JP5033348B2

JP5033348B2 - Filling cylinder and filler discharging device

Info

Publication number: JP5033348B2
Application number: JP2006115680A
Authority: JP
Inventors: 譲宮澤; 克昌鈴木; 康信磯部
Original assignee: Nippon Sanso Holdings Corp
Current assignee: Nippon Sanso Holdings Corp
Priority date: 2006-04-19
Filing date: 2006-04-19
Publication date: 2012-09-26
Anticipated expiration: 2026-04-19
Also published as: JP2007283252A

Description

本発明は、充填筒及び充填剤排出装置に関し、詳しくは、筒内に除害剤、吸着剤、乾燥剤、触媒等の粒状充填剤を充填して各種ガス処理を行う充填筒の構造、及び、該充填筒から充填剤を排出するための装置に関する。 The present invention relates to a filling cylinder and a filler discharging apparatus, and more specifically, a filling cylinder structure for performing various gas treatments by filling a granular filler such as a detoxifying agent, an adsorbent, a desiccant, and a catalyst into the cylinder, And an apparatus for discharging the filler from the filling cylinder.

各種ガスや液体を処理する充填剤を充填した充填筒は、様々な分野で広く使用されている。例えば、半導体製造装置からの排ガスを無害化する排ガス処理装置として、粒状の除害剤を充填した充填筒を有する排ガス処理装置が知られている。このような排ガス処理装置では、定期的に除害剤を交換するメンテナンスが行われており、通常は、充填筒を装置から取り外して除害剤を筒内から抜き取り、新しい除害剤を筒内に充填した後、再び装置に取り付ける作業を行っていた。 Filling cylinders filled with fillers for treating various gases and liquids are widely used in various fields. For example, an exhaust gas treatment apparatus having a filling cylinder filled with a granular detoxifying agent is known as an exhaust gas treatment apparatus for detoxifying exhaust gas from a semiconductor manufacturing apparatus. In such an exhaust gas treatment apparatus, maintenance is regularly performed to replace the detoxifying agent. Usually, the filling cylinder is removed from the apparatus, the detoxifying agent is extracted from the cylinder, and a new detoxifying agent is removed from the cylinder. After filling in, the work to attach to the apparatus again.

しかし、上述のような充填剤の交換方法では、充填筒が大型の場合は、ガス処理装置に対する着脱や運搬が困難であり、また、クリーンルームに設置されている排ガス処理装置の場合は、充填筒をクリーンルームから運び出して別の場所で作業を行う必要があり、多大な手間を要していた。さらに、充填筒に充填する充填剤の種類によっては、充填剤や充填筒の内面を長時間にわたって大気に暴露できないものもある。また、毒性ガスを処理した後の充填剤（除害剤）を充填筒から排出する場合には、安全性が極めて重要な問題となる。 However, in the above-described method for replacing the filler, when the filling cylinder is large, it is difficult to attach to and detach from the gas treatment apparatus, and in the case of an exhaust gas treatment apparatus installed in a clean room, the filling cylinder It was necessary to carry it out of the clean room and work in another place, which required a lot of work. Further, depending on the type of filler filled in the filling cylinder, there are some that cannot expose the filling material and the inner surface of the filling cylinder to the atmosphere for a long time. Moreover, when discharging | emitting the filler (detoxifying agent) after processing toxic gas from a filling cylinder, safety | security becomes a very important problem.

このようなことから、充填剤をガス流れに同伴させてホッパーから充填筒に移送する方法や装置が各種提案されており、例えば、触媒の供給先である反応容器より上方位置に常時設置したホッパーから自然落下を利用して触媒を反応容器内に供給する方法が提案されている（例えば、特許文献１参照。）。
特開平５−２２１５３１号公報 For this reason, various methods and apparatuses have been proposed in which a filler is entrained in a gas flow and transferred from a hopper to a filling cylinder. For example, a hopper that is always installed above a reaction vessel to which a catalyst is supplied. Has been proposed to supply the catalyst into the reaction vessel using natural fall (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 5-221531

前記特許文献１に記載されたシステムのように、筒内や容器内に粉粒体を充填する方法、装置は数多く提案されているものの、充填筒内に充填されている充填剤の排出についてはほとんど言及されていない。 As in the system described in Patent Document 1, many methods and apparatuses for filling granular materials in a cylinder or a container have been proposed, but regarding the discharge of the filler filled in the filling cylinder. Little is mentioned.

そこで本発明は、充填筒をガス処理装置内に設置した状態で、容易に、かつ、短時間で充填剤を排出することができ、しかも安全性の向上が図れ、充填剤等を大気に暴露させずに排出することも可能な充填筒及び充填筒から充填剤を排出するための装置を提供することを目的としている。 Therefore, the present invention can discharge the filler easily and in a short time in a state where the filling cylinder is installed in the gas processing apparatus, and can improve safety and expose the filler to the atmosphere. It is an object of the present invention to provide a filling cylinder that can be discharged without using it, and an apparatus for discharging the filler from the filling cylinder.

