JP5078738B2 - Robot for workpiece transfer - Google Patents

Description

  The present invention relates to a workpiece transfer robot.

  In a semiconductor manufacturing apparatus, a workpiece transfer robot for transferring a workpiece such as a semiconductor wafer is used (see, for example, Patent Document 1 and Patent Document 2).

  Each of the workpiece transfer robots disclosed in Patent Document 1 and Patent Document 2 is attached to two arms (first arm and second arm) that are connected in two stages, and the tip of the second arm. A workpiece transfer robot having a holding hand.

  In such a workpiece transfer robot, the workpiece transfer robot disclosed in Patent Document 1 corresponds to the first arm, the second arm, and the hand, respectively (motors for driving the first arm and for driving the second arm). A motor and a hand driving motor), and the first arm, the second arm and the hand are individually driven by these motors. Also, an elevating frame for elevating the first arm, the second arm, and the hand, and an elevating motor for driving the elevating frame are provided. The elevating frame can be moved up and down in the vertical direction by forward and reverse rotation of the elevating motor. The first arm driving motor, the second arm driving motor, and the hand driving motor are fixed to the lifting frame and move up and down together with the lifting frame.

  The workpiece transfer robot according to the first prior art configured as described above is provided corresponding to each of the first arm, the second arm and the hand, and the first arm, the second arm and the hand are individually endless by the motor. Can be swiveled. Further, the first arm, the second arm and the hand can be moved up and down by the lifting motor.

  On the other hand, in the workpiece transfer robot disclosed in Patent Document 2, the first arm drive motor, the second arm drive motor, and the hand drive motor are installed on the fixed frame of the workpiece transfer robot and installed on the fixed frame. In addition, the rotational driving force of each motor is transmitted to the first arm, the second arm, and the hand by a drive transmission mechanism.

JP 2003-25262 A JP 2001-96480 A

  In the workpiece transfer robot disclosed in Patent Document 1, the first arm driving motor, the second arm driving motor, and the hand driving motor are each fixed to the lifting frame and move up and down together with the lifting frame. ing. For this reason, whenever the elevating frame performs the elevating operation, the wiring cables of these motors are repeatedly deformed such as being bent or twisted each time. If the lifting and lowering operation of the lifting frame is frequently repeated for a long period of time, a heavy load is applied to the wiring cable, and there is a risk of contact failure or disconnection at the connection portion.

  On the other hand, in the robot for workpiece transfer according to the second prior art, each motor is set to a fixed frame of the workpiece transfer robot, so that each motor does not move. Therefore, in the workpiece transfer robot according to the second prior art, deformation such as bending or twisting does not occur in the wiring cable of each motor, and contact failure or disconnection of the wiring cable can be prevented.

  However, the robot for workpiece transfer according to the second prior art does not have a mechanism for vertically moving the arm mechanism unit, and the turning mechanism and the arm mechanism for turning the arm mechanism on the horizontal plane are on the horizontal plane. It is only an expansion / contraction mechanism for expanding / contracting. Therefore, for example, when the hand is moved up and down to the position of the work stored in multiple stages in the vertical direction, the work is held, the held work is transported and stored at an arbitrary height position There is a problem that it is unsuitable.

  Therefore, the present invention prevents the deformation of the wiring cable of each motor that enables turning and expansion / contraction of the arm mechanism unit having a plurality of arms and hands from occurring, and prevents horizontal deformation of the arm mechanism unit. It is an object of the present invention to provide a workpiece transfer robot that can move up and down in the vertical direction of an arm mechanism in addition to turning and expanding and contracting.

  (1) A workpiece transfer robot according to the present invention includes an arm mechanism unit having a plurality of arms connected in multiple stages and a hand for holding a workpiece, an elevating mechanism unit for elevating the arm mechanism unit in a vertical direction, A telescopic mechanism for extending and retracting the arm mechanism on a horizontal plane, a pivoting mechanism for rotating the arm mechanism on a horizontal plane, the arm mechanism, an elevating mechanism, a telescopic mechanism, and a pivot A robot for conveying a workpiece having a fixed frame that supports a mechanism unit, wherein the lifting mechanism unit includes a lifting motor fixed to the fixed frame, and the arm mechanism unit is attached to drive the lifting motor. An elevating board that moves up and down in a vertical direction by force, and the extension mechanism includes a telescopic motor fixed to the fixed frame and a driving force of the extension motor. A first spline shaft that transmits to the arm mechanism, the turning mechanism being fixed to the fixed frame, and a second that transmits the driving force of the turning motor to the arm mechanism. And a spline shaft.

