JP5020541B2 - Crimping apparatus and crimping method - Google Patents

Description

  The present invention relates to a crimping device for crimping an electrical connection portion such as an IC device, such as thermocompression bonding or ultrasonic crimping, and a crimping method using the same, and in particular, can perform crimping in an ultra-low pressure region with high accuracy. The present invention relates to a crimping apparatus and a crimping method using the same.

  An IC device such as an IC card or an IC tag has, for example, an antenna line and an IC circuit, and their electrical connection portions are connected by thermocompression bonding or ultrasonic pressure bonding. These crimping operations are performed by pressing the tool of the crimping device against an electrical connection portion, which is a body to be crimped, for a short time.

  As a thermocompression bonding apparatus for thermocompression bonding an electrical connection portion, those disclosed in Patent Document 1 and Patent Document 2 are known. The thermocompression bonding apparatus of Patent Document 1 is an apparatus for low pressure, and includes a linear motor attached to a support base, a rod driven by the linear motor, and a thermocompression bonding section driven by the rod, and the rod is an air bearing type. The guide body is slidably supported. This guide body has a cylindrical guide body surrounding the rod with a minute gap, and a lubricating gas is circulated through the gap between the rod and the guide body. Patent Document 1 shows a range of about 10 g to 100 g per bump as a pressure-bonding force (pressure amount) in low-pressure thermocompression bonding.

  The thermocompression bonding apparatus of Patent Document 2 is also an apparatus using a linear motor, and is characterized in that switching between high-pressure thermocompression bonding and low-pressure thermocompression bonding is possible by inserting and removing pins. Patent Document 2 shows a range of several kilograms to several tens of kilograms as a pressure-bonding force in high-pressure thermocompression bonding, and several tens to several hundreds grams as a pressure-bonding force in low-pressure thermocompression bonding.

JP 2001-225200 A JP 2002-43336 A

  However, the dimensions of IC devices are becoming smaller year by year as technology advances. For example, the dimensions of fine IC tags are about several millimeters. Such a fine IC device is required to have an ultra-low pressure region in which the electrical connection portion is finely formed and the pressure suitable for pressure bonding is 1 g or less, for example, about 0.5 g.

  When crimping a to-be-bonded body in a crimping | compression-bonding part, it is necessary to set the crimping force to the optimal value according to the kind and characteristic of a to-be-bonded body. Since the crimping force is generated by the thrust of the linear motor, the desired thrust, that is, the crimping force can be set by setting the current value of the linear motor. However, since gravity from the relatively heavy crimping part connected to the output shaft of the linear motor is applied to it, when crimping with a crimping force in the ultra-low pressure region, gravity applied to the crimping part even if the thrust of the linear motor is zero However, this excessive pressure problem made the operation of crimping in the ultra-low pressure region difficult.

  Therefore, an object of the present invention is to provide a crimping apparatus and a crimping method capable of setting the crimping force in the ultra-low pressure region with high accuracy for solving such problems in the conventional crimping apparatus.

The crimping device of the present invention that solves the above problems includes a support base (2), a linear motor (3) fixed to the support base (2), and an output shaft (4) extending downward from the linear motor (3). A pressure sensor (5) that is reciprocally driven by the pressure sensor (5) and a spring body (7) that connects the pressure bonding part (5) and the support base (2). 14)
The crimping part (5) has a tool (16) for crimping the body to be crimped (17), which is applied to the output shaft (4) of the linear motor (3) when crimping the body to be crimped (17). gravity spring body (7) and the linear motor (3) by the position control current as eliminated fully compensated irrespective of the position of the tool (16) of the crimping, tip sheath pressing of the tool (16) ( The thrust is automatically set upward based on the condition at the crimping position of 17).
The crimping part (5) is driven downward by the linear motor (3) until it comes into contact with the part to be crimped (17), and after the crimping part (5) comes into contact with the article to be crimped (17), The linear motor 3 is controlled at a constant current corresponding to the crimping force on the basis of the position control current of the linear motor so as to maintain the crimping force required for the linear motor (claim 1).

  In the above-described crimping apparatus, the crimping portion includes a moving shaft and a tool for thermocompression bonding the object to be bonded, and a pressure sensor is provided on the moving shaft and heat insulation from preventing heat from the tool from moving to the pressure sensor side. A body can be provided (claim 2).