上記目的を達成するため、本発明の充填筒は、充填筒の一端に設けたガス入口経路から筒内に導入されるガスを筒内に充填された粒状の充填剤に接触させた後、該充填筒の他端部に設けた処理ガス出口径路から導出する充填筒において、該充填筒の充填剤充填部の下部に充填剤を筒内から排出するための排出口を設けるとともに、該排出口から充填剤を排出するときに該充填筒内に外部からガスを吸引する吸気口を設け、前記充填剤は、充填筒内下部に設けられた充填剤支持部材の上方に充填されており、前記排出口が充填筒側面で前記充填剤支持部材の直上に開口し、前記排出口に対向する充填筒側面に、排出口から充填剤を排出するときに前記充填剤支持部材上の充填剤を排出口方向に向けて移動させるガスを噴出する移動ガス噴出口を備えていることを特徴としている。 In order to achieve the above-mentioned object, the filling cylinder of the present invention, after bringing the gas introduced into the cylinder from the gas inlet path provided at one end of the filling cylinder into contact with the granular filler filled in the cylinder, In the filling cylinder derived from the processing gas outlet path provided at the other end of the filling cylinder, a discharge port for discharging the filler from the inside of the cylinder is provided at the lower part of the filler filling portion of the filling cylinder, and the discharge port An intake port for sucking gas from the outside when discharging the filler from the inside is provided , and the filler is filled above a filler support member provided at a lower portion in the filling cylinder, A discharge port opens on the side of the filling cylinder directly above the filler support member, and the filler on the filler support member is discharged when the filler is discharged from the discharge port on the side of the filling cylinder facing the discharge port. A moving gas spout that spouts gas that moves toward the exit It is characterized in that Eteiru.

さらに、本発明の充填筒は、前記吸気口が前記充填剤支持部材の下方に設けられていること、前記充填筒の内面に接する前記充填剤支持部材の端部に充填筒内側に向かう傾斜面を設けたことを特徴としている。 Furthermore, the filling tube of the present invention, before Symbol the intake port is provided below the filler support member, inclined towards the filling tube inside an end portion of the filler support member in contact with the inner surface of the filling tube is characterized in the kite is provided a surface.

また、本発明の充填剤排出装置は、前記構成の充填筒から前記充填剤を排出するための充填剤排出装置であって、前記排出口に接続される吸引経路を介して充填筒内のガスを吸引する吸引手段と、前記排出口から前記吸引経路に吸引されるガス流に同伴されて充填筒内から排出される充填剤をガス流から分離する充填剤分離手段とを備えていることを特徴としている。 Moreover, the filler discharging apparatus of the present invention is a filler discharging apparatus for discharging the filler from the filling cylinder having the above-described configuration, and the gas in the filling cylinder via a suction path connected to the discharge port. A suction means for sucking the gas and a filler separation means for separating the filler discharged from the filling cylinder accompanying the gas flow sucked into the suction path from the discharge port from the gas flow. It is a feature.

さらに、本発明の充填剤排出装置は、前記充填剤分離手段が、前記吸引経路の充填筒側に接続されるガス入口部と、吸引手段側に接続されるガス出口部とを有するとともに、該ガス出口部は、前記ガス入口部の高さ以上の位置で、かつ、前記ガス入口部の軸線と前記ガス出口部の軸線とが直線状にない位置に設けられていること、前記充填剤分離手段が前記吸引手段の吸引側に一体的に設けられていること、前記充填剤分離手段が充填剤分離部と該充填剤分離部に着脱可能に設けられた充填剤回収容器とで形成されていること、前記吸引経路、前記吸引手段及び前記充填剤分離手段が一体的かつ移動可能に形成され、前記吸引経路が前記排出口に着脱可能に形成されていることを特徴としている。 Further, in the filler discharging apparatus of the present invention, the filler separating means has a gas inlet part connected to the filling cylinder side of the suction path and a gas outlet part connected to the suction means side, The gas outlet portion is provided at a position not less than the height of the gas inlet portion and at a position where the axis of the gas inlet portion and the axis of the gas outlet portion are not linear, the filler separation Means is integrally provided on the suction side of the suction means, and the filler separation means is formed by a filler separation part and a filler recovery container provided detachably on the filler separation part. The suction path, the suction means, and the filler separating means are formed integrally and movably, and the suction path is detachably formed on the discharge port.

本発明によれば、あらかじめ充填筒下部に設けた排出口から充填筒内のガスを吸引し、吸引したガスの流れに同伴させて充填筒内から充填剤の排出することにより、筒内からの充填剤の排出を簡単に効率よく行うことができる。また、ガス処理装置に組み込まれた充填筒を装置から取り外すことなく、筒内から充填剤を排出することが可能である。また、充填筒からガスを吸引する際に充填筒内に導入するガスを不活性ガスとすることにより、充填剤や充填筒内を大気に接触させることなく、筒内からの充填剤の排出を行うことができる。 According to the present invention, the gas in the filling cylinder is sucked from the discharge port provided in the lower part of the filling cylinder in advance, and the filler is discharged from the filling cylinder by being accompanied by the flow of the sucked gas, thereby The filler can be discharged easily and efficiently. Further, it is possible to discharge the filler from the cylinder without removing the filling cylinder incorporated in the gas processing apparatus from the apparatus. In addition, when the gas is sucked from the filling cylinder, the gas introduced into the filling cylinder is an inert gas, so that the filler can be discharged from the cylinder without bringing the filler or the filling cylinder into contact with the atmosphere. It can be carried out.

図１は本発明の充填筒の一形態例を示す説明図である。まず、充填筒１１は、例えば金属製の円筒体の両端開口を鏡板で閉塞したものであって、内部下方位置には、通気性を有する充填剤支持部材１２が設けられており、この充填剤支持部材１２の上部に充填剤１３が支持されて所定高さに充填されている。充填筒１１の上部には、半導体製造装置からの排ガス等が導入されるガス入口管１４が設けられ、充填剤支持部材１２より下部には、処理後のガスが導出される処理ガス出口管１５が設けられている。 FIG. 1 is an explanatory view showing an embodiment of the filling cylinder of the present invention. First, the filling cylinder 11 is formed, for example, by closing both end openings of a metal cylinder with end plates, and a filler support member 12 having air permeability is provided at an inner lower position. A filler 13 is supported on the upper portion of the support member 12 and filled to a predetermined height. A gas inlet pipe 14 into which the exhaust gas from the semiconductor manufacturing apparatus is introduced is provided at the upper part of the filling cylinder 11, and a processing gas outlet pipe 15 from which the processed gas is led out below the filler support member 12. Is provided.

