JP5164615B2 - Release film production method - Google Patents

Description

  The present invention relates to a method for producing a release film used when a molded product is molded with a mold.

  In the semiconductor assembly process, a semiconductor chip is mounted on a substrate, the terminals of the substrate and the semiconductor chip are connected by wires, and then the periphery of the mounted semiconductor chip is fixed with a resin such as epoxy, such as impact, temperature, humidity, etc. To protect from.

  Solidifying the periphery of such a semiconductor chip with a resin such as epoxy is called resin molding (also referred to as mold molding). Conventionally, when a semiconductor chip is resin molded, as shown in FIGS. A substrate 3 on which a semiconductor chip 2 is mounted and a resin 4 such as epoxy are conveyed (see FIG. 3) into an opened mold (see FIG. 2), and these 3 and 4 are set and clamped (FIG. 4). The resin 4 is pressed from below to melt the resin 4 and flow into the cavity of the mold 1 (see FIG. 5).

  When transporting the substrate 3 and the resin 4, a disposable release film 10 that covers the semiconductor chip 2 is inserted in the mold 1 in advance (see Patent Documents 1 and 2). This release film 10 is made of, for example, tetrafluoroethylene-ethylene copolymer from the viewpoint of ensuring peelability (non-adhesiveness), heat resistance, barrier properties from corrosive gas generated during molding, and followability to the mold 1. It consists of a flexible thin film made of coalescence (ETFE), and functions to facilitate removal of the semiconductor chip 2 from the mold 1.

When the resin 4 flows into the cavity of the mold 1, the resin 4 is cured to mold the semiconductor chip 2 on the substrate 3 (see FIG. 6), and the semiconductor chip 2 molded from the mold 1 is removed (see FIG. 6). When the release film 10 is peeled from the semiconductor chip 2 and the unnecessary resin 4 is separated (see FIG. 8), the resin molding of the semiconductor chip 2 can be completed (see FIG. 9). .
JP 2005-307059 A Japanese Patent Laid-Open No. 2001-206913

  Since the conventional release film 10 consists of a fluorine-type film made from ETFE as mentioned above, there are many environmental problems, and since it is expensive, there exists a problem that cost reduction is difficult.

  The present invention has been made in view of the above, and an object thereof is to provide an inexpensive method for producing a release film that can cope with environmental problems.

In the present invention, in order to solve the above problems, when molding a molded product by a mold, a method for producing a release film inserted into the mold,
A molding material is prepared by adding 1.0 to 20.0 parts by weight of silicone rubber to 100 parts by weight of a polyester elastomer, and melt-kneading. The mold film is wound around and stretched between a crimping roll, a metal roll, and a winding tube located downstream thereof, and the release film is sandwiched between the crimping roll and the metal roll. .

  The molding material composition is pulverized, and after the pulverized composition is dried, a release film is extruded, and the extrusion-molded release film is placed on the pressure roll, the metal roll, and downstream of these. When the release film is sandwiched between the crimping roll and the metal roll, the unevenness on the surface of the release roll and the metal roll are brought into close contact with each other. It is preferable to form irregularities on the surface.

Moreover, a molded article can be made into the semiconductor chip mounted in the board | substrate and connected with the terminal with the wire.
Moreover, it is preferable that a polyester-type elastomer has the characteristic of both rubber | gum and an engineering plastic.

  Here, although the molded product in the claims is mainly a semiconductor chip mounted on a substrate and connected to its terminals by wires, it may be another semiconductor component, an electronic component, or a molded product in another field. The surface of the release film may be smooth or uneven.

  According to the present invention, it is possible to provide an inexpensive release film that can cope with environmental problems.

  Hereinafter, a preferred embodiment of a method for producing a release film according to the present invention will be described with reference to the drawings. In the release film 10 in this embodiment, 1 to 20 parts by weight of silicone rubber is added to a polyester-based elastomer. The film is thinly formed with a molding material to improve the peelability (contact angle) of the film surface, and is used for resin molding of the semiconductor chip 2 using the mold 1.

  The polyester elastomer is a polyester / polyether type elastomer composed of a copolymer of crystalline aromatic polyester and polyether, or a polyester / polyether type composed of a copolymer of crystalline aromatic polyester and aliphatic polyester. Examples thereof include elastomers.

