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JP5067934B2 - Switching circuit - Google Patents
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JP5067934B2 - Switching circuit - Google Patents

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JP5067934B2
JP5067934B2 JP2007222885A JP2007222885A JP5067934B2 JP 5067934 B2 JP5067934 B2 JP 5067934B2 JP 2007222885 A JP2007222885 A JP 2007222885A JP 2007222885 A JP2007222885 A JP 2007222885A JP 5067934 B2 JP5067934 B2 JP 5067934B2
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integrated circuit
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JP2009055563A (en
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和彦 中村
明 福島
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Kokusai Denki Electric Inc
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Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Description

本発明は、スイッチング回路の金属酸化膜形電界効果トランジスタ(以下MOSFETと略す)の制御電極(以下ゲートと略す)駆動回路の改良に関するものである。   The present invention relates to an improvement in a control electrode (hereinafter abbreviated as a gate) drive circuit of a metal oxide field effect transistor (hereinafter abbreviated as a MOSFET) of a switching circuit.

電荷転送型(Cherge Cuopled Device以下CCDと略す)撮像素子の水平転送電極駆動回路も、振幅5V以下であれば、CCD撮像素子の駆動用論理集積回路が使用でき、振幅6V以下であれば、汎用CMOS論理集積回路が使用できる。(非特許文献1参照)
しかし、電子増倍型CCD撮像素子(Electron Multiplying-CCD以下EM−CCDと略す)は、電子冷却と組み合わせて感度を高くできるが、EM−CCDの電子増倍を行う水平転送電極(Charge Multiplication Gate以下CMGと略す)は、TI製の33万画素で、容量負荷約25pFで12.5MHzで電圧振幅が18 Vp-pから24Vp-pと大きくかつ可変な上に、CMG電圧振幅が高い高電子増倍時は、0.1Vで1.4倍感度が変化し、11℃で1.8倍感度が変化するので、駆動波形の振幅確保と高安定性と発熱の低減が求められる。e2V製では、CMG電圧振幅が35Vp-pから45Vp-pとさらに大きい。したがって、CCD撮像素子の他の電極駆動の様に耐圧18V程度の汎用ICを利用することが困難である。そこで、EM−CCDの電子増倍を行う水平転送電極に、電源電圧可変の相補のエンハンスメント型MOSFETのドレインでパルス波形を供給し、MOSFETのゲートを容量結合したCMOS論理集積回路で駆動することが一般的である。(非特許文献2と非特許文献3参照)
また、バッテリ入力のスイッッチング電源や非増倍の水平転送電極Hφ駆動用に、導通時間と非導通時間がほぼ等しくする従来の相補のMOSFET駆動回路の構成を示すブロック図の図15のような各種の回路も実用化されている(特許文献1参照)。図15に従来の相補のMOSFET駆動回路の動作の入出力電圧をしめす模式図、図16に従来の相補のMOSFET駆動回路の入出力電圧動作をしめす模式図、図17に従来の相補のMOSFET駆動回路の動作の入出力波形をしめす模式図を示す。
If the horizontal transfer electrode drive circuit of the charge transfer type (Cherge Cuopled Device, hereinafter abbreviated as “CCD”) image sensor also has an amplitude of 5V or less, a logic integrated circuit for driving the CCD image sensor can be used. A CMOS logic integrated circuit can be used. (See Non-Patent Document 1)
However, an electron multiplying CCD image pickup device (hereinafter referred to as EM-CCD) can increase sensitivity in combination with electronic cooling, but a horizontal transfer electrode (Charge Multiplication Gate) that performs electron multiplication of EM-CCD. (Hereinafter abbreviated as CMG) is TI's 330,000 pixels, with a capacitive load of about 25 pF, 12.5 MHz, voltage amplitude is large and variable from 18 Vp-p to 24 Vp-p, and high electron gain with high CMG voltage amplitude At the time of doubling, the sensitivity changes by 1.4 times at 0.1 V, and the sensitivity changes by 1.8 times at 11 ° C. Therefore, it is required to ensure the amplitude of the drive waveform, to have high stability, and to reduce heat generation. In the e2V product, the CMG voltage amplitude is larger from 35 Vp-p to 45 Vp-p. Therefore, it is difficult to use a general-purpose IC having a withstand voltage of about 18 V like other electrode driving of a CCD image pickup device. Therefore, a pulse waveform is supplied to the horizontal transfer electrode for electron multiplication of the EM-CCD by the drain of a complementary enhancement type MOSFET with variable power supply voltage, and the gate of the MOSFET can be driven by a CMOS logic integrated circuit. It is common. (See Non-Patent Document 2 and Non-Patent Document 3)
Further, as shown in FIG. 15 of the block diagram showing the configuration of a conventional complementary MOSFET drive circuit in which the conduction time and the non-conduction time are substantially equal for the battery-powered switching power source and the non-multiplier horizontal transfer electrode Hφ drive. This circuit has also been put into practical use (see Patent Document 1). FIG. 15 is a schematic diagram showing the input / output voltage of the conventional complementary MOSFET drive circuit, FIG. 16 is a schematic diagram showing the input / output voltage operation of the conventional complementary MOSFET drive circuit, and FIG. 17 is a conventional complementary MOSFET drive. The schematic diagram which shows the input / output waveform of the operation | movement of a circuit is shown.

図15と図17において、MOSFETのゲートを駆動するIC10の出力電圧Vout10が0Vになる際は、ダイオードD5が導通し抵抗3で駆動されてPch−MOSFETのQ1のゲート電圧は比較的長い時間でスレッショルド電圧を越えてPch−MOSFETのQ1はターンオンする。MOSFETのゲートを駆動するIC10の出力電圧Vout10が5Vになる際は、ダイオードD6が導通し抵抗4で駆動されてPch−MOSFETのQ1のゲート電圧はスレッショルド電圧までは短い時間で上昇しチャージ電荷が引き抜かれるまで、スレッショルド電圧に止まり、比較的長い時間でPch−MOSFETのQ1はターンオフする。   15 and 17, when the output voltage Vout10 of the IC 10 that drives the gate of the MOSFET becomes 0V, the diode D5 is turned on and driven by the resistor 3, and the gate voltage of the Qch of the Pch-MOSFET is relatively long. When the threshold voltage is exceeded, Q1 of the Pch-MOSFET is turned on. When the output voltage Vout10 of the IC 10 that drives the gate of the MOSFET becomes 5V, the diode D6 becomes conductive and is driven by the resistor 4, and the gate voltage of the Q1 of the Pch-MOSFET rises in a short time until the threshold voltage, and the charge charge is increased. Until it is pulled out, it remains at the threshold voltage, and Q1 of the Pch-MOSFET is turned off in a relatively long time.

同様に、MOSFETのゲートを駆動するIC10の出力電圧Vout10が0Vになる際は、ダイオードD7が導通し抵抗5で駆動されてNch−MOSFETのQ2のゲート電圧はスレッショルド電圧までは短い時間で下降しチャージ電荷が引き抜かれるまで、スレッショルド電圧に止まり比較的長い時間でNch−MOSFETのQ2はターンオフする。MOSFETのゲートを駆動するIC10の出力電圧Vout10が5Vになる際は、ダイオードD8が導通し抵抗6で駆動されてNch−MOSFETのQ2のゲート電圧は比較的長い時間でスレッショルド電圧を越えてNch−MOSFETのQ2はターンオンする。   Similarly, when the output voltage Vout10 of the IC 10 that drives the gate of the MOSFET becomes 0V, the diode D7 becomes conductive and is driven by the resistor 5, and the gate voltage of the Nch-MOSFET Q2 falls to the threshold voltage in a short time. Until the charge charge is extracted, the threshold voltage is maintained and Q2 of the Nch-MOSFET is turned off in a relatively long time. When the output voltage Vout10 of the IC 10 for driving the gate of the MOSFET becomes 5V, the diode D8 is turned on and driven by the resistor 6, so that the gate voltage of the Nch-MOSFET Q2 exceeds the threshold voltage in a relatively long time, and the Nch- MOSFET Q2 is turned on.

