JP5163875B2 - Amorphous cylinder manufacturing apparatus and amorphous cylinder manufacturing method - Google Patents

Description

  The present invention mainly relates to an amorphous cylinder manufacturing apparatus and an amorphous cylinder as a material for a belt applied to a belt-type speed change mechanism that decelerates the driving force of a motor with high rotational accuracy, such as a printing machine, a copying machine, various OA equipments, and medical equipment. It relates to the manufacturing method.

Reduction gears used in power transmission parts of personal computer printers and copiers are mainly gears, and others are toothed belts or flat belts. Those using gears generate noise and vibrations based on the characteristics of the teeth, and the effects of the vibrations adversely affect the image quality when the rotational accuracy of a printer or the like is required.
In addition, if a gear reducer with looseness is used for an amusement robot or the like, it may cause unexpected vibrations.

  In the case of using a rubber belt, since the belt has low rigidity, a change in the length of the belt occurs due to a load change of the apparatus, and a speed change occurs.

The one using a flat belt can transmit with high rotational accuracy, but uses the frictional force between the belt and the pulley, so the transmission load capacity is low and the structure is enlarged. In particular, when the speed reduction ratio increases, the pulley diameter on the output side becomes larger than the pulley on the input shaft side because it is a reciprocal number times the speed reduction ratio. However, since the belt stress is inversely proportional to the pulley diameter, the pulley diameter cannot be made too small.
For this reason, it is necessary to use two-stage deceleration, and the structure becomes complicated.

  A belt made of an amorphous material or the like is desired as a material having a high rotational accuracy and a large transmission load capacity, but no cylindrical manufacturing method has been established.

  The present invention selects an amorphous material for a belt that smoothly transmits rotation, such as a flat belt, and manufactures an amorphous cylinder as a material for a speed reduction drive mechanism belt that can increase torque transmission capacity compared to a conventional flat belt by developing a new manufacturing method. The present invention provides an apparatus and a method for manufacturing an amorphous cylinder, and is intended to solve problems such as vibration in a power transmission system or low rigidity in a power transmission system and a low transmission load capacity with respect to a reduction gear size.

  Specifically, the issues in creating a cylindrical amorphous belt, which is a key part of downsizing a belt reducer, by sputtering are described.

  Sputtering is usually performed on a flat substrate, but when sputtering is performed on a rigid rotating drum provided at a position corresponding to the substrate, the combination of drum and annular material is a combination of materials that can be removed if flat. Even so, it is extremely difficult to take out only the annular material that has been sputtered from the drum.

  When there is no cooling circuit inside the thin drum, the amorphous annular material is heated by the energy generated by the plasma. Although the drum is supported by the bearing, since the periphery of the drum is in a vacuum state, the energy generated by the plasma is stored, and the cooling rate required for amorphization cannot be obtained as the sputtering time elapses.

1. The amorphous production apparatus of the present invention is a plasma-type sputtering apparatus that includes a thin drum having a rotation axis parallel to a target inside a vacuum chamber, and deposits the target on the outer periphery of the thin drum. An air supply / exhaust pipe is provided from the outside of the chamber to the shaft center of the thin drum inside, and a cooling unit is provided in the pipe to recirculate a gas or liquid coolant to cool the thin drum. .
2. The amorphous manufacturing apparatus of the present invention is characterized in that, in the above-described amorphous cylinder manufacturing apparatus, a thin jig belt fitted into the outer diameter of the thin drum is provided, and the thin jig belt is sputtered.
3. The amorphous production method of the present invention comprises a thin drum having a rotation axis parallel to a target inside a vacuum chamber, and piping for air supply and exhaust from the outside of the vacuum chamber to the shaft center of the thin drum inside, In a plasma-type sputtering apparatus having a cooling unit that cools the thin drum by recirculating a gas or liquid coolant to the pipe, a voltage is applied between the target and the thin drum to generate plasma, While the thin drum is rotated, the target is sputter-adsorbed on the surface of the thin drum and simultaneously the cooling process is continuously performed to generate a belt-shaped thin film.
4). The amorphous manufacturing method of the present invention is characterized in that, in the above-described amorphous cylinder manufacturing method, a thin jig belt fitted to the outer diameter of the thin drum is provided, and the thin jig belt is sputtered.
5. The amorphous manufacturing method of the present invention is characterized in that, in the two amorphous cylinder manufacturing methods, the thin drum or the thin jig belt has a shaft rotational speed of 10 to 200 rpm.

