JP5186512B2 - Static elimination dust removal equipment - Google Patents

Description

  The present invention blows ionized air onto an object to be processed such as an electronic device, a lens, or a resin product for industrial products that require removal of static electricity and removal of adhering dust for the convenience of subsequent processes. The present invention relates to an improvement in a static elimination apparatus that is used to efficiently remove dust and static electricity adhering to a short time in a short time.

In this type of static elimination dust removal device, dust removed by blowing ionized air to the workpiece is scattered and floated around, contaminating the surrounding work environment, or reattaching to the workpiece. Problems are occurring.
In order to prevent this, conventionally, for example, apart from the means for ejecting ionized air, it corresponds to the periphery of the work processing chamber, in particular, an opening including an inlet / outlet for loading / unloading an object to / from the work processing chamber. An air ejection pipe is arranged at the top of the position where air is blown downward from this air ejection pipe to form an air curtain that shuts off the work processing chamber and the outside. Proposals have been made to prevent the dust removed from the object from leaking to the outside and prevent contamination of the surrounding work environment and reattachment to the object to be processed (see Patent Document 1).

  Separately from this, the direction in which ionized air is blown onto the object to be processed in the work chamber is obliquely upward from the lower portion of the work chamber, particularly from the lower portion of the opening (front surface) toward the center of the work chamber. By setting to, the ionized air that hits the workpiece is allowed to flow to the bottom of the work chamber, preventing dust removed from the workpiece from leaking to the outside, and contamination of the surrounding work environment. Proposals have been made to prevent reattachment to the object to be processed (see Patent Document 2).

JP 2006-7012 A Utility Model Registration No. 3117372

  However, Patent Document 1 discloses an arrangement of an air ejection pipe for forming an air curtain, a supply means for compressed air to the pipe, a valve and its opening / closing control means separately from the ionization air ejection means. There is a problem that equipment that requires different energy has to be installed, which increases the equipment cost. In addition, since it is necessary to constantly supply compressed air, there is an extra cost in terms of running cost after the equipment is introduced. There is a problem that takes.

  Moreover, the thing of patent document 2 will remove the dust adhering by applying ionized air from the lower surface (back surface) of a to-be-processed object, and it is difficult to remove the dust adhering to the upper surface of a to-be-processed object by this. However, there is a problem that it is necessary to always invert the object to be processed, and it is difficult to visually observe the processing state, and the workability is not good, and the air flow blown out from the ionizing air blowing means causes a problem in the work processing chamber. There also remains a problem that dust that is scattered and floats accompanying the air flow that escapes upward may leak to the outside from an opening such as an inlet / outlet of an object to be processed.

Furthermore, since the thing of the said patent documents 1 and 2 needed to install a dust collector downstream of a blower, the installation cost became expensive.
The present invention has been developed in view of the above-described problems of this type of conventional apparatus, and the object of the present invention is to provide a static eliminating dust removing apparatus capable of sticking and collecting dust removed from an object to be processed. It is to provide.

  In order to achieve the above-mentioned object, the present invention eliminates and removes dust adhered to a box in which a work processing space for the object to be processed is formed and the object to be processed placed in the work processing space of the box. Equipped with an ionizer that ejects ionized air and a dust collecting adhesive plate placed in the work space to collect the removed dust. This dust collecting adhesive plate is ionized from the adhesive surface to the back. A large number of through holes through which air flows are formed.

The said through-hole is orthogonal or inclined with respect to the surface of the said dust collection adhesion board, and is a straight hole or the taper hole of the back narrow, The inner peripheral surface of the hole is an adhesion surface.
The dust collecting pressure-sensitive adhesive plate is a single plate formed of a pressure-sensitive adhesive or a laminated plate obtained by laminating multiple pressure-sensitive adhesive films.
It is desirable that a suction blower is provided in the box, and a filter attached to an air inlet of the suction blower is connected to the back surface of the dust collecting adhesive plate through an air passage.

  ADVANTAGE OF THE INVENTION According to this invention, the static elimination dust removal apparatus which enabled it to carry out the adhesion collection of the dust removed from the to-be-processed object can be provided.

