JP5135403B2 - Chemical liquid measuring device and chemical liquid measuring system - Google Patents

Description

  The present invention relates to a chemical liquid measuring device and a chemical liquid measuring system.

  When manufacturing a flexible substrate (hereinafter, also referred to as “FPC”) or the like, in a manufacturing process that requires chemical processing, a mixture of several types of chemicals is used. These chemical solutions are prepared by mixing each stock solution at a certain ratio in advance. In general, the preparation of these chemicals is called a bath. In order to stabilize the quality of the product, it is necessary to keep the supply amount of these measured chemical solutions uniform every time during the bathing operation.

  Several techniques have been proposed as means for solving the above-described problems (for example, see Patent Document 1). However, in the invention according to Patent Document 1, when the chemical liquid is supplied from the raw liquid tank to the chemical liquid metering device and measured, the overflowed chemical liquid needs to be returned to the raw liquid tank using the height difference. Therefore, the layout of the chemical measuring device, the stock solution tank, and the building tub has been limited. In addition, since the measuring tank is arranged at a higher position than the stock solution tank, there is a problem that it is difficult to visually observe the chemical solution accumulated in the measuring tank.

JP-A-11-197484

  SUMMARY OF THE INVENTION An object of the present invention is to provide a chemical metering device that maintains a uniform supply amount of a measured chemical solution and has no restriction on the layout.

The first aspect of the present invention includes a measuring tank for measuring a specified amount of chemical solution, an overflow tank for storing an overflow chemical solution exceeding a specified amount, and when the specified amount of the chemical solution is supplied to the measuring tank, One end is arranged at a position where it hits the water surface of the chemical solution, the other end communicates with the overflow tank, and is attached to the overflow pipe for transferring the overflow chemical liquid from the measurement tank to the overflow tank, and the measuring tank for supplying the measured chemical liquid. The flow of the chemical liquid from the chemical liquid discharge pipe, the overflow chemical liquid transfer pipe having one end communicating with the chemical liquid discharge pipe and the other end communicated with the overflow tank, and the communicating portion of the chemical liquid discharge pipe and the overflow chemical liquid transfer pipe A chemical supply valve disposed downstream in the direction, and a chemical transfer disposed between the one end and the other end of the overflow chemical transfer pipe The measuring tank and the overflow tank are measuring mass portions formed integrally with an inner wall therebetween, and the measuring liquid supply valve is opened while the measuring liquid supply valve is closed, so that the measuring A gist of a chemical liquid metering device in which a prescribed amount of chemical liquid measured from a tank is supplied, and an overflow chemical liquid is transferred from the overflow tank to the measurement tank by opening the chemical liquid transfer valve while the chemical liquid supply valve is closed. And

  The gist of a second aspect of the present invention is a chemical measurement system including a chemical measurement device and an arithmetic control unit.

  ADVANTAGE OF THE INVENTION According to this invention, the supply amount of the measured chemical | medical solution is kept uniform, and the chemical | medical solution metering device without the restriction | limiting of an arrangement layout is provided.

It is the schematic of the chemical | medical solution measuring device concerning embodiment. It is the schematic (the 1) of the use condition of the chemical | medical solution measuring device concerning embodiment. It is the schematic (the 2) of the use condition of the chemical | medical solution measuring device concerning embodiment. It is the schematic (the 3) of the use condition of the chemical | medical solution measuring device concerning embodiment. It is the schematic of the chemical | medical solution measuring system concerning embodiment.

  Hereinafter, the present invention will be described with reference to embodiments, but the present invention is not limited to the following embodiments. In addition, about what has the same function or a similar function in a figure, the same or similar code | symbol is attached | subjected and description is abbreviate | omitted.

[Chemical liquid measurement system]
A chemical measurement system 100 according to the embodiment of the present invention shown in FIG. 5 includes a chemical measurement device 10 and an arithmetic control unit 23. The chemical liquid metering apparatus 10 is connected to the stock solution tank 40 via the chemical liquid supply pipe 11 and is connected to the building bath tank 41 via the chemical liquid discharge pipe 14.

  As shown in FIG. 1, the chemical liquid measuring device 10 supplies a predetermined amount of chemical liquid to the measuring tank 1 that measures a predetermined amount of chemical liquid, an overflow tank 2 that stores overflow chemical liquid that exceeds the specified amount, and the measuring tank 1. In this case, one end 12a is disposed at a position corresponding to a reference line (chemical liquid upper limit) X indicated by a virtual line, and the other end 12b is communicated with the overflow tank 2, and the overflow chemical liquid is transferred from the measuring tank 1 to the overflow tank 2. And an overflow pipe 12.

  The chemical liquid metering device 10 is attached to the measuring tank 1 to supply a measured chemical liquid, and an overflow chemical liquid transfer pipe 13 having one end connected to the chemical liquid discharge pipe 14 and the other end connected to the overflow tank 2. The chemical solution supply valve 22 disposed downstream of the chemical solution discharge pipe 14 and the overflow chemical solution transfer tube 13 in the flow direction of the chemical solution, and the chemical solution transfer valve disposed between one end and the other end of the overflow chemical solution transfer tube 13. 21.

