JP5124317B2 - Sheet plasma deposition apparatus and sheet plasma adjustment method - Google Patents

Description

  The present invention relates to a sheet plasma film forming apparatus that forms a film using sheet-like plasma, and also relates to a sheet plasma adjusting method for adjusting the inclination of the sheet-like plasma.

  When plasma is generated by a plasma gun, its shape is usually cylindrical. When this cylindrical plasma is sandwiched between a pair of permanent magnets facing the same magnetic pole, it is known that the plasma is deformed into a sheet by a repulsive magnetic field generated between the pair of permanent magnets. The sheet plasma film forming apparatus is an apparatus that forms a film using plasma formed in the form of a sheet (hereinafter referred to as “sheet plasma”). The film forming method performed by this sheet plasma film forming apparatus is a kind of vacuum film forming method.

  In the sheet plasma film forming apparatus, plasma is formed in a sheet shape in the sheet plasma forming chamber, and the sheet plasma is transported to the film forming chamber. In the film formation chamber, the target and the substrate are arranged so as to face each other, and the sheet plasma travels between them. At this time, the charged particles in the sheet plasma are attracted by the bias voltage applied to the target to sputter the target (striking out), and the sputtered particles that are struck out are ionized when passing through the sheet plasma to form the substrate. Is attracted by the bias voltage applied to the substrate and deposited on the substrate. As a result, a film is formed on the surface of the substrate.

  As can be seen from this principle, one of the reasons for forming the plasma in the form of a sheet is that the thickness of the plasma is kept constant, the target is sputtered evenly, and the substrate is uniformly formed. However, in order to form the substrate uniformly, it is not necessary to simply make the plasma uniform in thickness, and it is necessary to make the sheet plasma and the target parallel. However, when plasma is formed into a sheet by a pair of permanent magnets, electrons in the plasma are subjected to Lorentz force by Fleming's law, and when viewed from the plasma gun side (cathode side), the plasma transport axis is the center. Tilt counterclockwise. Therefore, in order to form the substrate uniformly, it is necessary to take some measures against the inclination of the plasma.

In contrast, in Patent Document 1, a plasma processing apparatus (sheet plasma film forming apparatus of the present invention) in which two magnets constituting a permanent magnet pair are shifted in opposite directions while being parallel to each other in a direction perpendicular to the transport direction. Is equivalent). According to such a configuration, the repulsive magnetic field generated between the pair of permanent magnets can be deformed, and thus the inclination of the sheet plasma can be corrected.
Japanese Patent No. 3095614

  However, in the plasma processing apparatus according to Patent Document 1, since the opposing permanent magnets need to be shifted in the opposite direction, the effective repulsive magnetic field width becomes narrow (the overlap width becomes narrow), Depending on the conditions, the plasma cannot be formed into a sheet.

  The present invention has been made to solve the above problems, and provides a sheet plasma film forming apparatus and a sheet plasma adjustment method capable of adjusting the inclination of the sheet plasma without reducing the width of the repulsive magnetic field by the permanent magnet. It is intended to provide.

In order to solve the above problems, a sheet plasma film forming apparatus according to the present invention is arranged such that a plasma gun that emits cylindrical plasma and a magnetic pole surface of N pole face each other across the cylindrical plasma. A pair of permanent magnets configured to deform the cylindrical plasma into a sheet shape, and when viewed from the cathode side, the plasma of the permanent magnet passes rightward through the central axis of the cylindrical plasma. Coordinates determined by the X axis and the Y axis when the axis parallel to the surface facing the X axis is the X axis and the center axis of the cylindrical plasma is vertically upward and the axis perpendicular to the X axis is the Y axis a first quadrant and a third quadrant of the at least one side of the system, and the magnetic member disposed on opposite sides to the plasma of the permanent magnet, deposition by using the sheet-shaped plasma is performed Provided that the film forming chamber, the. According to such a configuration, since the repulsive magnetic field generated between the permanent magnet pair can be deformed, the inclination of the sheet plasma can be adjusted without reducing the width of the repulsive magnetic field generated by the permanent magnet.

