 12 is composed of a common mode choke coil 22 having two coils having a pair of external electrodes, and the impedance measuring device 18 is composed of an LCR meter. Thus, it is possible to perform stable contact detection of the DUT 12 by using the existing parts as they are and easily and easily without being affected by variations in the contact resistance values r ₁ , r ₂ , r ₃ , r _4. it can.

  Next, a modified example of the characteristic measuring apparatus 10 according to the present embodiment will be described.

As shown in FIG. 5, a resistor _RA may be connected between each of the measurement terminals T ₁ and T ₃ and the impedance measuring device 18. Further, as shown in FIG. 6, a resistor _RA may be connected between the measurement terminal T ₁ and the impedance measuring device 18 and between the measurement terminal T ₄ and the impedance measuring device 18. Further, as shown in FIG. 7, a resistor _RA may be connected between the measurement terminal T ₂ and the impedance measuring device 18 and between the measurement terminal T ₃ and the impedance measuring device 18. In each of the above modifications, as in the characteristic measurement apparatus 10 of the above embodiment, stable contact detection of the DUT 12 can be performed without being substantially affected by variations in the contact resistance value r.

It is a lineblock diagram of the characteristic measuring device concerning one embodiment of the present invention. 1 is an equivalent circuit diagram of a characteristic measuring apparatus according to an embodiment of the present invention. It is an equivalent circuit diagram at the time of applying a common mode choke coil to the element of the electronic component used as the measuring object of the characteristic measuring device concerning one embodiment of the present invention. It is an equivalent circuit diagram when a common mode choke coil array in which a plurality of common mode choke coils are combined into one chip is applied to an element of an electronic component to be measured by the characteristic measuring apparatus according to an embodiment of the present invention. It is a block diagram of the modification of the characteristic measuring apparatus which concerns on one Embodiment of this invention. It is a block diagram of the modification of the characteristic measuring apparatus which concerns on one Embodiment of this invention. It is a block diagram of the modification of the characteristic measuring apparatus which concerns on one Embodiment of this invention. It is a block diagram of the conventional characteristic measuring apparatus. It is an equivalent circuit diagram of the conventional characteristic measuring apparatus.

Explanation of symbols

10 characteristic measuring device 12 DUT (electronic parts)
14A External electrode 14B External electrode 14C External electrode 14D External electrode 18 Impedance measuring instrument (measuring instrument)
20A element 20B element 22 common mode choke coil 26 cable 28 cable T ₁ measurement terminal T ₂ measurement terminal T ₃ measurement terminal T ₄ measurement terminal R ₁ element resistance value R ₂ element resistance value R _A resistor r ₁ contact resistance value r ₂ contact resistance value r ₃ contact resistance value r ₄ contact resistance value

Claims (2)

It has a resistance value, whereas a characteristic measurement apparatus of an electronic component for determining characteristic values of electronic component having two or more coils having respective external electrodes on end and the other end,
A measuring instrument for measuring electrical resistance and impedance characteristics other than the electrical resistance;
A measuring unit connected to the measuring instrument and having measuring terminals T1, T2, T3, T4 connected to the external electrodes, respectively.
The measurement terminal T1 is connected to an external electrode at one end of one of the two coils.
The measurement terminal T2 is connected to an external electrode at the other end of one of the two coils,
The measurement terminal T3 is connected to an external electrode at one end of the remaining coil of the two coils,
The measurement terminal T4 is connected to the external electrode at the other end of the remaining coil of the two coils,
The measurement terminal T1 and the measurement terminal T3 are connected in parallel to the Lo side of the measuring instrument,
The measurement terminal T2 and the measurement terminal T4 are connected in parallel to the Hi side of the measuring device,
Wherein the resistance value is, before substantially the same as the Kigaibu electrode and the contact resistance value of the measurement terminals T2, T4, alternatively at less,
_A resistor _RA having a sufficiently large resistance value that is hardly affected by variations in the contact resistance is at least the measurement terminal T1 and the Lo side of the measuring instrument, or the measuring terminal T2 and the measuring instrument. Connected between the Hi side,
In addition, the electronic component characteristic measuring apparatus is connected to at least the measuring terminal T3 and the Lo side of the measuring instrument, or between the measuring terminal T4 and the Hi side of the measuring instrument. An electronic component characteristic value measuring method for measuring an electronic component characteristic value using the electronic component characteristic measuring device according to claim 1,
The direct current resistance value when the measurement terminals T1, T2, T3, and T4 are all in contact with the external electrode and the external electrodes of one of the two coils are connected to the measurement terminals T1, T2, T3, A threshold is provided between the DC resistance value when T4 is in contact,
When the measured DC resistance value falls below the threshold value, it is detected that the measurement terminals T1, T2, T3, and T4 are all in contact with the external electrode. Measuring method.

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