  The weighing tank 1 and the overflow tank 2 are configured as a weighing mass portion 3 that is integrally formed with an inner wall 3a therebetween. This is because the size of the equipment can be reduced, so that the layout of the chemical solution stock tank 40 and the building bath tank 41 can be freely laid out without limitation.

The overflow pipe 12 has a main body 12a having _one end 12a ₁ disposed in the measuring tank 1 and a branch pipe 12b having the other end 12b ₁ disposed in the overflow tank 2, and is L-shaped. Is formed. Body 12a is may be a fixed, may be telescopic to allow adjustment of the position of one end 12a ₁ in accordance with the prescribed amount.

Determining chemical L ₁ defined amounts of whether filling the measuring tank 1, whether chemical came to the reference line X indicated by a virtual destination 1, using a sensor attached to the measuring tank 1 Can be confirmed. Further, it may be confirmed by a sensor attached to the overflow tank 2 that the chemical solution has been transferred to the overflow tank 2 through the overflow pipe 12.

The overflow tank 2, preferably further comprising a level sensor 30 that the water level sensing unit 30a is attached to the position of the overflow liquid medicine L ₂ of the reference line (upper surface of the water) Y shown in phantom.

The arithmetic control unit 51 includes a chemical solution supply valve control unit 512 that controls the supply of the chemical solution to the building bath tank 41 by opening and closing the chemical solution supply valve 22, and the overflow tank 2 through the overflow pipe 12 by opening and closing the chemical solution transfer valve 21. Chemical liquid transfer valve control means 513 for controlling the transfer of the chemical liquid to the measuring tank 1, chemical quantity confirmation means 514 for confirming the chemical quantity in the measuring tank 1, and overflow chemical quantity for confirming the overflow chemical quantity in the overflow tank 2 Confirmation means 515. And may have an overflow pipe control unit 511 for controlling the position of one end 12a ₁ of the main body 12a is moved up and down the main body 12a of the overflow pipe 12. The arithmetic control unit 51 may be configured by an arithmetic device used in a normal computer system such as a CPU, a PLC (programmable controller), or the like.

As shown in FIG. 5, the chemical liquid measurement system 100 further includes an input device 52 for inputting information such as a supply amount of chemical liquid and characteristics of the chemical liquid, and whether the chemical liquid is supplied from the stock solution tank 40 to the measurement tank 1, Alternatively, an output device 53 for outputting the supply state of the chemical solution as to whether the chemical solution has been supplied from the measuring tank 1 to the built bath tank, and a display device for displaying the supply result, the amount of overflow chemical liquid L ₂ in the overflow tank 2, and the like. 54 and a storage device 55 for storing various information relating to the chemical solution in the bathing process, for example, information on the composition of the stock solution necessary for preparation of the chemical solution, the amount of the chemical solution remaining in the overflow tank, and the like.

  Examples of the input device 52 include a pointing device such as a keyboard and a mouse, or a TP (touch panel). An example of the output device 53 is a printer. Examples of the display device 54 include an image display device such as a liquid crystal display and a monitor. As the storage device 55, a storage device such as a ROM, a RAM, or a magnetic disk can be used.

[Measuring method]
The chemical liquid measuring method will be described with reference to FIGS.

(A) First, the amount of chemical and the information on the chemical measured in step S101 are input using the input device 52 of FIG. One end 12a ₁ of the overflow pipe 12, it is determined whether the position suitable for chemical quantity metering, as appropriate, adjusting the height. Further, it is confirmed that the chemical liquid transfer valve 21 and the chemical liquid supply valve 22 are closed. In FIG. 1, the height adjustment is not necessary because the end 12a ₁ is on the reference line X suitable for the amount of the medicinal solution to be weighed.

(B) In step S103, a pump (not shown) is operated to supply the chemical solution from the stock solution tank 40 to the measuring tank 1 of the chemical solution measuring apparatus 10 through the chemical solution supply pipe 11. At that time, as shown in FIG. 2, the overflow chemical liquid L ₂ exceeding the specified amount exceeding the reference line X is transferred from one end 1 a of the overflow pipe 12 to the overflow tank 2 via the other end 1 b. Thereafter, either chemical L ₁ defined amount is filled in the measuring tank 1, to confirm to activate the chemical amount confirmation unit 514. Until the drug solution L ₁ defined amounts to measuring tank 1 is filled, to supply the chemical liquid to the measuring tank 1 from a stock solution tank 40.

(C) In step S105, it is confirmed whether the measuring tank 1 is filled with the prescribed amount of the chemical solution. If it is filled, as shown in FIG. 3 in step S108, the chemical solution supply valve 22 is opened while the chemical solution transfer valve 21 is closed, and a prescribed amount of the chemical solution L1 measured from the measuring tank ₁ is built. Supply to tank 41.

