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JP5084162B2 - Complex building - Google Patents
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JP5084162B2 - Complex building - Google Patents

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JP5084162B2
JP5084162B2 JP2006081189A JP2006081189A JP5084162B2 JP 5084162 B2 JP5084162 B2 JP 5084162B2 JP 2006081189 A JP2006081189 A JP 2006081189A JP 2006081189 A JP2006081189 A JP 2006081189A JP 5084162 B2 JP5084162 B2 JP 5084162B2
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building
vibration
aversion
seismic isolation
vibration source
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JP2007255071A (en
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久義 石橋
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Kumagai Gumi Co Ltd
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Description

本発明は振動源建物と振動嫌建物とを備えた複合建物の振動対策に関する。   The present invention relates to a vibration countermeasure for a complex building including a vibration source building and a vibration disagreeable building.

振動絶縁構成を備えた複合建物が知られている。即ち、振動を発する機械のような振動発生源が設置されるユーティリテイエリアの床を備えた振動源建物としての外部支持構造体と、半導体製造装置のような振動を嫌う嫌振機械が設置されるプロセスエリアの床を備えた振動嫌建物としての内部支持構造体とが同一の基礎上に設けられ、内部支持構造体と外部支持構造体とが互いに離された構造(特許文献1の図1及びその説明)を備えた複合建物としてのクリーンルーム建築物が知られている。しかしながら、このクリーンルーム建築物では、内部支持構造体と外部支持構造体とが同一の基礎の上に建てられているので、ユーティリテイエリアの振動が基礎を経由してプロセスエリアに伝達されてしまうという問題がある。この問題を解消するために上記内部支持構造体及びその基礎と上記外部支持構造体及びその基礎とが互いに分離された構造(特許文献1の図2;図3及びその説明)のクリーンルーム建築物が知られている。しかしながら、このクリーンルーム建築物では、地震の際に、内部支持構造体と外部支持構造体とがそれぞれ異なる方向に揺れ動くので、内部支持構造体と外部支持構造体とに繋がるように設けられたダクトや配管などの管が破壊されてしまうという課題があった。
即ち、図11に示すように、免震装置5aを備えた振動源建物3と振動嫌建物2とが一体の建物として形成され、ダクトや配管などの管3cが振動源建物3と振動嫌建物2とに繋がるように設けられている複合建物1Aの場合、振動源建物3の機械室3bに設けられた設備機械3aで発生した振動が振動嫌建物2の生産室2b内に設置された生産機械2aに伝達されてしまって半導体製品製造に悪影響を及ぼす。
そこで、振動源建物3から振動嫌建物2への振動の伝播を遮断するために、図11の振動源建物3と振動嫌建物2とを互いに離し、振動源建物3と振動嫌建物2とに繋がるように管3cを設置した複合建物(図示せず)とすることが考えられるが、この場合、地震などの際に、振動源建物3と振動嫌建物2とがそれぞれ異なる方向に揺れ動くので、管3cが破壊されやすくなってしまう。
特開平11−311036号公報
Complex buildings with vibration isolation configurations are known. That is, an external support structure as a vibration source building having a floor of a utility area in which a vibration generation source such as a machine that generates vibration is installed, and a vibration isolation machine that hates vibration such as a semiconductor manufacturing apparatus are installed. An internal support structure as a vibration aversion building having a floor in the process area is provided on the same foundation, and the internal support structure and the external support structure are separated from each other (see FIG. A clean room building is known as a complex building with the explanation. However, in this clean room building, the internal support structure and the external support structure are built on the same foundation, so that the vibration of the utility area is transmitted to the process area via the foundation. There is. In order to solve this problem, a clean room building having a structure in which the inner support structure and its foundation and the outer support structure and its foundation are separated from each other (FIG. 2 of Patent Document 1; FIG. 3 and the description thereof). Are known. However, in this clean room building, the internal support structure and the external support structure swing in different directions in the event of an earthquake, so there are ducts provided to connect the internal support structure and the external support structure. There existed a subject that pipes, such as piping, were destroyed.
That is, as shown in FIG. 11, the vibration source building 3 provided with the seismic isolation device 5a and the vibration aversion building 2 are formed as an integral building, and a pipe 3c such as a duct or a pipe is formed in the vibration source building 3 and the vibration aversion building. In the case of the complex building 1A provided so as to be connected to 2, the vibration generated in the equipment machine 3a provided in the machine room 3b of the vibration source building 3 is installed in the production room 2b of the vibration-averse building 2 It is transmitted to the machine 2a and adversely affects semiconductor product manufacturing.
Therefore, in order to block the propagation of vibration from the vibration source building 3 to the vibration aversion building 2, the vibration source building 3 and the vibration aversion building 2 in FIG. It can be considered to be a complex building (not shown) in which the pipe 3c is installed so as to be connected, but in this case, the vibration source building 3 and the vibration aversion building 2 swing in different directions in the event of an earthquake, The tube 3c is easily broken.
Japanese Patent Laid-Open No. 11-311036

発明が解決しようとする課題は、振動源建物と振動嫌建物とが一体とされた従来の複合建物では、振動源建物からの振動が振動嫌建物に伝達してしまって半導体製品製造などの生産性に悪影響を及ぼし、また、振動源建物と振動嫌建物とを互いに離した複合建物とした場合には、地震の際に振動源建物と振動嫌建物とがそれぞれ異なる方向に揺れ動くので、振動源建物と振動嫌建物とに繋がるように設置されたダクトや配管などの管が破壊されやすいという点にある。   The problem to be solved by the invention is that, in a conventional complex building in which a vibration source building and a vibration aversion building are integrated, the vibration from the vibration source building is transmitted to the vibration aversion building and the production of semiconductor products, etc. In the case of a composite building in which the vibration source building and the vibration aversion building are separated from each other, the vibration source building and the vibration aversion building swing in different directions during an earthquake. This is because pipes such as ducts and pipes installed so as to be connected to the building and the vibration-averse building are easily destroyed.

本発明の複合建物は、振動を嫌う装置を備えた振動嫌建物と振動発生源を備えた振動源建物とが互いに離され、これら建物同士が連結装置によって互いに連結され、連結装置が、上下方向に延長する孔を有した雌部材と、孔の内径よりも小さい外径の棒体を有した雄部材と、雌部材の孔の内周面と孔の内側に挿入された雄部材の棒体の外周面との間に設けられて振動源建物から振動嫌建物への振動伝達を遮断する振動遮断部を形成するゴムとを備え、雌部材が振動嫌建物又は振動源建物の一方に取付けられ、雄部材が他方に取付けられたことにより、振動源建物から振動嫌建物への振動伝達が防止され、かつ、地震の際には、振動源建物と振動嫌建物とが同一の方向に同じ変位で揺れるように構成されたことを特徴とする
動嫌建物の下部と振動源建物の下部とが連結装置によって互いに連結されたことも特徴とする。
振動嫌建物の上部と振動源建物の上部とが連結装置によって互いに連結されたことも特徴とする。
振動嫌建物と振動源建物とがそれぞれ個別に免震装置を備えたことも特徴とする
Composite building of the present invention is separated and vibration source building with vibration unpleasant building as vibration generating source with a device hating vibration each other, are connected to each other by these building each other connecting device, connecting device, the vertical direction A female member having a hole extending in the hole, a male member having a rod body having an outer diameter smaller than the inner diameter of the hole, and a rod body of the male member inserted into the inner peripheral surface of the hole of the female member and the inside of the hole And a rubber that forms a vibration blocking part that blocks vibration transmission from the vibration source building to the vibration disabling building, and the female member is attached to one of the vibration disabling building or the vibration source building. Because the male member is attached to the other, vibration transmission from the vibration source building to the vibration aversion building is prevented, and in the event of an earthquake, the vibration source building and the vibration aversion building are displaced in the same direction in the same direction. It is characterized by being configured to sway .
A lower portion of the vibration unpleasant buildings and bottom of the vibration source building also characterized in that connected to each other by a connecting device.
The upper part of the vibration-averse building and the upper part of the vibration source building are connected to each other by a connecting device.
It is also characterized in that the vibration aversion building and the vibration source building are each provided with a seismic isolation device .