その結果、Pch−MOSFETのQ1とNch−MOSFETのQ2とは、導通時間と非導通時間がほぼ等しくなる。   As a result, Q1 of the Pch-MOSFET and Q2 of the Nch-MOSFET have substantially the same conduction time and non-conduction time.

必要な駆動能力は、NchMOSFETターンオン<PchMOSFETターンオン<NchMOSFETターンオフ<PchMOSFETターンオフである。従来技術の図15では、ダイオードD2とD5〜D10とで、駆動能力を非対称としていた。   The required driving capability is NchMOSFET turn-on <PchMOSFET turn-on <NchMOSFET turn-off <PchMOSFET turn-off. In FIG. 15 of the prior art, the driving capability is asymmetric between the diodes D2 and D5 to D10.

MOSFETのゲートソース間容量(以下Cgsと略す)はドレインソース耐圧(以下耐圧と略す)とドレイン電流容量(以下電流容量と略す)との積に比例し、加工の細かさ(デザインルール)にもほぼ比例する。2006年量産の耐圧30VではPchピーク電流容量1.6Aで約40pF、Nchピーク電流容量2.8Aで約30pFである。また、MOSFETの電流をカットオフさせるゲートチャージ電荷(以下Qgと略す)は耐圧と電流容量との積やドレイン電流に比例し、加工の細かさにもほぼ比例する。2006年量産の耐圧30VではQgはPch電流1A当たり約2100pC、Nch電流1A当たり約1400pCであり、Pchは大きな駆動能力が必要である。   The capacitance between the gate and source (hereinafter abbreviated as Cgs) of the MOSFET is proportional to the product of the drain-source breakdown voltage (hereinafter abbreviated as breakdown voltage) and the drain current capacity (hereinafter abbreviated as current capacity). It is almost proportional. With a withstand voltage of 30 V in mass production in 2006, the Pch peak current capacity is 1.6 A, about 40 pF, and the Nch peak current capacity is 2.8 A, about 30 pF. Further, the gate charge charge (hereinafter abbreviated as Qg) for cutting off the current of the MOSFET is proportional to the product of the withstand voltage and the current capacity and the drain current, and is also approximately proportional to the fineness of processing. With a withstand voltage of 30 V in mass production in 2006, Qg is about 2100 pC per 1 A of Pch current and about 1400 pC per 1 A of Nch current, and Pch requires a large driving capability.

ゲート−ソース間遮断(スレショルド)電圧Vgthは加工の細かさにもほぼ比例し、2006年量産の耐圧30Vでは通常0.4〜1.4Vである。導通抵抗がほぼ飽和するゲートソース間(制御)電圧も加工の細かさにもほぼ比例し、2006年量産の耐圧30VではPchは通常4.5Vで、Nchは通常2.5Vであり、やはりPchは大きな駆動能力が必要である。
ソニー製CCD撮像素子ICX422データシートICX422対角11mm(2/3型)EIA白黒用固体撮像素子 TI製TC247SPD EM-CCD撮像素子データシート TC247SPD-B0 680 x 500 PIXEL IMPACTRONTM MONOCHROME CCD IMAGE SENSOR e2V製CCD65 EM-CCD撮像素子データシート A1A-CCD65_Series_Ceramic Issue 7, June 2004 特開2001−298943
The gate-source cut-off (threshold) voltage Vgth is substantially proportional to the fineness of processing, and is usually 0.4 to 1.4 V at a withstand voltage of 30 V in 2006 mass production. The gate-source (control) voltage at which the conduction resistance is almost saturated is also almost proportional to the fineness of processing. In the mass production of 30V in 2006, Pch is usually 4.5V and Nch is usually 2.5V. Requires a large driving capacity.
Sony CCD image sensor ICX422 data sheet ICX422 diagonal 11 mm (2/3 type) solid-state image sensor for EIA black and white TI TC247SPD EM-CCD image sensor data sheet TC247SPD-B0 680 x 500 PIXEL IMPACTRONTM MONOCHROME CCD IMAGE SENSOR e2V CCD65 EM-CCD Image Sensor Data Sheet A1A-CCD65_Series_Ceramic Issue 7, June 2004 JP 2001-298934 A

上記の導通時間と非導通時間がほぼ等しくする従来技術では、従来の相補のMOSFET駆動回路の構成を示すブロック図の図15の出力の抵抗直列ダイオードD5〜D8と直流再生のダイオードD2,D9,D10とで、ゲート駆動振幅がダイオード順方向降下電圧0.6Vの3倍の1.8V減少し3.2Vと、従来の相補のMOSFET駆動回路の動作の入出力波形をしめす模式図の図17の様になる。   In the conventional technique in which the conduction time and the non-conduction time are substantially equal to each other, the resistor series diodes D5 to D8 of the output of FIG. 15 and the DC regeneration diodes D2, D9,. FIG. 17 is a schematic diagram showing the input / output waveform of the operation of the conventional complementary MOSFET drive circuit, with D10, the gate drive amplitude is reduced by 1.8V, which is three times the diode forward drop voltage 0.6V, to 3.2V. It becomes like this.

EM−CCDの電子増倍を行う水平転送CMG電極容量スイッチング回路では、たとえば24Vp-pと振幅が大きく、バッテリ入力のスイッッチング電源や非増倍の水平転送電極Hφ駆動用の低耐圧で導通抵抗がほぼ飽和するゲートソース間(制御)電圧も低いMOSFETは使用できない。CMG駆動のPchMOSFETのオン抵抗が下がるゲート電圧は例えば4.5Vと高い。したがって、無理に上記の導通時間と非導通時間がほぼ等しくする従来技術をCMG駆動に適用すると、ゲート電圧が3.2Vと不足しPchMOSFETのon抵抗が下がらず、CMG電圧Voの対称性と飽和性等の波形特性が劣化し、有効なCMG電圧振幅が低下してEM−CCDの実効感度が低下する。感度を確保するため、VHを高くすると、MOSFETのターンオフが遅くなり、NchMOSFETとPchMOSFETとが同時導通する無効電力が消費される。無効電力による損失が大きい分発熱量が増加し温度が上昇しEM−CCDの感度が低下することが予想される。   The horizontal transfer CMG electrode capacitance switching circuit that performs electron multiplication of EM-CCD has a large amplitude of, for example, 24 Vp-p, and has a low withstand voltage and conductive resistance for driving a battery input switching power supply and non-multiplier horizontal transfer electrode Hφ. A MOSFET having a low gate-source (control) voltage that is almost saturated cannot be used. The gate voltage at which the on-resistance of the PchMOSFET driven by CMG decreases is as high as 4.5V, for example. Therefore, if the conventional technique in which the conduction time and the non-conduction time are forcibly equal is applied to the CMG drive, the gate voltage is insufficient as 3.2 V, the on-resistance of the PchMOSFET does not decrease, and the symmetry and saturation of the CMG voltage Vo The waveform characteristics such as the characteristics deteriorate, the effective CMG voltage amplitude decreases, and the effective sensitivity of the EM-CCD decreases. When VH is increased in order to ensure sensitivity, the turn-off of the MOSFET is delayed, and reactive power for simultaneously conducting NchMOSFET and PchMOSFET is consumed. It is expected that the amount of heat generated increases due to a large loss due to reactive power, the temperature rises, and the sensitivity of the EM-CCD decreases.

