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JP5175256B2 - Capacitive touch panel and manufacturing method thereof - Google Patents
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JP5175256B2 - Capacitive touch panel and manufacturing method thereof - Google Patents

Capacitive touch panel and manufacturing method thereof Download PDF

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JP5175256B2
JP5175256B2 JP2009227407A JP2009227407A JP5175256B2 JP 5175256 B2 JP5175256 B2 JP 5175256B2 JP 2009227407 A JP2009227407 A JP 2009227407A JP 2009227407 A JP2009227407 A JP 2009227407A JP 5175256 B2 JP5175256 B2 JP 5175256B2
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electrode
electrode layer
ito
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patterning
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JP2011076386A (en
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浩志 中川
弘 江馬
直也 竹原
安広 滋野
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Hosiden Corp
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Description

本発明は電子機器の操作入力用の入力装置等として用いられる静電容量式タッチパネル及びその製造方法に関する。   The present invention relates to a capacitive touch panel used as an input device for operation input of an electronic device, and a method for manufacturing the same.

携帯機器の操作性を向上する目的で、ディスプレイ一体型のタッチパネル入力装置が採用されることが増えている。タッチパネルの実現方式は、従来は抵抗膜方式が主流であったが、近年は静電容量式が市場を拡大しつつある。   In order to improve the operability of portable devices, a display-integrated touch panel input device is increasingly used. Conventionally, the resistive film method has been the main method for realizing touch panels, but in recent years, the capacitive type has been expanding the market.

図4(a)は従来の静電容量式タッチパネル100の一例を示す平面図、図4(b)は図4(a)の紙面左側から見た側面図である。静電容量式タッチパネル100は、基板101、第1電極層102、第1絶縁層103、第2電極層104、第2絶縁層105、第1金属膜106、及び第2金属膜107を備える。第1電極層102〜第2絶縁層105は図4(b)に示すように基板101上に順番に積層される。第1電極層102は透明導電膜であるITO膜であり、ストライプ状の複数(図4(a)では4本)の電極部102aと、それらそれぞれの引き出し配線である複数の配線部102bとからなる。第1絶縁層103は透明な絶縁素材からなる膜であり、第1電極部102aと第2電極部104aとを電気的に絶縁する。第2電極層104は透明導電膜であるITO膜であり、図4(a)に示すように第1電極層102の電極部102aに対し平面的に見て直交するストライプ状の複数の電極部104aと、それらそれぞれの引き出し配線である複数の配線部104bとからなる。このように配置された第1電極の電極部102aと第二電極の電極部104aは直交座標系を構成し、パネルへの指などの接触物と各電極部との間に生じた静電容量の変化からその接触物の当該パネル上での位置座標を検出可能とする。第2絶縁層105は透明な絶縁素材からなる保護膜である。第1金属膜106と第2金属膜107は、それぞれ第1電極層の配線部102bと第2電極層の配線部104bを低抵抗化するために当該各配線部を被膜する導体であり、双方の配線部に施すことが望ましいが、配線部の長さに応じ、いずれか配線長が長い一方の配線部のみに施すこととしても構わない。なお、第1電極層の配線部102bと第2電極層の配線部104bの電極部側端に対する他端は、圧着部108においてFPCなどのプリント基板に圧着接続される。   FIG. 4A is a plan view showing an example of a conventional capacitive touch panel 100, and FIG. 4B is a side view seen from the left side of FIG. 4A. The capacitive touch panel 100 includes a substrate 101, a first electrode layer 102, a first insulating layer 103, a second electrode layer 104, a second insulating layer 105, a first metal film 106, and a second metal film 107. The first electrode layer 102 to the second insulating layer 105 are sequentially stacked on the substrate 101 as shown in FIG. The first electrode layer 102 is an ITO film that is a transparent conductive film. The first electrode layer 102 includes a plurality of striped (four in FIG. 4A) electrode portions 102a and a plurality of wiring portions 102b that are the respective lead wires. Become. The first insulating layer 103 is a film made of a transparent insulating material, and electrically insulates the first electrode portion 102a and the second electrode portion 104a. The second electrode layer 104 is an ITO film which is a transparent conductive film, and as shown in FIG. 4A, a plurality of stripe-shaped electrode portions orthogonal to the electrode portion 102a of the first electrode layer 102 when viewed in plan. 104a and a plurality of wiring portions 104b which are the respective lead wires. The electrode portion 102a of the first electrode and the electrode portion 104a of the second electrode arranged in this way constitute an orthogonal coordinate system, and electrostatic capacitance generated between a contact object such as a finger to the panel and each electrode portion. It is possible to detect the position coordinates of the contact object on the panel from the change of. The second insulating layer 105 is a protective film made of a transparent insulating material. The first metal film 106 and the second metal film 107 are conductors that coat each wiring part in order to reduce the resistance of the wiring part 102b of the first electrode layer and the wiring part 104b of the second electrode layer, respectively. However, depending on the length of the wiring portion, it may be applied only to one wiring portion having a longer wiring length. Note that the other end of the wiring portion 102b of the first electrode layer and the wiring portion 104b of the second electrode layer with respect to the electrode side end is crimped and connected to a printed circuit board such as an FPC at the crimping portion 108.

