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JP5050725B2 - Manufacturing method of build-up printed wiring board - Google Patents
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JP5050725B2 - Manufacturing method of build-up printed wiring board - Google Patents

Manufacturing method of build-up printed wiring board Download PDF

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JP5050725B2
JP5050725B2 JP2007212691A JP2007212691A JP5050725B2 JP 5050725 B2 JP5050725 B2 JP 5050725B2 JP 2007212691 A JP2007212691 A JP 2007212691A JP 2007212691 A JP2007212691 A JP 2007212691A JP 5050725 B2 JP5050725 B2 JP 5050725B2
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conductor wiring
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wiring pattern
insulating resin
seed layer
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修 古賀
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Toppan Inc
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Description

本発明は、ビルドアッププリント配線基板及びその製造方法に関する。特に、導体配線幅が25μm以下のファイン導体パターンを有する多層プリント配線基板を安価に上市すること、かつ熱硬化性絶縁樹脂層上にその導体配線層の密着強度を向上させ、その接続信頼性を向上させたビルドアッププリント配線基板及びその製造方法に関する。   The present invention relates to a build-up printed wiring board and a method for manufacturing the same. In particular, a multilayer printed wiring board having a fine conductor pattern with a conductor wiring width of 25 μm or less is marketed at a low cost, and the adhesion strength of the conductor wiring layer is improved on the thermosetting insulating resin layer, thereby improving the connection reliability. The present invention relates to an improved build-up printed wiring board and a method for manufacturing the same.

従来、多層プリント配線板では、熱硬化性絶縁樹脂層と導体配線層との密着強度を向上させるために、銅箔の導体配線層と熱硬化性絶縁樹脂層との界面を粗らして、機械的なアンカー効果による密着性向上を図っていた。   Conventionally, in the multilayer printed wiring board, in order to improve the adhesion strength between the thermosetting insulating resin layer and the conductor wiring layer, the interface between the copper foil conductor wiring layer and the thermosetting insulating resin layer is roughened, The improvement of the adhesiveness by the anchor effect was aimed at.

しかし近年、高周波領域では、銅配線表面の粗さによる表皮効果で、信号遅延問題が提起されている。信号遅延問題などの高周波化に対応するために、導体配線層と熱硬化性絶縁樹脂層表面との界面粗さのロープロファイル化(算術平均粗度Ra=3μm以下)が要求されている。算術平均粗度Raは、JIS−B0601−1994で規定される方法で測定される。ここで、算術平均粗度Raとは、粗さ曲線を中心線から折り返し、その粗さ曲線と中心線によって得られた面積を長さLで割った値で表すことをいう。   However, in recent years, in the high frequency region, a signal delay problem has been raised due to the skin effect caused by the roughness of the copper wiring surface. In order to cope with high frequency such as a signal delay problem, a low profile (arithmetic average roughness Ra = 3 μm or less) of the interface roughness between the conductor wiring layer and the thermosetting insulating resin layer surface is required. The arithmetic average roughness Ra is measured by a method defined in JIS-B0601-1994. Here, the arithmetic average roughness Ra means that the roughness curve is folded from the center line and expressed by a value obtained by dividing the area obtained by the roughness curve and the center line by the length L.

また、電子機器への高機能化、小型化、軽量化等の要求に対応して、それに組み込まれる多層プリント配線板に対しても高密度化、薄型化の要求が高まっている。これらの要求に対応する多層プリント配線板の一つとして、ビルドアップ工法があげられる。ビルドアップ工法とは、熱硬化性絶縁樹脂層コートと化学銅めっきを繰り返す工法のことである。しかし、一般的に熱硬化性絶縁樹脂層と導体配線層とは密着力が低い。特に、高密度配線化するために、導体配線幅の細線化や導体配線ピッチのファイン化が要求されており、極細幅の導体配線層と熱硬化性絶縁樹脂層との密着強度の信頼性が大きな問題となってきている。   Further, in response to demands for higher functionality, miniaturization, weight reduction, and the like for electronic devices, there are increasing demands for higher density and thinner multilayer printed wiring boards incorporated therein. One of multilayer printed wiring boards that meet these requirements is a build-up method. The build-up method is a method of repeating a thermosetting insulating resin layer coat and chemical copper plating. However, in general, the adhesion between the thermosetting insulating resin layer and the conductor wiring layer is low. In particular, in order to achieve high-density wiring, it is required to narrow the conductor wiring width and finer the conductor wiring pitch, and the reliability of the adhesion strength between the extremely narrow conductor wiring layer and the thermosetting insulating resin layer is required. It has become a big problem.

上市されている、熱硬化性絶縁樹脂層は、一般的にフィラーとしてシリカを含有させ、熱硬化収縮を押さえ強度を向上させている。通常、熱硬化性絶縁樹脂層を強アルカリ性に調液した過マンガン酸塩溶液等の酸化剤で膨潤させ、フィラーの一部を溶解し、熱硬化性絶縁樹脂層の表面を凸凹に粗化し、めっきによる導体配線層との機械的アンカー効果により、密着強度を維持している。   A commercially available thermosetting insulating resin layer generally contains silica as a filler to suppress thermosetting shrinkage and improve strength. Usually, the thermosetting insulating resin layer is swollen with an oxidizing agent such as a permanganate solution prepared to be strongly alkaline, a part of the filler is dissolved, and the surface of the thermosetting insulating resin layer is roughened. The adhesion strength is maintained by the mechanical anchor effect with the conductor wiring layer by plating.

ここで、一般的に信頼性のある導体配線の密着強度の目安として、90°引き剥がし強度で最低5.9N/cmと言われている。一方例えば、上市されているシリカフィラーを含有する熱硬化性絶縁樹脂層で膨潤粗化処理をしないと、算術平均粗度Raが0.2μmと非常に平滑な表面である。この膨潤粗化しない熱硬化性絶縁樹脂層に化学銅めっきを行った場合、触媒の付着が悪く銅めっきが析出しない部分が生じたり、めっき中での化学銅めっき膜の引張り内部応力により、一部で浮きや剥がれを生じたりしてしまう。このように、非常に平滑な熱硬化性絶縁樹脂層へ無電解めっきを行う場合には、密着強度を向上させる方策が必要であった。   Here, it is generally said that the 90 ° peel strength is a minimum of 5.9 N / cm as a standard for reliable adhesion strength of conductive wiring. On the other hand, for example, when the swelling roughening treatment is not performed with a commercially available thermosetting insulating resin layer containing a silica filler, the arithmetic average roughness Ra is 0.2 μm, which is a very smooth surface. When chemical copper plating is performed on this thermosetting insulating resin layer that does not swell and roughen, there is a portion where the catalyst is poorly adhered and the copper plating does not precipitate, or because of the internal stress of the chemical copper plating film during plating. The part may be lifted or peeled off. Thus, when electroless plating is performed on a very smooth thermosetting insulating resin layer, a measure for improving the adhesion strength is required.

