JP5114301B2 - Image measuring apparatus, image measuring method, and computer program - Google Patents

Description

  The present invention relates to an image measurement device, an image measurement method, and a computer program that accurately measure an arc shape of a round shape portion of a measurement object based on captured image data.

Conventionally, as a device for measuring the shape of a measurement object, the measurement object is irradiated with light, and the transmitted light or reflected light of the irradiated light is received by a light receiving lens, CCD (Charge Coupled Device), CMOS (Complementary
2. Description of the Related Art There is an image measuring apparatus that acquires an image by forming an image on an image pickup device such as a metal-oxide semiconductor) and measures the shape of a measurement object by computer processing the acquired image.

  The image of the measurement object can be made to have a very accurate similarity to the measurement object by the light receiving lens. By calibrating the dimensions on the image with the magnification of the light receiving lens, the dimensions on the image can be accurately associated with the dimensions of the actual measurement object. Therefore, by accurately specifying the shape of the measurement object on the image, the accurate shape of the actual measurement object can be measured. The measurement object on the image is specified by detecting a boundary part (hereinafter referred to as an edge part) between the measurement object and the background image. FIG. 21 is an illustration of an edge detection region designated on a conventional image. FIG. 22 is a view showing an example of a shape specified by a least square method based on a conventional edge point. FIG. 23 is an explanatory diagram for explaining a circle obtained by fitting a conventional edge point to a geometric figure.

  When detecting an edge on an image, as shown in FIG. 21, an edge detection area is designated by surrounding the edge portion with a mouse cursor by clicking or dragging. The edge portion is a portion where the luminance value changes sharply between the pixel of the measurement object and the pixel of the background image, and the computer determines that the luminance difference between adjacent pixels is a predetermined value in the image data of the specified area, for example. Larger locations (between pixels) are acquired as a plurality of edge points as shown in FIG. The obtained plurality of edge points are fitted to a linear geometric figure as shown in FIG. 22 by a regression analysis method such as a least square method, and the calculated straight line is detected as an edge. Even if the straight line is a point, it can be similarly detected. As in the case of a straight line, a circular shape can be obtained as a plurality of points where the luminance value changes rapidly between adjacent pixels as shown in FIG. 23, and can be calculated by the least square method or the like.

With respect to the detected edges such as straight lines and circles, the shape of the measurement object can be specified by the distance or angle between the edges, the parameters of each edge (for example, the circle edge is the center point coordinate and diameter), and the like. . Therefore, in order to accurately specify the shape of the measurement object, it is necessary to reliably and accurately detect the edge. For example, in Patent Document 1, when an edge is detected for a measurement object having a shape that is bent at an acute angle without a gentle change, the next measurement target point is appropriately set in the automatic scanning measurement mode to ensure The edge point is positioned within the index so that the edge point can be reliably acquired.
Japanese Patent Laid-Open No. 10-232117

  However, in order to accurately measure the shape of the actual measurement object as described above, the shape obtained by fitting the edge point to the geometric figure by the least square method or the like, and the shape of the measurement object on the image It is necessary to detect the edge portion so that the error between is reduced. In Patent Document 1, an edge point can be reliably acquired even in a shape that is bent at an acute angle, but the shape obtained by fitting the acquired edge point by the least square method or the like, and the measurement object on the image The error from the shape is not considered.

  A shape that is bent at an acute angle can be reliably detected when the operator designates the periphery of the edge portion. Straight lines, points, circles, etc. are simple geometric figures, and the error between the shape obtained from the edge points acquired as described above by the least squares method and the shape of the measurement object on the image is small. .

  However, for a circular arc instead of a circle, an error between the shape obtained by fitting the edge point by the least square method or the like and the shape of the measurement object on the image tends to increase. FIG. 24 is an explanatory diagram for explaining the difference in approximate circles depending on the specified angle of the arc of the conventional edge detection region. When the center angle of the edge detection area is increased as shown in FIG. 24A, the error can be reduced, but when the center angle of the edge detection area is reduced as shown in FIG. The approximate circle of the shape obtained by the square method or the like becomes large, and the error deviates from the shape of the measurement object on the image. Therefore, in order to reduce the error, it is preferable to make the central angle as large as possible.

  FIG. 25 is an explanatory diagram showing an approximate circle when the designated arc range of the conventional edge detection region exceeds the arc range of the measurement object. FIG. 26 is a view showing an example of arcs displayed in a minute size on a conventional image. In many cases, the arc is provided in the round shape portion of the measurement object, and the arc of the round shape portion exists in a shape that is continuously and smoothly connected to the adjacent straight portion, so that the center angle is set as shown in FIG. If it is attempted to take a large portion, the continuous straight line portion is obtained as an edge point acquisition portion, and the edge point acquired in the straight line portion causes an error in edge detection. As shown in FIG. 26, the size of the arc of the round shape portion of the measurement object on the image is often a minute size with a radius (r) of 1 mm or less, and only the arc is accurately detected as an edge of the arc. It is often very difficult to designate as an area. Furthermore, there is a problem that the difference between the widths of the arc edge detection areas is large depending on the operator, and the variation in the edge detection result between operators is large.

  The present invention has been made in view of such circumstances, and provides an image measurement device, an image measurement method, and a computer program that can easily and accurately measure the arc shape of a round shape portion of a measurement object. With the goal.

In order to achieve the above object, the image measuring apparatus according to the first aspect of the present invention is based on an image obtained by forming an image of the transmitted light or reflected light of the light irradiated on the measurement object on the image sensor. In the image measuring apparatus for measuring the image, display means for displaying an image obtained by imaging with the imaging device on a display, and an edge including a predetermined edge portion of the measurement object on the image displayed on the display Based on the designation receiving means for receiving the designation of the detection area, the coordinate value obtaining means for obtaining the coordinate value of the predetermined edge point indicating the edge portion in the edge detection area that has received the designation, and the coordinate value of the acquired edge point Arc specifying means for specifying an arc of a round shape portion, and shape magnification conversion means for converting the shape of the arc specified by the arc specifying means with the magnification of the light receiving lens, the arc specifying means A straight line portion specifying means for specifying two straight line portions based on the coordinate values of a predetermined edge point indicating two straight line portions that are continuous with the circular arc of the round shape portion; A center line specifying means for specifying a center line that is a straight line that bisects an angle formed by extending an extension line of the book and sandwiching the arc, and a point at which the specified center line intersects the arc An intersection specifying means for specifying as follows: a point on the middle line, and a distance between the point and the two straight line portions or an extension line of the straight line portion is equal to a distance between the cross point and the point A center point specifying means for specifying as a center point of the arc, and a base point specifying means for specifying a point where a straight line passing through the center point is orthogonal to the two straight line portions or an extension line of the straight line portion. wherein the center point, less of the base point and the intersection point Wherein the Kutomo based on two points are to be identified said arc.

The image measuring device according to a second aspect of the present invention is the image measuring apparatus according to the first aspect, further comprising region specifying means for specifying an edge detection region including the vicinity of the intersection, wherein the coordinate value acquiring means is the edge specified by the region specifying means. The coordinate value of a predetermined edge point including the intersection point indicating the arc portion in the detection area is acquired.