In any one of the above crimping apparatuses, the pressure sensor 14 is a crystal type using a piezoelectric effect, and the pressure sensor 14 is interposed in a shaft portion of the moving shaft 13 connected in series to the output shaft 4. (Claim 3).

  Furthermore, in any one of the above crimping apparatuses, the crimping part can be slidably supported by an air bearing type guide part fixed to a support base.

  Furthermore, in any one of the above-described crimping apparatuses, the support base can be moved up and down by a lifting means.

  Furthermore, in any one of the above-described crimping apparatuses, a rotation driving unit that rotates the linear motor about its output shaft as a rotation center can be provided.

  Furthermore, in any one of the above-described crimping apparatuses, a position detection unit that detects the ascending / descending position of the crimping portion in the support base can be provided.

  The pressure-bonding method for solving the above-described problem is a method for pressure-bonding an object to be bonded using any one of the above-described pressure-bonding devices (Claim 8).

In the crimping process, the crimping portion is driven downward by the lifting means 10 until it contacts the object to be pressure-bonded body after the crimping portion is in contact with the crimping body, linear so as to maintain the contact pressure required for the compression member The motor can be subjected to constant current control (claim 9).

In addition the crimping process, the crimping portion drives down until contact with the crimping body, when the crimping portion is in contact with the pressure-receiving member wear, so that the crimping member is compressed only in the thickness direction preset value Further, the thrust of the linear motor can be controlled (claim 10).

According to the crimping apparatus of the present invention, the output of the linear motor is completely independent of the position of the crimping tool 16 by the position control current of the spring body and the linear motor 3 that connect the crimping portion and the support base. It is configured to compensate for gravity applied to the shaft. Therefore, even if the applied pressure required for pressure bonding is in an ultra-low pressure region of, for example, 1 g or less, the linear motor thrust corresponding to the applied pressure can be easily set for pressure bonding.

  In the above-described crimping apparatus, as described in claim 2, the crimping portion includes a moving shaft and a tool for thermocompression bonding the object to be bonded, a pressure sensor is provided on the moving shaft, and heat from the tool is a pressure sensor. A heat insulator that prevents movement to the side can be provided. When the crimping device of the present invention is configured in this way, heat from the crimping portion can be prevented from being transmitted to the pressure sensor, the linear motor, etc., and the pressure sensor is provided on the output shaft side of the linear motor. The crimping force by the crimping part can be detected with high accuracy.

  In any one of the above-described crimping apparatuses, a pressure sensor using a piezoelectric effect such as a crystal piezoelectric type can be used as the pressure sensor. By using a pressure sensor that utilizes the piezoelectric effect, for example, the pressure in an ultra-low pressure region of about 0.1 g can be detected with high accuracy, so that the accuracy of pressure control during pressure bonding can be further increased.

  Furthermore, in any one of the above crimping apparatuses, as described in claim 4, the crimping part can be slidably supported by an air bearing type guide part fixed to a support base. If comprised in this way, while being able to stably reciprocate a crimping | compression-bonding part and reducing the frictional resistance which generate | occur | produces at the time of the movement of a crimping | compression-bonding part, the precision of the crimping | compression-bonding force control in the crimping | compression-bonding of an ultra-low pressure area can be raised further. .

  Furthermore, in any one of the above-described crimping apparatuses, as described in claim 5, the support base can be moved up and down by lifting means. If comprised in this way, even when the movement distance for which the crimping | compression-bonding part is requested | required is large, the drive distance of the output shaft of a linear motor can be made small, and as a result, the precision of the crimping | compression-bonding force control in the crimping | compression-bonding of an ultra-low pressure area can be raised further. .

  Furthermore, in any one of the above-described crimping apparatuses, as described in claim 6, rotation driving means for rotating the linear motor around its output shaft can be provided. By providing such a rotation driving means, it is possible to easily perform accurate angle adjustment between the tool of the crimping portion and the object to be crimped by rotating the crimping portion (so-called θ angle adjustment).

  Furthermore, in any one of the above-described crimping apparatuses, as described in claim 7, a position detection unit that detects an ascending / descending position of the crimping portion in the support base can be provided. By providing such a position detection device, it is possible to accurately and easily control the movement of the crimping to the crimping position or the standby position.