さらに、充填剤充填部の下部で前記充填剤支持部材１２の直上位置には、充填剤１３を充填筒１１内から排出するための排出口１６と、充填剤１３を充填筒１１内から排出するときに充填剤１３を排出口１６の方向へ移動させるガスを噴出するための移動ガス噴出口１７とが設けられ、充填剤支持部材１２の下方には、排出口１６から充填剤１３を排出する際に充填筒１１内にガスを吸引するための吸気口１８が設けられている。 Further, at a position directly below the filler support member 12 below the filler filling portion, a discharge port 16 for discharging the filler 13 from the inside of the filling cylinder 11 and the filler 13 is discharged from the inside of the filling cylinder 11. A moving gas outlet 17 for ejecting a gas that sometimes moves the filler 13 toward the outlet 16 is provided, and the filler 13 is discharged from the outlet 16 below the filler support member 12. At the same time, an intake port 18 for sucking gas is provided in the filling cylinder 11.

前記排出口１６は、充填筒１１の周壁に設けた開口のみであってもよいが、図２の要部説明図に示すように、開口部１６に充填筒１１の側方に突出する排出筒１６ａを設け、この排出筒１６ａの突出端の開口下縁１６ｂを、排出筒１６ａの基端部に位置する開口上縁１６ｃよりも上方位置に設けることにより、排出口１６を開放したときに充填筒１１内の充填剤１３が排出口１６から外部にこぼれ落ちることを防止できる。この排出筒１６ａは、充填筒１１の周壁に直管を斜めに接合してもよいが、エルボのような曲管を用いることもできる。 The discharge port 16 may be only an opening provided on the peripheral wall of the filling cylinder 11, but as shown in the explanatory view of the main part of FIG. 2, the discharge cylinder protrudes to the side of the filling cylinder 11 in the opening 16. 16a is provided, and the lower opening edge 16b of the projecting end of the discharge cylinder 16a is provided above the upper opening edge 16c located at the base end of the discharge cylinder 16a, so that the discharge port 16 is filled when opened. The filler 13 in the cylinder 11 can be prevented from spilling out from the discharge port 16. The discharge tube 16a may be formed by joining a straight tube obliquely to the peripheral wall of the filling tube 11, but a curved tube such as an elbow can also be used.

また、図３の各説明図に示すように、前記吸気口１８の位置や設置数は、排出口１６からガスを吸引して充填筒１１内が減圧状態になったときに下部から充填筒１１内にガスを吸引できれば任意に選択することができる。例えば、図３（Ａ）に示す充填筒１１は、前述の図１に示したものと同様に、充填剤支持部材１２の下方で処理ガス出口管１５と同程度の高さに吸気口１８ａを設けている。図３（Ｂ）に示す充填筒１１は、充填剤支持部材１２の下方に設けた処理ガス出口管１５に分岐管を設けて吸気口１８ｂとしている。図３（Ｃ）に示す充填筒１１は、処理ガス出口管１５の開口部に充填剤支持部材１２ａを設け、充填筒１１の底部までを充填剤充填部とし、排出口１６を底部に開口させるとともに、処理ガス出口管１５に分岐管を設けて吸気口１８ｃとしている。 Further, as shown in each explanatory view of FIG. 3, the position and the number of the intake ports 18 are arranged so that the filling tube 11 is drawn from the bottom when the gas is sucked from the discharge port 16 and the inside of the filling tube 11 is decompressed. Any gas can be selected if it can be sucked into it. For example, the filling cylinder 11 shown in FIG. 3 (A) has an intake port 18a at the same height as the processing gas outlet pipe 15 below the filler support member 12 as in the case shown in FIG. Provided. In the filling cylinder 11 shown in FIG. 3B, a branch pipe is provided in the processing gas outlet pipe 15 provided below the filler support member 12 to serve as an intake port 18b. The filling cylinder 11 shown in FIG. 3 (C) is provided with a filler support member 12a at the opening of the processing gas outlet pipe 15, the bottom of the filling cylinder 11 is used as the filler filling section, and the discharge port 16 is opened at the bottom. At the same time, a branch pipe is provided in the processing gas outlet pipe 15 to form an intake port 18c.