The image measuring apparatus according to the third invention, in the second invention, the arc specifying unit may be a point in said line, with the extended line of the straight portion or the straight line portion between the point the two Center point specifying means for specifying a point where the distance is equal to the distance between the intersection and the point as a center point of the arc, and a straight line passing through the center point is the two straight parts or an extension of the straight part Base point specifying means for specifying a point orthogonal to the line as a base point, the area specifying means specifies an edge detection area including an arc having the base point as both ends, and the coordinate value acquiring means is The coordinate value of a predetermined edge point including the intersection and the base point indicating the arc portion in the edge detection area specified by the area specifying means is acquired.

Next, in order to achieve the above object, an image measurement method according to a fourth aspect of the present invention provides a measurement target based on an image obtained by forming an image of transmitted light or reflected light of light irradiated on a measurement target on an image sensor. In an image measurement method that can be executed by an image measurement device that measures the shape of an object, an image obtained by forming an image with the image sensor is displayed on a display, and measurement on the image displayed on the display is performed. Accepts the specification of the edge detection area including the predetermined edge part of the object, obtains the coordinate value of the predetermined edge point indicating the edge part in the edge detection area that received the specification, and obtains the arc of the round shape part of the measurement object The two straight line portions are specified based on the coordinate value of a predetermined edge point indicating two straight line portions that are continuous with the arc across the arc, and the extended lines of the two specified straight line portions intersect each other. Shaped across an arc Corners to identify and midline is a line that bisects identifies the point where the midline identified intersect the circular arc as an intersection, and a point in said line, said two linear portions with the point Alternatively, a point where the distance from the extension line of the straight line part and the distance between the intersection and the point are equal is specified as the center point of the arc, and a straight line passing through the center point is the two straight line parts or the point A point perpendicular to the extension line of the straight line portion is specified as a base point, the arc is specified based on at least two points of the center point, the base point, and the intersection point, and the shape of the specified arc is a magnification of the light receiving lens It is characterized by converting by.

The image measurement method according to a fifth aspect of the present invention is the image measurement method according to the fourth aspect , wherein an edge detection area including the vicinity of the intersection is designated, and a predetermined edge point including the intersection indicating the arc portion in the designated edge detection area is included. The coordinate value of is acquired.

The image measurement method according to a sixth aspect of the present invention is the image measurement method according to the fifth aspect , wherein the point is a point on the middle line, the distance between the point and the two straight line portions or an extension line of the straight line portion, and the intersection point. A point having the same distance from the point is specified as a center point of the arc, and a straight line passing through the center point is specified as a base point that is orthogonal to the two straight line portions or an extension line of the straight line portion, An edge detection area including an arc having both ends as the base point is designated, and the coordinate value of the predetermined edge point including the intersection and the base point indicating the arc portion in the designated edge detection area is obtained. To do.

Next, in order to achieve the above object, a computer program according to a seventh aspect of the present invention provides a measurement object based on an image obtained by forming an image of transmitted light or reflected light of light irradiated on the measurement object on an image sensor. In the computer program that can be executed by the image measuring device that measures the shape of the image, the image measuring device displays on the display an image obtained by forming an image on the image sensor, and is displayed on the display A designation receiving means for receiving specification of an edge detection area including a predetermined edge portion of the measurement object on the image obtained, and coordinates for acquiring a coordinate value of a predetermined edge point indicating the edge portion in the edge detection area which has received the specification Value acquisition means, arc specifying means for specifying an arc of a round-shaped portion based on the acquired coordinate values of edge points, and an arc specified by the arc specifying means A shape magnification conversion means for converting the shape by the magnification of the light receiving lens is used, and the arc specifying means is configured to obtain a predetermined edge point indicating two linear portions that are continuous with the arc with the arc of the round shape portion interposed therebetween. Straight line portion specifying means for specifying two straight line portions based on the coordinate values, and a straight line that bisects the angle formed by the extension lines of the two specified straight line portions intersecting the arc A middle line identifying means for identifying the point, an intersection identifying means for identifying a point where the identified middle line intersects the arc as an intersection, and a point on the middle line, the point and the two straight line parts or the straight line part Center point specifying means for specifying, as a center point of the arc, a point where the distance to the extension line is equal to the distance between the intersection and the point, and the straight line passing through the center point is the two straight line portions or the straight line The point perpendicular to the extension line of the part is the base point Specific to the base point specifying means, and said center point, characterized in that to function as a means for specifying the circular arc based on at least two points of the base point and the intersection point.

The computer program according to an eighth aspect of the present invention is the computer program according to the seventh aspect , wherein the image measuring device functions as an area designation unit that designates an edge detection area that includes the vicinity of the intersection point, and the coordinate value acquisition unit is designated as the area designation unit. It is made to function as a means to acquire the coordinate value of the predetermined edge point including the said intersection which shows the circular arc part in the edge detection area designated by the means.

The computer program according to a ninth aspect is the computer program according to the eighth aspect , wherein the arc specifying means is a point on the middle line, and a distance between the point and the two straight line portions or an extension line of the straight line portion. And a center point specifying means for specifying a point where the distance between the intersection and the point is equal as a center point of the arc, and a straight line passing through the center point is the two straight line portions or an extension line of the straight line portion Function as base point specifying means for specifying a point orthogonal to the base point, the area specifying means to function as means for specifying an edge detection area including an arc having both ends of the base point, and the coordinate value acquiring means, It is made to function as a means to acquire the coordinate value of the predetermined edge point including the said intersection and the said base point which show the circular arc part in the edge detection area designated by the area | region designation means.

In the first invention, the fourth invention, and the seventh invention, an image obtained by imaging with an image sensor is displayed on a display, and an edge detection region including a predetermined edge portion of a measurement object on the image is designated. Accepts and acquires the coordinate value of a predetermined edge point indicating the edge portion in the edge detection area, and the predetermined edge indicating the two linear portions that are continuous with the circular arc of the round shape portion of the measurement object By specifying the two straight line parts based on the coordinate values of the points, the area of the straight line part that sandwiches the arc can be easily specified. In addition, it is possible to specify the straight line portion that sandwiches the arc. In addition, a center line that is a straight line that bisects the angle formed by the extension lines of the two specified straight lines intersecting each other and sandwiching the arc is specified, and a point where the center line intersects the arc is specified as an intersection. Thus, it is possible to accurately specify the center line where the center of the arc is located from the accurately specified straight line portion and the intersection point where the center line intersects the arc and is the center on the arc . Their to, by converting the identified arc shape magnification of the light receiving lenses, it is possible to measure accurately the arc of the arc from the real measurement object on precisely specified image. Therefore, it is possible to accurately measure the arc of the round shape part of the measurement target by specifying the area of the straight part that can be easily specified without specifying the arc area that is difficult to specify accurately. It becomes possible to do.

Further, a point on the middle line, where the distance (L1) between the point and two straight line portions or an extension line of the straight line portion, and the distance (L2) between the intersection point and the point is equal, Specify as a center point, specify a point where a straight line passing through the center point is orthogonal to two straight line parts or an extension line of the straight line part, and based on at least two points of the center point, the base point, and the intersection Identify the arc. Therefore, when L1 and L2 are equal, L1 and L2 become the radius of the arc, and the base point becomes the end of the arc, and therefore, based on at least two points of the center point, the base point, and the intersection point together with the radius and the base point The arc on the image can be specified with high accuracy.