  The pressure-bonding method of the present invention is a method for pressure-bonding an object to be bonded using any one of the above-described pressure-bonding apparatuses. According to this pressure bonding method, for example, pressure bonding in an ultra-low pressure region of 1 g or less can be easily performed with high accuracy.

In the above bonding method, as claimed in claim 9, the crimping portion is driven downward by the lifting means 10 until it contacts the object to be pressure-bonded body, crimping part After the contact with the crimping member, is required to be pressure-bonded body The linear motor can be controlled at a constant current so as to maintain the crimping force. By controlling in this way, the pressure-bonding force after the pressure-bonding portion comes into contact with the object to be bonded can be stably and highly accurately maintained in the pressure bonding in the ultra-low pressure region.

In addition the compression method, as claimed in claim 10, the crimping portion is driven downward until it contacts the object to be pressure-bonded body, when the crimping portion is in contact with the pressure adherend, the pressure-bonded body is set in advance value The thrust of the linear motor can be controlled so as to be compressed only in the thickness direction. By controlling in this way, it is possible to control accurately and with high accuracy so that the compression amount of the object to be bonded becomes a preset value in the bonding in the ultra-low pressure region.

  Next, the best mode for carrying out the present invention will be described. In addition, although the following embodiment has been described as an example of the case where the object to be bonded is thermocompression bonded, it goes without saying that it can also be applied to ultrasonic pressure bonding. FIG. 1 is a front view showing the main part of the crimping apparatus of the present invention, and FIG. 2 is a right side view of FIG. In these drawings, the crimping apparatus 1 includes a support base 2, a linear motor 3 fixed to the support base 2, a crimping part 5 that is driven to reciprocate by an output shaft 4 that extends downward from the linear motor 3, and a crimping part 5. And a pair of spring bodies 7 for connecting the crimping part 5 and the support base 2 to each other. The upper end portion of the spring body 7 is fixed to the support base 2 by a locking member 6. The support base 2 is fixed to a support member 8 having an inner screw portion, and a screw rod 9 is screwed to the inner screw portion. Note that the linear motor 3 is driven and controlled by a control device 30 configured by, for example, a computer device, and a signal of a pressure detected by the pressure sensor 14 is transmitted to the control device 30.

  The locking member 6 can be provided with tension adjusting means as required. The tension adjusting means includes, for example, a fixing member having a screw that fixes the upper end of the spring body 7 at one end and an inner screw to which the screw is screwed, and the fixing member is fixed to the locking member 6. The effective tension of the spring body 7 is adjusted by rotating the screw.

  The screw rod 9 screwed to the support member 8 is rotationally driven by a drive unit comprising a reversible motor (not shown), and the support base 2 is moved up and down by the rotational drive. And the raising / lowering means 10 which raises / lowers the support base 2 is comprised by the support member 8, the screw rod 9, and the drive part which is not shown in figure. When the moving distance (lifting distance) required for the crimping part 5 connected to the output shaft 4 of the linear motor 3 is large, the lifting means 10 covers most of the lifting distance, thereby driving the output shaft of the linear motor. The distance can be reduced. However, in some cases, the lifting means 10 can be omitted, and the support base 2 can be directly fixed to the base of the crimping system or the like. The drive unit is driven and controlled by the control device 30.

  As the linear motor 3, for example, a voice coil motor (VCM) or the like commonly used in this field can be adopted. By controlling the current value, the driving speed or the thrust force applied to the object to be pressed is controlled. be able to. The linear motor 3 is fixed to the support base 2 by a fixing member 11 having a bolt.

  The crimping portion 5 includes an elongated connecting member 12 connected to the output shaft 4 of the linear motor 3, a moving shaft 13 extending downward from the connecting member 12, and a heat insulator 15 such as a ceramic material inserted in the moving shaft 13. And a tool 16 attached to the lower end of the moving shaft 13. The tool 16 is for thermocompression bonding of an object to be bonded 17 such as an electrical connection portion, and an electric heater provided therein is controlled by the control device 30 to maintain the tool 16 at a desired heating temperature. A pressure sensor 14 is provided in the middle of the moving shaft 13 constituting the crimping part 5. The heat insulator 15 prevents heat from the tool 16 from moving to the pressure sensor 14 side.