また、図３（Ｄ）に示す充填筒１１は、充填剤支持部材１２の下方に第１吸気口１８ｄを設けるとともに、充填剤支持部材１２の上方にも第２吸気口１８ｅを設けている。図３（Ｅ）に示す充填筒１１は、充填剤支持部材１２の下方に第１吸気口１８ｆを設けるとともに、充填剤支持部材１２の上方には第２吸気口１８ｇ及び第３吸気口１８ｈを２箇所に設けている。図３（Ｆ）に示す充填筒１１は、充填剤支持部材１２の下方に第１吸気口１８ｉを設けるとともに、充填剤支持部材１２の上方に第２吸気口１８ｊ、上部鏡板に第３吸気口１８ｋをそれぞれ設けている。図３（Ｇ）に示す充填筒１１は、充填筒１１の平面視において、処理ガス出口管１５の対向位置に排出口１６を、排出口１６の近傍に第１吸気口１８ｍ、処理ガス出口管１５の両側近傍に第２吸気口１８ｎ及び第３吸気口１８ｐを設けている。 In addition, the filling cylinder 11 shown in FIG. 3D is provided with a first intake port 18 d below the filler support member 12 and a second intake port 18 e above the filler support member 12. The filling cylinder 11 shown in FIG. 3E is provided with a first intake port 18 f below the filler support member 12, and a second intake port 18 g and a third intake port 18 h above the filler support member 12. It is provided in two places. The filling cylinder 11 shown in FIG. 3 (F) is provided with a first intake port 18i below the filler support member 12, a second intake port 18j above the filler support member 12, and a third intake port on the upper end plate. 18k are provided. The filling cylinder 11 shown in FIG. 3G has a discharge port 16 at a position facing the processing gas outlet pipe 15 in the plan view of the filling cylinder 11, a first intake port 18m near the discharge port 16, and a processing gas outlet pipe. A second intake port 18n and a third intake port 18p are provided in the vicinity of both sides of 15.

さらに、前記移動ガス噴出口１７の配置や噴出口（ノズル）の形状は、充填筒１１の断面積や充填剤１３の性状に応じて適宜に選択することができ、複数箇所に設けたり、圧縮ガスを噴出させたりすることもできる。加えて、充填剤支持部材１２で充填剤１３を支持する充填筒１１の場合は、充填剤支持部材１２の周囲に、筒内周側に向かって下方に傾斜した傾斜面を設けておくことにより、筒周壁と充填剤支持部材１２との隅部に充填剤１３が残留することを防止できる。また、充填筒１１の底面や充填剤支持部材１２に排出口１６に向かう下り勾配を設けておくこともできる。 Furthermore, the arrangement of the moving gas outlet 17 and the shape of the outlet (nozzle) can be appropriately selected according to the cross-sectional area of the filling cylinder 11 and the properties of the filler 13, and can be provided at a plurality of locations or compressed. Gas can also be blown out. In addition, in the case of the filling cylinder 11 that supports the filler 13 with the filler support member 12, an inclined surface that is inclined downward toward the inner peripheral side of the cylinder is provided around the filler support member 12. Further, it is possible to prevent the filler 13 from remaining in the corners between the cylindrical peripheral wall and the filler support member 12. In addition, a downward slope toward the discharge port 16 may be provided on the bottom surface of the filling cylinder 11 or the filler support member 12.

図４は、前記充填筒１１内から充填剤１３を排出するための充填剤排出装置２１の一形態例を示す説明図である。この充填剤排出装置２１は、充填筒１１内からガスを吸引するための吸引手段２２と、筒内から排出した充填剤１３を吸引手段２２に吸引されるガスから分離する充填剤分離手段２３とを備えている。充填剤分離手段２３は、前記排出口１６から吸引手段２２に至る吸引経路２４の途中に設けられており、充填剤分離手段２３と排出口１６とを接続する第１吸引経路２４ａは、少なくとも一部が柔軟なフレキシブルホースで形成されるとともに、排出口１６には、接続時に十分な気密性を得られるフランジ結合、ねじ結合等の周知の結合手段によって着脱可能に形成されている。また、充填剤分離手段２３と吸引手段２２とを接続する第２吸引経路２４ｂも、少なくとも一部が柔軟なフレキシブルホースで形成することが好ましい。なお、図５の説明図に示すように、前記吸引手段２２と前記充填剤分離手段２３とは、一体形成されたものを使用することも可能である。 FIG. 4 is an explanatory view showing an example of a filler discharging device 21 for discharging the filler 13 from the filling cylinder 11. The filler discharging device 21 includes a suction means 22 for sucking gas from the inside of the filling cylinder 11, and a filler separating means 23 for separating the filler 13 discharged from the inside of the cylinder from the gas sucked by the suction means 22. It has. The filler separating means 23 is provided in the middle of the suction path 24 extending from the discharge port 16 to the suction means 22, and the first suction path 24a connecting the filler separating means 23 and the discharge port 16 is at least one. The portion is formed of a flexible flexible hose, and the discharge port 16 is detachably formed by a well-known coupling means such as a flange coupling or a screw coupling that can obtain sufficient airtightness at the time of connection. The second suction path 24b connecting the filler separating means 23 and the suction means 22 is also preferably formed of a flexible hose at least partially flexible. As shown in the explanatory diagram of FIG. 5, the suction means 22 and the filler separating means 23 can be integrally formed.

