JP5042286B2 - Ceramic setter for firing electronic parts and method for producing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ceramic setter for firing electronic components, which has a light weight and excellent air permeability, and can prevent a Ag electrode material used for a ceramic multi-layer substrate to be adhered thereto at firing; and to provide a method for manufacturing the same. <P>SOLUTION: The ceramic setter for firing electronic components comprises a ceramic fiber and a ceramic particle as main ingredients, wherein the ceramic fiber is an alumina silicate fiber and/or an alumina-based fiber; the ceramic particle contains a spinel particle or a spinel particle and a magnesia particle; the bulk density is 370 to 950 kg/m<SP>3</SP>; and the average linear expansion coefficient (room temperature to 1,000&deg;C) is &le;6.3&times;10<SP>-6</SP>/K. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a ceramic setter used for firing electronic components such as a low-temperature fired ceramic multilayer substrate, and is particularly effective in preventing adhesion of silver electrode materials used in electronic components, and is lightweight and excellent in air permeability. It relates to ceramic setters.

In recent years, in the mounting board which mounts an electronic circuit, the development of the ceramic multilayer substrate which can be fired at a low temperature of 1000 ° C. or lower using a copper (Cu) or silver (Ag) electrode for the purpose of reducing the manufacturing cost. Has been done. This ceramic multilayer substrate is printed with a conductive paste on the surface of a green sheet mainly composed of alumina (Al ₂ O ₃ ) and glass components, and several sheets are stacked and placed on a setter to heat the organic binder in the green sheet. It is manufactured by removing and then firing.

  In the production of the ceramic multilayer substrate, it is important to efficiently remove the organic binder contained in the green sheet in a short time. Therefore, as a setter used for firing a green sheet, a ceramic setter having ceramic fibers and ceramic particles as main components and being lightweight and excellent in air permeability has been developed.

  For example, Japanese Patent Laid-Open No. 11-240769 (Patent Document 1) describes ceramic fibers and ceramic particles such as alumina particles or zirconia particles so that the alumina content is 75% by weight or more and the silica content is less than 25% by weight. , And after adding and forming an inorganic binder, the ceramic setter with good air permeability is manufactured by firing at 1100 ° C. or higher.

JP-A-11-240769

However, the conventional ceramic setter that is lightweight and excellent in air permeability as described in Patent Document 1 has a drawback that an electrode material used for a ceramic multilayer substrate, in particular, an Ag electrode material is easily attached. When the setter with the Ag electrode material adhered is used, Ag adheres to the fired ceramic multilayer substrate, which causes a problem in that the manufacturing yield decreases. Further, since the average linear thermal expansion coefficient of the ceramic setter is relatively large, for example, 7 × 10 ⁻⁶ / K (room temperature to 1000 ° C.) or more, there is a problem that damage such as cracks and cracks is likely to occur with respect to the thermal cycle. There was also.

  In order to prevent the adhesion of the Ag electrode material, it may be possible to apply a coating that prevents the adhesion of Ag to the surface of the ceramic setter. However, if the coating is provided, the pores on the surface of the setter are blocked and the air permeability is impaired. The inconvenience arises. When the air permeability is impaired, the organic binder cannot be efficiently removed in a short time, and defects such as warpage and discoloration are likely to occur in the ceramic multilayer substrate of the product.

  In view of the problems of the conventional ceramic setter that is lightweight and excellent in air permeability, the present invention is able to adhere the Ag electrode material used for the ceramic multilayer substrate while maintaining the lightweight and excellent air permeability. It is an object of the present invention to provide a ceramic setter for firing electronic parts and a method for producing the same, which can be prevented, have a low thermal expansion coefficient, and do not cause damage such as cracks or cracks with respect to a thermal cycle.

  In order to achieve the above object, the present inventor coated various ceramic particles on the surface of the ceramic setter described in Patent Document 1 in order to search for substances or materials that prevent adhesion of the Ag electrode material. The presence or absence of adhesion of the Ag electrode material was investigated by placing and firing a green sheet for a ceramic multilayer substrate on which a conductor paste of the Ag electrode material was printed on the ceramic setter coating.

