JP5154273B2 - Liquid crystal display device and manufacturing method thereof - Google Patents

Description

The present invention relates to a liquid crystal display device and a manufacturing method thereof, and more particularly to a liquid crystal display device that controls liquid crystal using an electric field in a substantially horizontal direction with respect to a transparent substrate and a manufacturing method thereof.

As a liquid crystal display device capable of obtaining a high contrast and a wide viewing angle, a liquid crystal display device using an electric field in a substantially horizontal direction with respect to a transparent substrate, that is, an FFS (Fringe-Field Switching) mode or an IPS (In-Plain Switching) mode There is known a liquid crystal display device that operates by, for example.

For example, in an FFS mode liquid crystal display device, a pixel electrode to which a display signal is supplied is formed on one of the two transparent substrates sandwiching the liquid crystal, and a plurality of layers are provided with an insulating film interposed therebetween. A common electrode having alternating linear portions and slit portions to which a common potential is supplied is disposed.

As an example of the configuration of the pixel electrode and the common electrode, as shown in the cross-sectional view of FIG. 8, ITO (Indium Tin O 2) is formed on the planarizing film 18 that covers the first transparent substrate (not shown) on which the pixel transistor is formed.
A pixel electrode 20 made of a transparent conductive material such as xide) or IZO (Indium Zinc Oxide) is formed. The pixel electrode 20 is covered with an insulating film 21 made of an inorganic film such as a silicon nitride film. The insulating film 21 is made of a transparent conductive material such as ITO or IZO, and includes a plurality of linear portions 22E.
And common electrodes to which the common potential is supplied are arranged. The linear portion 22E and the slit portion 22S of the common electrode are the first alignment film 2 made of polyimide resin or the like.
4 is covered. A second transparent substrate (not shown) on which a second alignment film is arranged is bonded to the first transparent substrate, and a liquid crystal LC is sealed between them. The first
A first polarizing plate and a second polarizing plate (not shown) whose transmission axes are orthogonal to each other are disposed on the transparent substrate and the second transparent substrate. The rubbing directions of the first alignment film 24 and the second alignment film are, for example,
It is parallel to the transmission axis of the first polarizing plate and is inclined about 5 to 10 ° in plan with respect to the longitudinal direction of the linear portion 22E of the common electrode.

A liquid crystal display device that operates in the FFS mode is described in Patent Document 1.
JP 2002-296611 A

However, in the conventional FFS mode liquid crystal display device, a high contrast and a wide viewing angle can be obtained as compared with other liquid crystal modes such as the TN mode. There was a problem in that seizure occurred due to shifting from the value. Thereby, the display quality of the liquid crystal display device was lowered.

According to the evaluation by experiments so far, it is clear that the shift of the center potential and the burn-in of the common potential in the FFS mode are greatly influenced by the characteristics of the first alignment film 24.

From this point of view, focusing on the configuration in the vicinity of the first alignment film 24 in FIG. 8, on the linear portion 22E of the common electrode, it is made of a transparent conductive material such as ITO and the polyimide-based resin that constitute the linear portion 22E. There are an interface H between the first alignment film 24 and an interface I between the first alignment film 24 and the liquid crystal LC. On the other hand, in the slit portion 22S of the common electrode, the interface J between the pixel electrode 20 made of a transparent conductive material such as ITO and the insulating film 21 made of an inorganic film such as a silicon nitride film, the insulating film 21 and the first alignment film 24 Interface K, and an interface L between the first alignment film 24 and the liquid crystal LC. That is, the stacking relationship in the linear portion 22E of the common electrode does not match the stacking relationship in the slit portion 22S.

Therefore, the line portion 22E between the pixel electrode 20 and the common electrode is caused by the potential difference between the display signal and the common potential.
When an electric field is generated between the first and second charges, the accumulated amount of charges charged at the interfaces H and I in the linear portion 22E differs from the accumulated amount of charges charged at the interfaces J, K, and L in the slit portion 22S. . Due to the difference in the amount of accumulated charge, an unnecessary direct current component is generated between the pixel electrode 20 and the linear portion 22E of the common electrode, and an optimum center potential shift is likely to occur, and image sticking is likely to occur. It is considered a thing.