つまり、本発明は、EM−CCDの電荷増倍電極を駆動するPchMOSFETのゲート駆動振幅を確保した上で、MOSFETのチャージ電荷量Qgを短時間でを引き抜き、かつQgを引き抜く時間分、ターンオンの位相を遅らし、MOSFETの導通期間を短く非導通期間を短く保ち、上記課題を解決する事を目的とする。   In other words, the present invention secures the gate drive amplitude of the Pch MOSFET that drives the charge multiplying electrode of the EM-CCD, pulls out the charge charge amount Qg of the MOSFET in a short time, and turns it on for the time to pull out Qg. The object is to solve the above problems by delaying the phase, keeping the conduction period of the MOSFET short and keeping the non-conduction period short.

上記の課題を解決するために、本発明は、P型電圧制御半導体素子とN型電圧制御半導体素子を用いた反転スイッチング回路において、上記P型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の電源電圧に対して入力電圧を接地方向にシフトする手段と、N型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の電源電圧に対して入力電圧を相対的に電源電圧方向にシフトする手段との少なくとも一方を有することを特徴とするスイッチング回路である。   In order to solve the above problems, the present invention provides an inverting switching circuit using a P-type voltage control semiconductor element and an N-type voltage control semiconductor element, and unbuffered inversion for driving a control electrode of the P-type voltage control semiconductor element. Means for shifting the input voltage in the ground direction with respect to the power supply voltage of the logic CMOS integrated circuit, and the input voltage relative to the power supply voltage of the unbuffered inversion logic CMOS integrated circuit that drives the control electrode of the N-type voltage control semiconductor element It is a switching circuit characterized by having at least one of means for shifting in the power supply voltage direction.

また、P型電圧制御半導体素子とN型電圧制御半導体素子を用いた反転スイッチング回路において、前記P型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の入力電圧を接地または負電圧に抵抗分圧する手段と、前記N型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の入力電圧を正電圧に抵抗分圧する手段と、前記P型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の電源電圧を前記P型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の入力電圧の最高値より高くする手段との少なくとも一方を有することを特徴とするスイッチング回路。   In an inverting switching circuit using a P-type voltage control semiconductor element and an N-type voltage control semiconductor element, the input voltage of an unbuffered inversion logic CMOS integrated circuit that drives the control electrode of the P-type voltage control semiconductor element is grounded or negative. Means for resistance-dividing the voltage into voltage; means for resistance-dividing the input voltage of the unbuffered inversion logic CMOS integrated circuit that drives the control electrode of the N-type voltage control semiconductor element to positive voltage; and control of the P-type voltage control semiconductor element At least one of means for setting the power supply voltage of the unbuffered inversion logic CMOS integrated circuit for driving the electrode higher than the maximum value of the input voltage of the unbuffered inversion logic CMOS integrated circuit for driving the control electrode of the P-type voltage control semiconductor element; A switching circuit comprising:

さらに、上記において、前記反転スイッチング回路の電源電圧に対して、前記抵抗分圧する電圧の絶対値と、前記抵抗分圧比の逆数と、前記P型電圧制御半導体素子の制御電極を駆動するアンバッファ反転論理CMOS集積回路の電源電圧との少なくとも一方を連動して可変する手段を有することを特徴とするスイッチング回路である。   Further, in the above, with respect to the power supply voltage of the inverting switching circuit, the absolute value of the voltage to be resistance-divided, the reciprocal of the resistance-dividing ratio, and the unbuffered inversion for driving the control electrode of the P-type voltage control semiconductor element A switching circuit comprising means for varying at least one of a power supply voltage of a logic CMOS integrated circuit in conjunction with the logic CMOS integrated circuit.

つまり、本発明は、P型電圧制御半導体素子とN型電圧制御半導体素子を用いた反転スイッチング回路において、上記電圧制御半導体素子のゲートを駆動するアンバッファ反転論理CMOS集積回路の引き込み電流値と吐き出し電流値を個別に設定する事を特徴とするスイッチング回路である。   That is, according to the present invention, in an inverting switching circuit using a P-type voltage control semiconductor element and an N-type voltage control semiconductor element, the drawing current value and discharge of an unbuffered inverting logic CMOS integrated circuit that drives the gate of the voltage control semiconductor element. It is a switching circuit characterized by setting current values individually.

以上説明したように本発明によれば、PchMOSFETのオン抵抗飽和ゲート電圧に近似した比較的高いゲート駆動電圧とターンオフ時の飽和動作の多くの駆動電流とターンオン時の非飽和動作の中程度の駆動電流とが供給され、NchMOSFETのオン抵抗飽和ゲート電圧に近似した比較的低いゲート駆動電圧とターンオフ時の飽和動作の多くの駆動電流とターンオン時の非飽和動作の中程度の駆動電流とが供給され、Qg引き抜きの高速化と合わせて、両chMOSFETのゲート波形はターンオフは早くターンオンは遅くオフ期間は広くオン期間は狭くなる。また、CMOS反転論理集積回路の電源電圧に対し入力電圧をシフトさせて両chMOSFETのゲート波形のオフ期間は広く、オン期間は狭くする。したがって、Qg引抜にかかる時間分広くなってしまった両chMOSFETの導通時間も短くなり、PchMOSFETの導通時間とNchMOSFETの導通時間が重なるために発生する貫通電流が低減し、容量負荷スイッチング波形の振幅が確保され、対称性と飽和性等の波形特性を改善すると共に、電力損失をより低減させる。   As described above, according to the present invention, a relatively high gate drive voltage approximated to the on-resistance saturation gate voltage of the Pch MOSFET, a large amount of drive current for saturation operation at turn-off, and moderate drive at non-saturation operation at turn-on. Current, a relatively low gate drive voltage approximating the on-resistance saturation gate voltage of the Nch MOSFET, a lot of drive current for saturation operation at turn-off, and a moderate drive current at non-saturation operation at turn-on. Along with the speeding up of Qg extraction, the gate waveforms of both channel MOSFETs turn off quickly, turn on slowly, turn off period wide, and turn on period narrow. Further, the input voltage is shifted with respect to the power supply voltage of the CMOS inversion logic integrated circuit, so that the off period of the gate waveforms of both channel MOSFETs is wide and the on period is narrowed. Therefore, the conduction time of both chMOSFETs that have become wider by the time required for Qg extraction is also shortened, the through current generated because the conduction time of the PchMOSFET and the conduction time of the NchMOSFET overlap, and the amplitude of the capacitive load switching waveform is reduced. It is ensured and improves waveform characteristics such as symmetry and saturation, and further reduces power loss.

また、本発明は、MOSFETの引抜チャージ電荷量に比例させてCMOSICのターンオフ駆動能力高めてQgを短時間で引き抜きMOSFETターンオフを早める、またはMOSFETのオン時ゲート電圧をオン抵抗飽和ゲート電圧に近似させ対称性と飽和性等の波形特性を改善る、またはMOSFETのオフ期間を長くオン期間を短くしNchMOSFETとPchMOSFETとが同時導通する無効電力を低減する。   In addition, the present invention increases the turn-off drive capability of the CMOSIC in proportion to the amount of charge extracted from the MOSFET, thereby pulling out the Qg in a short time, or speeding up the MOSFET turn-off, or approximating the on-state gate voltage to the on-resistance saturated gate voltage. Waveform characteristics such as symmetry and saturation are improved, or the OFF period of the MOSFET is lengthened and the ON period is shortened to reduce the reactive power at which the Nch MOSFET and the Pch MOSFET are simultaneously conducted.

さらに、EM−CCDのCMG電極容量を駆動する場合には、MOSFETのターンオフ高速化により貫通電流が少なく、損失分の発熱と温度上昇とが低減し、感度が向上する。また、CMGの波形特性が改善され振幅電圧が確保されるため、実効感度が改善される。   Further, when driving the CMG electrode capacitance of the EM-CCD, the through current is reduced by increasing the turn-off speed of the MOSFET, the heat generation and the temperature rise for the loss are reduced, and the sensitivity is improved. Further, since the CMG waveform characteristics are improved and the amplitude voltage is secured, the effective sensitivity is improved.