特許文献1では、酸化剤に対して難溶性の絶縁樹脂に、酸化剤に可溶な平均粒径2μm〜10μmの耐熱性粒子と平均粒径2μmの耐熱性粒子の混合物を、あるいは、平均粒径2μm〜10μmの耐熱性粒子と平均粒径2μmの耐熱性粒子の擬似粒子を混合することにより、酸化剤処理後の絶縁樹脂層に凹部を設け、機械的アンカー効果により、密着力を向上させている。   In Patent Document 1, a mixture of heat-resistant particles having an average particle diameter of 2 μm to 10 μm and heat-resistant particles having an average particle diameter of 2 μm soluble in an insulating resin that is hardly soluble in an oxidant, or an average particle By mixing heat-resistant particles with a diameter of 2 μm to 10 μm and pseudo particles of heat-resistant particles with an average particle diameter of 2 μm, a concave portion is provided in the insulating resin layer after the oxidant treatment, and the adhesion is improved by the mechanical anchor effect. ing.

しかしこのように、熱硬化性絶縁樹脂層と導体配線層との界面が凸凹であると、この後の導体配線層のパターニング工程で、熱硬化性絶縁樹脂層の凹部内に埋設されている導体配線層の一部が残渣として残りやすく、隣り合う導体パターンをショートさせる不良が発生してしまう。   However, if the interface between the thermosetting insulating resin layer and the conductor wiring layer is uneven as described above, the conductor embedded in the recess of the thermosetting insulating resin layer in the subsequent patterning process of the conductor wiring layer. A part of the wiring layer tends to remain as a residue, and a defect that shorts adjacent conductor patterns occurs.

特許文献2では、シランカップリング剤を用いて、熱硬化性絶縁樹脂層と導体配線層との密着強度を向上させる記載がある。この特許文献2では、内層の銅箔表面上にシランカップリング剤処理を施し、未硬化のエポキシ樹脂など不飽和二重結合を有する樹脂を、シランカップリング剤処理された銅箔上にコートし、熱硬化によって密着強度を発揮させるというものである。   Patent Document 2 describes that the adhesion strength between the thermosetting insulating resin layer and the conductor wiring layer is improved by using a silane coupling agent. In this patent document 2, a silane coupling agent treatment is performed on the copper foil surface of the inner layer, and a resin having an unsaturated double bond such as an uncured epoxy resin is coated on the copper foil treated with the silane coupling agent. The adhesive strength is exhibited by thermosetting.

このように銅箔とシランカップリング剤とは容易にカップリング反応できる。しかし逆に、不飽和二重結合のない樹脂表面に対しては、シランカップリング効果を発揮せず、この後導体配線層を形成しても充分な密着強度が得られない。従来のビルドアップ工法では、不飽和二重結合の少ない絶縁樹脂層上に導体配線層として銅めっきする工法であるため、従来のシランカップリング工法だけでは密着強度が出ない問題があった。   Thus, the copper foil and the silane coupling agent can be easily coupled. However, on the other hand, the silane coupling effect is not exerted on the resin surface having no unsaturated double bond, and sufficient adhesion strength cannot be obtained even if the conductor wiring layer is formed after that. The conventional build-up method is a method of copper plating as a conductor wiring layer on an insulating resin layer with few unsaturated double bonds, so that there is a problem that adhesion strength cannot be obtained only by the conventional silane coupling method.

前述したように一般的には、熱硬化性絶縁樹脂層と導体配線層との密着強度向上のために、熱硬化性絶縁樹脂層に強アルカリ性に調液した過マンガン酸塩溶液等による膨潤粗化処理が行われ、その後化学銅めっきにより数μm厚のシード層が形成される。更に感光性のレジストを用いて、所望する導体配線パターンに露光、現像してレジストのパターンを形成した後、レジストパターンから露出した化学銅めっきのシード層に電位を印加し、電解銅めっきを行う。更にここで不要なレジストパターンをアルカリ溶液にて剥膜させ、化学銅めっきのシード層上に電解銅めっきで形成された導体配線パターンが得られる。   As described above, in general, in order to improve the adhesion strength between the thermosetting insulating resin layer and the conductor wiring layer, the swelling coarseness by a permanganate solution or the like prepared in the thermosetting insulating resin layer with strong alkalinity is provided. Then, a seed layer having a thickness of several μm is formed by chemical copper plating. Further, using a photosensitive resist, a desired conductor wiring pattern is exposed and developed to form a resist pattern, and then an electric potential is applied to the chemical copper plating seed layer exposed from the resist pattern to perform electrolytic copper plating. . Further, an unnecessary resist pattern is stripped with an alkaline solution, and a conductor wiring pattern formed by electrolytic copper plating on the seed layer of chemical copper plating is obtained.

ここで、本発明で検討している一般的にフラッシュエッチングやクイックエッチングと呼ばれる(以下、「フラッシュエッチング」と呼ぶ。)工程にて、パターニングされた電解銅めっきから露出している化学銅めっきのシード層を完全にエッチングアウトする。   Here, the chemical copper plating exposed from the patterned electrolytic copper plating in a process generally referred to as flash etching or quick etching (hereinafter referred to as “flash etching”) considered in the present invention. Etch out the seed layer completely.