  According to the workpiece transfer robot of the present invention, not only the lifting and lowering motor, but also the telescopic motor and the turning motor are attached to the fixed frame of the workpiece transfer robot. Even if the arm mechanism moves up and down or turns by driving a motor other than itself, the positions of the telescopic motor and the turning motor do not change. As a result, the wiring cables of the telescopic motor and the turning motor are not deformed such as bending or twisting, and contact failure or disconnection of the wiring cable can be prevented.

  In addition, since the wiring cables of the telescopic motor and the turning motor do not bend or twist, the arm mechanism can be turned endlessly by 360 degrees or more in the clockwise and counterclockwise directions. As described above, by enabling the arm mechanism to turn 360 degrees or more in the clockwise direction and in the counterclockwise direction, it is possible to improve the work transfer efficiency.

  (2) In the workpiece transfer robot according to (1), the plurality of arms include two arms, and among the two arms, the arm on the fixed frame side is the first arm, and the arm on the hand side Is the second arm, the fixed frame side of each of the first arm and the second arm is the rear end side of the arm, and the hand side is the front end side of the arm. On the side, the driving force of the turning motor is received via the second spline shaft and rotates, and when the first arm rotates, the first arm is in a reverse rotation state relative to the rotation of the first arm. A pulley and a first spline shaft that is connected to the first arm by sharing a central axis with the first pulley are provided, and the tip end side of the first arm rotates in conjunction with the first pulley. And its rotational force A second pulley that rotates the second arm by transmitting to the rear end side of the second arm is provided, and the second arm shares a central axis with the second pulley on the rear end side of the second arm. A third pulley that is in a reverse rotation state with respect to the rotation of the second arm is provided, and a fourth pulley that rotates the hand in conjunction with the third pulley is provided on the distal end side of the second arm, When the first arm rotates by a predetermined angle in a predetermined direction by the rotation of the first spline shaft, the second arm rotates by a predetermined angle in the opposite direction to the first arm, and the second arm predetermined by the predetermined direction. It is preferable that the first arm, the second arm, and the hand perform a telescopic operation on a horizontal plane by performing an operation in which the hand rotates by a predetermined angle in a direction opposite to the second arm by rotating by an angle.

  By configuring the arm mechanism as described above, the first arm, the second arm, and the hand can be expanded and contracted on a horizontal plane even when the expansion and contraction motor and the turning motor are attached to the fixed frame side. it can.

  (3) In the workpiece transfer robot according to (2), when the turning mechanism performs a turning operation, the turning motor is driven and the driving force is transmitted via the second spline shaft. The first pulley is transmitted to the first pulley, and the first pulley is rotated, and the telescopic motor is driven in synchronization with the turning motor, and the driving force is transmitted to the first arm via the first spline shaft. It is preferable to transmit and rotate the first arm.

  In the workpiece transfer robot of the present invention, when performing a turning operation, control is performed to drive the turning motor and the telescopic motor while synchronizing them. This is a control for enabling the first arm, the second arm, and the hand to rotate while maintaining a predetermined angle. By performing such a control, The entire arm mechanism unit can be turned in a state where the arm, the second arm, and the hand hold a predetermined angle.

  Hereinafter, embodiments of the present invention will be described.

  FIG. 1 is a perspective view showing an external configuration of a workpiece transfer robot according to an embodiment of the present invention. As shown in FIG. 1, a workpiece transfer robot 10 according to an embodiment of the present invention includes an arm mechanism unit 100 and an elevating mechanism unit for moving the arm mechanism unit 100 in the vertical direction (direction along the z axis). 200, an expansion / contraction mechanism 300 for expanding / contracting the arm mechanism 100 on the horizontal plane (on the xy plane), a swing mechanism 400 for rotating the entire arm mechanism 100 on the horizontal plane, and an arm The mechanism unit 100, the elevating mechanism unit 200, the telescopic mechanism unit 300, and the fixed frame 500 that supports the turning mechanism unit 400 are included.