  Further, in the above-described sheet plasma film forming apparatus, each N pole magnetic pole surface may be formed in a planar shape and in parallel with each other. With such a configuration, the inclination of the sheet plasma can be predicted and adjusted to some extent.

  In the sheet plasma film forming apparatus, the magnetic member may have a rectangular parallelepiped shape. According to this configuration, the magnetic member can be easily processed.

  In the sheet plasma film forming apparatus, the magnetic member has a chamfered shape in which one side of a rectangular parallelepiped is chamfered, and the chamfered portion is a central side of the permanent magnet and a plasma side. You may make it arrange | position to a position. According to such a configuration, a repulsive magnetic field can be efficiently formed.

Furthermore, in order to solve the above-described problem, the sheet plasma adjustment method according to the present invention is arranged such that a plasma gun that emits cylindrical plasma and a magnetic pole surface of N pole face each other across the cylindrical plasma. A pair of permanent magnets, and a pair of permanent magnets for deforming the columnar plasma into a sheet shape, and a film forming chamber in which film formation is performed using the sheet plasma. In the membrane apparatus, when viewed from the cathode side, an axis parallel to the surface of the permanent magnet facing the plasma passing through the central axis of the cylindrical plasma is set to the X axis, and the center of the cylindrical plasma is Assuming that the axis perpendicular to the X axis is the Y axis, the axis is at least one side of the first quadrant and the third quadrant of the coordinate system defined by the X axis and the Y axis, and the front By disposing the magnetic member on a surface opposed to the plasma of the permanent magnets, adjusting the tilt of the sheet-shaped plasma. According to such a configuration, since the repulsive magnetic field generated between the permanent magnet pair can be deformed, the inclination of the sheet plasma can be adjusted without reducing the width of the repulsive magnetic field generated by the permanent magnet.

  In the sheet plasma adjustment method described above, the magnetic pole surfaces of the N poles may be planar and formed in parallel to each other. According to such a configuration, the inclination of the sheet plasma can be predicted and adjusted to some extent.

  In the sheet plasma adjustment method, the sheet-like shape may be changed by changing at least one of the arrangement of the magnetic member, the size of the magnetic member, the shape of the magnetic member, and the number of the magnetic members. You may make it adjust the inclination of a plasma. According to this configuration, the inclination of the sheet plasma can be adjusted more accurately.

  ADVANTAGE OF THE INVENTION According to this invention, the sheet plasma film-forming apparatus which can adjust the inclination of a sheet plasma, and a sheet plasma adjustment method can be provided, without narrowing the repulsive magnetic field by a permanent magnet.

  Embodiments according to the present invention will be described below with reference to the drawings. Below, the same code | symbol is attached | subjected to the element which is the same or it corresponds through all the drawings, and the overlapping description is abbreviate | omitted.

(First embodiment)
First, the sheet plasma film-forming apparatus 1 which concerns on 1st Embodiment is demonstrated. FIG. 1 is a schematic view of a sheet plasma film forming apparatus 1 according to the present embodiment. In the following, the left-right direction in FIG. 1 paper plane, which is the transport direction of plasma P, is the Z direction, the vertical direction in FIG. 1 paper plane orthogonal to the Z direction is the Y direction, and the penetration direction in FIG. The description will be made in the X direction.

  As shown in FIG. 1, the sheet plasma film forming apparatus 1 includes a plasma gun 2, a sheet plasma forming chamber 3, first to third electromagnetic coils 4 to 6, a permanent magnet pair 7, a magnetic member 8, and a component. A membrane chamber 9 and a terminal portion 10 are provided. The plasma P emitted from the plasma gun 2 (cathode 11) passes through the sheet plasma forming chamber 3 and the film forming chamber 9 and converges at the terminal portion 10 (anode 12). Further, the plasma gun 2, the sheet plasma forming chamber 3, and the film forming chamber 9 communicate with each other while being kept airtight. The plasma gun 2, the film forming chamber 9, the anode 12, the target 13, and the substrate 14 are electrically insulated through ceramic, resin, and the like, respectively.