本発明を図1から図14を用いて説明する。   The present invention will be described with reference to FIGS.

図1と図11とは、MOSFET駆動回路がゲートとをターンオン時に比較的小電流で駆動しターンオフ時に比較的大電流で駆動する本発明の1実施例と他の1実施例を示したブロック図であり、図2と図12はMOSFET駆動回路の本発明の1実施例と他の1実施例の動作の入出力電圧をしめす模式図であり、図3〜図10、図13、図14はMOSFET駆動回路の本発明の一実施例と他の1実施例の動作の入出力波形をしめす模式図である。   FIGS. 1 and 11 are block diagrams showing one embodiment of the present invention in which a MOSFET driving circuit drives a gate with a relatively small current when turned on and a relatively large current when turned off, and another embodiment. FIGS. 2 and 12 are schematic diagrams showing input / output voltages of the operation of the MOSFET driving circuit according to one embodiment of the present invention and another embodiment, and FIGS. 3 to 10, FIG. 13 and FIG. It is a schematic diagram showing input / output waveforms of the operation of one embodiment of the present invention and another embodiment of the MOSFET drive circuit.

図1〜14において、VAは電源でVgainは可変の電圧源でVrefは基準の電圧源、VccHとVccLと5Vとは論理電源、VHとVLとはスイッチング回路電源であり、IC1とIC2はCMOSアンバッファインバータ論理集積回路(InvIC)、IC5は演算増幅器(Operational Amplifier: Op Amp)、IC6〜IC8は可変電源回路(Adjist Regurator: Adj Reg)であり、Q1はPchMOSFET、Q2はNchMOSFET、D1,D2は直流再生ダイオード、D3は直流再生のショットーキバリアダイオード(以下SBD)である。また、CMGはEM−CCDの電子増倍水平転送電極、CLは負荷容量、C1、C2は交流結合容量であり、R1およびR2はゲート駆動抵抗であり、R3〜R22は分割抵抗である。   1 to 14, VA is a power source, Vgain is a variable voltage source, Vref is a reference voltage source, VccH, VccL and 5V are logic power sources, VH and VL are switching circuit power sources, and IC1 and IC2 are CMOS. An unbuffered inverter logic integrated circuit (InvIC), IC5 is an operational amplifier (Operational Amplifier: Op Amp), IC6 to IC8 are variable power supply circuits (Adjist Regurator: Adj Reg), Q1 is a PchMOSFET, Q2 is an NchMOSFET, D1, D2 Is a DC regeneration diode, and D3 is a DC regeneration Schottky barrier diode (hereinafter referred to as SBD). CMG is an electron multiplying horizontal transfer electrode of EM-CCD, CL is a load capacitor, C1 and C2 are AC coupling capacitors, R1 and R2 are gate drive resistors, and R3 to R22 are division resistors.

図3〜図10、図13、図14において、Vin1は論理回路1の入力波形であり、Vin2は論理回路2の入力波形であり、Vout1は論理回路1の出力波形であり、Vout2は論理回路2の出力波形であり、Vg1はPchMOSFETのQ1のゲート電圧であり、Vg2はNchMOSFETのQ2のゲート電圧である。   3 to 10, 13, and 14, Vin1 is an input waveform of the logic circuit 1, Vin2 is an input waveform of the logic circuit 2, Vout1 is an output waveform of the logic circuit 1, and Vout2 is a logic circuit. 2, Vg1 is the gate voltage of Q1 of the PchMOSFET, and Vg2 is the gate voltage of Q2 of the NchMOSFET.

本発明の1実施例と他の1実施例を示したブロック図の図1と図11において、従来技術のブロック図の図15と同様にVgainが演算増幅器IC5とR7とR8とで反転され、可変電源回路IC8とR9とR10とR11で再反転され、感度を可変するCMGの電圧振幅を定めるMOSFETの電源電圧を可変する。   In FIG. 1 and FIG. 11 of the block diagram showing one embodiment of the present invention and another embodiment, Vgain is inverted by the operational amplifiers IC5, R7, and R8 as in FIG. 15 of the prior art block diagram. Variable power supply circuits IC8, R9, R10, and R11 re-invert the power supply voltage of the MOSFET that determines the voltage amplitude of CMG that varies the sensitivity.

本発明の1実施例と他の1実施例を示したブロック図の図1、図11と従来技術のブロック図の図15との相異は、図15の様に論理集積回路の出力にダイオードと抵抗の組合せを複数用いて出力インピーダンスを制御せずに、図1と図11とでは電圧制御半導体素子の制御電極を駆動するCMOSアンバッファ反転論理集積回路の入力電圧の範囲をCMOSアンバッファ反転論理集積回路の電源電圧範囲と異ならせて、N型電圧制御半導体素子のゲートとP型電圧制御半導体素子のゲートとをターンオン時に比較的小電流で駆動しターンオフ時に比較的大電流で駆動することと、導通期間を短く非導通期間を長くすることである。詳細は後述するが、図1ではR4とR6でMOSFET電源電圧とCMOS反転論理集積回路の入力電圧範囲を連動して可変しており、R4とR6を開放とすれば、P型電圧制御半導体素子の制御電極を駆動するCMOSアンバッファ反転論理集積回路の入力電圧範囲を低く固定しN型電圧制御半導体素子の制御電極を駆動するCMOSアンバッファ反転論理集積回路の入力電圧を高く固定することになる。詳細は後述するが、図11ではR12とR15でMOSFET電源電圧とCMOS反転論理集積回路の電源電圧を連動して可変しており、R12とR15を開放とすれば、P型電圧制御半導体素子の制御電極を駆動するCMOSアンバッファ反転論理集積回路の電源電圧を高く固定しN型電圧制御半導体素子の制御電極を駆動するCMOSアンバッファ反転論理集積回路の電源電圧を低く固定することになる。   The difference between FIG. 1 and FIG. 11 in the block diagram showing one embodiment of the present invention and another embodiment and FIG. 15 in the block diagram of the prior art is that a diode is connected to the output of the logic integrated circuit as shown in FIG. In FIG. 1 and FIG. 11, the input voltage range of the CMOS unbuffer inversion logic integrated circuit that drives the control electrode of the voltage control semiconductor element is changed to CMOS unbuffer inversion. Different from the power supply voltage range of the logic integrated circuit, the gate of the N-type voltage control semiconductor element and the gate of the P-type voltage control semiconductor element are driven with a relatively small current when turned on and with a relatively large current when turned off. And shortening the conduction period and lengthening the non-conduction period. As will be described in detail later, in FIG. 1, the MOSFET power supply voltage and the input voltage range of the CMOS inversion logic integrated circuit are varied in conjunction with R4 and R6, and if R4 and R6 are opened, a P-type voltage control semiconductor element The input voltage range of the CMOS unbuffered inversion logic integrated circuit for driving the control electrodes of the N type is controlled to be low, and the input voltage of the CMOS unbuffered inversion logic integrated circuit for driving the control electrodes of the N-type voltage control semiconductor element is fixed to be high. . Although details will be described later, in FIG. 11, the MOSFET power supply voltage and the power supply voltage of the CMOS inversion logic integrated circuit are varied in conjunction with R12 and R15. If R12 and R15 are opened, the P-type voltage control semiconductor device The power supply voltage of the CMOS unbuffered inversion logic integrated circuit that drives the control electrode is fixed high, and the power supply voltage of the CMOS unbuffered inversion logic integrated circuit that drives the control electrode of the N-type voltage control semiconductor element is fixed low.