In the second invention, the fifth invention, and the eighth invention, the edge detection area including the vicinity of the intersection is designated, and the coordinate value of the predetermined edge point including the intersection indicating the arc portion in the designated edge detection area is obtained. By doing this, the intersection point at the center of the arc can be processed as one of the edge points, and even if the angle of the arc edge detection area is small, an appropriate arc edge point can be obtained around the intersection point. it can. Therefore, it is possible to avoid the occurrence of a large error between the shape of the arc and the shape on the image specified by acquiring the arc edge point to the straight line portion continuous with the arc, and based on the appropriately acquired edge point. The arc can be specified with high accuracy.

In the third invention, the sixth invention, and the ninth invention, a point on the middle line, the distance (L1) between the point and two straight line portions or an extension line of the straight line portion, and the distance between the intersection point and the point The point equal to (L2) is specified as the center point of the arc, the straight line passing through the center point is specified as the base point where the two straight line parts or the extension line of the straight line part is orthogonal, and the base point is both ends. An edge detection area including an arc is designated, and coordinate values of predetermined edge points including an intersection and a base point indicating an arc portion in the designated edge detection area are acquired. Therefore, the intersection point at the center of the arc and the base points at both ends of the arc can be processed as edge points, and the edge detection area can be specified accurately up to both ends of the arc. It is possible to acquire the edge point of a simple arc and to specify the arc with higher accuracy based on the edge points in the maximum edge detection region.

  According to the above configuration, the arc of the round shape portion of the measurement target can be obtained by designating the region of the straight line portion that can be easily designated without designating the arc region that is difficult to designate accurately. The shape can be measured easily and with high accuracy.

  Hereinafter, an image measuring device according to an embodiment of the present invention will be specifically described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a schematic diagram showing a configuration of an image measurement apparatus according to Embodiment 1 of the present invention. As shown in FIG. 1, the image measurement apparatus 1 according to the first embodiment includes a measurement unit 2 and a control unit 3. The control unit 3 calculates image data captured by the measurement unit 2. Process and measure the dimensions of the desired shape.

  The measurement unit 2 is provided with two sets of illumination devices across a stage 21 that moves the measurement object 20 to the measurement part. First, a ring-shaped epi-illumination device 22 that illuminates the measurement object 20 on the stage 21 from above is installed in the light receiving lens unit 23. The light irradiated by the epi-illumination device 22 is reflected by the surface of the measurement object 20 and returns to the light receiving lens unit 23. Thereby, the unevenness | corrugation of the surface of the measurement target object 20, a pattern, etc. can be imaged.

  A transmission illumination device 24 that illuminates the measurement target 20 from below is installed below the stage 21. The transmitted illumination device 24 includes at least a light source 241, a reflection mechanism 242, and a lens 243. The light emitted from the light source 241 is reflected by the reflection mechanism 242 toward the stage 21, and the lens 243 reflects the stage 21. To be converted into parallel light in a direction substantially perpendicular to each other. Thereby, only the light of the position where the measuring object 20 does not exist can be transmitted and imaged.

  The light receiving lens unit 23 includes at least a light receiving lens 231, a half mirror 232, a high magnification side imaging lens unit 233, and a low magnification side imaging lens unit 236. The half mirror 232 transmits the light emitted from the epi-illumination device 22 reflected by the measurement object 20 to the high magnification imaging lens unit 233 and transmits the light emitted from the transmission illumination device 24 through the measurement object 20 to reduce the light. Guide to the double-side imaging lens unit 236. The high magnification side imaging lens unit 233 includes a slit 234 and an imaging lens 235 for imaging, and the low magnification side imaging lens unit 236 includes a slit 237 and an imaging lens 238 for imaging. It is configured.

  The imaging device 25 forms an image of light guided to the high-magnification imaging lens unit 233 with an imaging element 251 such as a CCD or CMOS, and transmits the image data to the control unit 3. Similarly, the imaging device 26 forms an image of light guided to the low magnification side imaging lens unit 236 by an imaging element 261 such as a CCD or CMOS, and transmits the image data to the control unit 3.

  FIG. 2 is a block diagram showing the configuration of the control unit 3 of the image measurement apparatus 1 according to Embodiment 1 of the present invention. As shown in FIG. 2, the control unit 3 of the image measuring apparatus 1 according to the first embodiment connects at least a CPU (central processing unit) 33, a storage device 34 such as a memory, communication means 35, and the above-described hardware. An internal bus 36 is used. Via an internal bus 36, the input device is also connected to a mouse 32, a keyboard 31, and a display device 27, which is an output device.

  The CPU 33 is connected to the hardware units as described above of the control unit 3 through the internal bus 36, controls the operation of the hardware units described above, and according to the computer program stored in the storage device 34. Perform various software functions. The storage device 34 is composed of, for example, a volatile memory such as SRAM or SDRAM, and a load module is developed when the computer program is executed, and stores temporary data generated when the computer program is executed.

  The communication unit 35 is connected to the internal bus 36, is connected to the imaging devices 25 and 26 via a communication line, and receives image data captured by the imaging devices 25 and 26. Further, by being connected to an external network such as the Internet, a LAN, or a WAN, data can be transmitted / received to / from an external computer or the like. Note that the computer program stored in the storage device 34 is downloaded from an external computer via the communication means 35.

  The CPU 33 of the control unit 3 includes epi-illumination image data that is image data of an epi-illumination image captured by the imaging device 25 using the epi-illumination device 22 and image data of a transmission image captured by the imaging device 26 using the transmission illumination device 24. Storage means 331 for storing the transmitted image data, display means 332 for displaying the reflected image data or the transmitted image data on the display device 27, and a predetermined edge portion of the measurement object 20 on the displayed reflected image or transmitted image. A specification receiving unit 333 that receives a specification of an edge detection area including the coordinate value acquisition unit 334 that acquires a coordinate value of a predetermined edge point indicating an edge portion in the edge detection region that has received the specification, and a coordinate value of the edge point Arc specifying means 335 for specifying the arc of the round shape portion, and a shape for converting the specified arc shape by the magnification of the light receiving lens With the rate conversion unit 336, and controls these processing operations.

  The arc specifying means 335 also specifies a straight line portion for specifying two straight line portions based on the coordinate values of predetermined edge points indicating two straight line portions that are continuous with the circular arc between the circular shape portions. Means 51, middle line identifying means 52 for identifying a middle line that is a straight line that bisects an angle formed by extending two specified straight line sections and sandwiching the arc, and a point at which the middle line intersects the arc Is included as an intersection, a center point specifying unit 54 for specifying the center point of the arc, and a base point specifying unit 55 for specifying the base point of the arc.

  The storage unit 331 stores the incident image data and the transmission image data in the storage device 34 in a state where they are aligned with each other. Here, the alignment means that the coordinate position on the display screen is matched between the incident image and the transmission image. By storing the two types of image data that have been aligned, it is possible to select appropriate image data in accordance with the edge detection region for which the designation has been received. When measuring the arc shape of the round shape portion of the outer shape of the measurement object 20, optimal transmission image data can be used to measure the dimension of the contour line portion indicating the outer shape. Further, the arc shape of the round shape portion formed as the unevenness of the surface of the measurement object 20 can be accurately measured by processing the incident image data in the same manner as the transmission image data.

  The display unit 332 displays the transmission image data or the incident image data received by the communication unit 35 as a transmission image or an incident image on the display device 27 such as an LCD or an organic EL display. FIG. 3 is an exemplary view of a transmission image displayed on the display device 27. As shown in FIG. 3, an operation console 272 for designating an edge detection area on the transmission image is displayed on the screen of the display device 27 together with the transmission image 271 of the measurement object 20.