It is conceivable to deal with this problem by changing the materials such as the first alignment film 24 and the liquid crystal LC. In this case, however, the image is burned down due to a decrease in alignment force or excessive movement of charges. However, it cannot be said that sufficient improvement has been made at present.

According to one aspect of the present invention for solving the above problems, a liquid crystal sandwiched between the first transparent substrate and the second transparent substrate, a first transparent electrode disposed on the first transparent substrate, A first inorganic film that covers the first transparent electrode; a second transparent electrode that is disposed on the first inorganic film and that has alternating linear portions and slit portions; a first inorganic film; a second inorganic film; A second inorganic film that covers the linear part and the slit part of the transparent electrode, and an alignment film that covers the second inorganic film. In the first region corresponding to the linear part, the first transparent electrode, 1 inorganic film, 2nd transparent electrode, 2nd inorganic film, and alignment film are laminated in order, and in the 2nd field corresponding to a slit part, the 1st transparent electrode, the 1st inorganic film, the 2nd An inorganic film and an alignment film are sequentially stacked, the first and second transparent electrodes are formed of the same transparent electrode material, and the first and second inorganic films are the same. It is formed of an inorganic material, an inorganic material, a liquid crystal display device comprising a compound of nitrogen and oxygen is provided.

  According to another aspect of the present invention for solving the above problems, a step of forming a first transparent electrode on a first transparent substrate and a first inorganic film covering the first transparent electrode are provided. A step of forming, a step of forming a second transparent electrode having alternating linear portions and slit portions on the first inorganic film, a linear portion of the first inorganic film, the second transparent electrode, and Forming a second inorganic film covering the slit portion, forming an alignment film covering the second inorganic film, and bonding the second transparent substrate to the first transparent substrate to form a first transparent film Sealing a liquid crystal between the substrate and the second transparent substrate, and in the first region corresponding to the linear portion, the first transparent electrode, the first inorganic film, and the second transparent electrode , The second inorganic film, and the alignment film are sequentially stacked. In the second region corresponding to the slit portion, the first transparent electrode, the first inorganic film, and the second non-conductive film are stacked. A film and an alignment film are stacked in order, the first and second transparent electrodes are formed of the same transparent electrode material, the first and second inorganic films are formed of the same inorganic material, and the inorganic material is nitrogen And a method for manufacturing a liquid crystal display device comprising a compound with oxygen.

According to the present invention, symmetry regarding the amount of accumulated charge occurs in the formation region of the linear portion of the common electrode and the formation region of the slit portion of the common electrode, and an unnecessary DC component is generated between the pixel electrode and the linear portion. the occurrence of the suppression, can prevent burn thus suppressing the shift of the center potential of the common potential. As a result, display quality can be improved.

Hereinafter, a planar configuration of a liquid crystal display device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a schematic configuration of the liquid crystal display device according to the present embodiment. 2 is an enlarged plan view showing only three pixels PXL among the plurality of pixels PXL formed in the display unit 10A of FIG. 1, and shows a configuration operating in the FFS mode. . FIG.
In FIG. 2 and FIG. 2, only main components are shown for convenience of explanation.

In the following description of the planar configuration, the gate insulating film 12, the interlayer insulating film 15, the passivation film 17, and the planarizing film 18 are used to supplement the configuration of the contact holes H1 to H4.
However, these lamination relationships will be described in the description of the method for manufacturing a liquid crystal display device to be described later.

As shown in FIG. 1, the liquid crystal display device includes a display unit 10 in which a plurality of pixels PXL are arranged.
A and a terminal portion 10T in which a plurality of terminals TL for external connection are arranged. In the display unit 10A, as shown in FIG. 2, a gate line 1 to which a gate signal, that is, a pixel selection signal is supplied.
3 and each pixel PXL is arranged corresponding to the intersection of the source line 16S to which the source signal, that is, the display signal is supplied.

