JP5077320B2 - Method for producing N-type silicon single crystal and phosphorus-doped N-type silicon single crystal - Google Patents

Description

  In the present invention, a raw material crystal rod is heated and melted by an induction heating coil to form a floating zone, and a single crystal rod is grown by moving the floating zone. The present invention relates to a crystal manufacturing method and a silicon single crystal, and more particularly to a single crystal manufacturing method and a phosphorus-doped N-type silicon single crystal that prevent generation of OSF (oxidation induced stacking fault).

  The FZ method is used as one of manufacturing methods of a semiconductor single crystal, for example, a silicon single crystal that is most frequently used as a semiconductor element at present.

FIG. 3 is an example of a single crystal manufacturing apparatus used in a conventional FZ single crystal manufacturing method. A method of manufacturing a single crystal using the FZ single crystal manufacturing apparatus 30 will be described.
First, the raw crystal rod 1 is held by the upper holding jig 4 of the upper shaft 3 installed in the chamber 20. On the other hand, a single crystal seed (seed crystal) 8 having a small diameter is held by the lower holding jig 6 of the lower shaft 5 located below the raw crystal rod 1.

Next, the raw material crystal rod 1 is melted by the induction heating coil 7 and fused to the seed crystal 8. Thereafter, the narrowed portion 9 is formed by seed drawing to make dislocation-free. Then, by rotating the upper shaft 3 and the lower shaft 5 while lowering the raw crystal rod 1 and the grown single crystal rod 2, the floating zone (also referred to as a melting zone or melted melt) 10 is changed into the raw crystal rod 1 and the grown single crystal rod. 2, the floating zone 10 is moved to the upper end of the raw material crystal rod 1 and zoned to grow the grown single crystal rod 2.
This single crystal growth is performed in an atmosphere in which a small amount of nitrogen gas is mixed with Ar gas, and a resistance produced from a dope gas spray nozzle (dope nozzle) 11 in order to produce an N-type FZ single crystal. An appropriate amount of Ar-based PH ₃ gas is flowed.
As the induction heating coil 7, a single-winding or multiple-winding induction heating coil made of copper or silver in which cooling water is circulated is used.

In recent years, the demand for larger diameters of single crystals has been increasing. Therefore, also in the FZ method, the diameter of a single crystal to be manufactured is increasing. However, when an N-type large-diameter FZ single crystal, in particular, a large-diameter single crystal having a diameter of 200 mm or more is manufactured by a conventional manufacturing method, a wafer cut from this crystal is subjected to an OSF test (for example, 1150 ° C. Wet O ₂ -100 min, When etching is performed for 4 minutes, the problem is that OSF occurs.

  As an OSF prevention measure, a manufacturing method in which Al (aluminum) is doped in the production of a CZ single crystal is disclosed (for example, see Patent Document 1). However, in the FZ single crystal, which has a high demand for a crystal having a high resistivity as compared with the CZ single crystal, the segregation coefficient is 0.35 for P (phosphorus) and 0.8 for B (boron). When Al is doped as small as 0.002, the in-plane resistivity distribution and the axial resistivity distribution become very bad, and there is a problem that the resistivity cannot be controlled, and it is difficult to dope gas with Al. Therefore, a method to replace Al dope has been demanded.

JP-A-8-73293

  The present invention has been made in view of the above problems, and even when a silicon single crystal, particularly a silicon single crystal having a large diameter of 8 inches (200 mm) or more is manufactured by the FZ method, It is an object of the present invention to provide an N-type silicon single crystal manufacturing method and an N-type silicon single crystal that can prevent generation.

In order to solve the above-mentioned problems, the present invention is a method for producing a silicon single crystal by the FZ method, wherein N is doped by doping with Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas as doping gases. Provided is a method for producing an N-type silicon single crystal, characterized by producing a single-type silicon single crystal.

Thus, if doping is performed using Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas as the doping gas, it is possible to manufacture a high-quality FZ silicon single crystal that is N-type and does not generate OSF. it can.

In this case, a dope gas spray nozzle provided near the melt melt of the FZ single crystal manufacturing apparatus or a dope gas provided below the melt melt is doped with the Ar-based PH ₃ gas and the Ar-based B ₂ H ₆ gas. This can be performed by mixing and flowing Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas from the outlet.