本発明の複合建物は、振動源建物と振動嫌建物とが連結装置によって互いに連結されたので、振動源建物で発生した振動が連結装置によって遮断されて振動嫌建物に伝達されず、振動嫌建物での振動による悪影響を防止できる。また、地震などの際には、連結装置で連結された振動源建物と振動嫌建物とが同一の方向に同じ変位で揺れるために、振動源建物と振動嫌建物との相対変位を小さくできて、振動源建物と振動嫌建物とに繋がれた管の損傷や破壊を防止できる。
連結装置の振動遮断部をゴムにより形成したので、振動源建物で発生した振動がゴムにより減衰するので、振動源建物で発生した振動を遮断でき、地震などの際には、ゴムにより振動源建物と振動嫌建物とが同一の方向に同じ変位で揺れるために、振動源建物と振動嫌建物との相対変位を小さくできる。
振動嫌建物の下部と振動源建物の下部とを連結装置で互いに連結したことにより、複合建物の下部層での振動嫌建物及び振動源建物の変位を小さくできて、複合建物の上部層での振動嫌建物と振動源建物との相対変位を小さくできる。
振動嫌建物の下部と振動源建物の下部とを連結装置で互いに連結するとともに、振動嫌建物の上部と振動源建物の上部とを連結装置で互いに連結したことによって、複合建物の振動嫌建物と振動源建物との相対変位をより小さくできる。
振動嫌建物と振動源建物とがそれぞれ個別に免震装置を備えたことにより、地震の際の複合建物や機械などの損傷を小さくでき、地震の際の生産停止被害の回避、生産ラインの早期復旧が可能となる
In the composite building of the present invention, the vibration source building and the vibration aversion building are connected to each other by the connecting device. Therefore, the vibration generated in the vibration source building is blocked by the connection device and is not transmitted to the vibration aversion building. Can prevent adverse effects due to vibrations in In addition, in the event of an earthquake, the vibration source building and the vibration negative building that are connected by the connecting device shake in the same direction with the same displacement, so the relative displacement between the vibration source building and the vibration negative building can be reduced. It is possible to prevent damage and destruction of the pipes connected to the vibration source building and the vibration dislike building.
Since the vibration isolation part of the coupling device is made of rubber, the vibration generated in the vibration source building is attenuated by the rubber, so that the vibration generated in the vibration source building can be cut off. Therefore, the relative displacement between the vibration source building and the vibration aversion building can be reduced.
By connecting the lower part of the vibration aversion building and the lower part of the vibration source building with a connecting device, the displacement of the vibration aversion building and the vibration source building in the lower layer of the composite building can be reduced. The relative displacement between the vibration-averse building and the vibration source building can be reduced.
By connecting the lower part of the vibration aversion building and the lower part of the vibration source building to each other by a connecting device, and connecting the upper part of the vibration aversion building and the upper part of the vibration source building to each other by a connecting device, The relative displacement with the vibration source building can be made smaller.
The seismic isolation equipment for the vibration-averse building and the vibration source building, respectively, can reduce damage to complex buildings and machines during an earthquake, avoid production stoppage damage during an earthquake, and early production lines Recovery is possible .

図1乃至図10は最良の形態を示す。図1は複合建物の構造を示す。図2は連結装置の連結状態を縦断面で示す。図3は連結装置の連結状態の外観を斜めから見て示す。図4(a)は連結装置の連結状態の外観を側面から見て示し、図4(b)は図4(a)のa−a断面を示す。図5は免震ゴム装置5Aを縦断面で示す。図6はすべり支承装置を縦断面で示す。図7はオイルダンパー装置を縦断面で示す。図8はすべり支承装置及びオイルダンパー装置の特性を示す。図9、図10は連結装置の設置例を示す。   1 to 10 show the best mode. FIG. 1 shows the structure of a complex building. FIG. 2 shows a connected state of the connecting device in a longitudinal section. FIG. 3 shows the appearance of the connected state of the connecting device as seen from an oblique direction. FIG. 4A shows the appearance of the connecting device in a connected state as seen from the side, and FIG. 4B shows a cross section taken along the line aa in FIG. FIG. 5 shows the seismic isolation rubber device 5A in a longitudinal section. FIG. 6 shows a sliding bearing device in longitudinal section. FIG. 7 shows the oil damper device in a longitudinal section. FIG. 8 shows the characteristics of the sliding bearing device and the oil damper device. 9 and 10 show examples of installing the coupling device.

図1を参照し、複合建物1を説明する。複合建物1は、振動を嫌う装置を備えた振動嫌建物2と振動発生源を備えた振動源建物3とが互いに離され、これら建物の下部同士が連結装置4によって互いに連結され、振動嫌建物2と振動源建物3とがそれぞれ個別に免震装置5を備えた構成である。免震装置5としては、免震ゴム装置5A、すべり支承装置5B、減衰装置としてのオイルダンパー装置5Cを備える。   The composite building 1 will be described with reference to FIG. In the composite building 1, the vibration disagreement building 2 having a device that dislikes vibration and the vibration source building 3 having a vibration generating source are separated from each other, and the lower portions of these buildings are connected to each other by a connecting device 4. 2 and the vibration source building 3 are each provided with a seismic isolation device 5 individually. The seismic isolation device 5 includes a seismic isolation rubber device 5A, a sliding support device 5B, and an oil damper device 5C as a damping device.

図1では、複合建物1としての半導体製品製造工場を例にして説明する。振動嫌建物2は、半導体製品製造のための露光装置や検査装置などの振動を嫌う装置としての生産機械2aが設置されたクリーンルームのような生産室2bを備えた建物である。振動源建物3は、空調設備や、水供給設備や、ガス供給設備や、薬品供給設備などの振動発生源となる設備機械3aが設置された機械室3bを備えた建物である。ダクトや配管などの管3cは、振動源建物3の設備機械3aから振動嫌建物2の生産室2bへと延長して設備機械3aと生産室2bとに繋がれる。   In FIG. 1, a semiconductor product manufacturing factory as the complex building 1 will be described as an example. The vibration disgusting building 2 is a building including a production room 2b such as a clean room in which a production machine 2a is installed as an apparatus that dislikes vibration such as an exposure apparatus and an inspection apparatus for manufacturing semiconductor products. The vibration source building 3 is a building including a machine room 3b in which equipment machines 3a serving as vibration generation sources such as air conditioning equipment, water supply equipment, gas supply equipment, and chemical supply equipment are installed. A pipe 3c such as a duct or a pipe is extended from the equipment machine 3a of the vibration source building 3 to the production room 2b of the vibration negative building 2 and connected to the equipment machine 3a and the production room 2b.