以下図1〜図10を用いて、本発明の1実施例を説明する。
図1において、Q1のPchMOSFETのon抵抗が下がるゲート電圧は例えば4.5Vと高いので、VccHはIC1の推奨最大電圧以下に設定する。つまりIC1の品種が74ACならVccH=6V以下、IC1の品種が74LVCまたはTC7SZならVccH=5.5V以下にする。Q2のNchMOSFETのon抵抗が下がるゲート電圧は例えば2.5Vと低いので、IC2の品種が十分高速で駆動能力が大きく電源電圧より高い入力電圧を許容する74LVCまたはTC7SZならVccL=4.5V以下にする。
An embodiment of the present invention will be described below with reference to FIGS.
In FIG. 1, the gate voltage at which the on-resistance of the Pch MOSFET of Q1 decreases is as high as 4.5V, for example, so VccH is set to be equal to or less than the recommended maximum voltage of IC1. That is, if the IC1 type is 74AC, VccH = 6V or less, and if the IC1 type is 74LVC or TC7SZ, VccH = 5.5V or less. The gate voltage that lowers the on resistance of the N2 MOSFET of Q2 is as low as 2.5 V, for example, so that if the IC2 type is 74LVC or TC7SZ that has a sufficiently high speed, high drive capability and allows an input voltage higher than the power supply voltage, VccL = 4.5V To do.

演算増幅器のIC5とIC9とで、分圧電圧のVD1とVE1を可変する替わりに,分圧抵抗のR4とR6を開放し固定の分圧電圧VD2とVE2とを用い、分圧抵抗のR21とR22とに可変抵抗ICを用いて、MOSFET電源電圧と連動させても良い。分圧抵抗のR4とR6があれば分圧抵抗のR21とR22は開放で良くIC1とIC2の品種とVccHとVccLの相異で、図2(a)の動作で図3(a1)と図4(a2)の動作波形か、図2(c)の動作で図7(c1)と図8(c2)の動作波形になる。   Instead of varying the divided voltages VD1 and VE1 with the operational amplifiers IC5 and IC9, the divided resistors R4 and R6 are opened and fixed divided voltages VD2 and VE2 are used. A variable resistor IC may be used for R22 to be linked with the MOSFET power supply voltage. If the voltage dividing resistors R4 and R6 are present, the voltage dividing resistors R21 and R22 may be opened, and the IC1 and IC2 types and the VccH and VccL are different. 4 (a2) or the operation waveform of FIG. 2 (c) results in the operation waveforms of FIG. 7 (c1) and FIG. 8 (c2).

そして簡易には分圧抵抗のR4とR6は開放で分圧抵抗のR21とR22とにより、図2(b)の動作で図5(b1)と図6(b2)の動作波形と図2(d)の動作で図9(d1)と図10(d2)の動作波形の中間に固定しても構わない。さらに簡易にはVD2を接地とし、VE2をVccHとしても構わない。   For simplicity, the voltage dividing resistors R4 and R6 are opened, and the voltage dividing resistors R21 and R22 are operated, and the operation waveforms of FIGS. 5 (b1) and 6 (b2) in the operation of FIG. The operation of d) may be fixed in the middle of the operation waveforms of FIG. 9 (d1) and FIG. 10 (d2). More simply, VD2 may be grounded and VE2 may be VccH.

ここで、図1において、Q1のPchMOSFETのon抵抗が下がるゲート電圧は例えば4.5Vと高いので、直流再生ダイオードD3をSBD例えば例えば2mAの順方向降下電圧0.3Vの1SS388にしてオン時のPchMOSFETのQ1ゲート電圧Vgs=−5.4V〜−4.7Vを確保する。また、ゲート電圧が確保される一方、MOSFETのゲートのスレッショルド電圧を駆動する際の論理CMOS集積回路の電源電圧と論理CMOS集積回路の出力電圧との差が低減するが、駆動電流32mAを保証するTC7SZシリーズ等の高速論理CMOS集積回路を用いるか、駆動電流24mAを保証するLVCシリーズ等の高速論理CMOS集積回路を3ヶ等複数個を並列接続すれば、VccH=5Vにしても良い。図2(c)(d)の動作で図7(c1)と図8(c2)図9(d1)と図10(d2)の動作波形になる。IC1をさらに駆動能力の高い品種にするか並列個数を増加すれば、直流再生ダイオードD3をSBDで2mAの順方向降下電圧0.2Vの1SS421にしても良い。   Here, in FIG. 1, since the gate voltage at which the on resistance of the Pch MOSFET of Q1 decreases is as high as 4.5V, for example, the DC regenerative diode D3 is set to 1SS388 having a forward drop voltage of 0.3V of SBD, for example, 2mA. The Q1 gate voltage Vgs of the Pch MOSFET is secured from -5.4V to -4.7V. Further, while the gate voltage is secured, the difference between the power supply voltage of the logic CMOS integrated circuit and the output voltage of the logic CMOS integrated circuit when driving the threshold voltage of the gate of the MOSFET is reduced, but the drive current of 32 mA is guaranteed. If a high-speed logic CMOS integrated circuit such as TC7SZ series is used, or if a plurality of high-speed logic CMOS integrated circuits such as LVC series that guarantee a drive current of 24 mA are connected in parallel, VccH = 5V may be set. The operations shown in FIGS. 2C and 2D result in the operation waveforms shown in FIGS. 7C1 and 8C2 and FIGS. 9D1 and 10D2. If the IC1 is made to have a higher driving capability or the number of parallel circuits is increased, the DC regenerative diode D3 may be 1SS421 having a forward drop voltage of 0.2 mA of 2 mA by SBD.

その結果図2のように、アンバッファインバータ論理集積回路IC1の入力Vin1の最高レベルはIC1の電源電圧VccHより低くなり、IC1の反転出力低レベルの駆動能力は非飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。IC1の入力Vin1の最低レベルは接地電位付近で、IC1の反転出力高レベルの駆動能力は飽和動作で比較的高く、PchMOSFETのQ1のターンオフ時の駆動能力は比較的高く、Q1のターンオフは早くなる。アンバッファインバータ論理集積回路IC2の入力Vin2の最高レベルはIC1の電源電圧VccLより高いかVccL付近となり、IC2の反転出力低レベルの駆動能力は飽和動作で比較的高く、NchMOSFETのQ2のターンオフ時の駆動能力は非飽和動作で比較的高く、Q2のターンオフは早くなる。IC2の入力Vin2の最低レベルは接地電位より高く、IC2の反転出力高レベルの駆動能力は非飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。さらに、IC1の電源電圧の中心値VccH/2とIC2の電源電圧の中心値VccL/2と入力電圧Vinの中心値がシフトしているので、IC1の出力Vout1とIC2の出力Vout2とはLowとHiとの期間が非対称となり、Q1とQ2とのオン期間が短くオフ期間が長くなる。   As a result, as shown in FIG. 2, the highest level of the input Vin1 of the unbuffered inverter logic integrated circuit IC1 is lower than the power supply voltage VccH of the IC1, and the driving capability of the inverted output low level of the IC1 is relatively low in the non-saturated operation. The driving capability when Q1 is turned on is relatively low, and the turn-on of Q1 is delayed. The minimum level of the input Vin1 of the IC1 is near the ground potential, the driving capability of the inverted output high level of the IC1 is relatively high in the saturation operation, the driving capability at the time of turning off the Q1 of the PchMOSFET is relatively high, and the turning off of the Q1 is quick. . The maximum level of the input Vin2 of the unbuffered inverter logic integrated circuit IC2 is higher than or close to VccL of the power supply voltage VccL of the IC1, and the driving capability of the inverted output low level of the IC2 is relatively high in the saturation operation, and when the Q2 of the NchMOSFET is turned off. The driving capability is relatively high in non-saturated operation, and Q2 is turned off faster. The minimum level of the input Vin2 of the IC2 is higher than the ground potential, the driving capability of the inverted output high level of the IC2 is relatively low in the non-saturation operation, the driving capability at the turn-on time of the Q1 of the PchMOSFET is relatively low, and the turn-on time of the Q1 is slow. Become. Further, since the central value VccH / 2 of the power supply voltage of IC1, the central value VccL / 2 of the power supply voltage of IC2 and the central value of the input voltage Vin are shifted, the output Vout1 of IC1 and the output Vout2 of IC2 are low. The period of Hi becomes asymmetric, and the on period of Q1 and Q2 is short and the off period is long.