The plasma gun 2 is a component that generates plasma P. The plasma gun 2 has a cathode (cathode) 11, and the cathode 11 is supported by a flange (cathode mount) 15 provided at an end of the plasma gun 2. The flange 15 is also provided with a gas introduction structure (not shown) that guides the argon (Ar) gas, which is the discharge gas of the present embodiment, into the plasma gun 2. A discharge space (not shown) is formed inside the plasma gun 2, and the cathode 11 emits thermal electrons in the discharge space. The thermoelectrons emitted from the cathode 11 induce a plasma discharge, and argon gas is ionized by the induced plasma discharge. Thereby, plasma P that is an aggregate of charged particles (Ar ⁺ and electrons) is generated in the discharge space. In order to maintain the plasma discharge, a pair of grid electrodes (intermediate electrodes) G1 and G2 to which a predetermined positive voltage is applied by a combination of the DC voltage V1 and the resistors Rv, R1, and R2 are disposed at appropriate positions in the discharge space. Yes.

  The sheet plasma forming chamber 3 is disposed on the plasma transport direction side (terminal portion 10 side) of the plasma gun 2. The plasma P is cylindrical when it is emitted from the plasma gun 2, but is formed into a sheet inside the sheet plasma forming chamber 3. The sheet plasma forming chamber 3 has a cylindrical outer wall formed of a nonmagnetic material (for example, stainless steel or glass), and a transport space 16 through which the plasma P passes is formed.

  The first electromagnetic coil 4 is an annular air core coil and is disposed so as to surround the sheet plasma forming chamber 3. When a current is passed through the first electromagnetic coil 4, a magnetic field is formed in the sheet plasma forming chamber 3 from the plasma gun 2 (cathode 11) side toward the terminal end 10 (anode 12) side. Since the charged particles constituting the plasma P have a characteristic of traveling along the magnetic field lines (strictly, while being wound around the magnetic field lines), when the first electromagnetic coil 4 is energized, the plasma P is converted into the plasma gun 2. It is transported in a direction from the (cathode 11) toward the terminal end 10 (anode 12). That is, the first electromagnetic coil 4 has a function as a propulsion source for transporting the plasma P to the terminal end 10 (anode 12) side.

  Similarly, the second electromagnetic coil 5 is disposed in the vicinity of the boundary between the film forming chamber 9 and the sheet plasma forming chamber 3 so as to surround the film forming chamber 9, and the third electromagnetic coil 6 is disposed so as to surround the film forming chamber 9. 9 and the terminal portion 10. The second electromagnetic coil 5 and the third electromagnetic coil 6 are both annular air-core coils, like the first electromagnetic coil 4, and the terminal portion 10 (from the plasma gun 2 (cathode 11) side when current is applied. A magnetic field toward the anode 12) side is formed. That is, the second electromagnetic coil 5 and the third electromagnetic coil 6 have a function as a propulsion source for transporting the plasma P in the film forming chamber 9 to the terminal portion 10 (anode 12) side.

  The permanent magnet pair 7 includes two (a pair of) bar magnets (permanent magnets) 7A and 7B extending in the X direction. The permanent magnet pair 7 is disposed on the outer side of the sheet plasma forming chamber 3 and on the transport direction side of the plasma P (the end portion 10 side) than the first electromagnetic coil 4. The two bar magnets 7A and 7B constituting the permanent magnet pair 7 are arranged so that the N pole magnetic pole faces face each other in the Y direction and sandwich the sheet plasma film forming chamber 3. Moreover, the mutually opposing surfaces of the two bar magnets 7A and 7B are planar and parallel to each other. A repulsive magnetic field is generated in the transport space 16 of the sheet plasma film forming chamber 3 by the two bar magnets 7A, 7B, and the cylindrical plasma P is formed into a sheet shape by passing through the repelling magnetic field. In addition, neodymium, ferrite, samarium, cobalt, etc. are used for the material of the bar magnets 7A and 7B.