Thus, by mixing and flowing Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas from a dope gas spray nozzle provided in the vicinity of the melt melt of the FZ single crystal manufacturing apparatus, the concentration of B to be doped is increased. It is easy to control, moreover, B can be more easily taken into the produced N-type silicon single crystal, and Ar-based PH ₃ gas can be introduced from the dope gas outlet provided below the melt. By mixing and flowing Ar-based B ₂ H ₆ gas, B or P can be uniformly doped.

Further, the Ar-based PH ₃ gas and Ar-based _B 2 _{H 6} doped by gas, FZ PH ₃ gas from the doping gas spraying nozzle provided in the molten melt near the Ar-based single crystal manufacturing apparatus, the molten melt Alternatively, Ar-based B ₂ H ₆ gas can be flowed from a dope gas ejection port provided below.

In this way, Ar-based PH ₃ gas is supplied from the dope gas blowing nozzle provided in the vicinity of the melt melt of the FZ single crystal production apparatus, and Ar-based B ₂ H _{6 is} supplied from the dope gas ejection port provided below the melt melt. By flowing a gas, the resistivity by P doping, which requires a higher concentration than B in order to obtain an N-type crystal, can be easily adjusted, and B doped at a low concentration is uniformly doped to prevent OSF generation. Can do.

The Ar-based B ₂ H ₆ gas is flowed so that the B concentration in the produced N-type silicon single crystal is 3 × 10 ¹² atoms / cm ³ or more, and the diameter is 8 inches (200 mm) or more. An N-type silicon single crystal can be manufactured.

Thus, if Ar-based B ₂ H ₆ gas is flowed so that the B concentration in the produced N-type silicon single crystal is 3 × 10 ¹² atoms / cm ³ or more, the diameter is 8 inches (200 mm) or more. Even with a large diameter, sufficient OSF generation preventing effect can be obtained, and a high quality single crystal can be stably produced.

The present invention also provides a phosphorus-doped N-type FZ silicon single crystal having a B concentration of 3 × 10 ¹² atoms / cm ³ or more and a diameter of 8 inches (200 mm) or more.

As described above, the phosphorus-doped N-type FZ silicon single crystal having a B concentration of 3 × 10 ¹² atoms / cm ³ or more and a large diameter of 8 inches (200 mm) or more is an N-type large-diameter FZ silicon single crystal. The product value is very high because of the high quality without generation of OSF.

  As described above, according to the method for producing an N-type FZ silicon single crystal of the present invention, a high-quality single crystal that does not generate OSF even when it has a large diameter of 8 inches (200 mm) or more is obtained. It can be manufactured stably.

It is the schematic which shows an example of the single crystal manufacturing apparatus by FZ method used in the manufacturing method of the N-type silicon single crystal of this invention. It is the schematic which shows another example of the single crystal manufacturing apparatus by FZ method used in the manufacturing method of the N-type silicon single crystal of this invention. It is the schematic which shows an example of the single crystal manufacturing apparatus used in the conventional FZ single crystal manufacturing method.

Hereinafter, the present invention will be described more specifically.
As described above, with the recent demand for a single crystal having a large diameter, the single crystal manufactured in the FZ method is also increasing in diameter. When a silicon single crystal of (200 mm) or more is manufactured, there is a problem that OSF occurs frequently.

  The inventors of the present invention have made extensive studies on the cause of OSF generated when an N-type silicon single crystal having a diameter of 6 inches (150 mm) or more, particularly 8 inches (200 mm) or more is manufactured by the FZ method. It was. As a result, when the present inventors try to manufacture a large-diameter single crystal by the FZ method, a region where interstitial silicon is dominant is formed in the outer periphery of the crystal, and this interstitial silicon aggregates to become a nucleus, and OSF I found out that there was a problem that occurred.

Therefore, the inventors of the present invention have proposed that B suppresses generation of interstitial silicon-type dislocation clusters in the CZ method (“Silicon Technology No. 59 Effect of impurities on defects in CZ silicon crystal (B, C, N, O, Sb, As, P) "Komura Nakamura, Junsuke Tsujioka) As a result of further experiments, N-type FZ single crystal production during zoning in the production method of FZ silicon single crystal containing no oxygen For this purpose, B ₂ H ₆ gas doping is performed together with PH ₃ gas doping, and a small amount of B is added to the single crystal, thereby suppressing generation of interstitial silicon-type dislocation clusters that can become OSF nuclei, and generation of OSF. As a result, the present invention has been completed.

Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto.
1 and 2 are schematic views showing an example of a single crystal production apparatus used in the method for producing an N-type FZ silicon single crystal of the present invention.
The FZ single crystal manufacturing apparatus 40 in FIG. 1 includes a chamber 20 that accommodates a raw material crystal rod 1 and a grown single crystal rod 2 and a floating zone (melt melt) 10 between the raw material crystal rod 1 and the grown single crystal rod 2. It has the induction heating coil 7 used as the heat source for forming. Then, from the dope gas blowing nozzle (dope nozzle) 11, an Ar base B ₃ H ₆ gas for preventing generation of OSF is mixed and flowed together with an Ar base PH ₃ gas for manufacturing an N-type silicon single crystal.

The FZ single crystal manufacturing apparatus 41 of FIG. 2 flows an Ar-based PH ₃ gas for manufacturing an N-type silicon single crystal from the dope nozzle 11 and prevents OSF from being generated from the dope gas outlet 12 below the melt 10. Ar base B ₂ H ₆ gas is used. Other configurations are substantially the same as those in FIG.

In the present invention, for example, using such a single crystal manufacturing apparatus 40, an N-type silicon single crystal is manufactured as follows.
First, the portion of the silicon raw material rod 1 where melting starts is processed into a cone shape, and the surface is etched to remove the processing distortion. Thereafter, the silicon raw material rod 1 is accommodated in the chamber 20 of the FZ single crystal manufacturing apparatus 40 shown in FIG. 1 and fixed to the upper holding jig 4 of the upper shaft 3 installed in the chamber 20 with screws or the like. On the other hand, a seed crystal 8 is attached to the lower holding jig 6 of the lower shaft 5.

  Next, the lower end of the cone portion of the silicon raw material rod 1 is preheated with a carbon ring (not shown). Thereafter, Ar gas containing nitrogen gas is supplied from the lower part of the chamber 20 and exhausted from the upper part of the chamber, for example, 0.15 MPa, the flow rate of Ar gas is 20 to 50 l / min, and the nitrogen concentration in the chamber is 0.1 to 0.1. 0.5%. After the silicon raw material rod 1 is heated and melted by the induction heating coil 7, the tip of the cone portion is fused to the seed crystal 8, the dislocation is made by the narrowed portion 9, and the silicon raw material 1 is rotated while rotating the upper shaft 3 and the lower shaft 5. The rod 1 and the growing single crystal rod 2 are moved down at a speed of, for example, 1 to 5 mm / min to move the molten melt 10 to the upper end of the silicon raw material rod 1 and perform zoning to grow the silicon single crystal rod 2.

  At this time, a single crystal is grown by shifting (eccentrically) the upper shaft 3 serving as the center of rotation when growing the silicon raw material rod 1 and the lower shaft 5 serving as the center of rotation of the single crystal during single crystallization. It is preferable to do. By shifting both the central axes in this way, the melted portion can be agitated during single crystallization, and the quality of the single crystal to be produced can be made uniform. The amount of eccentricity may be set according to the diameter of the single crystal.

Further, during zoning, in order to obtain a predetermined N-type resistivity, an Ar-based PH ₃ gas and an Ar-based B ₂ H ₆ gas are mixed and flowed from the dope nozzle 11 to prevent OSF.

At this time, the concentration of PH _{3 in} the doping gas is set higher than the concentration of B ₂ H ₆ so that the conductivity type of the obtained silicon single crystal is N-type. The concentration ratio or concentration difference between PH ₃ and B ₂ H ₆ may be determined so that the silicon single crystal to be manufactured has a required resistivity.

Ar-based B ₂ H ₆ gas, In addition, as shown in FIG. 2, for example in the case of using a single crystal manufacturing apparatus 41 as described above, flows from doping gas blowing mouth 12 is located below the molten melt For example, an Ar-based PH ₃ gas and an Ar-based B ₂ H ₆ gas can be mixed and flowed from the dope gas ejection port 12.

At this time, in order to produce a large-diameter N-type silicon single crystal having a diameter of 8 inches (200 mm) or more without problems, Ar-based B ₂ H ₆ gas is used as a B concentration in the produced N-type silicon single crystal. Is preferably 3 × 10 ¹² atoms / cm ³ or more. Accordingly, Ar-based PH ₃ may be made to be N-type by canceling the B concentration of 3 × 10 ¹² atoms / cm ³ or more in the silicon single crystal and to flow at a concentration that provides the desired resistivity.

The N-type silicon single crystal manufactured in this way has a B concentration of 3 × 10 ¹² atoms / cm ³ or more, and can prevent generation of OSF even with a large diameter of 8 inches (200 mm) or more. In the invention, a high-quality phosphorus-doped N-type FZ silicon single crystal can be provided.

