JP5115538B2 - OPTICAL DEVICE, IMAGING DEVICE, AND OPTICAL DEVICE MANUFACTURING METHOD - Google Patents

Description

  The present invention relates to an optical device, an imaging device, and an optical device manufacturing method, and more particularly to an optical device having a dust removal function.

  In recent years, in an interchangeable lens digital camera or the like, there is a problem that dust adheres to the surface of an optical low-pass filter of an image sensor and the dust is reflected in a photographed image. In order to solve such problems, a dust-proof member is disposed between the image sensor and the optical system, and the image sensor is dust-proof and dust attached to the dust-proof member is removed by physical vibration. Has been developed (see Patent Document 1).

  However, since the conventional system removes dust by physical vibration, it effectively removes dust with a small mass that is difficult to generate a large inertial force and dust attached through electrostatic force due to charging. It has a problem that it is difficult to do.

JP 2008-99332 A

  An object of the present invention is to provide an optical device and an imaging device that can effectively remove dust attached to a substrate that transmits light, and a method for manufacturing the optical device.

In order to achieve the above object, an optical device according to the present invention comprises:
Vibration members (20, 20a, 20b) which are provided on substrates (36, 36a, 36b, 36c, 36d, 36e) that transmit light and vibrate the substrates;
A drive circuit (29) for driving the vibration member so that a vibration node is generated in the substrate;
A plurality of electrodes (42, 92, 98, 103) that transmit light provided at least in part in the vicinity of the vibration node (99) of the substrate;
An output circuit (28) for outputting a voltage to the plurality of electrodes so as to change an electric field on the surface of the substrate;

  For example, the electrode may be provided substantially in parallel with the vibration node of the substrate.

  For example, in the optical device according to the present invention, the vibration member and the electrode may be provided substantially in parallel.

  Further, for example, in the optical device according to the present invention, the vibration member and the electrode may be provided substantially orthogonally.

Further, for example, the substrate may be rectangular,
The vibration member may be provided substantially parallel to the sides (40a, 40b) of the substrate.

  Further, for example, the output circuit may output a voltage to the electrode so that an electric field generated in the substrate moves when the drive circuit drives the vibrating member.

  For example, the output circuit may output a voltage to the electrode so that an electric field generated in the substrate moves after the driving circuit drives the vibrating member.

Further, for example, the optical device according to the present invention may include a wiring board (38, 88, 96, 102) that is provided on the substrate and electrically connects the output circuit and the electrode.
The vibration member may be provided at least partially facing the wiring board.

  Further, for example, the plurality of electrodes are provided in parallel with the first electrode (42a, 92a, 98a, 103a) provided along the surface of the substrate and along the surface of the substrate. The second electrode (42b, 92b, 98b, 103b) may be included.

  For example, the output circuit may apply an AC voltage having a phase different from a phase of the AC voltage applied to the first electrode to the second electrode.

  For example, the output circuit applies a voltage to the first electrode and the second electrode so that an electric field generated in the light transmissive member moves in a direction orthogonal to a direction in which the first electrode is formed. It may be output.

An imaging apparatus according to the present invention includes any one of the optical devices described above,
An imaging unit (16) is provided to face the substrate of the optical device and captures an image by an optical system.

The method for manufacturing an optical device according to the present invention includes:
The vibration member (20, 20a, 20b) and the electrode (42, 92, 98, 103) that transmits light are arranged on a substrate that transmits light,
A drive circuit (29) for driving the vibrating member is connected to the vibrating member;
An output circuit (28) for outputting a voltage to the electrode is connected to the electrode so that an electric field generated in the substrate moves.

In addition, a method for manufacturing an optical device according to the present invention includes:
The drive circuit may be adjusted so that a vibration node (99) is generated in the vicinity of at least a part of the electrode.

Also, for example, the optical device according to the present invention is
You may have the voltage supply circuit (131) which supplies a voltage to the said drive circuit (129) and the said output circuit (128).

  For example, the voltage supply circuit may include a sweep circuit unit (131a) that changes the frequency of the voltage with time.

Also, for example, the optical device according to the present invention is
A switch circuit (133) disposed between the drive circuit, the output circuit, and the voltage supply circuit, for switching and connecting at least one of the drive circuit and the output circuit to the voltage supply circuit; May be.

Also, for example, the optical device according to the present invention is
In a series of dust removal operations, the switch circuit connects the voltage supply circuit and the drive circuit after connecting the voltage supply circuit and the drive circuit, and then connects the voltage supply circuit and the drive circuit again. It may be connected.

  In the above description, in order to explain the present invention in an easy-to-understand manner, the description has been made in association with the reference numerals of the drawings showing the embodiments, but the present invention is not limited to this. The configuration of the embodiment described later may be improved as appropriate, or at least a part of the configuration may be replaced with another component. Further, the configuration requirements that are not particularly limited with respect to the arrangement are not limited to the arrangement disclosed in the embodiment, and can be arranged at a position where the function can be achieved.

FIG. 1 is an overall block diagram of a camera equipped with an optical device according to an embodiment of the present invention. FIG. 2 is a plan view of the periphery of the image sensor mounted on the camera shown in FIG. FIG. 3 is a cross-sectional view taken along line III-III in the periphery of the image sensor shown in FIG. 4A to 4C are cross-sectional views of a filter portion provided in the periphery of the image sensor. FIG. 5 is a flowchart for explaining an example of the manufacturing process of the optical device according to the present invention. FIG. 6 is a cross-sectional view and a plan view of a dustproof filter provided in the periphery of the image sensor shown in FIG. FIG. 7 is a schematic diagram for explaining a dust removal operation using the dust filter shown in FIG. FIG. 8 is a cross-sectional view and a plan view of a dustproof filter in the optical device according to the second embodiment of the present invention. FIG. 9 is an overall block diagram of a camera equipped with an optical device according to the third embodiment of the present invention. FIG. 10 is a plan view of the periphery of the image sensor mounted on the camera shown in FIG. FIG. 11 is a cross-sectional view taken along line XI-XI in the periphery of the image sensor shown in FIG. 12 is a cross-sectional view and a plan view of a dustproof filter provided in the periphery of the image sensor shown in FIG. FIG. 13 is a schematic diagram for explaining a first stage in the dust removal operation by the dust filter shown in FIG. FIG. 14 is a schematic diagram for explaining a second stage in the dust removal operation by the dust filter shown in FIG. FIG. 15 is a schematic diagram for explaining a third stage in the dust removal operation by the dust filter shown in FIG. FIG. 16 is a cross-sectional view and a plan view of a dustproof filter in an optical device according to a fourth embodiment of the present invention. FIG. 17 is a sectional view and a plan view of a dustproof filter in an optical device according to a fifth embodiment of the present invention. FIG. 18 is a cross-sectional view and a plan view of a dustproof filter in an optical device according to a sixth embodiment of the present invention. FIG. 19 is a flowchart for explaining an example of the dust removal operation by the dust filter shown in FIG. FIG. 20 is an overall block diagram of a camera equipped with an optical device according to the seventh embodiment of the present invention. FIG. 21 is a schematic diagram for explaining the dust removal operation by the optical device according to the seventh embodiment of the present invention.

  FIG. 1 is an overall block diagram of a camera 3 equipped with an optical device according to an embodiment of the present invention. The camera 3 has a camera body 5 and a lens barrel 7. The lens barrel 7 is detachably attached to the camera body 5. In the description of the camera 3, as shown in FIGS. 1 and 2, etc., the direction from the lens barrel 7 toward the camera body 5 in the direction substantially parallel to the optical axis α is the negative direction of the Z axis, The description will be made assuming that the direction orthogonal to the Z-axis is the X-axis direction and the Y-axis direction.

  The camera equipped with the optical device according to the present invention is not limited to the interchangeable lens camera as shown in FIG. 1, and the lens barrel 7 and the camera body 5 may be an integrated camera. Is not particularly limited. The optical device according to the present invention can be applied not only to a still camera but also to an optical apparatus such as a video camera, a microscope, and a mobile phone.

  Inside the camera body 5 and the lens barrel 7, a plurality of optical components are arranged along the photographing optical system optical axis α. An image sensor peripheral portion 15 is arranged on the rear side (Z-axis negative direction side) of the camera body 5 shown in FIG. 1, and the image sensor peripheral portion 15 front side in the optical axis α direction (Z-axis positive direction side). In this case, a shutter 68 is arranged. A mirror 70 is disposed on the front side of the shutter 68 in the optical axis α direction, and a diaphragm portion 78 and the optical lens group 24 incorporated in the lens barrel 7 are disposed on the front side thereof.