  The arm mechanism unit 100 includes two arms, a first arm 110 and a second arm 120 that are connected in two stages, and a hand 130 that holds a workpiece (not shown) by vacuum suction. In this specification, the fixed frame 500 side of each arm of the first arm 110 and the second arm 120 is described as the rear end side of the arm, and the hand 130 side is described as the front end side of the arm.

  The front end side of the first arm 110 and the rear end side of the second arm 120 are rotatably connected to each other, and the rear end side of the first arm 110 rotates to the cylindrical arm mechanism holding unit 210 in the lifting mechanism unit 200. It is supported freely. Further, the rear end side of the hand 130 is rotatably supported on the front end side of the second arm 120.

  FIG. 1 shows a state in which the first arm 110 and the second arm 120 in the arm mechanism unit 100 are covered with arm covers 110a and 120a, respectively. Therefore, in FIG. 1, the first arm 110 and the second arm 120 are present in the arm covers 110a and 120a. The detailed configuration of the arm mechanism unit 100 will be described later. The detailed configuration of the arm covers 110a and 120a will be described later.

  The hand 130 has a U-shaped work holding part 131 formed on the tip side, and the work holding part 131 is provided with an air circulation hole 132 for holding the work (semiconductor wafer) by vacuum suction. Yes.

  The fixed frame 500 is fixed to the base 510 that forms the bottom of the workpiece transfer robot, the first stage 530 that is fixed to the base 510 via a column 520, and the first stage 530 via the column 540. A second stage 550.

  FIG. 2 is a diagram showing an essential part of FIG. 1 taken out in order to explain the configuration of the elevating mechanism unit 200. In FIG. 2, the same parts as those in FIG.

  As shown in FIG. 2, the elevating mechanism unit 200 is coupled to a cylindrical arm mechanism holding unit 210 that holds the rear end side of the first arm 110, an elevating motor 220, and a drive shaft of the elevating motor 220. The ball screw 240 is connected to the ball screw 240, and the elevator 260 is fixed with a ball nut 250 screwed to the ball screw 240. The lifting motor 220 is fixed to a first stage 530, which is not shown in FIG. 2 (see FIG. 1).

  The rear end side of the arm mechanism holding unit 210 is fixed to a substantially central portion of the elevator board 260 and performs an elevator operation together with the elevator board 260. The lifting board 260 is slidably supported by a support column 540. When the ball screw 240 is rotated by driving the lifting motor 220, the support column 540 serves as a guide in the vertical direction (the zz ′ direction in FIG. 2). It is designed to move up and down. As the elevator board moves up and down in the vertical direction, the arm mechanism holding unit 210 also moves up and down, and the arm mechanism unit 100 also moves up and down.

  FIG. 3 is a diagram showing the main part of FIG. 1 in order to explain the configuration of the expansion / contraction mechanism unit 300. In FIG. 3, the same parts as those in FIG.

  As shown in FIG. 3, the expansion / contraction mechanism 300 receives the expansion / contraction motor 310, the main driving pulley 320 attached to the drive shaft of the expansion / contraction motor 310, and the rotational force of the main driving pulley 320 via the timing belt 330. It has a driven pulley 340 that rotates, and a spline shaft 350 that rotates by receiving the rotational force of the driven pulley 340 (referred to as a first spline shaft 350). The telescopic motor 310 is fixed to the first stage 530, which is not shown in FIG. 3 (see FIG. 1).

The front end portion of the first spline shaft 350 is connected to the rear end side of the first arm 110, and the rotational force of the first spline shaft 350 is transmitted to the first arm 110. Note that the first spline shaft 350 passes through the center of a cylindrical arm mechanism holding portion 210 (not shown in FIG. 3) and is rotatably provided with respect to the arm mechanism holding portion 210.
The expansion / contraction operation of the arm mechanism unit 100 by the expansion / contraction mechanism unit 300 configured as described above will be described later.