充填剤分離手段２３における上流側（吸込側）の第１吸引経路２４ａと下流側（吐出側）の第２吸引経路２４ｂとの位置関係は任意であるが、図６の各説明図に示すように、第１吸引経路２４ａから充填剤分離手段２３に流入したガスが第２吸引経路２４ｂに直接的に流出しないような位置で、第２吸引経路２４ｂの開口が第１吸引経路２４ａの開口に対して同じ高さ以上になるように設定することが好ましい。例えば、図６（Ａ）に示す充填剤分離手段２３は、天板部に第１吸引経路２４ａと第２吸引経路２４ｂとをそれぞれ設けている。図６（Ｂ）に示す充填剤分離手段２３は、側壁上部に第１吸引経路２４ａを設けるとともに、天板部に第２吸引経路２４ｂを設けている。図６（Ｃ）に示す充填剤分離手段２３は、側壁上部に第１吸引経路２４ａと第２吸引経路２４ｂとをそれぞれ設けている。そして、これらの経路設置状態において、図６（Ｄ）の充填剤分離手段２３の平面視に示すように、第１吸引経路２４ａと第２吸引経路２４ｂとは、両者の軸線を対向させずに直交する方向に向けることが好ましい。第２吸引経路２４ｂの開口部分等に、第２吸引経路２４ｂに充填剤１３が流入することを防止するためのフィルターを設けておくこともできる。 The positional relationship between the first suction path 24a on the upstream side (suction side) and the second suction path 24b on the downstream side (discharge side) in the filler separating means 23 is arbitrary, but as shown in each explanatory view of FIG. Furthermore, the opening of the second suction path 24b becomes the opening of the first suction path 24a at a position where the gas flowing into the filler separating means 23 from the first suction path 24a does not directly flow out to the second suction path 24b. On the other hand, it is preferable to set the height to be equal to or higher than that. For example, the filler separating means 23 shown in FIG. 6A is provided with a first suction path 24a and a second suction path 24b in the top plate portion. The filler separating means 23 shown in FIG. 6B is provided with a first suction path 24a in the upper part of the side wall and a second suction path 24b in the top plate portion. The filler separating means 23 shown in FIG. 6C is provided with a first suction path 24a and a second suction path 24b in the upper part of the side wall. And in these path | route installation states, as shown in the planar view of the filler separation means 23 of FIG.6 ( D ), the 1st suction path 24a and the 2nd suction path 24b do not oppose both axes. It is preferable to face in the orthogonal direction. A filter for preventing the filler 13 from flowing into the second suction path 24b may be provided at an opening of the second suction path 24b or the like.

また、図７の説明図に示すように、前記吸引手段２２は、第２吸引経路２４ｂから充填剤が流入したときに備えて、駆動部２２ａの周囲をカバー２２ｂで覆い、駆動部２２ａが充填剤を吸引しないように形成しておくことが好ましい。さらに、各経路を構成する配管、ホースには、帯電が防止されたものを使用することが好ましく、その他の機器についても、静電気の発生を防止するため、充填剤排出装置２１の運転中は接地させることが好ましい。 Further, as shown in the explanatory diagram of FIG. 7, the suction means 22 covers the periphery of the drive portion 22a with a cover 22b in preparation for when the filler flows in from the second suction path 24b, and the drive portion 22a is filled. It is preferable to form it so as not to suck the agent. Furthermore, it is preferable to use a pipe and hose constituting each path that are prevented from being charged. In order to prevent generation of static electricity, other equipment is grounded during operation of the filler discharging device 21. It is preferable to make it.

なお、各口や経路の口径は、充填剤の大きさに応じて設定されるものであって、屈曲部等での詰まりを防止するため、通常は、充填剤の大きさの５倍以上の口径とすることが好ましいが、口径を大きくし過ぎると充填剤１３の搬送に大量のガスを高速で流す必要が生じ、コスト増ともなるので、最大でも５０ｍｍ程度の口径とすることが望ましい。また、充填剤１３を移送するための力は、風量、断面積及び圧力によって決まるものであり、前記風量は吸引手段２２の性能（風量と到達圧力の相関）及び各種ホース、配管のコンダクタンスによって決まるものであり、前記圧力は同じく前記コンダクタンスによって決まるので、経路中にコンダクタンスを調整する手段を設けておくことにより、充填筒１１から排出する充填剤１３の性状に応じた最適なコンダクタンスを得ることができる。 In addition, the diameter of each mouth and path is set according to the size of the filler, and in order to prevent clogging at a bent portion or the like, it is usually more than 5 times the size of the filler. Although it is preferable to set the diameter, if the diameter is excessively large, it is necessary to flow a large amount of gas at a high speed for transporting the filler 13, and the cost increases. Therefore, it is desirable that the diameter is about 50 mm at the maximum. The force for transferring the filler 13 is determined by the air volume, the cross-sectional area and the pressure, and the air volume is determined by the performance of the suction means 22 (correlation between the air volume and the ultimate pressure) and conductances of various hoses and pipes. Since the pressure is also determined by the conductance, an optimum conductance according to the properties of the filler 13 discharged from the filling cylinder 11 can be obtained by providing means for adjusting the conductance in the path. it can.

次に、充填筒１１内から充填剤１３を排出する手順の一例を説明する。まず、充填筒１１内に大気や窒素ガス等を導入して充填筒１１内を安全な雰囲気とした後、ガス入口管１４及び処理ガス出口管１５を弁等で閉塞するとともに、排出口１６を開口させて吸引経路２４（吸引経路２４ａ）を接続し、吸気口１８の弁等を開いて外部からガスを吸引可能な状態とする。 Next, an example of a procedure for discharging the filler 13 from the filling cylinder 11 will be described. First, after introducing air or nitrogen gas into the filling cylinder 11 to make the filling cylinder 11 safe, the gas inlet pipe 14 and the processing gas outlet pipe 15 are closed with a valve or the like, and the outlet 16 is opened. The suction path 24 (suction path 24a) is opened and the valve of the intake port 18 is opened so that gas can be sucked from the outside.