  Examples of the crystalline aromatic polyester include phthalic acid, terephthalic acid, isophthalic acid, 2,6-naphthalenedicarboxylic acid, or aromatic dicarboxylic acid such as 2,7-naphthalenedicarboxylic acid and ethylene glycol, It is particularly limited as long as it is composed of an aliphatic diol such as 3-propanediol, 1,3-butanediol, 1,4-butanediol, 1,6-hexanediol, or 1,4-cyclohexanedimethanol. It is not a thing. Examples thereof include polyethylene terephthalate (PET), polytrimethylene terephthalate (PTT), polybutylene terephthalate (PBT), polyethylene naphthalate (PEN), and polybutylene naphthalate (PBN). These aromatic dicarboxylic acids and aliphatic diols may be used alone or in combination of two or more.

  The polyether is not particularly limited, and examples thereof include polyethylene glycol, polypropylene glycol, and polytetramethylene glycol. These polyethers may be used by alloying or blending one kind or two or more kinds. Examples of the aliphatic polyester include, but are not limited to, polycaprolactone, polyethylene adipate, polybutylene adipate, polyethylene succinate, polybutylene succinate, and the like. These aliphatic polyesters may be used alone or in combination of two or more.

  The silicone rubber is a rubber having an average degree of polymerization in the range of 1000 to 30000, preferably an organopolysiloxane having an average degree of polymerization of 4000 to 15000, more preferably 5000 to 12000. Examples of the silicone rubber include dimethyl silicone rubber, methyl vinyl silicone rubber, methyl phenyl vinyl silicone rubber, and fluorosilicone rubber. These silicone rubbers may be used alone or in combination of two or more. These silicone rubber modified products, block copolymers, or random copolymers may also be used.

  Silicone oil, silicone grease, or the like instead of silicone rubber is not preferable because it bleeds from the release film 10 after melt extrusion and causes adverse effects such as contamination of the mold 1. The silicone rubber is 1.0 to 20.0 parts by weight, preferably 1.0 to 15.0 parts by weight, more preferably 3.0 to 10.0 parts by weight, based on 100 parts by weight of the polyester elastomer. Add in range. This is because the release effect of the release film 10 is poor when the silicone rubber is less than 1.0 part by weight, and conversely, when the silicone rubber exceeds 20.0 parts by weight, the mechanical properties of the release film 10 are reduced. This is because the strength is lowered and the film is easily broken during production, making it difficult to produce the release film 10.

  The release film 10 has an antioxidant, a light stabilizer, an ultraviolet absorber, a plasticizer, a lubricant, an antiblocking agent, a flame retardant, an antistatic agent, a crystal nucleating agent, an antibacterial agent within the range not impairing the effects of the present invention. Agents, fungicides, organic / inorganic compounds, etc. are added. In addition, the release film 10 has an olefin resin such as polyethylene and polypropylene, a polyamide resin, a thermoplastic resin such as a polyester resin, natural rubber, isoprene rubber, butadiene rubber, and the like within a range not impairing the effects of the present invention. Diene rubbers such as styrene butadiene rubber, non-diene rubbers such as butyl rubber, ethylene propylene rubber and urethane are selectively added.

  In the above, when the release film 10 is manufactured, as partially shown in FIG. 1, first, a polyester elastomer and silicone rubber are melt-kneaded to prepare these compositions, and the prepared molding The composition as a material is melt-extruded to form a band-shaped film, and this film is wound up to produce a release film 10.

  As a method for preparing such a composition, (1) a polyester elastomer and silicone rubber are stirred and mixed at a temperature lower than the melting point of the polyester elastomer, and melt-kneaded at a temperature higher than the melting point of the polyester elastomer to prepare a composition. And (2) a method of preparing a composition by adding silicone rubber to a polyester elastomer melted at a temperature equal to or higher than the melting point without melting and mixing the polyester elastomer and silicone rubber. .