基礎杭1xの上には免震ピット1yが形成され、免震ピット1yの免震ピット基礎6の上には免震部1zが形成される。免震部1zは、複合建物1の下面1aに形成された免震上部基礎部14と、免震ピット基礎6の上に形成された免震下部基礎部16と、免震上部基礎部14と免震下部基礎部16との間に設けられた免震装置5としての免震ゴム装置5Aとにより形成されたり、あるいは、免震上部基礎33と、免震下部基礎31と、免震上部基礎33と免震下部基礎31との間に設けられた免震装置5としてのすべり支承装置5Bとにより形成されたり、あるいは、複合建物1の下面1aと、免震ピット基礎6と、複合建物1の下面1aと免震ピット基礎6との間に設けられた免震装置5としてのオイルダンパー装置5Cとにより形成される。   A base isolation pit 1y is formed on the foundation pile 1x, and a base isolation part 1z is formed on the base isolation pit foundation 6 of the base isolation pit 1y. The seismic isolation portion 1z includes a base isolation base portion 14 formed on the lower surface 1a of the composite building 1, a base isolation base portion 16 formed on the base isolation pit base 6, and a base isolation base portion 14 It is formed by the seismic isolation rubber device 5A as the seismic isolation device 5 provided between the base isolation base 16 or the base isolation base 33, the base isolation 31 and the base isolation base 33 is formed by a sliding support device 5B as a seismic isolation device 5 provided between the seismic isolation lower foundation 31, or the lower surface 1a of the composite building 1, the seismic isolation pit foundation 6, and the composite building 1 The oil damper device 5 </ b> C as the seismic isolation device 5 provided between the lower surface 1 a and the seismic isolation pit foundation 6 is formed.

図2乃至図4を参照し、連結装置4を説明する。連結装置4は、互いに嵌め合わされる雄部材4a及び雌部材4bにより形成される。
雄部材4aは、取付部4cと腕部4dとピン部4eとを備える。ピン部4eは腕部4dの先端部に設けられる。取付部4cは振動源建物3の免震上部基礎部14の側面14fにアンカーボルトのような取付具14gによって取付けられる。取付部4cが振動源建物3の免震上部基礎部14の側面14fに取付けられた状態において、腕部4dが水平に延長し、ピン部4eが腕部4dの先端部の下面4rより下方に垂直に延長して突出する。
雌部材4bは、取付部4gと腕部4hと孔部4iとゴム4jとを備える。孔部4iは腕部4hの先端部に設けられる。取付部4gは振動嫌建物2の免震上部基礎部14の側面14fにアンカーボルトのような取付具14gによって取付けられる。取付部4gが振動嫌建物2の免震上部基礎部14の側面14fに取付けられた状態において、腕部4hが水平に延長し、孔部4iは孔4kが上下に垂直に延長する筒状である。ピン部4eは、雌部材4bに形成された孔4kの内径よりも小さい外径の棒体により形成される。ゴム4jは、孔部4iの孔4kの直径と同じ外径でピン部4eの直径と同じ内径に形成された筒状である。ゴム4jの筒の外周面と孔部4iの孔4kの内周面とが互いに嵌め合わされた状態で互いに接着剤で接着されることによって、ピン嵌合部4mが形成され、ゴム4jによる振動遮断部が形成される。ピン部4eは腕部4dの先端部に設けられる。ゴム4jの厚さ(ゴム4jの筒の外周面と内周面との間の厚さ)は、振動源建物3で発生する微細な機械振動(変位振幅1mm以下)を遮断可能な厚さ(数mm程度)に形成される。
The connecting device 4 will be described with reference to FIGS. The coupling device 4 is formed by a male member 4a and a female member 4b that are fitted together.
The male member 4a includes a mounting portion 4c, an arm portion 4d, and a pin portion 4e. The pin part 4e is provided in the front-end | tip part of the arm part 4d. The attachment portion 4c is attached to the side surface 14f of the seismic isolation upper base portion 14 of the vibration source building 3 with an attachment 14g such as an anchor bolt. In a state where the attachment portion 4c is attached to the side surface 14f of the seismic isolation upper base portion 14 of the vibration source building 3, the arm portion 4d extends horizontally, and the pin portion 4e is below the lower surface 4r of the distal end portion of the arm portion 4d. It extends vertically and protrudes.
The female member 4b includes a mounting portion 4g, an arm portion 4h, a hole portion 4i, and a rubber 4j. The hole 4i is provided at the tip of the arm 4h. The attachment portion 4g is attached to the side surface 14f of the seismic isolation upper base portion 14 of the vibration aversion building 2 by an attachment tool 14g such as an anchor bolt. In a state where the mounting portion 4g is attached to the side surface 14f of the seismic isolation upper base portion 14 of the vibration aversion building 2, the arm portion 4h extends horizontally, and the hole portion 4i has a cylindrical shape in which the hole 4k extends vertically. is there. The pin portion 4e is formed by a rod body having an outer diameter smaller than the inner diameter of the hole 4k formed in the female member 4b. The rubber 4j has a cylindrical shape formed with the same outer diameter as the diameter of the hole 4k of the hole 4i and the same inner diameter as the diameter of the pin 4e. The outer peripheral surface of the cylinder of the rubber 4j and the inner peripheral surface of the hole 4k of the hole portion 4i are bonded to each other with an adhesive, thereby forming a pin fitting portion 4m, and vibration isolation by the rubber 4j Part is formed. The pin part 4e is provided in the front-end | tip part of the arm part 4d. The thickness of the rubber 4j (thickness between the outer peripheral surface and the inner peripheral surface of the cylinder of the rubber 4j) is a thickness that can block fine mechanical vibration (displacement amplitude of 1 mm or less) generated in the vibration source building 3 ( About several mm).

連結装置4による連結方法を説明する。雌部材4bを振動嫌建物2に取付け、ピン嵌合部4mの上方からピン嵌合部4mのゴム4jの内側に雄部材4aのピン部4eを嵌め込み、孔部4iの上面4pと腕部4hの下面4rとを離した状態で、雄部材4aを振動源建物3に取付けることによって、振動源建物3と振動嫌建物2とが連結装置4によって互いに連結される。   A connection method by the connection device 4 will be described. The female member 4b is attached to the vibration avoiding building 2, the pin portion 4e of the male member 4a is fitted inside the rubber 4j of the pin fitting portion 4m from above the pin fitting portion 4m, and the upper surface 4p and the arm portion 4h of the hole portion 4i. The vibration source building 3 and the vibration disagreement building 2 are connected to each other by the connecting device 4 by attaching the male member 4a to the vibration source building 3 in a state where the lower surface 4r is separated.