  FIG. 4 is a view showing an example of an edge detection area designated on the image. As shown in FIG. 4, when the operator wants to measure the shape of a predetermined portion of the measurement object 20, for example, one side a of the outer shape of the measurement object 20, the operator uses the area b including the side a as an edge detection area. Specify by dragging with. The designated edge detection area is received by the designation receiving means 333. The side a to be measured is a boundary portion (edge portion) between the measurement object 20 and the background. In the image data, the luminance value of the background pixel is remarkably high and the luminance value of the pixel of the measurement object 20 is low. Therefore, for example, the luminance difference between adjacent pixels is a predetermined value from the luminance value of the pixel in the edge detection region. Larger places (between pixels) can be recognized as edges.

  The coordinate value acquisition means 334 sets the position of the predetermined interval as the edge point c as shown in FIG. 4 between the pixels in which the luminance difference between the adjacent pixels in the edge region in which the designation is received is larger than the predetermined value. The coordinate value of the point c is acquired. Specifically, the coordinate value acquisition unit 334 searches for edge points in the perpendicular direction d at predetermined intervals in the longitudinal direction of the region b as shown in FIG. 4, that is, calculates a luminance difference between adjacent pixels. Then, an edge point c is set between pixels having a luminance difference larger than a predetermined value, and coordinate values of a plurality of edge points are acquired.

  FIG. 5 is a view showing an example of the shape specified by the least square method based on the edge points. As shown in FIG. 5, since the edge point c acquired by the coordinate value acquiring unit 334 is not on a complete straight line, the straight line portion specifying unit 51 geometrically determines the edge point c by a regression analysis such as a least square method. The straight line portion of the geometric figure is specified by fitting to the geometric figure (a straight line in the example of FIG. 5). The identified straight line portion is the one side a portion of FIG. 4 to be measured, and has parameters such as coordinate values and distances. The arc specifying means 335 calculates edges such as circles in addition to straight lines, and determines the measurement object 20 according to the distance or angle between the edges, the parameters of each edge (for example, the center coordinates and diameter of the circle edge), and the like. measure. Therefore, “specifying a shape” such as a straight line or a circle means specifying parameters such as coordinate values and distances of each shape.

  FIG. 6 is an exemplary diagram of an edge detection region that is received by the designation receiving unit 333 when measuring a circular arc of a round shape portion of the measurement target 20. As shown in FIG. 6, when the predetermined edge portion of the measurement object 20 to be measured is a circular arc e of a round shape portion, only the circular arc e is detected without including a continuous linear portion as described above. Since it is very difficult to designate the region, the operator designates two linear portions that are continuous with the arc e with the arc e of the round-shaped portion interposed therebetween as the edge detection region f. Note that the edge detection region f of the two linear portions designates a complete linear portion sufficiently separated from the arc e. The specified edge detection region f is specified by the specification receiving unit 333 as described above, the coordinate value of the edge point is acquired by the coordinate value acquisition unit 334, and the minimum is determined based on the edge point by the straight line portion specifying unit 51. Two straight line portions are specified by being calculated by a square method or the like. Since the edge detection region can be easily specified for the two linear portions, it can be calculated with almost no error from the shape on the image.

  FIG. 7 is an explanatory diagram for explaining various points and lines specified by the arc specifying means 335. As shown in FIG. 7, the midline specifying means 52 is a midline i that is a straight line that bisects an angle h formed by the extension line g of the two specified straight portions x intersecting and sandwiching the arc e. Is identified. The intersection specifying means 53 specifies a point where the middle line i intersects the arc e as the intersection j. The intersection j is detected from the image. Specifically, the vicinity of the intersection j is designated as an edge detection area, and an edge point on the middle line i is detected as the intersection j among a plurality of edge points acquired from the edge detection area.

  The center point specifying means 54 determines a point where the distance L1 between the point on the middle line i and the two straight line parts x or the extension line g and the distance L2 between the intersection j and the point on the middle line i are equal to each other in the circular arc. It is specified as the center point k of e. The base point specifying means 55 specifies, as the base point n, a point where the straight line m passing through the center point k is orthogonal to the two straight line portions x or the extension line g. When the distances L1 and L2 are equal, the distances L1 and L2 are the arc radii. Therefore, at least two points among the center point k, the base point n, and the intersection point j can be specified, and the arc e can be specified based on the specified points.

  As described above, the center point k is a point obtained by calculation, but the intersection point j and the base point n are points detected from the image. Further, when the distances L1 and L2 are equal, the base point n is detected as a base point n where the straight line m is geometrically orthogonal to the two straight line portions x or the extension line g. An edge point on the straight line m among a plurality of edge points acquired by designating the vicinity of n as an edge detection region may be detected as the base point n.

  FIG. 8 is an exemplary diagram showing four patterns that specify the arc e based on at least two of the center point k, the base point n, and the intersection point j. 8A shows a pattern A based on the intersection j and the center point k, FIG. 8B shows a pattern B based on the center point k and one base point n, and FIG. 8C shows an intersection j and two base points n. FIG. 8D shows a pattern D based on the intersection point j, the center point k, and the two base points n.

  In the pattern A based on the intersection j and the center point k, as shown in FIG. 8A, if the intersection j and the center point k are determined, the distance L2 between the intersection j and the center point k becomes the radius of the arc, A circle with a radius L2 centered on the center point k can be specified, and the arc can be specified with the point where the specified circle is in contact with the two straight line portions x as both ends of the arc. The point where the circle touches the two straight line portions x is calculated as a coordinate value from parameters such as the coordinate values of the circle and the two straight line portions x.

  In the pattern B based on the center point k and one base point n, as shown in FIG. 8B, if the center point k and one base point n are determined, the distance L1 between the center point k and one base point n is determined. Is the radius of the arc, and similarly to the pattern A, the circle having the radius L1 with the center point k as the center is specified, and the arc is specified with the point where the specified circle is in contact with the two straight line portions x as both ends of the arc. it can.

  In the pattern C based on the intersection point j and the two base points n, as shown in FIG. 8C, a point located at an equal distance L3 from the intersection point j and the two base points n is the center point of the arc. And a circle with a radius L3 centered on the specified center point. An arc having two base points n at both ends can be specified from the specified circle.

  In the pattern D based on the intersection point j, the center point k, and the two base points n, as shown in FIG. 8D, when specifying a circle centered on the center point k, the circle passes through the two base points n. A circle can be specified, and an arc can be specified in the same manner as pattern C.

  Next, the operation of the image measuring apparatus 1 having the above-described configuration will be described in detail based on a flowchart. FIG. 9 is a flowchart showing an arc specifying process procedure of the pattern D by the CPU 33 of the control unit 3 of the image measuring device 1 according to the first embodiment of the present invention.

  As shown in FIG. 9, the CPU 33 of the control unit 3 displays an image on the display device 27 based on the transmission image data or the incident image data stored in the storage device 34 (step S901).

  The CPU 33 accepts designation of an edge detection region including two linear portions that are continuous with the arc on the displayed image across the arc of the round shape portion of the measurement target (step S902). Specifically, as shown in FIG. 6, the operator designates each edge detection region by dragging the mouse separately for the two linear portions.