On the first transparent substrate 10 of each pixel PXL, a pixel transistor TR such as a thin film transistor using the gate line 13 as a gate electrode is disposed. The source of the pixel transistor TR is connected to the source line 16S through a contact hole H1 formed in the gate insulating film 12 and the interlayer insulating film 15, and the drain thereof is a contact hole formed in the gate insulating film 12 and the interlayer insulating film 15. The drain electrode 16D is connected through H2. The drain electrode 16D includes a contact hole H3 and a planarizing film 18 formed in the passivation film 17.
It is connected to the pixel electrode 20 through the contact hole H4 formed in.

The pixel electrode 20 is covered with an insulating film 21, and a common electrode 22 is disposed on the insulating film 21. The common electrode 22 has a shape in which a plurality of linear portions 22E and slit portions 22S extend alternately in parallel. The common electrode 22 is connected to a common electrode line (not shown) that extends near the end of the display unit 10A and is supplied with a common potential through a contact hole (not shown).
The insulating film 21 and the common electrode 22 are covered with an inorganic film 23.

Further, the pixel electrode 20, the insulating film 21, and the linear portion 22E of the common electrode 22 are stacked in this order, so that a storage capacitor for holding a source signal for a certain period is formed. further,
Alternatively, another storage capacitor (not shown) connected to the drain of the pixel transistor TR and holding the source signal for a certain period and supplying it to the pixel electrode 20 may be formed.

On the other hand, the terminal TL of the terminal portion 10T in FIG. 1 has an FP extending from an external drive circuit (not shown).
External terminals (not shown) such as C (Flexible Printed Circuit) and COG (Chip On Glass) are connected.

In the pixel PXL having the above configuration, the pixel transistor TR is turned on in response to the pixel selection signal supplied from the gate line 13, and a display signal is supplied to the pixel electrode 20 through the source line 16 </ b> S and the pixel transistor TR. At this time, an electric field is generated along the substantially horizontal direction of the first transparent substrate 10 according to the display signal between the pixel electrode 20 and the linear portion 22E of the common electrode 22, and the liquid crystal ( By changing the orientation direction (not shown), optical control for display is performed. On the other hand, a drive signal such as a pixel selection signal and a display signal is supplied to the terminal TL from a drive circuit (not shown) via an FPC or the like.

Below, the manufacturing method of this liquid crystal display device is demonstrated with reference to sectional drawings. 3 to 6 show one pixel PXL of the display unit 10A in the liquid crystal display device. In addition,
3 to 6, the same components as those shown in FIGS. 1, 2, and 8 are referred to with the same reference numerals.

First, as shown in FIG. 3, in the first transparent substrate 10 of the display unit 10A, the pixel PXL
The active layer 11 is formed in the region where the pixel transistor TR is formed. A gate insulating film 12 is formed on the first transparent substrate 10 so as to cover the active layer 11. A gate line 13 is formed on the gate insulating film 12 overlapping the active layer 11. Although not shown, a common electrode line to which a common potential is supplied is formed on the gate insulating film 12 near the end of the display unit 10A.

In the display unit 10A, an interlayer insulating film 15 is formed on the gate insulating film 12 so as to cover the gate line 13 and the common electrode line. A source line 16S connected to the source of the active layer 11 through the contact hole H1 is formed on the interlayer insulating film 15, and the contact hole H2
A drain electrode 16D connected to the drain of the active layer 11 through is formed.

The source line 16S and the drain electrode 16D are formed simultaneously as the same layer, and are, for example, a laminate in which titanium, aluminum, and titanium are formed in this order. A passivation film 17 is formed on the interlayer insulating film 15 so as to cover the source line 16S and the drain electrode 16D. The passivation film 17 is made of, for example, a silicon nitride film formed in an environment of 300 to 400 ° C.

Then, by performing dry etching on the passivation film 17 using a resist layer (not shown) as a mask, a contact hole H3 exposing the drain electrode 16D is formed in the passivation film 17.

Next, after removing the resist layer, the contact hole H3 and the passivation film 17 are removed.
A planarizing film 18 such as an organic film covering them is formed on the top. Then, the contact hole H4 that exposes the drain electrode 16D in the contact hole H3 is formed by performing dry etching on the planarizing film 18 using another resist layer (not shown) as a mask.