As a result of the above examination, it was found that spinel (MgO.Al ₂ O ₃ ) particles and magnesia (MgO) particles are effective for preventing adhesion of Ag electrode material. However, ceramic setters coated with ceramic particles such as spinel particles and magnesia particles on the surface impair air permeability and deteriorate binder removal properties due to the coating, and warp and deform the ceramic multilayer substrate fired using this setter. It has been found that another inconvenience occurs.

  Therefore, instead of coating the surface with spinel particles or magnesia particles, ceramic setters were manufactured using spinel particles or magnesia particles as ceramic particles mixed with ceramic fibers as the main component. By placing and firing a ceramic multilayer substrate green sheet printed with a conductive paste of Ag electrode material on these ceramic setters, the presence or absence of adhesion of the Ag electrode material to the ceramic setter containing spinel particles and magnesia particles investigated.

  As a result, even if no coating is provided on the surface, if the ceramic setter contains spinel particles and magnesia particles, the adhesion of Ag electrode material is eliminated and good air permeability can be maintained. It has been confirmed that no warping or deformation occurs, and the present invention has been completed. However, since magnesia particles hydrate and swell in the slurry during the production process of the setter, increasing the compounding amount increases the filtration resistance when molding by the dehydration press method or suction method, making molding difficult. Therefore, it was found that use alone is not preferable.

That is, the ceramic setter provided by the present invention is a ceramic setter for firing electronic components mainly composed of ceramic fibers and ceramic particles, the ceramic fibers being alumina silicate fibers and / or alumina fibers, It contains spinel (MgO.Al ₂ O ₃ ) particles or spinel particles and magnesia (MgO) particles as ceramic particles, and has a bulk density of 370 to 950 kg / m ³ .

  Further, the method for producing a ceramic setter provided by the present invention is a method for producing a ceramic setter for firing an electronic component mainly composed of ceramic fibers and ceramic particles, wherein the ceramic fibers are alumina silicate fibers and / or alumina materials. 1200 to 60% by weight of fibers, spinel particles as ceramic particles or 30 to 75% by weight of magnesia particles, and 5 to 16% by weight of an inorganic binder are mixed in water to form a slurry, and then 1200 It is characterized by firing at ˜1400 ° C.

In the method for producing a ceramic setter according to the present invention, when an alumina silicate fiber is used as the ceramic fiber or a preferable silica sol is used as the inorganic binder, a cordierite phase is formed as a part of the crystal phase. By including this cordierite phase, the thermal expansion coefficient of the ceramic setter is lowered, for example, the average linear thermal expansion coefficient is 6.3 × 10 ⁻⁶ / K (room temperature to 1000 ° C.) or less, and the spalling resistance is reduced. It is particularly preferable because it improves.

  According to the present invention, it is lightweight and has excellent air permeability, and an organic binder can be efficiently removed in a short time. At the same time, Ag is not required when a ceramic multilayer substrate is fired without providing a coating on the surface. It is possible to provide a ceramic setter to which no electrode material adheres. Furthermore, it is possible to provide a ceramic setter having a small thermal expansion coefficient and excellent in spalling resistance that does not cause damage such as cracking or cracking with respect to the thermal cycle.

  Therefore, if the ceramic setter of the present invention is used, the ceramic setter can be used repeatedly because there is no adhesion of the Ag electrode material during firing of the green sheet for the ceramic multilayer substrate. Therefore, it is possible to contribute to a reduction in manufacturing cost.

  The ceramic setter of the present invention is composed of ceramic fibers and ceramic particles as main components, mixed with water together with an inorganic binder to form a slurry, wet-molded, and then fired the molded body to obtain a highly breathable ceramic. It is a setter. One or both of alumina silicate fiber and alumina fiber are used as the ceramic fiber, and spinel particles or spinel particles and magnesia particles are used as the ceramic particles.