  The method (1) will be described in detail. Stirring and mixing of a polyester elastomer and silicone rubber is performed by using a tumbler mixer, a hensil mixer, a V-type mixer, a nauter mixer, a ribbon blender, a universal stirring mixer, or the like. A mixer is used. When mixing and mixing polyester elastomer and silicone rubber, silicone rubber may be used alone, or silicone rubber such as toluene, xylene, cyclohexane, n-hexane, n-heptane, methyl ethyl ketone, methyl isobutyl ketone, etc. may be used. You may melt | dissolve and use it with the solvent to melt | dissolve.

  When the silicone rubber is used alone, a method of cutting the silicone rubber into a size of 1 cm × 1 cm × 1 cm or less is preferable from the viewpoint of obtaining excellent dispersibility. On the other hand, when using the silicone rubber dissolved in a solvent, since the polyester elastomer and the silicone rubber are melt-kneaded at a high temperature, the solvent may volatilize during melt-kneading, which may cause an accident. The solvent is removed before melt kneading. Examples of the solvent removal method include existing methods such as a vacuum drying method and a heat drying method after mixing and dispersing during mixing and dispersing of the polyester elastomer and the silicone rubber.

  A composition comprising a polyester elastomer and silicone rubber is prepared by mixing the stirring mixture prepared by the above method with a mixing roll, a Banbury mixer, a pressure kneader, a twin screw extruder, a three screw extruder, a four screw extruder, etc. It is prepared by melt-kneading and dispersing silicone rubber in a polyester elastomer with a melt-kneader such as a multi-screw extruder. The temperature at the time of melt-kneading the polyester elastomer and the silicone rubber is within the range of the melting point of the polyester elastomer to the melting point + 100 ° C., preferably the melting point to the melting point + 70 ° C., more preferably the melting point to the melting point + 50 ° C.

  Next, the method (2) will be described in detail. In this case, the polyester elastomer is mixed with a mixing roll, a Banbury mixer, a pressure kneader, a twin screw extruder, a triaxial extruder, a four screw extruder, and the like. These are melted by a melt kneader such as a multi-screw extruder, and silicone rubber is added and melt kneaded to prepare a composition comprising a polyester elastomer and silicone rubber.

  The temperature during the preparation is within the range of the melting point of the polyester elastomer to the melting point + 100 ° C., preferably the melting point to the melting point + 70 ° C., more preferably the melting point to the melting point + 50 ° C. The composition of polyester elastomer and silicone rubber is used after being processed into powder, granules, or pellets by a pulverizer or a cutter.

  When the release film 10 is produced from the polyester elastomer and the silicone rubber, a known molding method such as a melt extrusion molding method, a calender molding method, or a casting molding method is used, but the melt extrusion molding method is simple in equipment. It is optimal from the viewpoint of optimization and handling.

  The melt extrusion molding method is a method of melt-kneading a composition of a polyester elastomer and silicone rubber using an extruder such as a single screw extruder or a twin screw extruder, and a die such as a T die or a round die. The film is continuously extruded to form a strip-shaped release film 10. The temperature of the extruder or die in this melt extrusion molding method is within the range of the melting point of the polyester elastomer to the melting point + 100 ° C., preferably the melting point to the melting point + 70 ° C., more preferably the melting point to the melting point + 50 ° C.

  When the release film 10 is extrusion-molded in this way, the release film 10 is divided into a pressure roll 22, a heated metal roll 23 having fine irregularities on the surface, a pressure roll 24, a tension roll 25, and downstream of these. If it winds in tension between the winding pipes 26 positioned at the same time, and is sandwiched between the upstream crimping roll 22 and the metal roll 23 and finally wound up on the winding pipe 26, the complete release film 10 is obtained. Can be manufactured. Between the pressure roll 24 and the tension roll 25, slit blades 27 that form slits at both ends of the release film 10 are disposed so as to be movable up and down.

  The metal roll 23 is used within a temperature range of 10 to 70 ° C, preferably 20 to 60 ° C, more preferably 20 to 50 ° C. In addition, the press rolls 22 and 24 have at least a surface of natural rubber, isoprene rubber, butadiene rubber, norbornene rubber, acrylonitrile butadiene rubber, nitrile rubber, urethane from the viewpoint of appropriately bringing the release film 10 into close contact with the surface of the metal roll 23. It is formed using rubber such as rubber, silicone rubber, fluorine rubber and the like. Among these, it is preferable to use a heat-resistant rubber such as silicone rubber or fluorine rubber. The crimping rolls 22 and 24 can be formed by adding an inorganic compound such as bengara, silica, or alumina.