  FIG. 4 is a view showing the main part of FIG. 1 in order to explain the configuration of the turning mechanism part 400. In FIG. 4, the same parts as those in FIG. In FIG. 4, the arm mechanism unit 100 is not shown.

  As shown in FIG. 4, the turning mechanism unit 400 includes a turning motor 410, a spline shaft 430 (referred to as a second spline shaft 430) connected to a rotation shaft of the turning motor 410 via a coupling 420. The main driving pulley 440 attached to the second spline shaft 430, the driven pulley 460 that rotates by receiving the rotational force of the main driving pulley 440 via the timing belt 450, and the rotational force of the driven pulley 460 that rotates. And a first pulley 480 that is provided at the tip of the cylindrical rotating body 470 and rotates together with the cylindrical rotating body 470. The turning motor 410 is fixed to a first stage 530 (not shown in FIG. 4) (see FIG. 1).

  The first pulley 480 has a ring shape, and the first spline shaft 350 of the telescopic mechanism 300 passes through the center of the inner space. The first pulley 480 is not connected to the first arm 110 and the first spline shaft 350.

  The turning mechanism unit 400 configured as described above rotates the turning motor 410 so that the rotational force is applied to the cylindrical rotating body 470 via the second spline shaft 430, the main driving pulley 440, the timing belt 450, and the driven pulley 460. The first pulley 480 transmitted to the tip of the cylindrical rotating body 470 is rotated. When the turning mechanism unit 400 performs the turning operation of the arm mechanism unit 100, the turning motor 410 and the telescopic motor 310 are controlled to be driven in synchronization (hereinafter referred to as motion control). The arm mechanism 100 can be turned. This motion control will be described later.

  FIG. 5 is a diagram illustrating the configuration of the arm mechanism unit 100 in detail. In FIG. 5, the same parts as those in FIGS. FIG. 5 shows a state in which the arm covers 110a and 120a of the arm mechanism unit 100 in FIGS. 1 to 3 are removed.

  In FIG. 5, the rear end side of the first arm 110 is connected to the first spline shaft 350, and receives the rotational force of the first spline shaft 350 and rotates. Further, on the rear end side of the first arm 110, there is a first pulley 480 fixed to the front end side of the cylindrical rotating body 470 in the turning mechanism unit 400. The first pulley 480 is not directly connected to the first arm 110, and is in a reverse rotation state relative to the rotation of the first arm 110 when the first arm 110 rotates. Therefore, the first pulley 480 is hereinafter referred to as a first relative rotation pulley 480.

  On the other hand, a second pulley 140 having a smaller diameter than the first relative rotation pulley 480 is provided on the distal end side of the first arm 110. The second pulley 140 rotates by receiving the rotational force of the first relative rotation pulley 480 via the interlocking belt 150, and is hereinafter referred to as the first interlocking pulley 140. The first interlocking pulley 140 is rotatably supported with respect to the front end side of the first arm 110 and is fixed to the rear end side of the second arm 120. As a result, the rotational force of the first relative rotation pulley 480 is transmitted to the second arm 120 via the interlocking belt 150, and the second arm 120 rotates about the rotation axis of the first interlocking pulley 140. .

  A third pulley 160 fixed to the first arm 110 is attached to the rear end side of the second arm 120, and a fourth diameter larger than that of the third pulley 160 is attached to the front end side of the second arm 120. A pulley 170 is rotatably attached to the second arm 120. The third pulley 160 is not directly connected to the second arm 120, and is in a reverse rotation state relative to the rotation of the second arm 120 when the second arm 120 rotates. Therefore, the third pulley is hereinafter referred to as a second relative rotation pulley 160.

  Further, the fourth pulley 170 rotates by receiving the rotational force of the second relative rotation pulley 160 via the interlock belt 180, and is hereinafter referred to as a second interlock pulley 170. The second interlocking pulley 170 is fixed to the rear end side of the hand 130 and transmits its rotational force to the hand 130.