The ceramic setter of the present invention uses spinel (MgO.Al ₂ O ₃ ) particles alone as the main component ceramic particles or together with magnesia (MgO) particles, so that the surface of the ceramic setter is not provided with a coating. It is possible to prevent the Ag electrode material of the ceramic multilayer substrate green sheet from adhering during firing. The reason why the adhesion of the Ag electrode material can be prevented by the present invention may be due to the poor wettability between spinel particles or magnesia particles and Ag, but the details are not clear.

  The adhesion preventing effect of the Ag electrode material can be obtained with either spinel particles or magnesia particles. However, since magnesia particles hydrate and swell in the slurry, increasing the compounding amount increases the filtration resistance when forming by the dehydration press method or suction method, etc., making it difficult to use alone. Is not preferred. Accordingly, when magnesia particles are used in combination with spinel particles, the amount of magnesia particles is desirably 20% by weight or less as described later.

  The ceramic setter of the present invention may contain ceramic particles other than the spinel particles and magnesia particles. The ceramic particles other than the spinel particles and the magnesia particles are not particularly limited. For example, alumina particles can be preferably used. The particle size of ceramic particles such as spinel particles, magnesia particles and alumina particles is preferably 50 μm (325 mesh) or less. This is because if the particle size of the ceramic particles exceeds 50 μm, the strength of the ceramic setter obtained may be reduced or the particles may be shattered.

Among the ceramic fibers, the chemical composition of the alumina silicate fiber is preferably such that the alumina (Al ₂ O ₃ ) is 32% by weight or more and the total of alumina and silica (SiO ₂ ) is 80% by weight or more. . The chemical composition of the alumina fiber is preferably 72% by weight or more of alumina. This is because the alumina silicate fibers and alumina fibers having the above chemical composition are excellent in terms of improving the strength characteristics and creep characteristics of the setter.

  Next, the manufacturing method of the ceramic setter of the present invention will be specifically described. First, alumina silicate fibers and / or alumina fibers that are ceramic fibers, at least spinel particles as ceramic particles, and an inorganic binder are stirred and mixed in water to form a slurry. Any inorganic binder may be used as long as it is generally used in the production of ceramic fiber molded bodies. For example, silica sol (also referred to as colloidal silica) and alumina sol can be suitably used.

  The composition of each component is 10 to 60% by weight of alumina silicate fiber and / or alumina fiber, 30 to 75% by weight of spinel particles or spinel particles and magnesia particles, and 5 to 16% by weight of inorganic binder. . If the alumina silicate fiber and / or the alumina fiber is less than 10% by weight, the density increases and the air permeability decreases, and if it exceeds 60% by weight, the density decreases, the strength decreases, and the wear resistance also deteriorates. It is. In addition, if the inorganic binder is less than 5% by weight, the strength of the ceramic setter tends to decrease, and if it exceeds 16% by weight, the filtration resistance increases and a long time is required for molding, and cracks and voids are likely to occur in the setter. Become.

  Moreover, if the spinel particles or the spinel particles and the magnesia particles are less than 30% by weight, the effect of preventing the adhesion of the Ag electrode material cannot be obtained. It is not preferable because it tends to occur. However, when adding magnesia particles together with spinel particles, the magnesia particles are preferably 20% by weight or less. This is because if the magnesia particles exceed 20% by weight, the filtration resistance becomes too high and molding becomes difficult. In addition, when alumina particles are added, if the alumina particles exceed 50% by weight, the spinel particles are relatively reduced and the effect of preventing the adhesion of the Ag electrode material is reduced. It is preferable that

  The obtained slurry is agglomerated by adding an aqueous solution of an organic polymer flocculant, and wet-molded into a predetermined shape by a method such as a dehydration press method in which dehydration is performed while pressure is applied, or a suction method in which dehydration is performed by suction. The formed body is dried and fired at 1200 to 1400 ° C. to obtain the ceramic setter of the present invention. If the firing temperature is less than 1200 ° C., the firing is insufficient and satisfactory strength cannot be obtained. Conversely, if it exceeds 1400 ° C., the shrinkage of the molded product or setter becomes too large, which is not preferable.