  CPU33 acquires the coordinate value of the predetermined edge point which shows the linear part in each edge detection area which received designation | designated (step S903). Specifically, the coordinate difference between the adjacent pixels in the edge region in which the designation is received is larger than a predetermined value, and each coordinate value has a plurality of edge points at predetermined intervals as shown in FIG. To get.

  The CPU 33 specifies two straight line portions based on the acquired coordinate values of the plurality of edge points (step S904). Specifically, by fitting a plurality of edge points to a straight line by the least square method or the like, two straight line portions each having parameters such as a coordinate value and a distance are specified.

  As shown in FIG. 7, the CPU 33 specifies a middle line that is a straight line that bisects the angle formed by the extension lines of the two specified straight portions intersecting each other with an arc (step S905), and the CPU 33. Specifies a point where the specified middle line intersects the arc as an intersection (step S906). The middle line is calculated based on the straight line parameters, and the intersection point is detected from the image.

  The CPU 33 determines a point on the middle line, where the distance (L1) between the point and two straight line portions or an extension line of the straight line portion is equal to the distance (L2) between the intersection point and the point. Is specified as a center point (step S907), and a point where a straight line passing through the center point is orthogonal to two straight line portions or an extension line of the straight line portion is specified as a base point (step S908). The distance (L1 = L2) at which L1 becomes equal to L2 is specified as the radius of the arc (step S909). The base point is detected from the image, and the radius is calculated based on the center point, base point, and intersection parameters.

  The CPU 33 specifies a circle whose radius is the distance between the intersection and the center point (L1 = L2) with the center point as the center so that the circle passes through the two base points (step S910). An arc having two base points at both ends is specified (step S911).

  The CPU 33 measures the arc (size, etc.) of the actual measurement object by converting the specified arc shape by the magnification of the light receiving lens based on parameters such as the specified arc diameter and center point coordinates ( Step S912).

  As described above, according to the first embodiment, by specifying the two straight line portions based on the coordinate values of the predetermined edge points indicating the two straight line portions, the straight line portions sandwiching the circular arc are identified. Since the region can be easily specified, two straight line portions sandwiching the circular arc can be specified with almost no error from the shape on the image by the least square method or the like from the edge point. In addition, a center line that is a straight line that bisects the angle formed by the extension lines of the two specified straight lines intersecting each other and sandwiching the arc is specified, and a point at which the specified center line intersects the arc Thus, it is possible to accurately specify the center line where the center of the arc is located from the accurately specified straight line portion and the intersection point where the center line intersects the arc and is the center on the arc.

  Furthermore, by specifying the arc based on at least one of the two straight line portions, the middle line, and the intersection, for example, the center point and radius of the arc, and both ends of the arc can be accurately specified, The arc on the image can be accurately specified based on the center point or the like. In particular, the distance (L1) between the predetermined point and the intersection (L2) is the distance (L1) between the predetermined point on the center line and the point where the straight line passing through the two straight line parts or the extension line of the straight line part is orthogonal to the predetermined point. ) (L1 = L2), by making the orthogonal point as the base point, the arc on the image can be accurately obtained based on at least two points of the center point, the base point, and the intersection point together with the radius and the base point. Can be identified.

  Then, by converting the shape of the specified arc by the magnification of the light receiving lens, it becomes possible to accurately measure the arc of the actual measurement object from the arc on the accurately specified image. Therefore, by specifying the linear part area that can be easily specified without specifying the arc area that is difficult to specify accurately, the round shape part arc of the measurement object can be accurately specified. It becomes possible to measure.

(Embodiment 2)
Since the configuration of the image measuring apparatus 1 according to the second embodiment of the present invention is the same as that of the first embodiment, detailed description thereof is omitted by attaching the same reference numerals. FIG. 10 is a block diagram showing the configuration of the control unit 3 of the image measuring device 1 according to Embodiment 2 of the present invention. As shown in FIG. 10, the hardware configuration of the control unit 3 of the image measurement apparatus 1 according to the second embodiment is the same as that of the first embodiment. Is omitted.

  However, in the second embodiment, the CPU 33 of the control unit 3 includes an area designating unit 337 that designates an edge detection area including the vicinity of the intersection. Also, the coordinate value acquisition unit 334 acquires the coordinate value of a predetermined edge point including the intersection indicating the arc portion in the edge detection area designated by the area designation unit 337.

  FIG. 11 is an exemplary diagram showing two patterns for specifying the arc e based on the edge point p of the edge detection area o designated by the area designation means 337. FIG. 11A is an exemplary diagram showing a pattern E for searching for the edge point p in the direction parallel to the middle line i. FIG. 11B is an exemplary diagram showing a pattern F for searching the edge point p in the radial direction from the center point k.

  In the second embodiment, similarly to the first embodiment, as shown in FIG. 7, each means of the arc specifying means 335 includes two linear portions that are continuous with the arc e with the arc e of the round shape portion interposed therebetween. x is specified, and the middle line i and the intersection j are specified from the extension line g of the straight line portion. In the second embodiment, the area designating unit 337 designates an edge detection area o including the vicinity of the intersection j as shown in FIGS. 11 (a) and 11 (b). The area designating means 337 designates a central part having a sufficiently small angle with respect to the whole angle of the arc e as an edge detection area o with the intersection j as the center so as not to include two straight line parts x continuous with the arc e. Therefore, it is not necessary for the operator to specify the edge detection area o.

  When the coordinate value acquisition unit 334 searches for edge points p at a predetermined interval on a part of the arc e in the edge detection region o designated by the region designation unit 337, for example, as shown in FIG. The search is performed in a parallel direction of i or in a radial direction from the center point k as shown in FIG. The coordinate value acquisition unit 334 acquires the coordinate values of the plurality of edge points p, p,... Detected by searching and includes the intersection point j in the edge point p. In the arc specifying means 335, a circle having an arc e is specified by a least square method or the like based on a plurality of edge points p including the intersection j, and a point where the specified circle is in contact with the two straight line portions x is determined. The arc e can be specified as both ends. Although the edge detection area o is designated only in the narrow center portion of the arc e, an appropriate edge point p of the arc e can be acquired around the intersection j even if the angle of the edge detection area o of the arc e is small. . Therefore, it is possible to avoid the occurrence of a large error from the shape of the circular arc specified by acquiring the edge portion of the circular arc to the straight line portion continuous with the circular arc, based on the appropriately acquired edge point. An arc can be specified with high accuracy.

  FIG. 12 is a flowchart showing an arc specifying process procedure of the pattern E by the CPU 33 of the control unit 3 of the image measuring device 1 according to the second embodiment of the present invention. In the second embodiment, in the same manner as in the first embodiment, two straight line portions that are continuous with the circular arc across the circular arc of the round shape portion of the measurement object 20 are specified, and specified from an extension line of the straight line portion. An arc is identified based on the midline and intersection point. Therefore, since the arc specifying process procedure of the pattern F of the second embodiment is the same as that up to step S906 of the first embodiment until the middle line and the intersection point are specified, the process until the middle line and the intersection point are specified. Description is omitted.

  As shown in FIG. 12, the CPU 33 of the control unit 3 designates an edge detection region including the specified intersection point vicinity (step S1201). The central portion of the arc in the designated edge detection region is a central portion that is sufficiently narrow with respect to the entire arc so as not to include two linear portions that are continuous with the arc.