Compared to the metal belt material SUS304 currently used in the market, there are many amorphous materials having a high tensile strength and a small longitudinal elastic modulus.
Amorphous can be processed into a cylindrical shape by processing these using a method that solves the above-described problems. As a result, the size of the belt speed reducer can be significantly reduced as compared with the conventional one, and the weight can be reduced.

The amorphous cylinder manufacturing apparatus of the present invention will be described in detail below.
FIG. 1 is a cross-sectional view of an amorphous cylinder manufacturing apparatus of the present invention, and FIG. 2 is an enlarged cross-sectional view of a drum portion of Embodiment 1 of the present invention.

  As shown in FIG. 1, an amorphous cylinder manufacturing apparatus 100 of the present invention has a structure in which a sealed state can be maintained by an O-ring 3 provided between a vacuum chamber 1 and a chamber lid 2, and a target 4 and The thin drum 10 that is rotated by the motor 32 is provided at the facing position, and the air supply and exhaust pipes are provided from the outside of the vacuum chamber 1, and the gas or liquid flowing inside the air supply pipe 36 and the exhaust pipe 37 connected thereto, The cooling medium is recirculated through the shaft center of the shaft 14 that supports the thin drum, and the cylindrical inner surface of the thin drum 10 is cooled.

  The target 4 corresponds to a material made of the material of the belt to be created, and an adhesive in which a metal such as indium is melted on the surface 6 between the target press 5 fixed to the vacuum chamber 1. Secure with.

The shutter 7 is supported by a shaft 8 that passes through the center of the chamber 1. When performing real sputtering by rotating from the outside, the position of the hole 9 is positioned on the target 4. In the case of emptying, the particles are prevented from adhering from the target 4 to the thin drum 10 due to the plasma phenomenon by rotating the plate.
The thin drum 10 is not shown on the disk 11 but is supported by a shaft 14 rotatably supported by a bush 13 provided on a housing 12 made of a material that can be energized such as SUS or aluminum fastened with bolts. The outer diameter portion of the inner tube side 15 with the tube portion and the outer tube side 16 with the tube portion, which is fitted and supported by the outer diameter of the shaft 14, is fitted.

  The disk inner cylinder side 15 with the tube portion and the disk outer cylinder side 16 with the tube portion are held by a washer 17 between them so as to prevent the shaft 14 from generating “rare” in the axial direction by a snap ring 18.

  Further, an O-ring 19 is provided between the shaft 14 and the disk inner cylinder side 15 with the tube portion, an O-ring 20 is provided between the shaft 14 and the disk outer cylinder side 16 with the tube portion, and the disk inner cylinder side 15 with the tube portion. An O-ring 21 is provided between the thin-walled drum 10 and the O-ring 22 between the tube outer cylinder side 16 with the tube and the thin-walled drum 10. The space 24 is completely air-impermeable. Here, the thin drum 10 is made of nickel plating or the like and has a thickness of 0.1 mm or less, and is highly flexible.

In FIG. 1, the gas introduction system 101, the vacuum exhaust system 102, and the sputtering power source 103 each have the same characteristics as those provided in a sputtering apparatus already used for general purposes.
The cooling system 104 includes industrial compressed air or tap water with a device capable of controlling the flow rate.
The drum rotating power source 105 is a general device that controls the necessary current and voltage for changing the rotational speed of the motor 32.

Next, description will be made with reference to FIG. 2, AA sectional view of FIG. 2, and FIG. The cooling system refrigerant may be gas or liquid, but will be described below using air.
A sleeve 25 having an input / output port for cooling air passes through the shaft 14 in the center, and in the axial direction, isher 26 and washer 27 between the casing 12 and washer between the casing 12 and the large gear 28. 29, a female screw 30 bored in the large gear 28 and a set screw 31 hold a proper gap in the axial direction, and the rotational direction is stopped so that there is no relative movement.

  Between the inner diameter side of the sleeve 25 and the outer diameter of the shaft 14, O-rings 25a, 25b, and 25c for maintaining a vacuum space from a cooling system circuit are installed.

Since the sleeve 25 has an inlet / outlet port for cooling air, it does not rotate. The shaft 14 passing through the center of the sleeve 25 is rotated by a large gear 28 that is rotated by a small gear 33 fixed to the shaft of the motor 32.
The sleeve 25 has an inlet side port 34 and an outlet side port 35, and an air supply pipe 36 and an exhaust pipe 37 that are piped from the outside of the vacuum chamber 1 are connected to each of them.