このフラッシュエッチング工程の前工程で行われる熱硬化性絶縁樹脂層の膨潤粗化工程で、熱硬化性絶縁樹脂層表面の粗面化、及びめっき液の漏れ性が向上することにより密着強度向上の効果を狙っている。しかしながら、粗面化された熱硬化性絶縁樹脂層の凹部内部にめっきされた銅が残渣として残りやすく、隣り合う導体配線パターン間でショートが発生する問題があった。このため、一般的にフラッシュエッチングでは、化学銅めっき層のエッチング時間を助長させたり、電解銅めっきより化学銅めっきが溶解しやすいエッチング液を選定することにより、この電解銅めっきで形成された導体配線間パターン間に露出している化学銅めっき層をフラッシュエッチングで完全にエッチングアウトし、隣り合う導体配線パターンとのショートを防止したりしている。   In the swelling and roughening step of the thermosetting insulating resin layer performed in the pre-process of this flash etching step, the adhesion strength is improved by improving the roughening of the surface of the thermosetting insulating resin layer and the leakage of the plating solution. Aiming for an effect. However, there is a problem that copper plated in the concave portion of the roughened thermosetting insulating resin layer tends to remain as a residue and a short circuit occurs between adjacent conductor wiring patterns. For this reason, generally in flash etching, the etching time of the chemical copper plating layer is promoted, or the conductor formed by this electrolytic copper plating is selected by selecting an etching solution in which the chemical copper plating is easier to dissolve than the electrolytic copper plating. The chemical copper plating layer exposed between the wiring patterns is completely etched out by flash etching to prevent a short circuit with the adjacent conductor wiring pattern.

また、フラッシュエッチングの条件によって電解銅めっき層のエッチングが進みやすい条件では、導体配線パターン幅が細くなったり、化学銅めっき層のエッチングが進みやすい条件であれば、導体配線パターン直下の化学銅めっき層へのエッチングが進行(アンダーカット)し、導体配線の密着強度が低下したりする問題があった。   Also, under conditions where the etching of the electrolytic copper plating layer is easy to proceed depending on the flash etching conditions, the chemical copper plating just below the conductor wiring pattern is necessary if the conductor wiring pattern width is narrow or the etching of the chemical copper plating layer is easy to proceed. There was a problem that etching to the layer progressed (undercut), and the adhesion strength of the conductor wiring decreased.

特に、本発明で検討している導体配線幅25μm以下の微細導体配線パターンでは、電解銅めっきパターンの間隙には新鮮なフラッシュエッチング液との置換が悪いため、エッチング速度が遅くなり、電解銅めっきのエッチングだけが進行するため、導体配線パターンが細くなってしまう問題があった。また、導体配線パターンと導体配線パターンとの間隙が広い部分が混在する場合、この部分は化学銅めっきにアンダーカットが生じ、密着強度の低下が見られるなどの問題があった。次の製造工程で、熱硬化性絶縁樹脂層を更にビルドアップした場合や最外層のソルダーレジストをコートする場合、またはワーク搬送や取扱時接触した場合に、アンダーカットを生じた導体配線パターンは、導体配線パターンが剥離したり、倒れたりしてショートやオープン不良を発生させる問題があった。
特開平2−188992号公報 特許第3505135号公報
In particular, in the fine conductor wiring pattern having a conductor wiring width of 25 μm or less studied in the present invention, since the replacement of the electrolytic copper plating pattern with a fresh flash etching solution is poor, the etching rate becomes slow, and the electrolytic copper plating Since only this etching proceeds, there is a problem that the conductor wiring pattern becomes thin. In addition, when a portion where the gap between the conductor wiring pattern and the conductor wiring pattern is wide is mixed, there is a problem that this portion has an undercut in the chemical copper plating and a decrease in adhesion strength is observed. In the next manufacturing process, when the thermosetting insulating resin layer is further built up, when the outermost solder resist is coated, or when contacting the workpiece during handling or handling, the conductor wiring pattern that caused the undercut is There is a problem that the conductor wiring pattern is peeled off or falls down to cause a short circuit or an open defect.
Japanese Patent Laid-Open No. 2-188992 Japanese Patent No. 3505135

本発明は、フラッシュエッチング時の導体配線幅の細りを最小限にし、且つ、絶縁樹脂層との高い密着強度を有し不良を発生しない安価で信頼性の高いビルドアッププリント配線基板及びその製造方法を提供することである。   The present invention provides an inexpensive and highly reliable build-up printed wiring board that minimizes thinning of the conductor wiring width during flash etching, has high adhesion strength with the insulating resin layer, and does not cause defects, and a method for manufacturing the same. Is to provide.

本発明の請求項に係る発明は、コア層の両面に所望の形状を有した内層導体配線パターンを設けた基板を準備し、基板上の両面に所望の形状を有した絶縁樹脂層を形成し、前記絶縁樹脂層に膨潤粗化処理を行い、前記絶縁樹脂層に凹凸を形成し、前記絶縁樹脂層の凹凸の表面を埋めるように、絶縁樹脂層上の両面に導体配線シード層を形成し、導体配線シード層上の両面に所望の形状を有するめっきレジストを形成し、所望の形状を有する前記めっきレジストの非形成部分に外層導体配線パターンを形成し、エッチング液の温度における導体配線シード層と外層導体配線パターンとの腐蝕電位をそれぞれ別途測定しておき、前記導体配線シード層と前記外層導体配線パターンとを所望の形状に形成するために、選択的にエッチングを行う際、前記外層導体配線パターンの腐蝕電位が前記導体配線シード層の腐蝕電位より高いエッチング液の温度を有し、かつ前記外層導体配線パターンの腐蝕電位より低く、前記導体配線シード層の腐蝕電位より高い電位を前記外層導体配線パターン部分に電位を印加し、前記外層導体配線パターンから露出して形成される前記導体配線シード層部分をエッチングし、前記導体配線シード層のエッチングが前記外層導体配線パターン直下まで終了した時点で、前記外層導体配線パターン及び前記導体配線シード層の腐蝕電位より低い電位を印加し、前記外層導体配線パターン外の絶縁樹脂表面の凹凸中に残った不要な前記導体配線シード層部分をエッチングアウトすることを特徴とするビルドアッププリント配線基板の製造方法
The invention according to claim 1 of the present invention, providing a substrate provided with inner conductor wiring pattern having a desired shape on both sides of the core layer, forming an insulating resin layer having a desired shape on the both surfaces of the substrate Then, the roughening treatment is performed on the insulating resin layer, irregularities are formed on the insulating resin layer, and conductive wiring seed layers are formed on both surfaces of the insulating resin layer so as to fill the irregular surface of the insulating resin layer. and, on the both surfaces of the conductor wiring seed layer to form a plating resist having a desired shape, to form an outer layer conductor wiring pattern on the non-formation portion of the plating resist having a desired shape, the conductor wiring at temperatures et etching liquid the corrosion potential of the seed layer and the outer layer conductor wiring patterns keep each separately measured, the said conductor wiring seed layer and the outer layer conductor wiring patterns to be formed into a desired shape, when performing selective etching The corrosion potential of the outer layer conductor wiring pattern has a higher etchant temperature than the corrosion potential of the conductor wiring seed layer, and is lower than the corrosion potential of the outer layer conductor wiring pattern and higher than the corrosion potential of the conductor wiring seed layer. Applying a potential to the outer layer conductor wiring pattern portion, etching the conductor wiring seed layer portion that is exposed from the outer layer conductor wiring pattern, and etching of the conductor wiring seed layer is performed immediately below the outer layer conductor wiring pattern. At the time of completion, an unnecessary potential lower than the corrosion potential of the outer layer conductor wiring pattern and the conductor wiring seed layer is applied, and the unnecessary conductor wiring seed layer portion remaining in the irregularities on the surface of the insulating resin outside the outer layer conductor wiring pattern For manufacturing a build-up printed wiring board characterized by etching out