  According to the above, since the release film 10 is molded by blending silicone rubber with polyester elastomer, it can be manufactured at low cost, and cost reduction can be greatly expected. In addition, since polyester elastomers that have both rubber and engineering plastic properties are used instead of fluorine, heat resistance, barrier properties from the corrosive gas generated during molding, and followability to the mold 1 can be ensured. And can easily cope with environmental problems.

  Furthermore, in the production of the release film 10, instead of using only a polyester-based elastomer, 1 to 20 parts by weight of silicone rubber is added, so that an epoxy resin, a phenol resin, a melamine resin, a furan resin, an unsaturated polyester, etc. The releasability of the release film 10 with respect to the thermosetting resin can also be improved.

  Hereinafter, although the Example of the manufacturing method of the release film which concerns on this invention is described with a comparative example, the manufacturing method of the release film which concerns on this invention is not limited to a following example at all.

Example 1
First, when 10 kg of polyester elastomer (100 parts by weight) is put into a universal stirring mixer, 100 g of methyl vinyl silicone rubber cut to a size of 3 to 5 mm on one side is added and stirred for 10 minutes, and then 100 g is added. The mixture was stirred for 10 minutes, and 100 g was further added and stirred for 10 minutes. Thereby, a total of 300 g of methyl vinyl silicone rubber (3.0 parts by weight with respect to 100 parts by weight of the polyester elastomer) was added to prepare a mixture of the polyester elastomer and methyl vinyl silicone rubber.

  Perprene EN-2034 (trade name, manufactured by Toyobo Co., Ltd.) was used as the polyester elastomer, and KE-77VBS (trade name, manufactured by Shin-Etsu Chemical Co., Ltd.) was used as the methyl vinyl silicone rubber.

  When a mixture of polyester elastomer and methyl vinyl silicone rubber was prepared in this way, this mixture was supplied to a high-speed twin screw extruder (PCM30, L / D = 35) of φ30 mm, cylinder temperature: 210 to 230 ° C., adapter temperature. : Melted and kneaded under conditions of 230 ° C. and die temperature: 240 ° C., extruded from a die into a rod shape, cut after water cooling, and formed into a pellet-shaped molded body.

  After the molded body is molded, the molded body is left to stand in a hot air oven with an exhaust port heated to 120 ° C. (constant temperature chamber with explosion vent) for 4 hours and dried, and the dried composition has a width of 400 mm. Φ40mm extruder with T die (L / D = 25, screw; full flight screw (compression ratio 2.4)), melt kneaded, and T die connected by a connecting tube at the tip of the extruder The release film was extruded. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  Once the release film is extrusion molded, the release film is divided into a silicone rubber pressure roll, a metal roll heated to 45 ° C., a silicone rubber pressure roll, a tension roll, and these shown in FIG. A complete release film having a length of 500 m, a width of 200 mm, and a thickness of 50 μm was manufactured while being tensioned and wound between a 3-inch winding tube located downstream and sandwiched between an upstream crimping roll and a metal roll. . Between the pressure roll and the tension roll, a slit blade for forming slits at both end portions of the release film was disposed so as to be movable up and down.

  A complete release film was produced, and contact angles, tensile properties, release properties and bleeding properties of the produced release film were evaluated and summarized in Tables 1 and 3.

Example 2
First, 10 kg of a polyester elastomer (100 parts by weight) is put into a universal stirring mixer, and a dimethyl silicone rubber (trade name KE-76BS, manufactured by Shin-Etsu Chemical Co., Ltd.) solution (concentration: 25% by weight) dissolved in toluene is added. 0 kg (500 g in solids, 5.0 parts by weight in solids with respect to 100 parts by weight of polyester elastomer) was added and stirred for 20 minutes. As the polyester elastomer, Hytrel 7277 (trade name, manufactured by Toray DuPont) was used.