この状態で吸引手段２２を運転すると、充填筒１１内の充填剤１３は、吸引手段２２によって排出口１６から吸引経路２４に吸引されるガスに同伴されて充填剤分離手段２３でガスから分離されて充填剤分離手段２３内に回収される。このとき、充填筒１１内には、下方の吸気口１８からガスが流入して充填筒１１内の充填剤１３を流動状態とするので、排出口１６からの充填剤１３の排出を効率よく行うことができる。また、弁を間欠的に開閉するなどの操作で吸気口１８から充填筒１１内に流入するガスに脈動を発生させることにより、充填剤１３をより良好な流動状態にできるとともに、充填剤支持部材１２の通気部に捕捉された微小粉を充填剤支持部材１２から除去して排出することができ、充填剤支持部材１２の通気性能を回復させることができる。なお、充填筒１１の上部等の吸気口を設けた場合は、各吸気口から充填筒１１内に適量のガスを流入させるようにしてもよい。 When the suction means 22 is operated in this state, the filler 13 in the filling cylinder 11 is separated from the gas by the filler separation means 23 along with the gas sucked into the suction path 24 from the discharge port 16 by the suction means 22. And collected in the filler separation means 23. At this time, gas flows into the filling cylinder 11 from the lower intake port 18 so that the filler 13 in the filling cylinder 11 is in a fluid state, so that the filling agent 13 is efficiently discharged from the discharge port 16. be able to. Further, by causing pulsation in the gas flowing into the filling cylinder 11 from the intake port 18 by an operation such as intermittent opening and closing of the valve, the filler 13 can be brought into a better flow state and the filler support member. The fine powder trapped in the 12 ventilation portions can be removed from the filler support member 12 and discharged, and the ventilation performance of the filler support member 12 can be recovered. When an intake port such as an upper portion of the filling cylinder 11 is provided, an appropriate amount of gas may be allowed to flow into the filling cylinder 11 from each intake port.

充填剤１３の排出終了は、時間を設定して行ってもよく、充填筒１１に設けた監視窓から内部の状態を観察して判断してもよく、充填剤分離手段２３における充填剤１３の回収量で判断してもよい。 The end of the discharge of the filler 13 may be performed by setting a time, or may be determined by observing the internal state from a monitoring window provided in the filling cylinder 11, and the filling of the filler 13 in the filler separating means 23. You may judge by the amount collected.

また、前記移動ガス噴出口１７から移動ガスを適宜噴出し、噴出した移動ガスの流れで充填剤１３を排出口１６の方向に移動させることにより、排出口１６からの充填剤１３の排出を確実に行うことができ、充填筒１１内の充填剤１３の残留量を低減することができ、充填筒１１内の充填剤１３を効率よく排出することができる。特に、充填筒１１内の充填剤量が少なくなったとき、例えば、充填高さが１／１０以下になったときや、充填剤量が１０ｇ/ｃｍ^２以下になったときに移動ガス噴出口１７から筒内にガスを導入することにより、充填剤１３の排出効率を高めることができる。さらに、移動ガス噴出口１７から筒内に圧縮ガスを導入して充填剤１３の排出効果をより高めることもできる。導入する圧縮ガスは、ユーティリティーラインから直接導入してもよく、所定圧力でタンクに充填した圧縮ガスを用いることもできる。なお、移動ガス噴出口１７から圧縮ガスを導入する場合は、吸気口１８へのガスの逆流を防止するため、圧縮ガス導入量は、吸引手段２２の吸引ガス量より少なく設定する。 Further, the mobile gas is appropriately ejected from the mobile gas jet port 17 and the filler 13 is moved in the direction of the discharge port 16 by the flow of the jetted mobile gas, so that the discharge of the filler 13 from the discharge port 16 is ensured. The residual amount of the filler 13 in the filling cylinder 11 can be reduced, and the filler 13 in the filling cylinder 11 can be discharged efficiently. In particular, when the amount of the filler in the filling cylinder 11 decreases, for example, when the filling height becomes 1/10 or less, or when the amount of filler becomes 10 g / cm ² or less, the moving gas jet nozzle By introducing gas from 17 into the cylinder, the discharge efficiency of the filler 13 can be increased. Furthermore, the compressed gas can be introduced into the cylinder from the moving gas jet port 17 to further enhance the discharge effect of the filler 13. The compressed gas to be introduced may be introduced directly from the utility line, or a compressed gas filled in the tank at a predetermined pressure may be used. When the compressed gas is introduced from the moving gas outlet 17, the amount of compressed gas introduced is set to be smaller than the amount of suction gas of the suction means 22 in order to prevent the backflow of gas to the intake port 18.

充填剤分離手段２３では、充填剤１３の性状や量に応じた適宜な分離手段、例えば、サイクロン、フィルタ等を使用したり、充填剤１３の自重により、充填剤１３をガス流から分離する。分離した充填剤１３は、充填剤分離手段２３に設けた容器や袋に回収し、所定の再生工場や処理場に搬送することができる。このとき、回収した充填剤を密閉状態で搬送することにより、大気中の酸素や水分等との接触も最小限に抑えることができ、毒性ガスを処理した除害剤の処理における安全性も高めることができる。 The filler separating means 23 separates the filler 13 from the gas flow by using an appropriate separating means according to the properties and amount of the filler 13, such as a cyclone and a filter, or by the weight of the filler 13. The separated filler 13 can be collected in a container or bag provided in the filler separating means 23 and transported to a predetermined recycling factory or treatment plant. At this time, by transporting the collected filler in a hermetically sealed state, contact with oxygen, moisture, etc. in the atmosphere can be minimized, and safety in the treatment of the harmful agent treated with the toxic gas is enhanced. be able to.