本発明によれば、フラッシュエッチング時の導体配線幅の細りを最小限にし、且つ、絶縁樹脂層との高い密着強度を有し不良を発生しない安価で信頼性の高いビルドアッププリント配線基板及びその製造方法を提供することができる。   According to the present invention, an inexpensive and highly reliable build-up printed wiring board that minimizes thinning of the conductor wiring width during flash etching, has high adhesion strength with the insulating resin layer, and does not cause defects, and its A manufacturing method can be provided.

以下、本発明の実施の形態を、図面を参照しつつ、説明する。なお、実施の形態において同一構成要素には同一符号を付け、実施の形態の間において重複する説明は省略する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the embodiments, the same constituent elements are denoted by the same reference numerals, and redundant description among the embodiments is omitted.

本発明の目的は、フラッシュエッチング時の外層導体配線パターン7(電解銅めっき)部分のエッチングを最小限に抑え、導体配線シード層5の化学銅めっきを導体配線パターン8の配線ピッチなどによらず、均一にフラッシュエッチングすることである。   The object of the present invention is to minimize the etching of the outer layer conductor wiring pattern 7 (electrolytic copper plating) portion during flash etching, and to perform chemical copper plating of the conductor wiring seed layer 5 regardless of the wiring pitch of the conductor wiring pattern 8 or the like. , Uniformly flash-etching.

図1(A)〜(D)及び図2(A)〜(C)に示すように、本発明の実施の形態に係るビルドアッププリント配線基板の製造方法である。まず始めに、図1(A)に示すように、コア層1と、コア層1の両面に形成された内層導体配線パターン2と、内層導体配線パターン2上に絶縁樹脂層3を形成する。   As shown in FIGS. 1A to 1D and FIGS. 2A to 2C, it is a method for manufacturing a build-up printed wiring board according to an embodiment of the present invention. First, as shown in FIG. 1A, the core layer 1, the inner layer conductor wiring pattern 2 formed on both surfaces of the core layer 1, and the insulating resin layer 3 are formed on the inner layer conductor wiring pattern 2.

コア層1及び絶縁樹脂層3に用いられる樹脂としては、例えば、エポキシ樹脂系、フェノール樹脂系、ポリイミド樹脂系、不飽和ポリエステル樹脂系、ポリフェニレンエーテル樹脂系等の単独、変性物、混合物や、これらの樹脂に、シリカ、ガラス繊維等の充填材を含有させたものが挙げられるが本発明ではこれらに限定されるものではない。   Examples of the resin used for the core layer 1 and the insulating resin layer 3 include, for example, epoxy resins, phenol resins, polyimide resins, unsaturated polyester resins, polyphenylene ether resins alone, modified products, mixtures, and the like These resins include those containing fillers such as silica and glass fibers, but the present invention is not limited to these.

本発明の実施の形態に係る絶縁樹脂層3の材料としては、ペースト状のインキや、ドライフィルム化したものが使用できるが本発明ではこれらに限定されるものではない。絶縁樹脂層3のコートは、内層導体配線パターン2が形成された銅配線パターン層上に、ペースト状のインキで供給される絶縁樹脂層3をスクリーン印刷やディップコート、スピンコートなどのコーティング方式にコートし、プレベークを行うことができる。またドライフィルムは真空ラミネーターを用い、銅配線パターン層に気泡が巻き込まないよう貼り合わせることができる。ここで、180℃で30分間ベークし、絶縁樹脂層3を熱硬化させる。銅配線パターン層とは、内層導体配線パターン2のことである。   As the material of the insulating resin layer 3 according to the embodiment of the present invention, paste-like ink or dry film can be used, but the present invention is not limited to these. The insulating resin layer 3 is coated on the copper wiring pattern layer on which the inner conductor wiring pattern 2 is formed by applying the insulating resin layer 3 supplied with paste-like ink to a coating method such as screen printing, dip coating, or spin coating. It can be coated and pre-baked. Moreover, a dry film can be bonded together using a vacuum laminator so that bubbles are not caught in the copper wiring pattern layer. Here, the insulating resin layer 3 is thermally cured by baking at 180 ° C. for 30 minutes. The copper wiring pattern layer is the inner conductor wiring pattern 2.

次に、図1(B)に示すように、絶縁樹脂層3に接続用のビアホール4を形成する。またここでは図示しないが、このコア層1と絶縁樹脂層3とをドリルで貫通するスルーホールを形成しても良い。   Next, as shown in FIG. 1B, a via hole 4 for connection is formed in the insulating resin layer 3. Although not shown here, a through hole that penetrates the core layer 1 and the insulating resin layer 3 with a drill may be formed.

次に、ビアホール4形成時に生成したスミアを、加温したアルカリ水溶液に浸漬して除去する(デスミア処理)。次にセミアディティブ工法にて、外層導体配線パターン7と先に形成した内層導体配線パターン2との接続ビアを銅めっきで形成する。絶縁樹脂層3表面には極性が無く、水溶性の銅めっき処理液の漏れ性が悪いが、デスミア処理にてある程度漏れ性の向上が見られるが、表面を粗らす効果は低く、絶縁樹脂層3の表面の算術平均粗度Raは0.5μm以下が維持される。   Next, the smear generated at the time of forming the via hole 4 is removed by immersion in a heated alkaline aqueous solution (desmear treatment). Next, a connection via between the outer layer conductor wiring pattern 7 and the previously formed inner layer conductor wiring pattern 2 is formed by copper plating by a semi-additive method. There is no polarity on the surface of the insulating resin layer 3 and the leakage of the water-soluble copper plating solution is poor, but the leakage is improved to some extent by desmear treatment, but the effect of roughening the surface is low, and the insulating resin The arithmetic average roughness Ra of the surface of the layer 3 is maintained at 0.5 μm or less.