The ceramic setter of the present invention thus obtained has no coating on the surface, has a bulk density of 370 to 950 kg / m ³ , preferably 400 to 700 kg / m ³ , and conforms to JIS R2115. The air permeability measured in this way is 4.5 × 10 ^{−8 to} 29.0 × 10 ⁻⁸ cm ² , and is lightweight and has high air permeability. Accordingly, the organic binder can be efficiently removed in a short time when the ceramic multilayer substrate green sheet is fired.

The chemical composition of the ceramic setter of the present invention is 41 to 84% by weight of alumina (Al ₂ O ₃ ), 6 to 45% by weight of silica (SiO ₂ ), and 8 to 35% by weight of magnesia (MgO). It is preferable. In particular, by including cordierite (Mg ₂ Al ₄ Si ₅ O ₁₈ ) phase as a part of the crystal phase, a small coefficient of thermal expansion is obtained. Specifically, the average linear heat measured according to JIS R227-3 The expansion coefficient is in the range of 3.6 to 6.3 × 10 ⁻⁶ / K (room temperature to 1000 ° C.). As a result, a ceramic setter having excellent spalling resistance and having no cracks or cracks even when the heating and cooling cycle is short can be obtained.

Using ISOWool (trade name) manufactured by Isolite Industry Co., Ltd. and Arsene (trade name) manufactured by Denki Kagaku Kogyo Co., Ltd. as ceramic fibers and using at least spinel powder as ceramic powder, a ceramic setter is manufactured as follows. did. The above Isouru the _Al 2 _{O 3} is 45 wt%, the total of _Al 2 _{O 3} and SiO ₂ is 98 percent by weight of alumina silicate, fibrous, also the Arcen is the _Al 2 _{O 3} of 97 wt% crystalline Alumina fiber.

[Example 1]
20% by weight isowool of alumina silicate fiber, 8% by weight of arsene of alumina fiber, 48% by weight of spinel powder having an average particle size of 7.5 μm, 16% by weight of alumina powder having an average particle size of 4.3 μm, inorganic The binder silica sol 8% by weight was added to 150 liters of water and stirred for several minutes to form a slurry.

  An aqueous starch solution was added to the slurry as an organic polymer flocculant to cause aggregation, and pressure suction molding was carried out into a plate shape of 660 mm long × 330 mm wide × 60 mm thick. The obtained plate-shaped molded body was dried at 120 ° C. and then fired at 1300 ° C. for 3 hours, and surface treatment and slicing were performed to produce a setter.

The bulk density of the obtained setter was 690 kg / m ³ . Also, the air permeability (JIS R2115), three-point bending strength (JIS R2619), average linear thermal expansion coefficient (JIS R2207-3) at room temperature to 1000 ° C. are measured, and the crystal phase of the setter is further determined by X-ray diffraction method. analyzed. The obtained results are summarized in Table 1 below.

Using the setter of Example 1, the ceramic multilayer substrate green sheet was fired. That is, an Ag conductor paste is printed as an electrode material on the surface of a normal ceramic multilayer substrate green sheet mainly made of alumina (Al ₂ O ₃ ) or a glass component, and several sheets of these are stacked and placed on a setter. After removing the organic binder by heating for 5 hours, a ceramic multilayer substrate was manufactured by firing at 900 ° C. for 1 hour.

  When the setter after firing was visually observed using a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Example 2]
A setter was produced in the same manner as in Example 1 except that only 61% by weight of the same spinel powder as in Example 1 was used as ceramic powder (without using alumina powder), and 11% by weight of silica sol was added.

The bulk density of the obtained setter was 910 kg / m ³ . For the setter of Example 2, the air permeability, three-point bending strength, and average linear thermal expansion coefficient were measured in the same manner as in Example 1 above, and the crystal phase of the setter was further analyzed. The obtained results are shown together in Table 1 below together with the chemical compositions obtained in the same manner as described above.

  Furthermore, using the setter of Example 2, the ceramic multilayer substrate green sheet was fired in the same manner as in Example 1 above. When the setter after firing was visually observed with a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Example 3]
A setter was produced in the same manner as in Example 1, except that only 30% by weight of isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 62% by weight of the same spinel powder as in Example 1 was used as the ceramic powder. % (Without using alumina powder) and 8% by weight of silica sol was added.