振動源建物3と振動嫌建物2とが連結装置4によって互いに連結されたことによって、振動源建物3で発生した振動が振動遮断部としてのゴム4jにより減衰され、振動源建物3から振動嫌建物2への振動伝達を防止できるので、生産機械2aによる半導体生産への悪影響を防止できる。即ち、振動嫌建物2において良好な生産環境を維持できて生産性が向上する。また、地震などの際には、連結装置4で互いに連結された振動源建物3と振動嫌建物2とが連結装置4によって同一の方向に同じ変位で揺れるために、振動源建物3と振動嫌建物2との相対変位を小さくできる。このため、振動源建物3の設備機械3aと振動嫌建物2の生産室2b内とを繋ぐように振動源建物3と振動嫌建物2とに固定されたダクトや配管などの管3cの損傷や破壊を防止できる。また、雄部材4aのピン部4eをゴム4jの内側に嵌め込む構成としたので、ゴム4jで雄部材4aや雌部材4bの製造寸法誤差などを吸収でき、製造寸法誤差があっても雄部材4aや雌部材4bを容易に取付け可能となる。   When the vibration source building 3 and the vibration disagreement building 2 are connected to each other by the connecting device 4, the vibration generated in the vibration source building 3 is attenuated by the rubber 4 j as a vibration blocking unit, and the vibration source building 3 Since vibration transmission to 2 can be prevented, adverse effects on semiconductor production by the production machine 2a can be prevented. That is, a favorable production environment can be maintained in the vibration-averse building 2 and productivity is improved. Further, in the event of an earthquake or the like, the vibration source building 3 and the vibration disagreement building 2 connected to each other by the connecting device 4 are shaken with the same displacement in the same direction by the connecting device 4. The relative displacement with the building 2 can be reduced. For this reason, damage to pipes 3c such as ducts and pipes fixed to the vibration source building 3 and the vibration aversion building 2 so as to connect the equipment machine 3a of the vibration source building 3 and the production room 2b of the vibration aversion building 2 Destruction can be prevented. Further, since the pin portion 4e of the male member 4a is fitted inside the rubber 4j, the rubber 4j can absorb the manufacturing dimensional error of the male member 4a and the female member 4b, and the male member even if there is a manufacturing dimensional error. 4a and the female member 4b can be easily attached.

図5を参照し、免震装置5としての免震ゴム装置5Aを説明する。免震ゴム装置5Aは、例えばゴム9と鋼板10とが交互に多数枚積層されてこれらが接着により互いに連結された積層体11と、積層体11の上面に図外のボルト等の固定材で取付けられた上部フランジ12と、積層体11の下面に図外のボルト等の固定材で積層体11の下面に取付けられた下部フランジ13とを備える。ゴム9は天然系ゴムにより形成される。複合建物1の下面1aに形成される免震上部基礎部14の下面には上部フランジ12を連結可能とする上部ベース15が取付けられ、免震ピット基礎6上に形成された免震下部基礎部16の上面には下部フランジ13を連結可能とする下部ベース17が取付けられる。上部ベース15と下部ベース17は、金属袋体の内側に雌ねじの形成された複数の袋ナット部18及びスタッドボルト19を金属製の平板に設けたものである。免震上部基礎部14の下面への上部ベース15の取付けは以下の通りである。まず、平板に形成された図外のボルト貫通孔の位置に合わせて袋ナット部18を所定の数だけ溶接等の結合手段で平板に取付けるとともに、平板にコンクリートとの接続を確実にするためのスタッドボルト19を必要数取付けて上部ベース15を形成しておく。この上部ベース15を図外の型枠内の所定の位置に設置し、型枠内に免震上部基礎部14の鉄筋コンクリート部を打設充填することで、この鉄筋コンクリート部により形成される免震上部基礎部14の下面に上部ベース15が取付けられる。上部ベース15と上部フランジ12とが上部フランジ12に形成された上記ボルト貫通孔を通して袋ナット部18の雌ねじに締結されるボルト21により結合される。免震下部基礎部16の上面への下部ベース17の取付け方法も同様であり、免震下部基礎部16の上面に取付けられた下部ベース17と下部フランジ13とがボルト21により結合される。免震ゴム装置5Aは、ゴム9が水平方向に変形することで複合建物1への衝撃を緩和する。   With reference to FIG. 5, the seismic isolation rubber device 5A as the seismic isolation device 5 will be described. The seismic isolation rubber device 5A includes, for example, a laminated body 11 in which a large number of rubbers 9 and steel plates 10 are alternately laminated and connected to each other by bonding, and a fixing material such as a bolt not shown on the upper surface of the laminated body 11. An upper flange 12 is attached, and a lower flange 13 is attached to the lower surface of the laminate 11 with a fixing material such as a bolt (not shown) on the lower surface of the laminate 11. The rubber 9 is made of natural rubber. An upper base 15 capable of connecting the upper flange 12 is attached to the lower surface of the seismic isolation upper foundation 14 formed on the lower surface 1 a of the composite building 1, and the seismic isolation lower foundation formed on the seismic isolation pit foundation 6. A lower base 17 capable of connecting the lower flange 13 is attached to the upper surface of 16. The upper base 15 and the lower base 17 are formed by providing a plurality of cap nut portions 18 and stud bolts 19 each having a female thread inside a metal bag body on a metal flat plate. The attachment of the upper base 15 to the lower surface of the seismic isolation upper foundation 14 is as follows. First, a predetermined number of cap nuts 18 are attached to a flat plate by a joining means such as welding in accordance with the position of a bolt through-hole not shown in the figure formed on the flat plate, and for ensuring a connection between the flat plate and concrete. A necessary number of stud bolts 19 are attached to form the upper base 15. The upper base 15 is installed at a predetermined position in the mold form outside the figure, and the reinforced concrete part of the seismic isolated upper base part 14 is cast and filled in the mold form, thereby the seismic isolated upper part formed by the reinforced concrete part. An upper base 15 is attached to the lower surface of the base portion 14. The upper base 15 and the upper flange 12 are coupled by a bolt 21 that is fastened to the female screw of the cap nut portion 18 through the bolt through hole formed in the upper flange 12. The method of attaching the lower base 17 to the upper surface of the seismic isolation lower base portion 16 is the same, and the lower base 17 attached to the upper surface of the seismic isolation lower base portion 16 and the lower flange 13 are connected by bolts 21. The seismic isolation rubber device 5A alleviates the impact on the composite building 1 by the rubber 9 being deformed in the horizontal direction.

