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JP5155705B2 - Fluid dynamic bearing device, spindle motor, and fluid dynamic bearing device manufacturing method - Google Patents
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JP5155705B2 - Fluid dynamic bearing device, spindle motor, and fluid dynamic bearing device manufacturing method - Google Patents

Fluid dynamic bearing device, spindle motor, and fluid dynamic bearing device manufacturing method Download PDF

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JP5155705B2
JP5155705B2 JP2008068775A JP2008068775A JP5155705B2 JP 5155705 B2 JP5155705 B2 JP 5155705B2 JP 2008068775 A JP2008068775 A JP 2008068775A JP 2008068775 A JP2008068775 A JP 2008068775A JP 5155705 B2 JP5155705 B2 JP 5155705B2
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dynamic pressure
groove
pair
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忠 赤堀
偉紅 楊
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Minebea Co Ltd
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Description

本発明は、性能のばらつきが抑えられる流体動圧軸受装置に関する。   The present invention relates to a fluid dynamic bearing device that can suppress variation in performance.

流体動圧軸受装置において、動圧を発生させるための溝(動圧溝)を軸部材あるいは軸受部材側に設ける構成が知られている。この技術に関しては、例えば特許文献1〜5に記載されている。   In the fluid dynamic pressure bearing device, a configuration is known in which a groove (dynamic pressure groove) for generating dynamic pressure is provided on the shaft member or the bearing member side. This technique is described in Patent Documents 1 to 5, for example.

実開昭62−63415号公報(第1図)Japanese Utility Model Publication No. 62-63415 (FIG. 1) 特開平4−285311号公報(要約書)JP-A-4-285111 (Abstract) 特開昭61−127918号公報(第9図)Japanese Patent Laid-Open No. 61-127918 (FIG. 9) 特開平10−141358号公報(要約書)JP-A-10-141358 (abstract) 特許第3150878号公報(図4、図5および図8)Japanese Patent No. 3150878 (FIGS. 4, 5, and 8)

ところで、軸部材と軸受部材との間の相対的な動きに起因して、潤滑流体中に急激な負圧の状態が発生し、それにより潤滑流体中に気泡が発生(この現象をキャビテーションという)することがある。この潤滑流体中における気泡の発生が生じると、潤滑流体の外部への漏出や動圧発生効果の低下および振動が生じる。このため、このキャビテーションを抑える構造が重要となる。キャビテーションを抑えるには、動圧溝を所謂へリングボーン動圧溝のようなくの字に屈曲した形状にして、その屈曲した動圧溝の端部がより間隔の大きな隙間空間に開放された構造とすることが効果的である。本明細書では、このような構造の動圧溝を、ブレークスルー・ヘリングボーン動圧溝と称する。   By the way, due to the relative movement between the shaft member and the bearing member, a sudden negative pressure state is generated in the lubricating fluid, thereby generating bubbles in the lubricating fluid (this phenomenon is called cavitation). There are things to do. When bubbles are generated in the lubricating fluid, leakage of the lubricating fluid to the outside, a decrease in dynamic pressure generation effect, and vibration occur. For this reason, the structure which suppresses this cavitation becomes important. In order to suppress cavitation, the dynamic pressure groove is bent into a shape like a so-called herringbone dynamic pressure groove, and the end of the bent dynamic pressure groove is opened to a larger gap space. Is effective. In this specification, the dynamic pressure groove having such a structure is referred to as a breakthrough herringbone dynamic pressure groove.

しかしながら、図9に示すような、単にヘリングボーン動圧溝の端部を大きな隙間空間まで延長しただけの従来のブレークスルー・ヘリングボーン動圧溝を採用した場合、隙間部及び拡大隙間部に対応する形状を軸受部材内周面または軸部材外周面に加工する際の加工誤差と前記動圧溝を形成する際の加工誤差に起因して、ブレークスルー・へリングボーン動圧溝の屈曲点から端部までの寸法がばらつくこととなり、ひいては動圧軸受装置の性能がばらつくという問題が生じる。以下、この点について詳細に説明する。なお、動圧溝の形成は、加工の容易性、低コスト性さらに加工屑を低減する観点から、電解加工(Electro Chemical Machining)による方法が適当である。   However, when the conventional breakthrough / herringbone dynamic pressure groove is used, as shown in FIG. 9, in which the end of the herringbone dynamic pressure groove is simply extended to a large gap space, it corresponds to the gap and the enlarged gap. From the bending point of the breakthrough herringbone dynamic pressure groove due to the processing error when processing the shape to the inner peripheral surface of the bearing member or the outer peripheral surface of the shaft member and the processing error when forming the dynamic pressure groove As a result, the dimension to the end varies, and as a result, the performance of the hydrodynamic bearing device varies. Hereinafter, this point will be described in detail. The formation of the dynamic pressure groove is preferably performed by electrolytic processing (Electro Chemical Machining) from the viewpoint of ease of processing, low cost, and reduction of processing waste.

以下この問題について、上記のブレークスルー・ヘリングボーン動圧溝を軸受部材の内周面に電解加工により形成した場合を例に挙げ説明する。ブレークスルー・へリングボーン動圧溝の屈曲点から端部までの寸法がばらつく要因としては次のようなものが考えられる。
1)隙間部及び拡大隙間部を形成する部材形状の軸方向寸法のばらつき
2)電解加工にて動圧溝を形成するための電極工具の軸方向寸法のばらつき
3)電極工具の軸方向の位置出しを行う際に、電極工具端面と位置出し用基準面である軸受部材端面との間に微小な異物等が噛み込むことによって生じる動圧溝形成位置の軸方向のばらつき
Hereinafter, this problem will be described by taking as an example the case where the above breakthrough / herringbone dynamic pressure groove is formed on the inner peripheral surface of the bearing member by electrolytic processing. The following factors can be considered as factors that cause variations in the dimension from the bending point to the end of the breakthrough herringbone dynamic pressure groove.
1) Variation in axial dimension of member shape forming gap and enlarged gap 2) Variation in axial dimension of electrode tool for forming dynamic pressure groove by electrolytic processing 3) Position of electrode tool in axial direction Axial variation in the hydrodynamic groove forming position caused by minute foreign matter or the like biting between the end face of the electrode tool and the end face of the bearing member, which is the reference position for positioning.

上記の要因が単独または重複して発生することによって、軸受部材内周面と軸部外周面との間に形成された隙間部及び拡大隙間部に対して、拡大隙間部に連続するように隙間部に形成された動圧溝位置の軸方向のずれが生じ、ブレークスルー・ヘリングボーン動圧溝の屈曲点から端部までの軸方向寸法をばらつかせることになる。   As a result of the occurrence of the above factors alone or in duplicate, a gap is formed so as to be continuous with the enlarged gap portion with respect to the gap portion and the enlarged gap portion formed between the inner peripheral surface of the bearing member and the outer peripheral surface of the shaft portion. The position of the dynamic pressure groove formed in the portion shifts in the axial direction, and the axial dimension from the bending point to the end of the breakthrough herringbone dynamic pressure groove varies.

また、上記の軸方向のずれが発生することで、本来の設計では意図されていない潤滑流体の流れを生じさせ、それが原因で軸剛性のばらつき、回転トルクのばらつき等の動圧軸受装置の性能のばらつきの問題が生じる。   In addition, the occurrence of the axial displacement described above causes a flow of lubricating fluid that is not intended in the original design, which causes variations in shaft rigidity, rotational torque, etc. The problem of performance variation arises.

すなわち、特許文献1に記載の発明では、加工精度に起因して、軸部材と軸受部材の相対的な位置関係が軸方向でずれると、溝が形成されていない対向面との間の隙間の狭くなっている部分の対向面積が変化する。これは、軸受抵抗が増加する要因となる。つまり、特許文献1に記載の発明では、加工精度に起因する軸受の抵抗増加の問題が解決できない。   That is, in the invention described in Patent Document 1, due to the processing accuracy, if the relative positional relationship between the shaft member and the bearing member is shifted in the axial direction, the gap between the facing surface where no groove is formed is formed. The opposing area of the narrowed portion changes. This is a factor that increases the bearing resistance. That is, the invention described in Patent Document 1 cannot solve the problem of increased bearing resistance due to machining accuracy.

特許文献2に記載の発明では、動圧溝の一方の端部が塞がっているので、軸方向の振動等に起因する気泡の発生を防止する効果が乏しい。特許文献3に記載の発明では、軸方向の寸法誤差が生じた場合に、軸方向の一方において、動圧溝の端部が開放されない構造となり、気泡の発生を抑える効果が低下する。つまり、寸法誤差に起因して気泡が発生し易い構造となる可能性がある。また、上記の動圧溝の端部が開放されない構造となった場合に、軸部材と軸受部材との間に隙間の狭い部分が形成されるので、軸受抵抗が増加する。   In the invention described in Patent Document 2, since one end of the dynamic pressure groove is closed, the effect of preventing the generation of bubbles due to axial vibration or the like is poor. In the invention described in Patent Document 3, when an axial dimension error occurs, the end of the dynamic pressure groove is not opened in one axial direction, and the effect of suppressing the generation of bubbles is reduced. That is, there is a possibility that bubbles are likely to be generated due to dimensional errors. Further, when the end portion of the dynamic pressure groove is not opened, a narrow gap is formed between the shaft member and the bearing member, so that the bearing resistance increases.