このような従来の静電容量式タッチパネル100は、TFT液晶の製造工程に似た複雑な工程で製造される。図5にその製造工程を示す。まず、透明な基板101の上にITOを着膜し(S101)、それに積層する形でスパッタ等により金属膜を着膜する(S102)。続いて、当該金属膜を第1金属膜106の形状(=第1電極層の配線部102bの形状)にパターニングし(S103)、S103で露出したS101で着膜したITO膜を第1電極層の電極部102aの形状にパターニングする(S104)。続いて、第1電極層102上に透明な絶縁膜を着膜し(S105)、当該絶縁膜を電極部102aが覆われる形状にパターニングして第1絶縁層103を形成する(S106)。続いて、第1絶縁層103上にITOを着膜し(S107)、それに積層する形でスパッタ等により金属膜を着膜する(S108)。続いて、当該金属膜を第二金属膜107の形状(=第2電極層の配線部104bの形状)にパターニングし(S109)、S109で露出したS107で着膜したITO膜を第2電極層の電極部104aの形状にパターニングする(S110)。そして、第2電極層104上に透明な絶縁膜を着膜し(S111)、当該絶縁膜を第2電極層の電極部104aが覆われる形状にパターニングして第2絶縁膜105を形成する(S112)。   Such a conventional capacitive touch panel 100 is manufactured by a complicated process similar to the TFT liquid crystal manufacturing process. FIG. 5 shows the manufacturing process. First, ITO is deposited on the transparent substrate 101 (S101), and a metal film is deposited by sputtering or the like in a stacked manner (S102). Subsequently, the metal film is patterned into the shape of the first metal film 106 (= the shape of the wiring portion 102b of the first electrode layer) (S103), and the ITO film deposited in S101 exposed in S103 is used as the first electrode layer. The electrode portion 102a is patterned into a shape (S104). Subsequently, a transparent insulating film is deposited on the first electrode layer 102 (S105), and the insulating film is patterned into a shape covering the electrode portion 102a to form the first insulating layer 103 (S106). Subsequently, ITO is deposited on the first insulating layer 103 (S107), and a metal film is deposited by sputtering or the like in a stacked manner (S108). Subsequently, the metal film is patterned into the shape of the second metal film 107 (= the shape of the wiring portion 104b of the second electrode layer) (S109), and the ITO film deposited in S107 exposed in S109 is used as the second electrode layer. The electrode portion 104a is patterned into a shape (S110). Then, a transparent insulating film is deposited on the second electrode layer 104 (S111), and the second insulating film 105 is formed by patterning the insulating film so as to cover the electrode portion 104a of the second electrode layer ( S112).

特開2001−216090号公報Japanese Patent Laid-Open No. 2001-216090 特開2003−196030号公報JP 2003-196030 A

静電容量式タッチパネル100は、配線部をITO膜上に金属膜を着膜する2層構造としていることから、図5に示すようにITO膜、金属膜、絶縁膜それぞれの着膜とパターニングを繰り返す煩雑な製造工程を経る必要がある。また、製造上、配線部以外の部分にも広く金属膜を着膜する必要がある。そのため、抵抗膜方式に比べて価格が数倍になり、市場への採用が進みにくい状況にあった。   Since the capacitive touch panel 100 has a two-layer structure in which the wiring portion is formed by depositing a metal film on the ITO film, the ITO film, the metal film, and the insulating film are deposited and patterned as shown in FIG. It is necessary to go through a complicated manufacturing process to repeat. Moreover, it is necessary to deposit a metal film widely also in parts other than a wiring part on manufacture. For this reason, the price is several times higher than that of the resistive film type, and it has been difficult to adopt in the market.