  The magnetic member 8 is disposed on the surfaces of the two bar magnets 7A and 7B constituting the permanent magnet pair 7. The magnetic member 8 according to the present embodiment has a rectangular parallelepiped shape, and particularly has a cubic shape. The magnetic member 8 is preferably made of a magnetic material such as iron, nickel, ferrite stainless steel, martensitic stainless steel, or ferromagnetic material. Since these materials are general-purpose magnetic metals, the manufacturing cost of the sheet plasma film forming apparatus 1 can be suppressed. FIG. 2 is a schematic cross-sectional view showing a II-II cross section of FIG. That is, FIG. 2 is a cross-sectional view of the surface including the magnetic member 8 and the permanent magnet pair 7 when viewed from the plasma gun 11 side. As shown in FIG. 2, the magnetic member 8 according to the present embodiment is disposed on each of the two bar magnets 7A and 7B, and faces the plasma P (transport space 16) on the surface of the bar magnets 7A and 7B. It is arranged on the surface to do. Further, the magnetic members 8 on the surfaces of the bar magnets 7A and 7B are disposed asymmetrically with respect to the transport axis T of the plasma P when viewed from the opposing direction (Y direction) of the two bar magnets 7A and 7B. More specifically, the magnetic member 8 is disposed at the end portion on the clockwise direction side with respect to the transport axis T of the plasma P in the surface of the bar magnets 7A and 7B. The transport axis T of the plasma P is an axis that connects the center of the cathode 11 and the center of the anode 12 described later, that is, the central axis of a cylindrical plasma.

  Returning to FIG. 1, the film forming chamber 9 is disposed on the plasma transport direction side (terminal portion 10 side) of the sheet plasma forming chamber 3. The outer wall portion of the film forming chamber 9 is formed of a nonmagnetic material (for example, stainless steel). A bottleneck portion having a small cross-sectional area of the plane (XY cross section) perpendicular to the transport axis T of the plasma P is formed at the boundary portion with the sheet plasma forming chamber 3 and the boundary portion with the terminal portion 10 in the film forming chamber 9. 17 and 18 are formed. Further, a film formation space 19 is formed between the two bottleneck portions 17 and 18. The film formation space 19 is provided with an exhaust port 20 connected to a vacuum pump 25 (for example, a turbo pump) and a valve 21 for opening and closing the exhaust port 20. The vacuum pump 25 connected to the exhaust port 20 can quickly depressurize the film formation space 19 to a vacuum level at which the sputtering process can be performed, and the cylindrical plasma P transports the transport space 16 in the plasma formation chamber 3. The performance is such that the pressure can be quickly reduced to a possible level of vacuum.

  Further, a target holder 22 for holding the target 13 and a substrate holder 23 for holding the substrate 14 are provided in the film forming chamber 9 so as to be spaced apart from each other in the Y direction. . In this embodiment, a copper plate is held by the target holder 22 as a target, and a semiconductor wafer is held by the substrate holder 23 as a substrate. Further, a variable bias voltage (minus voltage) that can be changed within a range of several hundred volts by the DC power source V3 can be applied to the target 13 via the target holder 22. Similarly, a DC variable bias voltage that can be changed within a range of several hundred volts by the DC power source V <b> 2 can be applied to the substrate 14 through the substrate holder 23. The target holder 22 and the substrate holder 23 can be moved in the Y direction by actuators (not shown), and the distance to the plasma P can be changed.

Since the film forming chamber 9 has the above-described configuration, when the sheet plasma P is transported to the film forming chamber 9 with a bias voltage applied to the target 13 and the substrate 14, Ar ⁺ is attracted to the target 13 to which a bias voltage is applied. As a result, the sputtered particles (Cu particles in this embodiment) of the target 13 are knocked out by the collision energy between Ar ⁺ and the target 13. Then, when passing through the sheet plasma, sputtered particles (Cu ions in this embodiment) that have been stripped of electrons and ionized are deposited on the surface of the substrate 14. As a result, copper is deposited on the substrate 14.

  The terminal portion 10 is disposed on the plasma transport direction side of the film forming chamber 9. The terminal portion 10 is mainly composed of an anode (anode) 12 and a permanent magnet 24. The anode 12 has a function of recovering charged particles (particularly electrons) constituting the plasma P when a positive voltage (for example, 100 V) is applied to the cathode 11. Further, the permanent magnet (convergence magnet) 24 is arranged so that the anode 12 side becomes the south pole and the atmosphere side becomes the north pole. Since the permanent magnet 24 forms a magnetic field composed of magnetic lines that exit from the N pole and enter the S pole, the sheet plasma P toward the anode 12 is converged in the width direction. As a result, the charged particles of the sheet plasma P can be properly collected at the anode 12. The above is the configuration of the sheet plasma film forming apparatus 1 according to the present embodiment.