  Since the configuration and operation of the arm mechanism unit 100 are known, the operation will be briefly described here. First, when the telescopic motor 310 is driven, the driving force is transmitted to the first arm 110 via the first spline shaft 350, and the first arm 110 is, for example, counterclockwise (arrow y ′ direction) on the horizontal plane. ) Is rotated by a predetermined angle. Due to the counterclockwise rotation of the first arm 110, the first relative rotation pulley 480 (the turning motor 410 is in a non-driven state at this time) rotates in the reverse direction relative to the rotation of the first arm 110. It becomes a state. That is, the first relative rotation pulley 480 rotates in the clockwise direction (arrow y direction) relative to the counterclockwise rotation of the first arm 110.

  The relative rotation of the first relative rotation pulley 480 in the clockwise direction is transmitted to the first interlocking pulley 140 via the interlocking belt 150, and the first interlocking pulley 140 also rotates in the clockwise direction. When the first interlocking pulley 140 rotates in the clockwise direction, the second arm 120 also rotates in the clockwise direction (arrow y direction). When the second arm 120 rotates in the clockwise direction, the second relative rotation pulley 160 is in a reverse rotation state relative to the rotation of the second arm 120. That is, the second relative rotation pulley 160 rotates in the counterclockwise direction (arrow y ′ direction) relative to the clockwise rotation of the second arm 120.

  The relative rotation of the second relative rotation pulley 160 in the counterclockwise direction is transmitted to the second interlocking pulley 170 via the interlocking belt 180, and the second interlocking pulley 170 also rotates in the counterclockwise direction (arrow y ′ direction). To do. As a result, the hand 130 fixed to the second interlocking pulley 170 rotates counterclockwise (arrow y ′ direction).

  Here, on the first arm 110 side, the ratio of the effective diameter of the first relative rotation pulley 480 and the effective diameter of the first interlocking pulley 140 is set to, for example, 2 to 1, and on the second arm 120 side, Assume that the ratio of the effective diameter of the second relative rotation pulley 160 and the effective diameter of the second interlocking pulley 170 is set to, for example, 1: 2. As a result, the second arm 120 rotates in the direction opposite to the rotation direction of the first arm 110 by an angle twice as large as the rotation angle of the first arm 110, and the hand 130 is 1 / of the rotation angle of the second arm 120. The second arm 120 rotates in the direction opposite to the rotation direction by an angle of 2. For this reason, the hand 130 performs an extending operation in a direction away from the center of the rotation axis (first spline shaft 350) of the first arm in accordance with the rotation operation of the first arm 110 and the second arm 120 as described above. .

  Then, if the first arm 110 is further rotated counterclockwise or clockwise from the state in which the first arm 110, the second arm 120 and the hand 130 are extended to the maximum, the first arm 110, The second arm 120 and the hand 130 operate so that each is folded.

  The above is the expansion / contraction operation of the arm mechanism unit 100. The rotation operation of the arm mechanism unit 100 is a control in which the rotation motor 410 of the rotation mechanism unit 400 and the expansion / contraction motor 310 of the expansion mechanism unit 300 are driven synchronously ( This is possible by performing motion control. Motion control is control for enabling the entire arm mechanism unit 100 to turn on a horizontal plane in a state where the first arm 110, the second arm 120, and the hand 130 hold a predetermined angle.

  For example, consider a case where the entire arm mechanism unit 100 is turned counterclockwise. In this case, if the first spline shaft 350 is rotated counterclockwise by the telescopic motor 310, the first arm 110 rotates counterclockwise. However, the driving of the telescopic motor 310 alone has been described with reference to FIG. As described above, the arm mechanism 100 is expanded and contracted.

  Therefore, control is performed to drive the turning motor 410 so that the first relative rotation pulley 480 is rotated in the same direction as the rotation direction of the first arm 110 and the same rotation speed. By performing such control, the entire arm mechanism unit 100 can be turned counterclockwise on the horizontal plane while the first arm 110, the second arm 120, and the hand 130 hold a predetermined angle. In addition, it can implement similarly when turning clockwise.