抵抗膜方式のタッチパネルにおいては、配線部分に金属膜の代わりに電気メッキを行うことで配線の低抵抗化を図る方法が開示されている(特許文献1、2参照)。静電容量式タッチパネルにおいても、配線部の被膜に金属膜の代わりにメッキを採用することができれば、工程の簡易化や成膜範囲の縮小によるコスト削減が期待できる。しかし、ITO上には電気メッキを施すことができない。   In the resistive film type touch panel, a method of reducing the resistance of the wiring by performing electroplating on the wiring portion instead of the metal film is disclosed (see Patent Documents 1 and 2). Even in a capacitive touch panel, if plating can be employed instead of a metal film for the coating of the wiring portion, cost reduction can be expected by simplifying the process and reducing the film forming range. However, electroplating cannot be performed on ITO.

本発明の目的は、静電容量式タッチパネルの配線部にメッキを採用することにより、工程の簡易化や導体の着膜範囲の縮小によるコスト削減が可能な静電容量式タッチパネル及びその製造方法を実現することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide a capacitive touch panel and a method for manufacturing the same that can reduce the cost by simplifying the process and reducing the film deposition range of the conductor by employing plating for the wiring part of the capacitive touch panel. It is to be realized.

本発明の静電容量式タッチパネルの製造方法は、第1ITO着膜ステップと第1ITOパターニングステップと第1絶縁膜着膜ステップと第1絶縁膜パターニングステップと第2ITO着膜ステップと第2ITOパターニングステップと第2絶縁膜着膜ステップと第2絶縁膜パターニングステップとメッキステップとを実行する。   The method of manufacturing a capacitive touch panel according to the present invention includes a first ITO deposition step, a first ITO patterning step, a first insulation film deposition step, a first insulation film patterning step, a second ITO deposition step, and a second ITO patterning step. A second insulating film deposition step, a second insulating film patterning step, and a plating step are performed.

第1ITO着膜ステップでは、透明な基板上に透明な第1ITO膜を着膜する。   In the first ITO deposition step, a transparent first ITO film is deposited on a transparent substrate.

第1ITOパターニングステップでは、第1ITO膜を、ストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第1電極層を形成する。   In the first ITO patterning step, the first ITO layer is formed by patterning the first ITO film into the shape of a plurality of striped electrode portions and a plurality of wiring portions which are the respective lead wirings.

第1絶縁膜着膜ステップでは、第1電極層上に透明な絶縁膜を着膜する。   In the first insulating film deposition step, a transparent insulating film is deposited on the first electrode layer.

第1絶縁膜パターニングステップでは、第1絶縁膜を第1電極層の電極部が覆われ配線部が露出するようにパターニングして第1絶縁層を形成する。   In the first insulating film patterning step, the first insulating layer is formed by patterning the first insulating film so that the electrode portion of the first electrode layer is covered and the wiring portion is exposed.

第2ITO着膜ステップでは、第1絶縁層上に透明な第2ITO膜を着膜する。   In the second ITO deposition step, a transparent second ITO film is deposited on the first insulating layer.

第2ITOパターニングステップでは、第2ITO膜を第1電極層の複数の電極部に対し平面的に見て直交するストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第2電極層を形成する。   In the second ITO patterning step, the second ITO film is formed into a plurality of stripe-shaped electrode portions orthogonal to the plurality of electrode portions of the first electrode layer in a plan view and a plurality of wiring portions which are respective lead wires. A second electrode layer is formed by patterning.

第2絶縁膜着膜ステップでは、第2電極層上に透明な絶縁膜を着膜する。   In the second insulating film deposition step, a transparent insulating film is deposited on the second electrode layer.

第2絶縁膜パターニングステップでは、第2絶縁膜を第2電極層の電極部が覆われ配線部が露出するようにパターニングして第2絶縁層を形成する。   In the second insulating film patterning step, the second insulating film is patterned to form a second insulating layer so that the electrode portion of the second electrode layer is covered and the wiring portion is exposed.

メッキステップでは、第1電極層の配線部と第2電極層の配線部とに無電解メッキを施す。   In the plating step, electroless plating is performed on the wiring portion of the first electrode layer and the wiring portion of the second electrode layer.