  The CPU 33 searches for the edge point on the central portion of the arc in the designated edge detection area at a predetermined interval in the parallel direction of the center line, detects a plurality of edge points, includes the intersection points as edge points, and sets the edge points. Each coordinate value is acquired (step S1202).

  Based on the coordinate values of the edge points including the intersection point, the CPU 33 identifies a circle including an arc part having the intersection point in the center (step S1203), and determines the point where the identified circle is in contact with the two straight line parts. Arcs are specified as both ends (step S1204).

  The CPU 33 measures the arc (size, etc.) of the actual measurement object by converting the specified arc shape with the magnification of the light receiving lens based on the parameters such as the specified arc diameter and center point coordinate value. (Step S1205).

  As described above, according to the second embodiment, the intersection point can be processed as one of the edge points, and an appropriate arc edge point is obtained around the intersection point even if the angle of the arc edge detection region is small. can do. Therefore, it is possible to avoid the occurrence of a large error in the shape of the arc specified by acquiring the edge portion of the arc up to the linear portion continuous with the arc, and based on the appropriately acquired edge point. The arc can be specified with high accuracy.

(Embodiment 3)
Since the configuration of the image measuring apparatus 1 according to the third embodiment of the present invention is the same as that of the first embodiment, detailed description thereof is omitted by attaching the same reference numerals. FIG. 13 is a block diagram showing the configuration of the control unit 3 of the image measurement apparatus 1 according to Embodiment 3 of the present invention. As shown in FIG. 13, the hardware configuration of the control unit 3 of the image measurement apparatus 1 according to the third embodiment is the same as that of the first and second embodiments. The detailed explanation is omitted.

  However, in the third embodiment, as in the first embodiment, the center point specifying unit 54 and the base point specifying unit 55 are provided, and the region specifying unit 337 specifies an edge detection region including an arc having both ends as base points, The coordinate value acquisition unit 334 acquires the coordinate value of a predetermined edge point including the intersection and the base point indicating the arc portion in the edge detection area.

  FIG. 14 is an exemplary diagram showing a pattern G that specifies the arc e based on the edge point r of the edge detection region q designated by the region designation means 337.

  In the third embodiment, as in the first embodiment, as shown in FIG. 7, each means of the arc specifying means 335 includes two linear portions that are continuous with the arc e with the arc e of the round shape portion interposed therebetween. x is specified, and the middle line i, the intersection j, the center point k, and the base point n are specified from the extension line g of the straight line portion. Further, as in the second embodiment, the area designating unit 337 designates the edge detection area q including the vicinity of the intersection j, and the edge detection area q has the entire arc e having both ends of the base point n. The operator does not need to specify the edge detection area q.

  The coordinate value acquisition unit 334 searches for edge points r on the arc e within the edge detection region q designated by the region designation unit 337 at predetermined intervals. When searching for the edge point r, it is preferable to search in a radial direction from the center point k as shown in FIG. 11B so that the edge point r is at a predetermined interval on the entire arc e. The coordinate value acquisition unit 334 acquires the coordinate values of the plurality of edge points detected by searching, and includes the intersection point j and the two base points n in the edge point r. The arc specifying means 335 specifies a circle having an arc e by the least square method or the like based on a plurality of edge points r including the intersection j and the base point n, and the arc e having two base points n as both ends from the specified circle. Is identified.

  FIG. 15 is a flowchart showing an arc specifying process procedure of the pattern G by the CPU 33 of the control unit 3 of the image measuring device 1 according to the third embodiment of the present invention. In the third embodiment, in the same manner as in the first embodiment, two straight line portions that are continuous with the circular arc across the circular arc of the round shape portion of the measurement object are specified and specified from the extension line of the straight line portion. An arc is identified based on the midline, intersection, base point, and center point. Therefore, the arc specifying process procedure of the pattern G in the third embodiment is the same as that up to step S908 in the first embodiment until the center line, the intersection, the base point, and the center point are specified. The description until the base point and the center point are specified will be omitted.

  As shown in FIG. 15, the CPU 33 of the control unit 3 designates an edge detection region including an arc having both ends of the identified base point (step S1501). The arc in the specified edge detection area is the entire arc.

  The CPU 33 searches the edge points on the arc in the designated edge detection area at a predetermined interval in the radial direction from the center point, detects a plurality of edge points, includes the intersection points and the base points as the edge points, and sets each of the edge points. A coordinate value is acquired (step S1502).

  The CPU 33 specifies a circle including the entire arc having the intersection at the center based on the coordinate values of the edge points including the intersection and the base point (step S1503), and determines an arc having two base points as both ends from the specified circle. Specify (step S1504).

  The CPU 33 measures the arc (size, etc.) of the actual measurement object by converting the specified arc shape by the magnification of the light receiving lens based on parameters such as the specified arc diameter and center point coordinates ( Step S1505).

  As described above, according to the third embodiment, the intersection point at the center of the arc and the base points at both ends of the arc can be processed as edge points, and the edge detection area can be specified accurately to both ends of the arc. Therefore, it is possible to acquire an appropriate arc edge point according to the intersection and the base point, and it is possible to specify the arc more accurately based on the edge points of the maximum edge detection region.

(Embodiment 4)
Since the configuration of the image measuring apparatus 1 according to the fourth embodiment of the present invention is the same as that of the first embodiment, detailed description thereof is omitted by attaching the same reference numerals. Moreover, since the structure of the control unit 3 of the image measuring device 1 according to the fourth embodiment of the present invention is the same as that of the third embodiment, the detailed description is omitted by attaching the same reference numerals. However, in the fourth embodiment, the arc specifying means 335 specifies an arc so that the center of the arc is located on the middle line based on the coordinate value of a predetermined edge point on the arc.

  FIG. 16 is an exemplary diagram showing a pattern H that specifies the arc e based on the edge point t of the edge detection region s specified by the region specifying means 337.

  In the fourth embodiment, similarly to the first and third embodiments, as shown in FIG. 7, each means of the arc specifying means 335 includes two pieces that are continuous with the arc e across the arc e of the round-shaped portion. A straight line portion x is specified, and a center line i, an intersection j, a center point k, and a base point n are specified from an extension line g of the straight line portion. Further, as in the third embodiment, the area designating unit 337 designates the edge detection area s including the entire arc e having the base point n as both ends. The operator does not need to specify the edge detection area s.

  The coordinate value acquisition unit 334 searches for the edge points t at predetermined intervals on the arc e in the edge detection region s designated by the region designation unit 337 as shown in FIG. The coordinate values of the plurality of edge points are acquired, and the intersection point j and the two base points n are included in the edge point t. The arc specifying means 335 specifies a circle having the arc e by the least square method or the like based on a plurality of edge points t including the intersection j and the base point n so that the center of the arc e is positioned on the center line i. Then, an arc e having two base points n as both ends is specified from the specified circle.

  FIG. 17 is a flowchart showing an arc specifying process procedure of the pattern H by the CPU 33 of the control unit 3 of the image measuring device 1 according to the fourth embodiment of the present invention. In the fourth embodiment, in the same manner as in the first embodiment, two straight line portions that are continuous with the circular arc across the circular arc of the round shape portion of the measurement target are specified, and are specified from an extension line of the straight line portion. An arc is identified based on the midline, intersection, base point, and center point. Therefore, the arc specifying process procedure of the pattern H in the fourth embodiment is the same as that up to step S908 in the first embodiment until the center line, the intersection, the base point, and the center point are specified. The description until the base point and the center point are specified will be omitted.