The bulk density of the obtained setter was 700 kg / m ³ . For the setter of Example 3, the air permeability, three-point bending strength, and average linear thermal expansion coefficient were measured in the same manner as in Example 1, and the crystal phase of the setter was further analyzed. The obtained results are shown together in Table 1 below together with the chemical compositions obtained in the same manner as described above.

  Further, using the setter of Example 3, the green sheet for the ceramic multilayer substrate was fired in the same manner as in Example 1. When the setter after firing was visually observed with a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Example 4]
A setter was produced in the same manner as in Example 1, except that only 50% by weight of isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 42 weight of the same spinel powder as in Example 1 was used as the ceramic powder. % (Without using alumina powder) and 8% by weight of silica sol was added.

The bulk density of the obtained setter was 400 kg / m ³ . For the setter of Example 4, the air permeability, three-point bending strength, and average linear thermal expansion coefficient were measured in the same manner as in Example 1, and the crystal phase of the setter was further analyzed. The obtained results are shown together in Table 1 below together with the chemical compositions obtained in the same manner as described above.

  Further, using the setter of Example 4, the green sheet for the ceramic multilayer substrate was fired in the same manner as in Example 1. When the setter after firing was visually observed with a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Example 5]
A setter was produced in the same manner as in Example 1, except that only 30% by weight of isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 42% by weight of the same spinel powder as in Example 1 was used as the ceramic powder. % And 20% by weight of magnesia powder having an average particle diameter of 13.6 μm (without using alumina powder), and 8% by weight of silica sol was added.

The bulk density of the obtained setter was 850 kg / m ³ . For the setter of Example 5, the air permeability, three-point bending strength, and average linear thermal expansion coefficient were measured in the same manner as in Example 1, and the crystal phase of the setter was further analyzed. The obtained results are shown together in Table 1 below together with the chemical compositions obtained in the same manner as described above.

  Further, using the setter of Example 5, the green sheet for the ceramic multilayer substrate was fired in the same manner as in Example 1. When the setter after firing was visually observed with a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Example 6]
A setter was produced in the same manner as in Example 1, except that only 60% by weight of the isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 32 wt. % (Without using alumina powder) and 8% by weight of silica sol was added.

The bulk density of the obtained setter was 500 kg / m ³ . For the setter of Example 6, the air permeability, three-point bending strength, and average linear thermal expansion coefficient were measured in the same manner as in Example 1, and the crystal phase of the setter was further analyzed. The obtained results are shown together in Table 1 below together with the chemical compositions obtained in the same manner as described above.

  Further, using the setter of Example 6, the green sheet for the ceramic multilayer substrate was fired in the same manner as in Example 1. When the setter after firing was visually observed with a microscope, no adhesion of the Ag electrode material was observed, no warp, and no damage such as cracks or cracks occurred. Also, no warpage or deformation occurred in the ceramic multilayer substrate obtained by firing.

[Comparative Example 1]
A setter was produced in the same manner as in Example 1, except that only 30% by weight of isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 60 weight of the same alumina powder as in Example 1 was used as the ceramic powder. % (Without spinel powder) and 10% by weight of silica sol was added.

The bulk density of the obtained setter was 690 kg / m ³ . About this setter, it carried out similarly to the said Example 1, and measured the air permeability, the three-point bending strength, and the average linear thermal expansion coefficient, and also analyzed the crystal phase of the setter. The obtained results are shown together in Table 2 below together with the chemical composition of the setter obtained in the same manner as described above.

  Further, when the setter of Comparative Example 1 was used to fire the ceramic multilayer substrate green sheet in the same manner as in Example 1, Ag adhesion was observed on the surface of the setter after firing. The ceramic multilayer substrate obtained by firing was not warped or deformed.

Therefore, the same spinel powder coating as in Example 1 was applied to the surface of the setter. That is, spinel powder was mixed with an organic binder to form a slurry, applied to the surface of the setter, dried at 120 ° C., and fired at 1350 ° C. for 2 hours to form a spinel coating. The air permeability of this setter was 6.7 × 10 ⁻⁸ cm ² before coating, and 1.3 × 10 ⁻⁸ cm ² after coating.