本発明の静電容量式タッチパネル及びその製造方法によれば、静電容量式タッチパネルの配線部にITOとの親和性のよい無電解メッキを採用することにより、ITO上にメッキを施すことができるだけでなく、パターニングすることなくITOを選択的にメッキできるため、工程の簡易化や導体の着膜範囲の縮小によるコスト削減が可能となる。   According to the capacitive touch panel and the manufacturing method thereof of the present invention, it is possible to apply plating on ITO by adopting electroless plating having good affinity with ITO for the wiring part of the capacitive touch panel. In addition, since ITO can be selectively plated without patterning, the cost can be reduced by simplifying the process and reducing the film deposition range of the conductor.

本発明の静電容量式タッチパネルの構成例を示す平面図及び側面図。The top view and side view which show the structural example of the electrostatic capacitance type touch panel of this invention. 本発明の静電容量式タッチパネルの製造工程例を示す図。The figure which shows the example of a manufacturing process of the electrostatic capacitance type touch panel of this invention. 本発明の静電容量式タッチパネルの製造工程における着膜・パターニングの状態を段階的に示す図。The figure which shows the state of the film-forming and patterning in the manufacturing process of the capacitive touch panel of this invention in steps. 従来の静電容量式タッチパネルの構成例を示す平面図及び側面図。The top view and side view which show the structural example of the conventional electrostatic capacitance type touch panel. 従来の静電容量式タッチパネルの製造工程例を示す図。The figure which shows the manufacturing process example of the conventional electrostatic capacitance type touch panel.

〔第1実施形態〕
図1(a)は本発明の静電容量式タッチパネル200の一例を示す平面図、図1(b)は図1(a)の紙面左側から見た側面図である。静電容量式タッチパネル200は、基板101、第1電極層102、第1絶縁層103、第2電極層104、第2絶縁層105、メッキ部206、及びメッキ部207を備える。つまり、図4に示す従来の静電容量式タッチパネル100とは、第1金属膜106と第2金属膜107が、それぞれメッキ部206とメッキ部207に置き換わっている以外は構造上同様であるため、ここではメッキ部206、207について説明する。
[First Embodiment]
FIG. 1A is a plan view showing an example of the capacitive touch panel 200 of the present invention, and FIG. 1B is a side view seen from the left side of FIG. 1A. The capacitive touch panel 200 includes a substrate 101, a first electrode layer 102, a first insulating layer 103, a second electrode layer 104, a second insulating layer 105, a plating part 206, and a plating part 207. That is, the conventional capacitive touch panel 100 shown in FIG. 4 is similar in structure except that the first metal film 106 and the second metal film 107 are replaced with the plating part 206 and the plating part 207, respectively. Here, the plated portions 206 and 207 will be described.

メッキ部206とメッキ部207は、それぞれ第1電極層の配線部102bと第2電極層の配線部104bを低抵抗化するために当該各配線部に重畳して施す導体であるという点において、従来の静電容量式タッチパネル100の第1金属膜106と第2金属膜107と同様である。しかし、本発明ではスパッタ等による金属膜の代わりに、ITOとの親和性がよい無電解メッキ(例えば無電解Niメッキ)を採用する。そのため、従来の静電容量式タッチパネル100のように、金属膜を残すべき部分はごく一部であるにもかかわらず一旦第1電極層全体に金属膜を着膜してパターニングするという材料の無駄を避けることができるとともに、ITO膜に選択的に無電解メッキを施すことができるため、手間のかかる金属膜の着膜・パターニングの工程を経る必要がなくなる。また、無電解メッキはフィルム基板に対してもガラス基板に対しても好適である。   The plated portion 206 and the plated portion 207 are conductors that are superimposed on the respective wiring portions in order to reduce the resistance of the wiring portion 102b of the first electrode layer and the wiring portion 104b of the second electrode layer, respectively. This is the same as the first metal film 106 and the second metal film 107 of the conventional capacitive touch panel 100. However, in the present invention, electroless plating (for example, electroless Ni plating) having good affinity with ITO is employed instead of the metal film formed by sputtering or the like. Therefore, unlike the conventional capacitive touch panel 100, the material film is temporarily deposited and patterned on the entire first electrode layer even though only a part of the metal film should be left. In addition, since the electroless plating can be selectively applied to the ITO film, it is not necessary to go through a complicated process of depositing and patterning a metal film. Electroless plating is suitable for both a film substrate and a glass substrate.