  As shown in FIG. 17, the CPU 33 of the control unit 3 designates an edge detection area including an arc having both ends of the identified base point (step S1701).

  The CPU 33 searches the edge points on the arc in the designated edge detection area at a predetermined interval in the radial direction from the center point, detects a plurality of edge points, includes the intersection points and the base points as the edge points, and sets each of the edge points. A coordinate value is acquired (step S1702).

  The CPU 33 identifies a circle having an arc by the least square method or the like so that the center of the arc is located on the middle line based on the coordinate values of the edge points including the intersection and the base point (step S1703). To specify an arc having two base points at both ends (step S1704).

  The CPU 33 measures the arc (size, etc.) of the actual measurement object by converting the specified arc shape by the magnification of the light receiving lens based on parameters such as the specified arc diameter and center point coordinates ( Step S1705).

  As described above, according to the fourth embodiment, based on the coordinate value of the edge point on the arc, the arc is specified so that the center of the arc is located on the middle line. It is possible to correct or approximate the center point by correcting the position on the center line, and the arc can be specified with higher accuracy.

(Embodiment 5)
Since the configuration of the image measurement apparatus 1 according to the fifth embodiment of the present invention is the same as that of the first embodiment, detailed description thereof will be omitted by attaching the same reference numerals. In addition, the configuration of the control unit 3 of the image measuring device 1 according to the fifth embodiment of the present invention is the same as that of the second to fourth embodiments. . However, in the fifth embodiment, the arc specifying means 335 specifies the arc so that the center of the arc is located at the center point based on the coordinate value of the edge point on the arc.

  FIG. 18 is an exemplary diagram showing a pattern I for specifying the arc e based on the edge point v of the edge detection area u designated by the area designation means 337.

  In the fifth embodiment, in the same manner as in the first and third embodiments, as shown in FIG. 7, each means of the arc specifying means 335 includes two pieces that are continuous with the arc e across the arc e of the round-shaped portion. A straight line portion x is specified, and a center line i, an intersection j, a center point k, and a base point n are specified from an extension line g of the straight line portion. Further, as in the third and fourth embodiments, the region designating unit 337 designates the edge detection region u including the entire arc e having the base point n as both ends. The operator does not need to specify the edge detection area u.

  The coordinate value acquisition means 334 searches for edge points v at predetermined intervals on the arc e in the edge detection area u designated by the area designation means 337 as shown in FIG. Then, the coordinate values of the plurality of edge points v are acquired, and the intersection point j and the two base points n are included in the edge point v. The arc specifying means 335 specifies a circle having the arc e by the least square method or the like so that the center of the arc e is located at the center point k based on a plurality of edge points v including the intersection j and the base point n. An arc e having two base points n as both ends is specified from the specified circle.

  FIG. 19 is a flowchart showing the arc specifying process procedure of the pattern I by the CPU 33 of the control unit 3 of the image measuring apparatus 1 according to the fifth embodiment of the present invention. In the fifth embodiment, in the same manner as in the first embodiment, two straight line portions that are continuous with the circular arc across the circular arc of the round shape portion of the measurement object are specified and specified from the extension line of the straight line portion. An arc is identified based on the midline, intersection, base point, and center point. Therefore, the arc specifying process procedure of the pattern I of the fifth embodiment is the same as that up to step S908 of the first embodiment until the center line, the intersection, the base point, and the center point are specified. The description until the base point and the center point are specified will be omitted.

  As shown in FIG. 19, the CPU 33 of the control unit 3 designates an edge detection region including an arc having both ends of the identified base point (step S1901).

  The CPU 33 searches the edge points on the arc in the designated edge detection area at a predetermined interval in the radial direction from the center point, detects a plurality of edge points, includes the intersection points and the base points as the edge points, and sets each of the edge points. A coordinate value is acquired (step S1902).

  The CPU 33 identifies a circle having an arc by the least square method or the like so that the center of the arc is positioned on the center point based on the coordinate values of the edge points including the intersection and the base point (step S1903). An arc having two base points n at both ends is specified from the circle (step S1904).

  The CPU 33 measures the arc (size, etc.) of the actual measurement object by converting the specified arc shape by the magnification of the light receiving lens based on parameters such as the specified arc diameter and center point coordinates ( Step S1905).

  As described above, according to the fifth embodiment, by specifying the arc so that the center of the arc is located at the center point based on the coordinate value of the edge point on the arc, the center of the arc is set as the center point. An exact arc can be specified by matching.

  FIG. 20 is a schematic diagram illustrating a configuration of another image measurement apparatus 1. As shown in FIG. 20, the present image measurement apparatus 1 includes a measurement unit 2 and an external computer 4, and the image data captured by the measurement unit 2 is processed by the external computer 4 to obtain a desired value. Measure the dimensions of the shape.

  Since the configuration and function of the measurement unit 2 are the same as those in the first to fifth embodiments, detailed description is omitted by attaching the same reference numerals. The external computer 4 includes at least a CPU (not shown) and a storage device (not shown) such as a memory, and is connected to a display device 41, a keyboard 42, and a mouse 43. A CPU (not shown) acquires image data from the imaging devices 25 and 26, and executes the same processing as the CPU 33 of the control unit 3 in the first to fifth embodiments described above.

  In addition, the present invention is not limited to Embodiments 1 to 5 described above, and it goes without saying that various modifications and substitutions are possible within the scope of the present invention.

It is a schematic diagram which shows the structure of the image measuring device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is an illustration figure of the permeation | transmission image displayed on a display apparatus. It is an illustration figure of the edge detection area designated on an image. It is an illustration figure of the shape specified by the least squares method based on an edge point. It is an illustration figure of the edge detection area | region which a designation | designated reception means receives when measuring the circular arc of the round shape part of a measurement object. It is explanatory drawing for demonstrating the various points and line which are specified by a circular arc specifying means. It is an illustration figure which shows four patterns which specify a circular arc based on at least two points of a center point, a base point, and an intersection. It is a flowchart which shows the circular arc specific process sequence of the pattern D by CPU of the control unit of the image measuring device which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 2 of this invention. It is an illustration which shows two patterns which specify a circular arc based on the edge point of the edge detection area designated by the area designation means. It is a flowchart which shows the circular arc specific process sequence of the pattern E by CPU of the control unit of the image measuring device which concerns on Embodiment 2 of this invention. It is a block diagram which shows the structure of the control unit of the image measuring device which concerns on Embodiment 3 of this invention. It is an illustration figure which shows the pattern G which specifies a circular arc based on the edge point of the edge detection area designated by the area designation means. It is a flowchart which shows the circular arc specific process sequence of the pattern G by CPU of the control unit of the image measuring device which concerns on Embodiment 3 of this invention. It is an illustration figure which shows the pattern H which specifies a circular arc based on the edge point of the edge detection area designated by the area designation means. It is a flowchart which shows the circular arc specific process sequence of the pattern H by CPU of the control unit of the image measuring device which concerns on Embodiment 4 of this invention. It is an illustration figure which shows the pattern I which specifies a circular arc based on the edge point of the edge detection area designated by the area designation means. It is a flowchart which shows the circular arc specific process sequence of the pattern I by CPU of the control unit of the image measuring device which concerns on Embodiment 5 of this invention. It is a schematic diagram which shows the structure of another image measuring device. It is an illustration figure of the edge detection area designated on the conventional image. It is an illustration figure of the shape specified by the least squares method based on the conventional edge point. It is explanatory drawing for demonstrating the circle | round | yen obtained by fitting the conventional edge point to a geometric figure. It is explanatory drawing for demonstrating the difference of the approximate circle by the magnitude of the designated angle of the circular arc of the conventional edge detection area. It is explanatory drawing which shows the approximate circle when the designated circular arc range of the conventional edge detection area exceeds the circular arc range of a measurement object. It is an illustration figure of the circular arc displayed by a micro size on the conventional image.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Image measuring device 2 Measuring part 3 Control unit 25, 26 Imaging device 27 Display device 31 Keyboard 32 Mouse 34 Storage device 35 Communication means 36 Internal bus 331 Storage means 332 Display means 333 Specification reception means 334 Coordinate value acquisition means 335 Arc specifying means 336 Shape magnification conversion means 51 Straight line portion specifying means 52 Middle line specifying means 53 Intersection specifying means 54 Center point specifying means 55 Base point specifying means