また、分圧抵抗のR3とR4でIC1の入力Vin1を分圧し、分圧抵抗のR5とR6でIC2の入力Vin2を分圧する。その結果図2のように、アンバッファインバータ論理集積回路IC1の入力Vin1の最高レベルはIC1の電源電圧5Vより低くなり、IC1の反転出力低レベルの駆動能力は飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。IC1の入力Vin1の最低レベルは接地電位で、IC1の反転出力高レベルの駆動能力は非飽和動作で比較的高く、PchMOSFETのQ1のターンオフ時の駆動能力は比較的高く、Q1のターンオフは早くなる。アンバッファインバータ論理集積回路IC2の入力Vin2の最高レベルはIC2の電源電圧と同一の5Vで、IC2の反転出力低レベルの駆動能力は飽和動作で比較的高く、NchMOSFETのQ2のターンオフ時の駆動能力は比較的高く、Q2のターンオフは早くなる。IC2の入力Vin2の最低レベルは接地電位より高く、IC2の反転出力高レベルの駆動能力は非飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。   Further, the input Vin1 of the IC1 is divided by the voltage dividing resistors R3 and R4, and the input Vin2 of the IC2 is divided by the voltage dividing resistors R5 and R6. As a result, as shown in FIG. 2, the highest level of the input Vin1 of the unbuffered inverter logic integrated circuit IC1 is lower than the power supply voltage 5V of the IC1, and the driving capability of the inverted output low level of the IC1 is relatively low in the saturation operation. The driving capability at the turn-on of Q1 is relatively low, and the turn-on of Q1 is delayed. The lowest level of the input Vin1 of the IC1 is the ground potential, and the driving capability of the inverted output high level of the IC1 is relatively high in the non-saturation operation, the driving capability at the time of turning off the Q1 of the PchMOSFET is relatively high, and the turning off of the Q1 is quick. . The maximum level of the input Vin2 of the unbuffered inverter logic integrated circuit IC2 is 5V, which is the same as the power supply voltage of the IC2, and the driving capability of the inverted output of the IC2 is relatively high in the saturation operation, and the driving capability when the Q2 of the NchMOSFET is turned off. Is relatively high and Q2 turn-off is faster. The minimum level of the input Vin2 of the IC2 is higher than the ground potential, the driving capability of the inverted output high level of the IC2 is relatively low in the non-saturation operation, the driving capability at the turn-on time of the Q1 of the PchMOSFET is relatively low, and the turn-on time of the Q1 is slow. Become.

つまり、電圧VD1とVE1とを可変するか抵抗R21と抵抗R22とを可変することにより、MOSFET電源電圧とCMOS反転論理集積回路の入力電圧範囲を連動して可変する。その結果、図3〜図10の様にMOSFETのドレイン電流に比例するチャージ電荷Qgの引き抜き量が変化しても、Q1とQ2との導通期間と非導通期間とがほぼ等しくQ1とQ2とで貫通電流が流れない。   That is, by varying the voltages VD1 and VE1 or by varying the resistors R21 and R22, the MOSFET power supply voltage and the input voltage range of the CMOS inversion logic integrated circuit are varied in conjunction with each other. As a result, even if the amount of charge charge Qg drawn proportional to the drain current of the MOSFET changes as shown in FIGS. 3 to 10, the conduction period and the non-conduction period between Q1 and Q2 are almost the same between Q1 and Q2. No through current flows.

その結果、高感度動作のためにCMGの電圧振幅が大きくなりMOSFETのドレイン電流が増加し、よりQgが増加しても、CMOS反転論理集積回路の入力電圧が変化して、ターンオンがより遅く、ターンオフがより速くなり、貫通電流が少なく、CMGの振幅電圧と矩形波形が確保され、感度低下がなくなり、実効感度が改善される。   As a result, the voltage amplitude of CMG increases due to high sensitivity operation, the drain current of the MOSFET increases, and even if Qg increases, the input voltage of the CMOS inversion logic integrated circuit changes and the turn-on becomes slower, The turn-off is faster, the through current is less, the CMG amplitude voltage and the rectangular waveform are secured, the sensitivity is not lowered, and the effective sensitivity is improved.

以下図11〜図14を用いて、本発明の他の1実施例を説明する。   Hereinafter, another embodiment of the present invention will be described with reference to FIGS.

図11において、R12とR15で、Vgainが反転した演算増幅器IC7出力が可変電源回路IC9とR12とR13とR14で再反転され、PchMOSFETの電源電圧VHとPchMOSFETを駆動するCMOS反転論理集積回路の電源電圧VccHが正比例して可変し、NchMOSFETを駆動するCMOS反転論理集積回路の入力電圧Vin2は抵抗R6とR22とで電源電圧VccHに抵抗分圧される。   In FIG. 11, the output of the operational amplifier IC7 whose Vgain is inverted by R12 and R15 is re-inverted by the variable power supply circuits IC9, R12, R13 and R14, and the power supply voltage VH of the PchMOSFET and the power supply of the CMOS inverted logic integrated circuit for driving the PchMOSFET. The voltage VccH is varied in direct proportion, and the input voltage Vin2 of the CMOS inversion logic integrated circuit that drives the Nch MOSFET is divided by the resistors R6 and R22 into the power supply voltage VccH.

図11において、PchMOSFETQ1のon抵抗が下がるゲート電圧は例えば4.5Vと高いので、VccHはVHに正に連動してしIC1の推奨最大電圧以下で可変する。つまりIC1の品種が74ACならVccH=6V以下、IC1の品種が74LVCまたはTC7SZならVccH=5.5V以下で可変する。NchMOSFETQ2のチャージ電荷Qgとターンオフ遅延はPchMOSFETQ1より小さく、かつQ2のon抵抗が下がるゲート電圧は例えば2.5Vと低いので、VccLはIC2の品種が十分高速で駆動能力が大きく電源電圧より高い入力電圧を許容する74LVCまたはTC7SZならVccL=4.5Vとする。その結果図12のように、アンバッファインバータ論理集積回路IC1の入力Vin1の最高レベルはIC1の電源電圧VccHより低くなり、IC1の反転出力低レベルの駆動能力は非飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。IC1の入力Vin1の最低レベルは接地電位で、IC1の反転出力高レベルの駆動能力は飽和動作で比較的高く、PchMOSFETのQ1のターンオフ時の駆動能力は比較的高く、Q1のターンオフは早くなる。アンバッファインバータ論理集積回路IC2の入力Vin2の最高レベルはIC1の電源電圧VccLより高くなり、IC2の反転出力低レベルの駆動能力は飽和動作で比較的高く、NchMOSFETのQ2のターンオフ時の駆動能力は比較的高く、Q2のターンオフは早くなる。IC2の入力Vin2の最低レベルは接地電位より高く、IC2の反転出力高レベルの駆動能力は非飽和動作で比較的低く、PchMOSFETのQ1のターンオン時の駆動能力は比較的低く、Q1のターンオンは遅くなる。   In FIG. 11, since the gate voltage at which the on-resistance of the Pch MOSFET Q1 decreases is as high as 4.5 V, for example, VccH is positively linked to VH and varies below the recommended maximum voltage of IC1. In other words, if IC1 type is 74AC, VccH = 6V or less, and if IC1 type is 74LVC or TC7SZ, VccH = 5.5V or less. The charge voltage Qg and turn-off delay of the Nch MOSFET Q2 are smaller than those of the Pch MOSFET Q1, and the gate voltage at which the on resistance of Q2 decreases is as low as 2.5 V, for example. If it is 74LVC or TC7SZ that permits the above, VccL = 4.5V. As a result, as shown in FIG. 12, the highest level of the input Vin1 of the unbuffered inverter logic integrated circuit IC1 is lower than the power supply voltage VccH of the IC1, and the inverting output low level driving capability of the IC1 is relatively low in the non-saturated operation. The driving capability when Q1 is turned on is relatively low, and the turn-on of Q1 is delayed. The minimum level of the input Vin1 of the IC1 is the ground potential, the driving capability of the inverted output high level of the IC1 is relatively high in the saturation operation, the driving capability at the time of turning off the Q1 of the PchMOSFET is relatively high, and the turning off of the Q1 becomes fast. The highest level of the input Vin2 of the unbuffered inverter logic integrated circuit IC2 is higher than the power supply voltage VccL of the IC1, the low level driving capability of the inverted output of the IC2 is relatively high in the saturation operation, and the driving capability when the N2 MOSFET Q2 is turned off is Relatively high, Q2 turn-off is faster. The minimum level of the input Vin2 of the IC2 is higher than the ground potential, the driving capability of the inverted output high level of the IC2 is relatively low in the non-saturation operation, the driving capability at the turn-on time of the Q1 of the PchMOSFET is relatively low, and the turn-on time of the Q1 is slow. Become.