図2(a)に本発明の静電容量式タッチパネル200の製造工程例を示す。また、図3に工程途中段階の製造状態を示す。まず、透明な基板101の上にITOを着膜し(S1)、当該ITO膜を第1電極層102(電極部102a及び配線部102b)の形状にパターニングする(S2、図3(a))。続いて、それに積層する形で透明な絶縁膜を着膜し(S3)、当該絶縁膜を電極部102aが覆われ、配線部102bが露出する形状にパターニングして第1絶縁層103を形成する(S4、図3(b))。続いて、それに積層する形でにITOを着膜し(S5)、当該ITO膜を第2電極層104(電極部104a及び配線部104b)の形状にパターニングする(S6、図3(c))。続いて、それに積層する形で透明な絶縁膜を着膜し(S7)、当該絶縁膜を第2電極層の電極部104aが覆われ、配線部104bが露出する形状にパターニングして第2絶縁層105を形成する(S8、図3(d))。そして、露出した配線部102bと配線部104bに無電解メッキを施し、メッキ部206とメッキ部207を形成する(S9、図3(e))。ここで、メッキ部の膜厚は低抵抗化を図る上で0.05μm以上にすることが望ましい。また、メッキは双方の配線部に施すことが望ましいが、配線部の長さに応じ、いずれか配線長が長い一方の配線部のみに施すこととしても構わない。   FIG. 2A shows an example of a manufacturing process of the capacitive touch panel 200 of the present invention. FIG. 3 shows a manufacturing state in the middle of the process. First, ITO is deposited on the transparent substrate 101 (S1), and the ITO film is patterned into the shape of the first electrode layer 102 (electrode portion 102a and wiring portion 102b) (S2, FIG. 3 (a)). . Subsequently, a transparent insulating film is deposited so as to be laminated thereon (S3), and the first insulating layer 103 is formed by patterning the insulating film so that the electrode portion 102a is covered and the wiring portion 102b is exposed. (S4, FIG. 3 (b)). Subsequently, ITO is deposited in a laminated manner (S5), and the ITO film is patterned into the shape of the second electrode layer 104 (electrode part 104a and wiring part 104b) (S6, FIG. 3 (c)). . Subsequently, a transparent insulating film is deposited so as to be laminated thereon (S7), and the insulating film is patterned to a shape in which the electrode portion 104a of the second electrode layer is covered and the wiring portion 104b is exposed to form a second insulating film. The layer 105 is formed (S8, FIG. 3 (d)). Then, the exposed wiring portion 102b and the wiring portion 104b are subjected to electroless plating to form a plating portion 206 and a plating portion 207 (S9, FIG. 3 (e)). Here, the thickness of the plated portion is preferably 0.05 μm or more in order to reduce the resistance. Moreover, although it is desirable to apply plating to both wiring parts, depending on the length of the wiring part, it may be applied to only one wiring part having a longer wiring length.

なお、ここでは静電容量式タッチパネルを、第1電極層と第2電極層の双方を基板の片面に積層して構成する場合について説明したが、第1電極層と第2電極層を基板を挟んで構成することも可能である。その場合には、各電極層について上記S1〜S4を行った後にS9を実行すればよい。   Here, the case where the capacitive touch panel is configured by laminating both the first electrode layer and the second electrode layer on one side of the substrate has been described. However, the first electrode layer and the second electrode layer are formed on the substrate. It is also possible to sandwich the structure. In that case, what is necessary is just to perform S9 after performing said S1-S4 about each electrode layer.

以上のように、本発明の静電容量式タッチパネル200によれば、静電容量式タッチパネルの配線部にITOとの親和性のよい無電解メッキを採用することによりITO上にメッキを施すことができるだけでなく、パターニングすることなくITOを選択的にメッキできるため、工程の簡易化や導体の着膜範囲の縮小によるコスト削減が可能となる。また、工程が簡易化されることで単純マトリックスの液晶製造ラインでも製造可能となる。更に、ITO電極の形成と絶縁膜の形成(上記S1〜S8)を大型基板に多面取りで行い、無電解メッキ処理(S9)を個片に切断後に実施すれば、製造の効率化を図ることができる。   As described above, according to the capacitive touch panel 200 of the present invention, it is possible to perform plating on ITO by adopting electroless plating having good affinity with ITO for the wiring part of the capacitive touch panel. In addition, since ITO can be selectively plated without patterning, the cost can be reduced by simplifying the process and reducing the film deposition range of the conductor. Further, by simplifying the process, it is possible to manufacture even a simple matrix liquid crystal manufacturing line. Furthermore, if the formation of the ITO electrode and the formation of the insulating film (S1 to S8 above) are performed on a large substrate in multiple planes and the electroless plating process (S9) is performed after cutting into individual pieces, the production efficiency can be improved. Can do.