図6を参照し、免震装置5としてのすべり支承装置5Bを説明する。すべり支承装置5Bは、上記免震下部基礎部16とは異なる位置に設けられた免震下部基礎部31の上面に取付けられた下側部材32と、上記免震上部基礎部14とは異なる位置に設けられた免震下部基礎部33の下面に取付けられた上側部材34とにより形成される。下側部材32は、免震下部基礎部31の上面に取付けられた上記下部ベース17と同様の構成の下部ベース35にボルト21で結合された下部フランジ36と、この下部フランジ36の上面に図外の固定手段で取付けられた基材37と、基材37の上面に図外の固定手段で取付けられた台板38とにより形成される。上側部材34は、免震上部基礎部33の下面に取付けられた上部ベース39にボルト21で結合された上部フランジ40と、この上部フランジ40の下面に図外の固定手段で取付けられた弾性基材41と、弾性基材41の下面に図外の固定手段で取付けられたすべり板42とにより形成される。弾性基材41はゴム等の弾性材により形成される。   With reference to FIG. 6, the sliding support apparatus 5B as the seismic isolation apparatus 5 is demonstrated. The sliding support device 5B has a lower member 32 attached to the upper surface of the base isolation base 31 provided at a position different from the base isolation base 16 and a position different from the base isolation base 14 above. And an upper member 34 attached to the lower surface of the seismic isolation lower base portion 33 provided in the upper part. The lower member 32 includes a lower flange 36 coupled to the lower base 35 having the same configuration as the lower base 17 attached to the upper surface of the base isolation base 31 with bolts 21, and an upper surface of the lower flange 36. It is formed by a base material 37 attached by an external fixing means and a base plate 38 attached to the upper surface of the base material 37 by an external fixing means. The upper member 34 includes an upper flange 40 coupled to an upper base 39 attached to the lower surface of the seismic isolation upper base portion 33 by bolts 21 and an elastic base attached to the lower surface of the upper flange 40 by fixing means (not shown). It is formed by a material 41 and a sliding plate 42 attached to the lower surface of the elastic base material 41 by fixing means (not shown). The elastic base material 41 is formed of an elastic material such as rubber.

すべり支承装置5Bは、すべり板42の下面と台板38の上面とが接触され、所定値(例えば5gal(震度2程度に相当))以下の加速度エネルギーを受けても免震作動せず、所定値を超えた加速度エネルギーを受けた場合に免震作動する構成のものを用いた。即ち、すべり支承装置5Bは、所定値を超えた加速度エネルギーを受けた場合に、台板38の上面上をすべり板42がすべるように、すべり板42と台板38との間の摩擦係数が設定される。
即ち、すべり支承装置5Bは、所定値を超えた加速度エネルギーを受けた場合に、すべり板42が台板38の上面上をすべることで、免震ゴム装置5A及びすべり支承装置5B及びオイルダンパー装置5Cにより形成された免震装置が水平方向に変位しやすく免震効果を発揮できる状態に設定される。一方、所定値以下の加速度エネルギーを受けてもすべり板42が台板38の上面上をすべらず、免震部1zは高い剛性を有する状態に維持されるので、免震部1zは水平方向に変位しにくく、複合建物1は揺れにくくなる。
In the sliding support device 5B, the lower surface of the sliding plate 42 and the upper surface of the base plate 38 are in contact with each other, and even if they receive acceleration energy below a predetermined value (for example, 5 gal (corresponding to seismic intensity of about 2)), the seismic isolation device does not operate. A structure with seismic isolation when using acceleration energy exceeding the value was used. That is, the sliding support device 5B has a friction coefficient between the sliding plate 42 and the base plate 38 such that the sliding plate 42 slides on the upper surface of the base plate 38 when receiving acceleration energy exceeding a predetermined value. Is set.
That is, when the sliding support device 5B receives acceleration energy exceeding a predetermined value, the sliding plate 42 slides on the upper surface of the base plate 38, so that the seismic isolation rubber device 5A, the sliding support device 5B, and the oil damper device. The seismic isolation device formed by 5C is easily displaced in the horizontal direction and is set in a state where it can exhibit the seismic isolation effect. On the other hand, the slip plate 42 does not slide on the upper surface of the base plate 38 even if it receives acceleration energy of a predetermined value or less, and the seismic isolation portion 1z is maintained in a state having high rigidity. It is difficult to displace and the complex building 1 is less likely to shake.

図7を参照し、免震装置5としての減衰装置として機能するオイルダンパー装置5Cを説明する。オイルダンパー装置5Cは、一端にピストン44を有したロッド45とシリンダ46と制御機構47とを備える。ロッド45の一端に設けられたピストン44はシリンダ46の一端面と他端面との間を移動可能なようにシリンダ46内に封入されてシリンダ46内に2つのオイル室、即ち、第1オイル室48と第2オイル室49とを区画形成する。ロッド45はシリンダ46の一端面に形成されたロッド貫通孔50を介して外部に延長する。ピストン44の外周とシリンダ46の内壁との間やロッド45の外周とロッド貫通孔50との間は図外のゴムパッキン等で油密に形成される。ロッド45の他端は取付部材51の軸支持部材75により水平方向に回動自在に連結され、取付部材51がアンカーボルト等の固定具52で免震ピット基礎6に固定される。シリンダ46の他端面にはロッド45と同軸状に取付けられた支持ロッド53を備え、この支持ロッド53の他端が取付部材54の軸支持部材75により水平方向に回動自在に連結され、取付部材54がアンカーボルト等の固定具52で複合建物1の下面1aに固定される。
制御機構47は、第1オイル室48とタンク55とをつなぐオイル路56と、オイル路56の途中に設けられたオリフィス57と、オイル路56においてオリフィス57よりタンク55側に設けられた油路開閉弁58、第2オイル室49とタンク55とをつなぐオイル路59と、オイル路59において第1オイル室49の直後の位置に設けられたチェック弁60と、オイル路56におけるオリフィス57の直前位置とオイル路59におけるチェック弁60よりタンク55側とをむすぶオイル路61と、オイル路61の途中に設けられたリリーフ弁62と、ピストン44に形成されて第1オイル室48と第2オイル室49とをつなぐオイル路63と、オイル路63の途中に設けられたチェック弁64とを備える。
ロッド45及び支持ロッド53の他端が取付部材51;54に止ねじ74などで固定された軸支持部材75;75の支持軸76;76により支持されて、ロッド45及び支持ロッド53が支持軸76;76を中心として水平方向に移動可能に連結されたので、オイルダンパー装置5Cの連結部の破壊を防止できる。
With reference to FIG. 7, an oil damper device 5 </ b> C functioning as a damping device as the seismic isolation device 5 will be described. The oil damper device 5C includes a rod 45 having a piston 44 at one end, a cylinder 46, and a control mechanism 47. A piston 44 provided at one end of the rod 45 is enclosed in the cylinder 46 so as to be movable between one end surface and the other end surface of the cylinder 46, and two oil chambers, that is, a first oil chamber are contained in the cylinder 46. 48 and the second oil chamber 49 are partitioned. The rod 45 extends to the outside through a rod through hole 50 formed on one end surface of the cylinder 46. Between the outer periphery of the piston 44 and the inner wall of the cylinder 46 and between the outer periphery of the rod 45 and the rod through hole 50 are formed in an oil-tight manner by rubber packing or the like not shown. The other end of the rod 45 is connected to a shaft support member 75 of the attachment member 51 so as to be rotatable in the horizontal direction, and the attachment member 51 is fixed to the seismic isolation pit foundation 6 by a fixture 52 such as an anchor bolt. The other end surface of the cylinder 46 is provided with a support rod 53 that is coaxially attached to the rod 45, and the other end of the support rod 53 is connected to the shaft support member 75 of the attachment member 54 so as to be rotatable in the horizontal direction. The member 54 is fixed to the lower surface 1a of the composite building 1 with a fixture 52 such as an anchor bolt.
The control mechanism 47 includes an oil path 56 that connects the first oil chamber 48 and the tank 55, an orifice 57 provided in the middle of the oil path 56, and an oil path provided on the tank 55 side of the oil path 56 from the orifice 57. An on-off valve 58, an oil passage 59 connecting the second oil chamber 49 and the tank 55, a check valve 60 provided in the oil passage 59 at a position immediately after the first oil chamber 49, and an oil passage 56 immediately before the orifice 57. An oil passage 61 that extends between the position and the check valve 60 in the oil passage 59 to the tank 55 side, a relief valve 62 provided in the middle of the oil passage 61, and a piston 44 are formed in the first oil chamber 48 and the second oil. An oil path 63 connecting the chamber 49 and a check valve 64 provided in the middle of the oil path 63 are provided.
The other end of the rod 45 and the support rod 53 is supported by a support shaft 76; 76 of a shaft support member 75; 75 fixed to the mounting member 51; 54 with a set screw 74 or the like, and the rod 45 and the support rod 53 are supported by the support shaft. 76; Since it is connected so that it can move in the horizontal direction around 76, the breakage of the connecting portion of the oil damper device 5C can be prevented.