  The camera body 5 incorporates a body CPU 50 and is connected to the lens CPU 80 via a lens contact 62. The body CPU 50 has a communication function with the lens barrel 7 and a control function of the camera body 5. The lens contact 62 electrically connects the body CPU 50 and the lens CPU 80. The body CPU 50 is connected to a power source 58 for supplying power to the electronic components provided in the camera body 5 and the lens barrel 7.

  To the body CPU 50, a release switch 52, a strobe 54, a display unit 56, an EEPROM (memory) 26, an image processing controller 66, an AF sensor 60, a voltage signal output circuit 28, and the like are connected. The image processing controller 66 is connected to the image sensor unit 16 in the peripheral portion 15 of the image sensor via an interface circuit 64. The image processing controller 66 and the interface circuit 64 control image processing of an image captured by the image sensor unit 16 based on a signal from the body CPU 50. The image sensor unit 16 includes a solid-state image sensor such as a CCD or a CMOS.

  The display unit 56 is mainly composed of a liquid crystal display device or the like, and displays output results and menus. The release switch 52 is a switch for operating shooting timing. The release switch 52 outputs a half-press signal and a full-press signal to the body CPU 50. When the half-press signal is input from the release switch 52, the body CPU 50 controls shooting preparation operations such as AF control and AE control. When the full-press signal is input from the release switch 52, the body CPU 50 performs mirror up, shutter drive, and the like. Controlling the exposure operation.

  The quick return mirror 70 is for projecting an image on the viewfinder when determining the composition, and retracts from the optical path during exposure. The quick return mirror 70 is driven by a mirror driving unit (not shown) (for example, a DC motor).

  A sub mirror 70 a that guides light to the AF sensor 60 is connected to the quick return mirror 70. The sub mirror 70a is also retracted from the optical path during exposure.

  The shutter 68 controls the exposure time. The shutter 68 is driven by a shutter drive unit (not shown) (for example, a DC motor) based on control from the body CPU 50.

  The AF sensor 60 is a sensor for performing autofocus (AF). As this AF sensor 60, a CCD is usually used. The EEPROM 26 stores parameters and the like necessary for control by the body CPU 50 and outputs them to the body CPU 50 as necessary.

  The lens barrel 7 shown in FIG. 1 includes a focal length encoder 74, a distance encoder 72, a diaphragm 78, a drive motor 76 for driving the diaphragm 78, a lens CPU 80, a lens contact 62, and an optical lens group 24. .

  The lens CPU 80 has a communication function with the body CPU 50 and a control function for electronic components mounted on the lens barrel 7. For example, the lens CPU 80 outputs focal distance information, subject distance information, and the like to the body CPU 50 via the lens contact 62. The lens CPU 80 receives release information and AF information from the body CPU 50. The lens CPU 80 can control the drive motor 76 and the like of the diaphragm 78 based on these pieces of information.

  The focal length encoder 74 calculates a focal length from position information of a zoom lens group (not shown) and outputs the focal length to the lens CPU 80. The distance encoder 72 calculates the subject distance from the position information of the focusing lens group and outputs it to the lens CPU 80.

  As shown in FIG. 1, the camera body 5 includes a voltage signal output circuit 28. The voltage signal output circuit 28 outputs a voltage to a plurality of electrodes provided in the filter unit 18 in the image sensor peripheral portion 15 based on a control signal from the body CPU 50. For example, the voltage signal output circuit 28 is preferably supplied with necessary power from the power source 58.

  FIG. 2 is a plan view of the image sensor peripheral portion 15 mounted on the camera shown in FIG. The image pickup device peripheral portion 15 includes a unit fixing substrate 14, a case 12, a filter portion 18, and an image pickup device unit 16. Further, the imaging element peripheral portion 15 has a wiring portion 38 attached to the filter portion 18. As shown in FIG. 3, which is a cross-sectional view of the image sensor peripheral portion 15, an image sensor unit 16 and a case 12 are installed on the surface of the unit fixing substrate 14 having a rectangular flat plate shape on the positive side in the Z-axis direction. . The imaging element unit 16 is arranged with the imaging surface 16a facing the Z-axis positive direction. The case 12 has a frame shape and is arranged so as to surround the periphery of the image sensor unit 16. The case 12 is formed using an insulating material such as synthetic resin or ceramic.

  An attachment portion 12 a for attaching the filter portion 18 is formed on the inner peripheral surface of the case 12. The filter portion 18 has a rectangular flat plate shape, and is designed so that the peripheral portion of the filter portion 18 is in contact with the mounting portion 12a. The filter unit 18 is attached to the case 12 by, for example, an adhesive. The image sensor unit 16 is provided to face the filter unit 18, and the light transmitted through the filter unit 18 is incident on the imaging surface 16 a of the image sensor unit 16.

  As shown in FIG. 3, the periphery of the image sensor unit 16 is sealed by the unit fixing substrate 14, the case 12, and the filter unit 18. The image sensor peripheral unit 15 shown in FIG. Dust and the like are prevented from entering the sealed space to be stored. In addition, the image sensor peripheral part 15 shown in FIG. 3 can remove the dust adhering to the filter part 18 without vibrating the filter part 18 as described later. Therefore, the filter part 18 is fixed to the case 12 in a non-movable manner, and the attachment structure of the filter part 18 to the case 12 is simple. The sealing space in which the image sensor unit 16 is accommodated is surely sealed by the filter unit 18, the case 12, and the unit fixing substrate 14.

  The filter unit 18 has a laminated structure in which four filters including a dustproof filter 36, an infrared absorbing glass plate 32, a quartz wavelength plate 34 and a second birefringent plate 30 are laminated. As a laminating method, laminating with an adhesive or other laminating methods may be used.

  As shown in FIG. 4A, the filter unit 18 according to the present embodiment is formed by stacking four filters having substantially the same area. As the shape of the filter unit 18, It is not limited to. For example, in the filter unit 18 according to the modification shown in FIG. 4B, the area of one filter (second birefringent plate 30) is larger than the other three filters 36, 32, and 34. Moreover, in the filter part 18 which concerns on the modification shown in FIG.4 (C), one filter (dust-proof filter 36) is a different body from the other three filters 32.34.30.

  The quartz wavelength plate 34 shown in FIG. 3 is an optical plate that can change linearly polarized light into circularly polarized light, and the infrared absorbing glass plate 32 has a function of absorbing infrared rays. Further, the dustproof filter 36 is a birefringent plate (first birefringent plate) whose birefringence directions are different from each other by 90 degrees with respect to the second birefringent plate 30, and one of them is a 90-degree direction (short side direction). The other birefringent plate is a birefringent plate having birefringence in the 0 degree direction (long side direction). In the present embodiment, the dustproof filter 36 is a birefringent plate having birefringence in the 0 degree direction (long side direction), and the second birefringent plate 30 has birefringence in the 90 degree direction (short side direction). Although it is a board, the reverse may be sufficient.

  In the present embodiment, the dust-proof filter 36 and the second birefringent plate 30 in the filter unit 18 basically constitute an optical low-pass filter (OLPF). In general, the optical low-pass filter includes an optical absorption low-pass filter (OLPF) in which an infrared-absorbing glass plate 32 and a quartz wavelength plate 34 are laminated between two birefringent plates 36 and 30.

  The dustproof filter 36 and the second birefringent plate 30 are made using, for example, a quartz plate obtained by cutting out quartz at a specific angle. The raw material quartz may be artificial quartz or natural quartz.

  FIGS. 6A and 6B are a cross-sectional view (FIG. 6A) and a plan view (FIG. 6B) of the dustproof filter 36 provided in the image sensor peripheral portion 15 shown in FIG. As shown in FIG. 6A, the dustproof filter 36 includes a base material portion 40, a plurality of electrodes 42, and a surface layer 44. The base material portion 40 has a rectangular flat plate shape, and has a light transmission region 40c (FIG. 2) that transmits light toward the image sensor unit 16 provided on the Z-axis negative direction side. The base material portion 40 in the dustproof filter 36 is a birefringent plate having birefringence.

  For example, the electrode 42 and the surface layer 44 preferably have the same transmittance as the base material portion 40. For example, the electrode 42, the surface layer 44, and the base material portion 40 have a transmittance of 80% or more and 100% or less over the entire range of incident visible light (for example, light having a wavelength of 0.38 μm or more and 0.75 μm or less). It is preferable to have. This is because if the transmittance is 80% or more and 100% or less, sufficient optical characteristics for obtaining a captured image such as a still image or a moving image can be obtained. More preferably, it is preferable that the electrode 42, the surface layer 44, and the base material part 40 have the transmittance | permeability of 90% or more and 100% or less in the whole region of the incident visible light. This is because if the transmittance is 90% or more and 100% or less, sufficient optical characteristics for obtaining a high-definition still image can be obtained.