次に、図1(C)に示すように、化学銅めっきの前処理(触媒形成)を行ったのち、絶縁樹脂層3表面に最大でも厚み1μmの導体配線シード層5を化学銅めっきにより形成することができる。化学銅めっきは析出レートが遅く工業的な量産性が悪いのがデメリットである。このため、無電解めっき厚はなるべく厚く形成したいが、量産工程では面内膜厚ばらつきが生じるため、本発明の実施の形態においては、0.5μm〜1.0μmの導体配線シード層5を形成する。   Next, as shown in FIG. 1C, after conducting chemical copper plating pretreatment (catalyst formation), a conductor wiring seed layer 5 having a thickness of 1 μm at the maximum is formed on the surface of the insulating resin layer 3 by chemical copper plating. can do. The disadvantage of chemical copper plating is its slow deposition rate and poor industrial mass productivity. For this reason, the electroless plating thickness is desired to be as thick as possible, but in-plane film thickness variation occurs in the mass production process. Therefore, in the embodiment of the present invention, the conductor wiring seed layer 5 of 0.5 μm to 1.0 μm is formed. To do.

次に、図1(D)に示すように、導体配線シード層5上に所望の形状を有する外層導体配線パターン7のめっきレジスト6を形成する。   Next, as shown in FIG. 1D, a plating resist 6 of an outer layer conductor wiring pattern 7 having a desired shape is formed on the conductor wiring seed layer 5.

次に、図2(A)に示すように、電解銅めっきにより、所望の形状を有する膜厚まで銅めっきを行い、外層導体配線パターン7を形成する。   Next, as shown in FIG. 2A, copper plating is performed to a film thickness having a desired shape by electrolytic copper plating to form an outer layer conductor wiring pattern 7.

次に、図2(B)に示すように、外層導体配線パターン7のめっきレジスト6を剥離する。   Next, as shown in FIG. 2B, the plating resist 6 of the outer conductor wiring pattern 7 is peeled off.

次に、事前に化学銅めっきと電解銅めっきとの腐蝕電位が揃ったフラッシュエッチング液温、フラッシュエッチング液成分条件にて、図2(C)に示すように、フラッシュエッチングを行い、所望の形状を有する外層導体配線パターン7を形成する。ここで、化学銅めっきのことを導体配線シード層5という場合があり、電解銅めっきのことを外層導体配線パターン7という場合がある。   Next, as shown in FIG. 2 (C), flash etching is performed at a flash etching solution temperature and a flash etching solution component condition in which the corrosion potentials of chemical copper plating and electrolytic copper plating are aligned, and a desired shape is obtained. An outer layer conductor wiring pattern 7 having the following is formed. Here, the chemical copper plating may be referred to as a conductor wiring seed layer 5, and the electrolytic copper plating may be referred to as an outer layer conductor wiring pattern 7.

最後に、180℃60分間ポストベークして、絶縁樹脂層3を硬化させる。   Finally, the insulating resin layer 3 is cured by post-baking at 180 ° C. for 60 minutes.

図3に示すように、フラッシュエッチング時の処理温度で、化学銅めっきと電解銅めっきとのそれぞれの腐蝕電位をこのように化学銅めっきと電解銅めっきとの腐蝕電位が、処理温度によって逆転することがある。この処理温度を利用することにより選択的に化学銅めっきと電解銅めっきとをエッチングでき、銅残渣が発生せず、微細配線パターンを選択的に作製することができる。   As shown in FIG. 3, the corrosion potentials of the chemical copper plating and the electrolytic copper plating are reversed depending on the processing temperature at the processing temperature at the time of the flash etching. Sometimes. By utilizing this processing temperature, chemical copper plating and electrolytic copper plating can be selectively etched, and a copper residue is not generated, and a fine wiring pattern can be selectively produced.

比較的低温領域では化学銅めっきよりも電解銅めっきの腐蝕電位が高く、貴であるため、化学銅めっきの腐蝕電位より高く、かつ電解銅めっきの腐蝕電位より低い電位を電解銅めっき部分に電位を印加することにより、電解銅めっきのエッチングを防ぎ、化学銅めっきを選択的にエッチングさせることができる。   Since the corrosion potential of electrolytic copper plating is higher and noble than chemical copper plating in a relatively low temperature region, a potential higher than the corrosion potential of chemical copper plating and lower than the corrosion potential of electrolytic copper plating is applied to the electrolytic copper plating portion. By applying, etching of electrolytic copper plating can be prevented and chemical copper plating can be selectively etched.

絶縁樹脂層3と導体配線シード層5との密着強度向上のため、絶縁樹脂層3に強アルカリ性に調液した過マンガン酸塩溶液等による膨潤粗化処理が行われ、化学銅めっきは凹凸の絶縁樹脂層3の表面を埋めるような形状である。このため、化学銅めっきをフラッシュエッチングしていくと、絶縁樹脂層3表面の凹凸の穴の中に化学銅めっきが飛び石状に独立して存在する。   In order to improve the adhesion strength between the insulating resin layer 3 and the conductor wiring seed layer 5, the insulating resin layer 3 is subjected to swelling roughening treatment with a permanganate solution or the like prepared in a strong alkalinity. The shape is such that the surface of the insulating resin layer 3 is filled. For this reason, when the chemical copper plating is flash-etched, the chemical copper plating independently exists in a stepping stone shape in the uneven holes on the surface of the insulating resin layer 3.

化学銅めっきのエッチングが電解銅めっきパターン直下まで終了した時点で、電解銅めっき及び化学銅めっきの腐蝕電位より低い電位を印加することにより、導体配線パターン8の電解銅めっきとその直下の化学銅めっきのエッチングを防ぎ、導体配線パターン8外の絶縁樹脂3表面の凹凸の穴の中に残った飛び石状の化学銅めっきは継続してエッチングさせる。   When the etching of the chemical copper plating is completed up to just below the electrolytic copper plating pattern, by applying a potential lower than the corrosion potential of the electrolytic copper plating and the chemical copper plating, the electrolytic copper plating of the conductor wiring pattern 8 and the chemical copper immediately below it are applied. Etching of the plating is prevented, and the stepping stone-like chemical copper plating remaining in the uneven holes on the surface of the insulating resin 3 outside the conductor wiring pattern 8 is continuously etched.