特許文献4に記載の発明では、動圧溝の形成位置に冗長性が確保されているが、その形成位置が軸方向でずれた場合に動圧溝の端部が、拡径した領域に連続した構造ではなくなる。このため、動圧溝の形成誤差に起因して、振動時等に生じる気泡の発生を抑える構造が崩れ易い。   In the invention described in Patent Document 4, redundancy is secured in the formation position of the dynamic pressure groove, but when the formation position is shifted in the axial direction, the end of the dynamic pressure groove is continuous with the expanded diameter region. It is no longer the structure. For this reason, the structure which suppresses generation | occurrence | production of the bubble which arises at the time of a vibration etc. originates in the formation error of a dynamic-pressure groove | channel easily.

特許文献5には、動圧溝がより大きな隙間である油リザーバに連続する構造が記載されている。しかしながら、当該文献の図8に示されるように、油リザーバの縁が、隙間寸法の狭い部分に隣接しているので、油リザーバを構成する溝部の形成位置に誤差があると、この隙間寸法の狭い部分の幅が変化する。つまりこの構造は、隙間寸法の狭い部分の幅が製品毎に変動し易い。一方、この隙間寸法の狭い部分は、軸部材と軸受部材との間で働く摩擦力への影響が大きい。したがって、特許文献5に記載の技術を採用した場合、軸受の摩擦抵抗が製品毎にばらつき易いものとなる。   Patent Document 5 describes a structure in which a dynamic pressure groove is continuous with an oil reservoir having a larger gap. However, as shown in FIG. 8 of the document, since the edge of the oil reservoir is adjacent to the narrow gap portion, if there is an error in the formation position of the groove portion constituting the oil reservoir, The width of the narrow part changes. That is, in this structure, the width of the narrow gap portion is likely to vary from product to product. On the other hand, this narrow gap portion has a great influence on the frictional force acting between the shaft member and the bearing member. Therefore, when the technique described in Patent Document 5 is adopted, the frictional resistance of the bearing tends to vary from product to product.

以上のような技術背景において、本発明は、加工精度の誤差に起因して動圧溝の作用が阻害される不都合が発生し難く、さらに軸受抵抗のばらつきが発生し難い流体動圧軸受装置の提供を目的とする。   In the technical background as described above, the present invention is a fluid dynamic pressure bearing device in which it is difficult for the disadvantage that the action of the dynamic pressure groove is hindered due to errors in machining accuracy, and further, variation in bearing resistance is difficult to occur. For the purpose of provision.

請求項1に記載の発明は、軸受部材と、前記軸受部材に相対回転可能な状態で装着された軸部材と、前記軸受部材の一端側を閉塞する蓋部材と、前記軸受部材と前記軸部材との間の隙間に連続的に充填された潤滑流体と、前記軸受部材または前記軸部材の軸方向に離れた位置に形成された一対の環状溝と、前記一対の環状溝が形成された部材に形成され、前記一対の環状溝を繋ぐ屈曲した動圧溝とを備え、前記一対の環状溝のそれぞれは、前記動圧溝と同じ深さを有した状態で軸方向に延在し、前記動圧溝が形成された部分における前記軸受部材の内周面と前記軸部材の外周面との間の隙間より大きな隙間を有する拡大隙間部に連続していることを特徴とする流体動圧軸受装置である。 The invention according to claim 1 is a bearing member, a shaft member mounted on the bearing member in a relatively rotatable state, a lid member that closes one end side of the bearing member, the bearing member, and the shaft member. A lubricating fluid continuously filled in a gap between the bearing member or the shaft member, a pair of annular grooves formed at positions separated in the axial direction of the shaft member, and a member formed with the pair of annular grooves And each of the pair of annular grooves extends in the axial direction in the state having the same depth as the dynamic pressure groove, and includes a bent dynamic pressure groove that connects the pair of annular grooves. A fluid dynamic pressure bearing characterized in that it is continuous with an enlarged gap portion having a gap larger than a gap between an inner peripheral surface of the bearing member and an outer peripheral surface of the shaft member in a portion where a dynamic pressure groove is formed. Device.

請求項1に記載の発明によれば、軸方向に離間した一対の環状溝を繋ぐ屈曲したパターンを有する動圧溝を備えた構造において、各環状溝の外側の縁、すなわち環状溝同士が離間する方向側に位置する縁部分は、軸受部材/軸部材間の間隔が動圧溝の部分よりも広い部分(拡大隙間部)に連続している。   According to the first aspect of the present invention, in the structure including the dynamic pressure groove having the bent pattern that connects the pair of annular grooves separated in the axial direction, the outer edge of each annular groove, that is, the annular grooves are separated from each other. The edge portion located on the direction side is continuous with a portion (enlarged gap portion) where the interval between the bearing member / shaft member is wider than the portion of the dynamic pressure groove.

この構造によれば、動圧溝の両端が2つの環状溝に繋がり、その端部が開放されるので、軸受部材と軸部材との間で相対的な移動が急激に生じても、潤滑流体内における急激な負圧状態の発生が抑えられる。このため、この負圧状態の発生に起因する気泡の発生が抑えられる。また、動圧溝および環状溝の形成時における加工精度に起因して、軸方向における溝の位置ずれが生じても、動圧溝の両端が2つの環状溝に繋がる構造が維持され、動圧溝の屈曲点から端部までの軸方向寸法も維持される。このため、加工精度による位置ずれが生じても上述した気泡の発生が抑制される機能が維持される。   According to this structure, since both ends of the dynamic pressure groove are connected to the two annular grooves and the ends thereof are opened, even if a relative movement between the bearing member and the shaft member suddenly occurs, the lubricating fluid The occurrence of a sudden negative pressure state in the inside is suppressed. For this reason, generation | occurrence | production of the bubble resulting from generation | occurrence | production of this negative pressure state is suppressed. Further, even if the position of the groove in the axial direction is shifted due to the processing accuracy when forming the dynamic pressure groove and the annular groove, the structure in which both ends of the dynamic pressure groove are connected to the two annular grooves is maintained. The axial dimension from the bend to the end of the groove is also maintained. For this reason, even if the position shift due to processing accuracy occurs, the function of suppressing the generation of the above-described bubbles is maintained.

またこの構造によれば、動圧溝が形成された部分を挟んだ位置に形成された2つの環状溝がその軸方向外側の当該環状溝の部分よりも隙間寸法(軸部材と軸受部材間の隙間の寸法)が大きい拡大隙間部に連続している。このため、動圧溝および環状溝の形成時に軸方向における溝の位置ずれが生じても、意図しない狭い隙間が軸受部材の内周と軸部材の外周との間に形成されることが防止される。すなわち、動圧溝が形成された部分には、内周面の円周に沿って見た場合、溝部と丘部が交互に形成されており、溝部の面と軸部材の外周面との間の隙間よりも丘部の面と軸部材の外周面との間の隙間の方が狭く、軸方向における動圧溝の位置ずれによって、このような狭い隙間が意図しない位置に形成されると軸受性能が損なわれるが、一対の環状溝を屈曲した動圧溝で繋ぐ構成にすることによって、こうした問題が避けられる。また、このような狭い隙間では軸受抵抗が大きいため、動圧軸受の回転トルクを増大させ、結果的にスピンドルモータの消費電力を増大させるので、動圧を発生しない部分では上記狭い隙間を極力形成しない構造にする方が好ましい。動圧溝の両端部に環状溝を設けることによって、環状溝に対応する全周に亘って動圧溝の端部と拡大隙間部との間に動圧を発生しない狭い隙間(丘部の面と軸部材の外周面との間の隙間)が形成されないので、この一対の環状溝を有しない従来構造と比べて回転トルクが低減される。さらに、ヘリングボーン動圧溝の端部がより間隔の大きな隙間空間に開放された構造が確実に確保され、さらに、衝撃や振動等による軸部材と軸受部材との間の急激な相対移動に起因して潤滑流体中に急激な負圧の状態が発生することや、それにより潤滑流体中に気泡が発生することを防止できる。   Further, according to this structure, the two annular grooves formed at the positions sandwiching the portion where the dynamic pressure groove is formed are larger than the dimension of the annular groove on the outer side in the axial direction (between the shaft member and the bearing member). The dimension of the gap) is continuous with the enlarged gap. For this reason, even if the position of the groove in the axial direction is shifted when forming the dynamic pressure groove and the annular groove, an unintended narrow gap is prevented from being formed between the inner periphery of the bearing member and the outer periphery of the shaft member. The That is, in the portion where the dynamic pressure groove is formed, when viewed along the circumference of the inner peripheral surface, the groove portion and the hill portion are alternately formed, and between the surface of the groove portion and the outer peripheral surface of the shaft member. If the gap between the surface of the hill portion and the outer peripheral surface of the shaft member is narrower than the gap of the shaft, and if such a narrow gap is formed at an unintended position due to the displacement of the dynamic pressure groove in the axial direction, the bearing Although the performance is impaired, such a problem can be avoided by connecting the pair of annular grooves with bent dynamic pressure grooves. In addition, since the bearing resistance is large in such a narrow gap, the rotational torque of the dynamic pressure bearing is increased, resulting in an increase in the power consumption of the spindle motor. Therefore, the narrow gap is formed as much as possible in the portion where no dynamic pressure is generated. It is preferable to use a structure that does not. By providing annular grooves at both ends of the dynamic pressure groove, a narrow gap (hill surface that does not generate dynamic pressure between the end of the dynamic pressure groove and the enlarged gap part over the entire circumference corresponding to the annular groove. And the outer peripheral surface of the shaft member are not formed, so that the rotational torque is reduced as compared with the conventional structure having no pair of annular grooves. In addition, a structure in which the end of the herringbone dynamic pressure groove is opened to a gap space with a larger interval is reliably ensured, and furthermore, due to a sudden relative movement between the shaft member and the bearing member due to impact, vibration, etc. Thus, it is possible to prevent a sudden negative pressure state from being generated in the lubricating fluid, and thereby bubbles from being generated in the lubricating fluid.