また、充填剤１３や充填筒１１の内面を長時間にわたって大気に暴露できない場合は、吸気口１８や移動ガス噴出口１７から筒内に導入するガスを窒素等の不活性ガスにすればよく、充填剤１３が毒性ガスを処理した除害剤の場合は、吸引手段２２からガスを排出する排気管を除害装置に接続し、除害処理を行ってから大気中に放出すればよい。 If the inner surface of the filler 13 or the filling cylinder 11 cannot be exposed to the atmosphere for a long time, the gas introduced into the cylinder from the intake port 18 or the moving gas jet port 17 may be an inert gas such as nitrogen, In the case where the filler 13 is a detoxifying agent that has treated toxic gas, an exhaust pipe that discharges gas from the suction means 22 may be connected to the detoxifying device, and after detoxifying treatment, it may be discharged into the atmosphere.

充填剤１３を排出する際のガスの流速は任意に設定できるが、早すぎると充填剤１３が擦れ合って充填剤１３や配管、ホース等が損傷するおそれがあるため、吸引経路２４を構成する配管やホースの径を含めて適当な範囲の流速に設定することが好ましい。また、排出状況に応じて流速を変化させてもよい。 The flow rate of the gas when discharging the filler 13 can be set arbitrarily, but if it is too early, the filler 13 may rub against each other and the filler 13, piping, hoses, etc. may be damaged. It is preferable to set the flow rate within a suitable range including the diameter of the pipe and hose. Further, the flow rate may be changed according to the discharge state.

図８に示す実験装置を使用して充填筒１１内の充填剤１３を排出する実験を行った。充填筒１１には、内径約２６０ｍｍ、内側高さ約６３５ｍｍで、内部に直径４ｍｍ、重量３０ｍｍｇ（密度０．８ｋｇ／Ｌ）で略球形の粒状充填剤１３を１１．７ｋｇ充填し、充填高さ約３００ｍｍとしたものを使用した。排出口１６及び吸気口１８の口径はそれぞれ３０ｍｍとし、排出口１６には４５度の上昇角を有する排出筒１６ａを設けた。吸引経路２４ａ，２４ｂには口径３２ｍｍで長さ３ｍのゴム製のホースをそれぞれ使用し、吸引手段２２には、最大風量３ｍ^３／ｍｉｎ、到達圧力６１０Ｔｏｒｒの吸引機を使用した。また、充填筒１１は、底部高さＨを床面から６０ｃｍの位置に、充填剤分離手段２３及び吸引手段２２は床面にそれぞれ設置した。 An experiment for discharging the filler 13 in the filling cylinder 11 was performed using the experimental apparatus shown in FIG. The filling cylinder 11 is filled with 11.7 kg of a substantially spherical granular filler 13 having an inner diameter of about 260 mm, an inner height of about 635 mm, and a diameter of 4 mm and a weight of 30 mmg (density 0.8 kg / L). What used about 300 mm was used. The diameters of the discharge port 16 and the intake port 18 were 30 mm, respectively, and the discharge port 16 was provided with a discharge cylinder 16a having a rising angle of 45 degrees. A rubber hose having a diameter of 32 mm and a length of 3 m was used for each of the suction paths 24 a and 24 b, and a suction machine having a maximum air volume of 3 m ³ / min and an ultimate pressure of 610 Torr was used for the suction means 22. Moreover, the filling cylinder 11 installed the bottom part height H in the position of 60 cm from the floor surface, and the filler separation means 23 and the suction means 22 were installed in the floor surface, respectively.

吸気口１８から大気を吸引する状態で吸引手段２２を９０秒間作動させた。その結果、充填筒１１内に残留した充填剤１３の重量は３０３．７ｇであり、排出効率は９７．４％であった。一方、比較として、充填筒１１の蓋を開いて充填剤１３を排出する従来法の場合、充填剤残留量は３０ｇ以下となったが、１０分以上の時間がかかってしまった。また、従来法では、充填筒をガス処理装置から取り外し、所定の場所へ搬送してから充填剤を排出しなければならないため、搬送時間を含めて４０分以上を要し、しかも、２人以上で作業する必要があった。 The suction means 22 was operated for 90 seconds in a state where the atmosphere was sucked from the intake port 18. As a result, the weight of the filler 13 remaining in the filling cylinder 11 was 303.7 g, and the discharge efficiency was 97.4%. On the other hand, as a comparison, in the case of the conventional method in which the lid of the filling cylinder 11 is opened and the filler 13 is discharged, the residual amount of filler is 30 g or less, but it takes 10 minutes or more. Further, in the conventional method, since the filling cylinder must be removed from the gas processing apparatus and transported to a predetermined place and then the filler is discharged, it takes 40 minutes or more including transportation time, and more than two people. Had to work with.

図９及び図１０に示すように、排出口１６に対向する充填筒１１の壁面４箇所に口径４．３５ｍｍの移動ガス噴出口１７を設けるとともに、各移動ガス噴出口１７にはガス噴出弁１７ａを有する移動ガス噴出経路１７ｂから４本に分岐したガス導入管１７ｃをそれぞれ接続した。また、移動ガス噴出口１７にはオリフィス径２ｍｍのスプレーノズルをそれぞれ取り付けた。その他の構成は実施例１と同じとした。 As shown in FIG. 9 and FIG. 10, a moving gas jet 17 having a diameter of 4.35 mm is provided at four positions on the wall surface of the filling cylinder 11 facing the discharge port 16, and a gas jet valve 17 a is provided at each moving gas jet 17. The gas introduction pipes 17c branched into four from the moving gas ejection path 17b having the above were respectively connected. Further, spray nozzles having an orifice diameter of 2 mm were respectively attached to the moving gas ejection ports 17. Other configurations are the same as those in the first embodiment.