  Further, when the amount of light reaching the image sensor unit 16 is reduced due to light passing through the electrode 42, the surface layer 44, and the base material portion 40, a signal obtained by the image sensor unit 16 is processed (analog processing). Alternatively, the amount of light of the captured image may be substantially increased by digital processing).

  As shown in FIG. 6A, a plurality of electrodes 42 are formed on the surface of the base portion 40 on the Z axis positive direction side. The electrode 42 is formed using a material that transmits light, such as ITO (indium tin oxide) or ZnO (zinc oxide). The electrode 42 is formed on the entire surface of the base material portion 40 including the light transmission region 40c, and generates an electric field for removing dust adhering to the surface of the dustproof filter 36 as will be described later. The electrode 42 is formed in a strip shape along the surface of the base material portion 40 as shown in FIG. In the dustproof filter 36 in the present embodiment, the electrode 42 is formed so as to extend in a direction substantially parallel to the short side 40 b of the base material portion 40. The electrode 42 is provided substantially parallel to the imaging surface 16a of the imaging element unit 16 shown in FIG. By arranging the electrode 42 substantially parallel to the imaging surface 16a, the electric field by the electrode 42 can efficiently cover the light transmission region 40c (FIG. 2) as described later.

  The plurality of electrodes 42 are arranged at intervals along the long side 40a of the base material portion 40 so that, for example, the pitch is a predetermined length d1 and the interval between them is the length d2 ( FIG. 6 (a)). As shown in FIG. 6B, a wiring portion 38 is attached to one end portion (in this embodiment, the end portion on the Y axis positive direction side) of each electrode 42, and the electrode 42 is connected to the wiring portion. The voltage signal output circuit 28 shown in FIG. The wiring portion 38 according to the present embodiment is an FPC (flexible printed circuit board), but is not particularly limited as long as it transmits a voltage signal to the electrode 42.

  The plurality of electrodes 42 are configured by a plurality of groups to which alternating voltages having different phases are applied. That is, the plurality of electrodes 42 in the present embodiment includes a first group of electrodes 42a to which a first voltage signal is input, a second group of electrodes 42b to which a second voltage signal is input, and a third voltage. A third group of electrodes 42c to which a signal is input and a fourth group of electrodes 42d to which a fourth voltage signal is input are configured.

  Each group of electrodes 42a, 42b, 42c, and 42d has a first group of electrodes 42a, a second group of electrodes 42b, along the X-axis direction perpendicular to the Y-axis direction, which is the direction in which the electrodes 42 extend. The third group of electrodes 42c and the fourth group of electrodes 42d are sequentially arranged at predetermined intervals in the order. That is, between one first group electrode 42a1 and another one first group electrode 42a2 to which a voltage signal having the same phase is applied, a phase different from that of the first group electrode 42a is provided. One second group electrode 42b to which a voltage signal is applied, one third group electrode 42c, and one fourth group electrode 42d are provided at a distance from each other. The second group electrode 42b, the third group electrode 42c, and the fourth group electrode 42d are the same as the first group electrodes 42a1 and 42a2.

  The dustproof filter 36 according to the present embodiment has a surface layer 44 provided on the surface of the dustproof filter 36 on the Z-axis negative direction side so as to cover the surface of the electrode 42 (FIG. 6A). The surface layer 44 is provided so as to sandwich the electrode 42 between the base member 40 and the surface layer 44. The surface layer 44 is made of an insulating material that transmits light.

  The refractive index of the surface layer 44 is preferably substantially equal to the refractive index of the electrode 42. Further, it is preferable that the dispersion of light in the surface layer 44 (change in refractive index depending on the wavelength of light) is substantially equal to the dispersion of light in the electrode 42. The dustproof filter 36 having the surface layer 44 having optical characteristics substantially equal to those of the electrode 42 can prevent the shadow of the electrode 42 from appearing in the image picked up by the image pickup device unit 16. Further, the surface layer 44 may have water repellency. When the surface layer 44 has water repellency, the adhesion force of the dust 37 to the dustproof filter 36 can be reduced. Further, the surface layer 44 may have fine unevenness, and when the surface layer 44 has fine unevenness, the adhesion force (intermolecular force) of the dust 37 to the dust filter 36 can be reduced.

  FIG. 7 is a schematic diagram for explaining a dust removal operation using the dust filter 36. The voltage signal output circuit 28 includes a signal generation unit 82, a phase adjustment unit 84, and an amplification unit 86. The signal generator 82 generates an AC voltage signal having a predetermined cycle and outputs the AC voltage signal to the phase adjuster. The phase adjustment unit 84 adjusts the phase of the AC voltage signal, generates four AC voltage signals having different phases from each other, and outputs them to the amplification unit 86.

  The amplifying unit 86 amplifies the four AC voltage signals to a predetermined amplitude and then outputs them as drive voltage signals. The amplifying unit 86 outputs a drive voltage signal to the electrode 42 provided in the dust filter 36 via the wiring unit 38. Therefore, the voltage signal output circuit 28 supplies the first drive voltage signal ch1, the second drive voltage signal ch2, the third drive voltage signal ch3, and the fourth drive voltage signal ch4, which have different phases, to the electrode 42 provided in the dust filter 36. Can be output.

  The wiring section 38 includes a first wiring section 38a that transmits the first driving voltage signal ch1 to the first group of electrodes 42a, a second wiring section 38b that transmits the second driving voltage signal ch2 to the second group of electrodes 42b, The third wiring portion 38c transmits the third driving voltage signal ch3 to the third group of electrodes 42c, and the fourth wiring portion 38d transmits the fourth driving voltage signal ch4 to the fourth group of electrodes 42d.

  The first to fourth drive voltage signals ch1 to ch4 are square wave signals whose phases are shifted from each other by a quarter period. However, the voltage signal output to the electrode 42 is not limited to this, and is a sine wave. Or a triangular wave signal. The drive frequency of the first to fourth drive voltage signals ch1 to ch4 is not particularly limited. For example, by setting the drive frequency to 1 Hz to 500 Hz, dust can be efficiently moved.

  The voltage signal output circuit 28 can change the electric field on the surface of the dust filter 36 by applying a voltage to the plurality of electrodes 42 provided on the surface of the dust filter 36. In the dust-proof filter 36 according to the present embodiment, the electrodes 42 that transmit light are arranged in stripes, and a four-phase AC voltage is applied to the electrodes 42, so that a traveling-wave electric field is applied to the surface of the dust-proof filter 36. Can be generated.

  That is, the electrodes 42a, 42b, 42c, and 42d of each group are periodically arranged along the X-axis direction on the surface of the dustproof filter 36, and with respect to the electrodes 42a, 42b, 42c, and 42d of each group. Accordingly, the corresponding drive voltage signals ch1, ch2, ch3, and ch4 are applied. As a result, a traveling-wave electric field moving along the X-axis direction is generated on the surface of the dust-proof filter 36, and the dust 37 existing on the surface of the dust-proof filter 36 is moved and removed by the electrostatic force applied from the electric field. Is done. For example, the dust 37 adhering to the surface of the dustproof filter 36 is moved in a direction along the direction in which the traveling-wave electric field moves and is removed from the surface of the dustproof filter 36 as indicated by an arrow 39, for example.

  A four-phase drive voltage signal is applied to the electrode 42 according to the present embodiment, but the drive voltage signal applied to the electrode 42 according to the present invention may be single-phase or two-phase. Also good. Even in the case of a single phase, the electric field on the surface of the dust filter 36 can be changed to move the dust present on the surface of the dust filter 36. Further, if there are two or more phases, the electric field on the surface of the dustproof filter 36 can be moved, and the dust present on the surface of the dustproof filter 36 can be moved.

  However, the drive voltage signal applied to the electrode 42 is preferably three or more phases. A traveling wave electric field can be easily generated on the surface of the dust-proof filter 36 by applying an alternating voltage signal corresponding to each group to the electrode 42 composed of three or more groups arranged periodically. it can. By generating a traveling-wave electric field on the surface of the dust filter 36, the direction of movement of the dust 37 can be easily controlled, and the dust 37 can be moved greatly by a relatively small voltage. In the illustrated embodiment, the case where four groups of electrodes are used has been described as an example. However, the number of electrode groups may be two, three, or five or more groups.