  In this embodiment, the moving shaft 13 constituting the crimping portion 5 is slidably supported by an air bearing type guide portion 18. The guide portion 18 has the same structure as that described in Patent Document 1. That is, the guide portion 18 has a cylindrical guide body 19 that surrounds the moving shaft 13 with a minute gap, and a lubricating gas (for example, pressurized air) supplied from the hose 20 to the gap between the moving shaft 13 and the guide body 19. Circulates the air ring effect.

  The quartz-type piezoelectric pressure sensor 14 uses a piezoelectric effect caused by strain when a quartz crystal is pressurized, and has high detection accuracy and resolution. For example, a high-sensitivity force commercially available from Nippon Kistler Co., Ltd. Sensors (model 9203) and industrial force sensors (models 9101A to 9104A) can be used. In particular, since the high-sensitivity force sensor has a resolution of 0.1 g, it can be suitably used when the crimping apparatus of the present invention is crimped with a crimping force in an ultra-low pressure region. Note that the pressure sensor 14 is not limited to a crystal type, and may use another piezoelectric effect.

  In the present embodiment, the position detection means 21 is provided on the support base 2. The position detection means 21 detects the raising / lowering position of the crimping | compression-bonding part 5, for example, can be comprised with an optical encoder. The position detection signal of the position detection means 21 is transmitted to the control device 30 and used as a position feedback signal for controlling movement of the crimping portion 5 to an upper standby position or a crimping position, for example.

  Next, a method for thermocompression bonding of an object to be bonded using the pressure bonding apparatus of this embodiment will be described. Gravity applied to the output shaft 4 of the linear motor 3 (downward tensile force due to the weight of the output shaft 4 and the crimping portion 5) is reduced or compensated (cancelled) by the upward tension of the spring body 7 in advance. It is desirable to set the upward tension of the spring body 7 so as to cancel the gravity applied to the output shaft 4. The tension can be set by selecting the tension force of the spring body 7. However, as described above, the tension may be set by providing tension adjusting means on the locking member 6. It should be noted that the tension setting by the spring body 7 is desirably performed based on the state where the tip end portion of the tool 16 is at the thermocompression bonding position of the body 17 to be bonded.

  By reducing or compensating for the gravitational force applied to the output shaft 4 of the linear motor 3 in advance by the upward tension of the spring body 7, the linear motor 3 can apply the pressure in the ultra-low pressure region to the object to be bonded with high accuracy. become. Then, in a state where gravity is reduced or compensated by the spring body 7 in this manner, the control device 30 outputs a control signal for driving up and down to the lifting means 10 to perform pressure bonding control.

  In the crimping control method in this embodiment, first, a control signal is output from the control unit 30, and the elevating unit 10 is driven downward from the upper standby position toward the bonded body until the crimping portion 5 contacts the bonded body 17. After the crimping portion comes into contact with the body to be crimped 17, the linear motor 3 is controlled at a constant current so as to maintain the crimping force (set crimping force) required for the body to be crimped 17. When the crimping operation for a predetermined time is completed, the control device 30 performs control for raising and lowering the lifting means 10 to return the crimping portion 5 to the standby position, and one crimping operation is completed by each control.

  The descending drive of the elevating means 10 can be performed by a position control method. In the position control, the control device 30 compares the detection position of the crimping portion 5 fed back from the position detection means 21 with the set position, and outputs a lowering control signal to the elevating means 10 so that they match. When the crimping part 5 descends and reaches the position where the tip of the tool 16 comes into contact with the object to be crimped, the position is detected by the position detecting means 21 and fed back to the control device 30, and the control device 30 receives it. The descent drive control of the elevating means 10 is stopped.

  As described above, after the pressure-bonding portion comes into contact with the member 17 to be bonded, pressure maintaining control is performed in order to maintain the set pressure force applied to the member 17 to be bonded 17 stably for a predetermined time. The pressure maintenance control is performed by a method of controlling the thrust of the linear motor 3 so as to maintain the set crimping force applied to the workpiece 17 for a predetermined time. That is, the control device 30 performs control by causing a current corresponding to the thrust to flow through the linear motor 3 at a constant time, that is, by controlling the linear motor 3 at a constant current for a predetermined time.