  Annular air circuits 38 and 39 are provided inside the inlet side port 34 and the outlet side port 35 of the sleeve 25, and air circuits 40 and 41 radially formed in the shaft 14 are connected to the annular air circuits 38 and 39. ing.

  Further, this circuit is connected to air circuits 45 and 46 of the inner shaft 44 which are inserted into holes 42 and 43 provided with a step at the center of the shaft 14 with a fit of an intermediate fit.

  This air circuit on the air supply side includes an air circuit 47 formed radially from the center of the inner shaft 44, an air circuit 48 formed radially at the same position as the inner shaft 44 of the shaft 14, and the outside of the disk-attached disk. An annular air circuit 49 provided on the inner diameter side of the cylinder side 16 is connected to an air circuit 50 which is provided with a hole radially on the disk outer cylinder side 16 with a tube portion.

  Air is supplied from the air circuit 50 to a cylindrical space 51 between the inner diameter of the thin drum 10 and the outer diameter of the disk outer cylinder side 16 with the tube part, and the outer diameter of the disk inner cylinder side 15 with the tube part and the disk outer cylinder with the tube part. The cylindrical space 52 formed by the inner diameter of the side 16 is connected to the space 23 inside the disk inner cylinder side 15 with the tube portion, and the inner diameter of the shaft 14 and the outer diameter of the inner shaft 44 from the radial holes 53 formed in the shaft 14. Are connected to a cylindrical air circuit 54, an air circuit 41 radially formed in the shaft 14, an annular air circuit 39 of the sleeve 25, and an exhaust pipe 37.

  An O-ring groove 55 is provided near the shaft end of the inner shaft 44, and an O-ring 56 is installed here to completely shut off the cooling air system and the vacuum inside the chamber. The inner shaft 44 is prevented from coming off by a snap ring 58 in a groove 57 provided in the inner diameter.

  The cooling pipe 37 is connected to a cooling mechanism 59 of the motor and a cooling pipe 60 connected to the outside of the chamber 7. Reference numeral 61 denotes a pipe cover for protecting the pipe from scattering of sputtered atoms.

  According to the first embodiment, the vacuum chamber 1, the target 4 inside thereof, and the thin drum 10 rotated by the motor 32 at the facing position are provided, and air supply and exhaust pipes are provided from the outside of the vacuum chamber 1. The above-mentioned coolant is circulated through the axis of the shaft 14 supporting the thin drum by the gas or liquid flowing through the air supply pipe 36 and the exhaust pipe 37 connected to the inner pipe 36 to cool the cylindrical inner surface of the thin drum 10. As a result, the thin drum 10 with the tubular amorphous thin film belt 63 attached to the surface after the completion of sputtering is taken out and deformed, so that only the sputtered tubular amorphous thin film belt 63 can be easily separated and taken out. .

  The tubular amorphous thin film belt 63 can be made into a wide belt as it is, but if it is cut into cylinders of several widths, a large number of belts can be obtained as ordinary power driving belts.

  Although the structure of the apparatus has been described above, the operation and operation of the apparatus and the manufacturing method of the amorphous cylinder and the belt will be described below along the flow of making the amorphous cylinder in FIG.

  Set the target 4 in the vacuum chamber 1 to be made of a belt material, attach all the above-mentioned devices inside the chamber lid 2, and connect the drum rotation wiring and cooling air system piping to the device. In the vacuum chamber 1. The evacuation system is operated by shutting off the gas introduction, drum rotation power supply, cooling air system and sputtering power supply (f1, f2).

  When sufficient vacuum conditions are reached, argon gas is introduced, the vacuum exhaust system and argon gas are adjusted so that the plasma is stably generated, and the sputtering power is turned on with the shutter 7 closed. The impurities on the new surface of the target 4 are released under “kashi” conditions, and the actual sputtering conditions are set (f3, f4).

  Before applying the actual sputtering, the drum rotation power supply and the cooling air circulation system power supply are turned ON. The shutter 7 is set to the open position, that is, the position where the hole 9 of the shutter 7 is located directly below the drum 10. As a result, the plasma region formed between the target 4 and the shutter 7 spreads to the plasma region shown in FIG. 1 and is sputtered on the surface of the drum 10 (f5, f6, f7).