It is a vertical side view which shows the structure of the principal part of this invention apparatus. It is a schematic perspective view of this invention apparatus. It is a schematic side view of this invention apparatus. It is an electric circuit diagram of the device of the present invention. It is a schematic explanatory drawing of the dust collection function by the device of the present invention. It is a principal part schematic longitudinal cross-sectional view of other embodiment of the dust collection adhesive board used by this invention. It is a perspective view for decomposition | disassembly description of the dust collection adhesive board of this invention apparatus. It is a perspective view for description of the assembly | attachment state of the dust collection adhesive board of FIG.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a static elimination dust removing apparatus according to the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the static elimination and dust removal apparatus of the present invention includes a box 2 in which a work processing space 1 for an object to be processed w (FIG. 1 illustrates a lens) is formed. The suction blower 3 incorporated in the bottom 2a, the filter 4 attached to the air inlet 3a of the suction blower 3, the inlet / outlet port 5 of the workpiece w provided in the front of the box 2, and the workpiece w An ionizer 6 attached to the upper side of the box 2 for ejecting ionized air, and a box 2 for collecting and collecting dust blown off by the ionized air ejected from the ionizer 6 upstream of the filter 4. There are provided dust collecting adhesive plates 7A and 7B arranged at positions that serve as air passages inside, and ionized air is circulated from the adhesive surface to the back surface of the dust collecting adhesive plates 7A and 7B. Through hole 7a is a number formed porous plate structure that.

The box 2 has a ceiling portion 2b, both side surface portions 2c, and a front surface portion 2d so that the work situation in the work processing space 1 of the internal work piece w can be seen through from the outside, that is, can be easily visually observed. The back surface 2e and the bottom 2a are combined with a transparent plate material such as an acrylic resin plate so that the entire surface is clear.
An entrance / exit 5 for an object to be processed w is formed in the front portion 2d of the box 2 and the bottom 2a of the box 2 is formed in a raised bottom shape. An air inflow port 3 a of the suction blower 3 is formed in the center of the bottom 2 a of the box 2.

A suction blower 3 is attached to the lower surface of the bottom 2a of the box 2 so that air in the work processing space 1 in the box 2 can be sucked through the air inlet 3a.
The suction blower 3 has a structure in which an exhaust fan (not shown) having a rotating shaft supported in parallel in the vertical direction is built in a protective case. In addition, the lower part of the both-sides surface part 2c of the box 2 is cut out, and it is set as the exhaust port 9. FIG.

The filter 4 has a configuration using a filtration-type material such as a nonwoven fabric, and is installed so as to cover the air inlet 3 a on the upper surface of the bottom 2 a of the box 2. This filter 4 is preferably replaceable and replaceable.
The ionizer 6 is attached to the upper side of the box 2 and is disposed in the air ejection nozzle 6a supplied from an air pipe 13 that can be connected to an appropriate air supply source. A counter electrode (not shown) and a high voltage generating circuit (not shown) for applying a high voltage between the counter electrodes are provided. A high voltage is applied between the counter electrodes by the high voltage generating circuit to corona discharge. And ions having positive and negative polarities are alternately generated to be ejected as ionized air from the air ejection nozzle 6a.

  As shown in FIG. 4, the suction blower 3 is energized by turning on the main power switch 10 installed in the middle of the DC electric circuit 14 that can be connected to a DC power source (for example, DC 24V), and the exhaust fan rotates. It is configured to be driven. Further, as shown in FIG. 4, the ionizer 6 is connected to the DC electric circuit 14 in parallel with the suction blower 3, and energizes the high voltage generating circuit by connecting the foot switch 11 (stepping operation, etc.). The high voltage is applied between the opposing electrodes to generate ions. At the same time, an electromagnetic valve 12 for ejecting air from the air ejection nozzle 6a is connected in parallel to the DC electric circuit 14 of the ionizer 6. This solenoid valve 12 is installed in the middle of an air pipe 13 that can be connected to an air supply source in order to supply air to the air ejection nozzle 6a, and is opened when energized and closed when not energized. .

  The suction blower 3, ionizer 6 and solenoid valve 12 are connected in parallel to the DC electric circuit 14 shown in FIG. 4 in this order, and the main power switch 10 is connected to the upstream side of the suction blower 3 (the side closer to the power source). The foot switch 11 is disposed between the suction blower 3 and the ionizer 6. In FIG. 4, a fuse 15 is inserted between the main power switch 10 and the suction blower 3.

  On the other hand, the dust collecting adhesive plates 7A and 7B are manufactured by pouring a two-component urethane resin into a mold and forming the sheet into a sheet shape. At this time, if it is manufactured in a gel form with a hardness of rubber hardness C of 30 or less, self-adhesive properties are produced, and it is possible to have an adhesive force that can collect dust. Gels with self-adhesive properties reproduce their self-adhesive properties when washed with water and naturally dried when the adhesive strength is reduced by the collected dust. Thereby, the dust collecting adhesive plates 7A and 7B can be used repeatedly.