Next, the pixel electrode 20 extending from the planarizing film 18 into the contact hole H4 and connected to the drain electrode 16D is formed. The pixel electrode 20 is an example of the first transparent electrode of the present invention. The pixel electrode 20 is formed by forming and patterning a transparent conductive material such as ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide). The film thickness of the pixel electrode 20 is preferably about 100 nm.

Next, an insulating film 21 that covers the pixel electrode 20 is formed on the planarizing film 18. The insulating film 21 is made of an inorganic film containing a compound with nitrogen, for example, a silicon nitride film formed at a low temperature in an environment of about 200 ° C. This insulating film 21 is an example of the first inorganic film of the present invention.

Next, as shown in FIG. 4, a plurality of linear portions 22E and slit portions 22S are formed on the insulating film 21.
Are formed in an alternating arrangement in parallel with each other. The common electrode 22 is formed by forming a transparent conductive material such as ITO or IZO and patterning it.

Next, as shown in FIG. 5, the insulating film 21, the linear portion 22 </ b> E of the common electrode 22, and the slit portion 2.
An inorganic film 23 is formed so as to cover 2S. The inorganic film 23 contains a compound with nitrogen, is made of, for example, a silicon nitride film, and is formed by a CVD method or another film forming method. Although the film thickness of the inorganic film 23 is not specifically limited, For example, it is about 50 nm or less. This inorganic film 23 is an example of the second inorganic film of the present invention.

The inorganic film 23 and the insulating film 21 described above may be inorganic films other than the silicon nitride film, but the inorganic film 23 and the insulating film 21 are formed of the same material.

As another example, the inorganic film 23 and the insulating film 21 may include a compound with oxygen such as a silicon oxide film, or may include a compound of oxygen and nitrogen such as a silicon oxynitride film. There may be.

An example of a method of forming the inorganic film 23 by a method other than the CVD method is as follows. A paste containing silicon and an organic material is formed by a coating method (that is, a spin coating method, a printing method, etc.) and baked to form an inorganic film. A silicon oxide film can be formed as 23.

Preferably, the inorganic film 23 is formed by a printing method which is one of coating methods, that is, a method of printing an inorganic material in a predetermined pattern (for example, screen printing, letterpress printing). In the printing method,
When providing an opening in the inorganic film 23 in the terminal TL of the terminal portion 10T of FIG. 1, the patterning step of the inorganic film 23 required by the CVD method or other coating methods is omitted, and the manufacturing process can be simplified. Because.

Next, as shown in FIG. 6, a first alignment film 24 that covers the inorganic film 23 is formed. The first alignment film 24 is made of a polyimide resin or the like. The rubbing direction of the first alignment film 24 is inclined, for example, about 5 to 10 ° in a plane with respect to the longitudinal direction of the linear portion 22E of the common electrode 22. The first alignment film 24 is an example of the alignment film of the present invention.

Next, the second transparent substrate 30 is bonded to the first transparent substrate 10, and a liquid crystal LC such as a nematic liquid crystal having positive dielectric anisotropy is sealed therebetween. The second
The transparent substrate 30 is previously provided with a black matrix (on the side facing the first transparent substrate 10).
A color filter 31 and a second alignment film 32 covering the color filter 31 are formed. The second alignment film 32 is made of polyimide resin or the like. The rubbing direction of the second alignment film 32 is the first
The alignment film 24 is parallel to the rubbing direction.

Furthermore, in any of the above steps, the first polarizing plate PL1 is formed on the first transparent substrate on the side facing the light source BL. The transmission axis of the first polarizing plate PL1 is the first alignment film 24.
Parallel to the rubbing direction. In any of the above steps, the second polarizing plate PL <b> 2 is formed on the second transparent substrate 30 on the side not facing the first transparent substrate 10.
The transmission axis of the second polarizing plate PL2 is orthogonal to the transmission axis of the first polarizing plate PL1.

Finally, the laminated body composed of the first transparent substrate 10 and the second transparent substrate 30 is separated into a plurality of liquid crystal display devices by scribe and break.