  After stirring for 20 minutes in this manner, the stirred mixture is placed in a metal container, 6 hours in a hot air oven with an exhaust outlet heated to 50 ° C., 6 hours in a hot air oven with an exhaust outlet heated to 70 ° C., and Toluene was removed by sequential heating in a hot air oven with an exhaust port heated to 110 ° C. for 6 hours. This removal of toluene was confirmed by the presence or absence of toluene odor. No toluene odor was confirmed from the mixture heated under these conditions.

  Next, when a mixture of the polyester elastomer and dimethyl silicone rubber was prepared, this mixture was supplied to a high-speed twin screw extruder (PCM30, L / D = 35) having a diameter of 30 mm, cylinder temperature: 210 to 230 ° C., adapter temperature. : Melted and kneaded under conditions of 230 ° C. and die temperature: 240 ° C., extruded from a die into a rod shape, cut after water cooling, and formed into a pellet-shaped molded body.

  After the molded body is molded, the molded body is left to stand in a hot air oven with an exhaust port heated to 120 ° C. (constant temperature chamber with explosion vent) for 4 hours and dried, and the dried composition has a width of 400 mm. Φ40mm extruder with T die (L / D = 25, screw; full flight screw (compression ratio 2.4)), melt kneaded, and T die connected by a connecting tube at the tip of the extruder The release film was extruded. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  Once the release film was extrusion molded, a complete release film was produced in the same manner as in Example 1, and the contact angle, tensile properties, release properties and bleed properties of the produced release film were evaluated. It was summarized in 3.

Example 3
First, 10 kg of polyester elastomer (100 parts by weight) is charged into a 14-inch mixing roll (two rolls) heated to 230 ° C. and melted, and dimethyl silicone rubber (trade name KE-76BS manufactured by Shin-Etsu Chemical Co., Ltd.) 1.0 kg (10 parts by weight with respect to 100 parts by weight of the polyester elastomer) was added and melt-kneaded for 15 minutes. Perprene EN-2034 (trade name, manufactured by Toyobo Co., Ltd.) was used as the polyester elastomer.

  After melting and kneading in this way, the sheet is peeled off from the mixing roll so that the length and width are 10 cm or less and the thickness is 1 cm or less, respectively, to form a plate-shaped composition, and this composition is put into a pulverizer equipped with a punching metal with a diameter of 5.5 mm. did.

  After the composition was pulverized by a pulverizer, the composition was left to dry in a hot air oven with an exhaust port heated to 120 ° C. for 4 hours, and the dried composition was attached with a T die having a width of 400 mm. Φ40mm extruder (L / D = 25, screw; full flight screw (compression ratio 2.4)), melt kneaded, release film from T die connected by connecting tube at the tip of the extruder Was extruded. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  Once the release film was extrusion molded, a complete release film was produced in the same manner as in Example 1, and the contact angle, tensile properties, release properties and bleed properties of the produced release film were evaluated. It was summarized in 3.

Example 4
First, 12 kg of a polyester elastomer (100 parts by weight) was put into a 20 l pressure kneader heated to 230 ° C. and melted for 10 minutes, and dimethyl silicone rubber (trade name KE-76BS manufactured by Shin-Etsu Chemical Co., Ltd.) was added. 04 kg was added and melt-kneaded for 5 minutes, 1.0 kg was added and melt-kneaded for 20 minutes, and a total of 2.04 kg of dimethyl silicone rubber (17.0 parts by weight with respect to 100 parts by weight of the polyester elastomer) was added. As the polyester elastomer, Hytrel 7277 (trade name, manufactured by Toray DuPont) was used.

  Next, the melt-kneaded product is taken out with a pressure kneader and immediately rolled into a plate shape with a 14-inch mixing roll (two rolls) heated to 230 ° C. so that the length and width are 10 cm or less and the thickness is 1 cm or less from the mixing roll, respectively. It peeled and the plate-shaped composition was formed.

  Next, the composition was put into a pulverizer with a punching metal having a diameter of 5.5 mm and pulverized, and the composition was left to dry in a hot air oven with an exhaust port heated to 120 ° C. for 4 hours. The composition was fed to a φ40 mm extruder with a T die having a width of 400 mm (L / D = 25, screw; full flight screw (compression ratio 2.4)) and melt-kneaded. A release film was extruded from a T die connected by a connecting tube. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  Once the release film was extrusion molded, a complete release film was produced in the same manner as in Example 1, and the contact angle, tensile properties, release properties and bleed properties of the produced release film were evaluated. It was summarized in 3.