オイルダンパー装置5Cは、所定値(例えば5gal)以下の加速度エネルギーを受けても免震作動せず、所定値を超えた加速度エネルギーを受けた場合に免震作動する構成のものを用いた。例えば、免震ピット基礎6に設置された図外の加速度計が所定値を超えた加速度を計測した場合に、その計測値が制御装置8に送信され、制御装置8がオイルダンパー装置5Cの油路開閉弁58を開閉する図外のソレノイドを制御して油路開閉弁58を「開状態」に維持してオイルダンパー装置5Cをロック解除状態とする。これにより、第1オイル室48のオイルがオリフィス57を介して減衰力を作動させながらタンク55へと流れ、オイルダンパー装置5Cが減衰性能を発揮する。即ち、所定値を超えた加速度が検出された場合に、免震部1zは水平方向に変位しやすく免震効果を発揮できる状態に設定されるので、免震ゴム装置5Aのゴムの破断を防止できるとともに、オイルダンパー装置5Cの減衰機能により複合建物1の揺れを減衰できる。所定値を超えた加速度が検出されない場合には、オイルダンパー装置5Cの減衰機能は働かず、免震部1zは高い剛性を有する状態に維持されるので、免震部1zは水平方向に変位しにくく、複合建物1は揺れにくくなる。   The oil damper device 5C is configured so as not to perform a seismic isolation operation even when it receives acceleration energy of a predetermined value (for example, 5 gal) or less, and to perform a seismic isolation operation when receiving acceleration energy exceeding a predetermined value. For example, when an unillustrated accelerometer installed on the seismic isolation pit foundation 6 measures acceleration exceeding a predetermined value, the measured value is transmitted to the control device 8, and the control device 8 transmits the oil of the oil damper device 5C. A solenoid (not shown) that opens and closes the path opening / closing valve 58 is controlled to maintain the oil path opening / closing valve 58 in the “open state”, thereby bringing the oil damper device 5C into the unlocked state. Thereby, the oil in the first oil chamber 48 flows to the tank 55 while operating the damping force through the orifice 57, and the oil damper device 5C exhibits the damping performance. That is, when an acceleration exceeding a predetermined value is detected, the seismic isolation portion 1z is set in a state in which it can be easily displaced in the horizontal direction and can exhibit the seismic isolation effect, thereby preventing the rubber of the seismic isolation rubber device 5A from being broken. In addition, the vibration of the composite building 1 can be attenuated by the attenuation function of the oil damper device 5C. When the acceleration exceeding the predetermined value is not detected, the damping function of the oil damper device 5C does not work and the seismic isolation part 1z is maintained in a state having high rigidity, so that the seismic isolation part 1z is displaced in the horizontal direction. It is difficult, and the complex building 1 is difficult to shake.

つまり、すべり支承装置5B、オイルダンパー装置5Cとしては、図8に示すような特性のものを用いる。縦軸Vは、すべり支承装置5Bの場合は、すべり支承装置に加わる水平方向の加重P(W)、オイルダンパー装置5Cの場合は、減衰力(KN)である。横軸Hは、すべり支承装置5Bの場合は、すべり支承装置の水平方向の変形量δ(cm)、オイルダンパー装置5Cの場合は、免震部1zの応答速度(cm/s)である。即ち、すべり支承装置5B、オイルダンパー装置5Cとしては、所定値(例えば5gal)以下の加速度エネルギーを受けても免震作動しない構成を備えたものを用いる。換言すれば、生産室2bでの生産時に発生する微細な振動に対して、摩擦力によって免震部1zの変形を防止するように構成されたすべり支承装置5Bや、ロック機構(トリガー機能)によって免震部1zの変形を防止するように構成されたオイルダンパー装置5Cを用いたことによって、生産室2bでの生産時に発生する振動で振動嫌建物2が揺れないように構成され、よって、0.1ミクロンオーダーの微細加工を行う半導体製造の際に悪影響を及ぼす振動を防止でき、生産性を向上できる。   That is, as the sliding support device 5B and the oil damper device 5C, those having characteristics as shown in FIG. 8 are used. The vertical axis V represents the horizontal load P (W) applied to the sliding support device 5B in the case of the sliding bearing device 5B, and the damping force (KN) in the case of the oil damper device 5C. The horizontal axis H is the horizontal deformation amount δ (cm) of the sliding support device 5B in the case of the sliding support device 5B, and the response speed (cm / s) of the seismic isolation portion 1z in the case of the oil damper device 5C. That is, as the sliding support device 5B and the oil damper device 5C, those having a structure that does not perform seismic isolation even when receiving acceleration energy of a predetermined value (for example, 5 gal) or less are used. In other words, the sliding bearing device 5B configured to prevent deformation of the seismic isolation portion 1z by frictional force and the lock mechanism (trigger function) against minute vibrations generated during production in the production chamber 2b. By using the oil damper device 5C configured to prevent the deformation of the seismic isolation portion 1z, the vibration disgusting building 2 is configured not to be shaken by the vibration generated during production in the production room 2b. .Vibration that adversely affects semiconductor manufacturing with fine processing on the order of 1 micron can be prevented and productivity can be improved.