  The upper limit of the B concentration in the N-type silicon single crystal is the upper limit up to the solid solution limit that can maintain the single crystal structure by adding both P for producing the N-type silicon single crystal and B for preventing OSF. What is necessary is just to adjust so that it may become a desired resistivity with the following density | concentrations.

EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated more concretely, this invention is not limited to these.
Example 1
Zoning was performed by the FZ method using a CZ silicon single crystal having a diameter of 150 Ωcm or more and a diameter of 150 mm as a silicon raw material rod, and an FZ silicon single crystal having a diameter of 205 mm and a straight body length of 70 cm was manufactured using an N-type 50 Ωcm target.
When manufacturing this silicon single crystal, the single crystal manufacturing apparatus shown in FIG. 1 was used.
The induction heating coil is a parallel coil in which the outer diameter of the inner first heating coil is 160 mm, the outer diameter of the second outer heating coil is 280 mm, the furnace pressure is 0.19 MPa, the Ar gas flow rate is 50 L / min, and the nitrogen in the chamber The gas concentration was 0.1%, the growth rate was 2.0 mm / min, and the eccentricity was 12 mm. A quartz plate for preventing discharge was inserted into the slit of the induction heating coil.
From the dope nozzle, PH ₃ gas having a concentration of 0.35 to 0.45 ppma based on Ar was flowed at 1000 cc / min, and B ₂ H ₆ gas having a concentration of 0.004 to 0.02 ppma based on Ar was flowed at 500 cc / min.

In this way, eight silicon single crystals obtained by the FZ method were obtained without any dislocation during the growth, and without any trouble.
As a result of performing an OSF test (1150 ° C. Wet O ₂ -100 min, selective etching 4 min) on the wafer cut from the cone side, the center part, and the tail side of the obtained crystal, no OSF was generated. Further, as a result of measuring the B concentration in the crystal of the tail side sample by the PL method, the B concentration was 4.07 to 8.15 × 10 ¹² atoms / cm ³ (sample Nos. 10 to 17 in Table 1). there were. The resistivity was also as planned.

(Example 2)
Zoning was performed by the FZ method using a CZ silicon single crystal having a diameter of 150 Ωcm or more and a diameter of 150 mm as a silicon raw material rod, and an FZ silicon single crystal having a diameter of 205 mm and a straight body length of 70 cm was manufactured using an N-type 50 Ωcm target.
When manufacturing this silicon single crystal, the single crystal manufacturing apparatus shown in FIG. 2 was used.
The induction heating coil is a parallel coil in which the outer diameter of the inner first heating coil is 160 mm, the outer diameter of the second outer heating coil is 280 mm, the furnace pressure is 0.19 MPa, the Ar gas flow rate is 50 L / min, and the nitrogen in the chamber The gas concentration was 0.1%, the growth rate was 2.0 mm / min, and the eccentricity was 12 mm. A quartz plate for preventing discharge was inserted into the slit of the induction heating coil.
From the dope nozzle, PH ₃ gas having a concentration of 0.35 to 0.45 ppma on the basis of Ar is 1000 cc / min, and from the dope gas outlet located below the melt, the concentration of 0.02 to 0.06 ppma on the basis of Ar B ₂ H ₆ gas was flowed at 1000 cc / min.

In this way, 10 silicon single crystals obtained by the FZ method were obtained in a non-trouble manner without causing dislocations during the growth.
As a result of performing an OSF test (1150 ° C. Wet O ₂ -100 min, selective etching 4 min) on the wafer cut from the cone side, the center part, and the tail side of the obtained crystal, no OSF was generated. As a result of measuring the B concentration in the crystal of the tail side sample by the PL method, the B concentration was 3.22 to 8.05 × 10 ¹² atoms / cm ³ (sample Nos. 18 to 27 in Table 1). there were. The resistivity was also as planned.

(Comparative example)
Zoning was performed by the FZ method using a CZ silicon single crystal having a diameter of 150 Ωcm or more and a diameter of 150 mm as a silicon raw material rod, and an FZ silicon single crystal having a diameter of 205 mm and a straight body length of 70 cm was manufactured using an N-type 50 Ωcm target.
When manufacturing this silicon single crystal, the single crystal manufacturing apparatus shown in FIG. 3 was used.
The induction heating coil is a parallel coil in which the outer diameter of the inner first heating coil is 160 mm, the outer diameter of the second outer heating coil is 280 mm, the furnace pressure is 0.19 MPa, the Ar gas flow rate is 50 L / min, and the nitrogen in the chamber The gas concentration was 0.1%, the growth rate was 2.0 mm / min, and the eccentricity was 12 mm. A quartz plate for preventing discharge was inserted into the slit of the induction heating coil.
From the dope nozzle, PH ₃ gas having a concentration of 0.35 to 0.45 ppma on an Ar basis was flowed at 1000 cc / min.