  Using the setter of Comparative Example 1 to which the spinel coating was applied, the green sheet for the ceramic multilayer substrate was fired in the same manner as in Example 1 above. On the surface of the setter with the spinel coating after firing, Adhesion is no longer observed. However, since the air permeability was impaired by the coating and the binder removal property was deteriorated, warpage and deformation occurred in the obtained ceramic multilayer substrate.

[Comparative Example 2]
A setter was produced in the same manner as in Example 1, except that only 20% by weight of isosilicate wool of alumina silicate fiber was used as the ceramic fiber (no alumina fiber was used), and 75 weight of the same alumina powder as in Example 1 was used as the ceramic powder. % (Without spinel powder) and 5% by weight of silica sol was added.

The bulk density of the obtained setter was 1020 kg / m ³ . About this setter, it carried out similarly to the said Example 1, and measured the air permeability, the three-point bending strength, and the average linear thermal expansion coefficient, and also analyzed the crystal phase of the setter. The obtained results are shown together in Table 2 below together with the chemical compositions obtained in the same manner as described above.

  When the setter of Comparative Example 2 was used to fire the ceramic multilayer substrate green sheet in the same manner as in Example 1, adhesion of the Ag electrode material was observed on the surface of the setter after firing. In addition, the setter of this comparative example 2 had a larger bulk density than the setter of the said comparative example 1, and the air permeability was falling accordingly.

For the setter of Comparative Example 2, after applying spinel coating in the same manner as in Comparative Example 1, the green sheet for ceramic multilayer substrate was fired in the same manner as in Example 1. As a result, the adhesion of the Ag electrode material was not observed on the surface of the setter with spinel coating after firing, but the air permeability of the setter was 0.8 × 10 ⁻⁸ cm ² before coating, and was 0.8 after coating. Since it decreased to 63 × 10 ⁻⁸ cm ² , the binder removal property further deteriorated, and remarkable warpage and deformation occurred in the obtained ceramic multilayer substrate.

  As can be seen from the results of the comparative examples described above, the Ag electrode material adheres to the surface of the conventional ceramic setter that is lightweight and excellent in air permeability. If the coating such as spinel is applied, the adhesion of the Ag electrode material is eliminated, but the air permeability is impaired by the coating and the binder removal is deteriorated, so that the object to be fired is warped or deformed.

  On the other hand, as can be seen from the above examples, the ceramic setter of the present invention can prevent the adhesion of the Ag electrode material without coating the surface. Moreover, since the bulk density is low and the air permeability is excellent, the binder removal is good, and the fired product does not warp or deform.

Claims (5)

A ceramic setter for firing electronic parts mainly composed of ceramic fibers and ceramic particles, wherein the ceramic fibers are alumina silicate fibers and / or alumina fibers, and the ceramic particles are spinel particles or spinel particles and magnesia particles And a bulk density of 370 to 950 kg / m ³ .   The ceramic setter according to claim 1, wherein the chemical composition of the ceramic setter is 41 to 84 wt% alumina, 6 to 45 wt% silica, and 8 to 35 wt% magnesia. The cordierite phase is included as a part of the crystal phase, and the average linear thermal expansion coefficient is 6.3 × 10 ⁻⁶ / K (room temperature to 1000 ° C.) or less. Ceramic setter.   A method for producing a ceramic setter for firing an electronic component comprising ceramic fibers and ceramic particles as main components, wherein the ceramic fibers are alumina silicate fibers and / or alumina fibers of 10 to 60% by weight, and the ceramic particles are spinel particles or Spinel particles and magnesia particles 30 to 75% by weight (however, magnesia particles are 20% by weight or less) and inorganic binder 5 to 16% by weight are mixed with water to form a slurry, and then formed at 1200 to 1400 ° C. A method for producing a ceramic setter, characterized in that the ceramic setter is fired.   The method for producing a ceramic setter according to claim 4, wherein 50% by weight or less of alumina particles are added and mixed as ceramic particles other than the spinel particles and magnesia particles.