まず、実施例１と同じ条件で、吸引手段２２を９０秒間作動させた後、ガス噴出弁１７ａを開いて各移動ガス噴出口１７から充填筒１１内に０．３ＭＰａの圧縮ガスを６０秒間導入した。その結果、充填剤残留量は９４ｇ、排出効率は９９．２％となった。 First, after operating the suction means 22 for 90 seconds under the same conditions as in Example 1, the gas ejection valve 17a is opened, and 0.3 MPa of compressed gas is introduced into the filling cylinder 11 from each moving gas ejection port 17 for 60 seconds. did. As a result, the residual amount of filler was 94 g, and the discharge efficiency was 99.2%.

本発明の充填筒の一形態例を示す説明図である。It is explanatory drawing which shows one example of a filling cylinder of this invention. 本発明の充填筒の変形例を示す要部の説明図である。It is explanatory drawing of the principal part which shows the modification of the filling cylinder of this invention. 充填筒への吸気口の配置例を示す説明図である。It is explanatory drawing which shows the example of arrangement | positioning of the inlet in a filling cylinder. 本発明の充填剤排出装置の一形態例を示す説明図である。It is explanatory drawing which shows one example of a filler discharging apparatus of this invention. 本発明の充填剤排出装置の変形例を示す説明図である。It is explanatory drawing which shows the modification of the filler discharge | emission apparatus of this invention. 充填剤分離手段への吸引経路の配置例を示す説明図である。It is explanatory drawing which shows the example of arrangement | positioning of the suction path | route to a filler separation means. 吸引手段の内部構造の一例を示す説明図である。It is explanatory drawing which shows an example of the internal structure of a suction means. 実施例１で使用した実験装置の概略図である。1 is a schematic diagram of an experimental apparatus used in Example 1. FIG. 実施例２で使用した充填筒の説明図である。It is explanatory drawing of the filling cylinder used in Example 2. FIG. 同じく実施例２で使用した充填筒の説明図である。It is explanatory drawing of the filling cylinder similarly used in Example 2. FIG.

Explanation of symbols

１１…充填筒、１２…充填剤支持部材、１３…充填剤、１４…ガス入口管、１５…処理ガス出口管、１６…排出口、１６ａ…排出筒、１６ｂ…開口下縁、１６ｃ…開口上縁、１７…移動ガス噴出口、１７ａ…ガス噴出弁、１７ｂ…移動ガス噴出経路、１７ｃ…ガス導入管、１８，１８ａ〜１８ｐ…吸気口、２１…充填剤排出装置、２２…吸引手段、２２ａ…駆動部、２２ｂ…カバー、２３…充填剤分離手段、２４…吸引経路、２４ａ…第１吸引経路、２４ｂ…第２吸引経路 DESCRIPTION OF SYMBOLS 11 ... Filling cylinder, 12 ... Filler support member, 13 ... Filler, 14 ... Gas inlet pipe, 15 ... Process gas outlet pipe, 16 ... Discharge port, 16a ... Discharge cylinder, 16b ... Lower opening edge, 16c ... Above opening Rim, 17 ... moving gas ejection port, 17a ... gas ejection valve, 17b ... moving gas ejection path, 17c ... gas introduction pipe, 18, 18a-18p ... intake port, 21 ... filler discharge device, 22 ... suction means, 22a ... Driver, 22b ... Cover, 23 ... Filler separation means, 24 ... Suction path, 24a ... First suction path, 24b ... Second suction path

Claims

After bringing the gas introduced into the cylinder from the gas inlet path provided at one end of the filling cylinder into contact with the granular filler filled in the cylinder, from the processing gas outlet path provided at the other end of the filling cylinder In the filling cylinder to be derived,
A discharge port for discharging the filler from the inside of the cylinder is provided at the bottom of the filler filling portion of the filling cylinder,
An intake port for sucking gas from outside is provided in the filling cylinder when the filler is discharged from the discharge port ,
The filler is filled above a filler support member provided in the lower part of the filling cylinder, and the discharge port opens directly above the filler support member on the side of the filling cylinder,
Provided on the side surface of the filling cylinder facing the discharge port is a moving gas jet port for jetting a gas that moves the filler on the filler support member toward the discharge port when the filler is discharged from the discharge port. filling tube, characterized in <br/> Being.

The filling cylinder according to claim 1 , wherein the intake port is provided below the filler support member .

Wherein the end portion of the filler support member, according to claim 1 or 2 filling tube according to characterized in that a sloping surface toward the filling tube inside in contact with the inner surface of the filling tube.

A filler discharging apparatus for discharging the filler from the filling cylinder according to any one of claims 1 to 3,
Suction means for sucking the gas in the filling cylinder through a suction path connected to the discharge port;
A filler separating means for separating the filler discharged from the filling cylinder accompanying the gas flow sucked into the suction path from the discharge port from the gas flow;
A filler discharging device comprising:

The filler separating means has a gas inlet part connected to the filling cylinder side of the suction path and a gas outlet part connected to the suction means side, and the gas outlet part is located at a height higher than the gas inlet part. 5. The filler discharging apparatus according to claim 4 , wherein the filler discharging device is provided at a position which is equal to or greater than that and where the axis of the gas inlet and the axis of the gas outlet are not linear .

5. The filler discharging apparatus according to claim 4, wherein the filler separating means is integrally provided on the suction side of the suction means .

The filler separating means includes a filler separation unit, the filler separating portion detachably provided filler collection container and characterized in that it is formed by claims 4 to 6 any one of claims Filler discharger.

Said suction passage, said suction means and said filler separating means is formed integrally with and movable, in any one of claims 4-7 wherein the suction path, characterized in that it is detachably formed on the outlet The filler discharging apparatus according to claim 1.