<変形例>
図2(a)に示した工程では、S7、8の工程で第2電極層104の電極部104aを第2絶縁層105で覆った上でメッキ処理を施すが、第2絶縁層105の代わりに剥離可能なピーリングフィルム等のマスキング材を電極部104a上に印刷形成してもよい。図2(b)にこの場合の製造工程例を示す。S1〜S6までは図2(a)と同様である。続いて、電極部104a上にマスキング材を印刷形成し(S11)、配線部に無電解メッキを施してメッキを形成して(S9)、最後にマスキング材を剥離する(S12)。
<Modification>
In the process shown in FIG. 2A, the plating process is performed after the electrode portion 104a of the second electrode layer 104 is covered with the second insulating layer 105 in the steps S7 and S8. Alternatively, a masking material such as a peeling film may be printed on the electrode portion 104a. FIG. 2B shows an example of the manufacturing process in this case. S1 to S6 are the same as those in FIG. Subsequently, a masking material is printed on the electrode portion 104a (S11), electroless plating is applied to the wiring portion to form a plating (S9), and finally the masking material is peeled off (S12).

この変形例の場合、絶縁層の着膜・パターニングを行うことなく、単に印刷形成により電極部を覆うことができるため、工程の簡易化を図ることができる。なお、この場合、電極部104aの保護の役割を担う第2絶縁層が存在しないため、S12の後に電極部104a上に何らかの保護を施す必要があるが、単なる保護層であれば必ずしも着膜・パターニングにより形成する必要はないため、全体として工程の簡易化が図れることには変わりない。   In the case of this modification, the electrode portion can be covered by simply forming the print without depositing and patterning the insulating layer, so that the process can be simplified. In this case, since there is no second insulating layer that plays a role of protecting the electrode portion 104a, it is necessary to provide some protection on the electrode portion 104a after S12. Since it is not necessary to form by patterning, the process can be simplified as a whole.

〔第2実施形態〕
配線部にメッキを施す際に、隣接する配線部との間隔が狭いと、絶縁層のエッジ部分において配線間にショートが発生する恐れがある。そこで、第1電極層102と第2電極層104をパターニングする際に、配線部102bの電極部近傍部分102b1と配線部104bの電極部近傍部分104b1につき、隣接する配線部との間隔d1が所定の距離(例えば5〜6mm)より長くなるようにパターニングする。これにより、電極部近傍部分でのショートを回避しつつ、それ以外の部分(102b2、104b2)においては間隔d2をできるだけ狭く(例えば50〜100μm)パターニングして、限られたスペースでの配線の最適化を図ることができる。
[Second Embodiment]
When the wiring portion is plated, if the distance between adjacent wiring portions is narrow, there is a possibility that a short circuit may occur between the wirings at the edge portion of the insulating layer. Therefore, when patterning the first electrode layer 102 and the second electrode layer 104, the distance d1 between the adjacent wiring portions is predetermined for the electrode portion vicinity portion 102b1 of the wiring portion 102b and the electrode portion vicinity portion 104b1 of the wiring portion 104b. Patterning is performed so as to be longer than the distance (for example, 5 to 6 mm). As a result, while avoiding short-circuits in the vicinity of the electrode part, the distance d2 is patterned as narrowly as possible (for example, 50 to 100 μm) in the other parts (102b2, 104b2), and optimal wiring in a limited space is achieved. Can be achieved.

〔第3実施形態〕
無電解メッキを施した各配線部102b、104bの電極部側端に対する他端は、図1(a)に示すように圧着部108においてFPCなどのプリント基板に圧着接続されるが、圧着接続にACF(異方性導電フィルム)を用いる場合、FPCは金属で遮光性があり、かつメッキにも遮光性があるため、ACF接続部分の粒子の潰れ具合を確認することができない。そこで、このような場合には無電解メッキを施す際に、プリント基板との圧着接続を行う部分については無電解メッキを施さないようにすればよい。例えば、各配線部の圧着部108にあたる部分に、剥離可能なピーリングフィルム等のマスキング材を印刷形成した上で無電解メッキを施すことが考えられる。
[Third Embodiment]
As shown in FIG. 1A, the other end of each of the wiring portions 102b and 104b subjected to electroless plating is crimped and connected to a printed circuit board such as an FPC at the crimping portion 108. When ACF (anisotropic conductive film) is used, FPC is a metal and has a light-shielding property, and plating also has a light-shielding property. Therefore, in such a case, when electroless plating is performed, the electroless plating may be prevented from being applied to the portion to be crimped and connected to the printed board. For example, it is conceivable to perform electroless plating after printing a masking material such as a peelable peeling film on the portion corresponding to the crimping portion 108 of each wiring portion.