In this manner, nine silicon single crystals obtained by the FZ method were obtained without any dislocations during the growth without causing trouble.
As a result of performing an OSF test (1150 ° C. Wet O ₂ -100 min, selective etching 4 min) on the wafer cut from the cone side, center portion, and tail side of the obtained crystal, 6 out of 9 ring-shaped OSFs were obtained. It has occurred. Further, as a result of measuring the B concentration in the crystal of the tail side sample by the PL method, the B concentration was 1.46 to 2.97 × 10 ¹² atoms / cm ³ (sample Nos. 1 to 9 in Table 1). there were.

The results of Examples and Comparative Examples are shown in Table 1.

As shown in Table 1, in the comparative examples (sample Nos. 1 to 9), B is not doped, and the B concentration in the crystal is less than 3 × 10 ¹² atoms / cm ³ , which is unavoidable. In the example (sample Nos. 10 to 27), the concentration of B in the single crystal was 3 by doping with B in contrast to the ring-like OSF generated in 6 out of 9 that was considered to be mixed. × 10 ¹² atoms / cm ³ or more, and no ring-like OSF was generated in all 18 pieces.

Thus, it can be seen that the frequency of OSF is high in the conventional method.
On the other hand, in the method of the present invention, generation of OSF can be prevented, and it has been found that the method of the present invention is very effective.

From the above, according to the method for producing an N-type silicon single crystal of the present invention, generation of OSF can be prevented even with a large diameter of 8 inches (200 mm) or more, and a high-quality FZ silicon single crystal can be obtained. It can be said that it can be manufactured stably.
Further, since there was no occurrence of OSF in all resulting B concentration ³ × ¹⁰ 12 atoms / cm 3 or more silicon single crystal, if the B concentration in the crystal is ³ × ¹⁰ 12 atoms / cm 3 or more, It can be said that it has been proved that generation of OSF can be prevented more effectively.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.

1 ... Raw material crystal rod (silicon raw material rod), 2 ... Growing single crystal rod (silicon single crystal rod),
3 ... Upper shaft, 4 ... Upper holding jig, 5 ... Lower shaft, 6 ... Lower holding jig,
7 ... induction heating coil, 8 ... seed crystal, 9 ... throttle part, 10 ... floating zone (melt melt),
11 ... Nozzle for dope gas spraying (dope nozzle), 12 ... Dope gas ejection port,
30, 40, 41 ... FZ single crystal manufacturing apparatus.

Claims (5)

A method for producing a silicon single crystal by an FZ method, wherein an N-type silicon single crystal is produced by doping using Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas as a doping gas. A method for producing an N-type silicon single crystal. A dope gas spray nozzle provided below the melt melt, or a dope gas spray nozzle provided in the vicinity of the melt melt of the FZ single crystal manufacturing apparatus in which the Ar base PH ₃ gas and the Ar base B ₂ H ₆ gas are doped. _{2. The} method for producing an N-type silicon single crystal according to claim 1, wherein Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas are mixed and flowed. Doping with Ar-based PH ₃ gas and Ar-based B ₂ H ₆ gas causes Ar-based PH ₃ gas to be introduced from a nozzle for blowing dope gas provided in the vicinity of the melt melt of the FZ single crystal manufacturing apparatus more than the melt melt. _{2. The} method for producing an N-type silicon single crystal according to claim 1, wherein Ar-based B ₂ H ₆ gas is allowed to flow from a dope gas ejection port provided below. The Ar-based B ₂ H ₆ gas is flowed so that the B concentration in the produced N-type silicon single crystal is 3 × 10 ¹² atoms / cm ³ or more, and N-type silicon having a diameter of 8 inches (200 mm) or more. 4. The method for producing an N-type silicon single crystal according to claim 1, wherein the single crystal is produced. 5. A phosphorus-doped N-type FZ silicon single crystal having a B concentration of 3 × 10 ¹² atoms / cm ³ or more and a diameter of 8 inches (200 mm) or more.

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