A determination is made whether the overflow tank 2 by operating the overflow chemical quantity checking means 515 (d) In step S110 there is an overflow liquid medicine L _2. If the overflow vessel 2 there is an overflow liquid medicine L ₂ are closed chemical liquid supply valve 22, opens the drug solution transferring valve 21. Then, as shown in FIG. 4, the overflow chemical liquid L ₂ is transferred from the overflow tank 2 to the stock solution tank 40.

(E) In step S112, it is determined whether or not the chemical solution needs to be measured. If there is no need for weighing, stop weighing. If there is a need for weighing, the steps S101 to S110 are repeated.

In the conventional measuring mass type chemical measuring device, when the chemical solution is supplied from the raw solution tank to the chemical measuring device and measured, the overflowed chemical solution needs to be returned to the raw solution tank using the height difference. However, the chemical metering system 100 according to the embodiment, after transferring the overflow liquid medicine L ₂ into the overflow tank 2, drug solution transferring valve 21, by controlling the chemical liquid supply valve 22, returning the overflow liquid medicine L ₂ in the weighing vessel 1 be able to. For this reason, the restriction that the height difference must be provided between the chemical solution measuring device and the stock solution tank is eliminated, so that the layout of the chemical solution measuring device, the stock solution tank, and the building tub becomes free. Moreover, since there is no need to arrange the measuring tank 1 at a position higher than the stock solution tank, visual observation of the chemical solution accumulated in the measuring tank is facilitated. Furthermore, piping for returning the liquid to the stock solution tank is not required.

  In addition, since the chemical | medical solution measurement system 100 which concerns on embodiment has taken the measurement mass system, the malfunction which arises with a diaphragm type metering pump system does not arise. That is, in the case of chemicals such as hydrogen peroxide solution that foam itself, the problem is that air is collected in the replenishment piping due to decomposition and foaming in the piping, and in the case of chemicals with high specific gravity and viscosity such as sulfuric acid, the setting stroke of the metering pump Therefore, there is no problem that the supply amount varies depending on the supply time.

(Other embodiments)
As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

  For example, a semiconductor device partially including the configuration described in the embodiment can be manufactured similarly. In the embodiment, the chemical liquid measuring system 100 in which the set of the raw liquid tank 40 and the chemical liquid measuring apparatus 10 is connected to the building bath tank 41 has been described. However, the present invention is not limited thereto, and a plurality of sets of the stock solution tank 40 and the chemical solution measuring device 10 may be prepared and connected to the bathing tank 41.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 ... Measuring tank 2 ... Overflow tank 11 ... Chemical liquid supply pipe 14 ... Chemical liquid discharge pipe 12 ... Overflow pipe 13 ... Overflow chemical liquid transfer pipe 21 ... Chemical liquid transfer valve 22 ... Chemical liquid supply valve 30 ... Level sensor 40 ... Stock solution tank 41 ... Building bath Tank 51 ... Calculation control unit 52 ... Input device 53 ... Output device 54 ... Display device 55 ... Storage device

Claims (4)

A measuring tank for measuring a specified amount of chemical solution;
An overflow tank for storing an overflow chemical solution exceeding a prescribed amount;
An overflow pipe for transferring the overflow chemical from the measurement tank to the overflow tank when one end is disposed at a position where the chemical liquid is supplied to the measurement tank and the other end communicates with the overflow tank when the chemical liquid is supplied to the measurement tank When,
A chemical solution discharge pipe attached to the measuring tank for supplying the measured chemical solution;
An overflow chemical liquid transfer pipe having one end connected to the chemical liquid discharge pipe and the other end connected to the overflow tank;
A chemical solution supply valve disposed downstream of the chemical solution discharge pipe and the overflow chemical solution transfer pipe in the flow direction of the chemical solution,
A chemical liquid transfer valve disposed between the one end and the other end of the overflow chemical liquid transfer pipe,
The weighing tank and the overflow tank are weighing mass portions formed integrally with an inner wall therebetween,
With the chemical liquid transfer valve closed, by opening the chemical liquid supply valve, a prescribed amount of chemical liquid measured from the measuring tank is supplied,
An overflow chemical liquid is transferred from the overflow tank to the measurement tank by opening the chemical liquid transfer valve while the chemical liquid supply valve is closed . The overflow pipe includes the main body having the one end arranged in the measuring tank and adjustable in a telescopic manner according to a specified amount, and the branch pipe having the other end arranged in the overflow tank. The drug solution measuring device according to claim 1, wherein the drug solution measuring device is in a letter shape. Wherein the overflow tank, overflowed water of the upper limit further serial mounting of the chemical metering apparatus in claim 1, characterized in that it comprises a level sensor which sensor unit is attached to the position of the chemical. A chemical metering device according to any one of claims 1 to 3,
A chemical liquid measurement system comprising an arithmetic control unit.

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