このように導体配線パターン8外の化学銅めっきをエッチアウトすることにより、飛び石状の化学銅めっきの残渣によるショートや、微細配線パターン間でイオンマイグレーションが発生しないようにすることができる。   By etching out the chemical copper plating outside the conductor wiring pattern 8 in this way, it is possible to prevent a short circuit due to a stepping stone-like chemical copper plating residue and ion migration between the fine wiring patterns.

以下、本発明を実施例により具体的に説明するが本発明ではこの説明に限定されるものではない。 EXAMPLES Hereinafter, the present invention will be specifically described with reference to examples, but the present invention is not limited to this description.

図1(A)に示すように、コア層1には、両面に内層導体配線パターン2を設けたガラス−エポキシ絶縁樹脂性基板として、日立化成工業株式会社製、商品名「MCL−E−679F」を用いた。コア層1の両面に絶縁樹脂層3として、太陽インキ製造社製、商品名「HBI−200B」をロールコータにて塗布し、180℃、30分間ベークを行い、絶縁樹脂層3を形成した。このときコーティングした絶縁樹脂層3の膜厚は約50μmであった。   As shown in FIG. 1 (A), the core layer 1 has a product name “MCL-E-679F” manufactured by Hitachi Chemical Co., Ltd. as a glass-epoxy insulating resin substrate having inner-layer conductor wiring patterns 2 provided on both sides. Was used. The product name “HBI-200B” manufactured by Taiyo Ink Manufacturing Co., Ltd. was applied on both surfaces of the core layer 1 with a roll coater and baked at 180 ° C. for 30 minutes to form the insulating resin layer 3. At this time, the thickness of the coated insulating resin layer 3 was about 50 μm.

次に、図1(B)に示すように、形成した絶縁樹脂層3に所定のビアパターンのアライメントを合わせて、COレーザでΦ90μmのレーザビアホール4を形成した。更に、60℃の5%水酸化ナトリウム溶液で5分浸漬し、デスミア処理を行った。ここで、絶縁樹脂層3の算術平均粗さRaは0.2μmであった。 Next, as shown in FIG. 1B, a laser via hole 4 having a diameter of 90 μm was formed with a CO 2 laser by aligning a predetermined via pattern with the formed insulating resin layer 3. Further, it was immersed in a 5% sodium hydroxide solution at 60 ° C. for 5 minutes to perform desmear treatment. Here, the arithmetic average roughness Ra of the insulating resin layer 3 was 0.2 μm.

次に、250g/Lのプリディップ液として、日立化成工業株式会社製、商品名「PD−301」に浸漬し、増感剤として、日立化成工業株式会社製、商品名「HS−202B」に浸漬処理を行った。   Next, as a 250 g / L pre-dip solution, it is immersed in a product name “PD-301” manufactured by Hitachi Chemical Co., Ltd., and a product name “HS-202B” manufactured by Hitachi Chemical Co., Ltd. is used as a sensitizer. Immersion treatment was performed.

次に、図1(C)に示すように、導体配線シード層5は、日立化成工業株式会社製、商品名「CUST−201」を用いて、20分間化学銅めっきを行い形成した。   Next, as shown in FIG.1 (C), the conductor wiring seed layer 5 was formed by carrying out chemical copper plating for 20 minutes using the product name "CUST-201" by Hitachi Chemical.

ここで、図1(D)に示すように、導体配線シード層5上に、厚さ25μmの感光性ドライフィルムレジスト、日立化成工業株式会社製、商品名「RY−3325SG」を貼り合わせ、所望する外層導体配線パターン7のフォトマスクを載置して、100mJ/cmで露光、30℃の0.8%炭酸ナトリウム溶液で現像処理し、所望する外層導体配線パターン7のめっきレジスト6を形成した。 Here, as shown in FIG. 1 (D), a photosensitive dry film resist having a thickness of 25 μm, a product name “RY-3325SG” manufactured by Hitachi Chemical Co., Ltd. is bonded onto the conductor wiring seed layer 5 and desired. A photomask for the outer layer conductor wiring pattern 7 to be mounted is placed, exposed at 100 mJ / cm 2 and developed with a 0.8% sodium carbonate solution at 30 ° C. to form a plating resist 6 of the desired outer layer conductor wiring pattern 7 did.

次に、図2(A)に示すように、めっきレジスト6の非形成部分に以下の条件で電解銅めっきを施し、厚さ20μmの電解銅である外層導体配線パターン7を形成した。
〔電解めっき水溶液〕
硫酸 180g/L
硫酸銅 80g/L
添加剤(カパラシドGL、アトテックジャパン製) 1mL/L
〔電解めっき水溶液〕
電流密度 1A/dm
時間 40分
温度 室温
Next, as shown in FIG. 2A, electrolytic copper plating was performed on the non-formed portion of the plating resist 6 under the following conditions to form an outer layer conductor wiring pattern 7 that was 20 μm thick electrolytic copper.
(Electrolytic plating aqueous solution)
Sulfuric acid 180g / L
Copper sulfate 80g / L
Additive (Kaparaside GL, manufactured by Atotech Japan) 1mL / L
(Electrolytic plating aqueous solution)
Current density 1A / dm 2
Time 40 minutes Temperature Room temperature

さらに、図2(B)に示すように、60℃、5%NaOH水溶液に浸漬し、めっきレジスト6を剥離除去した。   Further, as shown in FIG. 2B, the plating resist 6 was peeled and removed by dipping in a 5% NaOH aqueous solution at 60 ° C.

図2(C)に示すように、剥離しためっきレジスト6下から露出した導体配線シード層5をエッチングアウトするため、エッチング液温を26.0℃に設定し、外層導体配線パターン7表面に腐蝕電位を120mV印加し、硫酸一過酸化水素系のフラッシュエッチング液でエッチングした。   As shown in FIG. 2C, the etching solution temperature is set at 26.0 ° C. to etch out the conductor wiring seed layer 5 exposed from under the peeled plating resist 6, and the surface of the outer layer wiring pattern 7 is corroded. An electric potential of 120 mV was applied, and etching was performed with a sulfuric acid monohydrogen peroxide-based flash etching solution.