請求項1に記載の発明において、動圧溝および環状溝は、軸部材側に設けても良いし、軸受部材側に設けても良い。なお、拡大隙間部を構成するための形状は、動圧溝および環状溝が形成された部材側に設けられる。   In the first aspect of the present invention, the dynamic pressure groove and the annular groove may be provided on the shaft member side or on the bearing member side. In addition, the shape for constituting the enlarged gap portion is provided on the member side where the dynamic pressure groove and the annular groove are formed.

請求項2に記載の発明は、請求項1に記載の発明において、拡大隙間部は、面取り部、シール部、リセス部、またはアンダーカット部により構成されていることを特徴とする。請求項2に記載の発明によれば、従来からの構造に存在する部位を用いて拡大隙間部が構成される。このため、コスト増や大型化を避けることができる。   The invention described in claim 2 is characterized in that, in the invention described in claim 1, the enlarged gap portion is constituted by a chamfered portion, a seal portion, a recess portion, or an undercut portion. According to the second aspect of the present invention, the enlarged gap portion is configured by using a portion existing in the conventional structure. For this reason, an increase in cost and an increase in size can be avoided.

請求項3に記載の発明は、請求項1または2に記載の発明において、動圧溝は、その屈曲部を境にして軸方向において非対称なパターンを有していることを特徴とする。動圧溝として屈曲部を境にして軸方向において非対称なパターンを採用することで、軸受装置内の潤滑流体を効果的に加圧することができ、動圧溝の形成位置精度、軸受部材内周面の寸法精度の悪化によって発生する可能性のある負圧を防ぐことができる。   The invention according to claim 3 is the invention according to claim 1 or 2, wherein the dynamic pressure groove has an asymmetric pattern in the axial direction with the bent portion as a boundary. By adopting an asymmetric pattern in the axial direction with the bent part as the boundary as the dynamic pressure groove, it is possible to effectively pressurize the lubricating fluid in the bearing device, the position accuracy of the dynamic pressure groove, the inner circumference of the bearing member It is possible to prevent negative pressure that may be generated due to deterioration of the dimensional accuracy of the surface.

請求項4に記載の発明によれば、請求項1〜3のいずれか一項に記載の発明において、動圧溝が一対の環状導電部及び該一対の環状導電部を繋ぐ屈曲した導電部が一体的に形成された電極工具を用いた電解加工により同時に形成されていることを特徴とする。電解加工は、開口径の軸受部材への加工が行いやすく、また加工コストが低く、さらに加工屑が発生しないという優位性がある。請求項4に記載の発明によれば、このような電解加工の優位性を得ることができるとともに、環状溝と動圧溝を同じ電極工具で同時に形成するため、環状溝および動圧溝の形成時に軸方向に溝形成位置のずれが生じても、動圧溝の屈曲点から環状溝に連続する端部までの軸方向寸法は変わらないので、流体動圧軸受装置の性能のばらつきが防止できる。   According to the invention described in claim 4, in the invention described in any one of claims 1 to 3, the dynamic pressure groove includes a pair of annular conductive portions and a bent conductive portion connecting the pair of annular conductive portions. It is formed simultaneously by the electrolytic processing using the electrode tool formed integrally. Electrolytic machining is advantageous in that it can be easily processed into a bearing member having an opening diameter, the machining cost is low, and machining waste is not generated. According to the invention described in claim 4, since the advantage of such electrolytic processing can be obtained, and the annular groove and the dynamic pressure groove are simultaneously formed with the same electrode tool, the annular groove and the dynamic pressure groove are formed. Even if the groove formation position shifts in the axial direction sometimes, the axial dimension from the bending point of the dynamic pressure groove to the end continuous with the annular groove does not change, so that variation in the performance of the fluid dynamic bearing device can be prevented. .

請求項5に記載の発明は、請求項1〜4のいずれか一項に記載の発明において、拡大隙間部に一部が重なる位置に一対の環状溝が形成されていることを特徴とする。請求項5に記載の発明によれば、加工精度に起因して、環状溝の軸方向における位置にずれが生じても、重なり代が確保されているので、環状溝が拡大隙間部に連続する構造が保たれる。そのため、この位置ずれに起因して、軸部材の外周面と、軸受部材の内周面との間に意図しない狭い隙間が形成される不都合を避けることができる。また、環状溝と動圧溝を同じ電極工具で同時に形成する場合、環状溝および動圧溝の形成時に軸方向に溝形成位置のずれが生じても、環状溝が拡大隙間部に重なる部分の幅が変動するのみで動圧溝の屈曲点から環状溝に連続する端部までの軸方向寸法は変わらないので、流体動圧軸受装置の性能のばらつきが防止できる。   The invention according to claim 5 is characterized in that, in the invention according to any one of claims 1 to 4, a pair of annular grooves is formed at a position partially overlapping with the enlarged gap portion. According to the fifth aspect of the present invention, even if the position of the annular groove in the axial direction is shifted due to processing accuracy, an overlap margin is secured, so the annular groove is continuous with the enlarged gap portion. The structure is preserved. Therefore, it is possible to avoid an inconvenience that an unintended narrow gap is formed between the outer peripheral surface of the shaft member and the inner peripheral surface of the bearing member due to this positional deviation. Further, when the annular groove and the dynamic pressure groove are formed simultaneously with the same electrode tool, even if the groove formation position shifts in the axial direction when forming the annular groove and the dynamic pressure groove, the annular groove overlaps the enlarged gap portion. Since the axial dimension from the bending point of the dynamic pressure groove to the end continuous with the annular groove does not change only by changing the width, it is possible to prevent variations in the performance of the fluid dynamic pressure bearing device.

請求項6に記載の発明は、請求項1〜5のいずれか一項に記載の流体動圧軸受装置を用いたことを特徴とするスピンドルモータである。   A sixth aspect of the present invention is a spindle motor using the fluid dynamic pressure bearing device according to any one of the first to fifth aspects.

請求項7に記載の発明は、軸受部材と、前記軸受部材に相対回転可能な状態で装着された軸部材と、前記軸受部材の一端側を閉塞する蓋部材と、前記軸受部材と前記軸部材との間の隙間に充填された潤滑流体と、前記軸受部材または前記軸部材の軸方向に離れた位置に形成された一対の環状溝と、前記一対の環状溝が形成された部材に形成され、前記一対の環状溝を繋ぐ屈曲した動圧溝とを備え、前記一対の環状溝のそれぞれは、前記動圧溝と同じ深さを有した状態で軸方向に延在し、前記動圧溝が形成された部分における前記軸受部材の内周面と前記軸部材の外周面との間の隙間より大きな隙間を有する拡大隙間部に連続している構造を備えた流体動圧軸受装置の製造方法であって、前記拡大隙間部を構成する形状に前記軸受部材または前記軸部材を加工する第1の工程と、前記第1の工程において加工された部分に、少なくとも一対の環状導電部及び環状導電部を繋ぐ屈曲した導電部が一体的に形成された電極工具を用いて、前記一対の環状溝及び該環状溝を繋ぐ屈曲した動圧溝を同時に形成する電解加工工程とを有し、前記電解加工工程において、前記一対の環状溝と前記拡大隙間部とを軸方向において一部で重ねる設定することを特徴とする流体動圧軸受装置の製造方法である。
The invention according to claim 7 is a bearing member, a shaft member mounted on the bearing member in a relatively rotatable state, a lid member closing one end side of the bearing member, the bearing member, and the shaft member. and a lubricating fluid filled in the gap between the a pair of annular grooves formed in a position away in the axial direction of the bearing member or the shaft member, the pair of annular grooves are formed in the member which is formed , and a bent dynamic pressure grooves connecting said pair of annular grooves, each of said pair of annular grooves extending in the axial direction in a state having the same depth as the dynamic pressure groove, the dynamic pressure grooves A method of manufacturing a fluid dynamic bearing device having a structure that is continuous with an enlarged gap portion having a gap larger than a gap between an inner circumferential surface of the bearing member and an outer circumferential surface of the shaft member in a portion where a gap is formed And the bearing member or the front in the shape constituting the enlarged gap portion A first step of processing the shaft member, and an electrode tool in which at least a pair of annular conductive portions and a bent conductive portion connecting the annular conductive portions are integrally formed in the portion processed in the first step. Te, possess an electrolytic machining process to simultaneously form a bent dynamic pressure grooves connecting said pair of annular grooves and annular grooves, it said in the electrolytic machining process, the axial direction and the said pair of annular grooves enlarged clearance Is a method of manufacturing a fluid dynamic bearing device, characterized in that a part of the fluid dynamic pressure bearing device is set.