  FIG. 6 is a view of FIG. 1 as viewed obliquely from above for explaining an example of the operation of the arm mechanism unit 100. 6 (a) to 6 (c), FIGS. 6 (a) and 6 (b) are diagrams showing a turning operation of the arm mechanism unit 100, and FIG. Position). The state where the arm mechanism unit 100 is rotated 180 degrees from the position of the home position shown in FIG. 6A while maintaining the angles of the first arm 110, the second arm 120 and the hand 130 of the arm mechanism unit 100. It is FIG.6 (b). When performing a turning operation, as described above, motion control is performed in which the turning motor 410 and the expansion / contraction motor 310 are driven in synchronization.

  FIG. 6C is a diagram illustrating a state in which the arm mechanism unit 100 is extended by the expansion / contraction mechanism unit 300, and the extension operation of such an arm mechanism can be performed by the operation described with reference to FIG. . FIG. 6C shows a state where the arm mechanism unit 100 is slightly raised from the state of FIGS. 6A and 6B. The operation of raising and lowering the arm mechanism unit 100 in this way can be performed by the elevation mechanism unit 200.

  The lifting / lowering operation of the arm mechanism 100 by the lifting / lowering mechanism 200 can be performed by driving the lifting / lowering motor 220. That is, when the elevating motor 220 is driven, the ball screw 240 rotates, and thereby the elevating board 260 moves upward or downward. Since the arm mechanism holding unit 210 is attached to the elevator plate 260, the arm mechanism unit 100 also moves up and down as the elevator plate 260 moves up and down.

  When the arm mechanism unit 100 moves up and down by the lift board 260, the first spline shaft 350 in the telescopic mechanism unit 300 and the second spline shaft 430 in the turning mechanism unit 400 slide in the vertical direction. For this reason, even if the expansion / contraction motor 310 of the expansion / contraction mechanism unit 300 and the rotation motor 410 of the rotation mechanism unit 400 are fixed to the fixed frame 500, the expansion / contraction motor 310 has a position where the arm mechanism unit 100 is moved up and down. The driving force can be transmitted to the first arm 110, and the driving force of the turning motor 410 can be transmitted to the first pulley 480 (first relative rotation pulley 480).

  As described above, in the workpiece transfer robot according to the embodiment of the present invention, not only the lifting motor 220 but also the telescopic motor 310 and the turning motor 410 are fixed to the fixed frame 500. As a result, the positions of the telescopic motor 310 and the turning motor 410 do not change even when the arm mechanism unit 100 moves up and down or expands and contracts by driving a motor other than itself. Therefore, the wiring cables of the telescopic motor 310 and the turning motor 410 are not deformed such as bending or twisting, and the contact failure or disconnection of the wiring cable can be prevented.

  Further, since the wiring cables of the telescopic motor 310 and the turning motor 410 are not bent or twisted, the arm mechanism unit 100 is turned endlessly by 360 degrees clockwise or counterclockwise. Is also possible. In this way, the arm mechanism 100 can be turned endlessly by 360 degrees or more in the clockwise direction and in the counterclockwise direction, thereby improving the work transfer efficiency.

  For example, when the arm mechanism unit 100 is now at a position (current position) that is rotated 340 degrees counterclockwise from the home position position, the hand 130 is to be returned from the current position to the home position. think of. In this case, if the arm mechanism unit 100 cannot rotate 360 degrees or more, the arm mechanism unit 100 needs to be rotated clockwise by 340 degrees to return to the home position. On the other hand, if the arm mechanism unit 100 can be rotated endlessly by 360 degrees or more, it can be easily returned to the home position by rotating it 20 degrees counterclockwise as it is from the current position. As described above, when the arm mechanism unit 100 can be rotated endlessly by 360 degrees or more, it can be efficiently transferred to a desired position.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the workpiece transfer robot used for transferring the semiconductor wafer has been described. However, the present invention is not limited to this, and the present invention can be applied to any workpiece transfer robot that can move up and down, turn, and extend. Can be applied.