100、200 静電容量式タッチパネル
101 基板
102 第1電極層
103 第1絶縁層
104 第2電極層
105 第2絶縁層
106 第1金属膜
107 第2金属膜
108 圧着部
206、207 メッキ部
100, 200 Capacitive touch panel 101 Substrate 102 1st electrode layer 103 1st insulating layer 104 2nd electrode layer 105 2nd insulating layer 106 1st metal film 107 2nd metal film 108 Crimp part 206,207 Plated part

Claims (5)

透明な基板上に、透明な第1ITO膜を着膜する第1ITO着膜ステップと、
上記第1ITO膜を、ストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第1電極層を形成する第1ITOパターニングステップと、
上記第1電極層上に、透明な絶縁膜を着膜する第1絶縁膜着膜ステップと、
上記第1絶縁膜を、上記第1電極層の電極部が覆われ、配線部が露出するようにパターニングして第1絶縁層を形成する第1絶縁膜パターニングステップと、
上記第1絶縁層上に、透明な第2ITO膜を着膜する第2ITO着膜ステップと、
上記第2ITO膜を、上記第1電極層の複数の電極部に対し平面的に見て直交するストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第2電極層を形成する第2ITOパターニングステップと、
上記第2電極層上に、透明な絶縁膜を着膜する第2絶縁膜着膜ステップと、
上記第2絶縁膜を、上記第2電極層の電極部が覆われ、配線部が露出するようにパターニングして第2絶縁層を形成する第2絶縁膜パターニングステップと、
上記第1電極層の配線部と上記第2電極層の配線部とに無電解メッキを施すメッキステップと、
を実行し、上記配線部のうち、プリント基板との圧着接続を行う部分については無電解メッキを施さないことを特徴とする静電容量式タッチパネルの製造方法。
A first ITO deposition step of depositing a transparent first ITO film on a transparent substrate;
A first ITO patterning step of patterning the first ITO film into the shape of a plurality of stripe-shaped electrode portions and a plurality of wiring portions which are respective lead wires, and forming a first electrode layer;
A first insulating film deposition step of depositing a transparent insulating film on the first electrode layer;
A first insulating film patterning step of patterning the first insulating film so that the electrode portion of the first electrode layer is covered and the wiring portion is exposed to form a first insulating layer;
A second ITO deposition step of depositing a transparent second ITO film on the first insulating layer;
The second ITO film is patterned into a plurality of stripe-shaped electrode portions that are orthogonal to the plurality of electrode portions of the first electrode layer in plan view and a plurality of wiring portions that are the respective lead wires. A second ITO patterning step to form a second electrode layer;
A second insulating film deposition step of depositing a transparent insulating film on the second electrode layer;
A second insulating film patterning step of patterning the second insulating film so that the electrode portion of the second electrode layer is covered and the wiring portion is exposed to form a second insulating layer;
A plating step of performing electroless plating on the wiring portion of the first electrode layer and the wiring portion of the second electrode layer;
The method for manufacturing a capacitive touch panel is characterized in that electroless plating is not performed on a portion of the wiring portion that is crimped and connected to the printed circuit board .
透明な基板上に、透明な第1ITO膜を着膜する第1ITO着膜ステップと、
上記第1ITO膜を、ストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第1電極層を形成する第1ITOパターニングステップと、
上記第1電極層上に、透明な絶縁膜を着膜する絶縁膜着膜ステップと、
上記絶縁膜を、上記第1電極層の電極部が覆われ、配線部が露出するようにパターニングして絶縁層を形成する絶縁膜パターニングステップと、
上記絶縁層上に、透明な第2ITO膜を着膜する第2ITO着膜ステップと、
上記第2ITO膜を、上記第1電極層の複数の電極部に対し平面的に見て直交するストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部の形状にパターニングして第2電極層を形成する第2ITOパターニングステップと、
上記第2電極層上に、上記第2電極層の電極部が覆われ、配線部が露出するようにマスキング材を印刷するマスキングステップと、
上記第1電極層の配線部と上記第2電極層の配線部とに無電解メッキを施すメッキステップと、
上記マスキング材を剥離する剥離ステップと、
を実行し、上記配線部のうち、プリント基板との圧着接続を行う部分については無電解メッキを施さないことを特徴とする静電容量式タッチパネルの製造方法。
A first ITO deposition step of depositing a transparent first ITO film on a transparent substrate;
A first ITO patterning step of patterning the first ITO film into the shape of a plurality of stripe-shaped electrode portions and a plurality of wiring portions which are respective lead wires, and forming a first electrode layer;
An insulating film deposition step of depositing a transparent insulating film on the first electrode layer;