During this time, the motor rotates the thin drum 10 through the small gear 33 and the large gear 28. However, if this rotation is slow, the thickness of only the target 4 side of the drum 10 is increased, and a very small amount is present in the opposite drum. However, sludge-like particles floating in the vacuum space are attached by particles activated in the plasma region.
Therefore, the rotation conditions are set so that the sludge-like adhesion becomes planar and does not become thicker (f7).

  Further, if the thin drum 10 is rotated faster, the O-rings 25a, 25b, and 25c at the boundary between the pressure in the air supply tube and the vacuum chamber generate heat and wear, and the securing of the vacuum is impaired. Therefore, the drum rotation is preferably 10 to 200 rpm (f7).

  Compressed air generated by an external device (not shown) is supplied from the air supply pipe 36 to the inlet side port 34 of the sleeve 25, the annular air circuit 38, the air circuit 40, the air circuit 45 formed radially, and the air formed radially. Circuits 47 and 48, an annular air circuit 49, and an air circuit 50 formed in a radial shape are pumped to cool the inner diameter portion of the thin drum 10 heated by the plasma heat when passing through the cylindrical space. The space 52, the space 23, the air circuit 53 provided with a radial hole, the cylindrical space 54, the air circuit 41 provided with a radial hole 41, the annular air circuit 39, the outlet port 35, and the exhaust pipe 37. The motor is cooled by the motor cooling mechanism 59 and discharged to the outside air through the cooling pipe 60 (f6).

  When the sputtering is performed to a desired thickness, all the power supplies are turned off and the thin drum 10 is taken out from the chamber. A tubular amorphous thin film 63 is formed on the outer diameter of the drum, and when this is recessed several times with the drum from a cylindrical shape and transformed into a gourd shape several times, there is a gap between the thin drum 10 and the tubular amorphous thin film. Can be peeled off (f8, f9, f10, f11, f12).

This tubular amorphous thin film can be made into a wide belt as it is, but if it is cut into cylinders of several widths, a large number of belts can be obtained as ordinary power driving belts (f13).

  Here, since the tubular amorphous thin film is thin, it is easily scratched when it is removed from the thin drum 10, and it is not easy to cut the tubular amorphous thin film into a narrow belt for driving power (f13).

  FIG. 5 is an explanatory view of a thin jig belt 62 according to a second embodiment of the present invention, in which thin jig belts 62 having the same width as the amorphous belt to be formed on the outer diameter of the thin drum 10 are arranged in parallel. . The operation and operation of the apparatus of the second embodiment and the method of manufacturing the amorphous cylinder and the belt are the same as the flow of creating the amorphous cylinder of the first embodiment shown in FIG. 4 except for the installation of the thin jig belt 62 (f1).

  When evacuation is started in order to perform sputtering in this state, the inner diameter side of the thin drum 10 is at atmospheric pressure and the outer diameter side is vacuum, so that the diameter of the thin drum 10 is expanded by this pressure difference, and the thin jig belt 62. It is possible to achieve a fit with no gap as in a press-fit state with a tightening margin, and heat generated by sputtering of the thin jig belt 62 can be transmitted and cooled to the thin drum 10 without variation. The tubular amorphous belt 63 can be formed without being damaged or broken (f2 to f8).

  When the sputtering is finished, the ring on which the amorphous belt 63 is adhered is removed from the outer diameter of the thin drum 10 to the outer diameter of the thin jig belt 62, is recessed from the cylindrical shape, and is transformed into a gourd shape several times. A gap is generated between the thin jig belt 62 and the tubular amorphous belt 63 and can be peeled off (f14, f15, f16, f17).

  According to the second embodiment, the thin jig belt 61 having the same width as the target belt width fitted to the outer diameter of the thin drum 10 of the first embodiment is arranged on the outer surface of the thin drum 10, and the thin jig belt 62 is arranged. By sputtering the thin film, the amorphous thin film belt 62 having a narrow width for power driving, which is the same as the thin jig belt 62, can be formed without cutting into a narrow belt having an amorphous thin film.