It is a perspective view which shows the external appearance structure of the robot for workpiece conveyance which concerns on embodiment of this invention. It is a figure which takes out and shows the principal part of FIG. 1 in order to demonstrate the structure of the raising / lowering mechanism part 200. FIG. FIG. 2 is a diagram showing an essential part of FIG. 1 taken out in order to explain the configuration of the telescopic mechanism 300. FIG. 2 is a diagram showing an essential part of FIG. 1 taken out in order to explain the configuration of a turning mechanism part 400; FIG. 2 is a diagram showing the configuration of an arm mechanism unit 100 in detail. FIG. 2 is a view of FIG. 1 as viewed obliquely from above for explaining an example of the operation of the arm mechanism section 100. FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Robot for workpiece conveyance, 100 ... Arm mechanism part, 110 ... 1st arm, 120 ... 2nd arm, 110a, 120a ... Arm cover, 130 ... Hand, 140 .... Second pulley (first interlocking pulley), 150, 180 ... interlocking belt, 160 ... third pulley (second relative rotating pulley), 170 ... fourth pulley (second interlocking pulley), DESCRIPTION OF SYMBOLS 200 ... Lifting mechanism part, 210 ... Arm mechanism holding part, 220 ... Lifting motor, 240 ... Ball screw, 250 ... Ball nut, 260 ... Lifting board, 300 ... Expansion / contraction Mechanism part, 310 ... telescopic motor, 340, 450 ... timing belt, 350 ... first spline shaft, 400 ... turning mechanism part, 410 ... turning motor, 430 ... first 2 supra 470 ... Cylinder rotator, 480 ... first pulley (first relative rotation pulley), 500 ... fixed frame, 530 ... first stage, 540 ... post, 550 ...・ Second stage

Claims (1)

An arm mechanism having a plurality of arms connected in multiple stages and a hand for holding a workpiece; an elevating mechanism for elevating the arm mechanism vertically; and for extending and retracting the arm mechanism on a horizontal plane. Work mechanism having a telescopic mechanism part, a turning mechanism part for turning the arm mechanism part on a horizontal plane, and a fixed frame that supports the arm mechanism part, a lifting mechanism part, a telescopic mechanism part, and a turning mechanism part. Robot,
The elevating mechanism unit includes an elevating motor fixed to the fixed frame, and an elevating plate to which the arm mechanism unit is attached and which moves up and down in a vertical direction by a driving force of the elevating motor,
The expansion / contraction mechanism has an expansion / contraction motor fixed to the fixed frame, and a first spline shaft that transmits a driving force of the expansion / contraction motor to the arm mechanism.
The turning mechanism unit, possess a turning motor which is fixed to the fixed frame, and a second spline shaft for transmitting the driving force of the turning motor to the arm mechanism,
The plurality of arms are composed of two arms. Of the two arms, the arm on the fixed frame side is a first arm, the arm on the hand side is a second arm, and each arm of the first arm and the second arm When the fixed frame side is the rear end side of the arm and the hand side is the front end side of the arm,
The rear end side of the first arm is rotated by receiving the driving force of the turning motor through a second spline shaft, and is relatively relative to the rotation of the first arm when the first arm rotates. A first pulley that is in a reverse rotation state, and the first spline shaft that is connected to the first arm by sharing the central axis with the first pulley;
A second pulley that rotates in conjunction with the first pulley and transmits the rotational force to the rear end side of the second arm to rotate the second arm is provided on the front end side of the first arm,
On the rear end side of the second arm, a third pulley is provided which shares a central axis with the second pulley and is in a reverse rotation state relative to the rotation of the second arm,
A fourth pulley that rotates the hand in conjunction with the third pulley is provided on the tip side of the second arm,
When the first arm rotates by a predetermined angle in a predetermined direction by the rotation of the first spline shaft, the second arm rotates by a predetermined angle in the opposite direction to the first arm, and the second arm predetermined by the predetermined direction. The first arm, the second arm, and the hand perform expansion and contraction operations on a horizontal plane by performing an operation in which the hand rotates by a predetermined angle in a direction opposite to the second arm by rotating by an angle,
When the turning mechanism performs a turning operation, the turning motor is driven and the driving force is transmitted to the first pulley via the second spline shaft so that the first pulley is moved in a predetermined direction. While rotating, the expansion / contraction motor is driven in synchronization with the turning motor, the driving force is transmitted to the first arm via the first spline shaft, and the first arm is transmitted to the first arm. A workpiece transfer robot that rotates in the same direction as a pulley .