請求項7に記載の発明では、拡大隙間部の基となる形状(例えば、段部、シール部のテーパ形状やリセス部のテーパ部)を形成した後に、拡大隙間部に一部が重なるように環状溝を形成する。これにより、環状溝の位置に軸方向におけるずれが生じても、環状溝が拡大隙間部に連続する構造を得ることができるとともに動圧溝の屈曲点から環状溝に連続する端部までの軸方向寸法が変わらない。このため、動圧溝と環状溝の形成において溝形成位置の誤差が生じても、それにより気泡の発生を抑える効果が失われず、さらに意図せず流体動圧軸受装置の抵抗が高くなることが防止され、動圧溝の屈曲点から端部までの軸方向寸法のばらつきが無くなることにより流体動圧軸受装置の性能のばらつきが低減される。したがって、請求項7に記載の発明は、溝形成位置の誤差が生じ易い電解加工を用いた場合に有用となる。   In the invention according to claim 7, after forming a shape (for example, a taper shape of a stepped portion, a seal portion or a tapered portion of a recess portion) to be a base of the enlarged gap portion, a part of the enlarged gap portion is overlapped. An annular groove is formed. As a result, even if a shift in the axial direction occurs in the position of the annular groove, it is possible to obtain a structure in which the annular groove continues to the enlarged gap portion, and the shaft from the bending point of the dynamic pressure groove to the end portion continuous to the annular groove. Directional dimensions do not change. For this reason, even if an error in the groove forming position occurs in the formation of the dynamic pressure groove and the annular groove, the effect of suppressing the generation of bubbles is not lost, and the resistance of the fluid dynamic pressure bearing device may increase unintentionally. This prevents the variation in the axial dimension from the bending point to the end of the dynamic pressure groove, thereby reducing the variation in the performance of the fluid dynamic bearing device. Therefore, the invention described in claim 7 is useful in the case of using electrolytic processing in which an error in the groove forming position is likely to occur.

本発明によれば、負圧による気泡の発生がし難く、動圧溝を形成する際の加工位置の誤差が簡単な構造によって吸収され、動圧溝の形成位置の加工誤差に起因して動圧溝の作用が阻害される不都合が発生し難く、ひいては軸受性能のばらつきが発生し難い流体動圧軸受装置および軸受性能の高いスピンドルモータを提供することができる。   According to the present invention, bubbles are not easily generated due to negative pressure, and errors in the machining position when forming the dynamic pressure groove are absorbed by a simple structure, and movement due to the machining error in the formation position of the dynamic pressure groove. It is possible to provide a fluid dynamic pressure bearing device and a spindle motor with high bearing performance that are unlikely to cause an inconvenience that the action of the pressure groove is hindered, and that are not likely to cause variations in bearing performance.

(1)第1の実施形態
(構造および製造方法)
以下、本発明を利用した流体動圧軸受装置の一例を説明する。図1は、実施形態の流体動圧軸受装置を構成する軸受部材の一例であり、その加工途中の状態を示す側断面図である。図2は、図1に示す軸受部材に電解加工を施した状態を示す側断面図(A)と、(A)における符号Bの部分を拡大した部分拡大図(B)である。図3は、図2に示す軸受部材に軸部材を装着した状態を示す側面図である。
(1) First embodiment (structure and manufacturing method)
Hereinafter, an example of a fluid dynamic bearing device using the present invention will be described. Drawing 1 is an example of the bearing member which constitutes the fluid dynamic pressure bearing device of an embodiment, and is a sectional side view showing the state in the middle of the processing. FIG. 2 is a side sectional view (A) showing a state in which electrolytic processing is performed on the bearing member shown in FIG. 1, and a partial enlarged view (B) in which a portion indicated by reference numeral B in (A) is enlarged. FIG. 3 is a side view showing a state in which a shaft member is mounted on the bearing member shown in FIG.

図1には、加工途中の軸受部材101が示されている。軸受部材101には、軸部材が挿入される軸孔102が中央に形成されている。図1において、符号103は、後述する蓋部材が嵌め込まれる蓋取付部である。蓋取付部103に連続して、蓋取付部103より内径が縮径した鍔収容部104が設けられている。鍔収容部104には、後述する軸部材側の鍔部材(フランジ部)が軸受される。鍔収容部104に連続して、面取り部106を介して、鍔収容部104より縮径された溝形成部105が設けられている。溝形成部105には、後述するラジアル動圧溝と環状溝とが形成される。図1には、溝形成部105に、ラジアル動圧溝および環状溝が形成されていない状態が示されている。鍔収容部104から溝形成部105に移行する部分には、面取り部106が形成されている。面取り部106は、軸方向に対して斜めにカットされた形状とされている。面取り部106は、溝形成部105から鍔収容部104に向かって漸次拡径する部分であり、軸受装置として組み上げられた状態において、この部分に拡大隙間部の一例が形成される。   FIG. 1 shows a bearing member 101 being processed. A shaft hole 102 into which the shaft member is inserted is formed in the bearing member 101 at the center. In FIG. 1, the code | symbol 103 is a cover attachment part in which the cover member mentioned later is engage | inserted. Continuing from the lid attachment portion 103, a heel housing portion 104 having an inner diameter smaller than that of the lid attachment portion 103 is provided. A shaft member-side flange member (flange portion), which will be described later, is supported by the flange housing portion 104. A groove forming portion 105 having a diameter smaller than that of the heel housing portion 104 is provided through the chamfered portion 106 continuously from the heel housing portion 104. The groove forming portion 105 is formed with a radial dynamic pressure groove and an annular groove, which will be described later. FIG. 1 shows a state in which the radial dynamic pressure groove and the annular groove are not formed in the groove forming portion 105. A chamfered portion 106 is formed at a portion that transitions from the heel housing portion 104 to the groove forming portion 105. The chamfered portion 106 has a shape cut obliquely with respect to the axial direction. The chamfered portion 106 is a portion that gradually increases in diameter from the groove forming portion 105 toward the flange housing portion 104, and in an assembled state as a bearing device, an example of an enlarged gap portion is formed in this portion.

溝形成部105に連続して、溝形成部105より内径が拡径されたリセス部107が形成されている。リセス部107は、軸受の回転トルク低減と潤滑流体である潤滑油の油溜まりを確保する意図で設けられている。相対的に内径が拡径されたリセス部107から、相対的に内径が縮径である溝形成部105に連続的に繋がるように、リセス部107の下端の縁には、テーパ部108が設けられている。この構造は、リセス部107の上端の縁にもテーパ部109として同様に設けられている。テーパ部108は、溝形成部105から漸次拡径する部分であり、軸受装置として組み上げられた状態において、この部分に拡大隙間部の一例が形成される。この拡大隙間部を構成する形状という点で、テーパ部109も同様の機能を有する。   A recess 107 having an inner diameter larger than that of the groove forming portion 105 is formed continuously with the groove forming portion 105. The recess 107 is provided with the intention of reducing the rotational torque of the bearing and securing an oil reservoir of lubricating oil as a lubricating fluid. A tapered portion 108 is provided at the lower edge of the recess 107 so that the recess 107 having a relatively increased inner diameter is continuously connected to the groove forming portion 105 having a relatively smaller inner diameter. It has been. This structure is similarly provided as a taper portion 109 at the upper edge of the recess portion 107. The taper portion 108 is a portion that gradually increases in diameter from the groove forming portion 105, and an example of an enlarged gap portion is formed in this portion when assembled as a bearing device. The taper portion 109 has a similar function in terms of the shape constituting the enlarged gap portion.

リセス部107から連続して、リセス部107より内径が縮径された溝形成部110が形成されている。溝形成部110には、後述する動圧溝と環状溝とが形成される。図1には、溝形成部110に、動圧溝および環状溝が形成されていない状態が示されている。溝形成部110の内径は、溝形成部105と同じ内径とされている。   A groove forming portion 110 having an inner diameter reduced from the recess portion 107 is formed continuously from the recess portion 107. The groove forming portion 110 is formed with a dynamic pressure groove and an annular groove which will be described later. FIG. 1 shows a state in which the dynamic pressure groove and the annular groove are not formed in the groove forming portion 110. The inner diameter of the groove forming portion 110 is the same as that of the groove forming portion 105.

溝形成部110に連続して、シール部111が形成されている。シール部111は、溝形成部110の縁から軸孔102の開放方向(図の上方向)に向かって、内面が軸方向に対して15°のなす角を有する広がったテーパ断面形状を有している。シール部111は、潤滑油の毛細管力を利用して、潤滑油が軸孔102内から外部に漏出しないようにする機能(毛細管シール機能)を有する。シール部111は、溝形成部110から漸次拡径する部分であり、軸受装置として組み上げられた状態において、この部分に拡大隙間部の一例が形成される。   A seal portion 111 is formed continuously with the groove forming portion 110. The seal portion 111 has a taper cross-sectional shape in which the inner surface has an angle of 15 ° with respect to the axial direction from the edge of the groove forming portion 110 toward the opening direction of the shaft hole 102 (upward direction in the figure). ing. The seal portion 111 has a function (capillary seal function) that prevents the lubricating oil from leaking out of the shaft hole 102 by utilizing the capillary force of the lubricating oil. The seal portion 111 is a portion that gradually increases in diameter from the groove forming portion 110, and an example of an enlarged gap portion is formed in this portion when assembled as a bearing device.

以下、上記の構造を得る工程の概略を簡単に説明する。まず、軸受部材101の出発材料となる金属材料を用意する。次に、この金属材料に円柱状の軸孔102の基なる孔を形成する。そして、その内面を切削加工することで、図1に示す形状を得る。   Hereafter, the outline of the process of obtaining said structure is demonstrated easily. First, a metal material as a starting material for the bearing member 101 is prepared. Next, the base hole of the cylindrical shaft hole 102 is formed in this metal material. And the shape shown in FIG. 1 is obtained by cutting the inner surface.

図2には、溝形成部105および110に動圧溝および環状溝を形成した状態が示されている。すなわち、溝形成部105には、環状溝112、動圧溝113および環状溝114が形成されている。環状溝112は、軸孔102の内面を一周する形の環状に内面が掘り下げられた形状を有している。環状溝112は、鍔収容部104から続く面取り部106に連続している。   FIG. 2 shows a state in which dynamic pressure grooves and annular grooves are formed in the groove forming portions 105 and 110. That is, an annular groove 112, a dynamic pressure groove 113, and an annular groove 114 are formed in the groove forming portion 105. The annular groove 112 has a shape in which the inner surface is dug down into an annular shape that goes around the inner surface of the shaft hole 102. The annular groove 112 is continuous with the chamfered portion 106 that continues from the rod housing portion 104.