  Next, the operation and effect of the sheet plasma film forming apparatus 1 according to the present embodiment will be described in comparison with the conventional sheet plasma film forming apparatus 50. FIG. 3 is a diagram showing a magnetic field simulation result around the permanent magnet pair 7 in the conventional sheet plasma film forming apparatus 50. FIG. 3 shows an XY cross section including the permanent magnet pair 7, and the back side of the drawing is the anode 12 (terminal portion 10) side. That is, FIG. 3 is a view seen from the cathode 11 (plasma gun 2) side. In the following description, the top, bottom, left, and right in the paper surface of FIG. Two rectangles of the same length extending left and right in the figure indicate the positions and shapes of the bar magnets 7A and 7B. Moreover, the arrow in a figure has shown the magnitude | size of the magnetic flux density, and the direction has shown the direction of the magnetic force line. Further, the dark gray portion marked with the symbol A indicates a region where the magnetic force of the downward component is large, and the slightly gray portion marked with the symbol B indicates a region where the magnetic force of the upward component is large. A thick line portion located between the bar magnets and extending in the left-right direction (X direction) indicates the position and shape of the sheet plasma P.

  Here, in FIG. 3, attention is paid to the direction of magnetic lines of force (the direction of the arrow) in the portion sandwiched between the two bar magnets 7A and 7B. The lines of magnetic force emerging from the N pole surface (lower surface) of the upper bar magnet 7A extend toward the lower bar magnet 7B. On the other hand, the lines of magnetic force emerging from the N pole surface (upper surface) of the lower bar magnet 7B extend toward the upper bar magnet 7A. And it turns out that the magnetic force line extended from both bar magnets 7A and 7B collides and repels in the center of both bar magnets 7A and 7B, and is extended in the left-right direction (X direction). As described above, since the charged particles constituting the plasma P travel along magnetic field lines (strictly, while wrapping around the magnetic field lines), when the cylindrical plasma P passes between the two bar magnets 7A and 7B. The charged particles spread in the left-right direction (X direction). Thereby, a sheet-like plasma P extending in the X direction is formed.

  Further, in FIG. 3, the shape of the region where the magnetic force is large in the vertical direction in the portion sandwiched between the two bar magnets 7A and 7B (regions denoted by symbols A and B; hereinafter referred to as “large magnetic force region”). Pay attention to. It can be seen that the large magnetic force region extending from the N pole surface (lower surface) of the upper bar magnet 7A slightly protrudes to the plasma P side on the left side compared to the right side. On the other hand, it can be seen that the large magnetic force region extending from the N pole surface (upper surface) of the lower bar magnet 7B slightly protrudes to the plasma P side on the right side compared to the left side. The sheet plasma P extends between these large magnetic force regions. For this reason, the sheet plasma P is not parallel to the N pole surfaces of the bar magnets 7A and 7B, but is inclined counterclockwise about the transport axis T of the plasma P. The above is the simulation result for the conventional sheet plasma film forming apparatus 50.

  On the other hand, FIG. 4 is a diagram showing a simulation result of the magnetic field around the permanent magnet pair 7 in the sheet plasma film forming apparatus 1 according to the present embodiment. The simulation result display method shown in FIG. 4 is the same as that in FIG. However, the squares located on the surfaces of the bar magnets 7A and 7B not shown in FIG. Except for the point that the magnetic member 8 is provided, the configuration of the sheet plasma film forming apparatus 1 according to the present embodiment is the same as the configuration of the conventional sheet plasma film forming apparatus 50. Here, in FIG. 4, attention is focused on the shape of the large magnetic force region (region denoted by reference symbols A and B) in the portion sandwiched between the two bar magnets 7A and 7B. In the large magnetic force region extending from the N pole surface (lower surface) of the upper bar magnet 7A and the large magnetic force region extending from the N pole surface (upper surface) of the lower bar magnet 7B, the outer edge of the tip portion of the bar magnet is It can be seen that it spreads in a state substantially parallel to the N pole face.