Claims (9)

In an image measurement device that measures the shape of a measurement object based on an image obtained by forming an image of a transmitted light or reflected light of light irradiated on the measurement object on an imaging device,
Display means for displaying an image obtained by imaging with the image sensor on a display;
Designation accepting means for accepting designation of an edge detection region including a predetermined edge portion of the measurement object on the image displayed on the display;
Coordinate value acquisition means for acquiring the coordinate value of a predetermined edge point indicating the edge portion in the edge detection region that has received the designation;
An arc specifying means for specifying an arc of the round-shaped portion based on the acquired coordinate value of the edge point;
A shape magnification conversion means for converting the shape of the arc specified by the arc specifying means by the magnification of the light receiving lens;
The arc specifying means includes
Straight line portion specifying means for specifying two straight line portions based on the coordinate values of predetermined edge points indicating two straight line portions that are continuous with the circular arc between the circular arcs of the round shape portion;
A middle line identifying means for identifying a middle line that is a straight line that bisects the angle formed by the extension lines of the two identified straight lines intersecting and sandwiching the arc;
An intersection specifying means for specifying a point at which the identified middle line intersects the arc as an intersection ;
A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. A center point identifying means to identify;
Base point specifying means for specifying a straight line passing through the center point as a base point that is perpendicular to the two straight line portions or an extension line of the straight line portion , and
An image measuring apparatus characterized in that the arc is specified based on at least two of the center point, the base point, and the intersection. Comprising an area designating means for designating an edge detection area including the vicinity of the intersection;
The coordinate value acquisition unit is configured to acquire a coordinate value of a predetermined edge point including the intersection point indicating an arc portion in an edge detection region designated by the region designation unit. image measurement device according to 1. The arc specifying means includes
A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. A center point identifying means to identify;
Base point specifying means for specifying, as a base point, a straight line passing through the center point is perpendicular to the two straight line portions or an extension line of the straight line portion;
Including
The region designating unit is configured to designate an edge detection region including an arc having both ends of the base point;
The coordinate value acquisition unit is configured to acquire coordinate values of a predetermined edge point including the intersection and the base point indicating the arc portion in the edge detection region designated by the region designation unit. The image measurement device according to claim 2 . In an image measurement method that can be executed by an image measurement device that measures the shape of a measurement object based on an image obtained by forming an image of a transmitted light or reflected light of light irradiated on the measurement object on an image sensor ,
Displaying an image obtained by imaging with the imaging device on a display;
Accepting designation of an edge detection region including a predetermined edge portion of the measurement object on the image displayed on the display,
Get the coordinate value of the specified edge point indicating the edge part in the edge detection area that received the specification,
Two linear portions are specified based on the coordinate values of predetermined edge points indicating two linear portions that are continuous with the circular arc of the round shape portion of the measurement object,
Identify the middle line that is a straight line that bisects the angle formed by the extension lines of the two identified straight lines intersecting the arc.
Identify the point where the identified midline intersects the arc as an intersection,
A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. Identify,
The point through which the straight line passing through the center point is orthogonal to the two straight line portions or an extension line of the straight line portion is specified as a base point,
Identifying the arc based on at least two points of the center point, the base point and the intersection;
An image measuring method, wherein the specified arc shape is converted by a magnification of a light receiving lens . Specify an edge detection area that includes the vicinity of the intersection,
The image measurement method according to claim 4, wherein the coordinate value of a predetermined edge point including the intersection indicating the arc portion in the designated edge detection region is acquired . A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. Specifying a point where a straight line passing through the center point is orthogonal to the two straight line portions or an extension line of the straight line portion,
Specify an edge detection area including an arc with both ends of the base point,
The image measurement method according to claim 5 , wherein coordinate values of predetermined edge points including the intersection point and the base point indicating the arc portion in the designated edge detection region are acquired . In a computer program that can be executed by an image measurement device that measures the shape of a measurement object, based on an image obtained by forming an image of a transmitted light or reflected light of light irradiated on the measurement object.
The image measuring device;
Display means for displaying an image obtained by imaging with the image sensor on a display;
Designation accepting means for accepting designation of an edge detection region including a predetermined edge portion of the measurement object on the image displayed on the display;
Coordinate value acquisition means for acquiring the coordinate value of a predetermined edge point indicating the edge portion in the edge detection region that has received the specification;
Arc specifying means for specifying the arc of the round-shaped portion based on the obtained coordinate value of the edge point, and
Shape magnification conversion means for converting the shape of the arc specified by the arc specifying means by the magnification of the light receiving lens
Function as
The arc specifying means,
Straight line portion specifying means for specifying two straight line portions based on the coordinate value of a predetermined edge point indicating two straight line portions that are continuous with the circular arc across the circular arc of the round shape portion;
A midline specifying means for specifying a midline that is a straight line that bisects the angle formed by the extension lines of the two specified straight portions intersecting each other with the arc interposed therebetween,
An intersection specifying means for specifying, as an intersection, a point at which the identified middle line intersects the arc;
A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. Means for identifying the center point,
A base point specifying means for specifying, as a base point, a point where a straight line passing through the center point is orthogonal to the two straight line portions or an extension line of the straight line portion; and
Means for identifying the arc based on at least two points of the center point, the base point, and the intersection point
A computer program that functions as a computer program . Causing the image measuring device to function as an area designating unit for designating an edge detection area including the vicinity of the intersection;
Claims, characterized in that to function as means for acquiring a coordinate value of a predetermined edge point, including the intersection point indicating the arc portion of the coordinate value obtaining means, the region designation means the edge detection area specified by Item 8. The computer program according to Item 7. The previous Symbol arc specific means,
A point on the middle line, and a point where the distance between the point and the two straight line portions or an extension line of the straight line portion is equal to the distance between the intersection and the point is defined as a center point of the arc. Center point identifying means for identifying, and
Base point specifying means for specifying, as a base point, a straight line passing through the center point is perpendicular to the two straight line portions or an extension line of the straight line portion.
Function as
The area specifying means functions as means for specifying an edge detection area including an arc having both ends of the base point,
The coordinate value acquisition means functions as means for acquiring the coordinate values of a predetermined edge point including the intersection and the base point indicating the arc portion in the edge detection area designated by the area designation means. The computer program according to claim 8 .

Images