  In the present embodiment, the dust collecting adhesive plates 7A and 7B exemplify a case where a perforated plate structure in which a large number of through holes 7a having a diameter of about 5 mm are formed in a rectangular urethane sheet having a thickness of 3 mm is illustrated. Since the dust collecting adhesive plates 7A and 7B are manufactured with a rubber hardness C of 30 or less, the surface of the sheet and the inner peripheral surface of the through hole 7a are also adhesive. The dust collecting adhesive plates 7A and 7B improve the dust collection efficiency as the through hole 7a has a smaller diameter. Therefore, the through hole 7a may have a smaller diameter depending on the ability of the suction blower 3. Further, in order to increase the area of the inner peripheral surface of the through hole 7a, it is preferable that the outlet side in the air passage direction is a tapered hole having a smaller hole diameter than the inlet side, as shown in FIG. Thus, by using a taper hole, the dust adhesion area of the through-hole 7a can be increased, and the dust collection efficiency can be improved.

  The dust collecting adhesive plates 7A and 7B are upstream of the filter 4 in the flow path of ionized air that is ejected from the ionizer 6 into the work processing space 1 and sucked into the suction blower 3 of the bottom 2a of the box 2. It is installed at least on the bottom surface of the work processing space 1, or on the bottom surface and a part of the surrounding wall surface or a plurality of wall surfaces. 1 and 2 exemplify a case where dust collecting adhesive plates 7A and 7B are installed on the bottom surface and the back surface, for example.

  The dust collecting adhesive plates 7A and 7B have predetermined dimensions (for example, about 1 to 3 cm) so that gaps that form air passages 8A and 8B are formed on the upper surface of the bottom portion 2a and the inner surface of the back surface portion 2e. They are spaced apart. The dust collecting adhesive plates 7A and 7B are detachably mounted on the box 2 (can be taken out). As a specific configuration of the dust collecting adhesive plates 7A and 7B, as shown in FIGS. 7 and 8, a gel sheet 7d is attached to each window hole 7b of a substrate 7c in which a plurality of window holes 7b are defined. As shown in FIG. 1, an entrance / exit 2f is formed in the box 2 corresponding to the installation positions of the dust collecting adhesive plates 7A and 7B. The doorway 2f is preferably capable of preventing air leakage by an appropriate seal member (not shown). Further, on the inner wall surface of the box 2, guide grooves (not shown) for the dust collecting adhesive plates 7A and 7B are formed.

  The through holes 7a formed in the dust collecting adhesive plates 7A and 7B are orthogonal or inclined (see FIG. 6) with respect to the adhesive surface, and are straight holes or narrow tapered holes. It has an adhesive surface. Further, only one dust collecting adhesive plate 7A, 7B may be disposed in the box 1 as shown in FIG. 1 or the like, but as shown in FIG. May be formed and arranged. In the latter case, it is preferable that the positions of the through holes 7a are shifted from each other, or the inclined directions are opposite to each other.

The dust collecting pressure-sensitive adhesive plates 7A and 7B may be formed into a single plate shape with urethane or other pressure-sensitive adhesive, or a laminated plate in which pressure-sensitive adhesive films are laminated in layers and peeled one by one from the top. The dust collection surface may be renewable.
The embodiment of the apparatus of the present invention has the above configuration, and the operation thereof will be described next.
First, the main power switch 10 in FIG. 4 is turned on. Thereby, the suction blower 3 operates in advance, and the air in the work processing space 1 is sucked through the air inlet 3a of the bottom 2a and discharged from the exhaust port 9. At that time, most of the air in the work processing space 1 passes through the through holes 7a of the dust collecting adhesive plates 7A and 7B, passes through the air passages 8A and 8B on the back surface, and passes through the filter 4. Some of them pass only through the filter 4 without passing through the through holes 7a of the dust collecting adhesive plates 7A and 7B.

  Next, the object to be processed w is carried into and supported by the work processing space 1 from the loading / unloading port 5 of the front portion 2d of the box 2 (for example, carried in and supported by an operator's hand or a robot hand), and the foot switch 11. Depress and operate. Thereby, the solenoid valve 12 is opened and air is ejected from the air ejection nozzle 6a of the ionizer 6. At the same time, the high voltage generating circuit of the ionizer 6 is energized, a high voltage is applied between the counter electrodes, and ions are generated. This ion changes the air ejected from the air ejection nozzle 6a to ionized air. The ionizer 6 is installed above the work processing space 1, and the air ejection nozzle 6 a blows ionized air from the upper side of the work processing space 1 toward the obliquely rear lower side. The workpiece w is carried in and supported by this ionized air blowing path. Thereby, the static electricity on the surface of the workpiece w is neutralized, and the dust a (see FIG. 5) adhering to the surface is efficiently blown off. At that time, dust adhering to the upper surface of the object to be processed w is removed by static electricity neutralizing action and air blowing action, and dust adhering to the lower face of the object to be processed w is also static electricity neutralizing action. Since it can be removed and removed by the dust's own weight and the downward air flow attracting action, it is not necessary to reverse the workpiece w. Further, when the removed dust passes through the surface of the dust collecting adhesive plates 7A and 7B and a large number of through holes 7a of the porous plate structure, most of the dust is collected by adhering to the surfaces and the inner surfaces of the through holes 7a. Is collected by the filter 4 attached to the air inlet 3a of the suction blower 3, so that the dust collection rate is increased.