  As described above, since the outer edge of the tip portion in the large magnetic field region spreads in a state substantially parallel to the N pole surface of the bar magnets 7A and 7B, the sheet plasma P affected by the large magnetic field region is subjected to the bar magnets 7A and 7B. It extends in the left-right direction in a state of being parallel to the N-pole surface or slightly inclined to the right. The reason why the large magnetic field region spreads in a state substantially parallel to the N pole surface of the bar magnets 7A and 7B at the outer edge of the tip portion is that the magnetic member 8 attached to the bar magnets 7A and 7B is magnetized. This is because a magnetic field is formed. In other words, the magnetized magnetic member 8 protrudes to the sheet plasma P side, and as a result, the upper bar magnet 7A pushes up the right large magnetic force region to the sheet plasma P side, and the lower bar magnet 7B has the left side. As a result, the large magnetic field region was pushed up to the sheet plasma P side.

  As described above, according to the sheet plasma film forming apparatus 1 according to the present embodiment, the inclination of the sheet plasma P is corrected only by attaching the magnetic member 8 having a general material and shape to the bar magnets 7A and 7B. be able to. That is, the inclination of the sheet plasma P can be corrected without adding a complicated driving mechanism or control mechanism to the conventional sheet plasma film forming apparatus 50 or reducing the width of the repulsive magnetic field. Furthermore, since the magnetic member 8 can be attached by the magnetic force of the bar magnets 7A and 7B, it is not necessary to use an adhesive or the like, and attachment and removal of the magnetic member 8 to and from the bar magnets 7A and 7B is very easy. .

(Second Embodiment)
Next, a sheet plasma film forming apparatus 1A according to the second embodiment will be described. FIG. 5 is a view showing a simulation result of the magnetic field around the permanent magnet pair 7 in the sheet plasma film forming apparatus 1A according to the present embodiment. The simulation result display method shown in FIG. 5 is the same as in FIG. Note that the magnetic member 8 according to this embodiment has a rectangular parallelepiped shape whose length in the vertical direction (Y direction) is twice that of the magnetic member 8 according to the first example. The rectangles arranged on the surfaces of the bar magnets 7A and 7B in FIG. Except for the point that the length of the magnetic member 8 is long in the vertical direction (Y direction), the configuration of the sheet plasma film forming apparatus 1A according to the present embodiment is the same as the configuration of the sheet plasma film forming apparatus 1 according to the first embodiment. The same.

  Here, attention is paid to the shape of the large magnetic force region (regions denoted by reference symbols A and B) in the portion sandwiched between the two bar magnets 7A and 7B shown in FIG. It can be seen that the large magnetic force region extending from the N pole surface (lower surface) of the upper bar magnet 7A protrudes toward the plasma P side on the right side compared to the left side. On the other hand, it can be seen that the large magnetic force region extending from the N pole surface (upper surface) of the lower bar magnet 7B protrudes to the plasma P side on the left side compared to the right side. This is because the magnetic member 8 according to the present embodiment protrudes largely toward the plasma P side as compared with the magnetic member 8 of the first embodiment (see FIG. 3). The sheet plasma P extends between these large magnetic force regions, and the sheet plasma P is inclined clockwise (downward to the right) with respect to the N pole surfaces of the bar magnets 7A and 7B.

  As described above, according to the sheet plasma film forming apparatus 1A according to the present embodiment, by increasing the size of the magnetic member 8, the sheet plasma P is rotated in the clockwise direction with respect to the N pole surfaces of the bar magnets 7A and 7B. It can be adjusted to tilt (downward to the right). In an actual sheet plasma film forming apparatus, the sheet plasma P (electrons) itself moves according to Ampere's law, so that a magnetic field is generated around the sheet plasma P. When the amount of movement of the sheet plasma (electrons) is increased (when the discharge current is increased), the influence of this magnetic field increases, and the sheet plasma P is counterclockwise around the transport axis T as viewed from the plasma gun 2 side. It will tilt around. The sheet plasma film forming apparatus 1A according to the present embodiment is effective when it is not operated under such conditions that the plasma P is inclined counterclockwise. That is, if the inclination of the sheet plasma P is adjusted to the clockwise side when the sheet plasma P is formed in consideration of the degree of the counterclockwise inclination in the film forming chamber 9, In between, the sheet plasma P can be passed so as to be parallel to these.