  FIG. 5 is a flowchart illustrating an example of the manufacturing process of the optical device according to the present embodiment. In step S001 shown in FIG. 5, the base material portion 40 shown in FIG. 6A is prepared. The base material portion 40 shown in FIG. 6A is a birefringent plate having birefringence, but the base material portion 40 in the dust filter 36 is not limited to this. For example, when the dustproof filter 36 is an optical member different from the optical low-pass filter, the base material portion 40 may be another light-transmitting member such as a glass plate. Moreover, the shape of the base material part 40 is not limited to a rectangular flat plate shape, and may be another shape such as a circular flat plate shape.

  In step S <b> 002, the electrode 42 is formed on the surface of the base material portion 40. A method for forming the electrode 42 is not particularly limited, and a wet etching method, a dry etching method, a spin coating method, or the like can be used. The pitch d1 (FIG. 6A) of the electrodes 42 formed on the surface of the base member 40 may be appropriately designed according to the nature of the dust 37 that is likely to adhere to the dustproof filter 36. It can be about 200 μm to 1000 μm (1 mm). Moreover, although it does not specifically limit about the clearance gap d2 between adjacent electrodes, For example, it can be set as 200 micrometers-1000 micrometers (1 mm).

  In step S002, the surface layer 44 is formed on the surface of the base member 40 on the side where the electrode 42 is formed. Furthermore, in step S002, the vibration element 20 (FIG. 12) may be disposed on the base material portion 40 as necessary. The vibration element 20 is fixed to the base material portion 40 with an adhesive or the like.

  Further, in step S003, the wiring portion 38 shown in FIG. 6B is attached, and the electrode 42 and the voltage signal output circuit 28 (FIG. 1) are electrically connected by the wiring portion 38. If the vibration element 20 (FIG. 12) is disposed on the base material portion 40 in step S002, the vibration element drive circuit 29 shown in FIG. 9 is connected to the vibration element 20 in step S003. In step S004, the voltage signal output circuit 28 (FIG. 1) is adjusted so that a periodic voltage is output to the electrode 42 shown in FIG. The amplitude of the voltage output to the electrode 42 may be appropriately designed according to the nature of the dust 37 that is highly likely to adhere to the dustproof filter 36, the pitch d1 of the electrode 42, and the like, for example, 100 Vp-p to 2 kVp. -P. When the vibration element 20 (FIG. 12) is disposed on the base member 40 in step S002, a vibration node 99 (FIG. 13) is generated in the vicinity of at least a part of the electrode 42 in step S004. The vibration element driving circuit 29 may be adjusted.

  The optical device according to the present embodiment moves and removes dust attached to the surface of the dustproof filter 36 by changing the electric field. The force that the electric field can apply to the dust is proportional to the amount of charge of the dust under a predetermined condition. Therefore, the optical device according to the present embodiment can be removed by a method in which a physical vibration is generated in the dustproof filter. Dust having a large charge amount, which has been difficult, can be removed.

  In addition, since the optical device according to the present embodiment moves dust by an electric force, it removes dust having a small mass, which has been difficult to remove by a method in which a physical vibration is generated in the dustproof filter. Can do. In addition, the optical device according to the present embodiment is excellent in quietness because dust can be removed without causing physical vibration. In addition, the dust filter 36 itself is less likely to generate dust (generate dust).

Since the optical device according to the present embodiment moves the dust by an electric force, it is necessary to attach the dustproof filter 36 in a vibrable state, unlike the conventional technique in which dust is removed by generating physical vibration. Absent. Therefore, since the filter part 18 including the dustproof filter 36 can be attached to the case 12 in a non-movable manner, it is effective for dust to enter the sealed space from the gap between the filter part 18 and the case 12. Can be prevented. Further, since it is not necessary to attach the dustproof filter 36 to the case 12 with an elastic member or the like interposed therebetween, there is no possibility that dust removal performance will change due to aging of the elastic member or the like.
Second embodiment

  FIGS. 8A and 8B are a cross-sectional view (FIG. 8A) and a plan view (FIG. 8B) of the dustproof filter 36a in the optical device according to the second embodiment of the present invention. The optical device according to the second embodiment is the same as the optical device according to the first embodiment, except that the arrangement of the plurality of electrodes 92 in the dustproof filter 36a is different.

  The dust filter 36 a includes a base material portion 40 having a rectangular flat plate shape, a plurality of electrodes 92, and a surface layer 94. Unlike the electrode 42 according to the first embodiment, the electrode 92 is formed on the surface of the base portion 40 on the Z axis negative direction side. The electrode 92 is formed so as to extend in a direction substantially parallel to the long side 40 a of the base material portion 40.

  The plurality of electrodes 92 are arranged at intervals along the short side 40b of the base material portion 40 so that the intervals between them are a predetermined length. A wiring portion 88 is attached to one end portion of each electrode 92 (in this embodiment, the end portion on the X axis positive direction side). The electrode 92 is electrically connected to the voltage signal output circuit 28 via the wiring portion 88.

  In the dustproof filter 36a according to the present embodiment, the electrode 92 is formed on the surface of the base member 40 on the surface of the image sensor unit 16 (Z-axis negative direction). In the dustproof filter 36a according to the present embodiment, the dust 37 mainly adheres to the surface of the base portion 40 on the Z axis positive direction side. However, the force due to the electric field formed by outputting a voltage to the electrode 92 extends to the opposite side of the base material portion 40.

  Therefore, similarly to the first embodiment, the optical device according to the present embodiment can change the electric field on the surface of the dustproof filter 36a opposite to the image sensor unit 16 side, and thereby the surface of the dustproof filter 36a. The dust 37 adhering to can be removed by moving.

  The plurality of electrodes 92 are configured by a plurality of groups to which alternating voltages having different phases are applied. That is, the plurality of electrodes 92 in the present embodiment includes a first group of electrodes 92a to which a first voltage signal is input, a second group of electrodes 92b to which a second voltage signal is input, and a third voltage. A third group of electrodes 92c to which a signal is input and a fourth group of electrodes 92d to which a fourth voltage signal is input are configured.

  The electrodes 92a, 92b, 92c, and 92d of each group are periodically arranged along the short side direction (Y-axis direction) of the base member 40, and the electrodes 92a, 92b, 92c, and 92d of each group include Similarly to the first embodiment, the drive voltage signals ch1 to ch4 corresponding to each phase are applied. As a result, a traveling-wave electric field that moves along the Y-axis direction, which is the direction in which the electrodes 92 are periodically arranged, is generated on the surface of the dust filter 36a. Therefore, the dust existing on the surface of the dustproof filter 36a is moved by the electrostatic force applied from the traveling wave electric field and removed from the surface of the dustproof filter 36a.

For example, the dust 37 adhering to the surface of the dust filter 36a is moved in a direction along the direction in which the traveling wave electric field moves (a direction along the Y-axis direction) as indicated by an arrow 95, for example. Removed from the surface. Since the optical device according to the present embodiment can move the dust along the direction of the short side 40b of the base material portion 40 in the dustproof filter 36a, the conveyance required for removing the dust 37 from the dustproof filter 36a. The distance is smaller than the dustproof filter 36 according to the first embodiment. For this reason, the optical device according to the second embodiment can more efficiently remove the dust 37 adhering to the surface of the dustproof filter 36a. Further, the optical device according to the present embodiment has the same effects as the optical device according to the first embodiment.
Third embodiment

  FIG. 9 is an overall block diagram of a camera 3a equipped with an optical device according to the third embodiment of the present invention. The camera 3a is provided with a vibration element driving circuit 29 in the camera body 5a. The image pickup device peripheral portion 15a provided in the camera body 5a is different from the image pickup device peripheral portion 15 shown in FIG. The same as the camera 3.

  The camera body 5a includes a vibration element driving circuit 29. The vibration element driving circuit 29 is electrically connected to the body CPU 50 and the imaging element peripheral portion 15a. The vibration element driving circuit 29 can drive the vibration element 20 (FIG. 10) provided in the imaging element peripheral portion 15 a under the control of the body CPU 50. For example, the vibration element driving circuit 29 is preferably supplied with necessary power from the power source 58.

  FIG. 10 is a plan view of the image sensor peripheral portion 15a provided in the camera 3a shown in FIG. The image sensor peripheral portion 15 a includes a unit fixing substrate 14, a case 12, a filter unit 18 a, and an image sensor unit 16. Further, the image sensor peripheral portion 15a includes a pressurizing member 10 for attaching the dustproof filter 36b (FIG. 11) to the case 12, a wiring portion 38 attached to the filter portion 18a, and the vibration element 20.

  As shown in FIG. 11, which is a cross-sectional view of the image sensor peripheral portion 15 a, the image sensor unit 16 and the case 12 are arranged on the surface of the unit fixing substrate 14 having a rectangular flat plate shape on the Z axis positive direction side. . The case 12 has a frame shape and is arranged so as to surround the periphery of the image sensor unit 16. The case 12 is formed using an insulating material such as synthetic resin or ceramic.