  FIG. 3 is a front view schematically showing another embodiment of the crimping apparatus of the present invention. In the example of FIG. 1, the support base 2 can be driven up and down by the lifting and lowering means 10. However, in this embodiment, the lifting and lowering means 10 is omitted, and the rest is configured similarly. Therefore, the same parts as those in the example of FIG.

  In this embodiment, the linear motor 3 is driven up and down between the standby position of the crimping portion 5 and the crimping position. First, a control signal is output from the control means 30, and the linear motor 3 is driven downward in the direction of the pressure-bonded body until the pressure-bonding portion 5 comes in contact with the pressure-bonded body 17 from the upper standby position. After the contact, the linear motor 3 is subjected to constant current control so as to maintain the pressure-bonding force (set pressure-bonding force) required for the member 17 to be bonded. When the crimping operation for a predetermined time is completed, the control device 30 controls to drive the linear motor 3 to return the crimping portion 5 to the standby position, and one crimping operation is completed by each control.

In the embodiment of FIG. 1 or FIG. 3, when the crimping portion is driven and controlled by the linear motor toward the workpiece, and the crimping portion comes into contact with the workpiece, its thickness direction is set by a preset value. It is also possible to perform a set compression amount control method (or a set crush amount control method) for controlling the thrust of the linear motor so as to be compressed.
In order to perform the set compression amount control method, the crimping unit is moved up and down by the control signal from the control device 30 by moving up and down means 10 (in the case of the embodiment of FIG. 1) or linear motor 3 (in the case of the embodiment of FIG. 3). 5 (specifically, the lower end portion of the tool 16 provided thereon) is lowered so as to come into contact with the member 17 to be bonded, and then the control device 30 controls the linear motor 3 to control the set compression amount.

  A distance (dimension) from the contact position of the pressure-bonded body 17 to the completion of compression is set in the control device 30 in advance, and the thrust of the linear motor 3 is increased until the lower end position of the tool 16 reaches the compression completion distance. I do. And after the to-be-bonded body 17 reaches a predetermined compression amount, or after a predetermined crimping time has elapsed, the control device 30 controls the lifting means 10 or the linear motor 3 to bring the crimping part 5 to the standby position. Drive up. By such a set compression amount control, the object to be bonded 17 can be bonded with a predetermined compression amount and with high accuracy.

  4 is a front view showing the main part of another crimping apparatus according to the present invention, and FIG. 5 is a right side view of FIG. The present embodiment differs from the example of FIG. 1 only in that a rotation driving means 40 for rotating the linear motor 3 around its output shaft is provided, and the rest of the configuration is the same. Accordingly, the same parts are denoted by the same reference numerals, and redundant description of the structure, operation, control method, and the like is omitted.

  The linear motor 3 is rotatably fixed to the support base 2 via bearing portions 41 and 42. A shaft body 43 extends in the axial direction from the center of the linear motor, and a timing pulley 44 is connected to the shaft body 43. A belt 45 is stretched between the timing pulley 44 and an output pulley of a rotary drive unit including a reversible motor (not shown). The bearings 41 and 42, the shaft body 43, the timing pulley 44, the belt 45, and a rotation driving unit (not shown) constitute a rotation driving means 40.

  The output shaft 4 of the linear motor 3 is connected to the connecting member 12 as in the example of FIG. 1, but in this embodiment, the output shaft 4 is fixed in the up-and-down direction with respect to the connecting member 12 but is freely connected to rotate. Is done. That is, a pair of guide shafts 46 are slidably passed through the left and right sides of the connecting member 12, and the upper ends of the guide shafts 46 are fixed to the support base 2 by the fixing members 47. Further, a step portion is provided in the through hole of the connecting member 12 through which the output shaft 4 passes, and the step portion provided on the output shaft 4 and the step portion provided on the output shaft 4 move the output shaft 4 and the connecting member in the up-and-down direction. Is prevented. Then, a relative member can be freely rotated between the output shaft 4 and the connecting member 12 without providing a fixing member such as a pin. In addition, in order to reduce the frictional resistance in the raising / lowering drive of the connection member 12, it is desirable for the connection part of the guide shaft 46 and the connection member 12 to be an air bearing type.