動圧溝113は、帯状であり、中央が屈曲した屈曲部113aを有し、周方向に見て山型の形状を有している。このような動圧溝の形状は、一般的にヘリングボーン動圧溝として知られている。動圧溝113の一端は、環状溝112に連続し、他端は、環状溝114に連続している。動圧溝113は、屈曲部113aを境にして、図の上下方向において対称な形状とされている。   The dynamic pressure groove 113 has a band shape, has a bent portion 113a bent at the center, and has a mountain shape when viewed in the circumferential direction. Such a shape of the dynamic pressure groove is generally known as a herringbone dynamic pressure groove. One end of the dynamic pressure groove 113 is continuous with the annular groove 112, and the other end is continuous with the annular groove 114. The dynamic pressure groove 113 has a symmetrical shape in the vertical direction in the figure with the bent portion 113a as a boundary.

環状溝114は、リセス部107に連続している。すなわち、環状溝114は、リセス部107のテーパ部108に連続している。環状溝114は、その幅が異なるのみで環状溝112と同じ構造とされている。この例では、環状溝112の幅(軸方向における寸法)より環状溝114の幅が広く設定されているが、この限りではない。環状溝の幅は、動圧溝の端部と拡大隙間部が連続して繋がるように、必要に応じて選択すればよい。また、環状溝112、動圧溝113および環状溝114は、この例において同じ深さとされている。環状溝112および114においては、潤滑油の主な流れ方向は周方向なので、動圧は発生しない。従って、環状溝112および環状溝114の深さ寸法は、動圧溝113と同じ、あるいはそれより深い寸法としてもよいが、一つの電極工具で少なくとも動圧溝とそれに対応する一対の環状溝を同時に加工できるようにするためには両者を同じ深さ寸法とすることが好ましい。   The annular groove 114 is continuous with the recess 107. That is, the annular groove 114 is continuous with the tapered portion 108 of the recess portion 107. The annular groove 114 has the same structure as the annular groove 112 except for the width. In this example, the width of the annular groove 114 is set wider than the width of the annular groove 112 (dimension in the axial direction), but this is not restrictive. What is necessary is just to select the width | variety of a cyclic | annular groove | channel as needed so that the edge part and expansion | swelling clearance gap part may be connected continuously. In addition, the annular groove 112, the dynamic pressure groove 113, and the annular groove 114 have the same depth in this example. In the annular grooves 112 and 114, the main flow direction of the lubricating oil is the circumferential direction, so no dynamic pressure is generated. Therefore, the depth dimension of the annular groove 112 and the annular groove 114 may be the same as or deeper than that of the dynamic pressure groove 113, but at least the dynamic pressure groove and the pair of annular grooves corresponding to it are formed by one electrode tool. In order to be able to process simultaneously, it is preferable to make both into the same depth dimension.

図2に示すように、溝形成部110には、環状溝115、動圧溝116および環状溝117が形成されている。環状溝115は、軸孔102の内面を一周する形の環状に、内面が掘り下げられた形状を有している。環状溝115は、リセス部107のテーパ部109に連続している。環状溝115、動圧溝116および環状溝117は、環状溝112、動圧溝113および環状溝114と同じ深さとされている。   As shown in FIG. 2, the groove forming portion 110 is formed with an annular groove 115, a dynamic pressure groove 116, and an annular groove 117. The annular groove 115 has a shape in which the inner surface is dug into an annular shape that goes around the inner surface of the shaft hole 102. The annular groove 115 is continuous with the tapered portion 109 of the recess portion 107. The annular groove 115, the dynamic pressure groove 116 and the annular groove 117 have the same depth as the annular groove 112, the dynamic pressure groove 113 and the annular groove 114.

動圧溝116は、帯状であり、中央から軸受の内側方向(図の下側方向)にずれた位置で屈曲した屈曲部116aを有し、周方向に見て両側が非対称な山型の形状を有している。動圧溝116の一端は、環状溝115に連続し、他端は、環状溝117に連続している。動圧溝116もヘリングボーン動圧溝の一つである。このように動圧溝116を屈曲部116aに対して非対称な形状とするのは、流体動圧軸受装置内の潤滑流体を、効果的に加圧するとともに、動圧溝や軸受内面部の精度によって発生する可能性のある負圧を防ぐためである。この実施例では、動圧溝116の屈曲点から溝の上側端部までの長さの方が屈曲点から溝の下側端部までの長さよりも長いので、軸受装置の内側が加圧されて軸受内部における負圧が防げる。   The dynamic pressure groove 116 has a belt-like shape and has a bent portion 116a bent at a position shifted from the center toward the inner side of the bearing (the lower side in the figure), and has a mountain shape that is asymmetric on both sides when viewed in the circumferential direction. have. One end of the dynamic pressure groove 116 is continuous with the annular groove 115, and the other end is continuous with the annular groove 117. The dynamic pressure groove 116 is also one of the herringbone dynamic pressure grooves. The reason why the dynamic pressure groove 116 is asymmetrical with respect to the bent portion 116a is that the lubricating fluid in the fluid dynamic pressure bearing device is effectively pressurized and the accuracy of the dynamic pressure groove and the bearing inner surface portion is increased. This is to prevent negative pressure that may occur. In this embodiment, since the length from the bending point of the dynamic pressure groove 116 to the upper end portion of the groove is longer than the length from the bending point to the lower end portion of the groove, the inside of the bearing device is pressurized. This prevents negative pressure inside the bearing.

以下、環状溝112、動圧溝113、環状溝114、環状溝115、動圧溝116および環状溝117を形成する工程について説明する。この例では、これらの溝を電解加工により、同時に形成する。まず、図1に示す状態の軸受部材101を用意する。次に電解加工により、図2に示す環状溝112、動圧溝113、環状溝114、環状溝115、動圧溝116および環状溝117を図8の電極工具800を用いて同時に形成する。図8の電極工具800には、環状溝112、環状溝114および動圧溝113にそれぞれ対応する一対の環状導電部801および802と、該一対の環状導電部801と802とを繋ぐ屈曲した動圧溝導電部803が一体的に形成されている。また、電極工具800には、環状溝115、環状溝117および動圧溝116にそれぞれ対応するもう一対の環状導電部804および805と、該一対の環状導電部804と805とを繋ぐ屈曲した動圧溝導電部806が一体的に形成されている。また、電極工具800の導電部以外の部分は絶縁膜で覆われている。これらの構成により、電極工具800を用いての、軸受部材101側の各溝の同時形成を可能にしている。   Hereinafter, the process of forming the annular groove 112, the dynamic pressure groove 113, the annular groove 114, the annular groove 115, the dynamic pressure groove 116, and the annular groove 117 will be described. In this example, these grooves are simultaneously formed by electrolytic processing. First, the bearing member 101 in the state shown in FIG. 1 is prepared. Next, the annular groove 112, the dynamic pressure groove 113, the annular groove 114, the annular groove 115, the dynamic pressure groove 116, and the annular groove 117 shown in FIG. 2 are simultaneously formed by electrolytic processing using the electrode tool 800 of FIG. The electrode tool 800 of FIG. 8 includes a pair of annular conductive portions 801 and 802 corresponding to the annular groove 112, the annular groove 114, and the dynamic pressure groove 113, respectively, and a bent motion that connects the pair of annular conductive portions 801 and 802. The pressure groove conductive portion 803 is integrally formed. Further, the electrode tool 800 includes a pair of annular conductive portions 804 and 805 corresponding to the annular groove 115, the annular groove 117, and the dynamic pressure groove 116, respectively, and a bent motion that connects the pair of annular conductive portions 804 and 805. A pressure groove conductive portion 806 is integrally formed. Further, the portion other than the conductive portion of the electrode tool 800 is covered with an insulating film. With these configurations, the grooves on the bearing member 101 side can be simultaneously formed using the electrode tool 800.

この際、環状溝112の縁(図の下側の縁)が面取り部106に一部重なるように環状溝112の幅およびその形成位置を設定する。また、環状溝114の縁(図の上側の縁)がテーパ部108に一部重なるように環状溝114の幅およびその形成位置を設定する。さらに、環状溝115の縁(図の下側の縁)がテーパ部109に一部重なるように環状溝115の幅およびその形成位置を設定する。さらに、環状溝117の縁(図の上側の縁)がシール部111に一部重なるように環状溝117の幅およびその形成位置を設定する。   At this time, the width of the annular groove 112 and the formation position thereof are set so that the edge of the annular groove 112 (the lower edge in the figure) partially overlaps the chamfered portion 106. Further, the width of the annular groove 114 and the formation position thereof are set so that the edge of the annular groove 114 (the upper edge in the drawing) partially overlaps the tapered portion 108. Further, the width of the annular groove 115 and the formation position thereof are set so that the edge of the annular groove 115 (the lower edge in the figure) partially overlaps the tapered portion 109. Further, the width of the annular groove 117 and the formation position thereof are set so that the edge of the annular groove 117 (the upper edge in the figure) partially overlaps the seal portion 111.

