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JP5046008B2 - Non-contact transfer system using vacuum - Google Patents
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JP5046008B2 - Non-contact transfer system using vacuum - Google Patents

Non-contact transfer system using vacuum Download PDF

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Publication number
JP5046008B2
JP5046008B2 JP2007153324A JP2007153324A JP5046008B2 JP 5046008 B2 JP5046008 B2 JP 5046008B2 JP 2007153324 A JP2007153324 A JP 2007153324A JP 2007153324 A JP2007153324 A JP 2007153324A JP 5046008 B2 JP5046008 B2 JP 5046008B2
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Japan
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contact
control algorithm
contact transfer
transfer
vacuum
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JP2007153324A
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JP2008284670A (en
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圭三 大谷
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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

本発明は、半導体製造装置や液晶製造装置に搭載されて、ウエハや液晶ガラスなどのワークを非接触で吊上げ搬送する搬送機器に関するものである。The present invention relates to a transfer device that is mounted on a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus and lifts and transfers a workpiece such as a wafer or liquid crystal glass in a non-contact manner.

従来技術Conventional technology

従来、半導体製造装置や液晶製造装置など、コンタミネーション（汚染）を極度に嫌う分野では、図４に示すように、エジェクタ効果を用いて非接触で吊上げ搬送を行なうノンコンタクト搬送パッドが使用されている。正圧を用いているため、吊上げ力が小さいなど多くの欠点を有していた。Conventionally, in a field where contamination (contamination) is extremely unfavorable, such as a semiconductor manufacturing apparatus and a liquid crystal manufacturing apparatus, a non-contact transfer pad that uses a ejector effect for non-contact lifting transfer is used as shown in FIG. Yes. Since positive pressure was used, it had many drawbacks such as small lifting force.

従来のノンコンタクト搬送では圧縮空気（正圧）を用い、次の欠点を有している。
○ 吸着力が非常に小さい。
○ 消費空気流量が多い（→容量の大きなコンプレッサが必要）。
○ 圧縮空気を用いるためエネルギー効率が悪い（搬送の仕事／電気）
○ 放出される圧縮空気によりクリーンルーム内の空気の流れが乱される（→クリーン度の低下）。
○ 放出される空気の質（パーティクル、湿度）を管理する必要がある。
○ 多量な空気流により静電気を発生する。Conventional non-contact conveyance uses compressed air (positive pressure) and has the following drawbacks.
○ Adsorption power is very small.
○ High air flow (→ High capacity compressor required).
○ Energy efficiency is low due to the use of compressed air (conveyance work / electricity)
○ The flow of air in the clean room is disturbed by the released compressed air (→ decrease in cleanliness).
○ It is necessary to control the quality of air released (particles, humidity).
○ Static electricity is generated by a large air flow.

そこで、この発明は、吸着力が弱いなどの課題を解決するノンコンタクト搬送システムを提供することを目的とする。In view of the above, an object of the present invention is to provide a non-contact conveyance system that solves problems such as weak adsorption force.

図１を用いて説明する。近接センサ２とロードセル３でそれぞれワーク――パッドの距離および吊上げ力を測定し、制御アルゴリズム８で操作量（バルブ４、ＡＣサーボモータ４）が計算され出力される。
これにより、ワーク９とパッド１の間に空隙を維持しながら吊上げ搬送が行なえる。This will be described with reference to FIG. The proximity sensor 2 and the load cell 3 respectively measure the work-pad distance and the lifting force, and the control algorithm 8 calculates and outputs the operation amount (valve 4, AC servomotor 4).
As a result, lifting and conveying can be performed while maintaining a gap between the workpiece 9 and the pad 1.

図１のロードセル３は、搬送時は、パッド１及び吊上げているワークの重量を示すことになる。The load cell 3 in FIG. 1 indicates the weight of the pad 1 and the workpiece being lifted during conveyance.

図１のバルブ４は、真空ポンプ６につながる開度を調整し、吊上げの用いる真空圧力を調整している。1 adjusts the opening degree connected to the vacuum pump 6 to adjust the vacuum pressure used for lifting.