  By providing such rotation driving means 40, as described above, it is possible to adjust the rotational angle of the crimping part (so-called θ angle adjustment) to perform an accurate angle adjustment between the tool of the crimping part and the object to be crimped. it can. In the example of FIG. 4, a belt drive system is employed for the rotation drive means 40, but the present invention is not limited to this, and for example, a system in which a direct current motor or an ultrasonic motor is directly connected to the shaft body 43 may be employed.

  The crimping device and the crimping method of the present invention can be used in a system for crimping an electrical connection portion such as an IC device.

The front view which shows the principal part of the crimping | compression-bonding apparatus which concerns on this invention. The right view of FIG. The front view which shows typically other embodiment of the crimping | compression-bonding apparatus of this invention.

The front view which shows the principal part of the other crimping | compression-bonding apparatus which concerns on this invention. The right view of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Crimping device 2 Support base 3 Linear motor 4 Output shaft 5 Crimp part 6 Locking member 7 Spring body 8 Support member 9 Screw rod 10 Lifting means

DESCRIPTION OF SYMBOLS 11 Fixing member 12 Connecting member 13 Moving shaft 14 Pressure sensor 15 Thermal insulator 16 Tool 17 Bonded body 18 Guide part 19 Guide body 20 Hose 21 Position detection means

30 Control device 40 Rotation drive means 41, 42 Bearing portion 43 Shaft body 44 Timing pulley 45 Belt 46 Guide shaft 47 Fixing member

Claims (10)

A support base (2), a linear motor (3) fixed to the support base (2), a crimping part (5) reciprocally driven by an output shaft (4) extending downward from the linear motor (3), A crimping part (5) and a spring body (7) connecting the support base (2) are provided, and the crimping part (5) is provided with a pressure sensor (14) for detecting the crimping force,
The crimping part (5) has a tool (16) for crimping the body to be crimped (17), which is applied to the output shaft (4) of the linear motor (3) when crimping the body to be crimped (17). gravity spring body (7) and the linear motor (3) by the position control current as eliminated fully compensated irrespective of the position of the tool (16) of the crimping, tip sheath pressing of the tool (16) ( The thrust is automatically set upward based on the condition at the crimping position of 17).
The crimping part (5) is driven downward by the linear motor (3) until it comes into contact with the part to be crimped (17), and after the crimping part (5) comes into contact with the article to be crimped (17), The linear motor (3) is controlled at a constant current corresponding to the crimping force based on the position control current of the linear motor (3) so as to maintain the crimping force required for the linear motor (3). .   In Claim 1, the said crimping | compression-bonding part 5 has the moving shaft 13 and the tool 16 which carries out the thermocompression bonding of the to-be-bonded body 17, the pressure sensor 14 is provided in the moving shaft 13, and the heat | fever from the tool 16 is a pressure sensor. 14. A crimping apparatus comprising a heat insulator 15 for preventing movement to the 14 side. According to claim 1 or claim 2, disposed in the axial portion of the pressure sensor 14 is Ri Monodea crystal type utilizing a piezoelectric effect, moving shaft 13 to the pressure sensor 14 is connected in series to the output shaft 4 Crimping device characterized by being made .   4. The crimping apparatus according to claim 1, wherein the crimping part 5 is slidably supported by an air bearing type guide part 18 fixed to the support base 2.   The crimping apparatus according to claim 1, wherein the support base 2 can be moved up and down by a lifting means 10.   6. The pressure bonding apparatus according to claim 1, further comprising a rotation driving unit 40 that rotates the linear motor 3 about the output shaft 4 as a rotation center.   The crimping apparatus according to claim 1, further comprising: a position detection unit 21 configured to detect an elevation position of the crimping part 5 in the support base 2.   A crimping method for crimping the object to be crimped 17 using the crimping apparatus according to claim 1. In claim 8, the crimping portion 5 is driven down until it comes into contact with the body to be crimped 17, and after the crimping portion 5 comes into contact with the body to be crimped 17, the crimping force required for the body to be crimped 17 is maintained. A crimping method characterized in that the linear motor 3 is subjected to constant current control. In Claim 8, when the crimping | compression-bonding part 5 is driven to descend | fall until it contacts the to-be-bonded body 17, and the crimping | compression-bonding part 5 contacts the to-be-pressurized body wearing 17, the to-be-bonded body 17 is only the preset value in the thickness direction. A pressure-bonding method, wherein the thrust of the linear motor 3 is controlled so as to be compressed.

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