  An attachment portion 12 a for attaching the filter portion 18 is formed on the inner peripheral surface of the case 12. In the filter portion 18a according to the present embodiment, the dustproof filter 36b is separate from the infrared absorbing glass plate 32, the quartz wavelength plate 34, and the second birefringent plate 30, which are the other three filters. Three filters 32, 34, 30 other than the dustproof filter 36b are attached to the attachment portion 12a of the case 12. The three filters 32, 34, and 30 are attached to the case 12 with, for example, an adhesive.

  The periphery of the image sensor unit 16 is sealed by the unit fixing substrate 14, the case 12, and the filter unit 18 a, and dust and the like are prevented from entering the sealed space in which the image sensor unit 16 is accommodated. .

  The dustproof filter 36 b is disposed on the negative Z-axis direction side of the infrared absorbing glass plate 32 with the sealing member 17 sandwiched between the infrared absorbing glass plate 32. The sealing member 17 is made of an elastic member such as synthetic resin or rubber, for example, and seals between the dustproof filter 36b and the infrared absorbing glass plate 32.

  The dustproof filter 36b is attached to the case 12 so as to vibrate by the pressure member 10 having a leaf spring shape. That is, the pressurizing member 10 pressurizes the dustproof filter 36b from the positive side of the Z axis toward the infrared absorbing glass plate 32 and holds the dustproof filter 36b between the sealing member 17 and the pressurizing member 10. Note that both ends of the pressure member 10 are spirally fixed to the case 12 as shown in FIGS. 10 and 11.

  FIG. 12 is a cross-sectional view (FIG. 12A) and a plan view (FIG. 12B) of the dustproof filter 36b provided in the image sensor peripheral portion 15a shown in FIG. As shown in FIG. 12A, the dustproof filter 36 b includes a base material portion 40, a plurality of electrodes 42, and a surface layer 44. Moreover, the vibration element 20 is attached to the surface of the dust-proof filter 36b on the Z axis positive direction side.

  The vibration element 20 includes, for example, a piezoelectric element and an electrode for applying a voltage to the piezoelectric element, and is driven by a vibration element drive circuit 29 shown in FIG. The vibration element drive circuit 29 can drive the vibration element 20 so that a vibration node is generated in the dust filter 36b. As shown in FIG. 13, the vibration element drive circuit 29 according to the present embodiment can drive the vibration element 20 so that the dustproof filter 36b causes third-order bending vibration, for example.

  A plurality of electrodes 42 are formed on the surface on the Z-axis positive direction side of the base material portion 40 according to the third embodiment, similarly to the dustproof filter 36 shown in FIG. The electrode 42 is formed in a strip shape along the surface of the base material portion 40 as shown in FIG. In the dustproof filter 36b in the present embodiment, the electrode 42 is formed so as to extend in a direction substantially parallel to the short side 40b of the base material portion 40. The electrode 42 is provided substantially parallel to the vibration node 99 shown in FIG.

  By providing the electrode 42 substantially in parallel with the vibration node 99, an electric field having a gradient in a direction substantially perpendicular to the vibration node 99 can be generated. Therefore, the dustproof filter 36b is substantially perpendicular to the vibration node 99. The dust 37 can be moved in the direction (X-axis direction). Therefore, the optical device having the dustproof filter 36b moves the dust 37 remaining around the vibration node 99 in a direction away from the vibration node 99 (a direction substantially perpendicular to the vibration node), so that the single-mode operation is performed. Dust on the entire surface of the dustproof filter 36b can be removed only by bending vibration.

  In addition, since the vibration element 20 in the dust filter 36b is also provided substantially parallel to the short side 40b of the base member 40, the vibration element 20 and the electrode 42 are provided substantially parallel in the optical device according to the present embodiment. . Since the vibration node is likely to be generated in a direction substantially parallel to the vibration element 20 or in a direction substantially parallel to the side of the base material portion 42, the electrode 42 is disposed substantially parallel to the side of the base material portion 40 or the vibration element 20. It is preferable to dust the entire surface of the dustproof filter 36b.

  A wiring portion 38 is attached to the end of each electrode 42 on the Y axis positive direction side, and the electrode 42 is electrically connected to the voltage signal output circuit 28 shown in FIG. Yes. In addition, as in the first embodiment shown in FIG. 7, the plurality of electrodes 42 in the present embodiment receive a first group of electrodes 42 a to which a first voltage signal is input and a second voltage signal. A second group of electrodes 42b, a third group of electrodes 42c to which a third voltage signal is input, and a fourth group of electrodes 42d to which a fourth voltage signal is input.

  Each group of electrodes 42a, 42b, 42c, and 42d has a first group of electrodes 42a, a second group of electrodes 42b, along the X-axis direction perpendicular to the Y-axis direction, which is the direction in which the electrodes 42 extend. The third group of electrodes 42c and the fourth group of electrodes 42d are sequentially arranged at predetermined intervals in the order.

  FIG. 19 is a flowchart for explaining an example of the dust removal operation by the camera 3a (FIG. 9) having the dust filter 36b shown in FIG. In step S101 shown in FIG. 19, a dust removal operation for removing the dust 37 adhering to the dust filter 36b is started. The dust removal operation is started, for example, when the power of the camera 3a shown in FIG. 9 is turned on or when a cleaning start signal is input to the body CPU 50 from an input unit (not shown) provided in the camera body 5a.

  In step S102, a control signal is output from the body CPU 50 shown in FIG. 9 to the vibration element drive circuit 29, and the vibration element drive circuit 29 drives the vibration element 20 to vibrate the dustproof filter 36b. FIG. 13 is a schematic diagram illustrating a first stage (step S102) in the dust removal operation by the dust filter 36b shown in FIG.

  In step S102, the vibration element driving circuit 29 drives the vibration element 20 so that the dustproof filter 36b causes third-order bending vibration. In step S102, among the dust adhering to the dustproof filter 36b, the dust 37 adhering to other than the vicinity of the vibration node 99 can be removed. However, since the vibration amplitude is small in the periphery 101 of the vibration node 99 in the bending vibration, the dust 37 adhering to the periphery of the vibration node 99 may not be sufficiently removed as shown in FIG.

  In step S103 shown in FIG. 19, a control signal is output from the body CPU 50 shown in FIG. 9 to the voltage signal output circuit 28. The voltage signal output circuit 28 outputs a voltage signal to the electrode 42 and proceeds to the surface of the dust filter 36b. A wavy electric field is generated. FIG. 14 is a schematic diagram illustrating the second stage (step S103) in the dust removal operation by the dust filter 36b shown in FIG.

  In step S103, the voltage signal output circuit 28 changes the electric field on the surface of the dust filter 36b by applying a voltage to the plurality of electrodes provided on the surface of the dust filter 36b. As shown in FIG. 7, the voltage signal output circuit 28 applies four-phase AC voltage signals ch1 to ch4 to the electrodes 42 arranged in a striped pattern, and travels in a traveling-wave electric field that moves along the X-axis direction. Is generated on the surface of the dustproof filter 36b (FIG. 14).

  Of the surface of the dust filter 36b, the dust 37 remaining in the periphery of the position where the vibration node 99 is generated in the bending vibration in step S102 is caused by electrostatic force applied from the electric field, as shown in FIG. As indicated by an arrow 105, it is moved along the X-axis direction. The voltage signal output circuit 28 can apply a voltage to the electrode 42 until the dust 37 remaining around the position where the vibration node 99 is generated moves to a position away from the vibration node 99. Note that a part of the dust remaining in the peripheral portion 101 where the vibration node 99 is generated in step S102 is removed from the surface of the dustproof filter 36b in step S103 as indicated by an arrow 106.

  In step S104, as in step S102, a control signal is output from the body CPU 50 shown in FIG. 9 to the vibration element drive circuit 29, and the vibration element drive circuit 29 drives the vibration element 20 to vibrate the dustproof filter 36b. . FIG. 15 is a schematic diagram illustrating a third stage (step S104) in the dust removal operation by the dust filter 36b shown in FIG.

  In step S104, the vibration element driving circuit 29 drives the vibration element 20 so that the dustproof filter 36b causes the third-order bending vibration. By step S103, the dust 37 remaining on the surface of the dust filter 36b has been moved to a position away from the vibration node 99, and thus is removed by the bending vibration in step S104. The dust 37 remaining on the surface of the dustproof filter 36b is moved and removed in the direction of gravity as indicated by an arrow in FIG.