Comparative Example 1
First, as a polyester-based elastomer, Perprene EN-2034 (trade name, manufactured by Toyobo Co., Ltd.) was allowed to stand for 4 hours in a hot air oven with an exhaust port heated to 120 ° C. and dried. Φ40 mm extruder with a T-die having a width (L / D = 25, screw; full flight screw (compression ratio 2.4)) was melted and connected by a connecting tube at the tip of the extruder A release film was extruded from the T die. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  A release film was extruded, and this release film was formed into a silicone rubber pressure roll, a metal roll heated to 45 ° C., a silicone rubber pressure roll, a tension roll, and these A complete release film having a length of 500 m, a width of 200 mm, and a thickness of 50 μm was manufactured while being tensioned and wound between a 3-inch winding tube located downstream and sandwiched between an upstream crimping roll and a metal roll. . Between the pressure roll and the tension roll, a slit blade for forming slits at both end portions of the release film was disposed so as to be movable up and down.

  A complete release film was manufactured, and contact angles, tensile properties, release properties and bleeding properties of the manufactured release film were evaluated and summarized in Tables 2 and 3.

Comparative Example 2
First, as a polyester-based elastomer, Hytrel 7277 (trade name, manufactured by Toray DuPont) was left to stand in a hot air oven with an exhaust port heated to 120 ° C. for 4 hours and dried. Φ40 mm extruder with a T-die having a width (L / D = 25, screw; full flight screw (compression ratio 2.4)) was melted and connected by a connecting tube at the tip of the extruder A release film was extruded from the T die. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  A release film was extruded, and a complete release film was produced in the same manner as in Example 1. The contact angle, tensile properties, release characteristics and bleedability of the produced release film were evaluated, and Table 2 was obtained. It was summarized in 3.

Comparative Example 3
As a polyester-based elastomer, 12 kg (100 parts by weight) of Perprene EN-2034 (trade name, manufactured by Toyobo Co., Ltd.) is heated to 230 ° C and melted for 10 minutes, and 0.2 kg of dimethyl silicone oil is added. Then, the mixture was melt-kneaded for 5 minutes, and the same operation was repeated 5 times to add a total of 10 parts by weight of dimethyl silicone oil to the polyester elastomer, and melt-kneaded for 20 minutes. As dimethyl silicone oil, KF-965-100CS (trade name, manufactured by Shin-Etsu Chemical Co., Ltd.) was used.

  In this way, the mixture was melt-kneaded for 20 minutes, the melt-kneaded product was taken out from the pressure kneader, and immediately rolled into a plate shape with a 14-inch mixing roll (two rolls) heated to 230 ° C., and the thickness was 10 cm or less from the mixing roll. It peeled so that it might become 1 cm or less, and formed the plate-shaped composition.

  Next, the composition was put into a pulverizer with a punching metal having a diameter of 5.5 mm and pulverized, and the composition was left to dry in a hot air oven with an exhaust port heated to 120 ° C. for 4 hours. The composition was fed to a φ40 mm extruder with a T die having a width of 400 mm (L / D = 25, screw; full flight screw (compression ratio 2.4)) and melt-kneaded. A release film was extruded from a T die connected by a connecting tube. At this time, the temperature of the extruder was 210 to 230 ° C, the temperature of the connecting tube was 230 ° C, and the temperature of the T die was 240 ° C.

  Once the release film was extrusion molded, a complete release film was produced in the same manner as in Example 1, and the contact angle, tensile properties, release properties and bleed properties of the produced release film were evaluated. It was summarized in 3.

-Thickness of release film The thickness of the release film was measured with a contact-type thickness meter.
-Contact angle The contact angle of the release film was measured using an image processing contact angle meter (CA-X type manufactured by Kyowa Interface Science Co., Ltd.), a measurement solution, and purified water in an environment of 23 ° C. and 53% RH. In the measurement, the angle after the purified water was dropped onto the release film to stabilize the contact angle was defined as the contact angle. The contact angle was measured 10 times, and the average value was taken as the contact angle.