最良の形態の複合建物1によれば、振動源建物3と振動嫌建物2とが連結装置4によって互いに連結され、さらに、免震ゴム装置5A、すべり支承装置5B、オイルダンパー装置5Cを備えた免震部1zを備えたことによって、以下の効果が得られる。
常時の半導体生産において有害な振動源建物3から振動嫌建物2への振動の伝達を連結装置4のゴム4jによる振動遮断部で遮断でき、生産性を向上できる。
所定値以下の加速度エネルギーを受けても免震作動しない構成のすべり支承装置5B及びオイルダンパー装置5Cを備えたことにより、生産室2bでの生産時に発生する振動で振動嫌建物2が揺れないようにしたので、常時の半導体生産において有害な振動を抑制でき、生産性を向上できる。
連結装置4によって、振動源建物3と振動嫌建物2との相対変位を小さくできるため、振動源建物3の設備機械3aと振動嫌建物2の生産室2b内とを繋ぐように振動源建物3と振動嫌建物2とに固定されたダクトや配管などの管3cの損傷や破壊を防止できる。連結装置4と免震装置との相乗作用により、管3cの損傷や破壊をより効果的に防止できる。
免震部1zが所定値を超えた加速度エネルギーを受ける地震などの際には、免震部1zによる免震効果が発揮されて、複合建物1や機械の損傷を小さくでき、よって、地震の際の生産停止被害の回避、生産ラインの早期復旧が可能となる。
According to the composite building 1 of the best mode, the vibration source building 3 and the vibration disagreeable building 2 are connected to each other by the connecting device 4, and further provided with a seismic isolation rubber device 5A, a sliding bearing device 5B, and an oil damper device 5C. By providing the seismic isolation portion 1z, the following effects can be obtained.
Transmission of vibration from the vibration source building 3 which is harmful in the normal semiconductor production to the vibration disagreeable building 2 can be cut off by the vibration cut-off portion by the rubber 4j of the coupling device 4, and productivity can be improved.
By providing the sliding bearing device 5B and the oil damper device 5C that are configured not to perform seismic isolation even when they receive acceleration energy of a predetermined value or less, the building 2 is prevented from shaking due to vibration generated during production in the production room 2b. As a result, harmful vibrations can be suppressed in regular semiconductor production and productivity can be improved.
Since the relative displacement between the vibration source building 3 and the vibration aversion building 2 can be reduced by the coupling device 4, the vibration source building 3 is connected so as to connect the equipment machine 3a of the vibration source building 3 and the production room 2b of the vibration aversion building 2. Further, it is possible to prevent damage or destruction of the pipe 3c such as a duct or a pipe fixed to the vibration dislike building 2. Due to the synergistic action of the coupling device 4 and the seismic isolation device, damage and destruction of the tube 3c can be prevented more effectively.
In the case of an earthquake or the like in which the seismic isolation part 1z receives acceleration energy exceeding a predetermined value, the seismic isolation effect by the seismic isolation part 1z is exerted, and damage to the complex building 1 and the machine can be reduced, so that in the event of an earthquake It is possible to avoid production stoppage damage and to quickly restore the production line.

尚、図9(a)に示すように、振動源建物3と振動嫌建物2とを複数の連結装置4によって互いに連結することで、振動源建物3で発生した振動の振動嫌建物2への伝達を防止できるとともに振動源建物3と振動嫌建物2との相対ねじれを防止できる。図9(b)のように、振動嫌建物2の周りに複数の振動源建物3が存在する場合には、複数の振動源建物3を複数の連結装置4によってそれぞれ振動嫌建物2に連結したり、図9(c)のように、振動嫌建物2の内側に特に振動を嫌う振動嫌建物2Xが存在する場合には、振動嫌建物2Xの外周囲と振動嫌建物2の内周囲とを複数の連結装置4によって互いに連結することによって、振動源建物3で発生した振動の振動嫌建物2及び振動嫌建物2Xへの伝達を防止できるとともに振動源建物3と振動嫌建物2との相対ねじれを防止できるとともに、振動嫌建物2と振動嫌建物2Xとの相対ねじれも防止できる。   In addition, as shown to Fig.9 (a), the vibration source building 3 and the vibration dislike building 2 are mutually connected by the some connection apparatus 4, and the vibration generated in the vibration source building 3 to the vibration dislike building 2 is connected. Transmission can be prevented and relative torsion between the vibration source building 3 and the vibration disagreement building 2 can be prevented. As shown in FIG. 9B, when there are a plurality of vibration source buildings 3 around the vibration aversion building 2, the plurality of vibration source buildings 3 are respectively connected to the vibration aversion building 2 by a plurality of connection devices 4. As shown in FIG. 9C, when there is a vibration aversion building 2X that particularly dislikes vibration inside the vibration aversion building 2, the outer periphery of the vibration aversion building 2X and the inner periphery of the vibration aversion building 2 are By connecting to each other by a plurality of connecting devices 4, it is possible to prevent vibration generated in the vibration source building 3 from being transmitted to the vibration aversion building 2 and the vibration aversion building 2 </ b> X, and the relative twist between the vibration source building 3 and the vibration aversion building 2. In addition, it is possible to prevent relative torsion between the vibration aversion building 2 and the vibration aversion building 2X.

最良の形態では、図1に示すように、振動嫌建物2の下部と振動源建物3の下部とが連結装置4によって互いに連結された複合建物1を示したが、図10に示すように、振動嫌建物2の下部と振動源建物3の下部とが連結装置4によって互いに連結され、かつ、振動嫌建物2の上部と振動源建物3の上部とが連結装置4によって互いに連結された構成の複合建物1とすることによって、振動源建物3と振動嫌建物2との相対変位をより小さくでき、管3cの損傷や破壊をより効果的に防止できるようになる。   In the best mode, as shown in FIG. 1, the composite building 1 in which the lower part of the vibration disagreement building 2 and the lower part of the vibration source building 3 are connected to each other by the connecting device 4 is shown, but as shown in FIG. The lower part of the vibration aversion building 2 and the lower part of the vibration source building 3 are connected to each other by the connecting device 4, and the upper part of the vibration aversion building 2 and the upper part of the vibration source building 3 are connected to each other by the connecting device 4. By using the composite building 1, the relative displacement between the vibration source building 3 and the vibration disagreement building 2 can be further reduced, and damage and destruction of the pipe 3c can be more effectively prevented.

連結装置4の振動遮断部をばねにより形成してもよい。
孔部4iの上面4pと腕部4hの下面4rとの間にゴムを配置した構成の連結装置4を用いてもよい。
図外の棒体からなるピン部材と2つの雌部材4bとによって連結装置4を構成してもよい。即ち、2つの雌部材4bのピン嵌合部4mが上下に連なるように、一方の雌部材4bを振動嫌建物2又は振動源建物3の一方に取付け、他方の雌部材4bを振動嫌建物2又は振動源建物3の他方に取付け、この2つのピン嵌合部4mの上からピン嵌合部4mのゴム4jの内側にピン部材を嵌め込むことによって2つの雌部材4b同士をピン部材によって互いに連結する構成の連結装置4を用いてもよい。この連結装置4によれば、2つの雌部材4bを取り付けた後にピン部材をピン嵌合部4m内に嵌合できるので、連結作業が容易となる。
The vibration blocking portion of the coupling device 4 may be formed by a spring.
You may use the connection apparatus 4 of the structure which has arrange | positioned rubber | gum between the upper surface 4p of the hole 4i, and the lower surface 4r of the arm part 4h.
The coupling device 4 may be constituted by a pin member made of a rod body not shown and the two female members 4b. That is, one female member 4b is attached to one of the vibration aversion building 2 or the vibration source building 3 so that the pin fitting portions 4m of the two female members 4b are vertically connected, and the other female member 4b is attached to the vibration aversion building 2. Alternatively, it is attached to the other side of the vibration source building 3, and the two female members 4b are connected to each other by the pin members by fitting the pin members inside the rubber 4j of the pin fitting portions 4m from above the two pin fitting portions 4m. You may use the connection apparatus 4 of the structure connected. According to the connecting device 4, since the pin member can be fitted into the pin fitting portion 4m after the two female members 4b are attached, the connecting work is facilitated.