外層導体配線パターン7まで導体配線シード層5がエッチングした時点で、腐蝕電位を100mVに印加し、凸凹な表面な穴に埋設した導体配線シード層5をエッチングアウトした。ここで、導体配線シード層5と外層導体配線パターン7とからなる二層構造の配線パターン8を形成した。   When the conductor wiring seed layer 5 was etched up to the outer layer conductor wiring pattern 7, a corrosion potential was applied to 100 mV, and the conductor wiring seed layer 5 embedded in the uneven surface hole was etched out. Here, a wiring pattern 8 having a two-layer structure composed of the conductor wiring seed layer 5 and the outer layer conductor wiring pattern 7 was formed.

このようにして得られた導体幅20μmの導体配線には、アンダーカットが観察されず、その強度を測定したところ、12.36mNであった。これを1cm幅に換算すると6.18N/cmであり、充分な強度を示した。   Undercuts were not observed in the conductor wiring having a conductor width of 20 μm thus obtained, and its strength was measured to be 12.36 mN. When this was converted into 1 cm width, it was 6.18 N / cm, indicating a sufficient strength.

比較例Comparative example

実施例と同様に、図1(A)に示すように、コア層1には、両面に内層導体配線パターン2を設けたガラス−エポキシ絶縁樹脂性基板として、日立化成工業株式会社製、商品名「MCL−E−679F」を用いた。コア層1の両面に絶縁樹脂層3として、太陽インキ製造社製、商品名「HBI−200B」をロールコータにて塗布し、180℃、60分間ベークを行い、絶縁樹脂層3を形成した。このときコーティングした絶縁樹脂層3の膜厚は約50μmであった。   As in the example, as shown in FIG. 1 (A), the core layer 1 is a glass-epoxy insulating resin substrate provided with inner-layer conductor wiring patterns 2 on both sides. “MCL-E-679F” was used. The product name “HBI-200B” manufactured by Taiyo Ink Manufacturing Co., Ltd. was applied on both surfaces of the core layer 1 with a roll coater and baked at 180 ° C. for 60 minutes to form the insulating resin layer 3. At this time, the thickness of the coated insulating resin layer 3 was about 50 μm.

次に、図1(B)に示すように、形成した絶縁樹脂層3に所定のビアパターンのアライメントを合わせて、COレーザでΦ90μmのレーザビアホール4を形成した。更に、60℃の5%水酸化ナトリウム溶液で5分浸漬し、デスミア処理を行った。ここで、絶縁樹脂層3の算術平均粗さRaは0.2μmであった。 Next, as shown in FIG. 1B, a laser via hole 4 having a diameter of 90 μm was formed with a CO 2 laser by aligning a predetermined via pattern with the formed insulating resin layer 3. Further, it was immersed in a 5% sodium hydroxide solution at 60 ° C. for 5 minutes to perform desmear treatment. Here, the arithmetic average roughness Ra of the insulating resin layer 3 was 0.2 μm.

次に、250g/Lのプリディップ液として、日立化成工業株式会社製、商品名「PD−301」に浸漬し、増感剤として、日立化成工業株式会社製、商品名「HS−202B」に浸漬処理を行った。   Next, as a 250 g / L pre-dip solution, it is immersed in a product name “PD-301” manufactured by Hitachi Chemical Co., Ltd., and a product name “HS-202B” manufactured by Hitachi Chemical Co., Ltd. is used as a sensitizer. Immersion treatment was performed.

次に、図1(C)に示すように、導体配線シード層5は、日立化成工業株式会社製、商品名「CUST−201」を用いて、20分間化学銅めっきを行い形成した。   Next, as shown in FIG.1 (C), the conductor wiring seed layer 5 was formed by carrying out chemical copper plating for 20 minutes using the product name "CUST-201" by Hitachi Chemical.

ここで、図1(D)に示すように、導体配線シード層5上に、厚さ25μmの感光性ドライフィルムレジスト、日立化成工業株式会社製、商品名「RY−3325SG」を貼り合わせ、所望する外層導体配線パターン7のフォトマスクを載置して、100mJ/cmで露光、30℃の0.8%炭酸ナトリウム溶液で現像処理し、所望する外層導体配線パターン7のめっきレジスト6を形成した。 Here, as shown in FIG. 1 (D), a photosensitive dry film resist having a thickness of 25 μm, a product name “RY-3325SG” manufactured by Hitachi Chemical Co., Ltd. is bonded onto the conductor wiring seed layer 5 and desired. A photomask for the outer layer conductor wiring pattern 7 to be mounted is placed, exposed at 100 mJ / cm 2 and developed with a 0.8% sodium carbonate solution at 30 ° C. to form a plating resist 6 of the desired outer layer conductor wiring pattern 7 did.

次に、図2(A)に示すように、めっきレジスト6の非形成部分に以下の条件で電解銅めっきを施し、厚さ20μmの電解銅である外層導体配線パターン7を形成した。
〔電解めっき水溶液〕
硫酸 180g/L
硫酸銅 80g/L
添加剤(カパラシドGL、アトテックジャパン製) 1mL/L
〔電解めっき水溶液〕
電流密度 1A/dm
時間 40分
温度 室温
Next, as shown in FIG. 2A, electrolytic copper plating was performed on the non-formed portion of the plating resist 6 under the following conditions to form an outer layer conductor wiring pattern 7 that was 20 μm thick electrolytic copper.
(Electrolytic plating aqueous solution)
Sulfuric acid 180g / L
Copper sulfate 80g / L
Additive (Kaparaside GL, manufactured by Atotech Japan) 1mL / L
(Electrolytic plating aqueous solution)
Current density 1A / dm 2
Time 40 minutes Temperature Room temperature

さらに、図2(B)に示すように、60℃、5%NaOH水溶液に浸漬し、めっきレジスト6を剥離除去した。   Further, as shown in FIG. 2B, the plating resist 6 was peeled and removed by dipping in a 5% NaOH aqueous solution at 60 ° C.

図2(C)に示すように、剥離しためっきレジスト6下から露出した導体配線シード層5をエッチングアウトするため、エッチング液温を35.0℃に設定し、外層導体配線パターン7表面に腐蝕電位を120mV印加し、硫酸一過酸化水素系のフラッシュエッチング液でエッチングした。   As shown in FIG. 2C, in order to etch out the conductor wiring seed layer 5 exposed from under the peeled plating resist 6, the etching solution temperature is set to 35.0 ° C. and the surface of the outer layer wiring pattern 7 is corroded. An electric potential of 120 mV was applied, and etching was performed with a sulfuric acid monohydrogen peroxide-based flash etching solution.