The box 2 forming the work processing space 1 of the workpiece w can be visually seen from the outside at least because the inside can be seen through at least from the outside, so that workability is improved.
When the adhesive strength of the dust collecting adhesive plates 7A and 7B is reduced, the self-adhesive property is reproduced and can be used repeatedly by taking out from the box 2, washing with water and naturally drying.

In the case where the dust collecting adhesive plate 7 has a multilayer structure in which adhesive films are laminated in multiple layers and peeled one by one from the top so that the dust collecting surface can be renewed, The adhesive force can be renewed by peeling one film at a time.
As described above, according to the configuration of the embodiment of the present invention, the contamination of the work environment due to the leakage of dust to the outside is not caused by the shielding means that requires another energy such as an air curtain, and the dust in the previous stage is adhered. This can be achieved with a simple and inexpensive dust collection configuration that does not require separate energy consisting of a combination of a dust collecting adhesive plate having a perforated plate structure to be collected and a filtration filter in the subsequent stage. Therefore, according to the configuration of the present invention, it is not necessary to separately install a multi-layer dust collecting filter or an externally attached dust collector downstream of the suction blower, the pressure loss of the suction blower can be kept low, and the equipment cost In addition, the running cost can be reduced, and a compact and low cost static elimination dust removal apparatus can be provided.

  The embodiment of the device of the present invention is as described above. However, the present invention is not limited to the above-described embodiment, and may be implemented with appropriate modifications. For example, the suction blower may be omitted. Further, the dust collecting adhesive plate may have a corrugated surface or an uneven surface shape in order to increase the adhesive surface. Further, the dust collecting adhesive plate may be of a disposable replacement type. Further, instead of the foot switch in the above embodiment, a sensor is installed in the work processing space to detect that the workpiece is inserted into the work processing space with a hand or a robot hand, and the DC electric power of the ionizer and the solenoid valve is detected. The energization / non-energization of the circuit may be controlled. Alternatively, this sensor may detect insertion of an object to be processed into the work processing space, and operate a timer for energizing the DC electric circuit of the ionizer and the solenoid valve for a predetermined time. In this case, the setting time of the timer is configured so that the setting can be easily changed to an appropriate time that can remove dust adhering to the required level according to the shape and size of the object to be processed. Is desirable.

  The apparatus of the present invention is used for electronic devices, lenses, resin products, etc., for industrial processes that require removal of static electricity and removal of adhering dust for the convenience of subsequent processes, and dust and static electricity adhering to similar objects to be processed. It can be used for a static eliminating dust removing device for removing the dust.

w Workpiece 1 Work space 2 Box 3 Suction blower 4 Filter 5 Insert / exit port 6 Ionizer 7 Dust collecting adhesive plate 8A, 8B Air passage 9 Exhaust port 10 Main power switch 11 Foot switch 12 Solenoid valve 13 Air piping 14 DC electric circuit 15 fuse

Claims (5)

  It adheres to the box (2) in which the work processing space (1) of the object to be processed (w) is formed and the object to be processed (w) placed in the work processing space (1) of the box (2). An ionizer (6) for ejecting ionized air for discharging and removing the dust, and a dust collecting adhesive plate (7A, 7B) disposed in the work processing space (1) for collecting the removed dust The dust-removing and dust-removing device comprising a plurality of through-holes (7a) through which ionized air flows from the adhesive surface to the back surface of the dust-collecting adhesive plates (7A, 7B).   The through hole (7a) is orthogonal or inclined with respect to the surface of the dust-collecting adhesive plate (7A, 7B), and is a straight hole or a tapered hole having a narrow depth, and the inner peripheral surface of the hole is an adhesive surface. The charge-removing / dust-removing device according to claim 1, wherein   3. The static elimination dust removing apparatus according to claim 1, wherein the dust collecting adhesive plate (7 </ b> A, 7 </ b> B) is a single plate formed of an adhesive or a laminated plate in which adhesive films are laminated in multiple layers.   The box (2) is provided with a suction blower (3), and the filter (4) attached to the air inlet (3a) of the suction blower (3) and the back surface of the dust collecting adhesive plate (7A, 7B) The static elimination dust-removing device according to any one of claims 1 to 3, wherein the static elimination dust communication device is communicated by an air passage (8A, 8B).   The dust collection adhesive plate (7A, 7B) is formed so as to be able to be taken out of the box (2) from a position in the work processing space (1). The static elimination dust removal apparatus of 1 item | term.