制御アルゴリズムを図２および図３に示す。図２は基本的な制御アルゴリズムである。図３のようにロードセルの信号をもとに力に関するマイナーフィードバックループを形成するとより制御性が向上する。The control algorithm is shown in FIGS. FIG. 2 shows a basic control algorithm. As shown in FIG. 3, when a minor feedback loop relating to force is formed based on the load cell signal, controllability is further improved.

以上説明したように、この発明によれば、高吊上げ力のノンコンタクト搬送システムが実現できる。As described above, according to the present invention, a non-contact conveyance system having a high lifting force can be realized.

図１を用いて本発明の実施例を説明する。近接センサ２とロードセル３でそれぞれワーク――パッドの距離および吊上げ力を測定し、制御アルゴリズム８で操作量（バルブ４、ＡＣサーボモータ４）が計算され出力される。制御アルゴリズムは、図２および図３に示す。
これにより、ワーク９とパッド１の間に空隙を維持しながら吊上げ搬送が行なえる。An embodiment of the present invention will be described with reference to FIG. The proximity sensor 2 and the load cell 3 respectively measure the work-pad distance and the lifting force, and the control algorithm 8 calculates and outputs the operation amount (valve 4, AC servomotor 4). The control algorithm is shown in FIGS.
As a result, lifting and conveying can be performed while maintaining a gap between the workpiece 9 and the pad 1.

実施例のシステム構成を示すThe system configuration of the embodiment is shown 実施例の制御アルゴリズムExample control algorithm 実施例の制御アルゴリズムExample control algorithm 従来のノンコンタクト搬送パッドの断面図である。It is sectional drawing of the conventional non-contact conveyance pad.

符号の説明Explanation of symbols

１ パッド
２ 近接センサ
３ ロードセル
４ バルブ
５ ＡＣサーボモータ
６ 真空ポンプ
７ ロボット先端
８ 制御アルゴリズム
９ ワーク
１０ 圧縮空気1 Pad 2 Proximity Sensor 3 Load Cell 4 Valve 5 AC Servo Motor 6 Vacuum Pump 7 Robot Tip 8 Control Algorithm 9 Work 10 Compressed Air

Claims (3)

負圧を用いてワークを非接触で吊上げ搬送するノンコンタクト搬送パッドにおいて、ロードセルおよび近接センサのセンサ信号をもとに、真空系のバルブおよびサーボモータなどアクチュエータを用いて、非接触搬送の制御を行なうことを特徴とするノンコンタクト搬送システム。Non-contact transfer pads that lift and transfer workpieces in a non-contact manner using negative pressure can control non-contact transfer using actuators such as vacuum valves and servo motors based on sensor signals from load cells and proximity sensors. A non-contact conveyance system characterized by performing. 制御アルゴリズムのなかに微分動作を含めたことを特徴とする請求項１に記載のノンコンタクト搬送システム。2. The non-contact transfer system according to claim 1, wherein a differential operation is included in the control algorithm. 制御アルゴリズムのなかに、力を検出して力に関するマイナーフィードバックループを入れたことを特徴とする請求項１または請求項２に記載のノンコンタクト搬送システム。The non-contact conveyance system according to claim 1 or 2, wherein a force is detected and a minor feedback loop regarding the force is inserted in the control algorithm.
JP2007153324A 2007-05-15 2007-05-15 Non-contact transfer system using vacuum Expired - Fee Related JP5046008B2 (en)

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JP2008284670A JP2008284670A (en) 2008-11-27
JP5046008B2 true JP5046008B2 (en) 2012-10-10

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TWI647779B (en) * 2011-08-30 2019-01-11 日商尼康股份有限公司 Object conveying device, object processing device, exposure device, manufacturing method of flat panel display, component manufacturing method, object conveying method, and object exchange method

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JPH115630A (en) * 1997-06-13 1999-01-12 Kokusai Electric Co Ltd Substrate transfer device

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