(Third embodiment)
Next, a sheet plasma film forming apparatus 1B according to the third embodiment will be described. FIG. 6 is a view showing a simulation result of the magnetic field around the permanent magnet pair 7 in the sheet plasma film forming apparatus 1B according to the present embodiment. The simulation result display method shown in FIG. 6 is the same as in FIG. The magnetic member 8 according to this embodiment has a rectangular parallelepiped shape that is twice as long in the left-right direction (X direction) as compared to the magnetic member 8 according to the first example. The rectangles arranged on the surfaces of the bar magnets 7A and 7B in FIG. Except for the point that the length of the magnetic member 8 is long in the left-right direction (X direction), the configuration of the sheet plasma film forming apparatus 1B according to the present embodiment is the same as the configuration of the sheet plasma film forming apparatus 1 according to the first embodiment. The same.

  As shown in FIG. 6, according to the sheet plasma film forming apparatus 1B according to the present embodiment, the sheet plasma P is rotated in the clockwise direction with respect to the N pole surfaces of the bar magnets 7A and 7B, as in the second embodiment. It can be adjusted to tilt (downward to the right). However, in the sheet plasma film forming apparatus 1B according to the present embodiment, the amount of protrusion of the magnetic member 8 toward the plasma P side is smaller than the case of the second embodiment (the length in the Y direction is short). When the sheet plasma film forming apparatus 1B is operated in a state where the distance between the magnets 7A and 7B is small, it is effective because collision between the sheet plasma P and the magnetic member 8 can be avoided.

(Fourth embodiment)
Next, a sheet plasma film forming apparatus 1C according to the fourth embodiment will be described. FIG. 7 is a view showing a simulation result of the magnetic field around the permanent magnet pair 7 in the sheet plasma film forming apparatus 1C according to the present embodiment. The simulation result display method shown in FIG. 7 is the same as in FIG. The magnetic member 8 according to the present embodiment has a chamfered shape in which one side of a rectangular parallelepiped is chamfered, and the chamfered portions are the center side of the permanent magnets (rod magnets) 7A and 7B and the plasma P side. It is arranged at such a position. In other words, the magnetic member 8 is disposed so that the chamfered portion faces the transport axis T of the plasma P. The pentagons arranged on the surfaces of the bar magnets 7A and 7B in FIG. Except for the fact that the magnetic member 8 has a chamfered shape, the configuration of the sheet plasma film forming apparatus 1C according to the present embodiment is the same as the configuration of the sheet plasma film forming apparatus 1 according to the first embodiment.

  As shown in FIG. 7, the magnetic member 8 according to the present embodiment is perpendicular to the N pole surface of the bar magnets 7A and 7B as compared with the magnetic member 8 according to the first embodiment (see FIG. 3). The surface area of the surface facing the center side (inner side) of 7B is reduced due to the chamfered effect. The magnetic field spreading from this surface hardly contributes to the formation of the repulsive magnetic field generated between the bar magnets 7A and 7B because the lines of magnetic force extend in parallel to the N pole surfaces of the bar magnets 7A and 7B. Further, the magnetic member 8 according to the present embodiment has a surface facing the transport axis T of the plasma P, which is not present in the magnetic member 8 according to the first embodiment. Since this surface faces the portion where the magnetic fields generated by the two bar magnets 7A and 7B collide, it contributes to the formation of a repulsive magnetic field generated between the bar magnets 7A and 7B. That is, according to the magnetic member 8 according to the present embodiment, a repulsive magnetic field for forming the plasma P in a sheet shape can be efficiently formed.

  As described above, in the first to fourth embodiments, the sheet plasma film forming apparatuses 1 and 1A to 1C provided with magnetic members having different shapes have been described. As described above, the inclination of the sheet plasma P can be adjusted by replacing the magnetic member 8 with one having a different shape. However, the inclination of the sheet plasma P can be adjusted by changing not only the shape of the magnetic member 8 but also the arrangement, size, and number of the magnetic members 8.