こうすることで、動圧溝113、116、環状溝112、114、115、117の形成時に電極工具の軸方向の位置決めにずれが生じても、環状溝112が面取り部106に連続し、環状溝114がテーパ部108に連続し、環状溝115がテーパ部109に連続し、環状溝117がシール部111に連続する構造を得ることができる。例として、図2(B)に環状溝117とシール部111の重なり具合を示す。すなわち、環状溝117の縁をテーパ部等の拡大隙間部が形成される部分に幅w分だけ重なるようにしておくことで、軸方向において環状溝117の位置がずれても、環状溝117が拡大隙間部に連続する構造を得る幅w分の余裕を確保できる。   By doing so, the annular groove 112 continues to the chamfered portion 106 even if a deviation occurs in the axial positioning of the electrode tool when the dynamic pressure grooves 113 and 116 and the annular grooves 112, 114, 115 and 117 are formed. It is possible to obtain a structure in which the groove 114 is continuous with the tapered portion 108, the annular groove 115 is continuous with the tapered portion 109, and the annular groove 117 is continuous with the seal portion 111. As an example, FIG. 2B shows how the annular groove 117 and the seal portion 111 overlap. That is, by setting the edge of the annular groove 117 so as to overlap the portion where the enlarged gap portion such as the taper portion is formed by the width w, the annular groove 117 is formed even if the position of the annular groove 117 is shifted in the axial direction. It is possible to secure a margin for the width w to obtain a structure continuous to the enlarged gap portion.

また、動圧溝と環状溝とは同時に形成されるので、それらの形成位置に軸方向におけるずれが生じても、動圧溝113の両端は、環状溝112および114に連続し(繋がり)、動圧溝116の両端は、環状溝115および117に連続する(繋がる)構造を得ることができる。さらに、軸受部材101や電極工具の加工誤差に起因して溝形成位置に軸方向におけるずれが生じても、動圧溝113および116のそれぞれの屈曲点から端部までの長さは設計どおりの寸法で形成されるため、所望の動圧特性が確保される。よって、動圧特性に影響を及ぼすことなく動圧溝の加工を行うことが容易になる。   In addition, since the dynamic pressure groove and the annular groove are formed at the same time, both ends of the dynamic pressure groove 113 are continuous (connected) to the annular grooves 112 and 114 even if the formation position is displaced in the axial direction. A structure in which both ends of the dynamic pressure groove 116 are continuous (connected) to the annular grooves 115 and 117 can be obtained. Further, even if the groove forming position is displaced in the axial direction due to the machining error of the bearing member 101 or the electrode tool, the length from the bending point to the end of each of the dynamic pressure grooves 113 and 116 is as designed. Since it is formed with dimensions, desired dynamic pressure characteristics are ensured. Therefore, it becomes easy to process the dynamic pressure grooves without affecting the dynamic pressure characteristics.

なお、上述した動圧溝および環状溝の形成と同時にあるいは前または後に、軸受部材101の鍔収容部端面104aにも動圧溝が形成される。この動圧溝のパターンの概要を図4(A)に示す。図4(A)において、符号31が鍔収容部端面104aに形成された動圧溝である。こうして図2に示す状態の軸受部材101を得る。   Note that the dynamic pressure groove is also formed on the flange housing portion end surface 104a of the bearing member 101 simultaneously with or before or after the formation of the dynamic pressure groove and the annular groove. An outline of the dynamic pressure groove pattern is shown in FIG. In FIG. 4A, reference numeral 31 denotes a dynamic pressure groove formed in the heel housing portion end surface 104a. Thus, the bearing member 101 in the state shown in FIG. 2 is obtained.

以下、続いて本実施形態で示す流体動圧軸受装置の組立手順を説明する。図2に示す状態の軸受部材101を得たら、図3に示す軸部材120を用意する。軸部材120は、軸孔102(図2参照)に入る部分が段差のない円筒形状であり、その先端に、円環形状の鍔部材121が固定されている。   Hereinafter, the assembly procedure of the fluid dynamic bearing device shown in the present embodiment will be described. When the bearing member 101 in the state shown in FIG. 2 is obtained, the shaft member 120 shown in FIG. 3 is prepared. The shaft member 120 has a cylindrical shape in which a portion entering the shaft hole 102 (see FIG. 2) has no step, and an annular flange member 121 is fixed to the tip thereof.

軸部材120を用意したら、軸部材120を軸孔102(図1または図2参照)に挿入する。軸部材120は、図の下方向から軸受部材101の軸孔102(図1または図2参照)に装着される。   When the shaft member 120 is prepared, the shaft member 120 is inserted into the shaft hole 102 (see FIG. 1 or FIG. 2). The shaft member 120 is attached to the shaft hole 102 (see FIG. 1 or 2) of the bearing member 101 from the lower side of the drawing.

軸部材120を軸受部材101に装着したら、蓋部材122を蓋取付部103に嵌め込み、接着剤で固定する。なお、蓋部材122の鍔部材121に対向する蓋部材内側端面122aと軸受部材101の鍔収容部端面104aには、それぞれスラスト動圧溝が形成されている。この動圧溝のパターンの概要を図4に示す。図4(A)において、符号31が鍔収容部端面104aに形成された動圧溝であり、図4(B)において、符号32が蓋部材内側端面122aに形成された動圧溝である。蓋部材122を固定した後、軸受部材と軸部材の間の微小隙間に所定量の潤滑流体を充填する。こうして、図3に示すように一端側が開放され、他端側が閉塞された流体動圧軸受装置が得られる。なお、潤滑流体としては、例えばエステル系の潤滑油を使用することができる。また、図3では軸受部材101の内周面上の溝形成部を、溝形成部110および105の2箇所としたが、溝形成部を1箇所または3箇所以上とすることも可能である。   When the shaft member 120 is mounted on the bearing member 101, the lid member 122 is fitted into the lid mounting portion 103 and fixed with an adhesive. Thrust dynamic pressure grooves are formed in the lid member inner end surface 122a of the lid member 122 facing the flange member 121 and the flange housing portion end surface 104a of the bearing member 101, respectively. An outline of the dynamic pressure groove pattern is shown in FIG. 4A, reference numeral 31 denotes a dynamic pressure groove formed on the heel housing portion end face 104a, and in FIG. 4B, reference numeral 32 denotes a dynamic pressure groove formed on the lid member inner end face 122a. After fixing the lid member 122, a predetermined amount of lubricating fluid is filled in the minute gap between the bearing member and the shaft member. In this way, as shown in FIG. 3, a fluid dynamic bearing device in which one end side is opened and the other end side is closed is obtained. As the lubricating fluid, for example, ester-based lubricating oil can be used. In FIG. 3, the groove forming portions on the inner peripheral surface of the bearing member 101 are two locations, that is, the groove forming portions 110 and 105. However, the groove forming portions may be one location or three or more locations.

(実施形態の機能)
以下、図3に示す軸受構造の機能について説明する。図3に示す構造において、軸部材120は、軸受部材101に対して相対的に回転することができる。この回転の際、ラジアル動圧溝113および116の作用により、当該付近の隙間に存在する潤滑流体に、ラジアル方向の動圧が発生する。この動圧により、軸部材120と軸受部材101との間のラジアル方向におけるバランスのとれた隙間が形成され、摩擦の低減された軸部材120の回転が可能とされる。また、軸受部材101の鍔収容部端面104a、および蓋部材122の蓋部材内側端面122aに形成されたスラスト動圧溝31および32の作用により、軸部材120に対してスラスト方向の動圧が発生し、軸部材120が鍔収容部端面104aおよび蓋部材内側端面122aと非接触状態になり、軸方向における軸部材120の保持が行われる。
(Function of the embodiment)
Hereinafter, the function of the bearing structure shown in FIG. 3 will be described. In the structure shown in FIG. 3, the shaft member 120 can rotate relative to the bearing member 101. During this rotation, radial dynamic pressure is generated in the lubricating fluid existing in the gap in the vicinity by the action of the radial dynamic pressure grooves 113 and 116. The dynamic pressure forms a balanced gap in the radial direction between the shaft member 120 and the bearing member 101, and the shaft member 120 with reduced friction can be rotated. Further, the thrust dynamic pressure grooves 31 and 32 formed on the flange housing portion end surface 104a of the bearing member 101 and the lid member inner end surface 122a of the lid member 122 generate dynamic pressure in the thrust direction on the shaft member 120. Then, the shaft member 120 is not in contact with the heel housing portion end surface 104a and the lid member inner end surface 122a, and the shaft member 120 is held in the axial direction.

(実施形態の優位性)
図2に示すように、動圧溝116の両端が、環状溝115および117に繋がっているので、軸部材120(図3参照)が軸受部材101に対して振動あるいは変位しても、潤滑流体内における急激な圧力変動が、環状溝115および117によって緩和される。このため、潤滑流体内における急激な負圧の発生が抑えられ、気泡の発生が防止される。これにより、振動や急激な力が軸部材120に加わった際の動圧の発生機能が損なわれず、安定した軸受性能を得ることができる。この点は、動圧溝113についても同じである。
(Advantages of the embodiment)
As shown in FIG. 2, since both ends of the dynamic pressure groove 116 are connected to the annular grooves 115 and 117, even if the shaft member 120 (see FIG. 3) vibrates or displaces with respect to the bearing member 101, the lubricating fluid Abrupt pressure fluctuations are mitigated by the annular grooves 115 and 117. For this reason, the generation of a sudden negative pressure in the lubricating fluid is suppressed, and the generation of bubbles is prevented. As a result, the function of generating dynamic pressure when vibration or a sudden force is applied to the shaft member 120 is not impaired, and stable bearing performance can be obtained. This also applies to the dynamic pressure groove 113.