  In step S105 shown in FIG. 19, the dust removal operation is terminated. The body CPU 50 stops the control of the voltage signal output circuit 28 and the vibration element driving circuit 29 in step S105.

  Thus, the optical device according to the present embodiment can perform both the dust removal operation for bending and vibrating the dust filter 36b and the dust removal operation for changing the electric field on the surface of the dust filter 36b. The dust 37 adhering to can be efficiently removed. That is, the dust removal operation by bending vibration can remove dust having a relatively large mass and dust attached to portions other than the periphery of the vibration node. In addition, dust removal operation using a progressive electric field can remove dust having a relatively small mass, dust attached to the periphery of a vibration node, dust having a large charge amount, and the like.

  The voltage signal output circuit 28 outputs a voltage to the electrode 42 so that the electric field generated in the dust filter 36b moves after the vibration element driving circuit 29 drives the vibration element 20, thereby generating a position where the vibration node 99 is generated. The dust 37 remaining in the periphery can be moved to a position away from the vibration node 99. Therefore, the optical device according to the present embodiment removes dust on the entire surface of the dust-proof filter 36b with only single mode bending vibration by combining both the dust removing operation for bending vibration and the dust removing operation for changing the electric field. can do.

  In the example of the dust removal operation shown in FIG. 19, the dust removal operation for bending vibration and the dust removal operation for changing the electric field are performed at different times. However, the dust removal operation is not limited to this, for example, the dust removal operation for bending vibration. The dust removal operation for changing the electric field may be performed simultaneously. That is, the voltage signal output circuit 28 can output a voltage to the electrode 42 so that the electric field generated in the dustproof filter 36b moves when the vibration element driving circuit 29 drives the vibration element 20. Thereby, the optical device according to the present embodiment can remove dust on the entire surface of the dustproof filter 36b in a short time.

Further, in the dust filter 36b according to the present embodiment, as shown in FIG. 13, the electrode 42 is formed on the entire surface of the dust filter 36b, but the arrangement of the electrode 42 is not limited to this, and the vibration node 99 is not limited to this. The electrode 42 may be formed only in the peripheral portion of the position where the above occurs. The dustproof filter having the electrode 42 only at the periphery of the position where the vibration node 99 is generated removes the dust 37 adhering to the vicinity of the position where the vibration node 99 is generated from the vibration node 99 by the dust removing operation that changes the electric field. It can be reliably moved to a remote location and stayed there.
Fourth embodiment

  FIG. 16 is a cross-sectional view (FIG. 16 (a)) and a plan view (FIG. 16 (b)) of a dustproof filter 36c in an optical device according to a fourth embodiment of the present invention. The optical device according to the fourth embodiment is the same as the optical device according to the third embodiment except that the arrangement of the plurality of electrodes 92 in the dust filter 36c is different.

  The dustproof filter 36 c includes a base material portion 40 having a rectangular flat plate shape, a plurality of electrodes 92, and a surface layer 94. Unlike the electrode 42 according to the third embodiment, the electrode 92 is formed on the surface of the base member 40 on the Z-axis negative direction side. The electrode 92 is formed so as to extend in a direction substantially parallel to the long side 40 a of the base material portion 40.

  In the dust-proof filter 36c according to the present embodiment, an electrode 92 is formed on the surface of the base member 40 on the surface of the image sensor unit 16 (Z-axis negative direction). In the dustproof filter 36c according to the present embodiment, the dust 37 mainly adheres to the surface of the base material portion 40 on the Z axis positive direction side. However, the force due to the electric field formed by outputting a voltage to the electrode 92 extends to the opposite side of the base material portion 40.

  Therefore, similarly to the third embodiment, the optical device according to the present embodiment can change the electric field on the surface of the dustproof filter 36c opposite to the imaging element unit 16 side, and thereby the surface of the dustproof filter 36c. The dust 37 adhering to can be removed by moving.

In the optical device according to the present embodiment, the vibration element 20 and the electrode 92 are provided substantially orthogonally. Even with such an arrangement, the voltage signal output circuit 28 can move the dust 37 remaining in the vicinity of the position where the vibration node 99 is generated in the Z-axis direction as indicated by an arrow 107 in FIG. . Therefore, similarly to the optical device according to the third embodiment, the optical device according to the present embodiment can remove dust attached to the entire surface of the dustproof filter 36c.
Fifth embodiment

  FIGS. 17A and 17B are a cross-sectional view (FIG. 17A) and a plan view (FIG. 17B) of a dustproof filter 36d in the optical device according to the fifth embodiment of the present invention. The optical device according to the fifth embodiment includes a first vibration element 20a and a second vibration element 20b, and the optical device according to the fourth embodiment is different except that the arrangement surfaces of the vibration elements 20a and 20b in the dust filter 36d are different. It is the same.

  The dustproof filter 36 d includes a base material portion 40 having a rectangular flat plate shape, a plurality of electrodes 98, and a surface layer 97. Similarly to the electrode 92 according to the fourth embodiment, the electrode 98 is formed on the surface of the base portion 40 on the Z-axis negative direction side. The electrode 98 is formed so as to extend in a direction substantially parallel to the long side 40 a of the base material portion 40.

  The plurality of electrodes 98 are arranged at intervals along the short side 40b of the base material portion 40 so that the intervals between them are a predetermined length. A wiring portion 96 is attached to one end portion of each electrode 98 (in this embodiment, the end portion on the X axis positive direction side). The electrode 98 is electrically connected to the voltage signal output circuit 28 (FIG. 1) via the wiring portion 96.

  The plurality of electrodes 98 are configured by a plurality of groups to which alternating voltages having different phases are applied. In other words, the plurality of electrodes 98 in the present embodiment includes a first group of electrodes 98a to which a first voltage signal is input, a second group of electrodes 98b to which a second voltage signal is input, and a third voltage. A third group of electrodes 98c to which a signal is input and a fourth group of electrodes 98d to which a fourth voltage signal is input are configured.

  The optical device according to the fifth embodiment includes a first vibration element 20a and a second vibration element 20b provided along a pair of short sides 40b in the dustproof filter 36d. Since the optical device according to the fifth embodiment includes the two vibration elements 20a and 20b arranged substantially in parallel to each other, it is possible to generate a stronger vibration to the dustproof filter 36d and efficiently remove dust. it can.

The second vibration element 20b and the wiring portion 96 are disposed at the end on the YX-axis positive direction side in the dust filter 36d. That is, the second vibration element 20b and the wiring portion 96 are arranged at positions overlapping each other when the dust filter 36d is viewed from the optical axis α direction (Z-axis direction). By disposing the second vibration element 20b and the wiring portion 96 so as to overlap in the optical axis direction, it is possible to suppress an increase in the area that does not transmit photographing light on the surface of the dust filter 36d. Therefore, the optical device according to the present embodiment can suppress an increase in the area of the dustproof filter 36d while increasing the dust removal effect by generating strong vibrations in the dustproof filter 36d. In addition, the optical device according to the present embodiment has the same effects as the optical device according to the fourth embodiment.
Sixth embodiment

  FIG. 18 is a cross-sectional view (FIG. 18A) and a plan view (FIG. 18B) of a dustproof filter 36e in the optical device according to the sixth embodiment of the present invention. The optical device according to the sixth embodiment is the same as the optical device according to the third embodiment except that the optical device includes the first vibration element 20a and the second vibration element 20b and the arrangement surface of the electrode 103 and the wiring portion 102 is different. is there.

  The dust filter 36 e has a base material portion 40 having a rectangular flat plate shape, a plurality of electrodes 103, and a surface layer 104. Unlike the electrode 42 according to the third embodiment, the electrode 103 is formed on the surface of the base portion 40 on the Z-axis negative direction side. However, like the electrode 42 according to the third embodiment, the electrode 103 is formed to extend in a direction substantially parallel to the short side 40 b of the base material portion 40.

  The plurality of electrodes 103 are arranged at intervals along the long side 40 a of the base material portion 40 so that the interval between them is a predetermined length. A wiring portion 102 is attached to one end of each electrode 103 (in this embodiment, the end on the Y axis positive direction side). The electrode 103 is electrically connected to the voltage signal output circuit 28 via the wiring portion 102.

  The plurality of electrodes 103 are configured by a plurality of groups to which alternating voltages having different phases are applied. That is, the plurality of electrodes 103 in the present embodiment includes a first group of electrodes 103a to which a first voltage signal is input, a second group of electrodes 103b to which a second voltage signal is input, and a third voltage. A third group of electrodes 103c to which a signal is input and a fourth group of electrodes 103d to which a fourth voltage signal is input are configured.