つまり、MOSFETの電源電圧とCMOS反転論理集積回路の電源電圧を連動して可変する。その結果、図13と図14の様にMOSFETのドレイン電流に比例するチャージ電荷Qgの引き抜き量が変化しても、Q1とQ2との導通期間と非導通期間とがほぼ等しくQ1とQ2とで貫通電流が流れない。   That is, the power supply voltage of the MOSFET and the power supply voltage of the CMOS inversion logic integrated circuit are varied in conjunction with each other. As a result, even if the amount of charge charge Qg drawn proportional to the drain current of the MOSFET changes as shown in FIGS. 13 and 14, the conduction period and the non-conduction period between Q1 and Q2 are almost equal. No through current flows.

その結果、高感度動作のためにCMGの電圧振幅が大きくなりMOSFETのドレイン電流が増加し、よりQgが増加しても、CMOS反転論理集積回路の入力電圧が変化して、ターンオンがより遅く、ターンオフがより速くなり、貫通電流が少なく、CMGの振幅電圧と矩形波形が確保され、感度低下がなくなり、実効感度が改善される。この点で図3〜図10と同様である。   As a result, the voltage amplitude of CMG increases due to high sensitivity operation, the drain current of the MOSFET increases, and even if Qg increases, the input voltage of the CMOS inversion logic integrated circuit changes and the turn-on becomes slower, The turn-off is faster, the through current is less, the CMG amplitude voltage and the rectangular waveform are secured, the sensitivity is not lowered, and the effective sensitivity is improved. This is the same as FIGS.

以上説明した様に本発明の一実施例と他の一実施例によれば、高感度動作のためにCMGの電圧振幅が大きくなりMOSFETのドレイン電流が増加し、よりQgが増加しても、PchMOSFETのゲートを駆動するCMOSアンバッファ反転論理集積回路の電源電圧より入力電圧範囲を低くしNchMOSFETのゲートを駆動するCMOSアンバッファ反転論理集積回路の電源電圧より入力電圧を高くして、MOSFETのターンオンが遅く、ターンオフが速く、CMGの対称性と飽和性等の波形特性を改善し振幅電圧と矩形波形が確保されるため、感度低下がなくなり、実効感度が改善される。また、貫通電流が少ない分電力損失が低減し、発熱と温度上昇とが低減し、感度が向上する。   As described above, according to one embodiment and another embodiment of the present invention, even if the voltage amplitude of the CMG increases and the drain current of the MOSFET increases due to high sensitivity operation, the Qg increases. Turn on the MOSFET by setting the input voltage range lower than the power supply voltage of the CMOS unbuffered inverting logic integrated circuit that drives the gate of the PchMOSFET and higher than the power supply voltage of the CMOS unbuffered inverting logic integrated circuit that drives the gate of the NchMOSFET. Is slow, the turn-off is fast, the waveform characteristics such as symmetry and saturation of CMG are improved, and the amplitude voltage and the rectangular waveform are secured, so that the sensitivity is not lowered and the effective sensitivity is improved. In addition, the power loss is reduced by the amount of through current, heat generation and temperature rise are reduced, and sensitivity is improved.

さらに本発明は、EM−CCDのCMG駆動回路だけでなく、電源電圧が変化する相補のFETの高速スイッチング回路の駆動回路に広く使用できる。   Furthermore, the present invention can be widely used not only in the EM-CCD CMG drive circuit but also in the drive circuit of the complementary FET high-speed switching circuit in which the power supply voltage changes.