また、環状溝112、114、115および117の縁が、面取り部106、リセス部107の一部であるテーパ部108および109、シール部111に重なる位置関係とされているので、環状溝の形成位置に多少の誤差が生じても、環状溝が拡大隙間部(例えば面取り部106の部分に形成される隙間部)に連続する構造を維持させることができる。このため、環状溝の形成位置の誤差に起因する意図しない狭い隙間部の形成が防止され、この狭い隙間部が形成されることに起因する軸受性能の低下を防ぐことができる。   Further, since the edges of the annular grooves 112, 114, 115, and 117 overlap with the chamfered portion 106, the tapered portions 108 and 109 that are part of the recess portion 107, and the seal portion 111, the annular groove is formed. Even if some errors occur in the position, it is possible to maintain a structure in which the annular groove continues to the enlarged gap portion (for example, the gap portion formed in the chamfered portion 106). For this reason, formation of an unintended narrow gap due to an error in the formation position of the annular groove is prevented, and deterioration of bearing performance due to the formation of this narrow gap can be prevented.

(実施形態の軸受を利用したスピンドルモータ)
以下、図3に示す軸受構造を利用したスピンドルモータの一例を説明する。図5は、スピンドルモータの一例を示す断面図である。なお、図5において、図1〜3と同じ符号は、同じ部分を示す。
(Spindle motor using the bearing of the embodiment)
Hereinafter, an example of a spindle motor using the bearing structure shown in FIG. 3 will be described. FIG. 5 is a cross-sectional view showing an example of a spindle motor. In FIG. 5, the same reference numerals as those in FIGS.

図5には、軸回転型のスピンドルモータ500が示されている。スピンドルモータ500は、例えばハードディスク装置等の磁気ディスク記憶装置や光ディスク記憶装置の回転機器の駆動源として利用される。スピンドルモータ500は、回転軸となる軸部材120を備えている。軸部材120は、軸受部材101に回転自在な状態で保持され、また軸部材120の一端部には、ロータ501が固定されている。ロータ501には、スピンドルモータ500によって駆動される回転部材(図示省略)がビス孔502を利用して固定される。ロータ501には、ヨーク503が固定され、ヨーク503には、環状の永久磁石504が固定されている。   FIG. 5 shows a shaft rotation type spindle motor 500. The spindle motor 500 is used as a drive source for a rotating device of a magnetic disk storage device such as a hard disk device or an optical disk storage device. The spindle motor 500 includes a shaft member 120 serving as a rotation shaft. The shaft member 120 is rotatably held by the bearing member 101, and a rotor 501 is fixed to one end portion of the shaft member 120. A rotating member (not shown) driven by the spindle motor 500 is fixed to the rotor 501 using a screw hole 502. A yoke 503 is fixed to the rotor 501, and an annular permanent magnet 504 is fixed to the yoke 503.

軸部材120は、図3を用いて説明したように、流体動圧を用いた軸受機構により、軸受部材101に軸受されている。軸受部材101は、ステータハウジング505に固定されている。ステータハウジング505には、磁性体により構成されるステータコア506が固定されている。ステータコア506には、コイル507が巻かれ、ステータ508が形成されている。ステータ508は、ロータ501側の永久磁石504に対向している。   As described with reference to FIG. 3, the shaft member 120 is supported by the bearing member 101 by a bearing mechanism using fluid dynamic pressure. The bearing member 101 is fixed to the stator housing 505. A stator core 506 made of a magnetic material is fixed to the stator housing 505. A coil 507 is wound around the stator core 506 to form a stator 508. The stator 508 faces the permanent magnet 504 on the rotor 501 side.

コイル507の巻き始めと巻き終わりからは、図示省略した配線が引き出されている。ステータハウジング505には、絶縁孔509が設けられており、その孔よりコイルの配線を引き出し半田510にてフレキシブルプリント配線板に結線される。この配線を介して、コイル507に図示しない駆動回路から駆動電流が供給される。この駆動電流がスイッチングされることで、ステータ508とロータ501側の永久磁石504との間で周期的に極性が反転する磁力が発生し、それによりステータハウジング505に対してロータ501が回転する。   From the winding start and winding end of the coil 507, wiring not shown is drawn. The stator housing 505 is provided with an insulating hole 509, through which the coil wiring is drawn and connected to the flexible printed wiring board by the solder 510. A drive current is supplied to the coil 507 from a drive circuit (not shown) via this wiring. By switching the drive current, a magnetic force whose polarity is periodically reversed is generated between the stator 508 and the permanent magnet 504 on the rotor 501 side, whereby the rotor 501 rotates with respect to the stator housing 505.

(2)第2の実施形態
以下、動圧溝と環状溝を軸部材側に設けた場合の一例を図6および7を用いて説明する。この場合、図1〜図3に示す構成において、軸受部材101の軸孔102の内面には、溝形成部105、リセス部107、溝形成部110およびシール部111は形成されず、それらの部分は、凹凸のない円筒内面となる。その代わり、軸部材120の対応する部分に第1の溝形成部、リセス部、第2の溝形成部およびシール部を構成するための加工が施される。
(2) Second Embodiment Hereinafter, an example in which a dynamic pressure groove and an annular groove are provided on the shaft member side will be described with reference to FIGS. In this case, in the configuration shown in FIGS. 1 to 3, the groove forming portion 105, the recess portion 107, the groove forming portion 110, and the seal portion 111 are not formed on the inner surface of the shaft hole 102 of the bearing member 101. Becomes the cylindrical inner surface without unevenness. Instead, the corresponding portions of the shaft member 120 are processed to form the first groove forming portion, the recess portion, the second groove forming portion, and the seal portion.

図6は、上述した加工を施した軸部材の概要を示す側面図である。図6には、軸部材601が示されている。軸部材601の先端(図の下端)の部分は、拡径された鍔部602とされている。鍔部602は、軸部材601と一体物であり、切削加工により形成されている。符号603は、鍔部602を形成する際に形成されるアンダーカット部である。アンダーカット部603は、部分的に縮径された環状の溝構造を有している。   FIG. 6 is a side view showing an outline of the shaft member subjected to the above-described processing. FIG. 6 shows the shaft member 601. A tip portion (lower end in the figure) of the shaft member 601 is a flange portion 602 having an enlarged diameter. The flange 602 is an integral part of the shaft member 601 and is formed by cutting. Reference numeral 603 denotes an undercut portion formed when the flange portion 602 is formed. The undercut portion 603 has an annular groove structure that is partially reduced in diameter.

アンダーカット部603に連続して環状溝604が形成されている。環状溝604は、図2の環状溝112に対応する。環状溝604には、動圧溝605の一端が繋がっている(連続している)。動圧溝605の他端は、環状溝606が繋がっている。環状溝604、動圧溝605および環状溝606の深さは同じ寸法とされている。環状溝604、動圧溝605および環状溝606により溝形成部607が構成されている。   An annular groove 604 is formed continuously with the undercut portion 603. The annular groove 604 corresponds to the annular groove 112 of FIG. One end of the dynamic pressure groove 605 is connected to the annular groove 604 (continuous). An annular groove 606 is connected to the other end of the dynamic pressure groove 605. The annular groove 604, the dynamic pressure groove 605, and the annular groove 606 have the same depth. A groove forming portion 607 is configured by the annular groove 604, the dynamic pressure groove 605, and the annular groove 606.

環状溝606は、リセス部608の縁を構成するテーパ部610に連続している。リセス部608は、溝形成部607よりも縮径された構造を有し、その役割は、図2に示すリセス部107と同じである。   The annular groove 606 is continuous with the tapered portion 610 that constitutes the edge of the recess portion 608. The recess portion 608 has a structure with a diameter smaller than that of the groove forming portion 607, and the role thereof is the same as that of the recess portion 107 shown in FIG.

リセス部608の他方の縁は、テーパ部611とされ、そこから環状溝612が連続している。環状溝612には、動圧溝613の一方の端部が繋がり、動圧溝613の他方の端部は、環状溝614に繋がっている。環状溝612、動圧溝613および環状溝614により溝形成部615が構成されている。環状溝612、動圧溝613および環状溝614は、同じ深さ寸法とされている。環状溝614に連続してシール部616が設けられている。シール部616は、図の上方に向かって漸次縮径した形状とされている。   The other edge of the recess 608 is a tapered portion 611, from which an annular groove 612 is continuous. One end of the dynamic pressure groove 613 is connected to the annular groove 612, and the other end of the dynamic pressure groove 613 is connected to the annular groove 614. The annular groove 612, the dynamic pressure groove 613, and the annular groove 614 constitute a groove forming portion 615. The annular groove 612, the dynamic pressure groove 613, and the annular groove 614 have the same depth dimension. A seal portion 616 is provided continuously to the annular groove 614. The seal portion 616 has a shape that is gradually reduced in diameter toward the top of the figure.

以下、上記構造の製造方法の一例を説明する。まず、溝形成部607および615が形成されていない形状を得る。次に溝形成部607および615を電解加工により形成する。この際、環状溝604の一部がアンダーカット部603に重なり、環状溝606の一部がテーパ部610に重なり、環状溝612の一部がテーパ部611に重なり、環状溝614の一部がシール部616に重なるように各環状溝の幅と、形成位置の調整を行う。   Hereinafter, an example of the manufacturing method of the said structure is demonstrated. First, a shape in which the groove forming portions 607 and 615 are not formed is obtained. Next, groove forming portions 607 and 615 are formed by electrolytic processing. At this time, a part of the annular groove 604 overlaps the undercut part 603, a part of the annular groove 606 overlaps the taper part 610, a part of the annular groove 612 overlaps the taper part 611, and a part of the annular groove 614 The width of each annular groove and the formation position are adjusted so as to overlap the seal portion 616.