An insulating film patterning step of forming the insulating layer by patterning the insulating film so that the electrode portion of the first electrode layer is covered and the wiring portion is exposed;
A second ITO deposition step of depositing a transparent second ITO film on the insulating layer;
The second ITO film is patterned into a plurality of stripe-shaped electrode portions that are orthogonal to the plurality of electrode portions of the first electrode layer in plan view and a plurality of wiring portions that are the respective lead wires. A second ITO patterning step to form a second electrode layer;
A masking step of printing a masking material on the second electrode layer so that the electrode part of the second electrode layer is covered and the wiring part is exposed;
A plating step of performing electroless plating on the wiring portion of the first electrode layer and the wiring portion of the second electrode layer;
A peeling step for peeling the masking material;
The method for manufacturing a capacitive touch panel is characterized in that electroless plating is not performed on a portion of the wiring portion that is crimped and connected to the printed circuit board .
請求項1又は2のいずれかに記載の静電容量式タッチパネルの製造方法であって、
上記配線部は電極部近傍部分とそれ以外の部分とからなり、
上記第1ITOパターニングステップ及び上記第2ITOパターニングステップにおいて、隣接する各配線部の電極部近傍部分の間隔が所定の距離より長くなるようにパターニングすることを特徴とする静電容量式タッチパネルの製造方法。
A method for manufacturing the capacitive touch panel according to claim 1, wherein:
The wiring part consists of a part near the electrode part and the other part,
In the first ITO patterning step and the second ITO patterning step, patterning is performed so that an interval between adjacent electrode portions in the vicinity of the electrode portion is longer than a predetermined distance.
透明な基板上に、ストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部とからなる透明なITO膜である第1電極層と、透明な絶縁層と、上記第1電極層の電極部に対し平面的に見て直交するストライプ状の複数の電極部とそれらそれぞれの引き出し配線である複数の配線部とからなる透明なITO膜である第2電極層とが順に積層された構造を備え、指などの接触物と上記第1電極層の電極部及び第2電極層の電極部との間の静電容量から上記接触物の位置座標を検知する静電容量式タッチパネルであって、
上記第1電極層の配線部又は上記第2電極層の配線部の少なくともいずれか一方に無電解メッキが施されており、上記配線部のうち、プリント基板との圧着接続を行う部分については無電解メッキを施さないことを特徴とする静電容量式タッチパネル。
On a transparent substrate, a first electrode layer which is a transparent ITO film comprising a plurality of striped electrode portions and a plurality of wiring portions which are the respective lead wires, a transparent insulating layer, and the first electrode A second electrode layer, which is a transparent ITO film composed of a plurality of stripe-shaped electrode portions orthogonal to the electrode portion of the layer when viewed in plan, and a plurality of wiring portions that are the respective lead-out wirings are sequentially laminated. A capacitive touch panel that detects the position coordinates of the contact object from the capacitance between the contact object such as a finger and the electrode part of the first electrode layer and the electrode part of the second electrode layer. There,
Electroless plating is applied to at least one of the wiring portion of the first electrode layer and the wiring portion of the second electrode layer, and there is no portion of the wiring portion that performs crimping connection with a printed circuit board. A capacitive touch panel, characterized by not being electroplated .
請求項に記載の静電容量式タッチパネルであって、
上記配線部は、電極部近傍部分とそれ以外の部分とからなり、隣接する各配線部の電極部近傍部分の間隔が所定の距離より長いことを特徴とする静電容量式タッチパネル。
The capacitive touch panel according to claim 4 ,
The said wiring part consists of an electrode part vicinity part and a part other than that, and the space | interval of the electrode part vicinity part of each adjacent wiring part is longer than predetermined distance, The capacitive touch panel characterized by the above-mentioned.
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