FIG. 6 is a central cross-sectional view of an apparatus showing the entirety of Embodiment 3 of the present invention. The structure of the apparatus will be described below. FIG. 6 shows a system in which only the motor 64 and the speed reduction mechanism are taken out of the chamber arm 65 as compared with FIG.
The rotational force of the motor 64 is decelerated by the small gear 66 and the large gear 67 meshing therewith and transmitted to the inside through the drive shaft 68.
The drive shaft 68 secures a vacuum inside the chamber arm 65 by an O-ring 69 provided on the chamber arm 65.

An input side dog clutch 70 is fixed to the end of the drive shaft 68 on the chamber arm 65 side by a set screw 71. The receiving dog clutch 72 is fixed to the end of the shaft 73 by a set screw 74.
The state of the clutch shown in FIG. 6 indicates a state in which the clutch is “open”, that is, the clutch is not engaged. This shows a state immediately after closing the lid 75 of the chamber including the entire rotating portion of the drum including the receiving dog clutch 72 and the shaft 73, and a state just before the sputtering is finished and the lid 75 of the chamber is opened.
Here, the driving force from the motor moves the drive shaft 68 “a” in the right direction in FIG. 6, and tightens the set screw 76 that fixes the drive shaft 68 and the large gear 67 to “close” the clutch. The state / power can be connected.
Reference numerals 77 and 78 denote radially toothed portions provided on the surfaces of the input side dog clutch 70 and the receiving side dog clutch 72, respectively.
By adopting such a method, the influence on the sputtering process due to the heat generated by the motor 64 can be reduced.

  Although not shown, the shaft 73 can be rotated by combining a bevel gear with a hole in the center of the shaft 8 passing through the center in FIG. it can.

  Further, the hatched parts excluding the disk 11 shown in FIG. 2 are arranged in a double row at a position on the disk 11 at the upper part of the plasma region, and connected to each other by a gear or the like to be rotated to obtain a large number of parts. You can also.

Regarding the manufacturing method for “Example 3”, (FIG. 4) In the amorphous cylinder production follow, (f5) “Clutch connection” before “turning on the motor and rotating the drum when the air blow is completed” Is added.
In addition, in (FIG. 4) “Amorphous cylinder creation follow”, a term “disengage the clutch” is added after (f8) “All power OFF at the end of sputtering”.

Cross-sectional view of the amorphous cylinder manufacturing apparatus of the present invention The expanded sectional view of the drum part of the present invention Example 1 AA sectional view of FIG. Amorphous cylinder manufacturing flow Explanatory drawing of the thin jig | tool belt of this invention Example 2. Central sectional view of the apparatus showing the entirety of Example 3 of the present invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 .... Vacuum chamberer 15 ... Disk inner cylinder side with pipe part 2 .... Chamberer lid 16 ... Disk outer cylinder side with pipe part 4 .... Target 25 ... · Sleeve 10 · · · Thin drum 44 · · · Inner shaft 11 · · · Disc 62 · · · Thin jig belt 12 · · · Case 63 · · · Amorphous thin belt

Claims (5)

  A plasma-type sputtering apparatus comprising a thin drum having a rotation axis parallel to a target inside a vacuum chamber, the sputter film forming the target on the outer periphery of the thin drum, wherein the thin wall inside the vacuum chamber from the outside An apparatus for producing an amorphous cylinder, wherein an air supply and exhaust pipe is provided at an axis of the drum, and a cooling unit is provided for cooling the thin drum by refluxing a gas or liquid coolant in the pipe.   2. The amorphous cylinder manufacturing apparatus according to claim 1, further comprising: a thin jig belt fitted to an outer diameter of the thin drum, and sputtering the thin jig belt.   A thin drum having a rotation axis parallel to the target inside the vacuum chamber is provided, and an air supply / exhaust pipe is provided from the outside of the vacuum chamber to the axial center of the thin drum inside, and cooling of the gas or liquid is performed on the pipe In a plasma-type sputtering apparatus including a cooling unit that recirculates the material and cools the thin drum, a voltage is applied between the target and the thin drum to generate plasma, and the thin drum is rotated while rotating the thin drum. A process for producing an amorphous cylinder, wherein a belt-like thin film is formed by continuously executing a process of simultaneously cooling the target on the surface of a thin drum while being sputter-adsorbed.   4. The method for producing an amorphous cylinder according to claim 3, further comprising a thin jig belt fitted into the outer diameter of the thin drum, and sputtering the thin jig belt. In amorphous cylindrical process according to claim 3 or claim 4, amorphous cylinder method, characterized in that the 10~200rpm axial rotation speed of the thin drum.

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