  The optical device according to the sixth embodiment includes a first vibration element 20a and a second vibration element 20b provided along a pair of short sides 40b in the base material portion 40 of the dust filter 36e. Since the optical device according to the sixth embodiment includes the two vibration elements 20a and 20b arranged substantially parallel to each other, it is possible to generate stronger vibrations to the dustproof filter 36e and efficiently remove dust. it can.

  Further, a part of the first and second vibrating elements 20a and 20b and a part of the wiring part 102 are arranged so as to overlap each other when viewed in the optical axis α direction (Z-axis direction). Accordingly, the dust filter 36e can suppress an increase in the area that does not transmit photographing light on the surface of the dust filter 36e, similarly to the dust filter 36d illustrated in FIG. In addition, the optical device according to the present embodiment has the same effects as the optical device according to the third embodiment.

  In the dustproof filters 36d and 36e according to the fifth and sixth embodiments, the electrodes 98 and 103 are disposed on one surface of the base material and the vibration elements 20a and 20b are disposed on the other surface of the base material. The arrangement of the vibration element is not limited to this. For example, an electrode and a surface layer may be formed on one surface of the base material, and the vibration elements 20a and 20b may be fixed to the surface layer, which is similar to the dustproof filters 36d and 36e according to the fifth and sixth embodiments. The effect is obtained.

The image processing controller 66 shown in FIGS. 1 and 9 may reduce the shadow of the electrode 42 by image processing when the shadow of the electrode 42 appears in the image captured by the image sensor unit 16. Thereby, the influence which the electrode 42 has on the optical performance of an imaging measure can be suppressed.
Seventh embodiment

  FIG. 20 is an overall block diagram of a camera 3b equipped with an optical device according to the seventh embodiment of the present invention. The camera 3b is different from the third embodiment shown in FIG. 9 in that the voltage signal output circuit 128 and the vibration element driving circuit 129 are different from those in the third embodiment, except that the voltage supply circuit 131 and the switch unit 133 are further provided. The same as the camera 3b. That is, the configuration of the filter unit 18a and the dustproof filter 36b (FIG. 21) included therein is the same as that of the second embodiment shown in FIGS.

  Similar to the voltage signal output circuit 28 according to the first and second embodiments, the voltage signal output circuit 128 outputs a voltage to the plurality of electrodes 42 provided in the filter unit 18a in the image sensor peripheral portion 15a. The voltage signal output circuit 128 includes a booster A135 and a delay unit 139, and does not include the signal generator 82 as shown in FIG. However, the voltage signal generated by the voltage supply circuit 131 is input to the voltage signal output circuit 128 via the switch unit 133.

  The vibration element driving circuit 129 can drive the vibration element 20 (FIG. 1) provided in the imaging element peripheral portion 15a, similarly to the vibration element driving circuit 29 according to the second embodiment. The vibration element drive circuit 129 includes a booster B137, but does not include a signal generator, like the voltage signal output circuit 128. Similarly to the voltage signal output circuit 128, the voltage signal generated by the voltage supply circuit 131 is input to the vibration element driving circuit 129 via the switch unit 133.

  A voltage supply circuit 131 is connected to the body CPU 50. The voltage supply circuit 131 generates a voltage signal based on the control signal from the body CPU 50, and supplies the generated voltage signal to the voltage signal output circuit 128 and the vibration element driving circuit 129. For example, the voltage supply circuit 131 is preferably supplied with necessary power from the power source 58. Further, the voltage supply circuit 131 may include a sweep circuit 131a (see FIG. 21) that changes the frequency of the voltage signal output to the voltage signal output circuit 128 and the vibration element driving circuit 129 with time.

  A switch unit 133 is disposed between the voltage supply circuit 131, the voltage signal output circuit 128, and the vibration element driving circuit 129. The switch unit 133 is disposed after the voltage supply circuit 131 and before the voltage signal output circuit 128 and the vibration element driving circuit 129. Therefore, the switch unit 133 transmits the voltage signal output from the voltage supply circuit 131 to the voltage signal output circuit 128 and the vibration element driving circuit 129.

  Under the control of the body CPU 50, the switch unit 133 switches and electrically connects either the voltage signal output circuit 128 or the vibration element driving circuit 129 to the voltage supply circuit 131. For example, in the series of dust removal operations, the switch 133 first connects the voltage supply circuit 131 and the vibration element drive circuit 129, and then switches the connection so as to connect the voltage supply circuit 131 and the voltage signal output circuit 128. Thereafter, the connection is switched so that the voltage supply circuit 131 and the vibration element driving circuit 129 are connected again.

  FIG. 21 is a schematic diagram for explaining a dust removal operation performed in the optical device according to the seventh embodiment. A voltage signal is supplied from the voltage supply circuit 131 to the electrodes 42a to 42b of the dust filter 36b and the vibration element 20 provided in the dust filter 36b. For example, the voltage supply circuit 131 receives the control from the CPU 50 (see FIG. 20), generates an AC voltage signal having a predetermined period, and outputs the AC voltage signal to the switch unit 133. The waveform of the voltage signal output from the voltage supply circuit 131 is not particularly limited. For example, a voltage signal having a rectangular waveform or a sine waveform can be used.

  The voltage supply circuit 131 may include a sweep circuit unit 131a that changes the frequency of the voltage signal to be output with time. The voltage supply circuit 131 including the sweep circuit portion 131a can change the frequency of traveling waves generated by the electrodes 42a to 42d in a transitional manner, and can move dust having various particle sizes or charged states. In addition, the voltage supply circuit 131 including the sweep circuit unit 131a can reliably resonate the dustproof filter 36b when the vibrating element 20 causes the dustproof filter 36b to bend and vibrate, and generates strong vibration in the dustproof filter 36b. Can be made.

  A voltage signal generated by the voltage supply circuit 131 is input to the voltage signal output circuit 128 via the switch unit 133. The voltage signal output circuit 128 according to the present embodiment includes a booster A135, a delay unit A139, a delay unit B141, and a delay unit C139. The booster A135 boosts or amplifies the voltage signal supplied from the voltage supply circuit 131 to a predetermined amplitude. Note that the booster A135 may be arranged at the subsequent stage of the delay unit A139, the delay unit B141, and the delay unit C139.

  The voltage signal boosted by the booster A135 is branched into four. One of the voltage signals branched into four becomes the first drive voltage signal ch1 input to the first electrode group 42a via the first wiring 38a. The remaining three of the four branched voltage signals are input to the delay unit A139, the delay unit B141, and the delay unit C143, respectively. The delay unit A139 delays the voltage signal input from the booster unit A135 by a quarter cycle and outputs the second drive voltage signal ch2. The delay unit B141 and the delay unit C143 also delay the voltage signal input from the boosting unit A135 by 1/2 cycle or 3/4 cycle, respectively, and output the third drive voltage signal ch3 or the fourth drive voltage signal ch4. To do.

  The drive voltage signals ch1 to ch4 output from the voltage signal output circuit 128 are input to the first to fourth electrode portions 42a to 42d via the wiring portion 38, as in the first embodiment. A traveling wave electric field for moving the dust is generated on the surface of the dust-proof filter 36b by the electrode 42 to which the voltage is applied by the drive voltage signals ch1 to ch4.

  Similarly to the voltage signal output circuit 128, the voltage signal generated by the voltage supply circuit 131 is input to the vibration element driving circuit 129 via the switch unit 133. The vibration element driving circuit 129 according to the present embodiment includes a booster B137. The booster B137 boosts or amplifies the voltage signal generated by the voltage supply circuit 131 to a predetermined amplitude as necessary. The voltage signal output from the vibration element driving circuit 129 is input to the vibration element 20. The vibration element 20 is driven by the voltage signal input from the vibration element drive circuit 129, and can bend and vibrate the dustproof filter 36b.

  Similarly to the camera 3a shown in FIG. 12, the camera 3b shown in FIG. 20 can perform the dust removal operation according to the flowchart shown in FIG. In step S101 shown in FIG. 19, the camera 3b starts a series of dust removal operations.

  In step S102, the camera 3b performs a dust removal operation by bending and vibrating the dustproof filter 38b shown in FIG. In step S102, a control signal is output to the voltage supply circuit 131 and the switch section 133 from the body CPU 50 shown in FIG. The voltage supply circuit 131 receives a control signal from the body CPU 50, generates a voltage signal, and outputs the voltage signal to the switch unit 133. The switch unit 133 receives the control signal from the body CPU 50 and electrically connects the voltage supply circuit 131 and the vibration element driving circuit 129.