・ Tensile properties (tensile strength, tensile elongation at break)
The tensile properties of the release film were measured under the conditions of 23 ° C. and 53% RH in accordance with JIS C 2318-1994, with the test piece having a strip shape and a tensile speed of 200 mm / min. MD in the table is the longitudinal direction of the release film (or the extrusion direction of the extruder), and TD is the lateral direction of the release film (or the direction perpendicular to the longitudinal direction).

・ Releasability
The releasability of the release film was measured by the following method.
Peelability from chrome-plated surface: The release film to be evaluated is sandwiched between two flat plate molds whose inner surfaces are chrome-plated, and the pressing pressure is 44 kgf / cm ² and the heating temperature is changed for 5 minutes. The peelability (peeling load) of the release film from the mold surface was measured and evaluated with a tension gauge.

Peeling property from molding resin: Molding resin KMC-3580 (manufactured by Shin-Etsu Chemical Co., Ltd.) is mounted on the release film to be evaluated, and this release film and molding resin are two flat plates whose inner surfaces are chrome plated It was sandwiched between molds, and was pressed by changing the heating temperature with a pressing pressure of 44 kgf / cm ² and a heating time of 5 minutes. Then, the peelability (peeling load) between the release film and the molding resin was measured and evaluated with respect to the pressed laminated product with a tension gauge.

-Bleed property The bleed property of the release film is determined by measuring the infrared absorption spectrum of the adherend after measurement of the release property with an infrared spectroscopic analyzer (Micro ATR manufactured by Sensor Technologies) and appearing at 1200 to 1000 cm ^-1. Absorption peaks derived from —O—Si bonds were confirmed. When the absorption peak derived from the Si—O—Si bond cannot be confirmed, the silicone rubber or silicone oil has no bleeding property, and when the absorption peak derived from the Si—O—Si bond can be confirmed, the silicone rubber Alternatively, the silicone oil has bleeding characteristics.

  Unlike the comparative example, good results could be obtained with respect to the contact angle, tensile properties, release properties and bleeding properties of the release films of the examples.

It is explanatory drawing which shows typically embodiment of the manufacturing method of the release film which concerns on this invention. It is explanatory drawing which shows the metal mold | die which opened the mold typically. It is explanatory drawing which shows typically the state which conveys the board | substrate which mounted the semiconductor chip, and resin to the metal mold | die of FIG. It is explanatory drawing which shows typically the state which clamps the metal mold | die of FIG. It is explanatory drawing which shows typically the state which makes resin flow in into the cavity of the metal mold | die of FIG. It is explanatory drawing which shows typically the state which hardens resin and resin-molds the semiconductor chip on a board | substrate. It is explanatory drawing which shows typically the state which demolds the shape | molded semiconductor chip. It is explanatory drawing which shows typically the state which isolate | separates unnecessary resin from the removed semiconductor chip. It is explanatory drawing which shows typically the resin-molded semiconductor chip.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Mold 2 Semiconductor chip 3 Substrate 10 Release film 20 Extruder 21 T die 22 Crimp roll 23 Metal roll 24 Crimp roll 25 Tension roll 26 Winding tube 27 Slit blade

Claims (2)

  A method for producing a release film to be inserted into a mold when molding a molded product with a mold, wherein 1.0 to 20.0 parts by weight of silicone rubber is added to 100 parts by weight of a polyester elastomer. A molding material is prepared by melt-kneading, a release film is formed from the molding material, and the molded release film is wound between a pressure roll, a metal roll, and a winding tube located downstream thereof. A method for producing a release film, characterized in that the release film is stretched over and held between a pressure roll and a metal roll.   The composition of the molding material is pulverized, and after the pulverized composition is dried, a release film is extruded, and the extrusion-molded release film is formed into a pressure-bonding roll, a metal roll, and a winding located downstream thereof. When the release film is sandwiched between the crimping roll and the metal roll, the unevenness of the surface of the release film and the metal roll is brought into close contact with the surface of the release film. The manufacturing method of the release film of Claim 1 which forms an unevenness | corrugation.

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