In the liquid crystal display device thus completed, the liquid crystal L is formed from the pixel electrode 20 in the display unit 10A.
Paying attention to the stacking relationship of the layers up to C, the stacking relationship of the layers above the linear portion 22E of the common electrode 22 and the stacking relationship of the layers in the formation region of the slit portion 22S coincide. This is realized by laminating the inorganic film 23 so as to cover the linear portion 22E and the slit portion 22S of the common electrode 22.

The coincidence of the stacking relationship will be described below with reference to the drawings. FIG. 7 is a partially enlarged view showing a configuration in the vicinity of the first alignment film 24 in FIG. As shown in FIG.
In the region where the linear portion 22E is formed, on the linear portion 22E, the interface A between the linear portion 22E made of a transparent conductive material such as ITO and the inorganic film 23 made of a silicon nitride film, the inorganic film 23 and the polyimide An interface B with the first alignment made of a resin or the like, and an interface C between the first alignment film 24 and the liquid crystal LC exist in this order.

On the other hand, in the formation region of the slit portion 22S of the common electrode 22, the interface D between the pixel electrode 20 made of a transparent conductive material such as ITO and the insulating film 21 made of an inorganic film such as a silicon nitride film, the inorganic made of a silicon nitride film or the like. Interface E between film 23 and first alignment film 24 made of polyimide resin or the like
The interface F between the first alignment film 24 and the liquid crystal LC exists in this order. That is, the lamination relationship in the linear portion 22E of the common electrode and the lamination relationship in the slit portion 22S are the same.

Note that since the insulating film 21 and the inorganic film 23 are the same inorganic film, the difference between the manufacturing methods can be ignored, and the interface between the insulating film 21 and the inorganic film 23 in the slit portion 22S is not considered.

With this configuration, when an electric field is generated between the pixel electrode 20 and the linear portion 22E of the common electrode 22 due to a potential difference between the display signal and the common potential, each interface A,
The amount of charge accumulated in B and C and the interfaces D, E, and
The accumulated amount charged to F is substantially equal. That is, symmetry occurs with respect to the amount of accumulated charge in both formation regions. It has been confirmed by experiments by the inventors of the present invention that this symmetry can be obtained regardless of the film thicknesses of the insulating film 21, the inorganic film 23, and the first alignment film 24.

Due to this symmetry, generation of an unnecessary DC component is suppressed between the pixel electrode 20 and the linear portion 22E of the common electrode 22, and only an electric field corresponding to the display signal is generated. Therefore, FF
In the S mode liquid crystal display device, the shift of the center potential of the optimum common potential and the burn-in as in the conventional example are suppressed. As a result, the display quality of the liquid crystal display device can be improved as compared with the conventional example.

In addition, in order to obtain the above effect, it is not necessary to change the materials such as the first alignment film 24 and the liquid crystal LC, and accordingly, the alignment force is reduced, and an excessive charge is transferred to cause image sticking. There is no need to consider the contradiction characteristics.

In the above embodiment, the inorganic film 23 and the insulating film 21 are formed of the same material, but the present invention is not limited to this. That is, although the above effect is slightly reduced, the inorganic film 23 and the insulating film 21 may be different from each other as long as unnecessary charges are difficult to accumulate at the interface between them. For example, when the insulating film 21 is a silicon nitride film, the inorganic film 23 may be formed of a silicon oxide film.

Moreover, the slit part 22S and the linear part 22E of this invention are not limited to what was shown in FIG. That is, the direction in which the slit portion 22S and the linear portion 22E are formed may be formed such that the longitudinal direction thereof extends along the source line 16 or obliquely intersects the gate line 13. . Further, the length of the slit portion 22S and the linear portion 22E may extend over a plurality of pixels. Further, the shape of the slit portion 22S and the linear portion 22E is not limited to a straight line, but may be an arc shape, a wave shape, or a zigzag shape. The shape of the slit portion 22S and the linear portion 22E may be a comb shape with one side open.