外層導体配線パターン7まで導体配線シード層5がエッチングした時点で、腐蝕電位を100mVに印加し、凸凹な表面な穴に埋設した導体配線シード層5をエッチングアウトした。ここで、導体配線シード層5と外層導体配線パターン7とからなる二層構造の配線パターン8を形成した。   When the conductor wiring seed layer 5 was etched up to the outer layer conductor wiring pattern 7, a corrosion potential was applied to 100 mV, and the conductor wiring seed layer 5 embedded in the uneven surface hole was etched out. Here, a wiring pattern 8 having a two-layer structure composed of the conductor wiring seed layer 5 and the outer layer conductor wiring pattern 7 was formed.

このようにして得られた導体幅20μmの導体配線には、アンダーカットが観察されず、その強度を測定したところ、4.86mNと簡単に剥離された。これを1cm幅に換算すると2.43N/cmであり、ほとんど強度が見られなかった。   Undercuts were not observed in the conductor wiring having a conductor width of 20 μm obtained in this way, and when the strength was measured, it was easily peeled off to 4.86 mN. When this was converted into 1 cm width, it was 2.43 N / cm and almost no strength was observed.

(A)〜(D)は本発明のビルドアッププリント配線基板の製造方法の工程の一部を示す模式構成断面図である。(A)-(D) are schematic structure sectional drawings which show a part of process of the manufacturing method of the buildup printed wiring board of this invention. (A)〜(C)は本発明のビルドアッププリント配線基板の製造方法の工程の一部を示す模式構成断面図である。(A)-(C) are schematic structure sectional drawings which show a part of process of the manufacturing method of the buildup printed wiring board of this invention. フラッシュエッチング時の処理温度で、導体配線シード層と外層導体配線パターンとのそれぞれの腐蝕電位を示す図である。It is a figure which shows each corrosion potential of a conductor wiring seed layer and an outer layer conductor wiring pattern at the process temperature at the time of flash etching.

符号の説明Explanation of symbols

1 コア層
2 内層導体配線パターン
3 絶縁樹脂層
4 ビアホール
5 導体配線シード層(化学銅めっき)
6 めっきレジスト
7 外層導体配線パターン(電解銅めっき)
8 配線パターン
1 Core layer 2 Inner layer conductor wiring pattern 3 Insulating resin layer 4 Via hole 5 Conductor wiring seed layer (chemical copper plating)
6 Plating resist 7 Outer layer conductor wiring pattern (Electrolytic copper plating)
8 Wiring pattern

Claims (1)

コア層の両面に所望の形状を有した内層導体配線パターンを設けた基板を準備し、
前記基板上の両面に所望の形状を有した絶縁樹脂層を形成し、
前記絶縁樹脂層に膨潤粗化処理を行い、前記絶縁樹脂層に凹凸を形成して、前記絶縁樹脂層の凹凸の表面を埋めるように、前記絶縁樹脂層上の両面に導体配線シード層を形成し、
前記導体配線シード層上の両面に所望の形状を有するめっきレジストを形成し、
所望の形状を有する前記めっきレジストの非形成部分に外層導体配線パターンを形成し
ッチング液の温度における前記導体配線シード層と前記外層導体配線パターンとの腐蝕電位をそれぞれ別途測定しておき、前記導体配線シード層と前記外層導体配線パターンとを所望の形状に形成するために、選択的にエッチングを行う際、前記外層導体配線パターンの腐蝕電位が前記導体配線シード層の腐蝕電位より高いエッチング液の温度を有し、かつ前記外層導体配線パターンの腐蝕電位より低く、前記導体配線シード層の腐蝕電位より高い電位を前記外層導体配線パターン部分に電位を印加し、前記外層導体配線パターンから露出して形成される前記導体配線シード層部分をエッチングし、
前記導体配線シード層のエッチングが前記外層導体配線パターン直下まで終了した時点で、前記外層導体配線パターン及び前記導体配線シード層の腐蝕電位より低い電位を印加し、前記外層導体配線パターン外の絶縁樹脂表面の凹凸中に残った不要な前記導体配線シード層部分をエッチングアウトすることを特徴とするビルドアッププリント配線基板の製造方法。
Prepare a substrate provided with an inner layer conductor wiring pattern having a desired shape on both sides of the core layer,
Forming an insulating resin layer having a desired shape on both surfaces of the substrate;
Conducting swelling roughening treatment on the insulating resin layer, forming irregularities on the insulating resin layer, and forming a conductor wiring seed layer on both sides of the insulating resin layer so as to fill the irregular surface of the insulating resin layer And
Forming a plating resist having a desired shape on both sides of the conductor wiring seed layer;
Forming an outer layer conductor wiring pattern in a non-formation portion of the plating resist having a desired shape ;
The corrosion potential of the conductor wiring seed layer at a temperature of d etching liquid and said outer conductor wiring patterns respectively measured separately advance, and said outer conductor wiring pattern and the conductive wiring seed layer to form a desired shape When the etching is selectively performed, the corrosion potential of the outer layer conductor wiring pattern has a higher etchant temperature than the corrosion potential of the conductor wiring seed layer, and is lower than the corrosion potential of the outer layer conductor wiring pattern. Applying a potential higher than the corrosion potential of the wiring seed layer to the outer layer conductor wiring pattern portion, etching the conductor wiring seed layer portion formed exposed from the outer layer conductor wiring pattern,
When the etching of the conductor wiring seed layer is completed immediately below the outer layer conductor wiring pattern, a potential lower than the corrosion potential of the outer layer conductor wiring pattern and the conductor wiring seed layer is applied, and an insulating resin outside the outer layer conductor wiring pattern A method for manufacturing a build-up printed wiring board, comprising etching out unnecessary conductive wiring seed layer portions remaining in the surface irregularities .
JP2007212691A 2007-08-17 2007-08-17 Manufacturing method of build-up printed wiring board Expired - Fee Related JP5050725B2 (en)

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JP2001036217A (en) * 1999-07-21 2001-02-09 Ngk Spark Plug Co Ltd Wiring board manufacturing method and etching apparatus
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