  The vibration element driving circuit 129 boosts the voltage signal output from the voltage supply circuit 131 by the booster B137 and outputs the boosted voltage signal to the vibration element 20 illustrated in FIG. Thereby, in step S102, bending vibration is generated as in the third embodiment (FIG. 13). In the dust removal operation in step S102, as shown in FIG. 13, the dust that could not be removed may remain in the periphery 101 of the vibration node 99.

  In step S103 shown in FIG. 19, the camera 3b shown in FIG. 20 performs a dust removal operation by generating a traveling wave electric field on the surface of the dustproof filter 36b shown in FIG. When step S103 is started, a control signal is output from the body CPU 50 shown in FIG. The switch unit 133 receives a control signal from the body CPU 50, electrically connects the voltage supply circuit 131 and the voltage signal output circuit 128, and cuts off the connection between the voltage supply circuit 131 and the vibration element driving circuit 129. The body CPU 50 may output a control signal to the voltage supply circuit 131 and start changing the frequency of the voltage signal generated by the voltage supply circuit 131 when starting step S103.

  The voltage signal output circuit 128 boosts the voltage signal output from the voltage supply circuit 131 by the booster A135 and then branches the voltage signal. The voltage signal output circuit 128 branches the boosted voltage signal into four, performs delay processing, and outputs the first to fourth drive signals ch1 to ch4 to the first to fourth electrode portions 42a to 42d. Accordingly, in step S103, a traveling wave electric field is generated on the surface of the dustproof filter 36b as in the third embodiment (FIG. 14).

  As shown in FIG. 14, in step S103, the dust 37 remaining on the dust filter 36b is moved along the X-axis direction as indicated by the arrow 105 by the electrostatic force applied from the electric field generated by the electrode 42. It is done. The voltage supply circuit 131 and the voltage signal output circuit 128 may apply a voltage to the electrode 42 until the dust 37 remaining in the vicinity of the position where the vibration node 99 is generated moves to a position away from the vibration node 99. it can.

  In step S104, the camera 3b performs a dust removal operation by causing the dustproof filter 38b shown in FIG. 21 to bend and vibrate again. When starting step S104, a control signal is output from the body CPU 50 shown in FIG. The switch unit 133 receives a control signal from the body CPU 50 and switches the connection at the subsequent stage of the voltage supply circuit 131 to electrically connect the voltage supply circuit 131 and the vibration element driving circuit 129. When starting step S104, the body CPU 50 outputs a control signal to the voltage supply circuit 131 and changes the frequency of the voltage signal generated by the voltage supply circuit 131, in the same manner as when starting step S103. May be.

  The vibration element driving circuit 129 boosts the voltage signal output from the voltage supply circuit 131 by the booster B137 and outputs the boosted voltage signal to the vibration element 20 illustrated in FIG. Thereby, in step S104, bending vibration is generated as in step S102 (see FIG. 15). The dust that could not be removed in step S102 has been moved away from the vibration node 99 in step S103, and therefore is removed from the surface of the dustproof filter 36b by the bending vibration in step S104.

  In step S105 shown in FIG. 19, the dust removal operation is terminated. In step S105, the body CPU 50 outputs a control signal to the voltage supply circuit 131 and stops generating the voltage signal.

  Thus, the optical device according to the present embodiment can perform both the dust removal operation for bending and vibrating the dust filter 36b and the dust removal operation for changing the electric field on the surface of the dust filter 36b. The dust 37 adhering to can be efficiently removed. That is, the dust removal operation by bending vibration can remove dust having a relatively large mass and dust attached to portions other than the periphery of the vibration node. In addition, the dust removal operation by the traveling wave electric field can remove dust having a relatively small mass, dust attached to the periphery of the vibration node, dust having a large charge amount, and the like.

  In addition, the optical device according to the present embodiment supplies voltage signals to both the voltage signal output circuit 128 and the vibration element driving circuit 129, and uses the voltage signal for dust removal operation by bending vibration and dust removal operation by traveling wave electric field. A voltage supply circuit 131 that generates both voltage signals is included. Therefore, an optical device capable of realizing both the bending vibration and the traveling wave electric field dust-removing operation can be realized at a lower cost compared to the case where the voltage signal output circuit 128 and the vibration element driving circuit 129 have their respective signal generation units. can do. Further, by switching the electrical connection in the subsequent stage of the voltage supply circuit 131 by the switch unit 133, it is possible to easily switch between the dust removal operation by bending vibration and the dust removal operation by the traveling wave electric field.

DESCRIPTION OF SYMBOLS 16 ... Imaging device unit 20 ... Vibrating element 28, 128 ... Voltage signal output circuit 29, 129 ... Vibrating element drive circuit 36, 36a, 36b, 36c, 36d, 36e ... Dust-proof filter 37 ... Dust 38 ... Wiring part 40 ... Base material Part 16 ... Hermetic seal member 42, 92, 98, 103 ... Electrode 42a, 92a, 98a, 103a ... First group of electrodes 42b, 92b, 98b, 103b ... Second group of electrodes 42c, 92c, 98c, 103c ... First Three groups of electrodes 42d, 92d, 98d, 103d ... Fourth group of electrodes 50 ... Body CPU
99 ... Node of vibration 131 ... Voltage supply circuit 131a ... Sweep circuit 133 ... Switch part

Claims (17)

A vibration member provided on a substrate that transmits light and vibrating the substrate;
A driving circuit for driving the vibrating member so that a vibration node is generated on the substrate;
A plurality of electrodes that transmit light provided at least partially near the vibration node of the substrate;
So as to change the electric field on the surface of the substrate, it possesses an output circuit for outputting a voltage to the plurality of electrodes,
The optical device, wherein the output circuit outputs a voltage to the electrode so that an electric field generated in the substrate moves when the driving circuit drives the vibrating member . The optical device according to claim 1,
The optical device, wherein the electrode is provided substantially parallel to the vibration node of the substrate. An optical device according to claim 1 or claim 2, wherein
The optical device, wherein the vibration member and the electrode are provided substantially in parallel. An optical device according to claim 1 or claim 2, wherein
The optical device is characterized in that the vibration member and the electrode are provided substantially orthogonally. An optical device according to any one of claims 1 to 4, wherein
The substrate is rectangular;
The optical device, wherein the vibration member is provided substantially parallel to a side of the substrate. An optical device according to any one of claims 1 to 5 , wherein
The optical device, wherein the output circuit outputs a voltage to the electrode so that an electric field generated in the substrate moves after the driving circuit drives the vibrating member. An optical device according to any one of claims 1 to 6 ,
The wiring board is provided on the substrate and electrically connects the output circuit and the electrode,
The optical device is characterized in that at least a part of the vibration member is provided to face the wiring board. An optical device according to any one of claims 1 to 6 ,
The plurality of electrodes is an optical device having a first electrode provided along the surface of the substrate and a second electrode provided in parallel with the first electrode along the surface of the substrate. The optical device according to claim 8 , comprising:
The optical circuit, wherein the output circuit applies an AC voltage having a phase different from that of the AC voltage applied to the first electrode to the second electrode. An optical device according to claim 8 or claim 9 , wherein
The output device is an optical device that outputs a voltage to the first electrode and the second electrode so that an electric field generated on the substrate moves in a direction orthogonal to a direction in which the first electrode is formed. An optical device according to any one of claims 1 to 10 , and
An imaging apparatus comprising: an imaging unit provided to face the substrate of the optical apparatus and capturing an image by an optical system. The vibration member and the electrode that transmits light are arranged on a substrate that transmits light,
A drive circuit for driving the vibration member is connected to the vibration member;
An output circuit that outputs a voltage to the electrode so that an electric field generated in the substrate moves is connected to the electrode ,
An optical device manufacturing method for adjusting the output circuit so that an electric field generated on the substrate moves when the drive circuit drives the vibrating member . A method for manufacturing an optical device according to claim 1 2,
A method of manufacturing an optical device, wherein the drive circuit is adjusted so that a vibration node is generated in the vicinity of at least a part of the electrode. The optical device according to claim 1,
An optical apparatus comprising a voltage supply circuit for supplying a voltage to the drive circuit and the output circuit. An optical device according to claim 1 4,
The optical device, wherein the voltage supply circuit includes a sweep circuit unit that changes the frequency of the voltage with time. An optical device according to claim 14 or claim 15 ,
A switch circuit disposed between the drive circuit and the output circuit and the voltage supply circuit, and switching and electrically connecting at least one of the drive circuit and the output circuit to the voltage supply circuit; Optical device characterized. An optical device according to claim 16 , comprising:
The switch circuit connects the voltage supply circuit and the drive circuit, connects the voltage supply circuit and the output circuit, and then connects the voltage supply circuit and the drive circuit again. An optical device.

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