The present invention is not limited to the above-described embodiment, and can be applied to a case where a common electrode is formed as the first transparent electrode and a pixel electrode is formed as the second transparent electrode. That is, a common electrode having the same shape as the pixel electrode 20 is formed on the planarizing film 18, and the insulating film 2 is formed thereon.
1, a pixel electrode having a plurality of linear portions and slit portions may be formed in the same manner as the common electrode 22. In this case, the inorganic film 2 covers the insulating film 21, the linear portion and the slit portion of the pixel electrode.
3 is formed. Even in this case, the same effect as described above can be obtained.

It is a top view which shows schematic structure of the liquid crystal display device by embodiment of this invention. FIG. 2 is an enlarged plan view showing a pixel in the display unit of FIG. 1. It is an enlarged plan view which shows the terminal in the terminal part of FIG. It is sectional drawing which shows the manufacturing method of the liquid crystal display device by embodiment of this invention. It is sectional drawing which shows the manufacturing method of the liquid crystal display device by embodiment of this invention. It is sectional drawing which shows the manufacturing method of the liquid crystal display device by embodiment of this invention. It is sectional drawing which shows the liquid crystal display device by embodiment of this invention. It is sectional drawing which shows the liquid crystal display device by a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 1st transparent substrate 10A Display part 10T Terminal part 11 Active layer 12 Gate insulating film 13 Gate line 15 Interlayer insulating film 16S Source line 16D Drain electrode 17 Passivation film 18 Planarization film 20 Pixel electrode 21 Insulating film 22 Common electrode 22E Line 22S slit portion 23 inorganic film 24 first alignment film 30 second transparent substrate 31 color filter 32 second alignment film PL1 first polarizing plate PL2 second polarizing plate BL light source TR pixel transistor LC liquid crystal PXL pixel TL terminal H1, H2, H3, H4 Contact hole

Claims (7)

A liquid crystal sandwiched between a first transparent substrate and a second transparent substrate;
A first transparent electrode disposed on the first transparent substrate;
A first inorganic film covering the first transparent electrode;
A second transparent electrode disposed on the first inorganic film and alternately having linear portions and slit portions;
A second inorganic film covering the first inorganic film, the linear part and the slit part of the second transparent electrode, and
An alignment film covering the second inorganic film;
With
In the first region corresponding to the linear portion, the first transparent electrode, the first inorganic film, the second transparent electrode, the second inorganic film, and the alignment film are sequentially laminated,
In the second region corresponding to the slit portion, the first transparent electrode, the first inorganic film, the second inorganic film, and the alignment film are sequentially laminated,
The first and second transparent electrodes are formed of the same transparent electrode material,
The first and second inorganic films are formed of the same inorganic material,
The inorganic material includes a compound with nitrogen and oxygen.
Liquid crystal display device.   A plurality of interfaces on the second transparent electrode that are in contact with different materials as viewed in the stacking direction in the first region, and The accumulated amount of charged charge is the same at multiple interfaces
  The liquid crystal display device according to claim 1. The inorganic material is an insulator.
  The liquid crystal display device according to claim 1. Forming a first transparent electrode on a first transparent substrate;
Forming a first inorganic film covering the first transparent electrode;
Forming a second transparent electrode alternately having linear portions and slit portions on the first inorganic film;
Forming a second inorganic film covering the first inorganic film, the linear part of the second transparent electrode, and the slit part;
Forming an alignment film covering the second inorganic film;
Bonding a second transparent substrate to the first transparent substrate and sealing a liquid crystal between the first transparent substrate and the second transparent substrate;
Including
In the first region corresponding to the linear portion, the first transparent electrode, the first inorganic film, the second transparent electrode, the second inorganic film, and the alignment film are sequentially laminated,
In the second region corresponding to the slit portion, the first transparent electrode, the first inorganic film, the second inorganic film, and the alignment film are sequentially laminated,
The first and second transparent electrodes are formed of the same transparent electrode material,
The first and second inorganic films are formed of the same inorganic material,
The inorganic material includes a compound with nitrogen and oxygen.
A method for manufacturing a liquid crystal display device. The second inorganic film is formed by a CVD method.
The method according to 請 Motomeko 4. The second inorganic film is formed by a coating method.
The method according to 請 Motomeko 4. The second inorganic film is formed by printing of the inorganic material
The method according to 請 Motomeko 6.

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