以上のように図6に示す軸部材601を得る。軸部材601を得たら、溝形成部、リセス部、シール部が形成されていない軸受部材620(図7参照)を用意し、軸部材601を装着する。そして、蓋部材621(図3の符号122に相当)を嵌め込み固定し、軸受部材と軸部材との間の隙間に潤滑油を充填することで、図7の流体動圧軸受装置を得る。   As described above, the shaft member 601 shown in FIG. 6 is obtained. When the shaft member 601 is obtained, a bearing member 620 (see FIG. 7) in which no groove forming portion, recess portion, or seal portion is formed is prepared, and the shaft member 601 is mounted. Then, the lid member 621 (corresponding to the reference numeral 122 in FIG. 3) is fitted and fixed, and the gap between the bearing member and the shaft member is filled with lubricating oil, whereby the fluid dynamic bearing device in FIG. 7 is obtained.

本発明は、流体動圧軸受装置および当該装置を用いたスピンドルモータに利用することができる。   The present invention can be used for a fluid dynamic pressure bearing device and a spindle motor using the device.

加工途中の軸受部材の概要を示す側断面図である。It is a sectional side view which shows the outline | summary of the bearing member in the middle of a process. 第1の実施形態の軸受部材を示す側断面図(A)と部分拡大図(B)である。They are a sectional side view (A) and a partial enlarged view (B) which show the bearing member of a 1st embodiment. 第1の実施形態を示す断面図である。It is sectional drawing which shows 1st Embodiment. スラスト動圧溝の形状の一例を示す正面図である。It is a front view which shows an example of the shape of a thrust dynamic pressure groove. スピンドルモータの概要を示す断面図である。It is sectional drawing which shows the outline | summary of a spindle motor. 軸部材の概要を示す側面図である。It is a side view which shows the outline | summary of a shaft member. 第2の実施形態を示す断面図である。It is sectional drawing which shows 2nd Embodiment. 電極工具の概要を示す側面図である。It is a side view which shows the outline | summary of an electrode tool. 従来のブレークスルー・ヘリングボーン動圧溝を示す側面図である。It is a side view which shows the conventional breakthrough herringbone dynamic pressure groove.

符号の説明Explanation of symbols

101…軸受部材、102…軸孔、103…蓋取付部、104…鍔収容部、105…溝形成部、106…面取り部、107…リセス部、108…テーパ部、109…テーパ部、110…溝形成部、111…シール部、112…環状溝、113…動圧溝、114…環状溝、115…環状溝、116…動圧溝、117…環状溝、120…軸部材、121…鍔部材、122…蓋部材、500…スピンドルモータ、501…ロータ、502…ビス孔、503…ヨーク、504…永久磁石、505…ステータハウジング、506…ステータコア、507…コイル、508…ステータ。   DESCRIPTION OF SYMBOLS 101 ... Bearing member, 102 ... Shaft hole, 103 ... Cover attaching part, 104 ... Saddle accommodating part, 105 ... Groove forming part, 106 ... Chamfering part, 107 ... Recessed part, 108 ... Tapered part, 109 ... Tapered part, 110 ... Groove forming part, 111 ... seal part, 112 ... annular groove, 113 ... dynamic pressure groove, 114 ... annular groove, 115 ... annular groove, 116 ... dynamic pressure groove, 117 ... annular groove, 120 ... shaft member, 121 ... collar member 122: Lid member, 500: Spindle motor, 501 ... Rotor, 502 ... Screw hole, 503 ... Yoke, 504 ... Permanent magnet, 505 ... Stator housing, 506 ... Stator core, 507 ... Coil, 508 ... Stator.

Claims (7)

軸受部材と、
前記軸受部材に相対回転可能な状態で装着された軸部材と、
前記軸受部材の一端側を閉塞する蓋部材と、
前記軸受部材と前記軸部材との間の隙間に連続的に充填された潤滑流体と、
前記軸受部材または前記軸部材の軸方向に離れた位置に形成された一対の環状溝と、
前記一対の環状溝が形成された部材に形成され、前記一対の環状溝を繋ぐ屈曲した動圧溝と
を備え、
前記一対の環状溝のそれぞれは、前記動圧溝と同じ深さを有した状態で軸方向に延在し、前記動圧溝が形成された部分における前記軸受部材の内周面と前記軸部材の外周面との間の隙間より大きな隙間を有する拡大隙間部に連続していることを特徴とする流体動圧軸受装置。
A bearing member;
A shaft member mounted in a relatively rotatable state on the bearing member;
A lid member for closing one end side of the bearing member;
A lubricating fluid continuously filled in a gap between the bearing member and the shaft member;
A pair of annular grooves formed at positions separated in the axial direction of the bearing member or the shaft member;
Formed in a member in which the pair of annular grooves are formed, and a bent dynamic pressure groove connecting the pair of annular grooves,
Each of the pair of annular grooves extends in the axial direction in a state having the same depth as the dynamic pressure groove, and the inner peripheral surface of the bearing member and the shaft member in a portion where the dynamic pressure groove is formed. A fluid dynamic bearing device, characterized in that the fluid dynamic bearing device is continuous with an enlarged gap portion having a gap larger than a gap between the outer peripheral surface of the first and second outer peripheral surfaces.
前記拡大隙間部は、面取り部、シール部、リセス部、またはアンダーカット部により構成されていることを特徴とする請求項1に記載の流体動圧軸受装置。   The fluid dynamic bearing device according to claim 1, wherein the enlarged gap portion includes a chamfered portion, a seal portion, a recess portion, or an undercut portion. 前記動圧溝は、その屈曲部を境にして軸方向において非対称なパターンを有していることを特徴とする請求項1または2に記載の流体動圧軸受装置。   3. The fluid dynamic bearing device according to claim 1, wherein the dynamic pressure groove has an asymmetric pattern in an axial direction with a bent portion as a boundary. 前記動圧溝が少なくとも一対の環状導電部と該一対の環状導電部を繋ぐ屈曲した導電部とが一体的に形成された電極工具を用いた電解加工により同時に形成されていることを特徴とする請求項1〜3のいずれか一項に記載の流体動圧軸受装置。   The dynamic pressure groove is simultaneously formed by electrolytic processing using an electrode tool in which at least a pair of annular conductive portions and a bent conductive portion connecting the pair of annular conductive portions are integrally formed. The fluid dynamic pressure bearing device according to any one of claims 1 to 3. 前記一対の環状溝のそれぞれが前記拡大隙間部に一部が重なる位置に形成されていることを特徴とする請求項1〜4のいずれか一項に記載の流体動圧軸受装置。   5. The fluid dynamic bearing device according to claim 1, wherein each of the pair of annular grooves is formed at a position partially overlapping with the enlarged gap portion. 請求項1〜5のいずれか一項に記載の流体動圧軸受装置を用いたことを特徴とするスピンドルモータ。   A spindle motor using the fluid dynamic bearing device according to any one of claims 1 to 5. 軸受部材と、
前記軸受部材に相対回転可能な状態で装着された軸部材と、
前記軸受部材の一端側を閉塞する蓋部材と、
前記軸受部材と前記軸部材との間の隙間に充填された潤滑流体と、
前記軸受部材または前記軸部材の軸方向に離れた位置に形成された一対の環状溝と、
前記一対の環状溝が形成された部材に形成され、前記一対の環状溝を繋ぐ屈曲した動圧溝と
を備え、
前記一対の環状溝のそれぞれは、前記動圧溝と同じ深さを有した状態で軸方向に延在し、前記動圧溝が形成された部分における前記軸受部材の内周面と前記軸部材の外周面との間の隙間より大きな隙間を有する拡大隙間部に連続している構造を備えた流体動圧軸受装置の製造方法であって、
前記拡大隙間部を構成する形状に前記軸受部材または前記軸部材を加工する第1の工程と、
前記第1の工程において加工された部分に、少なくとも一対の環状導電部及び環状導電部を繋ぐ屈曲した導電部が一体的に形成された電極工具を用いて、前記一対の環状溝及び該環状溝を繋ぐ屈曲した動圧溝を同時に形成する電解加工工程と
を有し、
前記電解加工工程において、前記一対の環状溝と前記拡大隙間部とを軸方向において一部で重ねる設定することを特徴とする流体動圧軸受装置の製造方法。
A bearing member;
A shaft member mounted in a relatively rotatable state on the bearing member;
A lid member for closing one end side of the bearing member;
A lubricating fluid filled in a gap between the bearing member and the shaft member;
A pair of annular grooves formed at positions separated in the axial direction of the bearing member or the shaft member;
Formed in a member in which the pair of annular grooves are formed, and a bent dynamic pressure groove connecting the pair of annular grooves,
Each of the pair of annular grooves extends in the axial direction in a state having the same depth as the dynamic pressure groove, and the inner peripheral surface of the bearing member and the shaft member in a portion where the dynamic pressure groove is formed. A method of manufacturing a fluid dynamic bearing device having a structure continuous to an enlarged gap portion having a gap larger than a gap between the outer peripheral surface of
A first step of processing the bearing member or the shaft member into a shape constituting the enlarged gap portion;
Using the electrode tool in which at least a pair of annular conductive portions and a bent conductive portion connecting the annular conductive portions are integrally formed on the portion processed in the first step, the pair of annular grooves and the annular grooves possess an electrolytic machining process for simultaneously forming a bent dynamic pressure grooves connecting,
In the electrolytic processing step, the pair of annular grooves and the enlarged gap portion are set so as to partially overlap in the axial direction .
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