最良の形態では、免震装置5として、免震ゴム装置5Aと、所定値以下の加速度エネルギーを受けても免震作動しない構成のすべり支承装置5B及びオイルダンパー装置5Cとを備えた複合建物1を示したが、すべり支承装置5B及びオイルダンパー装置5Cのうちの1つ以上が、所定値以下の加速度エネルギーを受けても免震作動しない構成であればよい。また、免震装置5として、少なくとも免震ゴム装置5Aを備えた複合建物1とすればよく、この場合、高減衰ゴムを備えた免震ゴム装置5Aを用いれば、複合建物1内で発生する振動を減衰できるので、振動により複合建物1が揺れないようにできて生産性を向上できる。減衰装置5として、免震用鉛ダンパー装置、その他のダンパー装置を用いてもよい。   In the best mode, the composite building 1 includes a seismic isolation rubber device 5A, a sliding bearing device 5B and an oil damper device 5C configured not to perform a seismic isolation operation even when receiving acceleration energy of a predetermined value or less. However, any one or more of the sliding support device 5B and the oil damper device 5C may be configured so as not to perform a seismic isolation operation even when receiving acceleration energy of a predetermined value or less. Moreover, what is necessary is just to set it as the composite building 1 provided with at least the seismic isolation rubber device 5A as the seismic isolation device 5. In this case, if the seismic isolation rubber device 5A provided with the high damping rubber is used, it will generate | occur | produce in the composite building 1. Since the vibration can be attenuated, the composite building 1 can be prevented from shaking due to the vibration, and the productivity can be improved. As the damping device 5, a seismic isolation lead damper device and other damper devices may be used.

本発明は、液晶製品製造工場、精密電子製品製造工場などの工場や、振動嫌建物2としての手術室を備えた病院のような複合建物1にも適用できる。   The present invention can also be applied to factories such as liquid crystal product manufacturing factories, precision electronic product manufacturing factories, and complex buildings 1 such as hospitals equipped with operating rooms as vibration-averse buildings 2.

複合建物の構造図(最良の形態)。Structural drawing of the complex building (best form). 連結装置の連結状態を示す縦断面図(最良の形態)。The longitudinal cross-sectional view which shows the connection state of a connection apparatus (best form). 連結装置の連結状態の外観を示す斜視図(最良の形態)。The perspective view which shows the external appearance of the connection state of a connection apparatus (best form). (a)は連結装置の連結状態の外観を側面から見た側面図、(b)は(a)のa−a断面図(最良の形態)。(A) is the side view which looked at the external appearance of the connection state of the connection apparatus from the side, (b) is aa sectional drawing (best form) of (a). 免震ゴム装置の縦断面図(最良の形態)。A longitudinal sectional view of the seismic isolation rubber device (best mode). すべり支承装置の縦断面図(最良の形態)。The longitudinal cross-sectional view (best form) of a sliding support apparatus. オイルダンパー装置の縦断面図(最良の形態)。The longitudinal cross-sectional view (best form) of an oil damper apparatus. すべり支承装置及びオイルダンパー装置の特性を示す図(最良の形態)。The figure which shows the characteristic of a slide bearing apparatus and an oil damper apparatus (best form). 連結装置の設置例を示す図(最良の形態)。The figure which shows the example of installation of a connection apparatus (best form). 連結装置の設置例を示す図(最良の形態)。The figure which shows the example of installation of a connection apparatus (best form). 従来の複合建物の一例を示す構造図。Structural diagram showing an example of a conventional complex building.

符号の説明Explanation of symbols

1 複合建物、2 振動嫌建物、2a 生産機械(振動を嫌う装置)、
3 振動源建物、3a 設備機械(振動発生源)、4 連結装置、4a 雄部材、
4b 雌部材、4e ピン部(棒体)、4j ゴム(振動遮断部)、4k 孔、
5 免震装置、5A 免震ゴム装置、5B すべり支承装置(減衰装置)、
5C オイルダンパー装置。
1 complex building, 2 vibration aversion building, 2a production machine (a device that dislikes vibration),
3 vibration source building, 3a equipment machine (vibration generation source), 4 coupling device, 4a male member,
4b Female member, 4e Pin part (rod), 4j Rubber (vibration blocking part), 4k hole,
5 Seismic isolation device, 5A Seismic isolation rubber device, 5B Sliding bearing device (damping device),
5C Oil damper device.

Claims (4)

振動を嫌う装置を備えた振動嫌建物と振動発生源を備えた振動源建物とが互いに離され、これら建物同士が連結装置によって互いに連結され、連結装置が、上下方向に延長する孔を有した雌部材と、孔の内径よりも小さい外径の棒体を有した雄部材と、雌部材の孔の内周面と孔の内側に挿入された雄部材の棒体の外周面との間に設けられて振動源建物から振動嫌建物への振動伝達を遮断する振動遮断部を形成するゴムとを備え、雌部材が振動嫌建物又は振動源建物の一方に取付けられ、雄部材が他方に取付けられたことにより、振動源建物から振動嫌建物への振動伝達が防止され、かつ、地震の際には、振動源建物と振動嫌建物とが同一の方向に同じ変位で揺れるように構成されたことを特徴とする複合建物。 The vibration aversion building having a device that dislikes vibration and the vibration source building having a vibration generation source are separated from each other, the buildings are connected to each other by a connection device, and the connection device has a hole extending in the vertical direction. Between the female member, the male member having a rod with an outer diameter smaller than the inner diameter of the hole, and the outer peripheral surface of the male member rod inserted inside the hole and the inner peripheral surface of the hole of the female member Provided with a rubber that forms a vibration isolating portion that blocks vibration transmission from the vibration source building to the vibration aversion building , the female member is attached to one of the vibration aversion building or the vibration source building, and the male member is attached to the other As a result, vibration transmission from the vibration source building to the vibration aversion building is prevented, and in the event of an earthquake, the vibration source building and the vibration aversion building are configured to swing in the same direction with the same displacement . A complex building characterized by that. 振動嫌建物の下部と振動源建物の下部とが連結装置によって互いに連結されたことを特徴とする請求項1に記載の複合建物。 The composite building according to claim 1, wherein a lower part of the vibration-averse building and a lower part of the vibration source building are connected to each other by a connecting device. 振動嫌建物の上部と振動源建物の上部とが連結装置によって互いに連結されたことを特徴とする請求項に記載の複合建物。 The composite building according to claim 2 , wherein the upper part of the vibration-averse building and the upper part of the vibration source building are connected to each other by a connecting device. 振動嫌建物と振動源建物とがそれぞれ個別に免震装置を備えたことを特徴とする請求項1乃至請求項のいずれかに記載の複合建物 The composite building according to any one of claims 1 to 3 , wherein the vibration aversion building and the vibration source building are individually provided with seismic isolation devices .
JP2006081189A 2006-03-23 2006-03-23 Complex building Expired - Fee Related JP5084162B2 (en)

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