  Further, the magnetic member 8 is not necessarily arranged in each of the two permanent magnets (bar magnets) 7A and 7B, and may be arranged in any one of the permanent magnets 7A and 7B.

  In the above-described embodiment, the case where the inclination of the sheet plasma is adjusted only by the magnetic member 8 has been described. However, the sheet plasma adjustment method according to the present invention may be used in combination with other sheet plasma adjustment methods.

  ADVANTAGE OF THE INVENTION According to this invention, the sheet plasma film-forming apparatus which can adjust the inclination of a sheet plasma, and a sheet plasma adjustment method can be provided, without narrowing the width | variety of the repulsive magnetic field by a permanent magnet. Therefore, the present invention is useful in the technical field of sheet plasma film forming apparatuses.

1 is a schematic view of a sheet plasma film forming apparatus according to a first embodiment of the present invention. It is a schematic sectional drawing of the surface containing the magnetic member and permanent magnet pair which concern on 1st Embodiment of this invention. It is the figure which showed the simulation result of the conventional sheet plasma film-forming apparatus. It is the figure which showed the simulation result which concerns on 1st Embodiment of this invention. It is the figure which showed the simulation result which concerns on 2nd Embodiment of this invention. It is the figure which showed the simulation result which concerns on 3rd Embodiment of this invention. It is the figure which showed the simulation result which concerns on 4th Embodiment of this invention.

Explanation of symbols

1, 1A, 1B, 1C Sheet plasma film forming apparatus 2 Plasma gun 7 Permanent magnet pair 7A Permanent magnet 7B Permanent magnet 8 Magnetic member 9 Film forming chamber P Plasma T Transport axis (center axis of cylindrical plasma)

Claims (7)

A plasma gun that emits cylindrical plasma;
A pair of permanent magnets arranged so that the N pole pole faces face each other across the columnar plasma, and the pair of permanent magnets deforms the columnar plasma into a sheet;
When viewed from the cathode side, the axis parallel to the surface of the permanent magnet facing the plasma passing through the central axis of the cylindrical plasma is X-axis, and the central axis of the cylindrical plasma is vertically upward And when the axis perpendicular to the X axis is the Y axis, it is at least one side of the first quadrant and the third quadrant of the coordinate system defined by the X axis and the Y axis, and the permanent magnet A magnetic member disposed on the surface facing the plasma ;
A sheet plasma film forming apparatus comprising: a film forming chamber in which film formation is performed using the sheet-like plasma.   The sheet plasma film forming apparatus according to claim 1, wherein the magnetic pole surfaces of each of the N poles are planar and formed in parallel to each other. The magnetic member has a rectangular parallelepiped shape, a sheet plasma film forming apparatus according to claim 1 or 2. The magnetic member has a chamfered shape in which one side of a rectangular parallelepiped is chamfered, and is disposed at a position where the chamfered portion is on the center side of the permanent magnet and on the plasma side. The sheet plasma film-forming apparatus of 1 or 2 . Consists of a plasma gun that emits cylindrical plasma and a pair of permanent magnets arranged so that the N pole magnetic pole faces face each other across the cylindrical plasma, and transforms the cylindrical plasma into a sheet shape A center of the cylindrical plasma when viewed from the cathode side in a sheet plasma film forming apparatus comprising a permanent magnet pair to be formed and a film forming chamber in which film formation is performed using the sheet-shaped plasma When the axis parallel to the surface of the permanent magnet facing the plasma and passing through the axis is the X axis, and the center axis of the cylindrical plasma is vertically upward and the axis perpendicular to the X axis is the Y axis, and at least one side of the first and third quadrants of the coordinate system determined by the X-axis and the Y-axis, and, by disposing the magnetic member on opposite sides to the plasma of the permanent magnet, the sheet Sheet plasma adjusting method for adjusting the inclination of the bets shaped plasma. The sheet plasma adjustment method according to claim 5 , wherein the magnetic pole surfaces of the N poles are planar and are formed in parallel to each other. The arrangement of the magnetic member, the magnitude of the magnetic member, the shape of the magnetic member, and, by at least one change of the number of the magnetic member, for adjusting the inclination of the sheet-shaped plasma, claim 5 Or the sheet plasma adjustment method of 6 .