本発明の一実施例の相補のMOSFET駆動回路の構成を示すブロック図The block diagram which shows the structure of the complementary MOSFET drive circuit of one Example of this invention 本発明の一実施例の相補のMOSFET駆動回路の幾つかの入出力電圧動作をしめす模式図((a)VccH=5.5V,VccL=4.5V,R4=R6=390,R21=R22=open a1:VD1=VE1=2.5V、a2:VD1=0V,VE1=5V (b)VccH=5.5V,VccL=4.5V,VD2=0V,VE2=5V,R4=R6=open b1:R21=R22=680、b2:R21=R22=390 (c)VccH=5V,VccL=5V,R4=R6=390,R21=R22=open C1:VD1=VE1=2.5V、C2:VD1=-0.5V,VE1=5.5V (d)VccH=5V,VccL=5V,VD2=-0.5V,VE2=5.5V,R4=R6=open d1:R21=R22=680、d2:R21=R22=390)Schematic diagram showing several input / output voltage operations of the complementary MOSFET drive circuit of one embodiment of the present invention ((a) VccH = 5.5V, VccL = 4.5V, R4 = R6 = 390, R21 = R22 = open a1 : VD1 = VE1 = 2.5V, a2: VD1 = 0V, VE1 = 5V (b) VccH = 5.5V, VccL = 4.5V, VD2 = 0V, VE2 = 5V, R4 = R6 = open b1: R21 = R22 = 680 , B2: R21 = R22 = 390 (c) VccH = 5V, VccL = 5V, R4 = R6 = 390, R21 = R22 = open C1: VD1 = VE1 = 2.5V, C2: VD1 = -0.5V, VE1 = 5.5 V (d) VccH = 5V, VccL = 5V, VD2 = -0.5V, VE2 = 5.5V, R4 = R6 = open d1: R21 = R22 = 680, d2: R21 = R22 = 390) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図((a1)VccH=5.5V,VccL=4.5V,R4=R6=390,R21=R22=open軽負荷用VD1=VE1=2.5V)Schematic diagram showing input / output waveform operation of complementary MOSFET drive circuit of one embodiment of the present invention ((a1) VccH = 5.5V, VccL = 4.5V, R4 = R6 = 390, R21 = R22 = open VD1 for light load = VE1 = 2.5V) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図((a2)VccH=5.5V,VccL=4.5V,R4=R6=390,R21=R22=open重負荷用VD1=0V,VE1=5V)Schematic diagram showing input / output waveform operation of complementary MOSFET drive circuit of one embodiment of the present invention ((a2) VccH = 5.5V, VccL = 4.5V, R4 = R6 = 390, R21 = R22 = open heavy load VD1 = 0V, VE1 = 5V) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図((b1)VccH=5.5V,VccL=4.5V,VD2=0V,VE2=5V,R4=R6=open軽負荷用R21=R22=680)Schematic diagram showing input / output waveform operation of complementary MOSFET drive circuit of one embodiment of the present invention ((b1) VccH = 5.5V, VccL = 4.5V, VD2 = 0V, VE2 = 5V, R4 = R6 = open light load (R21 = R22 = 680) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図((b2) VccH=5.5V,VccL=4.5V,VD2=0V,VE2=5V,R4=R6=open重負荷用R21=R22=390)Schematic diagram showing input / output waveform operation of complementary MOSFET drive circuit of one embodiment of the present invention ((b2) VccH = 5.5V, VccL = 4.5V, VD2 = 0V, VE2 = 5V, R4 = R6 = open heavy load (R21 = R22 = 390) 本発明の他の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。(c1)VccH=5V,VccL=5V,R4=R6=390,R21=R22=open 軽負荷用VD=VE=2.5V)The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of other one Example of this invention. (c1) VccH = 5V, VccL = 5V, R4 = R6 = 390, R21 = R22 = open Light load VD = VE = 2.5V) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。(c2)VccH=5V,VccL=5V,R4=R6=390,R21=R22=open重負荷用VD=-0.5V VE=5.5V)The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of one Example of this invention. (c2) VccH = 5V, VccL = 5V, R4 = R6 = 390, R21 = R22 = open heavy load VD = -0.5V VE = 5.5V) 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。(d1) VccH=5V,VccL=5V,VD2=-0.5V,VE2=5.5V,R4=R6=open軽負荷用 R21=R22=560The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of one Example of this invention. (d1) VccH = 5V, VccL = 5V, VD2 = -0.5V, VE2 = 5.5V, R4 = R6 = open for light load R21 = R22 = 560 本発明の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。(d2) VccH=5V,VccL=5V,VD2=-0.5V,VE2=5.5V,R4=R6=open重負荷用 R21=R22=330)The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of one Example of this invention. (d2) VccH = 5V, VccL = 5V, VD2 = -0.5V, VE2 = 5.5V, R4 = R6 = open heavy load R21 = R22 = 330) 本発明の他の一実施例の相補のMOSFET駆動回路の構成を示すブロック図 (e) VccH=5V〜6V VccL=5V〜4VBlock diagram showing the configuration of a complementary MOSFET drive circuit according to another embodiment of the present invention (e) VccH = 5V to 6V VccL = 5V to 4V 本発明の他の一実施例の相補のMOSFET駆動回路の入出力電圧動作をしめす模式図 (e) VccH=5V〜6V VccL=5V〜4VSchematic diagram showing input / output voltage operation of complementary MOSFET drive circuit of another embodiment of the present invention (e) VccH = 5V to 6V VccL = 5V to 4V 本発明の他の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。(e1) VccH=5.5V VccL=4.5V 軽負荷用The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of other one Example of this invention. (e1) VccH = 5.5V VccL = 4.5V For light load 本発明の他の一実施例の相補のMOSFET駆動回路の入出力波形動作をしめす模式図。((e2) VccH=6V VccL=4V 重負荷用)The schematic diagram which shows the input-output waveform operation | movement of the complementary MOSFET drive circuit of other one Example of this invention. ((e2) VccH = 6V VccL = 4V for heavy load) 従来の相補のMOSFET駆動回路の構成を示すブロック図。The block diagram which shows the structure of the conventional complementary MOSFET drive circuit. 従来の相補のMOSFET駆動回路の入出力電圧動作をしめす模式図Schematic diagram showing input / output voltage operation of a conventional complementary MOSFET drive circuit 従来の相補のMOSFET駆動回路の入出力波形動作をしめす模式図Schematic diagram showing the input / output waveform operation of a conventional complementary MOSFET drive circuit

符号の説明Explanation of symbols

IC1、IC2:アンバッファ反転論理CMOS集積回路(UB Inv IC)、
IC10:反転論理CMOS集積回路(Inv IC)、
IC5,IC9:演算増幅器(Operational Amplifier: Op Amp)、
IC6,IC7:可変電源回路(Adjist Regurator: Adj Reg)、
Q1:PchMOSFET、 Q2:NchMOSFET、
D1:ショットーキバリアダイオード、D2〜D8:ダイオード、
C1,C2:容量、CMG:EM−CCDの電子増倍水平転送電極、
Hφ:非増倍の水平転送電極、R1〜R14,R18〜R25:抵抗、
VA,VB:電源、VCCH,VCCM,VCCL,5V:論理電源、
8V:非増倍の水平転送電極電源、VH,VL:スイッチング回路電源、
Vgain,Vref:電圧源、Vin1〜Vin4, Vin10:IC入力電圧、
Vout1〜Vout4, Vout10:IC出力電圧、Vo:CMG電圧、
Vφ:非増倍の水平転送電極電圧、Vg1,Vg2:MOSFETゲート電圧、
VD1,VE1,VD2,VE2:分圧電圧
IC1, IC2: Unbuffered inversion logic CMOS integrated circuit (UB Inv IC),
IC10: Inverted logic CMOS integrated circuit (Inv IC),
IC5, IC9: Operational Amplifier (Op Amp),
IC6, IC7: Variable power supply circuit (Adjist Regurator: Adj Reg),
Q1: PchMOSFET, Q2: NchMOSFET,
D1: Schottky barrier diode, D2 to D8: diode,
C1, C2: capacity, CMG: EM-CCD electron multiplying horizontal transfer electrode,
Hφ: non-multiplied horizontal transfer electrode, R1 to R14, R18 to R25: resistance,
VA, VB: power supply, VCCH, VCCM, VCCL, 5V: logic power supply,
8V: non-multiplied horizontal transfer electrode power supply, VH, VL: switching circuit power supply,
Vgain, Vref: voltage source, Vin1 to Vin4, Vin10: IC input voltage,
Vout1 to Vout4, Vout10: IC output voltage, Vo: CMG voltage,
Vφ: non-multiplied horizontal transfer electrode voltage, Vg1, Vg2: MOSFET gate voltage,
VD1, VE1, VD2, VE2: Divided voltage

Claims (1)

P型電圧制御半導体素子とN型電圧制御半導体素子を用いた反転スイッチング回路において、
前記P型電圧制御半導体素子の制御電極を駆動する74LVCまたはTC7SZのアンバッファ反転論理CMOS集積回路の入力電圧を接地または負電圧に抵抗分圧する手段と、
前記N型電圧制御半導体素子の制御電極を駆動する74LVCまたはTC7SZのアンバッファ反転論理CMOS集積回路の入力電圧を正電圧に抵抗分圧する手段と、を有し、
前記反転スイッチング回路の電源電圧に対して、
前記P型電圧制御半導体素子の制御電極を駆動する74LVCまたはTC7SZのアンバッファ反転論理CMOS集積回路の電源電圧を連動して可変する手段を有することを特徴とするスイッチング回路。
In an inverting switching circuit using a P-type voltage control semiconductor element and an N-type voltage control semiconductor element,
Means for resistively dividing the input voltage of a 74LVC or TC7SZ unbuffered inversion logic CMOS integrated circuit that drives the control electrode of the P-type voltage control semiconductor element to ground or a negative voltage;
Means for resistively dividing the input voltage of the 74LVC or TC7SZ unbuffered inversion logic CMOS integrated circuit that drives the control electrode of the N-type voltage control semiconductor element to a positive voltage;
For the power supply voltage of the inverting switching circuit,
A switching circuit comprising means for varying the power supply voltage of a 74LVC or TC7SZ unbuffered inversion logic CMOS integrated circuit for driving a control electrode of the P-type voltage control semiconductor element in conjunction with the P-type voltage control semiconductor element.
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